Ultra-precision drive system

Abstract

The present application relates to the technical field of precision driver, and provides an ultra-precision driving system, which comprises an adaptive suction unit, an execution unit, an on-off unit and a control unit, the adaptive suction unit is provided with a negative pressure driving mechanism and a liquid storage space arranged in the negative pressure driving mechanism; the execution unit is provided with an execution end and a containing cavity, the containing cavity is connected with the liquid storage space through a first flow channel and a second flow channel respectively; the on-off unit is arranged on the first flow channel and the second flow channel and can realize the reciprocating motion of the execution end; and the control unit can control the motion of the on-off unit and make the second displacement of the execution end equal to the displacement instruction or within the range of the displacement instruction. The present application realizes the error-free accumulation in the driving control process through the stable negative pressure driving, can realize the continuous ultra-precision driving control, and has the advantages of compact overall driving system, small volume and no noise.

Description

Technical Field

[0001] This invention relates to the field of precision drive technology, and more specifically, to an ultra-precision drive system. Background Technology

[0002] Existing precision actuators using sensitive materials typically employ an electromagnetic drive device external to the sensitive material. By energizing this device, a magnetic field is generated, causing deformation of the sensitive material and thus influencing the output displacement of the output rod, forming a precision displacement actuator. However, because the magnetic field generated by the electromagnetic drive device affects the deformation of the sensitive material, the material must be placed within the magnetic circuit created by the energized device. Furthermore, the energized device generates heat, causing thermal expansion of the sensitive material. For a precision displacement actuator, even minute variations can introduce errors, failing to meet the precision requirements of modern enterprises. Therefore, the traditional actuator process involves online real-time synchronous input and conversion of energy. Interference caused by fluctuations in input energy during the actuator process has a significant impact on the accuracy of the actuator's end effector. Thus, eliminating external interference and achieving more precise actuator operation is a problem that needs to be solved.

[0003] Patent document CN109889084A discloses an ultra-precision five-degree-of-freedom piezoelectric motion platform and its excitation method. The feed and attitude adjustment device consists of a mover (1), a drive unit (2), a nut (3), a lead screw (4), and a base (5). The drive unit (2) is the main drive element, used to generate bending and torsional deformation and drive the mover's three-degree-of-freedom rotational motion and single-degree-of-freedom linear motion through the drive foot or the lead screw nut. However, this design still has the defects of insufficient drive precision and high noise. Summary of the Invention

[0004] In view of the shortcomings of the prior art, the purpose of this invention is to provide an ultra-precision drive system.

[0005] An ultra-precision drive system provided by the present invention includes:

[0006] An adaptive suction unit has a negative pressure drive mechanism and a liquid storage space arranged inside the negative pressure drive mechanism.

[0007] An execution unit has an execution end and a receiving cavity, the receiving cavity being connected to the liquid storage space through a first flow channel and a second flow channel respectively;

[0008] A switching unit is configured on the first flow channel and the second flow channel, enabling the first and second flow channels to be in an open or closed state. When the first flow channel is in the open state and the second flow channel is in the closed state, under the drive of the negative pressure drive mechanism, the fluid in the liquid storage space enters the receiving cavity through the first flow channel, thereby causing the actuating end to move in a first direction. When the first flow channel is in the closed state and the second flow channel is in the open state, under the drive of the negative pressure drive mechanism, the fluid in the receiving cavity enters the liquid storage space through the second flow channel, thereby causing the actuating end to move in a second direction, the first direction being opposite to the second direction.

[0009] The control unit controls the on / off unit to move a first displacement, thereby adjusting the orifice of the first or second flow channel. The second displacement of the actuator is obtained by the first displacement and preset flow channel parameters and liquid storage space parameters. The control unit compares the second displacement with the displacement command and corrects the first displacement until the output second displacement is equal to the displacement command or within the range of the displacement command.

[0010] Preferably, the negative pressure drive mechanism includes a first negative pressure driver and a second negative pressure driver;

[0011] The first negative pressure actuator includes a first housing, a first rotating shaft, and a first rotating body. The first rotating body is rotatably mounted inside the first housing via the first rotating shaft, and forms a first negative pressure space and a first fluid space on both sides of the first rotating body.

[0012] The second negative pressure actuator includes a second housing, a second rotating shaft, and a second rotating body. The second rotating body is rotatably mounted inside the second housing via the second rotating shaft, and forms a second negative pressure space and a second fluid space on both sides of the second rotating body.

