Deposition mask, method of manufacturing the same, and method of manufacturing a display device using the same

Abstract

Provided are a deposition mask for making a display device, a method for making the same, and a method for making a display device using the same, the deposition mask comprising: a frame comprising a first opening; a first member disposed above the first opening of the frame and comprising a first portion surrounding at least one second opening and a second portion disposed in the second opening and physically separated from the first portion; and a second member disposed on the first member and comprising a first connecting portion connected to the frame and a second grid portion overlapping the second portion.

Description

[0001] This application claims priority to and the benefit of Korean Patent Application No. 10-2019-0113341, filed on September 16, 2019, which is hereby incorporated by reference for all purposes as if fully set forth herein. Technical Field

[0002] Exemplary embodiments of the invention generally relate to deposition of a layer for manufacturing an electronic device, and more particularly, to a deposition mask, a method of manufacturing the deposition mask, and a method of manufacturing a display device using the deposition mask. Background Art

[0003] Organic light emitting display devices are a type of display device that has self-luminous display elements and has advantages including wide viewing angles, high contrast, and fast response times. Therefore, organic light emitting display devices are attracting attention as next-generation display devices.

[0004] The organic light emitting display device includes an intermediate layer including at least a light emitting layer between electrodes facing each other. The electrodes and the intermediate layer may be formed by various methods, one of which is a deposition method.

[0005] The above information disclosed in this Background section is only for understanding the background of the inventive concept and therefore it may contain information that does not constitute the prior art. Summary of the invention

[0006] The deposition mask constructed according to the exemplary embodiment of the principles of the invention and the exemplary method of manufacturing the deposition mask and the method of manufacturing a display device using such a deposition mask have improved manufacturing process efficiency and / or avoid visual defects in the resulting deposited film. For example, the deposition mask constructed according to the exemplary embodiment includes a hole forming portion that is not directly supported by the frame of the deposition mask, so that only one opening mask can be used to form the holes of the corresponding deposition film, thereby improving process efficiency. In addition, dark lines on the deposition film caused by the connecting member required to support the hole forming portion are avoided, thereby eliminating visual defects.

[0007] Additional features of the inventive concept will be set forth in the description which follows and will be apparent from the description, or may be learned by practice of the inventive concept.

[0008] According to one aspect of the invention, a deposition mask for manufacturing a display device includes: a frame including a first opening; a first member disposed above the first opening of the frame and including a first portion surrounding at least one second opening and a second portion disposed in the second opening and physically separated from the first portion; and a second member disposed on the first member and including a first connecting portion connected to the frame and a second grid portion overlapping the second portion.

[0009] The second portion may be configured to make a hole in a deposited film made by the deposition mask and may be connected to the second mesh portion.

[0010] The second portion may be directly connected to the second mesh portion.

[0011] The second portion may be welded to the second mesh portion using a laser.

[0012] A stainless steel (SUS) member may be disposed on an edge of the frame, wherein the SUS member may be connected to the frame.

[0013] The first component may include an opening piece having a first thickness based on a surface of the frame; the second component may include a metal sheet having a second thickness based on a surface of the opening piece; the SUS component may have a third thickness based on the one surface of the frame; wherein the third thickness may be greater than the sum of the first thickness and the second thickness.

[0014] A difference between the third thickness and the sum of the first thickness and the second thickness may be at least about 600 μm.

[0015] The SUS member may be welded to the frame.

[0016] The second portion may have a generally circular cross-sectional shape.

[0017] The first connecting portion may be directly connected and welded to the frame.

[0018] The first connection portion may include a metal connection portion having a substantially rectangular shape; and the second mesh portion may include a metal mesh portion having a substantially mesh shape.

[0019] The metal mesh portion may include: first lines extending in one direction; and second lines extending in another direction crossing the one direction.

[0020] The connection pattern may be disposed between the second grid portion and the second part, wherein the connection pattern is directly connected to the second grid portion and the second part.

[0021] According to another aspect of the invention, a deposition mask for manufacturing a display device includes: a frame including a first opening; a first member disposed above the first opening of the frame and including at least one second opening; and a second member disposed on the first member and including a first connecting portion connected to the frame and a second supporting portion disposed adjacent to the first connecting portion and overlapping the second opening, wherein the second supporting portion includes a second grid portion and a plug surrounded by the second grid portion.

[0022] A stainless steel (SUS) member may be disposed on an edge of the frame and connected to the frame.

[0023] The first component may include an opening piece having a first thickness based on one surface of the frame; the second component may include a metal piece having a second thickness based on one surface of the opening piece; the second supporting portion may include a metal main portion; the first connecting portion may include a metal connecting portion; the second mesh portion may include a metal mesh portion; and the SUS component may have a third thickness based on the one surface of the frame; wherein the third thickness may be greater than the sum of the first thickness and the second thickness, and the difference between the third thickness and the sum of the first thickness and the second thickness may be at least about 600 μm.

[0024] The plug may include a deposition barrier having a substantially circular cross-sectional shape.

[0025] According to other aspects of the invention, a method for manufacturing a deposition mask for making a display device includes the following steps: providing an opening sheet, the opening sheet having a first portion surrounding at least one opening, a second portion arranged in at least one opening, and a third portion connecting the first portion and the second portion; arranging a metal sheet on the opening sheet, the metal sheet having a metal grid portion; and welding the metal grid portion and the second portion and removing the third portion from the opening sheet.

[0026] The steps of welding the metal mesh and the second portion and removing the third portion from the opening sheet are performed using a laser.

[0027] According to another aspect of the invention, a method for manufacturing a display device includes the following steps: providing a deposition mask, the deposition mask including a frame, an opening sheet and a metal sheet, the frame having a first opening, the opening sheet being arranged above the first opening of the frame and having a first portion surrounding at least one second opening and a second portion being arranged in the second opening and physically separated from the first portion, the metal sheet being arranged on the opening sheet and having a metal connecting portion connected to the frame and a metal grid portion overlapping the second portion and having a deposition opening therein; setting a target substrate in a position separated from the metal grid portion by a gap; depositing a deposition material on the target substrate through the deposition opening in the metal grid; and forming a deposition film including a third opening formed by a portion overlapping the second portion.

[0028] It is to be understood that both the foregoing general description and the following detailed description are exemplary and explanatory and are intended to provide further explanation of the invention as claimed. BRIEF DESCRIPTION OF THE DRAWINGS

[0029] The accompanying drawings illustrate exemplary embodiments of the invention and together with the description serve to explain the inventive concept. The accompanying drawings are included to provide a further understanding of the invention and are incorporated in and constitute a part of this specification.

