Manufacturing apparatus of display device
Patent Information
- Application Number
- CN202110185217.4
- Authority / Receiving Office
- CN · China
- Patent Type
- Patents(China)
- Current Assignee / Owner
- Priority Date
- 2020-10-23
- Filing Date
- 2021-02-10
- Publication Date
- 2026-11-03
- Estimated Expiration
- 2041-02-10
AI Technical Summary
In existing inkjet printing processes, poor or large deviations in the ink curvature within the nozzle section make it difficult to eject the precise volume of ink to the precise location, affecting the manufacturing quality and yield of the display device.
By setting a measuring unit inside the nozzle section, the two-dimensional and three-dimensional shapes of the ink are accurately measured by scanning the surface of the nozzle section with point beams and line beams. The shape of the ink inside the nozzle section is judged and adjusted by the control unit to ensure the accuracy and stability of ink dispensing.
This improves the precision and stability of inkjet printing technology, thereby enhancing the manufacturing quality and yield of display devices.
Smart Images

Figure CN114497428B_ABST
Abstract
Description
Technical Field
[0001] Embodiments of the present invention relate to a manufacturing apparatus for a display device, and more specifically, to a manufacturing apparatus for a display device that improves the manufacturing quality of the display device. Background Technology
[0002] Mobile electronic devices are widely used. Besides small electronic devices such as mobile phones, tablet computers have recently become widely used as mobile electronic devices.
[0003] In order to provide users with visual information such as images or videos, these mobile electronic devices include display devices. Recently, the proportion of display devices in electronic devices has been gradually increasing, and structures that can be bent at specified angles from a flat state are also being developed.
[0004] Additionally, the display device may include multiple layers formed through various processes. For example, the display device may include a layer made of organic material, which can be formed by a process such as inkjet printing, in which organic ink is ejected onto a substrate. To achieve precise images in the display device, precise volumes of ink need to be ejected to precise locations on the substrate.
[0005] An apparatus for manufacturing a display device using inkjet printing technology may have a nozzle section for dispensing ink, within which an ink meniscus is formed. If the ink meniscus is poor or if there is a large deviation between the ink menisci formed in each of the multiple nozzle sections, there is a problem that it is difficult to dispense an accurate volume of ink to a precise location. Summary of the Invention
[0006] The present invention addresses various problems, including those described above, and aims to provide a manufacturing apparatus for a display device that improves the manufacturing quality and yield of the display device by accurately measuring the shape of the ink within the nozzle section and incorporating the measurement results into the manufacturing process of the display device. However, this subject matter is exemplary and does not limit the scope of the invention.
[0007] According to one aspect of the present invention, a manufacturing apparatus for a display device is provided, the manufacturing apparatus comprising: an ink dispensing section having a nozzle portion for dispensing ink; and a measuring section disposed at a distance from a first surface of the ink dispensing section, the nozzle portion being disposed on the first surface of the ink dispensing section, the measuring section obtaining the surface shape of the ink within the nozzle portion by scanning the first surface of the ink dispensing section along a first direction.
[0008] According to the manufacturing apparatus of the display device in this embodiment, the ink dispensing section may include a plurality of nozzle sections, which are arranged along the first direction on the first surface of the ink dispensing section.
[0009] According to this embodiment, a first moving part for moving the measuring part along the first direction may be further included.
[0010] According to this embodiment, a second moving part may be further included for moving the measuring part along a second direction intersecting the first direction.
[0011] According to this embodiment, the measuring unit can irradiate a spot beam toward the first surface of the ink ejection unit along a third direction intersecting the first direction.
[0012] According to this embodiment, the measuring unit can obtain the two-dimensional contour of the ink through the dot beam, and obtain the two-dimensional surface shape of the ink based on the two-dimensional contour.
[0013] According to this embodiment, the measuring unit can irradiate a line beam toward the first surface of the ink dispensing unit along a third direction intersecting the first direction, and the line beam can extend along a second direction intersecting the first direction and the third direction.
[0014] According to this embodiment, the measuring unit can obtain multiple two-dimensional contours of the ink through the line beam, and obtain the three-dimensional surface shape of the ink based on the multiple two-dimensional contours.
[0015] According to this embodiment, the scanning area of the measuring unit may include the area where the nozzle is disposed and the surrounding area of the nozzle.
[0016] According to this embodiment, a control unit may be further included, which is electrically connected to the measuring unit, and determines whether the shape of the ink is abnormal based on the surface shape of the ink measured by the measuring unit.
[0017] Other aspects, features, and advantages, in addition to the foregoing, will become clear from the following detailed embodiments, claims, and drawings for carrying out the invention.
[0018] This general and specific aspect can be implemented through a system, method, computer program, or any combination of system, method, and computer program.
[0019] According to an embodiment of the present invention configured as described above, the accuracy and stability of ink ejection can be improved by precisely measuring the shape of the ink within the nozzle section and reflecting the measurement results in the inkjet printing process, thereby enhancing process quality. Thus, a display device manufacturing apparatus and a display device manufacturing method can be realized that improve the manufacturing quality and yield of the display device. Of course, the scope of the present invention is not limited to this effect. Attached Figure Description
[0020] Figure 1 This is a perspective view of a manufacturing apparatus for a display device according to an embodiment of the present invention.
[0021] Figure 2 This is a partial bottom perspective view schematically illustrating a manufacturing apparatus for a display device according to an embodiment of the present invention.
[0022] Figure 3 This is a partial bottom view schematically illustrating a manufacturing apparatus for a display device according to an embodiment of the present invention.
[0023] Figure 4 This is a partial cross-sectional view schematically illustrating a manufacturing apparatus for a display device according to an embodiment of the present invention.
[0024] Figure 5 This is a partial bottom perspective view schematically illustrating a manufacturing apparatus for a display device according to another embodiment of the present invention.
[0025] Figure 6 This is a partial bottom view schematically illustrating a manufacturing apparatus for a display device according to another embodiment of the present invention.
[0026] Figure 7 This is a perspective view schematically illustrating the shape of the ink surface measured by a manufacturing apparatus for a display device according to another embodiment of the present invention.
[0027] Figure 8 This is a partial bottom view schematically illustrating a manufacturing apparatus for a display device according to another embodiment of the present invention.
[0028] Figure 9a and Figure 9b These are partial cross-sectional views of a manufacturing apparatus for a display device, schematically illustrating an embodiment of the present invention.
[0029] Figure 10 This is a schematic top view illustrating a display device manufactured according to an embodiment of the present invention.
[0030] Figure 11 This is a schematic cross-sectional view illustrating a display device manufactured according to an embodiment of the present invention.
