Fingerprint recognition module, driving method thereof and display device

Abstract

A fingerprint recognition module and its driving method and display device. The fingerprint recognition module includes a substrate and multiple fingerprint recognition areas located on the substrate; each of the fingerprint recognition areas includes multiple receiving electrodes, a piezoelectric material layer and multiple driving electrodes; the multiple receiving electrodes, the piezoelectric material layer and the multiple driving electrodes constitute multiple ultrasonic sensors. At least one driving chip is correspondingly arranged for each fingerprint recognition area, and the multiple driving electrodes in each fingerprint recognition area are connected to the output end of the at least one driving chip, and the at least one driving chip is configured to apply a driving voltage to the multiple driving electrodes to drive the multiple ultrasonic sensors in the corresponding fingerprint recognition area to perform fingerprint recognition. As a result, the fingerprint recognition module can realize large-area fingerprint detection and can also improve fingerprint recognition performance.

Description

Technical Field

[0001] Embodiments of the present disclosure relate to a fingerprint recognition module, a driving method thereof, and a display device. Background Art

[0002] With the continuous development of science and technology, fingerprint recognition technology has gradually been applied to people's daily life. Fingerprint recognition technology can achieve the function of identity recognition by comparing the detailed feature points of different fingerprints. Generally, fingerprint recognition technology can be divided into optical fingerprint recognition technology, silicon chip fingerprint recognition technology and ultrasonic fingerprint recognition technology.

[0003] At present, ultrasonic fingerprint recognition technology is a popular research direction for major manufacturers. The ultrasonic fingerprint recognition structure is mainly a three-layer structure, including a driving electrode, a receiving electrode, and a piezoelectric material layer located between the two. When a driving voltage is applied to the driving electrode and the receiving electrode, the piezoelectric layer is excited by the voltage to produce an inverse piezoelectric effect and vibrate regularly, thereby emitting a first ultrasonic wave outward. After the first ultrasonic wave contacts the finger, it is reflected back by the finger as a second ultrasonic wave. Since the fingerprint includes valleys and ridges, the vibration intensity of the second ultrasonic wave reflected back to the piezoelectric layer by the fingerprint varies. At this time, a fixed voltage is applied to the driving electrode, and the piezoelectric layer can convert the second ultrasonic wave into a voltage signal. The voltage signal is transmitted to the fingerprint recognition module through the receiving electrode. The position of the valleys and ridges in the fingerprint is determined based on the voltage signal, and the fingerprint image is obtained after processing. Summary of the invention

[0004] The disclosed embodiments provide a fingerprint recognition module and a driving method thereof and a display device. The fingerprint recognition module is provided with multiple fingerprint recognition areas, each of which is provided with at least one driving chip, so that a single driving chip only needs to drive a fingerprint recognition area of ​​a smaller area, thereby realizing fingerprint detection over a large area. In addition, since a single driving chip only needs to drive a fingerprint recognition area of ​​a smaller area, the driving chip can adopt a single crystal semiconductor-based chip such as a silicon-based chip or a gallium arsenide-based chip, thereby providing a high-performance driving voltage, thereby improving fingerprint recognition performance.

[0005] At least one embodiment of the present disclosure provides a fingerprint recognition module, which includes a substrate and multiple fingerprint recognition areas located on the substrate, wherein each of the fingerprint recognition areas includes: multiple receiving electrodes; a piezoelectric material layer located on one side of the multiple receiving electrodes; and multiple driving electrodes located on a side of the piezoelectric material layer away from the multiple receiving electrodes; the multiple receiving electrodes, the piezoelectric material layer and the multiple driving electrodes constitute multiple ultrasonic sensors, and at least one driving chip is correspondingly arranged in each of the fingerprint recognition areas, and the multiple driving electrodes in each of the fingerprint recognition areas are connected to the output end of the at least one driving chip, and the at least one driving chip is configured to apply a driving voltage to the multiple driving electrodes to drive the multiple ultrasonic sensors in the corresponding fingerprint recognition area to perform fingerprint recognition.

[0006] For example, the fingerprint recognition module provided by an embodiment of the present disclosure further includes: interconnection lines connecting the multiple driving electrodes in each of the fingerprint recognition areas with the multiple output terminals of the at least one driving chip.

[0007] For example, the fingerprint recognition module provided in one embodiment of the present disclosure further includes: a flexible circuit board; and an external integrated circuit, and the control end of the at least one driving chip corresponding to each of the fingerprint recognition areas is connected to the external integrated circuit through the flexible circuit board.

[0008] For example, the fingerprint recognition module provided by an embodiment of the present disclosure also includes: a packaging layer, which is located on a side of the multiple ultrasonic sensors and the at least one driver chip away from the substrate, and covers the multiple ultrasonic sensors and the at least one driver chip to package the multiple ultrasonic sensors and the at least one driver chip on the substrate, the driver chip includes a single crystal semiconductor substrate and a driver circuit, and a portion of the driver circuit is located in the single crystal semiconductor substrate.

[0009] For example, in a fingerprint recognition module provided in an embodiment of the present disclosure, the multiple receiving electrodes are arranged in an array along the first direction and the second direction, each of the driving electrodes is a strip-shaped driving electrode extending along the first direction, and the multiple strip-shaped driving electrodes are arranged at intervals along the second direction.

[0010] For example, in the fingerprint recognition module provided in one embodiment of the present disclosure, a driving chip is correspondingly arranged for each fingerprint recognition area, each fingerprint recognition area includes a plurality of focusing units, each focusing unit includes N strip-shaped driving electrodes arranged in order along the second direction, and the strip-shaped driving electrodes with the same order of the plurality of focusing units are electrically connected and connected to one of the output terminals of the driving chip, wherein N is a positive integer greater than or equal to 2.

[0011] For example, in the fingerprint recognition module provided in one embodiment of the present disclosure, the multiple fingerprint recognition areas are spaced apart along the first direction and have a first interval, the orthographic projection of the driving chip on the substrate is spaced apart from the multiple fingerprint recognition areas and the first interval, and the width of the first interval in the first direction is less than one third of the width of the fingerprint recognition area in the first direction.

[0012] For example, in the fingerprint recognition module provided in one embodiment of the present disclosure, a plurality of the driving chips are arranged corresponding to each of the fingerprint recognition areas, and each of the fingerprint recognition areas includes a focusing unit, and the focusing unit includes M of the strip-shaped driving electrodes arranged in order along the second direction, and the M strip-shaped driving electrodes are connected to the M output terminals of the plurality of driving chips, wherein M is a positive integer greater than or equal to 2.

[0013] For example, in a fingerprint recognition module provided in an embodiment of the present disclosure, the multiple fingerprint recognition areas are arranged at intervals along the first direction and have a second interval, the multiple driving chips are arranged in sequence along the second direction, the multiple driving chips are arranged on one side of the corresponding fingerprint recognition area in the first direction, and the width of the second interval in the first direction is less than half of the width of the fingerprint recognition area in the first direction.

[0014] For example, in a fingerprint recognition module provided in an embodiment of the present disclosure, the multiple fingerprint recognition areas are arranged at intervals along the first direction and have a third interval, the third interval is less than twice the width of the strip-shaped driving electrode, the orthographic projection of the at least one driving chip on the base substrate at least partially overlaps with the orthographic projection of the multiple ultrasonic sensors on the base substrate, and the at least one driving chip is located on a side of the multiple ultrasonic sensors away from the base substrate.

