A FPI batch testing system and testing method thereof

Abstract

The present invention proposes a FPI batch test system, including a controller, a first multiplexer, a second multiplexer and an FPI carrier module; the FPI carrier module includes m horizontal gating lines, n vertical gating lines and an FPI carrier array composed of m rows and n columns of FPI carriers, the FPI carrier array is used to carry the FPI to be tested, thereby forming an FPI array; one end of the m horizontal gating lines is electrically connected to the first multiplexer, and the other end is respectively connected in parallel to the n FPIs of the corresponding rows of the FPI array, one end of the n vertical gating lines is electrically connected to the second multiplexer, and the other end is respectively connected in parallel to the m FPIs of the corresponding columns of the FPI array; also includes an imaging device, the imaging device is used to collect the interference image of the FPI array. The present invention builds an FPI gating array based on a multiplexer by building an FPI carrier module, is compatible with the differences between individuals, meets the FPI batch test requirements, and thus greatly improves the test efficiency of FPI.

Description

Technical Field

[0001] The invention belongs to the field of FPI testing, and in particular relates to an FPI batch testing system and a testing method thereof. Background Art

[0002] The optical principle of FPI (Fabry-Perot interferometer) is based on the principle of Fabry-Perot interference. The spectrometer chip made by semiconductor integrated circuit technology drives the chip with different voltages to obtain different narrow-wave spectra. FPI needs to go through multiple rounds of testing before it is finished. Each round of testing takes a lot of time. In addition, there are individual differences between different FPIs, and compatible batch testing cannot be performed, resulting in low test efficiency of FPI, which is not conducive to mass production of FPI. Therefore, how to improve the test efficiency of FPI has become an important issue. Summary of the invention

[0003] In order to solve the problem of low test efficiency of existing FPI, the present application provides an FPI batch test system and a test method thereof to improve the test efficiency of FPI.

[0004] According to a first aspect of the present application, an FPI batch testing system is proposed, comprising a controller, a first multiplexer, a second multiplexer, and an FPI carrier module connected between the first multiplexer and the second multiplexer; the FPI carrier module comprises m horizontal gating lines, n vertical gating lines, and an FPI carrier array consisting of m rows and n columns of FPI carriers, wherein m≥2, n≥2, and m and n are both integers, and the FPI carrier array is used to carry FPIs to be tested, thereby forming an FPI array; one end of the m horizontal gating lines is electrically connected to the first multiplexer, and the other end is respectively connected in parallel to the n FPIs in the corresponding row of the FPI array, one end of the n vertical gating lines is electrically connected to the second multiplexer, and the other end is respectively connected in parallel to the m FPIs in the corresponding column of the FPI array, and the first multiplexer and the second multiplexer are both electrically connected to the controller; and an imaging device is also included, and the imaging device is used to collect an interference image of the FPI array. The system builds an FPI array, constructs an FPI gating array based on a first multiplexer and a second multiplexer, uses an imaging device to collect interference images of the FPI, and by gating corresponding horizontal gating lines and vertical gating lines, any FPI can be powered on with a different power-on voltage for testing, which is compatible with differences between individuals, thereby meeting the needs of FPI batch testing, greatly improving the test efficiency of the FPI, and facilitating the mass production of the FPI.

[0005] Preferably, the imaging device is an optical lens, through which the interference image of the FPI is collected.

[0006] Preferably, the optical lens simultaneously collects interference images of multiple FPIs. The interference images of all FPIs in the entire FPI array are collected by the optical lens and integrated into one image for appearance inspection, so that the FPI array can be quickly inspected and the batch testing efficiency of FPI can be improved.

[0007] Preferably, the optical lenses are provided in plurality, and the plurality of optical lenses respectively collect interference images of the plurality of FPIs. The interference images of the respective FPIs in the entire FPI array are collected by the plurality of optical lenses respectively and integrated into one image for appearance inspection, so that the FPI array can be quickly inspected, thereby improving the batch test efficiency of the FPI.

