Dynamic displacement error compensation system

Abstract

The dynamic displacement error compensation system provided by the present invention is: based on the detection error information obtained from the calibration detection of a first axis and a second axis, the position information of the first axis and the second axis are used as variables to respectively make a first compensation table for compensating the displacement of the first axis and a second compensation table for compensating the displacement of the second axis, and the first compensation table is stored in the first driver, and the second compensation table is stored in the second driver, and the first driver and the second driver simultaneously or successively obtain the first dynamic position information of the first moving element on the first axis and the second dynamic position information of the second moving element on the second axis, and then according to the first compensation table and the second compensation table, the displacement of the first moving element and the second moving element are respectively compensated.

Description

Technical Field

[0001] The present invention relates to a motor positioning correction technology, and in particular to a dynamic displacement error compensation system. Background Art

[0002] In the technical field of using motors as displacement drive elements, limited processing accuracy affects the accuracy of the displacement position. In modern industries where precision is increasingly important, a slight error in position may lead to major product defects. In order to ensure the accuracy of the displacement position, several previous technologies have been disclosed in the prior art. For example, in the Chinese patent publication case No. 104076739A, a laser interferometer is used to measure the displacement stroke of a linear motor to determine the degree of offset of each specific position of the linear motor in its displacement stroke, and an error compensation table of the linear motor is established. The error compensation table is then used as the basis for position correction of the linear motor when in use, thereby improving the accuracy of the displacement position.

[0003] However, the technology disclosed in the above-mentioned patent publication No. 104076739A can only compensate and correct the position under single-axis movement, and cannot compensate and correct the position coupling error of two-axis movement on the plane. Its application is still limited. Therefore, there is another patent publication such as China Patent No. 109709892A that provides a spatial position compensation technology under multi-axis linkage. After collecting the position information of each axis movement, it further performs calculations through the spatial position compensation program in the computer, modifies the feedback position signal of the position sensing element, and then feeds back the modified feedback position signal to the drive system to compensate based on the modified feedback position information. Although the above-mentioned patent No. '892 can perform dynamic compensation, it requires an external computer device with high computing power to perform calculations and correction compensation, and the cost is also very high. Summary of the invention

[0004] Therefore, the main purpose of the present invention is to provide a dynamic displacement error compensation system, which can achieve error compensation for two-dimensional or more motions without setting up additional devices in the driving structure, and has both economy and accuracy.

[0005] Therefore, in order to achieve the above-mentioned purpose, the dynamic displacement error compensation system provided by the present invention has a main technical feature that the detection error information obtained based on the calibration detection of a first axis and a second axis is made into a first compensation table for compensating the displacement of the first axis and a second compensation table for compensating the displacement of the second axis respectively, with the position information of the first axis and the second axis as variables, and the first compensation table is stored in a first driver of a first motor device used to drive a first moving element to perform linear motion on the first axis, and the second compensation table is stored in a second driver of a second motor device used to drive a second moving element to perform linear motion on the second axis, and the first driver and the second driver simultaneously or successively obtain the first dynamic position information of the first moving element on the first axis and the second dynamic position information of the second moving element on the second axis, and then compensate the displacement of the first moving element and the second moving element respectively according to the first compensation table and the second compensation table.

[0006] Thereby, the dynamic displacement error compensation system can perform dynamic displacement error compensation by means of the first driver and the second driver without setting up an additional computing device for computational compensation. In addition to reducing costs, displacement errors in two or more different axes can also be compensated.

[0007] As a preferred embodiment of the above technical solution, preferably, the first axis and the second axis are non-coaxial with each other.

[0008] As a preferred embodiment of the above technical solution, it is preferable that it further comprises a communication unit which is electrically connected to the first driver and the second driver.

[0009] As a preferred embodiment of the above technical solution, preferably, the first dynamic position information is first transmitted to the first driver, and then transmitted by the first driver to the second driver via the communication unit; and the second dynamic position information is first transmitted to the second driver, and then transmitted by the second driver to the first driver via the communication unit.

[0010] As a preferred embodiment of the above technical solution, preferably, the communication unit transmits signals between the first driver and the second driver via a line.

