A super surface optical device and its manufacturing process

Abstract

The present invention provides a metasurface optical device and a manufacturing process thereof, wherein the metasurface optical device comprises: a substrate and a plurality of nanocolumns arranged on the end face of the substrate, wherein the materials of the plurality of nanocolumns include at least two kinds, and the dispersion coefficients of the at least two materials compensate each other. The present invention uses at least two materials to form all nanocolumns, and the refractive index and dispersion coefficient of different materials are different. When light passes through the nanocolumns, different diffraction effects will be produced. Through the different materials, structures and arrangements of the nanocolumns, the wavefront of the outgoing light is modulated, including but not limited to reducing or increasing chromatic aberration, modulating polarization, amplitude, frequency, etc., to achieve different preset functions.

Description

Technical Field

[0001] The present invention relates to the field of optical technology, and in particular to a metasurface optical device and a manufacturing process thereof. Background Art

[0002] Metasurface optical devices are widely used in the field of optical design. Through metasurface design, lenses, polarization devices, optical computing, lidar, etc. can be realized. Metasurface optical devices can almost replace all existing optical devices.

[0003] Ordinary metasurface optical devices are affected by structural diffraction dispersion. Light of different wavelengths will have different diffraction directions when passing through metasurface optical devices, resulting in dispersion. Existing methods for reducing dispersion mainly include the following three categories: the first category is to make the nanocolumns on the surface of metasurface optical devices taller to reduce dispersion, but the high aspect ratio makes the manufacturing process difficult and has process limits; the second category is to combine metasurface optical devices with existing devices and use existing devices to eliminate dispersion, which increases the complexity of the optical system and reduces the efficiency, which is not conducive to the implementation of optical design; the third category is to design a metasurface device with a long focal depth and use computational processing for later imaging to reduce the influence of dispersion, but the algorithm is relatively complex and the focusing efficiency of the device with a long focal depth is low. It can be seen that the existing methods for reducing dispersion are difficult to implement. Summary of the invention

[0004] The purpose of the present invention is to provide a metasurface optical device and its manufacturing process, which can more effectively modulate the wavefront of the output light, including but not limited to reducing or increasing chromatic aberration, modulating polarization, amplitude, frequency, etc., and can be used for chromatic aberration adjustment, imaging, spectral control, display devices, electro-optical integration, optical computing, etc.

[0005] In order to solve the above technical problems, the technical solution of the present invention is as follows:

[0006] A first aspect of an embodiment of the present application provides a metasurface optical device, the metasurface optical device comprising: a substrate and a plurality of nanorods arranged on an end surface of the substrate, wherein:

[0007] The materials of the plurality of nanorods include at least two materials, and the dispersion coefficients of the at least two materials compensate or offset each other or are combined according to a preset function.

[0008] In some optional embodiments, the materials of the plurality of nanorods include at least two types, including:

[0009] The material of any nano-column in the first part of the plurality of nano-columns is the same material, and the material of any nano-column in the second part of the plurality of nano-columns is different from the first material.

[0010] In some optional embodiments, the material of any nano-column in the second portion of nano-columns is a single material, and the single material is different from the first material.

[0011] In some optional embodiments, any nano-column in the second portion of nano-columns includes at least two materials.

[0012] In some optional embodiments, the materials of the plurality of nanorods include at least two types, including:

[0013] Any nano-pillar among the plurality of nano-pillars includes at least two materials.

[0014] In some optional embodiments, when the nanocolumn includes at least two materials, the nanocolumn includes: a column formed by arranging the at least two materials layer by layer in a direction perpendicular to the end face of the substrate, or a column formed by combining the at least two materials in a direction perpendicular to the end face of the substrate.

