Lidar and its mask cleaning device, control method and control device

Abstract

This invention provides a lidar and its photomask cleaning device, control method, and control apparatus. The photomask cleaning device includes a cleaning section comprising a cleaning component and a first magnetic component. The cleaning component is adapted to clean the outer surface of the lidar photomask, and the first magnetic component is connected to the cleaning component. A second magnetic component is disposed on the optomechanical rotor of the lidar and is adapted to cooperate with the first magnetic component to drive the cleaning component to rotate along the outer surface of the photomask. The photomask cleaning device provided by this invention utilizes the magnetic attraction between the second magnetic component of the optomechanical rotor and the first magnetic component of the cleaning section to cause the cleaning component to adhere to the outer surface of the photomask and rotate along the outer surface to complete the cleaning of the photomask. This simplifies the structure of the photomask cleaning device, reduces the space occupied during use, and allows the cleaning operation to be performed simultaneously with the lidar's detection operation, minimizing the impact on the normal operation of the lidar.

Description

Technical Field

[0001] This invention relates to the field of environmental sensing, and in particular to a lidar and its photomask cleaning device, control method and control device. Background Technology

[0002] LiDAR is an important sensor for sensing information about the surrounding environment. When detecting the surrounding environment, the laser array of LiDAR can emit a detection beam to detect the target object. The detection beam is reflected by the target object to generate an echo beam. The echo beam is received by the detector array of LiDAR, and after processing, the surrounding environment information can be obtained.

[0003] A lidar includes a photomask, which is an important component that protects the laser array, detector array, and corresponding driver and readout chips so that they can work properly. Because the environment in which lidar operates can cause a lot of dust, sewage, mud, and frost to form on the photomask, the lidar may not be able to properly acquire information about the surrounding environment. Therefore, it is necessary to clean the dirt on the surface of the lidar photomask.

[0004] A common method involves cleaning using a combination of liquid rinsing and high-pressure air blowing. However, the aforementioned photomask cleaning device has many components and a complex structure, making it difficult to control, hard to fit the entire radar photomask, and the various components occupy a significant amount of space.

[0005] Therefore, how to simplify the structure of the lidar cleaning device and reduce the space it occupies has become an urgent technical problem to be solved. Summary of the Invention

[0006] This invention provides a photomask cleaning device to simplify the structure of the photomask cleaning device for lidar and reduce the space occupied.

[0007] To address the above problems, embodiments of the present invention provide a photomask cleaning device, comprising:

[0008] The cleaning unit includes a cleaning component and a first magnetic component, the cleaning component being adapted to clean the outer surface of the photomask of the lidar, and the first magnetic component being connected to the cleaning component;

[0009] The second magnetic component, disposed on the optomechanical rotor of the lidar, is adapted to cooperate with the first magnetic component to drive the cleaning component to rotate along the outer surface of the photomask.

[0010] Optionally, the second magnetic component is disposed on the side of the optomechanical rotor that does not emit the detection beam.

[0011] Optionally, the optomechanical rotor drives the cleaning component to rotate along the outer surface of the photomask.

[0012] Optionally, at least one of the first magnetic component and the second magnetic component is an electromagnetic component.

[0013] Optionally, in the axial direction of the lidar shaft, the size of the cleaning section is equal to the size of the photomask.

[0014] Optionally, the photomask cleaning device further includes:

[0015] A storage device adapted to store the cleaning unit.

[0016] Optionally, the photomask cleaning device further includes:

[0017] A moving device adapted to move the cleaning unit out of or back into the storage device.

[0018] Optionally, the mobile device includes:

[0019] The storage electromagnetic component is adapted to generate a repulsive force with the first magnetic component, causing the first magnetic component to move the cleaning part out of the storage device.

[0020] Optionally, the mobile device further includes:

[0021] An elastic component is fixed to the storage device, and when the cleaning part is stored in the storage device, the elastic component is in a compressed state.

[0022] Optionally, the mobile device further includes:

[0023] A pressure-applying component is adapted to apply pressure to the cleaning section, thereby pushing the cleaning section back into the storage device.

[0024] Optionally, in any of the above-described photomask cleaning devices, the cleaning section includes a first cleaning section and a second cleaning section, and in the axial direction of the lidar rotating shaft, the sum of the dimensions of the first cleaning section and the second cleaning section is equal to the dimension of the photomask.

[0025] Optionally, in any of the above-described photomask cleaning devices, the cleaning part includes a foldable cleaning part, wherein the size of the foldable cleaning part after unfolding is equal to the size of the photomask in the axial direction of the lidar rotating shaft.

[0026] Optionally, the foldable cleaning unit includes:

[0027] First foldable cleaning section;

[0028] The second foldable cleaning part is movably connected to the first foldable cleaning part;

[0029] An assisting component is adapted to provide an opening and closing force, enabling the second foldable cleaning section to swing relative to the first foldable cleaning section.

[0030] Optionally, the assistive component includes:

[0031] An electromagnetic component, adapted to provide magnetic attraction, controls the second foldable cleaning section to open or close relative to the first foldable cleaning section;

[0032] A support rod, connected to the second foldable cleaning part, is adapted to drive the swing of the second foldable cleaning part;

[0033] An elastic component, adapted to provide a compressive elastic force for opening the second foldable cleaning section relative to the first foldable cleaning section;

[0034] A magnetic component is adapted to generate a magnetic attraction force with the electromagnetic component, causing the elastic component to generate the compressive elastic force, and is used to keep the first foldable cleaning part and the second foldable cleaning part in a closed state.

[0035] Optionally, in any of the above-described photomask cleaning devices, the cleaning unit further includes:

[0036] A support body adapted to connect and support the cleaning component and the first magnetic component.

[0037] Optionally, the photomask cleaning device described in any of the above claims further includes:

[0038] The spraying component, located on the base of the lidar, is adapted to spray cleaning fluid.

[0039] The present invention also provides a lidar, including a photomask cleaning device as described in any of the preceding claims.

[0040] The present invention also provides a control method suitable for a photomask cleaning device, comprising:

[0041] The photomask cleaning signal is acquired, and the cleaning part is moved out of the storage device according to the position of the second magnetic component. It is then attracted to the photomask by the magnetic attraction between the first magnetic component and the second magnetic component, and rotates along the outer surface of the photomask with the optical engine rotor.

