Flexible display device peeling apparatus and peeling method thereof

Abstract

The application discloses a flexible display device stripping device and a stripping method thereof. The flexible display device stripping device comprises an auxiliary clamping component with magnetism and a suction component. The auxiliary clamping component has an auxiliary clamping plane. The suction component comprises a suction base, a powered magnetism assembly and a plurality of suction accessories. The suction base has a suction plane. The powered magnetism assembly is arranged on the suction base. The suction plane of the suction base is connected with the plurality of suction accessories. The powered magnetism assembly can magnetically cooperate with the auxiliary clamping component in the state with magnetism. The flexible display device stripping device can effectively improve the yield of the stripping process.

Description

TECHNICAL FIELD

[0001] The present application relates to the field of display, in particular to a flexible display device peeling device and a peeling method thereof BACKGROUND

[0002] In recent years, flexible display (Flexible Display), foldable display (Foldable Display) and other technologies have developed rapidly. With the continuous development of manufacturing process and technology, flexible display products are becoming more and more diverse, and the screen size of flexible display products is increasing while the display quality is also improving. Flexible display products use flexible substrate materials as device carrying substrates, and require the electrode layer, TFT matrix, display device and packaging layer to have a certain bending radius to realize flexibility, such as electronic paper, flexible liquid crystal display and flexible organic electroluminescent display device. Compared with ordinary displays, flexible display products have many advantages: such as light weight, small size, thinness; easy to carry; more resistant to high and low temperatures, impact and shock; can adapt to a wider working environment; can be rolled up; the appearance has more artistic design aesthetic; low production cost; low power consumption, more energy saving; organic materials are more environmentally friendly, etc.

[0003] At present, flexible display products mainly use S2S (sheet to sheet) production process, using glass substrate as carrier, and are prepared by combining flexible substrate attachment and removal, glass thinning and other methods. Attachment and removal is to attach the flexible substrate to the hard glass substrate to prepare the display device, and then peel off the glass substrate to take out the flexible display device. The glass thinning method has high thinning process requirements and low production yield. The attachment and removal process can be roughly divided into two categories: one is laser lift-off technology (LLO: Laser Lift-Off), which uses laser to directly act on the interface between the plastic substrate and the carrier, and separates them by destroying the bonding force between the plastic substrate and the carrier through high-energy laser; the other is mechanical lift-off technology (MLO: Mechanical Lift-Off), which uses a special release layer to combine the plastic substrate and the carrier with different bonding forces, and separates them by cutting off the part with strong edge bonding. At present, laser lift-off is mainly used. There are two schemes for laser lift-off technology, 1, the whole flexible device is first laser lifted off in large size, then cut into the required single size, and then IC bonding is performed; 2, the large-size flexible device is first cut into the required size, then the single device is bonded, and finally the single device is laser lifted off. Practice shows that the former laser lift-off process is more efficient and conducive to line layout, but there is a problem of inaccurate flexible device bonding alignment, and in the process of handling and transferring after laser scanning to separate the flexible device, there is a risk of flexible device and substrate falling off and slipping, which seriously affects the yield. SUMMARY

[0004] Therefore, it is necessary to provide a flexible display device peeling apparatus and a peeling method thereof. The flexible display device peeling apparatus can realize peeling of a flexible display device, and the flexible display device is not prone to falling off or slipping during peeling and transferring, thereby effectively improving the yield of the peeling process.

[0005] A flexible display device peeling apparatus comprises:

[0006] An auxiliary clamping component with magnetism, the auxiliary clamping component having an auxiliary clamping plane; and

[0007] An adsorption component, the adsorption component comprising an adsorption base, an energized magnetic assembly, and a plurality of adsorption accessories, the adsorption base having an adsorption plane, the energized magnetic assembly being arranged on the adsorption base, and a plurality of the adsorption accessories being connected to the adsorption plane of the adsorption base; wherein the energized magnetic assembly can magnetically cooperate with the auxiliary clamping component in a state with magnetism.

[0008] In one of the embodiments, the adsorption base has a plurality of substrates, the plurality of substrates being cross-connected, each of the substrates being respectively provided with the energized magnetic assembly and the adsorption accessory; and / or

[0009] The adsorption accessories on the adsorption base comprise a plurality of suction nozzles arranged at intervals; and / or

[0010] The energized magnetic assembly is in a plurality in number, and the plurality of energized magnetic assemblies are arranged at intervals on the adsorption base.

[0011] In one of the embodiments, the flexible display device peeling apparatus further comprises:

[0012] A multi-orientation motion component, the multi-orientation motion component being connected to at least one of the substrates of the adsorption base, the multi-orientation motion component being used to drive the adsorption base to move so as to transfer the adsorption accessory and the auxiliary clamping component clamped with the flexible display device to be peeled.

