BioFET sensor array with matrix-controlled chip electrodes

Abstract

The present application relates to a bio-FET sensor array with matrix-controlled chip electrodes. The present application relates to a sensing system, which includes a substrate, a sensor array disposed on the substrate, and a control unit electrically connected to the sensor array. The control unit is configured to activate a first sensor of the sensor array and simultaneously deactivate a second sensor disposed adjacent to the first sensor in the sensor array.

Description

Technical Field

[0001] The present application relates to a sensor array, and more specifically, to a bio-FET sensor array with matrix-controlled chip electrodes. Background Art

[0002] Ion-sensitive field effect transistors (ISFETs) were originally developed in the 1970s as an alternative to glass electrodes for pH and ion measurements. With the advancement of technology, ISFETs can be used to detect a variety of properties about biological materials, and are therefore sometimes referred to as FET biosensors or bio-FET sensors. Compared to MOSFETs, the gate electrode of a FET biosensor is replaced by a drive electrode that is in contact with the gate oxide and immersed in an aqueous solution. The drive electrode of a FET biosensor is typically placed to be separated from its sensing portion, and therefore the distance between the drive electrode and the sensing portion may adversely affect the accuracy of the FET biosensor. Therefore, integrating the drive electrode into a FET biosensor is one of the problems that remain to be solved in the field of FET biosensors. Summary of the invention

[0003] According to some example embodiments of the present application, a sensing system is disclosed. The sensing system includes a substrate, a sensor array disposed on the substrate, and a control unit electrically connected to the sensor array. The control unit is configured to activate a first sensor of the sensor array and simultaneously deactivate a second sensor of the sensor array disposed adjacent to the first sensor.

[0004] According to some example embodiments of the present application, a sensing system is disclosed. The sensing system includes a substrate, a sensor array disposed on the substrate, and a control unit electrically connected to the sensor array. The sensor array includes a first sensing portion, a first driving electrode, a fifth sensing portion, and a fifth driving electrode, wherein the control unit is configured to activate the first sensing portion and the first driving electrode, and simultaneously deactivate the fifth sensing portion and the fifth driving electrode.

[0005] According to some example embodiments of the present application, a method of controlling a sensor array is disclosed. The method includes providing a first signal by a control unit to activate a first sensing portion at a first time. The method includes providing a second signal by the control unit to activate a first drive electrode at a first time. The method includes providing a third signal by the control unit to deactivate a fifth sensing portion at a first time. The method includes providing a fourth signal by the control unit to deactivate the fifth drive electrode at a first time. Wherein the second sensing portion and the second drive electrode are disposed adjacent to the first sensing portion and the first drive electrode. BRIEF DESCRIPTION OF THE DRAWINGS

[0006] When read in conjunction with the accompanying drawings, it is easy to understand the various aspects of the present application from the following detailed description. It should be noted that the various features may not be drawn to scale. In fact, the size of the various features may be arbitrarily increased or reduced for the sake of clarity of discussion.

[0007] Figure 1A is a schematic diagram of a sensing system according to some embodiments of the present application.

[0008] Figure 1B is a cross-sectional view of a portion of a sensor array according to some embodiments of the present application.

[0009] Figure 2A is a schematic diagram of a sensor array according to some embodiments of the present application.

[0010] Figure 2B is a schematic diagram of a sensor array according to some embodiments of the present application.

[0011] Figure 3A is a schematic diagram of a sensor array according to some embodiments of the present application.

[0012] Figure 3B is a schematic diagram of a sensor array according to some embodiments of the present application.

[0013] Figure 3C is a schematic diagram of a sensor array according to some embodiments of the present application.

[0014] Figure 3D is a schematic diagram of a sensor array according to some embodiments of the present application.

[0015] Figure 4A is a schematic diagram of the electric field within a sensor array according to some embodiments of the present application.

[0016] Figure 4B is a schematic diagram of the electric field within a sensor array according to some embodiments of the present application.

[0017] Figure 5 are cross-sectional views of sensors according to some comparative embodiments of the present application.

[0018] Figure 6 are cross-sectional views of sensors according to some comparative embodiments of the present application.

[0019] Fig. 7A is a schematic diagram of a sensor according to some embodiments of the present application.

[0020] Figure 7B is a cross-sectional view of a sensor according to some embodiments of the present application.

[0021] Figure 8is a flow chart including operations for controlling an array of electrical components according to some embodiments of the present application.

[0022] Common reference numerals are used throughout the drawings and the specific embodiments to indicate the same or similar elements. According to the following detailed description made in conjunction with the accompanying drawings, the features of the present application will be more obvious. DETAILED DESCRIPTION

[0023] The following disclosure provides many different embodiments or examples for implementing the different features of the provided subject matter. Specific examples of components and arrangements are described below. Of course, these are just examples and are not intended to be restrictive. In the present application, mentioning in the following description that a first feature is formed on or on a second feature may include an embodiment in which the first feature is directly contacted with the second feature, and may also include an embodiment in which an additional feature may be formed between the first feature and the second feature so that the first feature may not be directly contacted with the second feature. In addition, the present application may repeat reference numerals and / or letters in various examples. This repetition is for the purpose of simplification and clarity, and does not itself specify the relationship between the various embodiments and / or configurations discussed.

[0024] The embodiments of the present application are discussed in detail below. However, it should be understood that the present application provides many applicable concepts that can be embodied in a wide variety of specific contexts. The specific embodiments discussed are merely illustrative and do not limit the scope of the present application.

[0025] Figure 1A is a schematic diagram of a sensing system according to some embodiments of the present application.

[0026] See also Figure 1A , the sensing system includes a control unit 12, a control interface 14, and a sensor array 10. The control unit 12 is electrically connected to the control interface 14. The control interface 14 is electrically connected to the sensor array 10. The control unit 12 may be configured to control the operation of the sensor array 10.

[0027] In some embodiments, the control unit 12 is electrically connected to the sensor array 10 by means of a control interface 14. In other embodiments, the control interface 14 may be removed, and thus the control unit 12 may be connected to the sensor array 10 directly.