[0030] Figure 1 is a plan view illustrating an exemplary embodiment of a deposition mask constructed according to the principles of the invention.

[0031] Figure 2 It is shown Figure 1 A plan view of an exemplary embodiment of a frame.

[0032] Figure 3 It is shown Figure 1 A plan view of an exemplary embodiment of an opening sheet.

[0033] Figure 4 It is shown Figure 1 A plan view of an exemplary embodiment of a metal sheet.

[0034] Figure 5 It is along Figure 1 A cross-sectional view taken along line V-V'.

[0035] Figure 6 It is along Figure 1 A cross-sectional view taken along line VI-VI'.

[0036] Figure 7 It is along Figure 1 A cross-sectional view taken along line VII-VII'.

[0037] Figure 8 It is shown Figure 4 An enlarged plan view of area A.

[0038] Fig. 9 It is shown Figure 4 An enlarged plan view of area B.

[0039] Fig.10 It is shown Figure 7 An enlarged cross-sectional view of area C.

[0040] Fig.11 is a flow chart illustrating steps of an exemplary method of manufacturing a deposition mask according to the principles of the invention.

[0041] Figures 12 to 15 are plan views illustrating exemplary steps in a method of manufacturing a deposition mask according to principles of the invention.

[0042] Fig.16 It is shown Fig.15 An enlarged plan view of area D.

[0043] Fig.17 and Fig.18 The present invention is a diagram showing exemplary steps in a method of manufacturing a deposition mask according to the principles of the invention. Fig.15 An enlarged plan view of area D.

[0044] Fig.19 are plan views illustrating exemplary steps in a method of manufacturing a display device according to the principles of the invention.

[0045] Fig. 20 It is along Fig.19 A cross-sectional view taken along line XX-XX'.

[0046] Fig.21 It is along Fig.19 A cross-sectional view taken along line XXI-XXI'.

[0047] Fig. 22 is a graphical table depicting films deposited according to the gap between a metal sheet and a target substrate.

[0048] Fig.23 is a plan view illustrating another exemplary embodiment of a deposition mask constructed according to the principles of the invention.

[0049] Fig.24 is a cross-sectional view illustrating another exemplary embodiment of a deposition mask constructed according to the principles of the invention. DETAILED DESCRIPTION

[0050] In the following description, for the purpose of explanation, many specific details are set forth to provide a thorough understanding of various exemplary embodiments or implementations of the invention. "Embodiment" and "implementation" as used herein are interchangeable words, which are non-limiting examples of devices or methods using one or more of the inventive concepts disclosed herein. However, it is apparent that various exemplary embodiments can be practiced without these specific details or using one or more equivalent arrangements. In other cases, well-known structures and devices are shown in block diagram form to avoid unnecessary obscurity of various exemplary embodiments. In addition, various exemplary embodiments may be different, but not necessarily exclusive. For example, without departing from the inventive concept, the specific shape, configuration and characteristics of the exemplary embodiment may be used or implemented in another exemplary embodiment.

[0051] Unless otherwise specified, the exemplary embodiments shown will be understood as providing exemplary features of the details of the changes in some ways of implementing the inventive concept in practice. Therefore, unless otherwise specified, the features, components, modules, layers, films, panels, regions and / or aspects, etc. (hereinafter individually or collectively referred to as "elements"), etc. of various embodiments may be further combined, separated, exchanged and / or rearranged without departing from the inventive concept.

[0052] The use of cross hatching and / or shading in the drawings is generally provided to make the boundaries between adjacent elements clear. Thus, unless otherwise specified, the presence or absence of cross hatching or shading does not convey or indicate any preference or requirement for the specific material, material properties, size, ratio, commonality between the illustrated elements and / or any other characteristics, attributes, properties, etc. of the element. In addition, in the drawings, the size and relative size of the elements may be exaggerated for clarity and / or descriptive purposes. When the exemplary embodiments may be implemented differently, a specific process sequence may be performed in a different order than described. For example, two processes described in succession may be performed substantially simultaneously or in an order opposite to the order described. In addition, the same reference numerals represent the same elements.

[0053] When an element or layer is referred to as being "on" another element or layer, "connected to" or "bonded to" another element or layer, the element or layer may be directly on, directly connected to or directly bonded to the other element or layer, or there may be an intermediate element or layer. However, when an element or layer is referred to as being "directly on" another element or layer, "directly connected to" or "directly bonded to" another element or layer, there is no intermediate element or layer. For this reason, the term "connection" may refer to a physical connection, an electrical connection, and / or a fluid connection with or without an intermediate element. In addition, the D1 axis, the D2 axis, and the D3 axis are not limited to three axes such as the x-axis, the y-axis, and the z-axis of a rectangular coordinate system, but may be interpreted in a broader sense. For example, the D1 axis, the D2 axis, and the D3 axis may be perpendicular to each other, or may represent different directions that are not perpendicular to each other. For the purpose of this disclosure, "at least one of X, Y, and Z" and "at least one selected from the group consisting of X, Y, and Z" may be interpreted as only X, only Y, only Z, or any combination of two or more of X, Y, and Z, such as XYZ, XYY, YZ, and ZZ for example. As used herein, the term "and / or" includes any and all combinations of one or more of the associated listed items.

[0054] Although the terms "first", "second", etc. may be used herein to describe various types of elements, these elements should not be limited by these terms. These terms are used to distinguish one element from another element. Therefore, without departing from the disclosed teachings, the first element discussed below may be named as the second element.

[0055] For descriptive purposes, spatially relative terms such as "under," "below," "beneath," "down," "above," "up," "above," "higher," "side" (e.g., as in "sidewall"), etc. may be used herein and thereby describe the relationship of one element to another element(s) as shown in the accompanying drawings. Spatially relative terms are intended to include different orientations of the device in use, operation, and / or manufacture in addition to the orientation depicted in the accompanying drawings. For example, if the device in the accompanying drawings is flipped, elements described as "under" or "beneath" other elements or features would then be oriented as "above" the other elements or features. Thus, the exemplary term "under" can include both above and below orientations. Furthermore, the device may be otherwise oriented (e.g., rotated 90 degrees or at other orientations), and as such, the spatially relative descriptors used herein are interpreted accordingly.

