CVD reactor and method for handling a process chamber lid plate

Abstract

The invention relates to a CVD reactor having a housing (1), a base (5) which bounds the process chamber (23) downward and a cover plate (6) which bounds the process chamber (23) upward, wherein the cover plate (6) can be raised by a lifting element (11) which can be raised from a lowered position into an installed position up to an abutment position against a fixed section (21) of the housing (1), against which the cover plate (6) can be fixed on the housing (1). In order to be able to fix the cover plate (6) on the housing (1) automatically or semi-automatically, a lifting element (11) is provided which either surrounds the base (5) or supports the base (5) at its edge. The lifting element (11) can also be formed by a protective tube. The cover plate (6) can be brought into its position which can be removed through a loading opening (18) by the lifting element (11).

Description

TECHNICAL FIELD

[0001] The invention relates to a method for handling a cover plate which defines the boundary of a process chamber of a CVD reactor upwards, in particular for fully or semi-automatically exchanging the cover plate. The invention also relates to an improved design of a CVD reactor in which the cover plate can be raised by a lifting element from a lowered position into an installed position. BACKGROUND

[0002] A CVD reactor is known from document DE 10 2012 110 125 A1. There, the cover plate is a shield plate with gas through openings arranged below the gas outlet plate of a showerhead which is brought into an installed position by simultaneous vertical movement of the base and the cover plate, wherein the base is moved in vertical direction by a lifting device and carries the shield plate on its surface. Fixing means are provided which enable automatic fixing of the cover plate. A similar device is described in document DE 10 2019 117 479 A1. Document WO 2007 / 060143 A1 also discloses a cover plate which is fixed below the gas outlet plate by holding elements. Furthermore, document JP 5721132 B2 also belongs to the prior art. SUMMARY

[0003] The invention solves the technical problem of advantageously improving devices and methods of the type according to the invention.

[0004] The above-mentioned technical problem is solved by the invention given in the claims, wherein the dependent claims are not only advantageous design solutions of the invention in the claims, but also independent solutions of the above-mentioned technical problem.

