Chemical vapor deposition equipment

Abstract

The present invention relates to the field of chemical vapor deposition technology, specifically a chemical vapor deposition device, including a box body, a box cover hinged on the box body, and a feed port fixedly installed on the box cover, a buffer box is fixedly installed on the inner wall of the box body, the bottom of the feed port is connected to the upper end of the buffer box, a first fixed rod is fixedly installed inside the buffer box, and a fan blade is provided at the lower end of the first fixed rod. The present invention sets a first fixed rod, a fan blade, a buffer box and other mechanisms, and the gas to be deposited enters the interior of the box body from the feed port, and the fan blade is driven to rotate by a driving device, and the rotating fan blade forms an airflow at the feed port, which speeds up the speed of the gas to be deposited entering the buffer box, and the gas to be deposited diffuses to the lower end of the buffer box through the vent hole, so that the gas to be deposited is evenly diffused into the inner cavity of the box body.

Description

Technical Field

[0001] The invention relates to the technical field of chemical vapor deposition, in particular to a chemical vapor deposition device. Background Art

[0002] Chemical vapor deposition is a chemical technology that mainly uses one or more gas phase compounds or single substances containing thin film elements to form thin films through chemical reactions on the substrate surface. Chemical vapor deposition is a new technology for preparing inorganic materials developed in recent decades. Chemical vapor deposition has been widely used in purifying substances, developing new crystals, and depositing various single crystal, polycrystalline or glassy inorganic thin film materials.

[0003] Chemical vapor deposition reactions require the transport of reactive gases to the deposition area, thereby producing solid matter on the substrate to obtain the desired material. However, when the reactive gases are fed into the reaction chamber through pipelines, the irregular flow of gases in the pipelines will inevitably contact the inner wall of the pipelines, and condensation of the reactive gases at the entrance is inevitable. This is particularly evident in winter, resulting in a reduction in the amount of reactive gases transported, affecting the deposition effect, and in severe cases causing product scrapping and increased costs.

[0004] To this end, a chemical vapor deposition device is proposed. Summary of the invention

[0005] The object of the present invention is to provide a chemical vapor deposition device to solve the problem in the above background technology that the gas at the feed inlet contacts the feed inlet wall and solidifies when it is cooled.

[0006] To achieve the above object, the present invention provides the following technical solutions:

[0007] A chemical vapor deposition device comprises a box body, a box cover hinged on the box body, and a feed port fixedly mounted on the box cover, a buffer box is fixedly mounted on the inner wall of the box body, the bottom of the feed port is connected to the upper end of the buffer box, a first fixing rod is fixedly mounted inside the buffer box, a fan blade is provided at the lower end of the first fixing rod, and the fan blade is arranged inside the buffer box, a plurality of ventilation holes are opened at the bottom of the buffer box, and a driving mechanism for driving the fan blade to rotate is provided on the box body.

[0008] By setting up the first fixed rod, fan blades, buffer box and other mechanisms, the gas to be deposited enters the interior of the box from the feed inlet, and the fan blades are driven to rotate by the driving device. The rotating fan blades form an airflow at the feed inlet, which speeds up the speed at which the gas to be deposited enters the buffer box. The gas to be deposited diffuses to the lower end of the buffer box through the vent hole, so that the gas to be deposited is evenly diffused into the inner cavity of the box.

[0009] Preferably, the driving mechanism includes a motor fixedly mounted on the outside of the box body, a worm being fixedly connected to the output end of the motor, the worm penetrating one side of the box body and being rotatably mounted on the other side of the box body, a driving rod being provided in the inner cavity of the box body, the top of the driving rod being rotatably mounted on the bottom wall of the buffer box, a worm wheel being fixedly mounted on the driving rod, and the worm and the worm wheel are meshing with each other.

[0010] By setting up mechanisms such as a motor, a worm, and a worm wheel, the rotation of the motor output shaft is used to drive the worm to rotate, and the worm and the worm wheel are meshed with each other, so that the worm drives the worm wheel to rotate, and then drives the drive rod to rotate, thereby driving the fan blades to rotate, thereby driving the fan blades.

