Heating and tape transport systems for superconducting tape preparation

Abstract

The present invention provides a heating and tape-feeding system for preparing superconducting tape, comprising a heating shell and a heating lamp tube, wherein: the heating lamp tube provides heat to heat the heating shell; the heating shell contacts the superconducting tape and heats the superconducting tape, and the superconducting tape rolls or slides on the heating shell; the heating lamp tube comprises a heating lamp tube shell, a conductive wire and a heating wire arranged in the heating lamp tube shell, a plurality of heating wires are arranged, and the plurality of heating wires are connected in series through the conductive wire, and the two ends of the conductive wire extend out of the heating lamp tube shell as a connection interface of the power supply. The present invention has a reasonable structure, ingenious design and convenient operation. By setting a gradient heating lamp tube, the problem of inconsistent heating temperature of film layers of different thicknesses and different coating amounts in different areas when the superconducting tape is reciprocated in multiple passes is solved. The present invention improves the heating efficiency by setting a heating shell with grooves.

Description

Technical Field

[0001] The present invention relates to the field of superconducting materials, and in particular to a heating and tape-feeding structure and process for preparing superconducting tapes. Background Art

[0002] This article describes the PLD deposition of REBCO film but is not limited to REBCO as a superconducting material or PLD as a method.

[0003] In the coating process of various vacuum coating processes, in order to ensure the quality of the film on the substrate, the preparation of many films requires heating the substrate to be coated, and there are strict requirements on the temperature deviation range of the substrate during the coating process. Therefore, the heating system is a crucial part of the coating equipment. For narrow and long continuous flexible substrate strips, a reciprocating roll-to-roll structure is often used in the coating to increase the coating area and improve the coating efficiency. Although the structure, size, geometry, etc. of the heating system are different in different equipment, for the flexible substrate strip that is approximately two-dimensional, the roll-to-roll conveying structure requires that the area of ​​the heating surface uniform temperature zone used by the heating system should be large enough to match the increased coating area, so that the temperature of the strip remains unchanged during the coating process. In summary, in order to ensure the coating quality of the roll-to-roll continuous strip, the heating system needs to ensure uniform temperature of the strip on a large heating surface. On the other hand, large-scale industrial production requires the flexible substrate to have a high conveying speed to meet its high production requirements. The limitation of the size of the heating plate and the high belt speed make the heating time of the flexible substrate strip very short. How to raise the temperature of the strip to the target temperature in a very short time has put forward new requirements for the heating system.

[0004] Deposition temperature is one of the most critical parameters in the superconducting layer process. The temperature range for the growth of ReBCO thin films is very narrow, generally only 20°C. It is usually not very convenient to measure the temperature of the substrate accurately. The reason is that there is often a significant difference between the measured temperature and the actual temperature. The stability of the test using a thermocouple to test the substrate temperature depends on the stable contact between the two. Even if the contact is very ideal, there is still a temperature gradient between the bottom and the surface of the substrate, which is the source of the difference.

[0005] The heating system has reached thermal equilibrium. If the substrate placed in it is static at this time, the substrate can be regarded as a point in the thermal environment. For this point, due to the long-term heat exchange, the substrate is easy to reach a thermal equilibrium state. Therefore, this difference relationship is stable, and it is relatively easy to determine the relative optimal deposition temperature.

[0006] Unlike static processes, in a dynamic tape system, each point of the base tape has to go through many different positions along the entire path. Due to the presence of thermal gradients in the heating system, the temperature of each point along the entire base tape path will fluctuate. The base tape travels along this path at a certain speed, passing through different temperature zones, and there will be a constant process of heat absorption and heat release, and the temperature will never be fixed. If you want to control the base tape to be at the optimal temperature during coating, the ideal situation is to have a temperature gradient as small as possible along the entire path the base tape passes. However, large-scale production requires a larger coating area, and a larger area is more likely to cause a large temperature gradient, which is inconsistent with the ideal temperature control situation.

[0007] Two of the problems are particularly difficult: 1. How to obtain the temperature distribution of the strip in the coating area through a series of temperature tests. 2. How to obtain the temperature distribution of the strip passing through the coating area again.