[0042] Upon receiving a stop cleaning signal, the magnetic attraction between the first and second magnetic components is severed based on the position of the second magnetic component, causing the cleaning unit to return to the storage device.

[0043] The present invention also provides a control device, comprising:

[0044] The cleaning module is adapted to acquire photomask cleaning signals, and according to the position of the second magnetic component, causes the cleaning part to move out of the storage device, and is attracted to the photomask by the magnetic attraction between the first magnetic component and the second magnetic component, and rotates along the outer surface of the photomask with the optical engine rotor;

[0045] The cleaning stop module is adapted to receive a stop cleaning signal and, based on the position of the second magnetic component, cut off the magnetic attraction between the first magnetic component and the second magnetic component, so that the cleaning part returns to the storage device.

[0046] Compared with the prior art, the technical solution of the embodiments of the present invention has the following advantages:

[0047] The photomask cleaning device provided in this embodiment of the invention includes a cleaning section, which includes a cleaning component and a first magnetic component. The cleaning component is adapted to clean the outer surface of the photomask of the lidar. The first magnetic component is connected to the cleaning component. A second magnetic component is disposed on the optomechanical rotor of the lidar and is adapted to cooperate with the first magnetic component to drive the cleaning component to rotate along the outer surface of the photomask. As can be seen, the photomask cleaning device provided in this embodiment of the invention utilizes the magnetic attraction between the first magnetic component of the cleaning part and the second magnetic component disposed on the optomechanical rotor, so that the cleaning part can be adsorbed onto the outer surface of the photomask of the lidar. As the optomechanical rotor of the lidar rotates, the cleaning part is driven to perform cleaning motion around the surface of the photomask. The entire photomask cleaning device only includes the cleaning part and the second magnetic component to complete the cleaning of the outer surface of the photomask, which simplifies the structure of the photomask cleaning device, saves unnecessary equipment settings, saves production costs, and reduces the space occupied by the photomask cleaning device since it only includes the cleaning part. Moreover, the cleaning part can be adsorbed onto the outer surface of the photomask, which can improve the cleaning effect. At the same time, the photomask cleaning device can perform cleaning work simultaneously with the detection work of the lidar, with minimal impact on the normal operation of the lidar.

[0048] In an optional embodiment of the present invention, the photomask cleaning device includes a foldable cleaning section. The unfolded size of the foldable cleaning section is equal to the size of the photomask in the axial direction of the lidar rotating shaft. When the foldable cleaning section unfolds by being attracted to the outer surface of the photomask under magnetic attraction, since the unfolded size of the foldable cleaning section is equal to the size of the photomask in the axial direction of the lidar rotating shaft, the foldable cleaning section can clean the entire outer surface of the photomask under the drive of the optomechanical rotor. Furthermore, the foldable cleaning section allows for a more efficient use of space in the photomask cleaning device. Attached Figure Description

[0049] To more clearly illustrate the technical solutions in the embodiments of this application or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only embodiments of this application. For those skilled in the art, other drawings can be obtained based on the provided drawings without creative effort.

[0050] Figure 1 This is a schematic diagram of the working state of the lidar photomask cleaning device provided in the embodiment of the present invention;

[0051] Figure 2 This is a schematic diagram of the cleaning section of the photomask cleaning device provided in an embodiment of the present invention;

[0052] Figure 3 This is another structural schematic diagram of the cleaning section of the photomask cleaning device provided in the embodiment of the present invention;

[0053] Figure 4 This is a schematic diagram of the structure of the optomechanical rotor of the lidar provided in an embodiment of the present invention;

[0054] Figure 5 This is another structural schematic diagram of the lidar provided in the embodiments of this application;

[0055] Figure 6 This is a schematic diagram of the foldable cleaning part of the photomask cleaning device provided in this embodiment of the invention when it swings.

[0056] Figure 7 This is a schematic diagram of the foldable cleaning section of the photomask cleaning device provided in this embodiment of the invention when it is closed;

[0057] Figure 8 This is a schematic diagram of the foldable cleaning section of the photomask cleaning device provided in this embodiment of the invention when it is unfolded.

[0058] Figure 9 This is a flowchart illustrating a control method provided in an embodiment of the present invention;

[0059] Figure 10 This is a schematic diagram of the structure of a control device provided in an embodiment of the present invention.

[0060]

[0061] Detailed Implementation

[0062] As can be seen from the background technology, the structure of the lidar cleaning device is relatively complex and occupies a large space during use and installation.

[0063] To simplify the structure of the lidar cleaning device and reduce the space it occupies, this invention provides a lidar cleaning device, comprising:

[0064] The cleaning unit includes a cleaning component and a first magnetic component, the cleaning component being adapted to clean the outer surface of the photomask of the lidar, and the first magnetic component being connected to the cleaning component;

[0065] The second magnetic component, disposed on the optomechanical rotor of the lidar, is adapted to cooperate with the first magnetic component to drive the cleaning component to rotate along the outer surface of the photomask.

[0066] As can be seen, the photomask cleaning device provided in this embodiment of the invention utilizes the magnetic attraction between the first and second magnetic components of the cleaning part to attract the cleaning part to adhere to the outer surface of the photomask of the lidar. As the cleaning part rotates along with the optomechanical rotor of the lidar, it rotates along the outer surface of the photomask, thereby completing the cleaning of the outer surface of the photomask. The photomask cleaning device includes only a cleaning part and a second magnetic component, simplifying its structure, saving unnecessary equipment setup, reducing production costs, and reducing the space occupied by the device. The cleaning part can adhere to the outer surface of the photomask, improving the cleaning effect. Furthermore, the cleaning work can be performed simultaneously with the lidar's detection work, minimizing the impact on the normal operation of the lidar.

[0067] The technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0068] It should be noted that the orientations or positional relationships indicated in this specification are based on the orientations or positional relationships shown in the accompanying drawings, and are only for the purpose of facilitating and simplifying the description, and are not intended to indicate or imply that the device referred to must have a specific orientation or be constructed in a specific orientation, and therefore should not be construed as a limitation of the present invention.

[0069] Please refer to Figure 1 , Figure 1 This is a schematic diagram of the working state of the lidar cleaning device provided in the embodiment of the present invention.

