Apparatus for manufacturing display device and method for manufacturing display device

Abstract

An embodiment of the present disclosure discloses a manufacturing apparatus of a display device and a manufacturing method of a display device, the manufacturing apparatus of the display device including: a measurement section that moves in a first direction on an inspection stage and measures a surface profile of an object; and a distance adjustment section that adjusts a distance between the measurement section and the inspection stage.

Description

Technical Field

[0001] This disclosure relates to apparatus and methods, and more specifically to an apparatus for manufacturing a display device and a method for manufacturing a display device. Background Technology

[0002] Electronic devices based on mobility are widely used. Besides small electronic devices like mobile phones, tablet computers have recently become widely used as mobile electronic devices.

[0003] Such mobile electronic devices include display devices to provide users with various functions, namely visual information such as images or videos. Recently, there has been a trend of increasing proportion of display devices in electronic devices, and structures that can be bent into predetermined angles in a flat state are also being developed.

[0004] On the other hand, a display device may include various layers, and various processes can be used to form these layers. In particular, when organic materials are used in the various layers of the display device, the organic materials can be laminated or structures can be formed by a printing process. In the printing process described above, factors such as the resolution of the display device are determined according to how the pattern of the organic droplets is formed; therefore, the organic droplets are generally pre-sprayed from the inspection table and then sprayed onto the display substrate. Summary of the Invention

[0005] The present disclosure aims to provide an apparatus for manufacturing a display device and a method for manufacturing a display device that precisely measures the volume of a droplet ejected onto an inspection table by measuring the surface profile of the droplet.

[0006] One embodiment of this disclosure discloses a manufacturing apparatus for a display device, comprising: a measuring unit that moves in a first direction on an inspection table and measures the surface profile of an object; and a distance adjusting unit that adjusts the distance between the measuring unit and the inspection table.

[0007] In one embodiment, the manufacturing apparatus for the display device may further include: at least one distance measuring unit for measuring the distance from a set height to the inspection table.

[0008] In one embodiment, the at least one distance measuring unit may move ahead of the measuring unit and together with it in the first direction.

[0009] In one embodiment, the inspection station may include: a first region from which droplets are ejected; and a second region separated from the ejected droplets in a second direction intersecting the first direction, wherein the measuring unit measures the surface profile of the first region, and the at least one distance measuring unit measures the distance from the predetermined height to the second region in a third direction intersecting the first and second directions.

[0010] In one embodiment, the first region and the second region may be separated.

[0011] In one embodiment, the first region and the second region may overlap.

[0012] In one embodiment, the at least one distance measuring unit may include a first distance measuring unit and a second distance measuring unit.

[0013] In one embodiment, the second region may include a first portion and a second portion, the first portion and the second portion being configured to place the ejected droplet between the first portion and the second portion, the first distance measuring unit measuring the distance from the set height to the first portion, and the second distance measuring unit measuring the distance from the set height to the second portion.

[0014] In one embodiment, the distance adjustment unit may maintain a constant distance between the measuring unit and the inspection table.

[0015] In one embodiment, the manufacturing apparatus for the display device may further include a droplet ejection section for ejecting droplets.

[0016] Another embodiment of this disclosure discloses a method for manufacturing a display device, including: measuring the distance from a set height to an inspection table; adjusting the distance between a measuring unit and the inspection table; and moving the measuring unit along a first direction and measuring the surface profile of a first region of the inspection table from which droplets are ejected.

[0017] In one embodiment, the distance between the measuring unit and the inspection table may be adjusted based on the distance from the set height to the inspection table.

[0018] In one embodiment, the step of measuring the distance from the set height to the inspection table may involve measuring the distance from the set height to a second region, the second region being separated from the first region of the surface profile being measured by moving in a second direction intersecting the first direction.

[0019] In one embodiment, the step of measuring the distance from the set height to the inspection table may be to measure the distance from the set height to a second region that overlaps with the first region of the surface profile being measured.

[0020] In one embodiment, the step of measuring the distance from the set height to the inspection table may involve measuring the distance from the set height to a first part and a second part, the first part and the second part being configured to place the droplet between the first part and the second part.

[0021] In one embodiment, at least one of the first portion and the second portion may overlap with the first region of the surface profile being measured.

[0022] In one embodiment, the first portion and the second portion are separated from the first region of the surface profile being measured by a second direction intersecting the first direction.

[0023] In one embodiment, the distance from the set height to the inspection table may be the average of the distance from the set height to the first part and the distance from the set height to the second part.

[0024] In one embodiment, the distance between the measuring unit and the inspection table may remain constant during the period when the measuring unit moves on the inspection table in the first direction.

[0025] In one embodiment, the manufacturing method of the display device may further include the step of spraying droplets from the inspection table or the display substrate.

[0026] (The effect of public disclosure)

[0027] As described above, one embodiment of this disclosure includes a measuring unit that moves in a first direction on an inspection table to measure the surface profile of an object, and a distance adjusting unit that adjusts the distance between the measuring unit and the inspection table, thereby enabling the measurement of the surface profile of a droplet ejected onto the inspection table regardless of the shape of the inspection table surface. Therefore, precise volume measurement of the ejected droplet can be achieved.

[0028] Furthermore, in one embodiment of this disclosure, the distance from a predetermined height to the inspection table is measured, and the distance between the measuring unit and the inspection table is adjusted. This allows for the measurement of the surface profile of a droplet ejected onto the inspection table while maintaining a constant focus, independent of the shape of the inspection table surface. Therefore, precise volume measurement of the ejected droplet can be achieved. Attached Figure Description

[0029] Figure 1This is a perspective view illustrating a manufacturing apparatus for a display device according to an embodiment of the present disclosure.

[0030] Figure 2 This is a perspective view illustrating a droplet measuring unit according to an embodiment of the present disclosure.

[0031] Figure 3 This is a top view showing a first region and a second region according to an embodiment of the present disclosure.

[0032] Figure 4 This is a cross-sectional view showing the operation of the distance measuring unit.

[0033] Figure 5 , Figure 6 as well as Figure 7 This is a cross-sectional view showing the operation of the measuring unit and the distance adjustment unit.

[0034] Figure 8 This is a top view showing a first region and a second region according to another embodiment of the present disclosure.

[0035] Figure 9 This is a perspective view illustrating a droplet measuring unit according to another embodiment of the present disclosure.

[0036] Figure 10 as well as Figure 11 This is a top view showing a first region and a second region according to yet another embodiment of the present disclosure.

[0037] Figure 12a as well as Figure 12b This is a simulation result showing the surface profile of the ejected droplets.

[0038] Figure 13 This is a top view schematically illustrating a display device manufactured by a manufacturing apparatus for a display device according to an embodiment of the present disclosure.

[0039] Figure 14 This is a cross-sectional view schematically illustrating a display device manufactured by a manufacturing apparatus for a display device according to an embodiment of the present disclosure.

[0040] (Explanation of reference numerals in the attached diagram)

[0041] Ra2: Part 1

[0042] Rb2: Part Two

[0043] R1: First Region

[0044] R2: Second Region

[0045] 100: Inspection Table

[0046] 200: Measurement Department

[0047] 300: Distance Adjustment Unit

[0048] 400, 400-1: Distance measuring unit

[0049] 400A: First Distance Measurement Unit

[0050] 400B: Second Distance Measuring Unit

[0051] 1000: Manufacturing apparatus for display devices

[0052] 4000: Droplet ejection section

[0053] 5000-1: Droplet Measurement Section

[0054] 5000, 5000-1: Droplet Measurement Section Detailed Implementation

[0055] This disclosure can be modified and has various embodiments, specific embodiments of which are illustrated in the accompanying drawings and described in detail in the accompanying description. The effects and features of this disclosure, as well as methods for implementing them, are referenced in the accompanying drawings. Figure 1 As will become clear from the detailed embodiments described below. However, this disclosure is not limited to the embodiments disclosed below and can be implemented in various forms.

[0056] Hereinafter, embodiments of the present disclosure will be described in detail with reference to the accompanying drawings. When describing the contents with reference to the drawings, the same or corresponding components will be given the same reference numerals, and repeated descriptions thereof will be omitted.

