A device and method for detecting the rotation performance of a rotating mechanism

Abstract

The present invention discloses a device for detecting the rotation performance of a rotating mechanism, comprising a balancing mechanism, a rotating mechanism to be detected, a supporting mechanism and a rotating drive mechanism that sequentially form a rotating connection, and a control module connected to the rotating drive mechanism, wherein the balancing mechanism is provided with a first rotating shaft, the supporting mechanism is provided with a second rotating shaft, the upper end of the first rotating shaft is rotationally fixed, the lower end of the first rotating shaft is passed through the rotating center of the rotating mechanism to form the central rotating shaft of the rotating mechanism, the lower end of the first rotating shaft also passes through the rotating mechanism and is coaxially fixed with the upper end of the second rotating shaft, the lower end of the second rotating shaft is rotationally connected with the rotating drive mechanism, and the torque value or load rate value from the rotating drive mechanism is obtained through the control module as a basis for evaluating whether the rotation performance of the rotating mechanism is qualified, so that it is possible to objectively detect whether the rotation performance of the rotating mechanism after assembly and maintenance is qualified. The present invention also discloses a method for detecting the rotation performance of a rotating mechanism.

Description

Technical Field

[0001] The present invention relates to the technical field of testing equipment, and in particular to a device and method for detecting the quality of rotation performance of a mechanical rotating mechanism. Background Art

[0002] For example, in the field of vacuum coating, in order to uniformly coat multiple products entering the coating vacuum chamber, it is often necessary to set a rotating mechanism with a multi-stage transmission function (such as a planetary rotating bracket, which is a product carrier) on the working platform in the vacuum chamber. Through the multi-stage transmission structure of the rotating mechanism, the coating jig installed on it is driven to revolve around the rotation center of the rotating mechanism, and at the same time, the coating jig is driven to rotate on the rotating mechanism, so that each surface that needs to be coated of the multiple products installed on the coating jig can be uniformly coated, thereby ensuring the consistency of the coating thickness and color of the plated products.

[0003] The multi-stage transmission form of the above-mentioned rotating mechanism is usually achieved by a central gear driving multiple planetary gears meshing with it to rotate in a graded manner. Since the central gear needs to drive multiple planetary gears to rotate synchronously at the same time, and each gear needs to cooperate with the corresponding bearing through a rotating shaft, it is very important to ensure the stability and reliability of the operation between these gears and between the rotating shafts and bearings of each gear during the coating process. For a specific coating production process, the above-mentioned rotating mechanism will change its own rotation resistance as the frequency and time of use increase, such as increased resistance, jamming, and even jamming.

[0004] At present, after the above-mentioned rotating mechanism is assembled and maintained, there is no reliable detection method to predict the operability of the rotating mechanism. It can only be roughly judged by manual induction whether the assembly and maintenance status of the gears and bearings in the rotating mechanism are qualified, and whether the rotation is smooth. However, due to the lack of clear inspection standards, this judgment method cannot completely check whether the torque of the gears and bearings in the rotating mechanism meets the standards, so it cannot make an accurate judgment, which often causes the rotating mechanism that is judged to be qualified to still have problems such as jamming or even stuck in actual work, thus seriously affecting the production yield.

[0005] Therefore, designing a device that can be used to objectively detect the rotation performance of a rotating mechanism and effectively prevent the rotating mechanism from getting stuck or even stuck due to excessive resistance during actual operation has become an issue that the industry urgently needs to solve.

[0006] Reference: CN201220026585.0 Planetary rotating bracket of vacuum coating device Summary of the invention

[0007] The purpose of the present invention is to overcome the deficiencies of the prior art and to provide a device and method for detecting the rotation performance of a rotating mechanism.

[0008] A technical solution of the present invention to achieve the above object is:

[0009] The present invention provides a device for detecting the rotation performance of a rotating mechanism, comprising a balancing mechanism, a rotating mechanism to be detected, a supporting mechanism and a rotating drive mechanism which are sequentially connected to form a rotation connection, and a control module connected to the rotating drive mechanism; wherein

[0010] The balancing mechanism is provided with a first rotating shaft, and the supporting mechanism is provided with a second rotating shaft. The upper end of the first rotating shaft is rotatably fixed, and the lower end of the first rotating shaft is passed through the rotation center of the rotating mechanism to form the central rotating shaft of the rotating mechanism. At the same time, the lower end of the first rotating shaft also passes through the rotating mechanism and is coaxially fixedly connected with the upper end of the second rotating shaft, and the lower end of the second rotating shaft is rotatably connected with the rotating drive mechanism.