[0031] Explanation of reference numerals in the attached figures
[0032] 1. Manufacturing apparatus for display devices
[0033] 10 Support section
[0034] 20 First Moving Unit
[0035] 30 Second Moving Section
[0036] 40 Third Moving Section
[0037] 50 Ink Ejection Section
[0038] 60 Fourth Moving Section
[0039] 70 Fifth Mobile Department
[0040] 80 Measurement Department
[0041] 90 Control Department
[0042] NP nozzle section
[0043] Ink ink
[0044] SB dot beam
[0045] LB line beam Detailed Implementation
[0046] This invention can be modified in various ways and has multiple embodiments. Specific embodiments are schematically illustrated in the accompanying drawings, and detailed descriptions follow. The effects and features of the invention, as well as the methods for achieving these effects and features, will become clear with reference to the accompanying drawings and the embodiments described in detail below. However, this invention is not limited to the embodiments disclosed below, but can be implemented in various forms.
[0047] Hereinafter, embodiments of the present invention will be described in detail with reference to the accompanying drawings. When describing with reference to the accompanying drawings, the same or corresponding structural elements will be referred to by the same reference numerals, and repeated descriptions of the structural elements will be omitted.
[0048] In the following embodiments, the terms "first," "second," etc., are not intended to be limiting, but are used for the purpose of distinguishing one structural element from other structural elements.
[0049] In the following embodiments, the expressions relating to the singular form will be used unless the context explicitly indicates a different meaning.
[0050] The singular form of the expression includes the plural form.
[0051] In the following embodiments, terms such as "comprising" or "having" indicate the presence of features or structural elements described in the specification, and are not intended to preclude the possibility of the addition of more than one other feature or structural element.
[0052] In the following embodiments, when it is mentioned that a membrane, region, structural element, or other part is located "above" or "on" another part, this includes not only the case where it is "directly" above the other part, but also the case where there are other membranes, regions, structural elements, etc. in between.
[0053] For ease of explanation, the size of structural elements may be exaggerated or reduced in the accompanying drawings. For example, the size and thickness of each structure shown in the drawings are arbitrarily depicted for ease of explanation; therefore, the present invention is not necessarily limited to the content shown in the drawings.
[0054] Where an embodiment can be implemented in different forms, the specific process sequence can also be implemented in a sequence different from that described. For example, two steps described consecutively can be performed substantially simultaneously, or they can be performed in the reverse order of the described sequence.
[0055] In this specification, "A and / or B" means either A or B, or A and B. Furthermore, "at least one of A and B" means either A or B, or A and B.
[0056] In the following embodiments, when referring to the interconnection of membranes, regions, structural elements, etc., it also includes cases where the membranes, regions, structural elements are directly connected, or / and cases where they are indirectly connected by having other membranes, regions, structural elements in between. For example, in this specification, when referring to the electrical connection of membranes, regions, structural elements, etc., it indicates cases where the membranes, regions, structural elements, etc. are directly electrically connected, and / or cases where they are indirectly electrically connected by having other membranes, regions, structural elements, etc. in between.
[0057] The x-axis, y-axis, and z-axis are not limited to the three axes of a rectangular coordinate system; they can be interpreted in a broader sense that includes these three axes. For example, the x-axis, y-axis, and z-axis can be orthogonal to each other, but they can also refer to different directions that are not orthogonal to each other.
[0058] Figure 1 This is a perspective view of a manufacturing apparatus for a display device according to an embodiment of the present invention.
[0059] Reference Figure 1 The manufacturing apparatus 1 for the display device may include a support unit 10, a first moving part 20, a second moving part 30, a third moving part 40, an ink dispensing part 50, a fourth moving part 60, a fifth moving part 70, a measuring part 80, and a control part 90.
[0060] The first moving part 20, the second moving part 30, the third moving part 40, the ink dispensing part 50, the fourth moving part 60, the fifth moving part 70, the measuring part 80, and the control part 90 may be disposed on the support part 10. The support part 10 may have a plane defined by a first direction DR1 and a second direction DR2 intersecting the first direction DR1. The support part 10 may include a worktable 11, a first guide part 12, and a second guide part 13.
[0061] The worktable 11 is disposed on the support 10 and may have a plane defined by a first direction DR1 and a second direction DR2. A display substrate DS may be placed on the worktable 11, and the worktable 11 may include alignment marks (not shown) for aligning the display substrate DS. Here, the display substrate DS may be a part of a display device being manufactured, or it may be a target for ink ejection from the ink ejection unit 50.
[0062] The first guide portion 12 may be disposed on the support portion 10 and disposed on both sides at a distance from each other across the worktable 11. For example, two first guide portions 12 may be provided, which may be disposed at a distance from each other along the first direction DR1. The first guide portions 12 may extend along the second direction DR2, and the extension length of each first guide portion 12 along the second direction DR2 may be at least longer than the side length of the display substrate DS. In this case, the side length of the display substrate DS is the length measured along the second direction DR2.
[0063] The first guide portion 12 can guide the first moving portion 20 to move linearly along the extension direction of the first guide portion 12. The first guide portion 12 may, for example, include a linear motion rail.
[0064] The second guide portion 13 may be disposed on the support portion 10 and between the first guide portions 12. For example, two second guide portions 13 may be provided, which may be spaced apart along the first direction DR1. In this case, in order to arrange the second guide portions 13 between the first guide portions 12, the spacing between the second guide portions 13 may be less than the spacing between the first guide portions 12. The second guide portions 13 may extend along the second direction DR2, and the extension length of each second guide portion 13 along the second direction DR2 may be at least longer than the side length of the ink dispensing portion 50. In this case, the side length of the ink dispensing portion 50 is the length measured along the second direction DR2.
[0065] The second guide section 13 can guide the fourth moving section 60 to move linearly along the extension direction of the second guide section 13. The second guide section 13 may, for example, include a linear motion rail.
[0066] The first moving part 20 can reciprocate linearly along the second direction DR2. The first moving part 20 may include a support member 20a and a horizontal member 20b. Figure 1 The support member 20a and the horizontal member 20b are shown to have a cuboid rod shape, but the shape of the support member 20a and the horizontal member 20b is not limited to this.
[0067] The support member 20a of the first moving part 20 can extend along a third direction DR3 that intersects the first direction DR1 and the second direction DR2, respectively. For example, two support members 20a may be provided, which can be disposed on both sides of the worktable 11. The support members 20a can move along the extension direction of the first guide part 12, i.e., the second direction DR2. In one embodiment, the support member 20a can perform manual linear movement, or it can perform automatic linear movement by incorporating a motor, cylinder, etc. For example, the support member 20a may include a linear motion block that moves along a linear motion track to perform automatic linear movement.