[0008] According to the second aspect of the present application, a FPI batch testing method is proposed, which adopts the above-mentioned FPI batch testing system, and the method includes: using an imaging device to collect an interference image of the FPI array, performing a first round of detection on the interference image, and when a defect point is detected in the interference image, extracting information of the defect point, and selecting a corresponding detection window on the defect point, and performing a second round of detection on each FPI in the FPI array by stepping the detection window, so as to quickly screen out the FPI with the defect point. The method establishes a smaller detection window based on the defect point, and compares and detects the same area of ​​other FPIs in the FPI array by stepping the detection window. Since the area of ​​the detection window is smaller than that of an entire FPI, the amount of data it covers is also less, so that FPIs with the same defect point can be screened out more quickly, thereby improving the batch testing efficiency of FPI.

[0009] Preferably, the step of using an imaging device to display the appearance image of the entire FPI matrix specifically includes: using a controller to turn on the first horizontal gating line and the first vertical gating line, the FPI in the first row and the first column of the FPI array is powered on and imaged on the imaging device; during the FPI response period, the second vertical gating line is turned on, the FPI in the first row and the second column of the FPI array is powered on and imaged on the imaging device, and so on, each FPI in the FPI array is powered on in turn. By powering on the FPIs one by one, imaging detection is performed on the FPIs one by one.

[0010] Preferably, the step of using an imaging device to display the appearance image of the entire FPI matrix specifically includes: using a controller to simultaneously open m horizontal gating lines and n vertical gating lines, and all FPIs in the FPI array are powered on at the same time and imaged on the imaging device. By powering on all FPIs at the same time, imaging detection is performed on all FPIs at the same time.

[0011] Preferably, the step of using an imaging device to display the appearance image of the entire FPI matrix specifically includes: dividing the FPI array into multiple partitions, and using a controller to sequentially open corresponding horizontal gating lines and vertical gating lines according to all FPIs in the multiple partitions, so as to sequentially power on the FPIs in the multiple partitions and image them on the imaging device. By partitioning the FPI array, common FPIs can be placed in the same partition, and then imaging detection is performed on the FPIs in each partition in turn.

[0012] Further preferably, the step of sequentially powering on each FPI in the FPI array specifically includes: different FPIs correspond to different power-on voltages. By providing different power-on voltages, different driving modes can be provided for different FPIs, thereby meeting the differences between compatible FPI individuals and realizing FPI batch testing.

[0013] Further preferably, the step of powering on the FPIs in the plurality of partitions in sequence and imaging on the imaging device specifically includes: the FPIs in different partitions correspond to different power-on voltages. A plurality of common FPIs are placed in the same partition, and different power-on voltages are provided to different partitions, so as to provide different driving modes for the FPIs in different partitions, thereby meeting the differences between compatible batch FPI individuals, realizing FPI batch testing, and further improving the testing efficiency of FPIs.

[0014] Further preferably, the step of performing a second round of detection on each FPI of the FPI array by stepping the detection window specifically includes: obtaining the stepping distance of the detection window according to the interval between two adjacent FPIs at the same position in the FPI array, and then controlling the stepping of the detection window by a controller. Since the interval between two adjacent FPIs in the FPI array is the same, it can be deduced that the stepping distance of the detection window is equal to the interval between two adjacent FPIs at the same position, that is, the sum of the interval between two adjacent FPIs and the length of the FPI.

