Workpiece table moving device

Abstract

The application relates to the technical field of photoetching machines, and discloses a workpiece table moving device which comprises a supporting frame, a fixed platform, a first fixing mechanism, a moving platform, a second fixing mechanism and an air floating mechanism; the workbench is moved relative to the fixed platform or the moving platform through the air floating mechanism, does not have contact friction with a supporting surface, eliminates the influence of friction loss on the flatness of the supporting surface relative to the roller plate spring mechanism, guarantees the positioning precision of the workpiece table, reduces the control difficulty in the moving-in and moving-out process of the workpiece table; secondly, the workpiece table moving device adopts a workpiece table transfer mode in which the moving platform and the fixed platform are connected, greatly shortens the suspension movement stroke of the workpiece table to the distance from the supporting surface of the fixed platform to the supporting surface of the moving platform, further improves the moving-in and moving-out efficiency of the workpiece table, is relatively convenient to operate, realizes long-distance movement of a large-quality and large-volume workpiece table, and reduces the possibility of damage caused by falling of the workpiece table.

Description

Technical Field

[0001] This invention relates to the field of photolithography technology, and in particular to a workpiece stage moving device. Background Technology

[0002] Photolithography machines are core equipment in the integrated circuit manufacturing industry, and the workpiece stage is one of the core components of a photolithography machine. As photolithography machines become increasingly sophisticated and complex, the size and weight of the workpiece stage are also constantly increasing, currently reaching several tons. When it is necessary to remove the workpiece stage from the photolithography machine frame for maintenance or parts replacement, how to quickly, safely, and reliably move the workpiece stage into and out of the frame has become an unavoidable problem.

[0003] Most existing workpiece stage moving devices typically employ a roller-leaf spring mechanism, where the deformation of the leaf spring drives the roller to contact the ground, thereby moving the workpiece stage. However, due to rolling friction, this device experiences a sharp increase in friction as the mass of the workpiece stage increases, leading to unavoidable wear and increasing the difficulty of controlling the workpiece stage during movement. A small number of workpiece stage moving devices use an air-float mechanism, but these still suffer from problems such as long moving distances, inconvenient operation of the workpiece stage, and susceptibility to falling and damage. Summary of the Invention

[0004] The purpose of this invention is to provide a workpiece stage moving device that is easy to control, convenient to operate, has a short workpiece stage suspension movement distance, and is highly safe.

[0005] To achieve the above objectives, the present invention provides a workpiece stage moving device, comprising:

[0006] Supporting framework;

[0007] A fixed platform is located within the supporting frame;

[0008] The first fixing mechanism is located on the support surface of the fixing platform and is used to position and fix the workpiece table.

[0009] A mobile platform, wherein the support surface of the mobile platform is flush with the support surface of the fixed platform;

[0010] The second fixing mechanism is provided on the support surface of the mobile platform and is used to position and fix the workpiece table.

[0011] An air flotation mechanism is located at the bottom of the workpiece stage;

[0012] The mobile platform can move to a first position and a second position. When the mobile platform is in the first position, it is in contact with the fixed platform. When the mobile platform is in the second position, it is located outside the support frame.

[0013] In some embodiments of this application, the air flotation mechanism includes a plurality of air flotation parts, which are evenly arranged at the bottom of the workpiece stage.

[0014] In some embodiments of this application, a magnetic suction element, a first electromagnetic element, and a second electromagnetic element are also included. The magnetic suction element is located at the bottom of the workpiece stage near the center and between the plurality of air-bearing parts. The first electromagnetic element is located at the top of the fixed platform, and the second electromagnetic element is located at the top of the moving platform. The first electromagnetic element and the second electromagnetic element extend in the same direction and abut against each other when the moving platform is in the first position.

[0015] In some embodiments of this application, the first fixing mechanism includes a first fixing member, a second fixing member, and a locking member. The first fixing member is disposed on one side of the workpiece stage along the X direction, the second fixing member is disposed on one side of the workpiece stage along the Y direction, and the locking member is disposed on the side of the workpiece stage away from the second fixing member.

[0016] In some embodiments of this application, the second fixing mechanism includes a third fixing member and a fourth fixing member. The third fixing member is provided in two parts and is respectively provided on both sides of the workpiece stage along the X direction. The fourth fixing member is provided in two parts and is respectively provided on both sides of the workpiece stage along the Y direction.

[0017] In some embodiments of this application, the first fixing member and the third fixing member can both slide along the X direction, the second fixing member and the fourth fixing member can both slide along the Y direction, and the locking member can slide along a predetermined direction.