[0015] For example, in a fingerprint recognition module provided in an embodiment of the present disclosure, a driver chip is correspondingly arranged in each fingerprint recognition area, each fingerprint recognition area includes a focusing unit, the focusing unit includes K strip-shaped driving electrodes arranged in order along the second direction, the K strip-shaped driving electrodes are connected to K output terminals of a driver chip, and the driver chip is arranged on one side of the corresponding fingerprint recognition area in the first direction, wherein K is a positive integer greater than or equal to 2.

[0016] For example, in the fingerprint recognition module provided in an embodiment of the present disclosure, the multiple fingerprint recognition areas are arranged in an array along the first direction and the second direction.

[0017] For example, in the fingerprint recognition module provided in an embodiment of the present disclosure, there is a gap between the orthographic projection of the at least one driving chip on the base substrate and the orthographic projection of the piezoelectric material layer on the base substrate.

[0018] For example, in a fingerprint recognition module provided in one embodiment of the present disclosure, the orthographic projection of the at least one driver chip on the base substrate at least partially overlaps with the orthographic projection of the multiple ultrasonic sensors on the base substrate, and the at least one driver chip is located on a side of the multiple ultrasonic sensors away from the base substrate.

[0019] For example, in a fingerprint recognition module provided in an embodiment of the present disclosure, the plurality of receiving electrodes are arranged in an array along a first direction and a second direction, each of the driving electrodes is a block driving electrode arranged in an array along the first direction and the second direction, and the plurality of receiving electrodes are arranged in a one-to-one correspondence with the plurality of the block driving electrodes.

[0020] For example, in the fingerprint recognition module provided in one embodiment of the present disclosure, one driving chip is arranged corresponding to each fingerprint recognition area, each fingerprint recognition area includes at least one focusing unit, each focusing unit includes D*D block driving electrodes arranged in a D*D matrix along the first direction and the second direction, and the D*D block driving electrodes are connected to the driving chip, wherein D is a positive integer greater than or equal to 2.

[0021] For example, in the fingerprint recognition module provided in one embodiment of the present disclosure, each of the fingerprint recognition areas includes a plurality of the focusing units, and the block driving electrodes with the same coordinates of the plurality of focusing units are electrically connected and connected to one of the output terminals of the driving chip.

[0022] For example, in a fingerprint recognition module provided in an embodiment of the present disclosure, the base substrate includes a glass substrate.

[0023] An embodiment of the present disclosure further provides a display device, comprising any of the above-mentioned fingerprint recognition modules.

[0024] For example, a display device provided by an embodiment of the present disclosure also includes: a display panel having a light-emitting side; and an adhesive layer, wherein the fingerprint recognition module is attached to a side of the display panel away from the light-emitting side through the adhesive layer, and the adhesive layer includes a light-shielding layer.

[0025] An embodiment of the present disclosure also provides a driving method for a fingerprint recognition module, wherein the fingerprint recognition module is any one of the above-mentioned fingerprint recognition modules, and the driving method includes: obtaining a fingerprint recognition area corresponding to a finger touch position; applying a control signal to the at least one driving chip of the fingerprint recognition area corresponding to the finger touch position; and the at least one driving chip applies a driving voltage to the multiple driving electrodes under the control of the control signal to drive the corresponding fingerprint recognition area to perform fingerprint recognition.

[0026] For example, in the driving method of the fingerprint recognition module provided in one embodiment of the present disclosure, the at least one driving chip applies a driving voltage to the multiple driving electrodes under the control of the control signal to drive the corresponding fingerprint recognition area to perform fingerprint recognition, including: the at least one driving chip applies driving voltages with different phases to the multiple driving electrodes under the control of the control signal to focus on the fingerprint recognition area. BRIEF DESCRIPTION OF THE DRAWINGS

[0027] In order to more clearly illustrate the technical solutions of the embodiments of the present disclosure, the drawings of the embodiments will be briefly introduced below. Obviously, the drawings in the following description only relate to some embodiments of the present disclosure, but are not intended to limit the present disclosure.

[0028] Figure 1 A schematic plan view of a fingerprint recognition module provided according to an embodiment of the present disclosure;

[0029] Figure 2 A fingerprint recognition module is provided according to an embodiment of the present disclosure. Figure 1 Schematic diagram of the cross section in the AA direction;

[0030] Figure 3A A schematic diagram of a fingerprint recognition module implementing ultrasonic focusing according to an embodiment of the present disclosure;

[0031] Figure 3B A schematic diagram of another fingerprint recognition module implementing ultrasonic focusing provided by an embodiment of the present disclosure;

[0032] Figure 4 A schematic plan view of another fingerprint recognition module provided according to an embodiment of the present disclosure;

[0033] Figure 5 A schematic plan view of another fingerprint recognition module provided according to an embodiment of the present disclosure;

[0034] Figure 6 A schematic plan view of another fingerprint recognition module provided according to an embodiment of the present disclosure;

[0035] Figure 7A cross-sectional schematic diagram of another fingerprint recognition module provided according to an embodiment of the present disclosure;

[0036] Figure 8 A schematic plan view of another fingerprint recognition module provided according to an embodiment of the present disclosure;

[0037] Fig. 9 A schematic diagram of the structure of a display device provided according to an embodiment of the present disclosure;

[0038] Fig.10 A flowchart of a driving method of a fingerprint recognition module provided according to an embodiment of the present disclosure;

[0039] Fig.11 A schematic diagram of a driving circuit in a driving chip provided according to an embodiment of the present disclosure;

[0040] Fig.12 A schematic diagram of a high-voltage output module in a driving circuit provided according to an embodiment of the present disclosure;

[0041] Fig.13 A schematic diagram of a high voltage output module in another driving circuit provided according to an embodiment of the present disclosure; and

[0042] Fig.14 The figure is a schematic diagram of a high-voltage output module in another driving circuit provided according to an embodiment of the present disclosure. DETAILED DESCRIPTION

[0043] In order to make the purpose, technical solution and advantages of the embodiments of the present disclosure clearer, the technical solution of the embodiments of the present disclosure will be clearly and completely described below in conjunction with the drawings of the embodiments of the present disclosure. Obviously, the described embodiments are part of the embodiments of the present disclosure, not all of the embodiments. Based on the described embodiments of the present disclosure, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present disclosure.

[0044] Unless otherwise defined, the technical terms or scientific terms used in the present disclosure should be understood by people with ordinary skills in the field to which the present disclosure belongs. "First", "second" and similar words used in the present disclosure do not indicate any order, quantity or importance, but are only used to distinguish different components. "Include" or "comprise" and similar words mean that the elements or objects appearing before the word cover the elements or objects listed after the word and their equivalents, without excluding other elements or objects. "Connect" or "connected" and similar words are not limited to physical or mechanical connections, but may include electrical connections, whether direct or indirect.

[0045] Among the numerous fingerprint recognition technologies, ultrasonic fingerprint recognition technology has significant advantages such as strong penetration, anti-pollution, anti-interference, and anti-spoofing, and is increasingly being used in identity authentication for mobile devices such as smartphones. In addition, ultrasonic fingerprint recognition technology can also provide a hidden fingerprint solution for the full-screen design of mobile devices such as smartphones.

