Air purification device and air purification method
By using a discharge plasma generation device and liquid injection technology in the air purification device, the problems of filter performance degradation and difficult dust collecting plate maintenance are solved, and efficient removal of particulate matter and pollutants in the air is achieved, reducing maintenance frequency.
Patent Information
- Application Number
- CN202110122689.5
- Authority / Receiving Office
- CN · China
- Patent Type
- Patents(China)
- Current Assignee / Owner
- Priority Date
- 2021-01-21
- Filing Date
- 2021-01-28
- Publication Date
- 2025-09-30
- Estimated Expiration
- 2041-01-28
AI Technical Summary
Existing air purification devices have problems with filter performance degradation and difficulty in maintaining dust collecting plates when capturing particulate matter and pollutants, making it difficult to efficiently remove particulate matter and pollutants from the air.
Using a discharge plasma generation device and liquid injection technology, discharge plasma is generated in a reactor, and dielectric particles and liquids are used to capture particulate matter and pollutants. Combined with alkaline aqueous solution treatment, efficient purification is achieved.
The removal performance of particulate matter and pollutants is improved, the burden of regular management and maintenance of the reactor is reduced, and the efficient capture and discharge of particulate matter and pollutants is achieved.
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Figure CN113251551B_ABST
Abstract
Description
Technical Field
[0001] The invention discloses an air purification device and an air purification method for purifying particulate matter and pollutants in the air. Background Art
[0002] Air purification devices capture or decompose gases (e.g., particulate matter and pollutants in the air) to purify the air. Air purification devices can be used in industrial dust collection facilities, building air conditioning / ventilation systems, etc.
[0003] Representative methods for removing particulate matter and pollutants from the air include filtration and electrostatic precipitation. Filtration is a method of capturing particulate matter and pollutants contained in the air through a filter. Filtration has excellent efficiency in removing particulate matter and pollutants, and can filter various forms of particulate matter and pollutants from the air. However, if the amount of captured particulate matter increases, the performance of the filter will decrease, and the pressure drop caused by the filter will increase. The filter can be maintained or replaced regularly. In addition, the electrostatic precipitation method purifies the air by using the principle of discharge to ionize pollutants in the air and adsorb them onto a strong dust collecting plate. However, there is the difficulty of regularly washing and managing the dust collecting plate made of metal. Summary of the Invention
[0004] [Problem to be solved]
[0005] The present invention provides an air purification device and an air purification method which can remove particulate matter and pollutants by discharge plasma and solution spraying.
[0006] The present invention provides an air purification device and an air purification method with improved performance in removing particulate matter and pollutants.
[0007]
Methods to solve the problem
[0008] According to one aspect, an air purification device may include: a reactor formed into a hollow shape extending in one direction; a discharge plasma generating device including a first electrode arranged on the outer wall of the reactor and a second electrode arranged inside the reactor, and generating a discharge plasma in a predetermined discharge area; a plurality of dielectric particles arranged in a packed bed of the reactor; a liquid supply unit for supplying liquid to the interior of the reactor; and a liquid recovery unit for recovering the liquid discharged from the reactor.
[0009] The liquid may include water.
[0010] The liquid may include an alkaline aqueous solution.
[0011] The alkalinity (pH) of the alkaline aqueous solution may be determined according to the ozone concentration inside the reactor.
[0012] The liquid may be a sodium hydroxide aqueous solution having a molar concentration of 1 mmol / L to 20 mmol / L.
[0013] The liquid recovery unit may further include a pump configured to generate pressure for transferring the liquid stored in the liquid recovery unit to the liquid supply unit.
[0014] The porosity of the filling layer may be greater than 0% and less than 90%.
[0015] The average particle size of the plurality of dielectric particles may be 1 mm to 20 mm.
[0016] The plurality of dielectric particles may include at least one of silicon oxide, boron oxide, aluminum oxide, manganese oxide, titanium oxide, barium oxide, copper oxide, magnesium oxide, zinc oxide, zirconium oxide, yttrium oxide, calcium oxide, nickel oxide, and iron oxide, or at least one of a mixture thereof.
[0017] A voltage of 2 kV to 500 kV can be applied in the discharge region.
[0018] It may also include: a high voltage generating device for applying a high voltage to the interior of the reactor; and a control unit for controlling the generated voltage of the high voltage generating device, wherein the control unit can transmit a control signal to the high voltage generating device, and the control signal increases the magnitude of the voltage generated in the high voltage generating device as the amount of polluted air introduced into the reactor increases.
[0019] The first electrode may be provided as a silver paste film.
[0020] The second electrode may extend along the one direction and be configured to be spaced apart from the first electrode by a predetermined distance.
[0021] The reactor may be configured as any one of metal, ceramic, or glass conduits extending along the one direction.
[0022] According to another aspect, the air purification method may include the following steps: introducing liquid into the interior of the reactor; applying a predetermined voltage to the first electrode and the second electrode to generate a discharge plasma; introducing the contaminated air into the interior of the reactor; and discharging the liquid and the purified air from the reactor.
[0023] The method may further include supplying the liquid discharged from the reactor to the liquid supply unit.
[0024] The liquid may include water.
[0025] The liquid may include an alkaline aqueous solution.
[0026] In order to generate the discharge plasma, a voltage of 2 kV to 500 kV may be applied.
[0027] The method may further include the step of removing ozone by using a catalyst at the rear end of the reactor.
[0028] The catalyst may include at least one of manganese oxide, copper oxide, aluminum oxide, titanium oxide, or a mixture thereof.
[0029]
Technical Effect
[0030] According to the embodiments of the air purification device and air purification method described above, particulate matter and pollutants are ionized or decomposed by the discharge plasma and, after being captured in the liquid passing through the reactor, can be easily discharged from the reactor. Therefore, particulate matter and pollutants in the air are more easily captured in the liquid and discharged to the outside, thereby achieving excellent pollutant removal performance. In addition, the liquid that captures particulate matter and pollutants is more easily discharged from the reactor, thereby reducing the burden of regular management or replacement of the reactor. BRIEF DESCRIPTION OF THE DRAWINGS
[0031] Figure 1 This is a general structural diagram of an embodiment of an air purification device.
[0032] Figure 2 yes Figure 1 An enlarged cross-sectional view of a portion of the illustrated air cleaning device.
[0033] Figure 3A and Figure 3B yes Figure 2 An enlarged overview of the M region is shown.
[0034] Figure 4 is a graph showing the relationship between plasma voltage and water-soluble organic compounds (VOCs) according to one embodiment. sol ) of the removal efficiency.
[0035] Figure 5A The plasma voltage and the non-water-soluble organic compound (VOC) according to an embodiment and a comparative example are shown. insol ) of the removal efficiency.
[0036] Figure 5B is a graph illustrating plasma voltage and particulate matter (PM) removal efficiency according to one embodiment.
