Article transport apparatus

Abstract

An article conveying apparatus is provided. A first vehicle is provided with a support rail that supports a main body portion, and is configured to be movable along a first path together with a second vehicle that is provided with the main body portion, in a state in which the main body portion is supported by the support rail. In a state in which the first vehicle is positioned at a connection portion of the first path that is connected to a second path, the support rail is disposed on an extension line of a movement rail.

Description

TECHNICAL FIELD

[0001] The present application relates to an article transport apparatus provided with a first vehicle that moves along a first path formed along a ceiling and a second vehicle that moves along a second path. BACKGROUND

[0002] One example of the above-described article transport apparatus is disclosed in International Publication No. 2015 / 174181 (Patent Document 1). Hereinafter, in the description of the background art and problems, the reference numerals shown in brackets are those of Patent Document 1. The transport system (2) disclosed in Patent Document 1 as an article transport apparatus is provided with a ceiling traveling vehicle (4) that travels along a traveling track (6) supported from a ceiling (25) side and a local vehicle (16) that travels along a local track (20). A buffer area (22) is provided along the local track (20), and the local vehicle (16) transports an article (10) between a loading port (14) and the buffer area (22). The local vehicle (16) lifts and lowers a lifting table (52) that holds the article (10) by means of a lifting winch (50), and carries the article (10) relative to the loading port (14) and the buffer area (22). Further, the ceiling traveling vehicle (4) lifts and lowers a lifting table (8) by means of a lifting winch, and carries the article (10) relative to the loading port (14) and the buffer area (22). SUMMARY

[0003] Incidentally, in the above-described article transport apparatus, depending on the place of the transport source and the transport target of the article, there are cases where it is necessary to transport the article along both the first path and the second path. Further, in order to suppress the length of the transport path of the article to be short, there are cases where it is desirable to transport the article along both the first path and the second path. For example, in the transport system (2) of Patent Document 1, in the case where the article (10) held by the ceiling traveling vehicle (4) is unloaded to the buffer area (22) disposed at a place where only the local vehicle (16) can access, it is necessary to transport the article (10) along both the traveling track (6) as the first path and the local track (20) as the second path. In this case, in the transport system (2) of Patent Document 1, in order to transfer the article (10) from the ceiling traveling vehicle (4) to the local vehicle (16), it is necessary to temporarily place the article (10) in the buffer area (22) or the like that is accessible to both the ceiling traveling vehicle (4) and the local vehicle (16), and the time required for the transport of the article (10) tends to be long.

[0004] Therefore, it is desirable to realize an article transport apparatus that can shorten the time required for the transport of the article in the case where the article is transported along both the first path and the second path.

[0005] The article conveying apparatus according to the present disclosure includes a first vehicle that moves along a first path formed along a ceiling, a second vehicle that moves along a second path connected to the first path at one end or both ends in a plan view, and a moving rail provided along the second path. The second vehicle includes a main body that moves along the moving rail, a holding portion that holds an article, and a lifting mechanism that lifts the holding portion with respect to the main body, and is configured to lower the holding portion to a height corresponding to a transfer target portion provided below the second path in a case where the article is transferred between the transfer target portion and the holding portion. The first vehicle includes a support rail that supports the main body, and is configured to move along the first path together with the second vehicle having the main body in a state where the main body is supported by the support rail. The support rail is disposed on an extension line of the moving rail in a state where the first vehicle is positioned at a connection portion of the first path connected to the second path.

[0006] In the present configuration, the first vehicle is configured to move along the first path together with the second vehicle in a state where the main body of the second vehicle is supported by the support rail. Therefore, by moving the first vehicle in the supported state along the first path, it is possible to convey the article held by the holding portion of the second vehicle supported by the first vehicle along the first path. In addition, in the present configuration, by moving the second vehicle along the second path, it is possible to convey the article held by the holding portion of the second vehicle along the second path.

[0007] Furthermore, in the present configuration, in a state where the first vehicle is positioned at a connection portion of the first path connected to the second path, the support rail that supports the main body of the second vehicle is disposed on an extension line of the moving rail provided along the second path and along which the main body of the second vehicle moves. Therefore, in this state, it is possible to move the main body of the second vehicle between the support rail and the moving rail. Thus, by disposing the first vehicle at the connection portion, it is possible to separate the second vehicle in a state where the article is held by the holding portion from the first vehicle in the state as it is and enter the second vehicle into the second path and exit the second vehicle from the second path and mount the second vehicle to the first vehicle. Thus, it is possible to quickly convey the article between the first path and the second path at the connection portion, and as a result, in a case where the article is conveyed along both the first path and the second path, it is possible to shorten the time required for conveying the article.

[0008] Further features and advantages of the article conveying apparatus will become apparent from the following description of the embodiments with reference to the drawings. BRIEF DESCRIPTION OF DRAWINGS

[0009] Figure 1is a plan view of a part of an article transport apparatus.

[0010] Figure 2 is an explanatory view of transfer processing of an article at a connection.

[0011] Figure 3 is an explanatory view of transfer processing of an article in a second path.

[0012] Figure 4 is an explanatory view of transfer processing of an article in a second path.

[0013] Figure 5 is an explanatory view of transfer processing of an article in a second path.

[0014] Figure 6 is a view that represents a scenario in which a second vehicle moves from one of two second paths that are not connected to each other to the other at a connection in a time series.

[0015] Figure 7 is a view that represents a scenario in which a second vehicle moves from one of two second paths that are not connected to each other to the other at a connection in a time series.

[0016] Figure 8 is a control block diagram. DETAILED DESCRIPTION

[0017] Embodiments of an article transport apparatus are described with reference to the drawings.