[0011] The control module obtains a torque value or a load rate value from the rotation drive mechanism as a basis for evaluating whether the rotation performance of the rotation mechanism is qualified.

[0012] Furthermore, the balancing mechanism is also provided with an upper cover and a cantilever, the upper end of the first rotating shaft is rotatably engaged with the upper cover, and the upper cover is relatively fixed with the rotating drive mechanism through the cantilever.

[0013] Furthermore, the support mechanism is also provided with a hollow body, the second rotating shaft is fitted and inserted into the hollow interior of the body, the upper end of the second rotating shaft has an axis end groove, the lower end of the first rotating shaft is fitted and accommodated in the axis end groove, and forms a coaxial fixed connection with the upper end of the second rotating shaft, the lower end of the second rotating shaft passes through the lower end of the body, and forms a rotational connection with the rotation drive mechanism through a coupling.

[0014] Furthermore, a shell is provided on the outside of the rotating mechanism, a fixing seat is provided on the lower end surface of the shell, and a supporting seat is provided on the upper end surface of the main body. The rotating mechanism is supported on the supporting mechanism through the insertion cooperation between the fixing seat and the supporting seat, and the first rotating shaft is also cooperated and penetrated through the fixing seat and the supporting seat.

[0015] Furthermore, an insertion connection is formed between the fixing seat and the supporting seat through the upper and lower cooperation of the pin and the pin groove, the upper end of the second rotating shaft also enters the supporting seat, and the shaft end groove is connected to the lower end of the first rotating shaft through a cylindrical pin.

[0016] Furthermore, the rotation drive mechanism is disposed on a base and fixed to the base via a bracket, the upper end of the cantilever is connected to the upper cover, and the lower end of the cantilever is fixed to the bracket.

[0017] Furthermore, the rotation drive mechanism includes a motor, and the motor is connected to the second rotating shaft through a transmission.

[0018] Further, the upper cover is horizontally connected to the cantilever, the upper end surface of the first rotating shaft is arc-shaped or flat, and the lower end surface of the upper cover is correspondingly provided with a bearing with an arc-shaped bottom groove or a bearing with a flat bottom groove, and the first rotating shaft is abutted against the arc-shaped or flat bottom surface of the bearing groove of the upper cover through its arc-shaped or flat upper end surface, so that a rotational fit is formed between the first rotating shaft and the upper cover.

[0019] Furthermore, the upper cover is provided with a first horizontal portion, a second horizontal portion and a vertical portion, the first horizontal portion is protrudingly provided on one end of the second horizontal portion, the bearing is provided on the lower end surface of the first horizontal portion, a horizontal fixed shaft is provided on the side surface of the vertical portion, the other end of the second horizontal portion is sleeved on the fixed shaft through an axis hole, and is fixed to the vertical portion through a clamp sleeved on the fixed shaft, a horizontal mounting plate is provided at the upper end of the cantilever, the lower end of the vertical portion passes through the mounting plate, and is fixed to the mounting plate through a nut, and a mass block is provided on the upper cover.

[0020] Furthermore, the control module includes a servo driver and a host computer, the servo driver is connected to the motor, and the host computer obtains the torque value or load rate value from the rotation drive mechanism collected by the servo driver and displays it through a display.

[0021] The present invention also provides a method for detecting the rotation performance of a rotating mechanism, comprising:

[0022] Using a rotation drive mechanism, driving the rotation mechanism to rotate around its rotation center from one side of the rotation center of the rotation mechanism to be detected;

[0023] Obtaining the torque value or load rate value of the rotation drive mechanism as a basis for evaluating whether the rotation performance of the rotation mechanism is qualified; wherein

[0024] Determine whether the torque value or load rate value of the rotation drive mechanism obtained is greater than the torque setting value or the load rate setting value. If not, determine that the rotation performance of the rotation mechanism is qualified. If so, determine that the rotation performance of the rotation mechanism is unqualified.

