Fork-shaped quartz crystal piezoelectric vibrating piece

Abstract

The present invention discloses a tuning fork-shaped quartz crystal piezoelectric vibrating piece, comprising a base and a pair of vibrating arms connected to the base and symmetrically arranged about the base's central axis. The base is characterized by a dispensing hole for injecting glue. By providing the dispensing hole in the base, the present invention guides glue droplets into the dispensing hole during glue extrusion. After the conductive glue solidifies, its bonding strength with the vibrating piece is significantly increased, reducing the resistance during tuning fork vibration and enabling the frequency piece to achieve better electrical performance parameters.

Description

Technical Field

[0001] The present invention relates to an electronic component, in particular to a tuning fork type quartz crystal piezoelectric vibration piece. Background Art

[0002] In the 21st century, with technological advancements and changes in market applications, quartz crystal resonators are showing a development trend toward miniaturization, high precision, and low power consumption. Secondly, quartz crystal resonators are developing toward higher precision and stability. The gradual miniaturization, thinning, and chip-type development of quartz crystal resonators poses greater challenges in improving their precision and stability. From a market application perspective, quartz crystal resonators provide stable clock frequencies for electronic products. Their precision and stability have a crucial impact on the quality, performance, and ongoing maintenance costs of downstream products. Miniaturization and ultra-high frequency quartz crystal resonators are a technological development trend for future 5G applications.

[0003] Tuning fork-shaped quartz resonators are one type of quartz resonator used in crystal resonators. Due to the trend toward miniaturization of piezoelectric resonators, miniaturized tuning fork KHz-level resonators are typically secured by dispensing glue at the base of the resonator during the packaging process. However, the glue droplet may lack sufficient adhesion, hindering the tuning fork's vibration and significantly increasing the resonator's resistance. Sometimes, large glue dots can cause conductive adhesive contact and cause short circuits, requiring urgent attention. Summary of the Invention

[0004] In order to avoid and overcome the technical problems existing in the prior art, the present invention provides a tuning fork-type quartz crystal piezoelectric vibration piece, which solves the problem of insufficient bonding force of traditional piezoelectric vibration pieces after glue dispensing.

[0005] To achieve the above object, the present invention provides the following technical solutions:

[0006] A tuning fork-type quartz crystal piezoelectric vibrating piece comprises a base and a pair of vibrating arms connected to the base and symmetrically arranged about the central axis of the base. The feature is that a glue hole for glue injection is opened on the base.

[0007] As a further solution of the present invention: the dispensing holes are provided in an even number and are symmetrically arranged about the central axis of the base, and isolation holes are opened on the surface of the base to separate the dispensing holes on both sides of the central axis of the base.

[0008] As a further solution of the present invention: the isolation holes are arranged along the length direction of the central axis of the base.

[0009] As a further solution of the present invention: the dispensing holes are through holes, or blind holes arranged on the front and back sides of the base and at corresponding positions.

[0010] As a further solution of the present invention: the isolation hole is a through hole, or a blind hole provided on the front and back sides of the base and at corresponding positions.

[0011] As a further solution of the present invention: an end of the base away from the vibration arm is protruded with a folding arm for facilitating the fixing of the vibration plate.

[0012] As a further solution of the present invention: a frequency modulation electrode is provided at one end of the vibration arm away from the base; grooves are provided on both the front and back sides of the vibration arm along the length direction of the vibration arm, the grooves are located between the frequency modulation electrode and the base, and groove electrodes are provided on the surface of the grooves; assembly electrodes are provided on both sides of the central axis of the base, and the two assembly electrodes are connected to the corresponding groove electrodes through connecting electrodes, and the two connecting electrodes are positioned to avoid each other.

[0013] As a further solution of the present invention: the frequency modulation electrode, the groove electrode, the assembly electrode and the connection electrode are all gold-plated layers.

[0014] As a further solution of the present invention: the gold plating thicknesses of the groove electrode, assembly electrode and connecting electrode are equal; the gold plating thickness of the FM electrode is greater than that of the groove electrode, assembly electrode and connecting electrode.

[0015] Compared with the prior art, the present invention has the following beneficial effects:

[0016] 1. The present invention provides a dispensing hole on the base. When the dispensing glue is squeezed, the glue droplets will be guided into the dispensing hole. After the conductive glue is cured, the bonding force between the conductive glue and the vibration plate will be greatly increased, thereby reducing the resistance during the vibration of the tuning fork and enabling the frequency plate to obtain better electrical performance parameters.

[0017] 2. The dispensing holes of the present invention are symmetrically arranged on both sides of the central axis of the base, and isolation holes are also opened on the surface of the base in the opposite direction along the length of the central axis to separate the dispensing holes on both sides of the central axis of the base. During the dispensing and fixing process, when the conductive glue is squeezed and deformed to the vicinity of the isolation holes, the extrusion deformation of the conductive glue will be greatly suppressed due to the obstruction of the isolation holes, thereby preventing the conductive glue on both sides from connecting and causing a short circuit.

[0018] 3. The dispensing holes and isolation holes of the present invention can be either through holes or blind holes, providing multiple options for the production and processing of the vibration plate; the setting of the folding arm facilitates the fixing of the vibration plate on the wafer so that it will not fall off during the reprocessing process.

[0019] 4. The present invention uses a gold-plated layer as an electrode, which has better conductivity and stable chemical properties; the gold-plated layer of the frequency modulation electrode is thicker, which makes it easier to cut the thickness of the gold-plated layer during later processing to change its frequency. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] Figure 1It is a structural schematic diagram of the present invention.

[0021] Figure 2 This is a diagram of the electrode position arrangement in the present invention.

[0022] Figure 3 It is a cross-sectional view of the section where the groove of the vibration arm is located in the present invention.

