Cutting device

Abstract

The present invention provides a cutting device that can reduce the possibility of defects in subsequent cutting processes even if a cutting defect occurs. The cutting device has a chuck table, a cutting unit, a camera unit, a sub-chuck table, and a control unit, the control unit having: a photographing instruction section that photographs a first cutting mark of a workpiece to obtain a cutting result image; a measurement section that obtains, from the first cutting mark of the cutting result image, measurement values of a plurality of measurement items each having a permissible range that is set in advance for the cutting mark; a dressing instruction section that performs dressing of the cutting tool if the measurement value of at least one of the plurality of measurement items of the first cutting mark exceeds the permissible range; and a notification section that causes the cutting device to issue an alarm if the measurement value of at least one of the plurality of measurement items of a second cutting mark formed at a position different from the first cutting mark exceeds the permissible range after the cutting is restarted after the dressing.

Description

Technical Field

[0001] This invention relates to a cutting device for cutting a workpiece held in a chuck table. Background Technology

[0002] A cutting device is known to use a cutting tool to cut various plate-shaped workpieces such as semiconductor wafers, sapphire substrates, silicon carbide substrates, glass substrates, and resin encapsulation substrates along a predetermined dividing line set on the front side of the workpiece, thereby forming a cutting groove (cutting mark) on the workpiece.

[0003] When the cutting marks on a workpiece are observed using a camera unit, minute defects (chipping) are usually observed. However, if poor cutting occurs for some reason during the cutting process, the size of the defects may sometimes be abnormally large.

[0004] Therefore, a so-called cut inspection is performed as follows: the cutting marks are photographed at an appropriate time during cutting, multiple pre-set measurement items (such as the width of the cutting marks, the size of the defects, etc.) are measured, and it is automatically determined whether a cutting defect has occurred (see, for example, Patent Document 1).

[0005] Patent Document 1: Japanese Patent Application Publication No. 2013-74198

[0006] Regarding the results of the cut inspection, if a cutting defect is identified, the aim is to eliminate the cause. However, inexperienced operators sometimes instruct the cutting device to continue cutting without eliminating the cause. But if cutting continues in this state, it is possible that cutting defects will occur on all subsequent workpieces. Summary of the Invention

[0007] The present invention was made in view of this problem and its object is to provide a cutting device that can reduce the possibility of cutting defects occurring in subsequent cutting processes, even if cutting defects have occurred.

[0008] According to one aspect of the present invention, a cutting apparatus is provided, comprising: a chuck table for holding a workpiece; a cutting unit having a spindle for cutting the workpiece held by the chuck table along a predetermined dividing line set on the workpiece using a cutting tool mounted on the spindle; a camera unit for photographing the workpiece held by the chuck table; a secondary chuck table for holding a dressing plate for dressing the cutting tool; and a control unit having a memory and a processor, the control unit comprising: a photographing instruction unit for causing the camera unit to photograph a first cutting mark on the workpiece cut by the cutting unit to obtain a cutting result image; and a measuring unit. Based on the first cutting mark in the cutting result image, it obtains the measurement values ​​of multiple measurement items, each with an allowable range, pre-set for the cutting mark; the dressing instruction unit, if the measurement value of at least one of the multiple measurement items of the first cutting mark exceeds the allowable range, uses the dressing plate held by the auxiliary chuck table to dress the cutting tool; and the notification unit, after the dressing of the cutting tool, if the cutting of the workpiece resumes after the cutting tool has been dressed, and the measurement value of at least one of the multiple measurement items of the second cutting mark formed at a different location than the first cutting mark exceeds the allowable range, the notification unit causes the cutting device to issue an alarm.

[0009] Preferably, these multiple measurement items include the width of the cut, the size of the defect, and the area of ​​the defect.

[0010] In one aspect of the present invention, the dressing indicator of the cutting device dresses the cutting tool using a dressing plate held by the sub-chuck table when the measured value of at least one of the plurality of measurement items of the first cutting mark exceeds the allowable range.

[0011] In this way, even if a cutting defect occurs, the cutting device automatically adjusts the cutting tool to attempt to eliminate the defect, thus reducing the possibility of a cutting defect occurring in subsequent cutting processes.

