Fluidic device

Abstract

The invention proposes a fluid device (1) having a fluid chamber (5) configured for accommodating a fluid, which fluid chamber is jointly defined by a device housing (3) and a flexurally elastic diaphragm element (4). The diaphragm element (4) is fluid-tightly fixed at the device housing (3) with a peripheral edge section (17) and has a diaphragm working section (27) enclosed by the peripheral edge section (17), which diaphragm working section can be deflected by a piezoelectric actuator (7) for changing the volume of the fluid chamber (5). The diaphragm element (4) is made of a rubber-elastic material, wherein the piezoelectric actuator (7) has a drive section (42) extending along the diaphragm working section (27), which drive section is embedded into the diaphragm element (4) and is wrapped by the rubber-elastic material of the diaphragm element (4).

Description

Technical Field

[0001] The present invention relates to a fluid device having a fluid chamber configured to contain fluid, the fluid chamber being defined by a device housing and a flexurally elastic diaphragm element having an extension of a plane in a main extending plane, wherein the diaphragm element is fluid-tightly fixed to the device housing at its peripheral edge section, and wherein the diaphragm working section of the diaphragm element enclosed by the peripheral edge section can be elastically deflected by a piezoelectric actuator of the fluid device acting on the diaphragm element to perform a stroke movement along a working direction oriented transversely to the main extending plane in order to change the volume of the fluid chamber. Background Technology

[0002] A fluid device of the type mentioned above is known from JP-H03-12917 A. This fluid device is used in semiconductor manufacturing and provides the possibility of backflowing fluid in a fluid channel to avoid undesirable dripping at the output opening. The backflow effect can be caused by a negative pressure generated within the fluid chamber of the fluid device, to which the fluid channel is connected. The fluid chamber is defined by a device housing and a diaphragm element fixed to the device housing at its edge. The negative pressure is generated by deflecting the diaphragm working section defining the fluid chamber by means of a piezoelectric actuator, thereby increasing the volume of the fluid chamber. The piezoelectric actuator is constructed as a stacked converter and fixed to one of two opposing diaphragm surfaces of a flexible diaphragm element. The piezoelectric actuator has multiple electrodes to which a control voltage can be applied, causing deformation of the piezoelectric actuator that is accompanied by a corresponding deformation of the diaphragm working section of the diaphragm element.

[0003] In the backflow valve known from DE 19810657 A1, the negative pressure that causes the fluid to backflow can be generated by means of a deformable diaphragm, a piston acts on the diaphragm, the piston is preloaded by a spring, and the movement of the piston can be controlled by a controlled fluid loading of another diaphragm. Summary of the Invention

[0004] The present invention is based on the objective of achieving a simple and precise change in the volume of the fluid chamber of a fluid device by taking measures.

[0005] To address the aforementioned task, a key feature of a fluid device with the characteristics mentioned at the beginning is that the diaphragm element is made of a rubber-elastic material, wherein the piezoelectric actuator has a drive section extending along the working section of the diaphragm, the drive section being embedded in the diaphragm element and encased by the rubber-elastic material of the diaphragm element.

[0006] In the fluid device according to the invention, the volume of the fluid chamber can be changed by means of a piezoelectric actuator, by which actuation of the piezoelectric actuator deforms a rubber-elastic diaphragm element, which forms a movable defining wall of the fluid chamber. The piezoelectric actuator has a drive section that can be deformed by actuation of the piezoelectric actuator, and its deformation is transmitted to an adjacent working section of the diaphragm, thereby enabling the working section to perform a stroke movement transverse to the main extension plane. Due to the rubber elasticity of the diaphragm element, the driving force applied by the drive section is relatively small, thus enabling the piezoelectric actuator to operate in an energy-efficient manner. Because the drive section of the piezoelectric actuator extends inside the working section of the diaphragm in such a way that the drive section is embedded in the diaphragm element and encased by the rubber-elastic material of the diaphragm element, the driving force can be reliably transmitted from the piezoelectric actuator to the working section of the diaphragm in combination with an extremely compact size.

[0007] A variable-sized control voltage can be applied to the piezoelectric actuator, causing a reversible shape change in the drive section according to the inverse piezoelectric effect. This shape change is directly transmitted to the diaphragm working section of the diaphragm element that surrounds the drive section. This ensures a clear match between the deflection of the drive section and the stroke of the diaphragm working section, providing a good premise for precise and adjustable volume changes in the fluid chamber. Depending on the degree of deflection of the diaphragm working section caused by the piezoelectric actuator, the volume of the fluid chamber is changed more or less strongly, where an increase in volume can, for example, be used to generate a negative pressure in the fluid chamber. Preferably, the piezoelectric actuator can be easily and proportionally controlled to set different stroke positions of the diaphragm working section for different preset fluid chamber volumes. The operation can be performed at a low energy level, so that no associated self-heating occurs despite direct control. Furthermore, the piezoelectric concept allows for position adjustment during diaphragm deflection when needed, making accurate and repeatable settings possible. By encapsulating the piezoelectric actuator within the diaphragm element, reliable shielding of the piezoelectric actuator from fluid within the fluid chamber is achieved, ensuring that the functionality of the piezoelectric actuator is not affected even in the presence of corrosive fluids.

[0008] Advantageous extensions of the invention are derived from the dependent claims.

[0009] As the material for the rubber elasticity used in diaphragm elements, elastomer materials are particularly preferred. Preferred elastomer materials include NBR, (F)FKM, EPDM, silicone resins, or thermoplastic elastomers.

[0010] The piezoelectric actuator is thus fixed to the diaphragm element, such that the piezoelectric actuator and the diaphragm element together form a unified assembly capable of operation. Preferably, the piezoelectric actuator and the diaphragm element are immovable relative to each other. During the assembly of fluid equipment, the previously assembled assembly can be uniformly placed into the equipment housing, thereby enabling efficient and cost-effective manufacturing.

[0011] The aforementioned assembly can be manufactured at a particularly cost-effective method by encapsulating the drive section of the piezoelectric actuator with a rubber-elastic material during the manufacturing of the diaphragm element. This allows for a very tight connection between the piezoelectric actuator and the diaphragm element, enabling the two components to adhere to each other.

[0012] Alternatively, for example, it is also possible to manufacture the diaphragm element independently of the piezoelectric actuator and to construct an elongated receiving recess located in the main extension plane within the diaphragm element independently of the piezoelectric actuator, into which the piezoelectric actuator with its drive section is inserted.

[0013] When the drive section of the piezoelectric actuator is encapsulated in a rubber-elastic material of a diaphragm element according to the previously mentioned design scheme, the receiving recess is automatically generated in such a way that the material of the diaphragm element is tightly attached to the outer periphery of the drive section of the piezoelectric actuator.

