Gas analyzer

Abstract

The present invention provides an easy-to-align gas analyzer. The gas analyzer (1) measures a specified component in the measurement gas (3) by irradiating light (4) from a light-emitting element (2) to the measurement gas (3) and receiving the light (4) that has passed through the measurement gas (3). The gas analyzer (1) includes: a base member (12) capable of position adjustment along at least one axis not parallel to the optical axis of the light-emitting element (2); and a holding member (13) held by the base member (12) so as to be capable of angular adjustment about at least one axis not parallel to the optical axis, and holding the light-emitting element (2).

Description

Technical Field

[0001] The present invention relates to a gas analyzer. Background Art

[0002] As a gas analyzer such as a laser gas analyzer using wavelength tunable diode laser absorption spectroscopy, a gas analyzer is known in which a holding member for holding a light emitting element can be positionally adjusted along at least one axis that is not parallel to the optical axis of the light emitting element (for example, see Patent Document 1).

[0003] Prior Art Documents

[0004] Patent Document 1: Japanese Patent Laid-Open Publication No. 2019-184368

[0005] There is room for improvement in the above-described conventional gas analyzer in terms of facilitating alignment to align the position and angle of the optical axis of the light emitting element so that the light receiving element can receive the light irradiated from the light emitting element. Summary of the Invention

[0006] Therefore, an object of the present invention is to provide a gas analyzer in which alignment can be easily facilitated.

[0007] The gas analyzer according to some embodiments measures a predetermined component in the measurement gas by irradiating light from a light emitting element to the measurement gas and receiving the light that has passed through the measurement gas. The gas analyzer includes: a base member that can be positionally adjusted along at least one axis that is not parallel to the optical axis of the light emitting element; and a holding member that is held by the base member so as to be angle-adjustable about at least one axis that is not parallel to the optical axis, and holds the light emitting element. With this configuration, facilitation of alignment can be easily achieved.

[0008] In one embodiment, the gas analyzer has a plurality of light emitting units each including the base member, the holding member, and the light emitting element. With this configuration, a plurality of predetermined components in the measurement gas can be measured using the plurality of light emitting units. In addition, since alignment can be performed independently for the plurality of light emitting units, easy alignment can be achieved.

[0009] In one embodiment, the gas analyzer has a reflection unit that reflects the light irradiated from the light emitting element to cause the light to travel back and forth in the measurement gas. With this configuration, since the optical path length in the measurement gas can be doubled by the reflection unit, the measurement accuracy can be improved.

[0010] In one embodiment, in the gas analyzer, the light emitting unit and the reflection unit are separately mounted on the flow path wall that forms the flow path of the measurement gas. The light emitting unit includes the base member, the holding member, and the light emitting element. The reflection unit reflects the light irradiated from the light emitting element to cause the light to travel back and forth in the measurement gas. According to this structure, since a long optical path length in the measurement gas can be ensured, the measurement accuracy can be improved.

[0011] In one embodiment, in the gas analyzer, the holding member is held by the base member in such a manner that it can be angle - adjusted about at least two axes that are not parallel to the optical axis. According to this structure, it is possible to more easily facilitate alignment.

[0012] In one embodiment, in the gas analyzer, the base member can be position - adjusted along at least two axes that are not parallel to the optical axis. According to this structure, it is possible to more easily facilitate alignment.

[0013] In one embodiment, the gas analyzer uses wavelength - tunable diode laser absorption spectroscopy. According to this structure, it is possible to measure a specified component in the measurement gas with high precision.

[0014] In one embodiment, in the gas analyzer, the holding member is held by the base member in such a manner that it can be angle - adjusted about at least one axis that intersects the optical axis. According to this structure, it is possible to more easily facilitate alignment.

[0015] In one embodiment, in the gas analyzer, the holding member is held by the base member in such a manner that it can be angle - adjusted about two axes that respectively intersect the optical axis and intersect each other. According to this structure, it is possible to more easily facilitate alignment.

[0016] In one embodiment, in the gas analyzer, the base member can be position - adjusted along at least one axis that intersects the optical axis. According to this structure, it is possible to more easily facilitate alignment.

