Coating apparatus and method of manufacturing display device using the same

Abstract

A coating apparatus and a method of manufacturing a display apparatus using the same are disclosed. The coating apparatus according to an embodiment includes a stage to transport a target substrate, a coating part to coat a coating material on the target substrate, a first light emitting part to emit a first light beam to cross an upper surface of the target substrate, a first position adjusting part connected to the first light emitting part and to adjust a height of the first light emitting part, a first distance measuring part disposed on the stage and to measure a first distance from the upper surface of the target substrate, and a control part to control the first position adjusting part to adjust the height of the first light emitting part based on the first distance measured by the first distance measuring part.

Description

Technical Field

[0001] This invention relates to a coating apparatus and a method for manufacturing a display device using the coating apparatus. Background Technology

[0002] With the development of multimedia, the importance of display devices is increasing. Correspondingly, various types of display devices, such as liquid crystal displays (LCDs) and organic light-emitting diode displays (OLEDs), have been put into use.

[0003] In the manufacturing process of the aforementioned display device, various types of coating equipment can be used, such as roller coating machines, slot coating machines, dispensers, or inkjet printers for coating layers constituting the display device onto a substrate. Summary of the Invention

[0004] Technical problems to be solved

[0005] The technical problem to be solved by the present invention is to provide a coating apparatus capable of detecting particles on a substrate in response to changes in the height of the substrate, and a method for manufacturing a display device using the coating apparatus.

[0006] The technical problems of the present invention are not limited to those described above, and those skilled in the art will clearly understand other technical problems not mentioned below through the following description.

[0007] Solution

[0008] A coating apparatus according to one embodiment for solving the above-mentioned technical problems includes: a stage for conveying a target substrate; a coating section for coating a coating material onto the target substrate; a first light-emitting section for emitting a first light beam across the upper surface of the target substrate; a first position adjustment section connected to the first light-emitting section and adjusting the height of the first light-emitting section; a first distance measuring section disposed on the stage and measuring a first distance from the upper surface of the target substrate; and a control section for controlling the first position adjustment section to adjust the height of the first light-emitting section based on the first distance measured by the first distance measuring section.

[0009] The control unit can calculate the change in height of the upper surface of the target substrate based on the change in the first distance, and can control the first position adjustment unit to adjust the height of the first light-emitting unit in accordance with the change in height of the upper surface of the target substrate.

[0010] The control unit can control the first position adjustment unit to keep the first gap between the first beam and the upper surface of the target substrate constant.

[0011] When the first distance is less than or equal to a preset value, the control unit can control the first position adjustment unit to raise the first light-emitting unit.

[0012] The coating apparatus may further include a first light-receiving unit for receiving a first light beam, wherein the control unit may detect particles with a size greater than or equal to a preset size on the upper surface of the target substrate based on the amount of the first light beam received by the first light-receiving unit.

[0013] When a particle with a size greater than or equal to a preset size is detected on the upper surface of the target substrate, the control unit can stop or interrupt the operation of the coating unit.

[0014] The coating apparatus may further include a third position adjustment unit for adjusting the height of the coating section, wherein the control unit can control the third position adjustment unit to adjust the spacing between the coating section and the upper surface of the target substrate based on a first distance.

[0015] The coating apparatus may further include: a second light-emitting section for emitting a second light beam across the lower surface of a target substrate; a second light-receiving section for receiving the second light beam; a fourth position adjustment section connected to the second light-emitting section and used to adjust the height of the second light-emitting section; a third position adjustment section for adjusting the height of the second light-receiving section; and a second distance measuring section disposed below the stage and used to measure a second distance from the lower surface of the target substrate, wherein the stage may be an air-bearing stage that uses gas pressure to lift the target substrate.

[0016] The control unit can control the fourth position adjustment unit to adjust the height of the second light-emitting unit based on the second distance measured by the second distance measurement unit.

[0017] The control unit can calculate the change in height of the lower surface of the target substrate based on the change in the second distance, and can control the fourth position adjustment unit to adjust the height of the second light-emitting part in accordance with the change in height of the lower surface of the target substrate.

[0018] The control unit can control the fourth position adjustment unit to keep the second distance between the second beam and the lower surface of the target substrate constant.

[0019] When the second distance is less than or equal to the preset value, the control unit can control the fourth position adjustment unit to lower the second light-emitting unit.

[0020] The control unit can detect particles with a size greater than or equal to a preset size on the lower surface of the target substrate based on the amount of the second beam received by the second light receiving unit.

[0021] A method for manufacturing a display device according to an embodiment for solving the above-mentioned technical problems includes: measuring a distance from a surface of a target substrate using at least one distance measuring instrument; and adjusting the spacing between a surface of the target substrate and at least one light beam spanning a surface of the target substrate based on the measured distance.

[0022] The step of measuring the distance from a surface of a target substrate may include: measuring the distance from the upper surface of the target substrate using a first distance measuring instrument disposed on the upper surface of the target substrate.

[0023] The step of adjusting the spacing between a surface of a target substrate and at least one light beam may include: raising a first light-emitting part when the distance from the upper surface of the target substrate is less than or equal to a preset value, wherein the first light-emitting part emits a first light beam onto the upper surface of the target substrate to span the upper surface of the target substrate.

[0024] The step of measuring the distance from a surface of a target substrate may include: measuring the distance from the lower surface of the target substrate using a second distance measuring instrument disposed on the lower surface of the target substrate.

[0025] The step of adjusting the spacing between a surface of the target substrate and at least one light beam may include: lowering the second light-emitting part when the distance from the lower surface of the target substrate is less than or equal to a preset value, wherein the second light-emitting part emits a second light beam onto the lower surface of the target substrate to span the lower surface of the target substrate.