[0012] Furthermore, after the cutting tool is dressed, cutting of the workpiece resumes, automatically forming a second cutting mark at a location different from the first cutting mark. And, if the measured value of at least one of the multiple measurement items of this second cutting mark exceeds the allowable range, the notification unit causes the cutting device to issue an alarm.

[0013] In this way, if the cutting defect cannot be eliminated even after adjustments by the cutting device, an alarm will be issued, prompting the operator to eliminate the cause of the defect. Therefore, even inexperienced operators can call upon experienced operators to resolve the defect. This reduces the likelihood of cutting defects occurring in subsequent cutting operations. Attached Figure Description

[0014] Figure 1 It is a three-dimensional diagram of the cutting device.

[0015] Figure 2 It is a partial cross-sectional side view showing the cutting of the workpiece.

[0016] Figure 3 This is an example of an image showing the result of cutting.

[0017] Figure 4 This is an example of an image showing multiple measurement items.

[0018] Figure 5 It is a graph used to illustrate the measured values.

[0019] Figure 6 This is a flowchart of a cutting method that uses a cutting device.

[0020] Label Explanation

[0021] 2: Cutting device; 4: Base; 4a, 4b, 4c: Opening; 6: Box lift; 8: Box; 12: Worktable cover; 14: Folded cover; 11: Workpiece; 11a: Front; 11b: Back; 13: Dividing line; 13a: Cutting mark; 13b: Edge; 13c: Center line; 15: Component; 17: Scribing strip; 19: Frame; 21: Workpiece unit; 16: Chuck table; 16a: Holding surface; 16b: Fixture; 18: Secondary chuck table; 18a: Dressing plate; 20: Support structure; 22: Cutting unit moving mechanism; 23: Edge chipping; 25: Cutting; 24: Y-axis guide rail; 26: Y-axis moving plate; 28: Y-axis ball screw ; 30: Y-axis pulse motor; 32: Z-axis guide rail; 34: Z-axis moving plate; 36: Z-axis ball screw; 38: Z-axis pulse motor; 40: cutting unit; 42: spindle; 44: cutting tool; 46: camera unit; 48: cleaning unit; 52: display device; 54: indicator light; 50: cutting result image; 50a: image; 56: control unit; 58: processor; 58a: contrast value; 58b: offset; 58c, 58d: width; 58e: maximum distance; 58f: dimension; 58g: total area; 58h: offset; 60: memory; 62: measuring unit; 64: shooting indicator unit; 66: trimming indicator unit; 68: notification unit. Detailed Implementation

[0022] An embodiment of one aspect of the present invention will be described with reference to the accompanying drawings. Figure 1 This is a perspective view of cutting device 2. Additionally, in Figure 1 In the diagram, a portion of the components of the cutting device 2 are shown using function blocks. Furthermore, in the following description, the X-axis (machining feed direction), Y-axis (indexing feed direction), and Z-axis (vertical and height directions) are perpendicular to each other.

[0023] The cutting device 2 has a base 4 that supports or houses the various components. An opening 4a is formed at the front corner of the base 4, and a box lift 6 that is raised and lowered by a lifting mechanism (not shown) is installed in the opening 4a.

[0024] A box 8 for storing multiple workpieces 11 is placed on the upper surface of the box elevator 6. Here, refer to... Figure 2 and Figure 3 The workpiece 11 will be described. The workpiece 11 is, for example, a disk-shaped wafer formed of a semiconductor material such as silicon.

[0025] On the front side 11a of the workpiece 11 (refer to) Figure 2 The side is provided with multiple mutually perpendicular dividing lines 13 (also called interval channels). See reference. Figure 3 Within each region divided by multiple predetermined dividing lines 13, devices such as ICs (Integrated Circuits) are formed (see reference). Figure 3 ).

[0026] On the back side 11b of the workpiece 11 (refer to) Figure 2 A dicing strip 17 with an area larger than the workpiece 11 is attached to the side. In addition, a ring-shaped frame 19 made of metal is attached to the outer periphery of the dicing strip 17.

[0027] like Figure 1 As shown, the workpiece 11 is stored in the box 8 as a workpiece unit 21 supported by the frame 19 by means of the dicing strip 17. In addition, there are no restrictions on the material, shape, structure, size, etc. of the workpiece 11.

