An exhaust gas combustion device and an exhaust gas combustion method

Abstract

The present invention discloses an exhaust gas combustion device and an exhaust gas combustion method, which include a reaction cavity, an exhaust gas outlet pipe, a combustion assembly, and an exhaust assembly. The combustion assembly includes a combustion chamber, a heating unit, a temperature measurement unit, and a flame detection unit. The reaction cavity, the exhaust gas outlet pipe, and the combustion chamber are connected in sequence. An exhaust gas switch valve is provided on the exhaust gas outlet pipe. The heating unit is arranged in the combustion chamber. The temperature measurement unit is used to detect the temperature in the combustion chamber. The flame detection unit is used to detect whether there is a flame in the combustion chamber. The exhaust assembly is connected to the combustion chamber, and a tail gas leakage detection unit for detecting whether there is exhaust gas in the combusted gas is provided between the two. The combustion chamber has an air inlet and the pressure in the combustion chamber is negative pressure. The present invention enables the entered exhaust gas to be fully combusted, avoids the situation where the exhaust gas enters the combustion chamber but has not reached the ignition point, ensures the safety and controllability of the exhaust gas combustion process, and thus achieves the effects of preventing hydrogen leakage, explosion, and being safe, environmentally friendly.

Description

Technical Field

[0001] The present invention relates to semiconductor technology, and particularly to an exhaust gas combustion device and an exhaust gas combustion method. Background Art

[0002] The rapid development of semiconductor technology has promoted the quality of semiconductor devices to be higher and higher. When implanting impurity ions into a semiconductor, high-energy incident ions will collide with atoms on the semiconductor lattice, causing some lattice atoms to be displaced, resulting in a large number of vacancies, which will make the atomic arrangement in the implantation area chaotic or become an amorphous area. In order to minimize such defects, a hydrogen annealing process is often used to restore the crystal structure and eliminate defects.

[0003] A hydrogen annealing / alloy furnace is a device for implementing the hydrogen annealing / alloy process. The traditional hydrogen annealing / alloy process is mostly carried out in a low-temperature environment below 600°C. In pure hydrogen or in pure nitrogen mixed with a low concentration of hydrogen, a chemical reaction occurs with the oxygen in the silicon wafer to form a low-oxygen area on the silicon wafer surface, so as to achieve the purpose of reducing lattice defects. In addition to being related to the process time and process temperature, the quality of the low-oxygen area formed by hydrogen annealing / alloy is also directly affected by the hydrogen concentration. The higher the hydrogen purity, the easier it is for impurities to be precipitated; in the low-concentration hydrogen annealing / alloy process, the mixed gas participating in the reaction belongs to a non-explosive and safe gas. In order to obtain semiconductor devices with better quality, the demand for a pure hydrogen annealing process is increasing day by day, and the hydrogen content in the process exhaust gas discharged during annealing will also increase accordingly. Directly discharging it or discharging it into the air in the case of incomplete combustion is likely to cause dangerous accidents such as hydrogen explosion. Therefore, there are relatively high requirements for a high-purity hydrogen annealing process exhaust gas treatment device.

[0004] At present, the mainstream hydrogen annealing / alloy process exhaust gas treatment devices on the market cannot solve the problem of full combustion of hydrogen in the exhaust gas. Especially when hydrogen is introduced at the beginning of the process and hydrogen supply is stopped at the end of the process, when hydrogen replaces nitrogen or nitrogen replaces hydrogen in the reaction tube, the hydrogen concentration is small, and hydrogen escapes at the equipotential value at the edge of the combustion chamber, and the treated exhaust gas or the exhaust gas is directly discharged into the exhaust duct without treatment, resulting in accidental hydrogen leakage and increasing the safety risk of fire or explosion accidents. Summary of the Invention

[0005] The technical problem to be solved by the present invention is to overcome the deficiencies of the prior art and provide an exhaust gas combustion device and an exhaust gas combustion method that ensure that the exhaust gas in the combustion chamber reaches the ignition point of hydrogen for combustion, ensure the safety and controllability of the exhaust gas combustion process, and fully burn the high-purity hydrogen in the annealing process exhaust gas without affecting the process and the environment, so as to achieve the effects of preventing hydrogen leakage, explosion and being safe and environmentally friendly.

