Pressure Sensors

Abstract

The present invention discloses a pressure sensor, comprising: a body, a receiving cavity for receiving liquid formed therein; a diaphragm, attached to the body, suitable for transmitting external medium pressure to the liquid in the receiving cavity; a pressure detection chip, mounted on the body, for detecting the liquid pressure in the receiving cavity; and a circuit board, mounted on the body and electrically connected to the pressure detection chip, a flat mounting surface is formed on the body, the mounting surface extends along the axial direction of the body, and the pressure detection chip and the circuit board are mounted on the mounting surface. In the present invention, since the circuit board is vertically mounted on the mounting surface extending along the axial direction, the circuit board will not increase the radial size of the pressure sensor, thereby reducing the diameter of the pressure sensor, so that the pressure sensor can be implanted in the human body.

Description

Technical Field

[0001] The invention relates to a pressure sensor. Background Art

[0002] The oil-filled pressure sensor usually includes a metal shell, a detection diaphragm, a detection chip and a circuit board. In the prior art, an oil cavity extending along the axial direction is formed in the metal shell, and the detection chip and the circuit board are horizontally mounted on the top of the metal shell. Since the horizontally mounted circuit board extends in the radial direction of the oil-filled pressure sensor, the diameter of the entire oil-filled pressure sensor is relatively large, usually greater than 6.9 mm, which cannot meet the requirements of the strict human implant sensor. In addition, in the prior art, the oil-filled pressure sensor contains a diaphragm welding ring, which will form a flow dead zone of the pressure transmission medium, and cannot meet the requirement of no dead zone in the medical industry. Summary of the invention

[0003] The purpose of the present invention is to solve at least one aspect of the above-mentioned problems and defects in the prior art.

[0004] According to one aspect of the present invention, there is provided a pressure sensor, comprising: a body, having a holding cavity for holding liquid formed therein; a diaphragm, attached to the body and suitable for transmitting external medium pressure to the liquid in the holding cavity; a pressure detection chip, mounted on the body and used for detecting the liquid pressure in the holding cavity; and a circuit board, mounted on the body and electrically connected to the pressure detection chip, a flat mounting surface being formed on the body, the mounting surface extending along the axial direction of the body, and the pressure detection chip and the circuit board being mounted on the mounting surface.

[0005] According to an exemplary embodiment of the present invention, the accommodating cavity includes a main passage extending along the axial direction of the body and a first branch passage extending along the radial direction of the body; the first branch passage is connected to the main passage, and the pressure detection chip is installed on the opening of the first branch passage.

[0006] According to another exemplary embodiment of the present invention, the body includes: a base in a cylindrical shape; and a mounting portion extending upward from a top surface of the base, the mounting surface is formed on the mounting portion, and the first branch passage is formed in the mounting portion.

[0007] According to another exemplary embodiment of the present invention, the pressure sensor further includes a signal processing chip, which is mounted on the circuit board and communicates with the pressure detection chip via the circuit board, and is used for processing the liquid pressure signal detected by the pressure detection chip.

[0008] According to another exemplary embodiment of the present invention, the pressure detection chip is electrically connected to the circuit board via a first electrical connection wire, and the signal processing chip is electrically connected to the circuit board via a second electrical connection wire.

[0009] According to another exemplary embodiment of the present invention, the pressure sensor further includes a cylindrical outer cover with a top, the outer cover is mounted on the body, and the pressure detection chip and the signal processing chip are accommodated in the outer cover.

[0010] According to another exemplary embodiment of the present invention, the circuit board has an external plug, which extends from the top of the outer cover and is used to output the liquid pressure signal detected by the pressure sensor to the outside.

[0011] According to another exemplary embodiment of the present invention, the outer cover is sealed with the body and the external plug, so that the pressure detection chip, the signal processing chip and the circuit board except the external plug are sealedly accommodated in the outer cover.

[0012] According to another exemplary embodiment of the present invention, the top surface of the base portion extends along the radial direction of the body and is perpendicular to the mounting surface on the mounting portion.