[0014] The elongated receiving recess is constructed in a particularly blind-hole manner, and is open on one side in the region of the edge section of the periphery of the diaphragm element. On the open side of the receiving recess, the piezoelectric actuator can extend in an additional length section connected to the drive section, which is particularly suitable for electrical contact.

[0015] Suitablely, the diaphragm element is constructed in a plate-like manner.

[0016] It is considered suitable that the diaphragm element has a rectangular, elongated outer contour in the region of its peripheral edge segment, so that the diaphragm element has an elongated shape extending along an imaginary longitudinal axis of the diaphragm. Suitablely, the outer contour is rounded at the corners.

[0017] Preferably, the diaphragm element is arranged as a separating wall within the device housing such that it divides the internal space of the housing into a fluid chamber and another housing chamber. To prevent the stroke of the diaphragm's working section from being affected by overpressure or negative pressure present in the other housing chamber, the other housing chamber is suitably continuously connected to the surrounding environment via at least one venting opening, thus allowing it to be referred to as a venting chamber. When the device housing is designed such that the diaphragm element rests against the housing wall in its undeflected state during the diaphragm's working section, the at least one venting opening also prevents the rubber-elastic diaphragm from adhering to the housing wall. This design is advantageous because it allows for a narrow dimension of the device housing in the working direction of stroke.

[0018] Preferably, the housing wall on the back side of the device housing, opposite the fluid chamber along the working direction and facing the diaphragm element, has a surface structure consisting of a region of multiple depths and protrusions on the inner surface of the device housing facing the diaphragm element. This effectively prevents the diaphragm element from adhering to the device housing. The diaphragm element enables large-area rear ventilation. Additionally or alternatively, a corresponding surface structure can be constructed on the diaphragm surface of the diaphragm element on the back side facing the housing back wall to interact with the housing back wall.

[0019] The diaphragm element has a diaphragm surface facing away from the fluid chamber. On the back side of the diaphragm surface, a groove assembly is suitably constructed on the longitudinal side, excluding the drive section of the piezoelectric actuator. For example, longitudinal grooves extend along the drive section of the piezoelectric actuator in the diaphragm element on both sides of the drive section. Even with a relatively large thickness of the diaphragm element in other cases, the groove assembly ensures high flexibility of the diaphragm element, a thickness chosen, for example, to ensure high stability of the diaphragm element even under relatively high fluid pressures.

[0020] The drive section of the piezoelectric actuator suitably has an electrode assembly, and a control voltage that causes the travel movement of the diaphragm working section can be applied to the electrode assembly in a variable magnitude. Depending on the magnitude of the control voltage, the travel position of the diaphragm working section can be set, and correspondingly, the desired volume of the fluid chamber can be set.

[0021] Suitably, the piezoelectric actuator has a non-piezoelectrically active carrier element, which is equipped with a piezoelectric element with piezoelectric properties on at least one of its two longitudinal sides pointing in the working direction in the region of the drive section. The piezoelectric element is laterally surrounded by electrodes of an electrode assembly on its sides facing away from each other in the working direction. For example, the piezoelectric actuator can be implemented as a bimorph or a trimorph. When a conductive carrier layer is used, the carrier layer itself can be used directly as an electrode. For example, a conductive carrier layer can be made of carbon fiber material.

[0022] In particular, the triangular piezoelectric actuator offers the advantage of active bending in two directions. When bending is primarily used in only one direction to change the volume of the fluid chamber, it becomes possible that, in the case of a deactivated piezoelectric actuator, the actuator and thus the diaphragm element do not precisely occupy their completely undeformed, flat, stationary position due to the typical hysteresis effect of the piezoelectric laminate structure. To counteract the hysteresis and reliably convert the diaphragm element to a flat surface orientation, a second piezoelectric element can be briefly activated at a corresponding voltage level.

[0023] For piezoelectric actuators, it is recommended to first achieve a layered longitudinal profile. This is especially true when the piezoelectric actuator is preferably implemented as a piezoelectric bending transducer.

[0024] Preferably, the piezoelectric actuator configured as a piezoelectric bending transducer has a drive section capable of performing a deflection motion to induce a stroke movement in the working section of the diaphragm. Suitably, the deflection motion can be performed from a rest position (which exists when the piezoelectric actuator is deactivated) in opposite directions, so that the working section of the diaphragm can be actively deflected in two opposite directions.

[0025] The piezoelectric actuator is constructed and arranged such that it is supported in the peripheral edge region of the diaphragm element by rigid support structures of the device housing at two locations spaced apart from each other in the main extension plane of the diaphragm element, along the working direction. The diaphragm working section extends between these two support structures and arches when the piezoelectric actuator is electrically activated. Due to this deformation behavior, the volume change of the fluid chamber can be set with particular precision. The application of a control voltage to the piezoelectric actuator causes the piezoelectric material to stretch along the electric field direction (currently, along the working direction), which on the one hand causes the piezoelectric element to become thicker, and on the other hand simultaneously causes the length of the piezoelectric element to decrease. Combined with the non-piezoelectrically active carrier element supporting the piezoelectric element (which does not deform along with it), this results in the aforementioned arched deformation of the drive section of the piezoelectric actuator, which in turn causes a corresponding deformation of the entire system consisting of the piezoelectric element and the diaphragm element.

[0026] Suitably, the diaphragm element has a gap in the region of the support structure into which the support structure engages, thereby fixing the diaphragm element in a shape-fitting manner relative to the device housing in the main extension plane. This is particularly advantageous when the diaphragm element is fixed to the device housing at its peripheral edge sections only by force and / or material fit (e.g., by clamping and / or by adhesive bonding).

[0027] Piezoelectric actuators are particularly designed such that they have a base section axially connected to the drive section, the base section extending freely from the diaphragm element. This base section can be used for electrically contacting the piezoelectric actuator. During the stroke movement of the diaphragm working section, the base section suitably performs an oscillating motion, the direction of which is opposite to the current stroke movement direction of the diaphragm working section.

[0028] In a particularly advantageous embodiment, the fluid device is equipped with a position detection mechanism configured to detect the changing relative position between the piezoelectric actuator and the device housing during the stroke movement of the diaphragm's working section. The position detection mechanism enables particularly precise and consistently reproducible setting of the desired volume for the fluid chamber. Since the stroke position of the diaphragm's working section affects the volume of the fluid chamber, particularly in a proportional relationship, reliable volume setting can be performed based on the measured position value. The position detection mechanism is configured to perform different measurement principles for position detection. For example, capacitive or inductive position detection is feasible.

[0029] Particularly suitable is a position detection mechanism having two cooperating detection components in the form of permanent magnets and a sensor operable by the permanent magnets. One of the detection components is arranged in a base section of the piezoelectric actuator that performs oscillating motion during the stroke of the diaphragm in its working region, while the other detection component is fixedly arranged relative to the device housing. Preferably, the sensor, for example configured as a Hall sensor, is located in the device housing, while the permanent magnet is positioned in the base section of the piezoelectric actuator. The sensor can be mounted directly in the device housing or in an additional component, such as a conductor plate, fixed to the device housing.