[0037] Figure 6 is a graph illustrating the relationship between plasma voltage and ozone (O 3 ) concentration according to an embodiment and a comparative example.
[0038] 7A to 7D Graphs showing changes in toluene concentration and ozone concentration according to experimental examples.
[0039] Figures 8A to 8B Graphs showing changes in toluene concentration and ozone concentration according to experimental examples.
[0040] Figure 9 is a flow chart of an air purification method according to an embodiment. DETAILED DESCRIPTION
[0041] Hereinafter, embodiments of the present invention will be described in detail with reference to the accompanying drawings. In the following drawings, the same reference numerals refer to the same components, and for clarity and convenience of description, the size of each component in the drawings may be exaggerated.
[0042] Figure 1 This is a general structural diagram of an embodiment of an air purification device. Figure 2 yes Figure 1 An enlarged cross-sectional view of a portion of the illustrated air cleaning device.
[0043] refer to Figure 1 and Figure 2 According to an example, an air purification device 1 may include: a reactor 10 formed in a hollow shape extending in one direction; a discharge plasma generating device 20 for generating discharge plasma inside the reactor 10; a plurality of dielectric particles 30 arranged in a packed-bed of the reactor 10; a liquid supply unit 40 for supplying liquid to the interior of the reactor 10; a liquid recovery unit 50 for recovering liquid discharged from the reactor 10; a pump 60 for generating pressure for transferring the liquid stored in the liquid recovery unit 50 to the liquid supply unit 40; and a control unit 90.
[0044] The polluted air (Air1) in this manual refers to the air containing particulate matter (PM), water-soluble organic compounds (VOC sol ) and non-water-soluble organic compounds (VOC insol ) in a mixed gas of at least one of the following. As an example, particulate matter (PM) may include fine particulate matter smaller than 10 μm and ultrafine particulate matter smaller than 25 μm. In addition, water-soluble organic compounds (VOCs) sol ) As volatile organic compounds, they can include gaseous substances that can be captured in water or aqueous solutions and can be removed (for example, ammonia (NH3), acetaldehyde (CH3CHO), acetic acid (CH3COOH), ozone (O3), etc.). In addition, water-insoluble organic compounds (VOC insol) as volatile organic compounds that are not captured by water or aqueous solutions, for example, may include benzene (C6H6), formaldehyde (CH2O), toluene (C6H5CH3), etc. However, the present disclosure is not limited thereto, and any gas that is decomposed and ionized by the discharge plasma and can be discharged to the outside of the reactor may also be included in the contaminated air (Air1).
[0045] Reactor 10 forms a flow path for contaminated air (Air1) and liquid. Furthermore, a filling layer 11 is provided inside reactor 10, and a plurality of dielectric particles 30 are arranged in filling layer 11. As an example, filling layer 11 may be a discharge region where discharge plasma is generated using discharge plasma generating device 20. However, the present disclosure is not limited thereto, and other regions including filling layer 11 may also serve as discharge regions.
[0046] According to an example, the reactor 10 extends in one direction and may have a hollow shape through which polluted air (Air1) and liquid can flow. However, the shape of the reactor 10 is not particularly limited. For example, the cross-sectional shape of the reactor 10 may be circular, polygonal, or the like. The cross-sectional shape of the reactor 10 of this embodiment is circular. As an embodiment, the reactor 10 may be configured as a glass conduit or an aluminum conduit extending in one direction. However, the present disclosure is not limited thereto, and any hollow conduit that can generate discharge plasma may be used as the reactor 10.
[0047] According to one example, contaminated air (Air1) is supplied to reactor 10 from a blower (not shown) through contaminated air inlet 70. Contaminated air (Air1) moves along an air flow path formed by reactor 10 and is discharged through clean air outlet 80. Furthermore, liquid supplied from liquid supply unit 40, described later, flows into reactor 10 through first end 12, and liquid stored in liquid recovery unit 50 can be discharged through second end 13.
[0048] The discharge plasma generating device 20 may include a first electrode 21 disposed on the outer wall of the reactor 10, a second electrode 22 disposed inside the reactor 10, and a high voltage generating device 23. According to one example, the first electrode 21 serves as a ground electrode, and the discharge region where the discharge plasma can be generated may be surrounded by the first electrode 21. For example, if the reactor 10 is a conductor, the first electrode 21 may be integrated with the reactor 10. If the reactor 10 is a non-conductor, the first electrode 21 may be configured as a silver paste film and thus be disposed so as to surround the outer wall of the reactor 10.
[0049] The second electrode 22 is a power electrode and is disposed a predetermined distance from the first electrode 21 in a discharge region where discharge plasma can be generated. For example, the second electrode 22 is configured as a steel wire extending in one direction and can be disposed inside the reactor 10.
[0050] Furthermore, the high-voltage generator 23 can apply a high voltage to the discharge region where discharge plasma can be generated. According to one example, the high-voltage generator 23 can include a sinusoidal AC power supply and a transformer. The high-voltage generator 23 can continuously apply a high voltage to the interior of the reactor 10, for example, to the discharge region where discharge plasma can be generated, via the power system. As an example, the voltage applied to the discharge region can be 2 kV to 500 kV, and the frequency can be 10 Hz to 1000 Hz, but the present disclosure is not limited thereto. Furthermore, the distance between the first electrode 21 and the second electrode 22 in the discharge region can be 10 mm to 100 mm, thereby enabling an electric field of 2 kV / cm to 5 kV / cm to be applied to the discharge region.
[0051] A plurality of dielectric particles 30 may be disposed on the filling layer 11 within the reactor 10. According to one example, the plurality of dielectric particles 30 are polarized to attract ionized contaminants. For example, the plurality of dielectric particles 30 may include a graded dielectric in the discharge region generated by the discharge plasma generating device 20. As an example, the plurality of dielectric particles 30 may include a metal oxide or a metal nitride, such as at least one of silicon oxide, boron oxide, aluminum oxide, manganese oxide, titanium oxide, barium oxide, copper oxide, magnesium oxide, zinc oxide, zirconium oxide, yttrium oxide, calcium oxide, nickel oxide, and iron oxide, or at least one of a mixture thereof.
[0052] Furthermore, as an example, the plurality of dielectric particles 30 may form predetermined pores, thereby adjusting the residence time of the polluted air (Air 1) in the reactor 10. For example, the plurality of dielectric particles 30 may have a bead shape with a predetermined particle size, such as an average diameter of 1 mm to 20 mm. However, the present disclosure is not limited thereto, and the dielectric particles 30 may have any other ternary shape, such as a right hexahedron.