[0068] The horizontal member 20b of the first moving part 20 can extend along a first direction DR1 between the support members 20a. The two ends of the horizontal member 20b can be connected to the upper part of each support member 20a. The horizontal member 20b may include a first groove 21 extending along the extending direction of the horizontal member 20b, i.e., the first direction DR1. The first groove 21 can be disposed on one side surface of the horizontal member 20b. For example, the first groove 21 can be disposed on the side surface of the first moving part 20 facing the second direction DR2. The first groove 21 can guide the second moving part 30 to perform linear reciprocating motion along the extending direction of the first groove 21.
[0069] The second moving part 30 can move linearly along the first direction DR1. The second moving part 30 can be connected to one side of the horizontal member 20b of the first moving part 20, for example, it can be disposed on the side of the first moving part 20 where the first groove 21 is disposed. The second moving part 30 is connected to the first groove 21 and can move linearly back and forth along the first groove 21 in the first direction DR1. As one embodiment, the second moving part 30 may include a linear motor, etc.
[0070] The third moving part 40 may be disposed on one side of the second moving part 30 and may reciprocate linearly along the third direction DR3. For example, the third moving part 40 may be disposed on the lower surface of the second moving part 30. Here, the lower surface of the second moving part 30 may be the surface of the second moving part 30 facing the worktable 11. As an embodiment, the third moving part 40 may include an air compressor cylinder, etc.
[0071] The ink dispensing section 50 may be disposed on the lower surface of the third moving section 40. The ink dispensing section 50 may move together with the first moving section 20, the second moving section 30 and the third moving section 40. That is, the ink dispensing section 50 may move along the first to third directions DR1, DR2 and DR3.
[0072] The ink ejection section 50 ejects droplets of ink Ink to the display substrate DS along the third direction DR3. In this case, the ink Ink can be a high-molecular-weight or low-molecular-weight organic material corresponding to the light-emitting layer of the organic light-emitting display device. As another embodiment, the ink Ink can be liquid crystal, alignment liquid, or a red, green, or blue liquid mixed with pigment particles in a solvent. As yet another embodiment, the ink Ink can include a solution containing inorganic particles such as quantum dots. The ink ejection section 50 may include a nozzle section (not shown) through which droplets of ink Ink are ejected. The nozzle section may be disposed on one side of the ink ejection section 50, for example, on the lower surface of the ink ejection section 50.
[0073] The fourth moving part 60 can perform linear reciprocating movement along the second direction DR2. In one embodiment, the fourth moving part 60 can perform manual linear movement, or it can be equipped with a motor, cylinder, etc., to perform automatic linear movement. For example, the fourth moving part 60 may include a linear motion block that moves along a linear motion track to perform automatic linear movement.
[0074] The fourth moving part 60 may include a second groove 61 extending along the first direction DR1. The second groove 61 may be disposed on the upper surface of the fourth moving part 60. The second groove 61 may guide the fifth moving part 70 to perform linear reciprocating motion along the extending direction of the second groove 61.
[0075] The fifth moving part 70 can reciprocate linearly along the first direction DR1. The fifth moving part 70 can be connected to the upper surface of the fourth moving part 60. The fifth moving part 70 can be connected to the second groove 61 of the fourth moving part 60, and can move linearly along the second groove 61 in the first direction DR1. As an embodiment, the fifth moving part 70 may include a linear motor or the like.
[0076] The measuring unit 80 may be disposed on the fifth moving part 70. The measuring unit 80 can measure the surface shape of one side (e.g., the lower surface) of the ink dispensing part 50 equipped with the nozzle by scanning that side. Here, the surface shape may be a two-dimensional surface shape or a three-dimensional surface shape.
[0077] As one embodiment, the measuring unit 80 can be a non-contact displacement sensor utilizing a beam. The beam can be a laser beam. The measuring unit 80 can obtain the position information of the target surface by emitting the beam towards the target and receiving the beam reflected from the target surface. For example, the position information of the target surface may include information about the distance between the measuring unit 80 and the target surface. Here, the target surface can be the lower surface of the ink dispensing unit 50. The measuring unit 80 can use the aforementioned position information to obtain the contour of the lower surface of the ink dispensing unit 50. Furthermore, the measuring unit 80 can obtain the surface shape of the lower surface of the ink dispensing unit 50 based on the aforementioned contour. Related content will be referred to later. Figures 2 to 7 Describe it.
[0078] As an optional embodiment, a camera unit (CMR) may be provided on the fifth moving part 70. The camera unit (CMR) can be moved together with the measuring part 80 by the fourth moving part 60 and the fifth moving part 70 along the first direction DR1 and the second direction DR2. The camera unit (CMR) can obtain a video image by photographing the lower surface of the ink dispensing part 50. The video image can be used to control the position of the measuring part 80 so that the beam emitted from the measuring part 80 can illuminate the desired position on the target and scan the desired area.
[0079] The control unit 90 is electrically connected to the first moving part 20, the second moving part 30, and the third moving part 40, and can control the position and movement of the first to third moving parts 20, 30, and 40. Furthermore, the control unit 90 is electrically connected to the fourth moving part 60 and the fifth moving part 70, and can control the position and movement of the fourth and fifth moving parts 60 and 70. The control unit 90 is also electrically connected to the ink dispensing part 50, and can control the ink dispensing time and ink dispensing volume, etc.
[0080] Furthermore, the control unit 90 is electrically connected to the measuring unit 80, and can obtain and analyze information related to the surface shape of the lower surface of the ink dispensing section 50 as measured by the measuring unit 80. The control unit 90 can determine whether the shape of the ink ink within the nozzle section of the ink dispensing section 50 is abnormal based on the aforementioned surface shape information. Here, the shape of the ink ink may include its form, position, volume, size, etc. If it is determined that the shape of the ink ink is abnormal, the user can be informed to stop ink dispensing from the ink dispensing section 50, or the amount of ink ink within the nozzle section can be adjusted. This improves process quality in the ink dispensing process, thereby improving the manufacturing quality and yield of the display device.
[0081] Furthermore, the control unit 90 is electrically connected to the camera unit CMR, enabling it to acquire and analyze video images of the lower surface of the ink dispensing unit 50 captured by the camera unit CMR. Based on these video images, the control unit 90 controls the movement of the fourth and fifth moving units 60 and 70, thereby controlling the position of the measuring unit 80 and allowing it to scan the desired area of the lower surface of the ink dispensing unit 50.
[0082] Figure 2 This is a partial bottom perspective view schematically illustrating a manufacturing apparatus for a display device according to an embodiment of the present invention. Figure 3 This is a partial bottom view schematically illustrating a manufacturing apparatus for a display device according to an embodiment of the present invention.
[0083] exist Figure 2 In the diagram, the structural elements surrounding the ink dispensing section 50 and the measuring section 80 are shown together. Figure 3 The diagram shows the ink in the first surface S1 of the ink ejection section 50 and the ink in the nozzle section NP. (Compared to the previously referenced...) Figure 1 Structural elements that are the same or corresponding to those described use the same reference numerals, and related redundant descriptions are omitted.
