Three-axis micromechanical gyroscope and angular velocity measurement method

Abstract

The present invention provides a three-axis micromechanical gyroscope and a method for measuring angular velocity, comprising a substrate, a vibration part connected to the substrate and suspended on the substrate, a driving electrode for driving the vibration part, and a detection part connected to the vibration part, wherein the vibration part comprises a vibration component for receiving Coriolis force and generating position change, the vibration component comprises four mass blocks symmetrically distributed in pairs and connected to each other, the four mass blocks can swing in a plane parallel to the substrate under the drive of the driving electrode, the swing center of each mass block is located outside the mass block, when the three-axis micromechanical gyroscope receives the angular velocity, the swinging mass block is subjected to the Coriolis force and generates a corresponding position change, the detection part is used to detect the position change of each mass block after being subjected to the Coriolis force, and convert the position change of each mass block into an electrical signal output. The three-axis micromechanical gyroscope of the present invention can obtain higher sensitivity.

Description

[Technical field]

[0001] The present invention relates to the technical field of gyroscopes, and in particular to a three-axis micromechanical gyroscope and a method for measuring angular velocity. [Background technology]

[0002] The micromechanical gyroscope of the prior art, namely the MEMS gyroscope, can detect angular velocity based on the principle of Coriolis force generation. The angular velocity in any direction can be decomposed along the X-axis, Y-axis and Z-axis in the spatial rectangular coordinate system. A three-axis gyroscope refers to a micromechanical gyroscope capable of measuring angular velocity in the directions of the X-axis, Y-axis and Z-axis. Therefore, the three-axis gyroscope can measure the direction and magnitude of any angular velocity in space. However, when detecting angular velocity, the three-axis gyroscope has the problem of low detection sensitivity.

[0003] Therefore, it is necessary to provide an improved three-axis micromechanical gyroscope and an angular velocity measurement method to solve the above problems. [Summary of the invention]

[0004] The purpose of the present invention is to provide a three-axis micro-mechanical gyroscope and a method for measuring angular velocity, so as to improve the detection sensitivity of the three-axis micro-mechanical gyroscope.

[0005] The technical solution of the present invention is as follows: a three-axis micromechanical gyroscope, comprising a substrate, a vibration part connected to the substrate and suspended on the substrate, a driving electrode for driving the vibration part, and a detection part connected to the vibration part, the vibration part comprising a vibration component for receiving Coriolis force and generating position change, the vibration component comprising four mass blocks symmetrically distributed in pairs and connected to each other, the four mass blocks can swing under the drive of the driving electrode, and the swing center of each mass block is located outside the mass block;

[0006] The four mass blocks include a first mass block, a second mass block, a third mass block and a fourth mass block. When the three-axis micromechanical gyroscope is stationary, the first mass block and the third mass block are symmetrical with respect to a first axis, and the second mass block and the fourth mass block are symmetrical with respect to the first axis; the first mass block and the second mass block are symmetrical with respect to a second axis, and the third mass block and the fourth mass block are symmetrical with respect to the second axis; the first axis is perpendicular to the second axis;

[0007] When the three-axis micromechanical gyroscope receives angular velocity, the swinging mass block is subjected to Coriolis force and produces corresponding position change. The detection unit is used to detect the position change of each mass block after being subjected to the Coriolis force and convert the position change of each mass block into an electrical signal output.

[0008] A method for measuring angular velocity is applied to a three-axis micromechanical gyroscope, comprising a substrate, a vibration part connected to the substrate and suspended on the substrate, a driving electrode connected to the driving vibration part, and a detection part connected to the vibration part, wherein the vibration part comprises four mass blocks for receiving Coriolis force and generating position changes, and the method for measuring angular velocity comprises:

[0009] The four mass blocks are driven to swing by driving electrodes, wherein the first mass block and the second mass block swing concentrically and in anti-phase, the third mass block and the fourth mass block swing concentrically and in anti-phase, and the swing of the first mass block is in anti-phase with the swing of the third mass block; or the first mass block and the second mass block swing concentrically and in phase, the third mass block and the fourth mass block swing concentrically and in phase, and the swing of the first mass block is in anti-phase with the swing of the third mass block;

[0010] Receiving angular velocity so that the four mass blocks are subjected to Coriolis force and produce position changes under the action of the Coriolis force;

[0011] The detection unit detects the position change of the four mass blocks in the direction of the Coriolis force and converts the position change into an electrical signal output;

[0012] The angular velocity is calculated based on the electrical signal.

[0013] The beneficial effect of the present invention is that the three-axis micromechanical gyroscope provided by the present invention has four mass blocks, and the four mass blocks swing under the action of the driving electrode, and the swing center of the mass block is located outside the mass block. Therefore, at the same time, the mass points at different positions in the mass block have different speed directions. When the three-axis micromechanical gyroscope receives an angular velocity in any direction, there are always some mass points in the swinging mass block, and the speed direction of these mass points is not parallel to the direction of the angular velocity to be detected. The mass points that are not parallel to the direction of the angular velocity to be measured can be subjected to the Coriolis force. Since the swing center of the mass block is located outside the mass block, the Coriolis forces of different mass points on the same mass block will not cancel each other, that is, the resultant force of the Coriolis force is not zero. Therefore, no matter what direction the angular velocity to be measured has, the swinging mass block can be subjected to the Coriolis force and produce a corresponding position change. The detection unit of the present invention can detect the position change of all mass blocks after being subjected to the Coriolis force, convert the position change of all mass blocks into electrical signal output, and finally calculate the magnitude and direction of the angular velocity. The detection sensitivity of the four-mass-block three-axis gyroscope in the prior art is low because only two masses are subjected to the Coriolis force when detecting the angular velocity of certain axes, and the remaining two masses are not subjected to the Coriolis force, nor do they undergo Coriolis motion to produce position changes. However, the four masses in the three-axis micromechanical gyroscope of the present invention can be subjected to the Coriolis force when detecting angular velocity in any direction, and can convert the position change into an electrical signal output. Therefore, compared with the prior art, the three-axis micromechanical gyroscope in the present invention improves the electrical signal output value while ensuring the detection of the three-axis angular velocity, thereby improving the sensitivity of the gyroscope.

Brief Description of the Drawings

[0014] Figure 1 A first structural schematic diagram of a three-axis micromechanical gyroscope provided by the present invention;

[0015] Figure 2 It is a schematic diagram of the driving mode of a four-mass three-axis gyroscope in the related art;

[0016] Figure 3 Schematic diagram of the driving mode of the mass block in the present invention;

[0017] Figure 4 It is a schematic diagram of another driving mode of the mass block in the gyroscope;

[0018] Figure 5 It is a schematic diagram of the Coriolis force on the four mass blocks when detecting the angular velocity in the direction of the first axis in the first driving mode;

[0019] Figure 6 It is a schematic diagram of the Coriolis force on the four mass blocks when detecting the angular velocity in the direction of the second axis in the first driving mode;

[0020] Figure 7It is a schematic diagram of the Coriolis force on the four mass blocks when detecting the angular velocity in the direction of the third axis in the first driving mode;

[0021] Figure 8 It is a schematic diagram of the Coriolis force on the four mass blocks when detecting the angular velocity in the direction of the first axis in the second driving mode;

[0022] Fig. 9 It is a schematic diagram of the Coriolis force on the four mass blocks when detecting the angular velocity in the direction of the second axis in the second driving mode;

[0023] Fig.10 It is a schematic diagram of the Coriolis force on the four mass blocks when detecting the angular velocity in the direction of the third axis in the second driving mode;

[0024] Fig.11 A second structural schematic diagram of the three-axis micromechanical gyroscope provided by the present invention;

[0025] Fig.12 for Figure 1 A partial enlarged view of E shown in FIG.