[0046] During the research, the inventor of this application noticed that when the ultrasonic fingerprint sensor is set on a display device such as a smartphone, the piezoelectric material layer of the ultrasonic sensor is often far away from the finger (500 microns to 2000 microns) because the ultrasonic fingerprint sensor needs to be set below the display panel; and the ultrasonic wave has divergence and diffraction during the transmission process, which causes the ultrasonic waves reflected by the adjacent valleys and ridges on the finger to crosstalk, thereby reducing the signal resolution and image contrast, and further affecting the performance and accuracy of fingerprint recognition. In this regard, on the one hand, the intensity of the ultrasonic wave can be increased by increasing the driving voltage of the ultrasonic sensor, and on the other hand, the above crosstalk can be reduced by focusing the ultrasonic wave, thereby significantly improving the quality of the fingerprint image.

[0047] However, the above two methods require a driving circuit that can generate high frequency, high voltage, and driving voltage with different phases. Glass-based thin film transistor circuits (TFT) have the advantages of low cost and easy large-area production, but glass-based thin film transistor circuits are difficult to generate high-performance (for example, frequency greater than 1MHz) driving voltages, and although silicon-based driving circuits can achieve high-performance driving voltages, they are small in size, high in cost, and difficult to achieve large-area fingerprint detection.

[0048] The disclosed embodiment provides a fingerprint recognition module and a driving method thereof and a display device. The fingerprint recognition module includes a substrate and a plurality of fingerprint recognition areas located on the substrate; each of the fingerprint recognition areas includes a plurality of receiving electrodes, a piezoelectric material layer and a plurality of driving electrodes. The plurality of receiving electrodes are located on the substrate, the piezoelectric material layer is located on a side of the plurality of receiving electrodes away from the substrate, and the plurality of driving electrodes are located on a side of the piezoelectric material layer away from the plurality of receiving electrodes; the plurality of receiving electrodes, the piezoelectric material layer and the plurality of driving electrodes constitute a plurality of ultrasonic sensors. At least one driving chip is provided corresponding to each fingerprint recognition area, and the plurality of driving electrodes in each fingerprint recognition area are connected to the output end of the at least one driving chip, and the at least one driving chip is configured to apply a driving voltage to the plurality of driving electrodes to drive the plurality of ultrasonic sensors in the corresponding fingerprint recognition area for fingerprint recognition. Thus, the fingerprint recognition module is provided with a plurality of fingerprint recognition areas, and each fingerprint recognition area is provided with at least one driving chip, so that a single driving chip only needs to drive a fingerprint recognition area of ​​a smaller area, thereby realizing fingerprint detection of a large area. Furthermore, since a single driver chip only needs to drive a smaller fingerprint recognition area, the driver chip can adopt single crystal semiconductor-based chips such as silicon-based chips and gallium arsenide-based chips, thereby providing high-performance driving voltage, thereby improving fingerprint recognition performance.

[0049] The fingerprint recognition module, its driving method and the display device provided by the embodiments of the present disclosure are described in detail below with reference to the accompanying drawings.

[0050] Figure 1 The figure is a plan view of a fingerprint recognition module provided according to an embodiment of the present disclosure. Figure 2 A fingerprint recognition module is provided according to an embodiment of the present disclosure. Figure 1 Schematic diagram of the cross section along the AA direction. Figure 1 and 2 As shown, the fingerprint recognition module 100 includes a base substrate 110 and a plurality of fingerprint recognition areas 120 located on the base substrate 110. For example, Figure 1 Two fingerprint recognition areas 120 are shown spaced apart along the first direction, but the number of fingerprint recognition areas in the fingerprint recognition module provided by the embodiment of the present disclosure is not limited to two, and may be more. Figure 1 and 2As shown, each fingerprint recognition area 120 includes a plurality of receiving electrodes 121, a piezoelectric material layer 122 and a plurality of driving electrodes 123; the plurality of receiving electrodes 121 are located on the base substrate 110, the piezoelectric material layer 122 is located on a side of the plurality of receiving electrodes 121 away from the base substrate 110, and the plurality of driving electrodes 123 are located on a side of the piezoelectric material layer 122 away from the plurality of receiving electrodes 121, so that the plurality of receiving electrodes 121, the piezoelectric material layer 122 and the plurality of driving electrodes 123 can constitute a plurality of ultrasonic sensors 130. Figure 1 and 2 As shown, at least one driving chip 140 is correspondingly arranged in each fingerprint recognition area 120, and a plurality of driving electrodes 123 in each fingerprint recognition area 120 are connected to an output terminal 142 of at least one driving chip 140, and at least one driving chip 140 is used to apply a driving voltage to the plurality of driving electrodes 123 to drive the plurality of ultrasonic sensors 130 in the corresponding fingerprint recognition area 120 to perform fingerprint recognition. For example, the driving chip 140 can apply a driving voltage to the plurality of driving electrodes 123 so that the corresponding ultrasonic sensor 130 emits an ultrasonic wave, and the ultrasonic wave is reflected back to the piezoelectric material layer 122 through the valleys and ridges of the finger and converted into an electrical signal and received by the plurality of receiving electrodes 121, so that fingerprint recognition can be performed.

[0051] In the fingerprint recognition module provided by the embodiment of the present disclosure, by setting multiple fingerprint recognition areas, each fingerprint recognition area is provided with at least one driver chip, so that a single driver chip only needs to drive a fingerprint recognition area of ​​a smaller area, thereby realizing fingerprint detection of a large area. In addition, since a single driver chip only needs to drive a fingerprint recognition area of ​​a smaller area, the driver chip can use a single crystal semiconductor-based chip such as a silicon-based chip, a gallium arsenide-based chip, etc. to provide a high-performance driving voltage, and a single driver chip can also control the driving voltage of each ultrasonic sensor individually (for example, providing driving voltages of different phases), so as to realize functions such as ultrasonic focusing. As a result, the fingerprint recognition module can improve the intensity and penetration of the ultrasonic wave emitted by the ultrasonic sensor on the one hand, and can also realize ultrasonic focusing to improve the directionality of the ultrasonic wave to reduce the crosstalk between the ultrasonic waves reflected by the adjacent valleys and ridges on the finger, thereby significantly improving the fingerprint image quality, and further improving the fingerprint recognition performance. In addition, on the other hand, when the fingerprint recognition module improves the intensity or energy of the emitted ultrasonic wave in a specific area or a specific direction by realizing ultrasonic focusing, the fingerprint recognition module can not only realize fingerprint recognition, but also penetrate the finger to distinguish whether the fingerprint is real skin.

[0052] It should be noted that if Figure 1 and 2As shown, the multiple driving electrodes 123 in each fingerprint recognition area 120 are respectively connected to the multiple output terminals 142 of at least one driving chip 140, that is, at least one driving chip 140 has multiple output terminals 142, and the multiple driving electrodes 123 in each fingerprint recognition area 120 are connected to different output terminals 142, so that they can be driven by different driving voltages (for example, driving voltages with different phases), thereby realizing functions such as ultrasonic focusing.

[0053] In some examples, such as Figure 1 and 2 As shown, the fingerprint recognition module 100 also includes interconnection lines 150, which connect the multiple driving electrodes 123 in each fingerprint recognition area 120 to the multiple output terminals 142 of at least one driving chip 140, so that the multiple driving electrodes 123 in each fingerprint recognition area 120 can be driven by different driving voltages (for example, driving voltages with different phases), thereby realizing functions such as ultrasonic focusing.