[0053] A plurality of dielectric particles 30 may be arranged in the filling layer 11. The filling layer 11 in which the plurality of dielectric particles 30 are arranged may have a porosity of 0% to 90%, for example, 30% to 60%. For example, to adjust the residence time of contaminated air (Air 1) and liquid in the reactor 10, the porosity of the filling layer 11 may be adjusted by adjusting the diameter of the plurality of dielectric particles 30 arranged in the filling layer 11. For example, to increase the residence time of contaminated air (Air 1) and liquid in the reactor 10, it is necessary to reduce the porosity of the filling layer 11. In this case, the porosity of the filling layer 11 can be reduced by reducing the average diameter of the plurality of dielectric particles 30.
[0054] In addition, according to an example, a water film 31 surrounded by liquid is formed on each surface of the plurality of dielectric particles 30 (see FIG. Figure 3A ), thereby capturing the contaminated air (Air1). The liquid supplied by the liquid supply unit 40, described later, moves downward in the direction of gravity (G). At this time, the downwardly moving liquid can come into contact with each of the plurality of dielectric particles 30. Through the contact between the downwardly moving liquid and the plurality of dielectric particles 30, a water film 31 can be formed on each surface of the plurality of dielectric particles 30. The contaminated air (Air1) disposed adjacent to the water film 31 can be captured by the water film 31 and discharged to the outside of the reactor 10 along with the liquid.
[0055] The liquid supply unit 40 stores a liquid and can supply the stored liquid to the interior of the reactor 10. As an example, the liquid supply unit 40 may include at least one spray nozzle 42 for spraying the liquid stored in the liquid supply unit 40 into the interior of the reactor 10. The liquid stored in the liquid supply unit 40 can be any fluid that captures the polluted air (Air1) and discharges it to the outside of the reactor 10. For example, the liquid can be water or an alkaline aqueous solution.
[0056] As an example, the water stored in the liquid supply unit 40 can be sprayed into the interior of the reactor 10 in the form of droplets through the spray nozzle 42. In this process, the liquid adheres to the surfaces of the plurality of dielectric particles 30 to form a water film 31. A portion of the polluted air (Air1) is attracted to each of the plurality of dielectric particles 30 and is thereby captured on the water film 31. In addition, the flow direction of the polluted air (Air1) can be formed into a curved shape by the plurality of dielectric particles 30. Accordingly, the increase in the contact area between the water film 31 formed on each surface of the plurality of dielectric particles 30 and the polluted air (Air1) makes it easier for the polluted air (Air1) to be captured on the water film 31. A gas-liquid mixed fluid in which the polluted air (Air1) and the liquid are mixed is formed inside the reactor 10. The gas-liquid mixed fluid flows toward the second end 13 of the reactor 10 and is thereby discharged to the outside of the reactor 10.
[0057] As an example, ozone (O3) can be generated from oxygen (O2) in the air by the discharge plasma generating device 20. In the case where ozone (O3) is generated inside the reactor 10 and the concentration of ozone (O3) increases, an alkaline aqueous solution can be stored in the liquid supply unit 40 to prevent it. As an example, the alkaline aqueous solution can be a sodium hydroxide (NaOH) aqueous solution with a molar concentration of 2 mmol / L to 20 mmol / L. The alkaline strength (pH) of the alkaline aqueous solution can also be determined according to the concentration of ozone (O3) inside the reactor 10. For example, when the concentration of ozone (O3) inside the reactor 10 increases, the alkaline strength (pH) of the alkaline aqueous solution can be increased proportionally.
[0058] The liquid recovery unit 50 stores the liquid discharged to the outside of the reactor 10 and can resupply the stored liquid to the liquid supply unit 40. As an example, the liquid recovery unit 50 stores the mixed discharge of the enterprise discharged to the outside of the reactor 10. In this case, the liquid recovery unit 50 can purify the mixed discharge of the enterprise using a predetermined purification device (not shown). The purified liquid is resupplied to the liquid supply unit 40 via the pump 60 and can be reused.
[0059] The control unit 90 can, for example, control at least one other component connected to the control unit 90 (e.g., a hardware or software component) by executing software (e.g., a program), and can perform various data processing or calculations. According to one embodiment, the control unit 90 can control the magnitude of the voltage generated by the high-voltage generator 23 by generating a control signal for the high-voltage generator 23. For example, if the amount of polluted air (Air1) introduced into the reactor 10 increases or the concentration of pollutants increases, the control unit 90 can transmit a control signal to the high-voltage generator 23 to increase the magnitude of the voltage generated by the high-voltage generator 23. Consequently, even if the amount of polluted air (Air1) introduced increases, the purification efficiency of the polluted air (Air1) can be maintained or improved.
[0060] The catalytic reactor 95 is disposed at the rear end of the reactor 10, and can remove ozone exhausted from the reactor 10 through a catalyst. As an example, the catalyst included in the catalytic reactor 95 may include a metal oxide or a metal nitride, such as at least one of manganese oxide, copper oxide, aluminum oxide, titanium oxide, or at least one of a mixture thereof.
[0061] As described above, the air purification device 1 can purify the polluted air (Air1) by simultaneously applying the decomposition by discharge plasma and the capture by liquid. sol ), non-water-soluble organic compounds (VOC insol ) and ozone (03) and describes in more detail the purification of polluted air (Air1) using discharge plasma and liquid.
[0062] Figure 3A and Figure 3B yes Figure 2 An enlarged overview of the M region is shown.
[0063] refer to Figure 3A According to one embodiment, when a high voltage is applied to the filling layer 11 using the discharge plasma generating apparatus 20, electrons (e) are generated in the second electrode 22 itself, which is disposed within the reactor 10, or in the gas surrounding the second electrode 22. Thus, a discharge plasma is formed around the second electrode 22. The electrons (e) generated around the second electrode 22 are attracted by electrical attraction toward the oppositely charged second electrode 22. Conversely, the ions separated from the electrons charge the surrounding particulate matter (PM), giving the PM a positive (+) charge.
[0064] As an example, when a high voltage is applied to the filling layer 11 by the plasma generating device 20, an electric field is applied between the first electrode 21 and the second electrode 22. At this time, the plurality of dielectric particles 30 arranged in the electric field may be polarized. As an example, Figure 3A As described above, the dielectric particles 30 disposed opposite the second electrode 22 have a negative (-) charge. As described above, particulate matter (PM) with a positive (+) charge from the plasma moves toward the plurality of dielectric particles 30 with an opposite charge due to electrical attraction. At this point, a water film 31 based on the liquid forms on each surface of the plurality of dielectric particles 30, capturing the positive (+) charged particulate matter (PM) on the water film 31. The liquid forming the water film 31 moves in the direction of gravity (G) and is discharged outside the reactor 10. Thus, the captured particulate matter (PM) can also be discharged outside the reactor 10 along with the liquid.
