Sample transport device and semiconductor apparatus

Abstract

The application discloses a sample transmission device for transmitting a sample in a cavity of a semiconductor device, comprising: a conveying table for placing the sample; a conveying rod for pushing and pulling the conveying table to transmit the sample in the cavity; and a constant force assembly, one end of the constant force assembly being connected to the conveying rod, the constant force assembly applying a constant pulling force to the conveying rod. The application also discloses a semiconductor device, comprising: a cavity and the sample transmission device. In the sample transmission device and the semiconductor device provided by the application, the constant force assembly is used to provide a constant pulling force to the conveying rod, thereby effectively preventing the stationary conveying rod and the conveying table from sliding, and effectively eliminating the hidden danger that the conveying table collides due to the sliding of the conveying rod.

Description

Technical Field

[0001] This invention relates to the field of semiconductor equipment technology, and more particularly to sample transfer devices and semiconductor equipment. Background Technology

[0002] Semiconductor equipment typically includes a preparation chamber and a main chamber. A sample transfer device delivers a sample from the preparation chamber to a mounting stage within the main chamber, where subsequent processing is performed on the sample. In the prior art, the sample transfer device includes a transfer rod and a transfer stage for placing the sample. The transfer rod is used to push and pull the transfer stage to transfer the sample within the chamber of the semiconductor equipment, for example, transferring the sample between the preparation chamber and the main chamber.

[0003] Taking the detection or measurement of a sample under vacuum as an example, first, the main chamber is evacuated. Then, the sample is placed on the transfer stage in the preparation chamber, and the preparation chamber is evacuated again. After the vacuum level in the preparation chamber meets the requirements, the valve located between the main chamber and the preparation chamber is opened to horizontally send the sample into the clamping stage located in the main chamber. Then, the sample rod is pulled out so that the sample and the transfer stage remain at the clamping stage. Finally, the valve is closed to complete the sample delivery process. The sampling process is the reverse of the sample delivery process. Taking the sample delivery process as an example, there is a need to keep the transfer rod stationary. For example, when evacuating the preparation chamber, the transfer rod and transfer stage need to be stationary.

[0004] The applicant points out the following problems with existing sample transfer devices: The inability to lock the stationary transfer rod allows it and the transfer platform to slide, creating a risk of collision. For example, when a sample is placed on the transfer platform within the preparation chamber, which is connected to the outside atmosphere, a pressure difference exists between the inside and outside of the preparation chamber after evacuation. Under atmospheric pressure, the transfer rod and transfer platform may slide towards the main chamber, posing a risk of collision (e.g., collision between the transfer platform and a valve or the main chamber), potentially damaging semiconductor equipment or causing the sample to fall off the transfer platform. Furthermore, when the stationary transfer rod is disturbed by external forces, the lack of locking mechanism also causes the transfer rod and transfer platform to slide, again presenting the aforementioned collision risk. Summary of the Invention

[0005] The purpose of this invention is to disclose a sample transfer device and a semiconductor device based thereon, in order to solve the problem of collisions occurring on the transfer stage in the prior art.

[0006] To achieve the above objectives, the present invention discloses a sample transfer device for transferring samples within a cavity of a semiconductor device, comprising:

[0007] A conveyor belt, used for placing samples;

[0008] A transfer rod is used to push and pull the transfer table to transfer samples within the cavity;

[0009] A constant force component, one end of which is connected to the conveyor rod, applies a constant tension to the conveyor rod.

[0010] As a further improvement of the present invention, the constant force applied to the transmission rod by the constant force component is greater than or equal to the pressure generated between the cavity and the atmosphere based on the difference in vacuum.

[0011] As a further improvement of the present invention, the cavity includes a preparation cavity and a main cavity, a valve is provided between the main cavity and the preparation cavity, and the constant tension is greater than or equal to the pressure between the preparation cavity and / or the main cavity and the atmosphere.

[0012] As a further improvement of the present invention, the constant force assembly includes a constant force spring, a rotating shaft and a base. The two ends of the constant force spring are respectively connected to the transmission rod and the rotating shaft. The constant force spring is wound on the rotating shaft and connected to the base through the rotating shaft.