[0005] First and essentially it is proposed to use the body surrounding the susceptor as a lifting element or to use the body supporting the susceptor at its edge as a lifting element. The body can be one piece or multiple pieces. The body surrounding the susceptor can be a closed body or a body interrupted in the circumferential direction. The lifting element can be a tube, for example. The body can be formed by a plurality of circumferentially adjacent partial bodies, whereby the body can have a planar profile corresponding to a circular ring, for example. The body can have a planar profile corresponding to a circular ring, for example. However, the body can also be formed by a plurality of vertically extending rods, posts or the like, which are arranged at different azimuthal positions around the susceptor or the heating device. In a preferred design of the application, the lifting element can be formed by a carrier element carrying the susceptor, as is known, for example, from document DE 10 2007 027 704 A1. The carrier element can have an upper edge and the shape of a tube. In the process position, the susceptor is supported on the upper edge. The edge of the susceptor lies flat on the upper edge here. In order to use the carrier element to lift the cover plate, the susceptor is first brought out of the housing of the CVD reactor through the loading port. For this purpose, the door closing the loading port is opened. It can be provided that, for this purpose, the annular gas outlet mechanism surrounding the susceptor must also be lowered so that it does not lie in the movement track of the susceptor, which moves in its plane of extension. The lifting element can be fixed on a vertically movable carrier device. The carrier device can be vertically movable. The carrier device can also carry the heating device with which the susceptor is heated from below in the process position. In a variant of the application, the gas inlet mechanism can perform the function of the lifting element. In a preferred variant, the installation of the cover plate is carried out automatically, in particular fully automatically. It is in particular provided that the exchange of the cover plate is semi-automatically or fully automatically. In a variant of the application, the cover plate can be fixed on a lid of the housing, which closes an upwardly facing housing opening. On the lid, a gas inlet mechanism can be fixed, which has the form of a shower head. The cover plate can be a protection plate, which extends parallel to the gas outlet face of the gas inlet mechanism. The gas outlet face can have a plurality of gas outlet openings opening into the direction of the cover plate. Between the gas outlet face and the upper surface of the cover plate having gas passage openings, a gap can be present, in which the gas expelled from the gas outlet face can be distributed. The edge of the cover plate can form a sealing bead, which in the installed position of the cover plate sealingly rests on a fixing section, for example a fixing ring or the like. The cover plate can be fixed on the fixing section by fixing means, for example screws, bayonets or the like. One or a plurality of fixing means can also be arranged outside the ring region of the cover plate. The fixing means can be provided over the entire face of the cover plate in order to connect it to the lid or the gas inlet mechanism. They can also be arranged near the center of the cover plate. The fixing means are preferably designed in such a way that they allow a small lateral movement of the plate relative to the gas inlet mechanism without blocking. In this way, different thermal expansions can be compensated. In a first variant of the application, when exchanging the cover plate, a cover plate used in a previous deposition process, on which a coating has already been formed, is exchanged for a cleaned cover plate.To this end, the lifting element can be brought into a raised position in which it supports the cover plate which is fixed on the fixing section. In a position in which the lifting element lies against the cover plate, the fixing means for fixing the cover plate on the fixing section are released. By lowering the lifting element, the cover plate is brought into a position in which it can be gripped by a gripper which extends into the interior space of the housing through the loading opening, in order to be able to remove it from the interior space through the loading opening. The cleaned cover plate is fixed on the fixing section in the reverse order. In a second variant of the invention, a cover which closes an opening of the housing carries the cover plate. In a raised position, temporary fixing means are used to hold the cover plate on the fixing section. The screws or other fixing means for fixing the cover plate on the fixing section can be released manually or automatically. Subsequently, the cover is lowered until a position in which the cover plate is carried by the lifting element. In this position, the temporary fixing means are released. By lowering the lifting element, the cover plate is released from the fixing section and brought into a position in which it can be gripped by a gripper. The cleaned cover plate is placed on the lifting element. The lifting element is brought into a raised position in which the cover plate lies against the fixing section, which is fixed there with temporary fixing means. The cover can be further raised until a position in which the screws or other fixing means can be installed. The temporary fixing means are removed. The cover is brought into its closed position. As temporary fixing means, C-shaped clips can be used with which the cover plate is temporarily held on the fixing section, in particular on the cover. The removal or introduction of the cover plate from or into the interior space of the chamber can be achieved by means of a robot arm which can extend through the loading opening. In the case of fully automatic installation, the cover plate is connected to the fixing section by means of automatically actuatable fixing means. In the case of semi-automatic installation, temporary fixing means, for example C-shaped clips, are used with which the cover plate is temporarily fixed on the fixing section. This is preferably achieved when the cover is brought into a first open position, in which the cover plate is brought by the lifting element above the upper edge of the housing opening, so that the edges of the cover plate are accessible and the temporary fixing means can be fixed thereon. Subsequently, in the case of semi-automatic installation, the cover is further raised until the downwardly facing broad side of the cover plate is accessible in order to install the fixing means there, which can be, for example, screw elements. In the case of fully automatic installation, this intermediate step is not necessary. The installation of the cover plate can be achieved while the cover is closed. After the fixing of the fixing means, the lifting element can be lowered. If a carrier element which carries the susceptor in the process position is used as the lifting element, the susceptor must be removed before the cover plate is exchanged from the process chamber. This is achieved after the lowering of the outgas mechanism which, in the process position, lies in the movement path of the susceptor to be removed. After the exchange of the cover plate, the susceptor loaded with the substrates to be coated can be brought into the process chamber through the lowered outgas mechanism through the loading opening. This is achieved by means of a robot arm which places the susceptor on the carrier element.The gas outlet mechanism is then raised until the upper edge of the gas outlet mechanism abuts the edge of the cover plate or the section of the housing surrounding the cover plate. The cover plate can be made of quartz, steel, in particular fine steel, or a ceramic material, which has a passage for the passage of process gas, which is fed into the gap between the cover plate and the gas inlet mechanism. The lifting element surrounding the susceptor can be made of steel, in particular fine steel, quartz or a ceramic material. It can be formed by a tubular body, in the cavity of which a heating device for heating the susceptor is arranged. The heating device can be moved vertically together with the lifting element. The lifting element can also function as a gasket in the process position, by which the space arranged below the susceptor is shielded with respect to the process gas. The lifting element can thus form the function of a shield tube.

