Damping system, substrate processing device including the same, and substrate processing method

Abstract

The present invention provides a damping system that monitors the pressure differential of gas in real time and automatically adjusts the exhaust volume when it exceeds a set pressure differential range, and can also be quickly manually adjusted in an emergency. It also provides a substrate processing device and a substrate processing method that can automatically control the pressure differential in a process chamber in real time and improve the stability of the process environment and the yield rate of the finished product. To this end, the damping system disclosed in the present invention includes: a housing having a flow path through which gas passes; a shaft component rotatably coupled to the housing; an adjustment plate disposed on the flow path, coupled to the shaft component to interlock and adjust the opening of the flow path; a pressure sensor that measures the pressure difference between a first exhaust pressure and a second exhaust pressure; a drive unit that rotates the shaft component; and a control unit that controls the drive unit so that the pressure difference between the first exhaust pressure and the second exhaust pressure is consistent with a preset reference pressure difference.

Description

Technical Field

[0001] The present invention relates to a damping system, a substrate processing device including the damping system, and a substrate processing method. Specifically, the present invention relates to a damping system that can monitor the pressure difference of gas passing through an exhaust pipe in real time, thereby automatically adjusting the exhaust volume when the pressure difference exceeds a set pressure difference range and can perform rapid manual adjustment in an emergency. The present invention also relates to a substrate processing device and a substrate processing method that can automatically control the pressure difference inside a process chamber in real time by using the damping system in a substrate manufacturing process, thereby improving the stability of the process environment and the yield of the finished product. Background Art

[0002] Semiconductors and display devices are manufactured by performing various unit processes for forming films, patterns, metal wiring, etc. In addition, in each unit process, it is necessary to use appropriate manufacturing equipment that meets the process conditions.

[0003] For example, a technique for controlling the exhaust volume of a process chamber during a wet process for processing a substrate is a very important factor in wet process conditions and directly affects the yield of finished products.

[0004] If the exhaust volume is relatively high, there is a problem of watermarks on the substrate surface during the evaporation of the liquid on the substrate surface. In addition, if the exhaust volume is relatively low, excessive mist will be generated, and the condensation caused by this mist may cause unevenness (mura).

[0005] Furthermore, when adding or modifying substrate processing equipment, if the exhaust volume is insufficient throughout the entire process, exhaust volume hunting may occur, thereby causing a problem of reduced yield of finished products.

[0006] Therefore, there is a need for an apparatus that can monitor the pressure difference state inside the process chamber in real time, which changes according to the substrate processing process, and uniformly maintain a set pressure difference state based on the pressure difference state.

[0007] As a prior art document, there is Korean Patent Publication No. 2006-0081525 (published on July 13, 2006). Summary of the Invention

[0008] Technical problem to be solved by the invention

[0009] The technical problem to be solved by the present invention is to provide a damping system which can monitor the pressure difference of the gas passing through the exhaust pipe in real time, automatically adjust the exhaust volume when the set pressure difference range is exceeded, and can perform rapid manual adjustment in an emergency.

[0010] Another technical problem to be solved by the present invention is to provide a substrate processing device and a substrate processing method, which monitor the process environment inside the process chamber in real time, adjust the exhaust volume when the process conditions inside the process chamber deviate from the preset values, and quickly and automatically adjust it to the set value, so as to maintain the desired process conditions in a short time.

[0011] The problems to be solved by the present invention are not limited to the above-mentioned technical problems. Ordinary technicians in the field to which the present invention belongs can clearly understand other unmentioned technical problems through the following description.

[0012] Means used to solve problems

[0013] In order to solve the above-mentioned problems, the damping system according to an embodiment of the present invention is characterized in that it includes: a shell having a flow path through which gas passes; a shaft component rotatably coupled to the shell; an adjustment plate arranged on the flow path, coupled to the shaft component to link and adjust the opening of the flow path; a pressure sensor, a part of which is exposed upstream of the adjustment plate and the other part is exposed downstream of the adjustment plate, for measuring the pressure difference between a first exhaust pressure upstream of the adjustment plate and a second exhaust pressure downstream of the adjustment plate; a drive unit that rotates the shaft component; a control unit that controls the drive unit so that the pressure difference between the first exhaust pressure and the second exhaust pressure is consistent with a preset reference pressure difference; and a control box that is coupled to the upper part of the shell and accommodates the drive unit and the control unit.

[0014] The damping system according to the embodiment of the present invention may further include: a manual adjustment portion, coupled to the shaft component, to adjust the opening of the adjustment plate.

[0015] In the damping system according to an embodiment of the present invention, the manual adjustment part may include: a connecting part, which is coupled to the shaft part and has a coupling hole on the outer surface; and an adjusting rod, one end of which is coupled to the coupling hole, so that the connecting part is rotated to adjust the opening of the adjustment plate.

[0016] In the damping system according to the embodiment of the present invention, the manual adjustment portion may further include: a guide slit formed at the control box and penetrated by the other end of the adjustment rod to guide movement of the adjustment rod.

[0017] In the damping system according to an embodiment of the present invention, the manual adjustment part may further include: an elastic component, which is arranged at the combining hole, elastically supports one end portion of the adjusting rod inserted into the combining hole, and separates the adjusting rod from the combining hole when the external force applied to the adjusting rod is removed.

[0018] In a damping system according to another embodiment of the present invention, the shaft component may include: a first shaft component, one end of which is coupled to the adjustment plate and has a key at the other end thereof rotatably coupled to the housing; and a second shaft component, one end of which is exposed to the outside of the housing and has a keyway coupled to the key at the other end thereof rotatably coupled to the housing.

[0019] Here, the manual adjustment part may include: an adjustment rod, which is combined with one end of the second shaft component, pressurizes the second shaft component along the axial direction to combine the key and the keyway, and rotates the first shaft component and the second shaft component together to adjust the opening of the adjustment plate.

