Laser device

Abstract

The present invention relates to a laser device, which includes a laser oscillator, a mirror frame assembly, a corrector, a diagnostic module, a calculation module and a controller. The diagnostic module re-diagnoses whether the optical path distortion occurs by re-calculating the optical path difference between the processing optical path changed by the drive motor according to the target drive speed and the target drive time and the reference processing optical path. When the re-calculated optical path difference is greater than the reference optical path difference, the calculation module re-calculates the target drive speed and the target drive time based on the re-calculated optical path difference, and the controller re-drives the drive motor according to the re-calculated target drive speed and the target drive time.

Description

Technical Field

[0001] The present invention relates to a laser device. Background Art

[0002] Recently, in the field of processing equipment such as cutting equipment and marking equipment, the use of laser beams having excellent physical properties has been increasing.

[0003] Typically, a laser device includes a laser oscillator that generates and oscillates a laser beam; an optical system that transmits the laser beam oscillated in the laser oscillator according to a predetermined transmission method; and a laser nozzle that focuses the laser beam transmitted through the optical system and irradiates the object to be processed.

[0004] On the other hand, if the alignment of the optical components in the optical system changes due to external forces and vibrations, wear and aging of the laser device's structural elements, or other factors, causing the laser beam's optical path to become distorted, the laser beam will be transmitted to the laser nozzle while deviating from the predetermined reference optical path. Consequently, the laser beam emitted from the laser nozzle will irradiate the object being processed while deviating from the predetermined processing position, adversely affecting the processing quality of the object.

[0005] Therefore, the existing laser device does not include a structure that can diagnose and correct the optical path distortion of the laser beam, and thus cannot quickly deal with the problem of optical path distortion of the laser beam. Summary of the Invention

[0006] The present invention is intended to solve the above-mentioned problems of the prior art, and an object of the present invention is to provide a laser device with an improved structure so as to be able to automatically diagnose the distortion of the optical path of the laser beam.

[0007] Furthermore, an object of the present invention is to provide a laser device having an improved structure so as to automatically correct the distortion of the optical path of the laser beam.

[0008] The laser device of a preferred embodiment of the present invention for solving the above-mentioned problem comprises: a laser oscillator for oscillating a laser beam; a mirror frame assembly provided with a mounting side reflector for transmitting by reflecting the above-mentioned laser beam; a corrector capable of changing the correction state of the above-mentioned mounting side reflector according to a rotation angle and a rotation direction, and formed with a knob and a drive motor, the above-mentioned knob adjusts the processing light path irradiated with the above-mentioned laser beam in a manner corresponding to the displacement of the reflection angle of the above-mentioned mounting side reflector caused by the change of the above-mentioned correction state, and the above-mentioned drive motor drives the above-mentioned knob to rotate; a diagnostic module for calculating the optical path difference between a preset reference processing light path and the above-mentioned processing light path to diagnose whether the above-mentioned processing light path is distorted; and a calculation module for calculating the target of the above-mentioned drive motor for changing the correction state of the above-mentioned mounting side reflector when the above-mentioned optical path difference is greater than the preset reference optical path difference. a target driving speed and a target driving time, thereby correcting the optical path distortion in such a manner that the optical path difference reaches below a preset reference optical path difference; and a controller, driving the driving motor according to the target driving speed and the target driving time to correct the optical path distortion, the diagnostic module re-diagnoses whether the optical path distortion occurs by recalculating the optical path difference between the processing optical path changed by the driving motor according to the target driving speed and the target driving time and the reference processing optical path, and when the recalculated optical path difference is greater than the reference optical path difference, the calculation module recalculates the target driving speed and the target driving time based on the recalculated optical path difference, and the controller re-drives the driving motor according to the recalculated target driving speed and the target driving time.

[0009] Preferably, the re-diagnosis of the optical path distortion, the target driving speed and the target driving time, and the re-correction of the optical path distortion are repeatedly performed until the optical path difference reaches or falls below a preset reference optical path difference.

[0010] Preferably, the calculation module calculates the target driving speed and the target driving time based on the target driving speed and the target driving time and the driving characteristics of the driving motor. The driving characteristics of the driving motor will result in differences in the actual driving speed and the actual driving time of the driving motor generated by the controller applying a command signal corresponding to the target driving speed and the target driving time to the driving motor.

[0011] Preferably, the present invention also includes a database, which will store the optical path difference caused by the difference between the actual driving speed and the actual driving time and the target driving speed and the target driving time when the controller drives the driving motor to correct the optical path distortion as learning data, and the calculation module will calculate the target driving speed and the target driving time based on the learning data.

[0012] Preferably, the present invention also includes a laser nozzle assembly, which is provided with a laser nozzle and a nozzle side detection component. The laser nozzle irradiates the laser beam transmitted from the mounting side reflector along the processing light path to the processing object. The nozzle side detection component detects the laser beam transmitted to the laser nozzle to output a nozzle side detection signal containing vector information of the processing light path. The diagnostic module analyzes the nozzle side detection signal to calculate the optical path difference.

[0013] Preferably, the nozzle side detection component has a nozzle side detection surface, which is arranged in a manner capable of irradiating the laser beam, and is provided with a coordinate system for specifying the position of the beam point of the laser beam. The diagnostic module calculates the optical path difference based on the position coordinates of the beam point of the laser beam irradiated onto the nozzle side detection surface.

[0014] Preferably, if the distance between the preset nozzle side reference point of the above-mentioned nozzle side detection surface and the above-mentioned light beam spot is greater than the preset reference interval, the above-mentioned diagnostic module diagnoses that the above-mentioned light path distortion has occurred, and the above-mentioned calculation module calculates the above-mentioned target driving speed and the above-mentioned target driving time so as to be able to change the correction state of the above-mentioned mounting side reflector to correct the distance between the above-mentioned nozzle side reference point and the above-mentioned light beam spot to be below the above-mentioned reference interval.

[0015] Preferably, the plurality of the above-mentioned frame assemblies are respectively located in an order in a preset transmission order, the plurality of the above-mentioned correctors are capable of respectively changing the correction state of one of the plurality of the above-mentioned frame assemblies, and the plurality of the above-mentioned frame assemblies also respectively include an installation side detection component that outputs an installation side detection signal containing vector information of the above-mentioned processing optical path by detecting the above-mentioned laser beam, and the above-mentioned diagnostic module analyzes the above-mentioned installation side detection signal to calculate the above-mentioned optical path difference.

[0016] Preferably, the above-mentioned installation side detection component has an installation side detection surface, which is arranged in a manner capable of irradiating the above-mentioned laser beam, and is set with a coordinate system for specifying the position of the beam point of the above-mentioned laser beam. The above-mentioned diagnostic module calculates the above-mentioned optical path difference based on the position coordinates of the beam point of the above-mentioned laser beam irradiated to the above-mentioned installation side detection surface.

[0017] Preferably, if the distance between the preset mounting side reference point of the above-mentioned mounting side detection surface and the above-mentioned light beam spot is greater than the preset reference interval, the above-mentioned diagnostic module diagnoses that the above-mentioned light path distortion has occurred, and the above-mentioned calculation module calculates the above-mentioned target driving speed and the above-mentioned target driving time so as to be able to change the correction state of the above-mentioned mounting side reflector to correct the distance between the above-mentioned mounting side reference point and the above-mentioned light beam spot to be below the above-mentioned reference interval.

[0018] Preferably, the above-mentioned diagnostic module diagnoses whether the above-mentioned optical path distortion occurs in the above-mentioned mounting side reflector of the above-mentioned mirror frame assembly located in one order in the above-mentioned transmission order by analyzing the above-mentioned mounting side detection signal outputted from the above-mentioned mounting side detection component of the above-mentioned mirror frame assembly located in the next order of the above-mentioned order. In the case where it is diagnosed that the above-mentioned optical path distortion occurs in the above-mentioned mounting side reflector of the above-mentioned mirror frame assembly located in the above-mentioned order, the above-mentioned calculation module calculates the above-mentioned target driving speed and the above-mentioned target driving time of the above-mentioned driving motor of the corrector among the plurality of the above-mentioned correctors that can change the correction state of the above-mentioned mounting side reflector of the above-mentioned mirror frame assembly located in the above-mentioned order.

[0019] Preferably, the diagnosis module diagnoses whether optical path distortion occurs in the mounting side reflectors of the plurality of mirror frame assemblies according to the transmission sequence.

[0020] The present invention relates to a laser device. The present invention can use various sensors to track the optical path of the laser beam, thereby automatically diagnosing whether the optical path of the laser beam is distorted and automatically identifying the structural elements that cause the optical path distortion of the laser beam.

[0021] In addition, the present invention can drive the driving motor provided in the corrector by speed control, and perform the correction operation of the optical path distortion of the laser beam by adjusting the optical path multiple times, so that the irradiation position of the laser beam (the irradiation position of the test beam point) gradually follows the zero point, thereby automatically correcting the optical path distortion of the laser beam.

[0022] By automatically diagnosing and correcting the optical path distortion of the laser beam, the present invention can improve the processing quality of the processing object and embody the automation of the laser device. BRIEF DESCRIPTION OF THE DRAWINGS

[0023] Figure 1 A diagram showing a schematic structure of a laser device according to a preferred embodiment of the present invention.

[0024] Figure 2 A partial cross-sectional view of the frame assembly.

[0025] Figure 3 A partial cross-sectional view of the mirror holder assembly showing a state where the side reflector is installed and led out from the processing light path.

[0026] Figure 4 A top view of the frame assembly.

[0027] Figure 5 A top view of the mirror holder assembly showing the state where the side reflector is installed and led out from the processing light path.

[0028] Figure 6 A diagram for explaining a method of deriving an installation-side detection optical path using an installation-side sensor.

[0029] Figure 7 This figure shows the state of the processing optical path and the mounting side detection optical path formed when the laser beam is transmitted to the mirror frame assembly in a state where the optical path is not distorted.

[0030] Figure 8 This diagram shows how the processing optical path and the mounting-side detection optical path are formed when a laser beam is transmitted to a mirror frame assembly in a state where the optical path is distorted.

[0031] Figure 9 It is a partial cross-sectional view showing the schematic structure of the laser nozzle assembly.

[0032] Figure 10 To show Figure 9 A partial cross-sectional view showing a nozzle-side reflector being inserted into a processing light path.

[0033] Figure 11 This figure is used to explain a method of deriving a nozzle-side detection light path using a nozzle-side sensor.

[0034] Figure 12 This figure shows how the processing optical path and the nozzle-side detection optical path are formed when the laser beam is transmitted to the laser nozzle assembly without optical path distortion.

[0035] Figure 13 This figure shows how the processing optical path and the nozzle-side detection optical path are formed when a laser beam is transmitted to a laser nozzle assembly in a state where the optical path is distorted.

[0036] Figure 14 A diagram illustrating a method for diagnosing whether or not optical path distortion occurs in a laser device.

[0037] Figures 15 to 22 A diagram for explaining a first method of correcting optical path distortion using a corrector.

[0038] Figures 23 to 29 A diagram for explaining a second method of correcting optical path distortion using a corrector.

[0039] Figure 30 A diagram for explaining a third method of correcting optical path distortion using a corrector.

