Cutting Calibration Method, Device, and Computer-Readable Storage Medium
By obtaining the deviation between the blade edge line and the camera lens, generating target movement parameters, controlling the camera adjustment axis to make the lens and the blade cutting position overlap, solving the cutting accuracy problem caused by the chopping knife and camera position offset, and improving the accuracy of wafer cutting.
Patent Information
- Application Number
- CN202210478175.8
- Authority / Receiving Office
- CN · China
- Patent Type
- Patents(China)
- Current Assignee / Owner
- Filing Date
- 2022-04-29
- Publication Date
- 2025-08-01
- Estimated Expiration
- 2042-04-29
AI Technical Summary
During the wafer cutting process, the relative position deviation between the chopper and the camera leads to a reduced cutting accuracy, affecting the lobe quality.
By obtaining the edge edge acquired by the camera, determining the deflection angle, horizontal offset and vertical offset between the edge edge edge and the center position of the camera lens, generating the target movement parameters associated with the camera lens, and controlling the camera adjustment axis to make the center position of the camera lens coincide with the cutting position of the blade.
Improves cutting accuracy, ensures accurate alignment of the camera lens and the cutting position of the blade, and improves the cutting quality of the lobes.
Smart Images

Figure CN115019025B_ABST
Abstract
Description
Technical Field
[0001] The present invention relates to the technical field of wafer cutting, and particularly to a cutting calibration method, device, and computer-readable storage medium. Background Art
[0002] In the wafer dicing process, it is necessary to locate the dicing track of the die through a camera, and then move the located dicing track directly below the splitting blade for splitting. The center of the camera's field of view is the splitting position corresponding to the splitting blade edge.
[0003] However, in the actual cutting process, due to the possible relative displacement between the splitting blade and the camera, that is, the actual position of the splitting blade does not coincide with the position located by the camera. At this time, splitting according to the camera positioning will reduce the accuracy of die cutting, thereby affecting the quality of the cut die.
[0004] The above content is only used to assist in understanding the technical solution of the present invention, and does not represent an admission that the above content is prior art. Summary of the Invention
[0005] The main object of the present invention is to provide a cutting calibration method, aiming to solve the problem of how to improve the cutting accuracy.
[0006] To achieve the above object, a cutting calibration method provided by the present invention includes:
[0007] Obtain the cutting edge line collected by the camera;
[0008] Determine the deflection angle, horizontal offset, and / or vertical offset between the cutting edge line and the target scale line at the center position of the camera lens;
[0009] Generate the target movement parameters associated with the camera lens according to the deflection angle, the horizontal offset, and / or the vertical offset;
[0010] Control the camera adjustment axis according to the target movement parameters, so as to control the center position of the camera lens to coincide with the cutting position of the cutting edge through the camera adjustment axis.
[0011] Optionally, the step of determining the offset angle, horizontal offset, and vertical offset between the cutting edge line and the target scale line at the center position of the camera lens includes:
[0012] Obtain the preset area where the target scale line is located;
[0013] When the cutting edge line is in the preset area, determine the relative offset position of the cutting edge line in the preset area;
[0014] Determine the offset angle, the horizontal offset, and the vertical offset between the cutting edge line and the target scale line according to the relative offset position.
[0015] Optionally, the step of determining the relative offset position of the cutting edge line in the preset area when the cutting edge line is in the preset area includes:
[0016] Obtain the gray values corresponding to each pixel point in the preset area;
[0017] Use the area corresponding to the pixel points that satisfy the preset gray matching condition and are located in the preset area among the gray values as the cutting edge line located in the preset area;
[0018] Determine the relative distance between the cutting edge line and the central area of the preset area to obtain the relative offset position of the cutting edge line in the preset area.
[0019] Optionally, the step of generating the target movement parameters associated with the camera lens according to the deflection angle, the horizontal offset, and / or the vertical offset includes:
[0020] Determine the horizontal movement amount corresponding to the camera lens according to the horizontal offset, where the horizontal movement amount includes a horizontal lateral movement amount and / or a horizontal longitudinal movement amount;
[0021] Determine the first target movement parameter associated with the camera lens according to the horizontal lateral movement amount and / or the horizontal longitudinal movement amount.