[0013] In one of the embodiments, the auxiliary clamping component comprises:

[0014] A clamping plate, the clamping plate having the auxiliary clamping plane; and

[0015] A plurality of magnetic pieces, the plurality of magnetic pieces being arranged at intervals in the clamping plate, and the plurality of magnetic pieces being arranged in at least one column;

[0016] The energized magnetic assembly can magnetically attract and cooperate with the magnetic pieces in a state with magnetism.

[0017] In one of the embodiments, the plurality of magnetic members are arranged in at least one column along a direction parallel to the side edge of the clamping plate, and the distance between adjacent magnetic members in each column is 5-10 mm; and / or

[0018] The plurality of magnetic members are arranged in multiple columns along a direction parallel to the side edge of the clamping plate, and the distance between adjacent columns is 3-5 mm.

[0019] In one of the embodiments, the clamping plate has a plurality of auxiliary adsorption holes, and the plurality of auxiliary adsorption holes are arranged at intervals and are penetrated by the auxiliary clamping plane through the clamping plate.

[0020] In one of the embodiments, the plurality of auxiliary adsorption holes are arranged in at least one column along a direction parallel to the side edge of the clamping plate, and the distance between adjacent auxiliary adsorption holes in each column is 5-10 mm; and / or

[0021] The plurality of auxiliary adsorption holes are arranged in multiple columns along a direction parallel to the side edge of the clamping plate, and the distance between adjacent columns is 3-5 mm; and / or

[0022] The center positions of the four adjacent magnetic members are provided with the auxiliary adsorption holes.

[0023] In one of the embodiments, the flexible display device peeling apparatus further comprises:

[0024] A laser peeling mechanism having a plurality of peeling adsorption holes, and the auxiliary adsorption holes can correspond to the peeling adsorption holes one by one; and / or

[0025] A separation mechanism having a plurality of separation grooves, and the groove bottom surface of the separation groove has a separation adsorption hole, and the auxiliary adsorption hole can correspond to the separation adsorption hole one by one.

[0026] A flexible display device peeling method, comprising the following steps:

[0027] Preparation of a flexible display device to be peeled on a carrier substrate;

[0028] Laser scanning treatment is performed on the interface between the carrier substrate and the flexible display device to be peeled;

[0029] The flexible display device to be peeled and the carrier substrate are clamped as a whole by using an adsorption component and an auxiliary clamping component with magnetism, wherein the energized magnetic assembly in the adsorption component can magnetically cooperate with the auxiliary clamping component in the magnetic state to clamp the flexible display device to be peeled and the carrier substrate, and the carrier substrate is close to the adsorption component.

[0030] The auxiliary clamping component is controlled to vacuum-adsorb and fix the flexible display device to be peeled, the energized magnetic assembly is controlled to be de-energized, and the adsorption component is controlled to separate the carrier substrate from the flexible display device to be peeled.

[0031] In one of the embodiments, the auxiliary clamping component is controlled to vacuum-adsorb and fix the flexible display device to be peeled, the energized magnetic assembly is controlled to be de-energized, and the adsorption component is controlled to separate the carrier substrate from the flexible display device to be peeled, including the following steps:

[0032] The adsorption component is controlled to adsorb and fix the surface of the carrier substrate away from the flexible display device to be peeled;

[0033] The adsorption component is controlled to move to transfer the flexible display device to be peeled and the carrier substrate to the auxiliary clamping plane of the auxiliary clamping component, and the flexible display device to be peeled is directed to the auxiliary clamping plane;

[0034] The energized magnetic assembly of the adsorption component is controlled to be energized, so that the adsorption component and the auxiliary clamping component clamp the flexible display device to be peeled and the carrier substrate.

[0035] In one of the embodiments, the auxiliary clamping component is controlled to vacuum-adsorb and fix the flexible display device to be peeled, the energized magnetic assembly is controlled to be de-energized, and the adsorption component is controlled to separate the carrier substrate from the flexible display device to be peeled, including the following steps:

[0036] The auxiliary clamping component is controlled to vacuum-adsorb and fix the flexible display device to be peeled, and the adsorption component is controlled to adsorb and fix the surface of the carrier substrate away from the flexible display device to be peeled;

[0037] The energized magnetic assembly is controlled to be de-energized, and the adsorption component is controlled to rotate to gradually lift one side of the carrier substrate from the flexible display device until separation.

[0038] In one of the embodiments, the adsorption component is controlled to rotate to gradually lift one side of the carrier substrate from the flexible display device until separation, including the following steps:

[0039] The adsorption component is controlled to rotate to lift one side of the carrier substrate from the flexible display device by 3°-5°, wait for 1-2 s, then lift by another 5°-10°, wait for 1-2 s, and then lift the carrier substrate at a speed of 3-5 mm / s until the carrier substrate is completely separated from the flexible display device.