[0020] The substrate processing apparatus according to an embodiment of the present invention is characterized by comprising: a process chamber in which a substrate is processed; an exhaust pipe connected to the process chamber; and the above-mentioned damping system provided on the exhaust pipe.

[0021] In a substrate processing device according to an embodiment of the present invention, when the pressure difference is less than the reference pressure difference, the control unit can control the driving unit to increase the opening of the adjustment plate, and when the pressure difference is greater than the reference pressure difference, the control unit can control the driving unit to reduce the opening of the adjustment plate.

[0022] The substrate processing apparatus according to an embodiment of the present invention may further include a blower disposed on the exhaust duct. Here, if the pressure difference does not match the reference pressure difference within a predetermined time, the control unit may open the adjustment plate to activate the blower and forcibly exhaust the gas within the process chamber.

[0023] The substrate processing apparatus according to an embodiment of the present invention may further include a humidity sensor for measuring the humidity inside the process chamber. Here, the control unit may control the driving unit to adjust the opening of the adjustment plate so that the humidity measured by the humidity sensor is consistent with a preset reference humidity.

[0024] The substrate processing apparatus according to the embodiment of the present invention may further include: a mist eliminator disposed in the process chamber and configured to remove mist generated in the process chamber.

[0025] The substrate processing apparatus according to the embodiment of the present invention may further include a purge unit disposed in the process chamber and configured to supply external air into the process chamber.

[0026] A substrate processing method according to an embodiment of the present invention uses the above-mentioned substrate processing device to process a substrate, and is characterized in that the method includes: a reference pressure difference setting step, setting the reference pressure difference between the first exhaust pressure and the second exhaust pressure according to the substrate processing conditions performed in the process chamber; a pressure difference measuring step, measuring the pressure difference between the first exhaust pressure and the second exhaust pressure; and an exhaust volume adjustment step, adjusting the exhaust volume of the gas passing through the exhaust pipe while adjusting the opening of the damping system, so that the pressure difference is consistent with the reference pressure difference.

[0027] In the substrate processing method according to an embodiment of the present invention, in the exhaust volume adjustment step, when the pressure difference is less than the reference pressure difference, the exhaust volume of the gas can be increased, and when the pressure difference is greater than the reference pressure difference, the exhaust volume of the gas can be reduced.

[0028] In the substrate processing method according to an embodiment of the present invention, in the exhaust volume adjustment step, when the pressure difference is inconsistent with the reference pressure difference within a preset set time, the damping system and the blower can be operated to forcibly exhaust the gas inside the process chamber.

[0029] In addition, a substrate processing method according to another embodiment of the present invention uses the above-mentioned substrate processing device to process the substrate, and is characterized in that the method includes: a reference pressure difference and reference humidity setting step, which sets the reference pressure difference between the first exhaust pressure and the second exhaust pressure, and the reference humidity inside the process chamber according to the substrate processing conditions performed in the process chamber; a pressure difference and humidity measuring step, which measures the pressure difference between the first exhaust pressure and the second exhaust pressure and the humidity inside the process chamber; and an exhaust volume adjustment step, which adjusts the exhaust volume of the gas passing through the exhaust pipe while adjusting the opening of the damping system, so that the pressure difference is consistent with the reference pressure difference, or the humidity inside the process chamber is consistent with the reference humidity.

[0030] In a substrate processing method according to another embodiment of the present invention, in the exhaust volume adjustment step, when the pressure difference is inconsistent with the reference pressure difference within a preset set time, or when the humidity measured by the humidity sensor is inconsistent with a preset reference humidity, the damping system and the blower can be operated to forcibly exhaust the gas inside the process chamber.

[0031] In a substrate processing method according to another embodiment of the present invention, in the exhaust volume adjustment step, a demister may be operated while forcibly exhausting the gas inside the process chamber to remove mist inside the process chamber.

[0032] In a substrate processing method according to another embodiment of the present invention, in the exhaust volume adjustment step, a purge unit may be operated while forcibly exhausting gas inside the process chamber to supply external air into the process chamber.

[0033] Effects of the Invention

[0034] According to the present invention, the process conditions inside the process chamber can be easily adjusted to pre-set reference values ​​such as reference pressure difference and reference humidity through a damping system including a pressure sensor, a control unit and a control box, and the measured values ​​of the process conditions can be monitored in real time, thereby enabling on-site workers to respond quickly.

[0035] Furthermore, the damping system with the built-in type pressure sensor according to the present invention can individually adjust the exhaust volume without requiring expensive PLC or PC control, thereby being able to reduce costs.

[0036] Furthermore, in the damping system with the manual adjustment unit according to the present invention, in the event of an emergency such as power outage, the exhaust volume can be quickly and easily adjusted by on-site workers regardless of the drive unit controlled by the control unit.

[0037] In addition, the substrate processing device according to the present invention monitors the changing pressure difference and humidity information of the process chamber in real time. If the measured pressure difference and humidity information of the process chamber deviate from the preset values, the exhaust volume is automatically adjusted to restore to the set value in a short time. In this way, the process environment of the process chamber can be uniformly maintained at suitable processing conditions, thereby greatly improving the yield of finished products.

[0038] It should be understood that the effects of the present invention are not limited to the above-mentioned effects, but include all effects that can be inferred from the structure of the present invention described in the detailed description of the present invention or the claims. BRIEF DESCRIPTION OF THE DRAWINGS

[0039] Figure 1 is an illustrative diagram illustrating a damping system according to an embodiment of the present invention.

[0040] Figure 2 yes Figure 1 Cross-sectional illustration of a damping system.

[0041] Figure 3 It shows Figure 1 An exploded illustration of an embodiment of a manual adjustment portion of a damping system.