[0022] Optionally, the step of determining the first target movement parameter associated with the camera lens according to the horizontal lateral movement amount and / or the horizontal longitudinal movement amount includes:
[0023] Determine the horizontal lateral movement parameter of the first target movement parameter according to the horizontal lateral movement amount, and / or determine the horizontal longitudinal movement parameter of the first target movement parameter according to the horizontal longitudinal movement amount, and determine the first target movement parameter according to the horizontal lateral movement parameter and / or the horizontal longitudinal movement parameter; or
[0024] Determine the linear movement parameter of the first target movement parameter according to the horizontal lateral movement amount and the horizontal longitudinal movement amount, and use the linear movement parameter as the first target movement parameter.
[0025] Optionally, the step of generating the target movement parameters associated with the camera lens according to the deflection angle, the horizontal offset, and / or the vertical offset includes:
[0026] Determine the rotation angle corresponding to the camera lens according to the deflection angle, determine the horizontal movement amount corresponding to the camera lens according to the horizontal offset amount, and / or determine the vertical movement amount corresponding to the camera lens according to the vertical offset amount;
[0027] Determine the second target movement parameter associated with the camera lens according to the rotation angle, the horizontal movement amount, and / or the vertical movement amount.
[0028] In addition, the present invention also provides a cutting calibration device, which includes: a splitting knife, a light source, a camera, a camera adjustment shaft, and a control circuit board. The control circuit board includes a memory, a processor, and a cutting calibration program stored on the memory and executable on the processor. When the cutting calibration program is executed by the processor, the steps of the cutting calibration method described above are implemented.
[0029] Optionally, the cutting calibration device includes: a splitting knife is provided at the top of the cutting calibration device, and the splitting knife is used to perform a cutting action after calibration; the light source and the camera are provided below the splitting knife, and the camera is used to collect the cutting edge line of the splitting knife under the illumination of the light source; the camera includes a camera lens on the upper side and a camera support on the lower side, the camera lens is used for cutting calibration, and the camera support is connected to the camera adjustment shaft at the bottom; the camera adjustment shaft includes a vertical adjustment shaft, a horizontal adjustment shaft, and a rotation shaft, and the camera adjustment shaft is used to control the camera lens to perform a cutting calibration action.
[0030] In addition, the present invention also provides a computer-readable storage medium, which stores a cutting calibration program. When the cutting calibration program is executed by a processor, the various steps of the cutting calibration method described in the above embodiments are implemented.
[0031] An embodiment of the present invention provides a cutting calibration method, device, and computer-readable storage medium. Among them, the method includes: obtaining the cutting edge line collected by the camera; determining the deflection angle, horizontal offset amount, and / or vertical offset amount between the cutting edge line and the target scale line at the center position of the camera lens; generating a target movement parameter associated with the camera lens according to the deflection angle, the horizontal offset amount, and / or the vertical offset amount; controlling the camera adjustment shaft according to the target movement parameter, so as to control the center position of the camera lens to coincide with the cutting position of the cutting edge through the camera adjustment shaft. By calibrating the center position of the camera lens and the cutting position of the cutting edge before cutting the wafer, the cutting accuracy is improved, and the problem of low cutting accuracy is solved. Description of the Drawings
[0032] Figure 1 It is a schematic hardware architecture diagram of the cutting calibration device related to the embodiment of the present invention;
[0033] Figure 2 Schematic flow diagram of the first embodiment of the cutting calibration method of the present invention;
[0034] Figure 3 Refined flow diagram of step S20 in the second embodiment of the cutting calibration method of the present invention;
[0035] Figure 4 Refined flow diagram of step S30 in the third embodiment of the cutting calibration method of the present invention;
[0036] Figure 5 Another refined flow diagram of step S30 in the fourth embodiment of the cutting calibration method of the present invention.
[0037] The realization, functional features and advantages of the object of the present invention will be further described with reference to the embodiments and the accompanying drawings. Specific embodiments
[0038] It should be understood that the accompanying drawings of the present invention show exemplary embodiments of the present invention, and the present invention can be implemented in various forms and should not be limited by the embodiments described herein. On the contrary, these embodiments are provided to enable a more thorough understanding of the present invention and to fully convey the scope of the present invention to those skilled in the art.
