A Reconfigurable Electromagnetic Metasurface Structure Based on IPMC and Its Design Method

By designing a reconstructible electromagnetic metasurface structure based on IPMC, and regulating electromagnetic characteristics using the deformation of the array unit, the problems of poor flexibility and practicality of traditional mechanical metasurfaces are solved, and electromagnetic wave regulation is realized at low voltage, simplifying the control circuit.

CN114744410BActive Publication Date: 2025-07-18XI AN JIAOTONG UNIV
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Patent Information

Application Number
CN202210396990.X
Authority / Receiving Office
CN · China
Patent Type
Patents(China)
Current Assignee / Owner
Filing Date
2022-04-15
Publication Date
2025-07-18
Estimated Expiration
2042-04-15

AI Technical Summary

Technical Problem

The existing electromagnetic metasurface technology has problems such as poor flexibility and practicality and complex control lines, especially when using mechanical control methods.

Method used

The reconstructible electromagnetic metasurface structure is designed using IPMC material. By setting an array unit on the IPMC material and applying a driving voltage, bending deformation of 0 to 90° is achieved, and the electromagnetic characteristics are dynamically regulated in combination with the overall or regional driving circuit.

Benefits of technology

It realizes flexible regulation of electromagnetic waves under low driving voltage, simplifies control lines, improves deformation response capabilities, and broadens the scope of application.

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Abstract

The present invention discloses a reconfigurable electromagnetic metasurface structure based on IPMC and its design method, which determines the characteristic dimensions and deformation forms of the array units of the metasurface structure, as well as the configuration and drive control of the array units; conducts deformation-electromagnetic simulations on array units of different sizes, optimizes and determines the shape processing parameters of the array units; processes the array units on the surface of the IPMC structure to obtain an IPMC array; designs a clamping and electrode lead structure, fixes the IPMC array in the clamping structure, and applies drive voltages to the upper surface and the lower surface of the IPMC array respectively through the electrode lead structure; designs a single-channel or multi-channel drive circuit and adjustment method on the IPMC array according to the distribution of the control area and the deformation amount regulation requirements, and completes the reconfigurable electromagnetic metasurface structure based on IPMC. The present invention has simple preparation, convenient drive control, high flexibility and practicality.
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Description

Technical Field

[0001] The present invention belongs to the technical field of intelligent materials, and particularly relates to a reconfigurable electromagnetic metasurface structure based on IPMC and a design method thereof. Background Art

[0002] Reconfigurable metasurfaces can dynamically regulate various electromagnetic properties to achieve diversified electromagnetic functions, and have important application values in the fields of stealth, communication, optoelectronic devices, etc. So far, the reconfigurable technologies of electromagnetic metasurfaces mainly include electrical regulation, material regulation, mechanical regulation and other methods. The electrical regulation method introduces interference due to the addition of active devices, increasing the complexity of the design; the regulation ability of material regulation is relatively limited; the flexibility and practicability of mechanical regulation are poor, and the control circuit is generally complex, so there is less research. With the rapid development of flexible intelligent materials, it is expected to bring new vitality to this direction.

[0003] Flexible intelligent materials can produce significant deformations under external stimuli. Their excitation sources are simple, response speed is fast, mass is light, structure is compact and there is no noise. They are an important direction in the field of bionic materials and are developing very rapidly. Among them, ionic polymer-metal composites (IPMC) have received extensive attention due to their advantages such as low driving voltage, large deformation response, and long service life.

[0004] The research on IPMC mechanically reconfigurable electromagnetic metasurfaces is expected to solve the defects of traditional mechanical reconfigurable methods such as poor flexibility and practicability, and complex control circuits, and become a new type of regulation method. Summary of the Invention

[0005] The technical problem to be solved by the present invention is to provide a reconfigurable electromagnetic metasurface structure based on IPMC and a design method thereof for the deficiencies in the above-mentioned prior art. The reconfigurable electromagnetic metasurface can dynamically regulate electromagnetic properties such as the optical rotation angle, ellipticity angle or transmittance of incident electromagnetic waves, and has a low driving voltage, a simple control circuit, and a large deformation response, and can solve the defects of traditional reconfigurable methods.