[0026] Fig.13 for Figure 1 A partial enlarged view of G shown in FIG.

[0027] Fig.14 for Figure 1 A partial enlarged view of H shown in FIG.

[0028] Fig.15 for Figure 1 A partial enlarged view of J shown in FIG.

[0029] Fig.16 A schematic diagram of the electrode arrangement in the three-axis micromechanical gyroscope provided by the present invention;

[0030] Fig.17 The present invention provides a method for measuring angular velocity. [Specific implementation method]

[0031] The present invention will be further described below in conjunction with the accompanying drawings and implementation modes.

[0032] See also Figure 1 , Figure 1 This is a structural schematic diagram of a three-axis micromechanical gyroscope 100 provided by the present invention. The present invention provides a three-axis micromechanical gyroscope 100, which includes a substrate 2, a driving electrode 8, a vibration part 4 and a detection part 6.

[0033] MEMS (Micro-Electro Mechanical Systems) refers to a complete micro-electromechanical system that integrates mechanical elements, micro sensors, micro actuators, signal processing and control circuits, interface circuits, communications and power supplies. Micromechanical gyroscopes are commonly used in various portable electronic devices such as mobile phones, IPADs, AR\VR wearable devices, etc. They are often used to detect the angular velocity of an object, and can realize the somatosensory interaction between users and devices, and have great application prospects.

[0034] The micromechanical gyroscope uses the principle of the generation of Coriolis force (also known as Coriolis force) to detect angular velocity. Coriolis force is an inertial force that an object in a rotating reference frame is subjected to when it moves. In the design of a micromechanical gyroscope, it is first necessary to manufacture a moving mass block. At this time, the mass block is in an inertial system and only maintains a preset motion state, which is called a driving mode. When an angular velocity is applied to the moving mass block, that is, when the mass block in the driving mode is suddenly rotated. Due to inertia, the mass block will maintain the original motion in the driving mode. However, when observing the mass block in the rotating system, it can be found that the mass block has generated a displacement in the vertical direction of the angular velocity. At this time, it can be considered that the mass block is subjected to an inertial force in the direction perpendicular to the angular velocity. This inertial force is called the Coriolis force, and the direction of the Coriolis force can be determined by the right-hand rule. When observing the mass block in the rotating system, in addition to maintaining the original motion, the mass block also generates a displacement in the direction of the Coriolis force. This motion state is called the detection mode. The detection unit can detect the position change of the mass block in the direction of the Coriolis force and convert the position change into an electrical signal for output. By measuring the displacement of the mass block in the direction of the Coriolis force, the magnitude of the angular velocity can be calculated, thereby realizing the detection of the angular velocity.

[0035] The substrate 2 in the micromechanical gyroscope is used to provide support for the vibration part 4. The vibration part 4 is connected to the substrate 2 and suspended above the substrate 2. The vibration part 4 is used to sense external rotation, receive external angular velocity input, generate Coriolis force, and generate displacement in the direction of the Coriolis force. The vibration part 4 enters the driving mode under the action of the driving electrode 8. The detection part 6 is used to detect the position change of the vibration part 4 in the direction of the Coriolis force, and convert the position change of the mass block into an electrical signal output.

[0036] The vibration part 4 includes four mass blocks symmetrically distributed in pairs, and the four mass blocks can swing under the drive of the driving electrode 8. The swing center of each mass block is located outside the mass block. When the three-axis micromechanical gyroscope 100 receives angular velocity, the swinging mass block is subjected to Coriolis force and produces corresponding position change. The detection part 6 is used to detect the position change of each mass block after being subjected to the Coriolis force, and convert the position change of each mass block into an electrical signal output.

[0037] It should be noted that the direction of the Coriolis force on the mass block is related to the direction of motion of the mass block in the driving mode and the direction of the angular velocity to be measured. When the input angular velocity is parallel to the direction of motion of the mass block in the driving mode, the Coriolis force is zero, that is, the mass block is not affected by the Coriolis force. Figure 2 , Figure 2 Schematic diagram of the driving mode of the four-mass-block three-axis gyroscope in the related art. In the related art, exemplarily, the driving mode of mass block A is set to linear reciprocating motion along the X-axis. According to the right-hand rule, when the direction of the angular velocity to be measured is the Y-axis direction, the direction of the Coriolis force on mass block A is the Z-axis direction perpendicular to the XY plane. When the direction of the angular velocity to be measured is also the X-axis direction, the direction of the angular velocity to be measured is parallel to the direction of motion of mass block A, and mass block A will not be affected by the Coriolis force. In this case, mass block A cannot be used to measure the angular velocity in the X-axis direction. In order to detect the angular velocity of the X-axis, a mass block B that reciprocates along the Y-axis is generally added to measure the angular velocity in the X-axis direction. When the direction of the angular velocity to be measured is the X-axis direction, only mass block B is affected by the Coriolis force and produces a position change. Mass block A is not affected by the Coriolis force and will continue to maintain linear reciprocating motion along the X-axis direction. Therefore, the detection unit cannot detect the position change of mass block A and output an electrical signal. At this time, mass block A is in an idle state and cannot contribute to the output of the electrical signal. When the direction of the angular velocity to be measured is the Z-axis direction which is perpendicular to both the X-axis and the Y-axis, the Coriolis force received by mass block A is along the Y-axis direction, and the Coriolis force received by mass block B is along the X-axis direction. Therefore, although the gyroscope in the prior art can measure the angular velocity of the X-axis, Y-axis and Z-axis, when measuring the angular velocity in a certain direction (such as the X-axis and the Y-axis), not all mass blocks can participate in the Coriolis motion. There are some mass blocks that are not affected by the Coriolis force and are idle, which leads to the low sensitivity of the gyroscope, which also limits the improvement of the detection efficiency of the gyroscope to a certain extent.

[0038] The driving mode of the mass block provided in the present invention is swinging in a plane parallel to the substrate. Figure 3 , Figure 3Schematic diagram of the driving mode of the mass block in the present invention. The shape of the mass block in the swing plane is a semicircular ring. It should be noted that because the semicircular ring mass block has no mass distribution at the center, the center of the semicircular ring mass block is located outside the mass block. An anchor connected to the base is set at the center of the circle, and the semicircular ring mass block is connected to the anchor located at the center of the circle through a beam. It can be understood that when the driving mode of the semicircular ring mass block is to rotate at an angular velocity ω 0 When the mass block swings around the center O (anchor) (the center of the swing coincides with the center O of the semicircular ring mass block, that is, the center of the swing of the mass block is not on the mass block), the speed of each point on the mass block is different, and the linear velocity is equal to the product of the angular velocity and the radius (υ=ω 0 ×r). The direction of motion of the mass point on the mass block is perpendicular to the line connecting this point and the center of the circle, and the magnitude of the speed is related to the distance from the point to the center of the circle. For example, when the mass block swings back and forth around the center of the circle O, at a certain moment, the mass block moves counterclockwise, and the endpoint m on the mass block 1 and m 3 The direction of movement 1 and 3 is the Y-axis direction, the midpoint m on the mass block 2 The direction of movement 2 is the X-axis direction. Therefore, when the angular velocity along the X-axis direction is input, m 1 and m 3 Can be subjected to Coriolis force, m 2 When the angular velocity along the Y-axis is input, m 2 can be subjected to the Coriolis force in the Z-axis direction, and m 1 and m 3 No Coriolis force. When the angular velocity of the Z axis, which is perpendicular to both the X axis and the Y axis, is input, every point in the mass block can be affected by the Coriolis force.

[0039] In addition, it should be noted that when the mass block is semicircular, the center of the semicircular mass block is located at the edge of the semicircular mass block, that is, the center of the semicircular mass block is not located on the mass block. When the semicircular mass block swings around the center of the circle located at its edge, when measuring the angular velocity in any direction, there are always some particles in the semicircular mass block that can be affected by the Coriolis force, that is, the angular velocity in any direction can be measured.