[0013] According to another exemplary embodiment of the present invention, the mounting portion is substantially semi-cylindrical, and the mounting surface is located on the central axis of the base or close to the central axis of the base.

[0014] According to another exemplary embodiment of the present invention, the radius of the mounting portion is slightly smaller than the radius of the base, and the central axes of the mounting portion and the base coincide with each other.

[0015] According to another exemplary embodiment of the present invention, a liquid filling port communicating with the accommodating cavity is formed on the body, so that the liquid can be filled into the accommodating cavity of the body through the liquid filling port.

[0016] According to another exemplary embodiment of the present invention, the pressure sensor further includes a sealing ball, which is disposed in the liquid filling port and is used to seal the liquid filling port.

[0017] According to another exemplary embodiment of the present invention, the liquid filling port is formed on the peripheral surface of the base, and the accommodating cavity also includes a second branch passage extending radially formed in the base, and the liquid filling port is connected to the main passage via the second branch passage.

[0018] According to another exemplary embodiment of the present invention, a central axis of the liquid filling port perpendicularly intersects with a central axis of the base and is perpendicular to the mounting surface.

[0019] According to another exemplary embodiment of the present invention, a circular positioning groove is formed on the circumferential surface of the base on the side opposite to the liquid filling port, and a strip positioning groove extending axially is formed on the circumferential surface of the mounting portion on the side opposite to the mounting surface, so that the main body can be positioned by the circular positioning groove and the strip positioning groove to prevent the main body from moving when the pressure detection chip and the circuit board are installed.

[0020] According to another exemplary embodiment of the present invention, the liquid filling port is formed on the top surface of the mounting portion and is directly communicated with the upper end of the main passage.

[0021] According to another exemplary embodiment of the present invention, a circular positioning groove and a strip positioning groove extending axially through the circular positioning groove are formed on the circumferential surface of the mounting portion on the side opposite to the mounting surface, so that the main body can be positioned by the circular positioning groove and the strip positioning groove to prevent the main body from moving when the pressure detection chip and the circuit board are installed.

[0022] According to another exemplary embodiment of the present invention, the liquid filling port is formed on a peripheral surface of the mounting portion on a side opposite to the mounting surface.

[0023] According to another exemplary embodiment of the present invention, a strip positioning groove extending axially through the liquid filling port is formed on the circumferential surface of the mounting portion on the side opposite to the mounting surface, and the liquid filling port serves as a circular positioning groove, so that the main body can be positioned by the liquid filling port and the strip positioning groove to prevent the main body from moving when the pressure detection chip and the circuit board are installed.

[0024] According to another exemplary embodiment of the present invention, the accommodating cavity has a bottom opening located on the bottom surface of the body, and the diaphragm is a thin film and is directly welded to the bottom surface of the body to seal the bottom opening of the accommodating cavity.

[0025] According to another exemplary embodiment of the present invention, the circuit board and the pressure detection chip are mounted on the mounting surface of the body.

[0026] According to another exemplary embodiment of the present invention, the pressure sensor is an oil-filled pressure sensor, and the liquid filled in the accommodating cavity of the body is insulating oil.

[0027] According to another exemplary embodiment of the present invention, the diameter of the pressure sensor is no greater than 5 mm.

[0028] According to another exemplary embodiment of the present invention, the pressure sensor is a medical pressure sensor suitable for being implanted in a human body and used for detecting body fluid pressure in the human body.

[0029] In the aforementioned exemplary embodiments according to the present invention, since the circuit board is vertically mounted on the mounting surface extending axially, the circuit board will not increase the radial dimension of the pressure sensor, thereby reducing the diameter of the pressure sensor, so that the pressure sensor can be implanted in the human body.