[0084] Reference Figure 2 and Figure 3 The ink dispensing section 50 may include at least one nozzle section NP for dispensing ink Ink. Within each nozzle section NP, there may be a nozzle for dispensing ink Ink onto the display substrate DS (refer to...). Figure 1 The ink that is expelled.
[0085] The nozzle section NP may be disposed on the first surface S1 of the ink dispensing section 50. The first surface S1 of the ink dispensing section 50 may be the surface of the ink dispensing section 50 facing the measuring section 80, for example, the first surface S1 may be the lower surface of the ink dispensing section 50. It can be understood that the first surface S1 of the ink dispensing section 50 includes the surface of the ink Ink inside the nozzle section NP.
[0086] As one embodiment, the ink dispensing section 50 may have a plurality of nozzle sections NP arranged along a first direction DR1 on the first surface S1. Figure 3 The ink ejection section 50 shown in the figure has first to fifth nozzle sections NP1, NP2, NP3, NP4, and NP5, but the present invention is not limited to a specific number of nozzle sections NP.
[0087] The measuring unit 80 may be disposed at a distance from the first surface S1 of the ink dispensing unit 50. For example, the measuring unit 80 may be disposed at a distance from the first surface S1 of the ink dispensing unit 50 along a third direction DR3. The measuring unit 80 may irradiate a beam onto the first surface S1 of the ink dispensing unit 50 along the third direction DR3.
[0088] The measuring unit 80 can scan the first surface S1 of the ink dispensing unit 50 along the first direction DR1. That is, the first direction DR1 can be defined as the scanning direction. In order to scan along the first direction DR1, either the ink dispensing unit 50 or the measuring unit 80 can move along the first direction DR1. As mentioned above, this can be achieved by the second moving unit 30 (see reference DR1). Figure 1 The ink ejection section 50 is moved along the first direction DR1, and the measuring section 80 can be moved along the first direction DR1 via the fifth moving section 70. For ease of explanation, the case where the measuring section 80 is moved along the first direction DR1 via the fifth moving section 70 will be described below.
[0089] In one embodiment, to scan the first surface S1 of the ink dispensing section 50, the measuring unit 80 may irradiate a spot beam SB onto the first surface S1 of the ink dispensing section 50 along a third direction DR3. The spot beam SB may be a point-shaped beam. The spot beam SB may be reflected on the first surface S1 of the ink dispensing section 50 and then propagate towards the measuring unit 80. The measuring unit 80 may receive the reflected spot beam SB to obtain position information of the first surface S1 of the ink dispensing section 50. In one embodiment, the measuring unit 80 may include a point displacement sensor, such as a laser displacement sensor or a confocal displacement sensor.
[0090] As one embodiment, the measuring unit 80 can measure the surface shape of the ink Ink within the nozzle section NP by scanning the first surface S1 of the ink dispensing section 50 along the first direction DR1. Specifically, the measuring unit 80 moves along the first direction DR1 and obtains the position information of the first surface S1 through a spot beam SB, thereby obtaining a two-dimensional profile of the first surface S1. Here, the two-dimensional profile may refer to the position information along the third direction DR3 in the first direction DR1. The two-dimensional profile of the first surface S1 may include the two-dimensional profile of the ink Ink, so the measuring unit 80 can obtain the two-dimensional surface shape of the ink Ink based on the aforementioned two-dimensional profile of the ink Ink.
[0091] Specifically, the spot beam SB can be moved along the scanning direction, i.e., the first direction DR1, on the first surface S1 to form a scanning path for the spot beam SB. The scanning path can traverse the nozzle section NP and can overlap with the ink Ink within the nozzle section NP. Therefore, the position information of the first surface S1 obtained by the measuring unit 80 scanning the first surface S1 of the ink dispensing section 50 can further include the surface position information of the ink Ink within the nozzle section NP. As a result, the measuring unit 80 can obtain a two-dimensional profile of the first surface S1 including the two-dimensional profile of the ink Ink, and can obtain the two-dimensional surface shape of the ink Ink based on the aforementioned two-dimensional profile of the ink Ink.
[0092] As an optional embodiment, a camera unit CMR may be provided, disposed on the fifth moving part 70 and on one side of the measuring part 80. For example, the camera unit CMR and the measuring part 80 may be arranged along the first direction DR1. The camera unit CMR can obtain a video image by capturing the first surface S1 of the ink dispensing part 50. The video image may include not only the position of the nozzle part NP on the first surface S1, but also information related to the position illuminated by the dot beam SB. Therefore, the video image can be used when aligning the measuring part 80 and the ink dispensing part 50 such that the scanning path of the dot beam SB crosses the nozzle part NP. For example, the video image is transmitted to the control unit 90 (see reference 1). Figure 1 The control unit 90 can control the position of the measuring unit 80 so that the scanning path of the spot beam SB overlaps with the ink Ink in the nozzle unit NP.
[0093] Figure 4 This is a partial cross-sectional view schematically illustrating a manufacturing apparatus for a display device according to an embodiment of the present invention. Figure 4 The diagram shows a cross-section of the ink dispensing section 50 with a nozzle section NP and the ink ink inside the nozzle section NP.
[0094] Reference Figure 4 The two-dimensional surface shape SS of the first surface S1 of the ink ejection section 50, measured by the measuring unit 80, may include the two-dimensional surface shape IS of the ink Ink. (Refer to...) Figure 2 and Figure 3 As described above, the two-dimensional surface shape SS of the first surface S1 can be obtained by scanning the two-dimensional contour of the first surface S1 along the first direction DR1 using the point beam SB. Figure 4 The two-dimensional surface shape SS of the first face S1 is represented by a thick line.
[0095] The nozzle section NP can be filled with ink (Ink), which forms a meniscus. When liquid is injected into the capillary, due to capillary action, the liquid surface inside the capillary may be higher or lower than the free surface, forming a convex or concave curved surface; this condition is called a meniscus. The surface of the ink (Ink) inside the nozzle section NP is formed by factors such as the cohesive force and specific gravity of the ink (Ink), the affinity between the ink (Ink) and the nozzle section NP, and the pressure difference between the ink (Ink) inside the nozzle section NP and the outside of the nozzle section NP. If the meniscus of the ink (Ink) is poor or the deviation of the meniscus of each nozzle section NP is large, the dispensing accuracy of the ink dispensing section 50 may be reduced. Therefore, it may be necessary to determine whether the shape of the ink (Ink) inside the nozzle section NP is abnormal.