[0026] The method of manufacturing a display device may further include: adjusting the spacing between a coating portion disposed on one surface of a target substrate and one surface of the target substrate based on a measured distance.

[0027] The method of manufacturing a display device may further include the step of calculating the size of particles on a surface of a target substrate based on a distance from a surface of a target substrate and a spacing between a surface of the target substrate and at least one light beam.

[0028] Specific details of other embodiments are included in the detailed description and accompanying drawings.

[0029] Beneficial effects

[0030] By using a coating apparatus according to one embodiment and a method for manufacturing a display device using the coating apparatus, particles on the substrate can be accurately detected in response to changes in the height of the substrate.

[0031] The effects of the embodiments are not limited to those illustrated above, and many more effects are included in this specification. Attached Figure Description

[0032] Figure 1 This is a perspective view of a coating apparatus according to an embodiment.

[0033] Figure 2 It is along Figure 1 A sectional view taken from line A-A'.

[0034] Figure 3This is a perspective view of a coating apparatus according to another embodiment.

[0035] Figure 4 It is along Figure 2 The cross-sectional view taken from B-B'.

[0036] Figure 5 This is a flowchart illustrating a method for manufacturing a display device according to an embodiment.

[0037] Figures 6 to 8 This is a diagram illustrating the steps of a method for manufacturing a display device according to an embodiment.

[0038] Figures 9 to 11 This is a diagram illustrating the steps of a method for manufacturing a display device according to another embodiment.

[0039] Explanation of reference numerals in the attached figures

[0040] 1: Coating device

[0041] 10: Taiwan

[0042] 31: First Light-Emitting Section

[0043] 33: First Light Receiving Section

[0044] 35: First position adjustment section

[0045] 37: Second position adjustment unit

[0046] 50: First Distance Measurement Unit

[0047] 70: Coating section

[0048] 90: Support platform

[0049] 100: Control Department Detailed Implementation

[0050] The advantages and features of the present invention, as well as the methods for achieving these advantages and features, will become clear from the following detailed description of the embodiments in conjunction with the accompanying drawings. However, the present invention is not limited to the embodiments disclosed below, but is implemented in various forms that differ from each other, and these embodiments are provided merely to complete the disclosure of the invention and to fully inform those skilled in the art of the scope of the invention, which is defined only by the scope of the claims.

[0051] When an element or layer is referred to as being "on" another element or layer, it includes both cases where it is directly on the other element and cases where other layers or elements are interposed in between. Throughout this specification, the same reference numerals denote the same constituent elements. The shapes, sizes, proportions, angles, numbers, etc., shown in the figures used to illustrate embodiments are exemplary, and therefore the invention is not limited to what is shown in the figures.

[0052] Hereinafter, specific embodiments will be described with reference to the accompanying drawings.

[0053] Figure 1 This is a perspective view of a coating apparatus according to an embodiment. Figure 2 It is along Figure 1 A sectional view taken from line A-A'.

[0054] Hereinafter, the first direction DR1, the second direction DR2, and the third direction DR3 intersect in different directions from each other. The first direction DR1 can be a horizontal direction. The second direction DR2 can be a vertical direction. The third direction DR3 can be a thickness direction. The first direction DR1, the second direction DR2, and / or the third direction DR3 can include two or more directions. For example, the third direction DR3 can include an upper direction toward the upper side of the figure and a lower direction toward the lower side of the figure. Therefore, a surface of a member arranged to face the upper direction can be referred to as the upper surface, and another surface of a member arranged to face the lower direction can be referred to as the lower surface. However, these directions are merely exemplary and relative, and are not limited to those described above.

[0055] The coating apparatus 1 described below includes various types of apparatus for coating a coating material onto a target substrate T, such as a roller coating apparatus, a slot coating apparatus, a dispenser, or an inkjet printer. In one embodiment, the coating apparatus 1 may be a manufacturing apparatus for a display device for coating at least one layer constituting a display device (e.g., an insulating layer, a light-emitting layer, a thin-film encapsulation layer, a color filter layer, etc.) onto the target substrate T, but is not limited thereto.

[0056] Reference Figure 1 and Figure 2 The coating apparatus 1 may include a stage 10, a first light-emitting part 31, a first light-receiving part 33, a first position adjustment part 35, a second position adjustment part 37, a first distance measuring part 50, a coating part 70, a support stage 90, and a control part 100.

[0057] The stage 10 can hold a target substrate T. In one embodiment, the target substrate T can be loaded onto the stage 10 and moved along a first direction DR1. In other embodiments, the target substrate T can also be loaded onto the stage 10, and the coating portion 70 and the first distance measuring portion 50 arranged on the stage 10 can be moved along the first direction DR1. In one embodiment, the coating apparatus 1 may further include a stage moving portion 11 that moves the stage 10 along at least one direction.

[0058] A coating section 70 is disposed on a stage 10 and applies coating material to the upper surface of a target substrate T mounted on the stage 10. The coating section 70 may include various means for dispensing, coating, or printing coating material. In one embodiment, the coating section 70 may include at least one opening for spraying coating material, such as a nozzle, but not limited thereto. In some embodiments, the coating section 70 may include a nozzle formed longitudinally along a second direction DR2 for use in a stencil coating machine. In some embodiments, the coating section 70 may also be an inkjet head including a plurality of nozzles for an inkjet printer. In some embodiments, the coating apparatus 1 may further include a third position adjustment section 71 that moves the coating section 70 along at least one direction (e.g., vertical direction) and can adjust the distance on a third direction DR3 between the coating section 70 and the target substrate T and / or the stage 10 according to the curvature of the target substrate T or the presence of particles on the target substrate T.