[0030] Other objects and advantages of the present invention will become apparent from the following description of the present invention with reference to the accompanying drawings, which will help to provide a comprehensive understanding of the present invention. BRIEF DESCRIPTION OF THE DRAWINGS

[0031] Figure 1 A perspective schematic diagram showing a pressure sensor according to a first embodiment of the present invention;

[0032] Figure 2 show Figure 1 The pressure sensor shown with the outer cover removed;

[0033] Figure 3 show Figure 2 A perspective schematic diagram of the pressure sensor shown when viewed from the rear side;

[0034] Figure 4 show Figure 1 A cross-sectional view of the pressure sensor shown;

[0035] Figure 5 A perspective schematic diagram showing a pressure sensor according to a second embodiment of the present invention, wherein the outer cover is removed;

[0036] Figure 6 A cross-sectional view showing a pressure sensor according to a second embodiment of the present invention;

[0037] Figure 7 A perspective schematic diagram showing a pressure sensor according to a third embodiment of the present invention, wherein the outer cover is removed;

[0038] Figure 8 A cross-sectional view showing a pressure sensor according to a third embodiment of the present invention; DETAILED DESCRIPTION

[0039] The technical solution of the present invention is further specifically described below by examples and in conjunction with the accompanying drawings. In the specification, the same or similar reference numerals indicate the same or similar components. The following description of the embodiments of the present invention with reference to the accompanying drawings is intended to explain the overall inventive concept of the present invention and should not be construed as a limitation of the present invention.

[0040] In addition, in the detailed description below, for ease of explanation, many specific details are set forth to provide a comprehensive understanding of the disclosed embodiments. However, it is apparent that one or more embodiments may be implemented without these specific details. In other cases, known structures and devices are embodied in a schematic manner to simplify the accompanying drawings.

[0041] According to an overall technical concept of the present invention, there is provided a pressure sensor, comprising: a body, having a holding cavity for holding a liquid formed therein; a diaphragm, attached to the body and suitable for transmitting external medium pressure to the liquid in the holding cavity; a pressure detection chip, mounted on the body and used for detecting the liquid pressure in the holding cavity; and a circuit board, mounted on the body and electrically connected to the pressure detection chip, a flat mounting surface being formed on the body, the mounting surface extending along the axial direction of the body, and the pressure detection chip and the circuit board being mounted on the mounting surface.

[0042] First embodiment

[0043] Figures 1 to 4 A pressure sensor according to a first embodiment of the present invention is shown. Figure 1 A perspective schematic diagram showing a pressure sensor according to a first embodiment of the present invention; Figure 2 show Figure 1 The pressure sensor is shown with the housing 200 removed; Figure 3 show Figure 2 A perspective schematic diagram of the pressure sensor shown when viewed from the rear side; Figure 4 show Figure 1 A cross-sectional view of a pressure sensor is shown.

[0044] like Figures 1 to 4 In the illustrated embodiment, the pressure sensor mainly includes: a body 100, a diaphragm 600, a pressure detection chip 400 and a circuit board 300. A receiving cavity for receiving liquid is formed inside the body 100. The diaphragm 600 is attached to the body 100 and is suitable for transmitting the external medium pressure to the liquid in the receiving cavity. The pressure detection chip 400 is mounted on the body 100 and is used to detect the liquid pressure in the receiving cavity. The circuit board 300 is mounted on the body 100 and is electrically connected to the pressure detection chip 400.

[0045] like Figures 1 to 4 In the illustrated embodiment, a flat mounting surface 120 a is formed on the body 100 , the mounting surface 120 a extends along the axial direction of the body 100 , and the pressure detection chip 400 and the circuit board 300 are mounted on the mounting surface 120 a .

[0046] like Figures 1 to 4 In the illustrated embodiment, the body 100 may be a metal shell made of metal, and the diaphragm 600 may be a flat metal diaphragm made of metal. The diaphragm 600 may be directly welded to the bottom surface of the body 100 to seal the bottom opening of the accommodating cavity.

[0047] like Figures 1 to 4 In the illustrated embodiment, the accommodating cavity includes a main passage 101 extending along the axial direction of the body 100 and a first branch passage 102 extending along the radial direction of the body 100. The first branch passage 102 is connected to the main passage 101, and the pressure detection chip 400 is installed on the opening of the first branch passage 102.