[0040] The flexible display device peeling device can realize peeling of the flexible display device from the carrier substrate, and the flexible display device is not prone to falling off and slipping during peeling and transferring, and the yield of the peeling process is effectively improved. BRIEF DESCRIPTION OF DRAWINGS

[0041] Figure 1 A flexible display device peeling device according to an embodiment of the present application is shown in the schematic view;

[0042] Figure 2 A transfer mechanism of the flexible display device peeling device shown in the schematic view is shown in the top view; Figure 1

[0043] Figure 3 An auxiliary clamping component of the flexible display device peeling device shown in the schematic view is shown in the side view; Figure 1

[0044] Figure 4 A side view of the auxiliary clamping component shown in the schematic view is shown in the side view; Figure 3

[0045] A schematic view of a flexible display device peeling device shown in embodiment 1 is shown in the schematic view of a packaging device peeling process; Figure 5

[0046] A schematic view of a flexible display device peeling device shown in embodiment 1 is shown in the schematic view of a packaging device peeling process; Figure 6

[0047] A schematic view of a carrier glass and the flexible AMOLED display shown in embodiment 1 is shown in the schematic view; Figure 7

[0048] A schematic view of a packaging device shown in embodiment 1 is shown in the schematic view. Figure 8 Legend of reference signs:

[0049] 10, flexible display device peeling device; 110, multi-directional motion component; 120, adsorption component; 121, adsorption base; 1211, substrate; 122, powered electromagnetic assembly; 123, adsorption accessory; 130, auxiliary clamping component; 131, clamping plate; 1311, auxiliary adsorption hole; 132, magnetic piece or magnetic guide piece; 200, laser peeling mechanism; 300, separation mechanism; 20, packaging device; 21, carrier glass; 22, flexible AMOLED display; 221, flexible substrate; 222, water and oxygen barrier layer; 223, TFT array; 224, functional layer; 225, thin film; 226, polaroid.

[0050] DETAILED DESCRIPTION

[0051] ​​​For the purpose of promoting an understanding of the application, the application will now be described in greater detail with reference to the figures. The preferred embodiments of the application are illustrated in the figures. However, the application can be embodied in many different forms and should not be construed as limited to the embodiments set forth herein. Rather, these embodiments are provided so that this disclosure will be thorough and complete, and fully convey the scope of the application to those skilled in the art.

[0052] In the description of the application, it should be understood that the use of terms such as "central", "upper", "lower", "bottom", "inner", "outer" and the like are intended to indicate a relative position or location as shown in the drawings and are for purposes of description and illustration and are not intended to limit or in any way suggest the specific orientation of the apparatus or elements thereof in its actual use or construction.

[0053] It should be understood that the terms "first", "second", etc. are used herein to describe various information, but these information should not be limited to these terms, and these terms are only used to distinguish the same type of information from each other. For example, the "first" information can also be referred to as "second" information, and similarly, the "second" information can also be referred to as "first" information without departing from the scope of the application.

[0054] In the description of the application, it should be understood that the terms "connected", "connected" should be understood broadly, for example, it can be fixedly connected, or it can be detachably connected, or integrally connected; it can be mechanically connected, or it can be electrically connected; it can be directly connected, or it can be indirectly connected through an intermediate medium, it can be the internal communication of two elements, that is, when an element is referred to as "fixed to" another element, it can be directly on another element or there can be a middle element. When an element is considered to be "connected" to another element, it can be directly connected to another element or there can be a middle element. For those skilled in the art, the specific meaning of the above terms in the application can be understood according to the specific circumstances.

[0055] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this application belongs. The terminology used in the description of the application herein is for the purpose of describing particular embodiments only and is not intended to be limiting of the application. As used herein, the use of the term "and / or" includes any and all combinations of one or more of the associated listed items.

[0056] Please refer to Figure 1 As shown in the drawings, an embodiment of the application provides a flexible display device peeling device 10.

[0057] A flexible display device peeling device 10 includes: a magnetic auxiliary clamping component 130 and an adsorption component 120. The auxiliary clamping component 130 has an auxiliary clamping plane; the adsorption component 120 includes an adsorption base 121, a magnetically conductive component 122 and a plurality of adsorption elements 123.

[0058] A magnetically conductive component 122 is disposed on the adsorption base 121. When magnetically activated, the magnetically conductive component 122 can magnetically engage with the auxiliary clamping component 130; when not magnetically activated, it does not magnetically engage with the auxiliary clamping component. The adsorption base 121 has an adsorption plane, and multiple adsorption elements 123 are connected to the adsorption plane of the adsorption base 121. (See also...) Figure 3 and Figure 4 As shown, the auxiliary clamping component 130 has an auxiliary clamping plane for supporting the flexible display device to be peeled off, and the auxiliary clamping component 130 has an auxiliary adsorption hole 1311 that extends through the auxiliary clamping plane.

