Transport device

Abstract

In order to illustrate a transport device (1) in the form of a planar motor which enables a more efficient operation, according to the application it is provided that the transport units (TE) can be moved in two main directions of movement (H1, H2) with different efficiencies (μH1 > μH2) and / or different maximum forces and / or different accuracies in such a way that the drive coils (AS1, AS2) of the first and second coil groups (SG1, SG2) have different coil properties influencing the magnetic field and / or the drive magnets (4) of the transport units which interact with the drive coils (AS1) of the first coil group (SG1) have different magnet properties influencing the magnetic field than the drive magnets (4) which interact with the drive coils (AS2) of the second coil group (SG2), characterized in that the at least one transport section (2) is arranged in a position which deviates from the horizontal position in such a way that the force component of the load force acting on the transport units in the first main direction of movement (H1) is greater than the force component of the load force in the second main direction of movement (H2) when the transport device (1) is operated, wherein the load force at least comprises the transport unit weight of the transport units.

Description

Technical Field

[0001] This invention relates to a transport device in the form of a planar motor, the transport device having at least one transport section constituting a transport plane and at least one transport unit capable of moving in at least two dimensions along two main motion directions in the transport plane, wherein a first coil group having a plurality of drive coils is provided on the transport section, the first coil group defining a first main motion direction; and a second coil group having a plurality of drive coils is provided, the second coil group defining a second main motion direction; and a plurality of drive magnets are provided on the transport unit, wherein the drive coils of the first coil group can be controlled by a control unit to electromagnetically interact with at least some of the drive magnets of the transport unit. The second coil group is used to move the transport unit in a first main motion direction, and its drive coils are controllable by a control unit to electromagnetically interact with at least a portion of the drive magnets of the transport unit to move the transport unit in a second main motion direction. The transport unit can move in the two main motion directions with different efficiencies and / or different maximum forces and / or different precisions, in such a way that the drive coils of the first and second coil groups have different coil characteristics affecting the magnetic field and / or the drive magnets of the transport unit interacting with the drive coils of the first coil group have different magnetic characteristics affecting the magnetic field compared to the drive magnets interacting with the drive coils of the second coil group. Furthermore, the present invention relates to a method for operating such a transport device. Background Technology

[0002] Planar motors are known in principle in the prior art. For example, US 9,202,719 B2 discloses the basic structure and working principle of such a planar motor. A planar motor basically has a stator that forms a transport plane, enabling one or more transport units to move at least two-dimensionally within this transport plane. The stator is typically composed of one or more transport sections. To enable the transport units to move within the transport plane, a driving force is generated acting on the transport units by the interaction of the magnetic field of the stator (of the transport sections) with the magnetic field of the transport units. To cause the transport units to move in a specific direction, at least one of the magnetic fields—the magnetic field on the stator and / or the magnetic field of the transport units—must change over time to follow the movement of the transport units. However, in most cases, only one magnetic field, typically the magnetic field of the stator, changes over time, while the corresponding other magnetic field (the magnetic field on the transport units) is usually constant, i.e., does not change over time.

[0003] A time-varying magnetic field can be generated, for example, by a coil (electromagnet), which can be installed not only on the transport unit but also on the stator, especially the transport section. This coil is often also called a drive coil. A time-invariant, i.e., constant magnetic field is typically generated by a permanent magnet. These components are usually called drive magnets. The drive magnet can also be installed not only on the transport unit but also on the transport section, depending on the implementation of the planar motor. For simpler control, the drive coil is typically installed on the transport section of the planar motor, while the drive magnet is installed on the transport unit.

[0004] The drive coil is typically controlled by a control unit to generate a kinetic magnetic field along the desired direction of motion. Drive magnets interacting with this kinetic magnetic field are arranged on the transport unit in at least two dimensions, enabling the generation of a drive and levitation force acting on the transport unit. This levitation force allows the transport unit to be held in a constant position, for example, by creating or adjusting and maintaining an air gap between the transport unit and the transport section. The additional driving force allows the transport unit to move along the desired direction of motion and generates a tilting force or tilting torque. To achieve the two-dimensional motion of the transport unit unique to planar motors, a two-dimensional interaction between the magnetic fields of the transport section and the transport unit is required, wherein one of the two types of magnetic fields must vary with time in at least two dimensions, or both types of magnetic fields must vary with time in at least one dimension (complementary to the corresponding other dimension). Here, the drive coil and drive magnets are advantageously arranged such that, in addition to one-dimensional motion along an axis defined by the transport plane, more complex two-dimensional motion of the transport unit within the transport plane is also possible.

[0005] Planar motors can be used, for example, as transport devices in production processes, enabling highly flexible transport processes with complex motion profiles. Such applications of planar motors as transport devices are shown, for example, in EP 3 172 156 B1 and EP 3 172 134 B1.

[0006] The stator of such a planar motor can have drive coils arranged in different ways, and the arrangement of the drive magnets on the transport unit can also be quite different. For example, US 9,202,719 B2 discloses a planar motor with a multi-layered stator having multiple coil planes stacked vertically. The drive coils in adjacent coil planes are perpendicular to each other to form two main directions of motion in which the transport unit can move. Thus, on average, the coil planes have different distances from the drive magnets of the transport unit. This results in different efficiencies of the planar motor in the two main directions of motion. To balance this, it is proposed that a higher coil current be applied to the drive coils of the coil planes farther from the drive magnets of the transport unit than to the drive coils of the coil planes closer to the drive magnets of the transport unit to generate driving force.

[0007] In their paper "Design and measurements of the Double Layer Planar Motor," presented at the IEEE International Conference on Electrical Machines and Drives in Chicago from May 12-15, 2013, JMM Rovers et al. disclosed a planar motor in which two coil planes are arranged in a layered configuration. To balance the varying efficiencies resulting from different spacing with the magnets of the transport unit, it was proposed to use drive coils of different heights for the two coil planes. Summary of the Invention

[0008] Therefore, the objective of this invention is to provide a transport device in the form of a planar motor and a method for operating the transport device in the form of a planar motor, wherein the device and method enable more efficient operation of the transport device.

[0009] According to the present invention, this task is solved by: the at least one transport section being arranged at a position off-horizontally such that the force component of the load force acting on the transport unit in the first main direction of motion during operation of the transport device is greater than the force component of the load force in the second main direction of motion, wherein the load force includes at least the transport unit weight of the transport unit.

[0010] Furthermore, the task is solved by a method for operating a transport device in the form of a planar motor. Attached Figure Description

[0011] The following is a reference to the appendix. Figure 1a To be continued Figure 6 The invention will be described in more detail below, with the accompanying drawings illustrating advantageous embodiments of the invention in a illustrative, schematic, and non-limiting manner. The drawings are as follows:

[0012] Figure 1aThe transport device, in the form of a planar motor, is shown in a top view.

[0013] Figure 1b and Figure 1c The transport device, which takes the form of a planar motor, is shown in side view.

[0014] Figures 2a to 2e This illustrates different possibilities for the arrangement of the drive coil on the transport section.

[0015] Figures 3a to 3f This demonstrates different possibilities for the 1D arrangement of the driving magnets on the transport unit.

[0016] Figures 4a to 4d This demonstrates different possibilities for the 2D arrangement of the driving magnets on the transport unit.

[0017] Figures 5a to 5e The force conditions on the transport unit and on the transport sections with different orientations are shown separately.

[0018] Figure 6 A top view shows a transport device in the form of a planar motor in an alternative embodiment. Detailed Implementation

[0019] exist Figures 1a to 1c An exemplary construction scheme of a transport device 1 in the form of a planar motor is simplified here. Figure 1a The transport unit 1 is shown in a top view, while Figure 1b and Figure 1c The transport device 1 is shown in a side view. The transport device 1 has at least one transport section 2 serving as a stator and at least one transport unit TE, the transport section forming a transport plane 3, and the transport unit being capable of moving at least two-dimensionally along two main motion directions H1 and H2 within the transport plane 3. Within the scope of this invention, the transport plane 3 can be understood as a flat surface of the transport section 2, determined by the size and shape of the transport section 2. The transport plane 3 is exemplarily horizontally arranged here. For simplicity, ... Figure 1a Only one transport section 2 is shown, but of course, multiple (and possibly different) transport sections 2 can be arranged sequentially to form a larger transport plane 3. Thus, the transport device 1 can be modularly constructed, and transport planes 3 of varying shapes and areas can be realized. Of course, this modular structure is only optional, and it is also possible to have only one unique transport section 2 as a single component. It is also possible for multiple, possibly different, transport units TE to move simultaneously and independently within the transport plane 3 of the transport section 2.