[0040] Therefore, different particles in the swinging mass block have different movement directions, and there are always some particles in the swinging mass block that can be affected by the Coriolis force, thereby driving the entire mass block to move. However, it should be noted that the swing center of the mass block needs to be located outside the mass block, that is, the swing center of the mass block can be located at the edge of the mass block, or it can be completely located at other positions where the mass block has no mass distribution.

[0041] Although there are always some points in the swinging mass that can be acted upon by the Coriolis force, there is also a situation where Figure 4 , Figure 4 Schematic diagram of another driving mode of the mass block in the gyroscope. The mass block is circular, the swing center is located on the circular mass block, and the swing center is located at the center of the circular mass block. It can be understood that when the circular mass block moves at an angular velocity ω 0 When the circular mass block swings around the center O, when measuring the Z-axis angular velocity, although each particle on the circular mass block can be acted upon by the Coriolis force, the Coriolis forces on the mass block are symmetrically distributed about the center O, and the resultant force of the Coriolis forces on the circular mass block is zero. In this case, the Z-axis angular velocity cannot be measured. Therefore, in order to avoid this situation, the three-axis micromechanical gyroscope provided in the embodiment of the present application places the swing center of the mass block outside the mass block to ensure that the Coriolis forces on the same mass block do not cancel each other out.

[0042] When measuring angular velocity, there are often errors caused by orthogonal errors and impact vibrations, which will affect the accuracy of angular velocity measurement. Orthogonal error is similar to the concept of "zero drift", that is, when there is no angular velocity input, the gyroscope can still measure the angular velocity. This is caused by the manufacturing and installation errors in the production process. For example, the movement of the mass block in the driving mode deviates from the preset trajectory, thereby generating a position change that deviates from the pre-set motion trajectory. The position change will also be detected by the detection unit, and the "angular velocity" is further calculated. Obviously, this measurement result is not the measurement result of the angular velocity. In addition, when the gyroscope encounters a collision or external vibration, the measurement unit inside the gyroscope will be offset to a certain extent under the action of the impact force, thereby causing the position of the mass block to change. This position change can also be detected by the detection unit. However, this position change is not caused by the Coriolis force, which causes the error of the gyroscope. If there is a vibration shock during the measurement of the angular velocity, it will cause a measurement error. For example, when an angular velocity with acceleration is received, Newton's second law shows that there is a force that provides the angular acceleration. The force that provides the acceleration will also cause impact and vibration inside the gyroscope, thereby generating errors. In order to avoid orthogonal errors and vibration impact errors, when the gyroscope measures any axis, it generally uses two mass blocks moving in opposite phases to measure an angular velocity at the same time, that is, differential detection of the angular velocity is performed. Differential detection can effectively avoid orthogonal errors and measurement errors caused by various vibration impacts. Therefore, gyroscopes are often designed with an even number of symmetrically distributed mass blocks, combined with symmetrical design and anti-phase drive modes, to achieve differential detection and thus improve detection accuracy.

[0043] It should be noted that, in order to realize differential detection and thus improve the measurement accuracy of the three-axis micromechanical gyroscope 100, the four mass blocks have the same shape and size, and the four mass blocks are arranged symmetrically in pairs. The mass block can be in various shapes. For example, the mass block can be a semicircular ring. Of course, the mass block can also be a semicircular, square, or a sector with a central angle of no more than 180 degrees, or a frame structure, such as a square frame, a semicircular frame, or a sector frame. The frame structure can reduce the mass of the mass block and facilitate the installation of the detection electrode.

[0044] It should be noted that when calculating the angular velocity, it is necessary to first calculate the movement speed of the mass block in the driving mode. Therefore, the gyroscope needs to pre-set the electrical parameters provided by the driving electrode 8 and the movement range of the mass block to determine the speed of the mass block in the driving mode. In order to facilitate calculation, the driving mode of the mass block in the three-axis micromechanical gyroscope 100 is often designed as a periodic motion, such as periodic reciprocating motion or swinging. It is understandable that when the driving mode is a periodic motion, the Coriolis force on the mass block is also periodic, so the Coriolis motion of the mass block under the action of the Coriolis force is also periodic.

[0045] Please continue reading Figure 1 , the four mass blocks include a first mass block 42a, a second mass block 42b, a third mass block 42c and a fourth mass block 42d located in the same plane, a first axis X is defined between the first mass block 42a and the third mass block 42c, the first mass block 42a and the third mass block 42c are symmetrical about the first axis X, and the second mass block 42b and the fourth mass block 42d are symmetrical about the first axis X;

[0046] A second axis Y is defined between the first mass block 42a and the second mass block 42b. The first mass block 42a and the second mass block 42b are symmetrical about the second axis Y. The third mass block 42c and the fourth mass block 42d are symmetrical about the second axis Y.

[0047] The first axis X is perpendicular to the second axis Y, and the three-axis micromechanical gyroscope 100 also includes a third axis Z that is perpendicular to both the first axis X and the second axis Y. The first axis X, the second axis Y, and the third axis Z constitute a spatial rectangular coordinate system, and the intersection of the first axis X and the second axis Y is the origin of the spatial rectangular coordinate system. The direction from the first mass block 42a to the second mass block 42b is the positive direction of the first axis X, the direction from the third mass block 42c to the first mass block 42a is the positive direction of the second axis Y, and the direction in which the mass block is away from the substrate 2 is the positive direction of the third axis Z.

[0048] The four masses are located in the same plane, which is more conducive to the processing and assembly of the three-axis micromechanical gyroscope 100. Alternatively, the four masses may not be located in the same plane but are symmetrical in pairs, which can also achieve three-axis differential detection, while satisfying that the four masses all participate in the Coriolis motion, thereby improving the sensitivity of the gyroscope.

[0049] When the four mass blocks are in the driving mode, the swing of one mass block is in phase with the swing of another mass block and in antiphase with the swing of the other two mass blocks, which can realize differential detection of any angular velocity.

[0050] In one implementation mode, please refer to Figures 5 to 7 , Figure 5 This is a schematic diagram of the Coriolis force on the four mass blocks when detecting the angular velocity of the first axis in the X direction under the first driving mode. Figure 6 This is a schematic diagram of the Coriolis force on the four mass blocks when detecting the angular velocity of the second axis in the Y direction under the first driving mode. Figure 7 Schematic diagram of the Coriolis force on the four mass blocks when detecting the angular velocity of the third axis Z direction in the first driving mode. Specifically, the driving electrode 8 drives the first mass block 42a and the second mass block 42b to swing in opposite phases, and the driving electrode 8 drives the third mass block 42c and the fourth mass block 42d to swing in opposite phases, wherein the swing of the first mass block 42a is in opposite phase to the swing of the third mass block 42c.