[0065] As described above, by filling the filling layer 11 with a plurality of dielectric particles 30 and spraying liquid, a water film 31 can be formed on each surface of the plurality of dielectric particles 30. This increases the contact area between the liquid forming the water film 31 and the particulate matter (PM), thereby improving the capture rate of particulate matter (PM). Furthermore, by using the plasma generating device 20 to convert the particulate matter (PM) to a specific charge state and the plurality of dielectric particles 30 to an opposite charge state, an attractive force can be generated between the plurality of dielectric particles 30 and the particulate matter (PM). Consequently, the water film 31 formed on each of the plurality of dielectric particles 30 can improve the capture rate of particulate matter (PM).
[0066] According to an example, the air purification device 1 can remove not only particulate matter (PM) but also water-soluble organic compounds (VOCs) by using liquid sprayed into the interior of the plasma generating device 20 and the reactor 10. sol ) and non-water-soluble organic compounds (VOC insol ).
[0067] refer to Figure 3B According to one embodiment, water-soluble organic compounds (VOC sol ) is to dissolve water-soluble organic compounds (VOCs) in the liquid supplied to the interior of the reactor 10. sol ) and discharged together with the liquid. However, according to the water-soluble organic compounds (VOC sol ) is introduced at a flow rate, and water-soluble organic compounds (VOC sol ) may remain for a relatively short time. At this time, water-soluble organic compounds (VOC sol ) is not in sufficient contact with the liquid, water-soluble organic compounds (VOC sol ) may not be adequately cleared.
[0068] To supplement the above preliminary method, the water-soluble organic compounds (VOCs) can be directly treated by using the plasma generating device 20. sol According to one embodiment, by using the discharge plasma generating device 20 to apply a high voltage to the filling layer 11, the water-soluble organic compounds (VOC) can be decomposed by using OH radicals (OH·). sol ) is decomposed. As an example, when a high voltage is applied to the filling layer 11 using the discharge plasma generating device 20, oxygen (O2) and water molecules (H2O) in the air around the second electrode 22 arranged inside the reactor 10 are broken and become a neutral gas ion state (plasma state), and OH radicals (OH·) can be generated from these ions. As an example, water-soluble organic compounds (VOC sol) can be decomposed into carbon dioxide (CO2) and water (H2O) as shown in the following chemical reaction formulas 1 to 3.
[0069] Chemical reaction formula 1
[0070] CH3COOH+4OH+O2→2CO2+4H2O
[0071] Chemical reaction formula 2
[0072] CH3CHO+6OH+O2→2CO2+5H2O
[0073] Chemical reaction formula 3
[0074] CH4+4OH+O2→CO2+4H2O
[0075] Carbon dioxide (CO2) and water (H2O) as decomposition products can be discharged to the outside of the reactor 10 together with the liquid. As described above, by using the liquid to dissolve water-soluble organic compounds (VOC sol ) and the secondary method using the plasma generating device 20 can improve the water-soluble organic compounds (VOC sol ) removal efficiency.
[0076] VOCs insol ) cannot be decomposed by the liquid supplied to the reactor 10, such as water or alkaline aqueous solution. Therefore, it is not possible to use the liquid to dissolve the non-water-soluble organic compounds (VOC insol ) and clearing method.
[0077] According to one example, the plasma generating device 20 can be used to directly treat the non-water-soluble organic compounds (VOC insol According to one embodiment, by using the discharge plasma generating device 20 to apply a high voltage to the filling layer 11, the non-water-soluble organic compounds (VOC) can be decomposed by using OH radicals (OH·). insol ) is decomposed. As an example, by applying a high voltage to the packed layer 11 using the discharge plasma generating device 20, oxygen (O2) and water molecules (H2O) in the air surrounding the second electrode 22 disposed within the reactor 10 are broken down into a neutral gas ion state (plasma state), and OH radicals (OH·) can be generated from these ions. As an example, water-soluble organic toluene (C6H5CH3) can be decomposed into carbon dioxide (CO2) and water (H2O) by OH radicals (OH·).
[0078] Carbon dioxide (CO2) and water (H2O) as decomposition products can be discharged to the outside of the reactor 10 together with the liquid. As described above, by using the decomposition method of the plasma generating device 20, the non-water-soluble organic compounds (VOCs) can be improved in the air purification device 1 according to an example. insol ) removal efficiency.
[0079] Figure 4 is a graph showing the relationship between plasma voltage and water-soluble organic compounds (VOCs) according to one embodiment. sol ) of the removal efficiency.
[0080] Experimental Example 1
[0081] At atmospheric pressure and a temperature close to room temperature, the air purification device 1 is used to remove water-soluble organic compounds (VOC sol )’s reaction.
[0082] As water-soluble compounds (VOC sol ) of ammonia (NH3), acetaldehyde (CH3CH O ), acetic acid (CH3COOH) and a mixture (NH3:CH3CHO:CH3COOH=1:1:1) of 4 L / min. A quartz tube with an inner diameter of 20 mm and a thickness of 2 mm is used as the dielectric barrier of the reactor 10. A stainless steel rod with a diameter of 2 mm is used as the second electrode 22 (power electrode), and a silver paste film is used as the first electrode 21 (ground electrode). In the reactor 10, a discharge area with a length of 280 mm is surrounded by a ground electrode. The discharge gap between the inner surface of the quartz tube and the high voltage electrode serving as the second electrode 22 is 9 mm. At this time, the volume of the plasma discharge area is fixed at 80.865 cm 3 . A plurality of dielectric particles 30 are completely filled in the filling layer 11 provided in the plasma discharge region. At this time, the plurality of dielectric particles 30 are spherical glass particles with a diameter of 6 mm, and the porosity of the filling layer 11 is 58%. Water (H20) is used as the liquid supplied to the interior of the reactor 10 and is sprayed at a volume flow rate of 100 mL / min. A sinusoidal AC power supply device is connected to the transformer, and a high voltage is continuously applied to the plasma discharge region through this power system. The voltage applied to the plasma discharge region is changed to 0 kV-35 kV, at which time the electric field is changed to 0 kV / cm-38.89 kV / cm. The residual rates of ammonia (NH3), acetaldehyde (CH3CHO), and acetic acid (CH3COOH) are measured at the purified air exhaust port 80.
[0083] refer to Figure 4, it can be confirmed that all ammonia (NH3) has been removed in the first area (Area1) in the plasma discharge area where a voltage of 5kV or less is applied. That is, ammonia (NH3) is removed to the liquid recovery part 50 by the water (H2O) supplied to the inside of the reactor 10. In addition, it can be confirmed that acetaldehyde (CH3CHO) and acetic acid (CH3COOH) have been removed by more than 80% in the first area (Area1) in the plasma discharge area where a voltage of 5kV or less is applied. It can be confirmed that other residues in acetaldehyde (CH3CHO) and acetic acid (CH3COOH) have been decomposed into carbon dioxide (CO2) and water (H2O) and removed in the second area (Area2) where a voltage of 25kV or more is applied. Therefore, it can be confirmed that most of the water-soluble organic compounds (VOCs) sol ) is captured by the liquid and initially removed. The remaining water-soluble organic compounds (VOC sol ) are decomposed and removed by the high voltage applied to the plasma discharge region.
