A transverse vacuum electron beam tube

By designing lateral vacuum electron beam tubes and using components such as ceramic connectors and electron injection window components, the problem that existing electron beam tubes cannot adapt to small spaces is solved, and diversification of electron beam tubes and stable and efficient electron beam emission is achieved.

CN112271128BActive Publication Date: 2025-04-01HUANGSHI SHANGFANG INSPECTION EQUIP
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Patent Information

Application Number
CN202011270106.5
Authority / Receiving Office
CN · China
Patent Type
Patents(China)
Current Assignee / Owner
Filing Date
2020-11-13
Publication Date
2025-04-01
Estimated Expiration
2040-11-13

AI Technical Summary

Technical Problem

The existing electron beam tube structure cannot meet the needs of small spaces and lacks a diverse design, making it difficult to meet consumers' demand for miniaturized and lightweight electron beam tubes.

Method used

A transverse vacuum electron beam tube is designed, using a cylindrical shell, ceramic connector, electron injection window assembly and titanium foil to form a closed vacuum cavity, and the suspended setting and high-voltage conduction of the field emission device are realized through the design of the ceramic connector and sealing flange.

Benefits of technology

The electron beam tube is miniaturized and diversified, meeting the application needs in a small transverse space, and ensuring stable molding and efficient injection of electron beams.

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Patent Text Reader

Abstract

A transverse vacuum electron beam tube comprises an outer shell with a cavity structure; a window portion is arranged on the shell wall of the outer shell; a field emission device is located in the cavity of the outer shell; a ceramic connector with a hollow structure is arranged between the field emission device and a sealing flange, one end of the ceramic connector is sleeved and fixed with the field emission device, and the other end is fixed with the sealing flange and passes through the sealing flange; an electron emission window assembly is welded on the window portion and corresponds to the field emission device, and a titanium foil covering the window portion and capable of transmitting electrons is arranged in the electron emission window assembly; the titanium foil, the end cover and the sealing flange make the cavity of the outer shell form a closed vacuum cavity; by designing the electron beam tube into a transverse structure, the demand for the electron beam tube in a small transverse space in the current market is met, and the diversification of market demand is met, and at the same time, the internal structure of the electron beam tube is designed to ensure stable forming and stable and efficient emission of the electron beam.
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Description

Technical Field

[0001] The invention relates to the field of electron acceleration, in particular to a transverse vacuum electron beam tube. Background Art

[0002] Electron beam irradiation technology has been widely used in the fields of material modification, coating preparation and aseptic rapid disinfection. Among them, the electron beam tube is an important electronic device for realizing electron beam emission. Therefore, the structure of the electron beam tube will affect the application scope of the electron beam.

[0003] At present, the use of electron beams in small spaces is very rare in the market. This is because the structure of current electron beam tubes is almost standardized, and there is a shortage of electron beam tubes that can adapt to small spaces. However, in life, there is a certain demand for miniaturized and structurally diversified electron beam tubes. Therefore, the design of miniaturized and lightweight electron beam tube structures is imminent, and electron beam tubes with various structures are needed to meet the needs of consumers. Summary of the invention

[0004] In view of the deficiencies in the prior art, the present invention proposes a new technical solution, which can meet the market demand for the diversity of electron beam tubes.

[0005] The technical solution proposed by the present invention is as follows:

[0006] A transverse vacuum electron beam tube comprising

[0007] The shell has a cavity structure; an end cover is provided at one end of the shell, and a sealing flange is provided at the other end; a window portion is provided on the shell wall of the shell;

[0008] A field emission device is located in the cavity of the shell; a ceramic connector with a hollow structure is arranged between the field emission device and the sealing flange, one end of the ceramic connector is sleeved and fixed to the field emission device, and the other end is fixed to the sealing flange and passes through the sealing flange; the field emission device is suspended in the cavity of the shell through the ceramic connector;

[0009] An electron emission window assembly, welded on the window portion and corresponding to the field emission device, wherein a titanium foil covering the window portion and capable of transmitting electrons is arranged in the electron emission window assembly;

[0010] The titanium foil, the end cover and the sealing flange enable the cavity of the shell to form a closed vacuum cavity.