[0056] The terms used here are for the purpose of describing specific embodiments, and are not intended to be limiting. Unless the context clearly indicates otherwise, the singular forms "one (kind / person)" and "said / the" as used here are also intended to include plural forms. In addition, when the terms "comprise", "include" and / or its variations are used in this specification, it is explained that there are stated features, integral bodies, steps, operations, elements, components and / or their groups, but it is not excluded that there are or add one or more other features, integral bodies, steps, operations, elements, components and / or their groups. It is also noted that, as used here, the terms "substantially", "approximately" and other similar terms are used as approximate terms rather than as degree terms, and are used to explain the inherent deviations in the measured values, calculated values ​​and / or provided values ​​that will be recognized by those of ordinary skill in the art.

[0057] Here, various exemplary embodiments are described with reference to cross-sectional views and / or exploded views that are schematic illustrations of idealized exemplary embodiments and / or intermediate structures. In this way, variations in the shapes of the illustrations, such as those caused by manufacturing techniques and / or tolerances, are expected. Therefore, the exemplary embodiments disclosed herein should not necessarily be interpreted as being limited to the specific illustrated shapes of the regions, but rather should include deviations in shape, such as those caused by manufacturing. In this way, the regions shown in the drawings may be schematic in nature, and the shapes of these regions may not reflect the actual shapes of the regions of the device, and are not necessarily intended to be limiting.

[0058] Unless otherwise defined, all terms (including technical and scientific terms) used herein have the same meaning as commonly understood by those of ordinary skill in the art to which this disclosure is a part. Terms (such as those defined in general dictionaries) should be interpreted as having a meaning consistent with their meaning in the context of the relevant art and should not be interpreted in an idealized or overly formal sense unless explicitly defined as such herein.

[0059] Figure 1 is a plan view illustrating an exemplary embodiment of a deposition mask constructed according to the principles of the invention. Figure 2 It is shown Figure 1 A plan view of an exemplary embodiment of a frame. Figure 3 It is shown Figure 1 A plan view of an exemplary embodiment of an opening sheet. Figure 4 It is shown Figure 1 A plan view of an exemplary embodiment of a metal sheet. Figure 5 It is along Figure 1 A cross-sectional view taken along line V-V'. Figure 6 It is along Figure 1 A cross-sectional view taken along line VI-VI'. Figure 7 It is along Figure 1 A cross-sectional view taken along line VII-VII'. Figure 8 It is shown Figure 4 An enlarged plan view of area A. Fig. 9 It is shown Figure 4 An enlarged plan view of area B. Fig.10 It is shown Figure 7 An enlarged cross-sectional view of region C. Figure 4 , for the convenience of description, the second part 250 is shown.

[0060] The deposition mask constructed according to the exemplary embodiment of the invention can be used in a deposition process for depositing an organic layer or an inorganic layer in a portable electronic device such as a mobile phone, a smart phone, a tablet personal computer (PC), a smart watch, a watch phone, a mobile communication terminal, a digital assistant, an e-book, a portable multimedia player (PMP), a navigation system, an ultra-mobile PC (UMPC) or a display device of a television, a notebook, a monitor, a billboard or an Internet of Things device. For example, the deposition mask can be used to deposit an organic light-emitting layer of an organic light-emitting display device or an organic thin film for a hole injection / transport layer, an electron injection / transport layer, etc., and can also be used to deposit other organic films, inorganic films, metal patterns, etc. The deposition mask can be an opening mask including an opening having a pattern identical to that of a thin film to be formed on a target substrate.

[0061] Reference Figures 1 to 10, the deposition mask 1 includes a frame 100, a first member and a second member, the first member may be in the form of an opening sheet 200 disposed on the frame 100, and the second member may be in the form of one or more metal sheets 300 disposed on the opening sheet 200. The deposition mask 1 according to an exemplary embodiment may further include one or more stainless steel (SUS) members 400 disposed on the frame 100.

[0062] First, refer to Figure 1 and Figure 2 , the frame 100 may include a first opening OP1. The frame 100 may be used to fix the opening piece 200 and the metal sheet 300. The frame 100 may be connected to the opening piece 200 and the metal sheet 300, and may also be directly connected to the opening piece 200 and the metal sheet 300. For example, the frame 100 may be connected to the opening piece 200 and the metal sheet 300 by a welding process. The frame 100 may have a substantially quadrilateral frame form in which the first opening OP1 is formed at or near its center. The frame 100 may include two short frames having a predetermined width and extending in one direction and two long frames extending in another direction intersecting the one direction.

[0063] When viewed from the Z-axis direction (eg, above), the two short frames and the two long frames may completely surround the first opening OP1. The frame 100 may be formed of a metal material having high strength (eg, stainless steel).

[0064] The opening piece 200 may be disposed on the frame 100. Figure 3 As shown in , when viewed from above, the opening piece 200 may include a first portion 210 and a second opening OP2 surrounded by the first portion 210. The second opening OP2 may be provided as a plurality of second openings OP2. The plurality of second openings OP2 may be arranged in one direction and in another direction. When viewed from above, the first portion 210 may completely surround the plurality of second openings OP2. The generally planar shape of the first portion 210 may be generally lattice-shaped, but is not limited thereto.

[0065] As depicted, five second openings OP2 are provided in one direction and two second openings OP2 are provided in the other direction, a total of ten second openings OP2 , but the number of second openings OP2 in one direction and the other direction is not limited thereto.

[0066] The opening sheet 200 may further include a second portion 250 that is physically separated from the first portion 210 and disposed in the second opening OP2 when viewed from above. The first portion 210 and the second portion 250 may be disposed coplanar and formed of the same material.

[0067] The approximate planar shape of the second opening OP2 may correspond to the approximate planar shape of a deposited film deposited through the second opening OP2 of a display device as described below. The approximate planar shape of the deposited film may roughly correspond to the approximate planar shape of the display device. The approximate planar shape of the display device may be a substantially rectangular shape with substantially angular corners, but is not limited thereto, and may be a substantially rectangular shape with substantially rounded corners, a substantially square shape, a substantially circular shape, a substantially elliptical shape, or another substantially polygonal shape.

[0068] like Figure 3 As shown in , the substantially planar shape of the second portion 250 may be a substantially circular shape. The second portion 250 may be used as a hole for forming a deposited film at a portion corresponding to the second portion 250 during a deposition process of a deposited film for a display device. The display device may include a sensor corresponding to the hole of the deposited film. The sensor may be an under-panel sensor (UPS) or an under-panel camera (UPC) disposed below a panel of the display device and corresponding to the hole of the deposited film, but is not limited thereto.

