Displacement device, lens assembly and testing equipment

Abstract

The present application discloses a displacement device, a lens assembly and a detection device. The displacement device pushes the inner frame frame through the first push rod, and can drive the inner frame frame to move along the extension direction of the inner side wall of the first guide frame, so that the movement direction of the inner frame frame is limited by the first guide frame, and during the movement of the inner frame frame, the first flexible component and the second flexible component are elastically deformed, and the inner frame frame is stretched or pushed by the elastic force of the first flexible component and the second flexible component, so as to ensure that the inner frame frame does not deviate during the movement, thereby improving the movement accuracy of the displacement device.

Description

Technical Field

[0001] The present invention relates to the field of semiconductor technology, and in particular to a displacement device, a lens assembly and a detection device. Background Art

[0002] The existing translation stage usually adjusts the displacement of other parts above the translation stage by means of the translation stage. The translation stage usually includes a slide rail and a mating part. The mating part and the slide rail slide relative to each other to drive the translation stage to move. However, there is a gap between the mating part and the slide rail, which makes it impossible for the translation stage to move accurately and may cause the movement direction of the parts to deviate. Summary of the invention

[0003] In view of at least some of the problems in the prior art, embodiments of the present invention disclose a displacement device, a lens assembly and a detection device.

[0004] On the one hand, an embodiment of the present invention provides a displacement device, the displacement device comprising a first push rod, an outer frame, a first flexible component, a second flexible component, a first guide frame and an inner frame, the first flexible component, the second flexible component, the first guide frame and the inner frame are all accommodated in the outer frame;

[0005] Two ends of the first flexible component are respectively connected to the outer frame and the first guide frame;

[0006] Two ends of the second flexible component are respectively connected to the first guide frame and the inner frame;

[0007] The first guide frame is received in the outer frame, the first flexible assembly and the second flexible assembly are arranged between the first guide frames which are arranged opposite to each other; the inner frame is received in the first guide frame, and the first guide frame is used to limit the moving direction of the inner frame;

[0008] One end of the first push rod abuts against the inner frame, and a pushing direction of the first push rod is the same as an extending direction of the first guide frame.

[0009] Optionally, the first flexible component includes four first sub-flexible structures, two of the first sub-flexible structures are arranged on a side of the outer frame close to the first push rod, and the other two of the first sub-flexible structures are arranged on a side of the outer frame away from the first push rod. The four first sub-flexible structures are arranged opposite to each other in pairs along the pushing direction of the first push rod, and the outer frame is connected to the first guide frame through the first sub-flexible structures.

[0010] Optionally, the second flexible component includes four second sub-flexible structures, two of the second sub-flexible structures are arranged on the side of the first sub-flexible structure away from the first push rod, and the other two second sub-flexible structures are arranged on the side of the first sub-flexible structure close to the first push rod. The four second sub-flexible structures are arranged opposite to each other in pairs along the pushing direction of the first push rod.

[0011] Optionally, the first sub-flexible structure includes a first connecting portion and a first reinforcing portion, two ends of the first reinforcing portion are respectively connected to the first connecting portion, and a width of the first reinforcing portion is greater than a width of the first connecting portion; and

[0012] The second sub-flexible structure includes a second connecting portion and a second reinforcing portion, two ends of the second reinforcing portion are respectively connected to the second connecting portion, and a width of the second reinforcing portion is greater than a width of the second connecting portion.

[0013] Optionally, the displacement device further includes a first elastic device, wherein the first elastic device is disposed between the outer frame and the inner frame and on a side of the inner frame away from the first push rod.

[0014] Optionally, the displacement device further comprises a second push rod, a third flexible component, a fourth flexible component, a second guide frame and a displacement frame, and the third flexible component, the fourth flexible component, the second guide frame and the displacement frame are all accommodated in the inner frame;

[0015] Two ends of the third flexible component are respectively connected to the inner frame and the second guide frame, and two ends of the fourth flexible component are respectively connected to the second guide frame and the displacement frame;

[0016] The second guide frame is received in the inner frame, the displacement frame is received in the second guide frame, and the second guide frame is used to limit the moving direction of the displacement frame;

[0017] One end of the second push rod abuts against the displacement frame, and a pushing direction of the second push rod is perpendicular to a pushing direction of the first push rod.