[0006] The present invention adopts the following technical solutions:

[0007] A reconfigurable electromagnetic metasurface structure based on IPMC of the present invention, the reconfigurable electromagnetic metasurface structure is made of IPMC material, and sequentially includes an upper electrode, an intermediate layer and a lower electrode from top to bottom. Array units are arranged on the upper electrode. The thicknesses of the upper electrode and the lower electrode are both 10 - 20 μm, and the thickness of the intermediate layer is 20 - 500 μm.

[0008] Specifically, the arrangement mode of the array units includes rectangular array, circular array or other periodic and aperiodic array forms.

[0009] Specifically, the characteristic size of the array unit is 1 to 30 mm, and the structural form of the array unit is a cantilever beam structure, a planar spiral structure, a double spiral structure, or a parabolic structure.

[0010] Specifically, the intermediate layer is a dielectric thin film, and the dielectric constant of the dielectric thin film is 1.8 to 2.3, and the tangent of the loss angle is 0 to 0.015.

[0011] Specifically, based on the IPMC-based reconfigurable electromagnetic metasurface structure, under the action of a driving voltage of 0 to 5 V, it can undergo a bending deformation of 0 to 90°.

[0012] In a second aspect, an embodiment of the present invention provides

[0013] A design method for an IPMC-based reconfigurable electromagnetic metasurface structure, characterized by comprising the following steps:

[0014] S1. According to the operating frequency of the electromagnetic metasurface structure and the regulation requirements of electromagnetic characteristics, determine the characteristic size and deformation form of the array unit of the metasurface structure, as well as the configuration and drive control of the array unit;

[0015] S2. According to the characteristic size and deformation form of the array unit determined in step S1, as well as the configuration and drive control of the array unit; perform deformation-electromagnetic simulation on array units of different sizes, optimize and determine the shape processing parameters of the array unit;

[0016] S3. Process the array unit on the surface of the IPMC structure according to the shape processing parameters of the array unit determined in step S2 to obtain an IPMC array;

[0017] S4. According to the unit size, area, and overall control method of the IPMC array processed in step S3, design a clamping and electrode lead structure, fix the IPMC array in the clamping structure, and apply a driving voltage to the upper surface and the lower surface of the IPMC array respectively through the electrode lead structure;

[0018] S5. According to the distribution of the control area and the deformation amount regulation requirements, design a single-channel or multi-channel driving circuit and an adjustment method on the IPMC array assembled in step S4 to complete the IPMC-based reconfigurable electromagnetic metasurface structure.

[0019] Specifically, step S2 is specifically: calculate the deformation amount of the minimum unit of the array under different voltages through deformation simulation, jointly perform electromagnetic simulation on the unit structure under different deformation amounts, calculate the electromagnetic regulation ability of the metasurface before and after deformation, and optimize the regulation performance of the metasurface with the size parameters of the structural unit and the array size as variables to determine the shape processing parameters.

[0020] Specifically, in step S3, when processing a pattern structure with a minimum line pitch greater than 1 mm on the IPMC structure, a die stamping method is used; when processing a pattern structure with a line pitch less than 1 mm on the IPMC structure, a laser cutting method is used.

[0021] Furthermore, the laser used in the laser cutting method is a picosecond laser or a femtosecond laser. The average power of the laser is 1 - 5 W, the pulse energy is 0 - 1 mJ, the scanning speed is 30 - 60 mm / s, and the number of scans is greater than 20 times.

[0022] Specifically, in step S5, the driving circuit adopts overall driving or independent driving to control the overall deformation or regional deformation of the IPMC array.

[0023] Compared with the prior art, the present invention has at least the following beneficial effects:

[0024] The reconfigurable electromagnetic metasurface structure based on IPMC of the present invention includes an upper electrode, an intermediate layer, and a lower electrode from top to bottom. The thicknesses of the upper electrode and the lower electrode are both 10 - 20 μm to ensure a uniform conductive effect; the thickness of the intermediate layer is 20 - 500 μm, maintaining a certain flatness while ensuring the deformation performance, thereby improving the deformation consistency of the array units.