[0017] In one embodiment, in the gas analyzer, the base member can be position - adjusted along two axes that respectively intersect the optical axis and intersect each other. According to this structure, it is possible to more easily facilitate alignment.

[0018] According to the present invention, it is possible to provide a gas analyzer that can more easily facilitate alignment. Brief Description of the Drawings

[0019] Figure 1It is a partial cross-sectional side view showing the state where a gas analyzer of one embodiment is installed on the flow path wall.

[0020] Figure 2A It shows Figure 1 a top view of the light emitting part of the gas analyzer shown.

[0021] Figure 2B It is Figure 2A a sectional view taken along line A-A of

[0022] Explanation of reference numerals

[0023] 1 Gas analyzer, 2 Light emitting element, 3 Measuring gas, 4 Light, 5 Light receiving element, 6 Light transceiver, 7 Reflecting part, 8 First housing, 9 Flow path wall, 10 Alignment flange, 11 Second housing, 12 Base member, 12a Contact surface, 12b Accommodating member, 12c Frame member, 12d Opposing wall, 13 Holding member, 13a Contact surface, 14 Light emitting part, 15 Adjusting screw for rotation about X' axis, 16 Adjusting screw for rotation about Y' axis, 17 X-direction adjusting screw, 18 Y-direction adjusting screw, O Spherical center. Detailed implementation mode

[0024] Hereinafter, embodiments of the present invention will be illustrated and described in detail with reference to the drawings.

[0025] As Figure 1 shown, the gas analyzer 1 of the present embodiment is configured to irradiate light 4 from a plurality of light emitting elements 2 to the measuring gas 3 respectively, for example, using tunable diode laser absorption spectroscopy (TDLAS: Tunable Diode Laser Absorption Spectroscopy), and receive the light 4 that has passed through the measuring gas 3, and measure a plurality of specified components in the measuring gas 3.

[0026] Tunable diode laser absorption spectroscopy is a method in which, based on the optical path length in the measuring gas 3 and the intensity difference of specific wavelength components of the light 4 before and after passing through the measuring gas 3, that is, the absorbance, the concentration of a specified component in the measuring gas 3 is measured, for example. Examples of the specified component may include CO, CO2, H2O, C n H m , NH3, O2, etc.

[0027] In this embodiment, the gas analyzer 1 includes: a plurality of optical transceiver units 6, each including a light-emitting element 2 composed of a laser diode or the like and a light-receiving element 5 composed of a photodiode or the like that receives the light 4 irradiated from the light-emitting element 2; and a reflection unit 7 that reflects the light 4 irradiated from the plurality of light-emitting elements 2 respectively to cause the light 4 to travel back and forth in the measurement gas 3. By means of the plurality of optical transceiver units 6, a plurality of specified components in the measurement gas 3 can be measured. In addition, the number of the optical transceiver units 6 is two in this embodiment, but it is not limited thereto, and can be appropriately increased or decreased.

[0028] Each optical transceiver unit 6 is housed in a first housing 8, and the first housing 8 is mounted on a cylindrical flow path wall 9 that forms the flow path of the measurement gas 3 via an alignment flange 10. By adjusting the alignment flange 10, the angle adjustment of the first housing 8 relative to the flow path wall 9 can be performed (refer to Figure 1 the thick arrow in the figure). By adjusting the angle of the alignment flange 10, the optical axes of the plurality of light-emitting elements 2 can be adjusted together.

[0029] The reflection unit 7 is composed of an optical element such as a reflecting mirror that reflects the light 4. The reflection unit 7 is housed in a second housing 11 in a manner that can adjust the angle, and the second housing 11 is separately mounted on the flow path wall 9 from the first housing 8. Since the optical path length in the measurement gas 3 can be doubled by the reflection unit 7, the measurement accuracy can be improved.

[0030] As described above, the gas analyzer 1 of this embodiment is an opposed type having two mounting parts (the first housing 8 and the second housing 11) opposed to each other across the flow path, and is a reflection type having a reflection unit 7, and is a multi-optical axis type having a plurality of light-emitting elements 2. The opposed type, reflection type, or multi-optical axis type tends to have a higher difficulty in alignment. In particular, the gas analyzer 1 of this embodiment that conforms to all of these has a higher difficulty in alignment.