[0015] The present application proposes an FPI batch test system and a test method thereof, by building an FPI array, constructing an FPI gating array based on a first multiplexer and a second multiplexer, and using an imaging device to collect an interference image of the FPI array; by gating the corresponding horizontal gating lines and vertical gating lines, it is possible to achieve different power-on voltages for different FPI individuals, and at the same time, different partitions of FPIs can correspond to different power-on voltages, or all FPIs can correspond to the same power-on voltage, thereby meeting the differences between compatible FPI individuals, achieving batch imaging and appearance inspection of FPIs, improving the test efficiency of FPIs, and further facilitating the batch production of FPIs. When a defective point is detected in a certain FPI in the FPI array, a detection window is selected according to the defective point, and the same position of other FPIs in the FPI array is compared and inspected by stepping the detection window. Since the amount of data contained in the detection window is much smaller than the amount of data of an entire FPI, the FPI with defective points can be quickly screened out, greatly improving the batch test efficiency of FPIs. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] The accompanying drawings are included to provide a further understanding of the embodiments and are incorporated into and constitute a part of this specification. The accompanying drawings illustrate the embodiments and are used together with the description to explain the principles of the present invention. It will be easy to recognize other embodiments and many expected advantages of the embodiments because they become better understood by reference to the following detailed description. The elements of the drawings are not necessarily to scale with each other. The same reference numerals refer to corresponding similar parts.

[0017] Figure 1 is a schematic structural diagram of an FPI batch testing system according to an embodiment of the present invention;

[0018] Figure 2 4 is a flow chart of a batch testing method of an FPI batch testing system according to the present invention.

[0019] Explanation of the accompanying drawings: 1. controller; 2. first multiplexer; 3. second multiplexer; 4. imaging device; 5. horizontal selection line; 6. vertical selection line; 7. FPI carrier; 8. FPI; 9. FPI array. DETAILED DESCRIPTION

[0020] The features and exemplary embodiments of various aspects of the present invention will be described in detail below. In order to make the purpose, technical solutions and advantages of the present invention clearer, the present invention will be further described in detail below in conjunction with the accompanying drawings and Examples. It should be understood that the specific embodiments described herein are only configured to explain the present invention and are not configured to limit the present invention. For those skilled in the art, the present invention can be implemented without the need for some of these specific details. The following description of the embodiments is only to provide a better understanding of the present invention by illustrating examples of the present invention.

[0021] It should be noted that, in this article, relational terms such as first and second, etc. are only used to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Moreover, the terms "include", "comprise" or any other variants thereof are intended to cover non-exclusive inclusion, so that a process, method, article or device including a series of elements includes not only those elements, but also other elements not explicitly listed, or also includes elements inherent to such process, method, article or device. In the absence of further restrictions, the elements defined by the statement "include..." do not exclude the existence of other identical elements in the process, method, article or device including the elements.

[0022] Figure 1 FIG. 4 shows a schematic diagram of the structure of an FPI batch test system according to an embodiment of the present invention. Figure 1 As shown, the test system includes a controller 1, a first multiplexer 2, a second multiplexer 3, an FPI carrier module and an imaging device 4. The FPI carrier module includes m horizontal gating lines 5, n vertical gating lines 6 and an FPI carrier array consisting of m rows and n columns of FPI carriers 7, where m≥2, n≥2 and are integers. The FPI carrier array is used to carry the FPI 8 to be tested, thereby forming an FPI array 9.

[0023] Continue to refer Figure 1Specifically, the first multiplexer 2 is placed vertically, one end of the first multiplexer 2 is electrically connected to the controller 1, and the other end of the first multiplexer 2 is electrically connected to m horizontal selection lines 5, and the other ends of the m horizontal selection lines 5 are respectively connected in parallel to the n FPIs 8 of the corresponding rows in the FPI array 9. The second multiplexer 3 is placed horizontally, one end of the second multiplexer 3 is also electrically connected to the controller 1, and the other end of the second multiplexer 3 is electrically connected to n vertical selection lines 6, and the other ends of the n vertical selection lines 6 are respectively connected in parallel to the m FPIs 8 of the corresponding rows in the FPI array 9, so that the FPI selection array is formed. The imaging device 4 then collects the interference image of the entire FPI array 9, so that the appearance of the FPI 8 can be batch tested.

