Self-sensing drive module and combination function body thereof

Abstract

This invention relates to the field of actuator and sensor technology, and provides a self-sensing actuator module and its combined functional units. The self-sensing actuator module includes: an attached conductor that generates an excitation magnetic field when a driving electrical signal is applied; and an actuator connected to the attached conductor that outputs force and / or displacement under the action of the excitation magnetic field, thereby acting on the attached conductor to generate a changing induced electrical signal. This invention achieves dual functions of driving and sensing based on a single-unit structure, avoiding structural redundancy caused by external sensors. Due to the consistency between the driving and sensing components, errors caused by assembly relationships and different reference points are reduced, thus improving the execution stability of the system.

Description

Technical Field

[0001] This invention relates to the field of actuator and sensor technology, and more specifically, to a self-sensing actuator module and its combined functional units. Background Technology

[0002] With the development of ultra-precision machining technology, the dimensional accuracy and machining consistency of mechanical parts have been further improved, making precision assembly a key to improving the quality of micro-devices or products. Micro-assembly technology refers to the assembly of parts with micron-level dimensions or sub-micron-level assembly tolerances. Its operational precision far exceeds the limits of human operation, reaching the sub-micron or even nanometer level. Therefore, it also puts forward performance requirements for actuators that are multi-scale, miniaturized, and easy to control. However, existing micro-nano manipulation systems suffer from insurmountable problems such as insufficient stroke and poor operational stability due to complex actuator structures and redundant external sensor structures.

[0003] Self-sensing actuators integrate driving functions with sensor components, providing a new solution for high-precision, miniaturized, and intelligent micro-operation scenarios. However, existing patents, such as patent document CN109495009B which proposes a self-sensing actuator based on magnetostrictive materials, are limited by the traditional electromagnetic coil driving method, restricting further miniaturization and functional integration of the actuator system. Summary of the Invention

[0004] To address the shortcomings of existing technologies, the purpose of this invention is to provide a self-sensing driving module and its combined functional components.

[0005] A self-sensing driving module provided by the present invention includes:

[0006] When a conductor is attached and a driving electrical signal is applied, an excitation magnetic field can be generated.

[0007] An actuator, connected to the attached conductor, outputs force and / or displacement under the action of the excitation magnetic field, which in turn acts on the attached conductor, causing the attached conductor to generate a changing induced electrical signal.

[0008] Preferably, it further includes an external sensor, wherein the actuator outputs force and / or displacement under the action of the excitation magnetic field, which acts on the external sensor so that the induced electrical signal is obtained through the external sensor.

[0009] Preferably, the attached conductor is wrapped around the outside of the actuator in a single-layer or multi-layer structure, and each pair of adjacent attached conductors is completely separated by an electrical insulation layer or separated by the electrical insulation layer and forms a closed loop through a gap provided on the electrical insulation layer.

[0010] Preferably, the attaching conductor is attached to the surface of the actuator by physical coating, sputtering, 3D printing, film bonding or chemical electrolysis.

[0011] Preferably, the attachment conductor includes a driving attachment conductor and a sensing attachment conductor, wherein the driving attachment conductor and the sensing attachment conductor are arranged in any of the following structural configurations:

[0012] The drive attachment conductor and the sensing attachment conductor are sequentially wrapped around the outside of the actuator from the inside out and separated from each other by an electrical insulation layer;

[0013] The driving attachment conductor and the sensing attachment conductor are arranged sequentially along the length or width of the actuator and separated by an electrical insulating layer.

[0014] One part of the actuator is covered by a drive attachment conductor, and the other part is covered by a sensor attachment conductor, with the drive attachment conductor and the sensor attachment conductor separated by an electrical insulation layer;

[0015] The attachment conductor includes multiple attachment conductor loops, each of which is coated with an electrical insulating layer and independently surrounds the actuator to form a circuit. A portion of the multiple attachment conductor loops serves as a drive attachment conductor, and another portion serves as a sensing attachment conductor.

[0016] Preferably, multiple attached conductor rings are arranged in a cross pattern to form an attached conductor ring network. The attached conductor ring network can generate a driving magnetic field in any direction inside the actuator, causing the actuator to produce displacement and force in the corresponding direction.