[0025] Furthermore, the arrangement pattern of the array units includes a rectangular array, a circular array, or other periodic and aperiodic array forms. By arranging the distribution of the array units, the control requirements for different regulation effects in different regions are met.

[0026] Furthermore, the characteristic size of the array unit is 1 - 30 mm, and the structural form is a cantilever beam structure, a planar spiral structure, a double - spiral structure, or a parabolic structure, so that the array unit generates different deformation forms and deformation amplitudes, thereby changing the type and regulation ability of the electromagnetic characteristics regulated by the metasurface.

[0027] Furthermore, the relative permittivity of the IPMC core - layer dielectric film in the electromagnetic simulation is selected to be 1.8 - 2.3, and the tangent of the loss angle is selected to be 0 - 0.015 to ensure the accuracy and reliability of the simulation results.

[0028] Furthermore, under the action of a driving voltage of 0 - 5 V, a bending deformation of 0 - 90° occurs, realizing a change in the transmission or reflection coefficient of the gigahertz - band electromagnetic wave. Thus, the electromagnetic parameters of the incident electromagnetic wave are adjusted without damaging the IPMC surface structure, and the regulation ability of the metasurface is reconfigured through the deformation of the array units.

[0029] A design method of a reconfigurable electromagnetic metasurface structure based on IPMC. Through designing the scheme of the metasurface configuration, simulating the theoretical results, cutting and processing the IPMC, assembling the device, and driving and controlling the array, a design process of a new type of mechanically reconfigurable metasurface is obtained, providing a design reference for the application of IPMC in the field of metasurfaces and putting forward a new direction for the development of reconfigurable metasurfaces.

[0030] Furthermore, the deformation amount of the minimum unit of the array under different voltages is obtained through deformation simulation calculation. The electromagnetic simulation of the unit structure under different deformation amounts is carried out in combination with electromagnetic simulation, and the electromagnetic regulation ability of the metasurface before and after deformation is calculated. By analyzing the regulation route of driving voltage - unit deformation - electromagnetic characteristics, taking the size parameters of the structural unit and the array size as variables, the regulation performance of the metasurface is optimized to determine the shape processing parameters, and a design scheme of the metasurface array unit is obtained, providing theoretical support for the experimental work.

[0031] Furthermore, the die stamping method is convenient to operate and has less damage to the cut seam morphology. However, there is a spacing limit for the die blade, which is suitable for processing IPMC pattern structures with a minimum line spacing greater than 1 mm, improving work efficiency; while the laser cutting method can cut IPMC with micro - pattern structures, and the cut seam has no burrs and no gaps, with high shape and size accuracy, which is suitable for processing IPMC pattern structures with a minimum line spacing less than 1 mm, ensuring the structural processing accuracy.

[0032] Furthermore, the laser used in the laser cutting method is a picosecond laser or a femtosecond laser. The average power of the laser is 1 - 5 W, the pulse energy is 0 - 1 mJ, the scanning speed is 30 - 60 mm / s, and the number of scans is greater than 20 times, reducing the ablation phenomenon and ensuring the cutting and processing accuracy of IPMC with different thickness sizes.

[0033] Furthermore, the driving circuit adopts integral driving or independent driving to control the overall deformation or regional deformation of the IPMC array, adjust the electromagnetic characteristics of different regions, and realize the application requirements of different scenarios.

[0034] In summary, the present invention solves a major problem that IPMC is restricted by the cutting process and cannot be designed and applied in precision devices, which has great significance for the application and development of IPMC, provides a design idea for the application of IPMC in the field of metasurfaces, and broadens the application scope of IPMC; and the designed reconfigurable electromagnetic metasurface is simple to prepare, convenient to drive and control, with high flexibility and practicality, overcomes the existing defects of traditional mechanical reconfigurable methods, and is expected to become a new regulation method, making a new breakthrough in the development of reconfigurable metasurfaces.