[0020] The transport section 2 is provided with a first coil group SG1 having multiple drive coils AS1 defining a first main motion direction H1, and a second coil group SG2 having multiple drive coils AS2 defining a second main motion direction H2. The drive coils AS1 of the first coil group SG1 are arranged sequentially in a specific direction, here in the X direction, to form the first main motion direction H1 of the transport unit TE, which extends along the X-axis. The drive coils AS2 of the second coil group SG2 are arranged sequentially in a specific direction, here in the Y direction, to form the second main motion direction H2 for the transport unit TE, which extends along the Y-axis. Preferably, the drive coils AS1 and AS2 of the first coil group and the second coil groups SG1 and SG2 are arranged as follows: Figure 1a As shown, the two main motion directions H1 and H2 are arranged relative to each other such that they are orthogonal to each other. However, other relative arrangements of the main motion directions H1 and H2 may also be considered, such as angles other than right angles between the two main motion directions H1 and H2.

[0021] The drive coil AS1 of the first coil group SG1 and the drive coil AS2 of the second coil group SG2 are respectively configured as elongated, conventionally wound coils. Each drive coil AS1 of the first coil group SG1 has a longitudinal extension LAS1 in the Y direction and a lateral extension QAS1 in the X direction that is smaller than the longitudinal extension, and they are arranged sequentially in the direction of their lateral extension QAS1, i.e., in the X direction. The lateral extension QAS1 of the drive coil AS1 is typically related to the pole pitch Ti of the drive magnet 4 of the magnet group MG1 that interacts with it and / or the winding method of the drive coil AS1, i.e., whether it is concentrated winding (single-tooth winding) or distributed winding. The winding method is known in the prior art. Thus, the direction in which the drive coils AS1 of the first coil group SG1 are arranged sequentially defines the first main motion direction H1 for the movement of the transport unit TE. The drive coils AS1 of the first coil group SG1 are configured as so-called "long coils". This means that their longitudinal extension LAS1 is larger than the extension of the transport unit TE in the corresponding direction (i.e., the Y direction in this case), i.e., longer than the transport unit width BTE of the transport unit TE in this case. In the example shown, the longitudinal extension LAS1 is substantially equal in length to the transport section 2 in the Y direction. Therefore, at approximately each location in the Y direction, movement of the transport unit TE in the X direction, i.e., in the first main motion direction H1, is possible.

[0022] The drive coil AS2 of the second coil group SG2 also has a longitudinal extension LAS2, which is smaller than the longitudinal extension LAS1 of the drive coil AS1 of the first coil group SG1. The longitudinal extension LAS2 of the drive coil AS2 of the second coil group SG2 extends in the X direction. Each drive coil AS2 of the second coil group SG2 also has a lateral extension QAS2, smaller than its longitudinal extension LAS2, in the Y direction. The lateral extension QAS2 is approximately equal in size to the lateral extension QAS1 of the drive coil AS1 of the first coil group SG1, but may be larger or smaller. The drive coil AS2 of the second coil group SG2 are also arranged sequentially in the direction of its lateral extension QAS2, in the Y direction. Thus, the direction in which the drive coils AS2 of the second coil group SG2 are sequentially arranged defines the second main motion direction H2 for the movement of the transport unit TE.

[0023] The drive coil AS2 of the second coil group SG2 is configured as a so-called "short coil". This means that its longitudinal extension LAS2 is equal to or less than the extension of the transport unit TE in the corresponding direction (here, the X direction), for example, the transport unit length LTE of the transport unit TE. However, in order to still enable the transport unit TE to move in the second main motion direction H2 throughout the entire transport plane 3, the drive coil AS2 of the second coil group SG2 is arranged in multiple rows side by side in the X direction, for example, three rows. However, the opposite arrangement is also possible, i.e., the "long" coil is used for the second main motion direction H2, and the "short" coil is used for the first main motion direction H1. It is also possible to use the "long" coil or the "short" coil separately for the two main motion directions H1 and H2. For example, if the same drive coil AS1 = AS2 is used for the two coil groups SG1 and SG2, this can be advantageous in terms of cost savings.

[0024] However, the illustrated embodiments are of course only to be understood as exemplary, and those skilled in the art may also specify other arrangements of coil groups SG1, SG2 and / or other construction methods of the drive coils. For example, so-called PCB coils may be used in a known manner. Here, PCB refers to "printed circuit board" and means that the coils are directly integrated into the printed circuit board. The two embodiments described are known in the prior art and will not be described in detail here. Other relative arrangements of coil groups SG1, SG2 with each other and / or with respect to transport section 2 may also be considered and / or there may also be additional coil groups SGi with drive coils AS1, AS2, which constitute another main direction of motion Hi. However, in the most common case, two coil groups SG1, SG2 with multiple drive coils AS1, AS2 of different orientations are sufficient, wherein each coil group SG1, SG2 defines a main direction of motion H1, H2. However, it is preferable that the at least two main directions of motion H1, H2 are orthogonal to each other as shown, thereby allowing for a simpler structural construction of transport section 2.

[0025] Furthermore, it is advantageous for the modular structure of the transport plane 3, which consists of multiple transport segments 2, that each transport segment 2 has a square or rectangular transport plane 3. The transport segments 2 can then be arranged sequentially in a simple manner, such that the corresponding first main movement direction H1 of each transport segment 2 extends parallel or orthogonal to the first main movement direction H1 of the adjacent transport segment 2. Thus, the transport plane 3 can be simply and flexibly constructed from multiple transport segments 2. Alignment of adjacent transport segments 2 is not mandatory; offsetting is also possible.

[0026] With the aid of the transport device 1 shown, it is possible for the transport unit TE to move substantially unrestricted in the two main motion directions H1 and H2 within the transport plane 3 of the transport section 2. Here, for example, it is possible for the transport unit TE to move only along the X-axis or only along the Y-axis, respectively. However, it is also possible for the transport unit TE to move simultaneously in both main motion directions H1 and H2, for example, by means of... Figure 1a The two-dimensional motion path BP with X and Y coordinates is shown on the transport unit TE in the transport plane 3. In the case of the corresponding construction embodiment of the transport section 2 and the corresponding transport unit TE, it is also possible to use at least four other degrees of freedom of motion (translational motion in the height direction Z and rotation about the three axes X, Y, and Z) in a known manner.

[0027] A control unit 5 is also provided in the transport device 1. This control unit can control the drive coils AS1 and AS2 of the transport section 2, such as... Figure 1aAs shown in the diagram. Control unit 5 can also be connected to or integrated into a higher-level equipment control unit 6. If multiple transport sections 2 are provided in the transport device 1, a section control unit (not shown) can be provided for each transport section 2 or a group of transport sections 2, and / or a coil control unit can be provided for each drive coil ASi. These section control units and / or coil control units can also be integrated into control unit 5. The movement path BP of the transport unit TE can be predetermined via control unit 5 and / or equipment control unit 6, for example, based on a specific production process of the equipment in which the transport device 1 can be integrated.

[0028] As mentioned, multiple transport units TE can of course move simultaneously and independently on the transport device 1. Therefore, the control unit 5 and / or the equipment control unit 6 ensure that the movement of each transport unit TE is synchronized or coordinated, for example, to avoid collisions between transport units TE and / or with the transported objects. A control program runs on the control unit 5, which implements the desired movement paths of each transport unit TE. The control unit 5 or the equipment control unit 6 can also be connected, for example, to a planning module PLM for planning the movement path BP. The planning module PLM can be, for example, a computer, on which the actually constructed transport device 1, especially the transport plane 3, is virtually implemented.

[0029] A plurality of driving magnets 4 are provided on at least one transport unit TE. These driving magnets electromagnetically interact with the driving coils AS1 and AS2 of the at least two coil groups SG1 and SG2 to move the transport unit TE. For this purpose, the transport unit TE typically has a base 9, on the bottom side of which the driving magnets 4 are provided, such as in… Figure 1b As can be seen in [the text]. In [the text] Figure 1a In the diagram, the corresponding portion of the substrate 9 is shown cut open so that the arrangement of the driving magnet 4 can be seen.