[0013] When the first flow channel is open and the second flow channel is closed, under the action of external atmospheric pressure, the first rotating body rotates in the direction where the first negative pressure space becomes smaller, thereby reducing the first fluid space. The fluid enters the receiving cavity through the first flow channel, thereby causing the actuating end to move in the first direction. When the first flow channel is closed and the second flow channel is open, under the action of external atmospheric pressure, the actuating end is driven to move in the second direction, causing the fluid in the receiving cavity to flow into the second fluid space through the second flow channel, thereby reducing the second negative pressure space.

[0014] Preferably, the first fluid space and the second fluid space together form a liquid storage space, and the second negative pressure space and the second fluid space are connected by a third flow channel equipped with a one-way valve.

[0015] When both the first and second flow channels are closed, the external force drives the first rotating body to rotate around the first axis, causing the volume of the first fluid space to increase. At this time, the fluid in the second fluid space is drawn into the first fluid space through the third flow channel and the one-way valve, causing the volume of the second negative pressure space to increase.

[0016] Preferably, the switching unit includes two switching actuators respectively installed on the first flow channel and the second flow channel; the switching actuator includes a third housing and an isolation diaphragm disposed inside the third housing and dividing the interior of the third housing into a first cavity and a second cavity;

[0017] The second cavity is wrapped with a flexible valve diaphragm, the bottom end of which is deformable. The first cavity is equipped with a vertical movement mechanism. The top end of the vertical movement mechanism is fixedly mounted on the third housing. The bottom end of the vertical movement mechanism is connected to the top end of the flexible valve diaphragm through the isolation diaphragm.

[0018] Preferably, the up-and-down movement mechanism includes a piezoelectric material and a magnetostrictive material connected in sequence. When the up-and-down movement mechanism is energized, the magnetostrictive material deforms and elongates, causing the isolation diaphragm to move toward the top of the flexible valve membrane, squeezing the flexible valve membrane and causing the deformable end to bulge outward, thereby enabling the first or second flow channel to be reduced in size or cut off. The displacement of the deformable end can be obtained by the change of the electrical signal of the piezoelectric material itself.

[0019] Preferably, the up-and-down motion mechanism uses a voice coil motor or a shape memory alloy.

[0020] Preferably, a gasket is provided on one or both sides of the isolation diaphragm, wherein the gasket is directly opposite the up-and-down movement mechanism and has an area larger than the end of the up-and-down movement mechanism that contacts the gasket;

[0021] The flexible valve diaphragm is a membrane structure made of elastic material.

[0022] Preferably, the area of ​​the second cavity near the insulating diaphragm is larger than the area of ​​the deformable end, such that the displacement of the insulating diaphragm is smaller than the displacement of the deformable end.

[0023] Preferably, the third housing has a fluid channel for controlling fluid flow. The first and second flow channels are both connected to the fluid channel, and the on / off state of the fluid channel is controlled by the deformable end to achieve control over the on / off state of the first and second flow channels.

[0024] Preferably, the on / off actuator further includes an excitation coil, a magnetic yoke, and a preload screw;

[0025] The excitation coil is arranged circumferentially along the magnetostrictive material, and the magnetic yoke is arranged outside the excitation coil;

[0026] The preload screw is installed on the third housing and can adjust the position of the up-down movement mechanism in the up-down direction.

[0027] Compared with the prior art, the present invention has the following beneficial effects:

[0028] 1. This invention achieves continuous ultra-precise drive control by combining stable negative pressure drive with upper and lower drive mechanisms, thus eliminating the single-step error accumulation that is common in stepping motion during the drive control process. The overall drive system is compact, small in size, and noiseless.

[0029] 2. The driving system of this invention can control positive and negative bidirectional displacement, and can not only release liquid but also suck up liquid, making it highly practical.

[0030] 3. The driving system of this invention has a self-sensing function, integrating driving and sensing, and has a simpler structure compared to existing technologies.

[0031] 4. This invention is based on negative pressure energy storage. After the initial state adjustment and energy injection are completed, there is no need to add power in real time during the driving process. Vacuum driving can be achieved by relying on the external atmosphere, and there is no noise.

[0032] 5. This invention can easily achieve precise control of output motion. With constant atmospheric pressure, it has the advantage of constant driving force when the cross-sectional area is fixed. Other energy sources, such as electrical energy, are not constant, resulting in higher driving precision.