[0059] In one embodiment, see Figure 2 As shown, the adsorption base 121 has multiple substrates 1211, which are interconnected. Each substrate 1211 is provided with an electromagnetic component 122 and an adsorption element 123. For example, there are three substrates 1211, which intersect to form a triangular structure. For example, there are four substrates 1211, which intersect to form a grid-like structure. For example, the number of substrates 1211 can also be other, with multiple substrates 1211 intersecting to form a grid-like structure or other shapes.

[0060] In one embodiment, there are multiple electromagnetic components 122, with multiple electromagnetic components 122 spaced apart on each substrate 1211. Preferably, the multiple electromagnetic components 122 are evenly distributed on the multiple substrates 1211. The clamping plate 131 is provided with multiple magnetic elements 132 or magnetic conductive elements 132, and the adsorption component 120 is provided with multiple electromagnetic components 122, enabling the entire packaged device 20 to be adsorbed and fixed from multiple positions, preventing slippage between the flexible display device and the carrier substrate after peeling.

[0061] In one embodiment, see Figure 1 As shown, the adsorption member 123 includes multiple suction nozzles. Multiple suction nozzles are respectively arranged at intervals on each substrate 1211. Preferably, the multiple suction nozzles on each substrate 1211 are evenly distributed. This arrangement can ensure that the adsorption member 123 adsorbs and fixes the carrier substrate of the encapsulation device 20 from multiple positions.

[0062] In one embodiment, the flexible display device peeling apparatus 10 further comprises a multi-orientation moving component 110 connected with the adsorption base 121. Specifically, the multi-orientation moving component 110 is connected with at least one base plate 1211 of the adsorption base 121. The multi-orientation moving component 110 is used to drive the adsorption base 121 to move so as to realize the transfer of the encapsulated device clamped by the transfer adsorption component 123 and the auxiliary clamping component 130. Preferably, the multi-orientation moving component 110 is a five-axis robot.

[0063] In one embodiment, the auxiliary clamping component 130 comprises a clamping plate 131 and a plurality of magnetic pieces 132 or magnetic conductive pieces 132 capable of being magnetically connected with the energized magnetic assembly 122. The energized magnetic assembly 122 in the magnetic state is capable of being magnetically attracted to the magnetic pieces 132 or the magnetic conductive pieces 132. The number of the magnetic pieces 132 or the magnetic conductive pieces 132 is one, two or other number. The plurality of magnetic pieces 132 are arranged at intervals in the clamping plate 131. The energized magnetic assembly 122 can be an electromagnet, the magnetic pieces 132 can be magnets, and the magnetic conductive pieces 132 can be made of iron, cobalt, nickel or other materials. The clamping plate 131 has the auxiliary clamping plane described above. The magnetic pieces 132 are built-in in the clamping plate 131, i.e. the magnetic pieces 132 are embedded in the inside of the clamping plate 131. Preferably, the plurality of magnetic pieces 132 are arranged at equal intervals in the clamping plate 131.

[0064] In one embodiment, please refer to Figure 3 As shown, the number of the magnetic pieces 132 or the magnetic conductive pieces 132 is multiple. The plurality of magnetic pieces 132 or the magnetic conductive pieces 132 are arranged at intervals in the clamping plate 131. Preferably, the plurality of magnetic pieces 132 or the magnetic conductive pieces 132 are uniformly arranged in the clamping plate 131.

[0065] In one embodiment, the plurality of magnetic pieces 132 or the magnetic conductive pieces 132 are arranged in at least one column.

[0066] In one embodiment, the plurality of magnetic pieces 132 or the magnetic conductive pieces 132 are arranged in at least one column along a direction parallel to one side edge of the clamping plate 131.

[0067] In one embodiment, the distance between adjacent magnetic pieces 132 or magnetic conductive pieces 132 in each column is equal, and the distance is 5mm-10mm. For example, the distance between adjacent magnetic pieces 132 or magnetic conductive pieces 132 in each column is 5mm, 6mm, 7mm, 8mm, 9mm, 10mm or other values.

[0068] In one embodiment, multiple magnetic elements 132 or magnetic conductive elements 132 are arranged in multiple columns along a direction parallel to the side of the clamping plate 131. Since each column has multiple magnetic elements 132 or magnetic conductive elements 132, the multiple magnetic elements 132 or magnetic conductive elements 132 are arranged in multiple rows and columns. The columns and rows formed by the multiple magnetic elements 132 or magnetic conductive elements 132 should be interpreted broadly, rather than simply as rows and columns being perpendicular. For example, taking the column formed by the multiple magnetic elements 132 or magnetic conductive elements 132 as a reference, the row formed by the multiple magnetic elements 132 or magnetic conductive elements 132 can be at a certain angle to the column, such as 30°, 45°, 60°, 90°, etc. Preferably, the column formed by the multiple magnetic elements 132 or magnetic conductive elements 132 is perpendicular to the row it forms; that is, the multiple magnetic elements 132 or magnetic conductive elements 132 are arranged in a matrix.