[0048] like Figures 1 to 4 In the illustrated embodiment, the body 100 includes: a base 110 in a cylindrical shape; and a mounting portion 120 extending upward from the top surface of the base 110. A mounting surface 120a is formed on the mounting portion 120, and the first branch passage 102 is formed in the mounting portion 120.

[0049] like Figures 1 to 4 In the illustrated embodiment, the pressure sensor also includes a signal processing chip 500, which is mounted on the circuit board 300 and communicates with the pressure detection chip 400 via the circuit board 300, and is used to process the liquid pressure signal detected by the pressure detection chip 400, for example, converting the analog signal into a digital signal, amplifying and filtering the signal, and other processing.

[0050] like Figures 1 to 4 In the illustrated embodiment, the pressure detection chip 400 is electrically connected to the circuit board 300 via a first electrical connection wire 4a, and the signal processing chip 500 is electrically connected to the circuit board 300 via a second electrical connection wire 5a.

[0051] like Figures 1 to 4 In the illustrated embodiment, the pressure sensor further includes a cylindrical outer cover 200 with a top, the outer cover 200 is mounted on the body 100 , and the pressure detection chip 400 and the signal processing chip 500 are accommodated in the outer cover 200 .

[0052] like Figures 1 to 4 In the illustrated embodiment, the circuit board 300 has an external plug 310, which extends from the top of the outer cover 200 and is used to output the liquid pressure signal detected by the pressure sensor to the outside.

[0053] like Figures 1 to 4 In the illustrated embodiment, the outer cover 200 is sealed with the body 100 and the external plug 310 so that the pressure detection chip 400, the signal processing chip 500 and the circuit board 300 except the external plug 310 are sealedly accommodated in the outer cover 200.

[0054] like Figures 1 to 4 In the illustrated embodiment, the top surface of the base 110 extends along the radial direction of the body 100 and is perpendicular to the mounting surface 120 a on the mounting portion 120 .

[0055] like Figures 1 to 4 In the illustrated embodiment, the mounting portion 120 is substantially semi-cylindrical, and the mounting surface 120 a is located on or near the central axis of the base 110 .

[0056] like Figures 1 to 4 In the illustrated embodiment, the radius of the mounting portion 120 is slightly smaller than the radius of the base 110 , and the central axes of the mounting portion 120 and the base 110 coincide with each other.

[0057] like Figures 1 to 4 In the illustrated embodiment, a liquid filling port 100 a communicating with the receiving cavity is formed on the body 100 , so that the receiving cavity of the body 100 can be filled with liquid through the liquid filling port 100 a .

[0058] like Figures 1 to 4 In the illustrated embodiment, the pressure sensor further comprises a sealing ball 10 , which is disposed in the liquid filling port 100 a and is used to seal the liquid filling port 100 a . The sealing ball 10 may be a metal ball suitable for being directly welded to the body 100 .

[0059] like Figures 1 to 4 In the illustrated embodiment, the liquid filling port 100a is formed on the peripheral surface of the base 110, and the accommodating cavity also includes a second branch passage 103 extending radially formed in the base 110, and the liquid filling port 100a is connected to the main passage 101 via the second branch passage 103.

[0060] like Figures 1 to 4 In the illustrated embodiment, the central axis of the liquid filling port 100 a perpendicularly intersects the central axis of the base 110 and is perpendicular to the mounting surface 120 a .

[0061] like Figures 1 to 4In the illustrated embodiment, a circular positioning groove 100b is formed on the circumferential surface of the base 110 on the side opposite to the liquid filling port 100a, and a strip positioning groove 100c extending in the axial direction is formed on the circumferential surface of the mounting portion 120 on the side opposite to the mounting surface 120a, so that the main body 100 can be positioned by the circular positioning groove 100b and the strip positioning groove 100c to prevent the main body 100 from moving when the pressure detection chip 400 and the circuit board 300 are installed.