[0028] A rectangular opening 4b with a long side along the X-axis is formed on the side of the box elevator 6. A ball screw type X-axis moving mechanism (machining feed unit) (not shown) is arranged at the lower part of the opening 4b.

[0029] A rectangular worktable cover 12 is arranged on the upper part of the X-axis moving mechanism, and pleated covers 14 are arranged on both sides of the worktable cover 12 in the X-axis direction. A chuck worktable 16 for holding the workpiece 11 is arranged on the worktable cover 12.

[0030] A θ-stage (not shown) with a rotary drive source such as an electric motor is connected to the lower part of the chuck table 16. The θ-stage causes the chuck table 16 to rotate within a specified angle range about a rotation axis that is approximately parallel to the Z-axis direction.

[0031] An attraction path (not shown) is formed inside the chuck stage 16, and one end of the attraction path is connected to an attraction source (not shown) such as a vacuum pump. The negative pressure generated by the attraction source is transmitted to the upper surface of the chuck stage 16.

[0032] The upper surface of the chuck table 16 is approximately parallel to the XY plane and functions as a holding surface 16a for attracting and holding the workpiece 11. Additionally, four clamps 16b are provided around the chuck table 16 for securing the frame 19 from all four sides.

[0033] A secondary chuck worktable 18 is located at the corner of the worktable cover 12. Figure 1 In the middle, two auxiliary chuck worktables 18 are arranged at two corners on one side of the worktable cover 12 in the X-axis direction, separated along the Y-axis direction.

[0034] Each sub-chuck worktable 18 is smaller than the chuck worktable 16 and is rectangular in shape when viewed from above. The flow path formed in the sub-chuck worktable 18 is connected to the aforementioned suction source, and the upper surface of the sub-chuck worktable 18 becomes a holding surface for attracting and holding the rectangular plate-shaped trimming plate 18a.

[0035] Dressing plate 18a is formed, for example, from a composite material in which abrasive particles such as white corundum (WA) and green carbon (GC) are mixed in with a bonding material such as ceramic or resin. Dressing plate 18a is used for dressing (sharpening) the cutting tool 44, which will be described later.

[0036] A first transport unit (not shown) is arranged above the opening 4b to transport the workpiece unit 21 to the chuck table 16. A gate-shaped support structure 20 is arranged to the side and above the opening 4b in a manner that spans the opening 4b.

[0037] On the upper part of the front surface of the support structure 20, there are two cutting unit moving mechanisms 22, each containing an indexing feed unit and a cutting feed unit. Each cutting unit moving mechanism 22 shares a pair of Y-axis guide rails 24 disposed on the front surface of the support structure 20 and approximately parallel to the Y-axis direction.

[0038] The Y-axis moving plate 26 is slidably mounted on the Y-axis guide rail 24. A nut portion (not shown) is provided on the back (rear surface) side of the Y-axis moving plate 26, and a Y-axis ball screw 28 that is approximately parallel to the Y-axis direction is rotatably connected in the nut portion.

[0039] A Y-axis pulse motor 30 is connected to one end of a Y-axis ball screw 28. If the Y-axis ball screw 28 is rotated by the Y-axis pulse motor 30, a Y-axis moving plate 26 moves along the Y-axis guide rail 24.

[0040] A pair of Z-axis guide rails 32, which are approximately parallel to the Z-axis direction, are provided on the front surface of each Y-axis moving plate 26. The Z-axis moving plate 34 is slidably mounted on the Z-axis guide rails 32.

[0041] A nut portion (not shown) is provided on the back side (rear surface side) of the Z-axis moving plate 34, and a Z-axis ball screw 36, which is approximately parallel to the Z-axis direction, is rotatably connected to the nut portion. A Z-axis pulse motor 38 is connected to the upper end of the Z-axis ball screw 36.

[0042] If the Z-axis ball screw 36 is rotated by the Z-axis pulse motor 38, the Z-axis moving plate 34 moves along the Z-axis direction. A cutting unit 40 is connected to the lower part of the Z-axis moving plate 34. The cutting unit 40 has a cylindrical spindle housing.