[0070] like Figure 1As shown, the photomask cleaning device provided in this embodiment of the invention includes a cleaning part 1, which includes a cleaning component 11 and a first magnetic component 12. The cleaning component 11 is adapted to clean the outer surface of the photomask of the lidar, and the first magnetic component 12 is connected to the cleaning component 11.

[0071] The second magnetic component 2 is disposed on the optomechanical rotor 3 of the lidar and is adapted to cooperate with the first magnetic component 12 to drive the cleaning component 11 to rotate along the outer surface of the photomask.

[0072] The cleaning component 11 mentioned in this article can be a component that can perform a cleaning function. Its specific material can be rubber or fiber, or other materials that are easy to clean. Materials that are easy to clean mainly refer to cleaning materials with elastic deformation. Specifically, they can be cleaning items such as rubber and polyester fiber.

[0073] It should be noted that the number of cleaning units 1 can be set as needed. Multiple cleaning units 1 can be set at different positions along the circumference of the photomask, or multiple cleaning units can be set at the same position along the axial direction. For example... Figure 1 The first cleaning section 13 and the second cleaning section 14 are included; the number of cleaning sections 1 is only required to ensure that the photomask cleaning device can complete the cleaning work.

[0074] The cleaning component 11 is attached to the outer surface of the photomask by the magnetic attraction of the first magnetic component 12 and the second magnetic component 2 only when cleaning is required.

[0075] Of course, as shown in the figure, the lidar also includes a transmitter or receiver 9. When it is a transmitter, the detection beam emitted by the transmitter passes through the lens 8 and illuminates the target. When it is a receiver, the echo beam reflected by the target passes through the lens 8 and is received by the receiver.

[0076] Both the first magnetic component 12 and the second magnetic component 2 can be permanent magnet components, or at least one of them can be an electromagnetic component. When one of them is an electromagnetic component, the first magnetic component 12 and the second magnetic component 2 generate magnetic attraction when energized. In order to facilitate the control of the power supply and the use of the photomask cleaning device, the second magnetic component 2 can be set as an electromagnetic component. In this way, not only can the first magnetic component 12 drive the cleaning part 1 to rotate and clean according to the magnetic attraction of the second magnetic component 2, but the setting of the power cord can also be facilitated.

[0077] When both are permanent magnet components, after cleaning the photomask, the cleaning part 1 can be removed from the outer surface of the photomask by external force; when one of them is an electromagnetic component, the cleaning part 1 can be removed from the outer surface of the photomask by disconnecting the power supply.

[0078] It can be seen that when either the first magnetic component 12 or the second magnetic component 2 is an electromagnetic component, the magnetic attraction between the two can be controlled by turning the power on and off, making the control process simpler.

[0079] Specifically, when setting up a photomask cleaning device, the type of magnetic component can be flexibly configured according to actual needs.

[0080] For example, when fewer rotations are needed to achieve the cleaning purpose, both magnetic components can be electromagnetic components, and the power supply can control both magnetic components simultaneously, facilitating the control of the photomask cleaning device; when more rotations are needed to achieve the cleaning purpose, the second magnetic component 2 can be an electromagnetic component, and the first magnetic component 12 can be a permanent magnet component, or both can be permanent magnet components. In this way, interference from the power line can be reduced during rotation; of course, power can also be transmitted wirelessly through energized slide rails, thereby reducing power line interference.

[0081] It is easy to understand that, in order to prevent the cleaning part 1 from detaching from the outer surface of the photomask under the action of centrifugal force when it rotates with the optical rotor 3, thereby improving reliability, the magnetic attraction between the second magnetic component 2 and the first magnetic component 12 needs to meet the following conditions:

[0082] F 磁吸力 ≥F 离心力

[0083] Obviously, the formula for calculating centrifugal force is:

[0084]

[0085] In the formula, m is the mass of the cleaning part 1, V is the rotational speed of the optical rotor 3, and r is the distance from the cleaning part 1 to the rotation center of the optical rotor 3.

[0086] According to Maxwell's formula, the magnetic attraction force is:

[0087]

[0088] In the formula, B is the magnetic induction intensity, S is the magnetic pole area, and μ0 is the magnetic permeability in vacuum or air.

[0089] With the structures of the cleaning unit 1 and the lidar fixed, the only variables are the rotational speed of the optomechanical rotor 3 and the magnetic field strength (i.e., magnetic induction intensity B) generated by the second magnetic component 2 on the optomechanical rotor 3; therefore, the magnetic induction intensity needs to satisfy the following condition 1:

[0090]

[0091] In addition, to prevent the cleaning unit 1 from falling off the outer surface of the photomask under the influence of gravity, the magnetic attraction must also meet the following conditions:

[0092] εF 磁吸力 ≥F 重力

[0093] In the formula, ε is the coefficient of friction between the cleaning part 1 and the photomask surface;

[0094] Obviously, the formula for calculating gravity is:

[0095] F 重力 =mg

[0096] In the formula, m is the mass of the cleaning part 1, and g is the acceleration due to gravity.

[0097] Therefore, given a fixed structure for the cleaning unit 1 and the lidar, the magnetic induction intensity also needs to satisfy the following condition 2:

[0098]

[0099] By setting the magnetic induction intensity B of the second magnetic component 2 to meet conditions 1 and 2, the centrifugal force and gravity during its rotation can be overcome, preventing it from falling off the outer surface of the lidar photomask and improving the reliability and stability of the photomask cleaning device.

[0100] Thus, the photomask cleaning device provided in this application embodiment has a second magnetic component 2 on the optomechanical rotor 3 and a first magnetic component 12 on the cleaning part 1. The second magnetic component 2 and the first magnetic component 12 generate magnetic attraction. When it is necessary to clean the outer surface of the photomask, the cleaning part 1 is attracted to the outer surface of the photomask under the action of the magnetic attraction between the second magnetic component 2 and the first magnetic component 12. The rotation of the optomechanical rotor 3 causes the second magnetic component 2 on the optomechanical rotor 3 to rotate, which drives the first magnetic component 12 and the cleaning component 11 to rotate along the outer surface of the photomask, thereby completing the cleaning of the outer surface of the photomask.

[0101] As can be seen, the photomask cleaning device provided in the embodiments of the present invention has a simple structure, can save unnecessary equipment setup, reduce production costs, reduce the space occupied by the photomask cleaning device, and the cleaning part can be adsorbed onto the outer surface of the photomask, which can improve the cleaning effect.

