Method for manufacturing liquid crystal lens phase modulation device

Abstract

A liquid crystal phase modulation device and a manufacturing method thereof, wherein the liquid crystal phase modulation device comprises a first substrate, a second substrate, a liquid crystal layer and a plurality of spacers. The first substrate has a first electrode layer. The second substrate is opposite to the first substrate, wherein the second substrate has a second electrode layer. The liquid crystal layer is located between the first substrate and the second substrate. The spacer is located between the first substrate and the second substrate, wherein the spacer is located in an active area of ​​the liquid crystal phase modulation device. The distribution of the spacer is designed according to the curvature of the substrate, so as to keep the liquid crystal cell gap of the liquid crystal phase modulation device uniform.

Description

[0001] This application is a divisional application of a patent application with an application date of May 23, 2019, application number 201910435053.9, and invention name “Liquid crystal phase modulation device and manufacturing method thereof”. Technical Field

[0002] The present disclosure relates to a method for manufacturing a liquid crystal lens phase modulation device. Background Art

[0003] An electrically controlled optical modulator includes an electro-optical material layer (e.g., a liquid crystal layer) having a refractive index that can be adjusted according to an electric field. By designing the appropriate shape of the electrodes, the phase difference distribution of the electro-optical material layer can achieve various optical effects when a specific voltage is applied to it. For example, the electro-optical material layer can simulate optical elements such as lenses, gratings, and switches. Summary of the invention

[0004] In some embodiments of the present disclosure, the distribution of the spacers is designed according to the curvature of the substrate to maintain a uniform cell gap of the liquid crystal device. In addition, the shape of the spacers is designed to have a small effect on the rubbing process, so that the rubbed alignment layer can effectively align the liquid crystal molecules.

[0005] According to some embodiments of the present disclosure, a liquid crystal phase modulation device includes a first substrate, a second substrate, a liquid crystal layer, and a plurality of spacers. The first substrate has a first electrode layer. The second substrate is opposite to the first substrate, wherein the second substrate has a second electrode layer. The liquid crystal layer is located between the first substrate and the second substrate. The spacer is located between the first substrate and the second substrate, wherein the spacer is located in the active area of ​​the liquid crystal phase modulation device.

[0006] In some embodiments, the spacer includes a first spacer, a second spacer, and a third spacer, the second spacer is adjacent to the first spacer and the third spacer, and the distance between the first spacer and the second spacer is different from the distance between the second spacer and the third spacer.

[0007] In some embodiments, the liquid crystal phase modulation device further includes a sealant located between the first substrate and the second substrate and surrounding the liquid crystal layer. The first substrate has a first region and a second region, and the first region is closer to the sealant than the second region, and the density of the spacers in the second region is greater than the density of the spacers in the first region.

[0008] In some embodiments, the first electrode layer includes a plurality of electrodes, the electrodes are located in the active region, and the second electrode layer covers the active region.

[0009] In some embodiments, the first substrate further includes a first base substrate and a first dielectric layer. The first base substrate has a surface, wherein the first electrode layer is disposed on the surface of the first base substrate. The first dielectric layer is located between the liquid crystal layer and the first electrode layer, wherein the spacer is located between the first dielectric layer and the second substrate.

[0010] In some embodiments, the first electrode layer includes a plurality of first electrodes located in the active region, and the second electrode layer includes a plurality of second electrodes located in the active region.

[0011] In some embodiments, the first substrate further includes a first base substrate and a first dielectric layer. The first base substrate has a surface, wherein the first electrode layer is disposed on the surface of the first base substrate. The first dielectric layer is located between the liquid crystal layer and the first electrode layer, wherein the spacer is located between the first dielectric layer and the second substrate. The second substrate further includes a second base substrate and a second dielectric layer. The second base substrate has a surface, wherein the second electrode layer is disposed on the surface of the second base substrate. The second dielectric layer is located between the liquid crystal layer and the second electrode layer, wherein the spacer is located between the first dielectric layer and the second dielectric layer.

[0012] In some embodiments, the first substrate further includes an alignment layer located between the liquid crystal layer and the first electrode layer, wherein at least one of the spacers has a long axis, and the long axis is in the alignment direction of the alignment layer.

[0013] In some embodiments, the at least one of the spacers gradually becomes thinner in the alignment direction.

[0014] In some embodiments, the second substrate further includes an alignment layer located between the liquid crystal layer and the second electrode layer, wherein at least one of the spacers has a long axis, and the long axis is in the alignment direction of the alignment layer.

[0015] According to some embodiments of the present disclosure, a liquid crystal phase modulation device includes a first substrate, a second substrate, a liquid crystal layer, and at least one spacer. The second substrate is opposite to the first substrate. The liquid crystal layer is located between the first substrate and the second substrate, wherein at least one of the first substrate and the second substrate includes an alignment layer, and the alignment layer is adjacent to the liquid crystal layer. The spacer is located between the first substrate and the second substrate, wherein the spacer has a long axis, and the long axis is in the alignment direction of the alignment layer.