[0011] Furthermore, the sealing flange is disc-shaped, and the side of the sealing flange facing the cavity is a concave structure that is low in the middle and high around. A through hole is provided at the center of the sealing flange, and the ceramic connector passes through the through hole and is sealed and fixed to the sealing flange.

[0012] Furthermore, the electron emission window assembly also includes a pressure plate, a grid plate, a sealing ring and a welding block which are stacked in sequence, the titanium foil is arranged between the pressure plate and the grid plate, and the pressure plate presses and fixes the titanium foil on the grid plate; a honeycomb heat dissipation net is provided on the grid plate at a position directly opposite to the titanium foil; the welding block is sealed and welded around the window portion, so that the electron beam generated by the field emission device passes through the heat dissipation net and hits the titanium foil and is transmitted outward.

[0013] Furthermore, the electron emission window assembly also includes a pressure plate and a grid plate which are stacked in sequence, the titanium foil is arranged between the pressure plate and the grid plate, and the pressure plate presses and fixes the titanium foil on the grid plate; a honeycomb heat dissipation net is provided on the grid plate at a position directly opposite to the titanium foil; the grid plate is sealed and welded and fixed on all sides of the window portion, so that the electron beam generated by the field emission device passes through the heat dissipation net and hits the titanium foil and is transmitted outward.

[0014] Furthermore, a cold circulation channel is provided in the grid plate, and the cold circulation channel is arranged around the heat dissipation net to cool the titanium foil attached to the grid plate.

[0015] Furthermore, the heat dissipation net is a heat dissipation net made of oxygen-free copper material.

[0016] Furthermore, the thickness of the titanium foil is 0.015-0.02 mm.

[0017] Furthermore, the outer surface of the ceramic connector is a corrugated structure.

[0018] Furthermore, the shell is a shell with a cylindrical structure.

[0019] The beneficial effects achieved by adopting this technical solution are:

[0020] By designing the electron beam tube into a horizontal structure, the current market demand for electron beam tubes in a small horizontal space can be met to meet the diversification of market demand. At the same time, the internal structure of the electron beam tube is designed to ensure the stable forming and stable and efficient emission of the electron beam. BRIEF DESCRIPTION OF THE DRAWINGS

[0021] Figure 1 This is a three-dimensional structural diagram of a transverse vacuum electron beam tube.

[0022] Figure 2 This is an exploded diagram of the structure of a transverse vacuum electron beam tube.

[0023] Figure 3 This is an exploded structural diagram of the electron ejection window assembly.

[0024] Figure 4 This is a planar structural diagram of the ceramic connector.

[0025] Figure 5 for Figure 4 The cross-sectional structure diagram of AA in the figure shows the internal structure of the ceramic connector.

[0026] Figure 6 This is the plan structure diagram of the sealing flange.

[0027] Figure 7 for Figure 6 The cross-sectional structure diagram of BB shows the structure of the sealing flange.

[0028] Figure 8 This is a diagram of the explosion structure of the field launch device.

[0029] Fig. 9 for Figure 8 The enlarged view of the part at point C in the middle shows the connection structure between the metal wire and the filament holder.

[0030] Fig.10 This is a three-dimensional structural diagram of a vertical vacuum electron beam tube.

[0031] Fig.11 This is an exploded structural diagram of a vertical vacuum electron beam tube.

[0032] Fig.12 This is a planar structural diagram of a vertical vacuum electron beam tube.

[0033] Fig.13 for Fig.12 The cross-sectional structure diagram of the DD in the figure shows the internal structure of the vertical vacuum electron beam tube.

[0034] Fig.14 This is a three-dimensional structural diagram of an open electron beam tube.