[0024] In this embodiment, the controller 1 is specifically a computer, and in other embodiments, it can also be a control terminal such as a single-chip microcomputer or a tablet computer; the imaging device 4 uses an optical lens, and in other embodiments, other devices such as an image processor can also be used, and no further restrictions are made here. In addition, in this embodiment, an optical lens is used to simultaneously collect interference images of all FPIs 8 in the FPI array 9, and integrate them into one image for appearance inspection, thereby further improving the batch testing efficiency of FPIs 8. However, it should be recognized by those skilled in the art that in other embodiments, multiple optical lenses can also be used to respectively collect interference images of multiple FPIs 8 in the FPI array 9, and integrate them into one image for appearance inspection.

[0025] The test system builds an FPI array 9, constructs an FPI gating array based on the first multiplexer 2 and the second multiplexer 3, and the controller 1 controls the first multiplexer 2 and the second multiplexer 3 to select the corresponding horizontal gating line 5 and the vertical gating line 6, so as to select the corresponding FPI 8, thereby powering on any FPI 8 with different power-on voltages, and then using the imaging device 4 to collect the interference image of the FPI 8, and then detect the appearance of the FPI 8. It should be understood by those skilled in the art that the difference between individual FPI 8 is that they need to be driven with different power-on voltages. Therefore, the test system of the present invention is compatible with the difference between individual FPI 8, so that different FPI 8 can be placed in the same FPI carrier array for testing, thereby meeting the needs of FPI 8 batch testing, greatly improving the test efficiency of FPI 8, and thus being suitable for mass production of FPI 8.

[0026] All the above actions are controlled by the controller 1 , and those skilled in the art should understand that this technical level is fully achievable by the prior art.

[0027] In this embodiment, the FPI array 9 is provided with one, and the acquisition area of ​​the imaging device 4 selected by the test system is equal to the size of the FPI array 9. In a preferred embodiment, the FPI array 9 can also be provided with multiple, and the acquisition area of ​​the imaging device 4 selected by the test system is equal to the sum of the sizes of the multiple FPI arrays 9. The imaging device 4 integrates the interference image outputs of all FPIs 8 in the multiple FPI arrays 9 into one image, and then detects its appearance, thereby further improving the batch test efficiency of FPI 8.

[0028] Figure 2 FIG. 4 shows a flow chart of a batch testing method of an FPI batch testing system according to the present invention. Figure 2 As shown, the batch testing method includes the following steps:

[0029] S1. Collect the interference image of the FPI array using an imaging device.

[0030] In a specific embodiment, each FPI in the FPI array can be selected one by one, so that different FPIs correspond to different power-on voltages, and finally the interference image of the entire FPI array is collected. The specific implementation method is: use the controller to turn on the first horizontal selection line and the first vertical selection line, and the FPI in the first row and first column of the FPI array is powered on and imaged on the imaging device; during the FPI response period, the second vertical selection line is turned on, and the FPI in the first row and second column of the FPI array is powered on and imaged on the imaging device, and so on, and each FPI in the FPI array is powered on in turn. By providing different power-on voltages to different FPIs, this method can provide different driving modes for different FPIs, thereby meeting the differences between compatible FPI individuals, so that different FPIs can be placed in the same FPI carrier array for testing, and FPI batch testing is achieved.

[0031] Those skilled in the art should understand that the above method for implementing different power-on voltages corresponding to different FPIs is only to start from the FPI in the first row and first column of the FPI array, and to select the FPIs one by one in the FPI array from left to right and from top to bottom. In other implementations, it should not be limited to this selection order.

[0032] In another specific embodiment, all FPIs in the FPI array can be powered on at the same time, and finally the interference image of the entire FPI array is collected. The specific implementation method is: using a controller to simultaneously open m horizontal gating lines and n vertical gating lines, all FPIs in the FPI array are powered on at the same time and imaged on an imaging device. This method can achieve unified power supply, and all FPIs correspond to the same power-on voltage.