[0042] Figure 4 It shows Figure 1 A cross-sectional illustration of another embodiment of a manual adjustment portion of a damping system.

[0043] Figure 5is an exemplary diagram illustrating a substrate processing apparatus according to an embodiment of the present invention.

[0044] Figure 6 is a flowchart illustrating a substrate processing method according to an embodiment of the present invention.

[0045] Figure 7 FIG. 1 is a flowchart for explaining an exhaust volume adjustment step of a substrate processing method according to an embodiment of the present invention.

[0046] Figure 8 is a flowchart illustrating a substrate processing method according to another embodiment of the present invention.

[0047] Figure 9 FIG. 1 is a flowchart for explaining an exhaust volume adjustment step of a substrate processing method according to another embodiment of the present invention.

[0048] Description of Reference Numerals

[0049] 100: Damping system 110: Housing

[0050] 120: shaft component 130: adjustment plate

[0051] 150: Driving unit 200: Process chamber

[0052] 300: Exhaust pipe DETAILED DESCRIPTION

[0053] Hereinafter, the preferred embodiment of the present invention which can specifically achieve the above-mentioned problem to be solved will be described with reference to the accompanying drawings. When describing this embodiment, the same names and the same reference numerals are used for the same structures, and additional description thereof is omitted.

[0054] Figure 1 is an illustrative diagram showing a damping system according to an embodiment of the present invention, Figure 2 yes Figure 1 Cross-sectional illustration of a damping system.

[0055] Reference Figure 1 and Figure 2 The damping system 100 according to this embodiment may include a housing 110 , a shaft component 120 , an adjustment plate 130 , a pressure sensor, a driving portion 150 , a control portion, and a control box 160 .

[0056] The housing 110 may have a flow path 111 through which gas passes. The housing 110 may be coupled to the exhaust pipe in the form of a flange.

[0057] The control box 160 may be coupled to an upper portion of the housing 110 and may house the pressure sensor, the driving part 150 , and at least a portion of the control part.

[0058] In addition, the control box 160 may have a display portion and an operation portion at an outer surface.

[0059] The display unit may display the pressure information received from the pressure sensor and the opening information received from the driving unit 150 in real time.

[0060] The operating unit can input or change the setting value of the control unit. In addition, the operating unit can have an emergency button for manual switching in an emergency.

[0061] The shaft member 120 may be rotatably coupled to the housing 110. In addition, the shaft member 120 may include an upper shaft member coupled to the upper portion of the adjustment plate 130 and a lower shaft member disposed on the same axis as the upper shaft member and coupled to the lower portion of the adjustment plate 130.

[0062] That is, the lower end of the upper shaft member may be coupled to the upper portion of the adjustment plate 130, and the upper end may be rotatably coupled through a shaft hole formed in the housing 110. The output end of the driving unit 150 may be coupled to the upper end of the upper shaft member exposed to the upper portion of the housing 110.

[0063] In addition, in the lower shaft member, the upper end portion may be coupled to the lower portion of the adjustment plate 130 , and the lower end portion may pass through a shaft hole formed at the housing 110 to be rotatably coupled.

[0064] A bearing member may be provided between the shaft member 120 and the shaft hole of the housing 110 .

[0065] The adjustment plate 130 has a shape corresponding to the flow path 111 and is disposed on the flow path 111 . The adjustment plate 130 can adjust the opening of the flow path 111 while being coupled to and linked with the shaft member 120 .

[0066] The pressure sensor may measure a pressure difference between a first exhaust pressure formed upstream of the regulating plate 130 and a second exhaust pressure formed downstream of the regulating plate 130 .

[0067] Such a pressure sensor is built into the damping system 100. A portion of such a built-in pressure sensor may be disposed to be exposed upstream of the adjustment plate 130, and another portion may be disposed to be exposed downstream of the adjustment plate 130. For example, a portion of the pressure sensor may be disposed to be exposed in front of the housing 110 relative to the flow direction, and another portion may be disposed to be exposed in rear of the housing 110 relative to the flow direction.

[0068] Therefore, the pressure sensor can measure the pressure difference between a first exhaust pressure formed upstream and a second exhaust pressure formed downstream of the damping system 100. The pressure difference thus measured and calculated can be transmitted to the control unit.

[0069] As such a pressure sensor, a manometer can be used.

[0070] Of course, unlike the above-mentioned embodiment, the pressure sensor may also include a first pressure sensor and a second pressure sensor, wherein the first pressure sensor measures the first exhaust pressure formed upstream of the regulating plate 130 and the second pressure sensor measures the second exhaust pressure formed downstream of the regulating plate 130.

[0071] The drive unit 150 can be housed in the control box 160 and can rotate the shaft member 120. The drive unit 150 according to this embodiment can be coupled to the upper shaft member. This drive unit 150 can adjust the opening of the flow path 111 while rotating the adjustment plate 130 along with the shaft member 120, thereby adjusting the amount of gas discharged through the flow path 111. The opening of the adjustment plate 130 adjusted by the drive unit 150 can be transmitted to the control unit.

[0072] As the driving unit 150 , a servo motor can be used.

[0073] The control unit can control the driving unit 150 and can adjust the opening of the regulating plate 130 while maintaining the pressure difference between the first exhaust pressure and the second exhaust pressure consistent with a preset reference pressure difference. Here, the reference pressure difference is a concept including a normal error tolerance range.

[0074] In addition, the opening degree of the adjustment plate 130 adjusted by the control unit and the pressure difference measured by the pressure sensor can be displayed in real time through the display unit of the control box 160.

[0075] Figure 3 It shows Figure 1 An exploded illustration of an embodiment of a manual adjustment portion of a damping system.