[0006] To solve the above technical problems, the present invention adopts the following technical solutions:

[0007] An exhaust gas combustion device, comprising a reaction cavity, an exhaust gas outlet pipe, a combustion assembly and an exhaust assembly. The combustion assembly includes a combustion chamber, a heating unit, a temperature measuring unit and a flame detection unit. The reaction cavity, the exhaust gas outlet pipe and the combustion chamber are connected in sequence. A tail gas switch valve is provided on the exhaust gas outlet pipe. The heating unit is arranged in the combustion chamber. The temperature measuring unit is used to detect the temperature in the combustion chamber. The flame detection unit is used to detect whether there is a flame in the combustion chamber. The exhaust assembly is connected to the combustion chamber and a tail gas leakage detection unit for detecting whether there is tail gas in the combusted gas is provided between the two. The combustion chamber has an air inlet and the pressure in the combustion chamber is negative pressure.

[0008] As a further improvement of the above technical solution, the temperature measuring unit includes a plurality of thermocouples, and the plurality of thermocouples are arranged at intervals on the combustion chamber.

[0009] As a further improvement of the above technical solution, the heating unit includes at least one layer of heating wires, and the heating wires are spirally wound from the center to the periphery.

[0010] As a further improvement of the above technical solution, the inner cavity of the combustion chamber is square, and the heating wires are correspondingly square to match the inner cavity of the combustion chamber.

[0011] As a further improvement of the above technical solution, a plurality of mounting cylinders are provided on the side wall of the combustion chamber. The number of the mounting cylinders corresponds to the number of the thermocouples, and each thermocouple is installed in each mounting cylinder.

[0012] As a further improvement of the above technical solution, a tail gas inlet pipe is provided at the bottom of the combustion chamber. The exhaust gas outlet pipe is connected to the tail gas inlet pipe. An air inlet cylinder is provided in the combustion chamber. The tail gas inlet pipe extends into the air inlet cylinder, and an air inlet communicating with the air inlet cylinder is provided at the bottom of the combustion chamber.

[0013] As a further improvement of the above technical solution, a flame retardant and backfire valve is provided on the exhaust gas outlet pipe, and the tail gas switch valve is provided on the exhaust gas outlet pipe and is located downstream of the flame retardant and backfire valve.

[0014] As a further improvement of the above technical solution, the exhaust assembly includes an exhaust cylinder and a pumping system communicated with the exhaust cylinder. The combustion chamber is connected to the exhaust cylinder through a corrugated pipe.

[0015] As a further improvement of the above technical solution, the combustion chamber is formed by splicing a main body and a split body.

[0016] A tail gas combustion method based on the above tail gas combustion device includes the following steps:

[0017] S1. Close the tail gas switch valve and turn on the heating unit to heat the combustion chamber.

[0018] S2. When the temperature measuring unit detects that the temperature in the combustion chamber reaches the ignition point of the tail gas, open the tail gas switch valve. The tail gas in the reaction chamber enters the combustion chamber through the tail gas outlet pipe for combustion. When the flame detection unit detects that there is no flame in the combustion chamber or when the temperature measuring unit detects that the temperature in the combustion chamber does not reach the ignition point of the tail gas, close the tail gas switch valve and give an alarm.

[0019] S3. The burned gas is discharged through the exhaust assembly. When the tail gas leakage detection unit detects that there is tail gas in the gas discharged from the combustion chamber, close the tail gas switch valve and give an alarm.

[0020] Compared with the prior art, the advantages of the present invention are as follows:

[0021] (1) The tail gas combustion device of the present invention, by setting a temperature measuring unit, a flame detection unit and a tail gas leakage detection unit, ensures that the tail gas in the combustion chamber reaches the ignition point of hydrogen for combustion, ensures the safety and controllability of the tail gas combustion process, and fully burns the high-purity hydrogen in the annealing process tail gas without affecting the process and the environment, so as to achieve the effects of preventing hydrogen leakage, explosion and being safe and environmentally friendly.

[0022] (2) The tail gas combustion device of the present invention, by adding a multi-point temperature measuring function, improves the real-time temperature measuring accuracy by multi-point temperature detection and comprehensively processes the multi-point temperature information. Multiple temperature measuring points can be independently installed and placed, and the device can realize different temperature measuring forms according to different requirements. It can be fixedly installed on the same horizontal plane for multi-point temperature measurement, or can be installed and fixed in a staggered manner in three-dimensional space to achieve accurate dynamic multi-point temperature measurement.

