Methods for loading ions

Abstract

The present invention discloses a method for loading ions, and the adopted ion loading system includes: a laser generator, an electric-controlled scanner, a target material and an ion trap. The laser generator is suitable for emitting laser, the electric-controlled scanner can deflect the laser optical path, the electric-controlled scanner is suitable for changing the direction of laser emission, the target material ejects atoms at the ablation position under the ablation of the ablation laser, and the ion trap is arranged adjacent to the target material and is suitable for collecting the atoms ejected from the target material. By arranging the electric-controlled scanner to change the position where the ablation laser irradiates the target material, it is avoided that the ablation laser ablates the same position of the target material for a long time, causing the target material to be damaged and depressed, thereby reducing the number of ejected atoms, thereby extending the service life of the target material, generating a large number of ions, and a stable rate, and the working efficiency of the ion loading system is high.

Description

Technical Field

[0001] The invention relates to the technical field of ion trap quantum computing, and in particular to a method for loading ions. Background Art

[0002] In ion trap quantum computing systems, ions are needed as carriers for bit storage and calculation, so loading ions needs to be prepared in advance. The steps for loading ions are generally three steps: evaporation of atoms, ionization, cooling and trapping. The method of evaporating atoms is generally to use high-energy pulsed light to ablate the target material and eject a large number of atoms at the ablation position.

[0003] In the process of evaporating atoms with pulsed light, the target material will be dented at the position irradiated by the pulsed light during the long-term ablation process. This will cause a significant reduction in the number of atoms ejected during further ablation, which is not conducive to the long-term operation of the ion trap quantum computer. Summary of the invention

[0004] The present invention aims to solve at least one of the technical problems existing in the prior art. To this end, one object of the present invention is to provide an ion loading system, which can maintain a large number of atoms ejected during the target ablation process, which is beneficial to the long-term operation of the ion trap quantum computer.

[0005] Another object of the present invention is to provide a method for loading ions.

[0006] According to an embodiment of the present invention, the ion loading system includes: a laser generator, which is suitable for emitting laser; an electrically controlled scanner, which can deflect the laser optical path and is suitable for changing the direction of the laser emission; a target material, which ejects atoms at the ablation position under the ablation of the ablation laser; and an ion trap, which is arranged adjacent to the target material and is suitable for collecting atoms ejected from the target material.

[0007] According to the ion loading system of the embodiment of the present invention, an electrically controlled scanner is provided to change the position where the ablation laser irradiates the target material, thereby avoiding the situation where the ablation laser ablates the same position of the target material for a long time, causing damage and depression of the target material and reducing the number of ejected atoms. The service life of the target material can be extended, the number of ions generated is large, the rate is stable, and the ion loading system has high working efficiency.

[0008] Optionally, the electrically-controlled scanner includes: an electrically-controlled reflector or an electrically-controlled translation stage.

[0009] In some embodiments, the electrically controlled reflector includes: a reflector body; a first movable member, wherein the first movable member is suitable for driving the reflector body to move in a first direction; and a second movable member, wherein the second movable member is suitable for driving the reflector body to move in a second direction.

[0010] Optionally, the first movable member is suitable for driving the reflector body to rotate in a first direction, and the second movable member is suitable for driving the reflector body to rotate in a second direction, the rotation axis of the reflector body in the first direction extends in a vertical direction, and the rotation axis of the reflector body in the second direction extends in a horizontal direction.

[0011] Specifically, the first movable member includes: a first driving member and a first rotating shaft connected to the first driving member, and the first rotating shaft is connected to the second movable member; the second movable member includes: a second driving member and a second rotating shaft connected to the second driving member, and the second rotating shaft is connected to the reflector body.

[0012] In some embodiments, the electrically controlled reflector further comprises: a base, the first rotating shaft is rotatably disposed on the base, and the second movable member further comprises: a mirror frame, the reflector body is disposed on the mirror frame, the second driving member is disposed on the mirror frame, and the second rotating shaft is rotatably disposed on the mirror frame.

[0013] In some embodiments, the second movable member further includes: a counterweight block, and a line connecting the counterweight block and the second driving member passes through the rotation axis of the mirror frame.

[0014] Optionally, a first speed reduction member is disposed between the first driving member and the first rotating shaft, and a second speed reduction member is disposed between the second driving member and the second rotating shaft.

[0015] According to an embodiment of the present invention, a method for loading ions is applied to any of the above-mentioned ion loading systems, and includes at least the following steps:

[0016] S1, decomposing the preset scanning path into points at certain intervals;

[0017] S2, using a non-ablative laser to align with any end point N0 of a preset scanning path, and then the electrically controlled scanner changes the emission direction of the non-ablative laser until the laser is aligned with an adjacent point N1, and recording the first offset information of the electrically controlled scanner causing the non-ablative laser to move from point N0 to point N1 in this stage;

[0018] S3, changing the emission direction of the non-ablative laser by the electric-controlled scanner until the laser is aligned with the adjacent point N2, and recording the second offset information of the electric-controlled scanner causing the non-ablative laser to move from point N1 to point N2 in this stage;

[0019] S4, repeat the above steps until the laser without ablative effect is aligned with the other end point Nn of the preset scanning path, and record the nth offset information of the electronically controlled scanner moving the laser without ablative effect from point Nn-1 to point Nn in this stage;

[0020] S5, replacing the non-ablative laser with an ablative laser, causing the electrically controlled scanner to reverse direction and scan from the Nn end to the N0 end of the preset scanning path in the order of the nth offset information, the n-1th offset information, ..., the second offset information and the first offset information;

[0021] S6, making the electric-controlled scanner scan from the N0 end to the Nn end of the preset scanning path in the positive direction in the order of the first offset information, the second offset information, ..., the n-1th offset information, and the nth offset information;

[0022] S7. Repeat steps S5 and S6.