[0076] Refer again Figure 3 According to this embodiment, the damping system 100 may further include a manual adjustment portion 170 .

[0077] The manual adjustment unit 170 is a component that allows the user to directly manually adjust the opening of the adjustment plate 130, and when an emergency occurs, such as when the power supply to the damping system 100 is cut off, the on-site operator can immediately adjust the opening of the adjustment plate 130 regardless of the drive unit 150 controlled by the control unit.

[0078] The manual adjustment unit 170 can be switched to an operable state after the emergency button of the control box 160 is pressed.

[0079] The manual adjustment portion 170 according to this embodiment may include a connecting member 171 and an adjustment rod 172 .

[0080] The connecting member 171 can be coupled to the shaft member 120 and can be coupled to one end of the upper shaft member exposed to the upper portion of the housing 110.

[0081] In addition, a coupling hole 171a may be provided at the outer surface of the connection member 171. A plurality of coupling holes 171a may be provided in the rotation direction of the connection member 171. One end portion of the adjustment rod 172 may be inserted into the coupling hole 171a.

[0082] The adjustment rod 172 may be formed in a rod shape, and one end thereof may be inserted into the coupling hole 171a. That is, the user may manually adjust the opening of the adjustment plate 130 while rotating the connecting member 171 with the adjustment rod 172 inserted into the coupling hole 171a.

[0083] This regulating rod 172 can be separated from the connecting component 171 when not in use and kept in a user or a specific place. That is, regulating rod 712 also can be used in a key form so that the opening of regulating plate 130 can be regulated only by a specific user as needed.

[0084] Of course, the adjustment rod 172 can also be used in a state of being combined with the connecting component 171, so that anyone can adjust the opening of the adjustment plate 130 in an emergency.

[0085] In addition, the manual adjustment portion 170 may further include a guide slit 173 .

[0086] The guide slit 173 may be provided at the control box 160 configured to surround the connection member 171 .

[0087] That is, a guide slit 173 may be provided on one surface of the control box 160. The other end of the adjustment rod 172 inserted into the coupling hole 171a may penetrate the guide slit 173. The guide slit 173 may be provided with a first limit 173a at one end thereof and a second limit 173b at the other end thereof, so as to respectively limit the fully closed state and the maximum open state of the adjustment plate 130.

[0088] Therefore, the user can rotate the adjustment rod 172 so that it is in close contact with the first stopper 173a to quickly close the adjustment plate 130, and can rotate the adjustment rod 172 so that it is in close contact with the second stopper 173b to quickly open the adjustment plate 130. In addition, the opening of the adjustment plate 130 can be finely adjusted while the adjustment rod 172 is located between the first stopper 173a and the second stopper 173b.

[0089] In addition, the operator can visually check the opening degree of the adjustment plate 130 from the position of the adjustment rod 172 placed on the guide slit 173 .

[0090] Furthermore, a scale may be provided on the periphery of the guide slit 173 so that the opening degree of the adjustment plate 130 can be confirmed more accurately.

[0091] In addition, the manual adjustment portion 170 may further include an elastic component 174 .

[0092] The elastic member 174 may be disposed inside the coupling hole 171 a and may elastically support one end portion of the adjustment rod 172 inserted into the coupling hole 171 a .

[0093] Thus, when the external force applied to the adjustment rod 172 by the user is removed, the adjustment rod 172 can be separated from the coupling hole 171a by the restoring force of the elastic member 174. In addition, the manual adjustment portion 170 may further include a sleeve 175 disposed inside the coupling hole 171a.

[0094] The sleeve 175 is provided at the inner circumferential surface of the coupling hole 171 a and may guide the insertion action of the adjustment rod 172 inserted into the coupling hole 171 a.

[0095] Figure 4 It shows Figure 1 A cross-sectional illustration of another embodiment of a manual adjustment portion of a damping system.

[0096] Refer again Figure 4 , the manual adjustment portion 180 according to the present embodiment may include an adjustment rod 181 directly connected to the shaft member 120 .

[0097] The shaft member 120 may include a first shaft member 121 and a second shaft member 122 .

[0098] In the first shaft member 121 , one end portion thereof is coupled to the lower end portion of the adjustment plate 130 , and a key 121 a may be provided at the other end portion thereof rotatably coupled to the shaft hole of the housing 110 .

[0099] In the second shaft member 122 , one end portion thereof is exposed to the outside of the housing 110 , and a key groove 122 a coupled with the key 121 a may be provided at the other end portion thereof rotatably coupled to the shaft hole of the housing 110 .

[0100] In this way, the second shaft member 122 can be separated from the first shaft member 121 while descending in the shaft hole of the housing 110 along the axial direction, and can be axially coupled to the first shaft member 121 by engaging the key 121a and the keyway 122a while ascending along the axial direction.

[0101] Here, the adjustment rod 181 may be coupled to one end portion of the second shaft member 122 exposed to the outside of the housing 110 .

[0102] Therefore, when the user presses the adjustment rod 181 toward the upper side in the axial direction, the key groove 122a of the second shaft component 122 and the key 121a of the first shaft component 121 can be combined. Thereafter, the user can adjust the opening of the adjustment plate 130 together with the shaft component 120 while rotating the adjustment rod 181.

[0103] In addition, when the user's pressing force applied to the adjustment lever 181 is removed, the second shaft member 122 can naturally separate from the first shaft member 121 while descending due to its own weight. As a result, even if an external force is applied to the adjustment lever 181 due to the user's inadvertent operation in which the opening of the adjustment plate 130 is adjusted, it is possible to prevent erroneous operation.

[0104] As described above, the manual adjustment parts 170 and 180 according to the embodiment may use only one selected from the adjustment rod 172 and the adjustment lever 181 , or may use both the adjustment rod 172 and the adjustment lever 181 .