[0018] As shown in Figure 1 , an article transport apparatus 100 is provided with a first vehicle 10 that moves along a first path P1 and a second vehicle 20 that moves along a second path P2. In Figure 1 , the second path P2 is represented by a thinner solid line than the first path P1. The second path P2 is connected to the first path P1 at one end or both ends in plan view (a direction observed along an up-down direction Z). In the present embodiment, a plurality of second paths P2 are formed, and at least a part of the second paths P2 are connected to the first path P1 at both ends in plan view. In the example shown in Figure 1 , all of the second paths P2 are connected to the first path P1 at both ends in plan view. In addition, in Figure 1 , in order to easily distinguish the first path P1 and the second path P2, the end of the second path P2 is represented as being away from the first path P1. It is also possible to have a structure in which the second path P2 that is connected to the first path P1 at both ends in plan view and the second path P2 that is connected to the first path P1 at one end in plan view are mixed, or a structure in which all of the second paths P2 are connected to the first path P1 at one end in plan view.

[0019] Two horizontal directions orthogonal to each other are set as a first horizontal direction X and a second horizontal direction Y, and a direction along the up-down direction Z is set as a vertical direction Z.Figure 1 In the example shown, the first path P1 includes a first portion P1a formed in top view along a first horizontal direction X and a second portion P1b formed in top view along a second horizontal direction Y. Multiple second portions P1b are arranged in the first horizontal direction X, each second portion P1b connecting the first portion P1a located on one side of the second horizontal direction Y with the first portion P1a located on the other side of the second horizontal direction Y. That is, the second portions P1b form paths that branch from one first portion P1a and merge with the first portion P1a on the other side.

[0020] exist Figure 1 In the example shown, the second path P2 is formed extending along the first horizontal direction X. Furthermore, the second path P2 connects two adjacent second portions P1b in the first horizontal direction X. That is, one side of the first horizontal direction X is designated as the first side X1, and the other side as the second side X2. The end of the first side X1 of the second path P2 connects to the second portion P1b of the two adjacent second portions P1b in the first horizontal direction X, which is configured on the first side X1; the end of the second side X2 of the second path P2 connects to the second portion P1b of the two adjacent second portions P1b, which is configured on the second side X2. Multiple second paths P2 are arranged in the second horizontal direction Y between two adjacent second portions P1b along the first horizontal direction X. Additionally, Figure 1 The layout of path P1 and path P2 shown is an example, and the layout of path P1 and path P2 can be changed appropriately.

[0021] like Figure 2 and Figure 3 As shown, the first path P1 is formed along the ceiling 1. Specifically, the first path P1 is formed by a first moving track R1 that is suspended and supported from the ceiling 1. That is, the article conveying device 100 includes a first moving track R1 arranged along the first path P1. Figure 1 The first moving track R1 is simplified in this embodiment, but in this embodiment, a pair of first moving tracks R1 (see reference) are provided along the first path P1 and are arranged apart in the horizontal direction. Figure 2 and Figure 3 Additionally, the horizontal direction here refers to the width direction of the first path P1, in other words, it is the direction orthogonal to both the length direction of the first path P1 (the direction in which the first path P1 extends) and the vertical direction Z.

[0022] like Figure 2 and Figure 3As shown, the second path P2 is formed along the ceiling 1. Specifically, the second path P2 is formed by a second moving track R2 that is suspended and supported from the ceiling 1. That is, the article conveying device 100 includes a second moving track R2 arranged along the second path P2. Figure 1 The second moving track R2 is simplified in this embodiment, but in this embodiment, a pair of second moving tracks R2 are arranged horizontally away from each other along the second path P2 (see reference). Figure 7 (d) Furthermore, the horizontal direction here refers to the width direction of the second path P2; in other words, it is the direction orthogonal to both the length direction of the second path P2 (the direction in which the second path P2 extends) and the vertical direction Z. In this embodiment, the second moving track R2 is equivalent to a "moving track".

[0023] like Figure 1 As shown, in this embodiment, the article conveying device 100 includes a plurality of first carriages 10 and a plurality of second carriages 20. As will be described later, in order for a second carriage 20 located on a second path P2 to exit from the second path P2, a first carriage 10 needs to be arranged in a connecting portion CP in the first path P1 that connects to the second path P2. Therefore, from the viewpoint of improving the conveying efficiency of the article W, it is preferable to make the article conveying device 100 have a structure with a plurality of first carriages 10, for example, it is preferable to make the article conveying device 100 have a number of first carriages 10 or more of the number of connecting portions CP in the first path P1 that connect to the second path P2. Furthermore, from the viewpoint of improving the conveying efficiency of the article W, it is preferable to make the article conveying device 100 have a structure with a plurality of second carriages 20, for example, it is preferable to make the article conveying device 100 have a number of second carriages 20 or more of the number of first carriages 10.

[0024] As in Figure 1 As illustrated in the example below, in this embodiment, the first movement direction M1 is set to unidirectional, and the second movement direction M2 is set to bidirectional. Here, the first movement direction M1 is the movement direction of the first vehicle 10 on the first path P1, and the second movement direction M2 is the movement direction of the second vehicle 20 on the second path P2. Figure 1 In the example shown, the first movement direction M1 of each of the two adjacent second parts P1b in the first horizontal direction X is set in such a way that the first movement directions M1 of the two second parts P1b are opposite to each other.

[0025] like Figure 1As shown, in this embodiment, a retraction track R3 is connected to the second moving track R2, which is used to allow the second vehicle 20 to retreat from the second path P2 (specifically, the second path P2 on which the second moving track R2 is located). The retraction track R3 is connected to the second moving track R2 in a manner that allows the second vehicle 20 to move (travel) between the second moving track R2 and the retraction track R3. By moving the second vehicle 20, located on the second path P2, from the second moving track R2 to the retraction track R3, the second vehicle 20 can retreat from the second path P2 without using the first vehicle 10. Figure 1 In order to avoid becoming complicated, it is set to a configuration in which the retreat track R3 is set only in one second path P2. However, the retreat track R3 can also be set in multiple second paths P2 (e.g., all second paths P2), or the retreat track R3 can be set only in second paths P2 that meet specific conditions (e.g., only in second paths P2 with a path length of more than a set length).