[0017] Preferably, the actuator is a material body with both driving and sensing functions.

[0018] Preferably, the actuator is configured to have one or more basic units such that the actuator can be connected and combined into a set shape by one or more basic units to match the application scenario of the actuator.

[0019] According to the present invention, a combined functional body based on self-sensing driving modules includes multiple self-sensing driving modules having identical, partially identical, or completely different configurations and / or sizes, wherein an electrical insulating layer is provided between each pair of adjacent self-sensing driving modules.

[0020] Preferably, the multiple self-sensing drive modules are connected as one unit by physical bonding or force adsorption.

[0021] Preferably, the combined functional body formed by multiple self-sensing drive modules in an ordered or disordered structural combination can achieve the set function by applying the same, partially the same or completely different electrical signals, thereby causing the combined functional body to exhibit ordered or disordered shape deformation matching the electrical signals.

[0022] Compared with the prior art, the present invention has the following beneficial effects:

[0023] 1. This invention achieves dual functions of driving and sensing based on a single-unit structure, avoiding structural redundancy caused by external sensors. Due to the consistency of the driving and sensing components, errors caused by different assembly relationships and references are reduced, thus improving the execution stability of the system.

[0024] 2. This invention utilizes physical coating, sputtering, 3D printing, film bonding, or chemical electrolysis to directly connect the driving and sensing attachment conductors to the actuator, avoiding the complex structure caused by external coils or other driving devices in common mechanisms. At the same time, due to the flexibility of the attachment conductor layout, it can provide a driving magnetic field in any direction in space and adapt to actuators with various driving substrate material shapes.

[0025] 3. The present invention can overcome the eddy current loss problem of conventional magnetostrictive actuators when operating at high frequency by arbitrarily combining individual modules; each module has an individual attached conductor to provide a magnetic field, ensuring the uniformity of the magnetic field distribution inside the functional body; and it can realize multi-scale driving modes in space to adapt to any needs of various extreme working scenarios in the future.

[0026] 4. The combined functional body in this invention can correspond different applied electrical signals to different deformations of the actuator, realizing the correspondence between digital signals and physical shape deformation, enabling precise and complex external deformation of the physical shape, and realizing the changes of different complex shapes and the realization of special functions. Attached Figure Description

[0027] Other features, objects, and advantages of the present invention will become more apparent from the following detailed description of non-limiting embodiments with reference to the accompanying drawings:

[0028] Figure 1 This is a schematic diagram of the conventional form of the attached conductor assembly in Embodiment 1 of the self-sensing drive module of the present invention;

[0029] Figure 2 This is a schematic diagram of the structure of Embodiment 2 of the self-sensing driving module of the present invention;

[0030] Figure 3 This is a schematic diagram of the structure of Embodiment 3 of the self-sensing driving module of the present invention;

[0031] Figure 4 This is a schematic diagram of the structure of Embodiment 4 of the self-sensing driving module of the present invention;

[0032] Figure 5 This is a schematic diagram of the structure of Embodiment 5 of the self-sensing driving module of the present invention;

[0033] Figure 6 This is a schematic diagram of the structure of Embodiment 6 of the self-sensing driving module of the present invention;

[0034] Figure 7 This is a schematic diagram of the installation of a single wire-like attached conductor in Embodiment 7 of the self-sensing driving module of the present invention;

[0035] Figure 8 This is a schematic diagram of the installation of the filament-attached conductor mesh in Embodiment 7 of the self-sensing drive module of the present invention;

[0036] Figure 9 This is a schematic diagram of the structure of Embodiment 10 of the present invention, which uses the same module for the combined functional body of the self-sensing driving module.

[0037] Figure 10 This is a schematic diagram of the structure of Embodiment 10 of the present invention, which uses different modules to form the self-sensing drive module combination function body;

[0038] Figure 11 This is a schematic diagram of the structure of Embodiment 11 of the self-sensing drive module combination functional body of the present invention;

[0039] Figure 12 This is a schematic diagram of the structure of Embodiment 12 of the self-sensing drive module combination functional body of the present invention;

[0040] Figure 13 This is a schematic diagram of the structure of embodiment 13 of the self-sensing drive module combination functional body of the present invention;

[0041] Figure 14 This is a schematic diagram of the structure of Embodiment 14 of the self-sensing drive module combination functional body of the present invention;

[0042] Figure 15 This is a schematic diagram of the structure of embodiment 15 of the self-sensing drive module combination function body of the present invention.