[0006] The invention also relates to an improved design of the cover plate. The cover plate has a ring-shaped elevation near its edge, which points towards the gas inlet mechanism or the gas outlet plate. The ring-shaped elevation defines a gap between the gas outlet plate and the cover plate. The ring-shaped elevation preferably lies in sealing abutment on the flat underside of the gas inlet mechanism or of the gas outlet plate formed by the gas inlet mechanism. The gas outlet plate can have a bevelled edge face in the region of the elevation. The elevation extends in the region of this bevelled edge face. The elevation prevents the process gas fed into the gap from escaping sideways.

[0007] A further aspect of the invention relates to an improved design of the lid of the housing. The gas inlet mechanism is an integral component of the lid of the housing. To this end, the lid of the housing forms a ring-shaped strip, which is materially formed on the cover plate of the lid. The ring-shaped strip has a radially outwardly facing wall, which lies in abutment on the inner surface of the housing wall in the mounted state of the lid. The ring-shaped strip also has a radially inwardly directed face, on which the outer edge section of the gas inlet mechanism lies in abutment. The gas inlet mechanism is preferably surrounded and enclosed by the ring-shaped strip. BRIEF DESCRIPTION OF DRAWINGS

[0008] Embodiments of the invention are explained below on the basis of the drawings. In the drawings:

[0009] Figure 1 A cross section of the CVD reactor in the process position is shown, in which the process chamber 23 is bounded downwards by the susceptor 5 and upwards by the cover plate 6, wherein the process chamber 23 is surrounded by the gas outlet mechanism 3,

[0010] Figure 1a An enlarged view of the partial view la is shown,

[0011] Figure 2 A view according to Figure 1 is shown, however, with the lowered gas outlet mechanism 3,

[0012] Figure 3 A view according to Figure 2 is shown, wherein the susceptor 5 is removed through the loading opening 18,

[0013] Figure 4 a view according to Figure 3 , in which the lid 2 is brought into a first open position, in which the lid is located about 20 to 30 mm above the edge 24' of the opening 24 of the housing 1, in which the temporary fixing means 19 are arranged to temporarily fix the cover plate 6 on the lid 2,

[0014] Figure 5 a view according to Figure 4 , in which the lid 2 is brought into a second open position,

[0015] Figure 6 a view according to Figure 5 , in which the screw elements 20 for fixing the cover plate 6 on the lid 2 are loosened and the cover plate 6 is held on the lid 2 only by the temporary fixing means 19,

[0016] Figure 7 a view according to Figure 6 , in which the cover plate 6, which is held on the lid 2 only by the temporary fixing means 19, is brought into a first open position, in which the upper edge of the lifting element 11 supports the cover plate 6,

[0017] Figure 8 a view according to Figure 7 , in which the temporary fixing means 19 have been removed so that the cover plate 6 is carried only by the lifting element 11,

[0018] Figure 9 a view according to Figure 8 , after the lifting element 11 has been lowered into a position in which the cover plate 6 has been loosened from the lid 2 and can be removed from the loading opening 18 by the clamping arm,

[0019] Figure 10 a view according to Figure 9 , in which the interior space 22 contains neither the base nor the cover plate 6, before the cleaned cover plate is brought into the interior space 22, which is fixed on the lid 2 substantially in the reverse order,

[0020] Figure 11 a view according to Figure 1a of a second embodiment in which the outlet mechanism 3 performs the function of the lifting element. DETAILED DESCRIPTION

