Stage water cooling device and fault detection method thereof

Abstract

The application relates to a water cooling device for a stage and a fault detection method thereof. The water cooling device comprises a water tank, a first pipeline and a second pipeline. The water tank is provided with a water suction port and a backflow port. The first pipeline comprises a water suction pipeline connected with the water suction port, a cooling pipeline located in the stage, and a backflow pipeline connected with the backflow port of the water tank. The second pipeline is connected between the water suction pipeline and the backflow pipeline and is close to the water suction port and the backflow port. The first pipeline and the water tank form a refrigeration circulation loop, and the second pipeline and the water tank form a test circulation loop. The fault detection method comprises the following steps: opening the refrigeration circulation loop and closing the test circulation loop, obtaining a first flow value at the water suction port and a second flow value of the backflow pipeline; closing the refrigeration circulation loop and opening the test circulation loop, obtaining a third flow value at the water suction port; and judging a fault type according to the first flow value, the second flow value, the third flow value and a target flow value.

Description

Technical Field

[0001] This invention relates to the field of semiconductor equipment for a stage, and more particularly to a stage water cooling device and a method for detecting faults in the stage water cooling device. Background Technology

[0002] In semiconductor device fabrication processes, substrates are typically placed on a dedicated stage for processing. Since heat is usually generated during processing, excessive heat can affect product yield. Therefore, a stage water-cooling system is generally used to control the stage temperature. This system circulates coolant through pipes to the stage, carrying away some of the heat and stabilizing the stage temperature. Under normal circumstances, the coolant circulates within the pipes at a set target flow rate. However, after prolonged use, the stage water-cooling system may develop malfunctions. For example, the flow meter installed in the pipes may detect an abnormal flow rate, deviating from the target value. Current stage water-cooling systems can only detect these abnormalities but cannot identify the specific cause, hindering rapid troubleshooting. Summary of the Invention

[0003] Based on this, this application addresses the technical problem that current stage water cooling devices cannot identify the specific cause of abnormal refrigerant flow when abnormal flow is detected, and proposes a new stage water cooling device and a fault detection method for stage water cooling devices.

[0004] A method for detecting faults in a water-cooling device for a platform.

[0005] The water-cooling device for the platform includes:

[0006] The system includes a water tank, a first pipe, and a second pipe. The water tank has an intake port and a return port. The first pipe includes an extraction pipe connected to the intake port, a cooling pipe located inside the platform, and a return pipe connected to the return port of the water tank. The second pipe is connected between the extraction pipe and the return pipe and is close to the intake port and the return port. The first pipe and the water tank form a refrigeration loop, and the second pipe and the water tank form a test loop.

[0007] The fault detection method includes:

[0008] Open the refrigeration cycle loop, close the test cycle loop, and obtain the first flow rate value at the water inlet and the second flow rate value of the return pipe;

[0009] Close the refrigeration cycle loop, open the test cycle loop, and obtain the third flow rate value at the water inlet;

[0010] By comparing the first flow rate value, the second flow rate value, the third flow rate value, and the target flow rate value, the fault type of the platform water cooling device is determined.

[0011] The aforementioned fault detection method for the water-cooled stage includes two pipes within the water-cooling device. The first pipe, connected to the water tank, forms a refrigeration circulation loop to dissipate heat from the stage. The second pipe, also connected to the water tank, forms a test circulation loop. During normal operation of the water-cooled stage, only the refrigeration circulation loop is activated, while the test circulation loop remains closed. The refrigerant circulates within the first pipe at a preset target flow rate, controlling the stage temperature. If the flow rate of the water-cooled stage becomes abnormal, indicating a low refrigerant flow rate in the refrigeration circulation loop, the first flow rate at the pump inlet and the second flow rate within the circulation pipe can be obtained by activating the refrigeration circulation loop and closing the test circulation loop. Similarly, the third flow rate at the pump inlet can be obtained by closing the refrigeration circulation loop and activating the test circulation loop. Since abnormal flow rates can be caused by factors such as insufficient pump power, pipe blockage, and pipe rupture, the relationship between these flow rates varies under different conditions. By comparing the first, second, and third flow rates with the target flow rate, the cause of the abnormal flow rate can be analyzed.

[0012] In one embodiment, comparing the first flow rate value, the second flow rate value, the third flow rate value, and the target flow rate value to determine the fault type of the platform water cooling device includes:

[0013] When the second flow rate value is less than the first flow rate value and the third flow rate value, the water cooling device of the platform is determined to be faulty due to pipe blockage.

[0014] When the second flow rate value is less than the first flow rate value and equal to the third flow rate value, the fault of the water cooling device of the platform is determined to be a pipe rupture.

[0015] When the third flow rate value is less than the target flow rate value, the fault of the water cooling device of the platform is determined to be insufficient power to extract the refrigerant.

[0016] In one embodiment, the method further includes:

[0017] When it is determined that the water cooling device of the platform is faulty due to insufficient power to extract the refrigerant, the refrigeration cycle loop is closed and the test cycle loop is opened to increase the power to extract the refrigerant until the newly obtained third flow rate value equals the target flow rate value.

[0018] In one embodiment, after obtaining the first flow rate value at the intake port and the second flow rate value of the return pipe, the method further includes:

[0019] Compare the second flow rate value with the target flow rate value;

[0020] When the second flow rate value is less than the target flow rate value, the steps of closing the refrigeration cycle loop and opening the test cycle loop are then executed.

[0021] In one embodiment, the platform water cooling device further includes a first to a third valve, wherein the first valve is disposed on the extraction pipe, and the connection end of the second pipe and the extraction pipe is located between the first valve and the water inlet; the second valve is disposed on the return pipe, and the connection end of the second pipe and the return pipe is located between the second valve and the return inlet; and the third valve is disposed on the second pipe.