[0016] In some embodiments, a plurality of spacers are located in an active region of the liquid crystal phase modulation device.

[0017] In some embodiments, the spacer has a portion, the portion has an opposite sidewall, and the opposite sidewall is inclined relative to the alignment direction.

[0018] According to some embodiments of the present disclosure, a method for manufacturing a liquid crystal phase modulation device is provided. The method includes detecting the thickness of multiple parts of a reference liquid crystal layer of a reference liquid crystal phase modulation sample; determining a distribution according to the thickness of the parts of the reference liquid crystal layer; forming multiple spacers on a first substrate with the determined distribution; and combining the first substrate with a second substrate and the liquid crystal layer to obtain a liquid crystal phase modulation device.

[0019] In some embodiments, the method further includes forming an alignment layer on the first substrate after forming the spacer; and rubbing the alignment layer in the alignment direction, wherein the step of forming the spacer enables at least one of the spacers to have a long axis, and the long axis is in the alignment direction.

[0020] In some embodiments, the step of forming the spacer enables the at least one of the spacers to have a portion, the portion having opposite sidewalls, and the opposite sidewalls are inclined relative to the alignment direction.

[0021] In some embodiments, the method further includes combining a first reference substrate, a second reference substrate, a reference sealant, and a reference liquid crystal layer to form a reference liquid crystal phase modulation sample, wherein the thickness of the reference sealant is substantially equal to the thickness of the sealant of the liquid crystal phase modulation device. BRIEF DESCRIPTION OF THE DRAWINGS

[0022] The present disclosure can be understood from the following detailed description of the embodiments and the accompanying drawings:

[0023] Figure 1 is a flow chart of a method for manufacturing a liquid crystal phase modulation device according to some embodiments of the present disclosure;

[0024] Figure 2A A system for manufacturing a liquid crystal phase modulation device according to some embodiments of the present disclosure;

[0025] Figure 2B Describe multiple operating steps of a computer device according to some embodiments of the present disclosure;

[0026] Figures 3A to 3G Describes multiple intermediate stages of a method for manufacturing a liquid crystal phase modulation device according to some embodiments of the present disclosure;

[0027] FIG. 4A to FIG. 4C Describes multiple intermediate stages of a method for manufacturing a liquid crystal phase modulation device according to some embodiments of the present disclosure;

[0028] Figure 5 is a schematic cross-sectional view of a liquid crystal phase modulation device according to some embodiments of the present disclosure;

[0029] Figure 6is a cross-sectional schematic diagram of a liquid crystal phase modulation device according to some embodiments of the present disclosure; and

[0030] Fig. 7A and Figure 7B FIG. 4 is a top view of a spacer in a liquid crystal phase modulation device according to some embodiments of the present disclosure.

[0031]

Explanation of symbols

[0032] 100: Methods

[0033] 102~114: Steps

[0034] 200: System

[0035] 210: Detection equipment

[0036] 220: Computer device

[0037] 222~229: Operation steps

[0038] 230: Lithography equipment

[0039] 300: Reference liquid crystal phase modulation sample

[0040] 310: Substrate

[0041] 312: Base substrate

[0042] 314: Electrode

[0043] 316: Dielectric layer

[0044] 320: Substrate

[0045] 322: Base substrate

[0046] 324: Electrode layer

[0047] 330: Liquid crystal layer

[0048] 332: Part

[0049] 340: Sealing

[0050] 400: Liquid crystal phase modulation device

[0051] 410: First substrate

[0052] 412: Base substrate

[0053] 414: First electrode layer

[0054] 414a: First electrode

[0055] 416: Dielectric layer

[0056] 420: Second substrate

[0057] 422: Base substrate

[0058] 424: Second electrode layer

[0059] 424a: Second electrode

[0060] 430: Liquid crystal layer

[0061] 440: Sealing

[0062] 450, 450-1 to 450-5: Spacer

[0063] 450B: Bottom surface

[0064] 450-4B, 450-5B: Bottom surface

[0065] 450T: Top surface

[0066] 450-4T, 450-5T: Top surface

[0067] 452, 454: Part

[0068] 452S, 454S: Edge

[0069] 500: Friction cloth

[0070] A1, A2: Alignment layers

[0071] AD1, AD2: Alignment direction

[0072] P: Position

[0073] T, T': thickness

[0074] E1, E2: Edge

[0075] FDX: horizontal distance

[0076] FDY: vertical distance

[0077] AA: Active Area

[0078] SA: Sealed Area

[0079] AX, AY: distance

[0080] R1: Zone 1

[0081] R2: Second Zone

[0082] LA: Long axis

[0083] W1: Width

[0084] P1: Spacing DETAILED DESCRIPTION

[0085] The following will disclose multiple embodiments with the accompanying drawings. For the purpose of clear description, many practical details will be described together in the following description. However, it should be understood that these practical details should not be used to limit the present invention. That is, in some embodiments of the present invention, these practical details are not necessary. In addition, in order to simplify the drawings, some known and commonly used structures and elements will be shown in the drawings in a simple schematic manner.