[0028] The control unit 12 may include (but is not limited to), for example: a central processing unit (CPU), a microprocessor, an application specific instruction set processor (ASIP), a machine control unit (MCU), a graphics processing unit (GPU), a physical processing unit (PPU), a digital signal processor (DSP), an image processor, a coprocessor, a storage controller, a floating point unit, a network processor, a multi-core processor, a front-end processor, etc. In some embodiments, the control unit 12 may be a combinational logic.

[0029] In some embodiments, control interface 14 may receive a signal from control unit 12 and provide the signal to one of the sensors within sensor array 10. In other embodiments, control interface 14 may relay the signal provided by control unit 12 to circuitry (not shown) related to the operation of one of the sensors within sensor array 10. In further embodiments, control interface 14 may receive a signal from one of the sensors within sensor array 10 and provide the signal to control unit 12.

[0030] The sensor array 10 includes several sensors. The sensors of the sensor array 10 may be arranged in a matrix, and the sensor array 10 includes sensors 2 and sensors 4. In some embodiments, the sensors 2 and sensors 4 may be bioFET sensors, and in other embodiments, they may be other types of sensors. In some embodiments, the sensor array 10 may include sensors of the same type, and in other embodiments, the sensor array 10 may include sensors of different types.

[0031] In some embodiments, the sensor array 10 may be arranged in a rectangular configuration. In some embodiments, the sensor array 10 may be arranged in a circular configuration. In some embodiments, the sensor array 10 may be arranged in an irregular configuration. In some embodiments, the sensor array 10 may be arranged in any suitable configuration.

[0032] Sensor 2 includes a sensing portion (not shown) and a drive electrode (not shown). Sensor 4 includes a sensing portion (not shown) and a drive electrode (not shown). In some embodiments, the sensing portion and the drive electrode of sensor 2 may be disposed adjacent to each other, while in other embodiments, they may be disposed in substantially coplanar planes. In some embodiments, the sensing portion and the drive electrode of sensor 4 may be disposed adjacent to each other, while in other embodiments, they may be disposed in substantially coplanar planes.

[0033] The sensing portion and driving electrode of sensor 2 may be referred to as a sensor / electrode pair in the subsequent paragraphs of this application. Similarly, the sensing portion and driving electrode of sensor 4 may be referred to as a sensor / electrode pair in the subsequent paragraphs of this application.

[0034] FET biosensors can detect the amount, percentage, or other characteristics of a specific biomaterial in an aqueous solution by means of an electric field generated between a driving electrode and a sensing portion of the FET biosensor. The electric field affects the current or voltage generated by the FET biosensor, and thus the characteristics of a specific biomaterial can be determined by comparing the current change or voltage change with a generated lookup table (e.g., generated based on experimental results). Multiple FET biosensors arranged in an array can simultaneously detect several different biomaterials in an aqueous solution. However, if multiple FET biosensors are arranged adjacent to each other, the electric fields generated by different FET biosensors may interfere with each other, and the interference may adversely affect the accuracy of the FET biosensor.

[0035] For example, the electric field generated by sensor 2 may adversely affect the accuracy of sensor 4 , and the electric field generated by sensor 4 may adversely affect the accuracy of sensor 2 .

[0036] Figure 1B is a cross-sectional view of a portion of a sensor array according to some embodiments of the present application. Figure 1B Show along Figure 1A FIG. 1 is a cross-sectional view of a portion of the sensor array 10 along the dashed line AA′ shown in FIG. Figure 1B , the sensor 2 includes a sensing portion 2s and a driving electrode 2e. The driving electrode 2e can be electrically connected to a reference voltage Vref via a switch s1. When the switch s1 is turned on, a signal (eg, voltage Vref) can be provided to the driving electrode 2e.

[0037] The sensing portion 2s may be electrically connected to the output terminal Drain_OUT via the switch s2. Figure 1B , the sensor 4 includes a sensing portion 4s and a driving electrode 4e. The driving electrode 4e can be electrically connected to a reference voltage Vref via a switch s3. The sensing portion 4s can be electrically connected to an output terminal Drain_OUT via a switch s4.

[0038] The switches s1, s2, s3, and s4 may be controlled by signals provided by the control unit 12. The control unit 12 may provide signals to turn on the switches s1, s2, s3, and s4. The control unit 12 may provide signals to turn off the switches s1, s2, s3, and s4. In some embodiments, the switches s1 and s2 may be controlled by a signal Sel_2. In some embodiments, the switches s3 and s4 may be controlled by a signal Sel_4. In other embodiments, the switches s1 and s2 may be controlled by different signals. In other embodiments, the switches s3 and s4 may be controlled by different signals.

[0039] Switches s1 and s2 may be turned on at the same time, and thus may activate the sensor 2. When switch s2 is turned on, the output terminal Drain_OUT may provide a signal generated by the sensing portion 2s to the control unit 12. In addition, the output terminal Drain_OUT may output a voltage generated by the sensing portion 2s, and may output a current generated by the sensing portion 2s.

[0040] The switches s3 and s4 may be turned on at the same time, and thus the sensor 4 may be activated. When the switch s3 is turned on, a signal (e.g., voltage Vref) may be provided to the driving electrode 4e. When the switch s4 is turned on, the output terminal Drain_OUT may provide a signal generated by the sensing portion 4s to the control unit 12. In addition, the output terminal Drain_OUT may output a voltage generated by the sensing portion 4s, and may output a current generated by the sensing portion 4s.

[0041] When sensor 2 is activated, the control unit 12 may keep sensor 4 deactivated. By controlling the adjacent sensor 4 to be deactivated, interference caused by sensor 4 may be avoided. Similarly, when sensor 4 is activated, the control unit 12 may keep sensor 2 deactivated. By controlling the adjacent sensor 2 to be deactivated, interference caused by sensor 2 may be avoided.

[0042] In some embodiments, sensor 2 and sensor 4 may be activated simultaneously, and in other embodiments, they may be activated sequentially. In other embodiments, sensor 2 and sensor 4 may be activated according to a time specified by control unit 12.

[0043] Figure 2A is a schematic diagram of a sensor array according to some embodiments of the present application.