[0023] According to the method for loading ions in an embodiment of the present invention, by changing the position where the ablation laser irradiates the target material, and continuously changing the direction of laser emission, the position where the ablation laser irradiates the target material can be moved according to a predetermined scanning path, thereby avoiding the situation where the ablation laser ablates the same position of the target material for a long time, causing damage and depression of the target material, thereby reducing the number of ejected atoms. The service life of the target material can be extended, the number of ions generated is large, the rate is stable, and the working efficiency of the ion loading system is high.

[0024] Optionally, the time taken for scanning of the ablation laser between any two adjacent points is the same or similar.

[0025] Additional aspects and advantages of the present invention will be given in part in the following description and in part will be obvious from the following description, or will be learned through practice of the present invention. BRIEF DESCRIPTION OF THE DRAWINGS

[0026] The above and / or additional aspects and advantages of the present invention will become apparent and easily understood from the description of the embodiments in conjunction with the following drawings, in which:

[0027] Figure 1 is a schematic structural diagram of an ion loading system according to an embodiment of the present invention;

[0028] Figure 2 is a schematic structural diagram of an electrically controlled reflector according to an embodiment of the present invention;

[0029] Figure 3 is a schematic structural diagram of a preset scanning path according to an embodiment of the present invention;

[0030] Figure 4 is a schematic structural diagram of a preset scanning path according to another embodiment of the present invention.

[0031] Reference numerals:

[0032] Ion loading system 1000,

[0033] Laser generator 100, electrically controlled scanner 200, target material 300, ion trap 400, preset scanning path 500, laser 10, electrically controlled reflector 20,

[0034] Reflector body 1,

[0035] The first moving member 2, the first driving member 21, the first rotating shaft 22, the first speed reducing member 23,

[0036] The second moving member 3, the second driving member 31, the second rotating shaft 32, the second speed reducing member 33, the mirror frame 34, the counterweight 35, the base 4, DETAILED DESCRIPTION

[0037] Embodiments of the present invention are described in detail below, examples of which are shown in the accompanying drawings, wherein the same or similar reference numerals throughout represent the same or similar elements or elements having the same or similar functions. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain the present invention, and cannot be understood as limiting the present invention.

[0038] In the description of the present invention, it should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", "clockwise", "counterclockwise", "axial", "radial", "circumferential" and the like indicate positions or positional relationships based on the positions or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present invention. In the description of the present invention, "first feature" and "second feature" may include one or more of the features. In the description of the present invention, "multiple" means two or more.

[0039] Reference below Figure 1-Figure 4 An ion loading system 1000 according to an embodiment of the present invention is described.

[0040] The ion loading system 1000 according to the embodiment of the present invention comprises: a laser generator 100, an electrically controlled scanner 200, a target material 300 and an ion trap 400. The laser generator 100 is suitable for emitting a laser 10, the electrically controlled scanner 200 can deflect the optical path of the laser 10, the electrically controlled scanner 200 is suitable for changing the direction of the laser 10, the target material 300 ejects atoms at the ablation position under the ablation of the ablation laser, and the ion trap 400 is arranged adjacent to the target material 300 and is suitable for collecting the atoms ejected from the target material 300.

[0041] The laser generator 100 is suitable for emitting laser 10, wherein the laser 10 is only a synonym for simplifying the description and facilitating the understanding of the present invention. The laser 10 is not limited to high-energy ablation laser with ablation effect, but also includes laser without ablation effect, etc. Therefore, the laser 10 cannot be simply understood as an ablation laser with ablation effect, and cannot be understood as a limitation of the present invention.

[0042] The ablation laser emitted by the laser generator 100 irradiates the target material 300. Under the ablation of the ablation laser, the target material 300 ejects a large number of atoms at the ablation position. The ion trap 400 is used to provide an electric field for trapping ions. The ion trap 400 is set close to the target material 300. The atoms ejected from the target material 300 are collected and trapped by the ion trap 400, and the ion trap 400 can perform processes such as electric field compensation and ion transport.

[0043] During the long-term ablation process of the target material 300 by the ablation laser, the ablated position of the target material 300 will be damaged and dented, which will cause the number of atoms ejected at the ablated position to be greatly reduced during further ablation, thereby reducing the working efficiency and poor working stability of the ion loading system 1000.