[0011] Preferably, a topless heating box is provided at the bottom end of the buffer box, a heating plate is fixedly installed on the inner wall of the heating box, a first groove is opened on the side wall of the feed port, a conductor rod is hinged inside the first groove, a limit rod is fixedly installed on the inner wall of the first groove, the limit rod is an arc structure, and the conductor rod slides on the limit rod, a first spring is fixedly connected to the top wall of the first groove, the bottom end of the first spring is fixedly connected to the conductor rod, a conductor block is fixedly installed on the bottom wall of the first groove, and the conductor rod and the conductor block are both electrically connected to the power supply.

[0012] By setting up mechanisms such as a heating plate, a conductor rod, and a conductor block, when the deposition gas enters the feed port under the acceleration of the fan blades, the conductor rod is driven by the airflow to overcome the pulling force of the first spring and deflects downward. Under the limit of the limit rod, the conductor rod rotates into the first groove until the conductor rod contacts the conductor block. Here, the circuit is connected, and the heating plate starts to heat the heating box. When the gas introduction is stopped, the conductor rod is reset, and the circuit is disconnected here, and the heating plate stops heating.

[0013] Preferably, a filter is fixedly installed on the side wall of the heating box close to the buffer box, the driving rod passes through the buffer box and the filter and extends to the bottom of the filter, four symmetrically arranged stirring rods are provided at the upper and lower ends of the filter, and the eight stirring rods are fixedly installed on the driving rod, a movable rod is slidably installed inside the stirring rod, one end of the movable rod is fixedly connected to a second spring, one end of the second spring is fixedly connected to the inner wall of the stirring rod, a rectangular groove is provided at the bottom of the movable rod, four oblique limit blocks are fixedly installed on the bottom wall of the heating box and the filter, and a plurality of vents are provided at the bottom of the heating box.

[0014] By setting up a stirring rod, a movable rod, a limit block and other mechanisms, the stirring rod is driven to rotate under the rotation of the driving rod. When the stirring rod rotates to above the limit block, the rectangular groove at the bottom of the movable rod slides toward the inside of the stirring rod under the limiting action of the limit block. After the stirring rod continues to rotate, the rectangular groove separates from the limit block, and the movable rod slides toward the outside of the stirring rod under the elastic force of the second spring, and this reciprocating process allows the heat inside the heating box to be fully diffused in the gas to be deposited.

[0015] Preferably, a first annular cavity is provided inside the side wall of the box body, a water pipe is wound inside the first annular cavity, a plurality of exhaust pipes are fixedly installed on the water pipe, an air-water separation membrane is fixedly installed inside the plurality of exhaust pipes, two water troughs are provided at the bottom end of the box body, a water outlet is provided between the two water troughs, a water pump is provided outside the box body, a water outlet pipe of the water pump is connected to one of the water troughs, the water outlet pipe of the water pump is connected to one end of the water pipe through a hose, and a water inlet end of the water pipe is connected to another water trough, a first pulley is fixedly installed on the worm, a second pulley is fixedly installed on one side of the water pump, the first pulley and the second pulley are connected by belt drive, a second annular cavity is provided inside the side wall of the heating box, one end of the exhaust pipe is connected to the second annular cavity.

[0016] By setting up mechanisms such as a water pipe, an exhaust pipe, and an air-water separation membrane, a large amount of heat is released when the deposited gas flows from the air vent to the bottom and reacts with the reaction gas to form a precipitate. The motor, the first pulley, and the second pulley are used to drive the water pump to operate. The cooling water in the water tank is pumped into the water pipe, and the cooling water then enters the water tank on the other side. After heat transfer, the cooling water in the water pipe absorbs heat to generate steam, thereby achieving heat dissipation of the box body. The water vapor passes through the air-water separation membrane into the second annular cavity to heat the heating box, thereby achieving energy recycling.

[0017] Preferably, a rotating rod is rotatably installed between the two water tanks, the rotating rod passes through the bottom wall of the box and extends into the inner cavity of the box, a fixing seat is fixedly installed on the top end of the rotating rod, a base plate is fixedly installed on the upper end of the fixing seat, an impeller is provided inside the water outlet, and the impeller is fixedly installed on the rotating rod.

[0018] By setting up mechanisms such as a rotating rod and an impeller, when the water pump pumps out the cooling water in one of the water tanks, the cooling water in the other water tank is replenished through the water inlet, thereby forming a water flow. The impeller rotates under the drive of the water flow, thereby driving the rotating rod to rotate, and the fixed seat at the top of the rotating rod starts to rotate, thereby driving the substrate to rotate, thereby achieving uniform deposition on the substrate.