[0086] Figure 1 FIG. 1 is a flow chart of a method 100 for manufacturing a liquid crystal phase modulation device 400 according to some embodiments of the present disclosure. Figure 2A A system 200 for manufacturing a liquid crystal phase modulation device 400 according to some embodiments of the present disclosure is shown. Figures 3A to 3G The following describes several intermediate stages of the method for manufacturing a liquid crystal phase modulation device 400 according to some embodiments of the present disclosure. These descriptions are for illustration only and are not intended to limit the scope of the following patent application. Figure 1 Additional steps may be performed before, during, and after the process, and in other embodiments of the process, some of the steps described below may be replaced or eliminated. The order of these steps / processes may be interchangeable.

[0087] refer to Figure 1 and Figure 3A , method 100 begins at step 102, wherein a substrate 310 is provided. Here, substrate 310 includes a base substrate 312, a plurality of electrodes 314 located on base substrate 312, a dielectric layer 316, and an alignment layer A1 thereon. Base substrate 312 may be a rigid and / or flexible substrate. For example, base substrate 312 is formed of a suitable transparent insulating material, such as glass, quartz, or a polymer material. Electrode 314 may be formed of a suitable transparent conductive material, such as indium tin oxide (ITO) or antimony tin oxide (ATO). Dielectric layer 316 is formed of silicon dioxide, a polymer, or other suitable dielectric materials. Alignment layer A1 may be formed of polyimide.

[0088] refer to Figure 1 and Figure 3BThe method 100 comes to step 104, and a reference liquid crystal phase modulation sample 300 is assembled. In detail, a reference substrate 310, a substrate 320, a liquid crystal layer 330 and a reference sealant 340 are combined to form a reference liquid crystal phase modulation sample 300. The substrates 310 and 320 are opposite to each other. The liquid crystal layer 330 is located between the substrates 310 and 320. The reference sealant 340 is located between the substrates 310 and 320 and surrounds the liquid crystal layer 330. The sealant 340 is designed to have an appropriate thickness so that the substrates 310 and 320 are separated and the liquid crystal layer 330 disposed therein has a corresponding thickness to achieve phase modulation, such as a lens effect. For example, the thickness of the sealant 340 may be in a range of about 10 microns to about 50 microns. In some embodiments, a thinning step may be performed to thin the bottom substrate 312 of the substrate 310 or the bottom substrate 322 of the substrate 320. In some implementations, a cutting step may be performed after assembly.

[0089] Here, the substrate 320 includes a base substrate 322, an electrode layer 324 located on the base substrate 322, and an alignment layer A2 thereon. The base substrate 322 can be a rigid and / or flexible substrate. For example, the base substrate 322 is composed of a suitable transparent insulating material, such as glass, quartz or a polymer material. The electrode layer 324 can be composed of a suitable transparent conductive material, such as indium tin oxide (ITO) or antimony tin oxide (ATO). The alignment layer A2 can be composed of polyimide. The alignment layer A2 can be rubbed according to the alignment direction AD1 of the alignment layer A1. For example, in a parallel-aligned (PA) liquid crystal configuration, the alignment direction of the alignment layer A2 can be parallel to the alignment direction AD1 of the alignment layer A1. In some other embodiments, for a twisted nematic (TN) liquid crystal configuration, the alignment direction of the alignment layer A2 may be perpendicular to the alignment direction AD1 of the alignment layer A1 .

[0090] In some embodiments, since the liquid crystal phase modulation sample 300 has a thin substrate, a large cell gap, and a large area, the substrates 312 and 322 may be curved, and the cell gap between the substrates 312 and 322 (e.g., the thickness of the liquid crystal layer 330) may vary at different locations. The combination of the substrates 312 and 322 may further intensify the non-uniformity of the cell gap therein. Figure 3C for Figure 3B Schematic diagram of a reference liquid crystal phase modulation sample 300. For example, Figure 3C In the embodiment, the thicknesses of the plurality of portions 332 of the liquid crystal layer 330 at various positions P may be different.

[0091] refer to Figure 1 , Figure 2A as well as Figure 3B and 3C The method 100 proceeds to step 106 to detect the liquid crystal phase modulation sample 300 to obtain the thickness T of the portion 332 of the liquid crystal layer 330 at each position P. In detail, the system 200 has a detection device 210 that can detect the optical characteristics of the liquid crystal phase modulation sample 300 at each position P. By analyzing the optical characteristics of the liquid crystal phase modulation sample 300 measured at each position P, the thickness T of the portion 332 of the liquid crystal phase modulation sample 300 at each position P is obtained.