[0022] The process of opening the refrigeration cycle loop and closing the test cycle loop includes: closing the third valve and opening the first valve and the second valve;

[0023] The steps of closing the refrigeration cycle circuit and opening the test cycle circuit include: opening the third valve and closing the first valve and the second valve.

[0024] In one embodiment, the water cooling device for the platform further includes a first flow meter and a second flow meter, wherein the first flow meter is disposed on the extraction pipe and close to the water inlet, the connection end of the second pipe and the extraction pipe is located between the first valve and the first flow meter, and the second flow meter is disposed on the return pipe and close to the outlet of the cooling pipe from which the refrigerant is discharged from the platform.

[0025] The step of obtaining the first flow rate value at the water inlet and the second flow rate value of the return pipe includes: obtaining the first flow rate value through the first flow meter and obtaining the second flow rate value through the second flow meter;

[0026] The step of obtaining the third flow rate value at the water inlet includes: obtaining the third flow rate value through the first flow meter.

[0027] In one embodiment, the method further includes:

[0028] The first temperature value of the refrigerant output from the stage through the cooling pipe is detected;

[0029] The temperature of the refrigerant in the water tank is adjusted according to the first temperature value of the refrigerant.

[0030] In one embodiment, the stage water-cooling device further includes:

[0031] A first temperature sensor is located on the return pipe and near the outlet of the cooling pipe from the stage where the refrigerant is output; it is used to detect the first temperature value of the refrigerant output from the stage by the cooling pipe.

[0032] A refrigeration assembly for regulating the temperature of the refrigerant in the water tank;

[0033] The step of detecting the first temperature value of the refrigerant output from the stage by the cooling pipe includes: detecting the first temperature value of the refrigerant output from the stage by the cooling pipe through the first temperature sensor.

[0034] Adjusting the temperature of the refrigerant in the water tank according to the first temperature value of the refrigerant includes:

[0035] When the first temperature value is greater than the preset temperature, the cooling component is controlled to increase the cooling capacity.

[0036] When the first temperature value is lower than the preset temperature, the cooling component is controlled to reduce its cooling capacity.

[0037] In one embodiment, the method further includes:

[0038] The resistance value of the refrigerant is detected, and the refrigerant needs to be replaced based on the resistance value.

[0039] In one embodiment, the stage water cooling device further includes a resistivity detector, which is installed on the return pipe and near the outlet of the cooling pipe from which the refrigerant is discharged from the stage.

[0040] The detection of the resistance value of the refrigerant includes: detecting the resistance value of the refrigerant using the resistivity detector.

[0041] A water-cooling device for a platform, comprising:

[0042] The system includes a water tank, a first pipe, and a second pipe. The first pipe includes an extraction pipe connected to the water tank's inlet, a cooling pipe located inside the platform, and a return pipe connected to the water tank's return outlet. The second pipe is connected between the extraction pipe and the return pipe and is close to the water tank and the return outlet. The first pipe and the water tank form a refrigeration loop, and the second pipe and the water tank form a test loop.

[0043] A drive component is provided on the refrigeration cycle circuit and the test cycle circuit, and is used to control the on / off state of the refrigeration cycle circuit and the test cycle circuit.

[0044] A control component, connected to the drive component, is used to control the drive component to execute a first process and a second process separately. The first process includes: opening the cooling cycle loop and closing the test cycle loop; the second process includes: closing the cooling cycle loop and opening the test cycle loop.

[0045] A flow detection component is disposed on the extraction pipe and the return pipe, and is used to detect the first flow value at the extraction port and the second flow value at the return pipe during the first process, and the third flow value at the extraction port during the second process.

[0046] The aforementioned water-cooled platform has two pipes. The first pipe connects the water tank's inlet and outlet to form a cooling circulation loop for the platform. The second pipe connects the outlet's extraction pipe and the outlet's return pipe to form a test circulation loop. When the water cooling device experiences an abnormal flow rate, the driving component is controlled to open the cooling circulation loop and close the test circulation loop to obtain a first flow rate value at the water tank outlet and a second flow rate value in the return pipe during this period. The driving component is also controlled to close the cooling circulation loop and open the test circulation loop to obtain a third flow rate value at the water tank outlet during this period. After obtaining the first, second, and third flow rates, these values ​​are compared with the target flow rate value to analyze the cause of the abnormal flow rate.

[0047] In one embodiment, it further includes:

[0048] A data acquisition component, connected to the flow detection component, is used to acquire the first flow value, the second flow value, and the third flow value;

[0049] An analysis component, connected to the data acquisition component, is used to acquire the first flow rate value, the second flow rate value, and the third flow rate value, and compare the first flow rate value, the second flow rate value, the third flow rate value, and the target flow rate value to determine the fault type of the platform water cooling device.

[0050] In one embodiment, the drive assembly includes a first valve, a second valve, and a third valve, wherein the first valve is disposed on the extraction pipe, and the connection end of the second pipe to the extraction pipe is located between the first valve and the water inlet; the second valve is disposed on the return pipe, and the connection end of the second pipe to the return pipe is located between the second valve and the return port; and the third valve is disposed on the second pipe.

[0051] The process of opening the refrigeration cycle loop and closing the test cycle loop includes: closing the third valve and opening the first valve and the second valve;

[0052] The steps of closing the refrigeration cycle circuit and opening the test cycle circuit include: opening the third valve and closing the first valve and the second valve.

[0053] In one embodiment, the flow detection component includes a first flow meter and a second flow meter, wherein the first flow meter is disposed on the extraction pipe and near the extraction port, the connection end of the second pipe to the extraction pipe is located between the first valve and the first flow meter, and the second flow meter is disposed on the return pipe and near the outlet of the cooling pipe from which the refrigerant is discharged from the platform; the first flow meter is used to detect a first flow value at the extraction port during the first process and a third flow value at the extraction port during the second process, and the second flow meter is used to detect a second flow value in the return pipe during the first process.