[0019] Preferably, a conductive block is fixedly installed on the bottom wall of the water tank away from the water pump, and second fixing rods are respectively provided on both sides of the conductive block, and the second fixing rods are fixedly installed on the top wall and the bottom wall of the water tank, and a conductive spherical shell is slidably installed between the second fixing rods. An alarm is fixedly installed on one side of the box body, and the conductive block, the conductive spherical shell and the alarm are electrically connected to the power supply through wires.

[0020] By setting up conductive blocks, conductive spherical shells, alarms and other mechanisms, the cooling water in the water tank makes the conductive spherical shell float above the conductive block. As the cooling water gradually decreases due to the volatilization of hot steam, the conductive spherical shell moves downward under the action of its own gravity until it contacts the conductive block. The circuit here is connected and the alarm sounds to remind the staff to manually fill the water.

[0021] Preferably, the bottom wall of the heating box is provided with a plurality of second grooves, and the plurality of second grooves are connected to the vent, a fixing plate is fixedly installed inside the second groove, a telescopic rod is fixedly installed on the fixing plate, a trapezoidal piston is fixedly installed on the upper end of the telescopic rod, a third spring is sleeved on the telescopic rod, and both ends of the third spring are respectively fixedly connected to the fixing plate and the trapezoidal piston.

[0022] By setting up mechanisms such as a telescopic rod, a trapezoidal piston, and a third spring, the heated gas to be deposited diffuses downward through the vent, and the trapezoidal piston moves downward under pressure, squeezing the telescopic rod and the third spring to contract, so that the gas to be deposited enters below through the vent and the second groove to react with the reaction gas. On the contrary, the reaction gas rises and pushes the trapezoidal piston upward to block the vent to prevent gas backflow.

[0023] Compared with the prior art, the present invention has the following beneficial effects:

[0024] 1. By setting up the first fixed rod, fan blades, buffer box and other mechanisms, the gas to be deposited enters the interior of the box from the feed inlet, and the fan blades are driven to rotate by the driving device. The rotating fan blades form an airflow at the feed inlet, which speeds up the speed at which the gas to be deposited enters the buffer box. The gas to be deposited diffuses to the lower end of the buffer box through the vent hole, so that the gas to be deposited is evenly diffused into the inner cavity of the box.

[0025] 2. By setting up heating plates, conductor rods, conductor blocks and other mechanisms, when the deposition gas enters the feed port under the acceleration of the fan blades, the conductor rod is driven by the airflow to overcome the pulling force of the first spring and deflects downward. Under the limit of the limit rod, the conductor rod rotates into the first groove until the conductor rod contacts the conductor block. Here, the circuit is connected, and the heating plate starts to heat the heating box. When the gas introduction is stopped, the conductor rod is reset, the circuit is disconnected, and the heating plate stops heating.

[0026] 3. By setting up a stirring rod, a movable rod, a limit block and other mechanisms, the stirring rod is driven to rotate under the rotation of the driving rod. When the stirring rod rotates to above the limit block, the rectangular groove at the bottom of the movable rod slides toward the inside of the stirring rod under the limiting action of the limit block. After the stirring rod continues to rotate, the rectangular groove separates from the limit block, and the movable rod slides toward the outside of the stirring rod under the elastic force of the second spring, and so on and so forth, so that the heat inside the heating box can be fully diffused in the gas to be deposited.

[0027] 4. By setting up mechanisms such as a water pipe, an exhaust pipe, and an air-water separation membrane, a large amount of heat is released when the deposited gas flows from the vent to the bottom and reacts with the reaction gas to form a precipitate. The motor, the first pulley, and the second pulley are used to drive the water pump to operate. The cooling water in the water tank is pumped into the water pipe, and the cooling water then enters the water tank on the other side. After heat transfer, the cooling water in the water pipe absorbs heat to generate steam, thereby achieving heat dissipation of the box body. The water vapor passes through the air-water separation membrane into the second annular cavity to heat the heating box, thereby achieving energy recycling. BRIEF DESCRIPTION OF THE DRAWINGS

[0028] Figure 1 It is a schematic diagram of the overall structure of the present invention;