[0040] Description of Reference Signs

[0041] 1: Laser device

[0042] 10: Laser Oscillator

[0043] 20: Optical system

[0044] 30: Laser nozzle assembly

[0045] 40: Controller

[0046] 50: Diagnostic module

[0047] 60: Computing module

[0048] 70: Database

[0049] 200: Frame assembly

[0050] 210: Frame

[0051] 211: Basic Blocks

[0052] 212: Mirror Plate

[0053] 213: Fixed block

[0054] 214: Fastening parts

[0055] 215: Sensor block

[0056] 220: Install side reflectors

[0057] 230: Corrector

[0058] 232: Knob

[0059] 234: Drive motor

[0060] 240: Install side transfer components

[0061] 250: Noise filter

[0062] 260: Install side sensor

[0063] 310: Laser nozzle

[0064] 312: Condenser

[0065] 320: Nozzle side reflector

[0066] 330: Nozzle side transfer component

[0067] 340: Noise filter

[0068] 350: Nozzle side sensor

[0069] LB: Laser beam

[0070] P: Processing object

[0071] LB m : Indicator light

[0072] LB p :Processing light

[0073] OP p :Processing light path

[0074] OP rp1 :First reference processing light path

[0075] OP rp2 : Second reference processing light path

[0076] OP s1 :Installation side detection optical path

[0077] OP rs1 :First reference detection optical path

[0078] OP s2 :Nozzle side detection light path

[0079] OP rs2 : Second reference detection optical path

[0080] BS m1 : Test beam point on the installation side

[0081] BS m2 : Test beam point on the nozzle side

[0082] BS r1 : Installation side reference beam point

[0083] BS r2 : Nozzle side reference beam point

[0084] D1, D2, D3, D4: Optical path difference DETAILED DESCRIPTION

[0085] The following describes some embodiments of the present invention in detail using the accompanying drawings. When assigning reference numerals to structural elements in the various drawings, identical structural elements, even if shown in different drawings, are assigned the same reference numerals whenever possible. Furthermore, when describing the embodiments of the present invention, if a detailed description of a related known structure or function is determined to obscure the understanding of the embodiments of the present invention, the detailed description thereof will be omitted.

[0086] In the process of describing the structural elements of the embodiments of the present invention, the terms such as first, second, A, B, (a), (b), etc. may be used. The above terms are only used to distinguish between two structural elements, and the nature, order, or sequence of the corresponding structural elements are not limited to their terms. Moreover, as long as they are not clearly defined, the meanings of all terms used herein, including technical or scientific terms, are the same as those generally understood by ordinary technicians in the technical field to which the present invention belongs. The meanings of the terms defined in commonly used dictionaries are the same as those in the relevant technical context, and as long as they are not clearly defined in this specification, they cannot be interpreted as ideal or excessive forms of meaning.

[0087] Figure 1 A diagram showing a schematic structure of a laser device according to a preferred embodiment of the present invention.

[0088] Reference Figure 1 The laser device 1 of a preferred embodiment of the present invention may include: a laser oscillator 10 for oscillating a laser beam LB; an optical system 20, which can sequentially transmit the laser beam LB transmitted from the laser oscillator 10 according to a preset reference transmission sequence S, and at the same time, can provide optical path information of the laser beam LB; a laser nozzle assembly 30, which can focus the laser beam LB transmitted from the optical system 20 to irradiate the processing object P, and at the same time, can provide optical path information of the laser beam LB; and a controller 40, which controls the overall drive of the laser device 1 based on information related to the optical path of the laser beam LB provided from the optical system 20 and the laser nozzle assembly 30, thereby correcting the optical path distortion of the laser beam LB.

[0089] First, the laser oscillator 10 can be processed according to the optical path OP p Oscillating laser beam LB. Processing optical path OP p It refers to the optical path of the laser beam LB oscillated from the laser oscillator 10, which passes through the optical system 20 and the laser nozzle assembly 30 in sequence and then irradiates the object P. The processing optical path OP p According to the installation side reflector 220 and other processing optical paths OP described later, p The corrective status of multiple affected components changes.

[0090] Furthermore, the laser oscillator 10 can be configured according to the processing optical path OP. p Selectively oscillating processing light LB with different frequency bands p and indicator light LB m Furthermore, the laser oscillator 10 can make the processing light LB p With indicator light LB m Therefore, the processing light LB oscillated from the laser oscillator 10 p and indicator light LB mAlong the same optical path, that is, along the processing optical path OP p Teleport.

[0091] Processing light LB p The laser beam LB used for processing the object P has a frequency band that is absorbed by the object P at a predetermined reference absorption rate or higher. p The type of laser beam used is not particularly limited. Depending on the type of the object P to be processed, at least one of a plurality of laser beams may be used as the processing light LB. p use.

[0092] Indicator light LB m The laser beam LB used for the optical path of the diagnosis laser beam LB has a visible light band that can be observed with the naked eye or photographed with a camera. m With processing light LB p Low output to prevent the multiple sensors 260, 350 described later from being affected by the indicator light LB m damage, but not limited to this. Can be used as indicator light LB m The type of laser beam LB used is not particularly limited. Depending on the types of the plurality of sensors 260, 350 described later, at least one of the plurality of laser beams may be used as the indicator light LB. m use.

[0093] The controller 40 can control the laser oscillator 10 to selectively oscillate the processing light LB according to the preset process conditions. p and indicator light LB m For example, when processing the object P, the controller 40 can oscillate the processing light LB. p For example, in the case of diagnosing the optical path of the laser beam LB, the controller 40 can oscillate the indicator light LB. m The laser oscillator 10 is controlled in this manner.

[0094] On the other hand, the controller 40 selectively oscillates the processing light LB p and indicator light LB m In other words, in addition to the processing light LB p and indicator light LB m In addition, the controller 40 may also selectively oscillate other types of laser beams LB.

[0095] Next, the optical system 20 is provided between the laser oscillator 10 and the laser nozzle assembly 30 so as to allow the laser beam LB oscillated from the laser oscillator 10 to travel along the processing optical path OP. pTo this end, the laser nozzle assembly 30 is conveyed. Figure 1 As shown, the optical system 20 may include a mirror frame assembly 200 having a mounting side reflector 220 described below.

[0096] The number of mirror frame assemblies 200 that can be installed is not particularly limited. For example, the optical system 20 can utilize multiple mounting side reflectors 220 to reflect the laser beam LB in sequence according to the reference transmission sequence S and transmit the laser beam along the processing optical path OP. p The transmission method has multiple frame assemblies 200. Figure 1 As shown, the plurality of mirror frame assemblies 200 are respectively arranged in one order of the reference transmission order S, thereby being able to sequentially transmit the laser beam LB along the reference transmission order S. In addition, preferably, the plurality of mirror frame assemblies 200 are arranged in different directions, heights, etc., so that the laser beam LB can be reflected by the mounting side reflector 220 described later, thereby converting the processing optical path OP into a uniform optical path. p The specific structure of the plurality of mirror frame assemblies 200 will be described later.

[0097] Next, the laser nozzle assembly 30 can irradiate the object P with the laser beam along the processing light path OP from the optical system 20. p The specific structure of the laser nozzle assembly 30 will be described later.

[0098] Figure 2 It is a partial cross-sectional view of the frame assembly. Figure 3 A partial cross-sectional view of the mirror holder assembly showing a state where the side reflector is installed and led out from the processing light path.

[0099] Figure 4 is a top view of the frame assembly. Figure 5 A top view of the mirror holder assembly showing the state where the side reflector is installed and led out from the processing light path.

[0100] like Figures 2 to 5 As shown, the plurality of mirror frame assemblies 200 may respectively include: a mirror frame 210; a mounting side reflector 220, which reflects the laser beam LB to move along the processing optical path OP; p Corrector 230, changes the correction state of the mounting side reflector 220 to adjust the reflection angle of the mounting side reflector 220; mounting side transfer member 240, so that the mounting side reflector 220 is reciprocated along a preset transfer path to the mounting side detection optical path OP s1 Selectively guide along the processing light path OP p Noise filter 250 for removing the laser beam LB along the mounting side detection light path OP s1 and the mounting side sensor 260, detects the laser beam LB through the noise filter 250 to output the mounting side detection optical path OPs1 The vector information of the installation side optical path signal.

[0101] The mirror frame 210 is configured to move along the processing optical path OP. p The mounted side reflector 220 can be supported in such a manner that the transmitted laser beam LB is incident on the mounted side reflector 220. That is, the mirror frame 210 is configured so that the mirror frame assembly 200 located in the previous order of the mirror frame assembly 200 provided with the mirror frame 210 in the laser oscillator 10 or the reference transmission sequence S is arranged along the processing optical path OP. p The transmitted laser beam LB is incident on the installation side reflection mirror 220 in such a manner that the installation side reflection mirror 220 can be supported.

[0102] The structure of the above-mentioned frame 210 is not particularly limited. Figure 2 As shown, the mirror frame 210 may include: a base block 211 for providing processing light LB p and the irradiation path of other laser beams LB; a mirror plate 212, provided with a mounting side reflector 220, so that the laser beam LB passing through the base block 211 is incident on the mounting side reflector 220; a fixing block 213, mounted on the mirror plate 212 in a manner capable of fixing the mounting side reflector 220; a fastening component 214, used to fasten the base block 211 and the mirror plate 212; and a sensor block 215, provided with a mounting side sensor 260.

[0103] like Figure 2 As shown, the base block 211 may have a laser passage 211a formed therein so as to allow the laser beam LB to be irradiated. Preferably, the base block 211 is fixed to a predetermined position by bolts or other fixing members, but is not limited thereto.

[0104] The shape of the laser path 211a is not particularly limited and has a processing optical path OP that is aligned with the laser beam LB. p The corresponding shape. For example, Figure 2 As shown, the irradiation direction of the laser beam LB is changed to the vertical direction to change the processing light path OP p In the case where the side reflector 220 is installed so as to convert the extending direction of the laser beam into a vertical direction, the laser path 211a may have an "L" shape. Therefore, from the mirror frame assembly 200 located at the laser oscillator 10 or the above-mentioned previous sequence along the processing optical path OP p The transmitted laser beam LB enters the laser path 211a through the side opening 211b of the laser path 211a, and then enters the mounting side reflector 220. The laser beam LB reflected by the mounting side reflector 220 is converted into a processing optical path OP in a vertical direction along the extending direction. p The laser beam is irradiated and released through the other opening 211c of the laser path 211a.

[0105] like Figure 2 As shown, the mirror plate 212 may include an opening 212a that is open and formed to allow the installation side reflector 220 to be inserted therein, and a flange 212b that protrudes from the inner circumferential surface of the opening 212a to support the installation side reflector 220 inserted therein. The mirror plate 212 may be closely attached to one surface of the base block 211 via a fastening member 214, which will be described later.

[0106] The opening 212a has a shape corresponding to the mounting side reflector 220 so that the mounting side reflector 220 can be inserted therein. The flange 212b protrudes from the inner side surface of the opening 212a by a predetermined length so as to support the outer periphery of the mounting side reflector 220 inserted therein. The mounting side reflector 220 is inserted into the opening 212a with its outer periphery supported by the flange 212b, thereby being detachably attached to the mirror plate 212.

[0107] like Figure 2 As shown, the fixing block 213 has a pressurizing portion 213a protruding from one side so as to be inserted into the opening 212a. Preferably, the fixing block 213 is screwed to a portion of the mirror plate 212 by bolts (not shown), but the present invention is not limited thereto.

[0108] The pressurizing portion 213a can protrude by a predetermined height from one side of the fixing block 213 so as to contact the mounting side reflector 220 inserted into the opening 212a. The pressurizing portion 213a can apply pressure to the mounting side reflector 220 inserted into the opening 212a, thereby securing it in close contact with the flange 212b. Therefore, the pressurizing portion 213a can prevent the mounting side reflector 220 from flowing within the opening 212a due to external forces, vibrations, etc. Furthermore, the pressurizing portion 213a can receive heat applied to the mounting side reflector 220 by the laser beam LB through its contact surface with the mounting side reflector 220. Thus, the fixing block 213 can release heat transferred from the mounting side reflector 220 to the outside, thereby preventing damage to the mounting side reflector 220 from the high heat.