[0039] As an implementation solution, the cutting calibration device can be as shown in Figure 1 shown.
[0040] The embodiment solution of the present invention relates to a cutting calibration device, and the cutting calibration device includes: a processor 101, such as a CPU, a memory 102, and a communication bus 103. Among them, the communication bus 103 is used to realize the connection and communication between these components.
[0041] The memory 102 can be a high-speed RAM memory or a stable memory (non-volatile memory), such as a disk memory. As shown in Figure 1 shown, the memory 102 as a computer-readable storage medium may include a cutting calibration program; and the processor 101 can be used to call the cutting calibration program stored in the memory 102 and perform the following operations:
[0042] Obtain the cutting edge line collected by the camera;
[0043] Determine the deflection angle, horizontal offset and / or vertical offset between the cutting edge line and the target scale line at the center position of the camera lens;
[0044] Generate the target movement parameters associated with the camera lens according to the deflection angle, the horizontal offset, and / or the vertical offset;
[0045] Control the camera adjustment axis according to the target movement parameters, so as to control the center position of the camera lens to coincide with the blade cutting position through the camera adjustment axis.
[0046] In one embodiment, the processor 101 can be used to call the cutting calibration program stored in the memory 102 and perform the following operations:
[0047] Obtain the preset area where the target scale line is located;
[0048] Obtain the gray values corresponding to each pixel point in the preset area;
[0049] Take the area corresponding to the pixel points that satisfy the preset gray matching condition and are located in the preset area among the gray values as the blade edge line located in the preset area;
[0050] Determine the relative distance between the blade edge line and the central area of the preset area to obtain the relative offset position of the blade edge line in the preset area;
[0051] Determine the deflection angle, the horizontal offset, and the vertical offset between the blade edge line and the target scale line according to the relative offset position.
[0052] In one embodiment, the processor 101 can be used to call the cutting calibration program stored in the memory 102 and perform the following operations:
[0053] Determine the horizontal movement amount corresponding to the camera lens according to the horizontal offset, where the horizontal movement amount includes a horizontal lateral movement amount and / or a horizontal longitudinal movement amount;
[0054] Determine the horizontal lateral movement parameter of the first target movement parameter according to the horizontal lateral movement amount, and / or determine the horizontal longitudinal movement parameter of the first target movement parameter according to the horizontal longitudinal movement amount, and determine the first target movement parameter according to the horizontal lateral movement parameter and / or the horizontal longitudinal movement parameter; or determine the linear movement parameter of the first target movement parameter according to the horizontal lateral movement amount and the horizontal longitudinal movement amount, and take the linear movement parameter as the first target movement parameter.
[0055] In one embodiment, the processor 101 can be used to call the cutting calibration program stored in the memory 102 and perform the following operations:
[0056] Determine the rotation angle corresponding to the camera lens according to the deflection angle, determine the horizontal movement amount corresponding to the camera lens according to the horizontal offset amount, and / or determine the vertical movement amount corresponding to the camera lens according to the vertical offset amount;
[0057] Determine the second target movement parameter associated with the camera lens according to the rotation angle, the horizontal movement amount, and / or the vertical movement amount.
[0058] Based on the hardware architecture of the cutting calibration device based on the wafer cutting technology, an embodiment of the cutting calibration method of the present invention is proposed.
[0059] Referring to Figure 2 , in the first embodiment, the cutting calibration method includes the following steps:
[0060] Step S10, obtain the cutting edge line collected by the camera;
[0061] In this embodiment, before the cutting edge performs cutting, it is necessary to calibrate the cutting position of the cutting edge. The calibration method in this embodiment is to collect the position of the cutting edge line of the cutting edge through a high-definition camera fixed on the cutting calibration device. The lens of the camera is vertically facing the cutting edge, and the cutting edge line part of the cutting tool is photographed under the illumination of the light source to obtain a clear cutting edge line image. And then, after collecting the cutting edge line image, the cutting edge line can be extracted from the edge line image by the method of gray level matching.