[0015] In some optional embodiments, the nanocolumn comprises: a column formed by arranging the at least two materials layer by layer in a direction perpendicular to the end face of the substrate, or a column formed by combining the at least two materials in a direction perpendicular to the end face of the substrate, comprising:

[0016] The at least two materials are arranged in sequence in a direction perpendicular to the end surface of the substrate to form the nanocolumn; or,

[0017] Any one of the at least two materials is used as a wrapping layer, and the other material is used as a nanocolumn formed by a column core in the wrapping layer. The column core is composed of a single material, or is composed of at least two materials layer by layer along a direction perpendicular to the end surface of the substrate.

[0018] In some optional implementations, the light absorptivity of the at least two materials is less than a preset value, and the refractive index of the at least two materials to light is different.

[0019] In some optional embodiments, the shape of any material of any nano-pillar among the plurality of nano-pillars includes: circle, square, star, ring, pentagon and hexagon.

[0020] A second aspect of an embodiment of the present application provides a manufacturing process for a metasurface optical device, the manufacturing process comprising:

[0021] Plating a first material on the end surface of the substrate so that the first material covers the entire end surface of the substrate;

[0022] Etching a portion of the first material to an end surface of the substrate and retaining another portion of the first material;

[0023] Plating a second material so that the second material and the first material are arranged side by side in a direction parallel to the end face of the substrate or are stacked in a direction perpendicular to the end face of the substrate, and the dispersion coefficient of the second material and the dispersion coefficient of the first material compensate each other;

[0024] The second material and the first material are etched to obtain a plurality of nanorods.

[0025] In some optional implementations, the plating of the second material includes:

[0026] The second material is plated on the end surface of the substrate obtained by etching, so that the thickness of the second material is the same as the thickness of the first material, thereby obtaining a coating of the first material and a coating of the second material arranged in parallel.

[0027] In some optional implementations, the plating of the second material includes:

[0028] Plating a sacrificial material or a filling material on the end surface of the substrate obtained by etching, so that the thickness of the sacrificial material or the filling material is the same as the thickness of the first material;

[0029] The second material is plated on the end surface formed by the sacrificial material or the filling material and the first material, so that the first material coating and the second material coating are stacked in a direction perpendicular to the substrate end surface.

[0030] In some optional implementations, etching the second material and the first material to obtain a plurality of nanorods includes:

[0031] The portion of the substrate end surface coated with the sacrificial material is etched to obtain a plurality of nano-pillars.

[0032] Another aspect of the present application provides a process for manufacturing a metasurface optical device, the process comprising:

[0033] Plating a sacrificial material on the end surface of the substrate so that the sacrificial material covers the entire end surface of the substrate;

[0034] Etching part of the sacrificial material to the end surface of the substrate to obtain at least two columnar spaces;

[0035] Nanomaterials are plated in the at least two columnar spaces respectively, so that the nanomaterials in different columnar spaces are different, or at least one columnar space contains at least two stacked nanomaterials, and the dispersion coefficients of the different materials compensate each other;

[0036] The remaining sacrificial material on the end surface of the substrate is etched to obtain a plurality of nanorods.

[0037] In order to solve the problem of dispersion of metasurface devices, an embodiment of the present application provides a metasurface optical device and a manufacturing process thereof, wherein the metasurface optical device comprises: a substrate and a plurality of nanocolumns arranged on the end face of the substrate, wherein the materials of the plurality of nanocolumns include at least two materials, and the dispersion coefficients of the at least two materials compensate each other. It can be seen that an embodiment of the present application provides a metasurface optical device and a manufacturing process thereof, by using at least two materials to constitute all nanocolumns, and the refractive index and dispersion coefficient of different materials are different, when light passes through the nanocolumns, different refraction and diffraction effects will be produced, and the wavefront of the outgoing light is modulated by different materials, structures, positions, shapes, periods, arrangements, heights, etc. of the nanocolumns, including but not limited to reducing or increasing chromatic aberration, modulating polarization, amplitude, frequency, etc., to achieve different preset functions. BRIEF DESCRIPTION OF THE DRAWINGS