[0109] On the other hand, preferably, the fixing block 213 makes the indicator light LB m Transmission, so that the processing light LB p To this end, the fixing block 213 can be made of glass, selectively transmitting other indicator light LB m In particular, the incident surface of the fixing block 213 facing the mounting side reflector 220 and the emitting surface of the fixing block 213 facing the noise filter 250 described later can selectively transmit the indicator light LB. m Therefore, if Figure 3As shown, the mounting side reflector 220 is moved from the processing optical path OP by the mounting side transfer component 240 described later. p In the case of leading out, the indicator light LB passing through the opening 212a m After passing through the fixed block 213, the optical path OP can be detected toward the installation side. s1 The light is guided so as to be irradiated toward the installation-side sensor 260 .

[0110] The fastening member 214 can be fastened to the base block 211. For example, Figure 3 As shown, the fastening member 214 may include a fastening bolt 214a, the screw portion of which passes through the mirror plate 212 and is screwed to a portion of the base block 211; and a spring 214b formed between the head of the fastening bolt 214a and the mirror plate 212. Preferably, the spring 214b is a compression wire spring, but is not limited thereto.

[0111] The number of fastening components 214 is not particularly limited. Figure 4 As shown, the plurality of fastening members 214 may be disposed at predetermined intervals.

[0112] According to the fastening member 214 , the mirror plate 212 is elastically biased toward one side of the base block 211 by the elastic force provided by the spring 214 b .

[0113] like Figure 3 As shown, the sensor block 215 can transmit the indicator light LB of the fixed block 213. m The sensor block 215 is preferably screwed to a portion of the fixing block 213 using bolts or other fastening components (not shown), but this is not limiting. Within the sensor block 215, the noise filter 250 and the mounting-side sensor 260, described later, can be positioned at predetermined intervals.

[0114] like Figure 2 As shown, the mounting side reflector 220 has a shape corresponding to the opening 212a of the mirror plate 212. The type of reflector that can be used as the mounting side reflector 220 is not particularly limited, and the mounting side reflector 220 can be formed of a common reflector that totally reflects the laser beam.

[0115] The side reflector 220 can reflect the light from the laser oscillator 10 or the mirror assembly 200 in the above order along the processing light path OP according to the preset reflection angle. p The laser beam LB is transmitted. Therefore, the installed reflector can make the processing light path OP p The extending direction of the side reflector 220 is converted to a reflection angle. Figure 2As shown, the side reflector 220 can reflect the laser beam LB to the processing light path OP. p According to the above-mentioned installation side reflector 220, when the laser processing of the processing object P is performed, the processing light LB oscillated from the laser oscillator 10 is converted into a vertical direction. p The press-bending reference transmission sequence S may be sequentially transmitted and transferred to the laser nozzle assembly 30 through the mounting side reflectors 220 provided on the plurality of mirror frame assemblies 200 .

[0116] The corrector 230 can change the correction state of the mirror 220 mounted on the frame 210 and the mounting side mirror 220 of the frame 210. The structure of the corrector 230 is not particularly limited. Figure 2 As shown, the corrector 230 may include a knob 232 and a drive motor 234 to change the correction state of the mirror plate 212 and the mounting side reflector 220 of the mirror plate 212 according to the rotation direction and rotation angle. The above-mentioned knob 232 is installed on the mirror plate 212, and the above-mentioned drive motor 234 drives the rotation 232 to rotate.

[0117] like Figure 2 As shown, the knob 232 may have a bolt shape with threads formed on the outer circumference thereof. The knob 232 may be screwed to the mirror plate 212 in such a manner that its end is in press contact with a portion of the base block 211 .

[0118] The drive motor 234 is coupled to the shaft of the knob 232 so as to rotate the knob 232. The type of motor that can be used as the drive motor 234 is not particularly limited. Specifically, various motors such as ultrasonic motors, servo motors, and stepping motors can be used as the drive motor 234.

[0119] If the knob 232 is rotated by the drive motor 234, the mirror plate 212 can be gradually moved to a predetermined distance closer to the base block 211 or further away from the base block 211 according to the rotation direction and rotation angle of the knob 232. As a result, the corrector 230 can change the angle between the base block 211 and the mirror plate 212 with the fastening member 214 as the center, thereby changing the correction state of the mirror plate 212 and the mounting side reflector 220 mounted thereon. Therefore, the reflection angle of the mounting side reflector 220 with respect to the laser beam LB can be adjusted according to the driving method of the corrector 230, and accordingly, the processing optical path OP is included. p And installation side detection optical path OP s1 The optical path of the laser beam LB can be adjusted according to the driving mode of the corrector 230.

[0120] The number of the correctors 230 is not particularly limited. Figure 4As shown, the corrector 230 may include: a first corrector 230a, which is centered on the Y axis and can adjust the angle between the base block 211 and the mirror plate 212 to adjust the processing optical path OP. p And the installation side detection optical path OP described later s1 The optical path of the laser beam LB moves along the X direction perpendicular to the Y direction; and the second corrector 230b, with the X axis as the center, changes the angle between the base block 211 and the mirror plate 212 to include the processing optical path OP p And the installation side detection optical path OP described later s1 The optical path of the laser beam LB moves in the Y direction.

[0121] Furthermore, the first corrector 230a may include: a first knob 232a, which changes the angle between the base block 211 and the mirror plate 212 along the rotation direction and rotation angle with the Y axis as the center, so that the optical path of the laser beam LB moves along the X direction; and a first driving motor 234a, which rotates and drives the first knob 232a.

[0122] Furthermore, the second corrector 230b may include: a second knob 232b, which changes the angle between the base block 211 and the mirror plate 212 along the rotation direction and rotation angle with the X-axis as the center to move the optical path of the laser beam LB along the Y-direction; and a second driving motor 234b, which rotates and drives the second knob 232b.

[0123] According to the first corrector 230a and the second corrector 230b, the optical path of the laser beam LB can be adjusted individually along the X direction and the Y direction according to the driving methods of the first corrector 230a and the second corrector 230b.

[0124] The mounting side transport component 240 can move the mounting side reflector 220 toward the processing optical path OP. p Insert or remove from the processing light path OP p The installation side reflector 220 is reciprocated along the preset transfer path in a leading manner. The type of transfer member that can be used as the installation side transfer member 240 is not particularly limited. For example, the installation side transfer member 240 can be composed of a cylinder device. In this case, Figure 4 As shown, the installation-side transfer component 240 may include: a cylinder body 242 for providing driving force; and a cylinder rod 244 , which reciprocates along a preset transfer path through the cylinder body 242 and is combined with the installation-side reflector 220 .

[0125] The transport path of the mounting side reflector 220 can make the mounting side reflector 220 move toward the processing optical path OP. p Insert or remove from the processing light path OP pLead out to prevent the sensor block 15 and the noise filter 250 provided thereon, the mounting side sensor 260 and the mounting side reflector 220 from interfering with each other. Figure 4 and Figure 5 As shown, the transport path of the mounting side reflector 220 can be determined to a degree that allows the mounting side reflector 220 to reciprocate along the width direction. To this end, the mirror plate 212 may have an expansion portion 212c that expands along the transport direction of the mounting side reflector 220 (for example, the width direction of the mounting side reflector 220). Correspondingly, the fixed block 213 may have an expansion portion 213b that expands along the transport direction of the mounting side reflector 220 (for example, the width direction of the mounting side reflector 220). A moving path and a setting space are respectively formed between the expansion portions 212c and 213b. The above-mentioned moving path is connected to the open port 212a of the mirror plate 212 in a manner that allows the mounting side reflector 220 to move along the preset transport path. The above-mentioned setting space is provided with a mounting side transport component 240.

[0126] As described above, if the expansion parts 212c and 213b are formed with the installation side transfer member 240, the installation side transfer member 240 can be used to move the processing optical path OP according to the driving mode of the laser device 1. p Selectively insert and install the side reflector 220 or p Lead out.

[0127] For example, Figure 2 and Figure 4 As shown, in order to process the object P, the laser oscillator 10 oscillates the processing light LB. p In the case of the installation side transfer component 240 can be to the processing light path OP p Insert the mounting side reflector 220. Therefore, the mounting side reflector 220 can be installed along the processing light path OP by total reflection. p Transmitted processing light LB p To process the optical path OP p The extending direction of the reflective mirror 220 is converted to a reflective angle.

[0128] For example, Figure 3 and Figure 5 As shown, in order to diagnose the optical path of the laser beam LB, the laser oscillator 10 oscillates the indicator light LB. m In the case of the installation side transfer component 240 can be from the processing light path OP p Lead out and install side reflector 220. Therefore, if Figure 3 As shown, along the processing light path OP p The indicator light LB transmitted to the frame assembly 200 m Directly transmit the fixed block 213 to detect the optical path OP to the installation sides1 Among them, the installation side detection light path OPs1 is the indicator light LB m The optical path OP is a path that directly transmits the fixed block 213 without being reflected by the mounting side reflector 220. s1 and processing optical path OP p Has a preset first correlation. For example, Figure 2 and Figure 3 As shown, the installation side detection optical path OP s1 By installing the side reflector 220, the processing optical path OP of the section before the extension direction is changed p Form a straight line, and by installing the side reflector 220, the processing light path OP of the section after the extension direction is converted to the preset reflection angle p It has the same reflection angle as the installation side reflector 220 .

[0129] like Figure 3 As shown, the noise filter 250 is used to detect the optical path OP through the fixed block 213 to the installation side. s1 Guiding indicator light LB m The noise filter 250 is arranged between the fixed block 213 and the mounting side sensor 260 in an incident manner. m The optical path of the diagnostic laser beam LB is shaped in a manner suitable for removing the indicator light LB. m The noise filter 250 detects the noise in the optical path OP. s1 Guiding indicator light LB m The noise-free state is transmitted to the mounting-side sensor 260 , thereby preventing the problem of an error in the optical path diagnosis result of the laser beam LB due to noise.

[0130] The installation side sensor 260 can detect the indicator light LB after the noise is removed by the noise filter 250. m To output including the installation side detection optical path OP s1 The above-mentioned installation side optical path signal may include the installation side detection optical path OP s1 Position coordinates, installation side detection optical path OP s1 The extension direction and the detection optical path OP with other installation sides s1 Related vector information. Figure 3 As shown, the side sensor 260 is installed to detect the indicator light LB m The indicator light LB may be irradiated through the noise filter 250. m The installation side detection surface 260a.

[0131] Figure 6A diagram for explaining a method for deriving an installation-side detection optical path using an installation-side sensor. Figure 7 This figure shows the state of the processing optical path and the mounting side detection optical path when the laser beam is transmitted to the frame assembly in a state where the optical path is not distorted. Figure 8 This diagram shows how the processing optical path and the mounting-side detection optical path are formed when a laser beam is transmitted to a mirror frame assembly in a state where the optical path is distorted.

[0132] like Figure 6 As shown, the installation side sensor 260 can detect the indicator light LB irradiated to the installation side detection surface 260a. m Mounting side test beam point BS m1 The installation side detection surface 260a can be formed by a two-dimensional plane with a preset detection area, and a test beam spot BS on the installation side detection surface 260a can be set to specify the installation side detection surface 260a. m1 The position coordinates of the XY coordinate system.

[0133] To detect the installation side test beam point BS m1 The installation side sensor 260 may have at least one of the following components, that is, to shoot the installation side test beam spot BS m1 The image camera outputs the test beam point BS with the installation side m1 The position of the PSD sensor corresponds to the position detection signal and can provide other mounting side test beam points BS m1 In particular, when the mounting side sensor 260 has a camera, it is preferable to use a CCD camera as the camera, but the present invention is not limited to this.

[0134] The installation side optical path signal outputted from the installation side sensor 260 can be used to diagnose the optical path of the laser beam LB. Figure 1 As shown, the laser device 1 may further include a diagnosis module 50 for diagnosing the optical path of the laser beam LB by analyzing the installation-side optical path signal output from the installation-side sensor 260 .