[0025] Furthermore, the rotation drive mechanism is coaxially arranged with the rotation center of the rotation mechanism to drive the rotation mechanism to rotate synchronously around its rotation center.

[0026] Furthermore, when the obtained torque value or load rate value of the rotary drive mechanism is greater than a preset amplitude of the torque setting value or the load rate setting value, the operation of the rotary drive mechanism is stopped and an alarm is issued.

[0027] Furthermore, the torque setting value or the load rate setting value is determined according to an empirical value or a rule.

[0028] Compared with the prior art, the present invention has the following advantages:

[0029] (1) Based on the corresponding relationship between the rotational resistance of the rotating mechanism itself and the torque or load rate of the motor, the rotation performance of the rotating mechanism is characterized by collecting the torque value or load rate value of the motor and comparing it with the torque setting value or load rate setting value. It can objectively detect whether the rotation performance of the rotating mechanism after assembly and maintenance is qualified, and can effectively and quickly detect the torque value of the periodic rotation of the rotating mechanism and the normal maintenance cycle.

[0030] (2) It can simulate the rotating working state of the rotating mechanism in the vacuum coating chamber, and can measure the torque value or load rate value data in the cold and hot states before and after entering and leaving the furnace, so as to make the measured results more effective.

[0031] (3) By setting overload protection, the motor can be prevented from overloading due to excessive torque of the rotating mechanism, which provides higher safety.

[0032] (4) By setting up a balancing mechanism and establishing a coaxial connection with the rotation center of the rotating mechanism, the rotation of the rotating mechanism can be effectively maintained to be smooth, so that the balancing mechanism, the rotating mechanism to be detected, the supporting mechanism and the motor are always in a coaxial state for operation, thereby improving the accuracy of the detection result.

[0033] (5) By arranging a combined upper cover structure with three-directional adjustment functions on the balancing mechanism, in coordination with the first rotating shaft, the cantilever and the bracket, it can be used to accurately adjust the verticality between the first rotating shaft and the rotating mechanism, thereby ensuring that the first rotating shaft and the rotation center of the rotating mechanism and the motor are always in a coaxial state; at the same time, by utilizing the mass block pressed on the upper cover, the stability of the coordination between the bearing on the upper cover and the first rotating shaft can be improved, thereby preventing the first rotating shaft from shaking due to the influence of torque during rotation.

[0034] (6) By setting a support mechanism between the rotating mechanism and the motor, and installing the rotating mechanism and the support mechanism in an up-and-down plug-in manner, and fixing them with a bracket, not only can the rotating mechanism avoid exerting gravity on the motor, but also the stability of the rotating mechanism during rotation can be maintained, thereby effectively improving the detection accuracy.

[0035] (7) The base is set to have a certain weight to ensure the stability of the center of gravity during measurement; at the same time, the four foot cups provided under the base and a level ruler placed on the base plane or the bracket plane can be used to easily adjust the level of the entire device by adjusting the foot cups while observing the horizontal state of the level ruler. BRIEF DESCRIPTION OF THE DRAWINGS

[0036] Figure 1-Figure 2 The figure is a schematic diagram of the structure of a device for detecting the rotation performance of a rotating mechanism according to a preferred embodiment of the present invention.

[0037] Figure 3 The figure is a schematic diagram of a bracket and a cantilever structure arranged on a base according to a preferred embodiment of the present invention.

[0038] Figure 4 The figure is a schematic diagram of the external structure of a supporting mechanism according to a preferred embodiment of the present invention.

[0039] Figure 5 The figure is a schematic diagram of the installation structure between a supporting mechanism and a rotating mechanism according to a preferred embodiment of the present invention.

[0040] Figure 6 The figure is a schematic diagram of an upper cover structure according to a preferred embodiment of the present invention.

[0041] In the figure, 1. base, 2. bracket, 3. coupling, 4. observation window, 5. support mechanism, 6. rotating mechanism, 7. first rotating shaft (connecting rod shaft), 8. upper cover, 9. cantilever, 10. protective cover, 11. control module, 12. transmission (reducer), 13. motor (rotation driving mechanism), 14. protective shell, 15. mounting plate, 16. main body, 17. second rotating shaft, 18. shaft end groove, 19. cylindrical pin, 20. supporting seat, 21. fixing seat, 22. fixing pin (pin), 23. first horizontal part, 24. mass block, 25. clamp, 26. fixed shaft, 27. vertical part, 28. nut, 29. second horizontal part, 30. shell. DETAILED DESCRIPTION

[0042] In order to better understand the technical solution of the present invention, a detailed description is given below through specific embodiments.

