A silicon insulation barrel for a vertical oxidation furnace

Abstract

The present invention discloses a silicon insulation barrel of a vertical oxidation furnace, comprising a base, a top seat and at least three groove rods vertically installed between the base and the top seat, a plurality of fins are arranged between the base and the top seat, and a plurality of accommodating grooves are provided on the groove rods along the height direction of the insulation barrel, wherein an opening for inserting the fins into the accommodating grooves is provided between two groove rods, at least one groove rod is provided with a drainage groove connecting the plurality of accommodating grooves, a groove rod for installing the drainage groove is provided on the base, a water collecting groove for receiving water droplets is provided on the supporting part, the water collecting groove is connected to the outside world and is provided with a drainage pipe, the fins are plugged into the accommodating groove through the opening, so as to facilitate the installation of the fins, and the drainage groove on the groove rod is used to drain the water droplets condensed on the fins into the water collecting groove of the supporting part, and then the water is discharged outward through the drainage pipe, so as to prevent the water droplets from passing through the base and the process door and contacting the components, thereby causing damage to the components, thereby achieving protection of the components.

Description

Technical Field

[0001] The present invention relates to the technical field of heat preservation devices for semiconductor vertical furnaces, in particular to a silicon heat preservation barrel for a vertical oxidation furnace. Background Art

[0002] A vertical furnace is a process equipment used for semiconductor silicon wafer processing. Silicon wafer processing is a very precise process, and temperature is a very important indicator in the silicon wafer processing process, which directly affects the thickness and uniformity of the silicon wafer film.

[0003] To maintain a stable temperature within the vertical furnace's thermal reaction tubes and enhance thermal insulation, a heat preservation barrel is installed. During the process, the heat preservation barrel, located beneath the furnace's thermal reaction tubes, supports the silicon wafer carriers and provides thermal insulation. After the process is complete, the heat preservation barrel cools down to ambient temperature along with the wafer carriers.

[0004] When silicon wafers undergo a wet oxygen process in an oxidation furnace, the primary reactions involve H2 + O2 → H2O and Si + H2O → SiO2 + H2. Excess water vapor or water vapor that does not participate in the reaction is discharged from the exhaust pipe along with the airflow. If the process temperature is low, excessive water droplets are generated. After the process is completed, the water droplets will flow down the process door during the cooling process, causing damage to cables and components below the process door. On the other hand, if the process temperature is high and the heat capacity of the insulation barrel is small, the temperature at the process door is too high, which may cause damage to the sealing components of the process door due to heat radiation.

[0005] As shown in the existing insulation barrel with patent number CN103871940B, a number of detachable fins are provided in the insulation barrel, which are installed on the base of the insulation barrel through pillars, and the number of fins is adjusted according to the different wet oxygen process temperature requirements. This is to reduce the water droplets generated during the low-temperature process and the impact of the high-temperature process on the equipment. When adjusting the number of fins in the insulation barrel in this patent, the fins can only be taken out from top to bottom in sequence, and one of the fins cannot be pulled out at will. When the number of fins is small, the fins are mainly distributed at the bottom of the pillars, which will cause uneven temperature at the bottom and top of the insulation barrel. At the same time, the insulation barrel in this patent cannot effectively prevent water droplets from contacting the process door and the components on the bottom side of the process door.

[0006] Therefore, how to design a silicon insulation barrel to solve the problem of water droplets damaging components on the lower side of the process door has become a technical problem that needs to be urgently solved by those skilled in the art. Summary of the Invention

[0007] In order to solve at least one of the technical problems mentioned in the background technology, the purpose of the present invention is to provide a silicon insulation tube for a vertical oxidation furnace to solve the problem of water droplets damaging components on the lower side of the process door.