[0018] Optionally, the third flexible component includes four third sub-flexible structures, two of the third sub-flexible structures are arranged on a side of the inner frame close to the second push rod, and the other two of the third sub-flexible structures are arranged on a side of the inner frame away from the second push rod. The four third sub-flexible structures are arranged opposite to each other in pairs along the pushing direction of the second push rod, and the inner frame is connected to the second guide frame through the third sub-flexible structures.

[0019] Optionally, the fourth flexible component includes four fourth sub-flexible structures, two of the fourth sub-flexible structures are arranged on the side of the third sub-flexible structure away from the first push rod, and the other two of the fourth sub-flexible structures are arranged on the side of the third sub-flexible structure close to the first push rod, and the four fourth sub-flexible structures are arranged opposite to each other in pairs along the pushing direction of the second push rod.

[0020] Optionally, the third sub-flexible structure includes a third connecting portion and a third reinforcing portion, two ends of the third reinforcing portion are respectively connected to two third connecting portions, and a width of the third reinforcing portion is greater than a width of the third connecting portion; and

[0021] The fourth sub-flexible structure includes a fourth connecting portion and a fourth reinforcing portion, two ends of the fourth reinforcing portion are respectively connected to two fourth connecting portions, and a width of the fourth reinforcing portion is greater than a width of the fourth connecting portion.

[0022] Optionally, the displacement device further includes a second elastic device, wherein the second elastic device is disposed between the inner frame and the displacement frame and is disposed on a side of the inner frame away from the second push rod.

[0023] The present invention further provides a lens assembly, which includes a detection lens and a displacement device as described in any one of the above embodiments, wherein the detection lens is connected to the displacement device, and the displacement device is used to adjust the position of the detection lens.

[0024] The present invention further provides a detection device, which includes a lens assembly as described in any one of the above embodiments.

[0025] It can be seen from the above that the above-mentioned technical features of the present invention can have one or more of the following beneficial effects: by pushing the inner frame through the first push rod, the inner frame can be driven to move along the extension direction of the inner side wall of the first guide frame, thereby limiting the moving direction of the inner frame through the first guide frame, and during the movement of the inner frame, the first flexible component and the second flexible component undergo elastic deformation, and the inner frame is stretched or pushed by the elastic force of the first flexible component and the second flexible component, thereby ensuring that the inner frame does not deviate during the movement, thereby improving the movement accuracy of the displacement device. BRIEF DESCRIPTION OF THE DRAWINGS

[0026] In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the accompanying drawings required for use in the description of the embodiments will be briefly introduced below. Obviously, the accompanying drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other accompanying drawings can be obtained based on these accompanying drawings without paying creative work.

[0027] Figure 1 A schematic diagram of the structure of a displacement device provided by an embodiment of the present invention;

[0028] Figure 2 for Figure 1 A magnified image of area A;

[0029] Figure 3 for Figure 1 Enlarged view of area B;

[0030] Figure 4 A schematic diagram of the structure of the displacement device provided by an embodiment of the present invention when pushing the first push rod;

[0031] Figure 5 for Figure 4 Enlarged view of the middle C area;

[0032] Figure 6 A schematic diagram of the structure of the displacement device provided by an embodiment of the present invention when pushing the second push rod;

[0033] Figure 7 for Figure 6 Enlarged view of the middle C area;

[0034] Description of Figure Numbers:

[0035] DETAILED DESCRIPTION

[0036] In order to make the purpose, technical solution and advantages of the present invention clearer, the technical solution of the present invention will be clearly and completely described below in conjunction with the specific embodiments of the present invention and the corresponding drawings. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making creative work are within the scope of protection of the present invention.