[0044] Figure 2A The arrangement of the sensor array 20 is shown. The sensor array 20 includes a plurality of sensing portions and a plurality of driving electrodes. The sensing portions and the driving electrodes may be different types of electrical components. Each of the sensing portions may be referred to as a first type of electrical component. Each of the driving electrodes may be referred to as a second type of electrical component.

[0045] In some embodiments, the sensor array 20 may be disposed on a substrate. The sensor array 20 includes drive electrodes 20e1, 20e2, 20e3, 20e4, and 20e5, and sensing portions 20s1 and 20s5. Figure 2A The sizes of the drive electrodes and sensing portions depicted in FIG. 5 are not drawn to scale and are for illustration purposes only.

[0046] The driving electrodes 20e1, 20e2, 20e3, and 20e4 may be disposed adjacent to the sensing portion 20s1. The driving electrodes 20e1, 20e2, 20e3, and 20e4 may be disposed around the sensing portion 20s1. The driving electrode 20e1 may be disposed adjacent to a first side of the sensing portion 20s1. The driving electrode 20e2 may be disposed adjacent to a second side of the sensing portion 20s1. The driving electrode 20e3 may be disposed adjacent to a third side of the sensing portion 20s1. The driving electrode 20e4 may be disposed adjacent to a fourth side of the sensing portion 20s1.

[0047] In some embodiments, drive electrodes 20e1, 20e2, 20e3, and 20e4 and sensing portion 20s1 may be activated simultaneously by control unit 12. In other embodiments, remaining drive electrodes and remaining sensing portions within sensor array 20 may be deactivated by control unit 12.

[0048] See also Figure 2A During the activation period of the driving electrodes 20e1, 20e2, 20e3 and 20e4 and the sensing portion 20s1, the driving electrode 20e5 may be a deactivated driving electrode. Figure 2A , during the activation period of the driving electrodes 20e1, 20e2, 20e3, and 20e4 and the sensing portion 20s1, the sensing portion 20s5 may be a deactivated sensing portion.

[0049] By activating the driving electrodes around the sensing portion 20s1, the electric field sensed by the sensing portion 20s1 can be more stable. By activating the driving electrodes around the sensing portion 20s1, the signal output by the sensing portion 20s1 can be more accurate. In addition, by activating the driving electrodes around the sensing portion 20s1, the characteristics of the determined biomaterial can be more accurate.

[0050] By disabling the adjacent sensing portions around the sensing portion 20s1, interference caused by the adjacent sensing portions can be avoided, and by disabling the drive electrodes not adjacent to the sensing portion 20s1, interference caused by those drive electrodes can also be avoided. In some embodiments, when the sensing portion 20s1 is activated, the number N of sensing portions of the sensor array 20 can be disabled, where N is a positive integer greater than one.

[0051] See also Figure 2A, the sensing portion 20s1 may be the Nth sensing portion of the sensor array 20. The sensing portion 20s5 may be the (N+1)th sensing portion of the sensor array 20. The driving electrode 20e1 may be the Mth driving electrode of the sensor array 20. The driving electrode 20e5 may be the (M+1)th driving electrode of the sensor array 20. In some embodiments, the control unit 12 may be configured to activate the Nth sensing portion (i.e., the sensing portion 20s1) and the Mth driving electrode (i.e., the driving electrode 20e1), and simultaneously deactivate the (N+1)th sensing portion (i.e., the sensing portion 20s5) and the (M+1)th driving electrode (i.e., the driving electrode 20e5).

[0052] See also Figure 2A , the driving electrode 20e4 may be the (M+2)th driving electrode of the sensor array 20. In some embodiments, the control unit 12 may be configured to simultaneously activate the Nth sensing portion (i.e., the sensing portion 20s1), the Mth driving electrode (i.e., the driving electrode 20e1), and the (M+2)th driving electrode (i.e., the driving electrode 20e4).

[0053] See also Figure 2A , the driving electrode 20e3 may be the (M+3)th driving electrode of the sensor array 20, and the driving electrode 20e2 may be the (M+4)th driving electrode of the sensor array 20. In some embodiments, the control unit 12 may be configured to simultaneously activate the Nth sensing portion (i.e., sensing portion 20s1), the Mth driving electrode (i.e., driving electrode 20e1), the (M+2)th driving electrode (i.e., driving electrode 20e4), the (M+3)th driving electrode (i.e., driving electrode 20e3), and the (M+4)th driving electrode (i.e., driving electrode 20e2).

[0054] See also Figure 2A , the Mth driving electrode (i.e., driving electrode 20e1) can be disposed on a first side adjacent to the Nth sensing portion (i.e., sensing portion 20s1), and the (M+3)th driving electrode (i.e., driving electrode 20e3) can be disposed on a third side adjacent to the Nth sensing portion (i.e., sensing portion 20s1) opposite to the first side.

[0055] See also Figure 2A , the (M+2)th driving electrode (i.e., driving electrode 20e4) may be disposed on a second side adjacent to the Nth sensing portion (i.e., sensing portion 20s1), and the (M+4)th driving electrode (i.e., driving electrode 20e2) may be disposed on a fourth side adjacent to the Nth sensing portion (i.e., sensing portion 20s1) opposite to the second side.

[0056] Figure 2B is a schematic diagram of a sensor array according to some embodiments of the present application.

[0057] Figure 2B The arrangement of the sensor array 20 is shown. The sensor array 20 includes a plurality of sensing portions and a plurality of driving electrodes. The sensor array 20 includes a driving electrode 20e1. The sensor array 20 includes sensing portions 20s1, 20s2, 20s3, and 20s4. Figure 2B The sizes of the drive electrodes and sensing portions depicted in FIG. 5 are not drawn to scale and are for illustration purposes only.

[0058] The sensing portions 20s1, 20s2, 20s3, and 20s4 may be disposed adjacent to the drive electrode 20e1. The sensing portions 20s1, 20s2, 20s3, and 20s4 may be disposed around the drive electrode 20e1. In some embodiments, the sensing portions 20s1, 20s2, 20s3, and 20s4 and the drive electrode 20e1 may be activated simultaneously by the control unit 12, and in other embodiments, the remaining drive electrodes and the remaining sensing portions within the sensor array 20 may be deactivated by the control unit 12.