[0043] Figure 16 This is a schematic diagram of the structure of Embodiment 1 of the self-sensing driving module of the present invention;

[0044] Figure 17 Example 1 is an example of attaching a conductor magnetic field simulation analysis diagram to Embodiment 1 of the self-sensing drive module of the present invention;

[0045] Figure 18 Example 2 is an example of attaching a conductor magnetic field simulation analysis diagram to Embodiment 1 of the self-sensing drive module of the present invention;

[0046] Figure 19 This is a schematic diagram of a special form 1 of the attached conductor assembly in Embodiment 1 of the self-sensing drive module of the present invention;

[0047] Figure 20 This is a schematic diagram of a special form 2 of the attached conductor assembly in Embodiment 1 of the self-sensing drive module of the present invention;

[0048] Figure 21 This is a schematic diagram of a special form of conductor assembly in Embodiment 1 of the self-sensing drive module of the present invention;

[0049] Figure 22 This is a schematic diagram of a special form of conductor assembly in Embodiment 1 of the self-sensing drive module of the present invention;

[0050] Figure 23 This is a schematic diagram of the structure of Embodiment 8 of the self-sensing driving module of the present invention;

[0051] Figure 24 This is a schematic diagram of the structure of Embodiment 9 of the self-sensing driving module of the present invention.

[0052] The diagram shows:

[0053] Self-sensing drive module 0

[0054] Executor 1

[0055] Attached conductor 2

[0056] Drive attached conductor 21

[0057] Sensor attached conductor 22

[0058] Attached conductor ring 23

[0059] Attached conductor ring mesh 24

[0060] Mutual inductance electrode 25

[0061] Electrical insulation layer 3

[0062] Gap 31

[0063] External sensor 4

[0064] Upper computer 5

[0065] Magnetic field generator 6 Detailed Implementation

[0066] The present invention will now be described in detail with reference to specific embodiments. These embodiments will help those skilled in the art to further understand the present invention, but do not limit the invention in any way. It should be noted that those skilled in the art can make several changes and improvements without departing from the concept of the present invention. These all fall within the scope of protection of the present invention.

[0067] Basic Implementation Example:

[0068] This invention provides a self-sensing drive module, including an actuator 1 and an attachment conductor 2. When a drive electrical signal is applied to the attachment conductor 2, it generates an excitation magnetic field. The actuator 1 is connected to the attachment conductor 2 and, under the influence of the excitation magnetic field, outputs force and / or displacement, thereby acting on the attachment conductor 2 to generate a changing induced electrical signal. This invention achieves both driving and sensing functions based on a single-unit structure, resulting in a simpler structure. Due to the consistency between the driving and sensing components, errors caused by assembly relationships and different reference standards are reduced, improving the stability of system execution.

[0069] In practical applications, the present invention can also be equipped with an external sensor 4. The actuator 1 outputs force and / or displacement under the action of the excitation magnetic field, which acts on the external sensor 4 so that the induced electrical signal is obtained through the external sensor 4. The specific application scenario can be flexibly selected.

[0070] The attached conductor 2 is wrapped around the outside of the actuator 1 in a single-layer or multi-layer structure, and each two adjacent layers are completely separated by the electrical insulation layer 3 or separated by the electrical insulation layer 3 and form a closed loop through the gap 31 provided on the electrical insulation layer 3. The gap 31 allows the two attached conductors 2 separated by the electrical insulation layer 3 to connect and form a closed loop, forming a complete ring current and thus generating an axial magnetic field on the actuator 1.

[0071] Furthermore, in a structure where the two layers of attached conductors 2 are completely separated by an electrical insulation layer 3, when an alternating current is applied to the inner layer of attached conductors 2, an induced current can be generated, which in turn generates an induced magnetic field. The induced magnetic field excites the internal actuator 1 to generate force and / or displacement.

