Electron microscope stage

Abstract

A positioning system for an electron microscope, comprising: a first carriage and a second carriage, the first carriage comprising a holder for holding a workpiece. The first carriage is coupled to one or more first drive units configured to position the workpiece along a first axis, a second axis, and a third axis and along a first tilt axis. The second carriage houses the one or more first drive units and is coupled to one or more second drive units configured to position the workpiece along a second tilt axis.

Description

Technical Field

[0001] This disclosure relates to a positioning system for holding a workpiece in a beam system and a method of using the same. Background Technology

[0002] High-resolution imaging and / or device processing can be accomplished using one or more instruments, such as scanning electron microscopes (SEM), transmission electron microscopes (TEM), ion columns, lasers, and / or other beam-generating instruments. Such instruments may require precise positioning of the workpiece to capture an image or to process a desired area. Typically, a positioning system includes a carrier element on which the workpiece (or sample to be imaged) can be mounted, and an assembly of actuators, such as motors, arranged to move the carrier element.

[0003] Interference with positioning caused by inaccurate positioning and / or vibration in the actuator can affect the imaging and / or machining quality of the workpiece. Therefore, there is a need for improved positioning systems for positioning workpieces. Summary of the Invention

[0004] This article describes a positioning system for use with a beam system and embodiments of a method for moving and positioning a workpiece using such a system.

[0005] In a representative embodiment, the positioning system may include a first bracket and a second bracket. The first bracket may include a holder for holding a workpiece and may be coupled to one or more first drive units configured to translate the workpiece along a first axis, a second axis, and a third axis, and to rotate the workpiece about a second axis. The second bracket may accommodate the one or more first drive units and may be coupled to one or more rotary drive units configured to rotate the workpiece about the first axis.

[0006] In some embodiments, the one or more first drive units are coupled to the first bracket via one or more support members. The positioning system may further include a column extending from the second bracket and having a body portion and a tip portion. The first bracket may be arranged adjacent to the tip portion, and the support member may extend through the body portion.

[0007] In some embodiments, the first bracket is connected to the second bracket via a plurality of resilient support members. The plurality of resilient support members may include a first resilient support member, a second resilient support member, and a third resilient support member, each resilient support member having a first end portion and a second end portion. The resilient support members may be arranged in a triangular shape such that the first end portion of each support member is connected to the first bracket, and the second end portion of each support member is connected to the second bracket.

[0008] In some embodiments, the one or more first drive units may include: a first drive unit, a second drive unit, and a third drive unit configured to be actuated along an axis arranged in a common area, and a fourth drive unit configured to be actuated along an axis arranged in a plane parallel to the common plane. In such embodiments, the first drive unit and the second drive unit may be configured to move the workpiece along the first axis and the second axis, the third drive unit may be configured to move the workpiece along the third axis, and the fourth drive unit may be configured to rotate the workpiece about the second axis.

[0009] The first drive unit, the second drive unit, the third drive unit, and the fourth drive unit can be connected to the first bracket via a first elastic member, a second elastic member, a third elastic member, and a fourth elastic member, respectively. In some embodiments, the positioning system may further include a fifth drive unit connected to the first bracket via a fifth elastic member. The fifth elastic member may include a first portion, which is connected to a second portion via a connector, such that the fifth elastic member has an L-shaped form.

[0010] In another representative embodiment, a charged particle beam system may include a vacuum chamber and a positioning system. The positioning system may extend into the vacuum chamber and may include a first bracket and a second bracket. The first bracket may include a holder for holding a workpiece and may be coupled to one or more first drive units configured to translate the workpiece along a first axis, a second axis, and a third axis, and to rotate the workpiece about a second axis. The second bracket may house the one or more first drive units and may be coupled to one or more rotary drive units configured to rotate the workpiece about the first axis.

[0011] In some embodiments, the positioning system may be disposed within the vacuum chamber. In other embodiments, the positioning system may include a housing disposed on the outer surface of the vacuum chamber and a column extending into the interior of the vacuum chamber. The column may include a body portion and a tip portion, and the first bracket may be disposed within the tip portion.

[0012] In some embodiments, the one or more first drive units may include: a first drive unit, a second drive unit, and a third drive unit configured to actuate along an axis arranged in a common plane, and a fourth drive unit configured to actuate along an axis arranged in a plane parallel to the common plane. The first drive unit and the third drive unit may be configured to move the workpiece along the first axis and the second axis, the second drive unit may be configured to move the workpiece along the third axis, and the fourth drive unit may be configured to rotate the workpiece about the first axis.

[0013] In a representative embodiment, a method may include actuating one or more first drive units coupled to a first bracket holding a workpiece to position the workpiece at a selected location along a first axis, a second axis, and a third axis, and to rotate the workpiece about a second axis to a selected location. The method may further include actuating one or more rotary drive units coupled to a second bracket element to rotate the workpiece about the first axis to a selected location.

[0014] Positioning the workpiece at a selected location may include positioning the workpiece relative to a charged particle beam (CPB). In such embodiments, the method may further include imaging the workpiece using the CPB.

[0015] In some embodiments, the second bracket may accommodate one or more of the first drive units. In some embodiments, the method may further include actuating another first drive unit to position the workpiece at a selected location about the third axis.

[0016] The foregoing and other objects, features, and advantages of this disclosure will become more apparent from the following detailed description with reference to the accompanying drawings. Attached Figure Description

[0017] Figure 1 A representative embodiment of the beam system is shown.

[0018] Figure 2 A schematic cross-sectional side view showing a representative embodiment of a positioning system mounted on the side of an electron microscope system.

[0019] Figure 3A A schematic cross-sectional side view showing another representative embodiment of a positioning system mounted on the side of an electron microscope system.

[0020] Figure 3B The figure shows a cross-sectional view of the positioning system along line AA in Figure 3.

[0021] Figure 3C Close-up images of the sample holder and the α-tilt holder are shown.

[0022] Figure 4 A top view of a cross section along line BB of the positioning system in Figure 3 is shown.

[0023] Figure 5 A schematic cross-sectional side view showing another representative embodiment of a positioning system mounted on the side of an electron microscope system.

[0024] Figure 6 Showing Figure 5 A top view of part of the positioning system.

[0025] Figure 7 Showing Figure 5 A cross-sectional side view of a portion of the positioning system.

[0026] Figure 8 A representative embodiment of the first bracket for use with a positioning system is shown. Detailed Implementation

[0027] introduce

[0028] This disclosure relates to systems and methods for moving positioning systems, such as wafer stage assemblies, within single-beam or multi-beam systems. The systems described herein allow for the precise positioning of workpieces, such as semiconductor wafers, relative to one or more tools (e.g., scanning electron microscopes (SEM), transmission electron microscopes (TEM), ion columns, laser beams, etc.) within a processing chamber (e.g., a vacuum chamber), wherein the tools and / or workpieces can be positioned at various angles as required by the system. Although the following systems and methods are described in some instances with reference to semiconductor processing applications, the positioning systems and control methods described herein are also applicable to other fields requiring precise positioning and / or imaging, such as the preparation and analysis of biological samples.