[0030] In the example shown, two first magnet groups MGa and two second magnet groups MGb are arranged on the transport unit TE. It is generally sufficient to operate the transport device 1 by providing one unique first magnet group MGa and one unique second magnet group MGb for each transport unit TE. However, it is also possible to provide two or more first magnet groups MGa and two or more second magnet groups MGb for each transport unit TE. It is also possible to consider unequal numbers of first and second magnet groups MGa and MGb, for example, two first magnet groups MGa and one second magnet group MGb. In each magnet group MGa and MGb, multiple driving magnets 4 are provided, arranged sequentially in a specific arrangement direction with specific pole pitches Ta and Tb, and with different magnetization directions. The arrangement direction of the first magnet group MGa corresponds to the X direction, and the arrangement direction of the second magnet group MGb corresponds to the Y direction. Thus, the arrangement directions are orthogonal to the main motion directions H1 and H2. Preferably, the magnet assemblies MGa and MGb are arranged as parallel as possible to the main motion directions H1 and H2 to generate force electromagnetically as efficiently as possible. The example shows a known 1D arrangement of the drive magnet 4 on the transport unit TE; however, a similarly known 2D arrangement may also be feasible, as will be further developed based on… Figures 4a to 4d As explained in detail.

[0031] To enable the transport unit TE to move in the transport plane 3, the first drive coil and the second drive coils AS1 and AS2 can be individually controlled (energized) by the control unit 5. Power electronics that may be required for this can be located in the control unit 5 or on the transport section 2. By controlling each of the first drive coils AS1 in a time-staggered manner, a magnetic field for basic motion is generated in the first main motion direction H1. This magnetic field in the first main motion direction H1 interacts electromagnetically primarily with the drive magnet 4 of the first magnet group MGa to generate a driving force in the first main motion direction H1 for adjusting a predetermined motion state of the corresponding transport unit TE, such as acceleration, constant speed, or deceleration up to a stationary state. Similarly, by controlling each of the second drive coils AS2 in a time-staggered manner, a magnetic field for basic motion is generated in the second main motion direction H2. This magnetic field interacts electromagnetically primarily with the drive magnet 4 of the second magnet group MGb to generate a driving force for moving the transport unit TE in the second main motion direction H2. The superposition of the moving magnetic field caused by the control of the drive coils AS1 and AS2 enables the transport unit TE to move in the transport plane 3 in a desired manner along a pre-given two-dimensional motion path BP.

[0032] In addition to the two essentially unrestricted translational degrees of freedom in the main motion directions H1 and H2 within the transport plane 3, finite translational motion of the transport unit TE in the direction normal to the transport plane 3, specifically in the Z-axis direction. The Z-axis is perpendicular to the horizontal transport plane 3 in the arrangement of the illustrated transport section 2. Based on the arrangement and structural configuration of the drive coils AS1 and AS2 of the coil groups SG1 and SG2, and the first and second magnet groups MGa and MGb interacting with them, finite rotation of the transport unit TE around the three spatial axes X, Y, and Z is also possible.

[0033] As mentioned, the adjacent driving magnets 4 of magnet groups MGa and MGb have different magnetic orientations and are spaced apart by specific pole pitches Ta and Tb (here, i.e., from the center of one driving magnet 4 to the center of the adjacent driving magnet 4, respectively). Typically, the magnetic field generated by magnet group MGa rotates 180° within the pole pitch Ti. Here, the spacing of the driving magnets 4 required to generate a magnetic field with the desired pole pitch Ti is also related to the arrangement of the driving magnets 4 within magnet group MGa, particularly to the gap width of any possible gap between adjacent driving magnets 4, to the magnetization directions of adjacent driving magnets 4 (e.g., 180° opposite arrangement or a Halbach array arrangement), and to the magnet width MBi of the driving magnets 4. In the case of a Halbach array arrangement, it may be advantageous, for example, that each of the outermost driving magnets 4 of magnet group MGa has, for example, half the magnet width MBi of the driving magnet 4 between them.

[0034] This could mean, for example, that the magnetic north and south poles alternate, as in... Figure 1a As indicated by the shaded and unshaded drive magnets 4 on the transport unit TE, this corresponds to arranging adjacent drive magnets 4 rotated by 180°. The known Halbach array arrangement has also proven advantageous, in which the magnetization directions of adjacent drive magnets 4 differ from each other by 90°. Here, the pole pitches Ta and Tb can be understood as the spacing between two adjacent drive magnets 4 arranged in opposite magnetic orientations (north / south poles) in the arrangement direction. If the drive magnets 4 (in the arrangement direction) have the same magnet width MB, adjacent drive magnets have orientation directions differing by 180°, and the drive magnets 4 are directly adjacent to each other (as is usually the case), then the pole pitches Ta and Tb are equal to the corresponding magnet widths MBa and MBb. The pole pitches Ta and Tb and the magnet widths MBa and MBb are exemplarily shown in... Figure 4a and Figure 4c The transport unit TE is shown in the diagram.

[0035] During operation, an air gap L is provided between the transport plane 3 of the transport section 2 and the driving magnets 4 of the magnet groups MGa and MGb of the transport unit TE, such as in Figure 1b As can be seen in the image. Preferably, a cover layer with magnetic permeability is also provided on the transport section 2 to shield the drive coils AS1 and AS2 located beneath it from external influences and to form a substantially smooth transport plane 3. The cover layer is... Figure 1a The image is shown in half to allow identification of the arrangement of the drive coils AS1 and AS2 located beneath it. Similarly, a covering layer for covering the drive magnet 4 can also be provided on the transport unit TE. The air gap L then extends between the covering layer of the respective transport unit TE and the drive magnet 4. To generate and, in particular, maintain the air gap L, the drive coils AS1 and AS2 and the drive magnet 4 interact in a known manner during operation, not only to generate the driving force (the driving force required for movement in the main motion directions H1 and H2), but also to generate the levitation force FS, which here is the levitation force in the Z direction. The levitation force FS also functions in the stationary state of the transport unit TE to generate and maintain the air gap L. In addition to Figure 1a and Figure 1b In addition to the basic horizontal installation position shown for transport section 2, an inclined installation position in the form of an inclined plane may also be considered, such as in... Figure 5b As shown in the image. Figure 5c A basically vertical installation position is also possible. Of course, any other installation position for transport section 2 is also possible.

[0036] Here, levitation force FS refers to the portion of the electromagnetically generated force acting on the transport unit TE that is opposite in the direction of gravity to the gravity FG and the possible process force FP (e.g., the gravity of the transported object O and, optionally, the additional process force acting on the transport unit TE based on the working process in the process handling station of transport device 1), as will be further explained below. Figures 5a to 5eAs described in detail. Therefore, the levitation force FS is numerically equal to the vector sum of gravity FG and the process force FP (in the direction of gravity), achieving a static equilibrium state for the transport unit TE while maintaining the air gap. The driving force refers to the portion of the electromagnetically generated force that causes changes in the motion state of the transport unit TE (e.g., uniform speed, acceleration, deceleration, etc.), or, in the case of the process force FP which does not act in the direction of gravity, the portion that must be added to the levitation force FS to keep the transport unit TE stationary. Therefore, in addition to the two-dimensional motion in the transport plane 3, specific motion of the transport unit TE in the height direction, i.e., orthogonal to the transport plane 3, is also possible. By correspondingly controlling the drive coils AS1 and AS2, the air gap L can be increased and decreased to a limited extent, thereby enabling the transport unit TE to move in the height direction, here in the Z direction, as shown in... Figure 1b As indicated by the double arrows on the transport unit TE. Here, the size of the range of motion available in the vertical direction is primarily related to the structural design of the transport device 1, especially to the maximum magnetic field that the drive coils AS1 and AS2 and the drive magnet 4 can generate, as well as the mass and load of the transport unit TE. Depending on the size and design of the transport device 1, the range of motion available in the vertical direction can range, for example, from a few millimeters to a few centimeters.

[0037] Furthermore, it is stipulated that the drive coils AS1 and AS2 of the first coil group and the second coil group SG1, SG2 have different coil characteristics affecting the magnetic field and / or the drive magnet 4 (here, the first magnet group MGa) that mainly interacts with the drive coil AS1 of the first coil group SG1 of the transport unit TE has different magnetic characteristics affecting the magnetic field than the drive magnet 4 (here, the second magnet group MGb) that mainly interacts with the drive coil AS2 of the second coil group SG2. This enables the transport unit TE to move in the two main motion directions H1, H2 with different efficiencies μH1≠μH2 and / or different maximum forces and / or different precisions.