[0021] Figure 1 The basic components are shown in the form of a cross-section through a cut CVD reactor. The CVD reactor has a gastight housing 1 which has an upwardly facing opening 24. In Figure 1The process position shown, the opening 24 is closed by the lid 2. The lid 2 carries an inlet means 4 in the form of a shower head. The inlet means 4 has a gas distribution volume, which is bounded downwards by an outlet plate 21, which forms an outlet face by its bottom face. The outlet plate 21 has a plurality of outlet openings 17, through which gas can be discharged from the gas distribution chamber 17 into the gap 15. The gap 15 extends between the outlet plate 21 and a cover plate 6, which is arranged below the inlet means 4. The edge of the cover plate 6, which is essentially disc-shaped, has a raised portion 14, which rests on an edge section of the outlet plate 21, wherein the height of the raised portion 14 defines the height of the gap 15. However, other spacing elements, which are not shown in the figure and are arranged in the area enclosed by the raised portion 14, can also be provided to define the gap. Thermal deformations can be compensated by such spacing elements. The height of the gap 15 can also be defined additionally by other spacing elements. The cover plate 6 has a plurality of gas passage openings 16, through which gas entering the gap 15 can flow into a process chamber 23 arranged below the cover plate 6. The cover plate 6 bounds the process chamber 23 upwards, while the base 5 bounds the process chamber 23 downwards.

[0022] The edge of the cover plate 6 can have a lower material thickness in the area in which the surrounding raised portion 14 is arranged than in the central area, wherein the material thickness is preferably reduced on the upper side, so that an outwardly rising gap relative to the inlet means can be formed. The material thickness can also be reduced on the upper side, so that an outwardly rising gap relative to the inlet means is formed.

[0023] The edge of the base 5 rests on a carrier element, which can have the shape of a tube in an embodiment. It can be formed in particular by a protection tube 11. The protection tube 11 encloses a device with a heating device 7, which is located below the base 5 and has a carrier plate 12 for supplying the heating device 7 with electrical power. The carrier element, i.e. in particular the protection tube 11 and the heating device 7, can be raised by a lifting device 10. In a variant of the invention, the tube 11 has the function of a carrier tube, on which the edge of the base rests. The tube 11 forms a carrier for the base 5.

[0024] The process chamber is surrounded by an annular outlet means 3. By means of a further lifting device, the outlet means 3 can be lowered from the process position shown in front of the loading opening 18 to a position in which the loading opening 18 is uncovered. In the position shown, the outlet means 3 is arranged in the process position shown in front of the loading opening 18. Figure 1 In the position shown, the base 5 can be gripped by a gripper, which extends through the loading opening 18 into the interior space 22 of the housing, so that it can be moved upwards as shown in the position shown in the lower part of the figure. Figure 2 In the position shown, the base 5 can be gripped by a gripper, which extends through the loading opening 18 into the interior space 22 of the housing, so that it can be moved upwards as shown in the position shown in the lower part of the figure. Figure 3is removed from the housing 1 through the loading opening 18 in order to exchange another base 5. The element indicated by reference numeral 9 forms an air outlet duct through which the gas collected in the air outlet mechanism 3 can be conveyed to the outside. However, the element indicated by reference numeral 9 in the drawing can also represent a further lifting device by means of which the air outlet mechanism 3 can be lowered and raised.

[0025] In the fully automatic exchange of the cover plate 6, the lifting element 11, which in the embodiment is formed by a protective tube that engages the edge region of the cover plate 6 from below, is moved upwards in order to support the cover plate 6 therewith, so that the fixing means that hold it on the lid 2 or the air inlet mechanism 4 can be released automatically, for example as suggested in the prior art mentioned at the outset. The cover plate 6 is then brought into the extraction position by lowering the lifting element 11, in which extraction position it can be extracted from the interior space 22 by means of a clamping arm that extends into the interior space 22 through the loading opening 18. The fixing of the cover plate 6 on the cover plate 2 or the air inlet mechanism 4 is effected in the reverse order. The cover plate 6 is placed on the lifting element 11. The lifting element 11 is raised until the cover plate 6 or the ridge 14 rests against the air inlet mechanism 4 or the lid 2. The fixing means are then brought into the fixing position. Additional centering means can be provided by means of which the cover plate 6 can be brought into a central position. However, the centering means can also be formed by the fixing means.

