A four-fan device and method for beam detection

Abstract

The present invention discloses a four-fan device and method for beam detection, the device includes: a flange, installed in a beam pipeline; a detection member, installed in the flange, used to withstand the impact of the beam and change the posture of the beam passing; the detection member is composed of a plurality of detection copper blocks; the plurality of detection copper blocks are provided with mutually adapted wedge angles, so that the plurality of detection copper blocks surround a unique exit, and do not contact each other, when the beam passes through the detection member, the beam is blocked by the plurality of detection copper blocks, and only passes through the unique exit. The present invention completes the detection of the beam by connecting the detection member composed of a plurality of detection copper blocks to the detector, by providing mutually adapted wedge angles on the plurality of detection copper blocks, so that the plurality of detection copper blocks surround a unique exit, and do not contact each other, when the beam passes through the detection member, the beam is blocked by the plurality of detection copper blocks, and only passes through the unique exit, not only meeting the detection needs, but also making the beam pass only through the unique exit during the detection process, so that the wafer is more uniform when irradiated.

Description

Technical Field

[0001] The present invention relates to the field of beam detection, and in particular to a four-fan device and method for beam detection. Background Art

[0002] Various types of beams are widely used in particle accelerators, medical treatment, chip irradiation modification, nuclear physics research, electron microscopy, controlled nuclear fusion and nuclear fuel processing, and play an increasingly important role in many aspects.

[0003] Taking patent number CN 204666822 U as an example, it discloses an improved deflected beam measurement system, which designs a central area deflection plate, and evenly arranges magnets and D-type boxes around the central area deflection plate, and a stripping target is connected to the magnet. A measuring device is arranged in the center of the central area deflection plate, and the measuring device leads a measuring line to the stripping target. The stripping target is connected to a PLC controller via a conversion box to achieve a detection effect. However, during detection, the beam easily passes through the gap between the magnet and the D-type box to irradiate the wafer, making the wafer irradiation uneven.

[0004] Therefore, providing a detection device that can detect the beam flow rate and deflection angle direction while also achieving uniform irradiation of the wafer is a problem that needs to be solved at present. Summary of the invention

[0005] Purpose of the invention: To provide a four-fan device and method for beam detection to solve the above-mentioned problems existing in the prior art.

[0006] Technical solution: A four-fan device for beam detection, comprising:

[0007] A flange, installed in the beam pipe;

[0008] The detection part is installed in the flange part and is used to withstand the impact of the beam and change the passing posture of the beam;

[0009] The detection part is composed of a number of detection copper blocks;

[0010] The several detection copper blocks are provided with mutually adapted wedge angles so that the several detection copper blocks surround a single outlet and do not contact each other. When the beam passes through the detection piece, the beam is blocked by the several detection copper blocks and only passes through the single outlet.

[0011] The present invention completes the detection of the beam by connecting the detector with a detection piece composed of a plurality of detection copper blocks. By arranging mutually adaptable wedge angles on the plurality of detection copper blocks, the plurality of detection copper blocks surround a single outlet without contacting each other. When the beam passes through the detection piece, the beam is blocked by the plurality of detection copper blocks and only passes through the single outlet. This not only meets the detection needs, but also makes the beam only pass through the single outlet during the detection process, so that the wafer is irradiated more evenly.

[0012] Due to the detection requirements, when several copper blocks are in contact with each other, the copper blocks are connected to each other. At this time, the beam hits the copper blocks, and when the copper blocks are connected to each other, the detection effect is affected;

[0013] Therefore, the present application involves a wedge angle, which makes the structure of several detection copper blocks compact and can be installed in a flange, and the flange can be installed in a beam pipe; at the same time, it avoids mutual contact between several detection copper blocks and mutual conduction between several detection copper blocks, thereby avoiding affecting the detection effect of the beam.

[0014] At the same time, the design of the wedge angle is also to make several detection copper blocks form a single exit when in use, allowing the beam to pass through and irradiate the wafer, making the wafer irradiation more uniform;

[0015] When the detection piece is in use, due to the wedge angle, even if there are gaps between the detection copper blocks so that the detection copper blocks do not touch each other, due to the design of the wedge angle, when the detection piece is in use, the beam can only pass through a single exit, and the rest is blocked by the detection copper blocks.

[0016] In a further embodiment, a side portion of the flange is connected to a detection column, and an end portion of the detection column is provided with a detection connector.

[0017] In a further embodiment, the plurality of detection copper blocks are respectively connected with detection cables, and the detection cables pass through the detection columns and are connected to the detection connectors.

[0018] In a further embodiment, a ceramic cushion layer is provided between the plurality of detection copper blocks and the flange member;

[0019] A plurality of detection copper blocks are connected to the flange parts through ceramic bolts.

[0020] In a further embodiment, the detection connector is externally connected to a detector.

[0021] The detector can be selected from the prior art, and is mainly used to detect the beam flow on several detection copper blocks.