[0092] In the present embodiment, the detected positions P are evenly distributed and are spaced at the same distance. In some other embodiments, the detected positions P may be set in different ways, such as randomly distributed. According to the detection device 210, the portion 332 may be detected sequentially or simultaneously. In some embodiments, for example, the detection device 210 may be a spectrometer, a spectrophotometer, or other appropriate device. In some embodiments, before detecting the thickness of the portion 332, the sealant 340 may be detected by an appropriate optical microscope and the position of the sealant 340 may be marked. When detecting the thickness of the portion 332, the position marked by the sealant 340 may be used as a reference for the position of the portion 332. For example, the positions of the inner edges E1 and E2 of the sealant 340 are marked.

[0093] The method 100 proceeds to step 108 to determine the distribution of spacers to be formed based on the measured thicknesses of the plurality of portions 332 of the liquid crystal layer 330. For example, the system 200 includes a computer device 220 connected to the detection device 210. In some embodiments, the computer device 220 includes a processor, a memory, and an interface. For example, the computer device 220 can be a single computer or a distributed computer. The computer device 220 receives the measured thickness T and the measured position P information (e.g., a signal) from the detection device 210 and performs a statistical analysis procedure to obtain the distribution of spacers to be formed. In some embodiments, the computer device 220 includes one or more software programs for calculating data.

[0094] Figure 2B The operation steps 222 to 229 of the computer device 220 according to some embodiments of the present disclosure are described. Figure 2A and Figure 2B Specifically, in the calculation step 222, the thickness difference TD, the horizontal distance FDX, and the vertical distance FDY of each detection position P are obtained by calculating the position P and the measured thickness T. Figure 3B, the thickness difference TD at one of the positions P represents the difference between the ideal thickness of the liquid crystal layer 330 and the thickness T of the liquid crystal layer 330 measured at the one of the positions P. Figure 3C , the horizontal distance FDX refers to the distance between one of the positions P and the edge E1 of the sealing glue 340. Figure 3C The vertical distance FDY refers to the distance between one of the positions P and the edge E2 of the sealing glue 340 .

[0095] Next, the computer device 200 establishes a relationship between the distance FDX / FDY of the detection position P and the thickness difference TD through, for example, a fitting operation step 224. In some embodiments, the relationship is linear and is described by formula (a):

[0096] TD i =a×FDX i +b

[0097] TD i =a×FDY i +b

[0098] In the above formula, a and b are parameters, and i is a positive integer, i represents the number of positions to be counted in the liquid crystal layer 330. Through this relationship, it is possible to simulate and obtain the number of positions of the liquid crystal layer 330 at any position (for example, the distance FDX from the sealant 340). i and / or FDY i The thickness difference TD i As defined above, the thickness difference TD i represents the difference between the ideal thickness of the liquid crystal layer 330 and the simulated thickness of the liquid crystal layer 330, and the distance FDX i and / or FDY i Represents the simulated position and Figure 3C The distance between the edge E1 / E2 of the middle sealing glue 340 .

[0099] Afterwards, the initial factor operation step is performed to find the initial factor PF i . Initial factor PF i It is used to describe the local density variation of the spacers to be formed. In some embodiments, the density of the spacers to be formed is designed to be proportional to the thickness difference TD i For example, here, the thickness difference TD i Thickness difference TD i The ratio of the maximum value of the initial factor PF is described by formula (b) i For example, formula (b) is described as follows:

[0100]

[0101] An adjustment operation step 228 is performed to adjust the initial factor PF by the parameter q. i , and then obtain the adjusted factor AF i The parameter q is related to the material, size and thickness of the substrate (eg, bottom substrate). The parameter q is in the range of 0 to 1. For example, the parameter q is equal to 0.5. The adjustment operation step can be described in formula (c):

[0102] AF i =PF i +q×(100%-PF i ).

[0103] Finally, a density calculation step 229 is performed to first determine the ideal density D of the spacers to be formed at the center. c , then by the ideal density D c Multiply by the adjusted factor AF i , to determine the other positions (such as the distance FDX from the sealant 340) to be formed. i and / or FDY i Through this calculation, the density of the spacer at other locations (e.g., the distance FDX from the sealant 340) can be obtained through formula (d). i and / or FDY i The density D of the position i For example, formula (d) is described as follows:

[0104] D i =D c ×AF i .

[0105] In some embodiments of the present disclosure, Table 1 provides an example, where the ideal density Dc of the spacers to be formed at the center is first set to 10%. In some embodiments, the center is about 17 mm away from the edge E1 / E2 .

[0106] <![CDATA[Distance FDX i / FDY i (mm)]]> 2 7 12 17 <![CDATA[Thickness Difference TD i > 0.2949 0.6553 1.0157 1.3761 <![CDATA[Initial factor PF i > 21％ 48％ 74％ 100％ <![CDATA[Adjusted Factor AF i > 60％ 74％ 87％ 100％ <![CDATA[Density D i > 6％ 7.4％ 8.7％ 10％

[0107] Table 1

[0108] Through these calculation steps, a non-uniform distribution of the spacers to be formed is obtained. For example, the density of the spacers to be formed decreases as it approaches the edge E1 / E2 .