[0008] To achieve the above object, the present invention provides the following technical solutions:

[0009] A silicon insulation barrel of a vertical oxidation furnace comprises a base, a top seat and at least three groove rods vertically installed between the base and the top seat, a plurality of fins are provided between the base and the top seat, and the groove rods are provided with a plurality of receiving grooves arranged along the height direction of the insulation barrel, wherein an opening for inserting the fins into the receiving grooves is provided between two of the groove rods, at least one of the groove rods is provided with a drainage groove connecting the plurality of receiving grooves, at least one supporting member is provided on the base, the supporting member is used to install the groove rod with the drainage groove, the supporting member is provided with a water collecting groove for receiving water droplets, and the water collecting groove is connected to the outside world and is provided with a drainage pipe.

[0010] Furthermore, the receiving groove is tilted and the angle between it and the base is between 5° and 20°, and the drainage groove is located on a groove rod on one side of the lowest position of the receiving groove.

[0011] Furthermore, at least two limiting posts extending vertically upward are provided in the receiving groove, and the limiting posts abut against outer edges of the fins to reserve a gap between the fins and the side walls of the receiving groove.

[0012] Furthermore, the supporting member includes a downwardly recessed mounting groove, the bottom wall of the mounting groove is higher than the bottom wall of the water collecting groove, and a drain port for water supply and discharge is provided between the mounting groove and the water collecting groove.

[0013] Furthermore, the base is provided with a receiving groove for placing the supporting member, the bottom wall of the water collecting groove is provided with a plurality of drainage holes, the bottom wall of the receiving groove is provided with a drainage port penetrating downward, and the drainage pipe is installed in the drainage port.

[0014] Furthermore, a first top column plugged into the vertical furnace is installed at the bottom of the base.

[0015] Furthermore, a first air hole is provided on the base, and a second air hole is provided on the top seat. The first air hole and the second air hole are used for air circulation of the heat preservation tube.

[0016] Furthermore, the base, top seat, bearing member, groove rod and fin are all made of silicon material.

[0017] Compared with the prior art, the present invention has the following advantages: the present invention can insert the fin into the receiving groove through the opening, which facilitates the installation of the fin. Compared with the traditional method of inserting the fins from top to bottom in sequence between several groups of groove rods, it is more convenient and can realize the rapid removal of the fins.

[0018] The drainage grooves on the groove rods are used to drain the condensed water droplets on the fins into the water collecting grooves of the carrier, and then the water is discharged outward through the drainage pipe. This prevents the water droplets from passing through the base and process door and contacting the components during the low-temperature process, thereby preventing the components from being damaged. This achieves protection for the components. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] Figure 1 It is a structural schematic diagram of the present invention;

[0020] Figure 2 An exploded view of the present invention;

[0021] Figure 3 is a cross-sectional view of the present invention;

[0022] Figure 4 for Figure 3 Schematic diagram of the enlarged structure of A;

[0023] Figure 5 It is a structural schematic diagram of the carrier of the present invention;

[0024] Figure 6 This is a schematic structural diagram of Example 2 of the present invention;

[0025] Figure 7 for Figure 6 Top view of .

[0026] In the figure: 1. Base; 11. Storage slot; 111. Limiting edge; 12. First mounting hole; 13. Drainage outlet; 14. First air hole; 2. Top seat; 21. Second air hole; 23. Second mounting hole; 3. Carrying member; 31. Water collecting trough; 32. Mounting slot; 33. Drainage outlet; 34. Drainage hole; 35. Carrying edge; 4. First groove rod; 41. First receiving slot; 42. Drainage slot; 5. Second groove rod; 51. Second receiving slot; 6. Fin; 7. Limiting column; 8. Positioning bolt; 9. Drainage pipe; 10. First top column; 101. Second top column. DETAILED DESCRIPTION

[0027] The following is a clear and complete description of the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making any creative efforts are within the scope of protection of the present invention.

[0028] This embodiment provides a silicon insulation barrel for a vertical oxidation furnace, which is mainly used to solve the problem of water droplets damaging components on the lower side of a process door.