[0069] In the deposition mask 1 according to some exemplary embodiments, since the second part 250 is physically separated from the first part 210 and is used to form holes in the deposition film, during the deposition process of the deposition film for the display device, multiple deposition masks or connecting members (e.g., substantially thin rods) connecting the second part 250 and the first part 210 are not required to form holes in the deposition film.

[0070] When a plurality of deposition masks are used to form the holes of the corresponding deposition film, the process time and process cost are increased. When a connection member (e.g., a thin rod) connecting the second portion 250 and the first portion 210 is used to form the holes of the corresponding deposition film, dark lines, etc., may be seen from the deposition film due to the connection member, resulting in visual defects.

[0071] However, since the deposition mask 1 according to an exemplary embodiment includes the second portion 250 described above, only one opening mask may be used to form holes of a corresponding deposition film, and dark lines on the deposition film due to a connection member connecting the second portion 250 and the first portion 210 may be prevented from being visible.

[0072] The second portion 250 separated from the first portion 210 may be connected to the metal sheet 300. The metal sheet 300 may include a metal material. Figure 1 and Figure 4 As shown in , the metal sheet 300 may have a generally elongated shape extending in one direction.

[0073] The metal sheet 300 may include one or more first connection portions, which may be in the form of a metal connection portion 310 connected to the frame 100, and one or more second mesh portions, which may be in the form of a metal mesh portion 350 disposed adjacent to the metal connection portion 310. The metal connection portion 310 may be disposed to overlap a portion of the region of the frame 100 around the first opening OP1, and may be disposed to overlap the first portion 210 of the opening sheet 200.

[0074] The metal mesh portion 350 may be disposed to overlap the second opening OP2 of the opening sheet 200 and a portion of the first portion 210 adjacent to the second opening OP2, and may be configured as follows. Fig. 9 3 and 4. The metal connection portion 310 is shown as being disposed to overlap with the second portion 250. The metal connection portion 310 may have a substantially rectangular shape, and the metal mesh portion 350 may have a substantially mesh-like shape.

[0075] As described above, the second part 250 and the first part 210 are physically separated from each other, and the second part 250 may be fixedly connected to the metal mesh part 350. The second part 250 may be directly connected to the metal mesh part 350. For example, the second part 250 may be welded to the metal mesh part 350 to be directly connected to the metal mesh part 350. The welding between the second part 250 and the metal mesh part 350 may be performed using a laser.

[0076] Reference Figure 8 , the metal mesh portion 350 may include a first line L1 extending in one direction (e.g., Y direction) and a second line L2 extending in another direction (e.g., X direction). The first line L1 and the second line L2 may be provided as a plurality of first lines L1 and a plurality of second lines L2, respectively. The plurality of first lines L1 may be arranged in one direction, and the plurality of second lines L2 may be arranged in another direction.

[0077] The first line L1 may extend while interlacing with the plurality of second lines L2, and the second line L2 may extend while interlacing with the plurality of first lines L1. For example, the first line L1 may extend while interlacing with the plurality of second lines L2 in such a manner that the first line L1 extends below one of the plurality of second lines L2 and extends above another of the plurality of second lines L2 adjacent to the one. Similarly, the second line L2 may extend while interlacing with the plurality of first lines L1 in such a manner that the second line L2 extends below one of the plurality of first lines L1 and extends above another of the plurality of first lines L1 adjacent to the one.

[0078] The metal mesh portion 350 may have a substantially mesh shape in which the plurality of first lines L1 and the plurality of second lines L2 are interlaced, and a portion surrounded by the substantially mesh shape may be a mesh opening. The deposition material may pass through the mesh opening, and the deposition material may not pass through the portion in which the plurality of first lines L1 and the plurality of second lines L2 are disposed.

[0079] The SUS member 400 may be disposed on the edge regions 104 of the two short frames of the frame 100. Figure 1 As depicted in the illustrated embodiment of FIG. 1 , two SUS members 400 are disposed on two short side frames of the frame 100 , but the exemplary embodiment is not limited thereto, and the number of the SUS members 400 may be one or three or more.

[0080] The SUS member 400 may be used to maintain a predetermined gap between the metal mesh portion 350 and a target substrate to be described below. That is, the SUS member 400 may have a thickness capable of maintaining a predetermined gap between the metal mesh portion 350 and the target substrate.

[0081] The SUS member 400 may be directly connected to the two short frames of the frame 100. For example, the SUS member 400 may be directly fixedly welded to the two short frames of the frame 100. Therefore, when a deposition process is performed on a target substrate, movement of the target substrate located above the SUS member 400 due to movement of the SUS member 400 may be prevented.

[0082] The SUS member 400 may include stainless steel but is not limited thereto, and may include any material having a strength capable of maintaining a predetermined gap between the metal mesh part 350 and a target substrate and being weldable to the frame 100 .

[0083] Reference Figure 5 and Figure 6 , in frame 100, a short border ( Figure 1 The upper short border of the Figure 1 The first opening OP1 is located between the two.

[0084] The opening piece 200 may be disposed on the frame 100. The first portion 210 may be disposed on one surface of the frame 100. The first portion 210 may be directly disposed on one surface of the frame 100 to overlap the first opening OP1.

[0085] exist Figure 5 and Figure 6 In the embodiment, when viewed from above, the first portion 210 may have a substantially lattice shape in which the divided first portions 210 are integrally connected.

[0086] exist Figure 5 and Figure 6 In the embodiment, the second opening OP2 may be defined between the divided first portions 210 disposed to be spaced apart from each other. When viewed from above, the second opening OP2 may be disposed in or above the first opening OP1.

[0087] As described above, the opening sheet 200 may further include a second portion 250 disposed in the second opening OP2 , and the second portion 250 is disposed coplanar with the first portion 210 and is generally made of the same material as the first portion 210 .

[0088] The metal sheet 300 may be disposed on the opening sheet 200 . The metal mesh portion 350 of the metal sheet 300 may be disposed to overlap the second opening OP2 and the first opening OP1 . The metal mesh portion 350 may extend to be longer than the second opening OP2 so as to partially overlap the first portion 210 .

[0089] The metal sheet 300 may be directly disposed on the opening sheet 200. The metal mesh portion 350 of the metal sheet 300 may be directly disposed on the first portion 210 and the second portion 250 of the opening sheet 200 which may have a surface 204. The metal mesh portion 350 and the second portion 250 may be directly connected by a process such as the welding process described above. That is, although the second portion 250 is physically separated from the first portion 210, the second portion 250 may be directly and fixedly welded to the metal mesh portion 350. The SUS member 400 may be disposed on two short frames of the frame 100.