[0035] Wherein: 10 shell, 11 end cover, 12 sealing flange, 13 window part, 14 high voltage access part, 15 sealing cover, 16 vacuum extraction part, 20 field emission device, 21 focusing head, 22 core column sealing tube, 23 cathode cover, 24 metal wire, 25 filament holder, 26 fixing block, 30 electron emission window assembly, 31 titanium foil, 32 pressing plate, 33 grid plate, 34 sealing ring, 35 welding block, 40 ceramic connector, 41 through hole, 100 cavity, 211 end plate, 231 housing body, 232 shielding cover, 233 incision, 234 grid, 251 blind hole, 252 ceramic column, 331 heat dissipation net. DETAILED DESCRIPTION

[0036] The principles and features of the present invention are described below in conjunction with the accompanying drawings. The examples given are only used to explain the present invention and are not used to limit the scope of the present invention.

[0037] This embodiment proposes an electron beam tube structure. By designing the electron beam tube structure, the market demand for diversified electron beam tube structures is met, thereby enhancing the competitiveness of enterprises.

[0038] In this proposal, see Figure 1-Figure 2 The proposed electron beam tube includes a shell 10, which is a cylindrical structure. An end cover 11 is provided at one end of the shell 10, and a sealing flange 12 is provided at the other end. Through the cooperation of the end cover 11 and the sealing flange 12, a cavity 100 is formed inside the shell 10.

[0039] A field emission device 20 is arranged in the cavity 100. The field emission device 20 is used to emit electrons. The emitted electrons form electron beams under the action of the electric field and are quickly emitted to the window portion 13 on the shell wall of the shell 10. The window portion 13 is provided with an electron emission window assembly 30. The electron emission window assembly 30 is welded on the window portion 13 and corresponds to the field emission device 20. A titanium foil 31 is arranged in the electron emission window assembly 30, and the titanium foil 31 can cover the window portion 13.

[0040] In this way, the titanium foil 31, the end cover 11 and the sealing flange 12 are combined to form a closed space in the cavity 100 of the shell 10. Then the entire electron beam tube is placed in a vacuum furnace and baked at a temperature of 500-600°C to make the cavity 100 a vacuum state, thereby forming a vacuum electron beam tube.

[0041] The thickness of the titanium foil 31 is between 0.015 mm and 0.02 mm. The main purpose of providing such a thin titanium foil 31 is to enable the electron beam emitted from the field emission device 20 to penetrate the titanium foil 31, thereby achieving improved treatment or disinfection of external objects.

[0042] It should be noted that the electron beam here can hit the surface of the titanium foil 31 for transmission, but it will not affect the vacuum state of the cavity 100, that is, the existence of the titanium foil 31 can not only effectively ensure the vacuum state in the cavity 100, but also enable the electron beam emitted by the field emission device 20 to be transmitted smoothly.

[0043] In order to ensure the stability of the connection between the titanium foil 31 and the electron emission window assembly 30, in this embodiment, see Figure 3 The electron emission window assembly 30 further includes a pressure plate 32, a grid plate 33, a sealing ring 34 and a welding block 35 which are sequentially stacked, wherein the titanium foil 31 is arranged between the pressure plate 32 and the grid plate 33. It can be understood that the arrangement order of the electron emission window assembly 30 from top to bottom is the pressure plate 32, the titanium foil 31, the grid plate 33, the sealing ring 34 and the welding block 35.

[0044] The main purpose of setting the pressing plate 32 here is to stably press the titanium foil 31 so that the titanium foil 31 can be stably attached to the grid plate 33 to ensure the sealing of the connection; the sealing ring 34 is used to ensure the sealing and stability of the connection between the grid plate 33 and the welding block 35. The welding block 35 is welded and fixed on the window part 13 to ensure the sealing of the window part 13 on all sides; the above-mentioned components are arranged in a superimposed manner to facilitate replacement.