[0043] A cylindrical spindle 42 (see reference) is rotatably housed within the spindle housing. Figure 2 It is part of the spindle 42. A rotary drive source such as a servo motor (not shown) is connected to one end of the spindle 42.

[0044] A circular cutting tool 44 is mounted at the other end of the spindle 42. Figure 2 The cutting tool 44 shown is a so-called hubless type (also known as a washer type), but the cutting tool 44 can also be a so-called hub type.

[0045] Return again Figure 1 A camera unit 46 is provided adjacent to each cutting unit 40. The camera unit 46 has a microscope camera, which has an image sensor such as CMOS (Complementary Metal-Oxide-Semiconductor) or CCD (Charge-Coupled Device), a prescribed optical system, and a lens.

[0046] The camera unit 46 captures an image of the front 11a side of the workpiece 11 held by the holding surface 16a on the back side 11b side. For example, the image of the front 11a side captured by the camera unit 46 can be used for alignment of the workpiece 11, analysis of the cutting results of the workpiece 11, etc.

[0047] A circular opening 4c is provided on the opposite side of opening 4a from opening 4b. A cleaning unit 48 for cleaning the workpiece 11 after cutting is arranged in the opening 4c. The workpiece 11 after cutting is transferred from the chuck table 16 to the cleaning unit 48 by a second transfer unit (not shown).

[0048] Here, the steps for cutting the workpiece 11 are briefly described. Figure 2 This is a partial cross-sectional side view showing the cutting of the workpiece 11. When cutting the workpiece 11, a workpiece unit 21 is first taken out from the box 8 and held on the back side 11b side of the workpiece 11 by the holding surface 16a.

[0049] Next, a camera unit 46 is used to take a picture of the front side 11a. Based on the obtained image of the front side 11a, the orientation of the chuck table 16 is adjusted using a θ-stage in a manner where the predetermined dividing line 13 is approximately parallel to the X-axis direction.

[0050] Furthermore, the cutting tool 44, which rotates at high speed, is positioned on the extension line of a predetermined dividing line 13, and the lower end of the cutting tool 44 is positioned between the holding surface 16a and the back surface 11b.

[0051] When the cutting tool 44 and the chuck table 16 move relative to each other in the X-axis direction via the X-axis moving mechanism in this state, the workpiece 11 is cut along a predetermined dividing line 13 to form a cutting mark (cutting groove) 13a.

[0052] After forming cutting marks 13a along all the predetermined dividing lines 13 in one direction, the chuck table 16 is rotated 90 degrees so that the predetermined dividing lines 13 in the other direction are approximately parallel to the X-axis direction. Then, cutting marks 13a are formed along all the predetermined dividing lines 13 in the other direction.

[0053] Thus, during the cutting of the workpiece 11, for example, when the cutting length using the cutting tool 44 reaches the kerf inspection conditions described later, the cutting mark 13a is first photographed by the camera unit 46 for kerf inspection. This yields a cutting result image 50 of the workpiece 11 (see reference). Figure 3 ).

[0054] Figure 3This is an example of a cutting result image 50. The cutting result image 50 is used when you want to obtain the measurement value of the cutting mark 13a (cut 25) among a number of pre-set measurement items such as the size of the chipped edge (defect) 23.

[0055] Returning here Figure 1 The cutting device 2 is equipped with a display device 52 for displaying images captured by the camera unit 46 and the aforementioned measurement values. In this example, the display device 52 is, for example, a touch panel that functions as both a display unit and an input unit.

[0056] Regarding the cutting device 2, if a problem occurs during the cutting process, an alarm indicating an error can be displayed on the display device 52. An indicator light 54 is provided on the upper part of the cutting device 2 to visually indicate its status.

[0057] Regarding indicator light 54, it illuminates in green, for example, when the cutting process proceeds without problems, and illuminates in red, for example, when a problem occurs during the cutting process. This red illumination serves as an alarm from the cutting device 2 to the operator, etc. Alternatively, a speaker (not shown) can be installed in the cutting device 2 to emit a prescribed warning sound (alarm) when a problem occurs during the cutting process.