[0038] Figure 1 is a schematic diagram of an exemplary nanocolumn structure shown in an embodiment of the present invention;

[0039] Figure 2 is a schematic diagram of a second exemplary nanocolumn structure shown in an embodiment of the present invention;

[0040] Figure 3 is a schematic diagram of a third exemplary nanocolumn structure shown in an embodiment of the present invention;

[0041] Figure 4 is a schematic diagram of a fourth exemplary nanocolumn structure shown in an embodiment of the present invention;

[0042] Figure 5 is a flowchart of an exemplary process for manufacturing a metasurface optical device provided by an embodiment of the present invention;

[0043] Figure 6 is a second exemplary process flow chart for manufacturing a metasurface optical device provided by an embodiment of the present invention;

[0044] Figure 7 is a third exemplary process flow chart for manufacturing a metasurface optical device provided by an embodiment of the present invention;

[0045] Figure 8 This is a fourth exemplary process flow chart for manufacturing a metasurface optical device provided in an embodiment of the present invention. DETAILED DESCRIPTION

[0046] The exemplary embodiments of the present disclosure will be described in more detail below with reference to the accompanying drawings. Although the exemplary embodiments of the present disclosure are shown in the accompanying drawings, it should be understood that the present disclosure can be implemented in various forms and should not be limited by the embodiments set forth herein. On the contrary, these embodiments are provided to enable a more thorough understanding of the present disclosure and to fully convey the scope of the present disclosure to those skilled in the art.

[0047] like Figure 1 , Figure 2 , Figure 3 and Figure 4 As shown, an embodiment of the present invention provides a metasurface optical device, comprising: a substrate and a plurality of nanorods arranged on the end surface of the substrate, wherein:

[0048] The materials of the plurality of nanorods include at least two materials, and the dispersion coefficients of the at least two materials compensate or offset each other or are combined according to a preset function.

[0049] In this embodiment, the substrate is usually a wafer, but the material of the substrate includes but is not limited to the wafer in this embodiment, and can also be other materials. The dispersion coefficients of at least two materials can be opposite or the same. When they are the same, the lens design of the metasurface device composed of the same nanomaterial can be relied on to reduce the final dispersion effect. Similar to the doublet lens in the traditional lens, the two lenses have the same dispersion coefficient sign, and the chromatic aberration is reduced by the dispersion coefficient size and the radius of curvature.

[0050] In this embodiment, if Figure 1 As shown, according to the functions that the metasurface optical device needs to realize, the array mode of nanocolumns is calculated through the database. The nanocolumns can be arranged alternately or periodically. Two different nanocolumns correspond to two different optical functions. The difference in the optical function of the nanocolumns mainly depends on the shape and material of the column. Different preset functions can be realized by different materials, structures, positions, shapes, periods, arrangements, heights, etc. of the nanocolumns.

[0051] In this embodiment, multiple nanocolumns are arranged on the substrate according to an array preset in a database. The light beam can be incident from any angle and emerge after penetrating the metasurface optical device. After the light beam is incident on the metasurface optical device, the materials and shapes of different nanocolumns are different. Nanocolumns of a certain material can be optimized for a specific wavelength of light, which can reduce dispersion or change the refraction and diffraction effects. Different refractive indices and dispersion coefficients of different materials can be combined in a variety of ways to reduce or increase the dispersion of the incident light, thereby realizing light convergence, divergence, transmission, reflection, polarization, etc.

[0052] It can be seen that by adopting this embodiment, a metasurface optical device is provided, in which all nanocolumns are composed of at least two materials, and the refractive index and dispersion coefficient of different materials are different. When light passes through the nanocolumns, different refraction and diffraction effects will be produced. Through the diversified arrangement and combination of nanocolumns made of different materials, the wavefront of the outgoing light is modulated, including but not limited to reducing or increasing chromatic aberration, polarization, amplitude, frequency, etc., thereby realizing the preset function better than a metasurface device made of a single material.