[0044] The ion loading system 1000 of the embodiment of the present invention further includes an electrically controlled scanner 200, which can deflect the optical path of the laser 10 emitted by the laser generator 100 to change the direction of the laser 10, so that the position where the ablation laser irradiates the target material 300 changes, thereby preventing the target material 300 from being dented due to long-term ablation by the ablation laser. Optionally, the ion loading system 1000 of the embodiment of the present invention can change the position where the ablation laser irradiates the target material 300 after a certain part of the target material 300 has been ablated for a period of time, thereby preventing the ablation laser from ablating the same position of the target material 300 for a long time, thereby preventing the target material 300 from being damaged and dented, thereby reducing the number of atoms ejected. The ion loading system 1000 of the embodiment of the present invention obtains a large number of ions and a stable ion generation rate, thereby improving the working efficiency of the ion loading system 1000. Moreover, changing the position where the ablation laser irradiates the target material 300 can prevent the ablation laser from causing serious damage to the target material 300, thereby extending the service life of the target material 300 and further improving the working efficiency of the ion loading system 1000.

[0045] The ion loading system 1000 of the embodiment of the present invention changes the position where the ablation laser irradiates the target material 300 by setting an electrically controlled scanner 200. The position where the ablation laser irradiates the target material 300 can be adjusted while the laser 10 is emitted. The optical path of the laser 10 can be adjusted at any time without the need to turn the laser generator 100 on and off. The operation of deflecting the optical path of the laser 10 is simple, and there is no need to repeatedly turn the laser generator 100 on and off. The laser generator 100 has a long service life, and the ion loading system 1000 has high working efficiency.

[0046] According to the ion loading system 1000 of the embodiment of the present invention, the electrically controlled scanner 200 is set to change the position where the ablation laser irradiates the target material 300, thereby avoiding the situation where the ablation laser ablates the same position of the target material 300 for a long time, causing damage and depression of the target material 300 and reducing the number of ejected atoms. The service life of the target material 300 can be extended, the number of ions generated is large, the rate is stable, and the working efficiency of the ion loading system 1000 is high.

[0047] In some specific embodiments of the present invention, the ablation laser is a 532 nm pulsed laser.

[0048] In some specific embodiments of the present invention, the target material 300 is a calcium target material 300 , and the ablation laser is irradiated on the calcium target material 300 to eject a large number of calcium atoms at the ablation position.

[0049] In some specific embodiments of the present invention, the ion trap 400 is configured as a surface ion trap 400 .

[0050] In some embodiments of the present invention, the electrically-controlled scanner 200 is an electrically-controlled reflector 20, and the laser 10 emitted by the laser generator 100 directly irradiates the electrically-controlled reflector 20, and the electrically-controlled reflector 20 reflects the laser 10, and the laser reflector can move to deflect the optical path of the laser 10, thereby changing the direction in which the laser 10 is emitted.

[0051] In some specific embodiments of the present invention, the electrically controlled reflector 20 comprises: a reflector body 1, a first movable member 2 and a second movable member 3, wherein the first movable member 2 is adapted to drive the reflector body 1 to move in a first direction, and the second movable member 3 is adapted to drive the reflector body 1 to move in a second direction. The reflector body 1 is used to reflect the laser 10, and the first movable member 2 and the second movable member 3 drive the reflector body 1 to move in two different directions.

[0052] The electrically controlled reflector 20 of the embodiment of the present invention can irradiate the laser 10 to any position of the ablated surface of the target 300 by providing the first movable member 2 and the second movable member 3 that can drive the reflector body 1 to move in two different directions. It can be understood that the ablation laser is irradiated on one side of the target 300, and the ablated surface of the target 300 is a plane of the target 300. The coordinates in two directions can represent any point on a plane, so the ablation laser can be irradiated to any position of the ablated surface by deflecting the ablation laser in two directions.

[0053] In some embodiments of the present invention, the position of the reflector body 1 relative to the supporting surface remains unchanged, and the first moving member 2 and the second moving member 3 drive the reflector body 1 to rotate.

[0054] Specifically, the first movable member 2 is suitable for driving the reflector body 1 to rotate in the first direction, the second movable member 3 is suitable for driving the reflector body 1 to rotate in the second direction, the rotation axis of the reflector body 1 in the first direction extends in the vertical direction, and the rotation axis of the reflector body 1 in the second direction extends in the horizontal direction.

[0055] In some specific embodiments of the present invention, the first moving member 2 includes: a first driving member 21 and a first rotating shaft 22, the first rotating shaft 22 is connected to the first driving member 21, and the first rotating shaft 22 is connected to the second moving member 3. The second moving member 3 includes: a second driving member 31 and a second rotating shaft 32, the second rotating shaft 32 is connected to the second driving member 31, and the second rotating shaft 32 is connected to the reflector body 1.

[0056] The first movable member 2 is connected to the second movable member 3, the second movable member 3 is connected to the reflector body 1, the first movable member 2 is suitable for driving the second movable member 3 and the reflector body 1 to rotate together in the first direction, and the second movable member 3 is suitable for driving the reflector body 1 to rotate in the second direction.