[0037] It should be noted that the directional terms mentioned in the embodiments of the present invention, such as "upper", "lower", "front", "back", "left", "right", "inner", "outer", "side", etc., are only reference to the directions of the attached drawings. Therefore, the directional terms used are used to illustrate and understand the present invention, rather than to limit the present invention. For the sake of understanding and ease of description, the size and thickness of each component shown in the drawings are arbitrarily shown, but the present invention is not limited thereto.

[0038] It is understood that when a component such as a layer, film, region or substrate is referred to as being "on" another component, the component may be directly on the other component, or intervening components may also be present. In addition, in the specification, unless explicitly described to the contrary, the word "comprising" will be understood to mean including the components, but not excluding any other components. Furthermore, in the specification, "on..." means being located above or below the target component, and does not mean necessarily being located on the top based on gravity.

[0039] In conjunction with the accompanying drawings, some embodiments of the present invention are described in detail below. In the absence of conflict, the following embodiments and features in the embodiments may be combined with each other.

[0040] See also Figures 1 to 3 , Figure 1 It is a displacement device provided in an embodiment of the present application.

[0041] In the present application, the displacement device includes a first push rod 10, an outer frame 20, a first flexible component 30, a second flexible component 40, a first guide frame 50 and an inner frame 60;

[0042] Specifically, the outer frame 20 is connected to the first flexible component 30.

[0043] The first flexible component 30 is connected to the first guide frame 50;

[0044] Two ends of the second flexible component 40 are respectively connected to the first guide frame 50 and the inner frame 60;

[0045] The first guide frame 50 is received in the outer frame 20;

[0046] The inner frame 60 is received in the first guide frame 50 , and the first guide frame 50 is used to limit the moving direction of the inner frame 60 ;

[0047] One end of the first push rod 10 abuts against the inner frame 60 .

[0048] The first push rod 10 can be pushed by rotating or sliding.

[0049] When the displacement device is required to drive other parts to move, the inner frame 60 is first pushed by the first push rod 10, and the inner frame 60 moves along the pushing direction of the first push rod 10. As the inner frame 60 moves, the second flexible component 40 connected to the inner frame 60 undergoes elastic deformation, and the elastic deformation of the second flexible component 40 drives the first guide frame 50 to move, and the movement of the first guide frame 50 drives the first flexible component 30 to undergo elastic deformation. During the movement of the inner frame 60, since the moving direction of the inner frame 60 is limited by the first guide frame 50, the position deviation of the inner frame 60 during the movement can be avoided, thereby improving the directional accuracy of the displacement device driving other parts to move.

[0050] In addition, since the displacement device includes the first flexible component 30 and the second flexible component 40, the first guide frame 50 can be limited to shift in position by the first flexible component 30, and the inner frame 60 can be limited to shift in position by the second flexible component 40 during movement.

[0051] The outer wall of the first guide frame 50 slides relatively with the inner wall of the outer frame 20 , and the moving direction of the first guide frame 50 is limited by the outer frame 20 .

[0052] In the embodiment of the present application, the displacement device includes a first push rod 10, an outer frame 20, a first flexible component 30, a second flexible component 40, a first guide frame 50 and an inner frame 60, the outer frame 20 is connected to the first flexible component 30, and the first flexible component 30 is connected to the first guide frame 50; the two ends of the second flexible component 40 are respectively connected to the first guide frame 50 and the inner frame 60; the first guide frame 50 is accommodated in the outer frame 20; the inner frame 60 is accommodated in the first guide frame 50, and the first guide frame 50 is used to limit the moving direction of the inner frame 60; one end of the first push rod 10 abuts against the inner frame 60. By pushing the inner frame 60 through the first push rod 10, the inner frame 60 can be driven to move along the extension direction of the inner side wall of the first guide frame 50, so that the moving direction of the inner frame 60 is limited by the first guide frame 50, and during the movement of the inner frame 60, the first flexible component 30 and the second flexible component 40 are elastically deformed, and the inner frame 60 is stretched or pushed by the elastic force of the first flexible component 30 and the second flexible component 40, thereby ensuring that the inner frame 60 does not deviate during the movement, thereby improving the movement accuracy of the displacement device.