[0029] Example 1:

[0030] like Figure 1 As shown, it includes a base 1, a top seat 2 and three groove rods vertically installed between the base 1 and the top seat 2. In this embodiment, the base 1 and the top seat 2 are circular, and the three groove rods are distributed circumferentially on the base 1. Among the three groove rods, one is the first groove rod 4 and the other two are the second groove rods 5. The connecting line of the two second groove rods 5 passes through the axis of the base 1. Several groups of fins 6 arranged along the height direction of the insulation barrel are provided between the three groove rods. Several groups of receiving grooves arranged along the height direction of the insulation barrel are opened on the groove rods. An opening for the fin 6 to be inserted into the receiving groove is formed between the two second groove rods 5, thereby facilitating the insertion of the fin 6 into the receiving groove.

[0031] In order to gather the water droplets on the fin 6, in this embodiment, Figure 4 and Figure 5 As shown, the several receiving grooves on the first groove bar 4 are first receiving grooves 41, and the first groove bar 4 is provided with a drainage groove 42 connecting the several first receiving grooves 41. The base 1 is provided with a supporting member 3 for mounting the first groove bar 4, and the supporting member 3 is provided with a water collecting groove 31 for receiving water droplets drained through the drainage groove 42. A drainage pipe 9 is provided between the water collecting groove 31 and the outside world, and the supporting member 3 is used to receive the water droplets condensed on the fin 6, and then discharged outward through the drainage pipe 9 to prevent the water droplets from penetrating the process door and contacting the components.

[0032] In order to gather the water droplets condensed on the fins 6 to the drainage grooves 42, in this embodiment, as shown in FIG. Figure 3 As shown, the receiving groove on the second groove bar 5 is the second receiving groove 51, the first receiving groove 41 on the first groove bar 4 and the two second receiving grooves 51 on the two second groove bars 5 form a group of receiving grooves, wherein the receiving grooves in the same group are tilted and the angle between them and the base 1 is between 5° and 20°. At this time, the tilted setting of the receiving groove allows the lowest end of the fin 6 to be inserted into the first receiving groove 41, as shown in FIG. Figure 3 As shown, the fin 6 is in an inclined state. When water droplets condense on the fin 6, the water droplets flow toward the first receiving groove 41 under the action of their own gravity, and then gather toward the drainage groove 42 to collect the water droplets on the fin 6. In this embodiment, the inclination angle of the receiving groove is 8°.

[0033] If the same set of receiving slots are on the same horizontal plane, the fins 6 are in a horizontal position. Since the opening between the two second groove bars 5 is 180 degrees, the installation of the fins 6 is facilitated. However, there is a certain drawback. When the entire insulation barrel is tilted toward the opening, the fins 6 located inside the receiving slots are prone to falling downward, causing the fins 6 to separate from the groove bars. However, in this embodiment, the receiving slots are set to be tilted upward at 8°. When the insulation barrel is placed vertically in a vertical furnace, the stability of the fins 6 can be improved. This prevents the fins 6 from separating from the receiving slots of the groove bars.

[0034] Since the fin 6 is placed inside the receiving groove, when the bottom end of the fin 6 is in the first receiving groove 41 and abuts against the side wall of the first receiving groove 41, the water droplets gathered on the fin 6 are not easy to fall off from the fin 6. Figure 4 As shown, two limiting columns 7 are provided in the first receiving groove 41, and the two limiting columns 7 are distributed circumferentially. When the fin 6 is inserted into the first receiving groove 6, the fin 6 and the two limiting columns 7 are abutted against each other, thereby preventing the fin 6 from contacting the bottom wall of the first receiving groove 41. At this time, when the water droplets on the fin 6 move to the lowest point of the fin 6, the water droplets can easily separate from the fin 6 under the action of gravity.