[0031] Therefore, in order to facilitate alignment, the gas analyzer 1 of this embodiment is configured to be able to independently adjust the positions and angles (orientations) of the plurality of optical axes. More specifically, the gas analyzer 1 includes a plurality of light-emitting parts 14 each including a base member 12, a holding member 13, and a light-emitting element 2. Since the plurality of light-emitting parts 14 have the same structure, one light-emitting part 14 will be illustrated in detail below.

[0032] As Figures 2A to 2B shown, the holding member 13 holds the light-emitting element 2. The light-emitting element 2 emits light 4 along the optical axis. Hereinafter, the axis coinciding with the optical axis will be referred to as the Z axis. The holding member 13 is in the shape of an annular ring centered on the Z axis, and integrally holds the light-emitting element 2 at its inner peripheral edge. In addition, the holding member 13 has a contact surface 13a that is in the shape of an annular ring centered on the Z axis and is along the spherical surface having the spherical center O on the Z axis.

[0033] The base member 12 is in a ring shape, and this ring shape is centered on the Z axis when the holding member 13 is in the Figure 2B neutral position shown. In addition, the neutral position means a position where the Z axis is perpendicular to both the X direction and the Y direction described later. More specifically, the base member 12 has: a housing member 12b having a contact surface 12a that contacts the contact surface 13a of the holding member 13; and a frame member 12c integrally attached to the housing member 12b. The contact surface 12a is in a ring shape centered on the Z axis when the holding member 13 is in the neutral position, and is in the shape of a spherical surface that defines the shape of the contact surface 13a. The frame member 12c has an opposing wall 12d that opposes the contact surface 12a in the Z direction along the Z axis when the holding member 13 is in the neutral position, and is in a ring shape centered on the Z axis.

[0034] Two X'-axis adjustment screws 15 are attached to the opposing wall 12d. When the holding member 13 is in the neutral position, the two X'-axis adjustment screws 15 are arranged on the Y' axis with the Z axis interposed therebetween when viewed from the Z direction, and can move forward and backward in the Z direction when the holding member 13 is in the neutral position. Here, the X' axis and the Y' axis each pass through the center O of the spherical surface, and when the holding member 13 is in the neutral position, they intersect the Z axis at right angles and intersect each other at right angles. In addition, the holding member 13 is clamped by the tips of the two X'-axis adjustment screws 15 and the contact surface 12a. Therefore, by adjusting the positions of the two X'-axis adjustment screws 15 in the Z direction (that is, retracting one X'-axis adjustment screw 15 and advancing the other X'-axis adjustment screw 15), the holding member 13 and the light-emitting element 2 held by it are rotated about the X' axis, and thus the angle of the optical axis can be adjusted about the X' axis (adjustment of the tilt angle of the optical axis with respect to the optical axis in the neutral position).

[0035] In addition, two Y'-axis adjustment screws 16 are attached to the opposing wall 12d. When the holding member 13 is in the neutral position, the two Y'-axis adjustment screws 16 are arranged on the X' axis with the Z axis interposed therebetween when viewed from the Z direction, and can move forward and backward in the Z direction when the holding member 13 is in the neutral position. In addition, the holding member 13 is clamped by the tips of the two Y'-axis adjustment screws 16 and the contact surface 12a. Therefore, by adjusting the positions of the two Y'-axis adjustment screws 16 in the Z direction (that is, retracting one Y'-axis adjustment screw 16 and advancing the other Y'-axis adjustment screw 16), the holding member 13 and the light-emitting element 2 held by it are rotated about the Y' axis, and thus the angle of the optical axis can be adjusted about the Y' axis.

[0036] In addition, instead of making both the contact surface 13a and the contacted surface 12a spherical, only one of the contact surface 13a and the contacted surface 12a may be spherical. Further, in Figure 2B , the light-emitting element 2 is held by the holding member 13 in a manner of facing left (the orientation of emitting light 4 leftward) (i.e., there are an adjustment screw 15 around the X'-axis and an adjustment screw 16 around the Y'-axis on the surface side of the light-emitting element 2). However, instead of this, it may be configured such that in Figure 2B , the orientation of the holding member 13 remains unchanged and the light-emitting element 2 is held by the holding member 13 in a manner of facing right (i.e., there are an adjustment screw 15 around the X'-axis and an adjustment screw 16 around the Y'-axis on the back side of the light-emitting element 2).