[0026] exist Figure 1 In the example shown, the retraction track R3 is connected to the second moving track R2 at one end in top view, and the second car 20 moves bidirectionally along the retraction track R3. Furthermore, in Figure 1 In the example shown, there are two tracks: a first retraction track R3a, used to retract a second vehicle 20 moving towards one side (here, the first side X1) on the second path P2; and a second retraction track R3b, used to retract a second vehicle 20 moving towards the other side (here, the second side X2) on the second path P2. Therefore, for example, when two second vehicles 20 are moving towards each other on the same second path P2, the second vehicle 20 that retracts from the second path P2 can be selected considering the overall transport efficiency of the item W, thus easily improving the transport efficiency of the item W.

[0027] Next, the structure of the first vehicle 10 and the second vehicle 20 will be described. For example... Figure 2 and Figure 3 As shown, the second vehicle 20 includes: a second main body 21 that moves along a second moving track R2 (here, there is a pair of second moving tracks R2); a holding part 24 that holds the article W; and a lifting mechanism 25 that raises and lowers the holding part 24 relative to the second main body 21. The second main body 21 includes a second traveling wheel 22 that rolls on the second moving track R2 (specifically, on the running surface of the second moving track R2). The second main body 21 moves along the second moving track R2 by being driven by a driving force source (not shown) such as a motor. In this embodiment, the second main body 21 is equivalent to the "main body".

[0028] In this embodiment, the holding part 24 holds the article W from the upper side Z1 (the upper side in the vertical direction Z). Here, the article W is a container for holding a semiconductor wafer, specifically a FOUP (Front Opening Unified Pod). The holding part 24 holds the article W by gripping the flange formed on the upper part of the article W. By means of a driving force source such as a motor (not shown), the state of the holding part 24 is switched between a holding state of holding the article W and a holding-release state of releasing the holding of the article W.

[0029] The lifting mechanism 25 raises and lowers the holding part 24 between a moving height (the height at which the second main body 21 moves) and a transfer height (the height at which the item W is transferred relative to the transfer target part 2). Specifically, the holding part 24 is supported by the lifting body 23, and the lifting mechanism 25 raises and lowers the holding part 24 supported by the lifting body 23 by raising and lowering the lifting body 23. The transfer height is set according to the height of each transfer target part 2. Figure 2 In the diagram, the holding part 24 at the moving height is indicated by a double-dotted line, and the holding part 24 at the transfer height corresponding to the port 41, which is the transfer target part 2, is indicated by a solid line. Port 41 is the processing device 40 (refer to) that processes the article W. Figure 1 The part (loading port, etc.) in which the item W is transported in and out. Figure 3 to 5 In the middle, it indicates the holding part 24 located at the moving height. The second vehicle 20 is configured such that when the item W is being transferred between the transfer object part 2, which is positioned below the second path P2, and the holding part 24, the lifting mechanism 25 lowers the holding part 24 to a height corresponding to the transfer object part 2 (transfer height).

[0030] In this embodiment, the lifting mechanism 25 raises and lowers the lifting body 23 while suspending and supporting it. Specifically, as... Figure 2 As shown, the lifting body 23 is connected to the front end of the transmission component 26, such as a belt or wire. Although not shown in the figure, the lifting mechanism 25 rotates the winding body wrapped around the transmission component 26 by means of a driving force source such as a motor, thereby winding or pulling out the transmission component 26 and causing the lifting body 23 to rise or fall.

[0031] In this embodiment, the second carriage 20 includes a rotation mechanism 27 that rotates the holding portion 24 relative to the second main body 21 about an axis in the vertical direction Z. The rotation mechanism 27 is configured, for example, to rotate the holding portion 24 relative to the lifting body 23 about an axis in the vertical direction Z, or to rotate the lifting body 23 supporting the holding portion 24 relative to the second main body 21 about an axis in the vertical direction Z. By providing the rotation mechanism 27 on the second carriage 20, the article W held by the holding portion 24 can be rotated to match the posture of the article W at the transfer object part 2.

[0032] In this embodiment, the second carriage 20 does not have a moving mechanism that moves the holding part 24 relative to the second main body 21 in the path width direction (the width direction of the second path P2). However, it is also possible to construct a structure in which such a moving mechanism (e.g., a mechanism that moves the lifting body 23 supporting the holding part 24 in the path width direction) is provided on the second carriage 20. By providing a moving mechanism on the second carriage 20, even if the object to be transferred is positioned at a position offset from the second path P2 in the path width direction when viewed from above, the article W can be transferred between the object to be transferred 2 and the holding part 24.

[0033] like Figure 2 and Figure 3 As shown, the first carriage 10 includes a first main body 11 that moves along a first moving track R1 (here, a pair of first moving tracks R1) and a carriage support 13 that supports the second carriage 20. The first main body 11 includes a first traveling wheel 12 that rolls on the first moving track R1 (specifically, on the running surface of the first moving track R1). The first main body 11 moves along the first moving track R1 by driving the first traveling wheel 12 with a driving force source (not shown) such as a motor.

[0034] The trolley support 13 is connected to the first main body 11 and moves along the first path P1 together with the first main body 11. In this embodiment, the trolley support 13 is suspended and supported by the first main body 11 in a state where it is positioned lower than the first moving track R1 by a Z2 (lower side in the vertical direction Z). In this embodiment, the trolley support 13 forms a storage space for storing the second trolley 20. This storage space is formed such that the second trolley 20 covers both sides of the first path P1 in the length direction and has openings on both sides of the first path P1 in the width direction.