[0033] 6. The up-and-down driving mechanism in this invention can adopt a structure that combines electromagnetic drive with piezoelectric materials, magnetostrictive materials, voice coil motors, shape memory alloys, cams, etc., and can be reasonably selected according to the actual application scenario and the actual driving precision of the product, thus having a wider range of applications. Attached Figure Description

[0034] Other features, objects, and advantages of the present invention will become more apparent from the following detailed description of non-limiting embodiments with reference to the accompanying drawings:

[0035] Figure 1 This is a schematic diagram of the structure of the present invention;

[0036] Figure 2 This is a schematic diagram of the structure when the valve port is fully open, with the area below the arrow being an enlarged view of the boxed part;

[0037] Figure 3 This is a structural diagram showing the valve port when it is partially open, with the area below the arrow being an enlarged view of the boxed section.

[0038] Figure 4 This is a structural diagram of the valve when it is closed, where the area below the arrow is an enlarged view of the boxed part;

[0039] Figure 5 A schematic diagram illustrating the working principle of an ultra-precision drive system within one cycle;

[0040] Figure 6 This is a schematic diagram of the adaptive suction unit in Example 2.

[0041] The diagram shows:

[0042] Adaptive suction unit 1

[0043] First shell 11

[0044] First negative pressure space 111

[0045] First Fluid Space 112

[0046] Valve port 1121

[0047] First pivot 12

[0048] First rotating body 13

[0049] Second shell 14

[0050] Second negative pressure space 141

[0051] Second fluid space 142

[0052] Second pivot 15

[0053] Second rotating body 16

[0054] Drive handle 17

[0055] Limit block 18

[0056] Execution Unit 2

[0057] Execution end 21

[0058] Accommodation cavity 22

[0059] On / off unit 3

[0060] First flow channel 101

[0061] Second flow channel 102

[0062] Third channel 103

[0063] One-way valve 1031

[0064] Third shell 31

[0065] First cavity 311

[0066] Second cavity 312

[0067] Fluid channel 313

[0068] 32 isolation diaphragm

[0069] Gasket 321

[0070] Flexible valve diaphragm 33

[0071] Deformable end 331

[0072] Magnetostrictive material 332

[0073] Piezoelectric material 333

[0074] Excitation coil 34

[0075] Magnetic yoke 35

[0076] Preload screw 36 Detailed Implementation

[0077] The present invention will now be described in detail with reference to specific embodiments. These embodiments will help those skilled in the art to further understand the present invention, but do not limit the invention in any way. It should be noted that those skilled in the art can make several changes and improvements without departing from the concept of the present invention. These all fall within the protection scope of the present invention.

[0078] Example 1:

[0079] This invention provides an ultra-precision drive system, such as Figure 1 As shown, the device includes an adaptive suction unit 1, an execution unit 2, an on / off unit 3, and a control unit. The adaptive suction unit 1 has a negative pressure drive mechanism and a liquid storage space arranged inside the negative pressure drive mechanism. The execution unit 2 has an execution end 21 and a receiving cavity 22, which is connected to the liquid storage space through a first flow channel 101 and a second flow channel 102. The on / off unit 3 is disposed on the first flow channel 101 and the second flow channel 102 and can make the first flow channel 101 and the second flow channel 102 either open or closed. When the first flow channel 101 is in the open state and the second flow channel 102 is in the closed state, the fluid in the storage space enters the receiving cavity 22 through the first flow channel 101 under the drive of the negative pressure drive mechanism, thereby causing the actuator 21 to move in the first direction; when the first flow channel 101 is in the closed state and the second flow channel 102 is in the open state, the fluid in the receiving cavity 22 enters the storage space through the second flow channel 102 under the drive of the negative pressure drive mechanism, thereby causing the actuator 21 to move in the second direction. The first direction and the second direction are opposite. It should be noted that the first direction and the second direction can be either as follows: Figure 1The direction of the straight up and down movement can also be the direction of rotation around a certain axis, or the direction of the actuator 21 moving forward or backward along a certain special path. For example, moving forward along a certain curve is the first direction, and moving backward along the curve is defined as the second direction. Therefore, in this invention, the actuator 21 can ultimately achieve reciprocating motion of multiple drive paths to achieve the effect of actual precision drive or motion function.

[0080] The control unit can control the on / off unit 3 to move a first displacement, thereby adjusting the orifice of the first flow channel 101 or the second flow channel 102. Through the first displacement and preset flow channel parameters and liquid storage space parameters, the control unit can output a second displacement of the actuator 21. The flow channel parameters include parameters such as the inner diameter of the first flow channel 101 or the second flow channel 102 and the fluid flow velocity. The liquid storage space parameters include parameters such as the cross-sectional area and the geometric shape. The control unit can correct the first displacement by comparing the second displacement with the displacement command until the output second displacement is equal to the displacement command or within the range of the displacement command, so that the actuator 21 finally outputs a precise second displacement.