[0084] When the ratio of ammonia (NH3) with high solubility in liquid is high, it is necessary to increase the water-soluble organic compounds (VOC sol ) Retention time inside the reactor 10. To this end, the average diameter of the plurality of dielectric particles 30 may be reduced, so that the porosity inside the filling layer 11 is reduced.
[0085] On the contrary, when the ratio of acetaldehyde (CH3CHO) and acetic acid (CH3COOH) which have relatively low solubility in liquid is high, the concentration of water-soluble organic compounds (VOCs) can be increased by increasing the voltage applied to the plasma generation region. sol For example, the control unit 90 can generate a control signal for the high voltage generator 23 to increase the voltage generated in the high voltage generator 23 to improve the removal efficiency of water-soluble organic compounds (VOCs). sol ) removal efficiency.
[0086] Figure 5A The plasma voltage and the non-water-soluble organic compound (VOC) according to an embodiment and a comparative example are shown. insol ) of the removal efficiency.
[0087] [Experimental Example 2-1 to Experimental Example 2-3]
[0088] The experimental method is the same as that of Experimental Example 1 except for the type and volume flow rate of the polluted air and the volume flow rate of the liquid supplied to the reactor 10 .
[0089] In Experimental Example 2-1, the water-insoluble organic compound (VOC insol) was 22 ppm of toluene (C6H5CH3), and the volume flow rate of the contaminated air including toluene (C6H5CH3) was 4 L / min. No liquid flowed into the reactor 10.
[0090] In Experimental Example 2-2, the water-insoluble organic compound (VOC insol ) is 22 ppm of toluene (C6H5CH3), and the volume flow rate of the contaminated air including toluene (C6H5CH3) is 4 L / min. The liquid flowing into the reactor 10 is water (H2O), and the volume flow rate is 100 mL / min.
[0091] In Experimental Example 2-3, the water-insoluble organic compound (VOC insol ) is 22 ppm of toluene (C6H5CH3), and the volume flow rate of the contaminated air including toluene (C6H5CH3) is 4 L / min. The liquid flowing into the reactor 10 is water (H2O), and the volume flow rate is 200 mL / min.
[0092] [Experimental Example 3-1 to Experimental Example 3-3]
[0093] The experimental method is the same as that of Experimental Example 1 except for the type and volume flow rate of the polluted air and the volume flow rate of the liquid supplied to the reactor 10 .
[0094] In Experimental Example 3-1, the water-insoluble organic compound (VOC insol ) was 22 ppm of toluene (C6H5CH3), and the volume flow rate of the contaminated air including toluene (C6H5CH3) was 10 L / min. No liquid flowed into the reactor 10.
[0095] In Experimental Example 3-2, the water-insoluble organic compound (VOC insol ) is 22 ppm of toluene (C6H5CH3), and the volume flow rate of the contaminated air including toluene (C6H5CH3) is 10 L / min. The liquid flowing into the reactor 10 is water (H2O), and the volume flow rate is 100 mL / min.
[0096] In Experimental Example 3-3, the water-insoluble organic compound (VOC insol ) is 22 ppm of toluene (C6H5CH3), and the volume flow rate of the contaminated air including toluene (C6H5CH3) is 10 L / min. The liquid flowing into the reactor 10 is water (H2O), and the volume flow rate is 200 mL / min.
[0097] refer to Figure 5AIn Experimental Examples 2-1 and 2-3, it was confirmed that the removal rate of toluene (C6H5CH3) increased as the voltage in the plasma discharge region increased to 25 kV. However, regardless of the volume flow rate of water (H2O) supplied to the reactor 10, toluene (C6H5CH3) was removed as the voltage applied to the plasma discharge region increased. Therefore, it was confirmed that the water-insoluble organic compounds (VOC insol ) remains irrelevant to the flow rate of the liquid supplied to the reactor 10.
[0098] Furthermore, in Experimental Examples 3-1 and 3-3, it was confirmed that the removal rate of toluene (C6H5CH3) increased as the voltage in the plasma discharge region increased to 25 kV. However, compared with Experimental Examples 2-1 and 2-3, the residual time of toluene (C6H5CH3) within the reactor 10 was shortened as the volume flow rate of the contaminated air containing toluene (C6H5CH3) increased. Consequently, even when the voltage in the plasma discharge region was increased to 30 kV, it was confirmed that only approximately 60% of the toluene (C6H5CH3) was removed.
[0099] As described above, in the case where the residence time of toluene (C6H5CH3) inside the reactor 10 is shortened as the volume flow rate of the polluted air including toluene (C6H5CH3) increases, in order to completely remove the toluene (C6H5CH3), it is necessary to increase the residence time of the toluene (C6H5CH3) inside the reactor 10. For example, by reducing the volume flow rate of toluene (C6H5CH3) supplied to the reactor 10, or reducing the porosity inside the filling layer 11, the residence time of the toluene (C6H5CH3) inside the reactor 10 can be increased. In the above embodiment, the embodiment of the invention describes the removal of the polluted air including the particulate matter (PM), the water-soluble organic compound (VOC), and the like. sol ) or non-water-soluble organic compounds (VOC insol ) of polluted air (Air1), but according to an example, the air purification device 1 can also purify the polluted air including particulate matter (PM), water-soluble organic compounds (VOC sol ) or non-water-soluble organic compounds (VOC insol ) contains two or more polluted air (Air1).
[0100] Figure 5B is a graph illustrating plasma voltage and particulate matter (PM) removal efficiency according to one embodiment.
[0101] [Experimental Example 4-1 to Experimental Example 4-3]
[0102] At atmospheric pressure and a temperature close to room temperature, an air purifier 1 is used to remove particulate matter (PM) and non-water-soluble organic compounds (VOCs). insol)’s reaction.
[0103] VOCs insol ) is 22 ppm of toluene (C6H5CH3), and the volume flow rate of the mixture of polluted air including toluene (C6H5CH3) and particulate matter (PM) is 10 L / min. A quartz tube with an inner diameter of 20 mm and a thickness of 2 mm is used as the dielectric barrier of the reactor 10. A stainless steel rod with a diameter of 2 mm is used as the second electrode 22 (power electrode), and a silver paste film is used as the first electrode 21 (ground electrode). In the reactor 10, a discharge area with a length of 260 mm is surrounded by the ground electrode. The discharge gap between the inner surface of the glass tube and the high voltage electrode serving as the second electrode 22 is 9 mm. At this time, the volume of the plasma discharge area is fixed at 80.865 cm 3 The filling layer 11 provided in the plasma discharge region was completely filled with a plurality of dielectric particles 30. At this time, the plurality of dielectric particles 30 were spherical glass particles with a diameter of 2 mm, and the porosity of the filling layer 11 was 53%. The liquid supplied to the interior of the reactor 10 was a sodium hydroxide (NaOH) aqueous solution with a concentration of 2.5 mmol / L and a pH of 11, which was sprayed at a volume flow rate of 75 mL / min. A DC pulse power supply was connected to the reactor, and a high voltage was continuously applied to the plasma discharge region via this power system.