[0062] Step S20, determine the deflection angle, the horizontal offset amount, and / or the vertical offset amount between the cutting edge line and the target scale line at the center position of the camera lens;
[0063] In this embodiment, after obtaining the cutting edge line, the position where the cutting edge line is located is used as the reference position, and the deviation amount between the camera lens and this reference position is determined. The deviation amount includes at least one of the deflection angle, the horizontal offset amount, and the vertical offset amount. The target scale line can be a horizontal scale line representing the center position of the camera. It should be emphasized that the target scale line is not really engraved at the center of the camera lens, but is used as a calibration line for the computer program to identify the cutting position.
[0064] Further, for the unbiased blade position, the blade edge line image should be at the center of the camera lens and coincide with the target scale line to a certain extent. Therefore, if there is no coincidence between the blade edge line position and the target scale line, it means that there is a deviation in the cutting position. The deflection angle is the angular value between the blade edge line and the horizontal target scale line, that is, the camera lens has a certain deflection relative to the cutting tool; the horizontal offset is the offset of the blade edge line relative to the target scale line in the horizontal direction (i.e., the x-axis and y-axis), which means that there is a deviation of the lens relative to the cutting tool in the horizontal direction; the vertical offset is the height deviation of the lens in the vertical direction (i.e., the z-axis).
[0065] Step S30: Generate target movement parameters associated with the camera lens according to the deflection angle, the horizontal offset, and / or the vertical offset.
[0066] Step S40: Control the camera adjustment axis according to the target movement parameters to control the center position of the camera lens to coincide with the blade cutting position through the camera adjustment axis.
[0067] In this embodiment, after determining the deviation between the camera lens and the cutting tool, corresponding movement parameters are generated according to the deviation value. Then, the camera adjustment axis controls the movement of the camera lens according to the movement parameters, so that the center position of the camera lens coincides with the blade cutting position, thereby realizing cutting calibration.
[0068] In the technical solution provided in this embodiment, by collecting the blade edge line of the cutting tool, then determining the deviation between the blade edge line and the center position of the camera lens, and then determining the corresponding deviation compensation movement parameters according to the deviation, and finally controlling the camera adjustment axis according to the compensation movement parameters, the center position of the camera lens coincides with the blade cutting position, thereby realizing cutting calibration. The cutting accuracy is improved.
[0069] Refer to Figure 3 , in the second embodiment, based on the first embodiment, the step S20 includes:
[0070] Step S21: Obtain the preset area where the target scale line is located.
[0071] Step S221: Obtain the gray values corresponding to each pixel point in the preset area.
[0072] Step S222: Use the area corresponding to the pixel points that satisfy the preset gray matching condition and are located in the preset area among the gray values as the blade edge line located in the preset area.
[0073] Step S223: Determine the relative distance between the cutting edge line of the blade and the central area of the preset area to obtain the relative offset position of the cutting edge line of the blade in the preset area.
[0074] Step S23: Determine the offset angle, the lateral offset amount, and the longitudinal offset amount between the cutting edge line of the blade and the target scale line according to the relative offset position.
[0075] Optionally, since the image of the cutting edge line of the blade collected may be too far from the camera lens, and this situation is often caused by errors during the collection process. Therefore, in this embodiment, a preset area is set based on the target scale line, and further actions are performed when the cutting edge line is within the preset area.
[0076] Furthermore, within the preset area, obtain the gray values corresponding to each pixel point in the area. By means of gray value matching, the area composed of the pixel points that meet the preset gray value matching conditions and are located in the preset area is used as the cutting edge line of the blade. Then, based on the central position coordinates of the preset area, that is, the position where the target scale line is located, determine the relative offset position of the cutting edge line of the blade in the preset area. The relative offset position includes the lens angle offset, the horizontal position offset, and the vertical position offset. Determine the offset angle, the lateral offset amount, and the longitudinal offset amount between the cutting edge line of the blade and the target scale line according to the relative offset position.
[0077] Exemplarily, the preset area can be a three-dimensional space, and the coordinates corresponding to its central position are set as (0, 0, 0). Perform gray value matching within the preset area to determine the cutting edge line of the blade. Further obtain the position of the cutting edge line of the blade. Based on the central coordinates, assume that the coordinates of the cutting edge line of the blade are (-1, 2, 1). Then, determine the offset amount of the camera as follows: move 1 unit in the positive X-axis direction, move 2 units in the negative Y-axis direction, and move 1 unit in the negative Z-axis direction. After moving, determine the offset angle of the camera lens according to the included angle between the two lines. When the included angle is 0° or 180°, it is determined that the two lines coincide.