[0008] The first problem is more difficult for two reasons: 1. Thermocouples cannot be placed directly in the coating area, which will interfere with the coating, and the plasma plume generated during the coating will also interfere with the test. 2. Laser and other optical temperature tests cannot be used in the cavity because the dust from the coating will cover the optical devices.

[0009] The second problem is more difficult. The temperature of the substrate surface depends on its own temperature when entering the coating area and the heat absorption and release process in the coating area. The temperature of each substrate when entering the coating area depends on the conduction heating between the heating plate and the radiation heating between the reflective wall.

[0010] Since the heating structure and environment are extremely complex, and are usually affected by factors such as water cooling, plasma plume, and heating roller defects, the thermocouple group has a high probability of failure during measurement. For example, the test results of a superconducting strip showed that the critical current on one side of the strip even decayed to 0A due to low temperature. Judging from the crystal structure of the film, the temperature at least fell below the lower limit of the window by 50-100℃ during coating, but the test data of the thermocouple group found that the temperature fluctuation was only 5-10℃.

[0011] The coated strip will be wound on the heating plate or heating roller in multiple reciprocating passes. In order to prevent the strip from slipping and colliding with each other and causing damage due to mechanical contact between the passes, the multiple reciprocating strip passes will be arranged at intervals.

[0012] There are many problems with the existing heating system, including a narrow window temperature in the coating area, which cannot adapt to large-area coating and requires further refinement; the heating surface contacts the strip and conducts heat, resulting in uneven heat conduction; the heating surface is difficult to maintain and the changes between batches are complex; curling is prone to occur during the strip plating process; it cannot adapt to the needs of plating thin base strips; it cannot make long strips; and the strip forms an arched cross-section due to the stretching transition at high temperature. Summary of the invention

[0013] In view of the defects in the prior art, an object of the present invention is to provide a heating and tape-feeding system for preparing superconducting tapes.

[0014] A heating and tape-feeding system for preparing a superconducting tape provided by the present invention comprises a heating housing and a heating lamp tube, wherein:

[0015] The heating lamp tube provides heat to heat the heating shell;

[0016] The heating shell contacts the superconducting tape and heats the superconducting tape, and the superconducting tape rolls or slides on the heating shell;

[0017] The heating lamp tube comprises a heating lamp tube shell, a conductive wire and a heating wire arranged in the heating lamp tube shell. There are multiple heating wires, and the multiple heating wires are connected in series through the conductive wire. Both ends of the conductive wire extend out of the heating lamp tube shell to serve as a connection interface for a power source.

[0018] Preferably, the length direction of the heating lamp tube is perpendicular to the moving direction of the superconducting tape, and along the length direction of the heating lamp tube, the length of the heating wire is determined by the X factor and the Y factor, wherein:

[0019] Based on the X factor, the length of the heating wire increases along the length of the heating lamp tube;

[0020] Based on the Y factor, along the length direction of the heating lamp tube, the length of the heating wire first increases and then decreases.

[0021] Preferably, the heating lamp tube is a fully transparent lamp tube.

[0022] Preferably, the heating lamp tube is more than 2 cm away from the heating shell.

[0023] Preferably, the heating shell is a ceramic heating shell.

[0024] Preferably, the heating shell is provided with slots, and the slots are 10% smaller than the actual spacing. For example, the slots provided between the superconducting tapes are 1 mm, but the slots opened on the heating shell are 1.1 mm.

[0025] Preferably, the heating shell is made of high thermal conductivity material.

[0026] Preferably, the heating shell comprises a heating roller, and when the superconducting tape reciprocates on the heating roller, the heating roller is lifted up, and the heating roller and the superconducting tape are relatively stationary.

[0027] Preferably, a plurality of heating lamp tubes are provided, and the plurality of heating lamp tubes are distributed on the moving path of the superconducting tape.

[0028] Preferably, the heating shell is provided with a plurality of guide grooves arranged side by side, and a superconducting tape contact surface is formed between adjacent guide grooves.

[0029] Preferably, the superconducting tape contact surfaces are superconducting tape contact surfaces arranged side by side.

[0030] Preferably, the heating shell is a heating drum, and a plurality of guide grooves are arranged in the radial direction of the heating drum and along the circumference of the heating drum.