[0104] refer to Figure 5B In Experimental Example 4-1, the voltage applied to the plasma discharge region was 18 kV, and the frequency was 840 Hz. In Experimental Example 4-2, the voltage applied to the plasma discharge region was 20 kV, and the frequency was 840 Hz. In Experimental Example 4-3, the voltage applied to the plasma discharge region was 22 kV, and the frequency was 840 Hz. For Experimental Examples 4-1 to 4-3, the residual rates of particulate matter (PM) and toluene (C6H5CH3) and the generated concentration of ozone (O3) were measured at the purified air outlet 80.
[0105] In Experimental Example 4-1, on average, more than 83% of particulate matter (PM) was removed, and more than 55% of toluene (C6H5CH3) was removed. In contrast, 10 ppm of ozone (O3) was generated.
[0106] In Experimental Example 4-2, on average, more than 91% of particulate matter (PM) was removed, and more than 64% of toluene (C6H5CH3) was removed. In contrast, 25 ppm of ozone (O3) was generated.
[0107] In Experiment 4-3, on average, more than 94% of particulate matter (PM) was removed, and more than 71% of toluene (C6H5CH3) was removed. In contrast, 38 ppm of ozone (O3) was generated.
[0108] With reference to Experimental Examples 4-1 to 4-3, it was confirmed that the removal rate of particulate matter (PM) and toluene (C6H5CH3) increased as the voltage applied to the plasma discharge region increased. However, it was confirmed that the decomposition of oxygen (O2) during the plasma discharge process increased the amount of ozone (O3) produced. To remove polluted air, the voltage applied to the plasma discharge region can be increased, but the amount of ozone (O3) produced also needs to be reduced. To this end, the alkalinity (pH) of the liquid flowing into the reactor 10 can be adjusted.
[0109] Figure 6 is a graph illustrating the relationship between plasma voltage and ozone (O 3 ) concentration according to an embodiment and a comparative example.
[0110] [Experimental Example 5-1 to Experimental Example 5-4]
[0111] At atmospheric pressure and a temperature close to room temperature, an air purifier 1 is used to remove water-insoluble organic compounds (VOCs). insol )’s reaction.
[0112] In Experimental Example 5-1, water-insoluble organic compounds (VOC insol ) is toluene (C6H5CH3) with a concentration of 23 ppm, and the volume flow rate of the contaminated air including toluene (C6H5CH3) is 10 L / min. A glass tube with an inner diameter of 20 mm and a thickness of 2 mm is used as the dielectric barrier of the reactor 10. A stainless steel rod with a diameter of 2 mm is used as the second electrode 22 (power electrode), and a silver paste film is used as the first electrode 21 (ground electrode). In the reactor 10, a discharge area with a length of 260 mm is surrounded by the ground electrode. The discharge gap between the inner surface of the quartz tube and the high voltage electrode as the second electrode 22 is 9 mm. At this time, the volume of the plasma discharge area is fixed at 80.865 cm 3 Filling layer 11, located within the plasma discharge region, was completely filled with dielectric particles 30. At this point, dielectric particles 30 were spherical glass particles with a diameter of 2 mm, and the porosity of filling layer 11 was 53%. No liquid was supplied to reactor 10. The voltage applied to the plasma discharge region was varied at a frequency of 210 Hz.
[0113] In Experimental Example 5-2, water-insoluble organic compounds (VOC insol) was toluene (C₆H₅CH₃) with a concentration of 22 ppm, and the volume flow rate of the contaminated air containing toluene (C₆H₅CH₃) was 10 L / min. Water (H₂O) was supplied to the interior of reactor 10 at a volume flow rate of 100 mL / min. Other settings were the same as those in Experimental Example 5-1.
[0114] In Experimental Example 5-3, water-insoluble organic compounds (VOC insol ) was toluene (C₆H₅CH₃) with a concentration of 24 ppm, and the volume flow rate of the contaminated air containing toluene (C₆H₅CH₃) was 10 L / min. Sodium hydroxide (NaOH) with a molar concentration of 1.25 mmol / L was supplied to the interior of reactor 10 at a volume flow rate of 100 mL / min. Other settings were the same as those in Experimental Example 5-1.
[0115] In Experimental Example 5-4, water-insoluble organic compounds (VOC insol ) was toluene (C₆H₅CH₃) with a concentration of 25 ppm, and the volume flow rate of the contaminated air containing toluene (C₆H₅CH₃) was 10 L / min. Sodium hydroxide (NaOH) with a molar concentration of 6.25 mmol / L was supplied to the interior of reactor 10 at a volume flow rate of 100 mL / min. Other settings were the same as those in Experimental Example 5-1.
[0116] With reference to Experimental Example 5-1, it was confirmed that the ozone (O3) concentration increased even at the lowest discharge plasma voltage. With reference to Experimental Example 5-2, it was confirmed that the ozone (O3) concentration increased similarly to Experimental Example 5-1 at a discharge plasma voltage higher than that of Experimental Example 5-1.
[0117] With reference to Experimental Example 5-3, it was confirmed that the ozone (O3) concentration increased at a higher discharge plasma voltage than that of Experimental Example 5-2, but remained at a lower concentration than that of Experimental Example 5-1. With reference to Experimental Example 5-4, it was confirmed that the ozone (O3) concentration increased at a higher discharge plasma voltage than that of Experimental Example 5-3, but remained at a lower concentration than that of Experimental Example 5-3.
[0118] When the plasma discharge voltage rises in the air purification device 1 according to an example, the non-water-soluble organic compounds (VOC insol) can be increased. On the contrary, when the plasma discharge voltage is increased, the ozone (O3) concentration can be increased during the decomposition process of oxygen (O2). As in Experimental Examples 5-1 to 5-4, when the alkalinity (pH) of the liquid supplied to the reactor 10 is increased, it can be confirmed that the increase in the ozone (O3) concentration can be suppressed. Therefore, the plasma discharge voltage can be increased as the volume flow rate and degree of contamination of the polluted air (Air1) increase. At this time, when the alkalinity (PH) of the liquid supplied to the reactor 10 is increased, not only can the polluted air (Air1) be purified, but the generation of ozone (O3) can also be suppressed.
[0119] 7A to 7D Graphs showing changes in toluene concentration and ozone concentration according to experimental examples.
[0120] [Experimental Example 6-1 to Experimental Example 6-4]
[0121] At atmospheric pressure and a temperature close to room temperature, an air purifier 1 is used to remove water-insoluble organic compounds (VOCs). insol )’s reaction.