[0090] The opening sheet 200 may have a first thickness t 1 , the metal sheet 300 may have a second thickness t 2 , the SUS member 400 may have a third thickness t 3 , and the third thickness t 3 With the first thickness t 1 and the second thickness t 2 The difference between the sum of the thickness and the gap can be the fourth thickness (or gap) t 4 .

[0091] The first thickness t 1 The second thickness t may be, for example, in the range of about 100 μm to about 200 μm, and 2 It may be in the range of, for example, about 20 μm to about 40 μm.

[0092] The third thickness t 3 can be greater than the first thickness t 1 and the second thickness t 2 Therefore, a gap between a target substrate to be disposed on the SUS member 400 and the metal sheet 300 can be maintained.

[0093] The third thickness t 3 By considering the fourth thickness t 4 to set up.

[0094] The third thickness t 3 It can be set so that the fourth thickness t 4 The third thickness t is described in detail below. 3 and a gap between the target substrate and the metal sheet 300 .

[0095] Reference Figure 7 , showing Figure 1 The two long borders of the frame 100.

[0096] The metal connection portion 310 may be connected to the frame 100. A portion of the metal connection portion 310 may be bent in a thickness direction due to a step difference between the metal connection portion 310 and the first portion 210, and may be connected to the frame 100. The metal connection portion 310 may be directly connected to the first portion 210. For example, the metal connection portion 310 may be directly connected to the first portion 210 by a method such as a welding method.

[0097] Reference Fig.10 , the metal mesh portion 350 may be directly connected to the second portion 250. The metal mesh portion 350 may include the plurality of first lines L1 and the plurality of second lines L2 described above. Fig.10 As shown in FIG. 2 , in the metal mesh portion 350, a plurality of patterns may be directly connected to the second portion 250. The plurality of patterns may be formed by at least one of the plurality of first lines L1 and the plurality of second lines L2.

[0098] As described above, in the deposition mask 1 according to the exemplary embodiment shown, the second part 250 is physically separated from the first part 210 and is used to form holes in the deposition film, so during the deposition process of the deposition film for the display device, multiple deposition masks or connecting members (e.g., thin rods) connecting the second part 250 and the first part 210 can be used to form corresponding holes in the deposition film.

[0099] When a plurality of deposition masks are used to form the holes of the corresponding deposition film, the process time and process cost are increased. In addition, when a connection member (e.g., a thin rod) connecting the second portion 250 and the first portion 210 is used to form the holes of the corresponding deposition film, dark lines or the like are seen from the deposition film due to the connection member, thereby causing visual defects.

[0100] However, since the deposition mask 1 according to one illustrated embodiment includes the above-mentioned second portion 250, only one opening mask can be used to form holes of the corresponding deposition film, and dark lines on the deposition film caused by the connection member connecting the second portion 250 and the first portion 210 can be prevented from being visible.

[0101] Hereinafter, a method of manufacturing the above-mentioned deposition mask will be described. Detailed description of components identical or similar to those of the above-mentioned embodiment will be omitted to avoid redundancy.

[0102] Fig.11 is a flow chart illustrating steps of an exemplary method of manufacturing a deposition mask according to the principles of the invention. Figures 12 to 15 are plan views illustrating exemplary steps in a method of manufacturing a deposition mask according to principles of the invention. Fig.16 It is shown Fig.15 An enlarged plan view of area D. Fig.17 and Fig.18 is a diagram showing exemplary steps in a method of manufacturing a deposition mask according to the principles of the present invention. Fig.15 An enlarged plan view of area D.

[0103] First, refer to Fig.11 and Fig.12 , an opening sheet 200a including a first portion 210 surrounding at least one opening, a second portion 250a disposed in the opening when viewed from above, and a third portion 270 connecting the first portion 210 and the second portion 250a is provided (S10). Figure 1 and Figure 2 The frame 100 shown in FIG. 1 is disposed below the opening piece 200 a .

[0104] The third portion 270 may be disposed between the second portion 250a and the first portion 210 and may be used to connect the second portion 250a and the first portion 210. The third portion 270 may be coplanar with the second portion 250a and the first portion 210 and formed of the same material as them.

[0105] Since the second part 250a is connected to the first part 210 through the third part 270, the second part 250a is connected to the first part 210 through the third part 270. Figure 1 and Figure 3 The second part 250 shown in FIG. 2 is the same as the second part 250 shown in FIG. 2 , and thus a repeated description thereof will be omitted to avoid redundancy.

[0106] The third portion 270 may connect one side of the second portion 250 a and the first portion 210 , and connect the other side of the second portion 250 a , which is a side opposite to the one side of the second portion 250 a , and the first portion 210 .

[0107] The third portion 270 may be disposed in the second opening OP2 . That is, the second portion 250 a may be physically connected to the first portion 210 through the third portion 270 .

[0108] Then, refer to Fig.11 and Fig.13 , a metal sheet 300a including a metal mesh portion 350 is disposed on the opening sheet 200a (S20). The metal sheet 300a may include a metal connection portion 310a disposed at one side and the other side of each of the metal mesh portions 350 and connected to one side and the other side of each of the metal mesh portions 350.

[0109] Operation S20 of disposing the metal sheet 300a on the opening sheet 200a may include an operation in which the metal sheet 300a is elongated in one direction and disposed on the opening sheet 200a. Therefore, a phenomenon in which the metal mesh portion 350 of the metal sheet 300a sags or the like may be reduced or prevented.

[0110] Reference Fig.14 , after the metal sheet 300a is disposed on the opening sheet 200a (S20), an operation may also be included in which the metal connection parts 310a on one side and the other side of each of the metal mesh parts 350 connected to the metal sheet 300a are welded to the frame 100.

[0111] Laser may be used to perform welding of the metal connection part 310a to the frame 100. For example, the laser emits light to the metal connection part 310a and the frame 100 to melt at least a portion of the metal connection part 310a and the frame 100, thereby directly welding the metal connection part 310a and the frame 100.

[0112] In an operation where the laser emits light, the laser may be a point laser. Fig.14 As shown in , the point laser may emit light to the metal connection part 310a and the frame 100 at predetermined intervals in another direction to weld the metal connection part 310a and the frame 100. Fig.14In the embodiment, the metal connection part 310a and the part of the frame 100 to be welded are arranged in another direction, but not limited thereto, and the metal connection part 310a and the part of the frame 100 to be welded may also be arranged in one direction or in the other direction and the one direction. In addition, as shown, the number of welded metal connection parts 310a and the part of the frame 100 on one side of one short frame of the frame 100 is six, and the number of welded metal connection parts 310a and the part of the frame 100 on one side of another short frame is six, but the number of welded parts is not limited thereto. In addition, the number of welded parts on one side of one short frame may be different from the number of welded parts on one side of another short frame.