[0045] As another embodiment, a scheme of retaining only the pressure plate 32, the titanium foil 31 and the grid plate 33 may be adopted, that is, the arrangement order of the electron emission window assembly 30 from top to bottom is the pressure plate 32, the titanium foil 31, the grid plate 33, and then the grid plate 33 is directly welded to the window portion 13 to ensure the sealing around the window portion 13; such a design scheme is conducive to reducing the assembly steps and has a certain promoting effect on ensuring the stability of the vacuum in the cavity 100.

[0046] The designs of the above two solutions can both ensure that the electron beam generated by the field emission device 20 passes through the window portion 13 and finally reaches the titanium foil 31 for transmission.

[0047] At the same time, it is found in the specific use process that the titanium foil 31 will generate a lot of heat under the impact of a large number of electron beams. Therefore, a heat dissipation mesh 331 with a honeycomb structure is set on the grid plate 33 at a position directly opposite to the titanium foil 31. Here, the heat dissipation mesh 331 not only promotes the heat dissipation of the electron beam to a certain extent, but also has the effect of uniform electric field. This is because the electrons emitted from the field emission device 20 may be concentrated to a certain extent. In this way, after the partially concentrated electron beams are dispersed through the honeycomb heat dissipation mesh 331, it has a certain promoting effect on the uniform distribution of the electron beams through the titanium foil 31.

[0048] Optionally, the heat dissipation mesh 331 is made of oxygen-free copper material.

[0049] In order to further achieve the cooling effect on the titanium foil 31, a cold circulation channel is also designed on the grid plate 33 in this solution. The cold circulation channel here mainly refers to the channel designed for medium flow on the grid plate 33, and the flow of the medium in the grid plate 33 is used to achieve the cooling effect on the titanium foil 31.

[0050] Specifically, the cold circulation channel described here is a water cooling channel, which is arranged around the heat dissipation network 331, that is, the water cooling channel is arranged around the heat dissipation network 331, and the water cooling channel is designed with a water inlet and a water outlet; when the field emission device 20 is working, water medium is injected into the water cooling channel, so that the entire grid plate 33 is in a relatively low temperature state, and the titanium foil 31 attached to the grid plate 33 can also be effectively cooled.

[0051] In order to meet the market's diverse demands for electron beam tube structures, this embodiment proposes two structures of vacuum electron beam tubes. The shell shapes of the two structures of vacuum electron beam tubes are different, but the working principles of the two are basically the same. In order to distinguish the two types of vacuum electron beam tubes, one design is defined as a horizontal vacuum electron beam tube and the other design is defined as a vertical vacuum electron beam tube. The structures of the two vacuum electron beam tubes are further introduced below.

[0052] The transverse vacuum electron beam tube is defined as a transverse direction in which the input flow direction of the external high voltage is parallel to the central axis of the shell 10 .

[0053] The field emission device 20 is able to generate electrons by utilizing high voltage. The high voltage described here specifically refers to a high voltage in the voltage range of about 50 KV to 200 KV.

[0054] For details, see Figure 2 , Figure 4-Figure 5 In the transverse vacuum electron beam tube, a hollow ceramic connector 40 is arranged between the field emission device 20 and the sealing flange 12, wherein one end of the ceramic connector 40 is sleeved and fixed to the field emission device 20, and the other end is fixed to the sealing flange 12 and passes through the sealing flange 12; the field emission device 20 is suspended in the cavity 100 of the shell 10 through the ceramic connector 40.

[0055] The ceramic connector 40 is provided here and the field emission device 20 is suspended in the cavity 100, which is mainly used to play an insulating role to prevent the field emission device 20 from having direct contact with the shell 10; at the same time, the ceramic connector 40 is designed to be a hollow structure, and the external high-voltage connecting wire can pass through the ceramic connector 40 and be connected to the field emission device 20, so that under the action of high voltage, the field emission device 20 is prompted to generate an electron beam.

