Chiller

Abstract

The present application relates to the technical field of refrigeration equipment, and discloses a chiller comprising: a centrifugal compressor including a refrigerant compression chamber and an air bearing; an overheating device, the inlet end of which is connected to the exhaust port of the refrigerant compression chamber via a first one-way valve, and the outlet end of which is connected to the air supply port of the air bearing, and is configured to provide saturated gas or overheated gas to the air bearing. The chiller provided by the embodiment of the present disclosure is provided with an overheating device at the air supply port of the air bearing of the centrifugal compressor, and the air supply of the air bearing is heated by the overheating device, thereby ensuring that the gas entering the air bearing is saturated gas or overheated gas, and preventing the air supply gas of the air bearing from containing liquid, which affects the normal operation of the centrifugal compressor.

Description

Technical Field

[0001] The present application relates to the technical field of refrigeration equipment, for example, to a chiller. Background Art

[0002] Gas lubrication technology is a high-tech that has rapidly developed since the mid-20th century. Its emergence has ushered in a qualitative leap in lubrication technology. Gas bearings are a core product developed from this technology. They are mechanical components that utilize gas films to support loads or reduce friction. Compared to rolling bearings and oil-filled sliding bearings, gas bearings offer four major advantages: high speed, high precision, low power consumption, and long life. They increase bearing speed by 5-10 times, improve support precision by two orders of magnitude, reduce power consumption by three orders of magnitude, and extend bearing service life by dozens of times. Gas lubrication technologies include hydrodynamic lubrication, hydrostatic lubrication, and dynamic and static lubrication. Hydrodynamic lubrication is self-acting, while hydrostatic lubrication uses external gas pressure. Dynamic and static lubrication combines the advantages of both. The appropriate lubrication type can be selected based on specific engineering requirements during design.

[0003] The hydrostatically lubricated gas bearings used in centrifugal compressors require an external pressure device to increase the refrigerant pressure and continuously supply high-pressure gaseous refrigerant to the bearings. Existing pressure supply devices typically use a gas tank, which uses electricity to heat the electric heating tubes inside the tank, causing the liquid refrigerant to evaporate into gas. However, since the evaporated gaseous refrigerant rises to the top of the gas tank and is discharged, it encounters the liquid refrigerant that has just entered the tank during its ascent, easily entraining small droplets. Liquid droplets in the bearing air supply disrupt the normal operation of the bearing's air film, affecting the operation of the rotor and bearings, causing bearing damage, and in severe cases, even causing shaft seizure.

[0004] During the implementation of the embodiments of the present disclosure, it was found that at least the following problems exist in the related art:

[0005] When supplying air to the air bearing, it cannot be ensured that the refrigerant at the compressor outlet is in a saturated gas state. Therefore, it cannot be guaranteed that the gas supplied to the air bearing is in a saturated gas state. It may contain liquid, and condensation may occur during operation, causing the gas to liquefy. Once the liquid enters the bearing gap, it will affect the normal operation of the bearing. Summary of the Invention

[0006] In order to provide a basic understanding of some aspects of the disclosed embodiments, a brief summary is given below. The summary is not an extensive review, nor is it intended to identify key / critical elements or delineate the scope of protection of these embodiments, but rather serves as a prelude to the detailed description that follows.

[0007] The disclosed embodiments provide a chiller capable of preventing liquid from being entrained in the air supply of an air bearing, so that the air supply of the air bearing is saturated gas or superheated gas.

[0008] In some embodiments, the chiller includes: a centrifugal compressor, including a refrigerant compression chamber and an air bearing; an overheating device, the inlet end of which is connected to the exhaust port of the refrigerant compression chamber through a first one-way valve, and the outlet end is connected to the air supply port of the air bearing, and is configured to provide saturated gas or superheated gas to the air bearing.

[0009] The chiller provided by the embodiments of the present disclosure can achieve the following technical effects:

[0010] An overheating device is provided at the air supply port of the air bearing of the centrifugal compressor. The air supply of the air bearing is heated by the overheating device, so that the gas entering the air bearing can be saturated gas or overheated gas, thereby preventing the supply gas of the air bearing from containing liquid and affecting the normal operation of the centrifugal compressor.