[0051] When the three-axis micromechanical gyroscope 100 receives the angular velocity in the direction of the first axis X, the four mass blocks all flip around the second axis Y, the flip of the first mass block 42a is in phase with the flip of the second mass block 42b, the flip of the third mass block 42c is in phase with the flip of the fourth mass block 42d, and the flip of the first mass block 42a is in anti-phase with the flip of the third mass block 42c. For details, please refer to Figure 5 , for example, at a certain moment, the first mass block 42a and the fourth mass block 42d move at an angular velocity ω 0 Swinging clockwise, the second mass block 42b and the third mass block 42c move at an angular velocity ω 0 When the angular velocity ω in the direction of the first axis X is input to the three-axis micromechanical gyroscope 100, x When, according to the right-hand rule, the resultant force F of the Coriolis force on the first mass block 42a is K The direction is along the positive direction of the third axis Z, and the resultant force F of the Coriolis force on the second mass block 42b is K The direction is along the positive direction of the third axis Z, and the first mass block 42a and the second mass block 42b flip around the second axis Y toward the positive direction of the third axis Z. The resultant force F of the Coriolis force on the third mass block 42c KThe direction is along the negative direction of the third axis Z, and the resultant force F of the Coriolis force on the fourth mass block 42d is K The direction is along the negative direction of the third axis Z, and the third mass block 42c and the fourth mass block 42d flip around the second axis Y toward the negative direction of the third axis Z. Therefore, the first mass block 42a and the second mass block 42b as a whole and the third mass block 42c and the fourth mass block 42d as a whole form an anti-phase Coriolis motion, which can realize the differential detection of the angular velocity of the first axis X. It can be understood that when the swing direction of the mass block changes at other times, the direction of the Coriolis force also changes with the change of the swing direction of the mass block.

[0052] When the three-axis micromechanical gyroscope 100 receives the angular velocity in the direction of the second axis Y, the four mass blocks all flip around their respective flip axes D, the flip axis D passes through the swing center of the mass block and is parallel to the first axis X, the flip of the first mass block 42a is in opposite phase to the flip of the second mass block 42b, the flip of the third mass block 42c is in opposite phase to the flip of the fourth mass block 42d, and the flip of the first mass block 42a is in opposite phase to the flip of the third mass block 42c. Figure 6 , for example, at a certain moment, the first mass block 42a and the fourth mass block 42d move at an angular velocity ω 0 Swinging clockwise, the second mass block 42b and the third mass block 42c move at an angular velocity ω 0 When the three-axis micro-mechanical gyroscope 100 is input along the second axis Y direction ω y When the angular velocity is , the Coriolis force F on the half of the first mass block 42a close to the first axis X is K Along the negative direction of the third axis Z, the Coriolis force F exerted on the half of the first mass block 42a away from the first axis X is K Along the positive direction of the third axis Z, the first mass block 42a flips around the first flip axis D1. Correspondingly, the second mass block 42b flips around the first flip axis D1 under the action of the Coriolis force, and the Coriolis motions of the first mass block 42a and the second mass block 42b are in opposite phases, which can realize differential detection of the second axis Y. The third mass block 42c and the fourth mass block 42d flip around the second flip axis D2 under the action of the Coriolis force, and the Coriolis motions of the third mass block 42c and the fourth mass block 42d are in opposite phases, and the third mass block 42c and the fourth mass block 42d can also realize differential detection of the angular velocity of the second axis Y. Among them, the Coriolis motions of the first mass block 42a and the third mass block 42c are in opposite phases.

[0053] When the three-axis micro-mechanical gyroscope 100 receives the angular velocity ω in the direction of the third axis Z zWhen the four mass blocks move along the first axis X direction, the movement of the first mass block 42a is in phase with the movement of the second mass block 42b, the movement of the third mass block 42c is in phase with the movement of the fourth mass block 42d, and the movement of the first mass block 42a is in phase with the movement of the third mass block 42c. Figure 7 At a certain moment, the first mass block 42a and the fourth mass block 42d move at an angular velocity ω 0 Swinging clockwise, the second mass block 42b and the third mass block 42c move at an angular velocity ω 0 When the three-axis micro-mechanical gyroscope 100 is input along the third axis Z direction ω z When the angular velocity is , the first mass block 42a and the second mass block 42b are subjected to the Coriolis force F along the negative direction of the first axis X. K , and moves in the negative direction of the first axis X. The third mass block 42c and the fourth mass block 42d are subjected to a Coriolis force F along the negative direction of the first axis X. K , and moves in the positive direction of the first axis X. Therefore, the first mass block 42a and the second mass block 42b as a whole and the third mass block 42c and the fourth mass block 42d as a whole complete the differential detection of the angular velocity of the third axis Z.

[0054] It is understandable that when an angular velocity in any direction is input, the angular velocity can be decomposed along the first axis X, the second axis Y and the third axis Z. The mass block will be subjected to Coriolis forces in multiple directions and perform complex Coriolis motion under the action of the Coriolis forces. The detection unit 6 can measure the component velocities along the three axes respectively, and then synthesize the velocities to finally obtain the magnitude and direction of the velocity.

[0055] For alternatives, please refer to Figures 8 to 10 , Figure 8 This is a schematic diagram of the Coriolis force on the four mass blocks when detecting the angular velocity in the X direction of the first axis under the second driving mode. Fig. 9 This is a schematic diagram of the Coriolis force on the four mass blocks when detecting the angular velocity in the Y direction of the second axis under the second driving mode. Fig.10 Schematic diagram of the Coriolis force on the four mass blocks when detecting the angular velocity of the third axis Z direction in the second driving mode. The driving electrode 8 drives the first mass block 42a and the second mass block 42b to swing in phase, and the driving electrode 8 drives the third mass block 42c and the fourth mass block 42d to swing in phase, wherein the swing of the first mass block 42a and the third mass block 42c are in anti-phase.

[0056] When the three-axis micromechanical gyroscope 100 receives the angular velocity ω in the direction of the first axis X xWhen the four mass blocks are turned around the second axis Y, the turning of the first mass block 42a is in opposite phase to the turning of the second mass block 42b, the turning of the third mass block 42c is in opposite phase to the turning of the fourth mass block 42d, and the turning of the first mass block 42a is in opposite phase to the turning of the third mass block 42c. For details, please refer to Figure 8 At a certain moment, the first mass block 42a and the second mass block 42b move at an angular velocity ω 0 The third mass block 42c and the fourth mass block 42d swing counterclockwise at an angular velocity ω 0 When the angular velocity ω in the direction of the first axis X is input to the three-axis micromechanical gyroscope 100, x When the first mass block 42a is subjected to the Coriolis force F K The direction is along the positive direction of the third axis Z, and the first mass block 42a flips around the second axis Y toward the positive direction of the third axis Z. The Coriolis force F on the second mass block 42b K The direction is along the negative direction of the third axis Z, and the second mass block 42b flips around the second axis Y toward the negative direction of the third axis Z. The Coriolis force on the third mass block 42c is along the negative direction of the third axis Z, and the third mass block 42c flips around the second axis Y toward the negative direction of the third axis Z. The Coriolis force on the fourth mass block 42d is along the positive direction of the third axis Z, and the fourth mass block 42d flips around the second axis Y toward the positive direction of the third axis Z. Therefore, the differential detection of the angular velocity in the direction of the first axis X can be achieved between the first mass block 42a and the second mass block 42b, and the differential detection can also be completed between the third mass block 42c and the fourth mass block 42d.

[0057] When the three-axis micromechanical gyroscope 100 receives the angular velocity ω in the direction of the second axis Y y When the first mass block 42a is turned over, the first mass block 42a and the second mass block 42b are turned over in phase, the third mass block 42c and the fourth mass block 42d are turned over in phase, and the first mass block 42a and the third mass block 42c are turned over in opposite phases. Fig. 9 At a certain moment, the first mass block 42a and the second mass block 42b move at an angular velocity ω 0 The third mass block 42c and the fourth mass block 42d swing counterclockwise at an angular velocity ω 0 When the three-axis micro-mechanical gyroscope 100 is input along the second axis Y direction ω yWhen the angular velocity is , the Coriolis force on the half of the first mass block 42a close to the first axis X is along the positive direction of the third axis Z, and the Coriolis force on the half of the first mass block 42a away from the first axis X is along the negative direction of the third axis Z, then the first mass block 42a flips around the first flip axis D1. Correspondingly, the second mass block 42b flips around the first flip axis D1 under the action of the Coriolis force, and the Coriolis motions of the first mass block 42a and the second mass block 42b are in phase. The third mass block 42c and the fourth mass block 42d flip around the second flip axis D2 in phase under the action of the Coriolis force, wherein the Coriolis motions of the first mass block 42a and the third mass block 42c are in anti-phase. The first mass block 42a and the second mass block 42b as a whole and the third mass block 42c and the fourth mass block 42d as a whole realize differential detection of the angular velocity of the second axis Y.