[0054] In one embodiment, it further includes:

[0055] The first temperature sensor is located on the return pipe and near the outlet of the coolant that is output from the stage by the cooling pipe, and is used to detect the first temperature value of the coolant output from the stage by the cooling pipe.

[0056] A refrigeration assembly for regulating the temperature of the refrigerant in the water tank;

[0057] A temperature regulation component is connected between the first temperature sensor and the cooling component, and is used to acquire the first temperature value and adjust the cooling capacity of the cooling component according to the first temperature value.

[0058] In one embodiment, it further includes:

[0059] A resistivity meter is installed on the return pipe and near the outlet of the cooling pipe from the stage where the refrigerant is output. It is used to detect the resistance value of the refrigerant output from the stage by the cooling pipe. Attached Figure Description

[0060] Figure 1 This is a flowchart of the steps for a fault detection method of a water-cooling device for a platform in one embodiment of this application;

[0061] Figure 2 This is a schematic diagram of the water-cooling device for the platform in one embodiment of this application;

[0062] Figure 3 This is a logic diagram of some components of the water-cooling device for the stage in one embodiment of this application.

[0063] Symbol Explanation

[0064] 110 Water tank; 120 Refrigeration unit; 211 Extraction pipe; 212 Cooling pipe; 213 Return pipe; 300 Drive unit; 310 First valve; 320 Second valve; 330 Third valve; 410 Flow detection unit; 411 First flow meter; 412 Second flow meter; 421 First temperature sensor; 422 Second temperature sensor; 431 Resistivity meter; 500 Stage; 600 Data acquisition unit; 610 First acquisition unit; 620 Second acquisition unit; 700 Temperature control unit; 800 Monitoring terminal; 810 Control unit; 820 Analysis unit. Detailed Implementation

[0065] To facilitate understanding of the present invention, a more complete description will be given below with reference to the accompanying drawings. Preferred embodiments of the invention are shown in the drawings. However, the invention can be implemented in many different forms and is not limited to the embodiments described herein. Rather, these embodiments are provided so that this disclosure will be thorough and complete.

[0066] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this invention pertains. The terminology used herein in the description of the invention is for the purpose of describing particular embodiments only and is not intended to be limiting of the invention. The term "and / or" as used herein includes any and all combinations of one or more of the associated listed items.

[0067] This application relates to a fault detection method for a water-cooled stage, used for detecting the water-cooled stage.

[0068] like Figure 2As shown, the water-cooling device for the platform includes a water tank 110, a first pipe (not shown in the figure), and a second pipe 220. Specifically, the water tank 110 has a water inlet A1 and a return outlet A2. The first pipe is formed by connecting an extraction pipe 211, a cooling pipe 212, and a return pipe 213. The cooling pipe 212 is placed inside the platform 500. Specifically, the platform has a water inlet B1 and a water outlet B2. The cooling pipe 212 connects the water inlet B1 and the water outlet B2 of the platform. The extraction pipe 211 connects the water inlet A1 and the water inlet B1, and the return pipe 213 connects the water outlet B2 and the return outlet A2. The first pipe, formed by the extraction pipe 211, the cooling pipe 212, and the return pipe 213, forms a refrigeration cycle with the water tank 110. When the refrigerant circulates in this refrigeration cycle, it can conduct heat to the platform 500 and control the temperature of the platform 500. Specifically, the second pipe 220 connects the extraction pipe 211 and the return pipe 213, and is close to the water inlet A1 and the return outlet A2, so as to connect the extraction pipe 211 and the return pipe 213 near the water inlet A1 and the return outlet A2, forming a test circulation loop near the water tank 110. It should be noted that the proximity of the second pipe 220 to the water inlet A1 and the return outlet A2 specifically means that the distance between the connection end of the second pipe 220 and the extraction pipe 211 and the water inlet A1, and the distance between the connection end of the second pipe 220 and the return pipe 213 and the return outlet A2, are both less than a preset distance. This preset distance depends on the actual environment and should be as small as possible to ensure that the second pipe 220 is as close as possible to the water inlet A1 and the return outlet A2. Understandably, the platform water-cooling device should also have a water pump, which draws refrigerant from the water tank when the platform water-cooling device is working.

[0069] like Figure 1 As shown, the fault detection method specifically includes:

[0070] Step S110: Open the refrigeration cycle loop, close the test cycle loop, and obtain the first flow rate value at the water inlet and the second flow rate value of the return pipe.

[0071] In this step, the refrigeration circulation loop is opened, and the test circulation loop is closed. The first pipe, connecting the extraction pipe 211, cooling pipe 212, and return pipe 213, is opened, while the second pipe 220 is closed. When the water pump operates, the refrigerant is output from the extraction port, enters the cooling pipe 212 through the extraction pipe 211, conducts heat to the stage 500, and then flows back to the water tank 110 through the return pipe 213. During this period, it is necessary to obtain the first flow rate value of the refrigerant at the extraction port A1 and the second flow rate value of the refrigerant in the return pipe 213, defining the first and second flow rate values ​​as S1 and S2, respectively. It is understood that the aforementioned first and second flow rate values ​​are obtained after the refrigerant flow in the pipes has stabilized.

[0072] Step S120: Close the refrigeration cycle loop, open the test cycle loop, and obtain the third flow rate value at the water inlet.