[0011] The above general description and the following description are exemplary and explanatory only and are not intended to limit the present application. BRIEF DESCRIPTION OF THE DRAWINGS

[0012] One or more embodiments are exemplarily described by corresponding drawings. These exemplary descriptions and drawings do not limit the embodiments. Elements with the same reference numerals in the drawings are shown as similar elements. The drawings do not constitute a scale limitation. In addition,

[0013] Figure 1 is a structural schematic diagram of a chiller provided by an embodiment of the present disclosure;

[0014] Figure 2 It is a structural schematic diagram of another chiller provided in an embodiment of the present disclosure.

[0015] Reference numerals:

[0016] 1. Centrifugal compressor; 11. Refrigerant compression chamber; 12. Air bearing; 2. Overheating device; 21. Shell; 22. Heating module; 31. First one-way valve; 32. Second one-way valve; 41. First solenoid valve; 42. Second solenoid valve; 43. Third solenoid valve; 5. First heat exchanger; 6. Gas compression device; 71. First sensor; 72. First flowmeter; 73. Second sensor; 74. Second flowmeter. DETAILED DESCRIPTION

[0017] In order to be able to understand the features and technical content of the embodiments of the present disclosure in more detail, the implementation of the embodiments of the present disclosure is described in detail below in conjunction with the accompanying drawings. The accompanying drawings are for reference only and are not used to limit the embodiments of the present disclosure. In the following technical description, for the sake of convenience of explanation, a full understanding of the disclosed embodiments is provided through multiple details. However, one or more embodiments can still be implemented without these details. In other cases, to simplify the drawings, well-known structures and devices can be simplified for display.

[0018] In the description and claims of the embodiments of the present disclosure, as well as in the accompanying drawings, the terms "first," "second," and the like are used to distinguish similar items and are not necessarily used to describe a particular order or precedence. It should be understood that the terms used in this manner are interchangeable where appropriate to describe the embodiments of the present disclosure herein. In addition, the terms "including," "having," and any variations thereof are intended to cover non-exclusive inclusions.

[0019] In the embodiments of the present disclosure, the terms "upper", "lower", "inside", "middle", "outside", "front", "back" and the like indicate directions or positional relationships based on the directions or positional relationships shown in the accompanying drawings. These terms are mainly intended to better describe the embodiments of the present disclosure and their embodiments, and are not intended to limit the indicated devices, elements or components to having a specific direction, or to be constructed and operated in a specific direction. Moreover, in addition to being used to indicate directions or positional relationships, some of the above terms may also be used to indicate other meanings. For example, the term "upper" may also be used to indicate a certain dependency or connection relationship in certain circumstances. For those of ordinary skill in the art, the specific meanings of these terms in the embodiments of the present disclosure can be understood according to specific circumstances.

[0020] Furthermore, the terms "disposed," "connected," and "fixed" should be interpreted broadly. For example, "connected" can mean a fixed connection, a removable connection, or an integral structure; it can be a mechanical connection or an electrical connection; it can be a direct connection, an indirect connection through an intermediary, or an internal connection between two devices, elements, or components. Those skilled in the art will understand the specific meanings of these terms in the embodiments of this disclosure based on the specific circumstances.

[0021] In the embodiment of the present disclosure, the character " / " indicates that the preceding and following objects are in an "or" relationship. For example, A / B means: A or B.

[0022] The term "and / or" describes an association between objects, indicating that three relationships can exist. For example, A and / or B means: A or B, or A and B.

[0023] It should be noted that, unless there is any conflict, the embodiments and features in the embodiments of the present disclosure can be combined with each other.

[0024] Figure 1 Schematic diagram of the structure of a chiller provided by the embodiment of the present disclosure. Figure 1 As shown, an embodiment of the present disclosure provides a chiller, including a centrifugal compressor 1 and a superheating device 2. The centrifugal compressor 1 includes a refrigerant compression chamber 11 and an air bearing 12. The superheating device 2 has an inlet end connected to the exhaust port of the refrigerant compression chamber 11 through a first one-way valve 31, and an outlet end connected to the air supply port of the air bearing 12. The superheating device 2 is configured to provide saturated gas or superheated gas to the air bearing 12.