[0057] The first rotating shaft 22 extends in the vertical direction, and the first direction is the circumferential direction of the first rotating shaft 22. The first driving member 21 drives the first rotating shaft 22 to drive the second movable member 3 and the reflector body 1 to rotate along the circumferential direction of the first rotating shaft 22; the second rotating shaft 32 extends in the horizontal direction, and the second direction is the circumferential direction of the second rotating shaft 32. The second driving member 31 drives the second rotating shaft 32 to drive the reflector body 1 to rotate along the circumferential direction of the second rotating shaft 32.

[0058] In some specific embodiments of the present invention, Figure 2 As shown, the electrically controlled reflector 20 also includes: a base 4, on which the first rotating shaft 22 is rotatably disposed, and the second movable member 3 also includes: a mirror frame 34, on which the reflector body 1 is disposed, on which the second driving member 31 is disposed, and on which the second rotating shaft 32 is rotatably disposed.

[0059] The base 4 is fixed on the support surface, the first rotating shaft 22 extends in the vertical direction, one end of the first rotating shaft 22 is rotatably connected to the base 4, and the other end of the first rotating shaft 22 is fixedly connected to the mirror frame 34. The second rotating shaft 32 extends in the horizontal direction, the second rotating shaft 32 passes through the mirror frame 34 and is rotatably connected to the mirror frame 34, the second driving member 31 is arranged on the mirror frame 34, and the second driving member 31 drives the second rotating shaft 32 to drive the mirror frame 34 and the reflector body 1 to rotate along the circumferential direction of the second rotating shaft 32.

[0060] In some embodiments of the present invention, a first deceleration member 23 is provided between the first driving member 21 and the first rotating shaft 22, and the first deceleration member 23 plays the role of reducing speed and increasing torque. It can be understood that the reflector body 1 only needs to move slightly to make the position where the ablation laser irradiates the target material 300 change greatly, so the rotation speed requirement of the first rotating shaft 22 is relatively low, but the rotation control accuracy of the first rotating shaft 22 is required to be relatively high. By providing the first deceleration member 23, the rotation speed of the first rotating shaft 22 can be reduced, but the rotation of the first rotating shaft 22 can be accurately controlled, thereby improving the motion stability of the first rotating shaft 22. Similarly, a second deceleration member 33 is provided between the second driving member 31 and the second rotating shaft 32, which can improve the motion stability of the second rotating shaft 32.

[0061] In other embodiments of the present invention, Figure 2 As shown, the second movable member 3 further includes a counterweight block 35 , and a connecting line between the counterweight block 35 and the second driving member 31 passes through the rotation axis of the mirror frame 34 .

[0062] The first driving member 21 and the first reduction member 23 are connected to the first rotating shaft 22, and the second driving member 31 and the second reduction member 33 are connected to the mirror frame 34. The first driving member 21 and the first reduction member 23 both have a certain weight, and the center of gravity of the first driving member 21 and the first reduction member 23 does not coincide with the axis of the first rotating shaft 22. The total weight of the first driving member 21 and the first reduction member 23 is heavier than the reflector body 1. Therefore, the weight of the first driving member 21 and the first reduction member 23 will drive the steering deviation of the first rotating shaft 22, making the movement of the first rotating shaft 22 unstable. Similarly, the second driving member 31 and the second reduction member are arranged at one end of the second rotating shaft 32, and the weight of the second driving member 31 and the second reduction member will also drive the steering deviation of the second rotating shaft 32. This makes the movement of the reflector body 1 driven by the first moving member 2 and the second moving member 3 unstable, and the reflector body 1 cannot accurately control the setting position of irradiating the laser 10 to the target material 300.

[0063] The electrically controlled reflector 20 of the embodiment of the present invention can balance the weight of the first driving member 21 and the first deceleration member 23, and can balance the weight of the second driving member 31 and the second deceleration member 33 by setting a counterweight block 35, so that the movement of the first rotating shaft 22 and the second rotating shaft 32 is stable, and the reflector body 1 is precisely controlled, so that the laser 10 is accurately irradiated to the predetermined position of the target material 300.

[0064] like Figure 2 As shown, the second driving member 31 and the second speed reducer are located at one end of the second rotating shaft 32, and the counterweight 35 is located at the other end of the second rotating shaft 32. The line between the counterweight 35 and the second driving line is parallel to the axis of the second rotating shaft 32. The counterweight 35 can balance the weight of the second driving member 31 and the second speed reducer 33, and improve the motion stability of the second rotating shaft 32. The first driving member 21 and the second speed reducer 33 are located directly below the first driving member 21 and the second speed reducer 33. The line between the counterweight 35 and the second driving member 31 is perpendicular to the axis of the first rotating shaft 22. Therefore, the counterweight 35 can also balance the weight of the first driving member 21 and the first speed reducer 23, and improve the motion stability of the first rotating shaft 22.

[0065] Reference below Figure 2 The structure of a specific embodiment of the electrically controlled mirror 20 of the present invention is described in detail.