[0062] like Figures 1 to 4 In the illustrated embodiment, the accommodating cavity has a bottom opening located on the bottom surface of the body 100, and the diaphragm 600 can be a flat film and is directly welded to the bottom surface of the body 100 to seal the bottom opening of the accommodating cavity. Since the diaphragm 600 is directly welded to the bottom surface of the body 100, there is no need to set a welding ring, and it can be used as a medical pressure sensor implanted in the human body.

[0063] like Figures 1 to 4 In the illustrated embodiment, the circuit board 300 and the pressure detection chip 400 are mounted on the mounting surface 120 a of the body 100 .

[0064] like Figures 1 to 4 In the illustrated embodiment, the pressure sensor is an oil-filled pressure sensor, and the liquid filled in the receiving cavity of the body 100 may be insulating oil, for example, insulating silicone oil. However, the present invention is not limited thereto, and the liquid filled in the receiving cavity of the body 100 may also be other insulating liquids.

[0065] like Figures 1 to 4 In the illustrated embodiment, since the circuit board 300 extends in the axial direction, the radial dimension of the pressure sensor will not be increased, so that the diameter of the pressure sensor can be reduced, for example, the diameter of the pressure sensor can be made no larger than 5 mm. In this way, the pressure sensor can be implanted in the human body, for example, in a blood vessel.

[0066] like Figures 1 to 4 In the illustrated embodiment, the pressure sensor is a medical pressure sensor suitable for implantation in a human body and used for detecting body fluid pressure in a human body.

[0067] like Figures 1 to 4 In the illustrated embodiment, the pressure detection chip 400 may be a MEMS pressure detection chip, the circuit board 300 may be a flexible circuit board, and the signal processing chip 500 may be an ASIC chip.

[0068] Second embodiment

[0069] Figure 5 and Figure 6 A pressure sensor according to a second embodiment of the present invention is shown. Figure 5 A perspective schematic diagram showing a pressure sensor according to a second embodiment of the present invention, wherein the outer cover 200 is removed; Figure 6 A sectional view showing a pressure sensor according to a second embodiment of the present invention.

[0070] Figure 5 and Figure 6 The second embodiment shown is Figures 1 to 4 The main difference of the first embodiment shown is that the liquid filling port 100a and the positioning groove are arranged at different positions.

[0071] like Figure 5 and Figure 6 As shown, in the illustrated embodiment, the liquid filling port 100 a is formed on the top surface of the mounting portion 120 and is directly communicated with the upper end of the main passage 101 .

[0072] like Figure 5 and Figure 6 As shown, in the illustrated embodiment, a circular positioning groove 100b and a strip positioning groove 100c extending axially through the circular positioning groove 100b are formed on the circumferential surface of the mounting portion 120 on the side opposite to the mounting surface 120a, so that the main body 100 can be positioned by the circular positioning groove 100b and the strip positioning groove 100c to prevent the main body 100 from moving when the pressure detection chip 400 and the circuit board 300 are installed.

[0073] In addition to the above differences, Figure 5 and Figure 6 The second embodiment shown is Figures 1 to 4 The other technical features of the first embodiment shown are basically the same and will not be described again for the sake of brevity.

[0074] Third embodiment

[0075] Figure 7 and Figure 8 A pressure sensor according to a third embodiment of the present invention is shown. Figure 7 A perspective schematic diagram showing a pressure sensor according to a third embodiment of the present invention, wherein the outer cover 200 is removed; Figure 8 A cross-sectional view showing a pressure sensor according to a third embodiment of the present invention;

[0076] Figure 7 and Figure 8 The third embodiment shown is Figures 1 to 4 The main difference of the first embodiment shown is that the liquid filling port 100a and the positioning groove are arranged at different positions.

[0077] like Figure 7 and Figure 8As shown, in the illustrated embodiment, the liquid filling port 100 a is formed on the peripheral surface of the mounting portion 120 on the side opposite to the mounting surface 120 a.

[0078] like Figure 7 and Figure 8 As shown, in the illustrated embodiment, a strip positioning groove 100c is formed on the circumferential surface of the mounting portion 120 on the side opposite to the mounting surface 120a, extending axially through the liquid filling port 100a. The liquid filling port 100a serves as a circular positioning groove, so that the main body 100 can be positioned by the liquid filling port 100a and the strip positioning groove 100c to prevent the main body 100 from moving when the pressure detection chip 400 and the circuit board 300 are installed.