[0031] Preferably, the plurality of heating lamp tubes are evenly distributed along the inner circumference of the heating drum.

[0032] Preferably, the heating shell is a heating plate, and a plurality of guide grooves extending along the length direction of the heating plate are arranged in the width direction of the heating plate.

[0033] Preferably, the heating lamp tube is in a strip shape, and the heating wires of the heating lamp tube are distributed in a stepped manner on the conductive wire.

[0034] Preferably, along the length direction of the heating lamp tube, the length of the heating wire increases or decreases.

[0035] Compared with the prior art, the present invention has the following beneficial effects:

[0036] 1. The present invention has reasonable structure, ingenious design and convenient operation.

[0037] 2. The present invention solves the problem of inconsistent heating temperatures of film layers of different thicknesses and different coating amounts in different areas when the superconducting tape is reciprocated in multiple passes by arranging gradient heating lamps.

[0038] 3. The present invention improves the heating efficiency by providing a heating shell with grooves.

[0039] 4. The present invention overcomes the deformation of the superconducting tape and improves the quality of the superconducting tape by providing a ceramic roller.

[0040] 5. The present invention greatly expands the coating area window and significantly improves the yield rate.

[0041] 6. The heating surface of the present invention is easier to maintain, greatly improving the equipment utilization rate.

[0042] 7. The present invention overcomes the strip deformation phenomenon and greatly improves the strip quality.

[0043] 8. The present invention can plate thin base strips, and the critical current density of strip engineering is greatly improved.

[0044] 9. The present invention can significantly lengthen the length of a single strip. BRIEF DESCRIPTION OF THE DRAWINGS

[0045] Other features, objects and advantages of the present invention will become more apparent from the detailed description of non-limiting embodiments made with reference to the following drawings:

[0046] Figure 1 Schematic diagram of the structure of the heating and tape-feeding system used for superconducting tape preparation.

[0047] Figure 2 It is a schematic structural diagram of the heating roller of the present invention.

[0048] Figure 3 It is a schematic diagram of the structure of the heating lamp tube of the present invention.

[0049] Figure 4 It is a perspective view of a heating roller of the present invention.

[0050] Figure 5 It is a schematic diagram of the use of the heating roller of the present invention.

[0051] Figure 6 It is a cross-sectional schematic diagram of the heating roller of the present invention.

[0052] Figure 7 It is a schematic diagram of the application of the heating plate of the present invention.

[0053] Figure 8 It is a schematic structural diagram of the heating plate of the present invention.

[0054] Fig. 9 It is a schematic diagram of the structure of the heating lamp tube at the back of the heating plate of the present invention.

[0055] Fig.10 It is a cross-sectional schematic diagram of the heating lamp tube at the back of the heating plate of the present invention.

[0056] The figure shows:

[0057] Heating roller 101

[0058] Grooved heating roller 102

[0059] Slotted heating plate 103

[0060] Superconducting tape 104

[0061] Front support frame 201

[0062] Support bearing seat 202

[0063] Support bearing 203

[0064] Support bearing shaft 204

[0065] Guide bearing seat 205

[0066] Guide bearing 206

[0067] Heating lamp 301

[0068] Heating lamp shell 302

[0069] Heating lamp conductive wire 303

[0070] Heating lamp heating wire 304 DETAILED DESCRIPTION

[0071] The present invention is described in detail below in conjunction with specific embodiments. The following embodiments will help those skilled in the art to further understand the present invention, but are not intended to limit the present invention in any form. It should be noted that, for those of ordinary skill in the art, several changes and improvements can also be made without departing from the concept of the present invention. These all belong to the protection scope of the present invention.