[0073] In this step, the refrigeration cycle loop is closed and the test cycle loop is opened. This closes the first pipe, which connects the extraction pipe 211, cooling pipe 212, and return pipe 213, while opening the second pipe 220. When the water pump operates, the refrigerant is output from the extraction port and flows back into the water tank 110 through the second pipe 220. During this period, a third flow rate value of the refrigerant at the extraction port A1 needs to be obtained. This third flow rate value is defined as S3, representing the actual flow rate under the current extraction power, unaffected by the pipes. To ensure the accuracy of the third flow rate value S3, the second pipe 220 should be as close as possible to the extraction port A1 and return port A2 of the water tank 110, thus making the extraction pipe 211 and return pipe 213 connected to the test cycle loop as short as possible. It is understood that the third flow rate value is also obtained after the refrigerant flow in the pipes has stabilized.

[0074] It should be noted that the power of the water pump to draw refrigerant in steps S110 and S120 must be consistent. Step S110 can be skipped to step S220 without turning off the water pump.

[0075] In one specific embodiment, the control of the refrigeration cycle loop and the test cycle loop in the above steps relies on valves. Specifically, such as... Figure 2As shown, the water-cooling device for the platform includes at least three valves: a first valve 310, a second valve 320, and a third valve 330. The first valve 310 is located on the extraction pipe 211 and controls the opening and closing of the extraction pipe 211; the connection end of the second pipe 220 to the extraction pipe 211 must be located between the first valve 310 and the water inlet A1. The second valve 320 is located on the return pipe 213 and controls the opening and closing of the return pipe 213; the connection end of the second pipe 220 to the return pipe 213 must be located between the second valve 320 and the return port A2. The third valve 330 is located on the second pipe 220 and controls the opening and closing of the second pipe 220.

[0076] When the first, second, and third valves are installed on the pipeline, the operation of opening the refrigeration circulation loop and closing the test circulation loop in step S110 specifically includes: opening the first valve 310 and the second valve 320, and closing the third valve 330. The operation of closing the refrigeration circulation loop and opening the test circulation loop in step S120 specifically includes: opening the third valve 330, and closing the first valve 310 and the second valve 320. Since the connection end of the second pipeline 220 and the extraction pipeline 211 is located between the first valve 310 and the water inlet A1, and the connection end of the second pipeline 220 and the return pipeline 213 is located between the second valve 320 and the return port A2, closing the first valve 310 and the second valve 320 and opening the third valve 330 allows the refrigerant to flow in the test circulation loop. It is understood that the above valves can be automatic valves such as magnetic valves or electric valves, or manual valves; the valve type is not limited here.

[0077] In one specific embodiment, obtaining the flow rate value at the relevant location in the above steps requires the use of a flow meter. Specifically, such as... Figure 2 As shown, the water-cooling device for the platform also includes a first flow meter 411 and a second flow meter 412. The first flow meter 411 is installed on the extraction pipe 211 at the water inlet A1, and is close to the water inlet A1. While the connection end of the second pipe 220 and the extraction pipe 211 is as close as possible to the water inlet A1, the first flow meter 411 must be positioned between the connection end of the second pipe 220 and the extraction pipe 211 and the water inlet A1. Therefore, the first flow meter 411 can be used to measure the flow rate at the water inlet A1 in both steps S110 and S120. The second flow meter 412 is installed on the return pipe 213, specifically near the outlet B2 where the refrigerant is discharged from the platform via the cooling pipe 212, to accurately reflect the flow rate of the refrigerant flowing through the platform 500.

[0078] When the first flow meter 411 and the second flow meter 412 are installed on the pipeline, in step S110, when the refrigeration cycle loop is connected, obtaining the first flow value at the water inlet specifically includes obtaining the first flow value S1 at the water inlet during this period through the first flow meter 411, and obtaining the second flow value in the return pipe specifically includes obtaining the second flow value S2 in the return pipe 213 during this period through the second flow meter 412. When the test cycle loop is connected, obtaining the third flow value at the water inlet specifically includes obtaining the third flow value S3 at the water inlet during this period through the first flow meter 411. That is, the first flow value S1 and the third flow value S3 are both measured by the same flow meter, which makes the data more reliable.

[0079] Step S130: Compare the first flow rate value, the second flow rate value, the third flow rate value, and the target flow rate value to determine the fault type of the platform water cooling device.

[0080] In this step, the data required for analysis has been acquired, including the first flow rate value S1, the second flow rate value S2, and the third flow rate value S3. In addition, the known target flow rate value S' is also included. The target flow rate value S' is the required flow rate of the refrigerant in the refrigeration cycle loop under normal conditions; normally, S1=S2=S'. During long-term use of the platform water-cooling device, problems may occur with its water pump motor and piping, causing the flow rate in the refrigeration cycle loop to fall below the set target flow rate value, resulting in flow abnormalities. Since the relationship between the above flow rate values ​​varies depending on the cause of the flow abnormality, comparing and analyzing these flow rate values ​​can reveal the cause of the flow abnormality.

[0081] When the first pipe ruptures or becomes blocked, the second flow rate S2 in the refrigeration cycle loop will be less than the first flow rate S1. Specifically, in the case of a ruptured pipe, the third flow rate S3 measured by the first flow meter 411 in the test cycle loop will be equal to the first flow rate S1 measured by the first flow meter 411 in the refrigeration cycle loop. Conversely, in the case of a blocked pipe, the third flow rate S3 measured by the first flow meter 411 in the test cycle loop will be greater than the first flow rate S1 measured by the first flow meter 411 in the refrigeration cycle loop. This allows identification of whether the pipe is blocked or ruptured. Simultaneously, to determine if the water pump is functioning correctly, the third flow rate S3 measured in the test cycle loop can be compared with the target flow rate S'. When the water pump's pumping power is normal, the third flow rate S3 is equal to the target flow rate S'. When the water pump's pumping power is insufficient, the third flow rate S3 is less than the target flow rate S'. Therefore, based on the above analysis, we can conclude that:

[0082] When S2 < S1 < S3, the fault of the water cooling device of the platform is determined to be pipe blockage.