[0029] Example 1

[0030] refer to Figure 1In one representative embodiment, the multi-beam system may be configured as a dual-beam system 100 comprising a scanning electron microscope (SEM), typically indicated at 102, and an ion beam column, typically indicated at 104. The SEM 102 may include one or more charged particle beam (CPB) lenses, such as a condenser lens 116 and an objective lens 106. In some embodiments, the one or more CPB lenses may be magnetic lenses, and specifically, the objective lens 106 may be a magnetic objective lens. The ion beam column is arranged to provide a focused ion beam (FIB) to a workpiece W, and the SEM 102 is positioned to generate an image of the workpiece W.

[0031] SEM 102 and ion beam column 104 can be mounted to vacuum chamber 108, which houses a movable positioning system 110 for holding workpiece W. Vacuum chamber 108 can be emptied using a vacuum pump (not shown). As discussed in further detail below, positioning system 110 can be moved along the X, Y, and / or Z axes relative to coordinate system 150, as shown, wherein the Y axis is perpendicular to the plane of the page.

[0032] In some embodiments, the SEM 102 can be vertically arranged above the workpiece W and can be used to image the workpiece W, and the ion beam column 104 can be arranged at an angle and can be used to process and / or handle the workpiece W. Figure 1 An exemplary orientation of SEM 102 and ion beam column 104 is shown.

[0033] SEM 102 may include an electron source 112 and may be configured to manipulate the “raw” radiation beam from the electron source 112 and perform operations such as focusing, aberration reduction, clipping (using aperture), filtering, etc. SEM 102 may generate a beam 114 (e.g., an electron beam) propagating along the particle optical axis 115 of the input charged particles. SEM 102 typically includes one or more lenses (e.g., CPB lenses), such as a condenser lens 116 and an objective lens 106, for focusing the beam 114 onto the workpiece W. In some embodiments, SEM 102 may be provided with a deflection unit 118, which may be configured to manipulate the beam 115. For example, the beam 114 may be manipulated to be in a scanning motion (e.g., raster or vector scan) across the sample under study or the workpiece to be processed.

[0034] The dual-beam system 100 may further include a computer processing device and / or a controller 128, which is used, among other things, to control the deflection unit 118, the charged particle beam (CPB) lenses 106, 116, and the detector (not shown), and to display information collected from the detector on a display unit. In some cases, a control computer 130 is provided to establish various excitations, record imaging data, and generally control the operation of both the SEM and FIB.

[0035] Still refer to Figure 1 The ion beam column 104 may include an ion source (e.g., a plasma source 120) and ion beam optics 122. In the illustrated embodiment, the ion beam column 104 is a plasma focused ion beam (PFIB); however, in other embodiments, the ion beam column 104 may be a standard focused ion beam (FIB) with a liquid metal ion source (LMIS) or any other ion source compatible with the focused ion beam column. The ion beam column 104 may generate and / or guide the ion beam 124 along the ion optical axis 125. As described above, the ion column 104 can be used to perform imaging, processing, and / or machining operations on a workpiece, such as cutting, milling, etching, deposition, etc.

[0036] In embodiments where the ion beam is a PFIB, the ion source 120 can be fluidly coupled to a variety of gases via a gas manifold 140, which includes gas sources coupled to the ion source 120 via corresponding valves. During operation of the ion source 120, gases can be introduced, which become charged or ionized, thereby forming a plasma. Ions extracted from the plasma can then be accelerated through an ion beam column 104 to form an ion beam. In other embodiments, the system 100 may include one or more lasers, or other types of milling or diagnostic tools.

[0037] As described above, such multi-beam systems may include a positioning system (e.g., a stage) configured to hold and position a workpiece W. The positioning system may position / move the carrier element with multiple degrees of freedom, including linear movement (e.g., to select a specific area for analyzing the workpiece) and / or angular or rotational movement (e.g., to achieve a selected angle of the workpiece relative to the instrument).

[0038] Example 2

[0039] Figure 2 A cross-sectional view is shown of an exemplary embodiment of a positioning system 200 coupled to a beam system of a charged particle microscope (CPM) configured to be typically indicated at 208. The positioning system 200 may include one or more drive units. For example, in the illustrated embodiment, the system may include three drive units, wherein... Figure 2 Two drive units 202 and 204 can be seen. In the illustrated embodiment, drive units 202 and 204 are configured as walking or stepping piezoelectric drive units, such as Heinmade piezoelectric stepper (HMPS) actuators available from Heinmade BV. However, in other embodiments, the drive units may include other types of actuators, such as other types of piezoelectric actuators, voice coil motors, rack and pinion systems, linear motors, etc.

[0040] The first drive unit 202 and the second drive unit 204 can be configured to position the workpiece W along at least the X-axis and Z-axis relative to the coordinate system 206 defined by the beam system 208. As described above, the positioning system may include three or more drive units to allow the workpiece to move along the X-axis, Y-axis, and Z-axis. In some specific embodiments, the positioning system may include three drive units oriented such that each drive unit is offset from each other by 120 degrees, as described in more detail in other examples.

[0041] As described above, the positioning system 200 can be used with a multi-beam system such as CPM 208. CPM 208 can be, for example, a scanning electron microscope (SEM), a transmission electron microscope (TEM), or a combined scanning and transmission electron microscope (STEM). CPM 208 may include a beam source 210, an upper objective lens 212, a lower objective lens 214, and a detector 216 (e.g., a camera, photomultiplier, photodiode, CMOS detector, CCD detector, photovoltaic cell, etc.). These components may be at least partially positioned within the vacuum chamber 218. A carrier element 220, including the workpiece W positioned thereon, is shown extending from the positioning system 200 into the vacuum chamber 218.

[0042] The positioning system 200 may include a frame or housing 222 coupled to an outer surface 224 of the CPM 208 (e.g., the outer surface of the vacuum chamber 218). The housing 222 may be coupled to the surface 224 using one or more bearings 226, which allow the housing 222 to tilt or rotate relative to the surface 224 (e.g., about the x-axis). In some embodiments, such as Figure 2 As shown, bearing 226 can be connected to mounting element 228 arranged on surface 224 of CPM 208.

[0043] The housing 222 can be arranged such that a portion of the housing, including a carrier element 220 for holding the workpiece W, can extend through an opening in the side of the CPM 208 and at least partially enter the vacuum chamber 218. The positioning system 200 can be configured to adjust the position of the carrier element 220 by adjusting the position of the workpiece W relative to the bundle 230 using drive units (e.g., a first drive unit 202 and a second drive unit 204), as described in more detail below.