[0013] As a further improvement of the present invention, the constant force component includes a traction line, a pulley, a base, and a lifting block. The two ends of the traction line are respectively connected to the transmission rod and the lifting block, and the traction line is connected to the base through the pulley.

[0014] As a further improvement of the present invention, the conveying rod is movably connected to the conveying platform so that one end of the conveying rod can be inserted into or pulled out of the conveying platform. A rotating member is provided at the end of the conveying rod away from the conveying platform. The rotating member can rotate about the axial direction of the conveying rod. One end of the constant force assembly is connected to the rotating member.

[0015] As a further improvement of the present invention, it also includes: a handle and a guide block disposed on the transmission rod, the rotating member being connected to the transmission rod through the guide block, the handle protruding from the guide block, and the handle driving the transmission rod to rotate circumferentially and / or move axially under the action of an external force.

[0016] As a further improvement of the present invention, the rotating component includes a bearing, the inner ring of which is fixed on the conveying rod, and the outer ring of which is connected to the constant force component; or the rotating component includes a ring, which is sleeved on and limited on the conveying rod, and the ring is connected to the constant force component.

[0017] As a further improvement of the present invention, it also includes: a dynamic sealing guide module, the dynamic sealing guide module comprising: at least one ring of sealing ring and linear sliding member coaxially surrounding the outer wall of the conveying rod, and a housing; the sealing ring and linear sliding member are housed within the housing, and the housing is connected to the cavity.

[0018] Based on the same inventive concept, the present invention also provides a semiconductor device, including: a cavity and the aforementioned sample transfer device.

[0019] Compared with the prior art, the beneficial effects of the present invention are:

[0020] Using a constant force component to provide constant tension to the conveyor rod effectively prevents the stationary conveyor rod and conveyor table from sliding, and effectively eliminates the potential danger of the conveyor table colliding due to the conveyor rod sliding. Attached Figure Description

[0021] Figure 1 The illustration shows a cross-sectional view of the sample transfer device of the present invention in one embodiment;

[0022] Figure 2 for Figure 1 A magnified view of a portion of region A in the middle;

[0023] Figure 3 for Figure 1 A 3D view of region A in the middle;

[0024] Figure 4 This is a perspective view of the constant force component in an embodiment of the present invention. Figure 4 The image only shows a portion of the constant force component. Detailed Implementation

[0025] The present invention will now be described in detail with reference to the embodiments shown in the accompanying drawings. However, it should be noted that these embodiments are not intended to limit the present invention. Equivalent changes or substitutions in function, method, or structure made by those skilled in the art based on these embodiments are all within the scope of protection of the present invention.

[0026] like Figure 1-4 As shown, this embodiment provides a sample transfer device for transferring a sample (e.g., a wafer) within a cavity 1 of a semiconductor device, comprising:

[0027] Conveyor 2 is used to place samples;

[0028] The conveyor rod 3 is used to push and pull the conveyor table 2 to transfer samples within the cavity 1;

[0029] A constant force component 4 is provided, one end of which is connected to the transmission rod 3, and the constant force component 4 applies a constant tension to the transmission rod 3.

[0030] The constant force component 4 provides a constant tension to the conveyor rod 3, which can solve the problem of the conveyor rod 3 sliding due to the lack of locking when it is stationary. For example, it can solve the problem of the conveyor rod 3 sliding due to external disturbance, thereby effectively preventing the stationary conveyor rod 3 and the conveyor platform 2 from sliding, and effectively eliminating the hidden danger of the conveyor rod 3 sliding and causing the conveyor platform 2 to collide.

[0031] For example, the constant force component 4 applies a constant pulling force to the conveyor rod 3 that is greater than or equal to the pressure generated by the vacuum difference between the cavity 1 and the atmosphere. Therefore, it can also solve the problem that the stationary conveyor rod 3 slides due to the pressure difference between the inside and outside of the cavity 1 caused by the vacuuming of the cavity 1 of the semiconductor device. This prevents the conveyor rod 3 and the conveyor table 2 from sliding and eliminates the risk of collision between the conveyor table 2 and the conveyor table 2.

[0032] For example, the cavity 1 includes a preparation cavity and a main cavity (not in...). Figure 1 (Distinguishing between the two), a valve is provided between the main cavity and the preparation cavity, which can be opened or closed, and the constant tension is greater than or equal to the pressure between the preparation cavity and / or the main cavity and the atmosphere.