[0054] In some examples, such as Figure 2 As shown, the fingerprint recognition module 100 also includes a flexible circuit board 170 and an external integrated circuit 180; the control terminal 142 of at least one driver chip 140 corresponding to each fingerprint recognition area 120 is connected to the external integrated circuit 180 through the flexible circuit board 170. Thus, the external integrated circuit 180 can control whether the driver chip 140 sends a driving voltage and the voltage, frequency, phase and other parameters of the sent driving voltage. In addition, the external integrated circuit 180 can also simultaneously control multiple driver chips 140 corresponding to multiple fingerprint recognition areas 120 to achieve large-area fingerprint recognition.

[0055] In some examples, such as Figure 2 As shown, the fingerprint recognition module 100 also includes a binding area 250, and the input ends 141 of the multiple driving chips 140 corresponding to the multiple fingerprint recognition areas 120 are connected to the binding area 250, and one end of the flexible circuit board 170 is connected to the binding area 250, and the other end is connected to the external integrated circuit 180.

[0056] For example, the external integrated circuit 180 may be a CPU, such as a CPU mounted on a smart phone or a CPU specifically used for fingerprint recognition.

[0057] In some examples, such as Figure 2As shown, the fingerprint recognition module 100 further includes a packaging layer 190; the packaging layer 190 is located on the side of the plurality of ultrasonic sensors 130 and at least one driver chip 140 away from the substrate 110, and covers the plurality of ultrasonic sensors 130 and at least one driver chip 140 to package the plurality of ultrasonic sensors 130 and at least one driver chip 140 on the substrate 110. The driver chip 140 includes a single crystal semiconductor substrate 141 and a driver circuit 142, and a portion of the driver circuit 142 is located in the single crystal semiconductor substrate 141. Since the driver chip 140 is based on the single crystal semiconductor substrate 141, a high-performance (e.g., high voltage, high frequency) driving voltage can be provided. In addition, the fingerprint recognition module 100 can integrate the driver chip 140 based on the single crystal semiconductor substrate 141 on the substrate 110. It should be noted that the encapsulation layer 190 can encapsulate a single fingerprint recognition area 120 , or all fingerprint recognition areas 120 of the fingerprint recognition module 100 , that is, the encapsulation layer 190 covers the ultrasonic sensors 130 and the driver chips 140 in all fingerprint recognition areas 120 of the fingerprint recognition module 100 .

[0058] In some examples, the above-mentioned single crystal semiconductor substrate 141 includes at least one of a single crystal silicon substrate and a single crystal gallium arsenide substrate.

[0059] In some examples, the size of the driver chip 140 is less than 3 mm; when the planar shape of the driver chip 140 is a rectangle, the length and width of the driver chip 140 are both less than 3 mm to ensure a good fingerprint detection effect.

[0060] For example, the frequency of the driving voltage outputted by the output terminal 142 of the driver chip 140 is greater than 5Mhz, for example, the frequency range of the driving voltage outputted by the output terminal 142 of the driver chip 140 may be 5-30Mhz. In addition, the absolute value of the driving voltage outputted by the output terminal 142 of the driver chip 140 is greater than 30V, for example, the absolute value range of the driving voltage outputted by the output terminal 142 of the driver chip 140 may be 30-100V. Thus, the ultrasonic sensor may have better performance (for example, greater energy and intensity).

[0061] In some examples, the above-mentioned base substrate 110 includes a glass substrate. Thus, the fingerprint recognition module 100 can manufacture the ultrasonic sensor 130 on the base substrate 110 through glass-based manufacturing equipment and processes, so that a larger-sized fingerprint recognition module can be manufactured at a lower cost. At the same time, the fingerprint recognition module 100 also integrates a high-performance single-crystal semiconductor substrate driver chip 140 on the base substrate 110, thereby taking into account large size, low cost and high fingerprint recognition performance. Of course, the embodiments of the present disclosure include but are not limited to this, and the base substrate can also be made of other materials, for example, the base substrate can be a polyimide substrate.

[0062] In some examples, such as Figure 1 As shown, the fingerprint recognition module 100 also includes a row control circuit 270 and a reading circuit 280, which are used to read the electrical signals on the multiple receiving electrodes 121 to obtain fingerprint image information. It should be noted that the above-mentioned row control circuit 270 and reading circuit 280 can be made on the substrate using the same equipment and process (i.e., glass-based manufacturing equipment and process) as the ultrasonic sensor 130, thereby further saving costs. The specific structure of the row control circuit and the reading circuit is not limited in the embodiment of the present disclosure.

[0063] In some examples, such as Figure 1 and 2 As shown, a plurality of receiving electrodes 121 are arranged in an array along the first direction and the second direction, each driving electrode 123 is a strip-shaped driving electrode 123 extending along the first direction, and a plurality of strip-shaped driving electrodes 123 are arranged at intervals along the second direction. Thus, when the plurality of strip-shaped driving electrodes 123 arranged at intervals along the second direction are driven individually, focusing in the second direction can be achieved.

[0064] Figure 3A A schematic diagram of a fingerprint recognition module implementing ultrasonic focusing according to an embodiment of the present disclosure. Figure 3AAs shown, the plurality of strip-shaped driving electrodes 123 include a first strip-shaped driving electrode 1231 and a second strip-shaped driving electrode 1232 arranged in sequence along the second direction. At this time, a driving voltage is applied to the first strip-shaped driving electrode 1231 at a first time point to drive the piezoelectric material layer corresponding to the first strip-shaped driving electrode 1231 to emit an ultrasonic wave, and then a driving voltage is applied to the second strip-shaped driving electrode 1232 at a second time point to delay the phase of the ultrasonic wave emitted by the piezoelectric material layer corresponding to the second strip-shaped driving electrode 1232 after the phase of the ultrasonic wave emitted by the piezoelectric material layer corresponding to the first strip-shaped driving electrode 1231, so that the ultrasonic wave can be focused (phase-incremental interference) directly above the second strip-shaped driving electrode 1232 (or at other positions of the second strip-shaped driving electrode 1232 away from the first driving electrode 1231), so that the intensity or energy of the ultrasonic wave directly above the second strip-shaped driving electrode 1232 can be enhanced. It should be noted that the second time point mentioned above is delayed from the first time point. It should be noted that the delay between the phase of the ultrasonic wave emitted by the piezoelectric material layer corresponding to the second strip-shaped driving electrodes and the phase of the ultrasonic wave emitted by the piezoelectric material layer corresponding to the first strip-shaped driving electrodes can be obtained through testing according to actual conditions.

[0065] Figure 3B A schematic diagram of another fingerprint recognition module implementing ultrasonic focusing according to an embodiment of the present disclosure. Figure 3B As shown, the plurality of strip-shaped driving electrodes 123 include a first strip-shaped driving electrode 1231, a second strip-shaped driving electrode 1232 and a third strip-shaped driving electrode 1233 arranged in sequence along the second direction. At this time, a driving voltage is applied to the first strip-shaped driving electrode 1231 and the third strip-shaped driving electrode 1233 at a first time point to drive the piezoelectric material layers corresponding to the first strip-shaped driving electrode 1231 and the third strip-shaped driving electrode 1233 to emit ultrasonic waves; and a driving voltage is applied to the second strip-shaped driving electrode 1232 at a second time point to delay the phase of the ultrasonic waves emitted by the piezoelectric material layers corresponding to the second strip-shaped driving electrode 1232 than the phase of the ultrasonic waves emitted by the piezoelectric material layers corresponding to the first strip-shaped driving electrode 1231 and the third strip-shaped driving electrode 1233, so that the focusing (phase-increase interference) of the ultrasonic waves can be achieved directly above the second strip-shaped driving electrode 1232, that is, the intensity or energy of the ultrasonic waves directly above the second strip-shaped driving electrode 1222 is enhanced.