[0105] As shown in the drawing, a connection member 171 and an adjustment rod 172 may be connected to the upper shaft member connected to the driving unit 150 , and an adjustment lever 181 may be connected to the lower shaft member disposed on the opposite side of the driving unit 150 .

[0106] Hereinafter, a substrate processing apparatus according to an embodiment of the present invention will be described.

[0107] Figure 5 is an exemplary diagram illustrating a substrate processing apparatus according to an embodiment of the present invention.

[0108] Reference Figure 5 The substrate processing apparatus according to the present embodiment may include a process chamber 200 , an exhaust pipe 300 , and a damping system 100 .

[0109] The process chamber 200 provides a space for processing a substrate therein. The pressure inside the process chamber 200 needs to be uniformly maintained according to substrate processing conditions.

[0110] That is, by maintaining the exhaust volume from the process chamber 200 at an appropriate exhaust capacity, the pressure difference between the first exhaust pressure and the second exhaust pressure can be made consistent with a preset reference pressure difference. This reference pressure difference can be input through the operating unit of the damping system 100 and preset in the control unit.

[0111] The exhaust pipe 300 may communicate with the inside of the process chamber 200 to exhaust the gas inside the process chamber 200 to the outside.

[0112] The damping system 100 may be provided on the exhaust pipe 300 , and repeated description of this damping system 100 is omitted for the same reason as the above embodiment.

[0113] The control unit of the damping system 100 can control the driving unit 150 based on the difference between the pressure difference between the first exhaust pressure corresponding to the internal pressure of the process chamber 200 and the second exhaust pressure corresponding to the outside air and a preset reference pressure difference, thereby adjusting the opening of the adjustment plate 130 in real time. In other words, the damping system 100 adjusts the exhaust volume through the exhaust pipe 300, thereby ensuring that the pressure difference between the first exhaust pressure and the second exhaust pressure is always consistent with the preset reference pressure difference.

[0114] For example, when the pressure difference between the first exhaust pressure and the second exhaust pressure is less than the reference pressure difference, the driving unit 150 may be controlled to increase the opening of the adjustment plate 130 to increase the exhaust volume.

[0115] In addition, when the pressure difference between the first exhaust pressure and the second exhaust pressure is greater than the reference pressure difference, the driving part 150 may be controlled to reduce the opening of the adjustment plate 130 to reduce the exhaust volume.

[0116] In addition, the substrate processing apparatus according to this embodiment may further include a blower 400 .

[0117] The blower 400 may increase the exhaust volume through the exhaust pipe 300 and may forcibly exhaust the gas inside the process chamber 200 to the outside in a short time.

[0118] As described above, although the exhaust volume of the damping system 100 is adjusted based on the difference between the pressure difference between the first exhaust pressure and the second exhaust pressure and the reference pressure difference, when the pressure difference between the first exhaust pressure and the second exhaust pressure is inconsistent with the reference pressure difference within a predetermined time, the blower 400 can be operated while the adjustment plate 130 of the damping system 100 is fully opened, thereby forcibly discharging the gas inside the process chamber 200 to the outside in a short time.

[0119] In addition, the substrate processing apparatus according to this embodiment may further include a humidity sensor 500 .

[0120] That is, the control unit of the damping system 100 may also control the driving unit 150 to adjust the opening of the adjustment plate 130 so that the humidity measured by the humidity sensor 500 is consistent with a preset reference humidity. In this case, the humidity inside the process chamber 200 measured by the humidity sensor 500 may be displayed on the display unit of the control box 160, and the user may input and set the reference humidity through the operation unit of the control box 160.

[0121] For example, when the humidity inside the process chamber 200 is higher than the reference humidity, the driving part 150 may be controlled to increase the opening of the adjustment plate 130 to increase the exhaust volume.

[0122] In addition, when the humidity inside the process chamber 200 is lower than the reference humidity, the driving unit 150 may be controlled to reduce the opening of the adjustment plate 130 to reduce the exhaust volume.

[0123] As a result, the damping system 100 of the substrate processing apparatus adjusts the exhaust amount of gas passing through the exhaust pipe 300 based on the pressure or humidity of the process chamber 200 , thereby maintaining the pressure and humidity of the process chamber 200 at preset pressures and humidity.

[0124] In addition, the substrate processing apparatus according to this embodiment may further include a mist remover 600 .

[0125] The mist eliminator 600 may be disposed inside the process chamber 200 and may remove mist generated inside the process chamber 200 .

[0126] For example, when the humidity inside the process chamber 200 is higher than the reference humidity, the mist remover 600 may be driven to remove mist inside the process chamber 200 so that the humidity inside the process chamber 200 is consistent with the reference humidity.

[0127] Such a demister 600 may include a cooling unit.

[0128] The cooling unit can cool the gas or fluid used in substrate processing, such as flushing water, inside the process chamber 200. As such a cooling unit, an HPS (Heat Pump System) or the like can be used.

[0129] For example, when the humidity inside the process chamber 200 is higher than the reference humidity, the cooling unit may be operated to cool the gas inside the process chamber 200 or fluid used in substrate processing, such as rinse water, to condense the mist and remove the mist.

[0130] In addition, as described above, the mist eliminator 600 may work together when the adjustment plate 130 of the damping system 100 is fully opened while forcibly exhausting the gas inside the process chamber 200 to the outside using the blower 400 .

[0131] In addition, the substrate processing apparatus according to this embodiment may further include a purge unit 700 .

[0132] The purge unit 700 may be provided on the process chamber 200 and may include a purge valve for ventilation. The purge unit 700 opens the purge valve and supplies external air into the process chamber 200, thereby making the pressure difference in the process chamber 200 consistent with the reference pressure difference or restoring the set reference humidity in a short time.