[0026] In order to exchange the cover plate 6 semi-automatically, the lid 2 is raised to Figure 4 the first open position shown, in which the cover plate is arranged, inter alia, together with the lifting element 11, about 10 to 30 mm above the opening edge 24'. In the first open position, the C-shaped clamps 19 are arranged on the cover plate 6, which is fixed on the fixing section 21 of the lid 2 with screws 20 (see Figure 6 ). The lid 2 is then brought to Figure 5 the second open position shown. Alternatively, the lid 2 can be brought directly to Figure 5 the open position shown, in order to fix the temporary fixing means formed by the C-shaped clamps 19 there.

[0027] Figure 6 It is shown how the aforementioned screws 20 are loosened in the second open position, in which the cover plate 6 is permanently fixed on the lid 2 by means of the screws 20. The lid 2, together with the cover plate 6, which is held only by the clamps 19, is lowered into the first open position. The protective tube 11, which in this embodiment has the function of a lifting element, has previously been brought into the raised installation position, in which the upper edge of the lifting element 11 supports the cover plate 6. The clamps 19 are removed, so that the operating position shown is achieved, in which the cover plate 6 is carried only by the lifting element 11. The lid 2 can be held in this position by further holding means, which are not shown. Figure 8 ​

[0028] This is achieved by lowering the lifting element 11. Figure 9 The operating position shown is in which the cover plate 6 is located in the plane of the loading port 18, such that the cover plate 6 can be removed from the internal space 22 by moving through the loading port 18 in its extended plane by means of a clamping arm (not shown).

[0029] The cleaned cover plate 6 has been fixed to the cover 2 in essentially the reverse order. For this purpose, the cover plate 6 is brought into the internal space 22 of the housing 1, which essentially has the following arrangement... Figure 10 The operating position of cover plate 6. Figure 9 Place it on the lifting element 11. Raise the lifting element 11 to... Figure 11 In the first open position shown, Figure 11 In the first open position shown, the cover 6 rests against the air intake mechanism 4, or rather, the cover 2. Installation Figure 7 The temporary fixing device 19 shown secures the cover plate 6 to the cover 2. Centering can be performed here if necessary. The cover 2 is raised to... Figure 6 In the second open position shown, a screw 20 or other fastening device is installed, and the cover 6 is permanently fixed to the cover 2 by the screw 20 or other fastening device. Alternatively, the centering of the cover 6 can also be accomplished by a durable or permanent fastening device 20.

[0030] Clip 19 can be removed. However, it is also possible to lower the cover 2 beforehand. Figure 4 In the indicated position, so that clip 19 can be removed in that position. Then, lower the cover 2 to... Figure 3 In the closed position shown. The lifting element 11 is brought into the lowered position. In this position, the new base 5 can be brought into the internal space 22 through the loading port 18, where it is placed on the lifting element 11.

[0031] Figure 11 According to Figure 1a A variation of the invention is shown in the view, wherein the edge of the cover plate 6 can be supported by the upper section of the annular venting mechanism 3. In this variation, the venting mechanism 3 can not only vent from... Figure 2 The lowering position shown is lowered. The exhaust mechanism 3 can also be lowered from... Figure 1 The process position shown is moved to an elevated position (not shown), in which it protrudes beyond edge 24' so as to bring the cover plate 6 into the elevated position.

[0032] Figure 1 and 1aAn annular strip 25 is shown, which is formed from the underside of the cover and which is formed integrally from the material of the cover plate, which consists of metal. The annular strip 25 has a radially outwardly facing surface, which rests on the surface of the wall of the housing 1. The annular strip 25 projects into the opening 24 when the cover is closed.