[0081] The negative pressure drive mechanism includes a first negative pressure driver and a second negative pressure driver. The first negative pressure driver includes a first housing 11, a first rotating shaft 12, and a first rotating body 13. The first rotating body 13 is rotatably mounted inside the first housing 11 via the first rotating shaft 12, and a first negative pressure space 111 and a first fluid space 112 are formed on both sides of the first rotating body 13. The second negative pressure driver includes a second housing 14, a second rotating shaft 15, and a second rotating body 16. The second rotating body 16 is rotatably mounted inside the second housing 14 via the second rotating shaft 15, and a second negative pressure space 141 and a second fluid space 142 are formed on both sides of the second rotating body 16.

[0082] Furthermore, the outer wall of the first rotating body 13 is connected to the atmosphere and preferably has a double-blade structure. When the first flow channel 101 is in the open state and the second flow channel 102 is in the closed state, the external atmospheric pressure drives the first rotating body 13 to rotate in the direction where the first negative pressure space 111 becomes smaller, thereby making the first fluid space 112 smaller. The fluid enters the receiving cavity 22 through the first flow channel 101, thereby pushing the actuator 21 to move in the first direction. Figure 1 The upward-moving arrow indicates the first direction; the outer wall of the second rotating body 16 is in contact with the second fluid space 142 and is preferably a single-blade structure. When the first flow channel 101 is in the cut-off state and the second flow channel 102 is in the open state, the external atmospheric pressure drives the actuator 21 to move in the second direction, so that the fluid in the receiving cavity 22 is forced into the second fluid space 142 through the second flow channel 102. The volume of the second fluid space 142 increases, thereby pushing the second rotating body 16 to rotate and thus making the second negative pressure space 141 smaller.

[0083] Specifically, the first fluid space 112 and the second fluid space 142 together form a liquid storage space. The second negative pressure space 141 and the second fluid space 142 are connected by a third flow channel 103 equipped with a one-way valve 1031. The one-way valve 1031 only allows fluid in the second fluid space 142 to flow into the first fluid space 112 and does not allow reverse flow. When both the first flow channel 101 and the second flow channel 102 are closed, when an external force drives the first rotating body 13 to rotate around the first rotating shaft 12, causing the volume of the first fluid space 112 to increase, the fluid in the second fluid space 142 is drawn into the first fluid space 112 through the third flow channel 103 and the one-way valve 1031, causing the volume of the second negative pressure space 141 to increase. This process is the process of injecting energy into the entire system. After the energy is injected, the system relies on the negative pressure spaces of the first negative pressure space 111 and the second negative pressure space 141, and under the action of external atmospheric pressure, the actuator 21 can move without the need for power.

[0084] The first negative pressure space 111, the first fluid space 112, the second negative pressure space 141, and the second fluid space 142 are preferably fan-shaped spaces, which can achieve a more integrated shape and is conducive to the miniaturization design of the product. In practical applications, other geometric shapes of spaces can also be used, and the specific design can be flexibly determined according to the actual application scenario.

[0085] The switching unit 3 includes two switching actuators respectively installed on the first flow channel 101 and the second flow channel 102. The switching actuator includes a third housing 31 and an isolation diaphragm 32 arranged inside the third housing 31 and dividing the interior of the third housing 31 into a first cavity 311 and a second cavity 312. The second cavity 312 is wrapped with a flexible valve diaphragm 33. The bottom end of the flexible valve diaphragm 33 is preferably a conical deformable end 331. The first cavity 311 is provided with a vertical movement mechanism. The vertical movement mechanism drives the isolation diaphragm 32 to move toward or away from the flexible valve diaphragm 33, so that the deformable end 331 can be deformed to achieve the action of fully opening, partially opening or fully cutting off the first flow channel 101 and the second flow channel 102.

[0086] Furthermore, the top end of the up-and-down motion mechanism is fixedly mounted on the third housing 31, and the bottom end of the up-and-down motion mechanism is connected to the top end of the flexible valve diaphragm 33 through the isolation diaphragm 32. It should be noted that a gasket 321 is provided at the part of the isolation diaphragm 32 that connects to the up-and-down motion mechanism, which can effectively protect the isolation diaphragm 32 from damage. At the same time, gaskets 321 are added to both the upper and lower sides of the isolation diaphragm 32, so that the up-and-down motion mechanism can contact the isolation diaphragm 32 through the gaskets 321 when it moves. Even if the cross-sectional area of ​​the up-and-down motion mechanism is small, the contact area between the gaskets 321 and the isolation diaphragm 32 can be guaranteed, which plays the role of expanding the contact area. Among them, the isolation diaphragm 32 is more flexible than the gasket 321, making the driving amplification effect more obvious.