[0037] The base member 12 is held by the first housing 8 in a manner of being positionally adjustable along the X-axis and the Y-axis, which are two axes that respectively intersect the Z-axis at right angles and intersect each other at right angles when the holding member 13 is in the neutral position. For example, the base member 12 can be positionally adjusted in the X-direction by an X-direction adjustment screw 17 that can advance and retreat in the X-direction along the X-axis, and can be positionally adjusted in the Y-direction by a Y-direction adjustment screw 18 that can advance and retreat in the Y-direction along the Y-axis. In addition, the X-axis and the X'-axis are parallel to each other, and the Y-axis and the Y'-axis are parallel to each other.

[0038] Thus, the optical axis can be translated in parallel by the positional adjustment of the base member 12, and the optical axis can be tilted by the angular adjustment of the holding member 13.

[0039] As described above, the opposed-type, reflection-type, and multi-optical-axis-type gas analyzer 1 of the present embodiment has a plurality of light-emitting units 14 capable of independently adjusting the position and angle of the optical axis, and thus easy alignment can be achieved.

[0040] The above-described embodiment is an example of the present invention, and various modifications can be made.

[0041] For example, the gas analyzer 1 of the above-described embodiment can be modified in various ways as described below.

[0042] The gas analyzer 1 of the above-described embodiment measures a specified component in the measurement gas 3 by irradiating the measurement gas 3 with light 4 from the light-emitting element 2 and receiving the light 4 that has passed through the measurement gas 3. The gas analyzer 1 includes: a base member 12 capable of being positionally adjusted along at least one axis not parallel to the optical axis of the light-emitting element 2; and a holding member 13 capable of being held by the base member 12 in a manner of being angularly adjustable about at least one axis not parallel to the optical axis and holding the light-emitting element 2. As long as it is this gas analyzer 1, various modifications can be made.

[0043] For example, the gas analyzer 1 of the above-described embodiment has two light-emitting elements 2, but is not limited thereto, and may have one light-emitting element 2 or may have three or more light-emitting elements 2.

[0044] In addition, the base member 12 of the gas analyzer 1 of the above-described embodiment can be positionally adjusted along two axes (X-axis, Y-axis), but it may also be that the base member 12 can be positionally adjusted along one axis, or it may be that the base member 12 can be positionally adjusted along three or more axes. In addition, the X-axis and the Y-axis of the gas analyzer 1 of the above-described embodiment are orthogonal, but are not limited thereto, and the X-axis and the Y-axis may also intersect at an angle other than a right angle.

[0045] In addition, the holding member 13 of the gas analyzer 1 of the above-described embodiment can be angularly adjusted about two axes (X'-axis, Y'-axis), but is not limited thereto, and it may also be that the holding member 13 can be angularly adjusted about one axis, or it may be that the holding member 13 can be angularly adjusted about three or more axes. In addition, the X'-axis and the Y'-axis of the gas analyzer 1 of the above-described embodiment are orthogonal, but are not limited thereto, and the X'-axis and the Y'-axis may also intersect at an angle other than a right angle. In addition, the X-axis and the X'-axis of the gas analyzer 1 of the above-described embodiment are parallel to each other, but are not limited thereto. In addition, the Y-axis and the Y'-axis of the gas analyzer 1 of the above-described embodiment are parallel to each other, but are not limited thereto.

[0046] In addition, the gas analyzer 1 of the above-described embodiment is a reflection type having a reflection portion 7, but is not limited thereto, and it may also be a non-reflection type opposed type in which the light-emitting element 2 and the light-receiving element 5 are mounted so as to face each other across the flow path. In addition, the gas analyzer 1 of the above-described embodiment is an opposed type, but is not limited thereto, and it may also be a probe type in which there is only one mounting portion to the flow path wall 9 and the reflection portion 7 is disposed in the flow path.

[0047] In addition, preferably, the gas analyzer 1 of the above-described embodiment has a plurality of light-emitting portions 14 each including a base member 12, a holding member 13, and a light-emitting element 2.