[0069] When multiple magnetic components 132 or magnetic conductive components 132 are distributed in a matrix, the distance between adjacent columns is 3mm-5mm, for example, the distance between adjacent columns is 3mm, 4mm, 5mm or other values.

[0070] Preferably, the clamping plate 131 can be a complete plate-like structure, and the shape of the plate-like structure can be circular, square, triangular, etc.

[0071] In one embodiment, the clamping plate 131 has a plurality of auxiliary adsorption holes 1311, which are spaced apart and are respectively penetrated by an auxiliary clamping plane through the clamping plate 131.

[0072] In one embodiment, a plurality of auxiliary adsorption holes 1311 are distributed in at least one column along a direction parallel to one side of the clamping plate 131.

[0073] In one embodiment, the distance between adjacent auxiliary adsorption holes 1311 in each column is 5mm-10mm; for example, the distance between adjacent auxiliary adsorption holes 1311 in each column is 5mm, 6mm, 7mm, 8mm, 9mm, 10mm or other values. The distance between adjacent auxiliary adsorption holes 1311 should not be too large. When the distance between adjacent auxiliary adsorption holes 1311 is too large, the adsorption force generated by the opening of the auxiliary adsorption hole 1311 during vacuuming will be less than the gravity of the flexible display device corresponding to that area, resulting in local detachment of the flexible display device.

[0074] In one embodiment, a plurality of auxiliary adsorption holes 1311 are distributed in multiple columns along a direction parallel to the side of the clamping plate 131, with a distance of 3mm-5mm between adjacent columns; for example, the plurality of auxiliary adsorption holes 1311 are distributed in a matrix on the auxiliary clamping component 130. The distance between adjacent columns is 3mm, 4mm, 5mm or other values. Optionally, the openings of a plurality of vent holes on the adsorption surface 211 are distributed in multiple rows and columns. The columns and rows formed by the auxiliary adsorption holes 1311 should be interpreted broadly, rather than simply as rows and columns being perpendicular. For example, based on a column formed by the auxiliary adsorption holes 1311, a row formed by the auxiliary adsorption holes 1311 can be at a certain angle to the column, such as 30°, 45°, 60°, 90°, etc. Preferably, a column formed by the plurality of auxiliary adsorption holes 1311 is perpendicular to its row, that is, the plurality of auxiliary adsorption holes 1311 are distributed in a matrix on the auxiliary clamping component 130.

[0075] In one embodiment, when multiple magnetic components 132 or magnetic conductive components 132 are arranged in a matrix and the row spacing and column spacing are equal, an auxiliary adsorption hole 1311 is provided at the center of each of the four adjacent magnetic components 132 or magnetic conductive components 132.

[0076] In one embodiment, the flexible display device peeling device 10 further includes a laser peeling mechanism 200. The laser peeling mechanism 200 has peeling adsorption holes, and auxiliary adsorption holes correspond to the peeling adsorption holes of the laser peeling mechanism 200. During installation, an auxiliary clamping component 130 can be disposed in the laser peeling mechanism 200, and the auxiliary adsorption holes 1311 correspond to the peeling adsorption holes of the laser peeling mechanism 200. When there are multiple auxiliary adsorption holes 1311, each of the multiple auxiliary adsorption holes 1311 corresponds one-to-one with the peeling adsorption holes on the laser peeling mechanism 200. The laser peeling mechanism 200 can achieve adsorption and fixation of the flexible display device of the packaged device 20 by drawing a vacuum through the peeling adsorption holes and the auxiliary adsorption holes 1311.

[0077] Preferably, a platform slot can be provided on the working platform of the laser stripping mechanism 200. The shape and size of the platform slot are consistent with the shape and size of the auxiliary clamping component 130. Multiple stripping adsorption holes are provided in the platform slot. The distribution order of the multiple stripping adsorption holes is consistent with the distribution order of the multiple auxiliary adsorption holes 1311 on the auxiliary clamping component 130. When the auxiliary clamping component 130 moves into the platform slot, the auxiliary adsorption holes 1311 on the auxiliary clamping component 130 can correspond one-to-one with the multiple stripping adsorption holes in the platform slot.

[0078] In one embodiment, the flexible display device peeling device 10 further includes a separation mechanism 300. The separation mechanism 300 has a separation groove. The bottom surface of the separation groove has a plurality of separation adsorption holes. Preferably, the shape and size of the separation groove are consistent with the shape and size of the auxiliary clamping component 130, and the distribution order of the plurality of separation adsorption holes is consistent with the distribution order of the plurality of auxiliary adsorption holes 1311 on the auxiliary clamping component 130. When the auxiliary clamping component 130 moves into the separation groove, the plurality of auxiliary adsorption holes 1311 can correspond one-to-one with the separation adsorption holes. By providing a plurality of separation adsorption holes and a plurality of auxiliary adsorption holes 1311, the flexible display device of the encapsulated device 20 can be adsorbed and fixed from multiple positions to ensure the smooth completion of the peeling process.