[0057] In the following embodiments, terms such as "first" and "second" are not limiting in meaning, but are used to distinguish one constituent element from other constituent elements.

[0058] In the following embodiments, the singular expression includes the plural expression unless explicitly indicated in the context as different.

[0059] In the following embodiments, terms such as "including" or "having" indicate the presence of features or constituent elements described in the specification, without pre-excluding the possibility of adding more than one other feature or constituent element.

[0060] In the following embodiments, when a membrane, region, or constituent element is described as being on or on other parts, it includes not only cases where it is directly on other parts, but also cases where other membranes, regions, or constituent elements are located in between.

[0061] In the accompanying drawings, the dimensions of the constituent elements may be enlarged or reduced for ease of explanation. For example, since the dimensions and thicknesses of the various components shown in the drawings are presented arbitrarily for ease of explanation, this disclosure is not necessarily limited to those shown in the figures.

[0062] Where a particular embodiment can be implemented differently, the specific process sequence may also be performed differently than the described sequence. For example, two processes described consecutively may be performed substantially simultaneously, or in the reverse order of the description.

[0063] In the following embodiments, when it is stated that membranes, regions, constituent elements, etc. are connected, it includes not only the case where membranes, regions, and constituent elements are directly connected, but also the case where membranes, regions, and constituent elements are indirectly connected by the intermediate intervention of other membranes, regions, and constituent elements. For example, when it is stated in this specification that membranes, regions, constituent elements, etc. are electrically connected, it includes not only the case where membranes, regions, and constituent elements are directly electrically connected, but also the case where they are indirectly electrically connected by the intermediate intervention of other membranes, regions, and constituent elements.

[0064] Figure 1 This is a perspective view illustrating a manufacturing apparatus 1000 for a display device according to an embodiment of the present disclosure. Figure 2 This is a perspective view illustrating a droplet measuring unit 5000 according to an embodiment of the present disclosure.

[0065] Reference Figure 1 as well as Figure 2 The manufacturing apparatus 1000 for the display device may include a workbench 1100, a first gantry crane 2000, a first moving part 3000, a droplet ejection part 4000, a droplet measuring part 5000, and a control part 6000.

[0066] The worktable 1100 may include a guide member 1200 and a substrate moving member 1300. The worktable 1100 may include alignment marks (not shown) for arranging the display substrate S. The worktable 1100 may be configured to extend in a first direction and a second direction intersecting the first direction. In one embodiment, the first and second directions may be orthogonal to each other. For example, the first direction may be an x-direction or a -x-direction, and the second direction may be a y-direction or a -y-direction. In one embodiment, the first and second directions may form an acute angle or an obtuse angle to each other. The following detailed description focuses on the case where the first and second directions are orthogonal to each other.

[0067] Here, the display substrate S can be a display device under manufacturing. The display substrate S can include glass or polymeric resins such as polyethersulfone, polyarylate, polyetherimide, polyethylene naphthalate, polyethylene terephthalate, polyphenylene sulfide, polyimide, polycarbonate (PC), cellulose triacetate (TAC), and cellulose acetate propionate.

[0068] The guide member 1200 is disposed on both sides, with the substrate moving member 1300 positioned between it. Furthermore, the guide member 1200 can extend from the worktable 1100 into a third direction (e.g., the z-direction or –z-direction) intersecting the first and second directions. The length of the guide member 1200 can be longer than the edge length of the display substrate S. In this case, the length of the guide member 1200 and the edge length of the display substrate S can be measured along the second direction (e.g., the y-direction or –y-direction).

[0069] The first gantry crane 2000 may be configured in the guide member 1200. In one embodiment, the guide member 1200 may include a certain track so that the first gantry crane 2000 can move linearly along the length of the guide member 1200. For example, the guide member 1200 may include a linear motion rail.

[0070] The substrate moving component 1300 may be disposed on the worktable 1100 and may include a substrate rotating component 1400. The substrate moving component 1300 may extend along the length direction of the guide component 1200. For example, the substrate moving component 1300 may extend along a second direction (e.g., the y-direction or the –y-direction). In addition, the substrate moving component 1300 may include a track to allow the substrate rotating component 1400 to move linearly. For example, the substrate moving component 1300 may include a linear motion rail.

[0071] The substrate rotating member 1400 can rotate on the substrate moving member 1300. If the substrate rotating member 1400 rotates, the display substrate S disposed on the substrate rotating member 1400 can rotate. In one embodiment, the substrate rotating member 1400 can rotate about a pivot axis perpendicular to one side of the stage 1100 on which the display substrate S is placed. For example, the substrate rotating member 1400 can rotate with reference to a third direction (e.g., the z-direction or the –z-direction). If the substrate rotating member 1400 rotates about a pivot axis perpendicular to one side of the stage 1100 on which the display substrate S is placed, the display substrate S disposed on the substrate rotating member 1400 can also rotate about a pivot axis perpendicular to one side of the stage 1100.

[0072] The first gantry crane 2000 can be configured on the guide member 1200. That is, the first gantry crane 2000 can be configured on the guide member 1200, which is spaced apart from the base plate moving member 1300 and placed therebetween.

[0073] The first gantry crane 2000 can move along the length of the guide member 1200. For example, the first gantry crane 2000 can move along a second direction (e.g., the y-direction or the –y-direction). In one embodiment, the first gantry crane 2000 can perform linear motion manually or automatically by incorporating a motor, cylinder, etc. For example, the first gantry crane 2000 can perform linear motion automatically by including a linear motion block that moves along a linear motion track.

[0074] The first moving part 3000 and the droplet ejection part 4000 that ejects droplets Ink can be disposed on the first gantry crane 2000. In one embodiment, the first moving part 3000 can perform linear movement on the first gantry crane 2000. The first gantry crane 2000 may include a track to enable the first moving part 3000 to perform linear movement.

[0075] The first moving part 3000 may include multiple nozzle moving units. For example, the first moving part 3000 may include a first nozzle moving unit 3000a, a second nozzle moving unit 3000b, and a third nozzle moving unit 3000c. As another example, the first moving part 3000 may include one or more nozzle moving units, or four or more nozzle moving units. However, for ease of explanation, the detailed description will focus on the case where the first moving part 3000 includes a first nozzle moving unit 3000a, a second nozzle moving unit 3000b, and a third nozzle moving unit 3000c.

[0076] The interval between the first nozzle moving unit 3000a and the second nozzle moving unit 3000b can be configured to be the same as the interval between the second nozzle moving unit 3000b and the third nozzle moving unit 3000c. Alternatively, the interval between the first nozzle moving unit 3000a and the second nozzle moving unit 3000b can be configured to be different from the interval between the second nozzle moving unit 3000b and the third nozzle moving unit 3000c.

[0077] The first moving part 3000 can move linearly on the first gantry crane 2000. The first moving part 3000 can move along the length direction of the first gantry crane 2000. For example, at least one of the first nozzle moving unit 3000a, the second nozzle moving unit 3000b, and the third nozzle moving unit 3000c can move along a first direction (e.g., the x-direction or the –x-direction).

[0078] In one embodiment, the first moving part 3000 can automatically perform linear motion. The first moving part 3000 can automatically perform linear motion by incorporating a motor, cylinder, or the like. For example, the first moving part 3000 may include a linear motion block that moves along a linear motion track.

[0079] The droplet ejection unit 4000 can eject droplets of ink from the display substrate S or the inspection stage 100, which will be described later. In this case, the droplet ink can be red, green, or blue ink mixed with pigment particles in liquid crystal, alignment liquid, or solvent. In another embodiment, the droplet ink can be a high-molecular-weight or low-molecular-weight organic material corresponding to the light-emitting layer of the organic light-emitting display device.

[0080] The nozzle moving unit of the first moving part 3000 and the ejection part of the droplet ejection part 4000 can be configured in various ways. For example, one nozzle moving unit and one ejection part can be provided. In this case, more than one nozzle can be provided to eject droplets Ink from the ejection part.

[0081] As another example, the system may have one or more ejector parts and one nozzle moving unit. In this case, with multiple ejector parts, the multiple ejector parts can be arranged within one nozzle moving unit. Therefore, the multiple ejector parts can move simultaneously depending on the movement of the nozzle moving unit.