[0066] The electric-controlled reflector 20 comprises: a reflector body 1, a base 4 and a mirror frame 34. The base 4 is fixed relative to the support surface and is used to support the electric-controlled reflector 20. The mirror frame 34 is connected to the base 4, and the reflector body 1 is arranged on the mirror frame 34. The electric-controlled reflector 20 also comprises: a first moving member 2 and a second moving member 3. The first moving member 2 comprises a first rotating shaft 22, a first speed reducing member 23 and a first driving member 21. The first rotating shaft 22 extends in a vertical direction. One end of the first rotating shaft 22 is rotatably connected to the base 4, and the other end of the first rotating shaft 22 is fixedly connected to the mirror frame 34. A first speed reducing member 23 and a first driving member 21 are arranged on one side of the first rotating shaft 22. The power is transmitted to the first rotating shaft 22 after the first speed reducing member 23 reduces the speed and increases the torque. The second moving member 3 comprises: a second rotating shaft 32, a second speed reducing member 33 and a second driving member 31. The second rotating shaft 32 extends in the horizontal direction. The second rotating shaft 32 is provided with a mirror frame 34 and is rotatably connected to the mirror frame 34. The second driving member 31 and the second speed reducing member 33 are arranged on the mirror frame 34. The power is transmitted to the second rotating shaft 32 after the second speed reducing member 33 reduces the speed and increases the torque. The first driving member 21 drives the first rotating shaft 22 to drive the second moving member 3 and the reflector body 1 to rotate along the circumferential direction of the first rotating shaft 22. The second driving member 31 drives the second rotating shaft 32 to drive the reflector body 1 to rotate along the circumferential direction of the second rotating shaft 32. A counterweight 35 is arranged at the other end of the mirror frame 34 opposite to the second driving member 31. The counterweight 35 can balance the weight of the first moving member 2 and the second moving member 3, so that the movement of the reflector body 1 is accurate and stable.

[0067] In some embodiments of the present invention, the first driving member 21 and the second driving member 31 are both motors, and the first reduction member 23 and the second reduction member 33 are both reduction gears.

[0068] The above-mentioned embodiment of the electrically-controlled reflector 20 is only described as an example. However, after reading the above-mentioned technical scheme, ordinary technicians will obviously find that the first movable member 2 drives the reflector body 1 to move linearly and the second movable member 3 drives the reflector body 1 to move linearly; or one of the first movable member 2 and the second movable member 3 drives the reflector body 1 to rotate and the other drives the reflector body 1 to move linearly can be applied to the above-mentioned technical scheme, which also falls within the protection scope of the present invention.

[0069] In some embodiments of the present invention, Figure 1 As shown, the ion loading system 1000 further includes: a window, through which the ablation laser 10 passes through the window and hits the target material 300 after being reflected by the electrically controlled reflector 20 .

[0070] In other embodiments of the present invention, the electrically-controlled scanner 200 is an electrically-controlled displacement stage, which can drive the laser generator 100 to move. The electrically-controlled displacement stage directly changes the orientation of the laser generator 100 to change the direction in which the laser 10 is emitted.

[0071] The following describes a method for loading ions according to an embodiment of the present invention.

[0072] According to the method for loading ions according to an embodiment of the present invention, the method for loading ions is applied to the above-mentioned ion loading system 1000, and includes at least the following steps:

[0073] S1, decomposing the preset scanning path 500 into points at certain intervals;

[0074] S2, using a non-ablative laser to align with any end point N0 of the preset scanning path 500, and then the electrically controlled scanner 200 changes the emission direction of the non-ablative laser until the laser is aligned with the adjacent point N1, and recording the first offset information of the electrically controlled scanner 200 moving the non-ablative laser from point N0 to point N1 in this stage;

[0075] S3, changing the emission direction of the non-ablative laser by the electric-controlled scanner 200 until the laser is aligned with the adjacent point N2, and recording the second offset information of the electric-controlled scanner 200 moving the non-ablative laser from point N1 to point N2 in this stage;

[0076] S4, repeat the above steps until the laser without ablative effect is aligned with the other end point Nn of the preset scanning path 500, and record the nth offset information of the electronically controlled scanner 200 moving the laser without ablative effect from point Nn-1 to point Nn in this stage;

[0077] S5, replacing the non-ablative laser with an ablative laser, causing the electrically controlled scanner 200 to reverse direction and scan from the Nn end to the N0 end of the preset scanning path 500 in the order of the nth offset information, the n-1th offset information, ..., the second offset information and the first offset information;

[0078] S6, making the electric-controlled scanner 200 move in the positive direction and scan from the N0 end to the Nn end of the preset scanning path 500 in the order of the first offset information, the second offset information, ..., the n-1th offset information, and the nth offset information;

[0079] S7. Repeat steps S5 and S6.

[0080] The method for loading ions in an embodiment of the present invention controls the direction in which the laser 10 is emitted to change the position on the target material 300 where the ablation laser is irradiated. By continuously changing the direction in which the laser 10 is emitted, the position on the target material 300 where the ablation laser is irradiated can be moved according to a predetermined scanning path, thereby avoiding the situation in which the ablation laser ablates the same position of the target material 300 for a long time, causing damage and depression of the target material 300 and reducing the number of ejected atoms. This can extend the service life of the target material 300, generate a large number of ions at a stable rate, and have a high working efficiency of the ion loading system 1000.