[0102] The tightness of the cleaning part adhering to the outer surface of the photomask can be controlled by the magnitude of the magnetic attraction. Increasing the current enhances the magnetic attraction, making the cleaning part adhere more tightly to the outer surface of the photomask, thus improving the cleaning effect of the photomask cleaning device.

[0103] In order to enable the photomask cleaning device to complete a thorough cleaning of the outer surface of the photomask, in one embodiment, the size of the cleaning part 1 in the axial direction of the lidar rotating shaft of the photomask cleaning device provided in this application embodiment is equal to the size of the photomask.

[0104] Wherein, the axial direction is as follows Figure 1 As indicated by the dashed line A, when the cleaning part 1 rotates, the cleaning surface can cover the entire area of ​​the outer surface of the photomask, thereby achieving comprehensive cleaning of the outer surface of the photomask and ensuring the cleaning effect of the photomask cleaning device.

[0105] For ease of installation of the cleaning unit 1, in one specific embodiment, please refer to [reference needed]. Figure 1 The photomask cleaning device may also be equipped with a storage device 4.

[0106] like Figure 1 As shown, the storage device 4 can store the cleaning part 1. When cleaning is not required or when the cleaning work is completed, the cleaning part 1 can be stored in the storage device 4. When cleaning is required, the cleaning part 1 can be removed from the storage device 4, thus facilitating the storage of the cleaning part 1.

[0107] To facilitate the removal or return of the cleaning unit 1 from the storage device 4, in one embodiment, the photomask cleaning device may also be provided with a moving device to move the cleaning unit 1 from the storage device 4 or return it.

[0108] In one specific embodiment, the moving device may include a storage electromagnetic component adapted to generate a repulsive force with the first magnetic component, causing the first magnetic component 12 to move the cleaning part out of or back into the storage device.

[0109] It is easy to understand that the storage electromagnetic component is installed in the storage device. By energizing or de-energizing the storage electromagnetic component, the generation or disappearance of the electromagnetic force is controlled, and the direction of the current is controlled, thereby controlling the direction of the generated electromagnetic force.

[0110] In this way, when cleaning is required, the power supply of the storage electromagnetic component is turned on, and the cleaning part 1 can be moved out of the storage device 4 under the repulsive force between the storage electromagnetic component and the first magnetic component 12, which can facilitate the control of the removal of the cleaning part 1; when cleaning is completed, the storage electromagnetic component is powered by a reverse current, generating a magnetic attraction force to attract the cleaning part 1 back to the storage device 4.

[0111] Of course, in another specific embodiment where power control is not used, the mobile device may further include:

[0112] An elastic component is fixed to the storage device 4. When the cleaning part 1 is stored in the storage device, the elastic component is in a compressed state.

[0113] Thus, when cleaning unit 1 needs to perform cleaning work, since cleaning unit 1 is either in a state where it has not performed cleaning work or has already completed the previous cleaning work and is already stored in the storage device 4, cleaning unit 1 can be moved out of the storage device using the elastic force of the elastic member without the need for additional assistance.

[0114] Of course, the moving device may also include a pressure-applying component adapted to apply pressure to the cleaning section 1, thereby pushing the cleaning section 1 back into the storage device 4.

[0115] When the cleaning work is completed, the cleaning part 1 can be easily reset using the pressure application component. Specifically, depending on the specific configuration of the first magnetic component 12 and the second magnetic component 2, the power supply of the first magnetic component 12 (when the first magnetic component 12 is an electromagnetic component) or the power supply of the second magnetic component 2 (when the second magnetic component 2 is an electromagnetic component) or both power supplies can be disconnected simultaneously (when both are electromagnetic components), thereby causing the magnetic attraction between the first magnetic component 12 and the second magnetic component 2 to disappear. At this time, the cleaning part 1 can be easily reset using the pressure application component. When both the first magnetic component 12 and the second magnetic component 2 are permanent magnet components, the cleaning part 1 can be reset directly using the pressure application component.

[0116] Specifically, the pressure-applying component may be a hydraulic cylinder or similar component, to assist the cleaning unit 1 in returning to the storage device 4.

[0117] Therefore, the removal and return of the cleaning unit 1 can be flexibly controlled, making it convenient to use.

[0118] For convenient storage of cleaning unit 1, in one embodiment, please refer to [reference needed]. Figure 1 The cleaning section 1 may include a first cleaning section 13 and a second cleaning section 14. In the axial direction of the lidar rotating shaft, the sum of the dimensions of the first cleaning section 13 and the second cleaning section 14 is equal to the dimension of the photomask.

[0119] It can be seen that dividing the cleaning unit 1 into two parts, the first cleaning unit 13 and the second cleaning unit 14, only requires satisfying the requirements in the axial direction of the lidar rotating shaft (i.e., Figure 1 As shown by arrow A, the size of the two components after splicing should be equal to the size of the photomask.

[0120] The cleaning unit 1 is configured as a combination of two parts, and the two parts of the cleaning unit 1 can be stored separately, so that the storage position can be set flexibly and reasonably, further reducing the storage space occupied; and if only a part of the photomask needs to be cleaned, only the first cleaning unit 13 or the second cleaning unit 14 can be operated.

[0121] It is readily understood that, in one specific embodiment, when the cleaning unit 1 is configured as two parts, a first cleaning unit 13 and a second cleaning unit 14, the corresponding storage device 4 and the moving device can also be configured as two separate units, such as... Figure 1 As shown, a top storage device is provided at the top for storing the first cleaning part 13. Of course, the moving device may also be provided with a top moving device; a bottom storage device is provided at the bottom for storing the second cleaning part 14. The moving device may also be provided with a bottom moving device.

[0122] Specifically, the top storage device is fixed to the top cover of the lidar. In order to house the first cleaning part 13, an opening facing the base of the lidar can be provided. Correspondingly, the moving device also needs to be provided with a top moving device. The top moving device may include a top cleaning magnetic component fixed to the top cleaning component and a top storage electromagnetic component fixed to the top storage device.

[0123] The top cleaning magnetic component is located on the side of the top cleaning component facing the top cover, and the top storage electromagnetic component is located on the side of the top storage device opposite to the opening.