[0059] By activating the sensing portions 20s1, 20s2, 20s3, and 20s4 around the driving electrode 20e1, the electric field generated by the driving electrode 20e1 can be uniformly sensed by the sensing portions 20s1, 20s2, 20s3, and 20s4. By activating the sensing portions 20s1, 20s2, 20s3, and 20s4 around the driving electrode 20e1, the characteristics of the biomaterial determined by the sensing portions 20s1, 20s2, 20s3, and 20s4 can be more accurate. In some embodiments, the activated sensing portions 20s1, 20s2, 20s3, and 20s4 can be used to detect different biomaterial characteristics. In some embodiments, the activated sensing portions 20s1, 20s2, 20s3, and 20s4 can provide different orientations relative to a specific biomaterial.

[0060] See also Figure 2B , the sensing portion 20s2 may be the (N+2)th sensing portion of the sensor array 20. The Nth sensing portion (i.e., sensing portion 20s1) and the (N+2)th sensing portion (i.e., sensing portion 20s2) are disposed around the Mth driving electrode (i.e., driving electrode 20e1). In some embodiments, the control unit 12 may be configured to simultaneously activate the Nth sensing portion (i.e., sensing portion 20s1), the (N+2)th sensing portion (i.e., sensing portion 20s2), and the Mth driving electrode (i.e., driving electrode 20e1).

[0061] See also Figure 2B, the sensing portion 20s3 may be the (N+3)th sensing portion of the sensor array 20, and the sensing portion 20s4 may be the (N+4)th sensing portion of the sensor array 20. In some embodiments, the control unit 12 may be configured to simultaneously activate the Nth sensing portion (i.e., sensing portion 20s1), the (N+2)th sensing portion (i.e., sensing portion 20s2), the (N+3)th sensing portion (i.e., sensing portion 20s3), the (N+4)th sensing portion (i.e., sensing portion 20s4), and the Mth driving electrode (i.e., driving electrode 20e1).

[0062] See also Figure 2B , the Nth sensing portion (i.e., sensing portion 20s1) may be disposed on a first side adjacent to the Mth driving electrode (i.e., driving electrode 20e1), the (N+3)th sensing portion (i.e., sensing portion 20s3) may be disposed on a third side adjacent to the Mth driving electrode (i.e., driving electrode 20e1) opposite to the first side, the (N+2)th sensing portion (i.e., sensing portion 20s2) may be disposed on a second side adjacent to the Nth sensing portion (i.e., sensing portion 20s1), and the (N+4)th sensing portion (i.e., sensing portion 20s4) may be disposed on a fourth side adjacent to the Mth driving electrode (i.e., driving electrode 20e1) opposite to the second side.

[0063] Figure 3A is a schematic diagram of a sensor array according to some embodiments of the present application.

[0064] See also Figure 3A , the sensor array 30 includes a plurality of sensing portions and a plurality of driving electrodes. In some embodiments, the sensor array 30 may be disposed on a substrate. The sensor array 30 may include a driving electrode 30e1 and sensing portions 30s1, 30s2, 30s3, and 30s4. The sensing portions 30s1, 30s2, 30s3, and 30s4 may be disposed adjacent to the driving electrode 30e1. The sensing portions 30s1, 30s2, 30s3, and 30s4 may be disposed around the driving electrode 30e1.

[0065] The driving electrode 30e1 may be symmetrical with respect to an axis 30x extending in the horizontal direction. The driving electrode 30e1 may also be symmetrical with respect to an axis 30y extending in the vertical direction.

[0066] In some embodiments, sensing portions 30s1, 30s2, 30s3, and 30s4 and drive electrode 30e1 may be activated simultaneously by control unit 12. In other embodiments, remaining drive electrodes and remaining sensing portions within sensor array 30 may be deactivated by control unit 12.

[0067] The driving electrode 30e1 may include a first portion 30p1, a second portion 30p2, a third portion 30p3, and a fourth portion 30p4. The first portion 30p1 may extend toward the space between the sensing portions 30s3 and 30s4. The second portion 30p2 may extend toward the space between the sensing portions 30s1 and 30s4. The third portion 30p3 may extend toward the space between the sensing portions 30s1 and 30s2. The fourth portion 30p4 may extend toward the space between the sensing portions 30s2 and 30s3.

[0068] The first portion 30p1 may enhance the accuracy of the sensing portions 30s3 and 30s4. The second portion 30p2 may enhance the accuracy of the sensing portions 30s1 and 30s4. The third portion 30p3 may enhance the accuracy of the sensing portions 30s1 and 30s2. The fourth portion 30p4 may enhance the accuracy of the sensing portions 30s2 and 30s3.

[0069] See also Figure 3A , the driving electrode 30e1 may be the Mth driving electrode of the sensor array 30. The Mth driving electrode may include a first portion 30p1, a second portion 30p2, a third portion 30p3, and a fourth portion 30p4. The sensing portion 30s1 may be the Nth sensing portion of the sensor array 30. The sensing portion 30s1 may be the Nth sensing portion of the sensor array 30. The sensing portion 30s3 may be the (N+3)th sensing portion of the sensor array 30. The sensing portion 30s4 may be the (N+4)th sensing portion of the sensor array 30. The first portion 30p1 of the Mth driving electrode extends toward a space between the (N+3)th sensing portion (i.e., sensing portion 30s3) and the (N+4)th sensing portion (i.e., sensing portion 30s4), and the second portion 30p2 of the Mth driving electrode extends toward a space between the Nth sensing portion (i.e., sensing portion 30s1) and the (N+4)th sensing portion (i.e., sensing portion 30s4).

[0070] Figure 3B is a schematic diagram of a sensor array according to some embodiments of the present application.

[0071] Figure 3B An arrangement of a sensor array 40 including a plurality of sensing portions and a plurality of driving electrodes is shown. In some embodiments, the sensor array 40 may be disposed on a substrate. The sensor array 40 includes driving electrodes 40e1, 40e2, 40e3, 40e4, and 40e5. Furthermore, the sensor array 40 includes a sensing portion 40s1. Figure 3B The sizes of the drive electrodes and sensing portions depicted in FIG. 5 are not drawn to scale and are for illustration purposes only.