[0083] When S2 < S1 = S3, the fault of the water cooling device of the platform is determined to be a pipe rupture.

[0084] When S3 < S', the fault of the water cooling device of the platform is determined to be insufficient power of the water pump to draw refrigerant.

[0085] The fault detection method of this application can analyze the cause of abnormal flow. The detection process can be carried out directly when an abnormality occurs during the operation of the water cooling device of the platform, or it can be used to detect the device before the water cooling device of the platform enters operation. Therefore, in the above embodiment, step S110 is executed first and then step S120 is executed. In other embodiments, step S120 can be executed first and then step S110 can be executed, as long as the first flow value, second flow value and third flow value can be obtained. In one embodiment, the above detection method is applied during the operation of the water-cooled device of the platform. First, step S110 is executed to make the refrigeration cycle loop open, and the first flow rate value S1 at the water inlet A1 and the second flow rate value S2 of the return pipe are obtained respectively. During the refrigeration cycle loop is open, after obtaining the first flow rate value S1 and the second flow rate value S2, the second flow rate value S2 is compared with the target flow rate value S' to detect whether there is a flow abnormality. If S2=S', it is determined that the current pipe flow is normal and can be maintained in the current state. Once S2<S' occurs, it is determined that the current pipe flow is abnormal. After recording the current first flow rate value S1 and the second flow rate value S2, step S120 is executed to obtain the third flow rate value S3, and the cause of the flow abnormality is analyzed in step S130.

[0086] In one embodiment, when it is determined that the water cooling device of the platform is faulty due to insufficient power of the water pump to draw refrigerant, the refrigeration circulation loop is closed, the test circulation loop is opened, and the power of the water pump to draw refrigerant is increased until the newly obtained third flow rate value S3 is equal to the target flow rate value S'.

[0087] In one embodiment, the fault detection method further includes detecting the first temperature value of the refrigerant output from outlet B2, and adjusting the temperature of the refrigerant in the water tank according to the first temperature value. The first temperature value of the refrigerant at outlet B2 can be used to reflect the temperature of the stage at this time. In order to ensure the temperature stability of the stage, the temperature of the refrigerant at this point is required to be maintained at a preset temperature. In this embodiment, by detecting the first temperature value of the refrigerant at the outlet, if the first temperature value is higher than the preset temperature, it indicates that the temperature of the stage is high and the temperature of the refrigerant in the water tank needs to be further reduced; if the first temperature value is lower than the preset temperature, it indicates that the temperature of the stage is low and the temperature of the refrigerant in the water tank needs to be further increased.

[0088] In one specific embodiment, the stage water-cooling device further includes a first temperature sensor 421 and a refrigeration component 120. The first temperature sensor 421 is located on the return pipe and near the outlet, and is used to detect the first temperature value of the refrigerant output at the outlet. The refrigeration component 120 is used to adjust the temperature of the refrigerant in the water tank. In the above detection method, detecting the first temperature value of the refrigerant output at the outlet B2 specifically includes obtaining the first temperature value of the refrigerant at the outlet through the first temperature sensor 421. Adjusting the temperature of the refrigerant in the water tank according to the first temperature value of the refrigerant specifically includes: comparing the first temperature value with a set temperature value; when the first temperature value is greater than the set temperature value, controlling the refrigeration component 120 to increase the cooling capacity; when the first temperature value is less than the set temperature value, controlling the refrigeration component 120 to decrease the cooling capacity. Optionally, the above stage water-cooling device further includes a second temperature sensor 422, which is located on the extraction pipe at the inlet, and is used to detect the second temperature value of the refrigerant at the inlet, thereby reflecting the actual temperature of the refrigerant in the water tank.

[0089] In one embodiment, the above-mentioned fault detection method further includes detecting the resistance value of the refrigerant and determining whether the refrigerant needs to be replaced based on the resistance value. In some special cases, such as when the stage is an electrostatic chuck, the relevant process parameters of the substrate on the electrostatic chuck, such as the feature size and etching rate of the silicon wafer, will be affected by other parameters of the water cooling device besides temperature. Analysis shows that the refrigerant has a low resistivity, and when it flows through the electrostatic chuck, it will generate power coupling with the electrostatic chuck, thereby affecting the above-mentioned process parameters. Although the resistance value of the refrigerant initially added to the water tank meets the requirements, the refrigerant in the water tank is not frequently replaced. Generally, refrigerant is only added when the volume of refrigerant in the water tank is lower than the set level. On the one hand, adding refrigerant is a manual operation, and sometimes errors may occur. On the other hand, refrigerants generally use fluorinated compounds, while the inner walls of the pipes, especially the cooling pipes in the stage, generally contain metallic components. During long-term circulation, the refrigerant will react chemically with the pipes, resulting in a certain amount of metallic components in the refrigerant, which will cause the refrigerant resistance to decrease. In this application, by real-time detection of the resistance value of the refrigerant, it is possible to avoid incorrect refrigerant addition or refrigerant degradation after long-term use, which could affect the process parameters of the substrate on the stage.

[0090] In one specific embodiment, the detection of the refrigerant resistance relies on a resistivity meter, such as... Figure 2As shown, the resistivity meter 431 is positioned on the return pipe 213 and near the outlet B2 of the cooling pipe where the refrigerant is discharged from the stage. This placement allows for a more accurate measurement of the resistance value of the refrigerant flowing through the stage. Specifically, the resistivity meter measures the resistivity between two electrodes with a surface area of ​​1 cm², spaced 1 cm apart, placed in the refrigerant and energized.