[0038] Here, the coil characteristics affecting the magnetic field can be understood as the variable structural or energy parameters of the driving coil ASi, which can influence the magnetic field generated by the driving coil ASi, especially the magnetic flux. This includes, for example, the average coil spacing Si between the driving coil ASi in the normal direction and the driving magnet 4 of the transport unit TE interacting with it. Figure 1bThe following parameters are considered in the coil group STi: the coil spacing TASi of adjacent drive coils ASi, the conductor resistance of drive coil ASi, the maximum coil current that can be applied to drive coil ASi, the number of turns of drive coil ASi, and the coil geometry of drive coil ASi. The coil geometry can be understood in particular as the longitudinal extension LASi and the transverse extension QASi of drive coil ASi parallel to the transport plane 3, and the coil height h of drive coil ASi orthogonal to the transport plane 3. ASi ,like Figure 1b As shown in the driving coil AS2. Furthermore, the winding method, i.e., whether it is concentrated winding or distributed winding, also affects the coil geometry of the driving coil ASi. The magnetic characteristics of the driving magnet 4 of the transport unit TE, influencing the magnetic field, can be understood, for example, as the remanent magnetic flux density of the driving magnet 4, the relative orientation between the driving magnet 4 and the driving coil ASi interacting with it, the pole pitch Ti of the driving magnet 4, and the magnetic geometry of the driving magnet. The magnetic geometry, in particular, relates to the magnet length LMi, magnet width MBi, and magnet height HMi, as shown, for example in... Figure 1b and Figure 3d As shown in the diagram.

[0039] The following are exemplary measures on how to improve the efficiency μHi of electromagnetic force formation in the main direction of motion Hi of the transport device 1 by means of the magnetic properties and / or the coil properties that affect the magnetic field. Of course, it is also possible to change multiple magnetic properties and / or coil properties.

[0040] The relative orientation between the driving magnet 4 and the driving coil ASi should be achieved as much as possible such that the conductor orientation of the driving coil ASi is perpendicular to the magnetic field generated by the driving magnet 4. In a practical embodiment, this is achieved, for example, by using an elongated driving coil ASi and an elongated driving magnet 4, with the magnet assembly MGi interacting therewith, positioned as parallel as possible to the longitudinal extension LASi (see, for example, [link to relevant documentation]). Figure 1a Furthermore, the relative orientation between the driving coil ASi of coil group SGi (e.g., SG1) and the magnet group MGi (e.g., MGb) that primarily interacts with the driving coil ASi of other corresponding coil groups SGi (e.g., SG2) should be as perpendicular as possible, so that little to no coupling effect is generated. This is based on... Figure 1a In one example, this is achieved by arranging the driving magnet 4 of the second magnet group MGb as parallel as possible to the lateral extension QAS1 of the driving coil ASi of the first coil group SG1. The spacing between the conductor of the driving coil ASi and the driving magnet 4 interacting with it (corresponding to the average coil spacing Si in each example) should be as small as possible because the flux density decreases exponentially with the normal spacing.

[0041] The conductor resistance of the drive coil ASi should be as low as possible. This can be achieved, for example, by having the drive coil ASi with the highest possible "coverage length" and / or increasing the cross-sectional area of ​​the conductor. Here, "coverage length" refers to the portion of the conductor within the influence range of the magnetic field of the drive magnet 4. Preferably, the "coverage length" should correspond as closely as possible to the entire extension of the conductor, or the drive coil ASi. A high copper fill factor is advantageous if multiple conductors are used to generate the driving force / levitation force (which is typically achieved using the drive coil ASi). (The definition of the copper fill factor is known in principle and is essentially equal to the ratio of the sum of the cross-sectional areas of the individual conductors of the coil to the total cross-sectional area of ​​the coil.) Since the resistivity of the conductor increases with increasing temperature, the efficiency of the conductor can be improved by lowering the temperature, for example, through heat dissipation.

[0042] The maximum force that can be generated acting on the transport unit TE (not only in the direction of motion but also in the height direction) may be affected, for example, by the maximum coil current that can be applied to the drive coil ASi (which is substantially limited by the power electronics) and / or by the coil geometry and number of turns. The positioning accuracy of the transport unit TE may be affected, for example, by the size of the coil spacing TASi. The coil spacing TASi refers to the distance between adjacent drive coils ASi, typically the distance between the coil axes, as exemplarily shown in… Figure 1a As shown in the driving coil AS2 of the second coil group SG2. It can be seen that there are numerous parameters that can affect the movement of the transport unit TE, including the efficiency μHi, the maximum force that can be generated on the transport unit TE, and / or the positional accuracy of the transport unit TE's movement. Of course, it is possible to try to optimize all or as many of the characteristics in the coil characteristics of the influencing magnetic field of the driving coil AS1 and the magnetic characteristics of the influencing magnetic field of the driving magnet 4. However, this is usually not feasible or undesirable, for example, for cost and efficiency reasons. For cost reasons, it may be advantageous, for example, to use coils constructed identically for the driving coil AS1 of the first coil group SG1 and the driving coil AS2 of the second coil group SG2, thereby generating an efficiency difference substantially automatically, for example, when the average coil spacing of the driving coils AS1 and AS2 is unequal, S1 ≠ S2. The following is based on... Figures 1a to 1c The case of different average coil spacing S1≠S2 for the drive coils AS1 and AS2 is discussed only by way of example, wherein the remaining coil characteristics and magnet characteristics that affect the magnetic field are consistent in the two main motion directions H1 and H2.

[0043] The drive coil AS1 of the first coil group SG1 is spaced apart from the first magnet group MGa by a first average coil spacing S1 in the normal direction of the transport plane 3 (i.e., in the Z direction), and the drive coil AS2 of the second coil group SG2 is spaced apart from the second magnet group MGb by a second average coil spacing S2, which is larger than the first average coil spacing S1, in the normal direction of the transport plane 3. Figure 1b As can be seen in the diagram. Therefore, the driving coil AS1 of the first coil group SG1 is closer to the driving magnet 4 of the first magnet group MGa in the Z direction than the driving coil AS2 of the second coil group SG2 is closer to the driving magnet 4 of the second magnet group MGb. Figure 1b In the example, the two coil groups SG1 and SG2 are arranged vertically overlapping each other.

[0044] Here, the average coil spacing S1 and S2 are measured from the position of the coil center when viewed in the Z direction from the corresponding drive coils AS1 and AS2. To avoid interfering magnetic attraction between the corresponding transport unit TE and transport section 2, the drive coils AS1 and AS2 are preferably implemented without an iron core, i.e., so-called "air coils". Figure 1a and Figure 1b In the example shown, the drive coils AS1 and AS2 are implemented as elongated coils with a generally elliptical shape, conventionally wound, each having a coil axis in the normal direction of the transport plane 3. However, the drive coils AS1 and AS2 may also be implemented as so-called PCB coils. However, the drive coils AS1 and AS2 of the corresponding coil groups SG1 and SG2 can also be, for example, layered and overlapped vertically in the normal direction of the transport plane 3 on the transport section 2 in a plurality of first coil planes SE1 having the first drive coil AS1 and a plurality of second coil planes SE2 having the second drive coil AS2, as shown in... Figure 1c As shown in the diagram.

[0045] exist Figure 1c In the example on the left, coil blocks with four first coil planes SE1 and coil blocks with four second coil planes SE2 are arranged vertically overlappingly on transport section 2. Figure 1c In the diagram on the right, four first coil planes and four second coil planes SE1 and SE2 are alternately arranged in the Z direction on the transport section 2. Here, the average coil spacings S1 and S2 are the average spacings between the coil planes SE1 and SE2 and the transport plane 3 in the Z direction, respectively. ; Where S1.i and S2.i are the coil spacings of the first coil plane and the second coil planes SE1 and SE2, and j and k are the number of the first coil plane and the second coil planes SE1 and SE2.

[0046] Under the same boundary conditions in terms of construction (same geometry (length, width, height), same number of turns, etc.) and energy (same maximum current or voltage, etc.), the drive coil AS1 of the first coil group SG1 generates the same (maximum) magnetic field as the drive coil AS2 of the second coil group SG2. The magnet groups MGa and MGb on the transport unit TE are implemented substantially identically (same geometry (magnet length, magnet width, magnet height), same number of drive magnets 4, same pole pitch Ti, same magnetization direction, same magnetic field strength, etc.), causing the magnet groups MGa and MGb to generate magnetic fields of substantially the same magnitude, which interact with the magnetic fields generated by the drive coils AS1 and AS2. However, because the drive coil AS1 of the first coil group SG1 is on average closer to the drive magnet 4 of the first magnet group MGa than the drive coil AS2 of the second coil group SG2 is closer to the drive magnet 4 of the second magnet group MGb, this results in a higher efficiency of electromagnetically forming force in the first main motion direction H1 than in the second main motion direction H2. This involves not only the generation of driving force but also the generation of levitation force. Thus, higher efficiency is achieved in the first main motion direction H1 in a known manner than in the second main motion direction H2.