[0022] A detection method of a four-fan device for beam detection, comprising:

[0023] Step 1: Connect several detection copper blocks in the flange through ceramic bolts, and place ceramic pads between the several detection copper blocks and the flange;

[0024] Step 2: Place the flange and the detection component into the beam pipe together, and install the flange in the beam pipe;

[0025] Step 3, the beam moves in the beam pipe, part of it hits several detection copper blocks, and part of it is emitted through the only outlet; after the beam is emitted through the only outlet, it evenly irradiates the wafer;

[0026] Step 4: The external detector detects the beam flow rate on each detection copper block through the detection connector and the detection cable, and obtains the beam deflection direction according to the beam flow rate.

[0027] The beam flow is deflected to the direction in which the beam flow detected on the copper block is larger.

[0028] Beneficial effects: The present invention discloses a four-fan device for beam detection. The present invention completes the detection of the beam by connecting a detection piece composed of a plurality of detection copper blocks to a detector. By arranging mutually adaptable wedge angles on the plurality of detection copper blocks, the plurality of detection copper blocks surround a unique exit without contacting each other. When the beam passes through the detection piece, the beam is blocked by the plurality of detection copper blocks and only passes through the unique exit. This not only meets the detection needs, but also makes the beam only pass through the unique exit during the detection process, so that the wafer is irradiated more evenly. BRIEF DESCRIPTION OF THE DRAWINGS

[0029] Figure 1 It is a structural schematic diagram of the present invention.

[0030] Figure 2 It is a schematic diagram of the invented flange.

[0031] Figure 3 It is a schematic diagram of the detection part of the invention.

[0032] Figure 4 It is a schematic diagram of the working state of the detection part of the invention.

[0033] Figure 5 It is a schematic diagram of the structure of the invented copper block detection device.

[0034] The accompanying drawings are marked as follows:

[0035] 1. Flange; 2. Detection part; 21. Ceramic bolt; 22. Ceramic cushion layer; 23. First detection copper block; 24. Second detection copper block; 25. Third detection copper block; 26. Fourth detection copper block; 3. Detection column; 4. Detection joint. DETAILED DESCRIPTION

[0036] The present application relates to a four-fan device for beam detection, which is explained in detail below through a specific implementation method.

[0037] A four-fan device for beam detection, comprising:

[0038] Flange 1, installed in the beam pipe;

[0039] The detection component 2 is installed in the flange component 1 and is used to withstand the impact of the beam and change the passing posture of the beam;

[0040] The detection member 2 is composed of a number of detection copper blocks;

[0041] The several detection copper blocks are provided with mutually adapted wedge angles so that the several detection copper blocks surround a single outlet and do not contact each other. When the beam passes through the detection member 2, the beam is blocked by the several detection copper blocks and only passes through the single outlet.

[0042] Due to the detection requirements, when several copper blocks are in contact with each other, the copper blocks are connected to each other. At this time, the beam hits the copper blocks, and when the copper blocks are connected to each other, the detection effect is affected;

[0043] Therefore, the present application involves a wedge angle, which makes the structure of several detection copper blocks compact and can be installed in the flange 1, and the flange 1 can be installed in the beam pipe; at the same time, it avoids mutual contact between several detection copper blocks and avoids mutual conduction between several detection copper blocks, thereby avoiding affecting the detection effect of the beam.

[0044] At the same time, the design of the wedge angle is also to make several detection copper blocks form a single exit when in use, allowing the beam to pass through and irradiate the wafer, making the wafer irradiation more uniform;

[0045] When the detection element 2 is in use, in order to make the detection effect accurate, gaps need to be left between the detection copper blocks so that the detection copper blocks do not touch each other. However, at this time, in addition to the specified outlet, part of the beam will also pass through the gap to irradiate the wafer, so that the wafer is not irradiated uniformly, affecting the finished product;

[0046] However, due to the design of the wedge angle, a slope is formed, so that when the detection component 2 is in use (i.e. when looking directly at the detection component 2), only a single exit is reserved for the detection component 2. Due to the viewing angle, no gap can be seen. At this time, the beam can only pass through the single exit, and the rest is blocked by the various detection copper blocks.

[0047] The side of the flange 1 is connected to a detection column 3 , and the end of the detection column 3 is provided with a detection connector 4 .

[0048] The plurality of detection copper blocks are respectively connected with detection cables, and the detection cables pass through the detection column 3 and are connected with the detection connector 4 .

[0049] A ceramic pad 22 is provided between the plurality of detection copper blocks and the flange 1;

[0050] The ceramic pad 22 is designed mainly to avoid the formation of a conductive relationship between the plurality of detection copper blocks and the flange 1, so as to avoid the formation of a conductive relationship and affect the detection effect;

[0051] Several detection copper blocks are connected to the flange 1 through ceramic bolts 21. The ceramic bolts 21 are designed to prevent the detection copper blocks from being in conduction with the flange 1 and to withstand high temperatures.

[0052] The beam hits the bolt, generating high temperature. If we ignore the conductive metal material of the bolt such as iron, non-conductive bolts such as traditional plastics are easy to melt when hit by the beam. At this time, ceramics are needed to withstand the high temperature generated by the beam hitting the bolt to avoid deformation.