[0082] As another example, multiple nozzle moving units and multiple ejector parts can be provided. In this case, more than one ejector part can be configured in one nozzle moving unit. For ease of explanation, the following detailed description will focus on the case where one ejector part is configured in one nozzle moving unit.

[0083] That is, the ejection portion of the droplet ejection portion 4000 can be disposed in the nozzle moving unit of the first moving portion 3000. For example, the first ejection portion 4000a can be disposed in the first nozzle moving unit 3000a. The second ejection portion 4000b can be disposed in the second nozzle moving unit 3000b. The third ejection portion 4000c can be disposed in the third nozzle moving unit 3000c.

[0084] The droplet volume of the first ejector 4000a, the second ejector 4000b, and the third ejector 4000c can be adjusted independently. The first ejector 4000a, the second ejector 4000b, and the third ejector 4000c can be electrically connected to the control unit 6000. Therefore, the droplet volume ejected from the first ejector 4000a, the second ejector 4000b, and the third ejector 4000c can be adjusted by the control unit 6000.

[0085] The droplet measuring unit 5000 can measure the volume of droplets Ink ejected from the droplet ejection unit 4000. Specifically, the droplet measuring unit 5000 can measure the volume of droplets Ink ejected from the droplet ejection unit 4000. The droplet measuring unit 5000 can measure the volume of droplets Ink ejected from the droplet ejection unit 4000 before the droplets Ink are ejected from the display substrate S. In this embodiment, the droplet measuring unit 5000 can measure the volume of droplets Ink ejected from the droplet ejection unit 4000 by measuring the surface profile of the object. Here, the surface profile refers to the three-dimensional surface pattern of a defined area. For example, the surface profile is a three-dimensional representation of the surface pattern, such as curvature, grooves, protrusions, etc. Therefore, the surface profile of the object can be defined as the three-dimensional surface pattern of the object.

[0086] The droplet measuring unit 5000 may include an inspection table 100, a measuring unit 200, a distance adjustment unit 300, a distance measuring unit 400, a second moving unit 500, and a second gantry crane 600.

[0087] The inspection table 100 can be disposed on the worktable 1100. In this case, the inspection table 100 can be disposed between the guide members 1200. In one embodiment, the shape of the inspection table 100 can be the same as that of the display substrate S. In another embodiment, the inspection table 100 may include a film supply section, a film recycling section, and a film. In this case, the film can be disposed in the film supply section and the film recycling section in the form of a roll. That is, the film can be wound around the film supply section and the film recycling section. Hereinafter, a detailed description will focus on the case where the shape of the inspection table 100 is the same as that of the display substrate S.

[0088] The inspection table 100 may include glass, similar to the display substrate S, or may include polymeric resins such as polyethersulfone, polyarylate, polyetherimide, polyethylene naphthalate, polyethylene terephthalate, polyphenylene sulfide, polyimide, polycarbonate (PC), cellulose triacetate (TAC), and cellulose acetate propionate.

[0089] The measuring unit 200 can measure the surface profile of an object. That is, the measuring unit 200 can measure the three-dimensional surface pattern of the object. In addition, the measuring unit 200 can be electrically connected to the control unit 6000 to transmit the three-dimensional surface pattern of the object to the control unit 6000.

[0090] The measuring unit 200 can be a confocal microscope or an interferometric microscope. A confocal microscope is a microscope that can acquire multiple two-dimensional images of an object at different depths and reconstruct the object's three-dimensional structure based on these images. Examples of confocal microscopes include chromatic confocal microscopes and chromatic line confocal microscopes. An interferometric microscope is a microscope used to quantitatively measure changes in the fine structure, phase, etc., of an object. Examples of interferometric microscopes include laser interferometric microscopes and white light interferometric microscopes.

[0091] The measuring unit 200 can move on the inspection table 100. The measuring unit 200 can be disposed on the second moving unit 500 and move along the length direction of the second gantry crane 600. For example, the measuring unit 200 can move together with the second moving unit 500 in a first direction (e.g., the x-direction or the –x-direction). Alternatively, the measuring unit 200 can move together with the second moving unit 500 in a second direction (e.g., the y-direction or the –y-direction).

[0092] The measuring unit 200 can move in a direction perpendicular to one side of the worktable 1100. For example, the measuring unit 200 can move in a third direction (e.g., the z-direction or the –z-direction). Therefore, the distance between the inspection table 100 and the measuring unit 200 can be adjusted. For example, the distance between the measuring unit 200 and the inspection table 100 can be increased or decreased.

[0093] The distance adjustment unit 300 can adjust the distance between the measuring unit 200 and the inspection table 100. The distance adjustment unit 300 can be connected to the measuring unit 200 and can also be connected to the second moving unit 500. The distance adjustment unit 300 can increase or decrease the distance between the inspection table 100 and the measuring unit 200 by moving the measuring unit 200.

[0094] The distance adjustment unit 300 can be extended or shortened in a third direction (e.g., the z-direction or the –z-direction). In this case, the distance adjustment unit 300 may include a cylinder. Alternatively, the distance adjustment unit 300 may include a linear motor, or a rack and pinion. Thus, the distance adjustment unit 300 may include all the means and structures for moving the measuring unit 200.

[0095] The distance adjustment unit 300 can be electrically connected to the control unit 6000. Therefore, the distance adjustment unit 300 can extend or shorten according to the electrical signal transmitted from the control unit 6000.

[0096] The distance measuring unit 400 can measure the distance from a preset height to the inspection table 100. The preset height can be, for example, the distance from the top of the worktable 1100 to the end of the distance measuring unit 400 in a third-party direction (e.g., the z-direction or the –z-direction). Alternatively, the preset height can be the distance from the top of the worktable 1100 to the end of the distance measuring unit 400 in a third-party direction (e.g., the z-direction or the –z-direction) minus the average thickness of the inspection table 100. Additionally, the preset height can be the distance from any point in a third-party direction (e.g., the z-direction or the –z-direction) to the end of the distance measuring unit 400. The distance from the preset height to the inspection table 100 can also be the distance from the preset height to the top of the inspection table 100 in a third-party direction (e.g., the z-direction or the –z-direction).

[0097] The distance measuring unit 400 can be electrically connected to the control unit 6000. Therefore, the distance from the set height to the inspection table 100 obtained from the distance measuring unit 400 can be transmitted to the control unit 6000.

[0098] In one embodiment, the droplet measuring unit 5000 may include at least one distance measuring unit 400. For example, the droplet measuring unit 5000 may include one distance measuring unit 400. In another embodiment, the droplet measuring unit 5000 may include multiple distance measuring units 400. Hereinafter, a detailed description will focus on the case where the droplet measuring unit 5000 includes one distance measuring unit 400.

[0099] The distance measuring unit 400 may include a distance measuring module 410 and a connecting part 420. The distance measuring module 410 can measure the distance from a set height to the top of the inspection table 100. In one embodiment, the distance measuring module 410 can measure the distance from the set height to the top of the inspection table 100 while separated from the top of the inspection table 100. For example, the distance measuring module 410 may include a laser displacement sensor. In this case, the distance measuring module 410 can use a laser emitted from the laser displacement sensor to measure the distance from the set height to the top of the inspection table 100. As another example, the distance measuring module 410 may include a confocal microscope or an interferometric microscope. In this case, the distance measuring module 410 can measure the distance from the set height to the top of the inspection table 100 by measuring the surface contour of the object. As yet another example, the distance measuring module 410 may include an ultrasonic displacement sensor. In this case, the ultrasonic waves emitted from the ultrasonic displacement sensor can be used to measure the distance from the set height to the top of the inspection table 100. As yet another example, the distance measuring module 410 may include a capacitive displacement sensor. In this case, the capacitive displacement sensor can use the capacitive displacement measurement principle to measure the distance from a set height to the top of the inspection table 100. As yet another example, the distance measuring module 410 may include an autofocus device to measure the distance from a set height to the top of the inspection table 100.

[0100] In one embodiment, the distance measuring module 410 can measure the distance from a predetermined height to the top of the inspection table 100 by contacting the top of the inspection table 100. In this case, the distance measuring module 410 can be lowered to the top of the inspection table 100 to measure the distance from the predetermined height to the top of the inspection table 100. As described above, the distance measuring module 410 may include all means and all structures for measuring the distance from the predetermined height to the top of the inspection table 100.