[0023] (3) The tail gas combustion device of the present invention abandons the traditional spiral heating wire shape and adopts an optimized rectangular surrounding heating wire. At the same time, the multi-layer heating wire design ensures the heating range and the contact surface area with hydrogen, accelerates the reaction between hydrogen and oxygen in the air, and maximally ensures the full combustion of the tail gas.

[0024] (4) The tail gas combustion method of the present invention. After the temperature measurement unit detects that the temperature in the combustion chamber reaches the ignition point of the tail gas, the tail gas switch valve is opened, and the tail gas in the reaction cavity enters the combustion chamber through the tail gas outlet pipe for combustion, ensuring that the incoming tail gas can burn fully and avoiding the situation where the tail gas enters the combustion chamber but has not reached the ignition point. During the entire process of hydrogen combustion, the temperature measurement unit detects the temperature in the combustion chamber in real time, the flame detection unit detects the presence or absence of a flame in real time, and the tail gas leakage detection unit monitors in real time whether there is hydrogen in the discharged gas. If the temperature is lower than the ignition point of hydrogen, the flame goes out, or hydrogen leaks, the tail gas switch valve is immediately closed, and a low-temperature alarm signal, a flame-out alarm signal, or a hydrogen leakage alarm signal is issued, ensuring the safety and controllability of the tail gas combustion process, thereby achieving the effects of preventing hydrogen leakage, explosion, and being safe, environmentally friendly. Description of the Drawings

[0025] Figure 1 It is a schematic structural diagram of the tail gas combustion device of the present invention.

[0026] Figure 2 It is a three-dimensional structural diagram of the combustion chamber in the present invention.

[0027] Figure 3 It is a schematic internal structure diagram of the combustion chamber in the present invention.

[0028] Figure 4 It is a schematic sectional view of the combustion chamber in the present invention.

[0029] Figure 5 It is a schematic installation structure diagram of the thermocouple in the present invention.

[0030] Figure 6 It is a three-dimensional structural diagram of the heating wire in the present invention.

[0031] Figure 7 It is a schematic plan view of the heating wire in the present invention.

[0032] Figure 8 It is a schematic flow chart of the tail gas combustion method of the present invention.

[0033] The reference numerals in the figures represent:

[0034] 1. Reaction cavity; 2. Tail gas outlet pipe; 21. Tail gas switch valve; 22. Flame retardant and backfire valve; 3. Combustion chamber; 31. Installation cylinder; 310. Main body; 32. Tail gas inlet pipe; 320. Split body; 33. Intake cylinder; 34. Air inlet; 35. Screw; 4. Heating unit; 41. Heating wire; 5. Temperature measurement unit; 51. Thermocouple; 6. Flame detection unit; 7. Exhaust assembly; 71. Exhaust cylinder; 8. Tail gas leakage detection unit; 9. Bellows. Detailed Embodiments

[0035] The present invention will be further described in detail below in conjunction with the accompanying drawings of the specification and specific embodiments.

[0036] As Figures 1 to 7 shown, the tail gas combustion device of this embodiment includes a reaction cavity 1, a tail gas outlet pipe 2, a combustion assembly, and an exhaust assembly 7. The combustion assembly includes a combustion chamber 3, a heating unit 4, a temperature measurement unit 5, and a flame detection unit 6. The reaction cavity 1, the tail gas outlet pipe 2, and the combustion chamber 3 are connected in sequence. A tail gas switch valve 21 is provided on the tail gas outlet pipe 2. The heating unit 4 is arranged in the combustion chamber 3. The temperature measurement unit 5 is used to detect the temperature in the combustion chamber 3. The flame detection unit 6 is used to detect whether there is a flame in the combustion chamber 3. The exhaust assembly 7 is connected to the combustion chamber 3, and a tail gas leakage detection unit 8 for detecting whether there is tail gas in the combusted gas is provided between the two. The combustion chamber 3 has an air inlet 34, and the pressure in the combustion chamber 3 is negative pressure.

[0037] In this embodiment, the tail gas to be treated is preferably hydrogen. The tail gas switch valve 21, the heating unit 4, the temperature measurement unit 5, the flame detection unit 6, and the tail gas leakage detection unit 8 are all connected to a controller, preferably a PLC controller.