[0053] In an optional embodiment, the first flexible assembly 30 includes four first sub-flexible structures 31, and the four first sub-flexible structures 31 are arranged opposite to each other in pairs, and the outer frame 20 is connected to the first guide frame 50 through the flexible structure. Specifically, the first sub-flexible structures 31 are arranged opposite to each other in pairs along the pushing direction of the first push rod 10. Specifically, when the first guide frame 50 moves along the pushing direction of the first push rod 10, the first guide frame 50 drives the first sub-flexible structure 31 on the side close to the first push rod 10 to be stretched, so that the first sub-flexible structure 31 undergoes elastic deformation, and the first sub-flexible structure 31 on the side away from the first push rod 10 is compressed, so that the first sub-flexible structure undergoes elastic deformation.

[0054] In a preferred embodiment, two of the first sub-flexible structures 31 are disposed on a side of the first guide frame 50 close to the first push rod 10 , and another two of the first sub-flexible structures 31 are disposed on a side of the first guide frame 50 away from the first push rod 10 .

[0055] In an optional embodiment, the second flexible component 40 includes four second sub-flexible structures 41, and the four second sub-flexible structures 41 are respectively arranged opposite to the four first sub-flexible structures 31. Specifically, the second sub-flexible structures 41 are arranged opposite to each other in pairs along the pushing direction of the first push rod 10. Specifically, when the inner frame 60 moves along the pushing direction of the first push rod 10, the inner frame 60 drives the second sub-flexible structure 41 on the side close to the first push rod 10 to be stretched, so that the second sub-flexible structure 41 undergoes elastic deformation, and the second sub-flexible structure 41 on the side away from the first push rod 10 is compressed, so that the second sub-flexible structure undergoes elastic deformation.

[0056] In a preferred embodiment, two of the second flexible sub-structures 41 are disposed on a side of the inner frame 60 close to the first push rod 10 , and another two of the second flexible sub-structures 41 are disposed on a side of the inner frame 60 away from the first push rod 10 .

[0057] In an optional embodiment, the displacement device further includes a first elastic device 70, which is disposed between the outer frame 20 and the inner frame 60 and on a side of the inner frame 60 away from the first push rod 10. Specifically, when the inner frame 60 is pushed by the first push rod 10, in order to ensure that the inner frame 60 can always abut against the first push rod 10 when the first push rod 10 moves to a side away from the pushing direction, the first elastic device 70 can be disposed between the inner frame 60 and the outer frame 20, and the inner frame 60 is pushed to move toward one side of the first push rod 10 by the elastic force of the first elastic device 70. In a preferred embodiment, the first elastic device 70 is a spring.

[0058] In an optional embodiment, the displacement device further includes a second push rod 80, a third flexible assembly 90, a fourth flexible assembly 100, a second guide frame 110 and a displacement frame 120;

[0059] The two ends of the third flexible component 90 are respectively connected to the inner frame 60 and the second guide frame 110.

[0060] The second guide frame 110 is connected to the fourth flexible component 100;

[0061] The other end of the fourth flexible component 100 is connected to the displacement frame 120;

[0062] The second guide frame 110 is received in the inner frame 60;

[0063] The displacement frame 120 is received in the second guide frame 110 , and the second guide frame 110 is used to limit the moving direction of the displacement frame 120 ;

[0064] One end of the second push rod 80 abuts against the displacement frame 120 .

[0065] Specifically, when the displacement device is required to drive other parts to move along the second direction, the second push rod 80 pushes the displacement frame 120 to move, and the displacement frame 120 moves along the pushing direction of the second push rod 80. As the displacement frame 120 moves, the fourth flexible component 100 connected to the displacement frame 120 undergoes elastic deformation, and the elastic deformation of the fourth flexible component 100 drives the second guide frame 110 to move, and the movement of the second guide frame 110 drives the third flexible component 90 to undergo elastic deformation. During the movement of the displacement frame 120, since the moving direction of the displacement frame 120 is limited by the second guide frame 110, the displacement frame 120 can be prevented from being offset during the movement, thereby improving the directional accuracy of the displacement device driving other parts to move.