[0133] In addition, as described above, the purge unit 700 may work together while fully opening the adjustment plate 130 of the damping system 100 and forcibly exhausting the gas inside the process chamber 200 to the outside using the blower 400 .

[0134] As a result, in the process of forcibly exhausting the gas inside the process chamber 200 through the damping system 100 and the blower 400, as the external air flows into the interior of the process chamber 200 through the purge unit 700, the exhaust volume of the gas through the exhaust pipe 300 can be sharply increased, thereby, the interior of the process chamber 200 can maintain the desired process environment in a shorter time.

[0135] Thus, the substrate processing apparatus according to this embodiment can not only automatically adjust the exhaust volume through the damping system 100, but also forcibly and rapidly increase the exhaust volume through the blower 400 and the purge unit 700, thereby maintaining a stable process environment in the process chamber 200 for a short period of time. In addition, by additionally operating the demister 600 including the cooling unit, the process environment can be maintained stably under all circumstances.

[0136] Hereinafter, a substrate processing method according to an embodiment of the present invention will be described.

[0137] Figure 6 is a flowchart illustrating a substrate processing method according to an embodiment of the present invention, Figure 7 FIG. 1 is a flowchart for explaining an exhaust volume adjustment step of a substrate processing method according to an embodiment of the present invention.

[0138] Reference Figure 6 and Figure 7 The substrate processing method according to this embodiment may include a reference pressure difference setting step S110 , a pressure difference measuring step S120 , and an exhaust volume adjusting step S130 .

[0139] The reference pressure difference setting step S110 may be a step of setting a reference pressure difference between a first exhaust pressure formed upstream of the damping system 100 and a second exhaust pressure formed downstream of the damping system 100 .

[0140] The reference pressure difference can be set to an appropriate reference pressure difference required for each process chamber 200 according to substrate processing conditions performed in the process chamber 200. Here, the reference pressure difference is a concept including a normal error tolerance range.

[0141] This reference pressure difference can be directly set by the user through the operation unit and the display unit provided at the control box 160 of the damping system 100 .

[0142] The pressure difference measuring step S120 may be a step of measuring the pressure difference between the first exhaust pressure and the second exhaust pressure in real time.

[0143] The pressure difference between the first exhaust pressure and the second exhaust pressure may be measured and calculated by a pressure sensor built into the damping system 100 .

[0144] In addition, the calculated pressure difference can be displayed in real time through the display unit of the control box 160.

[0145] The exhaust volume adjustment step S130 may be a step of adjusting the exhaust volume of the gas passing through the exhaust pipe 300 while adjusting the opening of the damping system 100 so that the pressure difference between the first exhaust pressure and the second exhaust pressure is consistent with the reference pressure difference.

[0146] For example, when the pressure difference between the first exhaust pressure and the second exhaust pressure is less than the reference pressure difference, the driving unit 150 may be controlled to increase the opening of the adjustment plate 130 to increase the exhaust volume.

[0147] In addition, when the pressure difference between the first exhaust pressure and the second exhaust pressure is greater than the reference pressure difference, the driving part 150 may be controlled to reduce the opening of the adjustment plate 130 to reduce the exhaust volume.

[0148] At this time, although the exhaust volume of the damping system 100 is adjusted based on the difference between the pressure difference between the first exhaust pressure and the second exhaust pressure and the reference pressure difference, when the pressure difference between the first exhaust pressure and the second exhaust pressure is inconsistent with the reference pressure difference within a predetermined time, the gas inside the process chamber 200 can be forcibly discharged to the outside.

[0149] In this case, by operating the blower 400 while fully opening the adjustment plate 130 of the damping system 100 , the gas inside the process chamber 200 may be forcibly exhausted to the outside in a short time.

[0150] In this way, by forcibly exhausting the gas inside the process chamber 200 to the outside in a short period of time, the pressure difference between the first exhaust pressure and the second exhaust pressure can be made consistent with the reference pressure difference in a short period of time, and the process environment inside the process chamber 200 can be restored to a stable state. In other words, the pressure difference, humidity, and fog environment inside the process chamber 200 can be restored to suitable processing conditions.

[0151] Figure 8 is a flow chart illustrating a substrate processing method according to another embodiment of the present invention. Figure 9 FIG. 1 is a flowchart for explaining an exhaust volume adjustment step of a substrate processing method according to another embodiment of the present invention.

[0152] Reference Figure 8 and Figure 9 The substrate processing method according to this embodiment may include a reference pressure difference and reference humidity setting step S210 , a pressure difference and humidity measuring step S220 , and an exhaust volume adjusting step S230 .

[0153] The reference pressure difference and reference humidity setting step S210 may be a step of setting a reference pressure difference between a first exhaust pressure formed upstream of the damping system 100 and a second exhaust pressure formed downstream of the damping system 100 , and setting a reference humidity inside the process chamber 100 .

[0154] The reference pressure difference and the reference humidity may be appropriately set according to substrate processing conditions performed in the process chamber 200 .

[0155] The reference pressure difference and the reference humidity can be directly set by the user through the operation unit and the display unit provided at the control box 160 of the damping system 100 .

[0156] The pressure difference and humidity measuring step S220 may be a step of measuring the pressure difference between the first exhaust pressure and the second exhaust pressure in real time, and measuring the humidity inside the process chamber 200 in real time.

[0157] The pressure difference between the first exhaust pressure and the second exhaust pressure may be measured and calculated by a pressure sensor built into the damping system 100 , and the humidity may be measured by a humidity sensor 500 disposed inside the process chamber 200 .

[0158] In addition, the calculated pressure difference and humidity may be displayed in real time through a display unit provided at the control box 160 .