[0018] In some embodiments of this application, the support frame is provided with a first position sensor and a second position sensor. The first position sensor is oriented toward the X direction and is used to measure the position of the workpiece stage in the X direction on the fixed platform. The second position sensor is oriented toward the Y direction and is used to measure the position of the workpiece stage in the Y direction on the fixed platform.

[0019] In some embodiments of this application, two first position sensors are arranged along the Y-axis, and two second position sensors are arranged along the X-axis.

[0020] In some embodiments of this application, the mobile platform includes a platform body, a driving device, and rollers disposed at the bottom of the platform body. The driving device is disposed on the platform body and is used to drive the rollers to roll in a predetermined direction.

[0021] This invention provides a workpiece stage moving device, which has the following advantages compared with the prior art:

[0022] The workpiece stage moving device provided by the present invention includes a support frame, a fixed platform, a first fixing mechanism, a moving platform, a second fixing mechanism, and an air-floating mechanism. The fixed platform is disposed within the support frame, the first fixing mechanism is disposed on the support surface of the fixed platform for positioning and fixing the workpiece stage, the support surface of the moving platform is flush with the support surface of the fixed platform, the second fixing mechanism is disposed on the support surface of the moving platform for positioning and fixing the workpiece stage, and the air-floating mechanism is disposed at the bottom of the workpiece stage. The moving platform can move to a first position and a second position. When the moving platform is in the first position, the moving platform is in contact with the fixed platform, and when the moving platform is in the second position, the moving platform is located outside the support frame. Based on the above structure, the worktable moves relative to the fixed or moving platform via an air-bearing mechanism, eliminating contact friction with the support surface. Compared to roller and leaf spring mechanisms, this eliminates the impact of friction loss on the flatness of the support surface, ensuring the positioning accuracy of the workpiece table and reducing the control difficulty during workpiece table movement. Secondly, this workpiece table moving device adopts a workpiece table transfer method that connects the moving and fixed platforms. When a workpiece table needs to be moved in, simply move the moving platform to the first position, then activate the air-bearing mechanism to move the workpiece table onto the fixed platform for fixation. This significantly shortens the suspension stroke of the workpiece table to the distance between the support surfaces of the fixed and moving platforms, further improving the efficiency of workpiece table movement. Operation is convenient, enabling long-distance movement of large-mass, large-volume workpiece tables and greatly reducing the possibility of the workpiece table falling and being damaged due to air-bearing mechanism failure. Furthermore, the second fixing mechanism can stably fix the workpiece table during the movement of the moving platform, preventing slippage. Attached Figure Description

[0023] Figure 1 This is a schematic diagram of the workpiece table moving device when the moving platform is in the first position according to an embodiment of the present invention;

[0024] Figure 2 This is a schematic diagram of the workpiece stage moving device when the workpiece stage is located on a fixed platform according to an embodiment of the present invention.

[0025] Figure 3 This is a schematic diagram of the structure of the mobile platform in the second position according to an embodiment of the present invention;

[0026] Figure 4 This is a schematic diagram of the workpiece stage according to an embodiment of the present invention;

[0027] Figure 5 This is a schematic diagram of the workpiece stage moving device according to an embodiment of the present invention.

[0028] In the figure: 1. Support frame; 11. First position sensor; 12. Second position sensor; 2. Fixed platform; 21. First electromagnetic component; 3. First fixing mechanism; 31. First fixing component; 32. Second fixing component; 33. Locking component; 4. Moving platform; 41. Second electromagnetic component; 42. Drive device; 43. Platform body; 44. Roller; 5. Second fixing mechanism; 51. Third fixing component; 52. Fourth fixing component; 6. Air buoyancy mechanism; 61. Air buoyancy part; 7. Magnetic suction component; 8. Pushing device; 9. Controller; 100. Workpiece table. Detailed Implementation

[0029] The technical solutions of the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only a part of the embodiments of this application, and not all of the embodiments. Based on the embodiments of this application, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the scope of protection of this application.

[0030] It should be understood that in the description of this application, the terms "center," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," and "outer," etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. These terms are used solely for the convenience of describing this application and for simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this application. The terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of indicated technical features. That is, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. Furthermore, unless otherwise stated, "a plurality of" means two or more.

[0031] It should be noted that, in the description of this application, unless otherwise expressly specified and limited, the terms "installation," "connection," and "linking" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection between two components. Those skilled in the art can understand the specific meaning of the above terms in this application based on the specific circumstances.