[0066] Need to explain, Figure 3A and 3B The case where two or three strip-shaped driving electrodes are driven separately to achieve ultrasonic focusing is shown; however, the embodiments of the present disclosure include but are not limited to this, and the fingerprint recognition module can achieve ultrasonic focusing by driving more strip-shaped driving electrodes separately.

[0067] For example, the distance between the center lines of two adjacent strip-shaped driving electrodes 123 may be in the range of 40-60 micrometers, for example, 50 micrometers.

[0068] In some examples, such as Figure 1 and 2 As shown, there is a gap between the orthographic projection of at least one driver chip 140 on the base substrate 110 and the orthographic projection of the plurality of ultrasonic sensors 130 on the base substrate 110. That is, the orthographic projection of at least one driver chip 140 on the base substrate 110 does not overlap with the orthographic projection of the plurality of ultrasonic sensors 130 on the base substrate 110, and the driver chip 140 and the ultrasonic sensors 130 are both disposed on the base substrate 110. It should be noted that the driver chip 140 can be directly fixed on the base substrate 110 by transfer or welding.

[0069] In some examples, such as Figure 1 As shown, each fingerprint recognition area 120 is correspondingly provided with a driving chip 140, each fingerprint recognition area 120 includes a plurality of focusing units 125, each focusing unit 125 includes N strip-shaped driving electrodes 123 arranged in order along the second direction, and the strip-shaped driving electrodes 123 with the same order of the plurality of focusing units 125 are electrically connected and connected to an output terminal 142 of the driving chip 140, wherein N is a positive integer greater than or equal to 2. Thus, the fingerprint recognition module can drive a plurality of focusing units 125 simultaneously through a driving chip 140, thereby reducing the number of driving chips 140, and a plurality of focusing units 125 can perform focusing and fingerprint recognition simultaneously, thereby improving the efficiency of fingerprint recognition.

[0070] For example, each fingerprint identification area 120 includes three focusing units 125, each focusing unit 125 includes 7 strip-shaped driving electrodes arranged in order along the second direction, the three strip-shaped driving electrodes 123 of the three focusing units 125 in the first order can be electrically connected and connected to an output terminal 142 of the driving chip 140, the three strip-shaped driving electrodes 123 of the three focusing units 125 in the second order can be electrically connected and connected to an output terminal 142 of the driving chip 140, and so on. It should be noted that the output terminals 142 connected to the strip-shaped driving electrodes 123 of different orders of the multiple focusing units 125 are different.

[0071] In some examples, such as Figure 1As shown, multiple fingerprint recognition areas 120 are arranged at intervals along the first direction and have a first interval 201. The orthographic projection of the driver chip 140 on the base substrate 110 is arranged at intervals from the multiple fingerprint recognition areas 120 and the first interval 201. The width of the first interval 201 in the first direction is less than one-third of the width of the fingerprint recognition area 120 in the first direction. Since the driver chip 140 is not arranged in the multiple fingerprint recognition areas 120 and the first interval 201, the driver chip 140 can be arranged in the peripheral area 102 around the touch area 101 of the fingerprint recognition module 100, and the width of the first interval 201 in the first direction is less than one-third of the width of the fingerprint recognition area 120 in the first direction, thereby increasing the proportion of multiple fingerprint recognition areas in the touch area and greatly reducing the detection blind area.

[0072] Figure 4 FIG. 1 is a plan view of another fingerprint recognition module provided according to an embodiment of the present disclosure. Figure 4 As shown, each fingerprint recognition area 120 is provided with a plurality of driving chips 140, each fingerprint recognition area 120 includes a focusing unit 125, and the focusing unit 125 includes M strip-shaped driving electrodes 123 arranged in order along the second direction, and the M strip-shaped driving electrodes 123 are connected to M output terminals of the plurality of driving chips 140, wherein M is a positive integer greater than or equal to 2. In other words, the plurality of driving chips 140 have a total of M output terminals 142, and the M strip-shaped driving electrodes 123 of the focusing unit 125 are connected to M output terminals 142 of the plurality of driving chips 140. Thus, the fingerprint recognition module drives one focusing unit 125 together through the plurality of driving chips 140.

[0073] In some examples, such as Figure 4 As shown, a plurality of fingerprint recognition areas 120 are arranged at intervals along the first direction and have a second interval 202, a plurality of driving chips 140 are arranged in sequence along the second direction, and a plurality of driving chips 140 are arranged on one side of the corresponding fingerprint recognition area 120 in the first direction, that is, Figure 4 On the right side of the fingerprint identification area 120, the width of the second interval 202 in the first direction is less than half of the width of the fingerprint identification area 120 in the first direction. Thus, the fingerprint identification module can realize ultrasonic focusing and fingerprint identification in a focusing unit with a larger area through multiple driving chips.

[0074] Figure 5 FIG. 1 is a plan view of another fingerprint recognition module provided according to an embodiment of the present disclosure. Figure 5As shown, multiple fingerprint recognition areas 120 are arranged at intervals along the first direction and have a third interval 203, the third interval 203 is less than twice the width of the strip-shaped driving electrode 123 in the second direction, the orthographic projection of at least one driving chip 140 on the base substrate 110 overlaps at least partially with the orthographic projection of the multiple ultrasonic sensors 130 on the base substrate 110, and at least one driving chip 140 is located on the side of the multiple ultrasonic sensors 130 away from the base substrate 110. In other words, the driving chip 140 is located on the side of the ultrasonic sensor 130 away from the base substrate 110. At this time, the driving chip 140 can be connected to the strip-shaped driving electrode 123 through a via, so that the driving chip 140 and the interconnection line do not occupy the area of ​​the touch area, and the multiple fingerprint recognition areas 120 are arranged more closely, thereby greatly reducing the touch blind area.

[0075] Figure 6 FIG. 1 is a plan view of another fingerprint recognition module provided according to an embodiment of the present disclosure. Figure 6 As shown, each fingerprint recognition area 120 is provided with a corresponding driving chip 140, each fingerprint recognition area 120 includes a focusing unit 125, and the focusing unit 125 includes K strip-shaped driving electrodes 123 arranged in order along the second direction, and the K strip-shaped driving electrodes 123 are connected to K output terminals of a driving chip 140, and the driving chip 140 is arranged on one side of the corresponding fingerprint recognition area 120 in the first direction, wherein K is a positive integer greater than or equal to 2. Thus, the fingerprint recognition module 100 drives one focusing unit 125 through one driving chip 140, so the structure of the fingerprint recognition module is simple, and it is easy to manufacture and maintain.

[0076] In some examples, such as Figure 6 As shown, a plurality of fingerprint identification areas 120 are arranged in an array along the first direction and the second direction.

[0077] Figure 7 FIG. 1 is a cross-sectional schematic diagram of another fingerprint recognition module provided according to an embodiment of the present disclosure. Figure 7 As shown, the orthographic projection of at least one driver chip 140 on the base substrate 110 at least partially overlaps with the orthographic projections of the plurality of ultrasonic sensors 130 on the base substrate 110, and the at least one driver chip 140 is located on a side of the plurality of ultrasonic sensors 130 away from the base substrate 110. Thus, the driver chip 140 does not occupy the area of ​​the touch area 101, thereby greatly reducing the touch blind area.