[0035] The technical solutions of the present invention will be further described in detail below through the drawings and embodiments. Description of the Drawings

[0036] Figure 1 is the design flow chart of the present invention;

[0037] Figure 2 is the structural form diagram of the metasurface array designed by the method of the present invention;

[0038] Figure 3 is the schematic diagram of the reconfigurable electromagnetic metasurface of the present invention, wherein, (a) is the unit configuration, and (b) is the array configuration;

[0039] Figure 4 is the design diagram of the clamping structure and the electrode lead structure;

[0040] Figure 5 is the clamping effect diagram of the reconfigurable electromagnetic metasurface of the present invention;

[0041] Figure 6 is the schematic diagram of a regional driving control form of the present invention;

[0042] Figure 7 is Figure 2 the electromagnetic test calculation result diagram of the metasurface of the structure shown;

[0043] Wherein: 1. upper electrode; 2. middle layer; 3. lower electrode; 4. first hinge; 5. second hinge; 6. conductive patch; 7. array unit. Specific embodiments

[0044] Next, the technical solutions in the embodiments of the present invention will be clearly and completely described in conjunction with the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are part of the embodiments of the present invention, rather than all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those of ordinary skill in the art without creative efforts shall fall within the protection scope of the present invention.

[0045] In the description of the present invention, it should be understood that the terms "include" and "comprise" indicate the presence of the described features, wholes, steps, operations, elements and / or components, but do not exclude the presence or addition of one or more other features, wholes, steps, operations, elements, components and / or their combinations.

[0046] It should also be understood that the terms used in the specification of the present invention are only for the purpose of describing specific embodiments and are not intended to limit the present invention. As used in the specification of the present invention and the appended claims, unless the context clearly indicates otherwise, the singular forms "a", "an" and "the" are intended to include the plural forms.

[0047] It should be further understood that the term "and / or" used in the specification and appended claims of the present invention refers to any combination and all possible combinations of one or more of the associated listed items, and includes these combinations. For example, A and / or B can represent three cases: A exists alone, A and B exist simultaneously, and B exists alone. Additionally, the character " / " in this text generally indicates an "or" relationship between the associated objects before and after.

[0048] It should be understood that although terms such as first, second, third, etc. may be used to describe preset ranges in the embodiments of the present invention, these preset ranges should not be limited to these terms. These terms are only used to distinguish the preset ranges from each other. For example, without departing from the scope of the embodiments of the present invention, the first preset range may also be referred to as the second preset range, and similarly, the second preset range may also be referred to as the first preset range.

[0049] Depending on the context, the word "if" as used herein may be interpreted as "when" or "while" or "in response to determining" or "in response to detecting". Similarly, depending on the context, the phrase "if determined" or "if detected (stated condition or event)" may be interpreted as "when determined" or "in response to determining" or "when detected (stated condition or event)" or "in response to detecting (stated condition or event)".

[0050] Various structural schematic diagrams according to the disclosed embodiments of the present invention are shown in the drawings. These figures are not drawn to scale, where for the purpose of clear expression, some details are enlarged and some details may be omitted. The shapes of various regions and layers shown in the figures, as well as their relative sizes and positional relationships, are merely exemplary and may deviate in practice due to manufacturing tolerances or technical limitations. And those skilled in the art can design regions / layers with different shapes, sizes, and relative positions according to actual needs.

[0051] The present invention provides a design method for a reconfigurable electromagnetic metasurface structure based on IPMC. According to the working frequency of the electromagnetic metasurface structure and the regulation requirements of electromagnetic characteristics, determine the characteristic dimensions and deformation forms of the array units on the electromagnetic metasurface structure, as well as the configuration scheme and drive control scheme of the array units; perform deformation-electromagnetic simulation on the array units of the metasurface structure with different sizes, optimize and determine the shape processing parameters of the array units of the metasurface structure; prepare IPMC materials, and process the electromagnetic metasurface array structure by precision cutting process methods such as die stamping and laser cutting; design and process the clamping and electrode lead structures of the metasurface structure according to the different unit sizes, regions, and overall control methods of the array structure; design single-channel or multi-channel drive circuits and adjustment methods according to the distribution of the control regions and the deformation amount regulation requirements, and perform deformation and electromagnetic function tests.