[0053] The detection connector 4 is externally connected to a detector.

[0054] The detector can be selected from the prior art, and is mainly used to detect the beam flow on several detection copper blocks.

[0055] Taking the detection part 2 consisting of four groups of detection copper blocks as an example (optimal method), this method is derived from the combination of cost and the effect of detecting the deflection direction of the beam;

[0056] The four groups of detection copper blocks are respectively a first detection copper block 23, a second detection copper block 24, a third detection copper block 25, and a fourth detection copper block 26;

[0057] When the detection member 2 is installed in the beam pipe, the end faces of the first detection copper block 23, the second detection copper block 24, the third detection copper block 25 and the fourth detection copper block 26 in the detection member 2 are parallel to the end face of the beam pipe.

[0058] The first detection copper block 23 and the third detection copper block 25 have the same structure and are symmetrically placed;

[0059] The second detection copper block 24 and the fourth detection copper block 26 have the same structure and are symmetrically placed;

[0060] The bottom area of ​​the first detection copper block 23 and the third detection copper block 25 is larger than the top area, so the first detection copper block 23 and the third detection copper block 25 and the second detection copper block 24 and the fourth detection copper block 26 form a single exit surface to form a slope surface, resulting in a wedge angle;

[0061] The second detection copper block 24 and the fourth detection copper block 26 also have grooves on both sides adapted to the slopes of the first detection copper block 23 and the third detection copper block 25 to form a wedge angle. When the first detection copper block 23, the second detection copper block 24, the third detection copper block 25, and the fourth detection copper block 26 are put together, since the slopes and the grooves are in close contact, there is no gap when looking directly at the detection piece 2 formed by the first detection copper block 23, the second detection copper block 24, the third detection copper block 25, and the fourth detection copper block 26 from above, that is, when the beam hits the detection piece 2, it is only ejected from the only outlet;

[0062] The remaining part is blocked and absorbed by the first detection copper block 23, the second detection copper block 24, the third detection copper block 25, and the fourth detection copper block 26 to detect the beam deflection direction.

[0063] Working principle description: several detection copper blocks are connected in the flange 1 through ceramic bolts 21, and the ceramic pad 22 is placed between the several detection copper blocks and the flange; the flange 1 and the detection part 2 are placed in the beam pipe together, and the flange 1 is installed in the beam pipe; the beam moves in the beam pipe, part of it hits several detection copper blocks, and part of it is emitted through the only outlet; after the beam is emitted through the only outlet, it irradiates the wafer evenly; the external detector detects the beam flow on each detection copper block through the detection connector 4 and the detection cable, and obtains the beam deflection direction, which direction has the largest beam flow detected on the detection copper block, at which time the beam is deflected in that direction, and then the beam direction and beam flow are adjusted.

[0064] The preferred embodiments of the present invention are described in detail above in conjunction with the accompanying drawings. However, the present invention is not limited to the specific details in the above embodiments. Within the technical concept of the present invention, various equivalent transformations can be made to the technical scheme of the present invention, and these equivalent transformations all belong to the protection scope of the present invention.

Claims

1. A four-fan device for beam detection, comprising: A flange (1) is installed in the beam pipe; The detection component (2) is installed in the flange component (1) and is used to withstand the impact of the beam and change the passing posture of the beam; Characterized in that the detection member (2) is composed of a plurality of detection copper blocks; The plurality of detection copper blocks are provided with mutually adapted wedge angles so that the plurality of detection copper blocks surround a single outlet and do not contact each other. When the beam passes through the detection member (2), the beam is blocked by the plurality of detection copper blocks and only passes through the single outlet.

2. A four-fan device for beam detection according to claim 1, characterized in that: The side of the flange (1) is connected to a detection column (3), and the end of the detection column (3) is provided with a detection connector (4).

3. A four-fan device for beam detection according to claim 1, characterized in that: The plurality of detection copper blocks are respectively connected to detection cables, and the detection cables pass through the detection columns (3) and are connected to the detection connectors (4).

4. A four-fan device for beam detection according to claim 1, characterized in that: A ceramic cushion layer (22) is provided between the plurality of detection copper blocks and the flange member (1); A plurality of detection copper blocks are connected to the flange (1) via ceramic bolts (21).

5. A four-fan device for beam detection according to claim 2, characterized in that: The detection connector (4) is externally connected to a detector.

6. A detection method for a four-fan device for beam detection according to any one of claims 1 to 5, characterized in that: include: Step 1: Connect a plurality of detection copper blocks to the flange (1) through ceramic bolts (21), and place a ceramic pad (22) between the plurality of detection copper blocks and the flange; Step 2: Place the flange (1) and the detection component (2) into the beam pipe together, and install the flange (1) in the beam pipe; Step 3, the beam moves in the beam pipe, part of it hits several detection copper blocks, and part of it is ejected through the only outlet; Step 4: The external detector detects the beam flow and Beam deflection direction.

7. The detection method of a four-fan device for beam detection according to claim 6, characterized in that: The step 3 also includes: after the beam is emitted through the only outlet, the wafer is uniformly irradiated.

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