[0079] The flexible display device peeling device 10 of the present invention can peel the flexible display device from the carrier substrate, and the flexible display device is not easy to fall off or slip during peeling and transfer, which effectively improves the yield of the peeling process.

[0080] An embodiment of the present invention also provides a method for peeling off a flexible display device.

[0081] A method for peeling off a flexible display device includes the following steps:

[0082] A flexible display device to be peeled off is fabricated on a carrier substrate 1211.

[0083] Laser scanning is performed on the interface between the carrier substrate 1211 and the flexible display device to be peeled off. During the laser scanning peeling process, different lasers can be selected based on the absorption degree of different wavelengths of laser light by the fabrication material of the flexible substrate 221 of the flexible display device; for example, a 308nm excimer laser and a 405nm semiconductor laser. Specifically, for flexible substrates 221 made of colored materials, the laser energy required for peeling is approximately 120–160 mJ / cm². 2 The flexible substrate 221, made of colorless and transparent material, requires a laser energy of approximately 180–220 mJ / cm² during peeling. 2 .

[0084] The flexible display device to be peeled off and the carrier substrate 1211 are clamped together by the adsorption component 120 and the magnetic auxiliary clamping component 130. The electromagnetic component 122 in the adsorption component 120 can magnetically cooperate with the auxiliary clamping component 130 in a magnetic state to clamp the flexible display device to be peeled off and the carrier substrate 1211, and the carrier substrate 1211 is close to the adsorption component 120.

[0085] The auxiliary clamping component 130 uses vacuum adsorption to fix the flexible display device to be peeled off. The electromagnetic component 122 is de-energized, and the adsorption component 120 is controlled to drive the carrier substrate 1211 to separate from the flexible display device to be peeled off.

[0086] In one embodiment, the flexible display device to be peeled off is clamped together with the carrier substrate 1211 using the adsorption component 120 and the magnetic auxiliary clamping component 130, specifically including the following steps:

[0087] The adsorption component 120 is used to adsorb and fix the carrier substrate 1211 on the surface away from the flexible display device to be peeled off.

[0088] The adsorption component 120 moves to transfer the flexible display device to be peeled off and the carrier substrate 1211 to the auxiliary clamping plane of the auxiliary clamping component 130, with the flexible display device to be peeled off facing the auxiliary clamping plane.

[0089] The electromagnetic component 122 of the adsorption component 120 is energized so that the adsorption component 120 and the auxiliary clamping component 130 clamp the flexible display device to be peeled off and the carrier substrate 1211.

[0090] In one embodiment, the auxiliary clamping component 130 vacuum adsorbs and fixes the flexible display device to be peeled off, and the electromagnetic component 122 is de-energized, so that the adsorption component 120 drives the carrier substrate 1211 to separate from the flexible display device to be peeled off. The specific steps include the following:

[0091] The auxiliary clamping component 130 is controlled to vacuum adsorb and fix the flexible display device to be peeled off, and the adsorption component 120 is controlled to adsorb and fix the surface of the carrier substrate 1211 away from the flexible display device to be peeled off.

[0092] The electromagnetic component 122 is de-energized, and the adsorption component 120 is rotated to gradually lift one side of the carrier substrate 1211 from the flexible display device until it separates.

[0093] In one embodiment, controlling the adsorption component 120 to rotate so as to gradually lift one side of the carrier substrate 1211 from the flexible display device until it is separated includes the following steps:

[0094] The adsorption component 120 is controlled to rotate so that one side of the carrier substrate 1211 is lifted from the flexible display device by 3° to 5°, waits for 1 to 2 seconds, then lifts it by 5° to 10°, waits for 1 to 2 seconds, and then lifts the carrier substrate 1211 at a speed of 3 to 5 mm / s until the carrier substrate 1211 is completely separated from the flexible display device.

[0095] In one embodiment, the movement of the adsorption component 120 can be achieved by driving the multi-directional motion component 110.

[0096] In one embodiment, when performing laser scanning processing on the interface between the carrier substrate 1211 and the flexible display device to be peeled off, the specific steps include the following:

[0097] The laser peeling mechanism 200 is controlled to draw a vacuum through the peeling adsorption holes and auxiliary adsorption holes 1311 to adsorb and fix the flexible display device. The scanning laser of the laser peeling mechanism 200 scans the interface between the flexible display device to be peeled and the carrier substrate 1211 to perform laser peeling processing on the packaged device 20.