[0048] In addition, preferably, the gas analyzer 1 of the above-described embodiment has a reflection portion 7 that reflects the light 4 irradiated from the light-emitting element 2 and causes the light 4 to travel back and forth in the measurement gas 3.

[0049] In addition, preferably, in the gas analyzer 1 of the above-described embodiment, the light-emitting portion 14 and the reflection portion 7 are separately mounted on the flow path wall 9 forming the flow path of the measurement gas 3. The light-emitting portion 14 includes a base member 12, a holding member 13, and a light-emitting element 2, and the reflection portion 7 reflects the light 4 irradiated from the light-emitting element 2 and causes the light 4 to travel back and forth in the measurement gas 3.

[0050] Furthermore, preferably, in the gas analyzer 1 of the above-described embodiment, the holding member 13 is held by the base member 12 in such a manner that angle adjustment can be performed about at least two axes that are not parallel to the optical axis.

[0051] Furthermore, preferably, in the gas analyzer 1 of the above-described embodiment, the base member 12 can be positionally adjusted along at least two axes that are not parallel to the optical axis.

[0052] Furthermore, preferably, the gas analyzer 1 of the above-described embodiment uses wavelength tunable diode laser absorption spectroscopy.

[0053] Furthermore, preferably, in the gas analyzer 1 of the above-described embodiment, the holding member 13 is held by the base member 12 in such a manner that angle adjustment can be performed about at least one axis that intersects the optical axis.

[0054] Furthermore, preferably, in the gas analyzer 1 of the above-described embodiment, the holding member 13 is held by the base member 12 in such a manner that angle adjustment can be performed about two axes that respectively intersect the optical axis and intersect each other.

[0055] Furthermore, preferably, in the gas analyzer 1 of the above-described embodiment, the base member 12 can be positionally adjusted along at least one axis that intersects the optical axis.

[0056] Furthermore, preferably, in the gas analyzer 1 of the above-described embodiment, the base member 12 can be positionally adjusted along two axes that respectively intersect the optical axis and intersect each other.

Claims

1. A gas analyzer measures a specified component in a measurement gas by irradiating light from a light-emitting element to the measurement gas and receiving the light that has passed through the measurement gas. The gas analyzer is characterized by comprising: a base member capable of position adjustment along at least one axis not parallel to the optical axis of the light-emitting element; and a holding member held by the base member so as to be capable of angular adjustment about at least one axis not parallel to the optical axis and holding the light-emitting element, the holding member having a contact surface, the base member having: a housing member having a contact surface to be contacted with the contact surface of the holding member; and a frame member integrally mounted on the housing member, at least one of the contact surface and the contact surface to be contacted being in a shape along a spherical surface, the frame member having opposing walls, two adjusting screws capable of angular adjustment of the holding member about the axis are slidably mounted on the opposing walls, and the holding member is clamped by the tips of the two adjusting screws and the contact surface to be contacted.

2. The gas analyzer according to claim 1, characterized in that, There are a plurality of light-emitting parts each including the base member, the holding member, and the light-emitting element.

3. The gas analyzer according to claim 1 or 2, characterized in that, There is a reflecting part that makes the light travel back and forth in the measurement gas by reflecting the light irradiated from the light-emitting element.

4. The gas analyzer according to claim 1 or 2, characterized in that, The light-emitting part and the reflecting part are separately mounted on a flow path wall forming a flow path of the measurement gas. The light-emitting part includes the base member, the holding member, and the light-emitting element. The reflecting part makes the light travel back and forth in the measurement gas by reflecting the light irradiated from the light-emitting element.

5. The gas analyzer according to claim 1 or 2, characterized in that, The holding member is held by the base member so as to be capable of angular adjustment about at least two axes not parallel to the optical axis, both the contact surface and the contact surface to be contacted being in the shape along the spherical surface.

6. The gas analyzer according to claim 1 or 2, characterized in that, The base member is capable of position adjustment along at least two axes not parallel to the optical axis.

7. The gas analyzer according to claim 1 or 2, characterized in that, Wavelength tunable diode laser absorption spectrometry is used.

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