[0032] like Figures 1 to 5As shown, this embodiment of the invention provides a workpiece stage moving device, which includes a support frame 1, a fixed platform 2, a first fixing mechanism 3, a moving platform 4, a second fixing mechanism 5, and an air-floating mechanism 6. The fixed platform 2 is disposed within the support frame 1. The first fixing mechanism 3 is disposed on the support surface of the fixed platform 2 and is used to position and fix the workpiece stage 100. The support surface of the moving platform 4 is flush with the support surface of the fixed platform 2. The second fixing mechanism 5 is disposed on the support surface of the moving platform 4 and is used to position and fix the workpiece stage 100. The air-floating mechanism 6 is disposed at the bottom of the workpiece stage 100. The moving platform 4 can move to a first position and a second position. When the moving platform 4 is in the first position, the moving platform 4 is in contact with the fixed platform 2. When the moving platform 4 is in the second position, the moving platform 4 is located outside the support frame 1.

[0033] Based on the above structure, the worktable moves relative to the fixed platform 2 or the moving platform 4 through the air-bearing mechanism 6. There is no contact friction with the support surface. Compared with the roller 44 leaf spring mechanism, the influence of friction loss on the flatness of the support surface is eliminated, ensuring the positioning accuracy of the workpiece table 100 and reducing the control difficulty of the workpiece table 100 during the moving in and out process. Secondly, this workpiece table moving device adopts the workpiece table 100 transfer method of connecting the moving platform 4 and the fixed platform 2. When it is necessary to move the workpiece table 100, it is only necessary to move the moving platform 4 to the first position, and then start the air-bearing mechanism 6 to move the workpiece table 100 to the fixed platform 2 for fixation. That is, the suspension motion stroke of the workpiece table 100 is greatly shortened to the distance between the support surface of the fixed platform 2 and the support surface of the moving platform 4, which further improves the efficiency of moving the workpiece table 100 in and out. The operation is more convenient, realizing long-distance movement of large mass and large volume workpiece table 100, and greatly reducing the possibility of the workpiece table 100 falling and being damaged due to the failure of the air-bearing mechanism 6. In addition, the second fixing mechanism 5 can relatively stably fix and lock the workpiece table 100 during the movement of the moving platform 4, preventing it from slipping.

[0034] Optionally, such as Figure 4 As shown, in this embodiment, the air flotation mechanism 6 includes multiple air flotation units 61, which are evenly arranged on the bottom of the workpiece stage 100. Thus, when the multiple air flotation units 61 are in operation, the workpiece stage 100 can be suspended on the support surface and moved smoothly.

[0035] Since there is no contact friction, the movement of the workpiece stage 100 is prone to displacement, which can easily lead to damage. Optionally, such as Figure 1As shown, in this embodiment, the workpiece stage moving device further includes a magnetic suction element 7, a first electromagnetic element 21, and a second electromagnetic element 41. The magnetic suction element 7 is located at the bottom of the workpiece stage 100 near the center and between multiple air-bearing parts 61. The first electromagnetic element 21 is located at the top of the fixed platform 2, and the second electromagnetic element 41 is located at the top of the moving platform 4. The first electromagnetic element 21 and the second electromagnetic element 41 extend in the same direction and abut against each other when the moving platform 4 is in the first position. Based on this, when the first electromagnetic element 21 and the second electromagnetic element 41 are activated, both can apply a downward force to the magnetic suction element 7, ensuring that the workpiece stage 100 moves along the extending direction of the first electromagnetic element 21 and the second electromagnetic element 41. This prevents the workpiece stage 100 from shifting during its movement from the moving platform 4 to the fixed platform 2 or in the opposite direction, thus preventing damage. Preferably, the magnetic suction element 7 is a permanent magnet, and the first electromagnetic element 21 and the second electromagnetic element 41 are electromagnets.

[0036] Optionally, such as Figure 2 As shown, in this embodiment, the first fixing mechanism 3 includes a first fixing member 31, a second fixing member 32, and a locking member 33. The first fixing member 31 is located on one side of the workpiece stage 100 along the X direction, the second fixing member 32 is located on one side of the workpiece stage 100 along the Y direction, and the locking member 33 is located on the side of the workpiece stage 100 away from the second fixing member 32. Thus, after the workpiece stage 100 moves onto the fixing platform 2, the first fixing member 31, the second fixing member 32, and the locking member 33 fix the position of the workpiece stage 100 in the X and Y directions.

[0037] Optionally, such as Figure 1 As shown, in this embodiment, the second fixing mechanism 5 includes a third fixing member 51 and a fourth fixing member 52. Two third fixing members 51 are respectively located on both sides of the workpiece stage 100 along the X direction, and two fourth fixing members 52 are respectively located on both sides of the workpiece stage 100 along the Y direction. Therefore, after the workpiece stage 100 moves to the moving platform 4, the third fixing members 51 and the fourth fixing members 52 can fix the position of the workpiece stage 100, preventing the workpiece stage 100 from slipping during the movement of the moving platform 4.