[0029] Figure 2 It is a front cross-sectional view of the present invention;

[0030] Figure 3 It is a top cross-sectional view of the buffer box of the present invention;

[0031] Figure 4 It is a top cross-sectional view of the stirring rod of the present invention;

[0032] Figure 5 It is a top cross-sectional view of the water tank of the present invention;

[0033] Figure 6 For the present invention Figure 2 A magnified view of the structure at center;

[0034] Figure 7 For the present invention Figure 2 A magnified view of the structure at B in the middle;

[0035] Figure 8 For the present invention Figure 2 A magnified view of the structure at C in the middle;

[0036] Fig. 9 For the present invention Figure 2 A magnified view of the structure at D in the middle;

[0037] Fig.10 For the present invention Figure 2 Enlarged view of the structure at E in the middle;

[0038] Fig.11 For the present invention Figure 3 Enlarged view of the structure at F in the middle.

[0039] In the figure: 1, box body; 2, box cover; 3, feed port; 4, buffer box; 5, first fixed rod; 6, fan blade; 7, vent; 8, motor; 9, worm; 10, worm wheel; 11, drive rod; 12, heating box; 13, heating plate; 14, first groove; 15, conductor rod; 16, limit rod; 17, first spring; 18, conductor block; 19, stirring rod; 20, movable rod; 21, second spring; 22, rectangular groove; 23, limit block; 24, filter; 25, vent; 26, first annular cavity; 27, water conduit; 28, exhaust pipe; 29, air-water separation membrane; 30, water tank; 31, water pump; 32, first pulley; 33, second pulley; 34, belt; 35, second annular cavity; 36, rotating rod; 37, fixing seat; 38, substrate; 39, water outlet; 40, impeller; 41, conductive block; 42, second fixing rod; 43, conductive spherical shell; 44, alarm; 45, second groove; 46, fixing plate; 47, telescopic rod; 48, trapezoidal piston; 49, third spring. DETAILED DESCRIPTION

[0040] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0041] In the description of the present invention, it should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", "clockwise", "counterclockwise" and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the referred device or element must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be understood as limiting the present invention.

[0042] In addition, the terms "first" and "second" are only used for descriptive purposes and cannot be understood as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Therefore, the features defined as "first" and "second" may explicitly or implicitly include one or more of the features. In the description of the present invention, "multiple" means two or more, unless otherwise clearly and specifically defined. In addition, the terms "installed", "connected" and "connected" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or it can be indirectly connected through an intermediate medium, or it can be the internal connection of two components. For those of ordinary skill in the art, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0043] See also Figures 1 to 11 The present invention provides a chemical vapor deposition device, and the technical solution is as follows:

[0044] A chemical vapor deposition device includes a box body 1, a box cover 2 hinged on the box body 1, and a feed port 3 fixedly installed on the box cover 2. A buffer box 4 is fixedly installed on the inner wall of the box body 1. The bottom of the feed port 3 is connected to the upper end of the buffer box 4. A first fixing rod 5 is fixedly installed inside the buffer box 4. A fan blade 6 is provided at the lower end of the first fixing rod 5, and the fan blade 6 is arranged inside the buffer box 4. A plurality of ventilation holes 7 are opened at the bottom of the buffer box 4. A driving mechanism for driving the fan blade 6 to rotate is provided on the box body 1.

[0045] By setting up the first fixed rod 5, fan blades 6, buffer box 4 and other mechanisms, the gas to be deposited enters the interior of the box body 1 from the feed port 3, and the fan blades 6 are driven to rotate by the driving device. The rotating fan blades 6 form an airflow at the feed port 3, which accelerates the speed of the gas to be deposited entering the buffer box 4. The gas to be deposited diffuses to the lower end of the buffer box 4 through the vent hole 7, so that the gas to be deposited is evenly diffused into the inner cavity of the box body 1.

[0046] As an embodiment of the present invention, refer to Figure 1 , 2 , 3, 6, the driving mechanism includes a motor 8 fixedly mounted on the outside of the box body 1, the output end of the motor 8 is fixedly connected to a worm 9, the worm 9 passes through one side of the box body 1 and is rotatably mounted on the other side of the box body 1, a driving rod 11 is provided in the inner cavity of the box body 1, the top of the driving rod 11 is rotatably mounted on the bottom wall of the buffer box 4, a worm wheel 10 is fixedly mounted on the driving rod 11, and the worm 9 and the worm wheel 10 are meshed with each other.