[0025] The centrifugal compressor 1 includes a refrigerant compression chamber 11. The refrigerant enters the refrigerant compression chamber 11 and is compressed into a high-temperature and high-pressure gas and then discharged from the centrifugal compressor to provide circulating refrigerant for the chiller.

[0026] The centrifugal compressor 1 also includes an air bearing 12, which provides power for compressing the refrigerant in the refrigerant compression chamber 11. The air bearing 12 is a sliding bearing that uses gas as a lubricant. The support parts do not have solid contact when starting or stopping work, so there is no solid wear. Optionally, the air bearing 12 is a hydrostatic air suspension bearing. The air bearing 12 has a simple operating principle, a large load-bearing capacity and rigidity, and can operate normally at high speed, low speed, and even zero speed. It has the advantages of high speed, high precision, low power consumption, and long life. Therefore, it has strong adaptability and wide application.

[0027] The superheating device 2 is positioned before the air supply port of the air bearing 12. Its inlet is connected to the exhaust port of the refrigerant compression chamber 11 via a first one-way valve 31, and its outlet is connected to the air supply port of the air bearing 12. In this way, the gas supplied from the refrigerant compression chamber 11 to the air bearing 12 is heated and pressure-stabilized by the superheating device 2, preventing the gas from containing liquid. This provides the air bearing 12 with superheated or saturated gas, while also ensuring a stable pressure for the supplied gas, thereby achieving stable operation of the centrifugal compressor 1.

[0028] The exhaust port of the refrigerant compression chamber 11 is provided with a first one-way valve 31. This can prevent the gas discharged from the centrifugal compressor 1 from flowing back, thereby ensuring the safe operation of the centrifugal compressor 1.

[0029] Optionally, the chiller also includes a second heat exchanger, to which the exhaust of the air bearing 12 is connected. Thus, the gas in the air bearing 12 after working returns to the compression chamber of the centrifugal compressor 1 through the second heat exchanger, continuing to provide circulating refrigerant for the chiller and gas for the air bearing 12.

[0030] The chiller provided by the embodiment of the present disclosure is provided with an overheating device at the air supply port of the air bearing of the centrifugal compressor. The air supply of the air bearing is heated by the overheating device, so that the gas entering the air bearing can be saturated gas or overheated gas, thereby preventing the supply gas of the air bearing from containing liquid and affecting the normal operation of the centrifugal compressor.

[0031] In some embodiments, the superheating device 2 includes a housing 21 and a heating module 22. The heating module 22 is disposed inside or on a side wall of the housing 21 and is configured to heat the gas in the superheating device 2.

[0032] Optionally, heating module 22 utilizes an electric heating tube for heating, which can be positioned within housing 21. Electric heating tubes offer rapid heating, high efficiency, and a compact structure. Thus, heating module 22 can rapidly heat the gas supplied to air bearing 12 to a preset or desired temperature. Furthermore, the low cost of electric heating tubes can reduce the cost of the superheating device.

[0033] Optionally, heating module 22 utilizes a semiconductor heating element, which can be positioned on the sidewalls of housing 21. Semiconductor heating provides fast, high-precision heating. By heating the sidewalls of housing 21 with the semiconductor heating element, the gas within superheater 2 can be heated in a short period of time, enabling accurate temperature control within superheater 2. Furthermore, semiconductor heating elements have no moving parts and are highly reliable.

[0034] Optionally, the heating module 22 is heated by electromagnetic heating, and the electromagnetic coil can be wound around the side wall of the housing 21. The gas in the superheating device 2 is heated by electromagnetic heating, which has accurate temperature control, safety and reliability, fast heating speed, and high efficiency and energy saving.