[0058] The display device 52, indicator light 54, and speaker function as a notification unit to inform the operator of any problems that have occurred during the cutting process. The cutting device 2 is equipped with a control unit 56 that controls the operation of each component.

[0059] The control unit 56 controls the operation of the box lifting machine 6, the X-axis moving mechanism, the chuck table 16, the first and second conveying units, the cutting unit moving mechanism 22, the cutting unit 40, the camera unit 46, the cleaning unit 48, the display device 52, the indicator light 54, the speaker, etc.

[0060] The control unit 56 is, for example, a computer, which includes: a processor 58, represented by a CPU (Central Processing Unit); and a memory 60, which includes main storage devices such as DRAM (Dynamic Random Access Memory), SRAM (Static Random Access Memory), and ROM (Read Only Memory), and auxiliary storage devices such as flash memory, hard disk drives, and solid-state drives.

[0061] The auxiliary storage device of the memory 60 stores software containing a prescribed program. The processor 58 is activated according to this software, thereby realizing the function of the control unit 56.

[0062] The memory 60 stores predetermined conditions that are input by the operator via the display device 52 or preset according to the type of workpiece 11. The predetermined conditions include cutting conditions such as the rotational speed of the cutting tool 44 and the machining feed rate of the chuck table 16.

[0063] The specified conditions also include kerf inspection conditions. Kerf inspection conditions refer to the conditions used to confirm whether there are any problems on the cutting marks 13a, for example, it is specified that the kerf inspection is performed when the workpiece 11 has been cut according to the specified cutting length.

[0064] Alternatively, instead of specifying the length, the kerf inspection can be performed when the workpiece 11 has been cut according to a specified number of sheets. The kerf inspection conditions can be appropriately set or changed by the operator via the display device 52.

[0065] In addition to the cutting and kerf inspection conditions described above, the memory 60 also stores allowable ranges for multiple measurement items preset for the cutting mark 13a. Figure 4 This is an example of an image showing multiple measurement items displayed on a portion of the display device 52.

[0066] The measured values ​​of each measurement item are obtained by the measurement unit 62, which detects the edge 13b (see reference) of the cutting result image 50 by means of a program stored in the memory 60. Figure 3 , Figure 5 It is obtained by image processing or calculating the size of feature regions in an image.

[0067] For example, when detecting the edge 13b of the cutting mark 13a through image processing, the measurement unit 62 calculates the difference in brightness between adjacent pixels in the cutting result image 50. Furthermore, the cutting mark 13a appears darker compared to the non-cutting area in the segmentation predetermined line 13.

[0068] In the cutting result image 50, one pixel corresponds to, for example, 1 μm. Therefore, the number of pixels constituting the cut 25 or the chipped edge 23 is calculated, thereby measuring the width of the cut 25, the size of the chipped edge 23, etc.

[0069] Several measurement items include: contrast value 58a; offset of center position 58b; width of cut 25 excluding chipped edge 23 58c; width of cut 25 including chipped edge 23 58d; maximum distance from the center of the mark to the outer edge of chipped edge 23 58e; size of the largest chipped edge 23 58f; total area of ​​chipped edge 23 58g; and offset in the Y-axis direction 58h (see reference). Figure 4 ).

[0070] The contrast value 58a refers to the numerical value showing the contrast between the predetermined dividing line 13 and the cutting mark 13a in the cutting result image 50. Figure 4 In the image shown, the contrast value 58a is represented as the cut score.

[0071] The lower limit of the contrast value 58a is displayed to the right of the text "Cut Score". The higher the value of the contrast value 58a, the greater the density difference between the pre-segmentation line 13 and the cutting mark 13a in the image, thus enabling more accurate measurements.

[0072] The offset 58b of the center position refers to the center line (not shown) of the datum line (reference line in the camera of camera unit 46) in the cutting result image 50 and the center line 13c (reference) of the cutting mark 13a. Figure 5 The positional offset between ).

[0073] If the offset 58b exceeds the upper limit value displayed to the right of the text "(Call)", the control unit 56 notifies the operator of an error. Additionally, the upper limit value displayed to the right of the text "(Call)" is greater than the upper limit value displayed to the right of the text "(Adjust)".