[0072] In practical applications, the attached conductor 2 can be attached to the surface of the actuator 1 by physical coating, sputtering, 3D printing, film bonding or chemical electrolysis. Film bonding is to attach a film to the surface of the actuator 1, and the single layer is a conductive medium with a certain thickness. The materials used include, but are not limited to, silver, copper and other good conductors of electricity. The cross-section of the attached conductor 2 can take various shapes, such as square, circle, regular polygon, rhombus and so on.

[0073] It should be noted that the actuator 1 and the attached conductor 2 also need to be isolated by an electrical insulation layer 3 to ensure that the attached conductor 2 will not be connected to the actuator 1 when energized.

[0074] Specifically, the attachment conductor 2 includes a driving attachment conductor 21 and a sensing attachment conductor 22. The driving attachment conductor 21 and the sensing attachment conductor 22 can be arranged in various structural configurations. For example, the driving attachment conductor 21 and the sensing attachment conductor 22 can sequentially cover the exterior of the actuator 1 from the inside out and be separated by an electrical insulation layer 3. Another example is that the driving attachment conductor 21 and the sensing attachment conductor 22 can be arranged sequentially along the length or width direction of the actuator 1 and separated by an electrical insulation layer 3. Yet another example... A portion of the actuator 1 is covered by a drive attachment conductor 21, and another portion is covered by a sensing attachment conductor 22. The drive attachment conductor 21 and the sensing attachment conductor 22 are separated by an electrical insulation layer 3. For example, the attachment conductor 2 includes multiple attachment conductor loops 23. Each attachment conductor loop 23 is coated with an electrical insulation layer 3 and independently surrounds the actuator 1 to form a circuit. A portion of the multiple attachment conductor loops 23 serves as the drive attachment conductor 21, and another portion serves as the sensing attachment conductor 22.

[0075] Multiple attached conductor rings 23 are arranged in a cross pattern to form an attached conductor ring network 24. The attached conductor ring network 24 can generate a driving magnetic field in any direction inside the actuator 1, causing the actuator 1 to produce displacement and / or force in the corresponding direction.

[0076] Specifically, the actuator 1 is configured to have one or more basic units, so that the actuator 1 can be connected and combined into a set shape through one or more basic units to match the application scenario of the actuator 1. In other words, the actuator 1 is designed according to the actual application scenario with the basic unit as the smallest unit. The actuator 1 can be spiral, Z-shaped folding, spatial linkage mechanism, complex irregular structure, etc.

[0077] The present invention also provides a combined functional body based on self-sensing driving modules, including multiple self-sensing driving modules having the same, partially the same or completely different configurations and / or sizes, wherein an electrical insulating layer 3 is provided between each pair of adjacent self-sensing driving modules, and the multiple self-sensing driving modules can be arranged side by side in a straight line along the horizontal or vertical direction, or the multiple self-sensing driving modules can be arranged and combined in any two directions to form a plane.

[0078] It should be noted that the actuator 1 is a material body with dual functions of driving and sensing, that is, a material that generates output stress or deformation under external electric or magnetic excitation and generates electric or magnetic signals under the action of external energy input, such as magnetostrictive material. The actuator 1 is a structure with a circular, rectangular or polygonal cross-section, or any other structure with a spatial three-dimensional configuration.

[0079] When a voltage or current signal is applied to the driving attachment conductor 21, the actuator 1 deforms under the action of the closed magnetic field formed by the driving attachment conductor 21, and outputs displacement and force. Due to the dual characteristics of the actuator 1, when the actuator 1 changes, its internal magnetic field also changes, and the sensing attachment conductor 22 will extract the corresponding sensing signal due to the electromagnetic induction effect. When the state of the actuator 1 changes under the action of the driving attachment conductor 21, the sensing signal will also change. By detecting the change in the sensing signal, the output displacement and force of the actuator 1 can be detected.

[0080] Multiple self-sensing drive modules can be physically bonded or forcefully attracted together, such as by magnetic attraction. Specifically, multiple self-sensing drive modules can be combined into a functional body in an ordered or disordered structural combination. By applying identical, partially identical, or completely different electrical signals, the functional body can exhibit ordered or disordered shape deformations that match the electrical signals, thereby achieving the set function. Therefore, this invention can correlate digital signals with physical deformations. Changes in digital signals correspond to changes in the shape of the actuator 1, thereby manifesting as changes in the overall shape of the functional body and achieving a specific function.