[0044] Carrier element 220 can be coupled to first guide 232 and second guide 234. Each guide 232, 234 can be further coupled to a corresponding strut member 238, 240 via a corresponding joint 236 (e.g., hinge, steering knuckle joint, ball joint, etc.). Strut 238 can be pivotally coupled to locator element or member 242 at pivot joint 239, and strut 240 can be pivotally coupled to locator element or member 244 at pivot joint 241. First drive unit 202 and second drive unit 204 can be configured to engage locator elements 242 and 244, respectively. Drive unit 202 can be configured to move locator element 242 along its axis toward and away from the rear wall 243 of housing 222 in a series of step movements, as described in more detail below. Drive unit 204 can be configured to move locator element 244 similarly to locator element 242 along its axis toward and away from the rear wall 245 of housing 222. Supports 238 and 240 (along with the mover elements and drive units) can be positioned at an angle relative to each other, such that movement of mover element 242 away from rear wall 243 and movement of mover element 244 toward rear wall 245 can cause carrier element 220 to tilt out of the XY plane. Movement of mover elements 242 and 244 away from walls 243 and 245 and toward CPM 208 can move carrier element 200 along the X-axis. In the illustrated embodiment, mover elements 242 and 244 are positioned at a 90° angle relative to each other. In some embodiments, the three drive units and corresponding mover elements can be arranged around the axis of carrier element 220 at an angular distance of 120°.

[0045] Each mover element 242, 244 may include a corresponding encoder scale 246. A first positioning encoder 248 and a second positioning encoder 250 (e.g., an optical encoder) mounted on the housing 222 may be configured to determine the position of each mover element 242, 244 based on the encoder scale 246, respectively. The encoder scale 246 may be coupled to or integrally formed with the movers 242, 244.

[0046] Each encoder 248, 250 can be configured to determine the position of a corresponding mover element 242, 244. The controller 252 can use the position data generated by the encoders 248, 250 to operate actuators 202, 204 to position the mover elements 242, 244 at selected locations, thereby positioning the workpiece W at the selected location. Each mover element 242, 244 may include a corresponding encoder scale 246. The first positioning encoder 248 and the second positioning encoder 250, mounted on the housing 222, can be configured to determine the position of each mover element 242, 244 based on the encoder scale 246, respectively. The encoder scale 246 can be coupled to or integrally formed with the movers 242, 244.

[0047] To load the workpiece W onto the carrier element 220, the carrier element 220 can be removed from the positioning system 200 by pulling it through the positioning system 200 in the direction indicated by arrow 254. The workpiece can then be loaded onto the end portion of the carrier element 220 and can be reinserted through the opening on the side of the CPM.

[0048] Drive units 202 and 204 may each be piezoelectric drive units comprising a first actuator group and a second actuator group. The first and second actuator groups can be actuated into alternating, stepping, or “walking” movements such that when the first actuator group engages with and applies force to a corresponding mover element (e.g., mover element 242 or 244), the second actuator group disengages or releases the mover element, and vice versa. There may be brief time intervals between steps when both actuator groups are in contact with movers 242 and 244. This is referred to as a “takeover” condition where one actuator group “takes over” from the other. This configuration, where one actuator in one group engages the first surface of the mover element and the second and third actuators in the group engage the second surface of the mover element, helps mitigate deformation during operation and can provide smoother movement of the mover element. The alternating takeover movement between the two actuator groups advantageously minimizes slippage between the actuators and the mover elements. Furthermore, this configuration allows for an extension of the drive unit's stroke length without compromising stiffness or motion performance. Additional details of the piezoelectric motor can be found in the application entitled "Systems and Methods of Clamp Compensation" filed with this application and also referenced in Agent's Reference No. 9748-102339-01, and in the application entitled "Systems and Methods of Hysteresis Compensation" filed with this application and also referenced in Agent's Reference No. 9748-102338-01, each of which is incorporated herein by reference in its entirety.

[0049] Example 3

[0050] Figure 3A-4 Another exemplary embodiment of the positioning system 300 is shown. The positioning system 300 can be used with a CPM (not shown). The CPM can be, for example, a transmission electron microscope (TEM) (or any of the various other beam systems described above) and may include a vacuum chamber 302.

[0051] refer to Figure 3AThe positioning system 300 may include a frame or housing 304, which is mounted to the outer surface 306 of the CPM (e.g., the outer surface of the vacuum chamber 302) using bolts 374, for example. The housing 304 may be arranged such that a post 308 can extend through an opening in the side of the CPM and at least partially enter the vacuum chamber 302. The post 308 may include a substantially rigid body portion 310 and a tip portion 312, the tip portion including a movable holder 314 configured to hold the workpiece W. The positioning system 300 may be configured to adjust the position of the workpiece W using one or more drive units, as described in more detail below.

[0052] In the illustrated embodiment, the body portion 310 has a cylindrical shape, and the tip portion 312 has a conical shape that is at least partially truncated. However, in other embodiments, the body portion and the tip portion can have any shape of various forms. For example, the cross-section of the body portion and / or the tip portion can be square, rectangular, triangular, etc. In some embodiments, the body may further include a truss-like structure, such that the body has a high mechanical resonant frequency. A high mechanical resonant frequency can prevent or mitigate vibrations of the workpiece, thereby allowing for improved high-resolution imaging of the workpiece.

[0053] The positioning system 300 can be configured to move a workpiece W arranged in the holder 314 along five motion directions associated with five degrees of freedom (e.g., translation along the X-axis, Y-axis, and Z-axis, and rotation about the X-axis and Y-axis by α and β, respectively). In some cases, the translational motion may include coupled rotational motion. For example, translation along the Y-axis may be coupled with a small γ tilt, and translation along the Z-axis may be coupled with a small degree of β tilt. In some cases, the small degree of tilt can be mitigated and / or compensated by relative movement. For example, in a particular embodiment, unintentional or undesirable β tilt movement during translation along the Z-axis can be compensated by generating a relative β tilt using the drive unit 320d. Referring to coordinate system 328, the X-axis, Y-axis, and Z-axis are orthogonal to each other; α tilt is rotation about the X-axis; β tilt is rotation about the Y-axis; and γ tilt is rotation about the Z-axis.

[0054] The positioning system 300 may include one or more bracket units coupled to one or more drive units. In the illustrated embodiment, the positioning system includes a first bracket 316, also referred to as a sample bracket, and a second bracket 318, also referred to as an α-tilt bracket. In some embodiments, the first bracket 316 may include a platform 315 (see...). Figure 3BSuch as the Stewart platform, the platform includes, for example, three support members 371 arranged in a triangular shape and three additional support members 322 extending along the length axis of the second bracket. As used herein, "platform" refers to a configuration of support members or other support members that are configured to allow movement relative to one or more degrees of freedom. The three support members 371 are coupled to the first bracket 316 and have a fixed length, and can be combined with the support members 322 to allow three-dimensional movement of the workpiece W. The platform 315 can be positioned in the ZY plane (also referred to as the O plane for ease of reference) and can be coupled to the first bracket 316 and the second bracket 318, as described in more detail below.

[0055] In the illustrated embodiment, the first tray 316 may include a sample tray 375 (see [link to example]). Figure 4 The workpiece W is mounted on the sample holder. The sample holder 375 can be connected to the holder 314 via a rotary sliding bearing (not shown). The bearing allows the workpiece W to be positioned about the Y-axis (e.g., β tilt). This allows the first holder to undergo a 7th independent positioning adjustment, which provides an additional adjustment mechanism for β tilt.