[0059] The first light-emitting part 31 emits a first light beam LB onto the stage 10 along a second direction DR2 intersecting the first direction DR1. When the target substrate T is mounted on the stage 10, the first light beam LB can be emitted across the upper surface of the target substrate T. In one embodiment, the first light beam LB can be parallel to the upper surface of the target substrate T and can be emitted at a first gap from the upper surface of the target substrate T. The first gap can be a gap on the third direction DR3. In some embodiments, the first light beam LB can also be emitted onto the upper surface of the target substrate T so that it is in close contact with the upper surface of the target substrate T. The first light beam LB can include light with high directionality, such as laser light. In one embodiment, the first light-emitting part 31 can be arranged on one side of the stage 10 along the second direction DR2.

[0060] The first light-receiving unit 33 receives the first light beam LB. In one embodiment, the first light-receiving unit 33 may include a device or sensor (e.g., a photoelectric sensor, etc.) that generates an electrical signal based on the amount of the received first light beam LB, and the electrical signal may be transmitted to the control unit 100. In one embodiment, the first light-receiving unit 33 may be arranged on the other side of the stage 10 in the second direction DR2. That is, the first light-emitting unit 31 and the first light-receiving unit 33 may be arranged opposite each other along the second direction DR2, wherein the stage 10 is located between the first light-emitting unit 31 and the first light-receiving unit 33.

[0061] The first position adjustment unit 35 can be connected to the first light-emitting unit 31 to adjust the position of the first light-emitting unit 31. Specifically, the first position adjustment unit 35 can adjust the height of the first light-emitting unit 31. This allows adjustment of the distance between the first light beam LB and the target substrate T. This distance can be a vertical distance.

[0062] The second position adjustment unit 37 can be connected to the first light receiving unit 33 to adjust the position of the first light receiving unit 33. Thus, the height of the first light receiving unit 33 can be adjusted according to the height change of the first light emitting unit 31. In some embodiments, the first light receiving unit 33 may have a predetermined range of light receiving area, and only the height of the first light emitting unit 31 may be adjusted.

[0063] In one embodiment, the first position adjustment portion 35 and the second position adjustment portion 37 may be implemented as a cylinder or robotic arm that is telescopic along the length direction, but are not limited thereto. In some embodiments, the first position adjustment portion 35 and the second position adjustment portion 37 may also include at least a portion of which is configured as a movable sliding member or a linear movement guide, etc.

[0064] The first distance measuring unit 50 measures the distance from the upper surface of the target substrate T. From this, the height variation and / or curvature of the upper surface of the target substrate T can be calculated. The first distance measuring unit 50 may include various distance measuring devices that use various methods (such as triangulation, time-of-flight measurement, phase difference displacement measurement, etc.) to measure the distance from the target substrate T, such as a laser distance meter or a vision camera. In one embodiment, the first distance measuring unit 50 may be arranged on the stage 10, but is not limited thereto. In some embodiments, the first distance measuring unit 50 may be connected to the lower end of a support stage 90 arranged above the stage 10 via a connecting part 51, but is not limited thereto. In one embodiment, multiple first distance measuring units 50 may be arranged. For example, three first distance measuring units 50 may be arranged at a certain interval to measure the height of different regions on the upper surface of the target substrate T, but is not limited thereto.

[0065] A support platform 90 can be configured on the stage 10 to span the stage 10. In one embodiment, the target substrate T can be moved along a first direction DR1, and the support platform 90 can be arranged to span the stage 10 along a second direction DR2. In this case, the first distance measuring unit 50 and the coating unit 70 can be coupled to the support platform 90, facing the upper surface of the stage 10. Figure 2As shown, in one embodiment, the first light-emitting part 31, the first distance measuring part 50, and the coating part 70 may be arranged sequentially along the direction of conveying the target substrate T, but are not limited thereto. In some embodiments, the first light-emitting part 31, the first distance measuring part 50, and the coating part 70 may also be arranged in the order of the first distance measuring part 50, the first light-emitting part 31, and the coating part 70 along the direction of conveying the target substrate T. That is, the first distance measuring part 50 may also be arranged before the first light-emitting part 31 on the side facing the target substrate T. In some embodiments, the first light-emitting part 31 and the first light-receiving part 33 may also be combined with the support platform 90, or only the coating part 70 may be combined with the support platform 90. In one embodiment, the support platform 90 may be a portal frame, which includes a horizontal part spanning above the platform 10 and two vertical parts arranged at both ends of the horizontal part and extending toward the support surface.

[0066] The control unit 100 may be at least one of the following: control console 10, coating unit 70, first light-emitting unit 31, first light-receiving unit 33, first position adjustment unit 35, second position adjustment unit 37, and first distance measurement unit 50.

[0067] The control unit 100 can control the first position adjustment unit 35 to adjust the height of the first light-emitting unit 31 based on a first distance measured by the first distance measurement unit 50. Specifically, the control unit 100 can calculate the change in height of the upper surface of the target substrate T based on the change in the first distance measured by the first distance measurement unit 50. The control unit 100 can control the first position adjustment unit 35 to adjust the height of the first light-emitting unit 31 corresponding to the change in height of the upper surface of the target substrate T. Furthermore, the control unit 100 can detect particles with a size greater than or equal to a preset size on the upper surface of the target substrate T based on the amount of the first light beam LB received by the first light-receiving unit 33.

[0068] In Figures 6 to 8 The specific operation of the coating apparatus 1 is described in detail.

[0069] Figure 3 This is a perspective view of a coating apparatus according to another embodiment. Figure 4 It is along Figure 2 The cross-sectional view taken from B-B'.

[0070] Figure 3 Implementation examples and Figure 1 The difference in the embodiment is that the coating apparatus 1 further includes a second light-emitting part 31_2, a second light-receiving part 33_2, and a second distance measuring part 50_2.