[0066] In a preferred embodiment, the pushing direction of the first push rod 10 is perpendicular to the pushing direction of the second push rod 80. Specifically, compared with the case where the pushing direction of the first push rod 10 is not perpendicular to the pushing direction of the second push rod 80, the pushing direction of the first push rod 10 is perpendicular to the pushing direction of the second push rod 80, which can be convenient for accurately adjusting the moving direction of other parts and reduce the difficulty of calculating the moving distance.

[0067] In an optional embodiment, the third flexible assembly 90 includes four third sub-flexible structures 91, which are arranged opposite to each other in pairs, and the inner frame 60 is connected to the second guide frame 110 through the flexible structure. Specifically, the third sub-flexible structures 91 are arranged opposite to each other in pairs along the pushing direction of the second push rod 80. Specifically, when the second guide frame 110 moves along the pushing direction of the second push rod 80, the second guide frame 110 drives the third sub-flexible structure 91 on the side close to the second push rod 80 to be stretched, so that the third sub-flexible structure 91 undergoes elastic deformation, and the third sub-flexible structure 91 on the side away from the second push rod 80 is compressed, so that the third sub-flexible structure undergoes elastic deformation.

[0068] In a preferred embodiment, two of the third sub-flexible structures 91 are disposed on a side of the second guide frame 110 close to the second push rod 80 , and another two of the third sub-flexible structures 91 are disposed on a side of the second guide frame 110 away from the second push rod 80 .

[0069] In an optional embodiment, the fourth flexible assembly 100 includes four fourth sub-flexible structures 101, and the four fourth sub-flexible structures 101 are respectively arranged opposite to the four first sub-flexible structures 31. Specifically, the fourth sub-flexible structures 101 are arranged opposite to each other in pairs along the pushing direction of the second push rod 80. Specifically, when the displacement frame 120 moves along the pushing direction of the second push rod 80, the displacement frame 120 drives the fourth sub-flexible structure 101 on the side close to the second push rod 80 to be stretched, so that the fourth sub-flexible structure 101 undergoes elastic deformation, and the fourth sub-flexible structure 101 on the side away from the second push rod 80 is compressed, so that the fourth sub-flexible structure undergoes elastic deformation.

[0070] In a preferred embodiment, two of the fourth sub-flexible structures 101 are disposed on a side of the displacement frame 120 close to the second push rod 80 , and another two of the fourth sub-flexible structures 101 are disposed on a side of the displacement frame 120 away from the second push rod 80 .

[0071] In an optional embodiment, the connection between the first flexible component 30 and the outer frame 20 is an arc-shaped structure. Specifically, when the first sub-flexible structure 31 in the first flexible component 30 undergoes elastic deformation, a shear force is formed at the connection between the first sub-flexible structure 31 and the outer frame 20. In order to avoid the shear force causing the connection between the first sub-flexible structure 31 and the mining frame to break, the connection is automatically formed into an arc-shaped structure, thereby reducing the risk of the first sub-flexible structure 31 breaking.

[0072] It can be understood that the connection part between the second flexible component 40 and the inner frame 60, the connection part between the third flexible component 90 and the inner frame 60, and the connection part between the fourth flexible component 100 and the displacement frame 120 are all arc structures, and the specific principles are the same as the connection part between the first flexible component 30 and the outer frame 20, which will not be repeated here.

[0073] In an optional embodiment, the first sub-flexible structure 31 includes two first connecting parts 311 and a first reinforcing part 312, the two ends of the first reinforcing part 312 are respectively connected to the first connecting part 311, and the width of the first reinforcing part 312 is greater than the width of the first connecting part 311. Specifically, since the width of the first reinforcing part 312 is greater than the width of the first connecting part 311, the rigidity of the first sub-flexible component can be improved by the first reinforcing part 312. It can be understood that the second sub-flexible structure 41 includes a second connecting part 411 and a second reinforcing part 412, the two ends of the second reinforcing part are respectively connected to one of the second connecting parts 411, and specifically, the rigidity of the second sub-flexible structure 41 is enhanced by the second reinforcing part 412, thereby avoiding the second sub-flexible structure 41 from being broken.