[0033] For example, when the sample is placed on the transfer stage 2 in the preparation chamber, the preparation chamber is in communication with the outside atmosphere. After the preparation chamber is evacuated, there is a pressure difference between the inside and outside of the preparation chamber. Under the action of atmospheric pressure, the transfer rod 3 and the transfer stage 2 will slide towards the main chamber, which may cause the transfer stage 2 to collide (for example, the transfer stage 2 collides with the valve or the main chamber). However, by setting a constant pressure, such as a constant pressure greater than or equal to the pressure between the preparation chamber and the atmosphere, the pressure can be overcome and the aforementioned sliding and collision of the transfer stage 2 can be prevented.

[0034] The sample transfer device is used to perform a sample delivery process that transfers a sample from the preparation chamber to the main chamber, or a sample retrieval process that transfers a sample from the main chamber to the preparation chamber, so as to transfer a sample within the cavity 1 of the semiconductor device using the sample transfer device.

[0035] Exemplarily, the volume of the chamber formed by the preparation cavity is smaller than the volume of the chamber formed by the main cavity. A clamping stage (not shown) is provided in the main cavity to transfer samples to the transfer stage 2, receive samples delivered by the transfer stage 2, or remove the transfer stage 2 and samples from the main cavity. Various semiconductor-related processes, such as detection, measurement, or machining, are performed on the samples in the main cavity. Specifically, after the transfer stage 2 and the clamping stage are detachably fixed in alignment (in this embodiment, the transfer stage 2 and the clamping stage are snapped together), the transfer rod 3 is pulled out, causing the transfer stage 2 and the sample on it to remain at the clamping stage. After the semiconductor process of the sample is completed in the main cavity, the transfer rod 3 is re-aligned and fixed with the clamping stage, causing the transfer stage 2 to detach from the clamping stage to retrieve the sample.

[0036] refer to Figure 2-4 In this embodiment, the constant force component 4 includes a constant force spring 41, a rotating shaft 42, and a base 44. The two ends of the constant force spring 41 are respectively connected to the transmission rod 3 and the rotating shaft 42. The constant force spring 41 is wound around the rotating shaft 42 and is connected to the base 44 through the rotating shaft 42. A fixed seat 43 protrudes from the base 44. The rotating shaft 42 and the fixed seat 43 are rotatably connected. One end of the base 44 has the fixed seat 43 protruding from it, and the other end is connected to the housing of the cavity 1 and / or the sealing guide module 8 (described later). When the transmission rod 3 moves axially, it drives the constant force spring 41 to move axially, causing the wound constant force spring 41 to be stretched or retracted towards the rotating shaft 42.

[0037] For example, the constant force component 4 includes a traction line, a pulley, a base, and a lifting block (none of which are shown). The two ends of the traction line are connected to the transmission rod 3 and the lifting block, respectively. The traction line is connected to the base through the pulley, and the weight of the lifting block provides a constant tension to the transmission rod 3.

[0038] In this embodiment, the conveyor rod 3 is fixedly or movably connected to the conveyor platform 2. In this embodiment, the conveyor rod 3 is movably connected to the conveyor platform 2, allowing one end of the conveyor rod 3 to be inserted into or removed from the conveyor platform 2. After insertion into the conveyor platform 2, the conveyor rod 3 is forced to drive the conveyor platform 2 to transfer the sample.

[0039] For example, taking the conveyor 2 as stationary and only the conveyor rod 3 as moving, the conveyor rod 3 can be inserted into the conveyor 2 by axially moving it or by axially moving and circumferentially rotating it. The conveyor rod 3 can be removed from the conveyor 2 by axially moving it or by axially moving and circumferentially rotating it.

[0040] Exemplarily, the end of the conveyor rod 3 includes a positioning element (not shown). The conveyor platform 2 has an insertion cavity inside. Within the insertion cavity, the positioning element can rotate circumferentially and move axially to push and pull the conveyor platform 2 to transfer samples within the cavity 1. Specifically, inserting the conveyor rod 3 into the insertion cavity and using the conveyor rod 3 to push against one inner wall (the first inner wall) of the conveyor platform 2 can push the conveyor platform 2 forward axially. Rotating the conveyor rod 3 circumferentially by an angle changes the state of the conveyor rod 3, so that the positioning element at the end of the conveyor rod 3 contacts another inner wall (the second inner wall, which is opposite to the first inner wall) of the conveyor platform 2. Then, pulling the conveyor rod 3 can move the conveyor platform 2 backward axially.