[0113] Then, a portion disposed outside the portion where the metal connection portion 310a and the frame 100 are welded may be removed. When the portion disposed outside the portion where the metal connection portion 310a and the frame 100 are welded is removed, an end of the metal connection portion 310a may be aligned with an end of the frame 100, but exemplary embodiments are not limited thereto.

[0114] Then, refer to Fig.15 , the frame 100, the opening piece 200a and the metal sheet 300a are turned over. That is, the stacking order of the frame 100, the opening piece 200a and the metal sheet 300a can be changed from Fig.14 Therefore, the stacking order may be the stacking order of the metal sheet 300a, the opening sheet 200a, and the frame 100.

[0115] The second portion 250 a and the third portion 270 of the opening piece 200 a may be exposed to the outside in the first opening OP1 of the frame 100 and the second opening OP2 of the opening piece 200 a .

[0116] Then, refer to Fig.11 , Fig.14 and Fig.16 , connecting the second part 250a and the metal mesh part 350 (S30). The operation (S30) of connecting the second part 250a and the metal mesh part 350 may include an operation of directly connecting the second part 250a and the metal mesh part 350. The operation of directly connecting the second part 250a and the metal mesh part 350 may include, for example, an operation of welding the second part 250a and the metal mesh part 350.

[0117] The operation of welding the second portion 250a and the metal mesh portion 350 may be performed using a laser. The laser may be a point laser. Fig.16 As shown in , the point laser can emit light onto the metal mesh portion 350 and the second portion 250a at predetermined intervals in random directions. Fig.16 , the number of portions where the metal mesh portion 350 and the second portion 250a are welded is four, but the number of welded portions is not limited thereto.

[0118] Then, refer to Fig.11 , Fig.14 , Fig.17 and Fig.18 , the third portion 270 is removed from the opening piece 200a (S30).

[0119] The operation S30 of removing the third portion 270 from the opening sheet 200a may be performed using a laser. The laser may be a point laser. Fig.17 As shown in , the laser may emit light to the boundary between the first portion 210 and the third portion 270 and to the boundary between the third portion 270 and the second portion 250a to remove the third portion 270 from the opening sheet 200a and obtain the second portion 250 as described above.

[0120] Therefore, if Fig. 9 and Fig.18 As shown in , the second portion 250 may be directly connected to the metal mesh portion 350. Hereinafter, a method of manufacturing a display device using the above deposition mask 1 according to an illustrated embodiment will be described. Detailed descriptions of components identical or similar to those of the above embodiment will be omitted to avoid redundancy.

[0121] Fig.19 are plan views illustrating exemplary steps in a method of manufacturing a display device according to the principles of the invention. Fig. 20 It is along Fig.19 A cross-sectional view taken along line XX-XX'. Fig.21 It is along Fig.19 A cross-sectional view taken along line XXI-XXI'. Fig. 22 is a graphical table depicting films deposited according to the gap between a metal sheet and a target substrate.

[0122] Reference Figures 19 to 22 , a deposition mask 1 according to an exemplary embodiment is provided.

[0123] As described above, the deposition mask 1 may include a frame 100, an opening sheet 200 and a metal sheet 300, the frame 100 includes a first opening OP1, the opening sheet 200 includes a first portion 210 and a second portion 250, the first portion 210 is arranged above the first opening OP1 of the frame 100 and surrounds at least one second opening OP2, the second portion 250 is arranged in the second opening OP2 when viewed from the Z-axis direction (for example, from above) and is physically separated from the first portion 210, and the metal sheet 300 includes a metal connecting portion 310 arranged on the opening sheet 200 and connected to the frame 100 and a metal grid portion 350 arranged to overlap with the second portion 250.

[0124] Then, a target substrate 500 is set on the deposition mask 1. The target substrate 500 may be a deposition substrate in which a deposition material DPMa is deposited by the deposition mask 1. The target substrate 500 may be a rigid substrate including a rigid material such as at least one of glass and quartz, but is not limited thereto, or may be a flexible substrate including a flexible material. When viewed from above, the target substrate 500 may have a substantially rectangular shape. However, the target substrate 500 is not limited thereto, but may be a square shape, a circular shape, an elliptical shape, or any polygonal shape.

[0125] In an operation in which the target substrate 500 is disposed on the deposition mask 1, the target substrate 500 may be disposed in direct contact with the SUS member 400. As described above, the opening sheet 200 may have a first thickness t 1 , the metal sheet 300 may have a second thickness t 2 , the SUS member 400 may have a third thickness t 3 , and the third thickness t 3 With the first thickness t 1 and the second thickness t 2 The difference between the sum of the fourth thickness t 4 .

[0126] The first thickness t 1 The second thickness t may be, for example, in the range of about 100 μm to about 200 μm. 2 It may be in the range of, for example, about 20 μm to about 40 μm.

[0127] The third thickness t 3 can be greater than the first thickness t 1 and the second thickness t 2 Therefore, a predetermined gap between the target substrate 500 to be disposed above the SUS member 400 and the metal sheet 300 can be maintained. 4 To set the third thickness t 3 The third thickness t 3The fourth thickness t is set so that 4 is in the range of at least about 600 μm.

[0128] The deposition material DPMa is conducted upward (eg, by spraying) from below the deposition mask 1 to the deposition mask 1. Through the first opening OP1 (see Figure 1 ) and the second opening OP2 (see Figure 1 ) deposits the deposition material DPMa on the target substrate 500.

[0129] More specifically, when the deposition material DPMa is conducted upward to the deposition mask 1 from below, the deposition material DPMa is not conducted upward to the deposition mask 1 at a region other than the first opening OP1 due to the frame 100. That is, only the deposition material DPMa moving toward the first opening OP1 is conducted to the opening sheet 200.

[0130] Due to the first portion 210 and the second portion 250 of the opening sheet 200, the deposition material DPMa conducted to the opening sheet 200 is not conducted to the metal sheet 300 at a region other than the second opening OP2. That is, among the deposition material DPMa passing through the first opening OP1, only the deposition material DPMa moving toward the second opening OP2 is conducted to the metal sheet 300.