[0038] During operation, when the temperature measurement unit 5 detects that the temperature in the combustion chamber 3 reaches the ignition point of hydrogen, the tail gas switch valve 21 is opened. The hydrogen in the reaction cavity 1 enters the combustion chamber 3 through the tail gas outlet pipe 2 for combustion. The residual waste gas or water vapor after combustion is discharged through the exhaust assembly 7. The combustion chamber 3 has an air inlet 34. The exhaust assembly 7 provides a negative pressure for the combustion chamber 3 to enable air to enter the combustion chamber 3 and provide oxygen for hydrogen combustion. The negative pressure environment in the combustion chamber 3 will not cause hydrogen leakage. During the entire process of hydrogen combustion, the temperature measurement unit 5 continuously detects the temperature in the combustion chamber 3, the flame detection unit 6 continuously detects the presence or absence of a flame, and the tail gas leakage detection unit 8 continuously monitors whether there is hydrogen in the discharged gas. If the temperature is lower than the ignition point of hydrogen, the flame goes out, or hydrogen leaks, the tail gas switch valve 21 is immediately closed, and a low-temperature alarm signal, a flame-out alarm signal, or a hydrogen leakage alarm signal is issued.

[0039] This tail gas combustion device, by setting the temperature measurement unit 5, the flame detection unit 6, and the tail gas leakage detection unit 8, ensures that the tail gas in the combustion chamber 3 reaches the ignition point of hydrogen for combustion, ensures the safety and controllability of the tail gas combustion process, and fully burns the high-purity hydrogen in the annealing process tail gas without affecting the process and the environment, thereby achieving the effects of preventing hydrogen leakage, explosion, and being safe and environmentally friendly.

[0040] In this embodiment, the temperature measurement unit 5 includes a plurality of thermocouples 51, which are arranged at intervals on the combustion chamber 3. The spatial temperature of the combustion chamber 3 is measured by the thermocouples 51. Considering that a single thermocouple 51 can only measure the local temperature of the combustion chamber 3, a multi-point temperature measurement function is added to improve the real-time temperature measurement accuracy by detecting multi-point temperatures and comprehensively processing the temperature information at multi-point positions. After the heating unit 4 is powered on, the thermocouples 51 start to measure the temperature around the air inlet of the exhaust gas in the combustion chamber 3 in real time, and obtain the accurately measured temperature through temperature signal acquisition, signal amplification processing, temperature signal analysis, etc., effectively improving the accuracy of the measurement data. Since the temperature measurement points can be installed and placed independently, the device can achieve temperature measurement forms under different requirements. It can be fixedly installed on the same horizontal plane for multi-point temperature measurement, or can be installed and fixed in a staggered manner in three-dimensional space to achieve accurate dynamic multi-point temperature measurement.

[0041] In this embodiment, the heating unit 4 includes at least one layer of heating wires 41, and the heating wires 41 are spirally wound from the center to the periphery, as Figure 6 and Figure 7 shown. The inner cavity of the combustion chamber 3 is square, and the heating wires 41 are correspondingly square to match the inner cavity of the combustion chamber 3. In this embodiment, two layers of heating wires 41 are provided as an example. In the prior art, due to the large gaps between the spiral heating wires and the limited surface area in contact with hydrogen, some hydrogen exhaust gases are discharged into the exhaust assembly 7 without being fully burned. After the exhaust gas leakage detection unit 8 detects the residual hydrogen, it alarms, the exhaust gas switch valve 21 closes, and the exhaust gas treatment process is interrupted. Therefore, in this embodiment, the traditional spiral heating wire shape is abandoned and the optimized designed rectangular surrounded heating wires 41 are adopted. At the same time, the double-layer heating wire design ensures the full combustion of hydrogen to the greatest extent. The design and laying of the heating wires 41 ensure the heating range and the surface area in contact with hydrogen, accelerate the reaction between hydrogen and oxygen in the air, and ensure the full combustion of the exhaust gas.

[0042] In this embodiment, the combustion chamber 3 is a cube. Taking 4 thermocouples 51 as an example, they are distributed on two opposite side walls of the combustion chamber 3. Four mounting cylinders 31 are provided on the side walls of the combustion chamber 3, corresponding to the number of thermocouples 51, and each thermocouple 51 is installed in each mounting cylinder 31. The mounting cylinders 31 are welded to the combustion chamber 3. Each layer of heating wires 41 is wound by one heating wire 41, and the lead-out parts of the upper and lower layers of heating wires 41 are connected to the inside of the combustion chamber 3 through the mounting cylinders 31. The vertical position of the thermocouple 51 in the mounting cylinder 31 is adjustable, and the temperature measurement points can be adjusted according to needs. The specific adjustment structure is that screws 35 are provided on the outer wall of the mounting cylinder 31, the screws 35 radially abut against the thermocouple 51, and the upper and lower two screws 35 hold the thermocouple 51. By adjusting the up and down positions of the screws 35, the up and down positions of the thermocouple 51 in the mounting cylinder 31 can be adjusted.