[0124] Of course, the top cleaning component moving device may also include the elastic component and the pressure-applying component. The elastic component is fixed to the side of the top storage device opposite to the opening. When the top cleaning component is stored in the top storage device, the elastic component is in a compressed state. Thus, when cleaning is required, the first cleaning part 13 can be moved out of the top storage device under the elastic force of the elastic component. The pressure-applying component is adapted to apply pressure to the top cleaning component, pushing the top cleaning component back into the top storage device. After the cleaning work is completed, the first cleaning part 13 is inconvenient to return due to the setting position of the top storage device. Thus, the pressure-applying component can be used to assist the first cleaning part 13 in returning to the top storage device, which is beneficial for the first cleaning part 13 to return to the top storage device.

[0125] The bottom storage device is fixed to the base of the lidar. In order to house the second cleaning part 14, an opening can be provided facing the top cover of the lidar. Correspondingly, the moving device also needs to be provided with a bottom moving device. The bottom moving device may include a bottom cleaning magnetic component fixed to the bottom cleaning component and a bottom storage electromagnetic component fixed to the bottom storage device.

[0126] The bottom cleaning magnetic component is located on the side of the bottom cleaning component facing the base, and the bottom storage electromagnetic component is located on the side of the bottom storage device opposite to the opening.

[0127] Similarly, the bottom moving device may also be provided with a bottom cleaning magnetic component, fixed to the bottom cleaning component; and a bottom storage electromagnetic component, fixed to the bottom storage device.

[0128] The bottom cleaning magnetic component is located on the side of the bottom cleaning component facing the base, and the bottom storage electromagnetic component is located on the side of the bottom storage device opposite to the opening.

[0129] In one specific embodiment, to facilitate the connection between the cleaning component 11 and the first magnetic component 12, the cleaning part 1 may further include a support body 16. Please refer to [reference needed]. Figure 2 , Figure 2 This is a schematic diagram of the cleaning section of the photomask cleaning device provided in an embodiment of the present invention.

[0130] like Figure 2 As shown, the support 16 is adapted to connect and support the cleaning component 11 and the first magnetic component 12.

[0131] Specifically, the support body 16 can be a support block with a frame structure and a storage space inside. The cleaning component 11 is disposed on one side of the support body 16, and the first magnetic component 12 is disposed inside the support body 16 and located on the side close to the cleaning component 11. This ensures that the cleaning component 11 fits the photomask while ensuring the magnetic attraction between the first magnetic component 12 and the second magnetic component 2.

[0132] Of course, the number of the cleaning components 11 can be set to multiple, since in Figure 1 The orientation shown does not allow for the simultaneous display of cleaning components 11 located in other positions, but in actual design... Figure 1 The cleaning component 11 of the photomask cleaning device shown can be arranged in multiple ways around the base 7.

[0133] In addition, along Figure 1In the placement of the lidar hood cleaning device shown, the cleaning component 11 can be positioned perpendicular to the base 7, covering the outer surface of the lid; or it can be inclined, meaning the cleaning component 11 is positioned at a certain angle to the base 7. When the cleaning component 11 is positioned in both the vertical and horizontal directions... Figure 1 The structure of the photomask cleaning device shown allows the upper and lower cleaning components 11 to fit together in a "<" or ">" shape. When the cleaning components 11 are positioned in one direction, that is... Figure 5 The structure of the photomask cleaning device shown can be such that the cleaning component 11 is arranged in a "\" or " / " shape. As long as the size of the cleaning component 11 can cover the outer surface of the photomask in the axial direction of the lidar rotation axis, it is acceptable.

[0134] The support body 16 can be made of metal brackets or other materials that can support the cleaning part 1 to perform cleaning work.

[0135] like Figure 2 As shown, the size of the support body 16 matches the size of the cleaning component 11, which can support the cleaning component 11 and the first magnetic component 12 to assist the cleaning part 1 in completing the cleaning work.

[0136] Of course, in another specific embodiment, to facilitate the removal of the cleaning part 1, when a support body is provided, this application embodiment also provides another cleaning part of the photomask cleaning device, such as... Figure 3 As shown, Figure 3 This is another structural schematic diagram of the cleaning section of the photomask cleaning device provided in the embodiment of the present invention.

[0137] like Figure 3 As shown, the support body 16 is attached and fixed to the cleaning component 11. A fixing magnetic component 17 is provided at the bottom of the support body 16. The fixing magnetic component 17 is adapted to generate a repulsive force with the storage electromagnetic component.

[0138] In this way, by setting a fixed magnetic element 17, when the cleaning part 1 needs to be removed from the storage device 4, the storage electromagnetic element is energized, and a repulsive force is generated between it and the fixed magnetic element 17, so that the cleaning part 1 is removed from the storage device 4.

[0139] Of course, the timing of removal needs to be controlled so that after the cleaning part 1 is removed, the position of the second magnetic component 2 is just above the storage device 4, so that a magnetic attraction force can be generated between the first magnetic component 12 and the second magnetic component 2, causing the cleaning part to adhere to the outer surface of the photomask.

[0140] To ensure that the second magnetic component 2 does not interfere with the normal operation of the lidar, in one embodiment, the second magnetic component 2 is positioned on the side of the optomechanical rotor 3 that does not emit the detection beam. For details, please refer to... Figure 1 And refer to Figure 4 , Figure 4 This is a schematic diagram of the structure of the optomechanical rotor of the lidar provided in an embodiment of the present invention.

[0141] It is easy to understand that when a lidar is working, the laser on the emitting plate emits a detection beam to detect the target object. The echo beam reflected by the target object is received by the detector on the detection plate, and the optical signal is converted into an electrical signal. After processing, the distance information is finally obtained, forming a point cloud image.

[0142] Therefore, in order to prevent the transmission of the detection beam and echo beam from being affected when the cleaning unit 1 cleans the photomask, the second magnetic component 2 is installed on the side where the lens 8 is not located.

[0143] Specifically, such as Figure 4 As shown, lens 8 is used to emit a detection beam or an incident echo beam. Therefore, the second magnetic component 2 can be installed at any position other than where lens 8 is located, so as not to affect the propagation of the beam and avoid affecting the normal operation of the lidar.

[0144] In one specific implementation, such as Figure 4 As shown, for ease of setup, the second magnetic component 2 can be positioned on the opposite side of the lens 8, i.e. Figure 4 The side behind the middle lens 8.