[0033] The annular strip 25 surrounds the gas inlet mechanism 4. The annular strip 25 forms a circular receiving chamber, in which the fixed gas inlet mechanism 4, which is in contact on the underside of the cover 2, is embedded. The outer edge section 26 of the gas inlet mechanism 4 is preferably formed integrally from the material of the gas outlet plate 21, which has a radially outwardly facing wall, which rests on the radially inwardly facing wall of the annular strip 25. The height of the annular strip 25 is preferably identical to the height of the gas inlet mechanism 4, so that the surface of the gas inlet mechanism 4, which faces the process chamber 23, extends flush with the axially directed face of the annular strip 25.

[0034] Figure 1a It is shown that the face of the cover plate 6, which faces the gas inlet mechanism 4, extends obliquely in the edge region, so that the material thickness of the cover plate 6 decreases wedge-shaped at the edge. The elevation 14, which has already been described above, extends into this region, which contacts the gas inlet mechanism 4 or the gas outlet plate 21. In an embodiment, the circularly extending elevation 14 rests on the outer edge section 26. Process gas, which enters the gap 15 through the gas outlet opening 17, is prevented from being discharged laterally from the gap 15 by the elevation 14.

[0035] The above-described embodiments serve to illustrate the application generally included by the present application, which improves the prior art at least by the following combinations of features, respectively, also individually, wherein two, several or all of these combinations of features can also be combined, i.e.:

[0036] A CVD reactor, characterized in that the lifting element 11 is formed by one or more bodies which surround the susceptor 5 or support the susceptor at the edge thereof.

[0037] A method, characterized in that the lifting element 11 is formed by one or more bodies which surround the susceptor 5 or support the susceptor at the edge thereof.

[0038] A CVD reactor or a method, characterized in that the lifting element 11 is a carrier element which carries the susceptor 5 or a gas inlet mechanism 3 which surrounds the susceptor 5.

[0039] A CVD reactor or a method, characterized in that the lifting element 11 has a circular ring-shaped planar profile and / or the lifting element 11 has the shape of a tube.

[0040] A CVD reactor or method, characterized in that the fixing section 21 is formed by the lid 2 closing the opening 24 of the upper part of the housing 1 and the lifting element 11 can be raised to a position in which at least an upper section of the lifting element 11 protrudes beyond the edge 24' of the opening 24.

[0041] A CVD reactor or method, characterized in that the cover plate 6 is fixed or fixable on the fixing section 21 by temporary and / or permanent fixing means 19, 20 and / or the cover plate 6 has an annular elevation 14 directed towards the gas inlet means 4 or the gas outlet plate 21, which elevation rests in a sealingly abutting manner on the gas inlet means 4 or the gas outlet plate 21 and / or the lid 2 has an annular strip 25, which extends into the opening 24 and surrounds the gas inlet means 4.

[0042] A CVD reactor or method, characterized in that the fixing section 21 is the gas inlet means 4 or surrounds the gas inlet means 4, wherein the gas inlet means 4 has a plurality of gas outlet openings 17, which open into the gap 15 between the cover plate 6 and the gas outlet face of the gas inlet means 4, wherein the cover plate 6 has gas passage openings 16.

[0043] A CVD reactor or method, characterized in that the gas outlet means 3 can be moved from a process position, which lies in the movement path of the susceptor 5 or the cover plate 6, into a lowered position.

[0044] A CVD reactor or method, characterized in that the fixing section 21 is assigned to the lid 2 closing the opening 24 of the housing 1 and, for the installation of the cover plate 6, the lid 2 is brought into a first open position before or while the cover plate 6 is raised and, after said raising, the cover plate 6 carried by the lifting element 11 is fixed on the lid 2 by first fixing means 19 and then, after the lid 2 has been raised, the lid is brought into a second open position, during which the cover plate 6 is separated from the lifting element 11, fixed on the lid 2 by second fixing means 20 and / or, for the removal of the cover plate 6, the lid 2 is first brought into a first open position, in which the first fixing means 19 are fixed on the lid 2, and, after the lid 2 has been raised to a second open position, the second fixing means 120 are released and the lid 2 is then brought back into the first open position, in which the cover plate 6 is supported on the lifting element 11, wherein the first fixing means 19 are removed in this position.