[0056] Now for reference Figure 3B As shown, platform 315 may include one or more resilient support members 371. In the illustrated embodiment, platform 315 includes three resilient support members 371a, 371b, and 371c. The resilient support members 371 may be substantially rigid along a first axis (e.g., along the length of the support) and substantially flexible along one or more axes transverse to the first axis. The resilient support members 371 may connect a first bracket 316 and a second bracket 318 to each other. In some specific embodiments, the resilient support members 371 may include stainless steel spring steel resilient sections. In some specific embodiments, the end portions 369 and 373 of the resilient support members may be thinner than the central portion 365; for example, the diameter or thickness of the end portions 369 and 373 may be approximately 0.25 mm and the thickness of the central portion may be approximately 1 mm. The length of the end portions 369 and 373 may be approximately 1 / 6 of the total length of the support member 371. For example, the length of the resilient support member may be approximately 22 mm, and the length of the end portions 369 and 373 may be between approximately 3 mm and 3.5 mm. In some specific embodiments, the diameter of column 308 may be approximately 38 mm.

[0057] like Figure 3CAs shown, the first bracket 316 and the second bracket 318 can be separated from each other by a helical or spiral-shaped cut 367. In the illustrated embodiment, the first bracket 316 and the second bracket 318 are formed as a single piece and cut into separate pieces by the helical cut 367. In other embodiments, the first bracket 316 and the second bracket 318 can be formed as separate pieces and arranged adjacent to each other, thereby defining the helical cut 367 between them. The helical cut 367 can be configured such that a first end portion 369 of each elastic member 371 can be connected to the first bracket 316, and a second end portion 373 of each elastic member can be connected to the second bracket 318, as shown. Figure 3B As shown. Due to the shape of the cutout 367, the elastic support member 371 can be positioned in the same plane (e.g., the O plane) while simultaneously connecting the first bracket 316 and the second bracket 318. The elastic member 371 can be connected to the first bracket and / or the second bracket by welding, brazing, or other means.

[0058] The connection of elastic members 371a, 371b, and 371c secures the first bracket 316 relative to the second bracket 318 in three directions (e.g., three degrees of freedom). The elastic members 371a, 371b, and 371c may have a fixed length and may be configured to allow the first bracket 316 to move along the X direction and to tilt β and γ about the Y and Z axes, respectively.

[0059] refer to Figure 3A The first bracket 316 can be connected to four drive units 320 (e.g., drive units 320a, 320b, 320c, and 320d) (see example, Figure 4 The four drive units are movable along the X-axis relative to one or more members 321, which are stationary relative to the second bracket 318 (hereinafter referred to as "stationary member" 321). The second bracket 318 may be coupled to a drive unit 324, as described in more detail below.

[0060] In the illustrated embodiment, all four drive units 320 are movable relative to the same stationary member 321. However, in other embodiments, each drive unit 320 may have a corresponding stationary member 321. In yet another embodiment, drive units 320d and 320c are movable relative to the same stationary member, and drive units 320a and 320b are movable relative to their respective stationary members.

[0061] A second bracket 318 may be disposed on the outer surface 306 of the vacuum chamber 302 and may accommodate one or more of the drive units. For example, in the illustrated embodiment, the second bracket 318 accommodates drive units 320a-320d. An O-ring 372 may be disposed between the housing 304 of the CPM and the outer surface 306. The O-ring 372 may be configured to separate the vacuum within the vacuum chamber 302 from the ambient atmospheric pressure.

[0062] In the exhibition Figure 3A In one embodiment, vacuum seal 372 creates a vacuum around the entire positioning system 300, so all components, such as the α-tilt bearing 326, encoder, piezoelectric motor, and all cables, are within the vacuum. These components may pose a risk of contaminating the vacuum, and therefore in some embodiments, it is preferred to arrange these components outside the vacuum chamber. In an alternative embodiment, the vacuum seal is performed in a manner that allows selected components (e.g., the α-tilt bearing 326, encoder, piezoelectric motor, and cables) to remain in ambient air. In this embodiment, it is possible to... Figure 3A The static vacuum seal 372 is removed, and the housing 306 may be provided with a protrusion extending toward the vacuum chamber 302 and surrounding the column 308. This protrusion may be provided with an annular groove facing the cylindrical outer sheath of the column 308. An O-ring may be arranged in the groove to create a vacuum seal between the vacuum chamber 302 and the ambient atmospheric pressure. This vacuum seal may be a dynamic vacuum seal that allows the required α-tilt rotation in the bearing 326. Within the column 308, a vacuum wall may be arranged with holes through which support members 322 can extend. Around these support members 322, axially adaptable bellows, which may be made of steel and have the smallest possible diameter, may be provided to complete the vacuum seal.

[0063] The second bracket 318 may be coupled to one or more bearings 326, which, when actuated by the drive unit 324, allow the second bracket to tilt or rotate relative to the housing 304. For example, in some embodiments, the second bracket 318 may tilt or rotate relative to the housing 304 only about the X-axis (e.g., α-tilt).

[0064] In some embodiments, one or more of the drive units may be piezoelectric drive units (such as drive units 202 and 204 described above) and / or cylindrical drive units with piezoelectric motors (e.g., cylindrical ceramic drive rails). For example, in the illustrated embodiment, drive units 320a-320d are piezoelectric drive units, and drive unit 324 is a cylindrical drive unit with a piezoelectric motor. The cylindrical drive unit with a piezoelectric motor can, for example, drive the second bracket 318 tangentially against the cylindrical ceramic drive rail. Piezoelectric drive units 320a-320d may be “walking” or stepping piezoelectric drive units, such as Heinmade piezoelectric stepper (HMPS) actuators available from Heinmade BV. The piezoelectric drive unit may include a first actuator group and a second actuator group, each actuator group including a clamping element and / or a shearing element. The actuator assembly can be configured to actuate in an alternating manner, such that when the first actuator assembly engages with and applies force to the stationary member 321, the second element assembly disengages from or releases the stationary member, and vice versa. In some embodiments, as shown, the piezoelectric component of the drive unit 320 can be located on the stationary member 321, such that movement of the piezoelectric component causes the drive unit (e.g., in an axial or rotational direction) to move. This allows the piezoelectric component to “walk” (e.g., move relative to the drive unit) along the drive unit 320 to move the drive unit 320. In other embodiments, the piezoelectric component can be located on the drive unit 320. Further details of the piezoelectric drive unit can be found in the application entitled “System and Method for Fixture Compensation” filed with this application and also referenced by Proxy Reference No. 9748-102339-01, and the application entitled “System and Method for Hysteresis Compensation” filed with this application and also referenced by Proxy Reference No. 9748-102338-01.

[0065] One or more loading units 376 can be configured to bias one or more of the drive units 320a-320d against one or more stationary members 321. The illustrated embodiment depicts a loading unit 376 arranged above the drive units 320a-320d; however, in other embodiments, additional loading units 376 may be arranged below the drive units 320a-320d. The loading unit 376 may include a biasing member 378 (e.g., a spring) and one or more rollers 380. The loading unit 376 can maintain a biasing force on one or more drive units such that the drive units remain in contact with the piezoelectric component during movement.