[0053] In some embodiments of the present invention, the materials of the plurality of nanorods include at least two types, including:

[0054] The material of any nano-column in the first part of the plurality of nano-columns is the same material, and the material of any nano-column in the second part of the plurality of nano-columns is different from the first material.

[0055] In this embodiment, the first part of nanocolumns includes at least one nanocolumn, and the specific number should be determined according to the functional design of the metasurface optical device; each nanocolumn in the first part of nanocolumns is composed of the same material; the material of the nanocolumns in the second part is different from the material of the nanocolumns in the first part.

[0056] In some embodiments of the present invention, the material of any nanorod in the second portion of nanorods is a single material, and the single material is different from the first material.

[0057] In this embodiment, the second part of nanocolumns includes at least one nanocolumn, and the specific number should be determined according to the functional design of the metasurface optical device; each nanocolumn in the second part of nanocolumns is composed of only one material, and all nanocolumns in the second part of nanocolumns can include different materials; the array mode of the nanocolumns in the second part and the nanocolumns in the first part are diversified, and the nanocolumns of different materials can be arranged alternately, or one area can be nanocolumns of the same material, and another area can be nanocolumns of another material, such as Figure 2 As shown, both parts of the nanorods are made of a single material, and the array pattern includes but is not limited to that shown in the figure.

[0058] In some embodiments of the present invention, any nanorod in the second portion of nanorods comprises at least two materials.

[0059] In this embodiment, if Figure 3 and Figure 4 As shown, each nanocolumn in the second part of the nanocolumns includes at least two materials. The materials included in each nanocolumn in the second part of the nanocolumns can be different from each other, or they can be exactly the same nanocolumns. Similarly, the array modes of the nanocolumns in the second part and the nanocolumns in the first part are diverse. Nanocolumns with different structures can be arranged alternately, or one area can have nanocolumns with the same structure, and another area can have nanocolumns with another structure.

[0060] In some embodiments of the present invention, the materials of the plurality of nanorods include at least two types, including:

[0061] Any nano-pillar among the plurality of nano-pillars includes at least two materials.

[0062] In this embodiment, if Figure 3 and Figure 4As shown, each of the nanocolumns on the metasurface optical device includes at least two materials. The materials included in each nanocolumn can be different or they can be exactly the same nanocolumns. The array modes of nanocolumns with different structures are diverse and need to be distributed according to preset functions.

[0063] In some embodiments of the present invention, when the nanocolumn includes at least two materials, the nanocolumn includes: the at least two materials are arranged layer by layer in a direction perpendicular to the end face of the substrate to form a column, or the at least two materials are combined in a direction perpendicular to the end face of the substrate to form a column.

[0064] In this embodiment, when a nanocolumn includes at least two materials, the arrangement of different materials includes the following two types: the first type is as follows: Figure 3 As shown in FIG. 1 , different materials are arranged in sequence along a direction perpendicular to the end surface of the substrate, and the arrangement order of different materials is determined according to the optical function of each nanorod; the second type, as shown in FIG. Figure 4 As shown, different materials are vertically arranged on the end surface of the substrate, the outer material is the same material, which is different from the inner material, and can be a sandwich structure or a ring-shaped surrounding structure, in which the outer material surrounds the inner material in a ring.

[0065] In some embodiments of the present invention, the nanocolumn comprises: a column formed by arranging the at least two materials layer by layer in a direction perpendicular to the end face of the substrate, or a column formed by combining the at least two materials in a direction perpendicular to the end face of the substrate, comprising:

[0066] The at least two materials are arranged in sequence in a direction perpendicular to the end surface of the substrate to form the nanocolumn; or,

[0067] Any one of the at least two materials is used as a wrapping layer, and the other material is used as a nanocolumn formed by a column core in the wrapping layer. The column core is composed of a single material, or is composed of at least two materials layer by layer along a direction perpendicular to the end surface of the substrate.