[0038] Optionally, in this embodiment, the first fixing member 31 and the third fixing member 51 can both slide along the X direction, the second fixing member 32 and the fourth fixing member 52 can both slide along the Y direction, and the locking member 33 can slide along a predetermined direction. Thus, the positions of the first fixing member 31, the second fixing member 32, the third fixing member 51, the fourth fixing member 52, and the locking member 33 can be adjusted to fix the workpiece stage 100 in different positions as needed.

[0039] Optionally, such as Figure 1As shown, in this embodiment, the support frame 1 is equipped with a first position sensor 11 and a second position sensor 12. The first position sensor 11 is oriented towards the X direction and is used to measure the position of the workpiece stage 100 in the X direction of the fixed platform 2. The second position sensor 12 is oriented towards the Y direction and is used to measure the position of the workpiece stage 100 in the Y direction of the fixed platform 2. In this way, the first position sensor 11 and the second position sensor 12 can work together to monitor the position of the workpiece stage 100, thereby completing the initial positioning and horizontal pose adjustment, improving the efficiency of the workpiece stage 100 in the moving-in and moving-out operations while ensuring motion accuracy.

[0040] Optionally, such as Figure 1 As shown, in this embodiment, two first position sensors 11 are arranged along the Y-axis, and two second position sensors 12 are arranged along the X-axis. This improves the accuracy and reliability of position monitoring.

[0041] Optionally, such as Figure 5 As shown, in this embodiment, a pushing device 8 and a controller 9 are also included. Multiple pushing devices 8 are arranged evenly around the inner wall of the support frame 1. The pushing devices 8 are used to push the workpiece table 100. The controller 9 is electrically connected to the moving platform 4, the first position sensor 11, the second position sensor 12, the pushing devices 8, the air float part 61, the first electromagnetic component 21, and the second electromagnetic component 41. The controller 9 can control different pushing devices 8 to extend or retract a predetermined distance according to the signals fed back by the first position sensor 11 and the second position sensor 12, so as to push the workpiece table 100 to a predetermined position. The controller 9 can control the start and stop of the air float part 61 and the first electromagnetic component 21 and the second electromagnetic component 41 to ensure that the movement path of the workpiece table 100 is correct.

[0042] Optionally, such as Figure 1 and Figure 3 As shown, in this embodiment, the mobile platform 4 includes a platform body 43, a drive device 42, and rollers 44 disposed at the bottom of the platform body 43. The drive device 42 is disposed on the platform body 43 and is used to drive the rollers 44 to roll in a predetermined direction. Preferably, the controller 9 is electrically connected to the drive device 42.

[0043] The working process of the workpiece stage moving device provided in this embodiment of the invention is as follows: When it is necessary to move the workpiece stage 100 out, the control drive device 42 moves the moving platform 4 to the first position, removes the first fixing member 31, the second fixing member 32 and the locking member 33, activates the air flotation part 61 and the first electromagnetic member 21 and the second electromagnetic member 41, moves the workpiece stage 100 from the fixed platform 2 to the moving platform 4, and initially fixes the workpiece stage 100 to the corresponding position by the third fixing member 51 and the fourth fixing member 52, closes the air flotation part 61, the first electromagnetic member 21 and the second electromagnetic member 41, and then fixes and locks the workpiece stage 100 to the moving platform 4; when it is necessary to move the workpiece stage 100 in, the control drive device 42 moves the moving platform 4 to the first position, removes the first fixing member 31, the second fixing member 32 and the locking member 33, activates the air flotation part 61 and the first electromagnetic member 21 and the second electromagnetic member 41, and then fixes and locks the workpiece stage 100 to the moving platform 4; when it is necessary to move the workpiece stage 100 in, the control drive device 42 moves the moving platform 4 to the first position, removes the first fixing member 31, the second fixing member 32 and the locking member 33, and then locks the workpiece stage 100 to the moving platform 4. The actuator 42 moves the moving platform 4 to the first position, removes the third fixing member 51 and the fourth fixing member 52, activates the air-float unit 61 and the first electromagnetic member 21 and the second electromagnetic member 41, moves the workpiece table 100 from the moving platform 4 to the fixed platform 2, monitors the position of the workpiece table 100 through the first position sensor 11 and the second position sensor 12, and controls the pushing device 8 to push and adjust the position and horizontal posture of the workpiece table 100 until it reaches the predetermined position and predetermined horizontal posture, closes the air-float unit 61, locks and fixes the workpiece table 100 through the first fixing member 31, the second fixing member 32 and the locking member 33, closes the first electromagnetic member 21 and the second electromagnetic member 41, and completes the transfer.