[0047] exist Figures 2a to 2e The diagram schematically illustrates different possibilities for the arrangement of the drive coils AS1 and AS2 of the first coil group and the second coil group SG1 and SG2 on the transport section 2. Figure 2a and Figure 2b The so-called “singer-layer” or “single-layer” variant is shown, in which the first coil group and the second coil groups SG1 and SG2 are arranged in the same plane. Figures 2c to 2e This illustrates a so-called "multi-layer" or multi-layer construction method, in which the first coil group and the second coil groups SG1 and SG2 are arranged in a layered, overlapping manner in the height direction, as previously described. Figure 1b and Figure 1c As explained, in the case of a "double-layer" construction, for example, two layers of drive coils AS1 and AS2 are arranged vertically overlapping each other. In this case, the first main motion direction H1 (with higher efficiency μH1 > μH2) is basically automatically determined (assuming that the characteristics of other coils affecting the magnetic field and the characteristics of the magnet affecting the magnetic field are the same), because the drive coil AS1 of the first coil group SG1 is closer to the transport plane 3 in the normal direction of the transport plane 3 than the drive coil AS2 of the second coil group SG2.

[0048] The "single-layer" construction method is typically used in transport devices 1 with two equivalent main motion directions H1 and H2. Here, the drive coils AS1 and AS2 of the first coil group and the second coil groups SG1 and SG2 each have a coil spacing S1=S2 equal to that of the transport plane 3. Under the condition that other coil characteristics and magnet characteristics affecting the magnetic field are the same, essentially the same efficiency μH1=μH2 can be obtained for the two main motion directions H1 and H2. However, as mentioned above, besides the coil spacing Si, there are many other coil characteristics and magnet characteristics affecting the magnetic field, and by changing these characteristics, the efficiency μH1 and μH2 can be changed. Therefore, in principle, it is also possible to consider, in the case of the "single-layer" construction method, that the two main motion directions H1 and H2 produce different efficiencies μH1≠μH2, for example, due to the different pole pitches Ta≠Tb of the drive magnets 4 of the two magnet groups MGa and MGb and / or the different magnet geometries of the drive magnets 4 of the two magnet groups MGa and MGb.

[0049] exist Figure 2a The diagram shows the so-called "fishbone" arrangement of the drive coils AS1 and AS2 of the two coil groups SG1 and SG2. Figures 2b to 2e Unlike other embodiments, the two main directions of motion H1 and H2 do not extend parallel to the edge of transport section 2 (i.e., in the X and Y directions), but rather extend at an angle relative to it. Related details are disclosed, for example, in JW Jansen's 2007 paper, *Magnetically Levitated Planar Actuator with Moving Magnets*, published in *Electromechanical Analysis and Design Eindhoven* (published by Technische Universiteit Eindhoven, DOI: 10.6100 / IR630846). Figure 2c The diagram shows a "double-layer" implementation in which "long" drive coils AS1 and AS2 are provided not only in the first coil group SG1 but also in the second coil group SG2. Figure 2d An embodiment is shown having a "long" drive coil AS1 in the first coil group SG1 and a "short" drive coil AS2 in the second coil group SG2, compared with... Figure 1a Similar to the Chinese. Figure 2e An example is shown with a “short” drive coil AS1 in the first coil group SG1 and a “short” drive coil AS2 in the second coil group SG2.

[0050] exist Figures 3a to 3f and Figures 4a to 4d The diagram schematically illustrates different arrangements of the driving magnet 4 on the transport unit TE. In principle, these can be categorized into so-called 1D arrangements (…). Figures 3a to 3f ) and 2D layout ( Figures 4a to 4d In the 1D arrangement, as detailed above, at least one first magnet group MGa with multiple driving magnets 4 is provided for the first main motion direction H1 (i.e., the X-axis), and at least one second magnet group MGb with multiple driving magnets 4 is provided for the second main motion direction H2 (i.e., the Y-axis). Magnet groups MGa and MGb each have a specific number of driving magnets 4, particularly permanent magnets, arranged sequentially in a specific arrangement direction (i.e., MGa in the X-direction and MGb in the Y-direction). Here, adjacent driving magnets 4 have different magnetization directions. For example, the magnetization directions of adjacent driving magnets 4 can differ from each other by 180°, i.e., alternating magnetic north and south poles, as shown by the driving magnets 4 with and without shaded lines. However, as mentioned, the driving magnets 4 of the magnet group MGI can also be arranged in a known Halbach array configuration, where, for example, driving magnets 4 with magnetization directions 90° out of phase are arranged between driving magnets 4 with opposite magnetization directions (north pole, south pole). The Halbach array configuration has the advantage that the magnetic flux on one side of the magnet group MGI (preferably the side facing the transport plane 3) is greater than the magnetic flux on the opposite side. If the corresponding outermost driving magnet 4 of the magnet group MGI has a reduced, especially halved, magnet width MBi compared to the driving magnets 4 in between, a particularly advantageous sinusoidal magnetic field pattern of the magnetic field of the magnet group MGI can be achieved. The Halbach array configuration is known in the prior art and will not be described further here.

[0051] In the 2D arrangement, the driving magnets 4 with different magnetization directions are arranged in a basically checkerboard pattern on the transport unit TE. Here, the driving magnets 4 with different magnetization directions are arranged alternately and offset in two arrangement directions (i.e., the X and Y directions). These two directions are preferably oriented relative to each other, such as the two main motion directions H1 and H2, i.e., orthogonal to each other. It is immediately apparent that a variety of different arrangement possibilities are obtained, among which the most common variation of the 1D arrangement is... Figures 3a to 3f As shown in the diagram, the most common variation of the 2D arrangement is... Figures 4a to 4dAs shown in the diagram. In the 2D arrangement, the first magnet group MGa corresponds to the driving magnets 4 alternately arranged in one direction (e.g., in the X direction), and the second magnet group MGb corresponds to the driving magnets 4 alternately arranged in the corresponding other direction (e.g., in the Y direction). Thus, the magnet groups MGa and MGb are not separated in the 2D arrangement as they are in the 1D arrangement; instead, the driving magnets 4 are not only part of the first magnet group MGa, but also part of the second magnet group MGb.

[0052] For example, in order to arrange coil groups SG1 and SG2 in a "single layer" on transport section 2 ( Figure 2a and Figure 2b In the case of (where the other coil characteristics affecting the magnetic field of the drive coils AS1 and AS2 are the same), different efficiencies μH1, μH2 and / or different maximum forces and / or different positioning accuracies of the transport unit TE can be achieved, and the magnetic characteristics affecting the magnetic field of the drive magnet 4 of the transport unit TE can also be changed as mentioned. One possibility is, for example, that the pole pitch Ta of the first magnet group MGa is different from the pole pitch Tb of the second magnet group MGb, as exemplarily in a 1D arrangement. Figure 3d and Figure 3f The shown and in the 2D arrangement Figure 4c and Figure 4d As shown in [the document]. If in [the document] Figures 1a to 1c In the case of the "double-layer" implementation of the transport section 2 shown, the drive coil AS1 of the first coil group SG1 has a smaller coil pitch S1 than the drive coil AS2 of the second coil group SG2, and different pole pitches Ta≠Tb are also provided on the magnet groups MGa and MGb of the transport unit TE. Preferably, the pole pitch Ta of the first magnet group MGa (which interacts with the first coil group SG1) is smaller than the pole pitch Tb of the second magnet group MGb. This is advantageous because the magnetic field generated by the drive magnet 4 further penetrates into the transport section 2 in the Z direction as the pole pitch Ti increases. Therefore, the magnet group MGa with a larger pole pitch Ti interacts more efficiently with the drive coil AS1 of the more distant coil group SGi.

[0053] As mentioned at the beginning, prior art has attempted to compensate for the efficiency difference between the two main motion directions H1 and H2 in order to achieve the most equivalent main motion directions in terms of available electromagnetic force. In contrast, in the case of the present invention, the efficiency difference between the two main motion directions H1 and H2 is specifically utilized, as explained in more detail below.