[0159] The exhaust volume adjustment step S230 can also adjust the exhaust volume of the gas passing through the exhaust pipe while adjusting the opening of the damping system 100, so that the pressure difference between the first exhaust pressure and the second exhaust pressure is consistent with the reference pressure difference, or the humidity inside the process chamber 200 is consistent with a pre-set reference humidity.

[0160] That is, when the pressure difference between the first exhaust pressure and the second exhaust pressure is less than the reference pressure difference, or when the humidity inside the process chamber 200 is higher than the reference humidity, the driving part 150 can be controlled to increase the opening of the adjustment plate 130 to increase the exhaust volume.

[0161] In addition, when the pressure difference between the first exhaust pressure and the second exhaust pressure is greater than the reference pressure difference, or when the humidity inside the process chamber 200 is lower than the reference humidity, the driving part 150 can be controlled to reduce the opening of the adjustment plate 130 to reduce the exhaust volume.

[0162] As a result, the damping system 100 of the substrate processing apparatus adjusts the exhaust volume of the gas passing through the exhaust pipe 300 based on the pressure difference or humidity value of the process chamber 200, thereby making the pressure difference and humidity of the process chamber 200 consistent with the preset reference pressure difference and humidity in a short time.

[0163] In addition, although the exhaust volume of the damping system 100 is adjusted based on the difference between the pressure difference between the first exhaust pressure and the second exhaust pressure and the reference pressure difference or the difference between the humidity measured by the humidity sensor and the reference humidity, when the pressure difference between the first exhaust pressure and the second exhaust pressure is inconsistent with the reference pressure difference within a predetermined time, or the humidity measured by the humidity sensor is inconsistent with the reference humidity, the gas inside the process chamber 200 can be forcibly discharged to the outside.

[0164] In this case, by operating the blower 400 while fully opening the adjustment plate 130 of the damping system 100 , the gas inside the process chamber 200 may be forcibly exhausted to the outside in a short time.

[0165] In addition, during such forced exhaust, the purge unit 700 may be additionally operated to supply external air into the process chamber, thereby rapidly increasing the exhaust amount of the gas passing through the exhaust pipe 300 .

[0166] In addition, when the humidity inside the process chamber 200 is higher than the reference humidity during forced exhaust, the defogger 600 including the cooling unit may be additionally driven to remove mist inside the process chamber 200 , thereby rapidly reducing the humidity inside the process chamber 200 .

[0167] In this way, by forcibly exhausting the gas inside the process chamber 200 in a short time, the pressure difference, humidity and fog environment inside the process chamber 200 can be quickly restored to appropriate processing conditions.

[0168] In particular, the damping system 100 not only automatically adjusts the exhaust volume, but also allows the blower 400 and the purge unit 700 to forcibly and rapidly increase the exhaust volume, thereby maintaining a stable process environment in the process chamber 200 for a short period of time. Furthermore, by additionally operating the demister 600 including the cooling unit, the process environment can be maintained stably under all circumstances.

[0169] As described above, according to the damping system 100 of the present invention, the user can easily set or change the set values ​​such as the reference pressure difference and the reference humidity through the operating unit provided at the control box 160, and can monitor the measurement values ​​displayed by the display unit in real time, thereby enabling on-site workers to respond quickly.

[0170] Furthermore, the process conditions inside the process chamber can be easily adjusted to pre-set reference values ​​such as reference pressure difference and reference humidity by using a damping system including a pressure sensor, a control unit, and a control box.

[0171] Furthermore, the damping system with the built-in type pressure sensor according to the present invention can individually adjust the exhaust volume without requiring expensive PLC or PC control, thereby being able to reduce costs.

[0172] Furthermore, in the damping system with the manual adjustment unit according to the present invention, in the event of an emergency such as power outage, the exhaust volume can be quickly and easily adjusted by on-site workers regardless of the drive unit controlled by the control unit.

[0173] In addition, the changing pressure difference and humidity information of the process chamber 200 are monitored in real time. When the measured pressure difference and humidity information of the process chamber 200 deviate from the preset values, the exhaust volume is automatically adjusted to restore to the set value in a short time. In this way, the process environment of the process chamber 200 can be uniformly maintained at suitable processing conditions, thereby improving the yield of finished products.

[0174] Furthermore, even when adding or modifying substrate processing apparatuses, an appropriate exhaust volume can be ensured throughout the entire process, and fluctuations in the exhaust volume caused thereby can be prevented, thereby further improving the yield of finished products.

[0175] As described above, the preferred embodiments of the present invention have been described with reference to the accompanying drawings. However, those skilled in the art may make various modifications or changes to the present invention without departing from the scope of the concept and field of the present invention described in the claims.

Claims

1. A damping system, characterized in that: include: a shell having a flow path for gas to pass through; a shaft member rotatably coupled to the housing; an adjusting plate, disposed on the flow path, and coupled with the shaft component to adjust the opening of the flow path; a pressure sensor, a portion of which is exposed upstream of the regulating plate and another portion of which is exposed downstream of the regulating plate, for measuring a pressure difference between a first exhaust pressure upstream of the regulating plate and a second exhaust pressure downstream of the regulating plate; a driving unit for rotating the shaft member; a control unit configured to control the driving unit so that a pressure difference between the first exhaust pressure and the second exhaust pressure is consistent with a preset reference pressure difference; a control box, coupled to the upper portion of the housing, housing the driving unit and the control unit; as well as The manual adjustment part is combined with the shaft component to adjust the opening of the adjustment plate. The manual adjustment part includes: a connecting component, which is connected to the shaft component and has a connecting hole on the outer surface; an adjusting rod, one end of which is connected to the connecting hole, so that the connecting component is rotated to adjust the opening of the adjusting plate; and a guide slit formed at the control box, which is penetrated by the other end of the adjusting rod to guide the movement of the adjusting rod.