[0045] All disclosed features, per se or in any combination, are essential to the invention. The disclosure of the present application therefore also contains the entire disclosure of the priority documents (prior application copies) attached herewith, the purpose being to incorporate the features of these documents into the claims of the present application as well. The dependent claims utilize their features to characterize an independently inventive design solution to the prior art, even without the features of the claims cited, especially for the purpose of divisional applications based on these claims. The invention given in all claims can additionally have one or more of the features given in the above description, especially the attached drawings, and / or a figure of the attached list of features. The invention can also relate to designs in which individual features stated in the above description are not implemented, especially if they are apparent to a person skilled in the art or can be replaced by other technically equivalent means.

[0046] List of reference signs

[0047] 1 housing

[0048] 2 lid

[0049] 3 gas outlet mechanism

[0050] 4 gas inlet mechanism

[0051] 5 base

[0052] 6 cover plate

[0053] 7 heating device

[0054] 8 rod

[0055] 9 lifting device, gas outlet tube

[0056] 10 lifting device

[0057] 11 lifting element, protection tube

[0058] 12 carrier plate

[0059] 13 carrier

[0060] 14 elevation

[0061] 15 gap

[0062] 16 gas passage

[0063] 17 gas outlet, gas distribution chamber

[0064] 18 loading opening

[0065] 19 holding clip, fixing means

[0066] 20 screw, fixing means, threaded element

[0067] 21 gas outlet plate, fixed section

[0068] 22 inner space

[0069] 23 process chamber

[0070] 24 opening

[0071] 24' edge of the opening

[0072] 25 annular strip

[0073] 26 outer edge section

Claims

1. A CVD reactor with a housing (1) having an opening (24) with an opening edge (24') facing upwards, with a cover (2) which is supported on the opening edge (24') and closes the opening (24), with a process chamber (23) arranged in the housing (1), which is bounded downwards by a base (5) and upwards by a cover plate (6), the base (5) being heatable by a heating device (7) arranged below the base (5), wherein the cover (2) has a gas inlet mechanism (4) with a gas distribution volume in the form of a shower head, wherein the cover plate (6) is fixed on a fixing section (21) of the cover (2) by releasable fixing means (20), with a loading opening (18) lying in a plane, which is configured in such a way that the cover plate (6) can be transported via the loading opening (18) by a gripper after lowering into the plane, with a vertically movable lifting device which is provided for acting on the edge of the cover plate (6) with a section of a lifting element (11) for selectively lifting or lowering the cover plate (6) into the plane, characterized in that the lifting element (11) is formed by a protective tube which surrounds the heating device (7), the protective tube forming a protective tube edge by an upper section, on which the edge of the base is supported in the process position, wherein the lifting device is configured in such a way that the cover plate (6) is lifted together with the cover (2) fixed on the cover plate (6) by the fixing means (20) by means of the lifting element (11) into a position in which the protective tube edge protrudes beyond the opening edge (24') of the opening (24) so that the fixing means (20) can be released manually or automatically, wherein the protective tube edge acts on the edge of the cover plate (6).