[0035] In order to facilitate the discharge of water droplets on the carrier 3, in this embodiment, as shown in FIG. Figure 4 As shown, a mounting groove 32 is further provided on the bearing member 3, and the first groove rod 4 is inserted into the mounting groove 32 from top to bottom. A drain port 33 is provided between the mounting groove 32 and the water collecting groove 31, and the bottom wall of the mounting groove 32 is higher than the bottom wall of the water collecting groove 31. When water droplets flow from the drainage groove 42 at the bottom end of the first groove rod 4 to the inside of the mounting groove 32, the water droplets flow to the water collecting groove 31 through the drain port 33 to prevent water droplets from accumulating inside the mounting groove 32. Since the water collecting groove 31 is connected to the outside world by a drainage pipe 9, it is convenient to drain the water inside the water collecting groove 31 outward.

[0036] In order to realize the installation of the bearing member 3, in this embodiment, as shown in FIG. Figure 4 As shown, the base 1 is provided with a downwardly recessed receiving groove 11, and the top of the receiving groove 11 is provided with a limiting edge 111. Figure 5 As shown, the upper end of the carrier 3 is provided with a carrying edge 35, and the carrying edge 35 is placed on the limiting edge 111 to support the carrier 3. Threaded holes are provided on the carrying edge 35 and the limiting edge 111, and the carrier 3 is fixed in the receiving groove 11 by a positioning bolt 8.

[0037] In order to facilitate the collection of water flow, in this embodiment, Figure 4As shown, the bottom wall of the receiving tank 11 is provided with a drain port 13 extending downward, and the bottom wall of the water collecting tank 31 is provided with a plurality of drain holes 34. The water inside the water collecting tank 31 enters the receiving tank 11 through the drain holes 34. The end of the drain pipe 9 is installed in the drain port 13 and the surrounding wall forms a seal. At this time, the water inside the receiving tank 11 flows out through the drain pipe 9.

[0038] In order to realize the installation of the second groove bar 5, in this embodiment, as shown in FIG. Figure 2 As shown, the base 1 is provided with two downwardly recessed first mounting holes 12, as shown in FIG. Figure 3 As shown, three upwardly recessed second mounting holes 23 are provided on the top seat 2, wherein the second mounting holes 23 are used for plugging the first groove rod 4 and the two second groove rods 5, thereby realizing the assembly of the heat preservation barrel.

[0039] In this embodiment, in order to install the heat preservation barrel on the equipment of the vertical furnace, as shown in FIG. Figure 1 and Figure 3 As shown, four circumferentially distributed first top columns 10 are fixed to the bottom of the base 1. The bottom of the first top column 10 is lower than the lowest position of the drain pipe, which can prevent the drain pipe 9 from interfering with the vertical furnace.

[0040] like Figure 3 As shown, four second top columns 101 extending upward are fixedly provided on the top of the top seat 2 , and the second top columns 101 are used for positioning with the silicon wafer carrier.

[0041] In order to realize air circulation at the position of the insulation barrel, a first air hole 14 is provided at the center position of the base 1, and a second air hole 21 is provided at the center position of the top seat 2. The first air hole 14 and the second air hole 21 enable the high-temperature gas of the vertical furnace to circulate at the position of the insulation barrel.

[0042] Example 2:

[0043] The difference between Example 2 and Example 1 is that the receiving grooves in the three groove bars are arranged horizontally. Figure 6 As shown, the three groove rods are provided with a drainage groove 42 that connects the receiving groove, and the base 1 is provided with three receiving grooves 11, as shown Figure 7 As shown, three receiving grooves 11 are provided with a carrier 3 inside, and the bottom of each receiving groove 11 is connected to the outside by a drainage pipe 9. Here, the receiving groove is changed to a horizontal setting, so that the fins 6 are also in a horizontal state, and a drainage groove 42 is opened on each groove rod to facilitate the collection of water droplets.