[0074] If the offset 58b exceeds the upper limit value to the right of the text displayed in "(Adjustment)" but is below the upper limit value to the right of the text displayed in "(Call)", the control unit 56 automatically performs line alignment to correct the cutting position.

[0075] The width of the cut 25 other than the chipped edge 23 is 58c (refer to...). Figure 5 ) refers to the width of the cut 25 in the cutting result image 50, excluding the multiple chipped edges 23 formed on both sides of the cut 25. Furthermore, the upper and lower limits of the width 58c are displayed to the right of the text "Upper Limit" and "Lower Limit," respectively.

[0076] The width of the cut 25, including the chipped edge 23, is 58d (refer to...). Figure 5The width of the cutting mark 13a and the chipped edge 23, including the size (length) of the largest chipped edge 23 in the width direction of the cut 25, is shown in the cutting result image 50. The upper limit of the width 58d is displayed to the right of the text "(including chipped edge)".

[0077] The maximum distance 58e from the center of the marking to the outer edge of the chipped edge 23 refers to the distance from the center line of the marking to the outermost end of the largest chipped edge 23 in the width direction of the cut 25 in the cutting result image 50. The upper limit of the maximum distance 58e is displayed to the right of the text "(center ~ chipped edge)".

[0078] The largest chipped edge 23 has a size of 58f (refer to). Figure 5 ) refers to the size (length) of the largest chipped edge 23 in the width direction of the cut 25 in the cutting result image 50. The upper limit value of the size 58f is displayed to the right of the text "Chipped Edge Allowable Value".

[0079] The total area 58g of the chipped edges 23 refers to the area of ​​the chipped edges 23 surrounding the outer edges of each chipped edge 23 at a position protruding to the outside of the width 58c in the cutting result image 50, and the two imaginary straight lines defining the cut 25. Figure 5 The sum of the areas (the areas marked in black). The upper limit of the total area of ​​58g is displayed to the right of the text "Collapse Area".

[0080] The offset 58h in the Y-axis direction refers to the position offset in the indexing feed direction between the actual position of the target in the cutting result image 50 and the position of the target calculated based on the indexing set by the device data.

[0081] The target refers to the target pattern used for alignment, etc., also known as the key pattern, alignment mark, etc. The upper limit of the offset of 58h in the Y-axis direction is displayed to the right of the text "Y Allowed Values ​​(Based on Target)" in the image.

[0082] In addition, Figure 4 In the Z1 axis column, the allowable values ​​for processing the cutting result image 50 obtained by the measuring unit 62 using one camera unit 46 are displayed. Similarly, the allowable values ​​for processing the cutting result image 50 obtained by the measuring unit 62 using another camera unit 46 are displayed in the Z2 axis column.

[0083] Each measured value is stored in memory 60 and checked by control unit 56 to see if it exceeds the allowable range. The operator pre-selects from "call", "correction" and "retry" when the measured value exceeds the allowable range (i.e., when an error occurs).

[0084] "Calling" refers to issuing an alarm through the display device 52, indicator light 54, speaker, etc., thereby notifying the operator that the cutting device 2 has malfunctioned. "Clothing" refers to dressing the cutting tool 44 using the dressing plate 18a.

[0085] "Retry" refers to the measurement unit 62 reprocessing the cutting result image 50 acquired by the camera unit 46, calculating the size of the feature regions in the image, etc. Figure 4 In the example shown, a "call" is made when the contrast value 58a is less than the lower limit. Additionally, a "retry" is made when the width 58c is less than the lower limit.

[0086] Conversely, when the width (58c), 58d, maximum distance (58e), dimension (58f), and total area (58g) exceed their respective upper limits, a "trim" process is performed. Furthermore, the selection of "call," "trim," and "retry" for each measurement item is not limited to... Figure 4 The example shown.

[0087] Figure 5 Image 50a, corresponding to the cutting result image 50, is a diagram used to illustrate the measured values. In image 50a, the edge 13b of the cutting mark 13a, the center line 13c of the cutting mark 13a, etc., are shown overlapping on the predetermined dividing line 13. Additionally, shaded lines are marked on the device 15.

[0088] Here, let's go back again. Figure 1 The structure of the control unit 56 will be further explained below. The memory 60 includes a shooting instruction 64 that enables the camera unit 46 to capture images of the cutting marks 13a on the workpiece 11.