[0081] Example 1:

[0082] The assembly method of attaching conductor 2 on the surface of actuator 1 is shown in the figure below. Figure 1 As shown, the attached conductor 2 completely surrounds the surface of the actuator 1 in two or more layers; the figure shows an example of two layers. The attached conductor 2 forms a completely closed loop around the actuator 1. There are electrical insulation layers 3 between the layers of the attached conductor 2 to prevent short circuits. Wires are pulled out from both ends of the attached conductor 2 for inputting drive signals or extracting sensing signals.

[0083] To demonstrate the advantages of the attached conductor 2 as an electromagnetic field input source proposed in this invention, simulation analysis of the attached conductor 2 was performed using the electromagnetic calculation module of the finite element software COMSOL. A common cross-sectional shape of the attached conductor 2 is a regular polygon. The simulation analysis results are as follows... Figure 17 As shown, Figure 17 The left image shows the geometric model of the attached conductor 2 in space. Figure 17 The right figure shows the spatial magnetic field distribution at the center of the attached conductor 2 when a current is applied. Another common cross-sectional shape of the attached conductor 2 is circular, and the simulation analysis results are as follows. Figure 18 As shown, Figure 18 The left image shows the geometric model of the attached conductor 2 in space. Figure 18The right figure shows the spatial magnetic field distribution at the center of the attached conductor 2 when a current is applied. It can be seen that the attached conductor configuration proposed in this invention can provide a stable, uniform spatial magnetic field perpendicular to the cross-sectional normal within the attached conductor 2. Utilizing this characteristic, the attached conductor 2 can greatly broaden the application prospects of existing devices.

[0084] When the actuator 1 is made of a material with dual properties that is easy to process, such as Galfenol alloy, the form of the actuator 1 can be diverse. Combined with the assembly method of the attached conductor 2 of the present invention, the proposed actuator 1 can have more diverse application scenarios. To further illustrate the advantages of the attached conductor assembly method proposed in this invention, the assembly forms and working modes of the attached conductor 2 in various possible actuator 1 structures are listed.

[0085] Figure 19 The actuator 1 is a spiral structure similar to a spring, with the conductor 2 attached to its surface. Figure 17 , Figure 18 Simulation analysis results show that the attached conductor 2 can provide a magnetic field along the axial direction of the actuator 1 at each position, enabling the actuator 1 to function as a smart spring. Furthermore, the actuator 1 can be used for both passive vibration isolation and as a driving device for active vibration isolation.

[0086] Figure 20 The actuator 1 is a "Z"-shaped folded structure with an attached conductor 2 covering its surface, providing a magnetic field along the central axis to various positions of the actuator 1. This type of actuator 1 can amplify the overall output displacement and force while occupying less space.

[0087] Figure 21 The shape of the actuator 1 is similar to a spatial linkage mechanism. The attached conductor completely covers all positions of the actuator 1. Using the attached conductor assembly method proposed in this invention, deformation can be output under the action of a single driving current input. Due to the symmetrical spatial geometry, the spatial stability of the actuator 1 is higher at this time, and it can output amplified displacement and force at a specific position.

[0088] Figure 22 The actuator 1 is a spatially heterogeneous structure, with the attached conductor 2 completely covering the surface of the actuator 1. The actuator 1 can be further combined with other mechanisms.

[0089] For ease of understanding and explanation, the structure of the execution body 1 in this invention will still be described using a conventional rectangle as an example.

[0090] like Figure 16As shown, the driving attachment conductor 21 and the sensing attachment conductor 22 are arranged vertically on the surface of the actuator 1. An electrical insulation layer 3 exists between the attachment conductors to avoid short circuits and signal interference. Two wires are connected to each end of the driving attachment conductor 21, one end is used to pass driving current, and the other end is grounded. Two wires are connected to each end of the sensing attachment conductor 22 to extract sensing voltage signals in real time.