[0054] To maintain the levitation state of the air gap L, i.e., the transport unit TE, it is necessary for a levitation force FS (generated by the electromagnetic interaction between the drive coil AS1 and the drive magnet 4 of the first magnet group MGa, and the electromagnetic interaction between the drive coil AS2 and the drive magnet 4 of the second magnet group MGb) to compensate for the gravity FG of the transport unit TE and the possible constant process force FP (in the direction of gravity). Depending on the installation of the transport section 2 of the transport device 1, the levitation force FS may not necessarily act in the normal direction of the transport plane 3 of the transport section 2, such as in... Figures 5a to 5e As shown in the diagram.

[0055] In the case of horizontal installation ( Figure 5a The levitation force FS acts orthogonally to the transport plane 3 of the transport section 2 (i.e., vertically in the Z-axis direction), in the case of vertical installation ( Figures 5c to 5e The levitation force FS acts essentially parallel to the transport plane 3 of transport section 2. Figure 5a In the case where the transport section 2 is inclined at an angle of α=90° only about the Y-axis in the horizontal plane, the levitation force FS is, for example, as in Figure 5c As can be seen, it only operates in the X-axis direction and thus simultaneously in the first primary motion direction H1. In installation cases between horizontal and vertical (… Figure 5b Based on the tilt angle α of transport section 2, the corresponding components of the levitation force FS in the X direction (FSx) and Z direction (FSz) are obtained. This also applies similarly to... Figure 5a The transport section 2 is tilted at an angle β only about the X-axis (not shown) in the horizontal plane, in the YZ plane. For example, in the case of an angle β = 90°, the levitation force FS may act in a similar manner only in the direction of the Y-axis and thus in the second main motion direction H2.

[0056] exist Figure 5d The transport section 2 is shown in a top view of the transport plane 3. The transport plane 3 of this transport section 2 is inclined about the Y-axis in the horizontal plane at an angle of α = 90° (within...). Figure 5c (Similar to the case in the middle). Additionally, the transport section 2 rotates about a vertical axis orthogonal to the transport plane 3, here the Z-axis, with a rotation angle γ, which is measured between the bottom edge of the rectangular, especially square, transport plane 3 and the horizontal plane. Thus, the levitation force FS is divided into a force component FSx in the X direction (which here also corresponds to the first main motion direction H1) and a force component FSY in the Y direction (which here also corresponds to the second main motion direction H2). Of course, this also applies similarly to the case where the transport section 2 is tilted about the X-axis (not shown) with an inclination angle β and additionally rotates about the Z-axis with a rotation angle γ.

[0057] According to Figure 5e In the example, transportation section 2 and Figure 5d The orientation is similar in the middle. However, additionally, the transport unit TE rotates relative to the transport section 2 about a vertical axis (Z-axis) orthogonal to the transport plane 3 at a relative angle φ. This changes the magnetic characteristics of the magnetic field of the driving magnet 4 that interacts with the drive coils AS1 and AS2 of the two coil groups SG1 and SG2. Although the allocation of the two main motion directions H1 and H2 (the first main motion direction H1 with higher efficiency µH1>µH2 is in the X direction; the second main motion direction H2 with lower efficiency µH2<µH1 is in the Y direction) remains unchanged in the example, the two efficiencies µH1 and µH2 are compared to those based on the non-optimal orientation between the driving magnet 4 and the drive coils AS1 and AS2. Figure 5d The arrangement is reduced. However, depending on the coil characteristics of the influencing magnetic fields of the drive coils AS1 and AS2 and the magnet characteristics of the influencing magnetic field of the drive magnet 4, the rotation of the transport unit TE around the relative angle φ may, where possible, cause the main motion directions H1 and H2 to be reversed, i.e., for example, H2 in the X direction and H1 in the Y direction, where µH1 > µH2).

[0058] Typically, when transport section 2 is positioned off-level, at an angle α about the Y-axis and / or an angle β about the X-axis and / or a rotation angle γ about the Z-axis, the corresponding components of the levitation force FS are obtained according to angles α, β, and γ: FSH1 in the first main motion direction H1 (i.e., FSx in the X-direction), FSH2 in the second main motion direction H2 (i.e., FSy in the y-direction), and FSz in the Z-direction. Thus, the levitation force FS compensates for the gravity FG caused by the mass of the transport unit TE and the force component of the possible process force FP in the gravity direction, such as in… Figure 5a As shown, the process forces generated by the transported object O and / or the process forces act on the transport unit TE based on the work performed in the process handling station (not shown) of the transport device 1. Thus, the position of the transport unit TE relative to the transport section 2 can be kept constant during operation by means of the levitation force FS. As mentioned at the beginning, specific movements of the transport unit TE in the height direction (i.e., in the Z direction here) can also be achieved, which can be realized by corresponding control drive coils AS1 and AS2.

[0059] The levitation force FS is orthogonal to the transport plane 3, specifically in the Z direction, as shown in the figure below. Figure 5bGenerally, the levitation force FS can be applied not only by the drive coil AS1 of the first coil group SG1, but also by the drive coil AS2 of the second coil group SG2. The force component FSH1 of the levitation force FS in the first main motion direction H1 (i.e., FSx in the X direction) is inclined at an angle α about the Y-axis in the transport section 2 (e.g., according to...). Figure 5b In the case of tilting the transport section 2 about the X-axis (not shown) at an angle β, the force component FSH2 of the levitation force FS in the second main motion direction H2 (here, FSy in the Y direction) is generally applied only by the drive coil AS2 of the second coil group SG2. In the case of tilting the transport section 2 about the X and Y axes at angles α and β, the levitation force FS is distributed to the drive coils AS1 and AS2 as force components FSH1 and FSH2 (here, FSx and FSy) corresponding to angles α and β. This also applies to tilting about the X and / or Y axes and to the case where the transport section 2 rotates an additional angle γ about the vertical axis, here the Z-axis.

[0060] In order to achieve the most efficient operation possible in a transport section 2 with an asymmetrical design, having a first main motion direction H1 with an efficiency of µH1 and a second main motion direction H2 with a lower efficiency of µH2 < µH1 (and / or having a higher maximum force in the first main motion direction H1 than in the second main motion direction H1), according to the present invention, the force component of the load force acting on the transport unit TE during the operation of the transport device 1 in the first main motion direction H1 is greater than the force component of the load force FB in the second main motion direction H2. Here, the load force includes at least the transport unit gravity FG of the transport unit TE.

[0061] However, the load force FB can also additionally include the process force FP, which in turn can include the weight of the object O transported by the transport unit TE and / or the working process force acting on the transport unit TE at least temporarily during the working process. For example, at least one (not shown) process processing station may be provided in the transport device 1 to perform the working process on the transport unit TE or on the object O transported by the transport unit TE, wherein, during the execution of the working process, the working process force can act on the transport unit TE at least temporarily as part of the process force FP. Of course, the working process force can act on the transport unit TE in any direction in space, while the object's weight acts only in the direction of gravity. Therefore, it may be advantageous for the transport section 2 to be arranged relative to the process processing station such that the load force is mainly in the first main direction of motion H1. Typically, the load force is equal to the vector sum of the process force FP and the weight FG of the transport unit TE, wherein the process force FP includes the working process force and / or the object's weight.

[0062] Preferably, when the transport section 2 is in a non-horizontal position, the inclination angle of the transport section is determined such that the force component of the load force FB in the first main direction of motion H1 is at least 5% larger than the force component of the load force FB in the second main direction of motion H2, preferably at least 10%, and particularly preferably at least 20%. For example, the inclination angle of the transport section 2 can be determined such that the first main direction of motion H1 forms an angle of 90° ± 45° with respect to the horizontal plane, for example in... Figure 5c As shown in the figure, in this drawing, the transport section 2 is inclined about the Y-axis in the horizontal plane at an angle of α = 90°. Here, the vector sum of the load force, the gravity FG of the transport unit TE, and the process force FP, which are equal to the load force, acts vertically and thus 100% in the first main direction of motion H1.

[0063] Control unit 5 of the transport device (see) Figure 1a Preferably, the drive coil AS1 of the first magnet group SG1 interacts with the drive magnet 4 of the transport unit TE to generate an electromagnetic force component in the first main motion direction H1 that reacts to the load force; and the drive coil AS2 of the second coil group SG2 interacts with the drive magnet 4 of the transport unit TE to generate an electromagnetic force component in the second main motion direction H2 that reacts to the load force.