[0078] In the technical solution provided in this embodiment, by setting a preset area, performing gray value matching based on this preset area to determine the cutting edge line of the blade, and then moving the target scale line according to the cutting edge line in the preset area, finally making the two lines coincide, the cutting accuracy is improved.
[0079] Refer to Figure 4 , in the third embodiment, based on the first embodiment, the step S30 includes:
[0080] Step S31: Determine the horizontal movement amount corresponding to the camera lens according to the horizontal offset amount, where the horizontal movement amount includes a horizontal lateral movement amount and / or a horizontal longitudinal movement amount;
[0081] Step S321: Determine the horizontal lateral movement parameter of the first target movement parameter according to the horizontal lateral movement amount, and / or determine the horizontal longitudinal movement parameter of the first target movement parameter according to the horizontal longitudinal movement amount, and determine the first target movement parameter according to the horizontal lateral movement parameter and / or the horizontal longitudinal movement parameter; or determine the linear movement parameter of the first target movement parameter according to the horizontal lateral movement amount and the horizontal longitudinal movement amount, and use the linear movement parameter as the first target movement parameter.
[0082] Optionally, this embodiment provides a method for determining the target movement parameter in the horizontal direction. In this embodiment, when there is a deviation in the horizontal direction between the cutting tool and the wafer cutting position, the movement parameter of the camera is determined according to the deviation amount determined in the horizontal direction. In the actual cutting process, the cutting position deviation in the horizontal direction is a relatively common deviation. For the horizontal position deviation, there are two directions, namely the lateral direction and the longitudinal direction (i.e., the x-axis and the y-axis). Therefore, taking the midpoint of the target scale line as the origin, a two-dimensional coordinate system is established, and at least one of the corresponding horizontal lateral movement amount and the horizontal longitudinal movement amount is determined according to the horizontal offset amount between the camera and the cutting tool obtained, and the target movement parameter of the camera lens is determined according to the horizontal lateral movement amount and / or the horizontal longitudinal movement amount.
[0083] Furthermore, for the movement mode of the camera, after a target position is determined, the camera adjustment axis can move according to the horizontal and vertical coordinates of the target position respectively, that is, first move the corresponding distance horizontally and then move the corresponding distance vertically (or first move the corresponding distance vertically and then move the corresponding distance horizontally); the camera adjustment axis can also directly control the camera to move linearly to the target position according to the straight-line distance between the target position and the current position, and the specific implementation method can be set according to the actual needs in the actual cutting process.
[0084] Exemplarily, in the display interface of the cutting calibration program, the center of the blue crosshair is set as the center of the camera's field of view (i.e., the midpoint of the target scale line), the yellow line is set as the deviation distance between the cutting blade and the camera center, and scale lines are provided at both left and right ends of the display interface, which are used to measure the deviation distance. Assuming there is a deviation between the blade line and the camera center on the y-axis, after the cutting calibration program obtains the image of the blade line, it automatically determines the deviation distance between the two, and visualizes the deviation distance by the length of the yellow line. For example, if the length of the generated yellow line is 7.204 mm and the yellow line is parallel to the vertical line of the blue crosshair, it means that there is a distance error of 7.204 mm between the cutting blade line and the camera lens on the y-axis in the horizontal direction.
[0085] Among the multiple technical solutions provided in this embodiment, by determining the horizontal movement amount corresponding to the camera lens based on the horizontal offset amount, and determining the first target movement parameter associated with the camera lens according to the horizontal lateral movement amount and / or the horizontal longitudinal movement amount, when there is a deviation in the horizontal direction at the cutting position, the camera lens is adjusted to align with the cutting tool, which improves the cutting accuracy.
[0086] Refer to Figure 5 , in the fourth embodiment, based on the first embodiment, the step S30 further includes:
[0087] Step S33, determining the rotation angle corresponding to the camera lens according to the deflection angle, determining the horizontal movement amount corresponding to the camera lens according to the horizontal offset amount, and / or determining the vertical movement amount corresponding to the camera lens according to the vertical offset amount;
[0088] Step S34, determining the second target movement parameter associated with the camera lens according to the rotation angle, the horizontal movement amount, and / or the vertical movement amount.