[0091] When a driving current I is applied to the driving attachment conductor 21, a closed magnetic field is formed around the actuator 1 due to the closed loop formed by the attachment conductor, causing the actuator 1 to deform and output displacement and force. At the same time, due to the dual effect of the actuator 1, the magnetic field distribution inside the actuator 1 also changes, and the sensing signal Vs extracted by the sensing attachment conductor 22 will also change accordingly. The displacement and force output by the actuator 1 are detected by measuring the change of Vs before and after.

[0092] Example 2:

[0093] This embodiment is a variation of Embodiment 1.

[0094] like Figure 2 As shown, the attachment conductor 2 only surrounds and covers the surface of the actuator 1 in one layer, leaving a small gap in the middle to avoid short circuits. The driving attachment conductor 21 and the sensing attachment conductor 22 are arranged vertically on the surface of the actuator 1. One end of the driving attachment conductor 21 is connected to a current source and the other end is grounded. Since the attachment conductor 2 completely surrounds the actuator 1 in space, after the driving current I is applied, a closed magnetic field is formed in the actuator 1, causing the actuator 1 to output displacement and force. The sensing attachment conductor 22 is connected to two wires at each end to extract the sensing signal Vs. The displacement and force output by the actuator 1 are detected by measuring the change of Vs.

[0095] The advantage of this embodiment is that only one layer of the attached conductor is assembled, which simplifies the processing technology.

[0096] Example 3:

[0097] This embodiment is the second variation of Embodiment 1.

[0098] like Figure 3 As shown, the driving attachment conductor 21 is wrapped around the outside of the sensing attachment conductor 22. Each attachment conductor forms a closed loop, and a physical or chemical electrical insulation layer 3 exists between the attachment conductors to prevent short circuits. Two wires are connected to the two ends of the driving attachment conductor 21. One end is filled with a driving current I, and the other end is grounded. The actuator 1 deforms under the action of the closed magnetic field formed by the driving attachment conductor 21, and outputs displacement and force. Two wires are connected to the two ends of the sensing attachment conductor 22, which are used to extract the sensing voltage signal Vs in real time. The displacement and force output by the actuator 1 are detected by measuring the change of Vs.

[0099] Example 4:

[0100] This embodiment is the third variation of Embodiment 1.

[0101] like Figure 4 As shown, the driving attachment conductor 21 is a single layer surrounding and covering the surface of the actuator 1, and the sensing attachment conductor 22 is nested inside the driving attachment conductor 21. The driving attachment conductor 21 and the sensing attachment conductor 22 each surround the actuator 1 and form a circuit. There is a physical or chemical electrical insulation layer 3 between the driving and sensing attachment conductors to avoid short circuits.

[0102] Two wires are connected to the two ends of the drive attachment conductor 21. One end is filled with a drive current I and the other end is grounded. The actuator 1 deforms under the action of the closed magnetic field formed by the drive attachment conductor 21, and outputs displacement and force. Two wires are connected to the two ends of the sensing attachment conductor 22 respectively, which are used to extract the sensing voltage signal Vs in real time. The displacement and force output by the actuator 1 are detected by measuring the change of Vs before and after.

[0103] Example 5:

[0104] This embodiment is the fourth variation of Embodiment 1.

[0105] like Figure 5 As shown, the attached conductor 2 serves both driving and sensing functions. A signal extraction circuit is simultaneously built at the driving signal input end to extract the sensing signal. Two wires are connected to each end of the attached conductor 2, one end carrying the driving current I and the other grounded. In addition, two wires are connected in parallel to these two wires to form the signal extraction circuit for real-time detection of the sensing voltage signal Vs. Under the action of the driving current I, a closed magnetic field is formed inside the actuator 1, causing the actuator 1 to output displacement and force. The displacement and force output by the actuator 1 are detected by real-time measurement of the change in Vs.

[0106] It should be noted that the attached conductor assembly method used here includes all the methods in the examples above.

[0107] The advantage of this embodiment is that it reduces the complexity of the attached conductor assembly process, making the structure of the drive module more compact.

[0108] Example 6:

[0109] This embodiment is the fifth variation of Embodiment 1.

