A test fixture and test method for scanning electron microscope energy spectrometer

Abstract

The invention relates to a test fixture for a scanning electron microscope energy spectrometer. The test fixture comprises a plurality of clamps, and two sides of each clamp comprise different metals. The scanning electron microscope energy spectrometer comprises a scanning electron microscope and an energy spectrum analyzer. The scanning electron microscope comprises a scanning electron microscope cabin. The fixture is arranged in the scanning electron microscope cabin. The energy spectrum analyzer is used for testing the element distribution of a cross section of a sample to be tested. The two sides of each clamp on the fixture are made of different metals, so as to avoid interference in test results caused by the same metal contained in the fixture and the test sample, and avoid the technical problem of inaccurate element distribution measurement.

Description

Technical Field

[0001] The invention belongs to the field of testing, and in particular relates to a testing fixture and a testing method for a scanning electron microscope energy spectrometer. Background Art

[0002] At present, the detection of element types and contents is an essential part of many production and research processes. The energy spectrum analyzer can be used in conjunction with a scanning electron microscope to perform element detection on some small samples. Small samples include but are not limited to the cross-section of semiconductor chips. Many samples require the testing of element distribution on their cross-sections. Some samples are relatively thin and difficult to detect, so a fixture is required to fix them. However, many existing fixtures are made of the same metal. If the sample itself contains this metal, the fixture will interfere with the test results, resulting in inaccurate element distribution measurements. Summary of the invention

[0003] In order to solve the problems of interference in test results caused by the same metal contained in the fixture and the sample to be tested, and inaccurate element distribution in the prior art, the present invention provides a test fixture and a test method for a scanning electron microscope spectrometer, comprising: the test fixture comprises a plurality of clamps; two sides of each clamp comprise different metals;

[0004] The scanning electron microscope energy spectrometer comprises a scanning electron microscope and an energy spectrum analyzer;

[0005] The scanning electron microscope comprises a scanning electron microscope cabin, and the fixture is arranged in the scanning electron microscope cabin;

[0006] The energy spectrum analyzer is used to test the element distribution of the cross section of the sample to be tested.

[0007] Preferably, an interface is provided at the bottom of the clamp; the clamp is connected to the scanning electron microscope sample stage via the interface.

[0008] Preferably, the size of the fixture is determined according to the volume in the scanning electron microscope chamber and the sample to be tested.

[0009] Preferably, the clamp is a rectangular structure; the multiple clamping openings are arranged in sequence along the direction of the rectangular structure, and there is a certain distance between each clamping opening.

[0010] Preferably, the clamp comprises at least three clamping openings;

[0011] The metals on both sides of the clamp are pure metals, and the pure metals include at least 4 kinds.

[0012] Preferably, the pure metal includes but is not limited to copper, aluminum, nickel, silver, gold, and manganese.

[0013] Preferably, the thickness of the sample to be tested is less than 2 mm.

[0014] A testing method using the test fixture as claimed in any one of claims 1 to 7, characterized in that it comprises: selecting a clamp from the fixture to fix the sample to be tested based on the metal element contained in the sample to be tested;

[0015] The fixture and the sample to be tested are placed in a scanning electron microscope chamber for observation to obtain observation results;

[0016] Based on the observation results, the element distribution of the cross section of the sample to be tested was tested using an energy spectrum meter.

[0017] Preferably, the method of selecting a clamp from a fixture to fix the sample to be tested based on the metal elements contained in the sample to be tested includes:

[0018] Based on the metal elements that may be contained in the sample to be tested, a clamp different from the metal elements in the sample to be tested is determined.

[0019] Preferably, the method of testing the element distribution of the cross section of the sample to be tested based on the observation results and using an energy spectrum measuring instrument includes:

[0020] Based on the sample to be tested, multiple tests are performed by selecting a clamp having a different metal element from the sample to be tested, and different clamps are selected during the multiple tests;

[0021] The final element distribution is obtained by combining the results of multiple tests and the metal elements contained on both sides of the clamp.