[0056] Optionally, the ceramic connector 40 has a conical structure and the outer surface is configured to be corrugated, and the cross-sectional diameter of one end of the ceramic connector 40 that is sleeved with the field emission device 20 is smaller than the cross-sectional diameter of the other end of the ceramic connector 40; at the same time, the hollow ceramic connector 40 can be understood as a ceramic connector 40 having a through hole 41 inside, that is, the through hole 41 makes the ceramic connector 40 a hollow structure, wherein the through hole 41 here is configured to be a conical structure having the same shape as the ceramic connector 40, and the aperture of the through hole 41 near the field emission device 20 is smaller than the aperture of the through hole 41 near the sealing flange 12.

[0057] Here, the surface of the ceramic connector 40 is designed to be corrugated, and the same conical structure design is made for the shape of the ceramic connector 40 and the through hole 41 to enhance the voltage resistance level of the ceramic connector 40 and improve the safety of the entire electron beam tube; on the other hand, the corrugated design makes the ceramic connector 40 have better heat dissipation performance.

[0058] At the same time, in the transverse vacuum electron beam tube, because the ceramic connector 40 is directly fixedly connected to the sealing flange 12, the structure of the sealing flange 12 is further designed, see Figure 2 , Figure 6-Figure 7 That is, the sealing flange 12 is disc-shaped and is used to close one end of the shell 10; a through hole is provided at the center of the sealing flange 12, and the ceramic connector 40 is penetrated by the through hole to achieve a sealed and fixed connection with the sealing flange 12. At the same time, the side of the sealing flange 12 facing the cavity 100 is a recessed structure with a low middle and high surroundings, and the through hole is arranged at the center of the recessed structure.

[0059] By designing the sealing flange 12 as a concave structure, the center of the sealing flange 12 becomes thinner, reducing the contact area between the ceramic connector 40 and the sealing flange 12, and minimizing the impact of high pressure diffusion to the housing 10.

[0060] Through the insulation of the ceramic connector 40 , the field emission device 20 can stably generate and emit electron beams under high voltage.

[0061] See also Figure 8 The field emission device 20 comprises a focusing head 21 , a core column sealing tube 22 , a cathode cover 23 and a metal wire 24 arranged in the cathode cover 23 .

[0062] Here, the focusing head 21 is sleeved on the core column sealing tube 22, mainly used to improve the focusing degree. At the same time, one end of the focusing head 21 connected to the ceramic connector 40 is designed to be trumpet-shaped, so that the ceramic connector 40 is at least partially sleeved in the focusing head 21. It should be noted that the end of the ceramic connector 40 with a smaller cross-sectional area is sleeved in the focusing head 21.

[0063] The focusing head 21 and core column sealing tube 22 mentioned here are both arranged on the outside of the cathode cover 23 to reduce the impact on the generation of electrons by the metal wire 24. Of course, the metal wire 24 here needs to be connected to the core column sealing tube 22 to ensure that the external high voltage can be smoothly connected to the metal wire 24, so that the metal wire 24 heats up to generate a high-energy electron cloud that is emitted to form an electron beam.

[0064] The cathode cover 23 includes a cover shell body 231 and a shielding cover 232. The cover shell body 231 is cylindrical, and a cutout 233 is provided on the cover shell body 231 so that the electron cloud generated by the metal wire 24 can be smoothly emitted outward. The focusing head 21 is welded to one end of the cathode cover 23 to ensure the conduction between the core column sealing tube 22 and the metal wire 24. The shielding cover 232 is located at the other end of the cover shell body 231. The shielding cover 232 is hemispherical. When installed on the cover shell body 231, the arc-shaped protruding part of the shielding cover 232 faces outward.

[0065] Here, the housing body 231 is designed to be cylindrical so as to collect the electron cloud generated by the metal wire 24. At the same time, a hemispherical shielding cover 232 is arranged on the housing body 231 to ensure that the generated electron cloud can be fully collected at the cutout 233 to be emitted to the outside.