[0047] By setting up mechanisms such as a motor 8, a worm 9, and a worm wheel 10, the rotation of the output shaft of the motor 8 is used to drive the worm 9 to rotate, and the worm 9 and the worm wheel 10 are meshed with each other, so that the worm 9 drives the worm wheel 10 to rotate, and then drives the rotation of the driving rod 11, thereby driving the rotation of the fan blades 6, thereby driving the fan blades 6.

[0048] As an embodiment of the present invention, refer to Figure 2 , 7 A topless heating box 12 is provided at the bottom end of the buffer box 4, a heating plate 13 is fixedly mounted on the inner wall of the heating box 12, a first groove 14 is opened on the side wall of the feed port 3, a conductor rod 15 is hinged inside the first groove 14, a limit rod 16 is fixedly mounted on the inner wall of the first groove 14, the limit rod 16 is an arc-shaped structure, and the conductor rod 15 slides on the limit rod 16, a first spring 17 is fixedly connected to the top wall of the first groove 14, the bottom end of the first spring 17 is fixedly connected to the conductor rod 15, a conductor block 18 is fixedly mounted on the bottom wall of the first groove 14, and the conductor rod 15 and the conductor block 18 are both electrically connected to the power supply.

[0049] By setting up the heating plate 13, the conductor rod 15, the conductor block 18 and other mechanisms, when the deposition gas enters the feed port 3 under the acceleration of the fan blade 6, the conductor rod 15 is driven by the airflow to overcome the pulling force of the first spring 17 and deflects downward. Under the limitation of the limiting rod 16, the conductor rod 15 rotates into the first groove 14 until the conductor rod 15 contacts the conductor block 18. Here, the circuit is connected, and the heating plate 13 starts to heat the heating box 12. When the gas introduction is stopped, the conductor rod 15 is reset, and the circuit is disconnected here, and the heating plate 13 stops heating.

[0050] As an embodiment of the present invention, refer to Figure 2 , 4 8. A filter screen 24 is fixedly installed on the side wall of the heating box 12 near the buffer box 4. The driving rod 11 passes through the buffer box 4 and the filter screen 24 and extends to the bottom of the filter screen 24. Four symmetrically arranged stirring rods 19 are provided at the upper and lower ends of the filter screen 24, and the eight stirring rods 19 are fixedly installed on the driving rod 11. A movable rod 20 is slidably installed inside the stirring rod 19. One end of the movable rod 20 is fixedly connected to a second spring 21, and one end of the second spring 21 is fixedly connected to the inner wall of the stirring rod 19. A rectangular groove 22 is provided at the bottom of the movable rod 20. Four oblique limit blocks 23 are fixedly installed on the bottom wall of the heating box 12 and the filter screen 24. A plurality of vents 25 are provided at the bottom of the heating box 12.

[0051] By setting up mechanisms such as a stirring rod 19, a movable rod 20, and a limit block 23, the stirring rod 19 is driven to rotate under the rotation of the driving rod 11. When the stirring rod 19 rotates to above the limit block 23, the rectangular groove 22 at the bottom of the movable rod 20 slides toward the inside of the stirring rod 19 under the limiting action of the limit block 23. After the stirring rod 19 continues to rotate, the rectangular groove 22 disengages from the limit block 23, and the movable rod 20 slides toward the outside of the stirring rod 19 under the elastic force of the second spring 21, and this reciprocating process allows the heat inside the heating box 12 to fully diffuse in the gas to be deposited.

[0052] As an embodiment of the present invention, refer to Figure 2 , 9 A first annular cavity 26 is provided inside the side wall of the housing 1, a water pipe 27 is wound inside the first annular cavity 26, a plurality of exhaust pipes 28 are fixedly mounted on the water pipe 27, a gas-water separation membrane 29 is fixedly mounted inside the plurality of exhaust pipes 28, two water tanks 30 are provided at the bottom end of the housing 1, a water port 39 is provided between the two water tanks 30, a water pump 31 is provided outside the housing 1, a water outlet pipe of the water pump 31 is communicated with one of the water tanks 30, a water outlet pipe of the water pump 31 is connected with one end of the water pipe 27 through a hose, a water inlet end of the water pipe 27 is communicated with another water tank 30, a first pulley 32 is fixedly mounted on the worm 9, a second pulley 33 is fixedly mounted on one side of the water pump 31, the first pulley 32 and the second pulley 33 are connected through a belt 34, a second annular cavity 35 is provided inside the side wall of the heating box 12, one end of the exhaust pipe 28 is communicated with the second annular cavity 35.