[0030] Preferably, the fluid device has an electronic control mechanism electrically connected to the piezoelectric actuator during operation of the fluid device. This electronic control mechanism allows for the preset control voltage of a desired magnitude, enabling the setting of at least one stroke position occupied by the diaphragm working section relative to the device housing. The electronic control mechanism is particularly configured to induce charge inflow and outflow as needed relative to the electrode assembly of the piezoelectric actuator. For example, the electronic control mechanism includes a high-voltage stage. By means of the control mechanism, depending on the magnitude of the applied control voltage, the stroke movement of the diaphragm working section and its positioning in predetermined stroke positions are possible, wherein the set stroke positions correspond to specific volumes of the fluid chamber.

[0031] Particularly suitable is that the electronic control mechanism is configured to adjust the stroke position of the diaphragm working section, wherein the adjustment is based on position measurements determined by a position detection mechanism. Volume adjustment of the fluid chamber is achieved indirectly through position adjustment because the piezoelectric actuator has reproducible deformation behavior, and therefore there is a clear association between each stroke position of the diaphragm working section and the current volume of the fluid chamber.

[0032] Fluid apparatuses can be used in any situation where the volume of a fluid chamber needs to be set as required. For example, a volume setting can be made to pre-determine the fluid volume associated with a subsequent metering process. This is, for example, in the semiconductor industry or in the field of laboratory automation.

[0033] For fluid devices, a particularly advantageous application is as a fluid suction device, where an increase in volume caused by a piezoelectric actuator within the fluid chamber creates a negative pressure, which draws fluid from a fluid channel connected to the fluid chamber into the chamber. This, for example, prevents liquid leakage during metering. Metering processes are common in many fields, such as in medical technology and industrial applications, and, for example, in the metering of photoresist on conductor plates or wafers used in semiconductor manufacturing.

[0034] A particularly suitable fluid device has two fluid channels communicating with a fluid chamber. The first fluid channel is a discharge channel through which fluid in the fluid chamber can flow out, while the second fluid channel is an injection channel through which fluid can flow into the fluid chamber. A shut-off unit associated with the second fluid channel can optionally release or shut off the second fluid channel to allow or prevent fluid flow. When the fluid device is used as a metering device or as part of a metering device, such a shut-off unit represents, for example, a metering valve. To prevent liquid fluid dripping after the metering process is completed, the piezoelectric actuator remains in an operating state during metering, in which the fluid volume in the fluid chamber decreases. After the metering process stops, the fluid volume is increased by corresponding manipulation of the piezoelectric actuator, thereby drawing the desired amount of fluid back into the fluid chamber from the discharge channel. Attached Figure Description

[0035] The invention will then be described in more detail with reference to the accompanying drawings. In the drawings:

[0036] Figure 1 A perspective view showing a preferred design of the fluid apparatus combined with a metering device according to the present invention is shown.

[0037] Figure 2 From another perspective, and in the partially cross-section of the equipment casing of the fluid device, it is shown that the origin is... Figure 1 Components,

[0038] Figure 3 Showing according to Figure 1 and 2 An isometric exploded view of the components.

[0039] Figure 4 Showing the source Figure 1 , 6 According to the longitudinal section of section IV-IV of section 7, the working section of the diaphragm occupies the undeflected basic position, thus the fluid chamber has the largest volume, wherein, in Figures 1 to 3 The channel plate that can be seen in the image is not shown.

[0040] Figure 5 Showing in with Figure 4 Another longitudinal section in the same cutting plane, in which the diaphragm working section is shown occupying the deflected operating position, thus giving the fluid chamber a reduced volume.

[0041] Figure 6 Showing the source Figure 4 Based on the cross section of section line VI-VI,

[0042] Figure 7Showing the source Figure 4 Based on the cross section of section line VII-VII,

[0043] Figure 8 The view along the direction of observation from the side of the fluid chamber shows the following: Figures 1 to 7 Detailed drawings of the diaphragm elements and associated piezoelectric actuators of the fluid equipment, and the assemblies capable of unified operation.

[0044] Figure 9 A rear view showing the line of sight away from the fluid chamber, according to... Figure 8 Another illustration of the assembly. Detailed Implementation

[0045] As can be seen from the accompanying drawings, the fluid device, generally designated by reference numeral 1, is shown in a preferred design and application as a fluid suction device 1a, and here is advantageously integrated into a metering device 2 for liquid media.

[0046] Suitably, the main components of the fluid device 1 are summarized as device unit 12, which can be implemented in a compact size. Preferably, device unit 12 is detachably fixed to channel plate 9. Channel plate 9 has a bearing surface 10 on which device unit 12 is mounted. Exemplarily, device unit 12 is clamped to bearing surface 10 by means of a threaded fastener 11 passing through it, the threaded fastener being screwed into channel plate 9. Channel plate 9 is not in Figures 4 to 9 As shown in the image.

[0047] The fluid device 1 has a device housing 3. In the illustrated embodiment, the device housing 3 relates to the housing of the device unit 12, which is constructed separately from the channel plate 9. However, it is feasible for the fluid device 1 to be constructed in a manner in which there is no physical division between the device unit 12 and the channel plate 9, and the channel plate 9 is thus an integral part of the device housing 3.

[0048] The fluid device 1 has a flexible diaphragm element 4, which is exemplary a component of the device unit 12 and is combined with the device housing 3 such that it, together with the device housing 3, defines a chamber 5, which contains fluid during the operation of the fluid device 1 and is therefore referred to as the fluid chamber 5 for better distinction.

[0049] The piezoelectric actuator 7 of the fluid device 1 is associated with the diaphragm element 4. In order to operate the piezoelectric actuator 7, the fluid device 1 suitably includes an electronic control mechanism 8, which is schematically shown only and is exemplarily arranged next to the device unit 12.

[0050] The device housing 3 has a longitudinal axis 19, a vertical axis 20 perpendicular to the longitudinal axis, and a transverse axis 21 perpendicular to both axes 19 and 20. Preferably, the device housing 3 has a longitudinal profile, wherein the device housing has a larger dimension along the axial direction of the longitudinal axis 19 than along the axial directions of the vertical axis 20 and the transverse axis 21. The dimension along the axial direction of the transverse axis 21 is preferably smaller than the dimension along the axial direction of the vertical axis 20, thereby giving the device housing 3 a narrow, strip-like shape. However, the device housing 3 can also be implemented in other proportions.

[0051] The axial directions of the longitudinal axis 19, the vertical axis 20, and the transverse axis 21 are referred to hereinafter as longitudinal direction 19, vertical direction 20, and transverse direction 21, respectively, for easier identification when the same reference numerals are used.