[0033] In another specific embodiment, the FPIs in the FPI array can be partitioned and gated, so that the FPIs in different partitions correspond to different power-on voltages, and finally the interference image of the entire FPI array is collected. The specific implementation method is: the FPI array is divided into multiple partitions, and according to all the FPIs in the multiple partitions, the corresponding horizontal gating lines and vertical gating lines are opened in sequence by the controller, so that the FPIs in the multiple partitions are powered on in sequence and imaged on the imaging device. This method places the common FPIs in the same partition, and then provides different power-on voltages to different partitions to provide different driving modes for the FPIs in different partitions, so as to meet the differences between the compatible batch FPI individuals, realize FPI batch testing, and further improve the testing efficiency of FPI.

[0034] S2, check whether there are defect points in the interference image of the FPI array, if yes, go to S3; if no, go to S4.

[0035] S3. Extract information of the defect point, select a corresponding detection window on the defect point, and perform a second round of detection on each FPI in the FPI array by stepping the detection window, so as to quickly screen out the FPI with defect points.

[0036] In the production process of FPI, due to process problems, the appearance of FPI often has defects similar to breakdown and burning, and when multiple FPIs have defects, the defects generally appear at the same position of the FPI. Therefore, a smaller detection window is established based on the defect point, and the same area of ​​other FPIs in the FPI array is compared and detected by stepping the detection window. Since the area of ​​the detection window is smaller than the area of ​​the entire FPI, the amount of data it covers is also less, so that FPIs with the same defect point can be screened out more quickly, thereby improving the batch testing efficiency of FPI.

[0037] Those skilled in the art should understand that the “stepping of the detection window” mentioned above means that the detection window moves by the same distance each time, and the moving direction includes but is not limited to horizontal or vertical.

[0038] In a specific embodiment, the step of performing a second round of detection on each FPI in the FPI array by stepping the detection window specifically includes: obtaining the stepping distance of the detection window according to the interval between two adjacent FPIs at the same position in the FPI array, and then controlling the stepping of the detection window by using a controller. Since the interval between two adjacent FPIs in the FPI array is the same, it can be deduced that the stepping distance of the detection window is equal to the interval between the two adjacent FPIs at the same position, that is, the sum of the interval between the two adjacent FPIs and the length of the FPI.

[0039] Those skilled in the art should understand that the "length of FPI" in the above "sum of the interval between two adjacent FPIs and the length of the FPI" is calculated according to the stepping direction of the detection window. If the detection window is stepped horizontally, then the "length of FPI" above refers to the length of the FPI in the horizontal direction; if the detection window is stepped vertically, then the "length of FPI" above refers to the length of the FPI in the vertical direction.

[0040] S4. End this round of testing.

[0041] Through the above batch testing method, unqualified FPIs can be quickly screened out.

[0042] The present application proposes an FPI batch test system and a test method thereof. By building an FPI array, an FPI gating array is constructed based on a first multiplexer and a second multiplexer, and an imaging device is used to collect an interference image of the entire FPI array; by gating the corresponding horizontal gating lines and vertical gating lines, different FPI individuals can correspond to different power-on voltages, and FPIs in different partitions can correspond to different power-on voltages, or all FPIs correspond to the same power-on voltage, thereby meeting the differences between compatible FPI individuals, realizing batch imaging and appearance inspection of FPIs, improving the test efficiency of FPIs, and further facilitating the batch production of FPIs. When a defective point is detected in a certain FPI in the FPI array, a detection window is selected according to the defective point, and the same position of other FPIs in the FPI array is compared and inspected by stepping the detection window. Since the amount of data contained in the detection window is much smaller than the amount of data of an entire FPI, the FPI with defective points can be quickly screened out, greatly improving the batch test efficiency of FPIs.

[0043] Obviously, those skilled in the art can make various modifications and changes to the embodiments of the present invention without departing from the spirit and scope of the present invention. In this way, if these modifications and changes are within the scope of the claims of the present invention and their equivalents, the present invention is also intended to cover these modifications and changes. The word "comprising" does not exclude the presence of other elements or steps not listed in the claims. The simple fact that certain measures are recorded in mutually different dependent claims does not indicate that the combination of these measures cannot be used to profit. Any reference numerals in the claims should not be considered to limit the scope.