[0043] See also Figure 1-Figure 2 The device for detecting the rotation performance of a rotating mechanism of the present invention may include balancing mechanisms 7, 8, 9 that sequentially form a rotation connection, a detected rotating mechanism 6, a supporting mechanism 5 and a rotation driving mechanism 13, and a control module 11 connected to the rotation driving mechanism 13.

[0044] The balancing mechanism 7, 8, 9 is provided with a first rotating shaft (connecting rod shaft) 7 arranged in the vertical direction. The upper end of the first rotating shaft 7 is in a relatively fixed state that can rotate; specifically, the upper end of the first rotating shaft 7 can be relatively fixed by rotating with a fixed upper cover 8 structure. The lower end of the first rotating shaft 7 is arranged in the rotation center of the rotating mechanism 6 and forms the central axis of the rotating mechanism 6.

[0045] The rotating mechanism 6 may have a multi-stage transmission structure. Generally, the rotating mechanism 6 may be driven by a central gear to rotate multiple planetary gears meshing with it, so as to realize its multi-stage transmission function in a step-by-step torque transmission manner. The central gear may synchronously drive multiple planetary gears to rotate, and each gear is matched with a corresponding bearing through a rotating shaft (gear shaft).

[0046] A specific structural form of the rotating mechanism can be referred to in the document: Planetary rotating bracket of vacuum coating device CN201220026585.0, but is not limited thereto.

[0047] In the present invention, the central axis (the gear shaft of the central gear) of the rotating mechanism 6 is replaced by the first rotating shaft 7 which is passed through the rotation center of the rotating mechanism 6 (the gear shaft position of the central gear of the rotating mechanism 6), so that the verticality between the rotating mechanism 6 and the first rotating shaft 7 can be ensured, which effectively ensures that the first rotating shaft 7 and the rotation center of the rotating mechanism 6 are in a coaxial state, thereby improving the accuracy of detection.

[0048] The first rotating shaft 7 and the rotating mechanism 6 , for example, the central gear thereof, can be relatively fixed in a conventional manner so that the rotating mechanism 6 can synchronously transmit power (torque) step by step under the rotation of the first rotating shaft 7 .

[0049] See also Figure 4-Figure 5 The support mechanism 5 is arranged between the rotating mechanism 6 to be detected and the rotating drive mechanism 13, and is used to support the rotating mechanism 6 installed on the support mechanism 5, and utilizes the certain mass of the support mechanism 5 itself to ensure the stability of the rotating mechanism 6 during horizontal operation and prevent it from deflecting. The support mechanism 5 is provided with a hollow body 16 with upper and lower openings, and a shell 30 is provided outside the rotating mechanism 6. The body 16 of the support mechanism 5 can provide support for the lower end surface of the shell 30 of the rotating mechanism 6, so that the rotating mechanism 6 can be fixed on the upper end surface of the support mechanism 5.

[0050] A second rotating shaft 17 is provided in the hollow body 16 of the support mechanism 5; the second rotating shaft 17 is cooperatively arranged in the hollow interior of the body 16 and exposed from the upper and lower ends of the body 16. The second rotating shaft 17 can be cooperatively arranged in the hollow interior of the body 16 through a bearing. Among them, an axis end groove 18 can be processed on the upper end of the second rotating shaft 17, and the axis end groove 18 can be a U-shaped groove structure, for example. At the same time, the lower end of the first rotating shaft 7 is inserted into the U-shaped axis end groove 18 to form a match with the second rotating shaft 17, and the axis end groove 18 can be fixedly connected to the lower end of the first rotating shaft 7 through a cylindrical pin 19, so that a coaxial connection is formed between the first rotating shaft 7 and the second rotating shaft 17.

[0051] The lower end of the second rotating shaft 17 can pass through the lower end of the body 16 and can be rotatably connected to the rotating driving mechanism 13 through a coupling 3 .