[0098] Example 1

[0099] This embodiment provides a method for peeling off a flexible AMOLED display 22.

[0100] A flexible AMOLED display 22 is fabricated on a carrier glass 21, wherein the carrier glass 21 and the flexible AMOLED display 22 are encapsulated together and defined as a packaged device 20.

[0101] The flexible AMOLED display 22 is obtained through the following method: A PI solution (polyimide) is coated onto a carrier glass 21 using a slit coating process. The coated carrier glass 21 is then subjected to high-vacuum drying and high-temperature heating to form a flexible substrate 221 with uniform thickness. A water-oxygen barrier layer 222 and a TFT array 223, such as Oxide-TFT or LTPSTFT, are fabricated on the flexible substrate 221. A functional layer 224 is prepared using inkjet printing or vapor deposition, and thin film 225 and polarizer 226 are encapsulated to obtain a packaged device 20, such as... Figure 8 As shown. The flexible AMOLED display 22 on the carrier glass 21 is peeled off. The peeling method for the flexible AMOLED display 22 includes the following steps:

[0102] The multi-directional motion component 110 is controlled to drive the adsorption component 120 to move into the encapsulation chamber. Air is drawn through the nozzle of the adsorption component 120 to adsorb and fix the carrier glass 21 of the encapsulation device 20. After the encapsulation device 20 is removed from the encapsulation chamber, it is rotated 180°. The multi-directional motion component 110 is then controlled to drive the adsorption component 120 to move, transferring the encapsulation device 20 to the auxiliary clamping plane of the auxiliary clamping component 130. Air is drawn through the auxiliary adsorption hole 1311 of the auxiliary clamping component 130 to adsorb and fix the flexible AMOLED display 22 of the encapsulation device 20. The nozzle of the adsorption component 120 is then controlled to release the carrier glass 21. (See below) Figure 5 As shown.

[0103] The packaged device 20 undergoes laser lift-off processing. The laser lift-off process includes the following steps: See [link to details]. Figure 5As shown, the laser lift-off mechanism 200 uses a scanning laser to scan the interface between the flexible display device and the carrier substrate, thereby performing laser lift-off processing on the packaged device 20. The laser lift-off mechanism 200 uses a 308nm excimer laser with a lift-off energy of 145mJ / cm². 2 A high-energy scanning laser beam penetrates the carrier glass 21 and is focused at the interface between the flexible AMOLED display 22 and the carrier glass 21, scanning the entire surface of the flexible AMOLED display 22. The PI material of the flexible display device absorbs the laser energy, causing the bond energy between the flexible AMOLED display 22 and the carrier glass 21 to be broken. The PI material itself decomposes and carbonizes, resulting in no adhesion between the flexible display device and the carrier substrate.

[0104] Multiple suction nozzles on the suction element 123 of the control suction component 120 adsorb and fix the carrier glass 21. When the electromagnetic component 122 of the suction component 120 is energized, it magnetically attracts the magnetic element 132 or the magnetically conductive element 132 on the auxiliary clamping component 130, causing the suction component 120 and the auxiliary clamping component 130 to firmly clamp the encapsulated device 20 between them. This prevents the flexible display device, which has no adhesive force, from slipping relative to the carrier substrate. See [link to relevant documentation]. Figure 6 As shown.

[0105] The multi-directional motion component 110 drives the adsorption component 120 and the auxiliary clamping component 130 to move synchronously to the separation mechanism 300 and rotate 180°, so that the auxiliary clamping component 130 is placed into the separation groove of the separation mechanism 300. At this time, the auxiliary adsorption holes 1311 on the auxiliary clamping component 130 correspond one-to-one with the separation adsorption holes in the separation groove and are interconnected. The flexible AMOLED display 22 is fixed by suction through the separation adsorption holes in the separation groove and the auxiliary suction holes of the auxiliary clamping component 130. See Figure 7 As shown.

[0106] The electromagnetic component 122 is de-energized, and the multi-directional motion component 110 is driven to rotate the adsorption component 120, causing one side of the carrier glass 21 to gradually lift 3° off the flexible AMOLED display 22. Wait 2 seconds, then lift 5°, wait 2 seconds, and so on. (See below) Figure 7 As shown, the carrier glass 21 is then lifted at a constant speed of 3 mm / s until the carrier glass 21 is completely separated from the flexible AMOLED display 22, thus obtaining the flexible AMOLED display 22.

[0107] The technical features of the above embodiments can be combined in any way. For the sake of brevity, not all possible combinations of the technical features in the above embodiments are described. However, as long as there is no contradiction in the combination of these technical features, they should be considered to be within the scope of this specification.

[0108] The embodiments described above are merely illustrative of several implementations of the present invention, and while the descriptions are specific and detailed, they should not be construed as limiting the scope of the present invention. It should be noted that those skilled in the art can make various modifications and improvements without departing from the concept of the present invention, and these modifications and improvements all fall within the scope of protection of the present invention. Therefore, the scope of protection of this patent should be determined by the appended claims.