[0109] Reference Figure 1 and Figure 3D and 3E . Figure 3E It is along Figure 3D3E-3E of the cross-sectional view. The method 100 proceeds to step 110, and a spacer 450 is formed on the first substrate 410 with a predetermined distribution. The first substrate 410 includes a base substrate 412, a first electrode layer 414, a dielectric layer 416, and an alignment layer A1. The dielectric layer 416 is formed on the first electrode 414. The alignment layer A1 is formed on the dielectric layer 416. Here, the first substrate 410 contains an active area AA and a sealing area SA surrounding the active area AA. In some embodiments, the active area AA can be designed according to customer requirements. In some embodiments, the active area AA and the sealing area SA can have a distance AX and AY between them, thereby preventing the formation of a sealant in the active area AA. For example, the distance AX and AY are in the range of about 200 microns to about 1000 microns. In some other embodiments, the active area AA can be adjacent to the sealing area SA, and the distance AX and AY are substantially zero. The first electrode layer 414 is patterned to form a first electrode 414a in the active area AA.

[0110] In this embodiment, the spacers 450 are formed on the dielectric layer 416 with a predetermined distribution. Figure 2B ) position, with density Di (reference Figure 2B ) to form the spacers 450. For example, the first substrate 410 has a first region R1 and a second region R2. In the horizontal direction, the first region R1 is closer to the sealing area SA than the second region R2, and the density of the spacers 450 in the second region R2 is greater than the density of the spacers 450 in the first region R1. With this configuration, the spacers 450 are distributed in an uneven manner.

[0111] Here, the spacers 450 in the first region R1 are distributed in an uneven manner. However, in some other embodiments, the spacers 450 in the first region R1 may be uniformly distributed, the spacers 450 in the second region R2 may be uniformly distributed, and the density of the spacers 450 in the first region R1 is lower than the density of the spacers 450 in the second region R2.

[0112] In some embodiments, the spacer 450 includes a first spacer 450-1, a second spacer 450-2, and a third spacer 450-3 that are sequentially arranged. In other words, the second spacer 450-2 is located between the first spacer 450-1 and the third spacer 450-3 and is adjacent to the first spacer 450-1 and the third spacer 450-3. In this embodiment, the distance between the first spacer 450-1 and the second spacer 450-2 is different from the distance between the second spacer 450-2 and the third spacer 450-3. For example, here, the distance between the first spacer 450-1 and the second spacer 450-2 is greater than the distance between the second spacer 450-2 and the third spacer 450-3.

[0113] In some embodiments, the photolithography equipment 230 (see Figure 2A ), the spacer 450 can be formed using appropriate photolithography and etching. For example, an organic layer is formed on the first substrate 410. Using a mask, the organic layer is patterned to remove a portion of the organic layer, and the patterned organic layer forms a plurality of spacers 450 at least in the active area AA. In some embodiments, the organic layer can be made of a positive photoresist or a negative photoresist. In some embodiments disclosed herein, the spacer 450 is used to maintain the liquid crystal cell gap. Herein, in the application of liquid crystal phase modulation (such as a liquid crystal lens), the spacer 450 can have a larger height (for example, 10 microns to 50 microns), and the spacer 450 has a larger width to stably maintain itself on the substrate 410. For example, the width of the spacer 450 is greater than 5 microns.

[0114] refer to Figure 1 and Figure 3F The method 100 proceeds to step 112 to perform a rubbing treatment on the alignment layer A1. In some embodiments, the rubbing cloth 500 is held by a roller to rub the alignment layer A1 along the alignment direction AD1. In some cases, because the large-sized spacer 450 may shield some parts of the alignment layer A1, these parts of the alignment layer A1 may not be rubbed, so that the liquid crystal molecules above these parts of the alignment layer A1 may not fall along the alignment direction AD1.

[0115] In some embodiments of the present disclosure, reference is made to Fig. 7A and 7B , which depicts a schematic top view of a spacer 450, wherein the spacer 450 is designed to have a long axis LA in the alignment direction AD1. In other words, the spacer 450 extends along the alignment direction AD1. Fig. 7AAs shown, the width of the spacer 450 narrows in the alignment direction AD1. Specifically, the spacer 450 gradually tapers along the alignment direction AD1. For example, the spacer 450 has two edges 452S tilted relative to the alignment direction AD1 and a vertex where the edges 452S meet. With this configuration, the spacer 450 can block less area, and the alignment layer A1 can be rubbed more effectively.

[0116] In some embodiments, Figure 7B As shown, the spacer 450 has portions 452 and 454. The portion 452 faces the alignment direction AD1, while the portion 454 does not face the alignment direction AD1. Specifically, the portion 452 has an edge 452S facing the alignment direction AD1, and the portion 454 has an edge 454S not facing the alignment direction AD1. Figure 7B As shown, a portion 452 of the spacer 450 tapers along the alignment direction AD1, and an edge 452S is inclined relative to the alignment direction AD1. With this configuration, the spacer 450 can block less area, and the alignment layer A1 can be rubbed more effectively. Although the spacer 450 can be designed as Fig. 7A and 7B , but should not limit the scope of the present disclosure. In some other embodiments, the spacer 450 may have other shapes. For example, the spacer 450 may have a circular top view.