[0041] The conveyor rod 3 can move axially or rotate circumferentially. When it rotates circumferentially, since the constant force component 4 is connected to the conveyor rod 3, it will cause the constant force component 4 to rotate, which may lead to entanglement and twisting of the constant force component 4, potentially damaging it and making it difficult for the constant force component 4 to continuously provide a constant tensile force. To solve this problem, in this embodiment, reference is made to... Figure 2 and Figure 3 A rotating component 5 is provided at the end of the conveyor rod 3 furthest from the conveyor platform 2. The rotating component 5 is capable of rotating about the axial direction of the conveyor rod 3. One end of the constant force assembly 4 is connected to the rotating component 5. When the conveyor rod 3 is driven to rotate circumferentially, the rotating component 5 remains relatively stationary with respect to the conveyor rod 3, preventing the constant force assembly 4 from rotating circumferentially. This avoids entanglement and twisting of the constant force assembly 4 and subsequent damage. In this embodiment, by providing the rotating component 5, entanglement and twisting of the constant force spring 41 can be avoided, thus preventing its damage.

[0042] refer to Figure 2 and Figure 3 The sample transfer device further includes a handle 6 and a guide block 7 disposed on the transfer rod 3. The rotating member 5 is connected to the transfer rod 3 through the guide block 7. The handle 6 protrudes from the guide block 7. Under the action of external force, the handle 6 drives the transfer rod 3 to rotate circumferentially and / or move axially.

[0043] In this embodiment, the guide block 7 provides guidance for the conveying rod 3. The guide block 7 can be in contact with the surface of the base 44 or form a gap with the surface of the base 44, both of which can achieve the guiding function. In addition, the guide block 7 can curb the possible pitching of the conveying rod 3 relative to the cavity 1, which can effectively reduce the wear of the conveying rod 3 and improve the service life of the conveying rod 3.

[0044] For example, the rotating component 5 is selected from a bearing or other prior art device capable of free rotation and connection to the constant force assembly 4. For instance, the rotating component 5 includes a bearing, the inner ring of which is fixed to the transmission rod 3, and the outer ring of which is connected to the constant force assembly 4.

[0045] In this embodiment, reference Figure 2 and Figure 3 The rotating component 5 includes a ring, which is sleeved and limited on the transmission rod 3. The ring is connected to the constant force component 4. To facilitate connection with the constant force component 4, a housing (e.g., a rectangular housing) can be fixed outside the ring. The ring is connected to the constant force component 4 through the housing.

[0046] In this embodiment, reference Figure 2 and Figure 3 The ring is mounted on the conveyor rod 3 via the guide block 7 and is limited by the guide block 7.

[0047] In this embodiment, the sample transfer device further includes a dynamic sealing guide module 8, which includes: at least one ring of sealing ring and linear sliding member (neither shown) coaxially surrounding the outer wall of the transfer rod, and a housing; the sealing ring and linear sliding member are housed in the housing, and the housing is connected to the cavity 1.

[0048] Exemplarily, the dynamic sealing guide module 8 includes a sealing module and a guide module. The sealing module includes a housing and at least one sealing element, and the guide module includes a linear sliding element. The sealing element and the linear sliding element surround the outer wall of the conveyor rod 3 and are housed within the housing, which is connected to the preparation cavity. Preferably, the dynamic sealing guide module 8 includes two spaced-apart sealing elements, each including an O-ring. Two grooves for embedding the sealing elements are formed on the inner wall of the housing.

[0049] By setting a linear sliding member to constrain the conveyor rod 3, the conveyor rod 3 moves linearly along its axial direction, effectively solving the pitching phenomenon that exists when the conveyor rod 3 moves axially. On the one hand, it effectively prevents the generation of particles due to friction between the conveyor rod 3 and the cavity 1 caused by the pitching of the conveyor rod 3 during repeated axial movements, effectively reducing the wear of the conveyor rod 3 and improving its service life. On the other hand, it improves the accuracy of the conveyor rod 3 in performing the sample feeding and retrieval process.