[0072] The sensor array 40 may include drive electrodes of different shapes. In some embodiments, the shape of the drive electrode 40e1 is different from the shape of the drive electrode 40e5. Figure 3B , the driving electrodes 40e1, 40e2, 40e3, and 40e4 have a shape similar to the letter "C", and the driving electrode 40e5 has a rectangular shape. The shapes of the driving electrodes 40e1, 40e2, 40e3, and 40e4 can enhance the accuracy of the sensing part 40s1.

[0073] The driving electrodes 40e1, 40e2, 40e3, and 40e4 may be disposed adjacent to the sensing portion 40s1. The driving electrodes 40e1, 40e2, 40e3, and 40e4 may be disposed around the sensing portion 40s1. In some embodiments, the driving electrodes 40e1, 40e2, 40e3, and 40e4 and the sensing portion 40s1 may be activated simultaneously by the control unit 12. In other embodiments, the remaining driving electrodes and the remaining sensing portions within the sensor array 40 may be deactivated by the control unit 12.

[0074] Figure 3C is a schematic diagram of a sensor array according to some embodiments of the present application.

[0075] Figure 3C An arrangement of a sensor array 40' is shown that includes a plurality of sensing portions and a plurality of drive electrodes. In some embodiments, the sensor array 40' may be disposed on a substrate. The sensor array 40' includes drive electrodes 40e1', 40e2', 40e3', 40e4', and 40e5'. In addition, the sensor array 40' includes sensing portions 40s1', 40s2', 40s3', and 40s4'.

[0076] The driving electrodes 40e1', 40e2', 40e3', and 40e4' may be disposed adjacent to the sensing portion 40s1'. The driving electrodes 40e1', 40e2', 40e3', and 40e4' may be disposed around the sensing portion 40s1'.

[0077] In some embodiments, drive electrodes 40e1', 40e2', 40e3', and 40e4' and sensing portion 40s1' may be activated simultaneously by control unit 12. In other embodiments, remaining drive electrodes and remaining sensing portions within sensor array 40' may be deactivated by control unit 12.

[0078] See also Figure 3C , the driving electrode 40e5' may be symmetrical with respect to the axis 40x extending in the horizontal direction. The driving electrode 40e5' may also be symmetrical with respect to the axis 40y extending in the vertical direction. In some embodiments, the shapes of the driving electrodes 40e1', 40e2', 40e3', 40e4' and 40e5' may be substantially the same as each other.

[0079] The driving electrode 40e3' may include a first portion 40p1, a second portion 40p2, a third portion 40p3, and a fourth portion 40p4. The first portion 40p1 may extend toward the sensing portion 40s1'. The second portion 40p2 may extend toward the sensing portion 40s2'. The third portion 40p3 may extend toward the sensing portion 40s3'. The fourth portion 40p4 may extend toward the sensing portion 40s4'.

[0080] The first portion 40p1 may enhance the accuracy of the sensing portion 40s1'. The second portion 40p2 may enhance the accuracy of the sensing portion 40s2'. The third portion 40p3 may enhance the accuracy of the sensing portion 40s3'. The fourth portion 40p4 may enhance the accuracy of the sensing portion 40s4'.

[0081] Figure 3D is a schematic diagram of a sensor array according to some embodiments of the present application.

[0082] Figure 3D An arrangement of a sensor array 40" is shown that includes a plurality of sensing portions and a plurality of drive electrodes. In some embodiments, the sensor array 40" may be disposed on a substrate. The sensor array 40" includes drive electrodes 40e1", 40e2", 40e3", 40e4", and 40e5". In addition, the sensor array 40" includes sensing portions 40s1", 40s2", 40s3", and 40s4".

[0083] See also Figure 3D , the driving electrode 40e5" may be symmetrical with respect to the axis 40x extending in the horizontal direction. The driving electrode 40e5" may also be symmetrical with respect to the axis 40y extending in the vertical direction. In some embodiments, the shapes of the driving electrodes 40e1", 40e2", 40e3", 40e4" and 40e5" may be substantially the same as each other.

[0084] The drive electrodes 40e1", 40e2", 40e3", 40e4" and 40e5" may include an octagonal shape. In some embodiments, the drive electrodes 40e1", 40e2", 40e3", 40e4" and 40e5" may be in the shape of a regular octagon. The shapes of the drive electrodes 40e1", 40e2", 40e3", 40e4" and 40e5' may enhance the accuracy of their adjacent sensing portions. For example, the drive electrode 40e3" may enhance the accuracy of the sensing portions 40s1", 40s2", 40s3" and 40s4".

[0085] Figure 4A is a schematic diagram of the electric field within a sensor array according to some embodiments of the present application.

[0086] Figure 4A A sensor array 50 is shown that includes a drive electrode 50e and sense portions 50s1, 50s2, and 50s3. When the drive electrode 50e and the sense portion 50s1 are activated, an electric field 52 may be generated between the drive electrode 50e and the sense portion 50s1. When the drive electrode 50e and the sense portion 50s2 are activated, an electric field 54 may be generated between the drive electrode 50e and the sense portion 50s2. When the drive electrode 50e and the sense portion 50s3 are activated, an electric field 56 may be generated between the drive electrode 50e and the sense portion 50s3.

[0087] Electric field 52 may interfere with electric field 54 or 56 and may adversely affect the accuracy of sensing portions 50s2 and 50s3. Electric field 54 may interfere with electric field 52 or 56 and may adversely affect the accuracy of sensing portions 50s1 and 50s3. Electric field 56 may interfere with electric field 52 or 54 and may adversely affect the accuracy of sensing portions 50s1 and 50s2. By controlling the activation of drive electrode 50e and predetermined sensing portions, undesirable interference may be eliminated. By activating drive electrode 50e and selected sensing portions while deactivating unselected sensing portions, undesirable interference may be eliminated.

[0088] Figure 4B is a schematic diagram of the electric field within a sensor array according to some embodiments of the present application.