[0035] In some embodiments, the chiller further includes a first solenoid valve 41 . The first solenoid valve 41 is connected to the heating module 22 and the first one-way valve 31 , and is configured to controllably conduct the refrigerant compression chamber 11 and the superheating device 2 .

[0036] One end of the first solenoid valve 41 is connected to the first one-way valve 31, and the other end of the first solenoid valve 41 is connected to the heating module 22. In this way, the first solenoid valve 41 can be controlled to open the passage between the refrigerant compression chamber 11 and the superheating device 2, allowing a portion of the gas discharged from the refrigerant compression chamber 11 to pass through the superheating device 2 and enter the air bearing 12, thereby supplying air to the air bearing 12; alternatively, the first solenoid valve 41 can be controlled to close the passage between the refrigerant compression chamber 11 and the superheating device 2.

[0037] Optionally, a first filter is provided between the first solenoid valve 41 and the first one-way valve 31. This prevents impurities from entering the air bearing 12 through the overheating device 2, ensuring the proper functioning of the air bearing 12. Optionally, a third one-way valve is provided before the first filter. This prevents backflow of the air passing through the first solenoid valve 41.

[0038] The passage through which the high-temperature and high-pressure gas discharged from the centrifugal compressor 1 provides gas to the air bearing 12 via the first one-way valve 31 and the first solenoid valve 41 is called the first gas supply pipeline.

[0039] In some embodiments, the chiller further includes a first heat exchanger 5 and a gas compression device 6. The first heat exchanger 5 is connected to the exhaust port of the refrigerant compression chamber 11 via a first one-way valve 31. The gas compression device 6 has an air inlet connected to the gas outlet of the first heat exchanger 5 and an air outlet connected to the inlet of the superheating device 2. The gas compression device 6 is configured to compress the gas discharged from the first heat exchanger 5 to provide gas for the superheating device 2.

[0040] The first heat exchanger 5 is connected to the exhaust port of the refrigerant compression chamber 11 through the first one-way valve 31. In this way, part of the gas discharged from the refrigerant compression chamber 11 flows into the superheating device through the first solenoid valve 41, and the other part of the gas flows into the first heat exchanger.

[0041] The air inlet of the gas compression device 6 is connected to the gas outlet end of the first heat exchanger 5, so that the gaseous part of the refrigerant entering the first heat exchanger 5 can be led out to the gas compression device 6; the air outlet of the gas compression device 6 is connected to the inlet end of the superheating device 2, so that the gaseous refrigerant led out of the first heat exchanger 5 can be compressed and discharged to the superheating device 2, and after heating or pressure stabilization by the heat device 2, superheated gas or saturated gas is provided to the air floating bearing 12.

[0042] The passage through which the high-temperature and high-pressure gas discharged from the centrifugal compressor 1 passes through the first heat exchanger 5 and the gas compression device 6 to provide gas to the air bearing 12 is called the second gas supply pipeline.

[0043] In some embodiments, the chiller further comprises a second solenoid valve 42. The second solenoid valve 42 connects the gas inlet of the gas compression device and the gas outlet of the first heat exchanger, and is configured to controllably conduct the first heat exchanger 5 and the superheating device 2.

[0044] One end of the second solenoid valve 42 is connected to the air inlet of the gas compression device 6, and the other end of the second solenoid valve 42 is connected to the gas outlet of the first heat exchanger 5. In this way, the second solenoid valve 42 can be controlled to open the passage between the first heat exchanger 5 and the superheater 2, allowing some of the gaseous refrigerant in the first heat exchanger 5 to be drawn into the gas compression device 6 for compression before entering the superheater 2 to supply air to the air bearing 12. Alternatively, the second solenoid valve 42 can be controlled to close the passage between the first heat exchanger 5 and the superheater 2.

[0045] Optionally, a second filter is provided between the second solenoid valve 42 and the gas compression device 6. This prevents impurities from entering the gas, ensuring the proper functioning of the air bearing 12. Optionally, a fourth one-way valve is provided before the second filter. This prevents backflow of gas through the second solenoid valve 42, which could cause unit failure.