[0071] Reference Figure 3 and Figure 4The coating apparatus 1a may include a stage 10a, a coating section 70, a first light-emitting section 31_1, a second light-emitting section 31_2, a first light-receiving section 33_1, a second light-receiving section 33_2, a first distance measuring section 50_1, a second distance measuring section 50_2, a first position adjusting section 35_1, a second position adjusting section 37_1, a third position adjusting section 71, a fourth position adjusting section 35_2, a fifth position adjusting section 37_2, a support stage 90, and a control section 100.

[0072] and Figure 1 In different embodiments, stage 10a can hold the target substrate T, such that the target substrate T is spaced apart from stage 10a. For example, stage 10a can be an air-bearing stage that lifts the target substrate T by injecting gas upwards. Thus, the target substrate T can move along the first direction DR1 with its lower surface spaced a predetermined distance from the upper surface of stage 10a. Figure 3 As shown, the stage 10a may include, but is not limited to, a plurality of air-bearing units extending along the first direction DR1 and arranged at certain intervals. Although not shown, the coating apparatus 1a may also include a gripper for gripping the target substrate T mounted on the air-bearing stage.

[0073] The coating unit 70 is arranged on the stage 10a and applies coating material to the upper surface of the target substrate T mounted on the stage 10a. The coating apparatus 1a may also include a third position adjustment unit 71 that moves the coating unit 70 in at least one direction.

[0074] The first light-emitting section 31_1 emits a first light beam LB_1 along the second direction DR2, such that the first light beam LB_1 crosses the upper surface of the target substrate T on the stage 10a. In some embodiments, the first light beam LB_1 may be emitted to be spaced apart from the upper surface of the target substrate T by a first gap.

[0075] The first light receiving unit 33_1 receives the first light beam LB_1 and converts the first light beam LB_1 into an electrical signal.

[0076] In some embodiments, the first light-emitting part 31_1 and the first light-receiving part 33_1 can be arranged on one side and the other side of the stage 10a in the second direction DR2, respectively, wherein the stage 10a is located between the first light-emitting part 31_1 and the first light-receiving part 33_1. In this case, the first light-emitting part 31_1 and the first light-receiving part 33_1 can be connected by the first position adjustment part 35_1 and the second position adjustment part 37_1, respectively, so that the first light-emitting part 31_1 and the first light-receiving part 33_1 are respectively suspended on the support platform 90 arranged on the stage 10a.

[0077] The second light-emitting section 31_2 emits a second light beam LB_2 onto the stage 10a. Specifically, the second light-emitting section 31_2 can emit the second light beam LB_2 along the second direction DR2, such that the second light beam LB_2 crosses the lower surface of the target substrate T between the target substrate T, which is lifted by air pressure on the stage 10a, and the stage 10a. In this case, the second light beam LB_2 can be parallel to the lower surface of the target substrate T and can be emitted to be spaced apart from the lower surface of the target substrate T by a second distance. The second distance can be the distance on the third direction DR3. In some embodiments, the second light-emitting section 31_2 can be arranged on one side of the stage 10a in the second direction DR2 and can be connected to and supported by the fourth position adjustment section 35_2 fixed on the support surface. The second light-emitting section 31_2 can be arranged at a lower position than the first light-emitting section 31_1. That is, as Figure 4 As shown, in the cross-section, the platform 10a, the target substrate T, the first light-emitting part 31_1, and the second light-emitting part 31_2 can be arranged in the order of platform 10a, second light-emitting part 31_2, target substrate T, and first light-emitting part 31_1 along the upper direction. In some embodiments, the second light-emitting part 31_2 can be arranged to at least partially overlap with the first light-emitting part 31_1 along the third direction DR3.

[0078] The second light-receiving section 33_2 receives the second light beam LB_2. Similar to the first light-receiving section 33_1, the second light-receiving section 33_2 may include a sensor or device that receives the second light beam LB_2 and converts it into an electrical signal, such as a photoelectric sensor. In one embodiment, the second light-receiving section 33_2 may be arranged on the other side of the stage 10a in the second direction DR2, facing the second light-emitting section 31_2, and the second light-receiving section 33_2 may be connected to and supported by the fifth position adjustment section 37_2 fixed on the support surface. The second light-receiving section 33_2 may be arranged at a lower position than the first light-receiving section 33_1. That is, similar to the arrangement of the second light-emitting section 31_2, the stage 10a, the target substrate T, the first light-receiving section 33_1, and the second light-receiving section 33_2 may be arranged in the upper direction in the order of stage 10a, second light-receiving section 33_2, target substrate T, and first light-receiving section 33_1. In some embodiments, the second light-receiving section 33_2 may be arranged to at least partially overlap with the first light-receiving section 33_1 along the third direction DR3.

[0079] The first distance measuring unit 50_1 measures the distance in a third direction DR3 from the upper surface of the target substrate T. From this, the height change and / or curvature of the upper surface of the target substrate T can be calculated. In some embodiments, the first distance measuring unit 50_1 can be connected to the lower end of the support platform 90 disposed above the stage 10a via the connecting part 51_1, but is not limited thereto. In some embodiments, the first light emitting part 31_1, the first light receiving part 33_1, the first distance measuring unit 50_1, and the coating part 70 can be connected adjacent to the lower end of the support platform 90 disposed above the stage 10a. In some embodiments, at least one of the first light emitting part 31_1, the first light receiving part 33_1, and the first distance measuring unit 50_1 can also be supported by a separate support device separate from the support platform 90.