[0043] In this embodiment, an exhaust gas inlet pipe 32 is provided at the bottom of the combustion chamber 3. The exhaust gas outlet pipe 2 is connected to the exhaust gas inlet pipe 32. An air inlet cylinder 33 is provided in the combustion chamber 3, and the exhaust gas inlet pipe 32 extends into the air inlet cylinder 33. An air inlet 34 communicating with the air inlet cylinder 33 is provided at the bottom of the combustion chamber 3. The side wall of the combustion chamber 3 is provided with the air inlet 34, and the bottom wall is also provided with the air inlet 34. Through the arrangement of the air inlet cylinder 33, the hydrogen gas entering the combustion chamber 3 through the exhaust gas inlet pipe 32 is surrounded by the air in the air inlet cylinder 33, so that the hydrogen gas can burn sufficiently. The combustion chamber 3 with a porous design is used as the flame combustion cavity to timely supplement the air in the combustion chamber 3 and ensure that a sufficient amount of oxygen reacts with the hydrogen gas in the exhaust gas.

[0044] In this embodiment, a flame-retardant backfire valve 22 is provided on the exhaust gas outlet pipe 2, and an exhaust gas switch valve 21 is provided on the exhaust gas outlet pipe 2 and is located downstream of the flame-retardant backfire valve 22. The function of the flame-retardant backfire valve 22 is to control the exhaust gas to enter the combustion chamber 3 from the reaction cavity 1, but the gas in the combustion chamber 3 cannot enter the reaction cavity 1. The flame-retardant backfire valve 22 has an explosion-proof function.

[0045] In this embodiment, the exhaust assembly 7 includes an exhaust cylinder 71 and an air extraction system (not shown in the figure) communicating with the exhaust cylinder 71. The combustion chamber 3 is connected to the exhaust cylinder 71 through a corrugated pipe 9. The air extraction system ensures that the inside of the combustion chamber 3 is in a negative pressure state.

[0046] In this embodiment, the combustion chamber 3 is formed by splicing a main body 310 and a split body 320, which is convenient for processing and installation.

[0047] In this embodiment, the flame detection unit 6 is preferably a flame detector, and the exhaust gas leakage detection unit 8 is preferably a hydrogen detector.

[0048] As Figure 8 shown, the exhaust gas combustion method using the above exhaust gas combustion device in this embodiment includes the following steps:

[0049] S1. Close the exhaust gas switch valve 21 and turn on the heating unit 4 to heat the combustion chamber 3;

[0050] S2. When the temperature measurement unit 5 detects that the temperature in the combustion chamber 3 reaches the ignition point of the exhaust gas, open the exhaust gas switch valve 21, and the exhaust gas in the reaction cavity 1 enters the combustion chamber 3 through the exhaust gas outlet pipe 2 for combustion. When the flame detection unit 6 detects that there is no flame in the combustion chamber 3 or when the temperature measurement unit 5 detects that the temperature in the combustion chamber 3 does not reach the ignition point of the exhaust gas, close the exhaust gas switch valve 21 to give an alarm;

[0051] S3. The burned gas is discharged through the exhaust assembly 7. When the exhaust gas leakage detection unit 8 detects that there is exhaust gas in the gas discharged from the combustion chamber 3, close the exhaust gas switch valve 21 to give an alarm.

[0052] Among them, in step S2, after the tail gas switch valve 21 remains open for a period of time, the flame detection unit 6 detects whether there is a flame. If no flame can be detected, a no-flame signal will be immediately fed back, the tail gas switch valve 21 will close and a no-flame alarm signal will be issued; if the flame detection unit 6 detects a flame, an ignition-normal signal will be fed back, the tail gas switch valve 21 will remain open, and hydrogen will fully burn with oxygen in the air through the double-layer heating wire 41. The residual waste gas after the tail gas combustion is discharged through the exhaust pipe 71. In step S3, the tail gas leakage detection unit 8 installed near the exhaust pipe 71 detects in real time whether there is hydrogen leakage in the residual waste gas, and gives an early warning in time when there is an abnormality to ensure the safety of the system.