[0096] According to an embodiment of the present invention, the control unit 90 (refer to) measures the two-dimensional surface shape IS of the ink Ink obtained by the measuring unit 80. Figure 1 The control unit 90 can determine whether the shape of the ink in the nozzle section NP is abnormal. Based on the above determination result, the control unit 90 can instruct the user to stop the ink dispensing from the ink dispensing section 50, or adjust the amount of ink in the nozzle section NP. This improves the process quality in the ink dispensing process, thereby improving the manufacturing quality and yield of the display device.
[0097] Figure 5 This is a partial bottom perspective view schematically illustrating a manufacturing apparatus for a display device according to another embodiment of the present invention. Figure 6 This is a partial bottom view schematically illustrating a manufacturing apparatus for a display device according to another embodiment of the present invention.
[0098] exist Figure 5 In the diagram, the structural elements surrounding the ink dispensing section 50 and the measuring section 80 are shown together. Figure 6 The diagram shows the ink in the first surface S1 of the ink ejection section 50 and the ink in the nozzle section NP. (Omitted from previous references.) Figure 2 and Figure 3 The content described herein is repetitive; the following explanation will focus on the differences.
[0099] Reference Figure 5 and Figure 6 In order to scan the first surface S1 of the ink dispensing section 50, the measuring unit 80 may irradiate a line beam LB onto the first surface S1 of the ink dispensing section 50 along a third direction DR3. The line beam LB may be a line-shaped beam extending along a second direction DR2. The extension length of the line beam LB may be at least greater than the diameter of the nozzle section NP.
[0100] The aforementioned line beam LB can be formed by focusing multiple point beams SB. For example, a line beam LB can be formed by focusing hundreds to thousands of point beams SB. Although in Figure 6 The diagram shows eight point beams SB arranged in a row to form a line beam LB, but the present invention is not limited to the number of point beams SB or the number of rows.
[0101] The line beam LB emitted from the measuring unit 80 can be reflected on the first surface S1 of the ink dispensing unit 50 and then propagates towards the measuring unit 80. The measuring unit 80 can receive the reflected line beam LB to obtain the position information of the first surface S1 of the ink dispensing unit 50.
[0102] The measuring unit 80 can scan the first surface S1 of the ink dispensing section 50 along the first direction DR1 using a line beam LB. Here, the area scanned along the first direction by the line beam LB extending along the second direction DR2 can be defined as the scanning area SA. The scanning area SA of the measuring unit 80 may include a local area of the first surface S1 of the ink dispensing section 50. For example, the scanning area SA may include the area where the nozzle section NP is located and the peripheral area of the nozzle section NP. Therefore, the surface shape of the ink ink within the nozzle section NP and the surface shape of the first surface S1 in the peripheral area of the nozzle section NP can be measured. Specific methods related to this will be referred to later. Figure 7 Describe it.
[0103] As one embodiment, when the measuring unit 80 scans the first surface S1 of the ink dispensing section 50, the moving speed of the measuring unit 80 can vary depending on the scanning position. For example, when scanning a region equipped with nozzle sections NP, the measuring unit 80 can move at a first speed, and when scanning a region without nozzle sections NP, the measuring unit 80 can move at a second speed. Here, the region without nozzle sections NP can be, for example, the region between multiple nozzle sections NP. The first speed and the second speed can be different from each other. For example, the first speed can be less than the second speed. That is, when scanning a region equipped with nozzle sections NP, the measuring unit 80 can move at a slower speed, thereby measuring the surface shape of the ink ink within the nozzle sections NP more precisely. Conversely, when scanning a region without nozzle sections NP, the measuring unit 80 can move at a faster speed, thereby shortening the overall scanning time.
[0104] As one embodiment, the measuring unit 80 may include a linear displacement sensor, such as a chromatic confocal line sensor, a laser confocal displacement sensor, or a 2D laser displacement sensor.
[0105] As another embodiment, the measurement unit 80 may include a confocal microscope or an interferometric microscope. A confocal microscope is a microscope capable of acquiring multiple two-dimensional images of a target and reconstructing its three-dimensional structure based on these images. Examples of confocal microscopes include chromatic confocal microscopes, chromatic line confocal microscopes, and inverted confocal microscopes. An interferometric microscope is a microscope that performs quantitative measurements by observing changes in the microstructure or phase of an object. Examples of interferometric microscopes include laser interferometric microscopes and white light interferometric microscopes.
[0106] Figure 7 This is a perspective view schematically illustrating the shape of the ink surface measured by a manufacturing apparatus for a display device according to another embodiment of the present invention. Figure 7 The ink ejection section, nozzle section, and ink are represented by dashed lines, while the three-dimensional surface shape SS' of the first surface measured by the measuring section is represented by solid lines.
[0107] Reference Figure 7 Measurement Unit 80 (Reference) Figure 5 The ink ejection section 50 (refer to) can be scanned along the first direction DR1 by the line beam LB. Figure 5 The first side S1 (refer to) Figure 5 Simultaneously, the three-dimensional surface shape SS' of the first surface S1 is measured, and the ink Ink can be obtained from this (refer to...). Figure 5 The three-dimensional surface shape IS' of ).
[0108] Specifically, when the line beam LB emitted by the measuring unit 80 is located at the first position P1, the position information of the first surface S1 corresponding to the line beam LB at the first position P1 can be obtained. As mentioned above, since the line beam LB extends along the second direction DR2, the position information of the first surface S1 can be the position information along the second direction DR2, and thus the first contour of the first surface S1 can be obtained. Here, the contour is a two-dimensional contour, which can refer to the position information along the third direction DR3 in the second direction DR2.
[0109] Next, as the measuring unit 80 scans the first surface S1 along the first direction DR1, the line beam LB can be located at the second position P2. The measuring unit 80 can obtain the position information of the first surface S1 corresponding to the line beam LB at the second position P2, and thereby obtain the second profile of the first surface S1. Since the line beam LB at the second position P2 overlaps with the ink Ink, the second profile of the first surface S1 can include the first profile of the ink Ink.
[0110] Similarly, as the measuring unit 80 scans the first surface S1 along the first direction DR1, the line beam LB can be located at the third position P3. The measuring unit 80 can obtain the position information of the first surface S1 corresponding to the line beam LB at the third position P3, and thereby obtain the third profile of the first surface S1. Since the line beam LB at the third position P3 also overlaps with the ink Ink, the third profile of the first surface S1 may include the second profile of the ink Ink.
[0111] Thus, the measuring unit 80 can obtain multiple two-dimensional contours of the first surface S1 via the line beam LB, and can obtain the three-dimensional surface shape SS' of the first surface S1 by synthesizing and combining these two-dimensional contours. The three-dimensional surface shape SS' of the first surface S1 may include the three-dimensional surface shape IS' of the ink Ink. As a result, the measuring unit 80 can obtain the three-dimensional surface shape IS' of the ink Ink.