[0089] Optionally, this embodiment provides another way to determine the target movement parameter. In addition to the relatively common position deviation in the horizontal direction mentioned in the third embodiment, in the cutting process, there will also be situations such as vertical direction and camera lens angle deviation. A deviation in the vertical direction easily causes the cutting tool to fail to cut to the target position or the cutting position to be too deep when cutting; during the wafer cutting process, when cutting and cleaving the wafer, the direction of the cleavage is fixed, so a deviation in the camera lens angle will cause an error in the cutting position, reducing the accuracy of wafer cutting. Since in each cutting calibration process, not every type of error will exist simultaneously, and the error types that often exist are at least one of them, when the cutting calibration program does not recognize this type of position error, the corresponding type of movement parameter is not generated.
[0090] Exemplarily, assume that the program determines that there is a 4 mm error between the cutting edge and the lens in the positive x-axis direction of the horizontal direction, and there is a 0.3° deflection of the lens (assuming clockwise is positive), but the deviation in the vertical direction is 0. Then the generated target movement parameters are: move 4 mm in the negative x-axis direction, and rotate the lens 0.3° counterclockwise. Since there is no deviation in the vertical direction, no vertical movement parameter is generated.
[0091] In this embodiment, by determining the rotation angle corresponding to the camera lens according to the deflection angle, determining the horizontal movement amount corresponding to the camera lens according to the horizontal offset amount, and / or determining the vertical movement amount corresponding to the camera lens according to the vertical offset amount, it covers relatively common types of position deviations, and generates corresponding position compensation data based on these types of position deviations, improving the cutting accuracy.
[0092] In addition, the present invention also provides a cutting calibration device, which includes: a splitting knife, a light source, a camera, a camera adjustment shaft, and a control circuit board. The control circuit board includes a memory, a processor, and a cutting calibration program stored on the memory and executable on the processor. When the cutting calibration program is executed by the processor, it implements the steps of the cutting calibration method described above.
[0093] Optionally, the cutting calibration device includes: a splitting knife is provided at the top of the cutting calibration device, and the splitting knife is used to perform a cutting action after calibration; the light source and the camera are provided below the splitting knife, and the camera is used to collect the cutting edge line of the splitting knife under the illumination of the light source; the camera includes a camera lens on the upper side and a camera support on the lower side, the camera lens is used for cutting calibration, and the camera support is connected to the camera adjustment shaft at the bottom; the camera adjustment shaft includes a vertical adjustment shaft, a horizontal adjustment shaft, and a rotation shaft, and the camera adjustment shaft is used to control the camera lens to perform a cutting calibration action.
[0094] In addition, the present invention also provides a computer-readable storage medium, which stores a cutting calibration program. When the cutting calibration program is executed by a processor, it implements each step of the cutting calibration method described in the above embodiment.
[0095] It should be noted that in this article, the terms "include", "comprise" or any other variant thereof are intended to cover non-exclusive inclusion, so that a process, method, article or device including a series of elements not only includes those elements, but also includes other elements not explicitly listed, or further includes elements inherent to such process, method, article or device. Without more limitations, an element defined by the statement "including one..." does not exclude the existence of another identical element in the process, method, article or device including that element.
[0096] Through the description of the above embodiments, those skilled in the art can clearly understand that the methods of the above embodiments can be implemented by means of software plus a necessary general hardware platform. Of course, they can also be implemented by hardware, but in many cases, the former is a better implementation. Based on such an understanding, the technical solution of the present invention, in essence, or the part that contributes to the prior art can be embodied in the form of a software product. This computer software product is stored in a computer-readable storage medium as described above (such as ROM / RAM, magnetic disk, optical disk), and includes several instructions for causing a terminal device (which can be a mobile phone, computer, server, air conditioner, or network device, etc.) to execute the methods described in various embodiments of the present invention.
[0097] The above are only the preferred embodiments of the present invention, and do not limit the patent scope of the present invention. Any equivalent structure or equivalent process transformation made by using the content of the specification and drawings of the present invention, or directly or indirectly applied in other related technical fields, shall be equally included in the patent protection scope of the present invention.