[0011] Furthermore, in order to enable the dynamic displacement error compensation system to be applied to the existing technology without hindrance, the dynamic displacement error compensation system can further include a communication unit. The communication unit is electrically connected to the first driver and the second driver, so that the first dynamic position information obtained by the first driver can be transmitted to the second driver via the communication unit. Similarly, the second dynamic position information obtained by the second driver can also be transmitted to the first driver via the communication unit, so that the first driver and the second driver can both obtain the first dynamic position information and the second dynamic position information, and then compensate for the motion displacement on the first axis and the second axis respectively according to the first compensation table and the second compensation table. BRIEF DESCRIPTION OF THE DRAWINGS

[0012] In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, a brief introduction is given below to the drawings required for use in the embodiments or the description of the prior art. Obviously, the drawings described below are some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying any creative work.

[0013] Figure 1 It is a schematic diagram of a preferred embodiment of the present invention.

[0014] Figure 2 A flow chart of establishing a detection error compensation table in a preferred embodiment of the present invention.

[0015] Figure 3 Flowchart of dynamic error compensation in a preferred embodiment of the present invention.

[0016] Figure 4 The circular test result after dynamic error compensation is performed in a preferred embodiment of the present invention.

[0017] Figure 5 The circular test results without dynamic error compensation are shown in FIG.

[0018] Among them, (10) dynamic displacement error compensation system (20) first motor device (21) first driver (22) first dynamic error processing unit (23) position information (24) control signal (30) second motor device (31) second driver (32) second dynamic error processing unit (33) position information (34) control signal (40) communication unit (X) first axis (Y) second axis (W) working plane. DETAILED DESCRIPTION

[0019] In order to make the purpose, technical solution and advantages of the embodiments of the present invention clearer, the technical solution in the embodiments of the present invention will be clearly and completely described below in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments are part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0020] First, see Figure 1 As shown, a dynamic displacement error compensation system (10) provided in a preferred embodiment of the present invention mainly comprises a first motor device (20) and a second motor device (30), a first moving element driven by the first motor device (20) to perform linear reciprocating displacement along a first axis (X) direction, and a second moving element driven by the second motor device (30) to perform linear reciprocating displacement along a second axis (Y) direction, as shown in FIG. Figure 1 As shown, the directions of the first axis (X) and the second axis (Y) are perpendicular to each other, and a working plane (W) is defined by the working strokes of the first movable element and the second movable element. However, the above-mentioned technology is not the technical target to be improved by the present invention, and is also the prior art already known to those of ordinary knowledge in the technical field to which the present invention belongs. Therefore, this case will only explain the parts related to the technical features of the present case based on the parts necessary for understanding the technical features of the present invention.

[0021] The first motor device (20) is a linear motor having a stator extending along the first axis (X) direction and a mover as the first moving element moving in the first axis (X) direction. Similarly, the second motor device (30) is also a linear motor having a stator extending along the second axis (Y) direction and a mover as the second moving element moving in the second axis (Y) direction. In addition, position sensing technologies for obtaining dynamic position information of the first moving element and the second moving element, such as optical rulers, magnetic rulers or other position sensing technologies, are also well-known technical contents and are already known to those of ordinary knowledge in the technical field to which the present invention belongs.

[0022] The dynamic displacement error compensation system (10) is different from the above-mentioned known technology in that its features exist in two parts, namely, the article and the method. In the article part, a first driver (21) of the first motor device (20) has a first dynamic error processing unit (22), and a second driver (31) of the second motor device (30) has a second dynamic error processing unit (32). At the same time, a communication unit (40) is used to electrically connect the first driver (21) and the second driver (31), so that the first driver (21) and the second driver (31) can communicate with each other via the communication unit (40).

[0023] In the methods section, Figure 2 As shown, the displacements of the first movable element and the second movable element on the first axis and the second axis are detected to obtain error values, and after determining the number of points on the compensation plane based on the error values, a first compensation table is established which uses the position information of the first axis and the position information of the second axis as variables and is suitable for compensating the first axis as shown in Table 1, and a second compensation table is established which is suitable for compensating the second axis as shown in Table 2, and then the first compensation table is stored in the first driver (21), the second compensation table is stored in the second driver (31), and the compensation functions of the first driver (21) and the second driver (31) are activated.