[0101] The connecting portion 420 can connect the distance measuring module 410 and the second moving portion 500. The connecting portion 420 can extend in a second direction (e.g., the y-direction or the –y-direction). In this case, the second moving portion 500 can be arranged on one side of the connecting portion 420, and the distance measuring module 410 can be arranged on the other side of the connecting portion 420.

[0102] In some embodiments, the connecting portion 420 may extend or shorten in a second direction (e.g., the y-direction or the –y-direction). In this case, the connecting portion 420 may include a cylinder, a linear motor, etc.

[0103] In one embodiment, the distance measuring module 410 and the measuring unit 200 may be spaced apart in a second direction (e.g., the y-direction or the –y-direction). Therefore, the measuring unit 200 can measure the surface profile of the droplet Ink ejected from the first region along a first direction (e.g., the x-direction or the –x-direction). The distance measuring module 410 can measure the distance along the first direction (e.g., the x-direction or the –x-direction) from a set height to a second region in the inspection table 100 separated from the ejected droplet Ink by the second direction (e.g., the y-direction or the –y-direction).

[0104] Additionally, the distance measuring module 410 and the measuring unit 200 can be arranged spaced apart in a first direction (e.g., the x-direction or the –x-direction). In this case, the distance measuring module 410 can precede the measuring unit 200 along the first direction (e.g., the x-direction or the –x-direction) and measure the distance from a set height to the top of the inspection table 100.

[0105] The second moving part 500 can move the distance adjustment part 300 and the distance measuring part 400 in a first direction (e.g., the x-direction or the –x-direction). Alternatively, one end of the distance adjustment part 300 may be connected to the measuring part 200, and the other end may be connected to the second moving part 500. Alternatively, one end of the connecting part 420 may be connected to the distance measuring module 410, and the other end may be connected to the second moving part 500.

[0106] In one embodiment, the second moving part 500 may be connected to the distance adjustment part 300 and the distance measuring part 400. In this case, the distance adjustment part 300 and the distance measuring part 400 may be connected to the second moving part 500 and move together in a first direction (e.g., the x-direction or the –x-direction). Alternatively, when the distance measuring part 400 and the measuring part 200 are separated along the first direction (e.g., the x-direction or the –x-direction), the distance measuring part 400 may move ahead of the measuring part 200 and move together with it.

[0107] In another embodiment, the second moving part 500 may be connected to the distance adjustment part 300, and the distance measuring part 400 may be connected to the third moving part (not shown). Hereinafter, a detailed description will focus on the case where both the distance adjustment part 300 and the distance measuring part 400 are connected to the second moving part 500.

[0108] In one embodiment, the second moving part 500 can perform linear motion manually, or it can perform linear motion automatically by incorporating a motor, cylinder, or the like. For example, the second moving part 500 may include a linear motion block that moves along a linear motion track to perform linear motion automatically.

[0109] The second gantry crane 600 can be configured on the guide member 1200. The second gantry crane 600 can be configured similarly to the first gantry crane 2000 on the guide member 1200 which is spaced apart from the inspection table 100. Figure 1 The diagram shows a second gantry crane 600 disposed on a guide member 1200 on which a first gantry crane 2000 is disposed. However, in another embodiment, the second gantry crane 600 may also be disposed on another second guide member that is not the guide member 1200.

[0110] The second gantry crane 600 can move along the length of the guide member 1200. For example, the second gantry crane 600 can move along a second direction (e.g., the y-direction or the –y-direction). In one embodiment, the second gantry crane 600 can be manually operated for linear motion, or it can be automatically operated for linear motion by means of a motor, cylinder, etc. For example, the second gantry crane 600 may include a linear motion block that moves along a linear motion track.

[0111] A second moving part 500 can be connected to the second gantry crane 600. The second moving part 500 can move along the length of the second gantry crane 600. For example, the second moving part 500 can move in a first direction (e.g., the x-direction or the –x-direction). In this case, the second gantry crane 600 may include a linear travel track.

[0112] The manufacturing apparatus 1000 for a display device as described above can be used to precisely measure the surface profiles of multiple droplets Ink, independent of the surface shape of the inspection table 100. The inspection table 100 may bend due to external factors or internal stress. In such cases, it is necessary to perform a planarization operation on the top surface of the inspection table 100. Furthermore, when the measuring unit 200 measures the surface profile of the ejected droplets Ink, the surface profile of the droplets Ink may be distorted due to the shape of the inspection table 100, and the measuring unit 200 may not be in focus with the top surface of the inspection table 100.

[0113] If the bending deviation of the inspection stage 100 in a third direction (e.g., the z-direction or the –z-direction) is greater than the measurement range of the measuring unit 200 in the third direction (e.g., the z-direction or the –z-direction), the surface profile of the droplet Ink may not be measured. In this case, it is necessary to reset the distance between the measuring unit 200 and the inspection stage 100 before measuring the surface profile of the droplet Ink, which may increase the measurement time.

[0114] In embodiments of this disclosure, the measuring unit 200 is connected to a distance adjusting unit 300 that adjusts the distance between the measuring unit 200 and the inspection table 100, thus allowing precise measurement of the surface profiles of multiple droplets Ink regardless of the shape of the inspection table 100. Therefore, since it is not necessary to perform a planarization operation to flatten the top surface of the inspection table 100 before the droplet ejection unit 4000 ejects the droplets Ink, the volume of the droplets Ink can be measured efficiently.

[0115] Furthermore, in the embodiments of this disclosure, the distance measuring unit 400 can measure the distance from a set height to the inspection table 100 in a first direction (e.g., the x-direction or the –x-direction) before the measuring unit 200. Therefore, the distance adjusting unit 300 can adjust the distance between the measuring unit 200 and the inspection table 100. Specifically, after the distance measuring unit 400 measures the distance from the set height to the inspection table 100, the control unit 6000 can use the measured distance data to extend or shorten the distance adjusting unit 300. Therefore, when the measuring unit 200 moves along the first direction (e.g., the x-direction or the –x-direction), the distance adjusting unit 300 can keep the distance between the measuring unit 200 and the inspection table 100 constant. Thus, the display device manufacturing apparatus 1000 can measure the surface profile of the droplet Ink while maintaining focus, regardless of the surface pattern of the inspection table 100, and can shorten the volume measurement time of the droplet Ink.

[0116] The operation method of the display device manufacturing apparatus 1000 will be described in detail below.

[0117] Figure 3This is a top view showing a first region R1 and a second region R2 according to an embodiment of the present disclosure. Figure 4 This is a cross-sectional view showing the operation method of the distance measuring unit 400. Figure 5 , Figure 6 as well as Figure 7 This is a cross-sectional view showing the operation of the measuring unit 200 and the distance adjustment unit 300.

[0118] Reference Figure 3 Droplets of ink can be ejected from the inspection table 100. At this time, the droplet ejection unit (not shown) can eject multiple droplets of ink from the inspection table 100. The droplet ejection unit can eject a set amount of droplets from the inspection table 100.

[0119] In one embodiment, a plurality of droplets Ink can be ejected along a first direction (e.g., the x-direction or the –x-direction). In another embodiment, a plurality of droplets Ink can be ejected along a first direction (e.g., the x-direction or the –x-direction) and / or a second direction (e.g., the y-direction or the –y-direction). The following detailed description focuses on the case where a plurality of droplets Ink are ejected along a first direction (e.g., the x-direction or the –x-direction).

[0120] The droplet Ink can be ejected from the first region R1. The first region R1 can be the area on the upper part of the inspection table 100 where the measuring section 200 measures the surface profile. At this time, the first region R1 can extend along a first direction (e.g., the x-direction or the –x-direction).

[0121] Reference Figure 3 as well as Figure 4 The distance measuring unit 400 can measure the distance from a set height to the inspection table 100. The distance measuring unit 400 can also measure the distance from a set height to a second region R2 separated from the droplet Ink. For example, the set height can be the height from the top of the worktable (not shown) to the end of the distance measuring module 410. In this case, the distance from the set height to the second region R2 can be measured as a first distance d1. Information about the first distance d1 measured by the distance measuring unit 400 can be transmitted to a control unit (not shown).