[0091] This application also relates to a water-cooling device for a platform, such as... Figure 2 As shown, the water-cooling device for the platform includes a water tank 110, a first pipe, and a second pipe 220. The structure of the water tank 110, the first pipe, and the second pipe 220 can be referred to the above description, and will not be repeated here. Meanwhile, the water-cooling device for the platform also includes a drive component 300, a control component 810, and a flow detection component 410. The drive component 300 is located on the refrigeration loop and the test loop, and is used to control the on / off state of the refrigeration loop and the test loop. The control component 810 is connected to the drive component 300 and is used to control the drive component 300 to execute the first process and the second process separately. The first process includes: opening the refrigeration loop and closing the test loop; the second process includes: closing the refrigeration loop and opening the test loop. The control component 810 can be located within the monitoring terminal 800. The flow detection component 410 is located on the extraction pipe 211 and the return pipe 213, and is used to detect the first flow rate S1 at the extraction port A1 and the second flow rate S2 at the return pipe 213 during the first process, and the third flow rate S3 at the extraction port A1 during the second process. It should be noted that the order of the first and second processes is not limited here; it is sufficient to control the first and second processes to be executed separately in two different time periods. Understandably, the water-cooling device should also have a water pump, which draws refrigerant from the water tank when the device is in operation.

[0092] The aforementioned water-cooled platform device, having a cooling circulation loop and a testing circulation loop, executes the first and second processes separately through the control component during testing. The flow detection component obtains the first flow value S1, the second flow value S2, and the third flow value S3 in the two processes. After obtaining the above flow values, they are compared with the target flow value to analyze the cause of the flow abnormality.

[0093] In one embodiment, the stage water-cooling device further includes a data acquisition component 600 and an analysis component 820. The analysis component 820 is specifically located within the monitoring terminal 800. The data acquisition component 600 is connected to the flow detection component 410 and is used to acquire a first flow value S1, a second flow value S2, and a third flow value S3 from the flow detection component 410. The analysis component 820 is connected to the data acquisition component 600 and is used to acquire the aforementioned first flow value S1, second flow value S2, and third flow value S3, and compare and analyze these flow values ​​with a target flow value S' to determine the fault type of the stage water-cooling device. In this embodiment, the stage water-cooling device can perform its own analysis after acquiring the aforementioned flow data, thereby making the device more intelligent. In one embodiment, the judgment logic of the analysis component 820 is as follows: when S2 < S1 < S3, the fault of the platform water cooling device is determined to be pipe blockage; when S2 < S1 = S3, the fault of the platform water cooling device is determined to be pipe rupture; when S3 < S', the fault of the platform water cooling device is determined to be insufficient power of the water pump to draw refrigerant.

[0094] Furthermore, when the stage water-cooling device includes an analysis component 820, this analysis component 820 is also connected to a control component 810. The control component 810 switches between the first and second processes according to the instructions from the analysis component 820. Upon startup, the control component first executes the first process. When it receives a first switching instruction from the analysis component 820, it switches from executing the first process to executing the second process. Specifically, as... Figure 3 As shown, after startup, the control component first executes the first process. In the first process, the refrigerant circulates in the refrigeration loop, thereby controlling the temperature of the stage 500. During this period, the data acquisition component 600 acquires the first flow rate value S1 and the second flow rate value S2 and transmits them to the analysis component. The analysis component compares the second flow rate value S2 with the target flow rate value S'. When S2 = S', it indicates that the current pipeline flow is normal, and the control component 810 continues to execute the first process. When S2 < S', it indicates that the current flow is abnormal. At this time, the analysis component 820 sends a first switching command to the control component, causing the control component 810 to switch from executing the first process to executing the second process. The data acquisition component 600 continues to acquire the third flow rate value S3 and transmits it to the analysis component 820. After acquiring the above S1, S2, and S3, the analysis component 820 compares and analyzes them together with the target flow rate value S' to determine the cause of the flow abnormality.

[0095] Furthermore, the analysis component 820 is also connected to the water pump. In the above process, when the analysis component 820 determines that the fault type of the platform water cooling device is insufficient water pump power, it is also used to control the water pump to increase power until S3=S'. When S3=S', the analysis component 820 sends a second switching command to the control component 810. The control component 810 is also used to receive the second switching command. When the second switching command is received, it switches from executing the second process to executing the first process. This realizes that the platform water cooling device can automatically diagnose and adjust the flow rate during operation, realizing the intelligence of the device. When the analysis component 820 determines that the fault type of the platform water cooling device is pipe rupture or blockage, it controls the water pump to stop working and repairs or replaces the pipe.

[0096] In one specific embodiment, the drive assembly 300 includes a first valve 310, a second valve 320, and a third valve 330. The first valve 310 is disposed on the extraction pipe 211 and is used to control the opening and closing of the extraction pipe 211. The connection end of the second pipe 220 with the extraction pipe 211 is located between the first valve 310 and the water inlet A1. The second valve 320 is disposed on the return pipe 213 and is used to control the opening and closing of the return pipe 213. The connection end of the second pipe 220 with the return pipe 213 is located between the second valve 320 and the return port A2. The third valve 330 is disposed on the second pipe 220 and is used to control the opening and closing of the second pipe 220. In this embodiment, the drive component 300 opening the refrigeration cycle loop and closing the test cycle loop specifically includes: closing the third valve 330 and opening the first valve 310 and the second valve 320; the drive component 300 closing the refrigeration cycle loop and opening the test cycle loop specifically includes: opening the third valve 330 and closing the first valve 310 and the second valve 320.

[0097] In one embodiment, the flow detection component 410 includes a first flow meter 411 and a second flow meter 412. The first flow meter 411 is disposed on the extraction pipe 211 at the extraction port A1 and is close to the extraction port A1. Simultaneously, while the connection end of the second pipe 220 and the extraction pipe 211 is as close as possible to the extraction port A1, the first flow meter 411 must be positioned between the connection end of the second pipe 220 and the extraction pipe 211 and the extraction port A1. The second flow meter 412 is disposed on the return pipe 213, specifically near the outlet B2 of the cooling pipe 212 where the refrigerant is discharged from the stage, to accurately reflect the flow rate of the refrigerant flowing through the stage 500. The first flow meter 411 is used to detect the first flow rate value S1 at the extraction port A1 during the first process and the third flow rate value S3 at the extraction port A1 during the second process. The second flow meter 412 is used to detect the second flow rate value S2 of the return pipe 213 during the first process.