[0053] By setting up the water pipe 27, the exhaust pipe 28, the gas-water separation membrane 29 and other mechanisms, a large amount of heat is released when the deposited gas flows into the bottom from the vent 25 to react with the reaction gas to form a precipitate. The motor 8, the first pulley 32 and the second pulley 33 are used to drive the water pump 31 to operate, and the cooling water in the water tank 30 is pumped into the water pipe 27, and the cooling water then enters the water tank 30 on the other side. After the heat is transferred, the cooling water in the water pipe 27 absorbs heat to generate steam, thereby realizing the heat dissipation of the box body 1, and the water vapor passes through the gas-water separation membrane 29 into the second annular cavity 35 to heat the heating box 12, thereby realizing the energy recycling.

[0054] As an embodiment of the present invention, refer to Figure 2 , 5 , 10, a rotating rod 36 is rotatably installed between the two water tanks 30, the rotating rod 36 passes through the bottom wall of the box body 1 and extends into the inner cavity of the box body 1, a fixing seat 37 is fixedly installed on the top of the rotating rod 36, a base plate 38 is fixedly installed on the upper end of the fixing seat 37, an impeller 40 is provided inside the water outlet 39, and the impeller 40 is fixedly installed on the rotating rod 36.

[0055] By setting up mechanisms such as the rotating rod 36 and the impeller 40, when the water pump 31 pumps out the cooling water in one of the water tanks 30, the cooling water in the other water tank 30 is replenished through the water inlet 39, thereby forming a water flow. The impeller 40 rotates under the drive of the water flow, thereby driving the rotating rod 36 to rotate, and the fixed seat 37 at the top of the rotating rod 36 starts to rotate, thereby driving the substrate 38 to rotate, thereby achieving uniform deposition on the substrate 38.

[0056] As an embodiment of the present invention, refer to Figure 2 , 9 10. A conductive block 41 is fixedly mounted on the bottom wall of the water tank 30 away from the water pump 31. Second fixing rods 42 are respectively provided on both sides of the conductive block 41. The second fixing rods 42 are fixedly mounted on the top wall and the bottom wall of the water tank 30. A conductive spherical shell 43 is slidably mounted between the second fixing rods 42. An alarm 44 is fixedly mounted on one side of the box body 1. The conductive block 41, the conductive spherical shell 43 and the alarm 44 are all electrically connected to the power supply through wires.

[0057] By providing the conductive block 41, the conductive spherical shell 43, the alarm 44 and other mechanisms, the cooling water in the water tank 30 makes the conductive spherical shell 43 float above the conductive block 41. As the cooling water gradually decreases due to the volatilization of hot steam, the conductive spherical shell 43 moves downward under the action of its own gravity until it contacts the conductive block 41. The circuit here is connected, and the alarm 44 sounds an alarm to remind the staff to manually fill the water.

[0058] As an embodiment of the present invention, refer to Figure 2 , 8 The bottom wall of the heating box 12 is provided with a plurality of second grooves 45, and the plurality of second grooves 45 are connected with the vent 25. A fixing plate 46 is fixedly installed inside the second groove 45, and a telescopic rod 47 is fixedly installed on the fixing plate 46. A trapezoidal piston 48 is fixedly installed on the upper end of the telescopic rod 47. A third spring 49 is sleeved on the telescopic rod 47, and the two ends of the third spring 49 are respectively fixedly connected to the fixing plate 46 and the trapezoidal piston 48.

[0059] By setting up mechanisms such as the telescopic rod 47, the trapezoidal piston 48, and the third spring 49, the heated gas to be deposited diffuses downward through the vent 25, and the trapezoidal piston 48 moves downward under pressure, squeezing the telescopic rod 47 and the third spring 49 to contract, so that the gas to be deposited enters the bottom through the vent 25 and the second groove 45 to react with the reaction gas. On the contrary, the reaction gas rises and pushes the trapezoidal piston 48 to move upward to block the vent 25 to prevent gas reflux.