[0074] In an optional embodiment, the third sub-flexible structure 91 includes two third connecting parts 911 and a third reinforcing part 912, the two ends of the third reinforcing part 912 are respectively connected to the third connecting part 911, and the width of the third reinforcing part 912 is greater than the width of the third connecting part 911. Specifically, since the width of the third reinforcing part 912 is greater than the width of the third connecting part 911, the stiffness of the third sub-flexible component can be improved by the third reinforcing part 912. It can be understood that the fourth sub-flexible structure 101 includes a fourth connecting part 1011 and a fourth reinforcing part 1012, the two ends of the fourth reinforcing part are respectively connected to one of the fourth connecting parts 1011. Specifically, the fourth sub-flexible structure 101 is reinforced with the fourth reinforcing part 1012 to avoid the fourth sub-flexible structure 101 from breaking.

[0075] In an optional embodiment, the displacement device further includes a second elastic device 130, which is disposed between the displacement frame 120 and the inner frame 60 and on a side of the displacement frame 120 away from the second push rod 80. Specifically, when the displacement frame 120 is pushed by the second push rod 80, in order to ensure that the displacement frame 120 can always abut against the second push rod 80 when the second push rod 80 moves to a side away from the pushing direction, the second elastic device 130 can be disposed between the displacement frame 120 and the outer frame 20, and the displacement frame 120 is pushed to move toward one side of the second push rod 80 by the elastic force of the second elastic device 130. In a preferred embodiment, the second elastic device 130 is a spring.

[0076] The present invention further provides a lens assembly, which includes a detection lens and a displacement device as described in any one of the above embodiments, wherein the detection lens is connected to the displacement device, and the displacement device is used to adjust the position of the detection lens.

[0077] The present invention also proposes a detection device, which includes a measuring platform as described in any of the above-mentioned embodiments. The specific structure of the measuring platform refers to the above-mentioned embodiments. Since the measuring platform adopts all the technical solutions of all the above-mentioned embodiments, it has at least all the beneficial effects brought by the technical solutions of the above-mentioned embodiments, which will not be repeated here one by one.

[0078] It can be understood that the aforementioned embodiments are merely exemplary descriptions of the present invention. The technical solutions of the various embodiments can be arbitrarily combined and used in combination, provided that the technical features do not conflict, the structures do not contradict, and the purpose of the present invention is not violated.

[0079] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention, rather than to limit it. Although the present invention has been described in detail with reference to the aforementioned embodiments, those skilled in the art should understand that they can still modify the technical solutions described in the aforementioned embodiments, or make equivalent replacements for some of the technical features therein. However, these modifications or replacements do not deviate the essence of the corresponding technical solutions from the spirit and scope of the technical solutions of the embodiments of the present invention.

Claims

1. A displacement device, characterized in that: The displacement device includes a first push rod, an outer frame, a first flexible component, a second flexible component, a first guide frame and an inner frame, and the first flexible component, the second flexible component, the first guide frame and the inner frame are all accommodated in the outer frame; The two ends of the first flexible component are respectively connected to the outer frame and the first guide frame; the connection portion between the first flexible component and the outer frame is an arc structure; The two ends of the second flexible component are respectively connected to the first guide frame and the inner frame; the connecting portion between the second flexible component and the inner frame is an arc structure; The first guide frame is accommodated in the outer frame, the first flexible assembly includes four first sub-flexible structures, and the four first sub-flexible structures are arranged opposite to each other in the pushing direction of the first push rod; and the second flexible assembly includes four second sub-flexible structures, and the four second sub-flexible structures are arranged opposite to each other in the pushing direction of the first push rod; the inner frame is accommodated in the first guide frame, and the first guide frame is used to limit the moving direction of the inner frame; One end of the first push rod abuts against the inner frame, and a pushing direction of the first push rod is the same as an extending direction of the first guide frame.