[0089] Figure 4B A sensor array 60 is shown including drive electrodes 60e1 , 60e2 and 60e3 and sense portions 60s1 , 60s2 and 60s3.

[0090] When the driving electrode 60e1 and the sensing portion 60s1 are activated, an electric field 62 may be generated therebetween. When the driving electrode 60e1 and the sensing portion 60s2 are activated, an electric field 64 may be generated therebetween. When the driving electrode 60e1 and the sensing portion 60s3 are activated, an electric field 66 may be generated therebetween.

[0091] When the drive electrode 60e2 and the sensing portion 60s1 are activated, an electric field 68 may be generated therebetween. When the drive electrode 60e2 and the sensing portion 60s2 are activated, an electric field 70 may be generated therebetween.

[0092] When the drive electrode 60e3 and the sensing portion 60s2 are activated, an electric field 72 may be generated therebetween. When the drive electrode 60e3 and the sensing portion 60s3 are activated, an electric field 74 may be generated therebetween.

[0093] The electric fields 62, 64, 66, 68, 70, 72, and 74 may interfere with each other. By controlling the activation of predetermined drive electrodes and predetermined sensing portions, the undesirable interference can be eliminated. By activating predetermined drive electrodes and selected sensing portions while deactivating the remaining drive electrodes and sensing portions, the undesirable interference can be eliminated.

[0094] Figure 5 are cross-sectional views of sensors according to some comparative embodiments of the present application.

[0095] See also Figure 5 , the sensor 80 includes a drive electrode 80e and a sensing portion 80s. The sensing portion 80s includes a substrate 82, a passivation layer 83, a drain electrode 84, a source electrode 85, an insulating layer 86, a silicon layer 87, an oxide layer 88, and a polysilicon gate 89. The sensor 80 can be immersed in a fluid 8f. In some embodiments, the fluid 8f can be an aqueous solution. In some embodiments, the fluid 8f can be a liquid solution. In some embodiments, the fluid 8f can be a fluid solution. In some embodiments, the source electrode 85 can be electrically connected to ground.

[0096] A voltage Vds may exist between the drain electrode 84 and the source electrode 85, a voltage Vpgs may exist between the polysilicon gate 89 and the source electrode 85, and a voltage Vfgs may exist between the drive electrode 80e and the source electrode 85. The voltage Vpgs may be referred to as a polysilicon gate voltage because it is a voltage between the polysilicon gate 89 and the source electrode 85. The voltage Vfgs may be referred to as a fluid gate voltage because it is a voltage between the fluid gate (i.e., the drive electrode 80e) and the source electrode 85.

[0097] The biomaterial in the fluid 8f may affect the electric field generated by the sensor 80. The amount of the biomaterial in the fluid 8f may affect the voltage Vpgs between the polysilicon gate 89 and the source electrode 85. The characteristics of the biomaterial in the fluid 8f may affect the voltage Vpgs between the polysilicon gate 89 and the source electrode 85. In some embodiments, the sensor 80 may detect the amount of the biomaterial in the fluid 8f based on the change in the voltage Vpgs. In other embodiments, the sensor 80 may detect the characteristics of the biomaterial in the fluid 8f based on the change in the voltage Vpgs.

[0098] The amount of biomaterial in the fluid 8f may affect the current Id (not shown) flowing through the drain electrode 84. The characteristics of the biomaterial in the fluid 8f may affect the current Id flowing through the drain electrode 84. In some embodiments, the sensor 80 may detect the amount of biomaterial in the fluid 8f based on the change in the current Id. In some embodiments, the sensor 80 may detect the characteristics of the biomaterial in the fluid 8f based on the change in the current Id.

[0099] In some embodiments, ions or charged molecules within the fluid 8f may be attracted by the electric field generated between the polysilicon gate 89 and the source electrode 85 (i.e., generated by Vpgs), and then accumulate on the surface of the insulating layer 86. The net charge of the ions or charged molecules within the fluid 8f affects the effective Vpgs, which in turn affects the channel formed in the silicon layer 87, and therefore, the current Id (not shown) flowing through the drain electrode 84 may be affected.

[0100] In some embodiments, ions or charged molecules within the fluid 8f may be attracted by the electric field generated between the drive electrode 80e and the sensing portion 80s (i.e., generated by Vfgs), and then accumulate on the surface of the insulating layer 86. The net charge of the ions or charged molecules within the fluid 8f affects the effective Vpgs, which in turn affects the channel formed in the silicon layer 87, and therefore, the current Id (not shown) flowing through the drain electrode 84 may be affected.

[0101] See also Figure 5 , the drive electrode 80e is arranged to be separated from the other parts of the sensor 80. The distance between the drive electrode 80e and the other parts of the sensor 80 may have some adverse effects on the performance of the sensor 80, including increasing the difficulty of manufacturing the sensor 80, introducing deviations or errors into the detection results of the sensor 80, and making it difficult to integrate the drive electrode 80e into the sensor 80. Typically, the drive electrode 80e and the sensing portion 80s are assembled manually or by equipment in different processes. The unexpected distance between the drive electrode 80e and the sensing portion 80s may cause deviations or errors because it is difficult to maintain a fixed distance if the drive electrode 80e is manually arranged or by equipment in different processes.

[0102] In addition, the different layers / components of the sensor 80 may include a variety of different materials, may have different geometric configurations, and may be formed using different processes. These differences make it difficult to integrate the drive electrode 80e within the sensor 80.

[0103] Figure 6 are cross-sectional views of sensors according to some comparative embodiments of the present application.

[0104] See also Figure 6 , the sensor 90 includes a substrate 92, a drive electrode 94, and a sensor region 96. The sensor 90 can be immersed in the fluid 9f. In some embodiments, the sensor region 96 can include a substrate 92, a drive electrode 94, and a sensor region 96. Figure 5 Features and structure of the sensing portion 80s.

[0105] The drive electrode 94 includes a conductive material. In some embodiments, the drive electrode 94 includes a metal material. In some embodiments, the drive electrode 94 may include an alloy or a multilayer metal compound, such as Al / Si / Cu or a NiTi alloy (TiNiAg). In some embodiments, the drive electrode 94 may include a semiconductor material, such as silicon, a doped silicon material, a doped polysilicon material, or a polysilicon material. In some embodiments, the drive electrode 94 may include a carbon (C) material. In some embodiments, the drive electrode 94 may include any material rich in electron carriers.