Claims

1. A flexible display device peeling apparatus characterized by comprising: The device comprises: an auxiliary clamping component with magnetism, which comprises a clamping plate and a plurality of magnetic pieces, the plurality of magnetic pieces are spacedly arranged in the clamping plate, the plurality of magnetic pieces are arranged in at least one column, the clamping plate has an auxiliary clamping plane, and the clamping plate is provided with a plurality of auxiliary adsorption holes; an adsorption component, which comprises an adsorption base, a powered magnetic assembly and a plurality of adsorption pieces, the adsorption base has an adsorption plane, the powered magnetic assembly is arranged on the adsorption base, and the adsorption plane of the adsorption base is connected with the plurality of adsorption pieces; wherein the powered magnetic assembly can be magnetically attracted to the magnetic pieces in the clamping plate in a state with magnetism; a laser stripping mechanism, which has a plurality of stripping adsorption holes, and the auxiliary adsorption holes can correspond to the stripping adsorption holes one by one; and a separation mechanism, which has a plurality of separation grooves, the groove bottom surface of the separation grooves is provided with separation adsorption holes, and the separation adsorption holes can correspond to the auxiliary adsorption holes.

2. The flexible display device peeling apparatus according to claim 1, wherein The adsorption base has a plurality of base plates, the plurality of base plates are cross-connected, each of the base plates is respectively provided with the powered magnetic assembly and the adsorption piece; and / or The adsorption pieces on the adsorption base comprise a plurality of spacedly arranged suction nozzles; and / or The powered magnetic assembly has a plurality of powered magnetic assemblies, and the plurality of powered magnetic assemblies are spacedly arranged on the adsorption base.

3. The flexible display device peeling apparatus according to claim 2, wherein Further comprising: a multi-orientation motion component, which is connected with at least one base plate of the adsorption base, and is used to drive the adsorption base to move so as to transfer the adsorption pieces and the auxiliary clamping component clamped with the flexible display device to be stripped.

4. The flexible display device peeling apparatus according to claim 1, wherein The plurality of magnetic pieces are arranged in at least one column along a direction parallel to the side edge of the clamping plate, and the distance between adjacent magnetic pieces in each column is 5mm-10mm.

5. The flexible display device peeling apparatus according to claim 4, wherein The plurality of magnetic pieces are arranged in a plurality of columns along a direction parallel to the side edge of the clamping plate, and the distance between adjacent columns is 3mm-5mm.

6. The flexible display device peeling apparatus according to any one of claims 1 to 5, wherein The plurality of auxiliary adsorption holes are spacedly arranged and respectively penetrated by the auxiliary clamping plane through the clamping plate.

7. The flexible display device peeling apparatus according to claim 6, wherein The plurality of auxiliary adsorption holes are arranged in at least one column along a direction parallel to the side edge of the clamping plate, and the distance between adjacent auxiliary adsorption holes in each column is 5mm-10mm; and / or The plurality of auxiliary adsorption holes are arranged in a plurality of columns along a direction parallel to the side edge of the clamping plate, and the distance between adjacent columns is 3mm-5mm; and / or The center positions of adjacent four magnetic pieces are provided with the auxiliary adsorption holes.

8. The flexible display device stripping device according to claim 7, wherein The auxiliary adsorption holes can correspond to the separation adsorption holes one by one. The flexible display device stripping device according to any one of claims 1-8 is used, and the steps comprise:

9. A flexible display device peeling method, characterized by, preparing a flexible display device to be stripped on a carrier substrate; performing laser scanning treatment on the interface between the carrier substrate and the flexible display device to be stripped; ​ Controlling the adsorption component to adsorb and fix the surface of the carrier substrate far away from one side of the flexible display device to be peeled, the adsorption component is moved to transfer the flexible display device to be peeled and the carrier substrate to the auxiliary clamping plane of the auxiliary clamping component, the flexible display device to be peeled is towards the auxiliary clamping plane, controlling the energized electromagnetic assembly of the adsorption component to be energized, so that the adsorption component and the auxiliary clamping component clamp the flexible display device to be peeled and the carrier substrate, and the carrier substrate is close to the adsorption component; Controlling the auxiliary clamping component to adsorb and fix the flexible display device to be peeled, controlling the adsorption component to adsorb and fix the surface of the carrier substrate far away from one side of the flexible display device to be peeled, controlling the energized electromagnetic assembly to be de-energized, controlling the adsorption component to rotate to lift one side of the carrier substrate from the flexible display device by 3°~5°, waiting for 1~2s, then lifting by 5°~10°, waiting for 1~2s, then lifting the carrier substrate at a speed of 3~5mm / s until the carrier substrate is completely separated from the flexible display device.

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