[0052] Please refer to Figure 1 , a design method for a reconfigurable electromagnetic metasurface structure based on IPMC of the present invention includes the following steps:

[0053] S1. Design the configuration scheme

[0054] According to the operating frequency of the electromagnetic metasurface structure and the regulation requirements of electromagnetic characteristics, determine the characteristic dimensions and deformation forms of the array units of the metasurface structure, as well as the configuration scheme and drive control scheme of the array units.

[0055] The characteristic dimensions of the array units are 1 - 30 mm, the arrangement methods include rectangular arrays, circular arrays or other periodic and aperiodic array forms, and the structural forms of the array units are cantilever beam structures, planar spiral structures, double spiral structures or parabolic structures.

[0056] S2. Parameter simulation and optimization

[0057] According to the characteristic dimensions and deformation forms of the array units of the metasurface structure determined in step S1, as well as the configuration scheme and drive control scheme of the array units; conduct deformation - electromagnetic simulation on array units of different sizes, and optimize and determine the shape processing parameters of the array units.

[0058] Calculate the deformation amount of the minimum array unit under different voltages through deformation simulation, jointly conduct electromagnetic simulation on the unit structures under different deformation amounts, calculate the electromagnetic regulation ability of the metasurface before and after deformation, and optimize the regulation performance of the metasurface with the size parameters of the structural unit and the array size as variables to determine the shape processing parameters.

[0059] S3. Structure processing

[0060] Prepare IPMC materials with a certain film thickness according to the shape processing parameters of the array units determined in step S2, and use precision cutting process methods such as die stamping and laser cutting to process the electromagnetic metasurface array structure.

[0061] The IPMC array presents in a sandwich structure in electromagnetic simulation, including an upper electrode, a middle layer and a lower electrode from top to bottom in sequence. The thicknesses of the upper electrode and the lower electrode are both 10 - 20 μm, and the materials selected for the upper electrode and the lower electrode are metals such as gold, silver and palladium; the middle dielectric film is an ion polymer with a thickness of 20 - 200 μm, a dielectric constant of 1.8 - 2.3, and a loss tangent of 0 - 0.015.

[0062] The laser cutting IPMC process provided by the present invention can process micro-pattern structures on the surface of IPMC, with small cutting seams, no burrs, no notches, high shape and size accuracy, and has little impact on the deformation performance of IPMC, solving a major problem that IPMC is restricted by the cutting process and cannot be designed and applied in precision devices, which is of great significance to the application and development of IPMC.

[0063] The die stamping method is only applicable to pattern structures with a minimum line spacing greater than 1 mm; the laser cutting method can process pattern structures with a line spacing less than 1 mm. The selected laser is a picosecond or femtosecond laser, with an average laser power of 1 - 5 W, a pulse energy of 0 - 1 mJ, a repetition frequency of 100 kHz, a scanning speed of 30 - 60 mm / s, and the number of scanning times is more than 20 times.

[0064] S4. Device assembly

[0065] According to the different control methods of the unit size, area, and overall of the electromagnetic metasurface array structure processed in step S3, design and process the clamping and electrode lead structures of the metasurface structure.

[0066] S5. Driving control

[0067] According to the distribution of the control area and the requirements of deformation amount regulation, design a single-channel or multi-channel driving circuit and adjustment method on the device assembled in step S4, and conduct deformation and electromagnetic function tests.

[0068] The electrical driving control method of the driving circuit is overall driving or independent driving, controlling the overall deformation or regional deformation of the IPMC array.

[0069] Please refer to Figure 2 , a reconfigurable electromagnetic metasurface structure based on IPMC, including a number of array units 7. The number of array units 7 is arranged in a rectangular array form on the IPMC structure. Under the action of a driving voltage of 0 - 5 V, the array units undergo a bending deformation of 0 - 90°, realizing a change in the transmission or reflection coefficient of electromagnetic waves in the gigahertz frequency band, thereby regulating the optical rotation angle and ellipticity angle or other electromagnetic characteristics of the incident electromagnetic wave within the range of 0 - 90°.

[0070] Among them, the IPMC structure is a sandwich structure, including an upper electrode 1, a middle layer 2, and a lower electrode 3 from top to bottom in sequence. The upper electrode 1 and the lower electrode 3 are prepared from common materials such as metal materials like gold, silver, palladium, etc., and are used to externally connect an excitation source to apply an electric field to the middle layer; the middle layer 2 is a dielectric film, usually an ion polymer.