[0080] The second distance measuring unit 50_2 measures the distance from the lower surface of the target substrate T. From this, the height variation and / or curvature of the lower surface of the target substrate T can be calculated. In some embodiments, the second distance measuring unit 50_2 may be arranged below the stage 10a and may be supported and fixed by a support 51_2 connected to a support surface. In this case, the second distance measuring unit 50_2 can measure the distance from the lower surface of the target substrate T through the gaps between multiple air-bearing units. In some embodiments, the second distance measuring unit 50_2 may be arranged to at least partially overlap with the first distance measuring unit 50_1 along the third direction DR3. In some embodiments, the second distance measuring unit 50_2 may also be integrally formed with the stage 10a. In some embodiments, multiple second distance measuring units 50_2 may be arranged. For example, three second distance measuring units 50_2 may be arranged at a certain interval to measure the height of different regions of the lower surface of the target substrate T, but are not limited thereto. The second distance measuring unit 50_2 may include various distance measuring devices that use various methods (such as triangulation, time of flight, phase difference displacement, etc.) to measure the distance to the target substrate T, such as a laser distance measuring instrument or a vision camera.

[0081] In some embodiments, the first light-emitting portion 31_1, the first distance measuring portion 50_1, and the coating portion 70 may be arranged sequentially along the first direction DR1, and the second light-emitting portion 31_2 and the second distance measuring portion 50_2 may be arranged sequentially along the first direction DR1. In some embodiments, the first distance measuring portion 50_1 and the second distance measuring portion 50_2 may also be arranged in front of the first light-emitting portion 31_1 and the second light-emitting portion 31_2, respectively, facing the side into which the target substrate T enters. For example, in Figure 4 In this configuration, the first distance measuring unit 50_1 and the second distance measuring unit 50_2 may also be arranged on the left side relative to the first light-emitting unit 31_1 and the second light-emitting unit 31_2, respectively.

[0082] The first position adjustment unit 35_1 and the second position adjustment unit 37_1 are respectively connected to the first light emitting unit 31_1 and the first light receiving unit 33_1. In some embodiments, the first position adjustment unit 35_1 and the second position adjustment unit 37_1 can be connected to be suspended on a support platform 90 arranged above the stage 10a. The first position adjustment unit 35_1 and the second position adjustment unit 37_1 can be configured to be telescopic along the length direction, thereby adjusting the height of the first light emitting unit 31_1 and the first light receiving unit 33_1.

[0083] The third position adjustment unit 71 connects the coating unit 70 and the support platform 90, and is configured to be telescopic along the third direction DR3 to adjust the height of the coating unit 70.

[0084] The fourth position adjustment section 35_2 and the fifth position adjustment section 37_2 are respectively connected to the second light emitting section 31_2 and the second light receiving section 33_2. In some embodiments, the fourth position adjustment section 35_2 and the fifth position adjustment section 37_2 can be fixed to the support surface, wherein the stage 10a is located between the fourth position adjustment section 35_2 and the fifth position adjustment section 37_2, but is not limited thereto. The fourth position adjustment section 35_2 and the fifth position adjustment section 37_2 can be configured to be telescopic along the length direction, thereby adjusting the height of the second light emitting section 31_2 and the second light receiving section 33_2.

[0085] In some embodiments, the first position adjustment unit 35_1, the second position adjustment unit 37_1, the third position adjustment unit 71, the fourth position adjustment unit 35_2, and the fifth position adjustment unit 37_2 may be implemented as a cylinder or robotic arm that is telescopic along the length direction, but are not limited thereto. In some embodiments, at least one of the first position adjustment unit 35_1, the second position adjustment unit 37_1, the third position adjustment unit 71, the fourth position adjustment unit 35_2, and the fifth position adjustment unit 37_2 may also include at least a portion thereof configured as a movable sliding member or a linear movement guide, etc.

[0086] The control unit 100 includes a control console 10a, a coating unit 70, a first light-emitting unit 31_1, a second light-emitting unit 31_2, a first light-receiving unit 33_1, a second light-receiving unit 33_2, a first distance measuring unit 50_1, a second distance measuring unit 50_2, a first position adjusting unit 35_1, a second position adjusting unit 37_1, a third position adjusting unit 71, a fourth position adjusting unit 35_2, and a fifth position adjusting unit 37_2.

[0087] The control unit 100 can control the fourth position adjustment unit 35_2 to adjust the height of the second light-emitting unit 31_2 based on the second distance measured by the second distance measurement unit 50_2.

[0088] The control unit 100 can detect particles with a size greater than or equal to a preset size on the lower surface of the target substrate T based on the amount of the second light beam LB_2 received by the second light receiving unit 33_2.

[0089] The following will be Figures 9 to 11 The specific operation of the coating apparatus 1a is described in the text.

[0090] Figure 5 This is a flowchart illustrating a method for manufacturing a display device according to an embodiment. Figures 6 to 8 This is a diagram illustrating the steps of a method for manufacturing a display device according to an embodiment.

[0091] Reference Figures 5 to 8 The method of manufacturing a display device may include: step S101, measuring the distance to a surface of a target substrate T by at least one distance measuring instrument; and step S102, adjusting the spacing between a surface of the target substrate T and at least one light beam spanning a surface of the target substrate T based on the measured distance.

[0092] Step S101, which measures the distance from a surface of the target substrate T, may include measuring the distance from the upper surface of the target substrate T by means of a first distance measuring unit 50 disposed on the upper surface of the target substrate T.

[0093] The step of adjusting the distance between a surface of the target substrate T and at least one light beam (S102) may include: raising the first light-emitting part 31 when the distance from the upper surface of the target substrate T is less than or equal to a preset value, wherein the first light-emitting part 31 emits a first light beam LB onto the upper surface of the target substrate T to span the upper surface of the target substrate T.

[0094] The method of manufacturing a display device may further include at least one of the following steps: adjusting the spacing between the coating portion 70 disposed on a surface of a target substrate T and the surface of the target substrate T based on a measured distance; and calculating the size of a particle P on a surface of the target substrate T based on the distance from the surface of the target substrate T and the spacing between the surface of the target substrate T and at least one light beam.