[0106] In some embodiments, the drive electrode 94 may include a noble metal. In a particular embodiment, the drive electrode 94 may include one or more of gold (Au), silver (Ag), platinum (Pt), or aluminum (Al). The drive electrode 94 may be disposed near the sensor region 96. The distance between the drive electrode 94 and the sensor region 96 may be much smaller than the distance between the drive electrode 80e and the rest of the sensor 80. The short distance between the drive electrode 94 and the sensor region 96 makes it easy to integrate the drive electrode 94 into the sensor 90. The short distance between the drive electrode 94 and the sensor region 96 can increase the accuracy of the sensor 90.

[0107] However, a drive electrode 94 composed of a metal or alloy may have several disadvantages. For example, the interface potential between the metal or alloy and the aqueous solution varies with the type / amount of ions and biomaterials within the fluid. The changes caused by the interface potential between the metal or alloy and the fluid may reduce the accuracy of the sensor 90. In another example, a chemical reaction between the drive electrode 94 and the biomolecules may cause the properties (e.g., activity, binding force, etc.) of the biomolecules within the fluid to change.

[0108] In some embodiments, the sensor 90 may include a protective layer 94p disposed on the drive electrode 94. The protective layer 94p may include an insulating material. The protective layer 94p may include an isolating material. The protective layer 94p may prevent undesirable current leakage from the drive electrode 94. The protective layer 94p may prevent undesirable chemical reactions between the drive electrode 94 and biological materials (e.g., water molecules, hydroxide ions) within the fluid 9f. In some embodiments, the protective layer 94p may include SiO2, Al2O3, HfO2, TiN, TiO2, or a mixture thereof.

[0109] It should be noted that the protective layer 94p is optional and may be removed if the material of the drive electrode 94 will not chemically react with the aqueous solution / fluid or the ions and biological materials within the aqueous solution / fluid.

[0110] In some embodiments, the protective layer 94p can be disposed on the drive electrode 94 by utilizing, for example, a coating process, a deposition process, or any other suitable process. In some embodiments, the protective layer 94p can include silicon dioxide. In some embodiments, the protective layer 94p can be formed by natural oxidation of the drive electrode 94.

[0111] Fig. 7A is a schematic diagram of a sensor according to some embodiments of the present application.

[0112] See also Fig. 7A , the sensor 100 includes several electrodes disposed on a substrate. The sensor 100 includes a drain electrode 104, a source electrode 105, and a gate electrode 109. The sensor 100 includes an active silicon layer 107 disposed between the drain electrode 104 and the source electrode 105. An aqueous solution or fluid droplet 100w may be placed over the active silicon layer 107. There is a distance 100d between the source electrode 105 and the gate electrode 109 and between the drain electrode 104 and the gate electrode 109. An insulating layer 106 may be disposed to cover a portion of the drain electrode 104, and disposed to cover a portion of the source electrode 105.

[0113] The gate electrode 109 may serve as a driving electrode. The gate electrode 109 may include a silicon material. The gate electrode 109 may include a doped silicon material. In some embodiments, the gate electrode 109 may include a doped P-type silicon material. In some embodiments, the gate electrode 109 may include a doped N-type silicon material. The gate electrode 109 may include a polysilicon material. The gate electrode 109 may include a doped polysilicon material. The gate electrode 109 may include a metal material with an insulating material.

[0114] The gate electrode 109 may be referred to as a polysilicon gate (poly-silicon gate or poly gate). The sensor 100 may detect the amount / characteristics of the biomaterial within the fluid droplet 100w. The gate electrode 109 may replace the drive electrode 94 composed of a metal or alloy. In addition, the gate electrode 109 may eliminate the error generated by the interface potential between the metal or alloy and the aqueous solution.

[0115] Figure 7B is a cross-sectional view of a sensor according to some embodiments of the present application.

[0116] Figure 7B Show along Fig. 7A100 is a cross-sectional view of the sensor 100 along the dashed line BB' shown in FIG. The sensor 100 includes a substrate 101 and a passivation layer 102 disposed on the substrate 101. An active silicon layer 107 is disposed on the passivation layer 102. A drain electrode 104 is disposed on the passivation layer 102 and covers a portion of the active silicon layer 107. A source electrode 105 is disposed on the passivation layer 102 and covers a portion of the active silicon layer 107. An insulating layer 106 surrounds a portion of the drain electrode 104. The insulating layer 106 surrounds a portion of the source electrode 105. The sensing portion 100s and the gate electrode 109 are immersed in the fluid droplet 100w.

[0117] Figure 1A Sensors 2 and 4 shown in may include structures similar to that of sensor 100 . Figure 2A The sensing portion 20s1 and the driving electrodes 20e1, 20e2, 20e3, 20e4, and 20e5 shown in FIG. 1 may include structures similar to those of the sensor 100. Figure 2B The sensing portions 20s1, 20s2, 20s3, and 20s4 and the driving electrode 20e1 shown in FIG. 1 may include structures similar to those of the sensor 100. Figure 3B The sensing portions 30s1 , 30s2 , 30s3 , and 30s4 and the driving electrode 30e1 shown in FIG. 1 may include structures similar to those of the sensor 100 . Figure 3B The sensing portion 40s1 and the driving electrodes 40e1, 40e2, 40e3, 40e4, and 40e5 shown in FIG. 4 may include structures similar to those of the sensor 100.

[0118] Figure 8 is a flow chart including operations for controlling an array of electrical components according to some embodiments of the present application. Figure 8 Flowchart 800 is shown. Flowchart 800 includes operations 802, 804, and 806.

[0119] In operation 802, a first electrical component of a first type may be activated by a control unit at a first time. For example, Figure 2A The sensing portion 20s1 may be activated by the control unit 12 at a first time. In another example, Figure 2B The driving electrode 20e1 may be activated by the control unit 12 at a first time.