[0135] Reference Figure 6 The diagnostic module 50 can detect the installation side test beam spot BS by the installation side sensor 260. m1 The position of the installation side detection optical path OP is derived based on the s1 After the vector, the installation side detection optical path OP can be calculated s1 With the preset first reference detection optical path OP rs1 In particular, the diagnostic module 50 can utilize the optical path OP along the mounting side to detect the optical path OP. s1The mounting side test beam spot BS irradiated to the mounting side detection surface 260a m1 The position coordinates along the first reference detection optical path OP rs1 The mounting side reference beam spot BS irradiated to the mounting side detection surface 260a r1 The difference in position coordinates is used to calculate the installation side detection optical path OP s1 With the first reference detection optical path OP rs1 The optical path difference D1.

[0136] Among them, the first reference detection optical path OP rs1 The laser beam LB is processed along the preset first reference optical path OP from the mounting side reflector 220 of the laser oscillator 10 or the mirror frame assembly 200 in the above order. rp1 Installation side detection optical path OP in case of transmission s1 . And, the first reference processing light path OP rp1 It refers to the processing optical path OP of the laser beam LB transmitted from the mounting side reflector 220 of the laser oscillator 10 or the mirror assembly 200 in the above order without optical path distortion. p As mentioned above, the installation side detection optical path OP s1 and processing optical path OP p There is a first correlation. In this regard, the first reference detection optical path OP rs1 It can also be processed with the first reference optical path OP rp1 Therefore, the installation side reference beam point BS r1 The position coordinates can be used to test the beam point BS on the mounting side m1 The position coordinates of the mounting side reference point are used to diagnose whether the optical path of the laser beam LB is distorted.

[0137] like Figure 7 As shown, in the indicator light LB m Along the first reference processing optical path OP rp1 Same processing light path OP p In the case of transmission, the installation side detection optical path OP s1 With the first reference detection optical path OP rs1 Same. And, as Figure 8 As shown, in the indicator light LB m Processing optical path OP from the first reference rp1 Along the processing optical path OP that deviates from the specified optical path difference D2 p In the case of transmission, the installation side detection optical path OP s1 and the first reference detection optical path OP rs1 The different degrees of processing light path OP p With the first reference processing optical path OP rp1The optical path difference D2 is proportional to the optical path difference D1.

[0138] The diagnostic module 50 can use the first correlation to analyze the installation side detection optical path OP s1 Vector to derive the processing light path OP p The processing light path OP derived above p The vector can contain the processing light path OP p Position coordinates, processing light path OP p The extension direction and other processing light paths OP p To this end, the diagnostic module 50 can detect the optical path OP on the installation side. s1 With the first reference detection optical path OP rs1 The optical path difference D1 is used as a reference to calculate the processing optical path OP p With the first reference processing optical path OP rp1 The optical path difference D2 calculated above can be compared with the optical path difference D2 calculated above. p The absolute value of the optical path distortion and the vector value according to the direction, which are transmitted to the mounting side mirror frame assembly 200 for performing the optical path diagnosis, correspond to each other.

[0139] As described above, the plurality of mirror frame assemblies 200 can sequentially transmit the laser beam LB oscillated from the laser oscillator 10 in the reference transmission order S using the plurality of mounting side reflection mirrors 220. Therefore, among the plurality of mirror frame assemblies 200, in the mirror frame assembly 200 located at the first order in the reference transmission order S, the indicator light LB oscillated from the laser oscillator 10 is transmitted. m Along the processing light path OP p Furthermore, among the plurality of frame assemblies 200, in the frame assemblies 200 located in the second or later order in the reference transmission order S, the indicator light LB reflected by the mounting side reflector 220 located in the above-mentioned frame assemblies 200 located in the previous order is transmitted. m Along the processing light path OP p Teleport.

[0140] Considering the above indicator light LB m The diagnostic module 50 can process the plurality of mirror frame assemblies 200 to process the optical path OP. p The vector, optical path difference D2, etc. are used as the basis for individual judgment of the indicator light LB m Is the optical path OP processed along the first reference in a normal state without optical path distortion? rp1 Teleport.

[0141] As described above, the laser oscillator 10 generates the processing light LB p , indicator light LB mThe plurality of laser beams LB oscillate in a manner having the same optical axis. Therefore, the plurality of laser beams LB oscillated from the laser oscillator 10 are along the same processing optical path OP. p To this end, the diagnostic module 50 can process the plurality of mirror frame assemblies 200 to process the optical path OP. p The path vector, optical path difference D2, etc. are used as references to individually determine whether the laser beam LB is from the laser oscillator 10 or the mirror frame assembly 200 in the above-mentioned previous sequence along the first reference processing optical path OP rp1 Teleport.

[0142] For example, when the diagnosis module 50 diagnoses the optical path of the laser beam LB on the mirror frame assembly 200 located in the first order, if the processing optical path OP p With the first reference processing optical path OP rp1 If the laser beam LB is different from the first lens frame assembly 200, it can be diagnosed that the processing light path OP is abnormal due to an abnormal phenomenon during the process of the laser beam LB being transmitted to the first lens frame assembly 200. p The abnormal option is the following phenomenon, that is, the calibration state of the laser oscillator 10 is poor, the processing light path OP occurs during the transmission of other laser beams LB to the mirror frame assembly 200 located in the first order. p distortion.

[0143] For example, when the diagnosis module 50 diagnoses the optical path of the laser beam LB on the mirror frame assembly 200 located in the latter order, if the processing optical path OP p With the first reference processing optical path OP rp1 If the laser beam LB is different, it can be diagnosed that the processing light path OP occurs during the process of transmitting the laser beam LB to the mirror frame assembly 200 located in the latter order. p The abnormal phenomenon is the phenomenon that the calibration state of the laser oscillator 10 is poor, the calibration state of the mounting side reflector 220 of the mirror frame assembly 200 located in the previous order of the reference transmission order S is poor compared to the above-mentioned subsequent order, and the processing light path OP may occur during the process of transmitting other laser beams LB to the mirror frame assembly 200 located in the above-mentioned subsequent order. p distortion.

[0144] On the other hand, preferably, if the processing optical path OP p With the first reference processing optical path OP rp1 The optical path difference D2 between the two is greater than the preset reference optical path difference, and the diagnosis module 50 diagnoses that the processing optical path OP p With the first reference processing optical path OP rp1 Different. Due to tolerances in the manufacturing process and errors in the assembly process, it is difficult to physically eliminate optical path distortion. p Distortion of processing light path OP p With the first reference processing optical path OPrp1 If the optical path difference D2 between the two is such that it adversely affects the processing quality of the object P, the processing optical path OP is diagnosed as being p With the first reference processing optical path OP rp1 different.

[0145] The diagnostic module 50 can perform optical path diagnosis of the laser beam LB on the plurality of mirror frame assemblies 200, thereby detecting in which component the processing optical path OP occurs. p Therefore, according to the above-mentioned diagnostic method, the processing optical path OP occurs in the specific order of the mirror frame assembly 200 located in the reference transmission order S. p The distortion of the processing optical path OP occurring in the lens frame assembly 200 located at the end of the reference transport sequence S (preferably, the end of the reference transport sequence S) cannot be detected by the above-mentioned diagnostic method. p The processing light path OP generated in the mirror frame assembly 200 located at the last order is detected. p The method of distortion will be described later.

[0146] Figure 9 A partial cross-sectional view showing the simplified structure of a laser nozzle assembly. Figure 10 To show Figure 9 A partial cross-sectional view showing a nozzle-side reflector being inserted into a processing light path.

[0147] like Figure 9 As shown, the laser nozzle assembly 30 may include: a laser nozzle 310; a nozzle side reflector 320, a detection optical path OP to the nozzle side; s2 Selectively guide along the processing light path OP p The laser beam LB is transmitted; the nozzle side transfer member 330 is moved to the processing optical path OP p Insert the nozzle side reflector 320 or p The extraction method reciprocates along the preset path; the noise filter 340 removes the detection light path OP along the nozzle side s2 and the nozzle side sensor 350, detects the laser beam LB through the noise filter 340 to remove the noise to output the nozzle side detection optical path OP s2 The nozzle side optical path signal of the vector information.

[0148] like Figure 9 As shown, the laser nozzle 310 has a processing optical path OP from the mounting side reflector 220 of the mirror frame assembly 200 located at the last sequence above. pThe laser beam LB can be transmitted to the hollow shape. The laser nozzle 310 can have a focusing lens 312 that can focus the laser beam LB entering the object. Figure 9 As shown, the condenser mirror 312 can preferably condense the laser beam LB that is directly irradiated without being reflected by the nozzle-side reflector 320 (described later), but the present invention is not limited to this. Specifically, when the laser nozzle 310 is arranged so that the laser beam LB reflected by the nozzle-side reflector 320 is irradiated onto the processing object P, the condenser mirror 312 can condense the laser beam LB reflected by the nozzle-side reflector 320. For ease of explanation, the present invention will be described below based on the case where the condenser mirror 312 is arranged so that the laser beam LB that is directly irradiated without being reflected by the nozzle-side reflector 320 is incident.

[0149] The laser nozzle 310 may also include: a beam expander (not shown), which can amplify the diameter of the laser beam LB entering the interior of the laser nozzle 310 according to a preset ratio and transmit it to the focusing lens 312; and various optical components (not shown), which can shape other laser beams LB according to the processing of the processing object P.

[0150] like Figure 9 As shown, the laser nozzle 310 can focus the processing light LB through the focusing lens 312. p Along the processing light path OP p The object P is irradiated with radiation to process the object P.

[0151] The nozzle side reflector 320 makes the nozzle side reflect the light along the processing light path OP. p The laser beam LB entering the interior of the laser nozzle 310 is incident on the interior of the laser nozzle 310, and the laser beam LB can be fully reflected at a preset reflection angle. Figure 10 As shown, the nozzle side reflector 320 can reflect the light along the processing light path OP. p The laser beam LB entering the laser nozzle 310 is totally reflected by changing its irradiation direction to a vertical direction. The reflector that can be used as the nozzle side reflector 320 is not particularly limited, and the nozzle side reflector 320 can be a common reflector that totally reflects the laser beam.

[0152] like Figure 10 As shown, in order to allow the laser beam LB that has not reached the condensing mirror 312 to be incident, the nozzle side reflection mirror 320 is preferably located closer to the optical system 20 than the condensing mirror 312 , but the present invention is not limited thereto.

[0153] The nozzle side transporting member 330 can move the nozzle side reflector 320 to the processing optical path OP. p Insert or remove from the processing light path OP pThe nozzle side reflector 320 is reciprocated along the preset transfer path in a leading manner. The type of transfer member that can be used as the nozzle side transfer member 330 is not particularly limited. For example, the nozzle side transfer member 330 can be composed of a cylinder device. In this case, Figure 9 and Figure 10 As shown, the nozzle side transfer component 330 may include: a cylinder body 332 for providing driving force; and a cylinder rod 334 , which is reciprocated along a preset transfer path through the cylinder body 332 and is combined with the nozzle side reflector 320 .

[0154] The nozzle side reflector 320 is moved along a path such that the nozzle side reflector 320 is moved toward the processing optical path OP. p Insert or remove from the processing light path OP p It is drawn out and prevents the noise filter 340 and the nozzle side sensor 350 described later from interfering with the nozzle side reflector 320. For example, Figure 9 and Figure 10 As shown, the transport path of the nozzle-side reflector 320 allows the nozzle-side reflector 320 to reciprocate along the horizontal direction of the laser nozzle 310. To this end, a first expansion portion 314 that expands along the transport direction of the nozzle-side reflector 320 (e.g., the horizontal direction of the laser nozzle 310) may be formed on a sidewall of the laser nozzle 310. The first expansion portion 314 has a predetermined volume, forming a transport passage and a space therein. The transport passage communicates with the interior of the laser nozzle 310 so as to allow the nozzle-side reflector 320 to reciprocate along the predetermined transport path. The space is provided with a nozzle-side transport component 330.