Claims

1. A FPI batch testing system, characterized in that: The invention comprises a controller, a first multiplexer, a second multiplexer and an FPI carrier module connected between the first multiplexer and the second multiplexer; The FPI carrier module includes m horizontal gate lines, n vertical gate lines, and an FPI carrier array consisting of m rows and n columns of FPI carriers, where m≥2, n≥2, and m and n are both integers, and the FPI carrier array is used to carry the FPI to be tested, thereby forming an FPI array; One ends of the m horizontal selection lines are electrically connected to the first multiplexer, and the other ends are respectively connected in parallel to the n FPIs corresponding to the rows of the FPI array, one ends of the n vertical selection lines are electrically connected to the second multiplexer, and the other ends are respectively connected in parallel to the m FPIs corresponding to the columns of the FPI array, and the first multiplexer and the second multiplexer are both electrically connected to the controller; Also included is an imaging device, the imaging device is used to collect an interference image of the FPI array; The system is used to detect the interference image. When a defect point is detected in the interference image, the information of the defect point is extracted, and a corresponding detection window is selected on the defect point. The same position of other FPIs in the FPI array is compared and detected by stepping the detection window.

2. A FPI batch testing system according to claim 1, characterized in that: The imaging device is an optical lens.

3. A FPI batch testing system according to claim 2, characterized in that: The optical lens simultaneously collects interference images of a plurality of the FPIs.

4. The FPI batch testing system according to claim 2, characterized in that: There are multiple optical lenses, and the multiple optical lenses respectively collect interference images of the multiple FPIs.

5. A FPI batch testing method using the testing system as claimed in any one of claims 1 to 3, characterized in that: include: An imaging device is used to collect interference images of the FPI array, and a first round of detection is performed on the interference image. When a defect point is detected in the interference image, information of the defect point is extracted, and a corresponding detection window is selected on the defect point. A second round of detection is performed on each FPI in the FPI array using the stepping of the detection window, so as to quickly screen out the FPI with the defect point.

6. The FPI batch testing method according to claim 5, characterized in that: The step of collecting the interference image of the FPI array by using an imaging device specifically includes: Using a controller to turn on a first horizontal gate line and a first vertical gate line, the FPI in the first row and the first column of the FPI array is powered on and forms an image on the imaging device; During the FPI response period, the second vertical strobe line is turned on, the FPI in the first row and second column of the FPI array is powered on and images are formed on the imaging device, and so on, each FPI in the FPI array is powered on in turn.

7. The FPI batch testing method according to claim 5, characterized in that: The step of collecting the interference image of the FPI array by using an imaging device specifically includes: using a controller to simultaneously open m horizontal gating lines and n vertical gating lines, and all FPIs in the FPI array are powered on at the same time and imaged on the imaging device.

8. The FPI batch testing method according to claim 5, characterized in that: The step of using an imaging device to collect the interference image of the FPI array specifically includes: dividing the FPI array into multiple partitions, and using a controller to sequentially open corresponding horizontal gating lines and vertical gating lines according to all FPIs in the multiple partitions, thereby powering on the FPIs in the multiple partitions in turn and imaging them on the imaging device.

9. The FPI batch testing method according to claim 6, characterized in that: Different FPIs correspond to different power-on voltages.

10. The FPI batch testing method according to claim 8, characterized in that: The FPIs of different partitions correspond to different power-on voltages.

11. The FPI batch testing method according to claim 5, characterized in that: The step of performing a second round of detection on each FPI in the FPI array by stepping the detection window specifically includes: obtaining the stepping distance of the detection window according to the interval between two adjacent FPIs at the same position in the FPI array, and then controlling the stepping of the detection window by using a controller.

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