[0087] In this embodiment, the up-and-down movement mechanism includes a piezoelectric material 333 and a magnetostrictive material 332 connected in sequence. When the up-and-down movement mechanism is energized, the magnetostrictive material 332 deforms and elongates, causing the isolation diaphragm 32 to move toward the top of the flexible valve diaphragm 33 and squeeze the flexible valve diaphragm 33, thereby causing the deformable end 331 to bulge outward, which can cut off the first flow channel 101 or the second flow channel 102. The displacement of the deformable end 331, i.e., the first displacement, can be obtained by the change of the electrical signal of the piezoelectric material 333 itself. For the formed product, the first displacement and the second displacement have a certain correspondence. By calculating or extracting experimental data, the correspondence between the change of the electrical signal of the piezoelectric material 333 itself and the second displacement can be obtained, and the value of the second displacement can also be determined.

[0088] In practical applications, the up-and-down motion mechanism can be selected from a variety of structures, such as motors, such as voice coil motors, linear motors, rotary motors, etc., as well as air pumps, hydraulic pumps, electromagnetic actuators, etc. It can also be a composite structure of magnetostrictive materials and piezoelectric materials, or thermal expansion materials, such as shape memory alloys and phase change materials. Shape memory alloys can deform by heating and the second displacement can be determined by the change of their own stiffness. In drives where the required precision is not very high, the up-and-down motion mechanism can also be selected from a cam structure, and the movement of the isolation diaphragm 32 can be adjusted by the rotation of the cam.

[0089] Specifically, the isolation diaphragm 32 adopts a metal or non-metal sheet structure. When the up and down moving mechanism deforms or moves, it can drive the flexible valve diaphragm 33 to deform to achieve the purpose of driving. The flexible valve diaphragm 33 is a membrane structure made of elastic material. This membrane structure is a closed capsule structure. The material is such as rubber, silicone, elastic metal, etc. It is preferably made of PDMS membrane and PMMA material layer disposed on both sides of PDMS membrane. PDMS membrane is a fully transparent, high-precision thin film material made by cross-linking and curing PDMS silicone rubber. The thickness ranges from 15 to 500 μm and has excellent tensile resilience. PMMA material layer is disposed on both sides of PDMS membrane. The PMMA material layer is preferably bonded to both sides of PDMS membrane and pressed together, which is simple to manufacture.

[0090] The area of ​​the second cavity 312 on the side closer to the isolation diaphragm 32 is larger than the area of ​​the deformable end 331, so that the movement displacement of the isolation diaphragm 32 is smaller than the movement displacement of the deformable end 331, thus amplifying the displacement of the up and down movement mechanism and manifesting it on the deformable end 331.

[0091] It should be noted that the area of ​​the second cavity 312 near the isolating diaphragm 32 is larger than the area of ​​the deformable end 331, making the displacement of the isolating diaphragm 32 smaller than that of the deformable end 331. Therefore, the second cavity 312 is a hydraulic amplification chamber, where a small displacement of the isolating diaphragm 32 can drive a larger displacement of the deformable end 331. When the on / off actuator operates, the PDMS diaphragm displaces, causing a change in fluid pressure within the hydraulic amplification chamber. The PDMS diaphragm undergoes parabolic deformation of varying degrees in the direction of the liquid microchannel. The driving pressure corresponds to the opening degree of the valve port 1121, resulting in the valve port 1121 being fully open, partially open, or closed. Figure 2 As shown, this is the state when valve port 1121 is fully open. Figure 3 As shown, this is the state when valve port 1121 is partially open. Figure 4 As shown, the valve port 1121 is closed, which corresponds to the first flow channel 101 and / or the second flow channel 102 being cut off. When the pressure inside the second cavity 312 increases, the flexible valve diaphragm 33 deforms more, and the opening of the valve port 1121 decreases. When the pressure inside the second cavity 312 decreases, the flexible valve diaphragm 33 deforms less, and the opening of the valve port 1121 increases.

[0092] Furthermore, the up-and-down motion mechanism contacts the flexible valve diaphragm 33 through the isolation diaphragm 32. During the flow control process, the flexible valve diaphragm 33 generates a micro-displacement to squeeze the fluid in the second cavity 312, causing the fluid pressure to change, which in turn causes the flexible valve diaphragm 33 to deform, thereby controlling the flow of fluid in and out of the fluid channel 313.