[0052] See also Figure 1-Figure 2 The rotation drive mechanism 13 may include a motor 13, for example, a servo motor 13. The motor 13 may be connected to the coupling 3 via a transmission (reducer) 12, thereby forming a coaxial connection between the motor 13 (motor 13 shaft), the transmission 12 (transmission drive shaft), the coupling 3, the second shaft 17 and the first shaft 7. Such a setting can maximize the accuracy of detection.

[0053] See also Figure 5 In a preferred embodiment, a fixing seat 21 may be installed on the lower end surface of the housing 30 of the rotating mechanism 6; meanwhile, a supporting seat 20 matching with the fixing seat 21 may be installed on the upper end surface of the body 16 of the supporting mechanism 5. In this way, the rotating mechanism 6 is supported on the supporting mechanism 5 through the installation and matching between the fixing seat 21 and the supporting seat 20.

[0054] Furthermore, an insert connection can be formed between the fixed seat 21 and the supporting seat 20 (horseshoe structure) through the upper and lower matching structure of the pin and the pin groove, such as the upper and lower matching structure of the fixed pin 22 and the pin groove, so that the rotating mechanism 6 can be placed on the supporting mechanism 5 for inspection, and the rotating mechanism 6 can be easily removed from the supporting mechanism 5 after inspection, while ensuring that the inspection accuracy is not affected by loading and unloading.

[0055] Channels are respectively provided in the middle of the fixing seat 21 and the supporting seat 20 so that the lower end of the first rotating shaft 7 can extend and fit through the fixing seat 21 and the supporting seat 20. At the same time, the upper end of the second rotating shaft 17 can also enter the supporting seat 20, so that it can be connected with the lower end of the first rotating shaft 7 through the shaft end groove 18 and locked with a cylindrical pin 19. In a specific example, the main body of the first rotating shaft 7 can be a hexagonal rod, the shaft end groove 18 has a cylindrical slot hole that can accommodate the hexagonal rod-shaped first rotating shaft 7, and the cylindrical pin 19 can be a cylindrical pin 19; the hexagonal rod-shaped upper end of the first rotating shaft 7 is processed into a cylindrical shape and can have an arc-shaped upper end face or a flat upper end face so as to form a rotational fit with the upper cover 8.

[0056] See also Figure 3 In conjunction with Figure 1-Figure 2 . The device of the present invention can be set on a base 1 and fixed by a bracket 2. Specifically, the motor 13 can be vertically installed on the base 1, and the rotating shaft of the motor 13 is in a vertical upward state. The input end transmission shaft of the reducer 12 is coaxially connected to the rotating shaft of the motor 13, and the output end transmission shaft of the reducer 12 is in a vertical upward state. The housing of the reducer 12 is fixed on the bracket 2. The coupling 3 and the support mechanism 5 are installed on the output end transmission shaft of the reducer 12 in sequence, and the upper end of the body 16 of the support mechanism 5 can be installed and fixed between a protective cover 10 and the bracket 2.

[0057] A protective shell 14 may also be installed on the side of the body 16 to protect the body 16 and the coupling 3 , and the protective shell 14 may be installed and fixed to the bracket 2 through the lower end of the protective shell 14 .

[0058] The upper end of the supporting mechanism 5 (main body 16 ) passes through the top of the protective cover 10 , so that the rotating mechanism 6 to be detected can be directly installed with the main body 16 by insertion.

[0059] Insert the first rotating shaft 7 into the rotating center of the rotating mechanism 6, and let the lower end of the first rotating shaft 7 fall downward into the U-shaped shaft end groove 18 at the upper end of the second rotating shaft 17 in the supporting mechanism 5. Through the observation window 4 set on the side of the protective cover 10, insert the cylindrical pin through the through hole on the side of the supporting seat 20 into the U-shaped shaft end groove 18 and the mounting hole on the first rotating shaft 7, so that the first rotating shaft 7 and the second rotating shaft 17 are installed and fixed. Further, the first rotating shaft 7 and the rotating mechanism 6 are fixed.

[0060] A cantilever 9 is vertically arranged on the bracket 2, and an upper cover 8 is installed on the upper end of the cantilever 9, and the upper cover 8 is buckled on the upper end of the first rotating shaft 7 to form a rotational fit with the upper end of the first rotating shaft 7, so that the upper end of the first rotating shaft 7 is relatively fixed through the upper cover 8, the cantilever 9 and the motor 13. The first rotating shaft 7, the upper cover 8 and the cantilever 9 serve as components of the balancing mechanism 7, 8, 9.