[0066] At the same time, taking into account the uneven density distribution of the high-energy electron cloud generated by the heating of the metal wire 24, in order to make the electrons as evenly distributed as possible to be emitted into the electron emission window assembly 30 to achieve the effect of uniform field, a grid mesh 234 is also provided at the incision 233. The grid mesh 234 is fixed in the incision 233, and the metal wire 24 is located directly below the grid mesh 234. In this way, after the metal wire 24 generates an electron cloud, the electron cloud is distributed under the guidance of the grid mesh 234, so that the generated electron beam can be distributed more evenly.

[0067] Optionally, the grid mesh 234 here is a molybdenum mesh.

[0068] The heat dissipation net 331 in the electron emission window assembly 30 also has the function of evenly distributing the electric field. That is, after the metal wire 24 generates an electron cloud, the electron cloud is guided and distributed for the first time through the grid net 234, so that the electrons are dispersed. Then, the electrons are emitted into the electron emission window assembly 30 under the action of the high-voltage electric field. When passing through the heat dissipation net 331 on the grid plate 33, they are evenly dispersed for the second time, and finally hit the titanium foil 31 to achieve transmission.

[0069] Through two dispersions, the density of the electron cloud is reduced, making the generated electron beam more uniform.

[0070] See also Figure 8-Figure 9 The metal wire 24 is arranged in the housing body 231 through the filament holder 25. The filament holder 25 is in a long strip shape and is fixedly arranged in the housing body 231. The metal wire 24 is arranged on the filament holder 25. Specifically, a plurality of blind holes 251 are arranged on the filament holder 25. The plurality of blind holes 251 are evenly distributed in an array along the length direction of the filament holder 25. At the same time, each blind hole 251 is provided with a porcelain column 252 extending along its axial direction. Each porcelain column 252 is fixed to the metal wire 24, so that the plurality of porcelain columns 252 jointly support the metal wire 24.

[0071] The purpose of setting the porcelain column 252 here is to ensure the straightness and integrity of the metal wire 24. At the same time, the porcelain column 252 can play an insulating role to avoid the contact between the metal wire 24 and the filament holder 25. After the metal wire 24 and the core column sealing tube 22 are electrically connected, an electron cloud can be smoothly generated under the action of high voltage.

[0072] Optionally, the metal wire 24 here is a tungsten wire.

[0073] Vertical vacuum electron beam tube, where the input flow direction of the external high voltage is perpendicular to the central axis of the shell is defined as vertical.

[0074] The working principle of the vertical vacuum electron beam tube is the same as that of the horizontal vacuum electron beam tube, and the structural design is also similar; specifically, first, the structure of the housing 10 of the vertical vacuum electron beam tube is slightly different from that of the horizontal vacuum electron beam tube; second, the structure of the field emission device 20 is slightly different; the above two differences are further introduced below:

[0075] See also Figure 10-13 The structure of the shell 10 of the vertical vacuum electron beam tube is different from that of the horizontal vacuum electron beam tube in that a high-voltage access portion 14 extending outward is provided on the outer wall of the shell 10 of the vertical vacuum electron beam tube, and the high-voltage access portion 14 here is used to install a ceramic connector 40; it can be understood that in the horizontal vacuum electron beam tube, the ceramic connector 40 is directly fixedly connected to the sealing flange 12; but in the vertical vacuum electron beam tube, because a high-voltage access portion 14 extending outward is specially provided on the outer wall of the shell 10, the ceramic connector 40 is directly fixedly connected to the high-voltage access portion 14, and the existence of the sealing flange 12 in the vertical vacuum electron beam tube is mainly used to facilitate the replacement of the metal wire 24.

[0076] At the same time, in order to ensure the sealed and stable connection between the ceramic connector 40 and the high-voltage access part 14, a sealing cover 15 is provided on the high-voltage access part 14. The sealing cover 15 is disc-shaped, and the side of the sealing cover 15 facing the cavity 100 is a concave structure with a low middle and high surroundings. At the same time, a through hole is provided at the center of the sealing cover 15, and the ceramic connector 40 passes through the through hole and is sealed and fixed to the sealing cover 15.