[0071] Please refer to Figure 3, the structural forms of the array unit 7 of the IPMC mechanical reconfigurable electromagnetic metasurface are cantilever beam structure, planar spiral structure, double spiral structure, parabolic structure, etc.; the configuration schemes of the array unit 7 are rectangular matrix, circular array or other periodic and aperiodic array forms.

[0072] Please refer to Figure 4 and Figure 5 , the clamping structure includes but is not limited to a hollow hinge structure and a paddle pressing structure. The hollow hinge structure includes a first hinge 4 and a second hinge 5. The electrode leads adopt conductive patches 6 or special-shaped PCBs; the IPMC array is clamped between the first hinge 4 and the second hinge 5, and a driving voltage is applied through the conductive patch 6 for electromagnetic test analysis.

[0073] Please refer to Figure 6 , a single-channel or multi-channel driving circuit and adjustment method can be designed according to the distribution of the control area and the deformation amount regulation requirements to control the overall deformation or regional deformation of the IPMC array unit.

[0074] Please refer to Figure 7 , the reconfigurable electromagnetic metasurface structure based on IPMC designed by the present invention can dynamically regulate the polarization rotation angle and ellipticity angle of incident electromagnetic waves in the frequency band of 18 - 26.5 GHz.

[0075] The metasurface designed by the method of the present invention can dynamically regulate electromagnetic characteristics such as the optical rotation angle, ellipticity angle or transmittance of incident electromagnetic waves, and has a low driving voltage, a simple control circuit, and a large deformation response, and is expected to solve the defects of traditional reconfigurable methods.

[0076] To make the objectives, technical solutions and advantages of the embodiments of the present invention clearer, the technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are some, but not all, of the embodiments of the present invention. Usually, the components described and shown in the accompanying drawings here can be arranged and designed in various different configurations. Therefore, the following detailed description of the embodiments of the present invention provided in the drawings is not intended to limit the scope of the claimed present invention, but merely represents the selected embodiments of the present invention. All other embodiments obtained by those of ordinary skill in the art based on the embodiments of the present invention without creative efforts shall fall within the protection scope of the present invention.

[0077] Embodiment

[0078] This embodiment describes a design method of an IPMC mechanical reconfigurable electromagnetic metasurface for dynamically regulating the polarization characteristics of electromagnetic waves.

[0079] According to the requirement that the electromagnetic metasurface operates in the frequency band near 20 GHz and the regulation of polarization characteristics, the cantilever beam unit structure is selected, and the planar rectangular periodic array distribution method is adopted to overall control the deformation of each unit.

[0080] Please refer to Figure 2 , establish the three-dimensional model of the minimum array unit under different size parameters. Based on the equivalent thermal deformation model, simulate the unit deformation under different driving voltages in Ansys, and establish the unit model under different deformation conditions in HFSS, simulate and calculate the change of the regulation ability, and optimize and determine the size parameters of the periodic unit.

[0081] Please refer to Figure 4 , design the shown hollow hinge structure, paste the conductive patch around the middle square hole for leading out the electrode, clamp the IPMC array processed by the etching die stamping method between the two hinges, and the clamping effect is as Figure 5 shown.

[0082] Through the signal generator, cooperate with the power amplifier module to apply a step signal to the whole IPMC array, so that each unit of the IPMC array undergoes consistent deformation, and conduct electromagnetic tests on the IPMC array before and after deformation respectively.

[0083] Please refer to Figure 7 , the IPMC mechanically reconfigurable electromagnetic metasurface has the regulation ability for the polarization characteristics of the incident electromagnetic wave in the frequency band of 18 - 26.5 GHz, and this regulation ability changes before and after deformation.

[0084] In summary, the present invention relates to a reconfigurable electromagnetic metasurface structure based on IPMC and its design method, which is simple to prepare, convenient for driving control, high in flexibility and practicability, overcomes the existing defects of the traditional mechanical reconfigurable method, and is expected to become a new regulation method, making a new breakthrough in the development of reconfigurable metasurfaces.

