A high-precision rotary blade slit device

Abstract

The present invention discloses a high-precision rotary blade slit device, which comprises a vacuum box and at least one set of slit structures. Corresponding two side walls of the vacuum box are respectively provided with a light inlet and a light outlet; the slit structure includes a rotating mechanism and a blade. One ends of two rotating mechanisms are arranged outside the vacuum box, and the output end of each rotating mechanism extends into the vacuum box and is connected with the blade. The two blades are symmetrically arranged, and the gap between the two blades is the slit width H. The rotating mechanism is driven to drive the blade to rotate so as to change the size of the slit width. The advantages of the present invention are that, compared with the existing translational movement of the blade, the rotation of the blade by using the rotating mechanism in the present invention can greatly improve the precision of the slit device, meet the requirements of high-precision slits, and enable the slit device to be widely applied to high-precision optical instruments.

Description

Technical Field

[0001] The present invention relates to the technical field of optical instruments, and particularly to a high-precision rotating blade slit device. Background Art

[0002] A slit is a light-passing structure necessary for applications such as measurement and analysis by utilizing the physical properties of light such as diffraction, interference, and different substances absorbing different spectral bands. With the construction and application of the fourth-generation synchrotron radiation light source, some synchrotron radiation beamline technologies require the beam size and position accuracy to reach the nanometer (nm) or angstrom scale, such as nano-structured probe beamlines, nano-imaging beamlines, coherent diffraction beamlines, X-ray photon correlation spectroscopy beamlines, and so on. Facing such high requirements for spot size and position accuracy, it is necessary to improve the precision of optical components as much as possible.

[0003] Currently, most of the slits used in light sources adopt the method of driving the blade material to translate by a stepping motor to achieve the functions of closing and opening the slit. For example, the Chinese utility model patent with the publication number CN211855559U discloses a continuously automatically adjustable monochromator slit device to obtain a slit with a uniform width. However, the minimum resolution of the lead screw motor used in the above patent is generally 1 micron, and in some optical instrument devices with high precision above the micron level, the precision of this translational slit cannot meet the requirements. Summary of the Invention

[0004] The technical problem to be solved by the present invention is how to provide a high-precision slit device.

[0005] To solve the above technical problem, the present invention provides the following technical solutions:

[0006] A high-precision rotating blade slit device includes a vacuum chamber and at least one group of slit structures. The opposite two side walls of the vacuum chamber are respectively provided with a light inlet and a light outlet;

[0007] The slit structure includes a rotating mechanism and a blade. One end of the two rotating mechanisms is arranged outside the vacuum chamber, and the output end of each rotating mechanism extends into the vacuum chamber and is connected to the blade. The two blades are symmetrically arranged, and the gap between the two blades is the slit width H. Driving the rotating mechanism to drive the blade to rotate can change the size of the slit width.

[0008] In the present invention, rotating the blade by the rotating mechanism can greatly improve the precision of the slit device compared with the existing translational blade, meet the requirements of high-precision slits, and enable the slit device to be widely applied to high-precision optical instruments.

[0009] Preferably, the rotation mechanism includes a rotation motor, a driving wheel, a driven wheel, and a rotating shaft. The rotation motor is fixed on the outer wall of the vacuum box. The output end of the rotation motor is connected to the driving wheel. The driven wheel is rotatably arranged on the outer wall of the vacuum box and meshes with the driving wheel. One end of the rotating shaft is coaxially connected to the driven wheel, and the other end extends into the vacuum box to connect to the blade.

[0010] Preferably, there are two sets of slit structures. One set of slit structures is arranged horizontally, and the other set of slit structures is arranged vertically.

[0011] Preferably, the blade is a sheet-like blade.

[0012] Preferably, the blade is cylindrical. Multiple sets of cutting edges are provided on the blade to form a spiral shape. The length difference between the long sides of adjacent cutting edges is a. The angle formed by each cutting edge and the rotation center of the blade is B. Each rotation of B by the rotation mechanism causes the slit width H to increase by 2*a.

[0013] In the invention, the use of a rotation mechanism to rotate the blade can greatly improve the accuracy of the slit device compared to the existing linear movement of the blade, meet the requirements of high-precision slits, and enable the slit device to be widely applied to high-precision optical instruments.

[0014] Preferably, the cutting edge is made of tungsten carbide.

[0015] Preferably, the slit width H is 100 nm, a is 10 nm, and B is 0.36°.