[0081] A scanning path is set on the ablated surface of the target material 300. It can be understood that the target material 300 is not limited to a cylindrical target material 300. The target material 300 can be constructed as a target material 300 of any shape with a flat ablated surface. Therefore, the scanning path set on the ablated surface of the target material 300 can be formed into any shape and can be individually designed according to the shape of the ablated surface of the target material 300.

[0082] like Figure 3 and Figure 4 As shown, the scanning path 500 preset on the circular ablated surface is spiral, and the scanning path 500 preset on the rectangular ablated surface is rotational.

[0083] The preset scanning path 500 is decomposed into multiple points, one end point of the scanning path is recorded as point N0, and multiple points are sequentially recorded as point N1, point N2, ..., along the extension direction of the scanning path until the other end point Nn of the scanning path.

[0084] The laser generator 100 first emits a non-ablative laser, and controls the movement of the electro-controlled scanner 200 to adjust the emission direction of the laser so that the non-ablative laser irradiates the position of point N0. Then, the emission direction of the non-ablative laser is changed by controlling the movement of the electro-controlled scanner 200 so that the non-ablative laser irradiates the position of point N1, and the first offset information of the movement of the electro-controlled scanner 200 is recorded in the process of the non-ablative laser irradiating the position of point N0 to the position of point N1. Then, the electro-controlled scanner 200 is used to change the emission direction of the non-ablative laser so that the non-ablative laser irradiates the position of point N1. The emission direction of the laser is changed to make the non-ablative laser irradiate the position of point N2, and the second offset information of the movement of the electro-controlled scanner 200 is recorded in the process of moving the non-ablative laser irradiation from the position of point N1 to the position of point N2; the above steps are repeated to make the non-ablative laser irradiate the position of point N3, point N4, ..., point Nn-1, and finally point Nn, and the third offset information, the fourth offset information, ..., the n-1th offset information and the nth offset information of the movement of the electro-controlled scanner 200 are recorded in sequence.

[0085] At this time, the position where the non-ablative laser irradiates the target 300 has moved according to the predetermined scanning path, and has moved from one end point to another end point of the predetermined scanning path, and n offset information of the electrically controlled scanner 200 is also recorded.

[0086] For the convenience of describing the present invention, the first offset information, the second offset information, ..., the n-1th offset information and the nth offset information of the electro-controlled scanner 200 are collectively referred to as the offset information of the electro-controlled scanner 200. The offset information of the electro-controlled scanner 200 is complex information including one or more of the motion size information, the motion angle information and the motion direction information. The offset information can record the distance, the angle and the direction of motion of the electro-controlled scanner 200, and the types and values ​​of the information recorded from the first offset information to the nth offset information are uncertain. After changing the preset scanning path 500 or even changing the decomposition point, the offset information also changes accordingly. Therefore, the offset information of the electro-controlled scanner 200 is only for the convenience of describing the present invention and simplifying the description, and cannot be understood as a limitation to the present invention.

[0087] After recording the offset information of the electrically-controlled scanner 200, the laser without ablative effect is replaced with an ablative laser. At this time, the ablative laser irradiates the point Nn position, and the electrically-controlled scanner 200 is controlled in the opposite direction, and is controlled in the order of the nth offset information, the n-1th offset information, ..., the second offset information and the first offset information. It can be understood that the motion size information and the motion angle information in the offset information of the electrically-controlled scanner 200 are both numerical information. When the electrically-controlled scanner 200 is controlled according to the motion size information and the motion angle information in the offset information, but controlled in the opposite direction, the ablative laser can be scanned from the Nn end to the N0 end of the preset scanning path 500.

[0088] Then, the electric-controlled scanner 200 is controlled in the positive direction in the order of the first offset information, the second offset information, ..., the n-1th offset information, and the nth offset information, so that the ablation laser scans from the N0 end to the Nn end of the preset scanning path 500.

[0089] The above process is repeated, and the ablation laser moves and scans along the preset scanning path 500, reciprocating between point N0 and point Nn. The position where the ablation laser irradiates the target material 300 moves along the preset scanning path 500. The ablation laser can evenly scan the ablated surface of the target material 300, avoiding the situation where the ablation laser ablates the same position of the target material 300 for a long time, causing damage and depression of the target material 300 and reducing the number of ejected atoms. The ablation laser irradiates the target material 300 and generates a large number of atoms at a stable rate.

[0090] In some embodiments of the present invention, the time taken by the ablation laser to scan between any two adjacent points is the same or similar, and the ablation time of the ablation laser at each location of the preset scanning path 500 is the same, so that the rate at which the target material 300 produces atoms is stable during the process of the ablation laser ablating the target material 300.

[0091] In some embodiments of the present invention, the electrically controlled scanner 200 is an electrically controlled mirror 20, as shown below. Figure 1 and Figure 2 The steps of a specific embodiment of an ion loading system 1000 in which the galvano-controlled scanner 200 is a galvano-controlled mirror 20 are described below.

[0092] The target material 300 is a cylindrical target material 300 , the ablated surface of the target material 300 is circular, and the preset scanning path 500 is spiral.