[0085] The above content is only to illustrate the technical idea of the present invention, and the protection scope of the present invention cannot be limited thereby. Any modification made on the basis of the technical solution according to the technical idea proposed by the present invention falls within the protection scope of the claims of the present invention.

Claims

1. A reconfigurable electromagnetic metasurface structure based on IPMC, characterized in that, The reconfigurable electromagnetic metasurface structure is an IPMC material, which sequentially includes an upper electrode (1), a middle layer (2), and a lower electrode (3) from top to bottom. An array unit is arranged on the upper electrode (1). The characteristic size of the array unit is 1 - 30 mm, and the structural form of the array unit is a cantilever beam structure, a planar spiral structure, a double spiral structure, or a parabolic structure. The middle layer (2) is a dielectric film, the dielectric constant of the dielectric film is 1.8 - 2.3, and the loss tangent is 0 - 0.

015. The thicknesses of both the upper electrode (1) and the lower electrode (3) are 10 - 20 μm, and the thickness of the middle layer (2) is 20 - 500 μm. Under the action of a driving voltage of 0 - 5V, the reconfigurable electromagnetic metasurface structure based on IPMC can undergo a bending deformation of 0 - 90°.

2. The reconfigurable electromagnetic metasurface structure based on IPMC according to claim 1, wherein The arrangement mode of the array units includes a rectangular array, a circular array, or other periodic and aperiodic array forms.

3. A design method of a reconfigurable electromagnetic metasurface structure based on IPMC according to claim 1, characterized in that, It includes the following steps: S1. According to the working frequency of the electromagnetic metasurface structure and the regulation requirements of electromagnetic characteristics, determine the characteristic size and deformation form of the array units of the metasurface structure, as well as the configuration and drive control of the array units; S2. According to the characteristic size and deformation form of the array units determined in step S1, as well as the configuration and drive control of the array units, conduct deformation - electromagnetic simulation on array units of different sizes, and optimize and determine the shape processing parameters of the array units; S3. Process the array units on the surface of the IPMC structure according to the shape processing parameters of the array units determined in step S2 to obtain an IPMC array; S4. According to the unit size, area, and overall control mode of the IPMC array processed in step S3, design a clamping and electrode lead structure, fix the IPMC array in the clamping structure, and apply a driving voltage to the upper surface and the lower surface of the IPMC array respectively through the electrode lead structure; S5. According to the distribution of the control area and the regulation requirements of the deformation amount, design a single - path or multi - path driving circuit and an adjustment method on the IPMC array assembled in step S4 to complete the reconfigurable electromagnetic metasurface structure based on IPMC.

4. The method for designing a reconfigurable electromagnetic metasurface structure based on IPMC according to claim 3, characterized in that, Step S2 specifically is: Calculate the deformation amount of the minimum unit of the array under different voltages through deformation simulation, jointly conduct electromagnetic simulation on the unit structure under different deformation amounts through electromagnetic simulation, calculate the electromagnetic regulation ability of the metasurface before and after deformation, and optimize the regulation performance of the metasurface with the size parameters of the structural unit and the array size as variables to determine the shape processing parameters.

5. The design method of the reconfigurable electromagnetic metasurface structure based on IPMC according to claim 3, characterized in that In step S3, when processing a pattern structure with a minimum line spacing greater than 1 mm on the IPMC structure, use the knife die stamping method; when processing a pattern structure with a line spacing less than 1 mm on the IPMC structure, use the laser cutting method.

6. The design method of the reconfigurable electromagnetic metasurface structure based on IPMC according to claim 5, characterized in that, The laser used in the laser cutting method is a picosecond laser or a femtosecond laser. The average power of the laser is 1 - 5W, the pulse energy is 0 - 1mJ, the scanning speed is 30 - 60 mm / s, and the number of scanning times is greater than 20 times.

7. The design method of the reconfigurable electromagnetic metasurface structure based on IPMC according to claim 3, wherein, In step S5, the driving circuit adopts overall driving or independent driving to control the overall deformation or regional deformation of the IPMC array.

Citation Information

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