[0046] In some embodiments, the chiller further includes a control device connected to the first solenoid valve 41 and / or the second solenoid valve 42 and configured to control the opening of the first solenoid valve 41 and / or the second solenoid valve 42 .

[0047] The control device is connected to the first solenoid valve 41 and / or the second solenoid valve 42 and is capable of controlling the opening of the first solenoid valve 41 and / or the second solenoid valve 42, thereby controlling the gas flow through the first solenoid valve 41 and / or the second solenoid valve 42, that is, controlling the flow in the first air supply pipeline and / or the second air supply pipeline of the air bearing 12. Optionally, the control device can control the opening or closing of the first solenoid valve 41 and / or the second solenoid valve 42, thereby controlling the opening or closing of the first air supply pipeline and / or the second air supply pipeline of the air bearing 12.

[0048] In some embodiments, the chiller further includes a first sensor 71 and a first flow meter 72. The first sensor 71 is disposed at the inlet of the superheating device 2 and connected to the control device, and is configured to detect the pressure and / or temperature of the gas entering the superheating device 2; and / or the first flow meter 72 is disposed at the inlet of the superheating device 2 and connected to the control device, and is configured to detect the flow rate of the gas entering the superheating device 2.

[0049] A first sensor 71 and a first flowmeter 72 connected to the control device are provided at the inlet of the superheating device 2. The first sensor 71 detects the pressure and / or temperature of the gas entering the superheating device 2. When the pressure detected by the first sensor 71 is lower than the preset gas supply pressure of the air bearing 12, and / or when the temperature detected by the first sensor 71 is lower than the preset gas supply temperature of the air bearing 12, the control device controls the heating module 22 to start heating, so that the gas entering the superheating device 2 reaches a saturated gas state or a superheated gas state. When the pressure detected by the first sensor 71 is greater than or equal to the preset gas supply pressure of the air bearing 12, and / or when the temperature detected by the first sensor 71 is greater than or equal to the preset gas supply temperature of the air bearing 12, the heating module is not turned on.

[0050] The first flowmeter 72 detects the flow rate of gas entering the superheating device 2. When the flow signal detected by the first flowmeter 72 fluctuates significantly, the control device controls the opening of the first solenoid valve 41 and / or the second solenoid valve 42, thereby adjusting the flow rate in the first air supply line and / or the second air supply line of the air bearing 12.

[0051] In some embodiments, the chiller further includes a second sensor 73 and a second flow meter 74. The second sensor 73 is disposed at the outlet of the superheating device 2 and connected to the control device, and is configured to detect the pressure and / or temperature of the gas flowing out of the superheating device 2; and / or the second flow meter 74 is disposed at the outlet of the superheating device 2 and connected to the control device, and is configured to detect the flow rate of the gas flowing out of the superheating device 2.

[0052] A second sensor 73 and a second flowmeter 74 connected to the control device are provided at the outlet of the superheating device 2. The second sensor 73 detects the pressure and / or temperature of the gas flowing out of the superheating device 2. When the pressure detected by the second sensor 73 is lower than the preset gas supply pressure of the air bearing 12, and / or when the temperature detected by the second sensor 73 is lower than the preset gas supply temperature of the air bearing 12, the control device controls the heating module 22 to start heating so that the gas entering the superheating device 2 reaches a saturated gas state or a superheated gas state. When the pressure detected by the second sensor 73 is greater than or equal to the preset gas supply pressure of the air bearing 12, and / or when the temperature detected by the second sensor 73 is greater than or equal to the preset gas supply temperature of the air bearing 12, the heating module is not turned on.

[0053] The second flowmeter 74 detects the flow rate of gas entering the superheating device 2. When the flow rate signal detected by the second flowmeter 74 fluctuates significantly, or when the flow rate signal detected by the second flowmeter 74 is less than the preset air supply flow rate of the air bearing 12, the control device controls the opening of the first solenoid valve 41 and / or the second solenoid valve 42, thereby adjusting the flow rate of the first air supply pipeline and / or the second air supply pipeline of the air bearing 12.