[0060] Working principle: the gas to be deposited enters the interior of the box body 1 from the feed inlet 3, and the rotation of the output shaft of the motor 8 drives the worm 9 to rotate, and the worm 9 and the worm wheel 10 are meshed with each other, so that the worm 9 drives the worm wheel 10 to rotate, and then drives the rotation of the driving rod 11, thereby driving the rotation of the fan blade 6. The rotating fan blade 6 forms an airflow at the feed inlet 3, which accelerates the speed of the gas to be deposited entering the buffer box 4. The gas to be deposited diffuses to the lower end of the buffer box 4 through the vent 7. When the gas to be deposited enters the feed inlet 3 under the acceleration of the fan blade 6, the conductor rod 15 is driven by the airflow to overcome the pulling force of the first spring 17 and deflects downward Under the limit of the limit rod 16, the conductor rod 15 rotates into the first groove 14 until the conductor rod 15 contacts the conductor block 18. Here, the circuit is connected, and the heating plate 13 starts to heat the heating box 12. When the gas introduction is stopped, the conductor rod 15 is reset, and the circuit is disconnected here, and the heating plate 13 stops heating. Under the rotation of the driving rod 11, the stirring rod 19 is driven to rotate. When the stirring rod 19 rotates to above the limit block 23, the rectangular groove 22 at the bottom of the movable rod 20 slides into the inside of the stirring rod 19 under the limit action of the limit block 23. After the stirring rod 19 continues to rotate, the rectangular groove 22 is separated from the limit block 23. The movable rod 20 slides toward the outside of the stirring rod 19 under the elastic force of the second spring 21. When the deposited gas flows into the bottom from the vent 25 and reacts with the reaction gas to form a precipitate, a large amount of heat is released. The motor 8, the first pulley 32 and the second pulley 33 drive the water pump 31 to operate. The cooling water in the water tank 30 is pumped into the water pipe 27, and the cooling water enters the water tank 30 on the other side. After the heat transfer, the cooling water in the water pipe 27 absorbs the heat to generate steam, thereby realizing the heat dissipation of the box body 1. The water vapor passes through the gas-water separation membrane 29 and enters the second annular cavity 35 to heat the heating box 12. When the water pump 31 pumps out the cooling water in one of the water tanks 30, the cooling water in the other water tank 30 is supplemented by the water inlet 39, thereby forming a water flow. The impeller 40 rotates under the drive of the water flow, thereby driving the rotating rod 36 to rotate. The fixing seat 37 at the top of the rotating rod 36 starts to rotate, thereby driving the substrate 38 to rotate. The cooling water in the water tank 30 makes the conductor spherical shell 43 float above the conductive block 41. The cooling water gradually decreases due to the volatilization of hot steam. The conductor spherical shell 43 moves downward under the action of its own gravity until it contacts the conductive block 41. The circuit here is connected, and the alarm 44 sounds an alarm.

[0061] Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that various changes, modifications, substitutions and variations may be made to the embodiments without departing from the principles and spirit of the present invention, and that the scope of the present invention is defined by the appended claims and their equivalents.