[0052] The device housing 3 surrounds the internal space 14. The internal space 14 contains not only the diaphragm element 4 but also the piezoelectric actuator 7.

[0053] The diaphragm element 4 preferably has a plate-like shape. The diaphragm element preferably has a rectangular, elongated outer contour 18 on its narrow side. The four corner areas are particularly rounded. The diaphragm element 4 is arranged in the internal space of the housing such that the longitudinal axis 6 of the diaphragm element 4, running along its longitudinal direction, is parallel to the longitudinal axis 19 of the device housing 3.

[0054] The diaphragm element 4 extends planarly in the main extension plane 15. The diaphragm element 4 is preferably arranged in the internal space 14 of the housing such that the normal direction of the main extension plane 15 coincides with the transverse direction 21.

[0055] The outer contour 18 is determined by the periphery of the edge segment 17 of the outer periphery of the diaphragm element 4.

[0056] The diaphragm element 4 is fluid-tightly fixed to the device housing 3 at its peripheral edge section 17. Exemplarily, for this purpose, the diaphragm element is clamped at its peripheral edge section 17 between two laterally positioned first and second housing portions 29, 30 of the device housing 3. The seal is achieved by the fact that the diaphragm element 4 is made of a rubber-elastic material, which is elastically compressed by the clamping in the region of the peripheral edge section 17.

[0057] Preferably, the rubber elastic material of the diaphragm element 4 relates to an elastomer material.

[0058] Because the diaphragm element 4 is constructed in a generally fluid-tight manner, it divides the internal space 14 of the housing into two subspaces under sealed conditions. One subspace forms the fluid chamber 5, and the other subspace, exemplary, does not have any additional function. However, to ensure unimpeded mobility of the diaphragm element 4 and continuous communication with the atmosphere, it is therefore referred to as the breathing chamber 25 for better distinction. The breathing chamber 25 is defined in relation to the device housing 3 by a housing back wall 26, which is implemented as part of the first housing portion 29. This housing back wall is opposite to the diaphragm surface 39 on the back side of the diaphragm element 4 and is penetrated by one or more breathing openings 16, which allow continuous air exchange with the atmosphere surrounding the device housing 3.

[0059] The two housing parts 29 and 30 are exemplary to be tightened together by means of a fixed threaded fastener 13, however, they can also be secured to each other in other ways.

[0060] Exemplarily, the first housing portion 29 has a recess 41 defined on its back side by a housing back wall 26 and closed on its open front side by a second housing portion 30. The second housing portion 30 forms a housing front wall 22, which defines a fluid chamber 5 on its front side opposite the diaphragm element 4 in the transverse direction 21. Suitably, the second housing portion 30 is designed as a cover that is recessed into the recess 41 and abuts against a support surface 41a formed by a stepped portion of the first housing portion 29 through the inner contour of the recess 41.

[0061] Due to the rubber elasticity of the diaphragm element 4, the diaphragm section enclosed by the outer edge section 17 (this diaphragm section is referred to as the diaphragm working section 27 for better distinction) is reversibly bendable or deflectable in a direction perpendicular to the main extension plane 15 (exemplarily, that is, in the lateral direction 21). The deflection or bending motion that occurs in this process is referred to hereinafter as stroke motion 28 and is illustrated by double arrows.

[0062] exist Figure 4 In the diagram, the diaphragm working section 27 is shown in the operating position, which relates to the undeflected basic position. Here, the diaphragm element 4 extends entirely within the main extension plane 15. Preferably, the diaphragm element 4 is not subjected to mechanical preload in the undeflected basic position of the diaphragm working section 27.

[0063] from Figure 5The operating position of the diaphragm working section 27, which is deflected in the lateral direction 21 relative to the basic position, can be seen. Here, the diaphragm working section 27 is at least partially spaced from the imaginary main extension plane 15 that runs through the peripheral edge section 17, wherein the spacing is greatest in the region 23 at the center of the surface and gradually decreases from there in the longitudinal direction 19 toward the peripheral edge section 17.

[0064] The diaphragm working section 27 can occupy operating positions with different intensities of deflection, and these operating positions differ from each other in terms of their spacing relative to the main extension plane 15.

[0065] The direction of the stroke movement 28 (which exemplary coincides with the transverse direction 21) is also referred to hereinafter as the working direction 32 and is indicated by a dotted line. The position achievable within the range of the stroke movement 28 of the diaphragm working section 27 is also referred to hereinafter as the stroke position of the diaphragm working section 27.

[0066] The volume of fluid chamber 5 depends on the current travel position of the diaphragm working section 27. The further the diaphragm working section 27 deflects in the direction toward the front wall 22 of the housing, the smaller the volume of fluid chamber.

[0067] Fluid device 1 in Figure 4 and 5 The running status shown in Figure 4 The maximum volume of fluid chamber 5 is defined in the middle and in Figure 5 The minimum volume of the fluid chamber 5 is defined in the middle.

[0068] The stroke movement 28 of the diaphragm working section 27 can be actuated by the piezoelectric actuator 7. Different stroke positions of the diaphragm working section 27 can be set by the piezoelectric actuator 7, either stepwise or preferably steplessly. Each set stroke position can be maintained for as long as desired.

[0069] Corresponding to the illustrated embodiment, the piezoelectric actuator 7 is preferably constructed as a piezoelectric bending transducer. The piezoelectric actuator particularly has a longitudinal extension with a layered profile, as this allows it to... Figure 3 As can be clearly seen in the diagram, the piezoelectric actuator 7 is arranged in the internal space 14 of the housing such that its longitudinal axis 37 runs parallel to the longitudinal axis 19 of the housing 3, and also suitably runs parallel to the main extension plane 15 in the undeflected basic position of the diaphragm element 4.

[0070] A length section in front of the piezoelectric actuator 7 forms a drive section 42, which acts on the diaphragm working section 27 to generate a stroke motion 28. In the longitudinal direction 37, a length section behind the piezoelectric actuator 7 is connected to the drive section 42, and this rear longitudinal section is referred to as the base section 43, which exemplarily serves to electrically contact the piezoelectric actuator 7.

[0071] The drive section 42 extends along the working section 27 of the diaphragm inside the diaphragm element 4. This is achieved by embedding the drive section 42 into the diaphragm element 4 and encasing it in a rubber-elastic material.

[0072] Suitably, the drive section 42 is completely surrounded by the diaphragm element 4, except at two locations optionally spaced longitudinally 37 apart in the region of the peripheral edge section 17, where the diaphragm element 4 suitably has a fixing gap 44 into which a support structure 45 constructed on the device housing 3 engages. The fixing gap 44 is exemplary located in the diaphragm section 46 on the back side between the drive section 42 and the housing back wall 26, while the support structure 45 is constructed on the inner surface 47 of the housing back wall 26 facing the diaphragm element 4. Each support structure 45 is preferably designed as a protrusion, particularly involving rib-like protrusions extending parallel to the vertical axis 20. Thus, each fixing gap 44 is suitably designed in a longitudinal slot shape.