[0093] First, the preset scanning path 500 is decomposed into multiple points at the same intervals, one end point of the scanning path is recorded as point N0, and multiple points are sequentially recorded as point N1, point N2, ... along the extension direction of the scanning path until the other end point Nn of the scanning path.

[0094] Subsequently, the laser generator 100 is controlled to emit a laser without ablative effect, and the first movable member 2 and the second movable member 3 drive the reflector body 1 of the electrically controlled reflector 20 to move so as to adjust the emission direction of the laser until the laser without ablative effect irradiates the position of point N0. Then, the first movable member 2 and the second movable member 3 are controlled to drive the reflector body 1 to move, and the emission direction of the laser without ablative effect is changed until the laser without ablative effect irradiates the position of the adjacent point N1, and the first rotation angle information and the rotation direction information A1 of the first rotating shaft 22 and the first rotation angle information and the rotation direction information B1 of the second rotating shaft 32 are recorded in the process of the laser without ablative effect moving from the position of point N0 to the position of point N1; and the first movable member 2 and the second movable member 3 are controlled to drive the reflector body 1 to move, and the emission direction of the laser without ablative effect is changed until the laser without ablative effect irradiates the position of the adjacent point N2, and the process of the laser without ablative effect moving from the position of point N1 to the position of point N2 is recorded. During the process, the second rotation angle information and rotation direction information A2 of the first rotating shaft 22, and the second rotation angle information and rotation direction information B2 of the second rotating shaft 32 are recorded; the above steps are repeated to sequentially irradiate the non-ablative laser to the position of point N3, the position of point N4, ..., the position of point Nn-1, and the position of point Nn, and sequentially record the third rotation angle information and rotation direction information A3 of the first rotating shaft 22, the third rotation angle information and rotation direction information B3 of the second rotating shaft 32, the fourth rotation angle information and rotation direction information A4 of the first rotating shaft 22, and the fourth rotation angle information and rotation direction information B4 of the second rotating shaft 32, ..., the n-1th rotation angle information and rotation direction information An-1 of the first rotating shaft 22, and the n-1th rotation angle information and rotation direction information Bn-1 of the second rotating shaft 32, the nth rotation angle information and rotation direction information An of the first rotating shaft 22, and the nth rotation angle information and rotation direction information Bn of the second rotating shaft 32.

[0095] At this time, the position of the target material 300 irradiated by the laser without ablative effect has moved according to the predetermined scanning path, and has moved from the endpoint point N0 to the endpoint point Nn. The n rotation angle information and rotation direction information of the first rotating shaft 22 and the n rotation angle information and rotation direction information of the second rotating shaft 32 are also recorded. The first movable member 2 and the second movable member 3 are controlled in sequence according to the recorded information, and the process of the position of the target material 300 irradiated by the laser moving according to the predetermined scanning path can be restored.

[0096] After recording the deflection information of the first moving member 2 and the second moving member 3, the laser without ablative effect is replaced with a 532nm pulse laser, and the ablative laser is irradiated at the point Nn position. Next, the first moving member 2 and the second moving member 3 are controlled in turn according to the recorded information, but the rotation angles of the first rotating shaft 22 and the second rotating shaft 32 are controlled in turn according to the recorded information, and the rotation directions of the first rotating shaft 22 and the second rotating shaft 32 are controlled in turn according to the reverse recorded information. That is, the first rotating shaft 22 is controlled in turn according to -An and the second rotating shaft 32 is controlled in turn according to -Bn, the first rotating shaft 22 is controlled in turn according to -(An-1) and the second rotating shaft 32 is controlled in turn according to -(Bn-1), ..., the first rotating shaft 22 is controlled in turn according to -A2 and the second rotating shaft 32 is controlled in turn according to -B2, the first rotating shaft 22 is controlled in turn according to -A1 and the second rotating shaft 32 is controlled in turn according to -B1, so that the ablative laser scans from the N point n end of the preset scanning path 500 to the point N0 end, and the scanning time used by the ablative laser between any two adjacent points is the same or similar. Here, '-' indicates that the rotation direction of the shaft is opposite to the recorded rotation direction.

[0097] At this time, the ablation laser is irradiated at point N0, and the first rotating shaft 22 is controlled according to A1 and the second rotating shaft 32 is controlled according to B1, the first rotating shaft 22 is controlled according to A2 and the second rotating shaft 32 is controlled according to B2, ..., the first rotating shaft 22 is controlled according to An-1 and the second rotating shaft 32 is controlled according to Bn-1, the first rotating shaft 22 is controlled according to An and the second rotating shaft 32 is controlled according to Bn, so that the ablation laser scans from point N0 end to point Nn end of the preset scanning path 500, and the scanning time of the ablation laser between any two adjacent points is the same or similar.

[0098] Repeat the steps, the ablation laser scans from point Nn end to point N0 end of the predetermined scanning path, and scans from point N0 end to point Nn end of the predetermined scanning path. The time taken by the ablation laser to scan between any two adjacent points is the same or similar. The ablation laser can evenly scan the ablated surface of the target material 300. The number of atoms generated by the ablation laser on the target material 300 is large and the rate of atom generation is stable.