[0016] Preferably, the slit width H is 100 nm, a is 5 nm, and B is 0.18°.

[0017] Preferably, the slit width H is 50 nm, a is 5 nm, and B is 0.18°.

[0018] Compared with the prior art, the beneficial effects of the present invention are:

[0019] 1. In the present invention, the use of a rotation mechanism to rotate the blade can greatly improve the accuracy of the slit device compared to the existing linear movement of the blade, meet the requirements of high-precision slits, and enable the slit device to be widely applied to high-precision optical instruments.

[0020] 2. By using a blade with multiple sets of cutting edges forming a spiral shape in cooperation with the rotational movement of the blade, the spiral-shaped blade can obtain a linear slit opening distance, and the slit accuracy does not change with the rotation angle of the blade, which can further improve the accuracy of the slit device. BRIEF DESCRIPTION OF THE DRAWINGS

[0021] Figure 1Schematic diagram of the structure of a high-precision rotary blade slit device according to Embodiment 1 of the present invention;

[0022] Figure 2 Partial schematic diagram of Embodiment 1 of the present invention;

[0023] Figure 3 Schematic diagram of the blade rotation according to Embodiment 1 of the present invention;

[0024] Figure 4 Schematic diagram of the blade rotation according to Embodiment 2 of the present invention. Detailed implementation manners

[0025] To facilitate those skilled in the art to understand the technical solution of the present invention, the technical solution of the present invention will be further described below with reference to the accompanying drawings of the specification.

[0026] In this application, unless otherwise clearly specified and defined, terms such as "installation", "connection", "connection", "fixation" and the like should be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, or integrated; it can be a mechanical connection, an electrical connection, or a communication connection; it can be directly connected, or indirectly connected through an intermediate medium, and can be the internal communication of two components or the interaction relationship between two components. For those of ordinary skill in the art, the specific meanings of the above terms in this application can be understood according to specific situations.

[0027] In this application, unless otherwise clearly specified and defined, the terms "first" and "second" are only used for descriptive purposes and cannot be understood as indicating or implying relative importance or implicitly indicating the quantity of the indicated technical features. Thus, the features defined with "first" and "second" may explicitly or implicitly include one or more of such features. In the description of this application, "a plurality" means two or more unless otherwise clearly specifically defined.

[0028] Embodiment 1:

[0029] Refer to Figures 1 to 2 , this embodiment discloses a high-precision rotary blade slit device, including a vacuum box 1 and two sets of slit structures 2. The corresponding two side walls of the vacuum box 1 are respectively provided with a light inlet 11 and a light outlet 12 to form an X-ray vacuum flight channel for the light beam line; one set of slit structures 2 is horizontally arranged to realize the horizontal opening size of the slit, and the other set of slit structures 2 is vertically arranged to realize the vertical opening size of the slit.

[0030] The slit structure 2 includes a rotating mechanism 21 and a blade 22. One end of two rotating mechanisms 21 is arranged outside the vacuum box 1. The output end of each rotating mechanism 21 extends into the vacuum box 1 and is connected to the blade 22. The two blades 22 are symmetrically arranged, and the gap between the two blades 22 is the slit. The rotating mechanism 21 is driven to drive the blade 22 to rotate to change the width of the slit.

[0031] The rotating mechanism 21 includes a rotating motor 211, a driving wheel 212, a driven wheel 213 and a rotating shaft 214. The rotating motor 211 is fixed on the outer wall of the vacuum box 1. The output end of the rotating motor 211 is connected to the driving wheel 212. The driven wheel 213 is rotatably arranged on the outer wall of the vacuum box 1 and meshes with the driving wheel 212. One end of the rotating shaft 214 is coaxially connected to the driven wheel 213, and the other end extends into the vacuum box 1 and is connected to the blade 22.