[0024] Table 1: First compensation table

[0025]

[0026] Table 2: Second Compensation Table

[0027]

[0028] See also Figure 1 and Figure 3As shown, after the system is initialized, the first dynamic position information (23) of the first moving element moving on the first axis is fed back to the first driver (21) by the conventional position sensing technology, and the second dynamic position information (33) of the second moving element moving on the second axis is fed back to the second driver (31). At the same time, the first driver (21) obtains the second dynamic position information from the second driver (31) via the communication unit (40), and the second driver (31) obtains the first dynamic position information from the first driver (21) via the communication unit (40). Thus, the first dynamic error processing unit (22) and the second dynamic error processing unit (32) can obtain the first dynamic position information based on the first dynamic error processing unit (22). The first dynamic position information and the second dynamic position information obtained are calculated individually according to the first compensation table and the second compensation table, and the corresponding compensation values ​​are used to dynamically compensate the displacement of the first moving element and the second moving element through the control signal (24) (34). For example, when the first dynamic position information corresponds to the first axis position of 120 mm and the second dynamic position information corresponds to the second axis position of 90 mm; according to the first compensation table, the first driver (21) should give the first moving element a dynamic displacement compensation value of -0.85 mm; according to the second compensation table, the second driver (31) should give the second moving element a dynamic displacement compensation value of -0.82 mm.

[0029] After the above dynamic displacement error compensation, the following is obtained through the circle test: Figure 4 The test results shown in the figure show that the roundness is 11.0μm, compared with Figure 5 The uncompensated control circular test result showed a circularity of only 23.5μm. The present invention can indeed achieve dynamic displacement error compensation and improve the precision of processing. In addition, there is no need to add additional compensation devices. It can be achieved by using a motor or a circular drive. It has advantages in terms of economic benefits and can be applied to dynamic position compensation of two axes or more. Compared with traditional single-axis compensation, the compensation accuracy of the present invention can also be greatly improved.

[0030] In addition, the applicant needs to further explain that, although the first axis and the second axis are in a relative state perpendicular to each other in the above embodiment, it is not limited to that, and they can also be parallel to each other or perpendicular to each other. In addition, the communication unit can be used for wired transmission as well as wireless transmission. And, importantly, the source from which the first driver obtains the second dynamic position information is not limited to the second driver, and the position sensing mechanism can also feed back both the first dynamic position information and the second dynamic position information to the first driver and the second driver without the need for transmission through the communication unit, and the purpose and effect of the present invention can be achieved.

[0031] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention, rather than to limit it. Although the present invention has been described in detail with reference to the aforementioned embodiments, those skilled in the art should understand that they can still modify the technical solutions described in the aforementioned embodiments, or replace some or all of the technical features therein with equivalents. However, these modifications or replacements do not cause the essence of the corresponding technical solutions to deviate from the scope of the technical solutions of the embodiments of the present invention.

Claims

1. A dynamic displacement error compensation system, characterized in that: Contains: A first moving element for linear motion along a first axis and a first motor device for driving the first moving element; A second moving element for linear motion along a second axis and a second motor device for driving the second moving element; Obtaining detection error compensation tables of the first moving element and the second moving element on the first axis and the second axis respectively; Features: The detection error compensation table has a first compensation table and a second compensation table, both of which use the position information of the first axis and the position information of the second axis as variables to obtain the compensation value on the first axis and the compensation value on the second axis respectively; The first compensation table is stored in a first driver of the first motor device, and the first driver has a first dynamic error processing unit; The second compensation table is stored in a second driver of the second motor device, and the second driver has a second dynamic error processing unit; and The first driver obtains first dynamic position information of the first moving element moving on the first axis and second dynamic position information of the second moving element moving on the second axis, and the first dynamic error processing unit calculates and obtains corresponding compensation values ​​according to the first compensation table, and then compensates for the displacement of the first moving element on the first axis; The second driver obtains the first dynamic position information and the second dynamic position information, and the second dynamic error processing unit calculates the corresponding compensation value according to the second compensation table, and then compensates the displacement of the second moving element on the second axis.

2. The dynamic displacement error compensation system according to claim 1, characterized in that: The first axis and the second axis are non-coaxial with each other.

3. The dynamic displacement error compensation system according to claim 1, characterized in that: The device further comprises a communication unit electrically connected to the first driver and the second driver.

4. The dynamic displacement error compensation system according to claim 3, characterized in that: The first dynamic position information is first transmitted to the first driver and then transmitted to the second driver via the communication unit; and the second dynamic position information is first transmitted to the second driver and then transmitted to the first driver via the communication unit.

5. The dynamic displacement error compensation system according to claim 4, characterized in that: The communication unit transmits signals between the first driver and the second driver via a line.

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