[0058] When the three-axis micro-mechanical gyroscope 100 receives the angular velocity in the direction of the third axis Z, the four mass blocks all move along the first axis X, the movement of the first mass block 42a is in opposite phase to the movement of the second mass block 42b, the movement of the third mass block 42c is in opposite phase to the movement of the fourth mass block 42d, and the movement of the first mass block 42a is in opposite phase to the movement of the third mass block 42c. For details, please refer to Fig.10 At a certain moment, the first mass block 42a and the second mass block 42b move at an angular velocity ω 0 The third mass block 42c and the fourth mass block 42d swing counterclockwise at an angular velocity ω 0 When the three-axis micro-mechanical gyroscope 100 is input along the third axis Z direction ω z When the angular velocity is 0.040°, the first mass block 42a is subjected to the Coriolis force in the negative direction of the first axis X, thereby moving in the negative direction of the first axis X. The second mass block 42b is subjected to the Coriolis force in the positive direction of the first axis X, thereby moving in the positive direction of the second axis Y. The first mass block 42a and the second mass block 42b can realize differential detection of the angular velocity of the third axis Z. Similarly, the directions of the Coriolis forces of the third mass block 42c and the fourth mass block 42d are opposite, and the directions of the Coriolis forces of the first mass block 42a and the third mass block 42c are opposite.

[0059] See also Fig.11 , Fig.11 The second structural schematic diagram of the three-axis micromechanical gyroscope provided by the present invention. The vibration part 4 also includes a connecting component 44 and a fixing component 46. Among them, the fixing component 46 is used to connect the four mass blocks to the substrate 2, and the connecting component 44 is used to connect the mass blocks to connect the four mass blocks into a complete whole. The use of the connecting component 44 can facilitate the fixation and constraint of the mass blocks, so that the four mass blocks are located in the same plane. At the same time, the setting of the connecting component 44 also defines the detection range of the gyroscope.

[0060] The fixing assembly 46 includes two anchors 462 for connecting the four mass blocks to the base 2, and the two anchors 462 include a first anchor 462a and a second anchor 462b arranged along the second axis Y and symmetrically distributed about the first axis X; the first mass block 42a and the second mass block 42b are both connected to the base 2 through the first anchor 462a, and the third mass block 42c and the fourth mass block 42d are both connected to the base 2 through the second anchor 462b; the first mass block 42a and the second mass are both concentrically swung with the first anchor 462a as the swing center, and the third mass block 42c and the fourth mass block 42d are both concentrically swung with the second anchor 462b as the swing center. It can be understood that the first anchor 462a is the common swing center of the first mass block 42a and the second mass block 42b, and the second anchor 462b is the common swing center of the third mass block 42c and the fourth mass block 42d. The sharing of the swing center can make the structure more compact and reduce the volume of the gyroscope. The swing centers of the mass blocks can also be set to be non-overlapping. It should be noted that a certain gap is left between the first mass block 42a and the second mass block 42b so that the mass blocks can perform periodic swings in the driving mode or perform Coriolis motion in the detection mode. However, whether it is the driving mode or the detection mode, the movement amplitude of the mass blocks is controlled within a relatively small range, so there is no need to leave too much movement space between the mass blocks, which is beneficial to reducing the volume of the gyroscope and reducing the energy consumption of the gyroscope.

[0061] It can be understood that the flip axis of the first mass block 42a coincides with the flip axis of the second mass block 42b, which is the first flip axis D1, and the first flip axis passes through the first anchor 462a and is parallel to the first axis X; the flip axis of the third mass block 42c coincides with the flip axis of the fourth mass block 42d, which is the second flip axis D2, and the second flip axis D2 passes through the second anchor 462b and is parallel to the first axis X.

[0062] Please continue reading Fig.11. The connection assembly 44 includes an inner coupling member 441 connecting each mass block and the corresponding anchor member 462. The inner coupling member 441 is located between the mass block and the anchor member 462. It can be understood that if the mass block is directly connected to the anchor member 462, the Coriolis motion of the mass block will be limited, which is not conducive to the change of the position of the mass block, thereby reducing the output of the electrical signal and not conducive to maximizing the sensitivity. The inner coupling member 441 provides radial and axial degrees of freedom to the mass block, so that the mass block can be connected to the substrate 2 through the anchor member 462, and the anchor member 462 will not affect the Coriolis motion of the mass block too much. The connection assembly 44 includes a first inner coupling member 441a connected to the first mass block 42a, a second inner coupling member 441b connected to the second mass block 42b, a third inner coupling member 441c connected to the third mass block 42c, and a fourth inner coupling member 441d connected to the fourth mass block 42d. The first inner coupling member 441a and the second inner coupling member 441b are connected and fixed to the first anchor member 462a, and the third inner coupling member 441c and the fourth inner coupling member 441d are connected and fixed to the second anchor member 462b.

[0063] Please refer to Fig.12 , Fig.12 for Figure 1 The inner coupling member 441 includes a first decoupling structure 4412, a fourth connecting beam 4414 connecting the anchor member 462 and the first decoupling structure 4412, and a fifth connecting beam 4416 connecting the first decoupling structure 4412 and the mass block. The fourth connecting beam 4414 is directly connected to the anchor member 462, and the fourth connecting beam 4414 and the first decoupling structure 4412 are fixed to the substrate 2 through the anchor member 462.

[0064] The fourth connection beam 4414 has a large circumferential degree of freedom, and the fifth connection beam 4416 has a bending structure and has a large circumferential stiffness and radial and out-of-plane degrees of freedom. Therefore, when the driving electrode 8 drives the mass block to swing, the fourth connection beam 4414 and the first decoupling structure 4412 swing around the anchor 462, and the first decoupling structure 4412 drives the mass block to swing around the anchor 462 through the fifth connection beam 4416. When the three-axis micromechanical gyroscope 100 receives angular velocities in the X direction of the first axis and in the Y direction of the second axis, the fifth connecting beam 4416 is deformed along the Z direction of the third axis, and the fourth connecting beam 4414 and the first decoupling structure 4412 do not move with the mass block under the Coriolis force; when the three-axis micromechanical gyroscope 100 receives angular velocities in the Z direction of the third axis, the fifth connecting beam 4416 is deformed along the X direction of the first axis, and the fourth connecting beam 4414 and the first decoupling structure 4412 do not move with the mass block under the Coriolis force.

[0065] It can be understood that, since the first decoupling structure 4412 does not move with the mass block under the action of the Coriolis force, the driving electrode can be set on the first decoupling structure 4412 to obtain a stable driving effect.

[0066] Please continue reading Fig.11 The connecting assembly 44 further includes a first connecting rod 442a and a second connecting rod 442b symmetrically distributed about the second axis Y. The first connecting rod 442a is arranged on the side of the first mass block 42a and the third mass block 42c away from the two anchors 462. The first connecting rod 442a is used to connect the first mass block 42a and the third mass block 42c so that the first mass block 42a and the third mass block 42c move in opposite phases. The fixing assembly 46 further includes a first fulcrum 464a located at the midpoint of the first connecting rod 442a. The first fulcrum 464a is used to connect the first connecting rod 442a and the base 2. The first mass block 42a, the third mass block 42c, and the first connecting rod 442a together form an equal-arm lever. When the first mass block 42a and the second mass block 42b measure the angular velocity of the third axis Z, the equal-arm lever ensures the anti-phase movement of the first mass block 42a and the third mass block 42c. The differential detection of the third axis Z is then completed to ensure the detection accuracy.