[0035] The first carriage 10 (specifically, the carriage support 13) includes a support rail 14 for supporting the second main body 21. The support rail 14 has a running surface on which the second traveling wheel 22 can roll (for example, a running surface with the same shape as the running surface of the second moving track R2). The support rail 14 supports the second main body 21 from below Z2 when the second traveling wheel 22 is placed on the running surface of the support rail 14. The first carriage 10 is configured such that, in the supported state where the second main body 21 is supported by the support rail 14, it can move along the first path P1 together with the second carriage 20, which includes the second main body 21.

[0036] like Figure 2 and Figure 3 As shown, when the first carriage 10 is located at the connecting part CP, the support rail 14 is arranged on the extension line of the second moving rail R2. Therefore, when the first carriage 10 is located at the connecting part CP, the second carriage 20 can move (reciprocate) between the second moving rail R2 and the support rail 14. The support rail 14 is formed in a straight line and is arranged to extend along the width direction of the first path P1. Moreover, when the first carriage 10 is located at the connecting part CP, the support rail 14 is arranged on a line that extends the second moving rail R2 towards the first carriage 10 side in the width direction of the first path P1. In this embodiment, since a pair of second moving rails R2 arranged horizontally away from each other along the second path P2 are provided, the first carriage 10 has a pair of support rails 14 arranged horizontally away from each other in the length direction of the first path P1. Furthermore, when the first car 10 is in the connecting part CP, each of the pair of support rails 14 is arranged on the extension line of the corresponding second moving rail R2.

[0037] With the first carriage 10 in the connecting section CP, the second carriage 20 moves from the second moving track R2 to the support track 14, and the second carriage 20 is mounted on the first carriage 10 (specifically, the second carriage 20 is stored in the carriage support section 13). The second carriage 20 is stored in the carriage support section 13 with the second main body 21 supported by the support track 14. In this embodiment, as... Figure 2 As shown, the trolley support 13 includes a limiting body 15, which restricts the movement of the second main body 21, which is supported by the support rail 14, along the support rail 14. The limiting body 15 is provided on both sides in the width direction of the first path P1, and is configured to switch between a restricting posture that restricts the movement of the second main body 21 and a permissive posture that allows the movement of the second main body 21. Figure 2 and Figure 3 In this context, it indicates that the restrictor bodies 15 on both sides of the width direction of the first path P1 are switched to a restricted posture state. On the other hand, inFigure 4 and Figure 5 In this context, it indicates that the restrictor 15, which passes through the width direction of the first path P1 (here, the first side X1), is switched to an allowable posture, and the second vehicle 20 mounted on the first vehicle 10 can move from the support track 14 to the second moving track R2.

[0038] Alternatively, the first carriage 10 can be configured with a track moving mechanism that allows the support track 14 to move in the width direction of the first path P1. In this case, when the second carriage 20 moves between the second moving track R2 and the support track 14, the support track 14 can be moved to reduce the gap between the second moving track R2 (the moving source or target of the second carriage 20) and the support track 14, making it easier for the second carriage 20 to move smoothly.

[0039] like Figure 8 As shown, the goods conveying equipment 100 includes a control unit 30 that controls the first vehicle 10 and the second vehicle 20. The control unit 30 includes a processing unit such as a CPU and peripheral circuits such as a memory. Through the cooperation of these hardware components and the program executed on the processing unit and other hardware, the various functions of the control unit 30 are realized.

[0040] The first vehicle 10 is equipped with a first vehicle control unit 31 (equipment controller) that controls the operation of the first vehicle 10 according to instructions from the control unit 30, and the second vehicle 20 is equipped with a second vehicle control unit 32 (equipment controller) that controls the operation of the second vehicle 20 according to instructions from the control unit 30. The first vehicle control unit 31 controls the operation of the first vehicle 10, for example, by controlling the drive of various motors based on detection information from various sensors, and the second vehicle control unit 32 controls the operation of the second vehicle 20, for example, by controlling the drive of various motors based on detection information from various sensors. The control unit 30 controls the first vehicle 10 via the first vehicle control unit 31 and controls the second vehicle 20 via the second vehicle control unit 32.

[0041] The operation of the first vehicle 10 controlled by the first vehicle control unit 31 includes the movement of the first main body 11. In this embodiment, it also includes the posture change of the restraint body 15. As described above, the first movement direction M1 is set to unidirectional in this embodiment, so the first vehicle control unit 31 controls the movement of the first main body 11 to move the first vehicle 10 in a specific direction along the first path P1. The operation of the second vehicle 20 controlled by the second vehicle control unit 32 includes the movement of the second main body 21, the state switching of the holding part 24, and the lifting and lowering of the holding part 24 by the lifting mechanism 25. In this embodiment, it also includes the rotation of the holding part 24 by the rotating mechanism 27. As described above, the second movement direction M2 is set to bidirectional in this embodiment, so the second vehicle control unit 32 controls the movement of the second main body 21 to move the second vehicle 20 in any direction along the second path P2.

[0042] The control unit 30 moves the second carriage 20 to a position corresponding to the transfer target location 2. Then, while the second carriage 20 is stopped at that position, the control unit 30 sequentially performs a descent operation of the holding unit 24 to the transfer height, a state switching operation of the holding unit 24, and a movement operation of the holding unit 24, thereby transferring the item W between the transfer target location 2 and the holding unit 24. Furthermore, when transferring the item W from the holding unit 24 to the transfer target location 2, the item W held by the holding unit 24 is unloaded from the transfer target location 2 by switching the state of the holding unit 24 from the holding state to the holding release state. Conversely, when transferring the item W from the transfer target location 2 to the holding unit 24, the item W placed in the transfer target location 2 is removed from the transfer target location 2 by switching the state of the holding unit 24 from the holding release state to the holding state.