[0078] In some examples, such as Figure 7As shown, the fingerprint recognition module 100 further includes: a first insulating layer 210, a reflective layer 220, and a second insulating layer 230. The first insulating layer 210 is located on a side of the plurality of driving electrodes 123 away from the base substrate 110, the reflective layer 220 is located on a side of the first insulating layer 210 away from the plurality of driving electrodes 123, the second insulating layer 230 is located on a side of the reflective layer 220 away from the first insulating layer 210, and at least one driving chip 140 is located on a side of the second insulating layer 230 away from the reflective layer 220. The reflective layer 220 can reflect the ultrasonic wave generated by the piezoelectric material layer 122 and propagating toward the reflective layer 220 toward the base substrate 110, thereby facilitating the enhancement of the intensity or energy of the emitted ultrasonic wave.

[0079] For example, the material of the second insulating layer 230 may be at least one of doped SiO 2 , polyimide, and parylene.

[0080] For example, Figure 7 As shown, vias can be formed in the first insulating layer 210, the reflective layer 220 and the second insulating layer 230, so that the interconnection line 150 can connect the driving chip 140 to the driving electrode 123 through these vias. Such a design will not occupy the touch area of ​​the fingerprint recognition module, thereby greatly reducing the detection blind area.

[0081] For example, the reflective layer 220 may be made of silver (Ag), and the first insulating layer 210 and the second insulating layer 230 may be made of silicon nitride (SiNx). Of course, the embodiments of the present disclosure include but are not limited to this, and the reflective layer 220 may also be made of other materials having the property of reflecting ultrasound, and the first insulating layer 210 and the second insulating layer 230 may be made of other insulating materials such as resin.

[0082] Figure 8 FIG. 1 is a plan view of another fingerprint recognition module provided according to an embodiment of the present disclosure. Figure 8 As shown, a plurality of receiving electrodes 121 are arranged in an array along the first direction and the second direction, each driving electrode 123 is a block-shaped driving electrode 123 arranged in an array along the first direction and the second direction, and a plurality of receiving electrodes 121 are arranged in a one-to-one correspondence with a plurality of block-shaped driving electrodes 123. Thus, the plurality of receiving electrodes 121 and the block-shaped driving electrodes 123 are both arranged in an array along the first direction and the second direction, so that focusing can be performed in two dimensions, the first direction and the second direction, by driving the plurality of block-shaped driving electrodes 123 respectively.

[0083] For example, Figure 8 As shown, Figure 8Taking the 3*3 matrix in the upper left corner as an example, at a first time point, a driving voltage is applied to the central block driving electrode 123 located at the center of the 3*3 matrix to drive the piezoelectric material layer corresponding to the central block driving electrode 123 to emit an ultrasonic wave, and then at a second time point, a driving voltage is applied to four block driving electrodes 123 adjacent to the central block driving electrode 123 in the first direction and the second direction so that the phase of the piezoelectric material layer corresponding to the four block driving electrodes 123 adjacent to the central block driving electrode 123 in the first direction and the second direction emitting an ultrasonic wave is delayed compared to the phase of the piezoelectric material layer corresponding to the central block driving electrode 1231 emitting an ultrasonic wave, and finally At a third time point, a driving voltage is applied to four block driving electrodes 123 located on the extension of the diagonal line of the central block driving electrode 123 so that the phase of the ultrasonic wave emitted by the piezoelectric material layer corresponding to the four block driving electrodes 123 located on the extension of the diagonal line of the central block driving electrode 123 is delayed compared with the phase of the ultrasonic wave emitted by the piezoelectric material layer corresponding to the four block driving electrodes 123 adjacent to the central block driving electrode 123 in the first direction and the second direction, so that the focusing (phase enhancement interference) of the ultrasonic wave can be achieved directly above the central block driving electrode 123, so that the intensity or energy of the ultrasonic wave directly above the central block driving electrode 123 can be enhanced. That is, the central block driving electrode located at the center of the 3*3 matrix can be driven at a first time point, the block driving electrodes with a first distance from the central block driving electrode in the 3*3 matrix can be driven at a second time point, and the block driving electrodes with a second distance from the central block driving electrode in the 3*3 matrix driven at a third time point can be driven to achieve two-dimensional focusing of the ultrasonic wave. It should be noted that the third time point mentioned above is delayed from the second time point, the second time point mentioned above is delayed from the first time point, and the second distance mentioned above is greater than the first distance.

[0084] In some examples, such as Figure 8 As shown, a driving chip 140 is correspondingly arranged in each fingerprint recognition area 120, and each fingerprint recognition area 120 includes at least one focusing unit 125. Each focusing unit 125 includes D*D block driving electrodes 123 arranged in a D*D matrix along the first direction and the second direction. The D*D block driving electrodes 123 are connected to the driving chip 140, wherein D is a positive integer greater than or equal to 2.

[0085] In some examples, such as Figure 8As shown, each fingerprint recognition area 120 includes a plurality of focusing units 125, and the block drive electrodes 123 with the same coordinates of the plurality of focusing units 125 are electrically connected and connected to an output terminal 142 of the driving chip 140. Thus, the fingerprint recognition module can drive a plurality of focusing units through a driving chip 140. It should be noted that the above-mentioned coordinates refer to the coordinates of the block drive electrodes in the above-mentioned D*D matrix. For example, the block drive electrodes with the same coordinates in a plurality of focusing units refer to the same relative positions of the block drive electrodes in the corresponding focusing units, for example, the row number and column number of the matrix of the corresponding focusing unit of the block drive electrodes with the same coordinates are the same.

[0086] In some examples, such as Figure 8 As shown, in each fingerprint recognition area 120, two adjacent focusing units 125 in the first direction can share a group of block driving electrodes 123 arranged in the second direction, and two adjacent focusing units 125 in the second direction can share a group of block driving electrodes 123 arranged in the first direction, thereby facilitating scanning drive.

[0087] In some examples, the material of the driving electrode 123 includes one or more of copper, silver, and aluminum.

[0088] Fig. 9 FIG. 1 is a schematic diagram of a display device according to an embodiment of the present disclosure. Fig. 9 As shown, the display device 500 includes the above-mentioned fingerprint recognition module 100. Thus, the display device can be provided with a plurality of fingerprint recognition areas, and each fingerprint recognition area is provided with at least one driver chip, so that a single driver chip only needs to drive a fingerprint recognition area of ​​a smaller area, thereby realizing large-area fingerprint detection. Moreover, since a single driver chip only needs to drive a fingerprint recognition area of ​​a smaller area, the driver chip can use a single crystal semiconductor-based chip such as a silicon-based chip, a gallium arsenide-based chip, etc. to provide a high-performance driving voltage, and a single driver chip can also control the driving voltage of each ultrasonic sensor individually (for example, providing driving voltages of different phases), thereby realizing functions such as ultrasonic focusing. Thus, the fingerprint recognition module can improve the intensity and penetration of the ultrasonic waves emitted by the ultrasonic sensor on the one hand, and can also realize ultrasonic focusing to improve the directionality of the ultrasonic waves to reduce the crosstalk between the ultrasonic waves reflected by the adjacent valleys and ridges on the finger, thereby significantly improving the fingerprint image quality, and further improving the fingerprint recognition performance. In addition, on the other hand, when the fingerprint recognition module increases the intensity or energy of the ultrasonic wave in a specific area or specific direction by focusing the ultrasonic wave, the fingerprint recognition module can not only realize fingerprint recognition, but also penetrate the finger to distinguish whether the fingerprint is real skin. For details, please refer to the relevant description of the embodiment of the fingerprint recognition module mentioned above, which will not be repeated here.