[0073] Because the support structure 45 engages in the fixing gap 44, the diaphragm element 4 is not only clamped at the edge side, but also shape-fitted in terms of relative movement with respect to the device housing 3 in the longitudinal direction 19. Thus, the diaphragm element 4 is reliably held in the desired position within the device housing 3.

[0074] Preferably, the support structure 45 extends through the diaphragm section 46 on the back side to the drive section 42, such that the drive section is directly supported on one side by the device housing 3 at two locations spaced apart from each other in the longitudinal direction 37. On the side opposite the support structure 45 in the transverse direction 21, direct support of the drive section 42 on the housing side is suitably not provided, where the fixation is limited to the clamping of the peripheral edge section 17.

[0075] Unlike this embodiment, the support structure 45 can be constructed on the front wall 22 of the housing instead of on the back wall 26 of the housing.

[0076] During the electrical actuation of the piezoelectric actuator 7, its drive section 42 bends in the region between the two support structures 45 along the lateral direction 21. This process is referred to as the deflection motion 48 of the drive section 42. During the deflection motion 48, the distance between the drive section 42 and the front wall 22 of the housing changes. Because the drive section 42 is surrounded by the diaphragm working section 27 of the diaphragm element 4, the diaphragm working section 27 also undergoes the deflection motion 48, thereby causing a stroke motion 28 of the diaphragm working section 27 oriented in the same direction.

[0077] In the electrically deactivated state, when the piezoelectric actuator 7 discharges, the drive section 42 occupies an undeflected rest position. A deflection motion 48 can be induced by electrical manipulation. Suitably, the deflection motion 48 can be selectively induced from the rest position in one of two opposing directions in the transverse direction 21, so that the diaphragm working section 27 can be actively deflected in two opposing directions.

[0078] The diaphragm element 4 extends only a portion of the length of the internal space 14 within the housing 3. Another subspace of the internal space 14 is connected to the diaphragm element 4 along the longitudinal direction 19. This other subspace is referred to hereinafter as the contact chamber 49 for better distinction, as it is in which the electrical contact of the piezoelectric actuator 7 is performed.

[0079] A receiving recess 50 is constructed in the diaphragm element 4. This receiving recess is designed as a blind hole and is open only on one side, specifically in the region of the outer contour 18 of the diaphragm element 4 facing the contact chamber 49. There, the piezoelectric actuator 7 extends from the diaphragm element 4 with its base section 43 and enters the contact chamber 49. The drive section 42 of the piezoelectric actuator 7 extends within the receiving recess 50.

[0080] Preferably, the piezoelectric actuator 7 is assembled into the receiving recess 50 with its drive section 42 in such a way that the diaphragm element 4 and the piezoelectric actuator 7 cannot move relative to each other and form an assembly that is fixedly held together, which can be placed as a unit into the device housing 3 when assembling the fluid device 1.

[0081] For example, the piezoelectric actuator 7 is inserted into and, in particular, pressed into a pre-formed receiving recess 50. Another implementation is configured such that the diaphragm element is molded around the drive section 42 during injection molding, so that the drive section 42 is encapsulated by the material of the diaphragm element 4 during injection molding.

[0082] Apart from electrical contact measures, the base section 43 is not mechanically connected to the equipment housing 3 within the contact chamber 49. The base section extends freely into the contact chamber 49, thereby enabling relative movement of the base section relative to the equipment housing 3 in the lateral direction 21.

[0083] The piezoelectric actuator 7 has a strip-shaped carrier element 53 extending in the longitudinal direction 37. The carrier element is non-piezoelectric and therefore does not have piezoelectric properties. The carrier element 53 extends through the entire length of the piezoelectric actuator 7.

[0084] In the region of the drive section 42, the carrier element 53 is covered with a plate-shaped piezoelectric element 54 with piezoelectric properties on its longitudinal sides facing each other along the working direction 28. The piezoelectric element 54 is fixedly connected to the carrier element 53 and is in particular bonded. Each piezoelectric element 54 is made of piezoelectric material, in particular piezoelectric ceramic.

[0085] Each piezoelectric element 54 is surrounded on its side by electrodes 55 and 56, respectively, on its opposite sides along the operating direction 28. These electrodes are referred to as the first electrode 55 and the second electrode 56 for better distinction. All electrodes 55 and 56 together form the electrode assembly 57 of the piezoelectric actuator 7.

[0086] Advantageously, corresponding to this embodiment, the carrier element 53 has conductive properties and directly functions as the first electrode 55 for the two piezoelectric elements 54. Suitably, the second electrode 56 is correspondingly made of a conductive coating of the piezoelectric element 54, which is applied, for example, as a metallization.

[0087] Because of the embedment of the drive section 42, the piezoelectric element 54 does not come into contact with the fluid located in the fluid chamber 5, which ensures operation with minimal interference.

[0088] In contact chamber 49, an electrical conductor 58 is connected to electrode assembly 57, and this conductor is connected to electronic control mechanism 8 in the ready-to-operate state of fluid device 1. Specifically, the electrical conductor 58 is connected to a plurality of, particularly elastically constructed, connecting contacts 62, which are fixed in and extend from the device housing 3 in the region facing the lower side 63 of the bearing surface 10. A conductor plate 64 is provided in the depth of the bearing surface 10, and the connecting contacts 62 are in electrical contact with this conductor circuit 65 when the device unit 12 is assembled at the bearing surface 10. The conductor circuit 65 is electrically connected to electronic control mechanism 8 in a preferably detachable manner via an arbitrarily implemented electrical conductor 66.

[0089] The electronic control mechanism 8 is configured to provide a control voltage of variable magnitude, which can be applied to the electrode assembly 57 via the electrical conductor 66. The control mechanism 8 has suitable mechanisms to achieve the charge inflow and charge outflow necessary for variable control with respect to the electrodes 55, 56.

[0090] Figure 4The diagram illustrates the following operating state, in which the control voltage is zero, thereby driving segment 42 to occupy the undeflected basic position. In contrast, Figure 5 The diagram illustrates an operating state with a control voltage greater than zero, in which the drive section 42 deflects in an arc shape while reducing the volume of the fluid chamber 5. The movement of the drive section 42 between different operating states occurs within the range of the deflection movement 48. The stroke movement 28 of the diaphragm working section 27 always accompanies this deflection movement 48.

[0091] Due to the exemplary triangular structure type, the exemplary piezoelectric actuator 7 can actively induce deflection motion 48 in two directions. In embodiments not illustrated, the piezoelectric actuator 7 is of a single- or double-body type, thus allowing active deflection in only one direction, while reset is caused by inherent spring elasticity.