[0066] In some embodiments, an additional loading unit 325, such as a preloaded spring, may extend between the drive unit 324 and the second bracket 318, such that a force applied by the drive unit 324 is applied to the second bracket 318.

[0067] The drive unit 320 can be coupled to the first bracket 316 via a plurality of support members 322 (e.g., support members 322a, 322b, 322c, 322d). Movement of the drive unit 320 relative to the stationary member 321 causes a corresponding movement of the support member 322. In other embodiments, the support member 322 can be coupled to a locator element, and the drive unit 320 can remain stationary. In such embodiments, actuation of the drive unit 320 can cause movement of the locator element and thus movement of the support member. The distal portion of the support member 322d (i.e., the end portion extending into the vacuum chamber 302) can be coupled to a rotary sliding bearing and / or shaft coupled to the first bracket 316. The bearing is configured to allow the first bracket 316 to rotate about the Y-axis (e.g., β-tilt).

[0068] Drive units 320a, 320b and 320d (see Figure 4 The drive unit 320c can be positioned such that it is actuated along the X-axis in a common plane (e.g., the XY plane shown in coordinate system 328), and the drive unit 320c can be positioned actuated along an axis parallel to (e.g., not coplanar with) the common plane. In other words, the drive unit 320c and the support 322c can be located below the drive units 320a, 320b, and 320d and the supports 322a, 322b, and 322d in the direction shown in FIG3. This configuration allows all drive units to be positioned on or below the plane in which the workpiece W is arranged, which can help mitigate vibrations that may affect the workpiece.

[0069] In other embodiments, the drive unit 320 and the support column 322 may be positioned at various locations in the YZ plane. For example, in some specific embodiments, the drive units are positioned such that each drive unit is at a 90-degree angle to each adjacent drive unit about the inner circumference of the column 308. In still other embodiments, the drive unit 320 and the support column 322 may be positioned such that they are not parallel to the X-axis. For example, the drive unit 320 and the support column 322 may be positioned at an angle relative to the main body portion 310 of the column 308.

[0070] Drive units 320a-320d can be configured to move relative to the rear wall 330 of housing 304, such that support members 322a-322d move along their axes toward and away from the rear wall 330. (See drive units 320a-320d) Figure 4(Together with supports 322a-322d) can be configured such that movement of drive units 320a-322d causes the first bracket 316 and thus the holder 314 (including the sample bracket 375 and the workpiece W) to move along the X, Y, and Z axes and rotate (β-tilt) about the Y axis. For example, movement of all four drive units 320a-320d can cause the first bracket to move backward and / or forward along the X axis. Movement of 320a or 320b while keeping 320c and 320d stationary can cause the first bracket 316 to move along the Y axis or both the X and Y axes.

[0071] The drive unit 320c can be configured such that movement of the drive unit 320c toward or away from the rear wall 330 of the housing 304 causes the first bracket to move along the Z-axis, combined with a small rotation about the Y-axis (e.g., β tilt), which can be prevented or mitigated by movement of the drive unit 320b. The drive unit 320d can be configured such that movement of the drive unit 320d (together with the support column 322d) toward or away from the rear wall 330 of the housing 304 causes the workpiece W held by the first bracket 316 to rotate about the Y-axis (β rotation).

[0072] The drive unit 324 can be coupled to the second bracket 318 and can be configured such that movement of the drive unit 324 causes the second bracket 318 (and therefore the drive units 320a-320d) to rotate (α rotation) about the X-axis as shown in coordinate system 328.

[0073] By actuating drive units 320a-320d and 324 individually or in any combination, positioning system 300 can move workpiece W in five degrees of freedom (X, Y, Z, α, and β). That is, positioning system 300 can be configured to position the workpiece along at least three linear axes (e.g., the X, Y, and Z axes shown relative to coordinate system 328) and about at least two rotational axes (e.g., rotation about the X-axis (α tilt) and about the Y-axis (β tilt)). Therefore, positioning system 300 can position workpiece W at a selected location relative to, for example, a transmission electron microscope (TEM).

[0074] Each drive unit 320a-d may include a corresponding positioning encoder 333. Each positioning encoder 333 may be similar to the encoder 248 described above and may include a corresponding encoder scale. In other embodiments, instead of the encoder scale or in addition to the encoder scale, each drive unit may include a mirror located on its end portion. The encoder scale and / or mirror may be mounted, for example, on the support member 322 and / or drive unit 320. The positioning encoder may determine the position of each support member (322a-322d) and / or drive unit (320a-320d) based on the encoder scale. The encoder scale may be coupled to or integrally formed with the support members 322a-322d and / or drive units 320a-320d. The positioning system 300 may further include an additional positioning encoder 335 comprising a laser fiber 337. The positioning encoder 335 may be configured to determine the amount of rotation about the X-axis (e.g., the amount of tilt α).

[0075] The positioning encoders 333 and 335 can be, for example, optical encoders, laser fiber displacement encoders (e.g., fiber Bragg grating sensors), and / or laser fiber speed encoders (e.g., vibrometers). In some embodiments, the positioning encoders can be positioned such that a suitable optical gap is formed between the respective positioning encoder and the positioning encoder scale and / or mirror.

[0076] Each drive unit 320a-320d and 324 can be coupled to one or more wires or cables 332 configured to supply power to the drive unit. Cables 332 and / or optical fibers (e.g., optical fibers acting as part of a positioning encoder) can be arranged within housing 304 and exit housing 304 via a vacuum seal 334. The seal may include, for example, one or more multi-pin connectors and optical fiber throughput. This configuration helps prevent air from being introduced into the vacuum chamber 302. Housing 304 may additionally include a central chamber 338 in which cables 332 can be arranged. The size of chamber 338 can be set to allow deflection and movement of cables 322 when drive unit 320 is actuated. In some specific embodiments, the stroke of drive units 320a-320d can be about + / - 2 mm, and the stroke (α tilt) of drive unit 324 can be about + / - 60°.

[0077] After imaging and / or processing is completed, workpiece W can be replaced with a new workpiece. In some embodiments, the workpiece can be replaced by inserting a new workpiece into the holder 314 while the positioning system is held in place. In such embodiments, the old workpiece W can be removed by a loading lock coupled to the vacuum chamber, and a new workpiece W' can be inserted by the loading lock. In other embodiments, the entire positioning system 300 can be detached from the vacuum chamber 302.

[0078] Example 4

[0079] Figure 5-7 Another exemplary embodiment of the positioning system 400 is shown. Except that the positioning system 400 does not include the main body portion 310 and is configured such that the entire positioning system (including the drive unit) can be arranged within the vacuum chamber 402 of the CPM, the positioning system 400 is similar to the positioning system 300 described above. Therefore, the positioning system 400 can be much smaller than the positioning system 300.

[0080] The smaller size of the positioning system 400 and the shorter length of selected components (such as the elastic member 418) can prevent or mitigate vibrations of the workpiece, thereby allowing for improved high-resolution imaging of the workpiece.