[0061] In a preferred embodiment, the upper cover 8 is horizontally connected to the cantilever 9, the upper end surface of the first rotating shaft 7 is arc-shaped, and a bearing having a groove with an arc-shaped bottom surface is provided on the lower end surface of the upper cover 8, and the first rotating shaft 7 abuts against the arc-shaped bottom surface of the groove of the bearing of the upper cover 8 through its arc-shaped upper end surface, so that a rotational fit is formed between the first rotating shaft 7 and the upper cover 8. Alternatively, the upper end surface of the first rotating shaft 7 is a plane, and a bearing having a groove with a plane bottom surface is provided on the lower end surface of the upper cover 8, and the first rotating shaft 7 abuts against the plane bottom surface of the groove of the bearing of the upper cover 8 through its plane upper end surface, so that a rotational fit is formed between the first rotating shaft 7 and the upper cover 8.

[0062] See also Figure 6 In conjunction with Figure 1-Figure 3 . Further, the upper cover 8 is a combined structure, which is provided with a first horizontal portion 23, a second horizontal portion 29 and a vertical portion 27. Among them, the first horizontal portion 23 is protrudingly arranged on one end (the left end in the figure) of the second horizontal portion 29, and a bearing with an arc-shaped groove is arranged on the lower end surface of the first horizontal portion 23. A horizontal fixed shaft 26 is arranged on the side of the vertical portion 27, and the other end (the right end in the figure) of the second horizontal portion 29 is sleeved on the fixed shaft 26 through an axial hole, so that the second horizontal portion 29 can rotate relative to the vertical portion 27 and can be fixed to the vertical portion 27 through a clamp 25 sleeved on the fixed shaft 26. A horizontal mounting plate 15 is arranged at the upper end of the cantilever 9, and the lower end of the vertical portion 27 passes through the mounting plate 15 and can be fixed to the mounting plate 15 through a nut 28, so that the relative position between the upper cover 8 and the upper end of the first rotating shaft 7 can be adjusted by adjusting the insertion depth and relative angle of the lower end of the vertical portion 27 on the mounting plate 15. In this way, by arranging a combined upper cover 8 structure with three-direction adjustment functions on the balancing mechanisms 7, 8, and 9, in cooperation with the first rotating shaft 7, cantilever 9 and bracket 2, it can be used to accurately adjust the verticality between the first rotating shaft 7 and the rotating mechanism 6, thereby ensuring that the first rotating shaft 7 and the rotation center of the rotating mechanism 6 and the motor 13 are always in a coaxial state.

[0063] In a preferred embodiment, a mass block 24 is further provided on the upper cover 8. The mass block 24 pressed on the upper cover 8 can improve the stability of the bearing with the arc-shaped groove on the upper cover 8 and the first rotating shaft 7 when they are matched, and prevent the first rotating shaft 7 from shaking or escaping from the constraint of the upper cover 8 due to the influence of torsion during the rotation process.

[0064] See also Figure 1 In a preferred embodiment, the control module 11 may include a servo driver and a host computer. The servo driver is connected to the motor 13, and the host computer obtains the torque value or load rate value from the motor 13 collected by the servo driver and can display it on a display.

[0065] The present invention also provides a method for detecting the rotation performance of a rotating mechanism, which can be implemented using the above-mentioned device for detecting the rotation performance of a rotating mechanism (but is not limited thereto).

[0066] A method for detecting the rotation performance of a rotating mechanism of the present invention may include:

[0067] Using a rotation drive mechanism 13, the rotation mechanism 6 is driven to rotate around its rotation center from one side of the rotation center of the rotation mechanism 6 to be detected;

[0068] Obtain the torque value or load rate value of the rotation drive mechanism 13 as a basis for evaluating whether the rotation performance of the rotation mechanism 6 is qualified; wherein

[0069] Determine whether the torque value or load rate value of the rotation drive mechanism 13 is greater than the torque setting value or the load rate setting value. If not, determine that the rotation performance of the rotation mechanism 6 is qualified. If so, determine that the rotation performance of the rotation mechanism 6 is unqualified.