[0099] In other embodiments of the present invention, the ablation laser may reciprocate between any two points in a predetermined scanning path, and does not necessarily have to scan from point Nn end to point N0 end.

[0100] In other embodiments of the present invention, after the ablation laser is irradiated at the decomposition point for a period of time, the target material 300 is ablated to form a more serious depression, and then moves to an adjacent point, and the ablation laser ablates atoms at multiple points respectively, and the time taken for the ablation laser to irradiate at any point is the same or similar.

[0101] Other components of the ion loading system 1000 according to the embodiment of the present invention, such as the laser generator 100 and the ion trap 400, and operations thereof are known to those skilled in the art and will not be described in detail herein.

[0102] In the description of this specification, the description with reference to the terms "one embodiment", "some embodiments", "illustrative embodiments", "examples", "specific examples", or "some examples" means that the specific features, structures, materials or characteristics described in conjunction with the embodiment or example are included in at least one embodiment or example of the present invention. In this specification, the schematic representation of the above terms does not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials or characteristics described may be combined in any one or more embodiments or examples in a suitable manner.

[0103] Although the embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that various changes, modifications, substitutions and variations may be made to the embodiments without departing from the principles and spirit of the present invention, and that the scope of the present invention is defined by the claims and their equivalents.

Claims

1. A method for loading ions, characterized in that: The ion loading systems used include: a laser generator, wherein the laser generator is suitable for emitting laser light; An electrically controlled scanner, which can deflect the laser light path and is suitable for changing the direction in which the laser is emitted; a target material, wherein the target material ejects atoms at an ablation position under ablation by the laser; an ion trap, the ion trap being disposed adjacent to the target material and being suitable for collecting atoms ejected from the target material; The method of loading ions comprises at least the following steps: S1, decomposing the preset scanning path into points at certain intervals; S2, using a non-ablative laser to align with any end point N0 of a preset scanning path, and then the electrically controlled scanner changes the emission direction of the non-ablative laser until the laser is aligned with an adjacent point N1, and recording the first offset information of the electrically controlled scanner causing the non-ablative laser to move from point N0 to point N1 in this stage; S3, changing the emission direction of the non-ablative laser by the electric-controlled scanner until the laser is aligned with the adjacent point N2, and recording the second offset information of the electric-controlled scanner causing the non-ablative laser to move from point N1 to point N2 in this stage; S4, repeat the above steps until the laser without ablative effect is aligned with the other end point Nn of the preset scanning path, and record the nth offset information of the electronically controlled scanner moving the laser without ablative effect from point Nn-1 to point Nn in this stage; S5, replacing the non-ablative laser with an ablative laser, causing the electrically controlled scanner to reverse direction and scan from the Nn end to the N0 end of the preset scanning path in the order of the nth offset information, the n-1th offset information, ..., the second offset information and the first offset information; S6, making the electric-controlled scanner scan from the N0 end to the Nn end of the preset scanning path in the positive direction in the order of the first offset information, the second offset information, ..., the n-1th offset information, and the nth offset information; S7. Repeat steps S5 and S6.

2. The method for loading ions according to claim 1, characterized in that: The time taken for the ablation laser to scan between any two adjacent points is the same or similar.

3. The method for loading ions according to claim 1 or 2, characterized in that: The electrically controlled scanner includes an electrically controlled reflector or an electrically controlled displacement stage.

4. The method for loading ions according to claim 3, characterized in that: The electrically controlled reflector comprises: Reflector body; A first moving member, wherein the first moving member is adapted to drive the reflector body to move in a first direction; The second moving member is suitable for driving the reflector body to move in a second direction.

5. The method for loading ions according to claim 4, characterized in that: The first movable member is suitable for driving the reflector body to rotate in a first direction, and the second movable member is suitable for driving the reflector body to rotate in a second direction. The rotation axis of the reflector body in the first direction extends in a vertical direction, and the rotation axis of the reflector body in the second direction extends in a horizontal direction.

6. The method for loading ions according to claim 5, characterized in that: The first moving member comprises: a first driving member and a first rotating shaft connected to the first driving member, and the first rotating shaft is connected to the second moving member; The second moving member includes: a second driving member and a second rotating shaft connected to the second driving member, and the second rotating shaft is connected to the reflector body.

7. The method for loading ions according to claim 6, characterized in that: The electrically controlled reflector further comprises: a base, the first rotating shaft is rotatably arranged on the base, and the second movable member further comprises: a mirror frame, the reflector body is arranged on the mirror frame, the second driving member is arranged on the mirror frame, and the second rotating shaft is rotatably arranged on the mirror frame.

8. The method for loading ions according to claim 7, characterized in that: The second moving member further includes a counterweight block, and a connecting line between the counterweight block and the second driving member passes through the rotation axis of the mirror frame.

9. The method for loading ions according to claim 6, characterized in that: A first speed reduction member is arranged between the first driving member and the first rotating shaft, and a second speed reduction member is arranged between the second driving member and the second rotating shaft.

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