[0092] It is preferable to operate the piezoelectric actuators 7 on both sides so as to compensate for the residual deformation caused by hysteresis in the case of a discharging piezoelectric actuator by means of an activated reverse piezoelectric layer.

[0093] In all cases, the volume enclosed in the fluid chamber 5 can be variably preset by the corresponding control of the piezoelectric actuator 7.

[0094] Fluid device 1 can operate using any kind of fluid. Preferred applications use liquids, but gaseous fluids, such as compressed air, can also be used.

[0095] Advantageously, the device housing 3 is designed such that the diaphragm working section 27 rests against the back wall 26 of the housing in the undeflected basic position. The volume of the breathing chamber 25 is therefore at least almost zero in the undeflected basic position. This achieves a shape for the device housing 3 with very small dimensions in the lateral direction 21.

[0096] To prevent the diaphragm element 4, for example made of silicone resin material, from adhering internally to the housing back wall 26, the housing back wall 26 is suitably provided with a surface structure 68 on its inner surface 47 facing the diaphragm element 4, which includes a plurality of deepenings and protrusions. Thus, when combined with at least one breathing opening 16, continuous rear ventilation is achieved in response to adhesion in the diaphragm working section 27.

[0097] Alternatively or additionally, a surface structure 68 having multiple protrusions and a deepening therebetween can be constructed on the membrane surface 39 on the back side facing the inner surface 47.

[0098] The diaphragm element 4 has an imaginary transverse axis 72 perpendicular to the longitudinal axis 6 of the diaphragm, which runs parallel to the vertical axis 20 of the device housing 3. The piezoelectric actuator 7 is preferably arranged such that its diaphragm working section 27 runs centrally within the diaphragm element 4 along the axial direction of the transverse axis 72 and is therefore spaced at the same size as the two longitudinal sides 95a, 95b of the diaphragm element 4.

[0099] In order to surround the drive section 42, a certain thickness of the diaphragm element 4, perpendicular to the main extending plane 15, is necessary. Nevertheless, to obtain a very good rubber-elastic deformation capability for the working section 27 of the diaphragm, it is advantageous to provide a groove assembly 73 with reduced wall thickness on the diaphragm surface 39 of the diaphragm element 4. The groove assembly 73 suitably extends along the axial direction of the longitudinal axis 6 of the diaphragm on both sides of the drive section 42. Exemplarily, the groove assembly 73 includes two longitudinal grooves 73a, 73b, which laterally surround the drive section 42 on opposite longitudinal sides.

[0100] Since the base section 43 is not supported within the contact chamber 49, the base section performs a swinging motion 74, indicated by the double arrows, relative to the device housing 3 during the stroke motion 28 of the diaphragm working section 27 caused by the piezoelectric actuator 7. More precisely, this swinging motion is performed in the same plane, in which a deflection motion 48 also occurs.

[0101] Preferably, the fluid device 1 is equipped with a position detection mechanism 33 configured to detect the current swing position of the base section 43. Since the swing position of the base section 43 is directly dependent on the stroke position of the drive section 42, the measured swing position allows for accurate estimation of the current volume of the fluid chamber 5. Furthermore, by selectively setting the swing position, the desired volume of the fluid chamber 5 for the application can be determined.

[0102] In the illustrated embodiment, the position measurement value determined by the position detection mechanism 33 is supplied to the electronic control mechanism 8, which is capable of adjusting the travel position of the diaphragm working section 27 and thus indirectly the volume of the fluid chamber 5 based on the position measurement value as an actual value. The position detection mechanism 33 is connected to the electronic control mechanism 8 via an electrical conductor 75. The electrical conductor 75 is connected to the position detection mechanism 33 via the conductor circuit 65 of the conductor plate 64.

[0103] The position detection mechanism 33 is suitably integrated into the device unit 12 at least in part.

[0104] Exemplarily, the position detection mechanism 33 has two non-contact cooperating first and second detection members 34, 35, which move relative to each other during the oscillation movement 74 of the base section 43. The first detection member 34 is arranged at the base section 43 and thus moves together with the oscillation movement 74 of the base section, while the second detection member 35 is arranged in a fixed position relative to the device housing 3. Exemplarily, the second detection member 35 is located outside the device housing 3, wherein the second detection member is suitably located on the conductor plate 64. Exemplarily, the second detection member 35 is located in the region of the lower side 63 of the device housing 3, which extends beyond the conductor plate 64 equipped with the second detection member 35.

[0105] The first detection component 34 is preferably arranged at the free end region of the base section 43, so that it traverses a relatively large swing path during the deflection motion 48, which is beneficial for accurate position detection.

[0106] It is understood that these two detection components 34 and 35 can also be arranged within the equipment housing 3, and especially within the contact chamber 49.

[0107] In the illustrated embodiment, the first detection element 34 is formed of a permanent magnet, and the second detection element 35 is formed of a sensor, particularly a Hall sensor, that responds to the magnetic field of the permanent magnet. The components can also be inverted. For position detection, other non-contact measurement principles can also be used, such as those based on inductive, capacitive, or optical principles.

[0108] In order to perform the adjustment measures further described above, the electronic control mechanism 8 suitably includes an internal adjustment unit 77.

[0109] Furthermore, the electronic control mechanism 8 is suitably equipped with an input device 78, through which at least one theoretical value of the desired swing position of the base section 43 or the desired volume of the fluid chamber 5 can be input. This theoretical value is compared in the adjustment unit 77 with the actual value measured by the position detection mechanism 33, so that, depending on the comparison result, a control voltage is output to the electrode assembly 57 via the electrical conductor 66, thereby deforming the piezoelectric actuator 7 so that the swing position of the base section 43 and thus the volume of the fluid chamber 5 are set to the desired theoretical value.

[0110] In the exemplary fluid device 1, there is thus an advantageous possibility that the working section 27 of the diaphragm can be deformed by adjusting the spacing and, correspondingly, the volume adjustment of the volume defined by the fluid chamber 5 can also be indirectly performed.

[0111] In an exemplary design illustrating the fluid suction device 1a, a first fluid channel 81 and a second fluid channel 82 are connected to a fluid chamber 5, wherein, exemplaryly, the first fluid channel 81 forms a discharge channel and the second fluid channel 82 forms an injection channel.

[0112] The first fluid passage 81 leads to the output opening 83, at which the desired amount of fluid can be output. When the fluid suction device 1a is used, the fluid chamber 5 and the first fluid passage 81 are typically completely filled with fluid.

[0113] The second fluid channel 82 leads to a fluid source 84, which may be, for example, a fluid storage device or a liquid container.

[0114] Preferably, a delivery pump 85 is connected in the direction of the second fluid channel 82, which is capable of feeding the fluid provided by the fluid source 84 through the second fluid channel 82 into the fluid chamber 5.