[0043] As described above, the transfer of the article W between the transfer target part 2 and the holding part 24 is performed with the second vehicle 20 positioned in a position corresponding to the transfer target part 2. In this embodiment, the position corresponding to the transfer target part 2 is the position where the second vehicle 20 overlaps with the transfer target part 2 in a top view. Figure 1 As shown, in this embodiment, the transfer object portion 2 is positioned at a location that overlaps with the first path P1 when viewed from above. Figure 1In the example shown, both the port 41 of the processing device 40 and the storage section 51 of the stored item W are positioned as transfer target sections 2, overlapping with the first path P1 in plan view. When the transfer target section 2, positioned thus overlapping with the first path P1 in plan view, is used as the transfer target (transfer source or transfer destination) of the item W by the second vehicle 20, the second vehicle 20, with its second main body 21 supported by the support rail 14 of the first vehicle 10 positioned in the first path P1 overlapping with the transfer target section 2 in plan view, transfers the item W between the transfer target section 2 and the holding section 24.

[0044] Figure 2 This indicates that port 41, positioned at a location overlapping with path P1 in overhead view, is the transfer target part 2 for the item W to be transferred by vehicle 20. Because... Figure 2 The port 41 shown is the transfer object part 2 located at the position where it overlaps with the connection part CP connecting to the second path P2 in the first path P1 when viewed from above. Therefore, in Figure 2 In the illustrated configuration, with the second main body 21 of the second vehicle 20 supported by the support rail 14 of the first vehicle 10 connected to the CP, the second vehicle 20 transfers the article W between the transfer target portion 2 and the holding portion 24. In this embodiment, the port 41 of the processing device 40 or the holding portion 51 for storing the article W is positioned as the transfer target portion 2, overlapping with the connecting portion CP in plan view. Figure 1 In the example shown, both ports 41 and storage section 51 are positioned as transfer target parts 2, overlapping with the connection section CP in a top view.

[0045] like Figure 1 As shown, the transfer object part 2 is also positioned to overlap with the second path P2 in a top-down view. Figure 1 In the example shown, both the port 41 of the processing device 40 and the storage section 51 of the stored item W are positioned as transfer target sections 2, overlapping with the second path P2 in plan view. When the transfer target section 2, positioned in a location overlapping with the second path P2 in plan view, is used as the transfer target (transfer source or transfer destination) of the item W by the second vehicle 20, the second vehicle 20, positioned in the second path P2 and overlapping with the transfer target section 2 in plan view, transfers the item W between the transfer target section 2 and the holding section 24.

[0046] Figure 3 to 5This indicates that the storage section 51 (specifically, the storage section 51 arranged adjacent to the second path P2 on the lower side Z2 relative to the second path P2) will be used as the transfer target part 2 for the item W to be transferred by the second vehicle 20. Here, this indicates that the second vehicle 20 (referring to the first vehicle 10 arranged in the connecting section CP) will be mounted on the first vehicle 10. Figure 3 The first car 10 moves from its support rail 14 to its second moving rail R2 (see reference). Figure 4 ), and is positioned in the second path P2 at a location that overlaps with storage unit 51 (the storage unit 51 of the object to be transferred from item W) when viewed from above (see reference). Figure 5 The situation of ).

[0047] exist Figure 3 to 5 In the example shown, a storage section 51 is provided in a storage device 50. This storage device 50 includes a support section 52 that supports the article W from below Z2. The support section 52 is configured to arrange and support multiple articles W along the length direction of the second path P2 (here, the first horizontal direction X), and each support portion of the article W in the support section 52 constitutes a storage section 51. Figure 3 to 5 In the example shown, the support 52 is suspended from the second moving track R2. Alternatively, a structure could be constructed in which the support 52 is suspended from the ceiling 1. Furthermore, regarding the storage device 50 positioned at a location overlapping the first path P1 in plan view (see...), Figure 1 Alternatively, it can be configured such that the support portion 52 is suspended and supported by the track R1 for moving from the first position. Furthermore, it can also be configured such that the support portion 52 is supported by a wall or floor.

[0048] When the transfer object part 2, which is the object to be transferred by the second vehicle 20 located on the second path P2, is positioned at a position that overlaps with the second path P2 (which is different from the second path P2) in a top view, or is positioned at a position that overlaps with the first path P1 in a top view, the control unit 30 uses the first vehicle 10 to move the second vehicle 20 to the position corresponding to the transfer object part 2. Figure 6 and Figure 7 Each of these represents an example of a situation where the control unit 30 performs such control.

[0049] exist Figure 6In this embodiment, one of the two second paths P2 interconnected by the connecting section CP is designated as the first object path P2a, and the other as the second object path P2b. The scenario of the second trolley 20 moving from the first object path P2a to the second object path P2b is represented as a time sequence. In this embodiment, the control unit 30 is configured to, when the object trolley 20, which is the second trolley 20 located on the first object path P2a, moves via the connecting section CP to the second object path P2b, control the first trolley 10 (which is not in a supported state, i.e., the first trolley 10 that does not support the second main body 21 with the support rail 14) to be positioned at the connecting section CP when the object trolley arrives at the connecting section CP. Here, "positioned to match the object trolley arriving at the connecting section CP" means positioned within a predetermined period including the time when the object trolley arrives at the connecting section CP. In other words, it means positioned simultaneously with or at the same time as the time when the object trolley arrives at the connecting section CP. From the viewpoint of improving the overall conveying efficiency of the equipment, the specified period is preferably a shorter period. Furthermore, the end of the specified period is preferably set as the time when the object trolley arrives at the connecting part CP.

[0050] Because the control unit 30 performs the control described above, therefore... Figure 6 In the example shown, the second vehicle 20, which is moving along the first object path P2a, arrives at the connecting part CP, and the first vehicle 10, which is not in a supported state, is configured to be connected to the connecting part CP. Figure 6 (a) Here, at a point earlier than the arrival time of the second car 20 at the connecting section CP, the first car 10, which is not in a supported state, is positioned at the connecting section CP. Then, the second main body 21 of the second car 20, which has arrived at the connecting section CP, moves from the second moving track R2 set along the first object path P2a to the support track 14 of the first car 10 positioned at the connecting section CP ( Figure 6 (b)), moving from the support track 14 to the second moving track R2 set along the second object path P2b ( Figure 6 (c) Thus, the second vehicle 20 moves from the first object path P2a to the second object path P2b via the connecting part CP.