[0122] The second region R2 can extend along a first direction (e.g., the x-direction or the –x-direction). Specifically, the second region R2 can be separated from the droplet Ink in a second direction (e.g., the y-direction or the –y-direction) and extend along the first direction (e.g., the x-direction or the –x-direction). Therefore, the distance measuring unit 400 can measure the distance from the set height to the inspection table 100 instead of the distance from the set height to the surface of the droplet Ink.

[0123] If the second region R2 overlaps with the droplet Ink, the distance measuring unit 400 can measure the distance from a set height to the surface of the droplet Ink. In this case, the distance adjusting unit 300 also adjusts the distance based on the height of the droplet Ink, thus failing to measure the accurate surface profile of the droplet Ink. In embodiments of this disclosure, the distance measuring unit 400 can measure the distance from a set height to the second region R2, which is separated from the droplet Ink in a second direction (e.g., the y-direction or the –y-direction).

[0124] In one embodiment, the first region R1 may be separated from the second region R2. Figure 3 In the diagram, the second region R2 is shown to be separated from the first region R1 in the y-direction. However, in another embodiment, the second region R2 may be separated from the first region R1 in the –y-direction. The following detailed description focuses on the case where the second region R2 is separated from the first region R1 in the y-direction.

[0125] Reference Figure 4 as well as Figure 5 The second moving part 500 can move along a first direction (e.g., the x-direction or the –x-direction). Therefore, the measuring part 200 and the distance measuring part 400 can move simultaneously along the first direction (e.g., the x-direction or the –x-direction). In this case, the distance measuring part 400 can move ahead of the measuring part 200 and together with it.

[0126] The distance adjustment unit 300 can adjust the distance between the measuring unit 200 and the inspection table 100 while the measuring unit 200 moves on the inspection table 100. In this embodiment, the distance adjustment unit 300 can keep the distance dis between the measuring unit 200 and the inspection table 100 constant while the measuring unit 200 moves on the inspection table 100. First, the distance dis between the measuring unit 200 and the inspection table 100 can be set. Then, the distance measuring unit 400 can measure the distance from the set height to the second region R2 while moving in a first direction (e.g., the x-direction or the –x-direction). Subsequently, the distance value measured by the distance measuring unit 400, such as information about the first distance d1, can be transmitted to the control unit (not shown). The control unit can extend or shorten the distance adjustment unit 300 based on the information about the first distance d1. Therefore, the distance adjustment unit 300 can adjust the distance between the measuring unit 200 and the inspection table 100 according to the distance from the set height to the inspection table 100, and in particular, the distance adjustment unit 300 can keep the distance dis between the measuring unit 200 and the inspection table 100 constant. Therefore, the measuring unit 200 can keep the first region R1 in focus.

[0127] The measuring unit 200 can measure the surface profile of the droplet Ink sprayed out of the first region R1. In the embodiments of this disclosure, the distance dis between the measuring unit 200 and the inspection table 100 is kept constant, so the surface profile of the droplet Ink can be precisely measured regardless of the shape of the inspection table 100.

[0128] Reference Figure 6 The second moving part 500 can move along the first direction (e.g., the x-direction or the -x-direction). Thus, the measuring part 200 and the distance measuring part 400 can move simultaneously along the first direction (e.g., the x-direction or the -x-direction).

[0129] The distance measuring unit 400 can measure the distance from a set height to the inspection table 100. The distance measuring unit 400 can also measure the distance from the set height to a second region (not shown) separated from the droplet Ink. At this time, the distance from the set height to the second region (not shown) can be measured as a second distance d2. Information regarding the second distance d2 measured by the distance measuring unit 400 can be transmitted to the control unit (not shown).

[0130] The distance adjustment unit 300 can adjust the distance between the measuring unit 200 and the inspection table 100 while the measuring unit 200 moves on the inspection table 100. In this embodiment, the distance adjustment unit 300 can keep the distance dis between the measuring unit 200 and the inspection table 100 constant while the measuring unit 200 moves on the inspection table 100. Figure 6 The diagram shows that the distance adjustment unit 300 is extended in order to keep the distance dis between the measuring unit 200 and the inspection table 100 constant.

[0131] The measuring unit 200 can measure the surface profile of the droplet Ink that is sprayed out of the first region R1.

[0132] Reference Figure 7 The second moving part 500 can move along the first direction (e.g., the x-direction or the -x-direction). Thus, the measuring part 200 and the distance measuring part 400 can move simultaneously along the first direction (e.g., the x-direction or the -x-direction).

[0133] The distance measuring unit 400 can measure the distance from a set height to the inspection table 100. The distance measuring unit 400 can also measure the distance from the set height to a second region (not shown) separated from the droplet Ink. At this time, the distance from the set height to the second region (not shown) can be measured as a third distance d3. Information regarding the third distance d3 measured by the distance measuring unit 400 can be transmitted to the control unit (not shown).

[0134] The distance adjustment unit 300 can adjust the distance between the measuring unit 200 and the inspection table 100 while the measuring unit 200 moves on the inspection table 100. In this embodiment, the distance adjustment unit 300 can keep the distance dis between the measuring unit 200 and the inspection table 100 constant while the measuring unit 200 moves on the inspection table 100. Figure 7 The diagram shows that the distance adjustment unit 300 is shortened in order to keep the distance dis between the measuring unit 200 and the inspection table 100 constant.

[0135] Figure 8 This is a top view showing a first region R1 and a second region R2 according to another embodiment of the present disclosure. Figure 8 In, with Figure 3 The same reference numerals refer to the same parts, and repeated descriptions are omitted.

[0136] Reference Figure 8 Multiple droplets Ink can be ejected from a first region R1 extending along a first direction (e.g., the x-direction or the –x-direction). The first region R1 can be the area on the upper part of the inspection table 100 where the measuring section 200 measures the surface profile.

[0137] In this embodiment, the second region R2 may overlap with the first region R1. In this case, the second region R2 may be separated from the droplet Ink in a second direction (e.g., the y-direction or the –y-direction). Therefore, the distance measuring unit 400 can measure the distance from a set height to the inspection table 100 instead of the distance from the set height to the surface of the droplet Ink.

[0138] In this embodiment, the distance measuring unit 400 can measure the distance from a set height to a second region R2 that overlaps with the first region R1. Therefore, the distance measuring unit 400 can measure the shape of the inspection table 100 corresponding to the surface contour of the inspection table 100 measured by the measuring unit 200.

[0139] Figure 9 This is a perspective view schematically illustrating a droplet measuring unit 5000-1 according to another embodiment of the present disclosure. Figure 9 In, with Figure 2 The same reference numerals refer to the same parts, and repeated descriptions are omitted.

[0140] Reference Figure 9 The droplet measuring unit 5000-1 may include an inspection table 100, a measuring unit 200, a distance adjustment unit 300, a distance measuring unit 400-1, a second moving unit 500, and a second gantry crane 600.

[0141] The distance measuring unit 400-1 can measure the distance from a set height to the inspection table 100 and can be electrically connected to the control unit (not shown). Therefore, the distance from the set height to the inspection table 100 obtained from the distance measuring unit 400-1 can be transmitted to the control unit 6000.

[0142] In this embodiment, the droplet measuring unit 5000-1 may include multiple distance measuring units 400-1. For example, the multiple distance measuring units 400-1 may include a first distance measuring unit 400A and a second distance measuring unit 400B. The multiple distance measuring units 400-1 may also include a third distance measuring unit. Hereinafter, a detailed description will be given focusing on the case where the multiple distance measuring units 400-1 include a first distance measuring unit 400A and a second distance measuring unit 400B.

[0143] The first distance measuring unit 400A may include a first distance measuring module 411 and a first connecting part 421. The second distance measuring unit 400B may include a second distance measuring module 412 and a second connecting part 422. The first distance measuring module 411 and the second distance measuring module 412 are connected to... Figure 2 The distance measuring module 410 is the same as or similar to the distance measuring module 410, so detailed descriptions are omitted.