2. A CVD reactor with a housing (1), the housing having an opening (24) with an opening edge (24') facing upwards, with a cover (2) which is supported on the opening edge (24') and closes the opening (24), with a process chamber (23) arranged in the housing (1), which is bounded downwards by a base (5) and upwards by a cover plate (6), the base (5) being heatable by a heating device (7) arranged below the base (5), wherein the cover (2) has a gas inlet mechanism (4) with a gas distribution volume in the form of a shower head, wherein the cover plate (6) is fixed on a fixing section (21) of the cover (2) by releasable fixing means (20), with a loading opening (18) lying in a plane, which is configured in such a way that the cover plate (6) can be transported via the loading opening (18) by a gripper after lowering into the plane, with a vertically movable lifting device which is provided for acting on the edge of the cover plate (6) with a section of a lifting element (11) for selectively lifting or lowering the cover plate (6) into the plane, ​ wherein ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ wherein ​ ​ ​ ​ ​ characterized in that the lifting device is configured to lift the cover plate (6) together with the lid (2) fixed to the cover plate (6) by means of the fixing means (20) by means of the lifting element (11) into a position in which the section of the lifting element (11) acting on the edge of the cover plate (6) projects beyond the opening edge (24') of the opening (24) outwards, so that the fixing means (20) can be released manually or automatically, wherein the lifting element (11) is formed by a gas outlet (3) which surrounds the base (5) and which can be lowered from a process position in which it is arranged in front of the loading opening (18) into a position in which the loading opening (18) is uncovered.

3. A method for removing a cover plate (6) from a CVD reactor according to claim 1 or 2, having the following steps: 1- lifting the lid (2) by upward displacement of the protection tube or gas outlet (3) into a mounting position in which the cover plate (6) is located above the opening edge (24'); 2- releasing the cover plate (6) from the fixing section (21); 3- lowering the protection tube or gas outlet (3) carrying the cover plate (6) into the plane of the loading opening (18); 4- removing the cover plate (6) from the protection tube or gas outlet (3) through the loading opening (18).

4. A method for inserting a cover plate (6) removed from a CVD reactor according to claim 3 into a CVD reactor according to claim 1 or 2, having the following steps: 1- with the lid (2) open: placing the cover plate (6) at the upper edge of the protection tube or gas outlet (3) placed into the plane of the loading opening (18); 2- lifting the cover plate (6) by upward displacement of the protection tube or gas outlet (3) until the cover plate (6) rests against the fixing section in the mounting position; 3- fixing the cover plate (6) on the fixing section (21); 4- lowering the protection tube or gas outlet (3) into a lowered position in which the lid (2) closes the opening (24).

5. An apparatus having a CVD reactor according to claim 1 or 2, characterized in that Temporary fixing means (19) are provided by means of which the cover plate (6) can be fixed to the fixing section (21).

6. The CVD reactor according to claim 1 or 2, characterized in that The cover plate (6) has an annular elevation (14) directed towards the gas inlet (4) which rests in sealing abutment on the gas inlet (4), and the lid (2) has an annular strip (25) which projects into the opening (24) and which surrounds the gas inlet (4).

7. A CVD reactor according to claim 1 or 2, characterized in that the fixing section (21) is formed by or surrounds the gas inlet (4), wherein the gas inlet (4) has a plurality of gas outlets (17) which open into the gap (15) between the cover plate (6) and the gas outlet face of the gas inlet (4), wherein the cover plate (6) has gas passage openings (16).

8. The CVD reactor according to claim 1 or 2, characterized in that The base (5) or cover plate (6) can be brought into the interior space (22) of the housing (1) through the loading opening (18) by means of a movement in the direction of the surface extending thereon, wherein the air outlet (3) can be moved from a process position, which lies in the movement path of the base (5) or cover plate (6), into a lowered position.

9. The method according to claim 3, characterized in that In order to remove the cover plate (6), the cover (2) is first brought into a first open position, in which a temporary securing means (19) is secured on the cover (2), and after the cover (2) is raised to a second open position, a releasable securing means (20) is released, and then the cover (2) is brought back into the first open position, in which the cover plate (6) rests on the protection tube or air outlet (3), wherein in this position the temporary securing means (19) is removed.

10. The method of claim 4, wherein, In order to install the cover plate (6), the cover (2) is brought into a first open position before or while the cover plate (6) is raised, and after the raising, the cover plate (6), which is carried on the protection tube or air outlet (3), is secured to the cover (2) by means of a temporary securing means (19) and then the cover (2) is brought into a second open position after the cover (2) is raised, during which the cover plate (6) is separated from the protection tube or air outlet (3) and secured to the cover (2) by means of a releasable securing means (20).

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