[0064] According to Figures 5a to 5eIn the example, the load force (composed of the gravity FG and process force FP of the transport unit TE) acts only in the direction of gravity, for example. Therefore, the transport section 2 is preferably positioned off-center from the horizontal position such that the force component FSH1 of the electromagnetically generated levitation force FS in the first main motion direction H1 (i.e., Figures 5b to 5e The force component FSx in the X direction is greater than the force component FSH2 in the second principal motion direction H2 (i.e., the levitation force FS). Figure 5d and Figure 5e The force component FSy in the Y direction; Figure 5b and Figure 5c There is no force component FSH2 in the second main motion direction H2, or FSy in the Y direction, because the transport section 2 is only inclined about the Y axis. Therefore, based on the advantageous orientation of the transport section 2, the levitation force FS generated by the drive coil AS1 in the first main motion direction H1 is greater than the levitation force generated by the drive coil AS2 in the second main motion direction H2. Thus, the transport device 1 with the transport section 2 in an inclined (non-horizontal) installation condition can achieve particularly efficient operation.

[0065] In the example shown, the process force FP, besides the object's weight O, does not include any working process force acting on the transport unit TE from the outside. This means that the tilt angle α about the Y-axis and / or the tilt angle β about the X-axis and / or the rotation angle γ about the Z-axis are determined such that the direction of gravity (here, the Z-direction) is as consistent as possible with the first main direction of motion H1 of the transport section 2. Advantageously, the tilt angles (angles α, β, γ) of the transport section 2 are determined such that the force component FSH1 of the levitation force FS in the first main direction of motion H1 is at least 5%, preferably at least 10%, and particularly preferably at least 20% larger than the force component FSH2 of the levitation force FS in the second main direction of motion H1. Thus, the larger the force component FSH1 of the levitation force FS in the first main direction of motion H1 is compared to the force component FSH2 of the levitation force FS in the second main direction of motion H2, the more efficient the transport device 1 can be, at least to a certain extent. If the levitation force FS is entirely in the first main direction of motion H1, then this corresponds, for example, according to Figure 5c The arrangement is such that the transport section 2 is tilted only about the Y-axis at an angle of α = 90°. However, the ohmic losses of the drive coils AS1 and AS2 must also be considered here, as these losses occur during the operation of the transport device 1 and are proportional to the square of the coil current. For example, if all or almost all of the levitation force FS is applied by the drive coil AS1 in the first main motion direction H1 (e.g., according to...) Figure 5cIn the arrangement of the drive coil AS1, the coil current is relatively higher than that of the drive coil AS2 in the second main motion direction H2. This means that although the load force FB acts almost entirely in the first main motion direction H1, it cannot or can only slightly improve the efficiency of the transport device 1 because the ohmic loss ratio in the drive coil AS1 increases too much. Therefore, for the most efficient operation of the transport device, it may be advantageous, in the sense of the present invention, to determine the tilt angle of the transport section 2 in a way that favors the first main motion direction H1, but only to a certain extent. Thus, the determination of the advantageous tilt angle of the transport section 2 is also related to the specific structural configuration of the drive coils AS1 and AS2. Therefore, the determination of the specific tilt angle is to be made by those skilled in the art based on the application.

[0066] exist Figure 6 The top view of transport plane 3 shows another advantageous embodiment of transport device 1. This transport device basically corresponds to... Figures 1a to 1c The implementation scheme described herein will be discussed here only for its key differences. The stator of the transport device 1 here has multiple, particularly four, transport sections 2 of the same type, which together form a transport plane 3 in which at least one transport unit TE can move. However, unlike the implementation scheme described herein... Figure 1a In one embodiment, the transport segments 2 are not constructed as rectangles, but rather each has a rhomboid shape. Similarly, the at least one transport unit TE is constructed such that the surface of the transport unit TE projected onto the transport plane 3 is rhomboid. However, the transport unit may also be constructed as a rectangle, as has been done according to… Figures 3a to 4d As described. The first main motion direction H1 is, for example, orthogonal to the first edge K1 of the rhombic transport plane 3, and the second main motion direction H2 is orthogonal to the second edge K2 of the rhombic transport plane 3 adjacent to the first edge K1. Each transport segment 2 is constructed such that the first edge K1 and the second edge K2 are arranged at a rhombic angle ω < 90° to form a rhombic shape. The opposing sides extend parallel to each other, as in... Figure 6 As shown in the diagram.

[0067] As already detailed, the directions of the two main motion directions H1 and H2 are derived from the arrangement of the drive coils AS1 and AS2 of the coil groups SG1 and SG2. (This is in accordance with...) Figure 1aSimilarly, in the example, the drive coils AS1 and AS2 of the first coil group and the second coil group SG1, SG2 are configured in this example as elongated coils having longitudinal extensions LAS1, LAS2 and transverse extensions QAS1, QAS2 that are orthogonal to the longitudinal extensions and smaller than the longitudinal extensions. Here, in order to achieve different coil characteristics affecting the magnetic field, the drive coil AS1 of the first coil group SG1 is, for example, closer to the transport plane 3 in the normal direction (in this case, in the Z direction) than the drive coil AS2 of the second coil group SG2. As a result, the first main motion direction H1 extends perpendicular to the longitudinal extension LAS1 of the first drive coil AS1, which is orthogonal to the first edge K1 of the transport section 2. The second main motion direction H2 extends perpendicular to the longitudinal extension LAS2 of the second drive coil AS2, which is orthogonal to the second edge K2 of the transport section 2. Therefore, the second main motion direction H2 extends at a rhomboid angle ω relative to the first main motion direction H1 in this example. The rhomboid shape is advantageously suited for situations where the desired angle between the main directions of motion H1 and H2 is less than 90°. In the case where the transport section 2 has a rectangular shape (e.g., according to...), Figure 1a While this may also be feasible, at least one of the drive coils AS1, AS2 in the main motion directions H1, H2 may have to be arranged such that their longitudinal extensions no longer extend parallel to the edge of the rectangular transport plane 3, which may be more complex in terms of construction.

[0068] On the transport unit TE, a first magnet group MGa and a second magnet group MGb, each having multiple driving magnets 4 with different magnetic orientations, are arranged. Here, the arrangement of the driving magnets 4 can be as follows: Figure 6 As shown in the figure, it is implemented in a 1D arrangement with multiple elongated driving magnets 4 (see also [reference]). Figures 3a to 3f However, a 2D arrangement of the drive magnets 4 with a checkerboard pattern is certainly also possible (see, for example, [link to relevant documentation]). Figures 4a to 4d The 1D and 2D arrangements have been described in detail and will not be repeated here. Here, the first magnet group MGa is based on... Figure 6 In the example, the arrangement is preferably such that the longitudinal direction of the driving magnet 4 of the first magnet group MGa extends as orthogonally as possible to the first main motion direction H1. Similarly, the second magnet group MGb is preferably arranged such that the longitudinal direction of the driving magnet 4 of the second magnet group MGb extends as orthogonally as possible to the second main motion direction H2. Of course, deviations may occur from the movement of the transport unit TE, especially due to the rotation of the transport unit TE around the vertical axis (i.e., the Z-axis in this case), which may, for example, lead to a decrease in the efficiency μH1, μH2 of the two main motion directions H1, H2, as already determined according to... Figure 5eAs described. However, if magnet groups MGa and MGb have the same magnetic properties that affect the magnetic field, this will not change the allocation of the two main motion directions H1 and H2.

[0069] The arrangement of transport section 2 according to the invention, as detailed above, is also applicable to the arrangement according to the present invention. Figure 6 The embodiment is therefore not described in detail here. Thus, the stator, consisting of four transport sections 2, is preferably positioned off-level such that the load force FB acting on the transport unit TE during operation of the transport device 1 has a greater force component in the first main direction of motion H1 than the force component in the second direction of motion. If the load force FB comprises, for example, only the weight FG of the transport unit TE and, optionally, the weight of the transported object O, then... Figure 6 For example, the transport section 2 may be configured such that the first main direction of motion H1 forms an angle of 90° ± 45° with the horizontal plane. If the load force also includes the working process force, then other advantageous arrangements of the transport section 2 can of course be derived based on the magnitude and direction of the working process force.