[0122] In Experimental Example 6-1, water-insoluble organic compounds (VOC insol ) is toluene (C6H5CH3) with a concentration of 23 ppm, and the volume flow rate of the contaminated air including toluene (C6H5CH3) is 10 L / min. A glass tube with an inner diameter of 20 mm and a thickness of 2 mm is used as the dielectric barrier of the reactor 10. A stainless steel rod with a diameter of 2 mm is used as the second electrode 22 (power electrode), and a silver paste film is used as the first electrode 21 (ground electrode). In the reactor 10, a discharge area with a length of 260 mm is surrounded by the ground electrode. The discharge gap between the inner surface of the quartz tube and the high voltage electrode as the second electrode 22 is 9 mm. At this time, the volume of the plasma discharge area is fixed at 80.865 cm 3 Filling layer 11, located within the plasma discharge region, was completely filled with dielectric particles 30. At this point, dielectric particles 30 were spherical alumina particles with a diameter of 2 mm, and the porosity of filling layer 11 was 53%. No liquid was supplied to reactor 10. The voltage applied to the plasma discharge region was varied at a frequency of 210 Hz.
[0123] In Experimental Example 6-2, the water-insoluble organic compound (VOC insol) was 30 ppm of toluene (C₆H₅CH₃), and the volume flow rate of the contaminated air including toluene (C₆H₅CH₃) was 10 L / min. The liquid flowing into the reactor 10 was water (H₂O) at a volume flow rate of 100 mL / min. Other settings were the same as those in Experimental Example 6-1.
[0124] In Experimental Example 6-3, the water-insoluble organic compound (VOC insol ) is 25.5 ppm of toluene (C6H5CH3), and the volume flow rate of the contaminated air including toluene (C6H5CH3) is 10 L / min. The liquid does not flow into the reactor 10. A reactor filled with manganese dioxide (MnO2) catalyst is connected to the rear end of the reactor, and the volume of the filled manganese dioxide catalyst is 80 cm 3 The other settings are the same as those in Experimental Example 6-1.
[0125] In Experimental Example 6-4, the water-insoluble organic compound (VOC insol ) is 20 ppm of toluene (C6H5CH3), and the volume flow rate of the contaminated air including toluene (C6H5CH3) is 10 L / min. The liquid flowing into the reactor 10 is water (H2O) with a volume flow rate of 100 mL / min. A reactor filled with manganese dioxide (MnO2) catalyst is connected to the rear end of the reactor, and the volume of the filled manganese dioxide catalyst is 80 cm 3 The other settings are the same as those in Experimental Example 6-1.
[0126] In Experimental Example 6-1, the toluene removal rate was 90%, and the ozone concentration was 476 ppm.
[0127] In Experimental Example 6-2, the toluene removal rate was 82% and the ozone concentration was 74 ppm.
[0128] In Experimental Example 6-3, the toluene removal rate was 89%, and the ozone concentration was less than 1 ppm.
[0129] In Experimental Example 6-4, the toluene removal rate was 73%, and the ozone concentration was less than 1 ppm.
[0130] Referring to Experimental Examples 6-3 and 6-4, it was confirmed that the ozone concentration could be reduced to less than 1 ppm by introducing an ozone scavenging catalyst such as manganese dioxide (MnO2). In this case, it was confirmed that the presence or absence of inflowing liquid did not affect the ozone scavenging performance of the catalyst.
[0131] Figures 8A to 8B Graphs showing changes in toluene concentration and ozone concentration according to experimental examples.
[0132] [Experimental Example 7-1 to Experimental Example 7-2]
[0133] At atmospheric pressure and a temperature close to room temperature, an air purifier 1 is used to remove water-insoluble organic compounds (VOCs). insol )’s reaction.
[0134] In Experimental Example 7-1, water-insoluble organic compounds (VOC insol ) was 22 ppm of toluene (C6H5CH3), and the volume flow rate of the mixture of polluted air including toluene (C6H5CH3) and particulate matter (PM) was 10 L / min. No liquid was supplied to the interior of the reactor 10. A reactor filled with a manganese dioxide (MnO2) catalyst was connected to the rear end of the reactor, and the volume of the filled manganese dioxide catalyst was 80 cm 3 The other settings are the same as those in Experimental Example 6-1.
[0135] In Experimental Example 7-2, water-insoluble organic compounds (VOC insol ) is 22 ppm of toluene (C6H5CH3), and the volume flow rate of the mixture of polluted air including toluene (C6H5CH3) and particulate matter (PM) is 10 L / min. The liquid flowing into the reactor 10 is water (H2O) with a volume flow rate of 100 mL / min. A reactor filled with manganese dioxide (MnO2) catalyst is connected to the rear end of the reactor, and the volume of the filled manganese dioxide catalyst is 80 cm 3 The other settings are the same as those in Experimental Example 6-1.
[0136] In Experiment 7-1, an average of more than 99% of particulate matter (PM) was removed, and more than 91% of toluene (C6H5CH3) was removed. The amount of ozone (O3) generated was less than 1 ppm.
[0137] In Experiment 7-2, an average of more than 99% of particulate matter (PM) was removed, and more than 74% of toluene (C6H5CH3) was removed. The amount of ozone (O3) generated was less than 1 ppm.
[0138] With reference to Experimental Examples 7-1 and 7-2, it was confirmed that even when particulate matter (PM) and toluene were supplied simultaneously, the ozone concentration could be reduced to less than 1 ppm by introducing an ozone removal catalyst such as manganese dioxide (MnO 2 ).
[0139] Figure 9 is a flow chart of an air purification method according to an embodiment.
[0140] refer to Figure 1 and Figure 9According to one example, a liquid may flow into the interior of the reactor 10. (S110) As an example, the reactor 10 may have a flow path through which the liquid and the polluted air (Air1) may flow. In this case, the liquid may be water or an alkaline aqueous solution.
[0141] Next, a predetermined voltage can be applied to the first electrode 21 and the second electrode 22 to generate a discharge plasma. (S210) As an example, the first electrode 21 can be disposed on the outer wall of the reactor 10 as a ground electrode, and the second electrode 22 can be disposed inside the reactor 10 as a power electrode. In this case, the first electrode 21 and the second electrode 22 can be separated by a predetermined distance. A predetermined voltage is applied to the first electrode 21 and the second electrode 22 to generate a discharge plasma in the filling layer 11. The magnitude of the voltage applied to the first electrode 21 and the second electrode 22 can be controlled by the control unit 90.