[0051] exist Figure 7 In this context, one of the two second paths P2 that are not interconnected at the connecting part CP is designated as the third object path P2c, and the other is designated as the fourth object path P2d. The scenario of the second vehicle 20 moving from the third object path P2c to the fourth object path P2d is represented as a time series. For example... Figure 7As shown in (d), the third object path P2c and the fourth object path P2d are connected via two connecting parts CP (the second connecting part CP2 and the third connecting part CP3) and the portion in the first path P1 that connects these two connecting parts CP. Additionally, in Figure 7 In (d), the arrow with a single-dot-dash line indicates that in Figure 7 (d) shows the movement trajectories of the first vehicle 10 and the second vehicle 20 before the time point indicated.

[0052] Through such Figure 7 (a) The second main body 21 of the second vehicle 20 moves from the support rail 14 of the first vehicle 10, located at the connecting part CP (first connecting part CP1) in the first path P1 that connects to the third object path P2c, to the second moving rail R2 set along the third object path P2c, and the second vehicle 20 enters the third object path P2c. The connecting part CP in the first path P1 that is not the first connecting part CP1 is designated as the second connecting part CP2, and the second vehicle 20 moves towards the second connecting part CP2 in the third object path P2c.

[0053] In this embodiment, the control unit 30 is configured to, when the object trolley 20, which is the second trolley 20 located on the second path P2, exits the connecting part CP from the second path P2, control the first trolley 10, which is not in a supported state, to be matched with the object trolley and placed at the connecting part CP. Therefore, when the second trolley 20, which is matched to move on the third object path P2c, reaches the second connecting part CP2, the first trolley 10, which is not in a supported state, is placed at the second connecting part CP2, and the second main body 21 of the second trolley 20, which has reached the second connecting part CP2, moves from the second moving track R2 provided along the third object path P2c to the support track 14 of the first trolley 10 placed at the second connecting part CP2. Figure 7 (b) Thus, the first vehicle 10 configured at the second connecting part CP2 becomes the first vehicle 10 in a supported state. In addition, the first vehicle 10 configured at the second connecting part CP2 can be the same as the first vehicle 10 configured at the first connecting part CP1, or it can be a different first vehicle 10.

[0054] As in Figure 7As shown in (d), the first vehicle 10, in a supported state, moves from the second connecting part CP2 along the first path P1 to the connecting part CP (the third connecting part CP3) in the first path P1 that connects to the fourth object path P2d. Then, with the first vehicle 10 in the supported state positioned at the third connecting part CP3, the second main body 21 of the second vehicle 20 moves from the support track 14 of the first vehicle 10 to the second moving track R2 set along the fourth object path P2d. Figure 7 (c) Thus, the second vehicle 20 moves from the third object path P2c via the two connecting parts CP and the first path P1 to the fourth object path P2d.

[0055] [Other Implementation Methods]

[0056] Next, other embodiments of the material conveying equipment will be described.

[0057] (1) In the above embodiment, the structure described is exemplified by the control unit 30 controlling the first car 10 (which is not in a supported state) to be matched with the object car and placed at the connection CP when the object car 20, which is located on the first object path P2a, moves to the second object path P2b via the connection CP. However, this disclosure is not limited to such a structure, and it is also possible to make a structure in which the control unit 30 does not perform such control.

[0058] (2) In the above embodiment, the structure in which the port 41 of the processing device 40 or the storage part 51 of the stored item W is arranged as the transfer object part 2 is positioned at a position that overlaps with the connecting part CP when viewed from above is described as an example. However, this disclosure is not limited to such a structure, and it is also possible to make a structure in which neither the port 41 nor the storage part 51 is arranged at a position that overlaps with the connecting part CP when viewed from above.

[0059] (3) In the above embodiment, the structure of the second vehicle 20 having a rotating mechanism 27 was described as an example. However, this disclosure is not limited to such a structure, and it is also possible to make a structure in which the second vehicle 20 does not have a rotating mechanism 27.

[0060] (4) In the above embodiment, the structure in which the movement direction (second movement direction M2) of the second vehicle 20 on the second path P2 is set to bidirectional is described as an example. However, this disclosure is not limited to such a structure, and it is also possible to make a structure in which the second movement direction M2 is set to unidirectional. Furthermore, in the above embodiment, the structure in which the movement direction (first movement direction M1) of the first vehicle 10 on the first path P1 is set to unidirectional is described as an example. However, this disclosure is not limited to such a structure, and it is also possible to make a structure in which the first movement direction M1 is set to bidirectional.

[0061] (5) In the above embodiments, the structure of the article conveying device 100 having multiple first vehicles 10 and multiple second vehicles 20 is described as an example. However, this disclosure is not limited to such a structure. Depending on the size and purpose of the article conveying device 100, it may also be made into a structure in which the article conveying device 100 has only one first vehicle 10, a structure in which the article conveying device 100 has only one second vehicle 20, or a structure combining them.

[0062] (6) In the above embodiments, the structure of article W as a container for containing semiconductor wafers has been described as an example. However, this disclosure is not limited to such a structure, and article W may also be a container for containing other objects (marker plates, glass substrates, etc.) other than semiconductor wafers, or an article other than a container.

[0063] (7) Furthermore, the structures disclosed in the above embodiments can be combined with structures disclosed in other embodiments (including combinations of embodiments described as other embodiments) as long as there is no contradiction. Regarding other structures, the embodiments disclosed in this specification are merely illustrative in all respects. Therefore, various changes can be made appropriately without departing from the spirit of this disclosure.

[0064] [Summary of the above embodiments]

[0065] The following is a summary of the article conveying equipment described above.