[0023] In the figure: 1. Vibrating arm; 11. FM electrode; 12. Groove; 13. Connecting electrode; 2. Base; 21. Glue hole; 22. Folding arm; 23. Isolation hole; 24. Assembly electrode; 3. Quartz; 4. Groove electrode. DETAILED DESCRIPTION

[0024] The following will clearly and completely describe the technical solutions in the embodiments of the present invention in conjunction with the accompanying drawings. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making creative efforts are within the scope of protection of the present invention.

[0025] See also Figures 1 to 3 In the embodiment of the present invention, the tuning fork type quartz crystal piezoelectric vibration piece includes a base 2 and a pair of vibration arms 1 symmetrically arranged about the central axis of the base 2. The vibration piece is made of quartz 3 as a whole.

[0026] Both sides of the two vibrating arms 1 have grooves 12 along their lengths. The grooves 12 have the same depth on both sides, and groove electrodes 4 are provided on the surfaces of the grooves 12. Mounting electrodes 24 are provided on the surface of the base 2 on both sides of the central axis, covering the front, side, and back surfaces of the base 2.

[0027] The assembly electrode 24 is connected to the groove electrode 4 through the connection electrode 13 . Specifically, the assembly electrode 24 on one side of the central axis of the base 2 is connected to the groove electrode 4 on the other side of the central axis of the base 2 . The two connection electrodes 13 are positioned away from each other.

[0028] The end of the vibration arm 1 is also provided with a frequency modulation electrode 11. There is an exposed quartz 3 area on both sides of the vibration arm 1, which separates the frequency modulation electrode 11 from the groove electrode 4. The two connecting electrodes 13 are also separated by the exposed quartz 3 area.

[0029] The FM electrode 11, the groove electrode 4, the assembly electrode 24 and the connecting electrode 13 are preferably gold-plated. The groove electrode 4, the assembly electrode 24 and the connecting electrode 13 have the same thickness, and the FM electrode 11 is thicker than the groove electrode 4, the assembly electrode 24 and the connecting electrode 13.

[0030] Electrode areas are also distributed on the sides of the two vibration arms 1 .

[0031] The surface of the base 2 is provided with glue dispensing holes 21 for injecting glue. The number of the glue dispensing holes 21 is an even number and is symmetrically arranged about the central axis of the base 2. The number is preferably two.

[0032] The surface of the base 2 is further provided with a long strip-shaped isolation hole 23 along the length direction of the central axis of the base 2 , thereby separating the two dispensing holes 21 .

[0033] The dispensing holes 21 and the isolation holes 23 can be through holes or blind holes. When the dispensing holes 21 are blind holes, the dispensing holes 21 are arranged on both sides of the front surface of the base 2 and the positions thereof correspond.

[0034] In order to facilitate the fixation of the vibration plate, a folding arm 22 is protruded from one end of the base 2 away from the vibration arm 1 to facilitate its fixation on the wafer so that it will not fall off during further processing.

[0035] The above description is only a preferred specific embodiment of the present invention, but the scope of protection of the present invention is not limited thereto. Any technician familiar with the technical field, within the technical scope disclosed by the present invention, who makes equivalent replacements or changes based on the technical solution and inventive concept of the present invention, should be covered by the scope of protection of the present invention.

Claims

1. A tuning fork type quartz crystal piezoelectric vibrating piece, comprising a base (2) and a pair of vibrating arms (1) connected to the base (2) and symmetrically arranged about the central axis of the base (2), characterized in that: The base (2) is provided with a glue dispensing hole (21) for injecting glue; The dispensing holes (21) are provided in an even number and are symmetrically arranged about the central axis of the base (2); an isolation hole (23) is provided on the surface of the base (2) to separate the dispensing holes (21) on both sides of the central axis of the base (2); The isolation holes (23) are arranged along the length direction of the central axis of the base (2); The dispensing holes (21) are through holes, or blind holes arranged on the front and back sides of the base (2) and at corresponding positions.

2. The tuning fork type quartz crystal piezoelectric vibrating piece according to claim 1, characterized in that: The isolation hole (23) is a through hole, or a blind hole provided on the front and back sides of the base (2) and at corresponding positions.

3. The tuning fork type quartz crystal piezoelectric vibrating piece according to claim 1 or 2, characterized in that: An end of the base (2) away from the vibration arm (1) is protrudingly provided with a folding arm (22) for facilitating the fixing of the vibration plate.

4. The tuning fork type quartz crystal piezoelectric vibrating piece according to claim 1 or 2, characterized in that: A frequency modulation electrode (11) is provided at one end of the vibration arm (1) away from the base (2); grooves (12) are provided on both the front and back sides of the vibration arm (1) along the length direction of the vibration arm (1), the grooves (12) are located between the frequency modulation electrode (11) and the base (2), and a groove electrode (4) is provided on the surface of the groove (12); assembly electrodes (24) are provided on both sides of the central axis of the base (2), and the two assembly electrodes (24) are connected to the corresponding groove electrodes (4) through the connecting electrodes (13), and the two connecting electrodes (13) are positioned to avoid each other.

5. The tuning fork type quartz crystal piezoelectric vibrating piece according to claim 4, characterized in that: The frequency modulation electrode (11), the groove electrode (4), the assembly electrode (24) and the connection electrode (13) are all gold-plated layers.

6. The tuning fork type quartz crystal piezoelectric vibrating piece according to claim 5, characterized in that: The gold plating thicknesses of the groove electrode (4), the assembly electrode (24), and the connecting electrode (13) are equal; the gold plating thickness of the frequency modulation electrode (11) is greater than the gold plating thicknesses of the groove electrode (4), the assembly electrode (24), and the connecting electrode (13).

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