[0079] In addition to the above differences, Figure 5 and Figure 6 The second embodiment shown is Figures 1 to 4 The other technical features of the first embodiment shown are basically the same and will not be described again for the sake of brevity.

[0080] Those skilled in the art can understand that the embodiments described above are exemplary and can be improved by those skilled in the art. The structures described in various embodiments can be freely combined without causing conflicts in structure or principle.

[0081] Although the present invention has been described in conjunction with the accompanying drawings, the embodiments disclosed in the accompanying drawings are intended to exemplify the preferred implementations of the present invention and should not be construed as limiting the present invention.

[0082] Although some embodiments of the present general inventive concept have been shown and described, it will be appreciated by those skilled in the art that changes may be made to these embodiments without departing from the principles and spirit of the present general inventive concept, the scope of which is defined by the claims and their equivalents.

[0083] It should be noted that the word "comprising" does not exclude other elements or steps, and the word "a" or "an" does not exclude a plurality. In addition, any element reference signs in the claims shall not be construed as limiting the scope of the present invention.

Claims

1. A pressure sensor, comprising: A body (100) having a receiving cavity formed therein for receiving liquid; A diaphragm (600) attached to the body (100) and adapted to transmit external medium pressure to the liquid in the accommodation chamber; a pressure detection chip (400), mounted on the body (100) and used to detect the liquid pressure in the containing cavity; and A circuit board (300) is mounted on the body (100) and is electrically connected to the pressure detection chip (400). Features: A flat mounting surface (120a) is formed on the body (100), the mounting surface (120a) extending along the axial direction of the body (100), the pressure detection chip (400) and the circuit board (300) being mounted on the mounting surface (120a), The accommodating cavity comprises a main passage (101) extending in the axial direction of the body (100) and a first branch passage (102) extending in the radial direction of the body (100) to penetrate the mounting surface (120a); The first branch passage (102) is connected to the main passage (101) filled with the liquid, and the pressure detection chip (400) is installed on the opening of the first branch passage (102). The body (100) is provided with a liquid filling port (100a) connected to the accommodating cavity, and the liquid is filled into the accommodating cavity of the body (100) through the liquid filling port (100a). The accommodating cavity further comprises a second branch passage (103) extending radially and formed in the body (100). The liquid filling port (100a) is connected to the main passage (101) via the second branch passage (103).

2. The pressure sensor according to claim 1, characterized in that: The body (100) comprises: a base (110) which is cylindrical; and The mounting portion (120) extends upward from the top surface of the base (110). The mounting surface (120a) is formed on the mounting portion (120), and the first branch passage (102) is formed in the mounting portion (120).

3. The pressure sensor according to claim 2, characterized in that: The pressure sensor further comprises a signal processing chip (500), wherein the signal processing chip (500) is mounted on the circuit board (300) and communicates with the pressure detection chip (400) via the circuit board (300), and is used for processing the liquid pressure signal detected by the pressure detection chip (400).

4. The pressure sensor according to claim 3, characterized in that: The pressure detection chip (400) is electrically connected to the circuit board (300) via a first electrical connection wire (4a), and the signal processing chip (500) is electrically connected to the circuit board (300) via a second electrical connection wire (5a).

5. The pressure sensor according to claim 3, characterized in that: The pressure sensor further comprises a cylindrical outer cover (200) with a top, wherein the outer cover (200) is mounted on the body (100), and the pressure detection chip (400) and the signal processing chip (500) are accommodated in the outer cover (200).

6. The pressure sensor according to claim 5, characterized in that: The circuit board (300) has an external plug (310), which extends from the top of the outer cover (200) and is used to output the liquid pressure signal detected by the pressure sensor to the outside.