[0053] Although the present invention has been disclosed above with preferred embodiments, it is not intended to limit the present invention. Any person skilled in the art can make many possible changes and modifications to the technical solution of the present invention, or modify it into an equivalent embodiment with equivalent changes, without departing from the scope of the technical solution of the present invention. Therefore, any simple modification, equivalent change and modification made to the above embodiments based on the technical essence of the present invention without departing from the content of the technical solution of the present invention shall fall within the scope of protection of the technical solution of the present invention.

Claims

1. An exhaust gas combustion device, characterized in that, It includes a reaction chamber (1), an exhaust gas outlet pipe (2), a combustion assembly, and an exhaust assembly (7). The combustion assembly includes a combustion chamber (3), a heating unit (4), a temperature measurement unit (5), and a flame detection unit (6). The reaction chamber (1), the exhaust gas outlet pipe (2), and the combustion chamber (3) are connected in sequence. An exhaust gas switch valve (21) is provided on the exhaust gas outlet pipe (2). The heating unit (4) is arranged in the combustion chamber (3). The heating unit (4) includes at least one layer of heating wires (41), and the heating wires (41) are spirally wound from the center to the periphery. The inner cavity of the combustion chamber (3) is square, and the heating wires (41) are correspondingly square to match the inner cavity of the combustion chamber (3). The temperature measurement unit (5) is used to detect the temperature in the combustion chamber (3), and the flame detection unit (6) is used to detect whether there is a flame in the combustion chamber (3). The exhaust assembly (7) is connected to the combustion chamber (3), and a tail gas leakage detection unit (8) for detecting whether there is tail gas in the gas after combustion is provided between the two. The pressure in the combustion chamber (3) is negative pressure. A tail gas inlet pipe (32) is provided at the bottom of the combustion chamber (3), and the exhaust gas outlet pipe (2) is connected to the tail gas inlet pipe (32). An air inlet cylinder (33) is arranged in the combustion chamber (3), and the tail gas inlet pipe (32) extends into the air inlet cylinder (33). An air inlet (34) communicating with the air inlet cylinder (33) is provided at the bottom of the combustion chamber (3), and an air inlet (34) is also provided on the side wall of the combustion chamber (3).

2. The exhaust gas combustion device according to claim 1, characterized in that, The temperature measurement unit (5) includes a plurality of thermocouples (51), and the plurality of thermocouples (51) are arranged at intervals on the combustion chamber (3).

3. The exhaust gas combustion device according to claim 2, characterized in that, A plurality of mounting cylinders (31) are provided on the side wall of the combustion chamber (3). The number of the mounting cylinders (31) corresponds to the number of the thermocouples (51), and each thermocouple (51) is installed in each mounting cylinder (31).

4. The tail gas combustion device according to any one of claims 1 to 3, characterized in that, A flame retardant and backfire valve (22) is provided on the exhaust gas outlet pipe (2), and the exhaust gas switch valve (21) is arranged on the exhaust gas outlet pipe (2) and is located downstream of the flame retardant and backfire valve (22).

5. The tail gas combustion device according to any one of claims 1 to 3, characterized in that, The exhaust assembly (7) includes an exhaust cylinder (71) and an air extraction system communicated with the exhaust cylinder (71). The combustion chamber (3) is connected to the exhaust cylinder (71) through a corrugated pipe (9).

6. The exhaust gas combustion device according to any one of claims 1 to 3, characterized in that, The combustion chamber (3) is formed by splicing a main body (310) and a split body (320).

7. A method for burning tail gas of the tail gas burning device according to any one of claims 1 to 6, characterized in that, It includes the following steps: S1. Close the exhaust gas switch valve (21), and turn on the heating unit (4) to heat the combustion chamber (3). S2. When the temperature measurement unit (5) detects that the temperature in the combustion chamber (3) reaches the ignition point of the exhaust gas, open the exhaust gas switch valve (21). The exhaust gas in the reaction chamber (1) enters the combustion chamber (3) through the exhaust gas outlet pipe (2) for combustion. When the flame detection unit (6) detects that there is no flame in the combustion chamber (3) or when the temperature measurement unit (5) detects that the temperature in the combustion chamber (3) does not reach the ignition point of the exhaust gas, close the exhaust gas switch valve (21) for alarm. S3. The gas after combustion is discharged through the exhaust assembly (7). When the tail gas leakage detection unit (8) detects tail gas in the gas discharged from the combustion chamber (3), the tail gas switch valve (21) is closed for alarm.

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