[0089] In some examples, such as Fig. 9 As shown, the display device 500 also includes a display panel 300 and an adhesive layer 400; the display panel 300 has a light-emitting side 310, that is, a display side; the fingerprint recognition module 100 is attached to the side of the display panel 300 away from the light-emitting side 310 through the adhesive layer 400, and the adhesive layer 400 includes a light-shielding layer 410, thereby shielding the influence of the light of the display panel 300 on the driving circuit 140 and the ultrasonic sensor 130, and can also electrically isolate the electromagnetic interference between the display panel and the fingerprint recognition module.

[0090] For example, the thickness of the adhesive layer 400 in the direction perpendicular to the display panel 300 is less than one tenth of the wavelength of the ultrasonic wave emitted by the ultrasonic sensor 130 , thereby reducing the influence on the ultrasonic wave.

[0091] Fig.10 FIG. 1 is a flow chart of a method for driving a fingerprint recognition module according to an embodiment of the present disclosure. The fingerprint recognition module may be the above-mentioned fingerprint recognition module. Fig.10 As shown, the driving method of the fingerprint recognition module includes the following steps S101-S103.

[0092] Step S101: obtaining a fingerprint recognition area corresponding to the finger touch position.

[0093] For example, the touch area of ​​the fingerprint recognition module can be divided into a plurality of fingerprint recognition areas. When a finger touches, the fingerprint recognition area corresponding to the finger touch position is first obtained.

[0094] Step S102: applying a control signal to at least one driver chip in the fingerprint recognition area corresponding to the finger touch position.

[0095] Step S103: at least one driving chip applies a driving voltage to the plurality of driving electrodes under the control of the control signal to drive the corresponding fingerprint recognition area to perform fingerprint recognition.

[0096] In some examples, in the driving method of the fingerprint recognition module, at least one driving chip applies a driving voltage to multiple driving electrodes under the control of a control signal to drive the corresponding fingerprint recognition area to perform fingerprint recognition, including: at least one driving chip applies driving voltages with different phases to multiple driving electrodes under the control of a control signal to focus on the fingerprint recognition area.

[0097] Fig.11 FIG. 1 is a schematic diagram of a driving circuit in a driving chip according to an embodiment of the present disclosure. Fig.11As shown, the driving circuit 142 includes a control logic module 1421, a waveform generator 1422, a high-voltage output module 1423 and a power boost module 1424. The control logic module 1421 can be connected to an external integrated circuit for communication and is used to receive a control signal. The control logic module 1421 is also connected to the waveform generating module 1422 for communication and controls the waveform generating module 1422 to emit a low-voltage square wave signal corresponding to the control signal. The high-voltage output module 1423 is connected to the power boost module 1424 and the waveform generator 1422. The high-voltage output module 1423 and the power boost module 1424 are used to boost the low-voltage square wave signal emitted by the waveform generating module 1422 to output a high-voltage square wave signal. For example, Fig.11 As shown, the high voltage output module 1423 can output a high voltage square wave signal to the driving electrode 123 .

[0098] Fig.12 FIG. 1 is a schematic diagram of a high voltage output module in a driving circuit according to an embodiment of the present disclosure. Fig.12 As shown, the high-voltage output module 1423 includes an input terminal Vin, a high-voltage input terminal Vdd, a first N-type transistor M1, a resistor R, a Zener diode D1, a first inductor L1 and an output terminal Vout. The input terminal Vin, the cathode of the Zener diode D1 and the gate of the first N-type transistor M1 are connected to the first node P1, the source of the first N-type transistor M1, one end of the resistor R and one end of the first inductor L1 are connected to the second node P2, the drain of the first N-type transistor M1 and the anode of the Zener diode D are grounded; the output terminal Vout is connected to the other end of the first inductor L1. The input terminal Vin is configured to input the above-mentioned low-voltage square wave signal, the high level of the low-voltage square wave signal can turn on the first N-type transistor M1, the output terminal Vout can output a low level, the low level of the low-voltage square wave signal can turn off the first N-type transistor M1, and the output terminal Vout can output the high level of the high-voltage input terminal Vdd, thereby generating a high-voltage square wave signal. It should be noted that the Zener diode D1 can prevent the input voltage from being too high.

[0099] Fig.13 FIG. 1 is a schematic diagram of a high voltage output module in another driving circuit provided according to an embodiment of the present disclosure. Fig.13As shown, the high-voltage output module 1423 includes a first input terminal Vin_p, a second input terminal Vin_n, a first inductor L1, a second inductor L2 and a capacitor C. One end of the second inductor L2 is connected to the first input terminal Vin_p, the other end of the second inductor L2 is connected to the third node P3, the first electrode of the capacitor C is connected to the second input terminal Vin_n, the second electrode of the capacitor C is connected to the third node P3, one end of the first inductor L1 is connected to the third node P3, and the other end of the first inductor L1 is connected to the output terminal Vout. The second inductor L2 and the capacitor C can form a frequency selection network, thereby converting the two reverse low-voltage square wave signals input from the first input terminal Vin_p and the second input terminal Vin_n into high-voltage sine waves.

[0100] Fig.14 FIG. 1 is a schematic diagram of a high voltage output module in another driving circuit provided according to an embodiment of the present disclosure. Fig.14 As shown, the high-voltage output module 1423 includes an input terminal Vin, a high-voltage input terminal Vdd, an output terminal Vdd, a P-type transistor M3 and a second N-type transistor M2; the input terminal Vin is connected to the gate of the P-type transistor M3 and the gate of the second N-type transistor M2, the source of the P-type transistor M3 is connected to the high-voltage input terminal Vdd, the drain of the P-type transistor M3, the source of the second N-type transistor M2 and the output terminal Vout are connected to the fourth node P4, and the drain of the second N-type transistor M2 is grounded. Thus, the P-type transistor M3 and the second N-type transistor M2 can form an inverter structure. The high level of the low-voltage square wave signal can turn on the second N-type transistor M2, turn off the P-type transistor M3, and the output terminal Vout is low level. The low level of the low-voltage square wave signal can turn off the second N-type transistor M2, turn on the P-type transistor M3, and the output terminal Vout can output the high level of the high-voltage input terminal Vdd, thereby generating a high-voltage square wave signal.

[0101] There are a few points to note:

[0102] (1) In the drawings of the embodiments of the present disclosure, only the structures related to the embodiments of the present disclosure are involved, and other structures can refer to the general design.

[0103] (2) In the absence of conflict, features in the same embodiment or in different embodiments of the present disclosure may be combined with each other.

[0104] The above are only specific embodiments of the present disclosure, but the protection scope of the present disclosure is not limited thereto. Any technician familiar with the technical field can easily think of changes or substitutions within the technical scope disclosed in the present disclosure, which should be included in the protection scope of the present disclosure. Therefore, the protection scope of the present disclosure should be based on the protection scope of the claims.