[0145] When the photomask cleaning device is performing cleaning work, the magnetic attraction between the first magnetic component 12 and the second magnetic component 2 causes the second magnetic component 2 to attract the first magnetic component 12, which in turn causes the cleaning component 11 to be adsorbed onto the outer surface of the photomask. At this time, the optomechanical rotor 3 rotates, causing the cleaning component 11 to rotate along the outer surface of the photomask, thus completing the cleaning work on the outer surface of the photomask.

[0146] It should be noted that the rotation angle can be 360 ​​degrees, and this 360 degrees refers to 360 degrees in the horizontal direction, rotating around the outer surface of the photomask. Figure 1 and Figure 4 The direction indicated by R in the middle is shown in the arrow. This is only one example for illustration and does not limit the direction of rotation. The specific direction of rotation can be adjusted as needed.

[0147] In this way, when the optical engine rotor 3 rotates, the magnetic attraction force can drive the cleaning component 11 to rotate 360 ​​degrees along the outer surface of the photomask, thus completing the cleaning work on the outer surface of the photomask.

[0148] In another specific implementation, such as Figure 5 As shown, Figure 5 This is another structural schematic diagram of the lidar provided in an embodiment of this application.

[0149] like Figure 5 As shown, the cleaning unit 1 further includes a foldable cleaning unit 15, located in the axial direction of the lidar rotating shaft (e.g., ...). Figure 1 (in the direction indicated by the dashed line A), the unfolded size of the foldable cleaning part 15 is equal to the size of the photomask.

[0150] The cleaning unit 1 is designed to be foldable, and its unfolded dimensions are such that it covers the outer surface of the photomask in the axial direction of the lidar's rotating shaft (e.g., ...). Figure 1 The dimensions (in the direction indicated by the dashed line A) are as follows. This allows for comprehensive cleaning of the outer surface of the photomask during rotational cleaning. Therefore, when setting up the storage device, only one storage device 4 needs to be installed, and the size of the storage device in the axial direction of the lidar rotation axis is reduced, thus reducing the space occupied by the photomask cleaning device.

[0151] For details, please continue to refer to Figure 5 In one specific embodiment, the foldable cleaning section 15 includes:

[0152] First foldable cleaning unit 151;

[0153] The second foldable cleaning part 152 is movably connected to the first foldable cleaning part 151;

[0154] The assist component 153 is adapted to provide an opening and closing force, enabling the second foldable cleaning section 152 to swing relative to the first foldable cleaning section 151.

[0155] It should be noted that the second foldable cleaning part 152 is movably connected to the first foldable cleaning part 151 at a connection point, which is the connection point. Figure 5 The position where the second foldable cleaning part 152 and the first foldable cleaning part 151 abut ( Figure 5 (The location indicated by the middle arrow S).

[0156] The second foldable cleaning part 152 swings relative to the first foldable cleaning part 151 around the connection point under the drive of the assist component 153.

[0157] When cleaning is not required using the foldable cleaning part 15, the first foldable cleaning part 151 and the second foldable cleaning part 152 are folded and placed. When cleaning is needed, the assisting component 153 drives the second foldable cleaning part 152 to swing upward around the connection point in the direction relative to the folding, thereby unfolding the second foldable cleaning part 152 and the first foldable cleaning part 151. When cleaning is completed, the assisting component 153 drives the second foldable cleaning part 152 to swing downward around the connection point in the direction relative to the folding, thereby closing the second foldable cleaning part 152 and the first foldable cleaning part 151, thus folding the second foldable cleaning part 152.

[0158] The foldable cleaning section 15 can be easily controlled and used by the assisting component 153 to help unfold or close the foldable cleaning section 15.

[0159] The foldable cleaning section is configured as a two-part unit, which reduces the size of the storage device 4 required by the foldable cleaning section 15 in the axial direction of the lidar shaft, thereby reducing the space occupied by the photomask cleaning device.

[0160] The connection point is the point where the top edges of the first foldable cleaning part 151 and the second foldable cleaning part 152 contact each other when they are folded together. Specifically, the first foldable cleaning part 151 and the second foldable cleaning part 152 can be connected by a hinge, therefore the connection point is the hinge point. For details, please refer to... Figure 6 At point C shown, Figure 6 This is a schematic diagram of the foldable cleaning part of the photomask cleaning device provided in the embodiment of the present invention when it swings.

[0161] To facilitate the control of the unfolding and closing of the first foldable cleaning section 151 and the second foldable cleaning section 152, in one specific embodiment, this application also provides a foldable cleaning section 15 of a photomask cleaning device. Please refer to... Figure 6 ,refer to Figure 7 and Figure 8 ,in, Figure 7 This is a schematic diagram of the foldable cleaning section of the photomask cleaning device provided in this embodiment of the invention when it is closed. Figure 8 This is a schematic diagram of the foldable cleaning section of the photomask cleaning device provided in an embodiment of the present invention when it is unfolded.

[0162] like Figures 6-8 As shown, the assist component 153 of the foldable cleaning section 15 of the photomask cleaning device provided in this application embodiment may include:

[0163] Electromagnetic component 1530 is adapted to provide magnetic attraction force to control the second foldable cleaning part 152 to open or close relative to the first foldable cleaning part 151;

[0164] The support rod 1531 is connected to the second foldable cleaning part 152 and is adapted to drive the second foldable cleaning part 152 to swing.

[0165] The elastic member 1532 is adapted to provide a compressive elastic force for opening the second foldable cleaning part 152 relative to the first foldable cleaning part 151;

[0166] The magnetic component 1533 is adapted to generate a magnetic attraction force with the electromagnetic component 1530, causing the elastic component 1532 to generate the compressive elastic force, and is used to keep the first foldable cleaning part 151 and the second foldable cleaning part 152 in a closed state.

[0167] Specifically, to facilitate the reciprocating motion of the assisting component 153 within the first foldable cleaning section 151, thereby causing the second foldable cleaning section 152 to unfold or close relative to the first foldable cleaning section 151, in one embodiment, a groove is provided inside the first foldable cleaning section 151. The opening of the groove is located on the side of the first foldable cleaning section 151 that is in contact with the second foldable cleaning section 152, and the size of the opening is smaller than the size of the cross-section of the groove parallel to the opening. This ensures that the assisting component 153 can slide smoothly within the groove, preventing tilting when pushing the second foldable cleaning section 152 to swing up or down, and also ensures that the assisting component 153 will not slide out of the groove due to an excessively large opening.