[0066] The article conveying equipment includes: a first vehicle that moves along a first path formed along a ceiling; a second vehicle that moves along a second path that connects to the first path at one or both ends when viewed from above; and a moving track provided along the second path; the second vehicle includes a main body that moves along the moving track, a holding part that holds the article, and a lifting mechanism that raises and lowers the holding part relative to the main body, and is configured such that when the article is transferred between a transfer object part located below the second path and the holding part, the lifting mechanism lowers the holding part to a height corresponding to the transfer object part; the first vehicle includes a support track that supports the main body, and is configured such that when the main body is supported by the support track, it can move along the first path together with the second vehicle having the main body; when the first vehicle is located at a connection part in the first path that connects to the second path, the support track is arranged on the extension line of the moving track.

[0067] In this structure, the first carriage is configured such that, in a supported state where the main body of the second carriage is supported by a support rail, it can move along the first path together with the second carriage. Therefore, by moving the first carriage in its supported state along the first path, an article held by the holding part of the second carriage supported by the first carriage can be transported along the first path. Furthermore, in this structure, by moving the second carriage along the second path, an article held by the holding part of the second carriage can be transported along the second path.

[0068] Furthermore, in this structure, with the first vehicle located at the connection point connecting the first and second paths in the first path, the support rail for the main body of the second vehicle is arranged on the extension line of the moving rail along the second path, along which the main body of the second vehicle moves. Therefore, in this state, the main body of the second vehicle can move between the support rail and the moving rail. Thus, by arranging the first vehicle at the connection point, the second vehicle, which is holding the item in the holding part, can detach from the first vehicle and enter the second path, and then exit the second path and be loaded onto the first vehicle, maintaining its original state. This allows for rapid transport of items between the first and second paths at the connection point, resulting in a reduction in the time required for transporting items along both the first and second paths.

[0069] Preferably, there are multiple first vehicles and multiple second vehicles; the movement direction of the first vehicle on the first path is set to unidirectional; and the movement direction of the second vehicle on the second path is set to bidirectional.

[0070] According to this structure, since the movement direction of the first vehicle on the first path is set to unidirectional, the efficiency of transporting goods can be improved by smoothing the movement of the first vehicle on the first path. Furthermore, since the movement direction of the second vehicle on the second path is set to bidirectional, the efficiency of transporting goods can be improved by shortening the length of the transport path.

[0071] Furthermore, preferably, the vehicle comprises a plurality of the aforementioned second vehicles; the movement direction of the aforementioned second vehicles on the aforementioned second path is set to bidirectional; and a retreat track is connected to the aforementioned movement track for retracting the aforementioned second vehicles from the aforementioned second path.

[0072] According to this structure, when multiple second vehicles are configured in a second path, a second vehicle that becomes a moving obstacle can be moved from the moving track to the retraction track and retracted from the second path. Moreover, according to this structure, since the retraction and return of the second vehicle from the second path can be performed without using the first vehicle, the impact on the overall transport efficiency of the equipment can be minimized, and these retraction and return operations can be performed.

[0073] Furthermore, preferably, the second path is connected to the first path at both ends when viewed from above.

[0074] According to this structure, since the freedom of setting the transport path of items via the second path can be increased compared to the case where only one end of the second path is connected to the first path, the overall transport efficiency of the equipment can be improved.

[0075] Furthermore, it is preferable that the aforementioned second vehicle is equipped with a rotation mechanism that allows the aforementioned retaining part to rotate relative to the aforementioned main body about an axis in the vertical direction.

[0076] According to this structure, since the object held by the holding part can be rotated to match the posture of the object at the transfer target location, it is easy to transfer the object between the transfer target location and the holding part.

[0077] Furthermore, it is preferable that at least one of the ports for transporting the aforementioned articles into and out of the processing apparatus, or the storage section for storing the aforementioned articles, is positioned as the transfer object portion and overlaps with the aforementioned connecting portion when viewed from above.

[0078] In the article conveying device of this disclosure, when the second carriage is supported by the first carriage, the main body of the second carriage is supported by the support rail of the first carriage. Therefore, by appropriately setting the support rail, the posture of the second carriage, when supported by the first carriage, can be maintained in a horizontal posture or other posture suitable for article transfer. As a result, even if the transfer target part is positioned to overlap with the connecting part in plan view, by positioning the first carriage, which supports the second carriage, at the connecting part, articles can be properly transferred between the transfer target part and the holding part of the second carriage. According to this structure, it is possible to effectively utilize the ability to position the transfer target part to overlap with the connecting part in plan view, and to position the port or storage part as the transfer target part to overlap with the connecting part in plan view.

[0079] Furthermore, it is preferable to have a number of the aforementioned first vehicles that have more than the number of the aforementioned connecting parts.

[0080] In the article conveying device disclosed herein, in order for the second vehicle to enter the second path and exit the second path, the first vehicle needs to be configured at the connecting part. According to this structure, since the article conveying device has a number of first vehicles sufficient to configure the first vehicle at all the connecting parts, the entry of the second vehicle into the second path and the exit of the second vehicle from the second path can be carried out efficiently, thereby improving the overall article conveying efficiency of the device.

[0081] Furthermore, it is preferable to have a number of the aforementioned second vehicles that is greater than or equal to the number of the aforementioned first vehicles.

[0082] If the number of first and second vehicles is the same, and a second vehicle is moving along the second path, the same number of first vehicles exist without supporting the second vehicle, resulting in waste as a transport device. According to this structure, since the transport device has more second vehicles than the number of first vehicles, the number of first vehicles not supporting the second vehicle can be reduced to a smaller number. Therefore, the overall transport efficiency of the device can be improved.

[0083] Furthermore, it is preferable to have a control unit that controls the aforementioned first vehicle and the aforementioned second vehicle; one of the two aforementioned second paths that are interconnected by the aforementioned connecting part is designated as the first object path, and the other is designated as the second object path; when the aforementioned control unit moves the object vehicle, which is the aforementioned second vehicle located on the aforementioned first object path, to the aforementioned second object path via the aforementioned connecting part, it controls the aforementioned first vehicle, which is not in the aforementioned supported state, to be matched with the aforementioned object vehicle and placed at the aforementioned connecting part.