[0081] refer to Figure 5 The positioning system 400 may include a housing 401 and may be mounted on the inner surface 404 of the CPM (e.g., the inner surface of the vacuum chamber 402). In some embodiments, such as the illustrated embodiment, the housing 401 may include a cylindrical portion 405 and a conical portion 407. In other embodiments, the housing 401 may have any shape of various shapes. The housing 401 may be mounted to the vacuum chamber using one or more O-rings 409. The positioning system 400 may include a holder 406 configured to hold the workpiece W (see [link to documentation]). Figure 6 The positioning system 400 can be configured to adjust the position of the workpiece W using one or more drive units, as described in more detail below.

[0082] The positioning system 400 can be configured to move the workpiece W arranged in the holder 406 in five directions (e.g., translation along the X-axis, Y-axis, and Z-axis, and rotations α and β about the X-axis and Y-axis, respectively). A reference coordinate system 420 is used, with the X-axis, Y-axis, and Z-axis orthogonal to each other; α tilt is a rotation about the X-axis; and β tilt is a rotation about the Y-axis.

[0083] The positioning system 400 may include one or more bracket elements coupled to one or more drive units. In the illustrated embodiment, the positioning system includes a first bracket 408 and a second bracket 410 (also referred to as an α bracket). The first bracket 408 may be coupled to four drive units 412 (e.g., drive units 412a, 412b, 412c, and 412d) (see, for example, Figure 6 The second bracket 410 may be connected to one or more drive units 414 (e.g., one in the illustrated example), as described in more detail below.

[0084] Four drive units 412 are movable relative to one or more members 413 (hereinafter referred to as "stationary members" 413), which are stationary relative to the second bracket 410. In the illustrated embodiment, all four drive units 412 are movable relative to the same member 413. However, in other embodiments, each drive unit 412 may have a corresponding stationary member 413. In still other embodiments, both drive units 412c and 412d are movable relative to the same stationary member 413, and drive units 412a and 412b are movable relative to their respective stationary members.

[0085] The second bracket 410 can accommodate drive units 412a-412d. The second bracket 410 can be coupled to one or more bearings 416, which allow the second bracket to tilt or rotate relative to the inner surface 404 of the side wall 403 of the vacuum chamber 402, thereby causing the drive units 412a-412d and the first bracket 408 to rotate.

[0086] In some embodiments, one or more of the drive units may be a piezoelectric drive unit and / or a cylindrical drive unit with a piezoelectric motor. For example, in the illustrated embodiment, drive units 412a-412d are piezoelectric drive units with a piezoelectric assembly located on a stationary member 413, and drive unit 414 is a cylindrical drive unit with a piezoelectric motor. The piezoelectric drive units and cylindrical drive units may be similar to the drive units 320, 324 previously described. In some embodiments, as shown, the piezoelectric assembly of drive unit 412 may be located on the stationary member 413, such that movement of the piezoelectric assembly causes the drive unit to move (e.g., in the axial or rotational direction). In other embodiments, the piezoelectric assembly may be located on drive unit 412.

[0087] In some embodiments, one or more loading units (not shown) may be configured to bias one or more of the drive units 412a-412d, 414 against one or more stationary members. The loading units may be similar to the loading units 376 and 325 described above and may include biasing members (e.g., springs) and / or one or more rollers. The one or more loading units may maintain a biasing force on the one or more drive units such that the drive units remain in contact with the piezoelectric assembly during movement.

[0088] The first bracket 408 may include one or more elastic members 418. A drive unit 412 may be coupled to the elastic member 418 such that movement of the drive unit 412 causes movement of the bracket 408 and thus the workpiece W. The elastic member 418 may include a portion having a thinner thickness or diameter. For example, the thinner portion may be formed by drilling or by electrical discharge machining (EDM). The thinner portion (e.g.) Figure 6-7The portion 413 shown can be configured as a hinge. In the illustrated embodiment, the first bracket 408 includes four resilient members 418a-418d, each resilient member being coupled to one of the drive units 412a-412d. In some embodiments, the resilient members may comprise stainless steel spring steel. In some specific embodiments, the resilient members may have portions that are thinner or thicker than adjacent portions of the resilient members.

[0089] Drive units 412a, 412b and 412d (see Figure 6 The actuator 412c can be positioned such that it is actuated along an axis in a common plane (e.g., the XY plane shown in coordinate system 420), and the drive unit 412c can be positioned such that it is actuated along an axis parallel to (e.g., not coplanar with) the common plane. In other words, the drive unit 412c is... Figure 5 The directions shown can be below drive units 412a, 412b, and 412d. This configuration allows all drive units to be positioned on or below the plane where workpiece W is arranged, which can help mitigate vibrations that may affect the workpiece. Figure 5 As shown, the elastic member 418c can be connected to the drive unit 412c at an angle φ, such that the elastic member 418d extends upward toward and is connected to the first bracket 408. Changing the angle φ can change the amount of movement required for the drive unit 412d to move the workpiece by a selected amount.

[0090] In other embodiments, the drive unit 412 and the support column 418 may be positioned at various locations in the YZ plane. For example, in some specific embodiments, the drive units are positioned such that each drive unit is at a 90-degree angle to each adjacent drive unit about the inner circumference of the conical portion 407. In still other embodiments, the drive unit 320 and the support column 322 may be positioned such that they are not parallel to the X-axis. For example, the drive unit 320 and the support column 322 may be positioned at an angle relative to the body portion 310 of the column 308.

[0091] Now for reference Figure 6 Each resilient member may include one or more connectors 413. In the illustrated embodiment, a connector 413 is a cutout in the end portion of the resilient member 418, the cutout being configured to allow the resilient member 418 to engage with the drive unit 412 at an off-center location (e.g., offset from the central longitudinal axis of the drive unit). In this configuration, movement of the drive unit along an axis, such as the X-axis, can cause movement of the resilient member along, for example, the X-axis and Y-axis. In the illustrated embodiment, the connector is positioned directly adjacent to the drive unit; however, in other embodiments, the connector may be positioned at any location along the various positions of the resilient member (see, for example, ...). Figure 8 ).

[0092] In other embodiments, the drive unit 412 may be positioned in other locations. For example, in some specific embodiments, the drive units are positioned such that each drive unit is at a 90-degree angle to each adjacent drive unit. For example, when the positioning system includes a conical or cylindrical housing, the drive units may be positioned around the inner circumference of the positioning system.

[0093] Drive units 412a-412d can be configured to move relative to the inner wall 404 of the vacuum chamber 402, such that elastic members 418a-418d move along their axes toward and away from the inner wall 404. (See drive units 412a-412d for more details.) Figure 6 (Together with elastic members 418a-418d) can be configured such that movement of drive unit 412 causes the first bracket 408 and therefore the holder 406 (including workpiece W) to move along the X, Y, and Z axes and rotate (β-tilt) about the Y axis. For example, movement of all four drive units 412a-412d can cause the first bracket 408 to move forward and / or backward along the X axis. Movement of 412a or 412b while keeping 412c and 412d stationary can cause the first bracket 408 to move along the Y axis or both the X and Y axes.