2. The displacement device according to claim 1, characterized in that: Two of the first sub-flexible structures are arranged on a side of the outer frame close to the first push rod, and the other two of the first sub-flexible structures are arranged on a side of the outer frame away from the first push rod. The outer frame is connected to the first guide frame through the first sub-flexible structures.

3. The displacement device according to claim 2, characterized in that: Two of the second sub-flexible structures are arranged on a side of the first sub-flexible structure away from the first push rod, and the other two of the second sub-flexible structures are arranged on a side of the first sub-flexible structure close to the first push rod.

4. The displacement device according to claim 3, characterized in that: The first sub-flexible structure includes a first connecting portion and a first reinforcing portion, two ends of the first reinforcing portion are respectively connected to the first connecting portion, and a width of the first reinforcing portion is greater than a width of the first connecting portion; and The second sub-flexible structure includes a second connecting portion and a second reinforcing portion, two ends of the second reinforcing portion are respectively connected to the second connecting portion, and a width of the second reinforcing portion is greater than a width of the second connecting portion.

5. The displacement device according to claim 1, characterized in that: The displacement device further comprises a first elastic device, which is arranged between the outer frame and the inner frame and at a side of the inner frame away from the first push rod.

6. The displacement device according to any one of claims 1 to 5, characterized in that: The displacement device further comprises a second push rod, a third flexible assembly, a fourth flexible assembly, a second guide frame and a displacement frame, wherein the third flexible assembly, the fourth flexible assembly, the second guide frame and the displacement frame are all accommodated in the inner frame; Two ends of the third flexible component are respectively connected to the inner frame and the second guide frame, and two ends of the fourth flexible component are respectively connected to the second guide frame and the displacement frame; The second guide frame is received in the inner frame, the displacement frame is received in the second guide frame, and the second guide frame is used to limit the moving direction of the displacement frame; One end of the second push rod is in contact with the displacement frame, and a pushing direction of the second push rod is perpendicular to a pushing direction of the first push rod.

7. The displacement device according to claim 6, characterized in that: The third flexible component includes four third sub-flexible structures, two of the third sub-flexible structures are arranged on a side of the inner frame close to the second push rod, and the other two of the third sub-flexible structures are arranged on a side of the inner frame away from the second push rod. The four third sub-flexible structures are arranged opposite to each other in pairs along the pushing direction of the second push rod, and the inner frame is connected to the second guide frame through the third sub-flexible structures.

8. The displacement device according to claim 7, characterized in that: The fourth flexible component includes four fourth sub-flexible structures, two of the fourth sub-flexible structures are arranged on the side of the third sub-flexible structure away from the first push rod, and the other two of the fourth sub-flexible structures are arranged on the side of the third sub-flexible structure close to the first push rod. The four fourth sub-flexible structures are arranged opposite to each other in pairs along the pushing direction of the second push rod.

9. The displacement device according to claim 8, characterized in that: The third sub-flexible structure includes a third connecting portion and a third reinforcing portion, two ends of the third reinforcing portion are respectively connected to two third connecting portions, and a width of the third reinforcing portion is greater than a width of the third connecting portion; and The fourth sub-flexible structure includes a fourth connecting portion and a fourth reinforcing portion, two ends of the fourth reinforcing portion are respectively connected to two fourth connecting portions, and a width of the fourth reinforcing portion is greater than a width of the fourth connecting portion.

10. The displacement device according to claim 6, characterized in that: The displacement device further comprises a second elastic device, wherein the second elastic device is arranged between the inner frame and the displacement frame and is arranged on a side of the inner frame away from the second push rod.

11. A lens assembly, characterized in that: The lens assembly includes a detection lens and a displacement device as described in any one of claims 1 to 10, the detection lens is connected to the displacement device, and the displacement device is used to adjust the position of the detection lens.

12. A detection device, characterized in that: The detection device comprises the lens assembly as claimed in claim 11.

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