[0093] The third housing 31 of the present invention has a fluid channel 313 for controlling the flow of fluid. The first flow channel 101 and the second flow channel 102 are both connected to the fluid channel 313 and the flow channel 313 is controlled by the deformable end 331 to control the flow of fluid and thus control the flow of the first flow channel 101 and the second flow channel 102.

[0094] The on / off actuator also includes an excitation coil 34, a magnetic yoke 35, and a preload screw 36. The excitation coil 34 is arranged circumferentially along the magnetostrictive material 332, and the magnetic yoke 35 is arranged outside the excitation coil 34. The preload screw 36 is mounted on the third housing 31 and can adjust the position of the up and down movement mechanism in the up and down direction. A permanent magnet can also be provided on the on / off actuator to provide a bias magnetic field for the up and down movement mechanism, ensuring that the fluid channel 313 is in the closed state in the initial state.

[0095] It should be noted that in certain application scenarios, the structure of the on / off unit 3 of the ultra-precision drive system of the present invention can be simplified and replaced with a general clamp. Both the first flow channel 101 and the second flow channel 102 are made of flexible tubes. The opening and closing functions of the first flow channel 101 and the second flow channel 102 can be realized through the simple clamp, which can greatly simplify the system and make it convenient to use.

[0096] This invention employs a quasi-static zero-mile gradient driving method to achieve driving, with offline energy injection. This ensures that the energy injection process, which may involve disturbances, is independent of the driving control process. There are two methods for injecting driving energy: one is to directly drive the first rotating body 13 to rotate, thus expanding the first negative pressure space 111 and creating an internal negative pressure space; the other is to first connect the first negative pressure space 111 to the external atmosphere, then rotate the first rotating body 13 to a set position, isolate the first negative pressure space 111 from the outside, and then evacuate the interior to achieve offline energy injection. After the driving energy injection is complete, closed-loop driving can begin. Because the negative pressure energy driving energy release is stable, steady-state energy output accompanies the driving control process. The driving force during the driving process is a static force without fluctuations, and no real-time power supply is required. The driving force does not change with changes in parameters such as spatial position, greatly improving stability.

[0097] Example 2:

[0098] This embodiment is a preferred example of Embodiment 1.

[0099] In this embodiment, as Figure 6 As shown, both the first housing 11 and the second housing 14 are cylinders and each consists of upper and lower parts. During assembly, the two parts can be sealed together using bolts and gaskets. The first rotating body 13 is a double-blade structure that can rotate around the axis of the first rotating shaft 12, and the second rotating body 16 is a single-blade structure that can rotate around the axis of the second rotating shaft 15. In actual products, the first rotating body 13 can be fixedly connected to the first rotating shaft 12, and the second rotating body 16 can be fixedly connected to the second rotating shaft 15. The ends of the first rotating shaft 12 and the second rotating shaft 15 extend to the outside of the housing and are respectively equipped with drive handles 17. By operating the drive handles 17, the rotation of the first rotating shaft 12 or the second rotating shaft 15 can be achieved, thereby realizing the operation of rotating bodies rotating around the axis. The drive handles 17 can be operated manually or automatically through a power source and a set software program. The specific application should be flexible according to the actual scenario.

[0100] During the rotation of the first rotating body 13 and the second rotating body 16, the stroke of the rotating body is limited by the limiting block 18 installed inside the first housing 11 or the second housing 14 to meet the actual needs.

[0101] During the specific energy injection process, pushing the drive handle 17 creates a negative pressure chamber within the single or double-blade cylinder to store energy. The amount of energy injected at one time depends on the size of the negative pressure chamber, and the driving force depends on the cross-sectional area of ​​the rotating blades within the cylinder. Without considering friction, the driving pressure is equivalent to standard atmospheric pressure, and the release of negative pressure energy is more stable compared to existing energy sources such as motors.

[0102] When the up-and-down motion mechanism is working, the magnetostrictive material 332 deforms and acts on the isolation diaphragm 32. Due to the presence of the reaction force, it eventually acts on the piezoelectric material 333, which generates a corresponding change in electrical signal, thereby enabling the measurement of the first displacement.

[0103] like Figure 5 As shown, the working principle of the ultra-precision drive system within one cycle is as follows:

[0104] Initial state: Figure 5 As shown in (1), fluid is pre-injected into the second fluid space 142 inside the single-blade cylinder, and the first flow channel 101 and the second flow channel 102 are both in the closed state, cutting off the passage between the adaptive suction unit 1 and the execution unit 2, and the displacement of the execution end 21 is in the initial self-locking 0 state.