[0131] At a region other than the metal opening formed by the above-mentioned first and second lines L1 and L2 of the metal sheet 300, the deposition material DPMa conducted to the metal sheet 300 is not conducted to the target substrate 500 due to the first and second lines L1 and L2 of the metal sheet 300. That is, only the deposition material DPMa moving toward the metal opening among the deposition materials DPMa passing through the opening sheet 200 is conducted to the target substrate 500.

[0132] Only the deposition material DPMa moving toward the first opening OP1, the second opening OP2, and the metal opening is conducted to the target substrate 500 to form a deposition film DPM. The deposition film DPM may further include a third opening OP3 formed therein. The region other than the third opening OP3 in the deposition film DPM may roughly correspond to the first opening OP1, the second opening OP2, and the metal opening.

[0133] The third opening OP3 of the deposition film DPM may be disposed to roughly overlap and correspond to the second portion 250 of the opening sheet 200. In addition, the deposition film DPM may further include a pattern or a fourth opening corresponding to the first line L1 and the second line L2.

[0134] Gap t 4 is disposed between the target substrate 500 and the metal mesh portion 350 of the metal sheet 300. Even when the gap t 4When only the deposition material DPMa moving toward the metal opening among the deposition material DPMa passing through the opening sheet 200 is conducted to the target substrate 500, the visibility of the pattern corresponding to the first line L1 and the second line L2 of the deposition film DPM or the fourth opening of the metal mesh portion 350 can also be substantially reduced. Fig. 22 Describe this.

[0135] Reference Fig. 22 , showing the gap t between the metal mesh portion 350 and the target substrate 500 4 The plane shape of the deposited film DPM in each of the reflection mode and the transmission mode. The approximate plane shape in the reflection mode is formed by emitting light upward from below the deposited film DPM and taking an image of the deposited film DPM, and the approximate plane shape in the transmission mode is formed by emitting light downward from above the deposited film DPM and taking an image of the deposited film DPM. In the reflection mode, the relatively dark portion is the pattern or the fourth opening of the deposited film DPM, and the relatively bright portion is the portion where the pattern or the fourth opening is not provided in the deposited film DPM. In the transmission mode, the relatively bright portion is the pattern or the fourth opening of the deposited film DPM, and the relatively dark portion is the portion where the pattern or the fourth opening is not provided in the deposited film DPM.

[0136] like Fig. 22 As shown in FIG. , as the gap t between the metal mesh portion 350 and the target substrate 500 increases, 4 Increasing from about 0 μm to about 50 μm and up to about 600 μm, relatively dark portions are not noticeably visible in the reflective mode, and relatively light portions are not noticeably visible in the transmissive mode.

[0137] According to an exemplary embodiment, the gap t between the metal mesh portion 350 and the target substrate 500 is 4 The gap t between the metal mesh portion 350 and the target substrate 500 may be in the range of about 500 μm to 2000 μm. 4 The gap t between the metal mesh portion 350 and the target substrate 500 may be in the range of about 600 μm to about 1000 μm. 4 When the gap t between the metal mesh portion 350 and the target substrate 500 is at least about 600 μm, the pattern of the deposited film DPM or the fourth opening is not recognized by visual inspection, and 4 When it is not greater than about 1000 μm, it may be possible to prevent a situation in which a deposition process is not easily performed in view of space limitation due to an enlarged deposition apparatus accommodating the deposition mask 1 and the target substrate 500 .

[0138] As described above, in the method for manufacturing a display device according to an embodiment, since the second portion 250 of the deposition mask 1 is physically separated from the first portion 210 and is used to form a hole of a deposition film, during the deposition process of the deposition film for the display device, a plurality of deposition masks or a connecting member (e.g., a thin rod) connecting the second portion 250 and the first portion 210 is not necessary to form the holes of the corresponding deposition film. When a plurality of deposition masks are used to form the holes of the corresponding deposition film, the process time period and the process cost are increased. When a connecting member (e.g., a thin rod) connecting the second portion 250 and the first portion 210 is used to form the holes of the corresponding deposition film, a visual defect may occur because a dark line or the like due to the connecting member may be visible from the deposition film.

[0139] However, in the method of manufacturing a display device using the deposition mask 1, since the deposition mask 1 includes the above-mentioned second part 250, only one opening mask can be used to form the holes of the corresponding deposition film, thereby improving the process efficiency and preventing the dark lines on the deposition film caused by the connecting member connecting the second part 250 and the first part 210 from being visible, thereby fundamentally preventing visual defects.

[0140] Hereinafter, another embodiment of the above-described deposition mask 1 will be described. Detailed descriptions of components identical or similar to those of the above-described embodiment will be omitted to avoid redundancy.

[0141] Fig.23 is a plan view illustrating another exemplary embodiment of a deposition mask constructed according to the principles of the invention.

[0142] Reference Fig.23 , deposition mask 2 with Figure 1 , Figure 3 and Figure 4 The deposition mask 1 is different in that the opening sheet 200_1 includes only the first portion 210 and does not include the second portion.

[0143] More specifically, in the deposition mask 2, the opening sheet 200_1 may include only the first portion 210 and may not include the second portion. In the deposition mask 2, the metal sheet 300_1 may also include one or more plugs that may be in the form of one or more deposition blocking portions 355. When viewed from above, the deposition blocking portion 355 may be surrounded by the metal mesh portion 350_1 of the metal sheet 300_1.

[0144] The deposition blocking portion 355 may function as described above. Figure 1 , Figure 3 and Figure 4The function of the second portion 250 of the opening sheet 200 described above is substantially the same. When viewed from above, the deposition blocking portion 355 is not coplanar with the second portion 250 in the stacked structure, but can be disposed at the same position of the second portion 250. The deposition blocking portion 355 can be connected to the metal mesh portion 350_1 and coplanar with the metal mesh portion 350_1, and formed of the same material as the metal mesh portion 350_1. The general planar shape of the deposition blocking portion 355 can be the same as that of the above reference. Figure 1 , Figure 3 and Figure 4 The second portion 250 is described to have the same shape, but is not limited thereto.

[0145] Fig.24 is a cross-sectional view illustrating another exemplary embodiment of a deposition mask constructed according to the principles of the invention.

[0146] Reference Fig.24 The deposition mask 3 is different from the deposition mask 1 according to one illustrated exemplary embodiment in that the deposition mask 3 further includes a connection pattern SWM between the metal mesh portion 350 and the second portion 250 of the opening sheet 200 .