2. The damping system according to claim 1, characterized in that The manual adjustment portion further includes an elastic component disposed at the coupling hole, elastically supporting one end of the adjustment rod inserted into the coupling hole, and separating the adjustment rod from the coupling hole when the external force applied to the adjustment rod is removed.

3. A damping system, characterized in that: include: a shell having a flow path for gas to pass through; a shaft member rotatably coupled to the housing; an adjusting plate, disposed on the flow path, and coupled with the shaft component to adjust the opening of the flow path; a pressure sensor, a portion of which is exposed upstream of the regulating plate and another portion of which is exposed downstream of the regulating plate, for measuring a pressure difference between a first exhaust pressure upstream of the regulating plate and a second exhaust pressure downstream of the regulating plate; a driving unit for rotating the shaft member; a control unit configured to control the driving unit so that a pressure difference between the first exhaust pressure and the second exhaust pressure is consistent with a preset reference pressure difference; a control box, coupled to the upper portion of the housing, housing the driving unit and the control unit; as well as A manual adjustment part, which is combined with the shaft component to adjust the opening of the adjustment plate, The shaft component comprises: a first shaft member having one end portion coupled to the adjustment plate and having a key at the other end portion thereof rotatably coupled to the housing; and a second shaft member having one end exposed to the outside of the housing and having a key groove coupled to the key at the other end rotatably coupled to the housing; The manual adjustment portion includes an adjustment rod coupled to one end of the second shaft component, pressurizing the second shaft component along the axial direction to engage the key and the keyway, and rotating the first shaft component and the second shaft component together to adjust the opening of the adjustment plate.

4. A substrate processing device, characterized in that: include: a process chamber, in which substrates are processed; an exhaust pipe connected to the process chamber; as well as The damping system according to claim 1, is provided on the exhaust pipe.

5. The substrate processing apparatus according to claim 4, wherein: When the pressure difference is smaller than the reference pressure difference, the control unit controls the driving unit to increase the opening of the adjustment plate. When the pressure difference is greater than the reference pressure difference, the control unit controls the driving unit to reduce the opening of the adjustment plate.

6. The substrate processing apparatus according to claim 5, wherein: It also includes a blower arranged on the exhaust pipe, When the pressure difference does not match the reference pressure difference within a preset time, the control unit opens the adjustment plate and operates the blower to forcibly exhaust the gas inside the process chamber.

7. The substrate processing apparatus according to claim 4, wherein: Also included is a humidity sensor for measuring the humidity inside the process chamber, The control unit controls the driving unit to adjust the opening of the adjustment plate so that the humidity measured by the humidity sensor matches a preset reference humidity.

8. The substrate processing apparatus according to claim 4, wherein: Also includes: The demister is arranged in the process chamber and is used to remove the mist generated inside the process chamber.

9. The substrate processing apparatus according to claim 4, wherein: Also includes: The purge unit is disposed in the process chamber and is used to supply external air into the process chamber.

10. A substrate processing method using the substrate processing apparatus according to claim 4, characterized in that: The method includes: a reference pressure difference setting step of setting a reference pressure difference between the first exhaust pressure and the second exhaust pressure according to substrate processing conditions performed in the process chamber; a pressure difference measuring step of measuring the pressure difference between the first exhaust pressure and the second exhaust pressure; and an exhaust volume adjustment step, adjusting the exhaust volume of the gas passing through the exhaust pipe while adjusting the opening of the damping system so that the pressure difference is consistent with the reference pressure difference, In the exhaust volume adjustment step, when an emergency occurs in which the power supply to the damping system is cut off, the adjustment rod of the manual adjustment part is used to link and rotate the connecting component and the adjustment plate together to manually adjust the opening of the damping system.

11. The substrate processing method according to claim 10, wherein: In the exhaust volume adjustment step, the exhaust volume of the gas is increased when the pressure difference is smaller than the reference pressure difference, and the exhaust volume of the gas is reduced when the pressure difference is larger than the reference pressure difference.

12. The substrate processing method according to claim 11, wherein: In the exhaust volume adjustment step, when the pressure difference is inconsistent with the reference pressure difference within a preset set time, the damping system and the blower are operated to forcibly exhaust the gas inside the process chamber.

13. A substrate processing method using the substrate processing apparatus according to claim 7, characterized in that: The method includes: a reference pressure difference and reference humidity setting step of setting a reference pressure difference between the first exhaust pressure and the second exhaust pressure, and a reference humidity inside the process chamber according to substrate processing conditions performed in the process chamber; a pressure difference and humidity measuring step of measuring the pressure difference between the first exhaust pressure and the second exhaust pressure and the humidity inside the process chamber; and an exhaust volume adjustment step, adjusting the exhaust volume of the gas passing through the exhaust pipe while adjusting the opening of the damping system, so that the pressure difference is consistent with the reference pressure difference, or the humidity inside the process chamber is consistent with the reference humidity, In the exhaust volume adjustment step, when an emergency occurs in which the power supply to the damping system is cut off, the adjustment rod of the manual adjustment part is used to link and rotate the connecting component and the adjustment plate together to manually adjust the opening of the damping system.

14. The substrate processing method according to claim 13, wherein: In the exhaust volume adjustment step, when the pressure difference is inconsistent with the reference pressure difference within a preset set time, or when the humidity measured by the humidity sensor is inconsistent with a preset reference humidity, the damping system and the blower are operated to forcibly exhaust the gas inside the process chamber.

15. The substrate processing method according to claim 14, wherein: In the exhaust volume adjustment step, the gas inside the process chamber is forcibly exhausted and at the same time, a demister is operated to remove mist inside the process chamber.

16. The substrate processing method according to claim 14, wherein: In the exhaust volume adjustment step, the gas inside the process chamber is forcibly exhausted and a purge unit is operated to supply external air into the process chamber.

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