[0067] The second connecting rod 442b is arranged on the side of the second mass block 42b and the fourth mass block 42d away from the two anchor members 462, and the second connecting rod 442b is used to connect the second mass block 42b and the fourth mass block 42d so that the second mass block 42b and the fourth mass block 42d move in opposite phases. The fixing assembly 46 also includes a second fulcrum 464b located at the midpoint of the second connecting rod 442b, and the second fulcrum 464b is used to connect the second connecting rod 442b and the base 2. The second mass block 42b, the fourth mass block 42d, and the second connecting rod 442b together form an equal-arm lever to ensure detection accuracy.

[0068] Please continue reading Fig.11 The connection assembly 44 further includes four first connection beams 443 and four outer coupling members 444 for connecting the connecting rod 442 and the mass block, each outer coupling member 444 is connected to one first connection beam 443, each connecting rod 442 is connected to two first connection beams 443, each mass block is connected to one first connection beam 443, and the first connection beam 443 is located on the flip axis D of each mass block. One end of the first connection beam 443 is fixed to the first connecting rod 442a, and the other end of the first connection beam 443 is fixed to the mass block. The first connecting rod 442a is connected to the first mass block 42a through the first connecting beam 443, the first connecting rod 442a is connected to the third mass block 42c through the first connecting beam 443, the second connecting rod 442b is connected to the second mass block 42b through the first connecting beam 443, the second connecting rod 442b is connected to the fourth mass block 42d through the first connecting beam 443, the first outer coupling member 444a is adjacent to the first mass block 42a, the second outer coupling member 444b is adjacent to the second mass block 42b, the third outer coupling member 444c is adjacent to the third mass block 42c, and the fourth outer coupling member 444d is adjacent to the fourth mass block 42d.

[0069] Please refer to Fig.13 , Fig.13 for Figure 1 The first connecting beam 443 includes a fixing portion 4431 connected to the connecting rod 442, and an extension portion 4433 separated from the fixing portion 4431 and connected to the mass block. A connecting groove 421 is provided on the mass block for accommodating part of the first connecting beam 443, and the extension portion 4433 is deeply inserted into the connecting groove 421, and its end is connected to the bottom of the connecting groove 421. Each of the outer coupling members 444 includes a second decoupling structure 4441 connected between the fixing portion 4431 and the extension portion 4433, and a sixth connecting beam 4443 arranged between the second decoupling structure 4441 and the base.

[0070] The sixth connecting beam 4443 has a bending structure, and the sixth connecting beam 4443 has a large circumferential stiffness and radial degree of freedom. The first connecting beam 443 has a large circumferential and out-of-plane degree of freedom and a large radial stiffness. Therefore, when the driving electrode 8 drives the mass block to swing, the second decoupling structure 4441, the fixing part 4431, and the connecting rod 442 do not swing with the mass block. When the three-axis micromechanical gyroscope 100 receives an angular velocity in the first axis X direction and the second axis Y direction, the second decoupling structure 4441, the fixing part 4431, and the connecting rod 442 do not move with the mass block under the action of the Coriolis force; when the three-axis micromechanical gyroscope 100 receives an angular velocity in the third axis Z direction, the second decoupling structure 4441, the fixing part 4431, and the connecting rod 442 move along the first axis X direction.

[0071] It can be understood that, since the second coupling structure 4441 only moves along the first axis X direction with the mass block, the detection electrode for detecting the angular velocity of the third axis Z can be set on the second coupling structure 4441 to obtain a stable detection effect.

[0072] Please continue reading Fig.11 , and refer to Fig.14 , Fig.14 for Figure 1 The connecting assembly 44 further includes four second connecting beams 445 for connecting the four mass blocks, the first mass block 42a and the second mass block 42b are connected by two second connecting beams (445a and 445b) symmetrically distributed about the first flip axis D1, and the two second connecting beams (445a and 445b) are used to associate the movement of the first mass block 42a with the movement of the second mass block 42b, specifically, to make the first mass block 42a and the second mass block 42b move in the same phase or in an opposite phase.

[0073] The third mass block 42c is connected to the fourth mass block 42d by two second connecting beams (445c and 445d) symmetrically distributed about the second flip axis D2. The two second connecting beams (445c and 445d) are used to associate the movement of the third mass block 42c with the movement of the fourth mass block 42d, specifically, to make the third mass block 42c move in the same phase or in opposite phases with the fourth mass block 42d.

[0074] It is understandable that the second connecting beam (445a, 445b, 445c and 445d) has a bent structure, so when the first mass block 42a and the second mass block 42b move in phase, the synchronization of the two mass blocks can be ensured. When the first mass block 42a and the second mass block 42b perform anti-phase Coriolis motion, the motion of the two mass blocks can be linked to better achieve differential detection. The second connecting beam 445 between the third mass block 42c and the fourth mass block 42d has the same function.

[0075] Please continue reading Fig.11 , and refer to Fig.15 , Fig.15 for Figure 1 The connecting assembly 44 further includes two third connecting beams (446a and 446b) symmetrically distributed about the second axis Y. The first mass block 42a is connected to the third mass block 42c via a third connecting beam 446a. The third connecting beam 446a is used to associate the movement of the first mass block 42a with the movement of the third mass block 42c, specifically, to make the first mass block 42a and the third mass block 42c move in the same phase or in an opposite phase.

[0076] The second mass block 42b is connected to the fourth mass block 42d via a third connecting beam 446b, and the third connecting beam 446b is used to associate the movement of the second mass block 42b with the movement of the fourth mass block 42d, specifically, to make the second mass block 42b and the fourth mass block 42d move in the same phase or in opposite phases.

[0077] It can be understood that the third connecting beam (446a and 446b) has a bent structure. When the first mass block 42a and the third mass block 42c perform Coriolis motion in the same phase or in opposite phase, the third connecting beam 446 can connect the motion between the two mass blocks so that the motion of the two mass blocks can be better correlated.

[0078] See also Fig.16 , Fig.16The schematic diagram of the electrode arrangement in the three-axis micromechanical gyroscope provided by the present invention. Each of the first decoupling structures 4412 is provided with a plurality of driving electrodes 8 for use in conjunction therewith, and the driving electrodes 8 are arranged to extend radially along the mass block, and the plurality of driving electrodes 8 on the same first decoupling structure 4412 are symmetrical about the flip axis D of each mass block relative to the first decoupling structure 4412, wherein the driving electrode 8 for driving the first mass block 42a to swing is symmetrical about the second axis Y with the driving electrode 8 for driving the second mass block 42b to swing, and the driving electrode 8 for driving the third mass block 42c to swing is symmetrical about the second axis Y with the driving electrode 8 for driving the fourth mass block 42d to swing.

[0079] Exemplarily, two driving electrodes (8a and 8b) may be provided on a mass block, and the driving electrodes 8a and 8b are provided on the first decoupling structure 4412 and extend toward the mass block. It should be noted that the driving electrodes 8a and 8b may be provided on the side facing the mass block, or a receiving groove may be provided on the first decoupling structure 4412 to place the driving electrodes.

[0080] Alternatively, without considering the influence of the mass block movement on the driving, the driving electrode 8 may be arranged on the mass block instead of the driving electrode. The driving electrode 8 may be arranged on the side of the mass block away from the substrate 2 or on the side close to the substrate 2.

[0081] It can be understood that the driving electrodes 8a and 8b drive the first decoupling structure 4412 to swing, and the fourth connecting beam 4414 is used to connect the first decoupling structure 4412 and the anchor 462, so that the first decoupling structure 4412 swings around the anchor 462. The first decoupling structure 4412 drives the mass to move through the fifth connecting beam 4416.