[0032] Refer to Figure 3 , the blade 22 is a sheet-like blade. The distance from the tip of the blade 22 to the rotation center of the blade 22 is R. The blade 22 changes from the translation driven by an existing stepping motor to the rotation generated by the rotation of the rotating motor 211. After rotating by an angle θ, the distance that the tip of the blade 22 is lifted is equal to Δh = R - R*cosθ = R(1 - cosθ). Then the slit width is H = 2*Δh = 2R(1 - cosθ). Obviously, only by controlling the rotation angle of the rotating motor 211 can the slit width be controlled. As shown in the following table:

[0033] 1 - cosθ R(1 - cosθ)(m) 1 - cos0.1° 1.52e-6 1.52e-8 1 - cos0.2° 6.09e-6 6.09e-8 1 - cos0.3° 13.71e-6 13.71e-8 1 - cos0.01° 1.52e-8 1.52e-10 1 - cos0.02° 6.09e-8 6.09e-10 1 - cos0.03° 13.71e-8 13.71e-10

[0034] Specifically, when the distance from the tip of the blade 22 to the rotation center of the blade 22 is R = 1 cm, only when the rotation accuracy of the rotating motor 211 reaches 0.1° can an accuracy of 15 nm be obtained. If a rotating motor 211 with a rotation accuracy of 0.01° is used, an accuracy of 0.15 nm can be obtained, and a rotating motor 211 with a rotation accuracy of 0.01° is easily available in the market.

[0035] Obviously, through the above embodiments, it can be seen that in the present invention, rotating the blade 22 by the rotating mechanism 21 can greatly improve the accuracy of the slit device compared with the existing translation of the blade, meet the requirements of high-precision slits, and enable the slit device to be widely applied to high-precision optical instruments.

[0036] Embodiment 2

[0037] Refer to Figure 4The difference between this embodiment and the first embodiment is that the blade 22 is cylindrical, the slit width is H, and a plurality of blades 221 are provided on the blade 22 to form a spiral shape. The length difference between the long sides of adjacent blades is a=a1-a2, where a1 is the length of the long side of the previous blade, and a2 is the length of the long side of the next blade.

[0038] The angle formed between each blade 221 and the rotation center of the blade 22 is angle B. Each rotation of the rotating mechanism 21 by B causes the slit width H to increase by 2*a.

[0039] In this embodiment, the slit width is 0 when the blade is at 0°, and the slit width is the maximum when the blade rotates 180°; further, the maximum slit width H is 10μm, the accuracy requirement is 10nm, and the spacing a between adjacent blades 221 is 10nm, and the rotating mechanism 21 meets one accuracy requirement every time it rotates B.

[0040] The slit width is H = 2*a*n;

[0041] Where n is a multiple of the required accuracy;

[0042] When the maximum slit width H=2*10*n=10000nm, it is calculated that n=500, then B=180° / 500=0.36°, that is, the rotating mechanism 21 replaces a set of blades 221 every time it rotates 0.36° to meet the accuracy requirement of 10nm.

[0043] Specifically, when the slit width H is required to be 100 nm, n=H / 2 / a=100 / 2 / 10=5 times, and the rotating mechanism 21 needs to drive the blade 22 to rotate 5 times to obtain the slit width of 100 nm, that is, rotate 10 times by 0.18°.

[0044] In this embodiment, a plurality of blades 221 are used to form a spiral blade 22 and the blade 22 rotates to cooperate. The spiral blade 22 can obtain a linear slit opening distance, and the slit accuracy does not change with the rotation angle of the blade 22. However, the opening accuracy of the sheet blade will change with the angle, or a very high angle accuracy is required at a high angle to obtain the corresponding accuracy, which increases the cost. For example, for a slit with an angle step of 0.36°, at 36°, the step accuracy obtained by the spiral blade per unit angle is still the same (1-cos0.36°)=0.00002; while the accuracy of the sheet blade becomes (cos36°-cos36.36°)=0.00371, which is 185.5 times larger, or in order to obtain the same accuracy requirement, the rotation angle becomes 36.00195°, and the angle accuracy requirement is greatly increased by several orders of magnitude. Therefore, the accuracy of the slit device is further improved by setting the spiral blade 22.

[0045] Example 3:

[0046] In this embodiment, when the blade is at 0°, the slit width is 0, and when the blade rotates 180°, it is the maximum slit width; further, when the maximum slit width H is 10 μm and the precision requirement is 5 nm, the distance a between adjacent cutting edges 221 is 5 nm, and each rotation of the rotating mechanism 21 by an angle B meets one precision requirement.

[0047] The slit width is H = 2 * a * n;

[0048] where n is the multiple of the precision requirement;

[0049] When the maximum slit width H = 2 * 5 * n = 10000 nm, it is calculated that n = 1000, then B = 180° / 1000 = 0.18°, that is, each rotation of the rotating mechanism 21 by 0.18° replaces a set of cutting edges 221 to meet the precision requirement of 5 nm.