[0089] When the aforementioned cut inspection conditions are met, the shooting instruction unit 64 causes the camera unit 46 to capture the cutting mark 13a. The measuring unit 62 calculates the measurement values ​​for each measurement item from the captured cutting result image 50.

[0090] If the measured value of at least one of the measured items exceeds the allowable range (i.e., if a cutting defect occurs), the control unit 56 causes the cutting unit 40, the cutting unit moving mechanism 22, the X-axis moving mechanism, the chuck table 16, etc. to operate and use the dressing plate 18a to dress the cutting tool 44.

[0091] Thus, the instruction to automatically perform dressing of the cutting tool 44 is executed by the dressing instruction unit 66 in the control unit 56. The dressing instruction unit 66 is, for example, a program stored in the memory 60.

[0092] During the dressing of the cutting tool 44, for example, the rotating cutting tool 44 is positioned outside the dressing plate 18a in the X-axis direction, and the lower end of the cutting tool 44 is positioned at a depth specified from the upper surface of the dressing plate 18a. In this state, the cutting tool 44 and the dressing plate 18a are moved relative to each other in the X-axis direction by the X-axis moving mechanism.

[0093] By trimming, dulling and clogging of the cutting edge of the cutting tool 44 can be eliminated, thereby reducing the size of the chipped edge 23 during cutting and lowering the frequency of chipped edge 23 occurrence. In addition, during trimming, the cutting tool 44 can be used to form one groove or multiple grooves on the trimming plate 18a.

[0094] Thus, in this embodiment, if the measured value of at least one measurement item exceeds the allowable range, the cutting tool 44 is automatically dressed, so even if a cutting defect occurs, it can be attempted to be eliminated in the cutting device 2. Therefore, the possibility of cutting defects occurring in subsequent cutting processes can be reduced.

[0095] After the cutting tool 44 is dressed, cutting of the workpiece 11 begins again. When cutting resumes after dressing, a predetermined number (e.g., one) of cutting marks 13a are formed at a different position in the indexing feed direction than the cutting marks 13a that were just formed previously, or on a workpiece 11 that was previously cut.

[0096] Additionally, a cutting mark 13a is formed on a predetermined dividing line 13. Furthermore, according to the instructions of the imaging instruction unit 64, a cutting result image 50 of the newly formed cutting mark 13a is acquired, and the measurement unit 62 calculates measurement values ​​for multiple measurement items of the newly formed cutting mark 13a.

[0097] At this time, if the measured value of at least one measurement item exceeds the allowable range, the notification unit 68 of the control unit 56 also issues an alarm through the display device 52, indicator light 54, speaker, etc., thereby notifying the operator that a cutting defect has occurred.

[0098] The notification unit 68 is implemented, for example, by a program stored in the memory 60. When the notification unit 68 causes the cutting device 2 to issue an alarm, the operator changes the cutting conditions such as changing the cutting tool 44, the machining feed rate, and the rotational speed of the cutting tool 44, and relaxes the allowable range of multiple measurement items, thereby clearing the alarm.

[0099] In this way, if the cutting device 2 fails to automatically eliminate cutting defects, it issues an alarm, thereby prompting the operator to eliminate the cause of the defects. Therefore, even inexperienced operators can call upon experienced operators to eliminate the defects. This reduces the likelihood of cutting defects occurring in subsequent cutting processes.

[0100] Next, refer to Figure 6 The cutting method using cutting device 2 will be explained. Figure 6 This is a flowchart of a cutting method using cutting device 2. When starting to cut a specified number of workpieces 11, the operator touches the "Fully Automatic Start" button displayed on the display device 52.

[0101] When multiple workpieces 11 are cut using the cutting device 2, if the first workpiece 11 is being cut (not in S2), the workpiece 11 is held and aligned using the holding surface 16a, and then the workpiece 11 is cut using the cutting tool 44 (cutting step S4).

[0102] If the workpiece 11 is cut sequentially along each predetermined dividing line 13 without meeting the cut inspection conditions (no in S6), the process returns to the cutting step S4. Conversely, if the cut inspection conditions are met (yes in S6), the process proceeds to the first cut inspection step S8.