[0070] For example, the above-mentioned device for detecting the rotation performance of the rotating mechanism can be used to detect the rotation performance of the rotating mechanism 6 used in the coating vacuum chamber. After the rotating mechanism 6 is installed on the above-mentioned device, the opening and closing of the motor 13 can be controlled and detected through the servo driver and the host computer. The host computer can collect parameters such as the speed and current of the motor 13 when the motor 13 is running under load through the servo driver, and obtain the torque value or load rate value data of the motor 13 through calculation, as a basis for evaluating whether the rotation performance of the rotating mechanism 6 is qualified.

[0071] According to the corresponding relationship between the rotation resistance of the rotating mechanism 6 itself and the torque or load rate of the motor 13, the rotation performance of the rotating mechanism 6 is characterized by collecting the torque value or load rate value of the motor 13 and comparing it with the torque setting value or load rate setting value. It can objectively detect whether the rotation performance of the rotating mechanism 6 after assembly and maintenance is qualified, and can effectively and quickly detect the torque value of the periodic rotation of the rotating mechanism 6 and the normal maintenance cycle.

[0072] Among them, when the torque value or load rate value of the rotation drive mechanism 13 obtained is less than or equal to the torque setting value or the load rate setting value, the host computer can determine that the rotation performance of the rotation mechanism 6 is qualified, that is, the rotation resistance of the rotation mechanism 6 in this state is small. On the contrary, when the torque value or load rate value of the rotation drive mechanism 13 obtained is greater than the torque setting value or the load rate setting value, the host computer determines that the rotation performance of the rotation mechanism 6 is unqualified, that is, the rotation resistance of the rotation mechanism 6 in this state is large, and it is easy to get stuck or even stuck in actual work. The host computer can display the data and the judgment result through the display.

[0073] The torque setting value or the load factor setting value can be determined based on the empirical value obtained from the accumulated detection data and can be adjusted.

[0074] In addition, the host computer can set overload protection to prevent the motor 13 from being overloaded due to excessive torque of the rotating mechanism 6. For example, when the torque value or load rate value of the rotating drive mechanism 13 obtained is greater than a preset range of the torque setting value or the load rate setting value, the host computer can stop the operation of the rotating drive mechanism 13 through the servo driver and alarm.

[0075] Furthermore, the preset amplitude can be set to be 20% to 60% greater than the torque setting value or the load rate setting value, so that the detection has a higher safety.

[0076] The present invention can simulate the actual rotation working state of the rotating mechanism 6 in the vacuum coating cavity, and can measure the torque value or load rate value data in the cold and hot states before and after entering and exiting the furnace, so that the measured results are more effective and suitable for promotion.

[0077] Those skilled in the art should recognize that the above embodiments are only used to illustrate the present invention, and are not intended to limit the present invention. As long as they are within the spirit of the present invention, any changes or modifications to the above embodiments will fall within the scope of the claims of the present invention.

Claims

1. A device for detecting the rotation performance of a rotating mechanism, characterized in that: It comprises a balancing mechanism, a detected rotating mechanism, a supporting mechanism and a rotating driving mechanism which are sequentially connected to form a rotating connection, and a control module connected to the rotating driving mechanism; wherein The balancing mechanism is provided with a first rotating shaft, and the supporting mechanism is provided with a second rotating shaft. The upper end of the first rotating shaft is rotatably fixed, and the lower end of the first rotating shaft is passed through the rotation center of the rotating mechanism to form the central rotating shaft of the rotating mechanism. At the same time, the lower end of the first rotating shaft also passes through the rotating mechanism and is coaxially fixedly connected with the upper end of the second rotating shaft, and the lower end of the second rotating shaft is rotatably connected with the rotating drive mechanism. Obtaining a torque value or a load rate value from the rotation drive mechanism through the control module as a basis for evaluating whether the rotation performance of the rotation mechanism is qualified; Wherein, the balancing mechanism is further provided with an upper cover and a cantilever, the upper end of the first rotating shaft is rotatably engaged with the upper cover, and the upper cover is relatively fixed with the rotating drive mechanism through the cantilever; The support mechanism is also provided with a hollow body, the second rotating shaft is cooperatively arranged in the hollow interior of the body, the upper end of the second rotating shaft has an axis end groove, the lower end of the first rotating shaft is cooperatively accommodated in the axis end groove, and is coaxially fixedly connected with the upper end of the second rotating shaft, the lower end of the second rotating shaft passes through the lower end of the body, and is rotatably connected with the rotation drive mechanism through a coupling; The rotating mechanism is provided with a shell outside, a fixing seat is provided on the lower end surface of the shell, and a supporting seat is provided on the upper end surface of the body. The rotating mechanism is supported on the supporting mechanism through the insertion cooperation between the fixing seat and the supporting seat, and the first rotating shaft is also cooperated and penetrated through the fixing seat and the supporting seat; The rotation driving mechanism is arranged on a base and fixed on the base through a bracket. The upper end of the cantilever is connected to the upper cover, and the lower end of the cantilever is fixed on the bracket.