[0115] Preferably, in the routing of the second fluid channel 82, a shut-off unit 86 is arranged in the channel section between the fluid chamber 5 and the delivery pump 85. Exemplarily, this shut-off unit relates to a shut-off valve, particularly having a 2 / 2 directional valve function. The shut-off unit 86 is suitably connected to an electronic control mechanism 8 via an electrical control line 87 and can be operated as needed by this electronic control mechanism. Exemplarily, the shut-off unit 86 can be optionally switched to be able to... Figure 1 The fluid can be switched to either the closed position or the open position. In the open position, fluid can flow through the second fluid channel 82, while in the closed position, the second fluid channel 82 is closed to prevent fluid from flowing into the fluid chamber 5.

[0116] In a preferred operating mode of the fluid suction device 1a, the shut-off unit 86 is switched to the open position during the first operating phase, wherein the operating delivery pump 85 delivers fluid from the fluid source 84 through the second fluid channel 82, the fluid chamber 5, and the first fluid channel 81 to the output opening 83. The fluid then flows out at the output opening 83 for the specified application.

[0117] Fluid transport and fluid output continue for an extended period until the cut-off unit 86 is switched to the cut-off position by the control mechanism 8. At this point, fluid flow and fluid output at the output opening 83 cease.

[0118] It can be seen that, by selecting the time interval between the open and closed positions of the cut-off unit 86, a metered fluid output can be made at the output opening 83. In this regard, the fluid suction device 1a can be advantageously applied in the metering device 2 corresponding to the illustrated embodiment.

[0119] The variability of the volume of fluid chamber 5 can be used in the described metering application to prevent [the spread of fluid from] [the fluid chamber]. Figure 1 As can be seen in the second operating phase, the fluid undesirably drips out at the output opening 83. To address this, after the corresponding operation of the piezoelectric actuator 7 switches the cut-off unit 86 to the cut-off position, the volume of the fluid chamber 5 can be increased, thereby generating a negative pressure in the fluid chamber 5. This negative pressure causes the fluid in the first fluid channel 81 to be drawn back into the fluid chamber 5. Thus, the fluid column in the first fluid channel 81 is retracted, and an air-filled intermediate space is formed between the fluid column and the output opening 83, preventing fluid from flowing out.

[0120] The exemplary fluid suction device 1a can be applied in such a way that the piezoelectric actuator 7 is activated by the application of a control voltage during a first operating phase (in which the cut-off unit occupies the open position), causing the diaphragm working section 27 to deflect in the direction toward the fluid chamber 5 and the fluid chamber 5 to be set to a reduced chamber volume. This corresponds to... Figure 5 The operating state is shown in the diagram. To generate the desired negative pressure, according to... Figure 4 In the second operating phase, the control voltage for the piezoelectric actuator 7 is reduced or the piezoelectric actuator 7 is discharged, thereby causing the diaphragm working section 27 to move along the direction according to... Figure 4 The fluid chamber 5 moves a distance in the direction of its undeflected basic position or returns completely to that undeflected basic position. This is related to the increase in the volume of the fluid chamber 5, which causes negative pressure and brings about the fluid backflow effect described earlier.

[0121] With the aid of the electronic control mechanism 8, the desired volume or desired volume change of the fluid chamber 5 can be set and preset very precisely. In this way, the amount of fluid to be drawn back can be accurately preset.

[0122] For example, the fluid aspiration device 1a can be used in conjunction with a metering device 2, which is used to apply necessary photoresist in semiconductor manufacturing. Another possible application is, for example, metering the dispensing of liquid into the cavity of a microtiter plate in laboratory applications.

[0123] The two fluid channels 81 and 82 open independently into the fluid chamber 5 through separate openings 81a and 82a. The openings 81a and 82a are exemplaryly constructed at the lower housing wall 88, which defines the fluid chamber 5 at its lower side 63, and is penetrated by length sections of the first and second fluid channels 81 and 82. Exemplarily, other length sections of the fluid channels 81 and 82 penetrate the channel plate 9, wherein these other length sections extend at the bearing surface 10 such that they communicate with the length sections of the fluid channels 81 and 82 penetrating the lower housing wall 88.

[0124] The two passages 81a and 82a are suitably arranged spaced apart from each other in the longitudinal direction 19, and are particularly located in one of the two axial end regions of the fluid chamber 5, so that the fluid travels through the fluid chamber 5 along the longest possible flow path, thereby ensuring uniform fluid flow.

[0125] Exemplarily, an output nozzle 91, through which a first fluid channel 81 passes, is disposed at the channel plate 9, and an output opening 83 is formed at the output nozzle. Furthermore, a connecting mechanism 92 is arranged at the channel plate 9, for example, which is associated with the second fluid channel 82 and is capable of connecting a fluid line 93 forming a length segment of the second fluid channel, which, in the illustrated embodiment, leads to a stop unit 86.

[0126] Fluid chamber 5 is not required to be connected to the two fluid channels 81, 82 for the intended use of fluid device 1. For example, only one fluid channel can be connected to fluid chamber 5, which itself is connected to another fluid channel that extends between fluid source 84 and output opening 83. In this case, fluid backflow can also be induced by manipulating fluid device 1.

[0127] On the inner surface of the second housing portion 30 facing the fluid chamber 5, there is suitably a one-piece construction of... Figure 3 The clamping frame 94, indicated by a dashed line, acts circumferentially on the edge section 17 of the periphery of the diaphragm element 4 to clamp the same edge section to the first housing portion 29.

[0128] In addition to the regurgitation of metered liquid, the fluid device 1 allows for other possibilities for fluid handling. If a second liquid, instead of air, is contained in the output nozzle 91 during the regurgitation, thorough mixing of the two liquids can be achieved within the output nozzle 91 by means of the oscillating stroke motion of the diaphragm element 4, especially when the first fluid channel 81 is constructed in a stepped manner within the output nozzle 91, which achieves even better thorough mixing by means of turbulence formation at the edges of the steps during fluid oscillation.

Claims

1. Fluid device, having a fluid chamber (5) configured for containing a fluid, which fluid chamber is jointly defined by a device housing (3) and a flexurally resilient diaphragm element (4) having a planar extension in a main extension plane (15), wherein, The diaphragm element (4) is fluid-tightly fixed at the device housing (3) at a peripheral edge section (17) thereof, and wherein a diaphragm working section (27) of the diaphragm element (4) enclosed by the peripheral edge section (17) is elastically deflectable for changing the volume of the fluid chamber (5) by a piezoelectric actuator (7) of the fluid device (1) acting on the diaphragm element (4) in a case of performing a stroke movement (28) in a working direction (32) oriented transversely to the main extension plane (15), characterized in that the diaphragm element (4) is made of a rubber-elastic material, wherein the piezoelectric actuator (7) has a drive section (42) extending along the diaphragm working section (27), which drive section is embedded into the diaphragm element (4) and is wrapped by the rubber-elastic material of the diaphragm element (4), wherein the fluid device (1) is equipped with a position detection mechanism (33) configured for detecting a relative position between the piezoelectric actuator (7) and the device housing (3) which changes upon the stroke movement (28) of the diaphragm working section (27), wherein the piezoelectric actuator (7) has a base section (43) axially coupled to the drive section (42) and freely ending out of the diaphragm element (4), and the position detection mechanism (33) has two first and second detection members (34, 35) cooperating with each other, one of which is arranged at the base section (43) of the piezoelectric actuator (7) performing a swinging movement (74) upon the stroke movement (28) of the diaphragm working section (27), and the other of which is arranged position-fixed relative to the device housing (3).