[0022] Compared with the prior art, the present invention has the following beneficial effects:

[0023] 1. A test fixture provided by the present invention comprises a plurality of clamps, and the two sides of each clamp comprise different metals. The scanning electron microscope energy spectrometer comprises a scanning electron microscope and an energy spectrum analyzer. The scanning electron microscope comprises a scanning electron microscope cabin. The fixture is arranged in the scanning electron microscope cabin. The energy spectrum analyzer is used to test the element distribution of the cross section of the sample to be tested. The two sides of each clamp on the fixture of the present invention are made of different metals to avoid interference with the test results caused by the same metal contained in the fixture and the test sample, and to avoid the technical problem of inaccurate measurement of element distribution.

[0024] 2. A testing method provided by the present invention includes: based on the metal elements contained in the sample to be tested, selecting a clamp from a clamp to fix the sample to be tested, placing the clamp and the sample to be tested in a scanning electron microscope chamber for observation, and obtaining observation results; based on the observation results, an energy spectrum meter is used to test the element distribution of the cross-section of the sample to be tested. The method repeats the measurement by changing different clamps to make the measurement results more accurate. BRIEF DESCRIPTION OF THE DRAWINGS

[0025] In order to more clearly illustrate the technical solutions in the present invention, the drawings required for use in the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0026] Figure 1 A top view of the clamp of the present invention;

[0027] Figure 2 A side view of the fixture of the present invention including the sample to be tested in two side directions;

[0028] Figure 3 It is a step diagram of the testing method in the present invention;

[0029] In the figure: 1-clamp; 2, 3, 4, 5, 6-tables made of different metals; 7-sample to be tested; 8-interface connecting the fixture with the sample stage of the scanning electron microscope. DETAILED DESCRIPTION

[0030] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0031] Example 1

[0032] like Figure 1 As shown, the present invention provides a test fixture for a scanning electron microscope spectrometer, the fixture comprises a plurality of clamps 1, and both sides of each clamp 1 comprise different metals 2, 3, 4, 5, 6;

[0033] The scanning electron microscope energy spectrometer comprises a scanning electron microscope and an energy spectrum analyzer, the scanning electron microscope comprises a scanning electron microscope cabin, and the fixture is arranged in the scanning electron microscope cabin;

[0034] The energy spectrum analyzer is used to: test the element distribution of the 7-section of the sample to be tested;

[0035] The test fixture provided by the present invention is made of different metals 2, 3, 4, 5, 6 on both sides of each clamping opening 1 on the fixture, so as to avoid the interference of test results caused by the fixture and the test sample containing the same metal, and the technical problem of inaccurate distribution of measured elements;

[0036] like Figure 2 As shown, an interface 8 is provided at the bottom of the fixture, and the fixture is connected to the scanning electron microscope sample stage through the interface 8;

[0037] In addition, the size of the fixture is determined according to the volume of the scanning electron microscope chamber and the sample to be measured 7;

[0038] The fixture is a rectangular structure; a plurality of clamps 1 are arranged in sequence along the direction of the rectangular structure, and there is a certain distance between each clamp 1;

[0039] Wherein, the distance between each clamping opening 1 exceeds 1 cm;

[0040] The clamp comprises at least three clamping openings 1;

[0041] The metals on both sides of the clamp 1 are pure metals, and the pure metals include at least 4 kinds;

[0042] Pure metals include, but are not limited to, copper, aluminum, nickel, silver, gold, and manganese;

[0043] The thickness of the sample to be tested is less than 2 mm.