7. The pressure sensor according to claim 6, characterized in that: The outer cover (200) is sealed and matched with the body (100) and the external plug (310), so that the pressure detection chip (400), the signal processing chip (500) and the circuit board (300) except the external plug (310) are sealed and accommodated in the outer cover (200).

8. The pressure sensor according to claim 2, characterized in that: The top surface of the base (110) extends in the radial direction of the body (100) and is perpendicular to the mounting surface (120a) on the mounting portion (120).

9. The pressure sensor according to claim 2, characterized in that: The mounting portion (120) is substantially semi-cylindrical, and the mounting surface (120a) is located on the central axis of the base (110) or close to the central axis of the base (110).

10. The pressure sensor according to claim 9, characterized in that: The radius of the mounting portion (120) is slightly smaller than the radius of the base portion (110), and the central axes of the mounting portion (120) and the base portion (110) coincide with each other.

11. The pressure sensor according to claim 1, characterized in that: The pressure sensor further comprises a sealing ball (10), wherein the sealing ball (10) is arranged in the liquid filling port (100a) and is used to seal the liquid filling port (100a).

12. The pressure sensor according to claim 2, characterized in that: The liquid filling port (100a) is formed on the peripheral surface of the base (110).

13. The pressure sensor according to claim 12, characterized in that: The central axis of the liquid filling port (100a) intersects perpendicularly with the central axis of the base (110) and is perpendicular to the mounting surface (120a).

14. The pressure sensor according to claim 13, characterized in that: A circular positioning groove (100b) is formed on the circumferential surface of the base (110) on the side opposite to the liquid filling port (100a), and a strip positioning groove (100c) extending in the axial direction is formed on the circumferential surface of the mounting portion (120) on the side opposite to the mounting surface (120a), so that the main body (100) can be positioned by the circular positioning groove (100b) and the strip positioning groove (100c) to prevent the main body (100) from moving when the pressure detection chip (400) and the circuit board (300) are installed.

15. The pressure sensor according to claim 1, characterized in that: The liquid filling port (100a) is formed on the top surface of the mounting portion (120) and is directly connected to the upper end of the main passage (101).

16. The pressure sensor according to claim 15, characterized in that: A circular positioning groove (100b) and a strip positioning groove (100c) extending axially through the circular positioning groove (100b) are formed on the peripheral surface of the mounting portion (120) on a side opposite to the mounting surface (120a), so that the body (100) can be positioned by the circular positioning groove (100b) and the strip positioning groove (100c) to prevent the body (100) from moving when the pressure detection chip (400) and the circuit board (300) are mounted.

17. The pressure sensor according to claim 1, characterized in that: The liquid filling port (100a) is formed on a peripheral surface of the mounting portion (120) on a side opposite to the mounting surface (120a).

18. The pressure sensor according to claim 17, characterized in that: A strip-shaped positioning groove (100c) is formed on the peripheral surface of the mounting portion (120) on a side opposite to the mounting surface (120a) and extends axially through the liquid filling port (100a). The liquid filling port (100a) serves as a circular positioning groove, so that the body (100) can be positioned through the liquid filling port (100a) and the strip-shaped positioning groove (100c) to prevent the body (100) from moving when the pressure detection chip (400) and the circuit board (300) are installed.

19. The pressure sensor according to claim 1, characterized in that: The accommodating cavity has a bottom opening located on the bottom surface of the body (100); the diaphragm (600) is a thin film and is directly welded to the bottom surface of the body (100) to seal the bottom opening of the accommodating cavity.

20. The pressure sensor according to claim 1, characterized in that: The circuit board (300) and the pressure detection chip (400) are mounted on the mounting surface (120a) of the body (100).

21. The pressure sensor according to claim 1, characterized in that: The pressure sensor is an oil-filled pressure sensor, and the liquid filled in the accommodating cavity of the body (100) is insulating oil.

22. The pressure sensor according to claim 1, characterized in that: The diameter of the pressure sensor is no greater than 5 mm.

23. The pressure sensor according to claim 1, characterized in that: The pressure sensor is a medical pressure sensor suitable for being implanted in a human body and used for detecting body fluid pressure in a human body.

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