[0084] According to this structure, by moving the main body of the object trolley (which is the second trolley located on the first object path) from a moving track along the first object path to a support track of the first trolley disposed at the connecting section, and then moving it from that support track to a moving track along the second object path, the object trolley can be moved from the first object path to the second object path. Furthermore, according to this structure, since the first trolley (not in a supported state) is disposed at the connecting section simultaneously with or at the same time as the object trolley arrives at the connecting section, the overall conveying efficiency of the equipment can be suppressed from decreasing due to premature placement of the first trolley at the connecting section, while the object trolley can be quickly moved from the first object path to the second object path.

[0085] The article conveying device disclosed herein is sufficient as long as it can perform at least one of the aforementioned effects.

[0086] Explanation of reference numerals in the attached figures

[0087] 1: Ceiling

[0088] 2: Location of the object being transferred

[0089] 10: The first car

[0090] 14: Support rails

[0091] 20: The second car

[0092] 21: Second Main Body (Main Body)

[0093] 24: Maintaining Section

[0094] 25: Lifting mechanism

[0095] 27: Rotating mechanism

[0096] 30: Control Department

[0097] 40: Processing device

[0098] 41: Port

[0099] 51: Storage Department

[0100] 100: Goods conveying equipment

[0101] CP: Connector

[0102] M1: First direction of movement (direction of movement of the first vehicle)

[0103] M2: Second direction of movement (the direction of movement of the second vehicle)

[0104] P1: Path 1

[0105] P2: Path 2

[0106] P2a: Path to the first object

[0107] P2b: Path to the second object

[0108] R2: Second moving track (moving track)

[0109] R3: Retreat Track

[0110] W: Items

[0111] Z: Up and down direction.

Claims

1. An article conveying apparatus characterized by comprising: a first vehicle that moves along a first path formed along a ceiling; a second vehicle that moves along a second path connected to the first path at one or both ends thereof in a plan view; and a moving rail provided along the second path; the second vehicle includes a main body that moves along the moving rail, a holding portion that holds an article, and a lifting mechanism that lifts the holding portion with respect to the main body, and is configured to lower the holding portion to a height corresponding to a transfer target portion between the article and the holding portion in a state where the article is transferred therebetween, by means of the lifting mechanism; the first vehicle includes a support rail that supports the main body, and is configured to be able to move along the first path together with the second vehicle including the main body in a state where the main body is supported by the support rail; the support rail is disposed on an extension line of the moving rail in a state where the first vehicle is positioned at a connection portion of the first path connected to the second path; the second vehicle is configured to be able to move along the moving rail independently of the first vehicle, so that the first vehicle is not in the state where the main body is supported by the support rail, the main body is supported by the moving rail, and the second vehicle is separated from the first vehicle.

2. The article conveying apparatus according to claim 1, characterized by comprising: a plurality of the first vehicles and a plurality of the second vehicles; a moving direction of the first vehicle on the first path is set to be unidirectional; a moving direction of the second vehicle on the second path is set to be bidirectional.

3. The article conveying apparatus according to claim 1 or 2, characterized by comprising: a plurality of the second vehicles; a moving direction of the second vehicle on the second path is set to be bidirectional; an evacuation rail for evacuating the second vehicle from the second path is connected to the moving rail.

4. The article conveying apparatus according to claim 1 or 2, characterized in that: the second path is connected to the first path at both ends thereof in a plan view.

5. The article conveying apparatus according to claim 1 or 2, characterized in that: the second vehicle includes a rotation mechanism that rotates the holding portion with respect to the main body about an axis along a vertical direction.

6. The article conveying apparatus according to claim 5, characterized by comprising: a support portion that is capable of arranging and supporting a plurality of the articles in different postures from each other in a length direction of the second path is disposed at a position overlapping the second path in a plan view, as the transfer target portion.

7. The article conveying apparatus according to claim 1 or 2, characterized by comprising: a port that performs at least one of an incoming and an outgoing of the article in a processing device that processes the article as a processing target, or a storage portion that stores the article is disposed at a position overlapping the connection portion in a plan view, as the transfer target portion. ​ 8. The article transport apparatus according to claim 1 or 2, characterized in that the first vehicle is provided in a number equal to or greater than the number of the connection portions.

9. The article transport apparatus according to claim 1 or 2, characterized in that the second vehicle is provided in a number equal to or greater than the number of the first vehicles.

10. The article transport apparatus according to claim 1 or 2, characterized in that the transfer target position is provided at both a position overlapping the first path in plan view and a position overlapping the second path in plan view.

11. An article transport apparatus characterized by comprising: a first vehicle that moves along a first path formed along a ceiling; a second vehicle that moves along a second path connected to the first path at one end or both ends in plan view; a moving rail provided along the second path; and a control portion that controls the first vehicle and the second vehicle; the second vehicle includes a main body that moves along the moving rail, a holding portion that holds an article, and a lifting mechanism that lifts the holding portion with respect to the main body, and is configured to lower the holding portion to a height corresponding to a transfer target position provided below the second path by the lifting mechanism in a case where the article is transferred between the transfer target position and the holding portion; the first vehicle includes a support rail that supports the main body, and is configured to be movable along the first path together with the second vehicle having the main body in a state where the main body is supported by the support rail; the support rail is provided on an extension line of the moving rail in a state where the first vehicle is positioned at a connection portion of the first path connected to the second path; one of the two second paths connected to each other at the connection portion is set as a first target path, and the other is set as a second target path; the control portion controls the first vehicle not in the supported state to be matched to an object vehicle reaching the connection portion and be provided to the connection portion in a case where the object vehicle positioned at the first target path is moved to the second target path via the connection portion. ​

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