[0044] Example 2

[0045] like Figure 3 As shown, the present invention also provides a testing method using a testing fixture for a scanning electron microscope spectrometer, comprising:

[0046] Based on the metal elements contained in the sample 7 to be tested, a clamp 1 is selected from the clamp to fix the sample 7 to be tested;

[0047] The fixture and the sample to be tested 7 are placed in a scanning electron microscope chamber for observation to obtain observation results;

[0048] Based on the observation results, the element distribution of the 7 cross sections of the sample to be tested was tested using an energy spectrum measuring instrument;

[0049] This method repeats the measurement by changing different clamps 1, so that the measurement result is more accurate;

[0050] Based on the metal elements contained in the sample 7 to be tested, a clamp 1 is selected from the fixture to fix the sample 7 to be tested, including:

[0051] Based on the metal elements that may be contained in the sample 7 to be tested, a clamp 1 different from the metal elements in the sample 7 to be tested is determined;

[0052] Based on the observation results, the energy spectrum measuring instrument is used to test the element distribution of the 7 cross sections of the sample to be tested, including:

[0053] Based on the sample 7 to be tested, multiple tests are performed on the clamp 1 having different metal elements from the sample 7 to be tested, and different clamps 1 are selected during the multiple tests;

[0054] The final element distribution is obtained by combining multiple test results and the metal elements contained on both sides of the clamp 1.

[0055] Finally, it should be noted that the above are only preferred embodiments of the present invention and are not intended to limit the present invention. For those skilled in the art, the present invention may have various modifications and variations. Any modifications, equivalent substitutions, improvements, etc. made within the spirit and principles of the present invention are included in the scope of the claims of the present invention to be approved.

Claims

1. A test fixture for a scanning electron microscope spectrometer, characterized in that: The test fixture comprises a plurality of clamps; two sides of each clamp comprise different metals; The clamp comprises at least three clamping openings; The metals on both sides of the clamp are pure metals, and the pure metals include at least 4 kinds; The scanning electron microscope energy spectrometer comprises a scanning electron microscope and an energy spectrum analyzer; The scanning electron microscope comprises a scanning electron microscope cabin; the fixture is arranged in the scanning electron microscope cabin; The energy spectrum analyzer is used to test the element distribution of the cross section of the sample to be tested.

2. The test fixture according to claim 1, characterized in that: An interface is arranged at the bottom of the fixture; the fixture is connected to the scanning electron microscope sample stage through the interface.

3. The test fixture according to claim 1, characterized in that: The size of the fixture is determined according to the volume in the scanning electron microscope chamber and the sample to be tested.

4. The test fixture according to claim 1, characterized in that: The clamp is a rectangular structure; the multiple clamping openings are arranged in sequence along the direction of the rectangular structure, and there is a certain distance between each clamping opening.

5. The test fixture according to claim 1, characterized in that: The pure metals include, but are not limited to, copper, aluminum, nickel, silver, gold, and manganese.

6. The test fixture according to claim 1, characterized in that: The thickness of the sample to be tested is less than 2 mm.

7. A testing method using the test fixture according to any one of claims 1 to 6, characterized in that: include: Based on the metal elements contained in the sample to be tested, a clamp is selected from the fixture to fix the sample to be tested; The fixture and the sample to be tested are placed in a scanning electron microscope chamber for observation to obtain observation results; Based on the observation results, the element distribution of the cross section of the sample to be tested was tested using an energy spectrum meter.

8. The testing method according to claim 7, characterized in that: The method of selecting a clamp from a fixture to fix the sample to be tested based on the metal elements contained in the sample to be tested comprises: Based on the metal elements that may be contained in the sample to be tested, a clamp different from the metal elements in the sample to be tested is determined.

9. The testing method according to claim 8, characterized in that: The method is based on the observation results and uses an energy spectrum measuring instrument to test the element distribution of the cross section of the sample to be tested, including: Based on the sample to be tested, multiple tests are performed by selecting a clamp having a different metal element from the sample to be tested, and different clamps are selected during the multiple tests; The final element distribution is obtained by combining the results of multiple tests and the metal elements contained on both sides of the clamp.

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