[0117] Reference Figure 1 and Figure 3G , the method 100 proceeds to step 114, the first substrate 410 is combined with the second substrate 420 and the liquid crystal layer 430, thereby obtaining the liquid crystal phase modulation device 400. The second substrate 420 includes a base substrate 422, a second electrode layer 424 and an alignment layer A2. The second electrode layer 424 is formed above the base substrate 422 and covers the active area AA. The alignment layer A2 is formed on the second electrode layer 424 and is rubbed.

[0118] like Figure 3G As shown, a liquid crystal phase modulation device 400 is provided. The liquid crystal phase modulation device 400 includes a first substrate 410, a second substrate 420, a liquid crystal layer 430, a sealant 440, a spacer 450, and alignment layers A1 and A2. The sealant 440 is located in the sealing area SA and between the first substrate 410 and the second substrate 420, and surrounds the liquid crystal layer 430. For example, the inner edge of the sealant 440 is aligned with the edge EX / EY of the sealing area SA (see Figure 3D ). The first electrode layer 414 has a first electrode 414a in the active area AA, and the second electrode layer 424 covers the active area AA.

[0119] In the present embodiment, the spacer 450 has a bottom surface 450B adjacent to the first substrate 410 and a top surface 450T adjacent to the second substrate 420. The area of ​​the bottom surface 450B is greater than the area of ​​the top surface 450T. Each spacer 450 has an appropriate height that is perpendicular to the first substrate 410 and corresponds to the liquid crystal cell gap, so that the spacer 450 can maintain the liquid crystal cell gap.

[0120] In some embodiments of the present disclosure, the first substrate 410, the second substrate 420, the liquid crystal layer 430 and the sealant 440 of the liquid crystal phase modulation device 400 have similar structures to the substrate 310, the substrate 320, the liquid crystal layer 330 and the sealant 340 of the reference liquid crystal phase modulation sample 300. For example, the thickness of the sealant 440 is equal to the thickness of the sealant 340 of the reference liquid crystal phase modulation sample 300. The thickness of the substrate 410 / 420 is similar to the thickness of the substrate 310 / 320. For example, the thickness of the substrate 410 / 420 is in the range of 0.2 mm to 0.5 mm. Through this configuration, by detecting the reference liquid crystal phase modulation sample 300, the degree of substrate bending is measured, and the spacer 450 is distributed in an uneven manner according to the substrate, thereby preventing and reducing substrate bending and maintaining a uniform liquid crystal cell gap of the liquid crystal device.

[0121] In some embodiments, in order to realize an electrically controlled phase modulation device (e.g., an electrically controlled lens with adjustable focal length, an electrically controlled grating, or a switch), the liquid crystal phase modulation device 400 is designed with appropriate parameters. For example, the thickness T' of the liquid crystal layer 430 is designed to be in the range of about 10 microns to about 50 microns, for example, about 20 microns to about 50 microns. If the thickness T' of the liquid crystal layer 430 is less than this thickness range, the device may not provide a suitable optical magnification (e.g., lens power) to achieve phase modulation. If the thickness T' of the liquid crystal layer 430 is greater than this thickness range, the device may require a long response time to operate and recover, which will limit the level of application. In some embodiments, the width W1 of the electrode 414a is designed to be in the range of about 1 micron to hundreds of microns, for example, about 1 micron to about 10 microns. In some embodiments, the spacing P1 between the electrodes 414a is designed to be in the range of about 1 micron to hundreds of microns, for example, about 1 micron to about 10 microns. For example, the length and width of the active area AA can be in the range of about 1 inch to about 2 inches.

[0122] In some embodiments, multiple liquid crystal phase modulation devices 400 are stacked to enhance the optical magnification (e.g., lens capability). For example, two to four liquid crystal phase modulation devices 400 are stacked and connected to each other when the active regions overlap. In some embodiments, the stacked liquid crystal phase modulation devices 400 can share their base substrates to reduce the overall thickness.

[0123] In some embodiments, the liquid crystal phase modulation device 400 may further include a light shielding layer having an opening corresponding to the active area AA. The light shielding layer may expose at least a portion of the active area AA and shield the sealing area SA to prevent the sealant 440 from being perceived by the user. For example, the area of ​​the opening of the light shielding layer is equal to the area of ​​the active area AA. The spacer 450 is disposed in the active area AA but not in the sealing area SA, and most of the spacer 450 is not covered by the light shielding layer and can be perceived by the user. In some embodiments, in the portion of the active area AA adjacent to the sealing area SA, process variation may occur due to the accuracy of mask alignment and mask size and shadow effects. In some embodiments, the area of ​​the opening of the light shielding layer may be smaller than the area of ​​the opening of the active area AA, so that the light shielding layer further covers the portion of the active area AA adjacent to the sealing area SA, which will prevent the user from observing undesirable performance due to process variation.