[0095] The methods for manufacturing display devices are not limited to the examples described above, and can be referenced from... Figures 1 to 4 At least some of the above steps may be omitted, or at least one other step may be included.

[0096] The following will refer to Figures 6 to 8 A method for manufacturing a display device is described in detail. According to one embodiment, the method for manufacturing a display device can be achieved through… Figures 1 to 2 The coating device 1 is used to perform the coating.

[0097] The following will illustrate a method for manufacturing a display device using coating apparatus 1, but the processes that can be used with coating apparatus 1 are not limited to the examples described above. Coating apparatus 1 can be used for various processes of coating material onto a substrate, such as dispensing processes, coating processes, or printing processes.

[0098] Reference Figure 6 The target substrate T mounted on platform 10 can move to one side.

[0099] When the target substrate T is located below the first distance measuring unit 50, the first distance measuring unit 50 can measure the first distance D1 from the first distance measuring unit 50 to the upper surface of the target substrate T.

[0100] Reference Figure 1 and Figure 6 Multiple first distance measuring units 50 can be arranged, and each can measure the height of different regions on the upper surface of the target substrate T. For example, three first distance measuring units 50 can respectively measure the distance to a region adjacent to one side of the target substrate T in the second direction DR2, another region adjacent to the other side of the target substrate T in the second direction DR2, and the intermediate region between the two regions. The control unit 100 can accurately identify whether the upper surface of the target substrate T is bent or whether particles P are present on the upper surface of the target substrate T based on multiple distance values ​​obtained from the multiple first distance measuring units 50 and the change in the amount of light of the first light beam LB received by the first light receiving unit 33.

[0101] When the first distance D1 is measured, the control unit 100 can calculate the height of the upper surface of the target substrate T based on the measured first distance D1. In some embodiments, the first distance measuring unit 50 may measure the distance between the first distance measuring unit 50 and the upper surface of the stage 10 when the target substrate T is not placed, and then measure the distance between the first distance measuring unit 50 and the upper surface of the target substrate T when the target substrate T is placed, thereby calculating the thickness Ht of the target substrate T.

[0102] After calculating the height of the upper surface of the target substrate T, the first position adjustment unit 35, the second position adjustment unit 37 and / or the third position adjustment unit 71 can adjust the height of the first light emitting unit 31, the first light receiving unit 33 and / or the coating unit 70 according to the height of the upper surface of the target substrate T.

[0103] The heights of the first light-emitting section 31 and / or the first light-receiving section 33 can be adjusted by the first position adjustment section 35 and the second position adjustment section 37, respectively, so that the first light beam LB is spaced apart from the upper surface of the target substrate T by a first distance D2. The first distance D2 can be the distance on the third direction DR3. The first distance D2 can be less than or equal to the height Ph of the particles P on the target substrate T to be detected in the coating process.

[0104] The height of the coating section 70 can be adjusted by the third position adjustment unit 71 to be spaced apart from the upper surface of the target substrate T by a second distance D3. The second distance D3 can be the distance on the third direction DR3. The second distance D3 can be greater than the first distance D2. The second distance D3 can be greater than or equal to the size of the particles P on the target substrate T to be detected in the coating process.

[0105] Reference Figure 7 After adjusting the height of the first light-emitting section 31 and / or the coating section 70, the target substrate T moves along the first direction DR1 and passes under the first light beam LB and the coating section 70. At this time, the coating section 70 can coat the coating material M onto the upper surface of the target substrate T. The coating material M may include a material for forming at least one layer on the target substrate T, for example, a material for forming a light-emitting layer, a thin-film encapsulation layer, or a color filter layer.

[0106] During the movement of the target substrate T along the first direction DR1, the first light beam LB can maintain a first distance D2 with the upper surface of the target substrate T, and the control unit 100 can monitor the change in the amount of light of the first light beam LB received by the first light receiving unit 33.

[0107] Particle P may be located on the target substrate T. Particle P may be a foreign object that may adhere to the target substrate T before or during the coating process. This foreign object is located between the coating material M and the target substrate T, which can lead to defective parts. Furthermore, when the target substrate T moves, the foreign object may become trapped between the coating section 70 and the target substrate T, potentially causing scratches on the target substrate T. This particle P can be detected by the change in the amount of light from the first light beam LB received by the first light-receiving section 33.

[0108] When the light intensity of the first beam LB remains unchanged or the change in light intensity is within a preset range, the coating unit 70 can continuously perform the coating process of coating material M onto the upper surface of the target substrate T. That is, when no particles P with a size greater than or equal to a preset size are detected on the upper surface of the target substrate T, the control unit 100 can control the control unit 10 and the coating unit 70 to continue performing the coating process.

[0109] When the change in the light intensity of the first beam LB is greater than or equal to a preset range, the control unit 100 can interrupt or stop the coating process. Specifically, when there are particles P on the upper surface of the target substrate T with a height greater than the first spacing D2, they will block or obstruct the path of the first beam LB. Therefore, the light intensity of the first beam LB received by the first light-receiving unit 33 may be reduced to less than or equal to the preset value, or the first light-receiving unit 33 may not receive the first beam LB at all. In this case, the control unit 100 can detect the change in the light intensity of the first beam LB through the first light-receiving unit 33 to control the coating unit 70 and / or the stage 10 to interrupt or stop the coating process. Then, the target substrate T can be transferred to the outside of the coating apparatus 1 for cleaning.