[0077] The purpose of setting the sealing cover 15 as a concave structure with a low middle and high surroundings is to make the center of the sealing cover 15 thinner, reduce the contact area between the ceramic connector 40 and the sealing cover 15, and minimize the impact of the high pressure spreading to the housing 10.

[0078] In the field emission device 20 in the vertical electron beam tube, the focusing head 21 and the cover body 231 are arranged vertically, while in the horizontal electron beam tube, the focusing head 21 is arranged parallel to one end of the cover body 231; when the focusing head 21 and the cover body 231 are arranged vertically, shielding covers 232 will need to be respectively arranged at both ends of the cover body 231, and the two shielding covers 232 are mirror-symmetrical to ensure the effective collection of the electron cloud.

[0079] At the same time, in the vertical electron beam tube, the filament holder 25 is fixed to the cover body 231 by a fixing block 26. The setting of the fixing block 26 here is also conducive to the installation of the focusing head 21, that is, an end plate 211 is also provided on the focusing head 21 in the vertical electron beam tube, and the end plate 211 is fixed to the fixing block 26 by screws, thereby realizing the fixation of the focusing head 21 and the cover body 231.

[0080] Here, by designing horizontal vacuum electron beam tubes and vertical electron beam tubes, when there is horizontal space and vertical space in the actual application scenario, the horizontal vacuum electron beam tubes and vertical electron beam tubes can be directly used, which is convenient and fast, and greatly promotes the lightweight and diversified use of electron beam tubes.

[0081] In this embodiment, a further design is made on the structure of the horizontal or vertical vacuum electron beam tube, and an open electron beam tube is designed. Fig.14 .

[0082] The use of horizontal or vertical vacuum electron beam tubes must have a requirement, that is, it is necessary to ensure that the interior of the cavity 100 is in a vacuum state. This requirement requires that after the vacuum electron beam tube is assembled, it must be placed in a vacuum furnace and baked at a temperature of 500-600°C to make the cavity 100 in a vacuum state. Such an operation is not only time-consuming, but also requires the cooperation of a large vacuum furnace, which is very inconvenient for those who need it urgently.

[0083] Therefore, considering the convenience of use, a vacuum extraction part 16 can be directly opened on the outer shell of the horizontal or vertical vacuum electron beam tube. The vacuum extraction part here is actually a flange for vacuum extraction. After the existence of the vacuum extraction part 16, it is no longer necessary to ensure that the cavity 100 is in a vacuum state, that is, when waiting to be used, the cavity 100 is connected to the outside through the vacuum extraction part 16. Only when in use, a vacuum pump (not shown) is directly installed on the vacuum extraction part 16, and the vacuum pump is used to extract the air inside the cavity 100 in real time, and the vacuum state inside the cavity is continuously ensured, and then the field emission device 20 is supplied with high voltage to cause it to generate electrons and release electron beams.

[0084] The open electron beam tube provided in this embodiment is formed by adding a vacuum extraction portion 16 to a vertical vacuum electron beam tube. In actual use, a vacuum extraction portion 16 can also be added to a horizontal vacuum electron beam tube, so that the electron beam tube structure can be diversified to meet different needs of users.

[0085] The open electron beam tube provided here eliminates the need for baking in a vacuum furnace, providing users with more choices. Users can hang horizontal vacuum electron beam tubes, vertical vacuum electron beam tubes or open electron beam tubes according to actual conditions.

[0086] The above description is only a preferred embodiment of the present invention and is not intended to limit the present invention. Any modifications, equivalent substitutions, improvements, etc. made within the spirit and principle of the present invention should be included in the protection scope of the present invention.