[0072] like Figures 1 to 10 As shown, a heating and tape-feeding system for preparing superconducting tapes according to the present invention comprises a heating shell and a heating lamp tube, wherein: the heating lamp tube provides heat to heat the heating shell; the heating shell contacts the superconducting tape and heats the superconducting tape, and the superconducting tape rolls or slides on the heating shell; the heating lamp tube comprises a heating lamp tube shell, a conductive wire and a heating wire arranged in the heating lamp tube shell, and a plurality of heating wires are arranged, and a plurality of heating wires are connected in series through the conductive wire, and both ends of the conductive wire extend out of the heating lamp tube shell as a connection interface of the power supply. A plurality of heating lamp tubes are arranged, and a plurality of heating lamp tubes are distributed on the moving path of the superconducting tape. A plurality of guide grooves arranged side by side are arranged on the heating shell, and a superconducting tape contact surface is formed between adjacent guide grooves. The superconducting tape contact surface is a superconducting tape contact surface arranged side by side. The heating shell is a heating roller, and a plurality of guide grooves arranged along the circumference of the heating roller are arranged in the radial direction of the heating roller. A plurality of heating lamp tubes are evenly distributed along the inner circumference of the heating roller. The heating housing is a heating plate, and a plurality of guide grooves extending along the length direction of the heating plate are arranged in the width direction of the heating plate. A plurality of heating lamp tubes are attached to the back of the heating plate. The heating lamp tubes are in a strip shape, and the heating wires of the heating lamp tubes are distributed in a stepped manner on the conductive wires. Along the length direction of the heating lamp tubes, the length of the heating wires increases or decreases.

[0073] To further explain, the present invention is described by using PLD to deposit a REBCO film, but is not limited to REBCO as a superconducting material or PLD as a method. Figure 1As shown, in the embodiment provided by the present invention, the heating roller is arranged on the front support frame, and the heating roller is supported by the support bearing, and the guiding function is achieved by the guide bearing. The heating lamp tube is arranged in the heating roller and evenly distributed along the inner circumference of the heating roller. It is further explained that there are multiple support bearing modules, which are distributed in the circumferential direction on both sides of the roller, so as to realize the up and down positioning function of the roller. Each support bearing module is provided with double bearings to ensure the operation of the roller. When one of the bearings is damaged, the other bearing can support the roller until the end of the work. An annular groove is provided on one side of the roller, and a guide bearing module is provided on the support frame on this side. The guide bearing module cooperates with the annular groove to axially limit one side of the roller.

[0074] The setting direction of the heating lamp tube is the same as the radial direction of the heating roller. Each heating lamp tube includes a heating lamp tube shell and a heating lamp tube conductive wire. A plurality of heating lamp tube heating wires are arranged on the heating lamp tube conductive wire. The heating lamp conductive wire is arranged in a U-shape. The first and last ends of the heating lamp conductive wire extend from one end of the heating lamp tube shell as a power connection component, and the remaining part is arranged inside the heating lamp tube shell. The power of the plurality of heating lamp tube heating wires distributed on the heating lamp tube conductive wire is distributed in a step-by-step manner along the length direction of the heating lamp tube conductive wire. Specifically, the length of the conductive wire is determined by two factors. The first factor is that the superconducting tape has multiple reciprocating paths, and the thickness of each path will increase relative to the previous path. Therefore, the temperature of the heating lamp tube needs to increase to ensure the coating effect. The second factor is that when shooting, the particles in the middle area of ​​the coating area are more than the particles on both sides. Therefore, along the length direction of the heating lamp tube, the heating temperature first increases and then decreases. The setting of the heating lamp tube is determined by the above two factors. Take 9 strips as an example:

[0075] For the X factor, the heating power of the lamp tube felt from the first strip to the last strip is 70% 72% 74% 76% 78% 80% 81% 83% 84% respectively; for the Y factor, the heating power of the lamp tube felt from the first strip to the last strip is 70% 78% 83% 86% 88% 86% 83% 78% 70% respectively; when the XY factors are superimposed, the heating power of the lamp tube felt from the first strip to the last strip is 65% 75% 83% 89% 94% 94% 91% 87% 78% respectively.

[0076] The outer side of the heating roller is provided with a groove, and the groove is provided with a plurality of grooves, and the plurality of grooves are evenly spaced and distributed on the outer side of the heating roller. Figure 5As shown, a superconducting tape contact surface in contact with the superconducting tape is arranged between adjacent grooves, and multiple superconducting tape contact surfaces are arranged side by side. The superconducting tape contact surface is an annular surface, and the width of the superconducting tape contact surface is consistent with the width of the superconducting tape. When the superconducting tape reciprocates on the heating roller, the heating roller is lifted up, and the heating roller and the superconducting tape are relatively stationary. That is, except for the superconducting tape entering the heating roller and the superconducting tape exiting the heating roller, the superconducting tape in the middle area is relatively stationary with the heating roller when moving.