Claims

1. A chemical vapor deposition device, comprising a box body (1), a box cover (2) hinged on the box body (1), and a feed port (3) fixedly mounted on the box cover (2), characterized in that: A buffer box (4) is fixedly mounted on the inner wall of the box body (1); the bottom of the feed port (3) is communicated with the upper end of the buffer box (4); a first fixing rod (5) is fixedly mounted inside the buffer box (4); a fan blade (6) is provided at the lower end of the first fixing rod (5), and the fan blade (6) is arranged inside the buffer box (4); a plurality of ventilation holes (7) are provided at the bottom of the buffer box (4); and a driving mechanism for driving the fan blade (6) to rotate is provided on the box body (1); The driving mechanism comprises a motor (8) fixedly mounted on the outside of the box (1); a worm (9) is fixedly connected to the output end of the motor (8); the worm (9) passes through one side of the box (1) and is rotatably mounted on the other side of the box (1); a driving rod (11) is provided in the inner cavity of the box (1); the top of the driving rod (11) is rotatably mounted on the bottom wall of the buffer box (4); a worm wheel (10) is fixedly mounted on the driving rod (11); and the worm (9) and the worm wheel (10) are meshed with each other; A heating box (12) without a roof is provided at the bottom end of the buffer box (4), a heating plate (13) is fixedly mounted on the inner wall of the heating box (12), a first groove (14) is provided on the side wall of the feed port (3), a conductor rod (15) is hingedly mounted inside the first groove (14), a limit rod (16) is fixedly mounted on the inner wall of the first groove (14), the limit rod (16) is an arc-shaped structure, and the conductor rod (15) slides on the limit rod (16), a first spring (17) is fixedly connected to the top wall of the first groove (14), the bottom end of the first spring (17) is fixedly connected to the conductor rod (15), a conductor block (18) is fixedly mounted on the bottom wall of the first groove (14), and both the conductor rod (15) and the conductor block (18) are electrically connected to a power supply; A filter screen (24) is fixedly installed on the side wall of the heating box (12) close to the buffer box (4); the driving rod (11) penetrates the buffer box (4) and the filter screen (24) and extends to the bottom of the filter screen (24); four symmetrically arranged stirring rods (19) are provided at the upper and lower ends of the filter screen (24), and the eight stirring rods (19) are fixedly installed on the driving rod (11); a movable rod (20) is slidably installed inside the stirring rod (19); one end of the movable rod (20) is fixedly connected to a second spring (21), and one end of the second spring (21) is fixedly connected to the inner wall of the stirring rod (19); a rectangular groove (22) is provided at the bottom of the movable rod (20); four oblique limit blocks (23) are fixedly installed on the bottom wall of the heating box (12) and the filter screen (24); and a plurality of vents (25) are provided at the bottom of the heating box (12); A first annular cavity (26) is provided inside the side wall of the box body (1), a water pipe (27) is arranged around the inside of the first annular cavity (26), a plurality of exhaust pipes (28) are fixedly installed on the water pipe (27), and a gas-water separation membrane (29) is fixedly installed inside the plurality of exhaust pipes (28). Two water tanks (30) are provided at the bottom end of the box body (1), a water opening (39) is provided between the two water tanks (30), a water pump (31) is provided outside the box body (1), and a water outlet pipe of the water pump (31) is connected to one of the water tanks (30). The water outlet pipe of the water pump (31) is connected to one end of the water pipe (27) through a hose, the water inlet end of the water pipe (27) is connected to another water tank (30), a first pulley (32) is fixedly mounted on the worm (9), a second pulley (33) is fixedly mounted on one side of the water pump (31), the first pulley (32) and the second pulley (33) are connected by a belt (34), a second annular cavity (35) is provided inside the side wall of the heating box (12), and one end of the exhaust pipe (28) is connected to the second annular cavity (35); A rotating rod (36) is rotatably mounted between the two water tanks (30), the rotating rod (36) penetrates the bottom wall of the box body (1) and extends into the inner cavity of the box body (1), a fixing seat (37) is fixedly mounted on the top end of the rotating rod (36), a base plate (38) is fixedly mounted on the upper end of the fixing seat (37), an impeller (40) is arranged inside the water outlet (39), and the impeller (40) is fixedly mounted on the rotating rod (36); A conductive block (41) is fixedly mounted on the bottom wall of the water tank (30) at a side away from the water pump (31); second fixing rods (42) are respectively provided on both sides of the conductive block (41); the second fixing rods (42) are fixedly mounted on the top wall and the bottom wall of the water tank (30); a conductor spherical shell (43) is slidably mounted between the second fixing rods (42); an alarm (44) is fixedly mounted on one side of the box body (1); and the conductive block (41), the conductor spherical shell (43) and the alarm (44) are all electrically connected to a power source via a wire; The bottom wall of the heating box (12) is provided with a plurality of second grooves (45), and the plurality of second grooves (45) are connected to the vent (25). A fixing plate (46) is fixedly installed inside the second groove (45), a telescopic rod (47) is fixedly installed on the fixing plate (46), a trapezoidal piston (48) is fixedly installed on the upper end of the telescopic rod (47), a third spring (49) is sleeved on the telescopic rod (47), and the two ends of the third spring (49) are respectively fixedly connected to the fixing plate (46) and the trapezoidal piston (48).

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