Claims

1. A transport device (1) in the form of a planar motor, the transport device having at least one transport section (2) constituting a transport plane (3) and having at least one transport unit (TE) capable of moving in at least two dimensions along two main motion directions in the transport plane (3), wherein a first coil group (SG1) having a plurality of first drive coils (AS1) and defining a first main motion direction (H1) and a second coil group (SG2) having a plurality of second drive coils (AS2) and defining a second main motion direction (H2) are provided on the transport section (2), and the transport unit (TE) is provided with A drive magnet (4) is provided, and the first drive coil (AS1) of the first coil group (SG1) can be controlled by the control unit (5) to electromagnetically interact with at least a portion of the drive magnet (4) of the transport unit (TE) to move the transport unit (TE) in the first main motion direction (H1), and the second drive coil (AS2) of the second coil group (SG2) can be controlled by the control unit (5) to electromagnetically interact with at least a portion of the drive magnet (4) of the transport unit (TE) to move the transport unit (TE) in the second main motion direction (H2), wherein, The transport unit (TE) is capable of moving with different efficiencies and / or different maximum forces and / or different precisions in the two main motion directions, in such a way that the drive coils of the first coil group and the second coil group have different coil characteristics affecting the magnetic field and / or the drive magnet (4) of the transport unit (TE) interacting with the first drive coil (AS1) of the first coil group (SG1) has different magnetic characteristics affecting the magnetic field compared with the drive magnet (4) interacting with the second drive coil (AS2) of the second coil group (SG2), characterized in that at least one transport section (2) is arranged at a position deviating from the horizontal position, such that the force component of the load force (FB) acting on the transport unit (TE) in the first main motion direction (H1) is greater than the force component of the load force (FB) in the second main motion direction (H2), wherein the load force (FB) at least includes the gravity of the transport unit (TE).

2. The transport device (1) according to claim 1, characterized in that, The angle of inclination of the transport section (2) is determined such that the force component of the load force (FB) in the first main motion direction (H1) is at least 5% larger than the force component of the load force (FB) in the second main motion direction (H2).

3. The transport device (1) according to claim 1, characterized in that, The tilt angle of the transport section (2) is determined such that the force component of the load force (FB) in the first main motion direction (H1) is at least 10% larger than the force component of the load force (FB) in the second main motion direction (H2).

4. The transport device (1) according to claim 1, characterized in that, The tilt angle of the transport section (2) is determined such that the force component of the load force (FB) in the first main motion direction (H1) is at least 20% larger than the force component of the load force (FB) in the second main motion direction (H2).

5. The transport device (1) according to claim 1, characterized in that, The load force (FB) includes process force (FP) acting at least temporarily on the transport unit (TE), wherein the process force (FP) includes the gravity of the object (O) transported by means of the transport unit (TE) and / or the working process force acting on the transport unit (TE) at least temporarily during the working process.

6. The transport device (1) according to claim 5, characterized in that, At least one process processing station (PSi) is provided for performing a work process on the transport unit (TE) or on an object (O) transported by means of the transport unit (TE), wherein, during the performance of the work process, a work process force as part of a process force (FP) is applied to the transport unit (TE) at least temporarily.

7. The transport device (1) according to any one of claims 1 to 6, characterized in that, The at least one transport section (2) is constructed in a rhombus shape to form a rhombus-shaped transport plane (3), and / or the projection surface of the at least one transport unit (TE) onto the transport plane (3) is constructed in a rhombus shape.

8. The transport device (1) according to claim 7, characterized in that, The first main motion direction (H1) is orthogonal to the first edge (K1) of the rhombus-shaped transport plane (3), and the second main motion direction (H2) is orthogonal to the second edge (K2) of the rhombus-shaped transport plane (3) adjacent to the first edge (K1).

9. The transport device (1) according to any one of claims 1 to 6, characterized in that, The average coil spacing (S1) between the driving coil of the coil group and the driving magnet (4) of the transport unit (TE) in the normal direction and / or the conductor resistance of the driving coil of the coil group and / or the maximum coil current of the driving coil of the coil group and / or the number of turns of the driving coil of the coil group and / or the coil geometry of the driving coil are set to the coil characteristics that affect the magnetic field; and / or the residual magnetic flux density of the driving magnet (4) and / or the relative orientation between the driving magnet (4) and the driving coil of the coil group and / or the pole pitch (Ta, Tb) of the driving magnet (4) and / or the magnetic geometry of the driving magnet (4) are set to the magnetic characteristics that affect the magnetic field of the driving magnet (4) of the transport unit (TE).

10. The transport device (1) according to any one of claims 1 to 6, characterized in that, The control unit (5) is configured to control the first drive coil (AS1) of the first coil group (SG1) to interact with the drive magnet (4) of the transport unit (TE) to generate an electromagnetic force component in the first main motion direction (H1), which reacts with the load force (FB) in the first main motion direction (H1), and the control unit is configured to control the second drive coil (AS2) of the second coil group (SG2) to interact with the drive magnet (4) of the transport unit (TE) to generate an electromagnetic force component in the second main motion direction (H2), which reacts with the load force (FB) in the second main motion direction (H2).

11. The transport device (1) according to any one of claims 1 to 6, characterized in that, The drive coils of the first coil group and the second coil group are respectively configured as elongated coils. The elongated coils have longitudinal extensions (LAS1, LAS2) and transverse extensions (QAS1, QAS2) orthogonal to the longitudinal extensions. The first main motion direction (H1) extends perpendicular to the longitudinal extension of the first drive coil (AS1) and the second main motion direction (H2) extends perpendicular to the longitudinal extension of the second drive coil (AS2).

12. A method for operating a transport device (1) in the form of a planar motor, the transport device having at least one transport section (2) constituting a transport plane (3) and at least one transport unit (TE) moving in at least two dimensions along two main motion directions in the transport plane (3), wherein a first coil group (SG1) having a plurality of first drive coils (AS1) and defining a first main motion direction (H1) is provided on the transport section (2), and a second coil group (SG2) having a plurality of second drive coils (AS2) and defining a second main motion direction (H2) is provided, and a drive magnet (4) is provided on the transport unit (TE), wherein, The first drive coil (AS1) of the first coil group (SG1) interacts electromagnetically with at least a portion of the drive magnet (4) of the transport unit (TE) to move the transport unit (TE) in the first main motion direction (H1), and the second drive coil (AS2) of the second coil group (SG2) interacts electromagnetically with at least a portion of the drive magnet (4) of the transport unit (TE) to move the transport unit (TE) in the second main motion direction (H2), wherein the transport unit (TE) moves in the two main motion directions with different efficiencies and / or different maximum forces and / or different precisions by providing different influencing magnetic fields for the drive coils of the first coil group and the second coil group. Coil characteristics; and / or the manner thereof: providing a different magnetic field characteristic for the driving magnet (4) of the transport unit (TE) interacting with the first driving coil (AS1) of the first coil group (SG1) relative to the driving magnet (4) interacting with the second driving coil (AS2) of the second coil group (SG2), characterized in that the at least one transport section (2) is positioned off-horizontally such that the force component of the load force (FB) acting on the transport unit (TE) in the first main motion direction (H1) is greater than the force component of the load force (FB) in the second main motion direction (H2), wherein the load force (FB) includes at least the gravity of the transport unit (TE).

13. The method according to claim 12, characterized in that, The angle of the transport section (2) is determined such that the force component of the load force in the first main motion direction (H1) is at least 5% larger than the force component of the load force (FB) in the second main motion direction (H2).

14. The method according to claim 12, characterized in that, The angle of inclination of the transport section (2) is determined such that the force component of the load force in the first main motion direction (H1) is at least 10% larger than the force component of the load force (FB) in the second main motion direction (H2).

15. The method according to claim 12, characterized in that, The angle of inclination of the transport section (2) is determined such that the force component of the load force in the first main motion direction (H1) is at least 20% larger than the force component of the load force (FB) in the second main motion direction (H2).

16. The method according to claim 12, characterized in that, The load force (FB) includes process force (FP) acting at least temporarily on the transport unit (TE), wherein the process force (FP) includes the gravity of the object (O) transported by means of the transport unit (TE) and / or the working process force acting on the transport unit (TE) at least temporarily during the working process.

17. The method according to claim 16, characterized in that, The transport unit (TE) is moved within the area of ​​the process processing station, where a work process is performed on the transport unit (TE) or on an object (O) transported by means of the transport unit (TE), wherein, during the execution of the work process, a work process force is applied to the transport unit (TE) at least temporarily.

18. The method according to any one of claims 12 to 17, characterized in that, The first drive coil (AS1) of the first coil group (SG1) interacts with the drive magnet (4) of the transport unit (TE) to generate an electromagnetic force component in the first main motion direction (H1), which reacts with the load force (FB) in the first main motion direction (H1). The second drive coil (AS2) of the second coil group (SG2) interacts with the drive magnet (4) of the transport unit (TE) to generate an electromagnetic force component in the second main motion direction (H2), which reacts with the load force (FB) in the second main motion direction (H2).

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