[0103] In the first cut inspection process S8, the imaging instruction unit 64 causes the camera unit 46 to capture, for example, a cutting mark (first cutting mark) 13a that has just been processed, thereby obtaining a cutting result image 50, and the measurement unit 62 obtains the measurement values ​​of each measurement item based on the cutting result image 50.

[0104] Regarding cutting mark 13a, if all measured values ​​are within the allowable range (No in S10), proceed to S2. Conversely, regarding cutting mark 13a, if at least one measured value exceeds the allowable range (Yes in S10), proceed to finishing process S12.

[0105] In the dressing process S12, the dressing of the cutting tool 44 is automatically performed according to the instruction of the dressing instruction unit 66. Therefore, the possibility of cutting defects occurring in the subsequent cutting process S4 can be reduced.

[0106] After the dressing process S12, a confirmation cutting process S14 is performed. In the confirmation cutting process S14, a predetermined number (e.g., one) of cutting marks 13a are formed at positions different from the previously formed cutting marks 13a in the indexing feed direction or on a workpiece 11 different from the workpiece 11 on which cutting was previously performed.

[0107] Furthermore, by means of the instruction of the imaging instruction unit 64, the cutting result image 50 of the newly formed cutting mark 13a is obtained, and the measurement unit 62 calculates the measurement value of multiple measurement items of the newly formed cutting mark (second cutting mark) 13a (second cut inspection process S16).

[0108] Furthermore, if all measured values ​​are within the allowable range (no in S18), return to S2. Conversely, if at least one measured value exceeds the allowable range (yes in S18), the notification unit 68 causes the display device 52, indicator light 54, speaker, etc. to issue an alarm (notification process S20).

[0109] Upon entering notification step S20, control unit 56 temporarily stops the automatic cutting of workpiece 11 in cutting device 2. Furthermore, unless the cause of the malfunction is eliminated and the alarm is cleared, automatic cutting will not resume even if the "Fully Automatic Start" button is touched.

[0110] Therefore, if the alarm is not cleared (no in S22), the cutting ends. Conversely, if the alarm is cleared after the cause of the malfunction is eliminated (yes in S22), the control unit 56 activates the "Fully Automatic Start" button, so when the operator touches the "Fully Automatic Start" button, automatic cutting resumes (returning to S2).

[0111] In this way, if the cutting device 2 fails to automatically eliminate cutting defects, it issues an alarm, thereby prompting the operator to eliminate the cause of the cutting defects. Therefore, even inexperienced operators can call upon experienced operators to eliminate the cutting defects. This reduces the likelihood of cutting defects occurring in subsequent cutting operations S4.

[0112] In addition, the structure and method of the above embodiments can be appropriately modified and implemented as long as they do not depart from the scope of the purpose of the present invention.

Claims

1. A cutting device, characterized in that, The cutting device has the following features: A chuck table holds the workpiece in place; A cutting unit having a spindle, which uses a cutting tool mounted on the spindle to cut the workpiece held by the chuck table along a predetermined dividing line set on the workpiece; A camera unit that takes pictures of the workpiece held on the chuck table; A secondary chuck table that holds the dressing plate used for dressing the cutting tool; and The control unit has a memory and a processor. The control unit has: The shooting instruction unit causes the camera unit to capture the first cutting mark on the workpiece cut by the cutting unit and obtain a cutting result image; The measuring unit obtains measurement values ​​for multiple measurement items, each with an allowable range, pre-set for the cutting mark based on the first cutting mark in the cutting result image. The dressing indicator, without issuing an alarm, automatically dresses the cutting tool using the dressing plate held by the auxiliary chuck table if at least one of the multiple measurement items of the first cutting mark exceeds the allowable range; and The notification unit alerts the cutting device if the measured value of at least one of the multiple measurement items of the second cutting mark exceeds the allowable range. The second cutting mark is formed immediately after the dressing of the cutting tool, at a different position in the indexing feed direction from the first cutting mark, or on a different workpiece from the workpiece that was just cut.

2. The cutting device according to claim 1, characterized in that, These measurements include the width of the cut, the size of the defect, and the area of ​​the defect.

Images