[0155] Furthermore, corresponding to the first expansion portion 314, a second expansion portion 316 may be formed on the other side wall of the laser nozzle 310 opposite to the one side wall of the laser nozzle 310, which expands along a predetermined extension direction. The extension direction of the second expansion portion 316 is not particularly limited. In the case where the nozzle side sensor 350 is formed in a manner to detect the laser beam LB totally reflected by the nozzle side reflector 320, the second expansion portion 316 may be formed to extend along the irradiation direction of the laser beam LB reflected by the nozzle side reflector 320. For example, Figure 10 As shown, when the nozzle-side reflector 320 can change the irradiation direction of the laser beam LB to a vertical direction, the second expansion portion 316 can be formed to extend horizontally along the laser nozzle 310. Inside the second expansion portion 316, the noise filter 340 and the nozzle-side sensor 350, which will be described later, can be installed at predetermined intervals.

[0156] As described above, if the first expansion portion 314 is provided together with the nozzle side transfer member 330, the nozzle side transfer member 330 can be used to move the processing light path OP according to the driving mode of the laser device 1. p Selectively insert the nozzle side reflector 320 or p Lead out.

[0157] For example, Figure 9 As shown, in order to process the object P, the laser oscillator 10 oscillates the processing light LB. p In the case of the nozzle side transfer component 330, the nozzle side transfer component 330 can be moved from the processing light path OP p Lead out the nozzle side reflector 320. Therefore, if Figure 9 As shown, processing light LB p The light beam can be directed along the processing light path OP without being reflected by the nozzle side reflector 320. p After direct irradiation, the object P can be irradiated.

[0158] For example, Figure 10 As shown, in order to diagnose the optical path of the laser beam LB, the laser oscillator 10 oscillates the indicator light LB. m In the case of the nozzle side transfer component 330 can be from the processing light path OP p Lead out the nozzle side reflector 320. Therefore, if Figure 10 As shown, along the processing light path OP p The transmitted laser beam LB is totally reflected by the nozzle side reflector 320, thereby detecting the optical path OP toward the nozzle side. s2 Guide. The above-mentioned nozzle side detection optical path OP s2 In order to make the indicator light LB m The irradiation direction is totally reflected by the nozzle side reflector 320 in a way that changes the preset reflection angle and enters the optical path. s2 and processing optical path OP p There is a preset second correlation. For example, Figure 10 As shown, when the nozzle side reflective mirror 320 is provided in such a manner as to change the irradiation direction of the laser beam LB to the vertical direction, the nozzle side detection optical path OP s2 and processing optical path OP p Perpendicular to each other.

[0159] like Figure 10 As shown, the noise filter 340 makes the detection light path OP toward the nozzle side s2 Guiding indicator light LB m The noise filter 340 is provided between the nozzle side reflector 320 and the nozzle side sensor 350 and is located inside the second expansion portion 316. mThe indicator light LB is removed in a manner that is suitable for shaping the optical path of the diagnostic laser beam LB. m The noise filter 340 detects the light path OP to the nozzle side. s2 Guiding indicator light LB m The noise-removed information is transmitted to the nozzle-side sensor 350 , thereby preventing an error in the optical path diagnosis result of the laser beam LB due to noise.

[0160] The nozzle side sensor 350 can detect the indicator light LB from which the noise is removed by the noise filter 340. m To output the nozzle side detection optical path OP s2 The nozzle side optical path signal of the vector information. The nozzle side optical path signal may include the nozzle side detection optical path OP s2 Position coordinates, nozzle side detection light path OP s2 Extension and other nozzle side detection optical path OP s2 Related vector information. Figure 10 As shown, the nozzle side sensor 350 detects the indicator light LB m Alternatively, the indicator light LB may be irradiated through the noise filter 340. m Nozzle side detection surface 350a.

[0161] Figure 11 A diagram for explaining a method of deriving a nozzle-side detection light path using a nozzle-side sensor. Figure 12 This figure shows the state of the processing optical path and the nozzle side detection optical path when the laser beam is transmitted to the laser nozzle assembly in a state where the optical path is not distorted. Figure 13 This figure shows how the processing optical path and the nozzle-side detection optical path are formed when a laser beam is transmitted to a laser nozzle assembly in a state where the optical path is distorted.

[0162] like Figure 11 As shown, the nozzle side sensor 350 can detect the indicator light LB irradiated to the nozzle side detection surface 350a. m Nozzle side test beam point BS m2 The nozzle side detection surface 350a of the nozzle side sensor 350 can form a preset detection area in a two-dimensional plane, and a nozzle side test beam point BS on the nozzle side detection surface 350a can be set to specify the nozzle side detection surface 350a. m2 The position coordinates of the XY coordinate system.

[0163] For nozzle side test beam point BS m2 The nozzle side sensor 350 may have at least one of the following components, that is, a sensor for capturing the nozzle side test beam spot BS. m2The image camera outputs the test beam point BS on the nozzle side m2 The position of the PSD sensor corresponds to the position detection signal, and can provide a test beam point BS with other nozzle sides m2 In particular, when the nozzle side sensor 350 has a camera, it is preferable to use a CCD camera as the camera, but the present invention is not limited to this.

[0164] As described above, the diagnosis module 50 may analyze the nozzle-side optical path signal output from the nozzle-side sensor 350 to diagnose the optical path of the laser beam LB.

[0165] like Figure 11 As shown, the diagnosis module 50 detects the nozzle side test beam point BS by the nozzle side sensor 350. m2 The position of the nozzle is used as a reference to derive the nozzle side detection light path OP s2 After the vector is obtained, the nozzle side detection light path OP can be calculated s2 With the preset second reference detection optical path OPr s2 In particular, the diagnostic module 50 can use the optical path OP along the nozzle side to detect the optical path OP. s2 The nozzle side test beam spot BS irradiated to the nozzle side detection surface 350a m2 The position coordinates along the second reference detection optical path OP rs2 The indicator light LB irradiated to the nozzle side detection surface 350a m Nozzle side reference beam point BS r2 The difference in the position coordinates is used to calculate the nozzle side detection light path OP s2 With the second reference detection optical path OP rs2 The optical path difference D3.

[0166] Among them, the second reference detection optical path OP rs2 The laser beam LB is directed from the mounting side reflector 220 of the mirror frame assembly 200 located at the last position along the second reference processing optical path OP. rp2 Nozzle side detection optical path OP in the case of transmission s2 . And, the second reference processing light path OP rp2 The processing optical path OP is the laser beam LB transmitted from the mounting side reflector 220 of the mirror frame assembly 200 located at the last order without optical path distortion. p As mentioned above, the nozzle side detection optical path OP s2 and processing optical path OP p There is a second correlation. In this regard, the second reference detection optical path OP rs2 It can also be processed with the second reference optical path OP rp2 Therefore, the nozzle side reference beam point BSr2 The position coordinates of the nozzle side test beam point BS m2 The position coordinates of the nozzle side reference point function to diagnose whether the optical path of the laser beam LB is distorted.

[0167] like Figure 12 As shown, in the indicator light LB m Along the second reference processing optical path OP rp2 Different processing light paths OP p In the case of transmission, the nozzle side detection optical path OP s2 With the second reference detection optical path OP rs2 Same. And, as Figure 13 As shown, in the indicator light LB m Along the processing light path OP p The second reference processing optical path OP is transmitted to the nozzle side reflector 320. rp2 If the optical path difference is outside the specified range of D4, the nozzle side detects the optical path OP. s2 With the second reference detection optical path OP rs2 The degree of difference is related to the processing light path OP p and the second reference processing optical path OP rp2 The optical path difference D4 is proportional to the optical path difference D3.

[0168] The diagnosis module 50 can use the second correlation to analyze the nozzle side detection light path OP s2 Vector and derive the processing light path OP p The processing light path OP derived above p The vector can contain the processing light path OP p Position coordinates, processing light path OP p The extension direction and other processing optical paths OP p To this end, the diagnostic module 50 can detect the optical path OP on the nozzle side. s2 and the second reference detection optical path OP rs2 The optical path difference D3 is used as the basis to calculate the processing optical path OP p and the second reference processing optical path OP rp2 The optical path difference D4 calculated above can be compared with the optical path difference D4 calculated above. p The absolute value of the optical path distortion occurring during the transmission to the laser nozzle assembly 30 corresponds to the vector value according to the direction.

[0169] The diagnosis module 50 can use the processing light path OP derived from the nozzle side sensor 350 to p The vector and optical path difference D4 are used as the basis to judge the indicator light LB m Whether to process the optical path OP along the second reference rp2The light is transmitted to the nozzle side reflector 320. However, the light is different from the indicator light LB. m Same, processing light LB p Along the processing light path OP p Transmitted to illuminate the object P. In this regard, if the diagnosis module 50 determines that the indicator light LB m Processing optical path OP along the second reference rp2 is transmitted to the nozzle side reflector 320, it can be determined that the processing light LB p The predetermined reference processing point of the object P is irradiated without error. On the contrary, if the diagnosis module 50 determines that the indicator light LB m Along the second reference processing optical path OP rp2 Processing optical path OP with different specified optical path difference D4 p is transmitted to the nozzle side reflector 320, it can be determined that the processing light LB p A distortion point having a predetermined optical path difference D4 is spaced apart from a preset reference processing point of the object P.

[0170] As described above, the laser beam LB oscillated in the laser oscillator 10 is sequentially reflected by the plurality of mounting side reflection mirrors 220 of the plurality of mirror frame assemblies 200, thereby traveling along the processing optical path OP. p Transmitted to the nozzle side reflector 320. In this regard, if the processing optical path OP p With the second reference processing optical path OP rp2 If the laser beam LB is different from the laser beam LB, the diagnostic module 50 can diagnose that the processing light path OP is abnormal due to an abnormal phenomenon during the process of transmitting the laser beam LB to the laser nozzle assembly 300. p The abnormal phenomenon is the following phenomenon, that is, the correction state of the mounting side reflector 220 of the mirror frame assembly 200 located at the last order is poor and the processing light path OP occurs during the transmission of other laser beams LB to the laser nozzle assembly 300. p distortion.

[0171] On the other hand, preferably, if the processing optical path OP p With the second reference processing optical path OP rp2 The optical path difference D4 between the two is greater than the preset reference optical path difference, and the diagnosis module 50 diagnoses that the processing optical path OP p With the second reference processing optical path OP rp2 Due to tolerances in the manufacturing process, errors in the assembly process, etc., it is impossible to completely physically eliminate the processing light path OP. p To this end, only when the optical path OP is processed p Distortion of processing light path OP p With the second reference processing optical path OP rp2If the optical path difference D4 between the two is such that it adversely affects the processing quality of the object P, the processing optical path OP is diagnosed as being p With the second reference processing optical path OP rp2 different.

[0172] Figure 14 This figure is used to explain the method of diagnosing whether a laser device has optical path distortion. Figures 15 to 22 A diagram for explaining a first method of correcting optical path distortion using a corrector.

[0173] If the laser device 1 is used for an extended period of time, the alignment of the mounting side reflector 220 may change from its designed value due to wear, aging, assembly tolerances, external vibrations, and other external factors, such as the mounting side reflector 220, the drive motor 234, and other components. This may cause distortion in the optical path of the laser beam LB. This distortion in the optical path of the laser beam LB may degrade the quality of the object P being processed. To address this issue, it is possible to diagnose whether the laser device 1 has optical path distortion and to correct any optical path distortion that occurs in the laser device 1.

[0174] Preferably, the diagnosis of whether optical path distortion occurs in the laser device 1 is performed whenever a preset diagnostic condition is met. The diagnostic conditions are not particularly limited. For example, the diagnosis of optical path distortion may be performed upon the lapse of a preset reference time after the previous diagnosis of optical path distortion, upon completion of laser processing of the object P, or upon startup (power on) of the laser device 1.