[0068] In this embodiment, when a nanocolumn includes at least two materials, and the at least two materials are combined and arranged in a direction perpendicular to the end surface of the substrate, such as Figure 4 As shown, the nanocolumn is divided into a coating layer and a column core. The coating layer is made of the same material and different from the column core. The column core can be a nanocolumn made of a single material or a nanocolumn made of different materials. The column core can be Figure 2 and Figure 3Any one of the nanocolumns shown, but not limited to the ones shown in the figure. The wrapping layer can be divided into two parts and arranged on both sides of the column core to form a sandwich structure, or it can be an annular structure arranged outside the column core, or it can be an annular structure with one or more gaps, but not limited to the above.

[0069] In some embodiments of the present invention, the light absorptivity of the at least two materials is less than a preset value, and the refractive index of the at least two materials to light is different.

[0070] In this embodiment, all materials should have no light absorption or an absorption less than a preset value. Only when the materials have no light absorption will they not affect the incidence and emission of light.

[0071] In some embodiments of the present invention, the shape of any material of any nanorod among the plurality of nanorods includes: circle, square, star, ring, pentagon and hexagon.

[0072] In this embodiment, the column shape of each nanocolumn is determined according to the function of the metasurface optical device. When the nanocolumn includes multiple materials stacked in layers, each layer of material can correspond to a different shape. For example, a nanocolumn has two layers, which can be a structure of a cylindrical bottom and a square top. Another nanocolumn can be a structure of a pentagon bottom and a hexagon top. The shape of the nanocolumn includes but is not limited to a circle, square, star, ring, pentagon and hexagon. The shape of each nanocolumn is determined according to the difficulty of the manufacturing process and the preset function. The arrangement of nanocolumns of different shapes is diversified.

[0073] In summary, the metasurface optical device using the structure described in the embodiment of the present application uses at least two materials to form all the nanocolumns, and the refractive index and dispersion coefficient of different materials are different. When light passes through the nanocolumns, it will produce different refraction and diffraction effects. Through the different materials, structures, positions, shapes, periods, arrangements, etc. of the nanocolumns, the wavefront of the outgoing light is modulated, including but not limited to reducing or increasing chromatic aberration, modulating polarization, amplitude, frequency, etc., to achieve different preset functions.

[0074] correspond Figures 1 to 4 The embodiment of the present invention also provides a corresponding manufacturing process for the illustrated metasurface optical device. The manufacturing process for manufacturing the corresponding metasurface optical device is introduced below in combination with the embodiment.

[0075] In some embodiments, the present invention provides an exemplary manufacturing process 100 of a metasurface optical device, wherein the manufacturing process 100 comprises the following steps:

[0076] Plating a first material on the end surface of the substrate so that the first material covers the entire end surface of the substrate;

[0077] Etching a portion of the first material to an end surface of the substrate and retaining another portion of the first material;

[0078] Plating a second material so that the second material and the first material are arranged side by side in a direction parallel to the end face of the substrate or are stacked in a direction perpendicular to the end face of the substrate, and the dispersion coefficient of the second material and the dispersion coefficient of the first material compensate each other;

[0079] The second material and the first material are etched to obtain a plurality of nanorods.

[0080] Optionally, the process of plating the second material in the manufacturing process 100 may include:

[0081] The second material is plated on the end surface of the etched substrate so that the thickness of the second material is the same as that of the first material, thereby obtaining a film of the first material and a film of the second material arranged in parallel. Figure 5 shown.