[0105] Energy Injection: Figure 5 As shown in (2), the energy injection process is a one-time offline process. The drive handle 17, which is fixed to the first rotating shaft 12 of the double-blade cylinder, is pushed. The fluid in the single-blade cylinder flows into the first fluid space 112 in the double-blade cylinder through the third flow channel 103 and the one-way valve 1031. At the same time, negative pressure chambers for storing steady-state energy are formed in the two cylinders, namely the first negative pressure space 111 and the second negative pressure space 141.

[0106] Negative drive execution: Figure 5 As shown in (3), the end effector is negatively displaced, that is, the actuator 21 moves in the second direction. By controlling the drive current of the up and down movement mechanism, the first flow channel 101 connecting the first fluid space 112 in the double-blade cylinder and the receiving cavity 22 in the actuator 2 is closed, and the second flow channel 102 connecting the second fluid space 142 in the single-blade cylinder and the receiving cavity 22 in the actuator 2 is opened. The fluid in the end effector is sucked back into the second fluid space 142 in the single-blade cylinder under the action of the second negative pressure space 141, and the end effector generates a negative displacement.

[0107] Forward-driven execution: Figure 5 As shown in (4), the end effector is positively displaced, that is, the execution end 21 moves in the first direction, controlling the drive current of the up and down motion mechanism, so that the first flow channel 101 is opened and the second flow channel 102 is closed. The fluid in the first fluid space 112 in the double blade cylinder is pushed into the receiving cavity 22 in the execution unit 2 under the action of the first negative pressure space 111, and the end effector generates positive displacement.

[0108] Resetting the negative and positive drive execution completely eliminates the negative pressure chambers in the single-blade and double-blade cylinders, exhausts the drive energy, and closes all flow channels. Figure 5As shown in (5), it completes a whole cycle of operation.

[0109] The ultra-precision drive system in this invention can drive the execution end 21 offline by injecting energy into the negative pressure drive mechanism. It does not require real-time power supply, and the driving force is stable, enabling precise control.

[0110] In the description of this application, it should be understood that the terms "upper", "lower", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing this application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this application.

[0111] Specific embodiments of the present invention have been described above. It should be understood that the present invention is not limited to the specific embodiments described above, and those skilled in the art can make various changes or modifications within the scope of the claims, which do not affect the essence of the present invention. Unless otherwise specified, the embodiments and features described in this application can be arbitrarily combined with each other.

Claims

1. An ultra-precision drive system, characterized by, The application relates to an adaptive suction unit (1) comprising a negative pressure driving mechanism and a liquid storage space arranged inside the negative pressure driving mechanism; an execution unit (2) comprising an execution end (21) and a containing cavity (22) connected with the liquid storage space through a first flow channel (101) and a second flow channel (102) respectively; an on-off unit (3) arranged on the first flow channel (101) and the second flow channel (102) and capable of making the first flow channel (101) and the second flow channel (102) in an open state or a cut-off state, wherein when the first flow channel (101) is in the open state and the second flow channel (102) is in the cut-off state, the fluid in the liquid storage space enters the containing cavity (22) through the first flow channel (101) under the driving of the negative pressure driving mechanism, and the execution end moves towards a first direction; when the first flow channel (101) is in the cut-off state and the second flow channel (102) is in the open state, the fluid in the containing cavity (22) enters the liquid storage space through the second flow channel (102) under the driving of the negative pressure driving mechanism, and the execution end moves towards a second direction, the first direction being opposite to the second direction; a control unit capable of controlling the on-off unit (3) to move a first displacement and adjust the aperture of the first flow channel (101) or the second flow channel (102), and obtaining a second displacement of the execution end (21) through the first displacement and preset flow channel parameters and liquid storage space parameters, wherein the control unit corrects the first displacement by comparing the second displacement with a displacement instruction until the output second displacement is equal to the displacement instruction or is within the range of the displacement instruction. The negative pressure driving mechanism comprises a first negative pressure driver and a second negative pressure driver. The first negative pressure driver comprises a first shell (11), a first rotating shaft (12) and a first rotating body (13), the first rotating body (13) is rotatably arranged in the interior of the first shell (11) through the first rotating shaft (12) and forms a first negative pressure space (111) and a first fluid space (112) on both sides of the first rotating body (13); the second negative pressure driver comprises a second shell (14), a second rotating shaft (15) and a second rotating body (16), the second rotating body (16) is rotatably arranged in the interior of the second shell (14) through the second rotating shaft (15) and forms a second negative pressure space (141) and a second fluid space (142) on both sides of the second rotating body (16). ​ ​ 2. The ultra-precision drive system according to claim 1, wherein, ​ ​ ​ When the first flow channel (101) is in an open state and the second flow channel (102) is in a cut-off state, the first rotating body (13) is driven to rotate towards the direction in which the first negative pressure space (111) becomes smaller under the action of the external atmospheric pressure, and the first fluid space (112) becomes smaller, so that the fluid enters the accommodating cavity (22) through the first flow channel (101), and the execution end moves in the first direction; when the first flow channel (101) is in a cut-off state and the second flow channel (102) is in an open state, the execution end is driven to move in the second direction under the action of the external atmospheric pressure, so that the fluid in the accommodating cavity (22) flows into the second fluid space (142) through the second flow channel (102), and the second negative pressure space (141) becomes smaller.