Claims

1. A fingerprint recognition module, comprising a substrate and a plurality of fingerprint recognition areas located on the substrate, wherein: Each of the fingerprint recognition areas includes: a plurality of receiving electrodes; a piezoelectric material layer, located on one side of the plurality of receiving electrodes; and A plurality of driving electrodes, located on a side of the piezoelectric material layer away from the plurality of receiving electrodes; Wherein, the multiple receiving electrodes, the piezoelectric material layer and the multiple driving electrodes constitute a plurality of ultrasonic sensors, at least one driving chip is correspondingly arranged in each of the fingerprint recognition areas, the multiple driving electrodes in each of the fingerprint recognition areas are connected to the output end of the at least one driving chip, and the at least one driving chip is configured to apply a driving voltage to the multiple driving electrodes to drive the multiple ultrasonic sensors in the corresponding fingerprint recognition area to perform fingerprint recognition; and Each of the fingerprint recognition areas includes at least one focusing unit, and the at least one focusing unit is connected to the output end of the corresponding at least one driving chip.

2. The fingerprint recognition module according to claim 1, further comprising: Interconnection lines connect the plurality of driving electrodes in each of the fingerprint recognition areas with the plurality of output terminals of the at least one driving chip.

3. The fingerprint recognition module according to claim 1, further comprising: Flexible circuit boards; as well as External integrated circuit, Wherein, the control end of the at least one driving chip corresponding to each of the fingerprint recognition areas is connected to the external integrated circuit through the flexible circuit board.

4. The fingerprint recognition module according to any one of claims 1 to 3, further comprising: a packaging layer, located on a side of the plurality of ultrasonic sensors and the at least one driver chip away from the substrate substrate, and covering the plurality of ultrasonic sensors and the at least one driver chip to package the plurality of ultrasonic sensors and the at least one driver chip on the substrate substrate, The driving chip includes a single crystal semiconductor substrate and a driving circuit, and a part of the driving circuit is located in the single crystal semiconductor substrate.

5. The fingerprint recognition module according to any one of claims 1 to 3, wherein: The plurality of receiving electrodes are arranged in an array along a first direction and a second direction, each of the driving electrodes is a strip-shaped driving electrode extending along the first direction, and the plurality of strip-shaped driving electrodes are arranged at intervals along the second direction.

6. The fingerprint recognition module according to claim 5, wherein: A driving chip is correspondingly arranged in each of the fingerprint recognition areas, each of the fingerprint recognition areas includes a plurality of focusing units, each of the focusing units includes N strip-shaped driving electrodes arranged in order along the second direction, and the strip-shaped driving electrodes with the same order of the plurality of focusing units are electrically connected and connected to one of the output terminals of the driving chip, wherein N is a positive integer greater than or equal to 2.

7. The fingerprint recognition module according to claim 6, wherein: The multiple fingerprint recognition areas are arranged at intervals along the first direction and have a first interval, the orthographic projection of the driving chip on the substrate is arranged at intervals from the multiple fingerprint recognition areas and the first interval, and the width of the first interval in the first direction is less than one third of the width of the fingerprint recognition area in the first direction.

8. The fingerprint recognition module according to claim 5, wherein: A plurality of the driving chips are arranged corresponding to each of the fingerprint recognition areas, and each of the fingerprint recognition areas includes a focusing unit, and the focusing unit includes M strip-shaped driving electrodes arranged in order along the second direction, and the M strip-shaped driving electrodes are connected to the M output terminals of the plurality of driving chips, wherein M is a positive integer greater than or equal to 2.

9. The fingerprint recognition module according to claim 8, wherein: The multiple fingerprint recognition areas are arranged at intervals along the first direction and have a second interval, the multiple driving chips are arranged in sequence along the second direction, the multiple driving chips are arranged on one side of the corresponding fingerprint recognition area in the first direction, and the width of the second interval in the first direction is less than half of the width of the fingerprint recognition area in the first direction.

10. The fingerprint recognition module according to claim 8, wherein: The multiple fingerprint recognition areas are arranged at intervals along the first direction and have a third interval, the third interval is less than twice the width of the strip-shaped driving electrode, the orthographic projection of the at least one driving chip on the base substrate at least partially overlaps with the orthographic projection of the multiple ultrasonic sensors on the base substrate, and the at least one driving chip is located on a side of the multiple ultrasonic sensors away from the base substrate.

11. The fingerprint recognition module according to claim 5, wherein: A driving chip is correspondingly arranged in each fingerprint recognition area, and each fingerprint recognition area includes a focusing unit, and the focusing unit includes K strip-shaped driving electrodes arranged in order along the second direction, and the K strip-shaped driving electrodes are connected to K output terminals of a driving chip, and the driving chip is arranged on one side of the corresponding fingerprint recognition area in the first direction, wherein K is a positive integer greater than or equal to 2.

12. The fingerprint recognition module according to claim 11, wherein: The plurality of fingerprint recognition areas are arranged in an array along the first direction and the second direction.

13. The fingerprint recognition module according to any one of claims 1 to 3, wherein: There is a space between the orthographic projection of the at least one driving chip on the base substrate and the orthographic projection of the piezoelectric material layer on the base substrate.

14. The fingerprint recognition module according to any one of claims 1 to 3, wherein: The orthographic projection of the at least one driving chip on the base substrate at least partially overlaps with the orthographic projections of the plurality of ultrasonic sensors on the base substrate, and the at least one driving chip is located on a side of the plurality of ultrasonic sensors away from the base substrate.

15. The fingerprint recognition module according to any one of claims 1 to 3, wherein: The plurality of receiving electrodes are arranged in an array along a first direction and a second direction, each of the driving electrodes is a block-shaped driving electrode arranged in an array along the first direction and the second direction, and the plurality of receiving electrodes are arranged in a one-to-one correspondence with the plurality of block-shaped driving electrodes.

16. The fingerprint recognition module according to claim 15, wherein: A driving chip is correspondingly arranged in each fingerprint recognition area, each fingerprint recognition area includes at least one focusing unit, each focusing unit includes D*D block driving electrodes arranged in a D*D matrix along the first direction and the second direction, and the D*D block driving electrodes are connected to the driving chip, wherein D is a positive integer greater than or equal to 2.

17. The fingerprint recognition module according to claim 16, wherein: Each of the fingerprint recognition areas includes a plurality of the focusing units, and the block-shaped driving electrodes with the same coordinates of the plurality of focusing units are electrically connected to one of the output terminals of the driving chip.

18. A display device comprising the fingerprint recognition module according to any one of claims 1-17.

19. The display device according to claim 18, further comprising: A display panel having a light emitting side; as well as Adhesive layer, The fingerprint recognition module is attached to a side of the display panel away from the light-emitting side through the adhesive layer, and the adhesive layer includes a light-shielding layer.

20. A method for driving a fingerprint recognition module, wherein: The fingerprint recognition module is a fingerprint recognition module according to any one of claims 1 to 17, and the driving method comprises: Get the fingerprint recognition area corresponding to the finger touch position; Applying a control signal to the at least one driving chip in the fingerprint recognition area corresponding to the finger touch position; and The at least one driving chip applies a driving voltage to the plurality of driving electrodes under the control of the control signal to drive the corresponding fingerprint recognition area to perform fingerprint recognition.

21. The driving method of the fingerprint recognition module according to claim 20, wherein: The at least one driving chip applies a driving voltage to the plurality of driving electrodes under the control of the control signal to drive the corresponding fingerprint recognition area to perform fingerprint recognition, which includes: The at least one driving chip applies driving voltages with different phases to the plurality of driving electrodes under the control of the control signal to focus on the fingerprint recognition area.

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