[0094] Drive unit 412d can be configured such that movement of drive unit 412d toward or away from the inner surface 404 of CPM causes the first bracket 408 to move along the Z-axis. Drive unit 412c can be configured such that movement of drive unit 412c toward or away from the inner surface 404 of vacuum chamber 402 causes the first bracket to rotate about the Y-axis (β rotation). The end portion of elastic member 418d can be coupled to a sliding bearing and / or a shaft to produce β rotation.

[0095] Drive unit 414 can be coupled to second bracket 410 and can be configured such that movement of drive unit 414 causes second bracket 410 (and therefore drive units 412a-412d and first bracket 408) to rotate about the X-axis (α rotation) (see, for example, Figure 5 (Coordinate system 420 in the middle).

[0096] By actuating drive units 412a-412d and 414 individually or in any combination, positioning system 400 can move workpiece W in five degrees of freedom (X, Y, Z, α, and β). That is, positioning system 400 can be configured to position the workpiece along at least three linear axes (e.g., translations along the X, Y, and Z axes shown relative to coordinate system 420) and about at least two rotational axes (e.g., rotations about the X-axis (α tilt) and about the Y-axis (β tilt). Therefore, positioning system 400 can position workpiece W relative to, for example, a transmission electron microscope (TEM) at a desired location.

[0097] Each drive unit 412, 414 may include a corresponding positioning encoder 422. Each positioning encoder 422 may be similar to the encoder 248 described above and may include a corresponding encoder scale. The encoder scale may be mounted on, for example, the stationary member 413 and / or the drive unit 412, 414. The positioning encoder may be, for example, an optical encoder and / or a laser fiber displacement encoder. The positioning encoder may determine the position of each drive unit 412 and / or the elastic member 418 based on the encoder scale. The encoder scale may be coupled to or integrally formed with one or more stationary members 413 and / or drive units 412, 414. The positioning system 400 may further include one or more additional positioning encoders 423 comprising a laser fiber 425. The positioning encoder 423 may be configured to determine the amount of rotation (e.g., the amount of tilt α) of the second bracket 410 about the X-axis.

[0098] As described above with respect to positioning system 300, positioning encoders 422, 423 may be, for example, optical encoders, laser fiber displacement encoders (e.g., fiber Bragg grating sensors), and / or laser fiber speed encoders (e.g., vibrometers). In some embodiments, the positioning encoders may be positioned such that a suitable optical gap is formed between the respective positioning encoder and the positioning encoder scale and / or mirror.

[0099] Each drive unit 412a-412d, 414 can be connected to one or more wires or cables 427 configured to supply power to the drive unit. Cables and / or optical fibers (e.g., optical fibers used in positioning encoders 422, 423) can exit the vacuum chamber through a vacuum seal including, for example, a first multi-pin connector 424 and a second multi-pin connector 426. Cables 427 and / or optical fibers can be arranged within a second bracket 410 and can be connected to the first multi-pin connector 424. The first multi-pin connector 424 can extend through a sidewall 403 and connect to the second multi-pin connector 426, which can be connected to a power source (not shown). This configuration helps prevent air from being introduced into the vacuum chamber 402.

[0100] After imaging and / or processing is completed, workpiece W can be replaced with a new workpiece. In some embodiments, workpiece W can be removed using a loading lock on the vacuum chamber and a new workpiece W' can be inserted into the holder 406 to replace the workpiece. In other embodiments, the entire positioning system 400 can be detached from the vacuum chamber 402 to replace the workpiece.

[0101] Example 5

[0102] Figure 8 An exemplary embodiment of a positioning system, such as positioning systems 300 and 400 described above, is shown, comprising a first bracket 500 and an associated drive unit 502. The first bracket 500 includes a holder 504 configured to hold a workpiece W. The first bracket 500 may be housed in a housing 501 similar to the conical housing 407 described above. In some embodiments, as shown, the housing 501 may comprise a conical or partially conical shape. In other embodiments, the housing 501 may have any shape of various forms.

[0103] The first bracket 500 can be configured to be movable, such that the workpiece W can move in six directions (e.g., translation along the X-axis, Y-axis, and Z-axis as shown in coordinate system 506, and rotation about the X-axis, Y-axis, and Z-axis, which can be referred to as β rotation, α rotation, and γ rotation, respectively).

[0104] As shown, the first bracket 500 can be connected to five drive units 502a-502e. Drive units 502a-502d can be positioned as previously described with respect to drive units 412a-412d of the positioning system 400, and can be connected to the first bracket 500 via elastic members 508a-508d similar to the elastic members 418a-418d of the positioning system 400. Drive units 502c and elastic members 508c are... Figure 8 The configuration shown is located below the drive unit 502d and the elastic member 508d (e.g., extending along the Z-axis into the plane of the page). The first bracket 500 may further include an additional drive unit 502e that can be coupled to the first bracket 500 via the elastic member 508e.

[0105] The additional drive element 502e and the elastic member 508e can be configured to rotate (e.g., tilt γ) the holder 504 (and thus the workpiece W) about the Z-axis. The elastic member 508e can have a generally L-shaped configuration including a joint 510. Due to the shape of the elastic member 508e, longitudinal movement of the drive unit 502e (e.g., movement along the X-axis) causes a γ tilt of the holder 504 (and the workpiece W) via elastic hinges 505 and 507. In some cases, the γ tilt can be coupled with a small amount of translation along the Y-axis, which can be compensated for using other members 508a-d. In the illustrated embodiment, the joint 510 is arranged substantially at the center of the elastic member 508 to define two similarly sized portions 512a and 512b of the elastic member 508e. However, in other embodiments, the joint 510 can be positioned closer to or further from the drive unit 502e, which can be used to change the amount of movement required to move the workpiece W.

[0106] In some embodiments, the first portion 512a may be coupled to a ball joint (not shown) configured to allow the drive unit 508e to provide a γ tilt about the Z-axis. In some specific embodiments, the radius of the ball joint may be 30 mm.

[0107] In the illustrated embodiment, the first portion 512a of the elastic member 508e is positioned above the elastic member 508a. However, in other embodiments, the first portion 512a may be positioned below the elastic member 508a. In still other embodiments, the first portion 512a may be positioned above or below the elastic member 502b.

[0108] General considerations

[0109] For the purposes of this description, certain aspects, advantages, and novel features of embodiments of this disclosure are described herein. The disclosed methods, apparatuses, and systems should not be construed as limiting in any way. Rather, this disclosure relates to all novel and non-obvious features and aspects of the various disclosed embodiments (individually and in various combinations and sub-combinations with each other). The methods, apparatuses, and systems are not limited to any particular aspect or feature or combination thereof, and the disclosed embodiments do not require the existence of any one or more specific advantages or problems solved.