[0112] According to an embodiment of the present invention, the control unit 90 (refer to) measures the three-dimensional surface shape IS' of the ink Ink obtained by the measuring unit 80. Figure 1 The control unit 90 can determine whether the shape of the ink in the nozzle section NP is abnormal. Based on the above determination result, the control unit 90 can instruct the user to stop the ink dispensing from the ink dispensing section 50, or adjust the amount of ink in the nozzle section NP. This improves the process quality in the ink dispensing process, thereby improving the manufacturing quality and yield of the display device.
[0113] Furthermore, the three-dimensional surface shape SS' of the first surface S1 may further include the surface shape of the area surrounding the nozzle portion NP. Therefore, it can be further determined whether the area surrounding the nozzle portion NP is contaminated due to the adhesion of ink, impurities, etc.
[0114] Figure 8 This is a partial bottom view schematically illustrating a manufacturing apparatus for a display device according to another embodiment of the present invention. Compared with previous references... Figure 6 Structural elements that are the same or corresponding to those described use the same reference numerals, and related redundant descriptions are omitted.
[0115] Reference Figure 8The angle θ formed by the scanning direction of the measuring unit 80 and the extension direction of the line beam LB can be greater than 0° and less than 90°. In this case, the vertical distance V between the point beams SB constituting the line beam LB can be reduced. Here, the vertical distance V refers to the distance relative to the scanning direction (e.g., ...). Figure 8 The first direction DR1) is perpendicular to the direction (e.g., Figure 8 The distance between the point beams SB on the second direction DR2).
[0116] As the vertical distance V decreases, a more precise three-dimensional surface shape can be obtained. The three-dimensional surface shape of the first surface S1 obtained by scanning the line beam LB along the first direction DR1 can be understood as the sum of the two-dimensional surface shapes of the first surface S1 obtained by scanning the individual point beams SB constituting the line beam LB along the first direction DR1. In this case, if the vertical distance V decreases, the spacing between the two-dimensional surface shapes of the first surface S1 obtained by the individual point beams SB decreases. That is, a more compact two-dimensional surface shape can be obtained, and thus a more precise three-dimensional surface shape can be obtained.
[0117] Figure 9a and Figure 9b These are partial cross-sectional views of a manufacturing apparatus for a display device, schematically illustrating an embodiment of the present invention. Figure 9a and Figure 9b The illustration shows a case where the ink in the second nozzle section NP2 has a poor shape, and the illustration also shows a case where the ink in the first nozzle section NP1 and the third to fifth nozzle sections NP3, NP4, and NP5 has a good shape.
[0118] Reference Figure 9a and Figure 9b The shape of the ink ink (IS) can be used to determine if there are any abnormalities in its shape. Alternatively, the three-dimensional surface shape of the ink ink (IS') can also be used (see...). Figure 7 To determine this, for ease of explanation, the following explanation will focus on the case of the two-dimensional surface shape IS of ink.
[0119] Control Unit 90 (Reference) Figure 1 It can receive the measurement unit 80 (refer to). Figure 1 The control unit 90 transmits the two-dimensional surface shape SS of the first surface S1 and can analyze the two-dimensional surface shape IS of the ink Ink within the two-dimensional surface shape SS of the first surface S1. First, the control unit 90 compares the surface shape IS of the ink Ink in the first to fifth nozzle sections NP1, NP2, NP3, NP4, and NP5 with a pre-defined reference surface shape R of the ink Ink. Then, if the positional difference between the surface shape IS of the ink Ink and the reference surface shape R in the third direction DR3 is greater than a set value, an abnormal state can be determined.
[0120] For example, the first surface shape IS1 of the ink Ink in the first nozzle section NP1 may be substantially consistent with the reference surface shape R. In this case, the first surface shape IS1 can be determined to be good. Conversely, the second surface shape IS2 of the ink Ink in the second nozzle section NP2 may be different from the reference surface shape R. Specifically, there may be a positional difference e between the second surface shape IS2 and the reference surface shape R in the third direction DR3. In this case, if the positional difference e is greater than a predetermined set value, the control unit 90 can determine that the second surface shape IS2 is in an abnormal state.
[0121] Thus, the shape of the ink ink (Ink) can be determined to be abnormal based on its two-dimensional surface shape (IS). Based on this determination, the control unit 92 can instruct the user to stop ink dispensing from the ink dispensing unit 50, or adjust the amount of ink in the nozzle unit NP. This improves process quality in the ink dispensing process, thereby enhancing the manufacturing quality and yield of the display device.
[0122] Figure 10 This is a schematic top view illustrating a display device manufactured according to an embodiment of the present invention.
[0123] Reference Figure 10 A display device DP manufactured according to an embodiment of the present invention may include a display area DA and a peripheral area PA located outside the display area DA. The display device DP can provide an image through an array of multiple pixels PX arranged in two dimensions on the display area DA.
[0124] The peripheral area PA is a region that does not provide an image and may surround the display area DA entirely or partially. Drivers may be provided on the peripheral area PA to provide electrical signals or power to the pixel circuits corresponding to each pixel PX. Pads may be provided on the peripheral area PA, which are areas that can be electrically connected to electronic components or printed circuit boards.
[0125] The following description of the display device DP includes an organic light-emitting diode (OLED) as a light-emitting element, but the display device DP of the present invention is not limited thereto. As another embodiment, the display device DP can be a light-emitting display device including an inorganic light-emitting diode, i.e., an inorganic light-emitting display. The inorganic light-emitting diode may include a PN diode containing a material based on an inorganic semiconductor. When a forward voltage is applied to the PN junction diode, holes and electrons can be injected into it, and light of a predetermined color is emitted by converting the energy generated by the recombination of the holes and electrons into light energy. The aforementioned inorganic light-emitting diode may have a width of several micrometers to several hundred micrometers; in some embodiments, the inorganic light-emitting diode may be referred to as a micro LED. In yet another embodiment, the display device DP can be a quantum dot light-emitting display.
[0126] Furthermore, the display device DP can be used not only as a display screen for portable electronic devices such as mobile phones, smartphones, tablet personal computers, mobile communication terminals, electronic notebooks, e-readers, portable multimedia players (PMPs), navigators, and ultra-mobile PCs (UMPCs), but also as a display screen for various products such as televisions, laptops, monitors, billboards, and the Internet of Things (IoT). In addition, one embodiment of the display device DP can be used on wearable devices such as smartwatches, watch phones, glasses displays, and head-mounted displays (HMDs). Furthermore, one embodiment of the display device DP can be used as a car dashboard, a center information display (CID) mounted on the car's center fascia or front bulkhead, an interior rearview mirror display replacing the car's side mirrors, and a display screen mounted behind the front seats as an entertainment device for rear-seat passengers.
[0127] Figure 11 This is a schematic cross-sectional view illustrating a display device manufactured according to an embodiment of the present invention, which can be correspondingly viewed along... Figure 10 The cross-section of the display device taken by the XI-XI' line.