[0082] Please continue reading Fig.16 , the detection unit 6 includes a plurality of X-axis detection units 61, a plurality of Y-axis detection units 62 and a plurality of Z-axis detection units 63, the X-axis detection unit 61 is used to detect the position change of the four mass blocks when the three-axis micro-mechanical gyroscope 100 receives the first axis X angular velocity, the Y-axis detection unit 62 is used to detect the position change of the four mass blocks when the three-axis micro-mechanical gyroscope 100 receives the second axis Y angular velocity, and the Z-axis detection unit 63 is used to detect the position change of the four mass blocks when the three-axis micro-mechanical gyroscope 100 receives the third axis Z angular velocity;

[0083] A Y-axis detection unit 62 and a Z-axis detection unit 63 are provided on each of the mass blocks. The X-axis detection unit 61 is located at the edge of the mass block away from the second axis Y, the Y-axis detection unit 62 is located at the edge of the mass block close to the second axis Y, and the Z-axis detection unit 63 is arranged on the side of the second decoupling structure 4441 close to the connecting rod 442.

[0084] Exemplarily, two X-axis detection units (61a and 61b) may be provided on each mass block, the X-axis detection unit 61 is located at the edge of the mass block away from the second axis Y, and the X-axis detection unit 61a and the X-axis detection unit 61b are symmetrically arranged about the first flip axis D1. Two Y-axis detection units (62a and 62b) may also be provided on each mass block, the Y-axis detection unit 62a and the Y-axis detection unit 62b are arranged at the edge close to the second axis Y, and the Y-axis detection unit 62a and the Y-axis detection unit 62b are symmetrically arranged about the first flip axis D1. Two Z-axis detection units (63a and 63b) may be provided on each second decoupling structure 4441, and the Z-axis detection unit 63a and the Z-axis detection unit 63b are symmetrically arranged about the first flip axis D1.

[0085] Optionally, the detection electrodes (such as 61a and 61b, 62a and 62b) constituting the detection unit can be arranged on a side of the mass block close to the substrate 2, or on a side of the mass block far from the substrate 2, or the detection electrodes can be arranged on both sides of the mass block close to the substrate 2 and far from the substrate 2. A receiving groove can also be provided in the mass block to receive the detection electrode, and the use of the receiving groove can reduce the required space and material of the three-axis micromechanical gyroscope 100. Furthermore, the mass block can also be made into a frame structure, and the detection electrode can be directly connected to the mass block in the frame structure.

[0086] The present invention provides an angular velocity measurement method, which is applied to a three-axis micro-mechanical gyroscope. The three-axis micro-mechanical gyroscope includes a substrate, a vibration part connected to the substrate and suspended on the substrate, a driving electrode connected to drive the vibration part, and a detection part connected to the vibration part. The vibration part includes a vibration component for receiving Coriolis force and generating position change. The vibration component includes four mass blocks. Fig.17 , Fig.17 The present invention provides a method for measuring angular velocity, the method comprising:

[0087] 501, using the driving electrode to drive the four masses to swing in a plane parallel to the substrate, wherein the first mass block and the second mass block swing concentrically and in anti-phase, the third mass block and the fourth mass block swing concentrically and in anti-phase, and the swing of the first mass block is in anti-phase with the swing of the third mass block; or the first mass block and the second mass block swing concentrically and in phase, the third mass block and the fourth mass block swing concentrically and in phase, and the swing of the first mass block is in anti-phase with the swing of the third mass block;

[0088] It should be noted that before use, the three-axis micro-mechanical gyroscope is in a stationary state, in which the first mass block and the second mass block are symmetrical about the second axis, the third mass block and the fourth mass block are symmetrical about the second axis, the first mass block and the third mass block are symmetrical about the third axis, and the second mass block and the fourth mass block are symmetrical about the third axis. This symmetrical structure is conducive to the differential detection of the angular velocity of each axis by the three-axis micro-mechanical gyroscope.

[0089] 502, receiving an angular velocity so that the four mass blocks are subjected to a Coriolis force and undergo position changes under the action of the Coriolis force;

[0090] 503, a detection unit detects position changes of four mass blocks in the direction of the Coriolis force, and converts the position changes into electrical signals for output;

[0091] 504, calculating an angular velocity according to the electrical signal.

[0092] Compared with the prior art, no matter what direction the angular velocity to be detected is, the angular velocity measurement method provided by the present invention can make all the mass blocks be affected by the Coriolis force and participate in the Coriolis motion. And because the position change caused by the Coriolis motion can be detected by the detection unit, the detection sensitivity of the four-mass gyroscope in the prior art is low because only two mass blocks are affected by the Coriolis force when detecting the angular velocity of certain axes, and the remaining two mass blocks are not affected by the Coriolis force, and do not perform Coriolis motion to produce position changes. Therefore, the angular velocity measurement method provided by the present invention can obtain a larger output electrical signal, thereby having a higher sensitivity.

[0093] It should be noted that when the micromechanical gyroscope is used and installed, the base needs to be kept parallel to the ground, so as to ensure that the direction and magnitude of the measured angular velocity are consistent with the user's daily cognitive habits.

[0094] It can be understood that when angular velocity inputs in two or three directions are received simultaneously, the four mass blocks will be subjected to Coriolis forces in multiple directions simultaneously and will undergo position changes under the action of the Coriolis forces.

[0095] The above description is only an implementation mode of the present invention. It should be pointed out that, for ordinary technicians in this field, improvements can be made without departing from the creative concept of the present invention, but these all belong to the protection scope of the present invention.

Claims

1. A three-axis micromechanical gyroscope, comprising a substrate, a vibration part connected to the substrate and suspended on the substrate, a driving electrode driving the vibration part, and a detection part connected to the vibration part, It is characterized in that The vibration part includes a vibration component for receiving Coriolis force and generating position change, the vibration component includes four mass blocks which are symmetrically distributed and connected to each other, the four mass blocks can swing in a plane parallel to the substrate under the drive of the driving electrode, and the swing center of each mass block is located outside the mass block; The four mass blocks include a first mass block, a second mass block, a third mass block and a fourth mass block. When the three-axis micromechanical gyroscope is stationary, the first mass block and the third mass block are symmetrical relative to the first axis, and the second mass block and the fourth mass block are symmetrical relative to the first axis; the first mass block and the second mass block are symmetrical relative to the second axis, and the third mass block and the fourth mass block are symmetrical relative to the second axis; the first axis is perpendicular to the second axis; when the four mass blocks are in a driving mode, the swing of one mass block is in phase with the swing of another mass block and in anti-phase with the swing of the other two mass blocks; wherein the first mass block and the second mass block swing concentrically and in anti-phase, the third mass block and the fourth mass block swing concentrically and in anti-phase, and the swing of the first mass block is in anti-phase with the swing of the third mass block; or, the first mass block and the second mass block swing concentrically and in phase, the third mass block and the fourth mass block swing concentrically and in phase, and the swing of the first mass block is in anti-phase with the swing of the third mass block; When the three-axis micromechanical gyroscope receives angular velocity, the swinging mass block is subjected to Coriolis force and produces corresponding position change. The detection unit is used to detect the position change of each mass block after being subjected to the Coriolis force, and convert the position change of each mass block into an electrical signal output.