[0082] For example, Figure 5 The flowchart of the manufacturing process of a metasurface optical device provided by an embodiment of the present invention is shown. First, a first material is plated on a substrate so that the first material covers the entire end face of the substrate. Some sacrificial materials and photolithography materials are also included on the first material. Then, according to the preset arrangement information of the nanocolumns, some unnecessary materials are etched away. Then, a second material is plated, and sacrificial materials and photolithography materials are plated on the two different materials. Then, according to the preset arrangement information of the nanocolumns, some unnecessary materials are etched away. In order to protect the formed nanocolumns, sacrificial media need to be plated between the nanocolumns. After all the nanocolumns are etched and formed, the unnecessary material media are etched away. The final result is as follows Figure 2 In the optical device shown, each nanocolumn of the obtained optical device is composed of a single material, and the materials of the multiple nanocolumns are different.

[0083] Figure 5 The manufacturing process shown is only an optional manufacturing process of the embodiment of the present invention. In other embodiments, the technical solution of the present invention also provides other manufacturing processes. For example, in some other embodiments of the present invention, the plating of the second material in the manufacturing process 100 also includes:

[0084] Plating a sacrificial material or a filling material on the end surface of the substrate obtained by etching, so that the thickness of the sacrificial material or the filling material is the same as the thickness of the first material;

[0085] The second material is plated on the end surface formed by the sacrificial material or the filling material and the first material, so that the first material coating and the second material coating are stacked in a direction perpendicular to the substrate end surface.

[0086] In some embodiments of the present invention, etching the second material and the first material to obtain a plurality of nanorods comprises:

[0087] The portion of the substrate end surface coated with the sacrificial material is etched to obtain a plurality of nano-pillars.

[0088] For example, Figure 6 As shown, Figure 6 A process flow chart of manufacturing a metasurface optical device provided by an embodiment of the present invention is shown. Figure 6 In the method, the first material is first plated on the substrate so that the first material covers the entire end face of the substrate. Some sacrificial materials and photolithography materials are also included on the first material. Then, according to the preset arrangement information of the nanocolumns, some unnecessary materials are etched away. Then, sacrificial materials or filling materials are plated in the etched columnar space. Then, the second material is plated, and sacrificial materials and photolithography materials are plated on the second material. Then, according to the preset arrangement information of the nanocolumns, the sacrificial materials are etched away. The filling material is used to protect the mechanical stability of the nanocolumns and prevent the nanocolumns from being damaged externally. Therefore, the filling material is retained to obtain the preset nanocolumns. Each nanocolumn on the final optical device includes at least two materials, and the different materials are arranged in sequence along the direction perpendicular to the end face of the substrate, such as Figure 3 Metasurface optical device shown.

[0089] It should be understood that the manufacturing process 100 and its optional implementation are only schematic descriptions and do not constitute a limitation on the manufacturing process of the embodiment of the present invention. In other implementations of the present invention, the manufacturing process of the present invention can also be implemented in other ways.

[0090] For example, the present invention also provides a manufacturing process 200 of a metasurface optical device, and the manufacturing process 200 includes the following steps:

[0091] Plating a sacrificial material on the end surface of the substrate so that the sacrificial material covers the entire end surface of the substrate;

[0092] Etching part of the sacrificial material to the end surface of the substrate to obtain at least two columnar spaces;

[0093] Nanomaterials are plated in the at least two columnar spaces respectively, so that the nanomaterials in different columnar spaces are different, or at least one columnar space contains at least two stacked nanomaterials, and the dispersion coefficients of the different materials compensate each other;

[0094] The remaining sacrificial material on the end surface of the substrate is etched to obtain a plurality of nanorods.

[0095] In some implementations, the manufacturing process 200 is implemented, for example, as follows Figure 7The manufacturing process of the metasurface optical device shown in the figure is, specifically, firstly, a sacrificial material is plated on the end face of the substrate so that the sacrificial material covers the complete end face of the substrate, and a photolithography material is also included on the sacrificial material, and then according to the preset arrangement information of the nanocolumns, part of the unnecessary material is etched away, and the nanomaterial is plated in the columnar space obtained by etching, and then the photolithography material is continued to be plated, and etching is performed according to the preset arrangement information of the nanocolumns, and different nanomaterials are plated in different columnar spaces, and finally the unnecessary materials are etched away to obtain multiple nanocolumns. Finally, the following is obtained. Figure 2 In the optical device shown, each nanopillar on the optical device is made of a single material, and the materials of the multiple nanopillars are different.