[0110] Although the operations of some embodiments in the disclosed examples are described in a specific chronological order for ease of presentation, it should be understood that this descriptive style encompasses rearrangements unless the specific language used in the following description requires a particular order. For example, operations described sequentially may be rearranged or performed concurrently in some cases. Furthermore, for simplicity, the accompanying drawings may not show the various ways in which the disclosed methods can be combined with other methods. Additionally, this specification sometimes uses terms such as "provide" and "implementation" to describe the disclosed methods. These terms are high-level abstractions of the actual operations performed. The actual operations corresponding to these terms may vary depending on the specific implementation and are readily discernible by those skilled in the art.

[0111] All features described herein are independent of each other and may be used in combination with any other features described herein unless structurally impossible.

[0112] As used in this application and claims, unless the context clearly indicates otherwise, the singular forms "a / an" and "the" include the plural forms. Additionally, the term "include" means "comprise". Furthermore, the terms "connected" and "associated" generally refer to electrical, electromagnetic, and / or physical ( For example (Mechanical or chemical) connections or links, and does not exclude the existence of intermediate elements between connected or related items in the absence of a particular opposite language.

[0113] In the following description, certain terms such as "up," "down," "above," "below," "horizontal," "vertical," "left," and "right" may be used. Where applicable, these terms are used to provide a clear description when dealing with relative relationships. However, these terms are not intended to imply absolute relationships, positions, and / or orientations. For example, regarding an object, simply flipping the object can turn the "upper" surface into the "lower" surface. Nevertheless, it remains the same object.

[0114] Unless otherwise stated, all figures used in the specification or claims to represent material quantities, angles, pressures, molecular weights, percentages, temperatures, times, etc., should be understood to be modified by the term "about". Therefore, unless otherwise implied or expressly indicated, the numerical parameters shown are approximate values, which may depend on the desired characteristics sought and / or detection limitations under test conditions / methods familiar to those skilled in the art. The number of examples is not approximate unless the word "about" is used to directly and explicitly distinguish them from the prior art discussed. Furthermore, not all alternatives described herein are equivalent.

[0115] Given the many possible embodiments to which the principles of this disclosure can be applied, it should be recognized that the illustrated embodiments are merely preferred examples and should not be considered as limiting the scope of this disclosure. Rather, the scope of this disclosure is at least as broad as the appended claims. Therefore, protection is claimed for all contents falling within the scope and spirit of these claims.

Claims

1. A positioning system, comprising: A first bracket, the first bracket including a holder for holding a workpiece, the first bracket being coupled to one or more first drive units, the one or more first drive units being configured to translate the workpiece along mutually orthogonal first axes, second axes and third axes, and to rotate the workpiece about the second axis; A second bracket, which houses the one or more first drive units, is coupled to one or more rotary drive units configured to rotate the workpiece about the first axis. The first bracket is coupled to the second bracket via a plurality of elastic support members, wherein the plurality of elastic support members include a first elastic support member, a second elastic support member, and a third elastic support member, each elastic support member having a first end portion and a second end portion, and wherein the elastic support members are arranged in a triangular shape such that the first end portion of each support member is coupled to the first bracket, and the second end portion of each support member is coupled to the second bracket.

2. The positioning system according to claim 1, wherein the one or more first drive units are connected to the first bracket via one or more support members.

3. The positioning system of claim 2, further comprising a post extending from the second bracket and having a body portion and a tip portion, wherein the first bracket is arranged adjacent to the tip portion and the post member extends through the body portion.

4. The positioning system according to claim 1, wherein the one or more first driving units comprise: A first drive unit, a second drive unit, and a third drive unit are configured to be actuated along an axis arranged in a common plane, and a fourth drive unit is configured to be actuated along an axis arranged in a plane parallel to the common plane.

5. The positioning system of claim 4, wherein the first drive unit and the second drive unit are configured to move the workpiece along the first axis and the second axis, the third drive unit is configured to move the workpiece along the third axis, and the fourth drive unit is configured to rotate the workpiece about the second axis.

6. The positioning system according to claim 4, wherein the first drive unit, the second drive unit, the third drive unit and the fourth drive unit are respectively connected to the first bracket through the first elastic member, the second elastic member, the third elastic member and the fourth elastic member.

7. The positioning system of claim 6, wherein the one or more first drive units further include a fifth drive unit configured to rotate the workpiece about the third axis.

8. The positioning system of claim 7, wherein the fifth drive unit is connected to the first bracket via a fifth elastic member, and wherein the fifth elastic member comprises a first part and a second part, the first part being connected to the second part via a connector, such that the fifth elastic member has an L-shaped shape.

9. A charged particle beam system, comprising: Vacuum chamber; as well as A positioning system that extends into the vacuum chamber and includes... A first bracket, the first bracket including a holder for holding a workpiece, the first bracket being coupled to one or more first drive units, the one or more first drive units being configured to translate the workpiece along mutually orthogonal first axes, second axes and third axes, and to rotate the workpiece about the second axis; A second bracket, which houses the one or more first drive units, is coupled to one or more rotary drive units configured to rotate the workpiece about the first axis. The first bracket is coupled to the second bracket via a plurality of elastic support members, wherein the plurality of elastic support members include a first elastic support member, a second elastic support member, and a third elastic support member, each elastic support member having a first end portion and a second end portion, and wherein the elastic support members are arranged in a triangular shape such that the first end portion of each support member is coupled to the first bracket, and the second end portion of each support member is coupled to the second bracket.

10. The system of claim 9, wherein the positioning system is arranged in the vacuum chamber.

11. The system of claim 9, wherein the positioning system comprises a housing disposed on the outer surface of the vacuum chamber and a column extending into the interior of the vacuum chamber.

12. The system of claim 11, wherein the column comprises a body portion and a tip portion, and wherein the first bracket is disposed within the tip portion.

13. The system of claim 9, wherein the one or more first drive units comprise: A first drive unit, a second drive unit, and a third drive unit configured to actuate along an axis arranged in a common plane, and a fourth drive unit configured to actuate along an axis arranged in a plane parallel to the common plane, wherein the first drive unit and the third drive unit are configured to move the workpiece along the first axis and the second axis, the second drive unit is configured to move the workpiece along the third axis, and the fourth drive unit is configured to rotate the workpiece about the first axis.

14. A method comprising: One or more first drive units are actuated to a first bracket element for holding a workpiece to position the workpiece at a selected location along mutually orthogonal first, second, and third axes, and to rotate the workpiece about the second axis to a selected location; as well as One or more rotary drive units actuated to the second bracket element are used to rotate the workpiece about the first axis to a selected position, wherein the first bracket is connected to the second bracket by a plurality of elastic support members, wherein the plurality of elastic support members include a first elastic support member, a second elastic support member and a third elastic support member, each elastic support member having a first end portion and a second end portion, and wherein the elastic support members are arranged in a triangular shape such that the first end portion of each support member is connected to the first bracket and the second end portion of each support member is connected to the second bracket.

15. The method of claim 14, wherein positioning the workpiece at the selected location comprises positioning the workpiece relative to the charged particle beam.

16. The method of claim 15, further comprising imaging the workpiece using the charged particle beam.

17. The method of claim 14, wherein the second bracket element accommodates the one or more first drive units.

18. The method of claim 14, further comprising actuating an additional first drive unit to position the workpiece at a selected location about the third axis.

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