[0110] In some embodiments, when the change in the light intensity of the first beam LB is greater than or equal to a preset range, the control unit 100 can control the third position adjustment unit 71 to move the coating unit 70 upward. This allows the coating unit 70 to avoid foreign objects on the upper surface of the target substrate T. In some embodiments, the control unit 100 can move the coating unit 70 or stop the coating process based on the degree of change in the light intensity of the first beam LB. For example, when the change in the light intensity of the first beam LB is within a first preset range, the control unit 100 can move the coating unit 70 upward; and when the change in the light intensity of the first beam LB is within a second preset range greater than the first preset range, the control unit 100 can stop or halt the coating process while moving the coating unit 70 upward.

[0111] Reference Figure 8 Particle P can be located between the target substrate T and stage 10. That is, with Figure 7 In different cases, particle P may be located on the lower surface of the target substrate T. Since particle P has a predetermined height, it causes the target substrate T to bend. In this case, the height of the first light-emitting portion 31 and / or the coating portion 70 can be adjusted according to the bending of the target substrate T.

[0112] The first distance measuring unit 50 measures a first distance D1' from the upper surface of the target substrate T, and the control unit 100 can monitor the change in the first distance D1'. The control unit 100 can calculate the change in the height of the upper surface of the target substrate T based on the change in the first distance D1', and can control the height of the first light-emitting unit 31 and / or the coating unit 70 accordingly. In some embodiments, when the measured change in the height of the upper surface of the target substrate T is greater than or equal to a preset range, the control unit 100 can interrupt or stop the coating process.

[0113] For example, the upper surface of the target substrate T below the first distance measuring unit 50 may gradually rise due to the bending of the target substrate T. In this case, the first distance D1' measured by the first distance measuring unit 50 will decrease. When the measured first distance D1' is less than or equal to a preset value, the control unit 100 can raise the first light emitting unit 31. The control unit 100 can determine the rising distance of the first light emitting unit 31 by taking into account the amount of decrease in the first distance D1'. As a result, the first light beam LB can rise to maintain a constant first distance D2 with the upper surface of the target substrate T. That is, the coating apparatus 1 can prevent false detection due to changes in the light intensity of the first light beam LB by moving the first light emitting unit 31 so that the first light beam LB maintains a constant distance with the target substrate T in response to the bending of the target substrate T, thereby continuously detecting particles P with a size greater than or equal to a preset size on the upper surface of the bent target substrate T. In some embodiments, the control unit 100 can control the rising distance and / or rising speed of the first light emitting unit 31 by calculating the change in the first distance D1' per unit time.

[0114] In some embodiments, since the precise height of the upper surface of the target substrate T is calculated by the first distance measuring unit 50, particles P on the upper surface of the target substrate T can be accurately detected even if the target substrate T is bent. In this case, the height Ph of particle P can be calculated based on the change in the light intensity of the first beam LB, the height of the upper surface of the target substrate T, and the first spacing D2.

[0115] Figures 9 to 11 This is a diagram illustrating the steps of a method for manufacturing a display device according to another embodiment.

[0116] Figures 9 to 11 Implementation examples and Figures 6 to 8 The difference in the embodiments is that the bending of the lower surface of the target substrate T and the particles P on the lower surface of the target substrate T can be further detected.

[0117] Reference Figure 5 , Figures 9 to 11 The step S101 of measuring the distance from one surface of the target substrate T may include: measuring the distance from the lower surface of the target substrate T by means of a second distance measuring unit 50_2 arranged below the target substrate T.

[0118] Step S102, which adjusts the spacing between a surface of the target substrate T and at least one light beam, may include: lowering the second light-emitting part 31_2 when the distance from the lower surface of the target substrate T is less than or equal to a preset value, wherein the second light-emitting part 31_2 emits a second light beam LB_2 onto the lower surface of the target substrate T so that the second light beam LB_2 spans the lower surface of the target substrate T.

[0119] Reference Figure 3 , Figure 4 and Figure 9 The stage 10a can be an air-bearing stage that suspends the target substrate T by air pressure. This allows a gap to be formed between the lower surface of the target substrate T and the upper surface of the stage 10a. The target substrate T can move along the first direction DR1 while spaced apart from the stage 10a.

[0120] The first light-emitting section 31_1 can emit a first light beam LB_1 onto the upper surface of the target substrate T. The first light beam LB_1 can be spaced apart from the upper surface of the target substrate T by a first distance D2.

[0121] The second light-emitting section 31_2 can emit a second light beam LB_2 onto the lower surface of the target substrate T. The second light beam LB_2 can be spaced apart from the lower surface of the target substrate T by a third distance D5. In this case, the second light beam LB_2 can pass between the lower surface of the target substrate T and the upper surface of the stage 10a. That is, the target substrate T can be moved to pass between the first light beam LB_1 and the second light beam LB_2.

[0122] When the target substrate T moves along the first direction DR1, the first distance measuring unit 50_1 can measure a first distance D1 from the upper surface of the target substrate T, and the second distance measuring unit 50_2 can measure a second distance D4 from the lower surface of the target substrate T. The control unit 100 can calculate the change in height of the upper and lower surfaces of the target substrate T based on the measured first distance D1 and second distance D4, respectively. Multiple first distance measuring units 50_1 and multiple second distance measuring units 50_2 can be arranged. In some embodiments, the precise thickness Ht and / or the change in thickness Ht of the target substrate T can be calculated based on the first distance D1 and the second distance D4.

[0123] The control unit 100 can control the first position adjustment unit 35_1 and the fourth position adjustment unit 35_2 to adjust the heights of the first light-emitting unit 31_1 and the second light-emitting unit 31_2 according to the change in height of the upper and lower surfaces of the target substrate T. The control unit 100 monitors the change in height of the upper and lower surfaces of the target substrate T and controls the first position adjustment unit 35_1 and the fourth position adjustment unit 35_2 to keep the first pitch D2 and the third pitch D5 constant. In this case, the heights of the first light-receiving unit 33_1 and the second light-receiving unit 33_2 can be adjusted respectively by the second position adjustment unit 37_1 and the fifth position adjustment unit 37_2 according to the heights of the first light-emitting unit 31_1 and the second light-receiving unit 31_2.