[0147] More specifically, the deposition mask 3 may further include a connection pattern SWM between the metal mesh portion 350 and the second portion 250 of the opening sheet 200. The connection pattern SWM may be disposed between the metal mesh portion 350 and the second portion 250, and connected to the metal mesh portion 350 and the second portion 250. The connection pattern SWM may be disposed between the metal mesh portion 350 and the second portion 250, and directly connected to the metal mesh portion 350 and the second portion 250. The connection pattern SWM may be disposed between the metal mesh portion 350 and the second portion 250, and directly connected to the metal mesh portion 350 and the second portion 250 by a method such as a welding method.

[0148] The general planar shape of the connection pattern SWM may be substantially the same as the general planar shape of the second portion 250 , but is not limited thereto.

[0149] The plane size of the connection pattern SWM may be the same as the plane size of the second portion 250. For example, the plane size of the connection pattern SWM may be smaller than the plane size of the second portion 250. Since the plane size of the connection pattern SWM is smaller than the plane size of the second portion 250, the movement of the deposition material DPMa may be prevented from being hindered by the connection pattern SWM, and thus a deposition film DPM having a desired size and shape may be formed.

[0150] Since the welding method for connecting the pattern SWM, the metal mesh portion 350, and the second portion 250 has been described, a detailed description thereof will be omitted to avoid redundancy.

[0151] A deposition mask and an exemplary method of manufacturing the deposition mask and a method of manufacturing a display device using the deposition mask constructed according to exemplary embodiments of the principles of the invention have improved manufacturing process efficiency and / or avoid visual defects in the resulting deposited film.

[0152] Although certain exemplary embodiments and implementations have been described herein, other embodiments and modifications will be apparent from this description. Therefore, the inventive concept is not limited to such embodiments, but rather to the broader scope of the appended claims and various obvious modifications and equivalent arrangements that will be apparent to those of ordinary skill in the art.

Claims

1. A deposition mask for manufacturing a display device, the deposition mask include: a frame including a first opening; a first member disposed above the first opening of the frame and comprising a first portion surrounding at least one second opening and a second portion disposed in the second opening and physically separated from the first portion; as well as a second member disposed on the first member and comprising a first connection portion connected to the frame and a second grid portion overlapping the second portion, The second grid portion is arranged to overlap with the second opening and a portion of the first portion adjacent to the second opening.

2. The deposition mask according to claim 1, in, The second portion is configured to make holes in a deposited film made by the deposition mask, and is connected to the second mesh portion.

3. The deposition mask according to claim 2, in, The second portion is directly connected to the second grid portion.

4. The deposition mask according to claim 3, in, The second portion is welded to the second mesh portion using a laser.

5. The deposition mask according to claim 2, further comprising a stainless steel member disposed on an edge of the frame, in, The stainless steel member is connected to the frame.

6. The deposition mask according to claim 5, in: The first member includes an opening piece having a first thickness based on one surface of the frame; The second member includes a metal sheet having a second thickness based on one surface of the opening sheet; and The stainless steel member has a third thickness based on the one surface of the frame; The third thickness is greater than the sum of the first thickness and the second thickness.

7. The deposition mask according to claim 6, in, The difference between the third thickness and the sum of the first thickness and the second thickness is at least 600 μm.

8. The deposition mask according to claim 5, in, The stainless steel member is welded to the frame.

9. The deposition mask according to claim 2, in, The second portion has a circular cross-sectional shape.

10. The deposition mask according to claim 2, in, The first connecting portion is directly connected and welded to the frame.

11. The deposition mask according to claim 2, in: The first connection portion includes a metal connection portion having a rectangular shape; and The second mesh portion includes a metal mesh portion having a mesh shape.

12. The deposition mask according to claim 11, in, The metal mesh portion comprises: A first line, extending in one direction; and The second line extends in another direction intersecting the one direction.

13. The deposition mask according to claim 1, further comprising a connection pattern disposed between the second mesh portion and the second portion, in, The connection pattern is directly connected to the second grid portion and the second portion.

14. A deposition mask for manufacturing a display device, the deposition mask include: a frame including a first opening; a first member disposed above the first opening of the frame and including a first portion having a lattice-shaped planar shape and at least one second opening surrounded by the first portion; as well as a second member disposed on the first member and comprising a first connection portion connected to the frame and a second support portion disposed adjacent to the first connection portion and overlapping the second opening, wherein the second supporting portion comprises a second grid portion and a plug surrounded by the second grid portion, and The second grid portion is arranged to overlap with the second opening and a portion of the first portion adjacent to the second opening. 15 . The deposition mask of claim 14 , further comprising a stainless steel member disposed on an edge of the frame and connected to the frame.

16. The deposition mask according to claim 15, in: The first member includes an opening piece having a first thickness based on one surface of the frame; The second member includes a metal sheet having a second thickness based on one surface of the opening sheet; The second support portion includes a metal main portion; The first connecting portion includes a metal connecting portion; The second mesh portion comprises a metal mesh portion; and The stainless steel member has a third thickness based on the one surface of the frame; Wherein, the third thickness is greater than the sum of the first thickness and the second thickness, and the difference between the third thickness and the sum of the first thickness and the second thickness is at least 600µm.

17. The deposition mask according to claim 14, in, The plug includes a deposition barrier having a circular cross-sectional shape.

18. A method for manufacturing a deposition mask for making a display device, the method comprising the following steps: providing an opening sheet having a first portion surrounding at least one opening, a second portion disposed in the at least one opening, and a third portion connecting the first portion and the second portion; A metal sheet is arranged on the opening sheet, wherein the metal sheet has a metal mesh portion; as well as The metal mesh portion and the second portion are welded and the third portion is removed from the opening sheet.

19. The method according to claim 18, in, The steps of welding the metal mesh portion and the second portion and removing the third portion from the opening sheet are performed using a laser.

20. A method for manufacturing a display device, the method comprising the following steps: Providing a deposition mask, the deposition mask comprising a frame, an opening sheet, and a metal sheet, the frame having a first opening, the opening sheet being disposed above the first opening of the frame and having a first portion surrounding at least one second opening and a second portion being disposed in the second opening and physically separated from the first portion, the metal sheet being disposed on the opening sheet and having a metal connection portion connected to the frame and a metal mesh portion overlapping the second portion and having a deposition opening therein; disposing a target substrate in a position spaced apart from the metal mesh portion by a gap; depositing a deposition material on the target substrate through the deposition openings in the metal mesh portion; as well as forming a deposited film including a third opening formed through a portion overlapping the second portion, The metal grid is arranged to overlap with the second opening and a portion of the first portion adjacent to the second opening.

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