[0142] Next, polluted air (Air1) may be flowed into the reactor 10. (S130) As an example, the polluted air (Air1) may include particulate matter (PM), water-soluble organic compounds (VOCs), and sol ) and non-water-soluble organic compounds (VOC insol ) is a mixed gas of at least one of the following: The volume flow rate of the polluted air (Air1) flowing into the reactor 10 can be increased or decreased according to the purification capacity of the air purification device 1. The polluted air (Air1) flowing into the reactor 10 can be captured by a liquid or decomposed into carbon dioxide (CO2) and water (H2O) by plasma.
[0143] Next, ozone may be removed using a catalyst at the rear end of the reactor 10. (S140) As an example, the catalyst included in the catalytic reactor 95 may include at least one of manganese oxide, copper oxide, aluminum oxide, or a mixture thereof.
[0144] Next, the liquid and the purified air can be discharged from the reactor 10. (S150) According to one example, the liquid that captures a portion of the polluted air (Air1) and the air (Air2) that is partially decomposed and purified in the polluted air (Air1) can be discharged outside the reactor.
[0145] The liquid that captures a portion of the polluted air (Air1) can be stored in the liquid recovery unit 50. After the polluted air (Air1) is purified using a purification device, the liquid stored in the liquid recovery unit 50 is moved to the liquid supply unit 40 by the pump 60. Thus, the liquid supply unit 40 can reuse the purified water or alkaline aqueous solution.
[0146] Although embodiments of the air purification device and the air purification method have been described with reference to the accompanying drawings for better understanding, these are merely exemplary, and those skilled in the art will understand that various modifications and equivalent other embodiments may be made therefrom. Therefore, the true technical protection scope of the present invention should be determined by the appended claims.
[0147] Reference numerals
[0148] 1: Air purification device
[0149] 10: Reactor
[0150] 11: Filling layer
[0151] 20: Plasma generation device
[0152] 21: First electrode
[0153] 22: Second electrode
[0154] 23: High voltage generator
[0155] 30: Multiple dielectric particles
[0156] 31: Water film
[0157] 40: Liquid supply unit
[0158] 41: Liquid storage
[0159] 42: Spray nozzle
[0160] 50: Liquid Recovery Department
[0161] 60: Pump
[0162] 70: Polluted air intake
[0163] 80: Purified air outlet
[0164] 90: Control Department
Claims
1. An air purification device comprising: a reactor formed into a hollow shape extending in one direction; a discharge plasma generating device comprising a first electrode disposed on an outer wall of the reactor and a second electrode disposed inside the reactor, and configured to generate a discharge plasma in a predetermined discharge region; a plurality of dielectric particles disposed in a filling layer of the reactor, wherein the discharge region includes the filling layer; a liquid supply unit that supplies liquid into the interior of the reactor and sprays the liquid toward the packed layer; and The liquid recovery unit recovers the liquid discharged from the reactor.
2. The air purification device according to claim 1, characterized in that The liquid includes water.
3. The air purification device according to claim 1, characterized in that The liquid includes an alkaline aqueous solution.
4. The air purification device according to claim 3, characterized in that The alkaline strength pH of the alkaline aqueous solution is determined by the ozone concentration inside the reactor.
5. The air purification device according to claim 3, characterized in that: The liquid is a sodium hydroxide aqueous solution having a molar concentration of 2 mmol / L to 20 mmol / L.
6. The air purification device according to claim 1, characterized in that Also includes: A pump is configured to generate pressure for transferring the liquid stored in the liquid recovery part to the liquid supply part.
7. The air purification device according to claim 1, characterized in that The porosity of the filling layer is greater than 0% and less than 90%.
8. The air purification device according to claim 7, characterized in that: The average particle size of the plurality of dielectric particles is 1 mm to 20 mm.
9. The air purification device according to claim 1, characterized in that: The plurality of dielectric particles include at least one of silicon oxide, boron oxide, aluminum oxide, manganese oxide, titanium oxide, barium oxide, copper oxide, magnesium oxide, zinc oxide, zirconium oxide, yttrium oxide, calcium oxide, nickel oxide, and iron oxide, or at least one of a mixture of these substances.
10. The air purification device according to claim 1, characterized in that A voltage of 2 kV to 500 kV is applied to the discharge region.
11. The air purification device according to claim 1, characterized in that: Also includes: a high voltage generating device configured to apply a high voltage to the interior of the reactor; as well as a control unit configured to control the generated voltage of the high voltage generating device, The control unit is configured to transmit a control signal to the high voltage generating device, wherein the control signal increases a magnitude of a voltage generated in the high voltage generating device as an amount of polluted air introduced into the reactor increases.
12. The air purification device according to claim 1, characterized in that The first electrode is a silver paste film.
13. The air purification device according to claim 1, characterized in that The second electrode extends along the one direction and is spaced apart from the first electrode by a predetermined distance.
14. The air purification device according to claim 1, characterized in that The reactor is a glass tube extending along the one direction.
15. The air purification device according to claim 1, characterized in that Also includes: The catalyst reactor is arranged at the rear end of the reactor and can remove ozone exhausted from the reactor using a catalyst.
16. The air purification device according to claim 15, characterized in that: The catalyst includes at least one of manganese oxide, copper oxide, aluminum oxide, titanium oxide, or at least one of a mixture of these substances.
17. The air purification device according to claim 1, characterized in that A water film is formed on the surfaces of the plurality of dielectric particles by the liquid.
18. The air purification device according to claim 1, characterized in that The polluted air supplied to the air purification device includes at least one of toluene, ammonia, acetaldehyde, acetic acid, formaldehyde, ozone and particulate matter.
19. An air purification method, using the air purification device according to claim 1 to purify polluted air, comprising the following steps: introducing a liquid into the interior of the reactor by spraying the liquid into a packing layer of the reactor; applying a predetermined voltage to the first electrode and the second electrode to generate a discharge plasma; introducing the contaminated air into the interior of the reactor; as well as Liquid and purified air are discharged from the reactor.
20. The air purification method according to claim 19, characterized in that: The following steps are also included: The liquid discharged from the reactor is supplied to a liquid supply unit.
21. The air purification method according to claim 19, characterized in that: The liquid includes water.
22. The air purification method according to claim 19, characterized in that: The liquid includes an alkaline aqueous solution.
23. The air purification method according to claim 22, characterized in that: The alkaline strength pH of the alkaline aqueous solution is determined according to the ozone concentration inside the reactor.
24. The air purification method according to claim 19, characterized in that: A voltage of 2 kV to 500 kV is applied to generate the discharge plasma.
25. The air purification method according to claim 19, characterized in that: The following steps are also included: Ozone is removed using a catalyst at the back end of the reactor.
26. The air purification method according to claim 25, characterized in that: The catalyst includes at least one of manganese oxide, copper oxide, aluminum oxide, titanium oxide, or at least one of a mixture of these substances.
27. The air purification method according to claim 19, characterized in that: A water film is formed on the surfaces of the plurality of dielectric particles by the liquid.
Citation Information
Patent Citations
Treatment of effluent from a substrate processing chamber
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