[0175] The method for diagnosing whether the laser device 1 has optical path distortion is not particularly limited. For example, the operation of diagnosing whether the laser device 1 has optical path distortion can be implemented in the following state, that is, by oscillating the indicator light LB using the controller 40. m The laser oscillator 10 is driven in such a manner that the indicator light LB m The plurality of mounting side reflectors 220 and the nozzle side reflector 320 are driven in such a manner as to irradiate the final sensor, that is, the nozzle side detection surface 350a of the nozzle side sensor 350, so that the plurality of mounting side reflectors 220 and the nozzle side reflector 320 provided in the laser device 1 are directed respectively to the processing optical path OP. p Insert. Therefore, if Figure 14 As shown, the diagnosis module 50 can analyze the nozzle side optical path signal output from the nozzle side sensor 350 to determine the nozzle side test beam spot BS on the nozzle side detection surface 350a. m2 With the nozzle side reference beam point BS r2 The distance between them is used as a reference to diagnose whether the optical path is distorted.

[0176] For example, if the nozzle side test beam point BSm2 With the nozzle side reference beam point BS r2 The distance between them is greater than the preset reference interval, the diagnostic module 50 can diagnose that during the process of the laser beam LB being transmitted to the laser nozzle assembly 30, the optical path of the laser beam LB, that is, the processing optical path OP p Generator and nozzle side detection optical path OP s2 and the second reference detection optical path OP rs2 The degree of distortion of the optical path difference D3 is proportional to the optical path difference D4.

[0177] For example, if the nozzle side test beam point BS m2 With the nozzle side reference beam point BS r2 is less than a preset reference interval, the diagnosis module 50 can diagnose that no optical path distortion of the laser beam LB occurs during the process of the laser beam LB being transmitted to the laser nozzle assembly 30 .

[0178] However, the diagnosis result of optical path distortion during the process of transmitting the laser beam LB to the laser nozzle assembly 30 can only indicate that the optical path distortion of the laser beam LB has occurred in at least one frame assembly 200, but cannot specify which frame assembly 200 has experienced the optical path distortion. Therefore, preferably, when it is diagnosed that the optical path distortion has occurred during the process of transmitting the laser beam LB to the laser nozzle assembly 30, the operation of diagnosing whether the optical path distortion has occurred in the plurality of frame assemblies 200 and correcting the optical path distortion occurring in the plurality of frame assemblies 200 are performed individually.

[0179] The closer to the end of the reference transport sequence S, the greater the optical path distortion that occurs in one of the plurality of mirror frame assemblies 200. Therefore, preferably, the operation of diagnosing whether optical path distortion occurs in a mirror frame assembly 200 in a specific order before the end of the reference transport sequence S is performed using a mount-side sensor 260 provided on a mirror frame assembly 200 in an order after the specific order. Furthermore, preferably, the operation of diagnosing whether optical path distortion occurs in the mirror frame assembly 200 in the end of the reference transport sequence S is performed using a nozzle-side sensor 350 provided on the laser nozzle assembly 30.

[0180] The corrector 230 can adjust the reflection angle of the mounting side reflector 220 by changing the correction state of the mounting side reflector 220, which is linked to the corrector 230, thereby adjusting the optical path of the laser beam LB. In this regard, the operation of correcting the optical path distortion of the frame assembly 200 diagnosed as having optical path distortion is preferably performed by using the corrector 230 provided in the frame assembly 200 to adjust the optical path of the laser beam LB according to the form of the optical path distortion.

[0181] However, the corrector 230 includes a knob 232 for adjusting the corrected state of the mounting side reflector 220 according to the rotational direction and rotational angle, and a drive motor 234 for rotating the knob 232. The direction of the optical path of the laser beam LB adjusted by the knob 232 is determined by the rotational direction of the drive motor 234, and the amount of displacement of the optical path of the laser beam LB adjusted by the knob 232 is determined by the rotational angle of the drive motor 234. Therefore, the operation of correcting the optical path distortion of the lens frame assembly 200 diagnosed as having optical path distortion can be carried out by selectively driving the drive motor 234 provided in the lens frame assembly 200 diagnosed as having optical path distortion, depending on the form of the optical path distortion.

[0182] Preferably, the operation of correcting the optical path distortion of the mirror frame assembly 200 diagnosed as having optical path distortion is performed by driving the drive motor 234 using a speed control method. Typically, a speed control method applies an analog speed command voltage to the motor and drives the motor to constantly track the speed command corresponding to the speed command voltage. However, this is not limiting. In the case of a motor with a pulse input, the motor can be controlled by changing the speed setting regardless of position, thereby embodying a speed control method.

[0183] Hereinafter, a method of performing an optical path distortion diagnosis operation and an optical path distortion correction operation on a plurality of mirror frame assemblies 200 will be described with reference to the accompanying drawings.

[0184] Preferably, the optical path distortion occurring in one of the plurality of frame assemblies 200 increases as the sequence approaches the later stage of the reference transmission sequence S. Based on the reference transmission sequence S, the optical path distortion diagnosis and correction operations are performed on each of the plurality of frame assemblies 200. In this regard, a method for performing the optical path distortion diagnosis and correction operations on each of the plurality of frame assemblies 200 based on the reference transmission sequence S is described below.

[0185] First, an operation of diagnosing whether or not optical path distortion occurs in the first-order lens frame assembly 200 of the reference transfer order S and an operation of correcting the optical path distortion occurring in the first-order lens frame assembly 200 will be described.

[0186] The operation of diagnosing whether the optical path distortion occurs in the lens frame assembly 200 located in the first order and the operation of correcting the optical path distortion occurring in the lens frame assembly 200 located in the first order are respectively performed by oscillating the indicator light LB by using the controller 40. m The laser oscillator 10 is driven in the manner of p Insert the mounting side reflector 220 provided in the mirror frame assembly 200 located in the first order, and pThe embodiment is introduced in a state where the side reflector 220 is installed in the mirror frame assembly 200 located in the second order of the reference transmission order S. Therefore, Figure 15 As shown, the indicator light LB oscillated in the laser oscillator 10 m The optical path OP can be detected from the mirror frame assembly 200 located in the second order to the mounting side. s1 The light is guided so that the light can be irradiated onto the mounting side detection surface 260a of the mounting side sensor 260 provided on the frame assembly 200 located in the second order.

[0187] like Figure 15 As shown, the diagnostic module 50 can analyze the mounting side optical path signal output from the mounting side sensor 260 of the second-order frame assembly 200 to determine the mounting side test beam spot BS on the mounting side detection surface 260a. m1 Reference beam point BS on the mounting side r1 The distance between them is used as a reference to diagnose whether the optical path distortion occurs in the lens frame assembly 200 located in the first order.

[0188] For example, if the test beam point BS on the mounting side m1 Reference beam point BS on the mounting side r1 If the distance between the two mirrors is greater than the preset reference interval, the diagnostic module 50 can diagnose that in the mounting side reflector 220 provided in the mirror frame assembly 200 located in the first order, the optical path of the laser beam LB, that is, the processing optical path OP p Generation and installation side detection optical path OP s1 and the first reference detection optical path OP rs1 The degree of distortion of the optical path difference D1 is proportional to the optical path difference D2.

[0189] For example, if the test beam point BS on the mounting side m1 Reference beam point BS on the mounting side r1 If the distance between them is less than the preset reference interval, the diagnosis module 50 can diagnose that the optical path of the laser beam LB is not distorted by the mounting side reflector 220 provided on the mirror frame assembly 200 located in the first order.

[0190] The operation of correcting the optical path distortion occurring in the lens frame assembly 200 located in the first order can be implemented as follows, that is, when it is diagnosed that the optical path distortion occurs in the mounting side reflector 220 provided in the lens frame assembly 200 located in the first order, the driving motor 234 provided in the lens frame assembly 200 located in the first order is driven by speed control.

[0191] As described above, the mounting side detection surface 260a can identify the mounting side test beam spot BS. m1The XY coordinate system is formed in a set two-dimensional plane in the form of the position coordinates. In this regard, the operation of correcting the optical path distortion occurring in the frame assembly 200 located in the first order can be carried out as follows, that is, on the mounting side detection surface 260a of the frame assembly 200 located in the second order, so that the mounting side test beam spot BS m1 Reference beam point BS on the mounting side r1 The driving motor 234 of the mirror frame assembly 200 located in the first order is driven by a speed control method in a manner that the distance is less than the preset reference interval.

[0192] However, each of the multiple mirror frame assemblies 200 includes a first corrector 230a for shifting the optical path of the laser beam LB in the X direction, and a second corrector 230b for shifting the optical path of the laser beam LB in the Y direction. Therefore, correcting optical path distortion occurring in the mirror frame assemblies 200 in the first order may include correcting optical path distortion in the X direction by driving the first drive motor 234a of the first corrector 230a in a speed-controlled manner, and correcting optical path distortion in the Y direction by driving the second drive motor 234b of the second corrector 230b in a speed-controlled manner. For ease of explanation, optical path distortion in the X direction will be referred to as X-direction optical path distortion, and optical path distortion in the Y direction will be referred to as Y-direction optical path distortion.

[0193] Hereinafter, the method of correcting the optical path distortion in the X direction and the optical path distortion in the Y direction will be described by taking the case where the first drive motor 234a of the first corrector 230a is driven by speed control to correct the optical path distortion in the X direction as an example.

[0194] The controller 40 is located on the mounting side detection surface 260a of the mirror frame assembly 200 in the second order so as to make the mounting side test beam point BS m1 Reference beam point BS on the mounting side r1 The first drive motor 234a provided in the mirror frame assembly 200 located in the first order is driven at a target drive speed V 11 Drive target driving time T 11 This corrects the X-direction optical path distortion that occurs in the mounting side reflector 200 of the mirror frame assembly 200 located in the first order.

[0195] To this end, the laser device 1 may further include a method for calculating the target driving speed V of the driving motor 234 according to the occurrence form of the optical path distortion. 11 and target driving time T 11 The calculation module 60.

[0196] The calculation module 60 can calculate the target driving speed V of the first driving motor 234a provided in the first-order mirror frame assembly 200 according to the form of the X-direction optical path distortion in the mounting side reflector 220 provided in the first-order mirror frame assembly 200. 11 The target driving speed V of the first driving motor 234a is 11 is a vector value including the driving speed and rotation direction of the first driving motor 234a.

[0197] The calculation module 60 can make the installation side reference beam point BS r1 The target driving speed V of the first driving motor 234a is calculated by moving the first driving motor 234a in the opposite direction to the direction in which the X-direction optical path distortion occurs to correct the X-direction optical path distortion. 11 In particular, the calculation module 60 can calculate the target driving speed V of the first driving motor 234a by analyzing data related to the X-direction optical path distortion vector, the driving characteristics (torque, responsiveness, etc.) of the first driving motor 234a, the detection area of ​​the mounting side detection surface 260a, and other driving conditions of the first driving motor 234a. 11 .

[0198] The X-direction optical path distortion vector is the absolute value E of the X-direction optical path distortion. x1 The absolute value of the optical path distortion in the X direction is E. x1 Test beam point BS for the installation side m1 Reference beam point BS from the mounting side r1 The distance in the X direction and the direction of the optical path distortion in the X direction indicate the test beam point BS on the mounting side. m1 Whether to reference the beam point BS from the mounting side r1 Spaced along one of the +X direction and the −X direction.

[0199] The following equation 1 is used to calculate the target driving speed V of the driving motor 234. sn The mathematical formula of .