[0128] Reference Figure 11 The display device DP may include a laminated structure of substrate 100, pixel circuit layer PCL, display element layer DEL and encapsulation layer 300.
[0129] The substrate 100 may be a multilayer structure comprising a base layer and an inorganic layer, wherein the base layer contains a polymer resin. For example, the substrate 100 may include a base layer containing a polymer resin and a barrier layer containing an inorganic insulating layer. For example, the substrate 100 may include a first base layer 101, a first barrier layer 102, a second base layer 103, and a second barrier layer 104 laminated sequentially. The first base layer 101 and the second base layer 103 may contain polyimide (PI), polyethersulfone (PES), polyarylate, polyetherimide (PEI), polyethylene naphthalate (PEN), polyethylene terephthalate (PET), polyphenylene sulfide (PPS), polycarbonate (PC), cellulose triacetate (TAC), and / or cellulose acetate propionate (CAP), etc. The first barrier layer 102 and the second barrier layer 104 may contain inorganic insulators such as silicon oxide, silicon oxynitride and / or silicon nitride, and the substrate 100 may have flexible properties.
[0130] A pixel circuit layer PCL is disposed on the substrate 100. Figure 11 The pixel circuit layer PCL shown in the figure includes a thin film transistor (TFT), a buffer layer 111 disposed below and / or above the structural elements of the thin film transistor TFT, a first gate insulating layer 112, a second gate insulating layer 113, an interlayer insulating layer 114, a first planarization insulating layer 115, and a second planarization insulating layer 116.
[0131] The buffer layer 111 can reduce or block the penetration of impurities, moisture or external air from the lower part of the substrate 100, and can provide a flat surface on the substrate 100. The buffer layer 111 may contain an inorganic insulating material such as silicon oxide, silicon oxynitride or silicon nitride, and may be formed from a single layer or multilayer structure containing the aforementioned material.
[0132] The thin-film transistor (TFT) on the buffer layer 111 includes a semiconductor layer Act, which may comprise polycrystalline silicon. Alternatively, the semiconductor layer Act may comprise amorphous silicon, oxide semiconductor, or organic semiconductor, etc. The semiconductor layer Act may include a channel region C and a drain region D and a source region S respectively disposed on both sides of the channel region C. The gate electrode GE may overlap with the channel region C.
[0133] The gate electrode GE may contain a low-resistance metallic material. The gate electrode GE may contain a conductive material such as molybdenum (Mo), aluminum (Al), copper (Cu), titanium (Ti), etc., and may be formed as a multilayer or single-layer structure containing the above materials.
[0134] The first gate insulating layer 112 between the semiconductor layer Act and the gate electrode GE may contain materials such as silicon oxide (SiO2) and silicon nitride (SiN). X Inorganic insulating materials such as silicon nitride oxide (SiON), aluminum oxide (Al2O3), titanium oxide (TiO2), tantalum oxide (Ta2O5), hafnium oxide (HfO2), or zinc oxide (ZnO2).
[0135] The second gate insulating layer 113 may be configured to cover the gate electrode GE. Similar to the first gate insulating layer 112, the second gate insulating layer 113 may contain materials such as silicon oxide (SiO2) or silicon nitride (SiN). X Inorganic insulating materials such as silicon nitride oxide (SiON), aluminum oxide (Al2O3), titanium oxide (TiO2), tantalum oxide (Ta2O5), hafnium oxide (HfO2), or zinc oxide (ZnO2).
[0136] An upper electrode Cst2 of an energy storage capacitor Cst may be disposed on the upper part of the second gate insulating layer 113. The upper electrode Cst2 may overlap with the gate electrode GE below it. In this case, the gate electrode GE and the upper electrode Cst2, which overlap through the second gate insulating layer 113, can form the energy storage capacitor Cst. That is, the gate electrode GE can function as the lower electrode Cst1 of the energy storage capacitor Cst.
[0137] Thus, the energy storage capacitor Cst can be formed to overlap with the thin-film transistor TFT. In some embodiments, the energy storage capacitor Cst can also be formed not to overlap with the thin-film transistor TFT.
[0138] The upper electrode Cst2 may contain aluminum (Al), platinum (Pt), palladium (Pd), silver (Ag), magnesium (Mg), gold (Au), nickel (Ni), neodymium (Nd), iridium (Ir), chromium (Cr), calcium (Ca), molybdenum (Mo), titanium (Ti), tungsten (W) and / or copper (Cu), and may be a single-layer or multi-layer structure of the aforementioned materials.
[0139] Interlayer insulating layer 114 may cover the upper electrode Cst2. Interlayer insulating layer 114 may contain silicon oxide (SiO2) or silicon nitride (SiN). X The inorganic insulating layer 114 can be a single-layer or multi-layer structure containing the aforementioned inorganic insulating materials, such as silicon nitride oxide (SiON), aluminum oxide (Al2O3), titanium oxide (TiO2), tantalum oxide (Ta2O5), hafnium oxide (HfO2), or zinc oxide (ZnO2).
[0140] The drain electrode DE and source electrode SE can be located on the interlayer insulating layer 114. The drain electrode DE and source electrode SE can be connected to the drain region D and source region S respectively through contact holes formed on the insulating layer below them. The drain electrode DE and source electrode SE can contain materials with good conductivity. The drain electrode DE and source electrode SE can contain conductive materials containing molybdenum (Mo), aluminum (Al), copper (Cu), titanium (Ti), etc., and can be formed as a multilayer or single-layer structure containing the above materials. As an embodiment, the drain electrode DE and source electrode SE can have a Ti / Al / Ti multilayer structure.
[0141] The first planarization insulating layer 115 may cover the drain electrode DE and the source electrode SE. The first planarization insulating layer 115 may contain an organic insulating material, such as common general-purpose polymers such as polymethyl methacrylate (PMMA) or polystyrene (PS), polymer derivatives with phenolic groups, acrylic polymers, imide polymers, aryl ether polymers, amide polymers, fluorinated polymers, p-xylene polymers, vinyl alcohol polymers, and mixtures thereof.
[0142] The second planarization insulating layer 116 may be disposed on the first planarization insulating layer 115. The second planarization insulating layer 116 may contain the same material as the first planarization insulating layer 115, and may contain organic insulating materials such as common general-purpose polymers such as polymethyl methacrylate (PMMA) or polystyrene (PS), polymer derivatives with phenolic groups, acrylic polymers, imide polymers, aryl ether polymers, amide polymers, fluorinated polymers, p-xylene polymers, vinyl alcohol polymers, and mixtures thereof.