[0098] In one embodiment, the stage water-cooling device further includes a first temperature sensor 421, a temperature regulating component 700, and a cooling component 120. The first temperature sensor 421 is located on the return pipe 213 near the outlet B2 and is used to detect the first temperature value of the refrigerant output from the outlet B2. The cooling component 120 is used to regulate the temperature in the water tank 110. The temperature regulating component 700 is connected between the first temperature sensor 421 and the cooling component 120, and is used to acquire the first temperature value of the first temperature sensor 421 and compare it with a set temperature value. When the first temperature value is greater than the set temperature value, the cooling component 120 is controlled to increase its cooling capacity; when the first temperature value is less than the set temperature value, the cooling component 120 is controlled to decrease its cooling capacity. Optionally, the stage water-cooling device further includes a second temperature sensor 422, which is located on the extraction pipe at the inlet and is used to detect the second temperature value of the refrigerant at the inlet A1, thereby reflecting the actual temperature of the refrigerant in the water tank. In one embodiment, the stage water cooling device has a data acquisition component 600, and a temperature regulation component 700 is connected to a first temperature sensor 421 through the data acquisition component 600 to obtain a first temperature value.

[0099] In one embodiment, the stage water cooling device further includes a resistivity detector 431, which is disposed on the return pipe 213 and near the outlet B2 of the cooling pipe from which the refrigerant is discharged from the stage. This placement allows for a more accurate measurement of the resistance value of the refrigerant flowing through the stage. In another embodiment, the stage water cooling device includes a data acquisition component 600, which is connected to the resistivity detector 431 to collect the resistance value of the refrigerant.

[0100] In one embodiment, the data acquisition component 600 is connected to the monitoring terminal 800 and is used to upload the acquired data to the monitoring terminal 800. In a specific embodiment, the data acquisition component 600 may include a first acquisition component 610 and a second acquisition component 620 respectively connected to the monitoring terminal 800. The first acquisition component 610 is placed near the platform 500 and connected to the second flow meter 412, the first temperature sensor 421 and the resistivity detector 431 located at the water outlet. The second acquisition component 620 is placed near the water tank 110 and connected to the first flow meter 411 and the second temperature sensor 422 located at the water inlet A1.

[0101] The above embodiments merely illustrate several implementation methods of the present invention, and their descriptions are relatively specific and detailed, but they should not be construed as limiting the scope of the invention patent. It should be noted that those skilled in the art can make various modifications and improvements without departing from the concept of the present invention, and these all fall within the protection scope of the present invention. Therefore, the protection scope of this invention patent should be determined by the appended claims.

Claims

1. A method for detecting faults in a water-cooling device for a platform, characterized in that, The water-cooling device for the platform includes: The system includes a water tank, a first pipe, and a second pipe. The water tank has an intake port and a return port. The first pipe includes an extraction pipe connected to the intake port, a cooling pipe located inside the platform, and a return pipe connected to the return port of the water tank. The second pipe is connected between the extraction pipe and the return pipe and is close to the intake port and the return port. The first pipe and the water tank form a refrigeration loop, and the second pipe and the water tank form a test loop. The fault detection method includes: Open the refrigeration cycle loop, close the test cycle loop, and obtain the first flow rate value at the water inlet and the second flow rate value of the return pipe; Close the refrigeration cycle loop, open the test cycle loop, and obtain the third flow rate value at the water inlet; By comparing the first flow rate value, the second flow rate value, the third flow rate value, and the target flow rate value, the fault type of the platform water cooling device is determined.

2. The fault detection method as described in claim 1, characterized in that, The step of comparing the first flow rate value, the second flow rate value, the third flow rate value, and the target flow rate value to determine the fault type of the platform water cooling device includes: When the second flow rate value is less than the first flow rate value and the third flow rate value, the water cooling device of the platform is determined to be faulty due to pipe blockage. When the second flow rate value is less than the first flow rate value and equal to the third flow rate value, the fault of the water cooling device of the platform is determined to be a pipe rupture. When the third flow rate value is less than the target flow rate value, the fault of the water cooling device of the platform is determined to be insufficient power to extract the refrigerant.

3. The fault detection method as described in claim 1, characterized in that, The method further includes: When it is determined that the water cooling device of the platform is faulty due to insufficient power to extract the refrigerant, the refrigeration cycle loop is closed and the test cycle loop is opened to increase the power to extract the refrigerant until the newly obtained third flow rate value equals the target flow rate value.

4. The fault detection method as described in claim 1, characterized in that, After obtaining the first flow rate value at the water inlet and the second flow rate value in the return pipe, the method further includes: Compare the second flow rate value with the target flow rate value; When the second flow rate value is less than the target flow rate value, the steps of closing the refrigeration cycle loop and opening the test cycle loop are then executed.

5. The fault detection method as described in claim 1, characterized in that, The water-cooling device for the platform also includes a first valve, a second valve, and a third valve. The first valve is disposed on the extraction pipe, and the connection end of the second pipe to the extraction pipe is located between the first valve and the water inlet. The second valve is disposed on the return pipe, and the connection end of the second pipe to the return pipe is located between the second valve and the return port. The third valve is disposed on the second pipe. The process of opening the refrigeration cycle loop and closing the test cycle loop includes: closing the third valve and opening the first valve and the second valve; The steps of closing the refrigeration cycle circuit and opening the test cycle circuit include: opening the third valve and closing the first valve and the second valve.