[0096] In some other implementations, the manufacturing process 200 can also be implemented as Figure 8 The process flow is shown in Figure 1. Figure 8 As shown, a sacrificial material is first plated on the end face of the substrate so that the sacrificial material covers the entire end face of the substrate, and a photolithography material is also included on the sacrificial material. Then, according to the preset arrangement information of the nano-columns, some unnecessary materials are etched away, and at least two different nano-materials are sequentially plated in the columnar space obtained by etching along the direction perpendicular to the end face of the substrate, so that at least two nano-materials are stacked and arranged to obtain the preset nano-columns. Each nano-column on the finally obtained optical device includes at least two materials, and the different materials are sequentially arranged along the direction perpendicular to the end face of the substrate, so as to obtain the following Figure 3 The optics shown.

[0097] The nanopillars obtained by the manufacturing process 100 and the manufacturing process 200 can also be combined with the self-aligned double patterning technology to obtain Figure 4 structure.

[0098] The manufacturing process 100 and the manufacturing process 200 provided in the present disclosure are only schematic descriptions and do not limit the technical solutions of the embodiments of the present invention. The specific implementation methods of the technical solutions of the embodiments of the present invention include but are not limited to the above-mentioned embodiments. In actual implementation scenarios, other specific implementation methods can also be adopted according to the structure of the metasurface optical device disclosed in the present disclosure, which will not be repeated here.

[0099] In summary, in the above embodiments of the present invention, a metasurface optical device and a manufacturing process thereof are provided. By using at least two materials to constitute all the nanocolumns, and the refractive index and dispersion coefficient of different materials are different, when the light passes through the nanocolumns, different refraction and diffraction effects will be produced. Through the different materials, structures, positions, shapes, periods, arrangements, etc. of the nanocolumns, the wavefront of the outgoing light is modulated, including but not limited to reducing or increasing chromatic aberration, modulating polarization, amplitude, frequency, etc., to achieve different preset functions.

[0100] The above is a preferred embodiment of the present invention. It should be pointed out that for ordinary technicians in this technical field, several improvements and modifications can be made without departing from the principles of the present invention. These improvements and modifications should also be regarded as the scope of protection of the present invention.

Claims

1. A metasurface optical device, characterized in that: The metasurface optical device comprises: a substrate and a plurality of nanorods arranged on the end surface of the substrate, wherein: The materials of the plurality of nanorods include at least two materials, and the dispersion coefficients of the at least two materials compensate or offset each other or are combined according to preset functions, and the preset functions include light convergence, divergence, transmission, reflection, and polarization; The materials of the plurality of nanorods include at least two types, including: The material of any nanocolumn in the first part of the plurality of nanocolumns is the same material, and the material of any nanocolumn in the second part of the plurality of nanocolumns is different from the first material; Any nanocolumn in the second part of nanocolumns comprises at least two materials; Nanocolumns with the same structure are arranged in a certain area on the end surface of the substrate, and nanocolumns with another structure are arranged in another area on the end surface of the substrate.

2. The metasurface optical device according to claim 1, characterized in that: The materials of the plurality of nanorods include at least two types, including: Any nano-pillar among the plurality of nano-pillars includes at least two materials.

3. The metasurface optical device according to claim 1, characterized in that: When the nanocolumn includes at least two materials, the nanocolumn includes: a column formed by arranging the at least two materials layer by layer in a direction perpendicular to the end face of the substrate, or a column formed by combining the at least two materials in a direction perpendicular to the end face of the substrate.