Claims

1. A transverse vacuum electron beam tube, characterized in that: The invention comprises a shell (10) having a cavity (100) structure; an end cover (11) is arranged at one end of the shell (10), and a sealing flange (12) is arranged at the other end; a window portion (13) is arranged on the shell wall of the shell (10); a field emission device (20) is located in the cavity (100) of the shell (10); a ceramic connector (40) with a hollow structure is arranged between the field emission device (20) and the sealing flange (12), one end of the ceramic connector (40) is sleeved and fixed to the field emission device (20), and the other end is fixed to the sealing flange (12) and passes through the sealing flange (12); the field emission device (20) is suspended in the cavity (100) of the shell (10) through the ceramic connector (40); An electron emission window assembly (30) is welded on the window portion (13) and corresponds to the field emission device (20), wherein a titanium foil (31) covering the window portion (13) and capable of transmitting electrons is arranged in the electron emission window assembly (30); The titanium foil (31), the end cover (11) and the sealing flange (12) enable the cavity (100) of the housing (10) to form a sealed vacuum cavity (100); the field emission device (20) comprises a focusing head (21), a core column sealing tube (22), a cathode cover (23) and a metal wire (24) arranged in the cathode cover (23); the cathode cover (23) comprises a cover body (231) and a shielding cover (232); the cover body (231) is designed to be cylindrical; a hemispherical shielding cover (232) is arranged on the cover body (231) to ensure that the generated electron cloud can be fully gathered at the cutout (233); a grid net (234) is arranged at the cutout (233); the grid net (234) is fixed in the cutout (233); and the metal wire (24) is located directly below the grid net (234).

2. The transverse vacuum electron beam tube according to claim 1, characterized in that: The sealing flange (12) is disc-shaped, and the side of the sealing flange (12) facing the cavity (100) is a concave structure that is low in the middle and high around. A through hole is provided at the center of the sealing flange (12), and the ceramic connector (40) passes through the through hole and is sealed and fixed to the sealing flange (12).

3. The transverse vacuum electron beam tube according to claim 1, characterized in that: The electron emission window assembly (30) further comprises a pressing plate (32), a grid plate (33), a sealing ring (34) and a welding block (35) which are stacked in sequence; the titanium foil (31) is arranged between the pressing plate (32) and the grid plate (33); the pressing plate (32) presses and fixes the titanium foil (31) on the grid plate (33); a honeycomb heat dissipation net (331) is provided at a position on the grid plate (33) directly opposite to the titanium foil (31); the welding block (35) is sealed and welded and fixed around the window portion (13), so that the electron beam generated by the field emission device (20) passes through the heat dissipation net (331) and hits the titanium foil (31) and is transmitted outward.

4. The transverse vacuum electron beam tube according to claim 1, characterized in that: The electron emission window assembly further comprises a pressing plate (32) and a grid plate (33) which are stacked in sequence, the titanium foil (31) being arranged between the pressing plate (32) and the grid plate (33), the pressing plate (32) pressing and fixing the titanium foil (31) on the grid plate (33); a honeycomb heat dissipation net (331) is provided at a position on the grid plate (33) directly opposite to the titanium foil (31); the grid plate (33) is sealed and welded and fixed around the window portion (13), so that the electron beam generated by the field emission device (20) passes through the heat dissipation net (331) and hits the titanium foil (31) and is transmitted outward.

5. The transverse vacuum electron beam tube according to claim 3 or 4, characterized in that: A cold circulation channel is also provided in the grid plate (33), and the cold circulation channel is arranged around the heat dissipation net (331) to cool the titanium foil (31) attached to the grid plate (33).

6. The transverse vacuum electron beam tube according to claim 5, characterized in that: The heat dissipation net (331) is a heat dissipation net (331) made of oxygen-free copper material.

7. The transverse vacuum electron beam tube according to claim 5, characterized in that: The thickness of the titanium foil (31) is 0.015-0.02 mm.

8. The transverse vacuum electron beam tube according to claim 1, characterized in that: The outer surface of the ceramic connecting head (40) is a corrugated structure.

9. The transverse vacuum electron beam tube according to claim 1, characterized in that: The housing (10) is a housing (10) with a cylindrical structure.

Citation Information

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