[0168] Thus, when the foldable cleaning section 15 is not needed, such as... Figure 7 As shown, due to the magnetic attraction between the electromagnetic component 1530 and the magnetic component 1533, the magnetic component 1533 is attracted to the electromagnetic component 1530. On the one hand, this causes the elastic component 1532 located between the magnetic component 1533 and the electromagnetic component 1530 to be in a compressed state. On the other hand, this allows the support rod 1531 connected to the other end of the magnetic component 1533 to drive the second foldable cleaning part 152 to adhere to the first foldable cleaning part 151, thus closing the part.

[0169] When the foldable cleaning section 15 needs cleaning, such as Figure 6 and Figure 8As shown, the electromagnetic component 1530 and the magnetic component 1533 can generate a repulsive force through a reverse current, causing the magnetic component 1533 to spring away, or the power supply to the electromagnetic component 1530 can be cut off, causing the magnetic attraction between the electromagnetic component 1530 and the magnetic component 1533 to disappear, thereby causing the magnetic component 1533 to no longer be subject to magnetic force and detach from the electromagnetic component 1530; at this time, the elastic component 1532, which is in a compressed state, is no longer subject to the external force that compresses it, and under the action of elastic force, it drives the magnetic component 1533 to move towards the opening of the slide, so as to push the support rod 1531 connected to the other end of the magnetic component 1533 to support the second foldable cleaning part 152 to unfold around the connection point C along the direction of the slide.

[0170] With the assistance of the assisting component 153, the second foldable cleaning section 152 can be unfolded or closed in the axial direction along the rotating axis of the lidar, which facilitates control of the state of the cleaning section 1 of the photomask cleaning device.

[0171] In one embodiment, the photomask cleaning device may further include a spraying component disposed on the base 7 of the lidar, adapted to spray cleaning fluid.

[0172] In this way, without hindering the installation of the storage device 4 for the photomask cleaning device, the spraying component can spray cleaning liquid onto the outer surface of the photomask while the cleaning section 1 is performing cleaning work, making the cleaning work more convenient and the cleaning effect better.

[0173] The embodiments of the photomask cleaning device described above can be directly installed on the base of the lidar, or can be installed simultaneously with the lidar on the equipment that needs to use the lidar, such as on the roof of an autonomous vehicle, where both sides of the vehicle can be used at the same time. Furthermore, since the photomask cleaning device provided by the embodiments of the present invention has a simple structure and occupies little space, it is convenient to install directly without affecting the normal operation of the lidar.

[0174] For ease of control, embodiments of the present invention also provide a control method suitable for controlling the use of the photomask cleaning device, such as... Figure 9 As shown, Figure 9 This is a flowchart illustrating a control method provided in an embodiment of the present invention, which may specifically include the following steps:

[0175] In step S910, a photomask cleaning signal is obtained, and the cleaning part 1 is moved out of the storage device 4 according to the position of the second magnetic component 2. It is attracted to the photomask by the magnetic attraction between the first magnetic component 12 and the second magnetic component 2, and rotates along the outer surface of the photomask with the optical engine rotor 3.

[0176] In step S911, a stop cleaning signal is obtained, and the magnetic attraction between the first magnetic component 12 and the second magnetic component 2 is cut off according to the position of the second magnetic component 2, so that the cleaning part 1 returns to the storage device 4.

[0177] When the photomask cleaning device receives a cleaning signal and determines that the second magnetic component 2 is located relative to the first magnetic component in the axial direction, the cleaning part 1 is moved out of the storage device 4 under the repulsive force of the first magnetic component 12 and the cleaning magnetic component, and at the same time, the magnetic attraction between the second magnetic component 2 and the first magnetic component 12 is used to make the cleaning part 1 adhere to the outer surface of the photomask.

[0178] Then, under the rotation of the optomechanical rotor 3, since the second magnetic component 2 is disposed on the optomechanical rotor 3, the optomechanical rotor 3 can drive the first magnetic component 12 under the action of magnetic attraction to rotate 360 ​​degrees along the outer surface of the photomask, thus completing the cleaning work on the outer surface of the photomask.

[0179] The acquired cleaning signal can be a signal indicating that dirt has been detected on the lidar cover, or a signal indicating that regular maintenance cleaning is required. Alternatively, it can be a signal that the lidar cover is automatically detected and assessed based on the lidar point cloud, prompting the user to initiate lidar cleaning.

[0180] When cleaning is no longer required, a stop cleaning signal is obtained, and when the cleaning part 1 is located at the position corresponding to the storage device 4 based on the position of the second magnetic component 2, the power is disconnected, that is, the magnetic attraction between the second magnetic component 2 and the first magnetic component 12 disappears, so that the cleaning part 1 returns to the storage device 4.

[0181] The stop signal acquisition can be achieved by stopping the LiDAR and acquiring the stop signal based on a fixed cleaning time (e.g., stopping and generating a signal every 10 minutes), or by acquiring the stop signal when the LiDAR does not stop detecting and the LiDAR determines that there is no dirt or that even if there is a small amount of dirt, it does not affect normal detection.

[0182] When the cleaning unit 1 includes a first cleaning unit 13 and a second cleaning unit 14, the storage device 4 is provided with a top storage device and a bottom storage device. When the cleaning unit 1 returns to the storage device 4, the first cleaning unit 13 returns to the top storage device, and the second cleaning unit 14 returns to the bottom storage device.

[0183] In addition, in one specific embodiment, the present invention also provides a control device, such as... Figure 10 As shown, Figure 10 This is a schematic diagram of the structure of a control device provided in an embodiment of the present invention.

[0184] As shown in the figure, the control device 10 includes:

[0185] The cleaning module 100 is adapted to acquire a photomask cleaning signal, and according to the position of the second magnetic component, moves the cleaning part out of the storage device, and is attracted to the photomask by the magnetic attraction between the first magnetic component and the second magnetic component, and rotates along the outer surface of the photomask with the optical engine rotor.

[0186] The cleaning stop module 101 is adapted to receive a stop cleaning signal and, based on the position of the second magnetic component, cut off the magnetic attraction between the first magnetic component and the second magnetic component, so that the cleaning part returns to the storage device.