2. The device for detecting the rotation performance of a rotating mechanism according to claim 1, characterized in that: The fixing seat and the supporting seat are connected by an insertion type through the upper and lower cooperation of a pin and a pin groove. The upper end of the second rotating shaft also enters the supporting seat, and the shaft end groove is connected to the lower end of the first rotating shaft through a cylindrical pin.

3. The device for detecting the rotation performance of a rotating mechanism according to claim 1, characterized in that: The rotation driving mechanism comprises a motor, and the motor is connected to the second rotating shaft through a transmission.

4. The device for detecting the rotation performance of a rotating mechanism according to claim 1, characterized in that: The upper cover is horizontally connected to the cantilever, the upper end surface of the first rotating shaft is arc-shaped or flat, and a bearing with an arc-shaped bottom groove or a bearing with a flat bottom groove is correspondingly provided on the lower end surface of the upper cover. The first rotating shaft abuts against the arc-shaped or flat bottom surface of the bearing groove of the upper cover through its arc-shaped or flat upper end surface, so that a rotational fit is formed between the first rotating shaft and the upper cover.

5. The device for detecting the rotation performance of a rotating mechanism according to claim 4, characterized in that: The upper cover is provided with a first horizontal portion, a second horizontal portion and a vertical portion, the first horizontal portion protruding from one end of the second horizontal portion, the bearing being provided on the lower end surface of the first horizontal portion, a horizontal fixed shaft being provided on the side surface of the vertical portion, the other end of the second horizontal portion being sleeved on the fixed shaft through an axial hole, and being fixed to the vertical portion through a clamp sleeved on the fixed shaft, a horizontal mounting plate being provided at the upper end of the cantilever, the lower end of the vertical portion passing through the mounting plate, and being fixed to the mounting plate through a nut, and a mass block being provided on the upper cover.

6. The device for detecting the rotation performance of a rotating mechanism according to claim 3, characterized in that: The control module includes a servo driver and a host computer. The servo driver is connected to the motor. The host computer obtains the torque value or load rate value from the rotation drive mechanism collected by the servo driver and displays it through a display.

7. A method for detecting the rotation performance of a rotating mechanism, using the device for detecting the rotation performance of a rotating mechanism as claimed in claim 1, characterized in that: include: Using a rotation drive mechanism, driving the rotation mechanism to rotate around its rotation center from one side of the rotation center of the rotation mechanism to be detected; Obtaining a torque value or a load rate value of the rotation drive mechanism as a basis for evaluating whether the rotation performance of the rotation mechanism is qualified; in Determine whether the torque value or load rate value of the rotation drive mechanism obtained is greater than the torque setting value or the load rate setting value. If not, determine that the rotation performance of the rotation mechanism is qualified. If so, determine that the rotation performance of the rotation mechanism is unqualified.

8. The method for detecting the rotation performance of a rotating mechanism according to claim 7, characterized in that: The rotation drive mechanism is arranged coaxially with the rotation center of the rotation mechanism to drive the rotation mechanism to rotate synchronously around its rotation center.

9. The method for detecting the rotation performance of a rotating mechanism according to claim 7, characterized in that: When the acquired torque value or load rate value of the rotary drive mechanism is greater than a preset amplitude of the torque setting value or the load rate setting value, the operation of the rotary drive mechanism is stopped and an alarm is issued.

10. The method for detecting the rotation performance of a rotating mechanism according to claim 9, characterized in that: The torque setting value or the load rate setting value is determined according to an empirical value or a rule.

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