3. The ultra-precision drive system according to claim 2, wherein, The first fluid space (112) and the second fluid space (142) jointly constitute a liquid storage space, and the first fluid space (112) and the second fluid space (142) are connected through a third flow channel (103) provided with a one-way valve (1031); When the first flow channel (101) and the second flow channel (102) are both closed, when the first rotating body (13) is driven to rotate around the first rotating shaft (12) to make the first fluid space (112) become larger, the fluid in the second fluid space (142) is sucked into the first fluid space (112) through the third flow channel (103) and the one-way valve (1031), so that the second negative pressure space (141) becomes larger.

4. The ultra-precision drive system according to claim 1, wherein, The on-off unit (3) comprises two on-off actuators respectively installed on the first flow channel (101) and the second flow channel (102); the on-off actuators comprise a third shell (31) and a separation diaphragm (32) arranged inside the third shell (31) and dividing the inside of the third shell (31) into a first cavity (311) and a second cavity (312). The outside of the second cavity (312) is wrapped with a flexible valve film (33), the bottom end of the flexible valve film (33) is a deformable end (331), the inside of the first cavity (311) is provided with an up-down movement mechanism, the top end of the up-down movement mechanism is fixedly installed on the third shell (31), and the bottom end of the up-down movement mechanism is connected to the top end of the flexible valve film (33) through the separation diaphragm (32).

5. The ultra-precision drive system according to claim 4, wherein, The up-down movement mechanism comprises a piezoelectric material (333) and a magnetostrictive material (332) connected in sequence, when the up-down movement mechanism is powered on, the magnetostrictive material (332) deforms and elongates by itself, so that the separation diaphragm (32) moves towards the top end of the flexible valve film (33) and extrudes the flexible valve film (33), and the deformable end (331) protrudes outward, so that the first flow channel (101) or the second flow channel (102) can be made smaller or cut off, and the displacement of the deformable end (331) is obtained through the change of the electric signal of the piezoelectric material (333) itself.

6. The ultra-precision drive system according to claim 4, wherein, The up-down movement mechanism adopts a motor or a thermal expansion material.

7. The ultra-precision drive system according to claim 4 or 5, wherein, The isolation diaphragm (32) is provided with a gasket (321) on one side or both sides, wherein the gasket (321) is opposite to the up-down movement mechanism and has an area greater than that of the end of the up-down movement mechanism in contact with the gasket (321); The flexible valve diaphragm (33) is a membrane structure made of elastic material.

8. The ultra-precision drive system according to claim 5, wherein, The area of the second cavity (312) near one side of the isolation diaphragm (32) is greater than that of the deformable end (331), so that the movement displacement of the isolation diaphragm (32) is less than that of the deformable end (331).

9. The ultra-precision drive system of claim 5, wherein, The third housing (31) has a fluid channel (313) inside for controlling fluid flow, and the first flow channel (101) and the second flow channel (102) are connected to the fluid channel (313) and control the opening and closing of the first flow channel (101) and the second flow channel (102) by controlling the opening and closing of the fluid channel (313) through the deformable end (331).

10. The ultra-precision drive system of claim 5, wherein, The on-off actuator further comprises an excitation coil (34), a magnetic yoke (35), and a pre-press screw (36); The excitation coil (34) is arranged along the circumference of the magnetostrictive material (332), and the magnetic yoke (35) is arranged outside the excitation coil (34); The pre-press screw (36) is installed on the third housing (31) and can adjust the position of the up-down direction of the up-down movement mechanism.

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