[0044] In summary, this embodiment of the invention provides a workpiece stage moving device, which mainly consists of a support frame 1, a fixed platform 2, a first fixing mechanism 3, a moving platform 4, a second fixing mechanism 5, and an air-floating mechanism 6. The fixed platform 2 is disposed within the support frame 1. The first fixing mechanism 3 is disposed on the support surface of the fixed platform 2 for positioning and fixing the workpiece stage 100. The support surface of the moving platform 4 is flush with the support surface of the fixed platform 2. The second fixing mechanism 5 is disposed on the support surface of the moving platform 4 for positioning and fixing the workpiece stage 100. The air-floating mechanism 6 is disposed at the bottom of the workpiece stage 100. The moving platform 4 can move to a first position and a second position. When the moving platform 4 is in the first position, it is in contact with the fixed platform 2. When the moving platform 4 is in the second position, it is located outside the support frame 1. Compared with the prior art, this workpiece stage moving device has advantages such as low control difficulty, convenient operation, small workpiece stage suspension movement distance, and high safety.

[0045] The above description is only a preferred embodiment of the present invention. It should be noted that for those skilled in the art, several improvements and substitutions can be made without departing from the technical principles of the present invention, and these improvements and substitutions should also be considered within the scope of protection of the present invention.

Claims

1. A workpiece stage moving device, characterized in that, include: Supporting framework; A fixed platform is located within the supporting frame; The first fixing mechanism is located on the support surface of the fixing platform and is used to position and fix the workpiece table. A mobile platform, wherein the support surface of the mobile platform is flush with the support surface of the fixed platform; The second fixing mechanism is provided on the support surface of the mobile platform and is used to position and fix the workpiece table. An air flotation mechanism is located at the bottom of the workpiece stage; The mobile platform can move to a first position and a second position. When the mobile platform is in the first position, it is in contact with the fixed platform. When the mobile platform is in the second position, it is located outside the support frame. The air flotation mechanism includes multiple air flotation units, which are evenly arranged at the bottom of the workpiece stage. It also includes a magnetic suction component, a first electromagnetic component, and a second electromagnetic component. The magnetic suction component is located at the bottom of the workpiece stage near the middle and between the multiple air-bearing parts. The first electromagnetic component is located at the top of the fixed platform, and the second electromagnetic component is located at the top of the moving platform. The first electromagnetic component and the second electromagnetic component extend in the same direction and abut against each other when the moving platform is in the first position. When the first and second electromagnetic components are activated, both can apply a downward force to the magnetic attraction component. The support frame is equipped with a first position sensor and a second position sensor. The first position sensor is oriented towards the X direction and is used to measure the position of the workpiece stage in the X direction on the fixed platform. The second position sensor is oriented towards the Y direction and is used to measure the position of the workpiece stage in the Y direction on the fixed platform. It also includes a pushing device and a controller. Multiple pushing devices are arranged evenly around the inner wall of the support frame. The pushing devices are used to push the workpiece table. The controller is electrically connected to the moving platform, the first position sensor, the second position sensor, the pushing device, the air bearing part, the first electromagnetic component, and the second electromagnetic component. The controller can control the different pushing devices to extend or retract a predetermined distance according to the signals fed back by the first position sensor and the second position sensor, so as to push the workpiece table to the predetermined position. The controller can control the start and stop of the air bearing part and the first electromagnetic component and the second electromagnetic component to ensure that the movement path of the workpiece table is correct. The first fixing mechanism includes a first fixing member, a second fixing member, and a locking member. The first fixing member is located on one side of the workpiece table along the X direction, the second fixing member is located on one side of the workpiece table along the Y direction, and the locking member is located on the side of the workpiece table away from the second fixing member. The second fixing mechanism includes a third fixing member and a fourth fixing member. The third fixing member is provided in two parts and is respectively provided on both sides of the workpiece table along the X direction. The fourth fixing member is provided in two parts and is respectively provided on both sides of the workpiece table along the Y direction. The first fixing member and the third fixing member can both slide along the X direction, the second fixing member and the fourth fixing member can both slide along the Y direction, and the locking member can slide along a predetermined direction; The first position sensor is configured as two and arranged along the Y-axis, and the second position sensor is configured as two and arranged along the X-axis; The mobile platform includes a platform body, a driving device, and rollers located at the bottom of the platform body. The driving device is located on the platform body and is used to drive the rollers to roll in a predetermined direction.

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