Claims
1. A cutting calibration method, characterized in that, The steps of the cutting calibration method include: Obtain a preset area where the edge line of the cutting edge and the target scale line at the center position of the camera lens are collected by the camera. Among them, the preset area is a three-dimensional space; Obtain the gray values corresponding to each pixel point in the preset area; Take the area corresponding to the pixel points that satisfy the preset gray matching condition and are located in the preset area among the gray values as the edge line of the cutting edge located in the preset area; Determine the relative distance between the edge line of the cutting edge and the central area of the preset area to obtain the relative offset position of the edge line of the cutting edge in the preset area; Determine the deflection angle, horizontal offset, and / or vertical offset between the edge line of the cutting edge and the target scale line according to the relative offset position; Generate target movement parameters associated with the camera lens according to the deflection angle, the horizontal offset, and / or the vertical offset; Control the camera adjustment axis according to the target movement parameters to control the coincidence of the central position of the camera lens and the cutting position of the cutting edge through the camera adjustment axis.
2. The cutting calibration method according to claim 1, wherein The step of generating the target movement parameters associated with the camera lens according to the deflection angle, the horizontal offset, and / or the vertical offset includes: Determine the horizontal movement amount corresponding to the camera lens according to the horizontal offset. Among them, the horizontal movement amount includes a horizontal lateral movement amount and / or a horizontal longitudinal movement amount; Determine the first target movement parameter associated with the camera lens according to the horizontal lateral movement amount and / or the horizontal longitudinal movement amount.
3. The cutting calibration method according to claim 2, wherein The step of determining the first target movement parameter associated with the camera lens according to the horizontal lateral movement amount and / or the horizontal longitudinal movement amount includes: Determine the horizontal lateral movement parameter of the first target movement parameter according to the horizontal lateral movement amount, and / or determine the horizontal longitudinal movement parameter of the first target movement parameter according to the horizontal longitudinal movement amount, and determine the first target movement parameter according to the horizontal lateral movement parameter and / or the horizontal longitudinal movement parameter; Or determine the linear movement parameter of the first target movement parameter according to the horizontal lateral movement amount and the horizontal longitudinal movement amount, and take the linear movement parameter as the first target movement parameter.
4. The cutting calibration method according to claim 1, wherein The step of generating the target movement parameters associated with the camera lens according to the deflection angle, the horizontal offset, and / or the vertical offset includes: Determine the rotation angle corresponding to the camera lens according to the deflection angle, determine the horizontal movement amount corresponding to the camera lens according to the horizontal offset, and / or determine the vertical movement amount corresponding to the camera lens according to the vertical offset; Determine the second target movement parameter associated with the camera lens according to the rotation angle, the horizontal movement amount, and / or the vertical movement amount.
5. A cutting calibration device, characterized in that, The cutting calibration device includes: a splitting knife, a light source, a camera, a camera adjustment shaft, and a control circuit board. The control circuit board includes a memory, a processor, and a cutting calibration program stored on the memory and executable on the processor. When the cutting calibration program is executed by the processor, it implements the steps of the cutting calibration method according to any one of claims 1-4.
6. The cutting calibration device according to claim 5, characterized in that, A splitting knife is provided at the top of the cutting calibration device, and the splitting knife is used to perform a cutting action after calibration; The light source and the camera are provided below the splitting knife, and the camera is used to collect the edge line of the cutting edge of the splitting knife under the illumination of the light source; The camera includes a camera lens on the upper side and a camera support on the lower side. The camera lens is used for cutting calibration, and the camera support is connected to the camera adjustment shaft at the bottom; The camera adjustment shaft includes a vertical adjustment shaft, a horizontal adjustment shaft, and a rotation shaft, and the camera adjustment shaft is used to control the camera lens to perform a cutting calibration action.
7. A computer-readable storage medium, characterized in that, A cutting calibration program is stored on the computer-readable storage medium. When the cutting calibration program is executed by a processor, it implements the steps of the cutting calibration method according to any one of claims 1-4.
Citation Information
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Correction method of laser cutting equipment, laser cutting equipment and storage medium
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