[0143] A display element layer (DEL) may be disposed on the pixel circuit layer (PCL) of the aforementioned structure. The display element layer (DEL) may include an organic light-emitting diode (OLED) as a display element (i.e., a light-emitting element). The OLED may include a laminated structure of a pixel electrode 210, an intermediate layer 220, and a common electrode 230. The OLED may emit red, green, or blue light, or red, green, blue, or white light. The OLED can emit light through a light-emitting area, which may be defined as a pixel (PX).
[0144] The pixel electrode 210 of the organic light-emitting diode (OLED) can be electrically connected to the thin-film transistor (TFT) through contact holes formed on the second planarization insulating layer 116 and the first planarization insulating layer 115 and contact metal CM disposed on the first planarization insulating layer 115.
[0145] Pixel electrode 210 may include a conductive oxide such as indium tin oxide (ITO), indium zinc oxide (IZO), zinc oxide (ZnO), indium oxide (In₂O₃), indium gallium oxide (IGO), or aluminum zinc oxide (AZO). As another embodiment, pixel electrode 210 may include a reflective film comprising silver (Ag), magnesium (Mg), aluminum (Al), platinum (Pt), palladium (Pd), gold (Au), nickel (Ni), neodymium (Nd), iridium (Ir), chromium (Cr), or compounds thereof. As another embodiment, pixel electrode 210 may further include a film formed above / below the aforementioned reflective film of ITO, IZO, ZnO, or In₂O₃.
[0146] A pixel defining film 117 is disposed on the pixel electrode 210, the pixel defining film 117 having an opening 117OP exposing the central portion of the pixel electrode 210. The pixel defining film 117 may contain organic and / or inorganic insulating materials. The opening 117OP may define a light-emitting area for light emitted by an organic light-emitting diode (OLED). For example, the size / width of the opening 117OP may correspond to the size / width of the light-emitting area. Therefore, the size and / or width of the pixel PX may depend on the size and / or width of the opening 117OP of the corresponding pixel defining film 117.
[0147] The intermediate layer 220 may include a light-emitting layer 222 formed corresponding to the pixel electrode 210. The light-emitting layer 222 may contain a high-molecular-weight or low-molecular-weight organic material that emits light of a predetermined color. Alternatively, the light-emitting layer 222 may contain an inorganic light-emitting material or may contain quantum dots.
[0148] As one embodiment, the intermediate layer 220 may include a first functional layer 221 and a second functional layer 223 respectively disposed below and above the light-emitting layer 222. The first functional layer 221 may include, for example, a hole transport layer (HTL), or may include a hole transport layer and a hole injection layer (HIL). The second functional layer 223 is a structural element disposed above the light-emitting layer 222, and may include an electron transport layer (ETL) and / or an electron injection layer (EIL). The first functional layer 221 and / or the second functional layer 223 may be configured as a common layer that fully covers the substrate 110, similar to the common electrode 230 described later.
[0149] The common electrode 230 may be disposed on and overlapped with the pixel electrode 210. The common electrode 230 may be formed of a conductive material with a low work function. For example, the common electrode 230 may include a (semi-)transparent layer containing silver (Ag), magnesium (Mg), aluminum (Al), platinum (Pt), palladium (Pd), gold (Au), nickel (Ni), neodymium (Nd), iridium (Ir), chromium (Cr), lithium (Li), calcium (Ca), or alloys thereof. Alternatively, the common electrode 230 may further include a layer such as ITO, IZO, ZnO, or In2O3 on the (semi-)transparent layer containing the aforementioned materials. The common electrode 230 may be integrally formed to completely cover the substrate 100.
[0150] The encapsulation layer 300 can be disposed on and cover the display element layer DEL. The encapsulation layer 300 includes at least one inorganic encapsulation layer and at least one organic encapsulation layer. As one embodiment, in... Figure 11The encapsulation layer 300 shown in the figure includes a first inorganic encapsulation layer 310, an organic encapsulation layer 320 and a second inorganic encapsulation layer 330 laminated sequentially.
[0151] The first inorganic encapsulation layer 310 and the second inorganic encapsulation layer 330 may contain one or more inorganic materials selected from aluminum oxide, titanium oxide, tantalum oxide, hafnium oxide, zinc oxide, silicon oxide, silicon nitride, and silicon nitride. The organic encapsulation layer 320 may contain polymer-based materials. Polymer-based materials may include acrylic resin, epoxy resin, polyimide, and polyethylene, etc. As an example, the organic encapsulation layer 320 may contain acrylate. The organic encapsulation layer 320 may be formed by curing monomers or coating polymers. The organic encapsulation layer 320 may be transparent.
[0152] The present invention has been described with reference to the embodiments illustrated in the accompanying drawings, but these are merely examples of the invention. Those skilled in the art will understand that various modifications and other equivalent embodiments can be obtained based on the above embodiments. Therefore, the true scope of protection of the present invention should be determined by the technical concept of the appended claims.
Claims
1. An apparatus for manufacturing a display device, comprising: An ink dispensing section is provided with a nozzle for dispensing ink; as well as A measuring section disposed at a distance from the first surface of the ink dispensing section. The nozzle portion is disposed on the first surface of the ink dispensing portion. The measuring unit obtains the surface shape of the ink in the nozzle by scanning the first surface of the ink dispensing section along a first direction.
2. The manufacturing apparatus for the display device according to claim 1, wherein, The ink dispensing section has a plurality of nozzles, which are arranged along the first direction on the first surface of the ink dispensing section.
3. The manufacturing apparatus for the display device according to claim 1, It further includes a first moving part for moving the measuring part along the first direction.
4. The manufacturing apparatus for the display device according to claim 3, It further includes a second moving part for moving the measuring part along a second direction intersecting the first direction.
5. The manufacturing apparatus for the display device according to claim 1, wherein, The measuring unit irradiates a point beam toward the first surface of the ink dispensing unit along a third direction intersecting the first direction.
6. The manufacturing apparatus for the display device according to claim 5, wherein, The measuring unit obtains the two-dimensional profile of the ink through the dot beam, and obtains the two-dimensional surface shape of the ink based on the two-dimensional profile.
7. The manufacturing apparatus for the display device according to claim 1, wherein, The measuring unit irradiates a line beam toward the first surface of the ink dispensing unit along a third direction intersecting the first direction. The line beam extends along a second direction that intersects the first direction and the third direction.
8. The manufacturing apparatus for the display device according to claim 7, wherein, The measuring unit obtains multiple two-dimensional contours of the ink through the line beam, and obtains the three-dimensional surface shape of the ink based on the multiple two-dimensional contours.
9. The manufacturing apparatus for a display device according to claim 7, wherein, The scanning area of the measuring unit includes the area where the nozzle is located and the surrounding area of the nozzle.
10. The manufacturing apparatus for the display device according to claim 1, The device further includes a control unit electrically connected to the measuring unit, which determines whether the shape of the ink is abnormal based on the surface shape of the ink measured by the measuring unit.
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