[0144] The first connecting portion 421 can connect the first distance measuring module 411 and the second moving portion 500. The first connecting portion 421 can extend from the second moving portion 500 in the y-direction. In this case, the second moving portion 500 can be arranged on one side of the first connecting portion 421, and the first distance measuring module 411 can be arranged on the other side of the first connecting portion 421. The first distance measuring module 411 can be spaced apart from the measuring portion 200 in the y-direction. Therefore, the measuring portion 200 can measure the surface profile of the droplet Ink ejected along a first direction (e.g., the x-direction or the –x-direction), and the first distance measuring module 411 can measure the distance from a set height to the area in the inspection table 100 separated from the ejected droplet Ink in the y-direction.

[0145] The second connecting portion 422 can connect the second distance measuring module 412 and the second moving portion 500. The second connecting portion 422 can extend from the second moving portion 500 in the -y direction. In this case, the second moving portion 500 can be arranged on one side of the second connecting portion 422, and the second distance measuring module 412 can be arranged on the other side of the second connecting portion 422. The second distance measuring module 412 can be arranged spaced apart from the measuring portion 200 in the -y direction. Therefore, the measuring portion 200 can measure the surface profile of the ejected droplet Ink along a first direction (e.g., the x direction or the -x direction), and the second distance measuring module 412 can measure the distance from a set height to the area in the inspection table 100 separated from the ejected droplet Ink in the -y direction.

[0146] In some embodiments, at least one of the first connecting portion 421 and the second connecting portion 422 may be extended or shortened in a second direction (e.g., the y-direction or the –y-direction). In this case, at least one of the first connecting portion 421 and the second connecting portion 422 may include a cylinder, a linear motor, etc.

[0147] In this embodiment, the distance from the set height to the inspection platform 100 can be the average of the distance measured by the first distance measuring module 411 and the distance measured by the second distance measuring module 412. The control unit (not shown) can use the average value to extend or shorten the distance adjustment unit 300, and the measuring unit 200 can move in a third direction (e.g., the z-direction or the –z-direction) corresponding to the shape of the inspection platform 100. Therefore, the measuring unit 200 can measure the surface profile of the droplet Ink regardless of the shape of the inspection platform 100 from which the droplet Ink is ejected.

[0148] Figure 10 as well as Figure 11 This is a top view showing a first region R1 and a second region R2 according to yet another embodiment of the present disclosure. Figure 10 as well as Figure 11 In, with Figure 3 The same reference numerals refer to the same parts, and repeated descriptions are omitted.

[0149] Reference Figure 10 as well as Figure 11 Multiple droplets Ink can be ejected from a first region R1 extending along a first direction (e.g., the x-direction or the –x-direction). The first region R1 can be the area on the upper part of the inspection table 100 where the measuring section 200 measures the surface profile.

[0150] A distance measuring unit (not shown) can measure the distance from a set height to the inspection table 100. The distance measuring unit can also measure the distance from the set height to a second region R2 separated from the droplet Ink. The second region R2 may include a first portion Ra2 and a second portion Rb2 separated in a second direction (e.g., the y-direction or the –y-direction) by placing the droplet Ink therebetween. The first portion Ra2 and the second portion Rb2 may extend along a first direction (e.g., the x-direction or the –x-direction).

[0151] First distance measuring unit 400A (reference) Figure 9 This can measure the distance from a set height to the first part Ra2. The second distance measuring unit 400B (see reference) Figure 9The distance from the set height to the second part Rb2 can be measured. In this case, the distance from the set height to the inspection table 100 can be the average of the distance from the set height to the first part Ra2 and the distance from the set height to the second part Rb2. The control unit (not shown) can use the average value to extend or shorten the distance adjustment unit 300, and the measuring unit 200 can move in a third direction (e.g., the z-direction or the –z-direction) corresponding to the shape of the inspection table 100. Therefore, the measuring unit 200 can accurately measure the surface profile of the droplet Ink.

[0152] Reference Figure 10 The first region R1 and the second region R2 can be separated from each other. Specifically, the first portion Ra2 can be separated from the first region R1 in a second direction (e.g., the y-direction or the –y-direction). The second portion Rb2 can be separated from the first region R1 in a second direction (e.g., the y-direction or the –y-direction). The first region R1 can be configured between the first portion Ra2 and the second portion Rb2.

[0153] Reference Figure 11 The first region R1 and the second region R2 can overlap each other. In this case, the first portion Ra2 can be separated from the droplet Ink in a second direction (e.g., the y-direction or the –y-direction). The second portion Rb2 can also be separated from the droplet Ink in a second direction (e.g., the y-direction or the –y-direction). The droplet Ink can be positioned between the first portion Ra2 and the second portion Rb2.

[0154] In this embodiment, the first distance measuring unit 400A (refer to...) Figure 9 The second distance measuring unit 400B can measure the distance from a set height to the first portion Ra2 that overlaps with the first region R1. Figure 9 The first distance measuring unit 400A can measure the distance from a set height to the second portion Rb2 that overlaps with the first region R1. Therefore, the first distance measuring unit 400A (refer to...) Figure 9 ) and the second distance measuring unit 400B (refer to Figure 9 It can measure the shape of the inspection table 100 that corresponds to the surface contour of the inspection table 100 measured by the measuring unit 200.

[0155] In the manufacturing apparatus 1000 for such a display device, the droplet ejection unit 4000 ejects droplets Ink from the inspection table 100, and the volume of the droplet Ink can be determined by measuring the surface profile of the droplet Ink. In one embodiment, the control unit 6000 can compare the accurate volume of the droplet Ink obtained from the droplet measuring unit 5000 with the volume of a predetermined droplet ejected from the droplet ejection unit 4000. For example, the control unit 6000 can be set to eject a 1 ml droplet from the first ejection unit 4000a. Then, the first ejection unit 4000a ejects the predetermined droplet (1 ml) from the droplet measuring unit 5000. At this time, if the accurate volume of the ejected droplet Ink obtained from the droplet measuring unit 5000 is not 1 ml, the control unit 6000 can change the volume of the predetermined droplet ejected from the first ejection unit 4000a. By repeating this process, the volume of the droplets originally intended to be ejected can be ejected from the droplet ejection section 4000. Therefore, precise control over the volume of the droplets Ink ejected by the droplet ejection section 4000 can be achieved.

[0156] The droplet ejection unit 4000 of the display device manufacturing apparatus 1000 can eject predetermined droplets onto the display substrate S. At this time, the droplets Ink ejected by the droplet ejection unit 4000 can eject an accurate volume of droplets Ink measured in the droplet measuring unit 5000 onto the display substrate S. Therefore, problems such as spots caused by volume differences between multiple droplets Ink in the manufactured display device can be solved.

[0157] Figure 12a as well as Figure 12b This is a simulation result showing the surface profile of the ejected droplet Ink. Figure 12a The simulation results show the surface profile of the ejected droplet Ink without adjusting the distance between the measuring unit and the inspection table. Figure 12b The simulation results show the surface profile of the ejected droplet Ink when the distance between the measuring unit and the inspection table is adjusted.

[0158] Reference Figure 12a The inspection table may bend due to external factors or internal stress, and multiple droplets Ink may be arranged along the shape of the inspection table. In this case, due to the shape of the inspection table, the surface profile of a portion of the droplet Ink' may be distorted during measurement. Furthermore, if the bending deviation of the inspection table is large, the surface profile of the droplet Ink may not be measured at all.

[0159] Reference Figure 12bBecause the measuring unit is connected to a distance adjusting unit that adjusts the distance between the measuring unit and the inspection table, a certain distance can be maintained between the measuring unit and the inspection table regardless of the shape of the inspection table. Therefore, the measuring unit can precisely measure the surface profile of multiple droplets Ink regardless of the shape of the inspection table.

[0160] Hereinafter, a detailed description will be given of a display device 1 manufactured using a display device manufacturing apparatus as described above.

[0161] Figure 13 This is a top view schematically illustrating the manufacture of display device 1 by means of a manufacturing apparatus for a display device according to an embodiment of the present disclosure.

[0162] Reference Figure 13 The display device 1 includes a display area DA for displaying an image and a non-display area NDA for not displaying an image. The display device 1 can provide an image by emitting light from a plurality of pixels PX disposed in the display area DA. Each pixel PX can emit red, green, blue, or white light respectively.