2. The three-axis micromechanical gyroscope according to claim 1, Features: The driving electrode drives the first mass block and the second mass block to swing in anti-phase, and the driving electrode drives the third mass block and the fourth mass block to swing in anti-phase, wherein the swing of the first mass block is in anti-phase with the swing of the third mass block; when the three-axis micromechanical gyroscope receives an angular velocity in the direction of the first axis, the four mass blocks all flip around the second axis, the flip of the first mass block is in phase with the flip of the second mass block, the flip of the third mass block is in phase with the flip of the fourth mass block, and the flip of the first mass block is in anti-phase with the flip of the third mass block; when the three-axis micromechanical gyroscope receives an angular velocity in the direction of the second axis, the four mass blocks all flip around their respective The three-axis micromechanical gyroscope performs a flipping motion, the flipping axis passes through the swing center of the mass block and is parallel to the first axis, the flipping of the first mass block is in phase with the flipping of the second mass block, the flipping of the third mass block is in phase with the flipping of the fourth mass block, and the flipping of the first mass block is in phase with the flipping of the third mass block; when the three-axis micromechanical gyroscope receives an angular velocity in the direction of the third axis that is perpendicular to both the first axis and the second axis, the four mass blocks all move along the first axis direction, the movement of the first mass block is in phase with the movement of the second mass block, the movement of the third mass block is in phase with the movement of the fourth mass block, and the movement of the first mass block is in phase with the movement of the third mass block.

3. The three-axis micromechanical gyroscope according to claim 1, Features: The driving electrode drives the first mass block and the second mass block to swing in phase, and the driving electrode drives the third mass block and the fourth mass block to swing in phase, wherein the swing of the first mass block and the third mass block are in anti-phase; when the three-axis micromechanical gyroscope receives an angular velocity in the direction of the first axis, the four mass blocks all flip around the second axis, the flip of the first mass block is in anti-phase with the flip of the second mass block, the flip of the third mass block is in anti-phase with the flip of the fourth mass block, and the flip of the first mass block is in anti-phase with the flip of the third mass block; when the three-axis micromechanical gyroscope receives an angular velocity in the direction of the second axis, the four mass blocks all flip around their respective flip axes The three-axis micromechanical gyroscope performs a flipping motion, wherein the flipping axis passes through the swing center of the mass block and is parallel to the first axis, the flipping of the first mass block is in phase with the flipping of the second mass block, the flipping of the third mass block is in phase with the flipping of the fourth mass block, and the flipping of the first mass block is in anti-phase with the flipping of the third mass block; when the three-axis micromechanical gyroscope receives an angular velocity in the direction of a third axis that is perpendicular to both the first axis and the second axis, the four mass blocks all move along the direction of the first axis, the movement of the first mass block is in anti-phase with the movement of the second mass block, the movement of the third mass block is in anti-phase with the movement of the fourth mass block, and the movement of the first mass block is in anti-phase with the movement of the third mass block.

4. The three-axis micromechanical gyroscope according to claim 1, Features: The vibration part further comprises a fixing assembly for connecting the four mass blocks to the substrate, the fixing assembly comprising two anchors for connecting the four mass blocks to the substrate, the two anchors comprising a first anchor and a second anchor arranged along the second axis and symmetrically distributed about the first axis; The first mass block and the second mass block are both connected to the substrate via the first anchor, and the third mass block and the fourth mass block are both connected to the substrate via the second anchor; The first mass block and the second mass block both swing concentrically with the first anchor as the swing center, and the third mass block and the fourth mass block both swing concentrically with the second anchor as the swing center.

5. The three-axis micromechanical gyroscope according to claim 4, Features: The vibration part further includes a connection assembly for connecting the four mass blocks, the connection assembly includes an inner coupling member connecting each mass block and the corresponding anchor member, the inner coupling member includes a first decoupling structure, a fourth connection beam connecting the anchor member and the first decoupling structure, and a fifth connection beam connecting the first decoupling structure and the mass block; When the driving electrode drives the mass block to swing, the fourth connecting beam and the first decoupling structure swing around the anchor, and the first decoupling structure drives the mass block to swing around the anchor through the fifth connecting beam; when the three-axis micromechanical gyroscope receives the angular velocity in the direction of the first axis and the direction of the second axis, the fourth connecting beam and the first decoupling structure do not move with the mass block under the action of the Coriolis force; When the three-axis micromechanical gyroscope receives an angular velocity in a third axis direction that is perpendicular to both the first axis and the second axis, the fourth connecting beam and the first decoupling structure do not move with the mass block under the Coriolis force.

6. The three-axis micromechanical gyroscope according to claim 4, Features: The vibration part also includes a connecting component used for connecting the four mass blocks; The connecting assembly further comprises a first connecting rod and a second connecting rod symmetrically distributed about the second axis, the first connecting rod being arranged on a side of the first mass block and the third mass block away from the two anchors, the first connecting rod being used to connect the first mass block and the third mass block, the fixing assembly further comprises a first fulcrum located at a midpoint of the first connecting rod, the first fulcrum being used to connect the first connecting rod and the base; The second connecting rod is arranged on the side of the second mass block and the fourth mass block away from the two anchor members, and the second connecting rod is used to connect the second mass block and the fourth mass block. The fixing assembly also includes a second fulcrum located at the midpoint of the second connecting rod, and the second fulcrum is used to connect the second connecting rod and the base.

7. The three-axis micromechanical gyroscope according to claim 6, Features: The connection assembly further comprises four first connection beams and four outer coupling members for connecting the connecting rod and the mass block, each outer coupling member is connected to one first connection beam, each connecting rod is connected to two first connection beams, each mass block is connected to one first connection beam, and the first connection beam is located on the flip axis of each mass block; The first connecting beam comprises a fixed portion connected to the connecting rod, and an extending portion separated from the fixed portion and connected to the mass block, the outer coupling member comprises a second decoupling structure connected between the fixed portion and the extending portion, and a sixth connecting beam connecting an end of the second decoupling structure and the base; When the driving electrode drives the mass block to swing, the second decoupling structure, the fixing part, and the connecting rod do not swing with the mass block; when the three-axis micromechanical gyroscope receives angular velocities in the directions of the first axis and the second axis, the second decoupling structure, the fixing part, and the connecting rod do not move with the mass block under the action of the Coriolis force; When the three-axis micromechanical gyroscope receives an angular velocity in the direction of a third axis, the second decoupling structure, the fixing portion, and the connecting rod move in the direction of the first axis; the direction of the third axis is perpendicular to the first axis and the second axis.

8. The three-axis micromechanical gyroscope according to claim 5, Features: The driving electrodes are disposed on each of the first decoupling structures.

9. The three-axis micromechanical gyroscope according to claim 7, Features: The detection part includes a plurality of Z-axis detection units, which are used to detect the position changes of the four mass blocks when the three-axis micromechanical gyroscope receives an angular velocity of a third axis that is perpendicular to both the first axis and the second axis; the Z-axis detection unit is arranged on the second decoupling structure.

10. A method for measuring angular velocity, applied to a three-axis micromechanical gyroscope, comprising a substrate, a vibrating portion connected to the substrate and suspended on the substrate, a driving electrode connected to drive the vibrating portion, and a detecting portion connected to the vibrating portion, wherein the vibrating portion comprises a vibrating component for receiving Coriolis force and generating position change, and the vibrating component comprises four mass blocks, Features: The driving electrodes are used to drive the four mass blocks to swing in a plane parallel to the substrate. When the four mass blocks are in a driving mode, the swing of one mass block is in phase with the swing of another mass block and in anti-phase with the swing of the other two mass blocks; wherein the first mass block swings concentrically with the second mass block and in anti-phase, the third mass block swings concentrically with the fourth mass block and in anti-phase, and the swing of the first mass block is in anti-phase with the swing of the third mass block; or the first mass block swings concentrically with the second mass block and in phase, the third mass block swings concentrically with the fourth mass block and in phase, and the swing of the first mass block is in anti-phase with the swing of the third mass block; Receiving angular velocity so that the four mass blocks are subjected to Coriolis force and produce position changes under the action of the Coriolis force; The detection unit detects the position change of the four mass blocks in the direction of the Coriolis force and converts the position change into an electrical signal output; The angular velocity is calculated based on the electrical signal.

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