[0187] The cleaning module 100 controls the photomask cleaning device to perform cleaning based on the acquired cleaning signal. The acquired cleaning signal can be a periodically set cleaning signal. In this case, regardless of whether there is dirt on the outer surface of the photomask, the cleaning module 100 will perform cleaning based on the acquired pre-set cleaning signal. In another specific embodiment, the acquired cleaning signal can also be a dirt signal detected by the cleaning module 100 itself or a signal detected by a detection device and sent to the cleaning module 100. When the cleaning module 100 acquires a cleaning signal that the outer surface of the photomask needs to be cleaned, it starts the photomask cleaning device to perform cleaning.

[0188] It is easy to understand that the stop cleaning signal acquired by the cleaning stop module 101 may include stopping the cleaning work of the photomask cleaning device according to a predetermined stop time, or it may be determined to stop cleaning automatically based on the degree of dirt detected by the dirt signal. For example, when the detection result determines that there is no dirt or even if there is a small amount of dirt but it does not affect normal detection, a stop signal is acquired.

[0189] The control device can be installed in the lidar or on the equipment that needs to use the lidar (such as a car). It can control the photomask cleaning device by interacting with the lidar signal.

[0190] In this way, the photomask cleaning device can be controlled by acquiring cleaning signals and stop cleaning signals, and the logic is simple.

[0191] While the embodiments of the present invention have been disclosed above, the present invention is not limited thereto. Any person skilled in the art can make various modifications and alterations without departing from the spirit and scope of the present invention; therefore, the scope of protection of the present invention should be determined by the scope defined in the claims.

Claims

1. A photomask cleaning device, characterized in that, Suitable for lidar, including: The cleaning unit includes a cleaning component and a first magnetic component, the cleaning component being adapted to clean the outer surface of the photomask of the lidar, and the first magnetic component being connected to the cleaning component; The second magnetic component is disposed on the optomechanical rotor of the lidar and is adapted to cooperate with the first magnetic component. The optomechanical rotor drives the cleaning component to rotate along the outer surface of the photomask. Storage device, adapted to store the cleaning unit; A moving device is adapted to move the cleaning part out of or back from the storage device. The moving device includes: a storage electromagnetic component adapted to generate a repulsive force with the first magnetic component, so that the first magnetic component moves the cleaning part out of the storage device, and after the cleaning part is moved out, the position of the second magnetic component is just above the storage device, so that a magnetic attraction force is generated between the first magnetic component and the second magnetic component, so that the cleaning part is adsorbed onto the outer surface of the photomask.

2. The photomask cleaning device as described in claim 1, characterized in that, The second magnetic component is disposed on the side of the optomechanical rotor that does not emit the detection beam.

3. The photomask cleaning device as described in claim 1, characterized in that, At least one of the first magnetic component and the second magnetic component is an electromagnetic component.

4. The photomask cleaning device as described in claim 1, characterized in that, In the axial direction of the lidar shaft, the size of the cleaning section is equal to the size of the photomask.

5. The photomask cleaning device as described in claim 1, characterized in that, The mobile device further includes an elastic component fixed to the storage device, wherein the elastic component is in a compressed state when the cleaning part is stored in the storage device.

6. The photomask cleaning device as described in claim 5, characterized in that, The moving device further includes a pressure-applying component adapted to apply pressure to the cleaning section, thereby pushing the cleaning section back into the storage device.

7. The photomask cleaning apparatus according to any one of claims 1-6, characterized in that, The cleaning section includes a first cleaning section and a second cleaning section. In the axial direction of the lidar rotating shaft, the sum of the dimensions of the first cleaning section and the second cleaning section is equal to the dimension of the photomask.

8. The photomask cleaning apparatus according to any one of claims 1-6, characterized in that, The cleaning unit includes a foldable cleaning unit, and the size of the foldable cleaning unit after unfolding is equal to the size of the photomask in the axial direction of the lidar rotating shaft.

9. The photomask cleaning device as described in claim 8, characterized in that, The foldable cleaning unit includes: First foldable cleaning section; The second foldable cleaning part is movably connected to the first foldable cleaning part; An assisting component is adapted to provide an opening and closing force, enabling the second foldable cleaning section to swing relative to the first foldable cleaning section.

10. The photomask cleaning device as described in claim 9, characterized in that, The assisting component includes: an electromagnetic component adapted to provide magnetic attraction force to control the second foldable cleaning part to open or close relative to the first foldable cleaning part; A support rod, connected to the second foldable cleaning part, is adapted to drive the swing of the second foldable cleaning part; An elastic component, adapted to provide a compressive elastic force for opening the second foldable cleaning section relative to the first foldable cleaning section; A magnetic component is adapted to generate a magnetic attraction force with the electromagnetic component, causing the elastic component to generate the compressive elastic force, and is used to keep the first foldable cleaning part and the second foldable cleaning part in a closed state.

11. The photomask cleaning apparatus according to any one of claims 1-6, characterized in that, The cleaning unit also includes: A support body adapted to connect and support the cleaning component and the first magnetic component.

12. The photomask cleaning apparatus according to any one of claims 1-6, characterized in that, Also includes: The spraying component, located on the base of the lidar, is adapted to spray cleaning fluid.

13. A lidar, characterized in that, Includes the photomask cleaning device as described in any one of claims 1-12.

14. A control method, characterized in that, Suitable for controlling the photomask cleaning apparatus according to any one of claims 1-12, the control method comprising: The photomask cleaning signal is acquired, and the cleaning part is moved out of the storage device according to the position of the second magnetic component. It is then attracted to the photomask by the magnetic attraction between the first magnetic component and the second magnetic component, and rotates along the outer surface of the photomask with the optical engine rotor. Upon receiving a stop cleaning signal, the magnetic attraction between the first and second magnetic components is severed based on the position of the second magnetic component, causing the cleaning unit to return to the storage device.

15. A control device, characterized in that, Suitable for controlling the photomask cleaning apparatus according to any one of claims 1-12, the control device comprising: The cleaning module is adapted to acquire photomask cleaning signals, and according to the position of the second magnetic component, causes the cleaning part to move out of the storage device, and is attracted to the photomask by the magnetic attraction between the first magnetic component and the second magnetic component, and rotates along the outer surface of the photomask with the optical engine rotor; The cleaning stop module is adapted to receive a stop cleaning signal and, based on the position of the second magnetic component, cut off the magnetic attraction between the first magnetic component and the second magnetic component, so that the cleaning part returns to the storage device.

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