[0077] like Figure 7 As shown, according to another embodiment provided by the present invention, a heating plate is provided to replace the heating roller, and a plurality of grooves extending along the length direction of the heating plate are also provided on the heating plate. A superconducting tape contact surface is formed between adjacent grooves, and the superconducting tape slides over the superconducting tape contact surface. A plurality of heating lamps arranged side by side are provided on the back of the heating plate, and the length direction of the heating lamps is perpendicular to the length direction of the heating plate.

[0078] In the above two embodiments, the heating wires in the heating lamp tube are distributed in a stepped manner in the length direction of the heating lamp tube. Specifically, the length of the heating wires in the heating lamp tube is related to the film thickness of the superconducting tape at the corresponding position. The superconducting tape reciprocates multiple times, and as the film layer thickens, the temperature requirement during coating is gradually increased. Therefore, the longer the length of the heating wire at the corresponding position where the film layer thickens, the greater the heating temperature.

[0079] The heating roller or plate of the present invention is a lightweight heating roller or plate, and the heating roller or plate is a ceramic heating roller or plate, and its surface is preferably provided with a grooved ceramic heating roller. The heating roller or plate of the present invention is made of a high thermal conductivity material, such as carbon nitride material.

[0080] In the description of the present application, it should be understood that the terms "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", etc., indicating orientations or positional relationships, are based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present application and simplifying the description, and do not indicate or imply that the referred device or element must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be understood as a limitation on the present application.

[0081] The above describes the specific embodiments of the present invention. It should be understood that the present invention is not limited to the above specific embodiments, and those skilled in the art can make various changes or modifications within the scope of the claims, which does not affect the essence of the present invention. In the absence of conflict, the embodiments of the present application and the features in the embodiments can be combined with each other arbitrarily.

Claims

1. A heating and tape-feeding system for superconducting tape preparation, It is characterized in that It includes a heating shell and a heating lamp, wherein: The heating lamp tube provides heat to heat the heating shell; The heating shell contacts the superconducting tape and heats the superconducting tape, and the superconducting tape rolls or slides on the heating shell; The heating lamp tube comprises a heating lamp tube shell, a conductive wire and a heating wire arranged in the heating lamp tube shell, a plurality of heating wires are arranged, the plurality of heating wires are connected in series through the conductive wire, and both ends of the conductive wire extend out of the heating lamp tube shell as a connection interface of a power source; The heating shell is a ceramic heating shell; The heating shell comprises a heating roller. When the superconducting tape reciprocates on the heating roller, the heating roller is lifted up, and the heating roller and the superconducting tape are relatively stationary.

2. The heating and tape-feeding system for superconducting tape preparation according to claim 1, It is characterized in that The length direction of the heating lamp tube is perpendicular to the moving direction of the superconducting tape. Along the length direction of the heating lamp tube, the length of the heating wire is determined by the X factor and the Y factor, wherein: Based on the X factor, the length of the heating wire increases along the length of the heating lamp tube; Based on the Y factor, along the length direction of the heating lamp tube, the length of the heating wire first increases and then decreases.

3. The heating and tape-feeding system for superconducting tape preparation according to claim 1, It is characterized in that The heating lamp tube is a fully transparent lamp tube.

4. The heating and tape-feeding system for superconducting tape preparation according to claim 1, It is characterized in that The heating lamp tube is more than 2 cm away from the heating shell.

5. The heating and tape-feeding system for superconducting tape preparation according to claim 1, It is characterized in that The heating shell is provided with a slot, and the slot is 10% larger than the actual spacing.

6. The heating and tape-feeding system for superconducting tape preparation according to claim 1, It is characterized in that The heating shell is made of high thermal conductivity material.

7. The heating and tape-feeding system for superconducting tape preparation according to claim 1, It is characterized in that The heating lamp tubes are provided in plurality and are distributed on the moving path of the superconducting tape.

8. The heating and tape-feeding system for superconducting tape preparation according to claim 1, It is characterized in that The heating shell is provided with a plurality of guide grooves arranged side by side, and adjacent guide grooves form superconducting tape contact surfaces arranged side by side.

Images