[0200] Mathematical formula 1

[0201]

[0202] *s: Motor type

[0203] Example) 1: First drive motor, 2: Second drive motor

[0204] *n: Number of optical path distortion corrections

[0205] Example 1: First optical path distortion correction

[0206] *d: Direction of optical path distortion

[0207] Example) x: X direction, y: Y direction

[0208] *V sn : Target driving speed of type s driving motor when performing the nth optical path distortion correction operation using type s driving motor

[0209] Example) V 11 : Target driving speed of the first driving motor when performing the first optical path distortion correction operation using the first driving motor

[0210] *E dn : The absolute value of the d-direction optical path distortion when the n-th correction operation is performed on the d-direction optical path distortion

[0211] Example) E x1 : The absolute value of the X-direction optical path distortion when the first correction operation is performed on the X-direction optical path distortion

[0212] *E dmax : The absolute value of the maximum optical path distortion in the d direction

[0213] Example) E xmax : Absolute value of maximum X-direction optical path distortion

[0214] *V smax : Maximum target drive speed of type S drive motor when using type S drive motor to perform optical path distortion correction operation

[0215] Example) V 1max : The maximum target driving speed of the first driving motor when the first driving motor is used to perform the optical path distortion correction operation

[0216] *α s : Speed ​​coefficient of type S drive motor when using type S drive motor to perform optical path distortion correction operation

[0217] Example) α1: Speed ​​coefficient of the first drive motor when performing optical path distortion correction operation using the first drive motor

[0218] As described below, the correction operation of the optical path distortion can be repeated n times according to the driving conditions of the drive motor 234. In this regard, the target driving speed V of the drive motor 234 at each correction number can be calculated using Mathematical Formula 1. sn According to the above formula 1, the target driving speed V of the first driving motor 234a is 11 This corresponds to the first target driving speed of the first driving motor 234a when performing the first correction operation of the X-axis optical path distortion.

[0219] The absolute value of the maximum optical path distortion E dmaxDetermined based on the detection area of ​​the detection surfaces 260a and 350a. Figure 16 As shown, when the detection length of the detection surface 260a, 350a in the X-axis direction is X, the reference beam point BS r1 ,BS r2 The absolute value of the maximum X-direction optical path distortion E is taken as the reference position. xmax = X / 2, when the Y-axis direction of the detection surface 260a, 350a is detected as Y, the reference beam point BS r1 ,BS r2 The absolute value of the maximum Y-direction optical path distortion E is taken as the reference. ymax is Y / 2.

[0220] Maximum target driving speed V smax is the target driving speed of the driving motor 234 when an optical path distortion corresponding to the maximum optical path distortion occurs. 11 The speed can be determined based on the detection area of ​​the detection surfaces 260 a and 350 a , the speed curve, the torque, and other characteristics of the drive motor 234 .

[0221] Speed ​​coefficient α s This is a coefficient formed to minimize the number of times the optical path distortion correction operation is performed. s The influence of the characteristics of the drive motor 234 on the optical path distortion correction operation can be determined individually for each drive motor 234 by big data analysis.

[0222] The laser device may further include a database 70, which stores the detection area of ​​the detection surface 260a, 350a, the absolute value E of the maximum optical path distortion, and the speed control method. dmax , characteristics of the plurality of drive motors 234, maximum target drive speed V of the plurality of drive motors 234 smax , speed coefficient α of the plurality of drive motors 234 s Various data to correct optical path distortion.

[0223] The calculation module 60 can calculate the target driving speed V of the first driving motor 234a. 11 Then, the target driving time T of the first driving motor 234a can be calculated as follows: 11 According to Mathematical Formula 2, the target driving time T of the first driving motor 234a is 11 This corresponds to the first target driving time of the first driving motor 234a when performing the first correction operation of the X-axis optical path distortion.

[0224] Mathematical formula 2

[0225]

[0226] *T sn : Target driving time of type s driving motor when performing the nth optical path distortion correction operation using type s driving motor

[0227] Example)T 11 : Target driving time of the first driving motor when performing the first optical path distortion correction operation using the first driving motor

[0228] The controller 40 drives the first drive motor 234a at the target drive speed V 11 Drive target driving time T 11 Therefore, if Figure 16 As shown, the test beam point BS on the mounting side m1 In the direction opposite to the direction in which the X-direction optical path is distorted, the target driving speed V 11 The corresponding speed moving target driving time T 11 , thereby correcting the X-direction optical path distortion.

[0229] For example, when the optical path distortion vector in the X direction is -X / 2, the calculation module 60 can make the mounting side test beam point BS m1 The target driving speed V of the first driving motor 234a is calculated by moving X / 2 in the +X direction. 11 and target driving time T 11 , the controller 40 drives the first drive motor 234a at the target drive speed V 11 Drive target driving time T 11 To correct the X-direction optical path distortion.

[0230] However, due to the characteristics of a typical motor, a predetermined error may occur between the target rotational form of the motor based on the motor's design value and the actual rotational form based on the motor's driving conditions, depending on the inertia acting when the motor is driven, the wear state of the motor, and other motor driving conditions. 11 and target driving time T 11 In the case of a corresponding command signal, the actual driving speed and the actual driving time of the first driving motor 234a can be compared with the target driving speed V of the first driving motor 234a. 11 and target driving time T 11 different.

[0231] Therefore, the first drive motor 234a is driven at the target drive speed V 11 Drive target driving time T 11 When the first driving motor 234a is driven by the speed control method, the installation side test beam point BS may occur.m1 The X-axis zero point stops after passing the specified distance, or stops before reaching the fixed distance of the X-axis zero point. That is, when the first correction operation of the X-axis optical path distortion is performed, the driving conditions of the first drive motor 234a may cause the specified second X-axis optical path distortion to occur again. The X-axis zero point is the mounting side reference beam point BS. r1 The X-axis coordinate of .

[0232] Preferably, the calculation module 60 takes into account the possibility of the second X-direction optical path distortion, and calculates the absolute value E of the second X-direction optical path distortion. x2 The target driving speed V11 and the target driving time T of the first driving motor 234a are calculated based on the characteristics of the first driving motor 234a in a minimization manner. 11 .

[0233] Furthermore, the calculation module 60 can analyze the second X-direction optical path distortion vector and the driving characteristics (torque and responsiveness) of the first driving motor 234a. When an X-direction optical path distortion similar to the initial X-direction optical path distortion occurs later, the vector can be used to calculate the target driving speed V of the first driving motor 234a. 11 and target driving time T 11 Preferably, the above learning data is stored in the database 70.

[0234] As described above, after the first correction operation of the X-direction optical path distortion is performed, the calculation module 60 calculates the second target driving speed V of the first driving motor 234a in a manner that can perform the second correction operation of the X-direction optical path distortion. 12 For example, the calculation module 60 can be used to make the mounting side reference beam point BS r1 The second target driving speed V of the first driving motor 234a is calculated by moving in the opposite direction to the direction in which the second X-direction optical path distortion occurs to correct the second X-direction optical path distortion using the above-mentioned mathematical formula 1. 12 .

[0235] However, when the initial X-direction optical path distortion is corrected, the second X-direction optical path distortion corresponds to a small error caused by the driving conditions of the first driving motor 234a. The absolute value E of the second X-direction optical path distortion is x2 Smaller than the absolute value E of the initial X-direction optical path distortion x1 In this regard, according to the above formula 1, the second target driving speed V of the first driving motor 234a is 12 The absolute value of the first target driving speed V 11 The absolute value of .

[0236] Furthermore, as described above, the calculation module 60 calculates the second target driving speed V 12 Then, the second target driving time T of the first driving motor 234a can be calculated using the above formula 2. 12 .

[0237] The controller 40 drives the first drive motor 234a at the second target drive speed V 12 Drive the second target driving time T 12 Therefore, if Figure 17 As shown, the test beam point BS on the mounting side m1 Along the direction opposite to the direction in which the second X-direction optical path distortion occurs at the second target driving speed V 12 The corresponding speed moves the second target driving time T 12 , thereby correcting the X-direction optical path distortion for the second time.

[0238] For example, when the second X-direction optical path distortion vector is +X / 10, the calculation module 60 can make the installation side test beam point BS m1 Calculate the second target driving speed V by moving X / 10 along the -X direction 12 And the second target driving time T 12 The controller 40 drives the first drive motor 234a at the second target drive speed V 12 Driving to secondary target driving time T 12 To correct the second X-direction optical path distortion.

[0239] However, when the second X-direction optical path distortion is corrected, the second actual driving speed and the second actual driving time of the first driving motor 234a can be adjusted to the second target driving speed V of the first driving motor 234a according to the driving conditions of the first driving motor 234a. 12 And the second target driving time T 12 That is, when the second X-direction optical path distortion is corrected, a third X-direction optical path distortion can be generated according to the driving conditions of the first driving motor 234a. The third X-direction optical path distortion can also be corrected by the test beam point BS on the mounting side. m1 The movement occurs when the movement stops after passing the specified distance from the X-axis zero point or stops before reaching the specified distance from the X-axis zero point.

[0240] Reference Figure 18 The third X-direction optical path distortion and the correction of the X-direction optical path distortion are caused by a slight error in the driving conditions of the first driving motor 234a. The absolute value of the third X-direction optical path distortion E x3 Less than the absolute value E of the second X-direction optical path distortion x2In this regard, the result of the second correction operation of the X-direction optical path distortion is that the test beam point BS on the mounting side is smaller than that of the first correction operation of the X-direction optical path distortion. m1 The position converges to the zero point of the X axis.

[0241] Preferably, the calculation module 60 takes into account the possibility of a third X-direction optical path distortion, and calculates the absolute value E of the third X-direction optical path distortion. x3 The second target driving speed V of the first driving motor 234a is calculated based on the characteristics of the first driving motor 234a in a minimized manner. 12 And the second target driving time T 12 .

[0242] Furthermore, the calculation module 60 can analyze the third X-direction optical path distortion vector and the driving characteristics (torque and responsiveness) of the first driving motor 234a, and when an X-direction optical path distortion similar to the second X-direction optical path distortion occurs later, it can be used as a target driving speed V for calculating the first driving motor 234a. 11 and target driving time T 11 Preferably, the above learning data is stored in the database 70.

[0243] As described above, if the speed control method is repeated n times at the nth target driving speed V 1n Drive target driving time T 1n For operation, install the side test beam point BS m1 The position will gradually converge to the X-axis zero point, thereby correcting the X-axis optical path distortion.

[0244] like Figure 19 As shown, if the nth correction operation of the X-direction optical path distortion is completed, the test beam point BS on the mounting side m1 When the distance from the X zero point decreases to below the preset reference interval, it can be determined that the correction of the X-direction optical path distortion is completed, and the correction operation of the X-direction optical path distortion can be terminated.

[0245] As described above, after the correction of the X-direction optical path distortion is performed, Figure 20 and Figure 21 As shown, it is possible to make the test beam point BS on the mounting side m1 The position of the Y axis is gradually converged to the zero point of the Y axis and the second drive motor 234b is repeatedly performed n times so that the second drive motor 234b is driven at the nth target drive speed V according to the speed control method. 2n Drive the nth target driving time T 2n The Y-axis zero point is the reference beam point BS on the mounting side. r1 The Y-axis coordinate of .

[0246] like Figure 20 and Figure 21 As shown, the reference numeral "E y1 ” is the absolute value of the initial Y-direction optical path distortion, and the reference symbol “E y2 ” is the absolute value of the second Y-direction optical path distortion, and the reference symbol “V 21 ” is the first target driving speed of the second driving motor 234b, and the reference symbol “V 22 ” is the second target driving speed of the second driving motor 234b.

[0247] like Figure 22 As shown, if the nth correction operation of the Y-direction optical path distortion is completed, the test beam point BS on the mounting side m1 When the distance from the Y-axis zero point decreases below a preset reference interval, it can be determined that the correction of the Y-direction optical path distortion is completed, and the correction operation of the Y-direction optical path distortion can be terminated.

[0248] Meanwhile, the optical path distortion correction operation for the X-direction optical path distortion and the optical path distortion correction operation for the Y-direction optical path distortion are performed separately to correct the optical path distortion occurring in the mounting-side reflector 220 of the mirror frame assembly 200 located in the first order, but the present invention is not limited to this. Specifically, the first drive motor 234a and the second drive motor 234b may be driven simultaneously to simultaneously perform the optical path distortion correction operation for the X-direction optical path distortion and the optical path distortion correction operation for the Y-direction optical path distortion. This allows correction of the optical path distortion occurring in the mounting-side reflector 220 of the mirror frame assembly 200 located in the first order.