[0054] In some embodiments, the chiller further comprises a third solenoid valve 43. The third solenoid valve 43 is connected to the outlet of the superheating device 2 and the air supply port of the air bearing 12, is connected to the control device, and is configured to controllably conduct air between the superheating device 2 and the air bearing 12.

[0055] One end of the third solenoid valve 43 is connected to the outlet of the superheating device 2, and the other end is connected to the air supply port of the air bearing 12. The third solenoid valve 43 is also connected to a control device. Under the control of the control device, the third solenoid valve 43 can direct the flow between the superheating device 2 and the air bearing 12. Optionally, when the flow rate detected by the second flowmeter 74 exceeds the preset air supply flow rate for the air bearing 12, the control device controls the opening of the third solenoid valve 43. In this way, the air supply flow rate for the air bearing 12 can be adjusted.

[0056] In some embodiments, the chiller further comprises a second one-way valve 32. The second one-way valve 32 is disposed at the inlet end of the superheating device 2.

[0057] A second one-way valve 32 is provided at the inlet end of the superheating device 2. This can prevent the gas entering the superheating device 2 from flowing back and causing unit failure.

[0058] Optionally, the chiller further includes a throttling device, which is arranged between the first heat exchanger 5 and the second heat exchanger to ensure the circulation of the refrigerant in the refrigeration system.

[0059] Optionally, a second filter is provided before the throttling device.

[0060] Optionally, the second heat exchanger and centrifugal compressor 1 are connected via a fourth solenoid valve, which is connected to the control device. In this way, the fourth solenoid valve can be controlled to open the passage between the second heat exchanger and centrifugal compressor 1; or the opening of the fourth solenoid valve can be controlled to adjust the refrigerant flow between the second heat exchanger and centrifugal compressor 1.

[0061] Optionally, when the chiller is turned on, the first air supply line of the air bearing 12 is closed and the second air supply line of the air bearing 12 is opened. That is, when the chiller is turned on, the system operation is unstable. At this time, the first solenoid valve 41 is closed and the second solenoid valve 42 is opened. The gas compression device 6 compresses part of the gas drawn from the first heat exchanger 5 and then transmits the gas to the superheating device 2 for heating, thereby reducing droplets in the gas and allowing the gas to reach a preset gas supply pressure or gas supply temperature, or stabilizing the gas pressure in the superheating device 2. This provides stable saturated gas or superheated gas to the air bearing 12, thereby ensuring the stability of the operation of the centrifugal compressor 1.

[0062] Optionally, after the chiller is operating stably, the first air supply line to the air bearing 12 is closed, and the second air supply line to the air bearing 12 is closed. That is, after the chiller system is operating stably, the first solenoid valve 41 is opened, and the second solenoid valve 42 is closed, so that a portion of the gas discharged from the refrigerant compression chamber 11 is directed through the first solenoid valve 41 to the superheating device 2 for heating, thereby reducing the amount of liquid droplets in the gas. When the first sensor 71 detects that the gas pressure and / or temperature is lower than a preset value for the air supply to the air bearing 12, and / or when the second sensor 73 detects that the gas pressure and / or temperature is lower than a preset value for the air supply to the air bearing 12, the control device controls the heating module to turn on, thereby increasing the gas pressure and / or temperature by heating. Furthermore, the control device determines whether to turn the heating module on or off based on the pressure and / or temperature signals detected in real time by the first sensor 71 and / or the second sensor 73. When the first sensor 71 and / or the second sensor 73 detects that the gas pressure is higher than the preset value for the air supply to the air bearing 12, the heating module is not turned on. In this way, when the system is running stably, the first air supply pipeline of the air bearing 12 is opened to supply air to the air bearing, thereby reducing the power consumption of the gas compression device 6 and the energy consumption of the chiller.

[0063] Optionally, after the chiller is running stably, the first air supply pipeline of the air-floating bearing 12 supplies air. When the flow signal detected by the first flow meter 72 and / or the second flow meter 74 cannot meet the air supply flow of the air-floating bearing 12, the control device can control the opening of the first solenoid valve 41 to change the flow of the first air supply pipeline; or, the control device controls the second solenoid valve 42 to open to open the second air supply pipeline of the air-floating bearing 12, and adjusts the opening of the second solenoid valve 42 and the third solenoid valve 43 to adjust the flow of the second air supply pipeline to ensure the air supply of the air-floating bearing 12.