[0044] The fins 6 in Examples 1 and 2 are not affected by being in a horizontal or tilted state, and when the number of fins 6 needs to be changed, the fins can be directly pulled out from the openings of the two second groove bars 5. Compared with the prior art, there is no need to remove the top seat and then reduce the number of fins from top to bottom. This improves the efficiency of fin removal. In this embodiment, when the fins are pulled out of the insulation bucket, the corresponding fins can be selectively pulled out, so that the fins reserved in the insulation bucket are evenly distributed, which can improve the insulation effect.

[0045] In Examples 1 and 2, the base 1, top seat 2, support 3, groove rods and fins 6 are all made of silicon material, so that the heat capacity of the insulation barrel can be consistent with the heat capacity of the silicon wafer carrier, can withstand higher temperatures, make the support position less likely to deform, and will not cause pollution to the silicon wafer, thereby improving the processing quality of the silicon wafer.

[0046] It will be apparent to those skilled in the art that the present invention is not limited to the details of the exemplary embodiments described above and that the invention can be embodied in other specific forms without departing from the spirit or essential characteristics of the invention. Therefore, the embodiments should be considered in all respects as illustrative and non-restrictive, and the scope of the invention is defined by the appended claims rather than the foregoing description, and it is intended that all variations that come within the meaning and range of equivalents of the claims be embraced therein.

Claims

1. A silicon heat-insulating barrel of a vertical oxidation furnace, comprising a base (1), a top seat (2), and at least three groove rods vertically installed between the base (1) and the top seat (2), wherein a plurality of fins (6) are provided between the base (1) and the top seat (2), characterized in that: The groove rod is provided with a plurality of receiving grooves arranged along the height direction of the heat preservation barrel, wherein an opening for inserting the fin (6) into the receiving groove is provided between two groove rods, and at least one groove rod is provided with a drainage groove (42) connecting the plurality of receiving grooves, and the base (1) is provided with at least one bearing member (3), the bearing member (3) is used to install the groove rod with the drainage groove (42), and the bearing member (3) is provided with a water collecting groove (31) for receiving water droplets, and the water collecting groove (31) is connected to the outside and provided with a drainage pipe (9); At least two vertically upwardly extending limiting columns (7) are provided in the receiving groove, and the limiting columns (7) abut against the outer edges of the fins (6) to reserve a gap between the fins (6) and the side walls of the receiving groove.

2. The silicon insulation barrel of a vertical oxidation furnace according to claim 1, characterized in that: The receiving groove is tilted and has an angle of 5° to 20° with the base (1). The drainage groove (42) is located on a groove rod on one side of the lowest position of the receiving groove.

3. The silicon insulation barrel of a vertical oxidation furnace according to claim 1, characterized in that: The bearing member (3) comprises a downwardly recessed mounting groove (32), the bottom wall of the mounting groove (32) being higher than the bottom wall of the water collecting groove (31), and a drain port (33) for water supply and discharge is provided between the mounting groove (32) and the water collecting groove (31).

4. The silicon insulation barrel of a vertical oxidation furnace according to claim 3, characterized in that: The base (1) is provided with a receiving groove (11) for placing the bearing member (3), the bottom wall of the water collecting groove (31) is provided with a plurality of drainage holes (34), the bottom wall of the receiving groove (11) is provided with a drainage port (13) penetrating downward, and the drainage pipe (9) is installed in the drainage port (13).

5. The silicon insulation barrel of a vertical oxidation furnace according to claim 1, characterized in that: A first top column (10) plugged into the vertical furnace is installed at the bottom of the base (1).

6. The silicon insulation barrel of a vertical oxidation furnace according to claim 1, characterized in that: The base (1) is provided with a first air hole (14), and the top seat (2) is provided with a second air hole (21). The first air hole (14) and the second air hole (21) are used for air circulation of the heat preservation cylinder.

7. The silicon insulation barrel of a vertical oxidation furnace according to claim 1, characterized in that: The base (1), top seat (2), bearing member (3), groove rod and fin (6) are all made of silicon material.

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