[0124] When the measured first distance D1 and / or second distance D4 is greater than or equal to a preset range, the control unit 100 can move the position of the coating unit 70, or stop or interrupt the coating process. For example, when the first distance D1 decreases, the coating unit 70 can rise, and when the first distance D1 increases, the coating unit 70 can fall. That is, when using an air-floating stage, the coating apparatus 1a can move the first light-emitting unit 31_1 and / or the second light-emitting unit 31_2 in accordance with the vertical movement of the target substrate T according to the gas jet, thereby accurately detecting particles P on the upper or lower surface of the target substrate T.

[0125] Reference Figure 3 , Figure 4 and Figure 10 When particle P is located on the upper surface of the target substrate T, the control unit 100 can determine whether a particle P with a size greater than or equal to a preset size exists based on the change in the amount of light from the first light beam LB_1 received by the first light receiving unit 33_1. The detection of particle P on the upper surface of the target substrate T and... Figure 7 The embodiments are basically the same or similar, so their detailed descriptions will be omitted below.

[0126] Reference Figure 3 , Figure 4 and Figure 11 When particle P is located on the lower surface of the target substrate T, the control unit 100 can determine whether there is a particle P with a size greater than or equal to a preset size based on the change in the amount of light from the second light-receiving unit 33_2 receiving the second beam LB_2. The preset size can be greater than or equal to the third spacing D5. Specifically, when a particle P with a height greater than the third spacing D5 is located on the lower surface of the target substrate T, it will block or obstruct the path of the second beam LB_2, thereby causing a change in the amount of light from the second light-receiving unit 33_2 receiving the second beam LB_2. When the change in the amount of light from the second beam LB_2 is greater than or equal to a preset range, the control unit 100 can stop or interrupt the operation of the coating unit 70.

[0127] In some embodiments, since the precise heights of the upper and lower surfaces of the target substrate T are calculated by the first distance measuring unit 50_1 and the second distance measuring unit 50_2, the precise heights of the particles P on the upper and / or lower surfaces of the target substrate T can be calculated even if the target substrate T is bent.

[0128] In addition to further detecting the curvature of the lower surface of the target substrate T and the particles P on the lower surface of the target substrate T, it can also detect other defects. Figures 9 to 11 Implementation examples and Figures 6 to 8 The embodiments are basically the same or similar, therefore, repeated descriptions will be omitted below.

[0129] The embodiments of the present invention have been described above with reference to the accompanying drawings. However, those skilled in the art will understand that the present invention can be implemented in other specific forms without changing the technical concept or essential features of the invention. Therefore, the embodiments described above should be understood as exemplary in all respects and not restrictive.

Claims

1. A coating apparatus comprising: a stage configured to convey a target substrate; a coating section configured to coat a coating material onto the target substrate; a first light emitting section configured to emit a first light beam across an upper surface of the target substrate; a first position adjusting section connected to the first light emitting section and configured to adjust a height of the first light emitting section; a first distance measuring section disposed on the stage and configured to measure a first distance from the upper surface of the target substrate; and a control section configured to control the first position adjusting section to adjust the height of the first light emitting section based on the first distance measured by the first distance measuring section, wherein the control section controls the first position adjusting section to keep a first spacing between the first light beam and the upper surface of the target substrate constant, and wherein the control section controls the first position adjusting section to raise the first light emitting section when the first distance is less than or equal to a predetermined value.

2. The coating apparatus according to claim 1, further comprising: a first light receiving section configured to receive the first light beam, wherein the control section detects a particle having a size greater than or equal to a predetermined size on the upper surface of the target substrate based on an amount of the first light beam received by the first light receiving section. The control section suspends or interrupts an operation of the coating section when a particle having a size greater than or equal to a predetermined size is detected on the upper surface of the target substrate.

3. The coating apparatus of claim 2, wherein, 4. A coating apparatus comprising: a stage configured to convey a target substrate; a coating section configured to coat a coating material onto the target substrate; a first light emitting section configured to emit a first light beam across an upper surface of the target substrate; a first position adjusting section connected to the first light emitting section and configured to adjust a height of the first light emitting section; a first distance measuring section disposed on the stage and configured to measure a first distance from the upper surface of the target substrate; a control section configured to control the first position adjusting section to adjust the height of the first light emitting section based on the first distance measured by the first distance measuring section; a second light emitting section configured to emit a second light beam across a lower surface of the target substrate; a second light receiving section configured to receive the second light beam; a fourth position adjusting section connected to the second light emitting section and configured to adjust a height of the second light emitting section; a third position adjusting section configured to adjust a height of the second light receiving section; and a second distance measuring section disposed below the stage and configured to measure a second distance from the lower surface of the target substrate, wherein the stage is an air floating stage configured to lift the target substrate using air pressure.

5. The coating apparatus according to claim 4, wherein the control section controls the fourth position adjusting section to adjust the height of the second light emitting section based on the second distance measured by the second distance measuring section.

6. The coating apparatus according to claim 5, wherein ​ ​ The control section calculates an amount of change in height of the lower surface of the target substrate based on an amount of change in the second distance, and controls the fourth position adjustment section to adjust the height of the second light emitting section in correspondence with the amount of change in height of the lower surface of the target substrate.

7. The coating apparatus according to claim 4, wherein The control section controls the fourth position adjustment section to keep a second distance between the second light beam and the lower surface of the target substrate constant.

8. The coating apparatus according to claim 4, wherein The control section detects a particle having a size greater than or equal to a predetermined size on the lower surface of the target substrate based on an amount of the second light beam received by the second light receiving section.

Images