[0120] In operation 804, a number P of electrical components of a first type may be disabled by a control unit at a first time. The number P may be an integer equal to or greater than 1. For example, see Figure 2A , the sensing portion 20s5 (and all other non-activated sensing portions) may be deactivated by the control unit 12 at the first time the sensing portion 20s1 is activated. Figure 2B, all the inactive electrodes may be deactivated by the control unit 12 at the first time the driving electrode 20e1 is activated.

[0121] In operation 806, a number Q of electrical components of the second type may be disabled by the control unit at a first time. The number Q may be an integer equal to or greater than 1. For example, see Figure 2A , the drive electrode 20e5 (and all other non-activated drive electrodes) may be deactivated by the control unit 12 at the first time the sensing portion 20s1 is activated. Figure 2B , all unactivated sensors may be deactivated by the control unit 12 at the first time the drive electrode 20e1 is activated.

[0122] As used herein, spatially relative terms such as "under," "below," "lower," "above," "upper," "lower," "left," "right," and the like may be used herein for ease of description to describe the relationship of one element or feature relative to another element or features as shown in the figures. In addition to the orientations depicted in the figures, spatially relative terms are also intended to cover different orientations of the device in use or operation. The device may be oriented in other ways (rotated 90 degrees or in other orientations), and the spatially relative descriptors used herein may be interpreted accordingly. It should be understood that when an element is referred to as being "connected to" or "coupled to" another element, it may be directly connected or coupled to the other element, or there may be intervening elements.

[0123] As used herein, the terms "approximately", "substantially", "generally" and "about" are used to describe and take into account minor variations. When used in conjunction with an event or situation, the term may refer to instances where the event or situation occurs precisely and instances where the event or situation is very close to occurring. As used herein with respect to a given value or range, the term "approximately" generally means within ±10%, ±5%, ±1% or ±0.5% of a given value or range. In this article, a range may be expressed from one endpoint to another or between two endpoints. Unless otherwise specified, all ranges disclosed herein include endpoints. The term "substantially coplanar" may refer to two surfaces positioned along the same plane within a few microns (μm), such as within 10 μm, within 5 μm, within 1 μm or within 0.5 μm, positioned along the same plane. When referring to a numerical value or feature being "substantially" the same, the term may refer to a value within ±10%, ±5%, ±1% or ±0.5% of the average value of the value.

[0124] The foregoing summarizes several embodiments of the present application and features of the details. The embodiments described in the present application can be easily used as the basis for designing or modifying other processes and structures for implementing the same or similar purposes and / or achieving the same or similar advantages of the embodiments introduced herein. Such equivalent constructions do not depart from the spirit and scope of the present application, and various changes, substitutions and modifications can be made without departing from the scope of the present application.

Claims

1. A sensing system comprising: substrate; a sensor array disposed on the substrate; as well as a control unit configured to control the sensor array; The sensor array comprises: Nth sensing part; Mth driving electrode; (N+1)th sensing part; (N+2)th sensing part; (N+3)th sensing part; (N+4)th sensing portion; and (M+1)th driving electrode; Wherein M and N are both integers equal to or greater than 1; wherein the Nth sensing portion, the (N+2)th sensing portion, the (N+3)th sensing portion, and the (N+4)th sensing portion are disposed around the Mth driving electrode, wherein the Nth sensing portion is disposed at a first side adjacent to the Mth driving electrode, the (N+3)th sensing portion is disposed at a third side adjacent to the Mth driving electrode opposite to the first side, the (N+2)th sensing portion is disposed at a second side adjacent to the Mth driving electrode, and the (N+4)th sensing portion is disposed at a fourth side adjacent to the Mth driving electrode opposite to the second side; wherein the Mth driving electrode comprises a first portion, a second portion, a third portion and a fourth portion, the first portion of the Mth driving electrode extends toward a space between the (N+3)th sensing portion and the (N+4)th sensing portion, and the second portion of the Mth driving electrode extends toward a space between the Nth sensing portion and the (N+4)th sensing portion; wherein the control unit is configured to simultaneously activate the Nth sensing portion, the (N+2)th sensing portion, the (N+3)th sensing portion, the (N+4)th sensing portion, and the Mth driving electrode, and simultaneously deactivate the (N+1)th sensing portion and the (M+1)th driving electrode, wherein the (N+1)th sensing portion and the (N+4)th sensing portion are disposed around the (M+1)th driving electrode, wherein the (N+4)th sensing portion is disposed on a second side adjacent to the (M+1)th driving electrode, and the (N+1)th sensing portion is disposed on a first side adjacent to the (M+1)th driving electrode and adjacent to the second side, and The sensing part includes a substrate, a passivation layer, a drain electrode, a source electrode, an insulating layer, a silicon layer, an oxide layer and a polysilicon gate.

2. The sensing system according to claim 1, wherein the sensor array further comprises an (M+2)th driving electrode, the Mth driving electrode and the (M+2)th driving electrode are arranged around the Nth sensing portion, and wherein the control unit is configured to simultaneously activate the Nth sensing portion, the Mth driving electrode and the (M+2)th driving electrode.

3. The sensing system of claim 2, wherein the sensor array further comprises an (M+3)th driving electrode and an (M+4)th driving electrode disposed around the Nth sensing portion, and wherein the control unit is configured to simultaneously activate the Nth sensing portion, the Mth driving electrode, the (M+2)th driving electrode, the (M+3)th driving electrode, and the (M+4)th driving electrode. 4 . The sensing system of claim 3 , wherein the Mth driving electrode is disposed at a third side adjacent to the Nth sensing portion, and the (M+3)th driving electrode is disposed at a first side adjacent to the Nth sensing portion opposite to the third side.

5. The sensing system of claim 3, wherein the (M+2)th driving electrode is disposed at a second side adjacent to the Nth sensing portion, and the (M+4)th driving electrode is disposed at a fourth side adjacent to the Nth sensing portion opposite to the second side. 6 . The sensing system of claim 1 , wherein the Mth driving electrode is symmetrical with respect to a first axis extending in a horizontal direction, and wherein the Mth driving electrode is symmetrical with respect to a second axis extending in a vertical direction.

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