[0163] Display device 1, as a device for displaying images, can be a portable mobile device such as a game console, multimedia device, or miniature PC. The display device 1 described below may include liquid crystal displays, electrophoretic displays, organic light-emitting displays, inorganic light-emitting displays, field emission displays, surface-conduction electron-emitter displays, quantum dot displays, plasma displays, and cathode ray tube displays, etc. Hereinafter, an organic light-emitting display will be used as an example to describe display device 1 manufactured using a display device manufacturing apparatus according to an embodiment of this disclosure; however, embodiments of this disclosure can be used to manufacture display devices of various types as described above.

[0164] Pixel PX can be electrically connected to both scan line SL and data line DLn. Specifically, scan line SL can extend in the x-direction, and data line DLn can extend in the y-direction.

[0165] Figure 14This is a cross-sectional view schematically illustrating a display device manufactured by a manufacturing apparatus for a display device according to an embodiment of the present disclosure.

[0166] Reference Figure 14 The display layer DL and the thin-film encapsulation layer TFE can be disposed on the substrate 10. The display layer DL may include the pixel circuit layer PCL and the display element layer DEL.

[0167] The substrate 10 may include glass or polymeric resins such as polyethersulfone, polyarylate, polyetherimide, polyethylene naphthalate, polyethylene terephthalate, polyphenylene sulfide, polyimide, polycarbonate, cellulose triacetate, and cellulose acetate propionate.

[0168] A barrier layer (not shown) may also be included between the display layer DL and the substrate 10. The barrier layer, as a barrier layer to prevent the penetration of external foreign matter, may be a single layer or multiple layers containing inorganic materials such as silicon nitride and silicon oxide.

[0169] A pixel circuit layer PCL is disposed on the substrate 10. Figure 14 The pixel circuit layer PCL shown includes a thin-film transistor (TFT) and a buffer layer 11, a first gate insulating layer 13a, a second gate insulating layer 13b, an interlayer insulating layer 15, and a planarization insulating layer 17 disposed below and / or above the TFT.

[0170] The buffer layer 11 may contain inorganic insulating materials such as silicon nitride, silicon oxynitride, and silicon oxide, and may be a single layer or multiple layers containing the aforementioned inorganic insulating materials.

[0171] The thin-film transistor (TFT) includes a semiconductor layer 12, which may contain polycrystalline silicon. Alternatively, the semiconductor layer 12 may contain amorphous silicon, oxide semiconductor, or organic semiconductor, etc. The semiconductor layer 12 may include a channel region 12c and a drain region 12a and a source region 12b respectively disposed on both sides of the channel region 12c. The gate electrode 14 may overlap with the channel region 12c.

[0172] The gate electrode 14 may contain a low-resistance metallic material. The gate electrode 14 may contain a conductive material including molybdenum (Mo), aluminum (Al), copper (Cu), titanium (Ti), etc., and may be formed from multiple layers or a single layer containing said material.

[0173] The first gate insulating layer 13a between the semiconductor layer 12 and the gate electrode 14 may comprise silicon oxide (SiO2) or silicon nitride (SiN). X Inorganic insulating materials such as silicon oxynitride (SiON), aluminum oxide (Al2O3), titanium oxide (TiO2), tantalum oxide (Ta2O5), hafnium oxide (HfO2), or zinc oxide (ZnO2).

[0174] The second gate insulating layer 13b may be provided in a manner that covers the gate electrode 14. The second gate insulating layer 13b may, similarly to the first gate insulating layer 13a, comprise silicon oxide (SiO2) or silicon nitride (SiN). X Inorganic insulating materials such as silicon oxynitride (SiON), aluminum oxide (Al2O3), titanium oxide (TiO2), tantalum oxide (Ta2O5), hafnium oxide (HfO2), or zinc oxide (ZnO2).

[0175] An upper electrode Cst2 of a storage capacitor Cst can be disposed above the second gate insulating layer 13b. The upper electrode Cst2 can overlap with the gate electrode 14 below it. In this case, the overlapping gate electrode 14 and the upper electrode Cst2, with the second gate insulating layer 13b placed between them, can form a storage capacitor Cst. That is, the gate electrode 14 can function as the lower electrode Cst1 of the storage capacitor Cst.

[0176] Thus, the storage capacitor Cst and the thin-film transistor TFT can be formed overlappingly. In some embodiments, the storage capacitor Cst can also be formed without overlapping with the thin-film transistor TFT.

[0177] The upper electrode Cst2 may contain aluminum (Al), platinum (Pt), palladium (Pd), silver (Ag), magnesium (Mg), gold (Au), nickel (Ni), neodymium (Nd), iridium (Ir), chromium (Cr), calcium (Ca), molybdenum (Mo), titanium (Ti), tungsten (W) and / or copper (Cu), and may be a single layer or multiple layers of the aforementioned materials.

[0178] The interlayer insulating layer 15 can cover the upper electrode Cst2. The interlayer insulating layer 15 can contain silicon oxide (SiO2) or silicon nitride (SiN). XThe inorganic insulating layer 15 can be a single layer or multiple layers containing the aforementioned inorganic insulating materials, such as silicon oxynitride (SiON), aluminum oxide (Al2O3), titanium oxide (TiO2), tantalum oxide (Ta2O5), hafnium oxide (HfO2), or zinc oxide (ZnO2).

[0179] Drain electrode 16a and source electrode 16b can be located on the interlayer insulating layer 15, respectively. Drain electrode 16a and source electrode 16b can be connected to drain region 12a and source region 12b, respectively, through contact holes in the underlying insulating layer. Drain electrode 16a and source electrode 16b can contain materials with good conductivity. Drain electrode 16a and source electrode 16b can contain conductive materials including molybdenum (Mo), aluminum (Al), copper (Cu), titanium (Ti), etc., and can be formed from multiple layers or a single layer containing the above materials. As an embodiment, drain electrode 16a and source electrode 16b can have a Ti / Al / Ti multilayer structure.

[0180] The planarization insulation layer 17 may include an organic insulation layer. The planarization insulation layer 17 may include common general-purpose polymers such as polymethyl methacrylate (PMMA) or polystyrene (PS), polymer derivatives having phenolic groups, acrylic polymers, imide polymers, aromatic ether polymers, amide polymers, fluorinated polymers, p-xylene polymers, vinyl alcohol polymers, and blends thereof, as organic insulating materials.

[0181] A display element layer (DEL) is disposed on the pixel circuit layer (PCL) of the aforementioned structure. The display element layer (DEL) may include an organic light-emitting diode (OLED), and the pixel electrode 21 of the OLED is electrically connected to a thin-film transistor (TFT) through contact holes in the planarized insulating layer 17.

[0182] A pixel (PX) can include an organic light-emitting diode (OLED) and a thin-film transistor (TFT). Each pixel (PX) can emit red, green, or blue light, or red, green, blue, or white light, through an OLED.

[0183] The pixel electrode 21 may comprise a conductive oxide such as indium tin oxide (ITO), indium zinc oxide (IZO), zinc oxide (ZnO), indium oxide (In₂O₃), indium gallium oxide (IGO), or aluminum zinc oxide (AZO). As another embodiment, the pixel electrode 21 may comprise a reflective film comprising silver (Ag), magnesium (Mg), aluminum (Al), platinum (Pt), palladium (Pd), gold (Au), nickel (Ni), neodymium (Nd), iridium (Ir), chromium (Cr), or compounds thereof. As yet another embodiment, the pixel electrode 21 may further comprise a film formed on / below the aforementioned reflective film using ITO, IZO, ZnO, or In₂O₃.

[0184] A pixel defining film 19 having an opening 19OP exposing the central portion of the pixel electrode 21 is disposed on the pixel electrode 21. The pixel defining film 19 may contain organic and / or inorganic insulating materials. The opening 19OP may define a light-emitting region (hereinafter referred to as the light-emitting region) EA from the organic light-emitting diode OLED. For example, the width of the opening 19OP may correspond to the width of the light-emitting region EA.