[0050] Specifically, when the required slit width H is 100 nm, n = H / 2 / a = 100 / 2 / 5 = 10 times, then the rotating mechanism 21 needs to drive the blade 22 to rotate 10 precision requirements to obtain a slit width of 100 nm, that is, rotate 10 times by 0.18°.

[0051] Example 4:

[0052] In this embodiment, when the blade is at 0°, the slit width is 0, and when the blade rotates 180°, it is the maximum slit width; further, when the maximum slit width H is 10 μm and the precision requirement is 5 nm, the distance a between adjacent cutting edges 221 is 5 nm, and each rotation of the rotating mechanism 21 by an angle B meets one precision requirement.

[0053] The slit width is H = 2 * a * n;

[0054] where n is the multiple of the precision requirement;

[0055] When the maximum slit width H = 2 * 5 * n = 10000 nm, it is calculated that n = 1000, then B = 180° / 1000 = 0.18°, that is, each rotation of the rotating mechanism 21 by 0.18° replaces a set of cutting edges 221 to meet the precision requirement of 5 nm.

[0056] Specifically, when the required slit width H is 50 nm, n = H / 2 / a = 50 / 2 / 5 = 5 times, then the rotating mechanism 21 needs to drive the blade 22 to rotate 5 precision requirements to obtain a slit width of 50 nm, that is, rotate 5 times by 0.18°.

[0057] For those skilled in the art, it is obvious that the present invention is not limited to the details of the above-described exemplary embodiments, and the present invention can be implemented in other specific forms without departing from the spirit or basic characteristics of the present invention. Therefore, from any point of view, the embodiments should be regarded as exemplary and non-limiting. The scope of the present invention is defined by the appended claims rather than the above description. Therefore, all changes falling within the meaning and scope of the equivalent elements of the claims are intended to be embraced within the present invention, and any reference signs in the claims should not be regarded as limiting the claims involved.

[0058] The above-described embodiments merely represent the implementation manners of the invention. The protection scope of the present invention is not limited to the above embodiments only. For those skilled in the art, without departing from the concept of the present invention, several modifications and improvements can be made, and these all fall within the protection scope of the present invention.

Claims

1. A high-precision rotary blade slit device, characterized in that: It includes a vacuum chamber and at least one set of slit structures. Light inlet and light outlet are respectively arranged on two opposite side walls of the vacuum chamber. The slit structure includes a rotating mechanism and a blade. One ends of two rotating mechanisms are arranged outside the vacuum chamber. The output end of each rotating mechanism extends into the vacuum chamber and is connected to the blade. The two blades are symmetrically arranged. The gap between the two blades is the slit width H. The rotating mechanism is driven to drive the blade to rotate to change the size of the slit width. The blade is cylindrical. Multiple sets of cutting edges are arranged on the blade to form a spiral shape. The length difference between the long sides of adjacent cutting edges is a. The angle formed by each cutting edge and the rotation center of the blade is B. Each rotation of the rotating mechanism by B results in an increase in the slit width H by 2*a.

2. The high-precision rotary blade slit device according to claim 1, characterized in that: The rotating mechanism includes a rotating motor, a driving wheel, a driven wheel and a rotating shaft. The rotating motor is fixed on the outer wall of the vacuum chamber. The output end of the rotating motor is connected to the driving wheel. The driven wheel is rotatably arranged on the outer wall of the vacuum chamber and meshes with the driving wheel. One end of the rotating shaft is coaxially connected to the driven wheel, and the other end extends into the vacuum chamber and is connected to the blade.

3. A high-precision rotary blade slit device according to claim 1, characterized in that: Two sets of slit structures are provided. One set of slit structures is horizontally arranged, and the other set of slit structures is vertically arranged.

4. A high-precision rotary blade slit device according to claim 1, characterized in that: The blade is a sheet-like blade.

5. A high-precision rotary blade slit device according to claim 1, characterized in that: The cutting edge is made of tungsten carbide material.

6. The high-precision rotary blade slit device according to claim 1, wherein: The slit width H is 100 nm, a is 10 nm, and B is 0.36°.

7. A high-precision rotary blade slit device according to claim 1, characterized in that: The slit width H is 100 nm, a is 5 nm, and B is 0.18°.

8. A high-precision rotary blade slit device according to claim 1, characterized in that: The slit width H is 50 nm, a is 5 nm, and B is 0.18°.

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