[0249] As described above, after performing the operation of diagnosing whether the optical path distortion occurs in the frame assembly 200 located in the above-mentioned first order and correcting the optical path distortion occurring in the frame assembly 200 located in the above-mentioned first order, the operation of diagnosing whether the optical path distortion occurs in the remaining multiple frame assemblies 200 and correcting the optical path distortion occurring in the multiple frame assemblies 200 can be performed individually on the remaining multiple frame assemblies 200 according to the reference transmission order S.

[0250] Reference Figures 15 to 22 The operation of diagnosing whether the optical path distortion occurs in the remaining multiple frame assemblies 200 and the operation of correcting the optical path distortion occurring in the remaining multiple frame assemblies 200 are attempted by the same method as the operation of diagnosing whether the optical path distortion occurs in the frame assembly 200 located in the above-mentioned first order and the operation of correcting the optical path distortion occurring in the frame assembly 200 located in the above-mentioned first order, and the detailed description thereof will be omitted.

[0251] As described above, the laser device 1 can track the optical path of the laser beam LB using various sensors 260 and 350 , thereby automatically diagnosing whether the optical path of the laser beam LB is distorted and automatically identifying the structural element causing the optical path distortion of the laser beam LB.

[0252] Furthermore, the laser device 1 can drive the driving motor 234 provided in the corrector 230 by speed control, and perform the operation multiple times so that the irradiation position of the laser beam LB (test beam spot BS) is m1 , BSm2 irradiation position) gradually follows the zero point (reference beam point BS r1 ,BS r2 The optical path distortion correction operation of adjusting the optical path of the laser beam LB by means of the position of the optical path of the laser beam LB can automatically correct the optical path distortion of the laser beam LB.

[0253] By automatically diagnosing and correcting the optical path distortion of the laser beam LB, the laser device 1 can improve the processing quality of the object P and realize the automation of the laser device 1.

[0254] Figures 23 to 29 A diagram for explaining a second method of correcting optical path distortion using a corrector.

[0255] As described above, the corrector 230 can change the angle between the base block 211 and the mirror plate 212 with the fastening member 214 as the center, thereby changing the correction state of the mirror plate 212 and the mounting side reflector 220 mounted on the mirror plate 212. Figure 23 As shown, according to the setting structure of the corrector 230 and the fastening component 214, when the first driving motor 234a set in the first corrector 230a is driven, it is possible to adjust the X' direction to form a preset angle θ between the optical path of the laser beam LB and the X direction on the detection surface 260a, 350a, and when the second driving motor 234b set in the second corrector 230b is driven, it is possible to adjust the Y' direction to form a preset angle θ between the optical path of the laser beam LB and the Y direction on the detection surface 260a, 350a.

[0256] In the above case, if the first driving motor 234a is driven, the test beam spot BS m1 ,BS m2 It moves mainly in the X direction and also slightly in the Y direction. Correspondingly, if the second drive motor 234b is driven, the test beam spot BS m1 ,BS m2 It moves mainly in the Y direction, but also slightly in the X direction.

[0257] On the other hand, if the correction operation for the optical path distortion in one of the X and Y directions is performed first and then the correction operation for the optical path distortion in the other direction is performed, residual optical path distortion in the other direction will remain.

[0258] For example, Figures 24 to 26 As shown, according to the above speed control method, the first driving motor 234a performs the nth correction operation of the X-direction optical path distortion, thereby making the test beam spot BS m1 ,BS m2 After the position converges to the zero point of the X axis, Figures 27 to 29 As shown, the second driving motor 234b is driven according to the above speed control method to perform the nth correction operation of the Y-direction optical path distortion. Therefore, if the test beam spot BS m1 ,BS m2 If the position of the optical path converges to the Y-axis zero point, the residual optical path distortion in the X direction will remain.

[0259] If the absolute value (ΔE) of the residual optical path distortion vector is less than a preset reference interval, laser processing of the object P is adversely affected. If the absolute value (ΔE) of the residual optical path distortion vector is greater than the preset reference interval, the laser processing quality of the object P is adversely affected. To address this issue, if the absolute value (ΔE) of the residual optical path distortion vector is greater than the preset reference interval, one of the X-axis optical path distortion correction operation and the Y-axis optical path distortion correction operation is performed n times until the absolute value (ΔE) of the residual optical path distortion vector falls below the preset reference interval, at which point the remaining operation is performed n times. This prevents degradation of the laser processing quality of the object P caused by residual optical path distortion resulting from the arrangement of the corrector 230 and the fastening member 214.

[0260] Figure 30 A diagram for explaining a third method of correcting optical path distortion using a corrector.

[0261] In the second method described above, in order to prevent a reduction in the laser processing quality of the processing object P caused by the residual optical path distortion resulting from the setting structure of the corrector 230 and the fastening component 214, after performing the correction operation of the X-axis optical path distortion and the correction operation of the Y-axis optical path distortion n times until the absolute value (△E) of the residual optical path distortion vector reaches below the preset reference interval, the remaining optical path distortion is corrected n times, but is not limited to this.

[0262] For example, Figure 30As shown, the correction of the axial optical path distortion and the Y-axis optical path distortion can be performed alternately until the absolute value of the residual optical path distortion vector (△E) reaches below the preset reference interval to correct the optical path distortion. In this case, the reference beam point BS r1 ,BS r2 As the center, the test beam point BS m1 ,BS m2 Move in a spiral shape and gradually approach the reference beam point BS r1 ,BS r2 .

[0263] The above description is merely illustrative of the technical concept of the present invention, and a person skilled in the art can make various modifications and variations without departing from the essential characteristics of the present invention.

[0264] Therefore, the embodiments disclosed in the present invention are intended to illustrate the present invention, but are not intended to limit the technical concept of the present invention. The scope of the technical concept of the present invention is not limited to such embodiments. The scope of protection of the present invention needs to be interpreted in accordance with the scope of protection of the following invention claims, and all technical concepts within the scope equivalent to this scope are included in the scope of protection of the present invention claims.

Claims

1. A laser device, characterized in that: include: a laser oscillator for oscillating a laser beam; a mirror frame assembly provided with a mounting side reflector for transmitting the laser beam by reflecting the laser beam; a corrector capable of changing the correction state of the mounting side reflector according to a rotation angle and a rotation direction, the corrector comprising a knob and a drive motor, the knob adjusting the processing light path irradiating the laser beam in a manner corresponding to the displacement of the reflection angle of the mounting side reflector caused by the change in the correction state, and the drive motor rotating the knob; a diagnostic module for calculating an optical path difference between a preset reference processing optical path and the processing optical path to diagnose whether the processing optical path is distorted; a calculation module for calculating a target driving speed and a target driving time of the driving motor for changing a correction state of the mounting side reflector when the optical path difference is greater than a preset reference optical path difference, thereby correcting the optical path distortion in such a manner that the optical path difference becomes less than the preset reference optical path difference; and The controller drives the driving motor according to the target driving speed and the target driving time to correct the optical path distortion. The diagnosis of the optical path distortion by the diagnosis module, the calculation of the target driving speed and the target driving time by the calculation module, and the correction of the optical path distortion by the controller are repeatedly performed at least once until the optical path difference reaches or falls below the preset reference optical path difference. The target driving speed is determined by the following mathematical formula: Mathematical formula The above s represents the type of the above drive motor, The above n represents the number of corrections for the above optical path distortion. The above d represents the direction in which the above optical path distortion occurs. The above V sn represents the target driving speed of the driving motor of type s when the optical path distortion correction operation is performed n times, The above E dn represents the absolute value of the optical path distortion of the d-direction component when the n correction operations are performed on the optical path distortion of the d-direction component, The above E dmax Indicates the absolute value of the maximum optical path distortion in the d direction. The above V smax represents the maximum target driving speed of the driving motor of type s when performing the correction operation of the optical path distortion, The above α s It represents the speed coefficient corresponding to the driving characteristics of the driving motor of type s when the correction operation of the optical path distortion is performed.

2. The laser device according to claim 1, characterized in that The above-mentioned calculation module calculates the above-mentioned target driving speed and the above-mentioned target driving time based on the above-mentioned target driving speed and the above-mentioned target driving time and the driving characteristics of the above-mentioned driving motor. The driving characteristics of the above-mentioned driving motor will result in differences in the actual driving speed and actual driving time of the above-mentioned driving motor generated by the above-mentioned controller applying a command signal corresponding to the above-mentioned target driving speed and the above-mentioned target driving time to the above-mentioned driving motor.

3. The laser device according to claim 2, characterized in that The system further includes a database for storing, as learning data, the optical path difference generated due to the difference between the actual driving speed and the actual driving time and the target driving speed and the target driving time when the controller drives the driving motor to correct the optical path distortion. The calculation module calculates the target driving speed and the target driving time based on the learning data.

4. The laser device according to claim 1, wherein The laser nozzle assembly is further provided with a laser nozzle and a nozzle side detection component. The laser nozzle irradiates the laser beam transmitted from the mounting side reflector along the processing light path to the processing object. The nozzle side detection component detects the laser beam transmitted to the laser nozzle and outputs a nozzle side detection signal containing vector information of the processing light path. The diagnosis module analyzes the nozzle-side detection signal to calculate the optical path difference.

5. The laser device according to claim 4, characterized in that The nozzle side detection member has a nozzle side detection surface, is provided so as to be irradiated with the laser beam, and has a coordinate system for specifying the position of the beam spot of the laser beam. The diagnostic module calculates the optical path difference based on the position coordinates of the beam spot of the laser beam irradiated onto the nozzle-side detection surface.

6. The laser device according to claim 5, characterized in that If the distance between the preset nozzle side reference point of the nozzle side detection surface and the beam spot is greater than a preset reference interval, the diagnosis module diagnoses that the optical path distortion occurs. The calculation module calculates the target driving speed and the target driving time so as to change the calibration state of the mounting side reflector to correct the distance between the nozzle side reference point and the beam spot to be less than the reference interval.

7. The laser device according to claim 1, wherein The plurality of mirror frame assemblies are respectively located in one of the preset transmission sequences, The plurality of correctors can respectively change the correction state of one of the plurality of frame assemblies. The plurality of mirror frame assemblies further include a mounting side detection component that outputs a mounting side detection signal containing vector information of the processing light path by detecting the laser beam. The diagnostic module analyzes the installation-side detection signal to calculate the optical path difference.

8. The laser device according to claim 7, characterized in that The mounting side detection member has a mounting side detection surface, is provided in a manner capable of irradiating the laser beam, and has a coordinate system for specifying the position of the beam spot of the laser beam. The diagnostic module calculates the optical path difference based on the position coordinates of the beam spot of the laser beam irradiated onto the mounting-side detection surface.

9. The laser device according to claim 8, characterized in that If the distance between the preset installation side reference point of the installation side detection surface and the beam spot is greater than a preset reference interval, the diagnostic module diagnoses that the optical path distortion occurs. The calculation module calculates the target driving speed and the target driving time so as to change the calibration state of the mounting side reflector to correct the distance between the mounting side reference point and the beam spot to be less than the reference interval.

10. The laser device according to claim 9, characterized in that The diagnostic module diagnoses whether the optical path distortion occurs in the mounting side reflector of the mirror frame assembly located in one order of the transmission order by analyzing the mounting side detection signal outputted from the mounting side detection component of the mirror frame assembly located in the next order of the one order. When it is diagnosed that the optical path distortion occurs in the mounting side reflector of the mirror frame assembly located in the one order, the calculation module calculates the target driving speed and the target driving time of the driving motor of the corrector among the multiple correctors that can change the correction state of the mounting side reflector of the mirror frame assembly located in the one order.

11. The laser device according to claim 10, characterized in that The diagnosis module diagnoses whether optical path distortion occurs in the mounting side reflectors of the plurality of mirror frame assemblies according to the transmission sequence.

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