4. The metasurface optical device according to claim 3, characterized in that: The nanocolumn comprises: a column formed by arranging the at least two materials layer by layer in a direction perpendicular to the end face of the substrate, or a column formed by combining the at least two materials in a direction perpendicular to the end face of the substrate, comprising: The at least two materials are arranged in sequence in a direction perpendicular to the end surface of the substrate to form the nanocolumn; or, Any one of the at least two materials is used as a wrapping layer, and the other material is used as a nanocolumn formed by a column core in the wrapping layer. The column core is composed of a single material, or is composed of at least two materials layer by layer along a direction perpendicular to the end surface of the substrate.

5. The metasurface optical device according to claim 1, characterized in that: Also includes: The light absorptivity of the at least two materials is less than a preset value, and the refractive index of the at least two materials to light is different.

6. The metasurface optical device according to claim 4, characterized in that: The shape of any material of any nano-pillar among the plurality of nano-pillars includes: circle, square, star, ring, pentagon and hexagon.

7. A process for manufacturing a metasurface optical device, characterized in that: The manufacturing process comprises: Plating a first material on the end surface of the substrate so that the first material covers the entire end surface of the substrate; Etching a portion of the first material to an end surface of the substrate and retaining another portion of the first material; Plating a second material so that the second material and the first material are arranged side by side in a direction parallel to the end face of the substrate or are stacked in a direction perpendicular to the end face of the substrate, and the dispersion coefficient of the second material and the dispersion coefficient of the first material compensate each other; Etching the second material and the first material to obtain a plurality of nanocolumns, wherein the material of any nanocolumn in a first part of the plurality of nanocolumns is the same material, and the material of any nanocolumn in a second part of the plurality of nanocolumns is different from the first material; Any nanocolumn in the second part of nanocolumns comprises at least two materials; Nanocolumns with the same structure are arranged in a certain area on the end surface of the substrate, and nanocolumns with another structure are arranged in another area on the end surface of the substrate.

8. The process for manufacturing a metasurface optical device according to claim 7, characterized in that: The plating of the second material comprises: The second material is plated on the end surface of the substrate obtained by etching, so that the thickness of the second material is the same as the thickness of the first material, thereby obtaining a coating of the first material and a coating of the second material arranged in parallel.

9. The process for manufacturing a metasurface optical device according to claim 7, characterized in that: The plating of the second material comprises: Plating a sacrificial material or a filling material on the end surface of the substrate obtained by etching, so that the thickness of the sacrificial material or the filling material is the same as the thickness of the first material; The second material is plated on the end surface formed by the sacrificial material or the filling material and the first material, so that the first material coating and the second material coating are stacked in a direction perpendicular to the substrate end surface.

10. The process for manufacturing a metasurface optical device according to claim 9, characterized in that: Etching the second material and the first material to obtain a plurality of nanorods, comprising: The portion of the substrate end surface coated with the sacrificial material is etched to obtain a plurality of nano-pillars.

11. A process for manufacturing a metasurface optical device, characterized in that: The manufacturing process comprises: Plating a sacrificial material on the end surface of the substrate so that the sacrificial material covers the entire end surface of the substrate; Etching part of the sacrificial material to the end surface of the substrate to obtain at least two columnar spaces; Nanomaterials are plated in the at least two columnar spaces respectively, so that the nanomaterials in different columnar spaces are different, or at least one columnar space contains at least two stacked nanomaterials, and the dispersion coefficients of the different materials compensate each other; Etching the remaining sacrificial material on the end surface of the substrate to obtain a plurality of nanocolumns, wherein the material of any nanocolumn in a first part of the plurality of nanocolumns is the same material, and the material of any nanocolumn in a second part of the plurality of nanocolumns is different from the first material; Any nanocolumn in the second part of nanocolumns comprises at least two materials; Nanocolumns with the same structure are arranged in a certain area on the end surface of the substrate, and nanocolumns with another structure are arranged in another area on the end surface of the substrate.

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