6. The fault detection method as described in claim 5, characterized in that, The water cooling device for the platform also includes a first flow meter and a second flow meter. The first flow meter is installed on the extraction pipe and close to the water inlet. The connection end of the second pipe with the extraction pipe is located between the first valve and the first flow meter. The second flow meter is installed on the return pipe and close to the outlet of the cooling pipe from which the refrigerant is discharged from the platform. The step of obtaining the first flow rate value at the water inlet and the second flow rate value of the return pipe includes: obtaining the first flow rate value through the first flow meter and obtaining the second flow rate value through the second flow meter; The step of obtaining the third flow rate value at the water inlet includes: obtaining the third flow rate value through the first flow meter.

7. The fault detection method as described in claim 1, characterized in that, The method further includes: The first temperature value of the refrigerant output from the stage through the cooling pipe is detected; The temperature of the refrigerant in the water tank is adjusted according to the first temperature value of the refrigerant.

8. The fault detection method as described in claim 7, characterized in that, The water-cooling device for the platform also includes: A first temperature sensor is located on the return pipe and near the outlet of the cooling pipe from the stage where the refrigerant is output; it is used to detect the first temperature value of the refrigerant output from the stage by the cooling pipe. A refrigeration assembly for regulating the temperature of the refrigerant in the water tank; The step of detecting the first temperature value of the refrigerant output from the stage by the cooling pipe includes: detecting the first temperature value of the refrigerant output from the stage by the cooling pipe through the first temperature sensor. The step of adjusting the temperature of the refrigerant in the water tank according to the first temperature value of the refrigerant includes: When the first temperature value is greater than the preset temperature, the cooling component is controlled to increase the cooling capacity. When the first temperature value is lower than the preset temperature, the cooling component is controlled to reduce its cooling capacity.

9. The fault detection method as described in claim 1, characterized in that, The method further includes: The resistance value of the refrigerant is detected, and the refrigerant needs to be replaced based on the resistance value.

10. The fault detection method as described in claim 9, characterized in that, The water-cooling device for the platform also includes a resistivity detector, which is installed on the return pipe and near the outlet of the cooling pipe from which the refrigerant is output from the platform. The detection of the resistance value of the refrigerant includes: detecting the resistance value of the refrigerant using the resistivity detector.

11. A water-cooling device for a platform, characterized in that, include: The system includes a water tank, a first pipe, and a second pipe. The first pipe includes an extraction pipe connected to the water tank's inlet, a cooling pipe located inside the platform, and a return pipe connected to the water tank's return outlet. The second pipe is connected between the extraction pipe and the return pipe and is close to the water tank and the return outlet. The first pipe and the water tank form a refrigeration loop, and the second pipe and the water tank form a test loop. A drive component is provided on the refrigeration cycle circuit and the test cycle circuit, and is used to control the on / off state of the refrigeration cycle circuit and the test cycle circuit. A control component, connected to the drive component, is used to control the drive component to execute a first process and a second process separately. The first process includes: opening the cooling cycle loop and closing the test cycle loop; the second process includes: closing the cooling cycle loop and opening the test cycle loop. A flow detection component is disposed on the extraction pipe and the return pipe, and is used to detect the first flow value at the extraction port and the second flow value at the return pipe during the first process, and the third flow value at the extraction port during the second process.

12. The water-cooling device for the platform as described in claim 11, characterized in that, Also includes: A data acquisition component, connected to the flow detection component, is used to acquire the first flow value, the second flow value, and the third flow value; An analysis component, connected to the data acquisition component, is used to acquire the first flow rate value, the second flow rate value, and the third flow rate value, and compare the first flow rate value, the second flow rate value, the third flow rate value, and the target flow rate value to determine the fault type of the platform water cooling device.

13. The water-cooling device for the platform as described in claim 11, characterized in that, The drive assembly includes a first valve, a second valve, and a third valve, wherein the first valve is disposed on the extraction pipe, and the connection end of the second pipe to the extraction pipe is located between the first valve and the water inlet; the second valve is disposed on the return pipe, and the connection end of the second pipe to the return pipe is located between the second valve and the return port; and the third valve is disposed on the second pipe. The process of opening the refrigeration cycle loop and closing the test cycle loop includes: closing the third valve and opening the first valve and the second valve; The steps of closing the refrigeration cycle circuit and opening the test cycle circuit include: opening the third valve and closing the first valve and the second valve.

14. The water-cooling device for the platform as described in claim 13, characterized in that, The flow detection component includes a first flow meter and a second flow meter. The first flow meter is disposed on the extraction pipe and near the extraction port. The connection end of the second pipe with the extraction pipe is located between the first valve and the first flow meter. The second flow meter is disposed on the return pipe and near the outlet of the cooling pipe from which the refrigerant is discharged from the platform. The first flow meter is used to detect a first flow value at the extraction port during the first process and a third flow value at the extraction port during the second process. The second flow meter is used to detect a second flow value in the return pipe during the first process.

15. The water-cooling device for the platform as described in claim 11, characterized in that, Also includes: The first temperature sensor is located on the return pipe and near the outlet of the coolant that is output from the stage by the cooling pipe, and is used to detect the first temperature value of the coolant output from the stage by the cooling pipe. A refrigeration assembly for regulating the temperature of the refrigerant in the water tank; A temperature regulation component is connected between the first temperature sensor and the cooling component, and is used to acquire the first temperature value and adjust the cooling capacity of the cooling component according to the first temperature value.

16. The water-cooling device for the platform as described in claim 11, characterized in that, Also includes: A resistivity meter is installed on the return pipe and near the outlet of the cooling pipe from the stage where the refrigerant is output. It is used to detect the resistance value of the refrigerant output from the stage by the cooling pipe.

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