[0185] A light-emitting layer 22 can be disposed in the opening 19OP of the pixel defining film 19. The light-emitting layer 22 may contain a high-molecular-weight or low-molecular-weight organic material that emits light of a predetermined color. Such a light-emitting layer 22 can be formed by ejecting droplets using an embodiment of the present disclosure, namely a display device manufacturing apparatus.

[0186] Although not shown, a first functional layer and a second functional layer can be disposed above and below the light-emitting layer 22, respectively. The first functional layer may, for example, include a hole transport layer (HTL), or a hole transport layer and a hole injection layer (HIL). The second functional layer, as a constituent element disposed above the light-emitting layer 22, is optional. The second functional layer may include an electron transport layer (ETL) and / or an electron injection layer (EIL). The first functional layer and / or the second functional layer may be a common layer formed to completely cover the substrate 10 in the same manner as the common electrode 23, which will be described later.

[0187] The common electrode 23 can be formed of a conductive material with a low work function. For example, the common electrode 23 may include a (semi-)transparent layer containing silver (Ag), magnesium (Mg), aluminum (Al), platinum (Pt), palladium (Pd), gold (Au), nickel (Ni), neodymium (Nd), iridium (Ir), chromium (Cr), lithium (Li), calcium (Ca), or alloys thereof. Alternatively, the common electrode 23 may also include a layer such as ITO, IZO, ZnO, or In2O3 on the (semi-)transparent layer containing the aforementioned materials.

[0188] In one embodiment, the thin-film encapsulation layer TFE may include at least one inorganic encapsulation layer and at least one organic encapsulation layer. As one embodiment, Figure 14 The thin-film encapsulation layer TFE is shown to include a first inorganic encapsulation layer 31, an organic encapsulation layer 32, and a second inorganic encapsulation layer 33 stacked sequentially.

[0189] The first inorganic encapsulation layer 31 and the second inorganic encapsulation layer 33 may contain one or more inorganic materials selected from aluminum oxide, titanium oxide, tantalum oxide, hafnium oxide, zinc oxide, silicon oxide, silicon nitride, and silicon oxynitride. The organic encapsulation layer 32 may contain polymer-based materials. Polymer-based materials may include acrylic resins, epoxy resins, polyimides, and polyethylene, etc. As an embodiment, the organic encapsulation layer 32 may contain acrylate.

[0190] In another embodiment, the thin-film encapsulation layer TFE can be a structure in which the substrate 10 and the upper substrate, which are transparent components, are sealed by a sealing member to seal the internal space between the substrate 10 and the upper substrate. In this case, a desiccant or filler material can be located in the internal space. The sealing member can be a sealant, and in another embodiment, the sealing member can be made of a laser-cured material. For example, the sealing member can be a frit. Specifically, the sealing member can be formed of polyurethane resins, epoxy resins, acrylic resins as organic sealants, or silicone as inorganic sealants. As a polyurethane resin, polyurethane acrylates can be used, for example. As an acrylic resin, butyl acrylate, ethyl silicate, etc., can be used, for example. On the other hand, the sealing member can be made of a thermosetting material.

[0191] A touch electrode layer (not shown) including touch electrodes can be configured on a thin-film encapsulation layer TFE, and an optical functional layer (not shown) can be configured on the touch electrode layer. The touch electrode layer can acquire external input, such as coordinate information based on touch events. The optical functional layer can reduce the reflectivity of light incident from the outside toward the display device 1 (external light), and / or can improve the color purity of light emitted from the display device 1. As an embodiment, the optical functional layer may include a phase retarder and / or a polarizer. The phase retarder may be a film type or a liquid crystal coating type, and may include a λ / 2 phase retarder and / or a λ / 4 phase retarder. The polarizer may also be a film type or a liquid crystal coating type. For example, the film type may include a stretched synthetic resin film, and the liquid crystal coating type may include liquid crystals arranged in predetermined rows and columns. The phase retarder and the polarizer may also include a protective film.

[0192] In another embodiment, the optical functional layer may include a black matrix and color filters. The color filters may be arranged to take into account the color of light emitted from each pixel PX of the display device 1. Each color filter may include red, green, or blue pigments or dyes. Additionally, each color filter may include quantum dots in addition to the aforementioned pigments or dyes. Furthermore, a portion of the color filters may not include the aforementioned pigments or dyes, but may include scattering particles such as titanium dioxide. Color filters as described above can be formed by ejecting droplets using a manufacturing apparatus for a display device according to an embodiment of this disclosure.

[0193] As another embodiment, the optical functional layer may include a destructive interference structure. The destructive interference structure may include a first reflective layer and a second reflective layer disposed on different layers from each other. The first and second reflected light reflected by the first and second reflective layers, respectively, can destructively interfere, thereby reducing the external light reflectivity.

[0194] An adhesive component may be disposed between the touch electrode layer and the optical functional layer. The adhesive component may be any common adhesive component known in the art. The adhesive component may be a pressure-sensitive adhesive (PSA).

[0195] This disclosure has been illustrated with reference to an embodiment shown in the accompanying drawings, but it is merely illustrative, and those skilled in the art will understand from this that various modifications and variations of the embodiment are possible. Therefore, the true scope of protection of this disclosure should be determined by the technical concept of the appended claims.

Claims

1. An apparatus for manufacturing a display device, wherein, include: The measuring unit moves in the first direction on the inspection table and measures the surface profile of the droplet; A distance adjustment unit adjusts the distance between the measuring unit and the inspection table; as well as At least one distance measuring unit measures the distance from a pre-set height to the inspection table. The distance adjustment unit adjusts the distance between the measuring unit and the inspection table according to the distance measured by the distance measuring unit, so that the distance between the measuring unit and the inspection table remains constant.

2. The manufacturing apparatus for the display device according to claim 1, wherein, The at least one distance measuring unit moves ahead of the measuring unit and together with it in the first direction.

3. The manufacturing apparatus for the display device according to claim 1, wherein, The inspection station includes: a first region where the sprayed droplets are emitted; and a second region separated from the sprayed droplets in a second direction intersecting the first direction. The measuring unit measures the surface profile of the first region. The at least one distance measuring unit measures the distance from the set height to the second region in a third direction that intersects the first direction and the second direction.

4. The manufacturing apparatus for the display device according to claim 3, wherein, The first region and the second region are separated.

5. The manufacturing apparatus for the display device according to claim 3, wherein, The first region and the second region overlap.

6. The manufacturing apparatus for the display device according to claim 3, wherein, The at least one distance measuring unit includes a first distance measuring unit and a second distance measuring unit. The second region includes a first portion and a second portion, the first portion and the second portion being configured to place the ejected droplet between the first portion and the second portion. The first distance measuring unit measures the distance from the preset height to the first part. The second distance measuring unit measures the distance from the set height to the second part.

7. A method for manufacturing a display device, wherein, include: The procedure for measuring the distance from the set height to the inspection table; The step of adjusting the distance between the measuring unit and the inspection table; as well as The step of moving the measuring unit along the first direction and measuring the surface profile of the first area of ​​the sprayed droplets in the inspection table. Based on the measured distance from the set height to the inspection table, the distance between the measuring unit and the inspection table is adjusted so that the distance between the measuring unit and the inspection table remains constant.

8. The method for manufacturing a display device according to claim 7, wherein, The step of measuring the distance from the set height to the inspection table is to measure the distance from the set height to the second area. The second region is separated from the first region of the surface profile being measured by moving in a second direction that intersects with the first direction.

9. The method for manufacturing a display device according to claim 7, wherein, The step of measuring the distance from the set height to the inspection table is to measure the distance from the set height to the second region that overlaps with the first region of the surface profile being measured.

10. The method of manufacturing a display device according to claim 7, wherein, The step of measuring the distance from the set height to the inspection table involves measuring the distance from the set height to a first part and a second part, the first part and the second part being configured to place the droplet between the first part and the second part.

11. The method of manufacturing a display device according to claim 10, wherein, At least one of the first portion and the second portion overlaps with the first region of the surface profile being measured.

12. The method of manufacturing a display device according to claim 10, wherein, The first portion and the second portion are separated from the first region of the surface profile being measured by a second direction intersecting the first direction.

13. The method of manufacturing a display device according to claim 10, wherein, The distance from the set height to the inspection table is the average of the distance from the set height to the first part and the distance from the set height to the second part.

Images