2. The fluidic device of claim 1, wherein, The diaphragm element (4) is made of an elastomeric material.

3. The fluidic device of claim 1 or 2, wherein, The piezoelectric actuator (7) is fixed at the diaphragm element (4) such that the diaphragm element (4) and the piezoelectric actuator (7) form a combined piece which can be operated as a whole.

4. The fluid apparatus according to claim 1 or 2, characterized by, The drive section (42) of the piezoelectric actuator (7) embedded into the diaphragm element (4) is overmolded by the material of the diaphragm element (4).

5. The fluid apparatus according to claim 1 or 2, wherein An elongated receiving recess (50) in the main extension plane (15) is constructed inside the diaphragm element (4), which receiving recess is blind-hole-like constructed and open on one side in the area of the peripheral edge section (17) of the diaphragm element (4), and which receiving recess accommodates the drive section (42) of the piezoelectric actuator (7) for wrapping the drive section.

6. The fluid apparatus according to claim 1 or 2, wherein The diaphragm element (4) is plate-like constructed.

7. The fluid apparatus according to claim 1 or 2, wherein The diaphragm element (4) has a rectangular, elongated outer contour (18) in the area of its peripheral edge section (17), so that the diaphragm element has an elongated outer shape extending along an imaginary diaphragm longitudinal axis (6).

8. The fluid apparatus according to claim 1 or 2, wherein The diaphragm element (4) is arranged in the device housing (3) as a separating wall between the fluid chamber (5) and a breathing chamber (25) which is continuously in communication with the surroundings via at least one breathing opening (16).

9. The fluidic device of claim 1 or 2, wherein, A housing back wall (26) of the device housing (3), which is arranged opposite the diaphragm element (4) on a side of the device housing (3) which is opposite the fluid chamber (5) in the working direction (32), has a surface structure (68) composed of regions of depressions and elevations at an inner face (47) of the device housing facing the diaphragm element (4) and / or a diaphragm face (39) of the diaphragm element (4) facing a back side of the housing back wall (26) has a surface structure (68) composed of regions of depressions and elevations.

10. The fluidic device of claim 1 or 2, wherein, The diaphragm element (4) has a diaphragm face (39) facing away from a back side of the fluid chamber (5), in which diaphragm face, in addition to a drive section (42) of the piezoelectric actuator (7), a groove assembly (73) is configured on the longitudinal sides.

11. The fluidic device of claim 1 or 2, wherein, The drive section (42) of the piezoelectric actuator (7) has an electrode assembly (57) to which a control voltage can be applied in variable size, by which control voltage a deflection movement (48) of the drive section (42) of the piezoelectric actuator (7) can be caused which causes a stroke movement (28) of the diaphragm working section (27).

12. The fluidic device of claim 11, wherein, The piezoelectric actuator (7) has a carrier element (53) which is not piezoelectrically active, which carrier element is equipped in the region of the drive section (42) at at least one of its two longitudinal sides pointing in the working direction (32) with a piezoelectric element (54) having piezoelectric properties, which piezoelectric element is respectively laterally surrounded at its two sides facing away from one another in the working direction (32) by electrodes (55, 56) of the electrode assembly (57).

13. The fluidic device of claim 1 or 2, wherein, The piezoelectric actuator (7) has a longitudinal outer shape and is configured in layers.

14. The fluidic device of claim 1 or 2, wherein, The piezoelectric actuator (7) is a piezoelectric bending transducer.

15. The fluidic device of claim 14, wherein, The piezoelectric actuator (7) configured as a piezoelectric bending transducer has a drive section (42) which can perform a deflection movement (48) in order to cause a stroke movement (28) of the diaphragm working section (27).

16. The fluidic device of claim 1 or 2, wherein, The piezoelectric actuator (7) is supported in the region of an edge section (17) of the periphery of the diaphragm element (4) at two points spaced apart from one another in a main extension plane (15) of the diaphragm element (4) in the working direction (32) respectively by a rigid support structure (45) of the device housing (3).

17. The fluidic device of claim 16, wherein, The support structure (45) engages into a fixing recess (44) of the diaphragm element (4) and thereby fixes the diaphragm element (4) in the main extension plane (15) form-fittingly with respect to the device housing (3).

18. The fluidic device of claim 1 or 2, wherein, The fluid device has an electronic control mechanism (8) electrically coupled or capable of being electrically coupled to the piezoelectric actuator (7), by means of which, by means of a predefinition of a corresponding size of a control voltage, at least one stroke position of the diaphragm working section (27) relative to the device housing (3) can be set.

19. The fluidic device of claim 18, wherein, The electronic control mechanism (8) is designed for the regulated setting of the stroke position of the diaphragm working section (27) on the basis of the position measurement of the position detection mechanism (33).

20. The fluidic device of claim 1 or 2, wherein, The fluid device (1) is a fluid suction device (1a) in which, by means of a volume increase of the fluid chamber (5) caused by means of the piezoelectric actuator (7), a negative pressure can be caused by means of which a fluid located in a first fluid channel (81) connected to the fluid chamber (5) can be sucked into the fluid chamber (5).

21. The fluidic device of claim 20, wherein, A second fluid channel (82) is additionally connected to the fluid chamber (5), wherein fluid can flow into the fluid chamber (5) and out of the fluid chamber (5) through the first fluid channel (81) through the second fluid channel (82), wherein the second fluid channel (82) is assigned a shut-off unit (86) by means of which the second fluid channel (82) can be shut off in order to prevent fluid from flowing into the fluid chamber (5), and wherein the fluid flowing from the fluid chamber (5) into the first fluid channel (81) can be sucked back into the fluid chamber (5) by means of a negative pressure in the case of a shut-off second fluid channel (82).

22. The fluidic device of claim 7, wherein, The drive section (42) of the piezoelectric actuator (7) is oriented parallel to the diaphragm longitudinal axis (6).

23. The fluidic device of claim 15, wherein, The deflection movement (48) can be carried out in mutually opposite directions from a rest position.

24. The fluidic device of claim 1, wherein, The two mutually cooperating first and second detection members (34, 35) are formed by a permanent magnet and a sensor which can be manipulated by means of the permanent magnet.

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