[0124] In some embodiments, the light shielding layer may be located between the alignment layer A1 and the dielectric layer 416, between the dielectric layer 416 and the substrate 412, between the alignment layer A2 and the second electrode layer 424, or between the second electrode layer 424, or between the electrode layer 424 and the substrate 422. The transmittance of the light shielding layer is less than 20%. The light shielding layer may be a conductive or dielectric material. For example, in some embodiments, the light shielding layer is made of an opaque ink, such as a black ink. In some embodiments, the light shielding layer is made of a metal. In some embodiments, the thickness of the light shielding layer may be greater than about 500 microns. In some embodiments, the configuration of the light shielding layer may be omitted, and the user may see the non-active area (outside the active area AA).

[0125] In some embodiments of the present disclosure, the base substrates 412 and 422 may be rigid and / or flexible substrates. For example, the base substrates 412 and 422 are made of a suitable transparent insulating material, such as glass, quartz, or a polymer material. The first and second electrode layers 414 and 424 may be made of a suitable transparent conductive material, such as indium tin oxide (ITO) or antimony tin oxide (ATO). The dielectric layer 416 is made of silicon oxide, a polymer, or other suitable dielectric materials. The alignment layers A1 and A2 may be made of polyimide.

[0126] Figures 4A to 4C The intermediate stages of the method for manufacturing a liquid crystal phase modulation device according to some embodiments of the present disclosure are shown. Figure 1 and Figure 4A , the method proceeds to step 110, forming a spacer 450 on the second substrate 420, instead of Figure 3FThe spacers 450 are formed on the first substrate 410. The configuration of the second substrate 420 is similar to the aforementioned configuration, and thus will not be repeated here.

[0127] refer to Figure 1 and Figure 4B The method 100 proceeds to step 112, wherein the alignment layer A2 is subjected to a rubbing treatment. In some embodiments, the rubbing cloth 500 is held by a roller to rub the alignment layer A2 along the alignment direction AD2. In some embodiments, the spacer 450 is designed to have a long axis LA parallel to the alignment direction AD2, for example, Fig. 7A and 7B As shown, the spacer 450 can block less area and the alignment layer A2 can be rubbed more effectively.

[0128] Reference Figure 1 and Figure 4C The method 100 proceeds to step 114, combining the second substrate 420 with the first substrate 410 and the liquid crystal layer 430, thereby obtaining the liquid crystal phase modulation device 400. The structure of the first substrate 410 is similar to the above, so it will not be repeated here.

[0129] like Figure 4C As shown, a liquid crystal phase modulation device 400 is provided. The liquid crystal phase modulation device 400 includes a first substrate 410, a second substrate 420, a liquid crystal layer 430, a sealant 440, a spacer 450, and alignment layers A1 and A2. The sealant 440 is located in the sealing area SA and between the first substrate 410 and the second substrate 420, and surrounds the liquid crystal layer 430. The first electrode layer 414 has a first electrode 414a in the active area AA, and the second electrode layer 424 covers the active area AA. In the present embodiment, the spacer 450 has a bottom surface 450B adjacent to the second substrate 420 and a top surface 450T adjacent to the first substrate 410. The bottom surface 450B has an area larger than that of the top surface 450T. Each spacer 450 has an appropriate height, which is perpendicular to the first substrate 410 and corresponds to the liquid crystal cell gap, so that the spacer 450 can maintain the liquid crystal cell gap.

[0130] Other details of this embodiment are similar to those of the above embodiment and will not be repeated here.

[0131] Figure 5 is a cross-sectional view of a liquid crystal phase modulation device 400 according to some embodiments of the present disclosure. Figure 3G and Figure 4C Embodiment of the present invention Figure 3G and Figure 4CThe difference between the embodiments of the present invention and the present invention is that in the present embodiment, the spacers 450 of the first part (hereinafter referred to as the spacers 450-4) are formed on the first substrate 410, and the spacers 450 of the second part (hereinafter referred to as the spacers 450-5) are formed on the second substrate 420. For example, the spacer 450-4 has a bottom surface 450-4B adjacent to the first substrate 410 and a top surface 450-4T adjacent to the second substrate 420, and the spacer 450-5 has a bottom surface 450-5B adjacent to the second substrate 420 and a top surface 450-5T adjacent to the first substrate 410. The areas of the bottom surfaces 450-4B and 450-5B are respectively greater than the areas of the top surfaces 450-4T and 450-5T. In some embodiments, the sizes of the spacers 450-4 and 450-5 may be the same or different. Other details of the present embodiment are similar to those of the above-mentioned embodiments and are not repeated here.