[0064] Optionally, the control device adjusts the opening and closing of the superheating device 2 or the opening of the first solenoid valve 41, the second solenoid valve 42, and the third solenoid valve 43 based on the real-time detection data of the first sensor 71, the first flowmeter 72, and / or the second sensor 73, the second flowmeter. This can make the operation of the centrifugal compressor 1 more stable and the chiller more efficient and energy-saving.

[0065] Figure 2 Schematic diagram of another chiller provided by the embodiment of the present disclosure. Figure 2 As shown, optionally, the gas compression device 6 is replaced by a gas heating device, which can also achieve the effects achieved in the above embodiments.

[0066] The above description and the accompanying drawings sufficiently illustrate the embodiments of the present disclosure to enable those skilled in the art to practice them. Other embodiments may include structural and other changes. The embodiments represent only possible variations. Unless expressly required, individual components and functions are optional, and the order of operations may vary. Portions and features of some embodiments may be included in or replace portions and features of other embodiments. The embodiments of the present disclosure are not limited to the structures described above and shown in the accompanying drawings, and various modifications and changes may be made without departing from the scope thereof. The scope of the present disclosure is limited only by the appended claims.

Claims

1. A chiller, characterized in that: include: A centrifugal compressor including a refrigerant compression chamber and an air bearing; a superheating device, the inlet end of which is connected to the exhaust port of the refrigerant compression chamber through a first one-way valve, the outlet end of which is connected to the air supply port of the air bearing, and is configured to provide saturated gas or superheated gas to the air bearing; The superheating device comprises: a shell; and a heating module disposed inside or on a side wall of the shell and configured to heat the gas in the superheating device; a first heat exchanger connected to the exhaust port of the refrigerant compression chamber via a first one-way valve; A gas compression device, whose air inlet is connected to the gas outlet end of the first heat exchanger and whose air outlet is connected to the inlet end of the superheating device, is configured to compress the exhaust gas of the first heat exchanger to provide gas for the superheating device.

2. The chiller according to claim 1, characterized in that: Also includes: a first solenoid valve, connected to the heating module and the first one-way valve, and configured to controllably conduct electricity between the refrigerant compression chamber and the superheating device; Wherein, a first filter is provided between the first solenoid valve and the first one-way valve.

3. The chiller according to claim 1, characterized in that: Also includes: The second solenoid valve is connected to the gas inlet of the gas compression device and the gas outlet of the first heat exchanger, and is configured to controllably conduct the first heat exchanger and the superheating device.

4. The chiller according to claim 3, characterized in that: Also includes: The control device is connected to the first solenoid valve and / or the second solenoid valve and is configured to control the opening of the first solenoid valve and / or the second solenoid valve.

5. The chiller according to claim 4, characterized in that: Also includes: a first sensor, disposed at an inlet end of the superheating device and connected to the control device, configured to detect the pressure and / or temperature of the gas entering the superheating device; and / or, The first flow meter is provided at the inlet end of the superheating device and connected to the control device, and is configured to detect the flow rate of the gas entering the superheating device.

6. The chiller according to claim 5, characterized in that: Also includes: a second sensor, disposed at an outlet end of the superheating device and connected to the control device, configured to detect the pressure and / or temperature of the gas flowing out of the superheating device; and / or, A second flow meter is provided at the outlet end of the superheating device and connected to the control device, and is configured to detect the flow rate of the gas flowing out of the superheating device.

7. The chiller according to claim 6, characterized in that: Also includes: The third solenoid valve is connected to the outlet of the overheating device and the air supply port of the air bearing, is connected to the control device, and is configured to controllably conduct the overheating device and the air bearing.

8. The chiller according to claim 7, characterized in that: Also includes: The second one-way valve is arranged at the inlet end of the superheating device.

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