[0050] For example, a linear slider may include a linear bearing or a linear guide slider.

[0051] This embodiment also provides a semiconductor device, including: a cavity 1 and the sample transfer device.

[0052] For example, cavity 1 includes a main cavity and a preparation cavity, and the sample is transferred between the preparation cavity and the main cavity through the sample transfer device. A gate valve is provided between the main cavity and the preparation cavity.

[0053] For example, the semiconductor device may be a semiconductor film thickness measurement device or a semiconductor defect detection device, and the sample may be a semiconductor sample (such as a wafer), but is not limited thereto. For example, when the semiconductor device is a FIB-SEM (Focused Ion Beam Scanning Electron Microscope), the sample may also be a non-semiconductor sample (such as a biological sample).

[0054] In this embodiment, a movable valve that can be opened or closed is provided between the main cavity and the preparation cavity. The volume of the chamber formed by the preparation cavity is smaller than the volume of the chamber formed by the main cavity. A clamping stage is provided in the main cavity. The clamping stage cooperates with the transfer stage to receive or remove the sample sent by the transfer stage. Various processes based on semiconductor manufacturing processes are performed on the sample in the main cavity.

[0055] The detailed descriptions listed above are merely specific descriptions of feasible embodiments of the present invention, and are not intended to limit the scope of protection of the present invention. All equivalent embodiments or modifications made without departing from the spirit of the present invention should be included within the scope of protection of the present invention.

Claims

1. A sample transfer device for transferring a sample within a cavity of a semiconductor device, characterized in that, include: A conveyor belt, used for placing samples; A transfer rod is used to push and pull the transfer table to transfer samples within the cavity; A constant force component, one end of which is connected to the conveyor rod, applies a constant tension to the conveyor rod, and a rotating component is provided on the conveyor rod, which can rotate about the axis of the conveyor rod. One end of the constant force component is connected to the rotating component, and the rotating component remains relatively stationary with respect to the conveyor rod. The constant force applied to the transmission rod by the constant force component is greater than or equal to the pressure generated between the cavity and the atmosphere based on the difference in vacuum.

2. The sample transfer device according to claim 1, characterized in that, The cavity includes a preparation cavity and a main cavity, and a valve is provided between the main cavity and the preparation cavity. The constant tension is greater than or equal to the pressure between the preparation cavity and / or the main cavity and the atmosphere.

3. The sample transfer device according to claim 1, characterized in that, The constant force assembly includes a constant force spring, a rotating shaft, and a base. The two ends of the constant force spring are respectively connected to the transmission rod and the rotating shaft. The constant force spring is wound around the rotating shaft and connected to the base through the rotating shaft.

4. The sample transfer device according to claim 1, characterized in that, The constant force assembly includes a traction line, a pulley, a base, and a lifting block. The two ends of the traction line are connected to the transmission rod and the lifting block, respectively, and the traction line is connected to the base through the pulley.

5. The sample transfer device according to claim 1, characterized in that, The conveying rod is movably connected to the conveying platform so that one end of the conveying rod can be inserted into or pulled out of the conveying platform, and a rotating component is provided at the end of the conveying rod away from the conveying platform.

6. The sample transfer device according to claim 5, characterized in that, Also includes: The handle and the guide block disposed on the conveying rod, the rotating member is connected to the conveying rod through the guide block, the handle protrudes from the guide block, and the handle drives the conveying rod to rotate circumferentially and / or move axially under the action of external force.

7. The sample transfer device according to claim 5 or 6, characterized in that, The rotating component includes a bearing, the inner ring of which is fixed on the conveying rod, and the outer ring of which is connected to the constant force component; or the rotating component includes a ring, which is sleeved on and limited on the conveying rod, and the ring is connected to the constant force component.

8. The sample transfer device according to claim 1, characterized in that, Also includes: A dynamic sealing guide module, comprising: at least one ring of sealing elements and linear sliding elements coaxially arranged and surrounding the outer wall of the conveyor rod, and a housing; The sealing ring and the linear sliding member are housed within the housing, and the housing is connected to the cavity.

9. A semiconductor device, characterized in that, include: The cavity and the sample transfer device as described in any one of claims 1 to 8.

Images