[0132] Figure 6 is a cross-sectional view of a liquid crystal phase modulation device 400 according to some embodiments of the present disclosure. Figure 3G Similar to the implementation of Figure 3G The difference between the embodiments of the present invention and the present invention is that the first electrode layer 414 has a first electrode 414a in the active area AA, and the second electrode layer 424 has a second electrode 424a in the active area AA. In some embodiments, the first electrode 414a and the second electrode 424a may have the same spacing, but this should not limit the scope of this embodiment. In some other embodiments, the second electrode 424a may have a spacing different from the spacing of the first electrode 414a. Other details of this embodiment are similar to the above-mentioned embodiments and are not repeated here.

[0133] Based on the above discussion, it can be seen that the present disclosure provides many advantages for liquid crystal devices. However, it should be understood that other embodiments may provide additional advantages, and not all advantages must be disclosed herein, and not all embodiments require particular advantages. One advantage of the present case is that the distribution of the spacers is designed according to the curvature of the substrate, thereby maintaining a uniform liquid crystal cell gap of the liquid crystal device. Another advantage of the present case is that the shape of the spacers is designed to have less effect on the friction treatment, so that the rubbed alignment layer can effectively align the liquid crystal molecules.

[0134] The foregoing references to certain embodiments describe the present disclosure in considerable detail, but other embodiments are possible. Therefore, the spirit and scope of the appended patent application should not be limited to the description of the embodiments contained herein.

[0135] It is obvious to those skilled in the art that various modifications and changes can be made to the structure of the present disclosure without departing from the scope or spirit of the present disclosure. In view of the foregoing, the present disclosure is intended to include modifications and changes of the present disclosure within the scope of the attached patent application.

Claims

1. A method for manufacturing a liquid crystal lens phase modulation device, characterized in that: Include: Combining a first reference substrate, a second reference substrate, a reference sealant and a reference liquid crystal layer to form a reference liquid crystal phase modulation sample; detecting thicknesses of a plurality of portions of the reference liquid crystal layer of the reference liquid crystal phase modulation sample; Determining a distribution according to the thicknesses of the plurality of portions of the reference liquid crystal layer, wherein determining the distribution comprises: determining a plurality of thickness differences between the thicknesses of the plurality of portions of the reference liquid crystal layer and an ideal thickness of the reference liquid crystal layer; Determine a plurality of initial factors, wherein the plurality of initial factors are respectively proportional to the inverses of the corresponding plurality of thickness differences; Adjusting the plurality of initial factors by a parameter to obtain a plurality of adjusted factors, wherein the parameter is related to the material, size and thickness of the first reference substrate and the second reference substrate, and the parameter is in a range from 0 to 1; as well as calculating a plurality of densities based on the plurality of adjusted factors to determine the distribution; forming a plurality of spacers on a first substrate with the determined distribution; After forming the plurality of spacers, forming an alignment layer on the first substrate; as well as The first substrate is combined with a second substrate and a liquid crystal layer to obtain the liquid crystal lens phase modulation device, wherein the alignment layer separates the plurality of spacers from the liquid crystal layer, the material and thickness of the first reference substrate are the same as the material and thickness of the first substrate of the liquid crystal lens phase modulation device, the material and thickness of the second reference substrate are the same as the material and thickness of the second substrate of the liquid crystal lens phase modulation device, the material of the reference liquid crystal layer is the same as the material of the liquid crystal layer of the liquid crystal lens phase modulation device, and the thickness of the reference sealant is equal to the thickness of the sealant of the liquid crystal lens phase modulation device.

2. The method according to claim 1, characterized in that Also includes: The alignment layer is rubbed in an alignment direction, wherein the step of forming the plurality of spacers enables at least one of the plurality of spacers to have a long axis, and the long axis is in the alignment direction.

3. The method according to claim 2, characterized in that The step of forming the plurality of spacers enables at least one of the plurality of spacers to have a portion having opposite side walls, and the opposite side walls are inclined relative to the alignment direction.

4. The method according to claim 1, characterized in that The step of forming the plurality of spacers enables the height of the plurality of spacers to be in a range of 10 micrometers to 50 micrometers.

5. The method according to claim 1, characterized in that The step of forming the plurality of spacers enables the width of the plurality of spacers to be greater than 5 micrometers.

6. The method according to claim 1, characterized in that The step of forming the plurality of spacers enables the plurality of spacers to be located in an active region of the liquid crystal lens phase modulation device, wherein the length and width of the active region are in the range of 1 inch to 2 inches.

7. The method according to claim 6, characterized in that The liquid crystal lens phase modulation device further comprises a light shielding layer having an opening corresponding to the active area.

8. The method according to claim 6, characterized in that The active region has a first region and a second region, and the first region is closer to the sealing glue of the liquid crystal lens phase modulation device than the second region. The step of forming the plurality of spacers makes a density of the spacers in the second region greater than a density of the spacers in the first region.

9. The method according to claim 1, characterized in that Also includes: Before the step of forming the plurality of spacers and the step of combining the first substrate with the second substrate and the liquid crystal layer, forming a first electrode layer on the first substrate; as well as Before the step of combining the first substrate with the second substrate and the liquid crystal layer, a second electrode layer is formed on the second substrate.

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