[0110] like Figure 6As shown, the actuator 1 can be used in combination with other external sensors 4 that can convert displacement or force signals into electrical signals. Specific forms include, but are not limited to, piezoelectric elements, Hall elements, etc. The drive attachment conductor 21 is attached to the surface of the actuator 1 by physical coating, sputtering or chemical electrolysis to form a closed loop. The actuator 1 outputs displacement and force under the action of the drive attachment conductor 21. The external sensor 4 is installed at the end of the actuator 1 and generates a corresponding sensing signal after being subjected to displacement or force by the actuator 1.

[0111] When current flows into the drive attached conductor 21, the actuator 1 deforms under the action of the magnetic field formed by the drive current I, and outputs displacement and force. Since the actuator 1 hits the external sensor 4, the external sensor 4 will receive a corresponding force signal, causing a change in the output voltage or current signal. The output displacement and force of the actuator 1 can be detected by the signal change of the external sensor 4.

[0112] Example 7:

[0113] This embodiment is the fifth variation of Embodiment 1.

[0114] This embodiment provides a self-sensing drive module, including an actuator 1 and an attachment conductor 2. The attachment conductor 2 includes several attachment conductor rings 23, such as... Figure 7 As shown, the attached conductor ring 23 independently surrounds the actuator 1 to form a loop, and its axis can be oriented in any direction in space. When the attached conductor 2 is supplied with a driving current I, a magnetic field H can be generated in the normal direction of the attached conductor ring 23. Under the action of H, the actuator 1 will generate displacement and force in the corresponding direction.

[0115] like Figure 8 As shown, several attached conductor rings 23 are wrapped around and cover the actuator 1 to form an attached conductor ring mesh 24. They are attached to the surface of the actuator 1 by physical coating, sputtering or chemical electrolysis. An electrical insulation layer 3 is coated on the surface of each attached conductor ring 23 to avoid short circuits. Each attached conductor ring 23 is equipped with a corresponding circuit. Through the program control of the host computer 5, the attached conductor ring mesh 24 can generate a driving magnetic field in any direction inside the actuator 1, so that the actuator 1 produces displacement and force in the corresponding direction.

[0116] Among the several attached conductor rings 23, a portion serves as the driving attached conductor 21, and another portion can be arbitrarily selected as the sensing attached conductor 22. The axial direction of the sensing attached conductor 22 can be coincident with or not coincident with the axis of the actuator 1. The change of the sensing signal Vs is measured in real time through the sensing attached conductor 22, thereby detecting the displacement and force changes of the actuator 1 in any direction.

[0117] Example 8:

[0118] This embodiment is the sixth variation of Embodiment 1.

[0119] like Figure 23 As shown, the surface of the actuator 1 is wrapped with a completely closed attachment conductor 2, and several layers of attachment conductor 2 are wound around the outside of the attachment conductor 2. An electrical insulating layer 3 is coated between the attachment conductors 2. When a driving current is passed through the attachment conductor 2, due to the mutual inductance effect, an induced electromotive force that changes synchronously with the driving current is generated in the attachment conductor 2. This can be used as a supplement to the driving signal to improve the output performance of the actuator 1, and can also be used as a sensing signal to extract the output state of the actuator 1 in real time.

[0120] Furthermore, the attached conductor 2 can also be used as both a driving and sensing electrode. The extracted sensing signal can be compared with the induced electromotive force extracted by the mutual inductance electrode to improve the control accuracy of the actuator 1.

[0121] Example 9:

[0122] This embodiment is the seventh variation of Embodiment 1.

[0123] In this embodiment, the actuator 1 is wrapped with several layers of attached conductors 2, with two layers as an example. Figure 24 As shown, an electrical insulation layer 3 is placed between the two attached conductors 2 to prevent short circuits. A magnetic field generator 6 is placed outside the actuator 1. The magnetic field generator 6 can be an electromagnetic field generated by alternating current or a changing magnetic field caused by the movement of a permanent magnet.

[0124] The actuator 1 deforms under the action of the magnetic field generator 6, and outputs displacement and force. Due to the mutual inductance effect, the attached conductor 2 will generate an induced electromotive force that changes synchronously with the magnetic field. The induced electromotive force is extracted as a sensing signal, and the output state of the actuator 1 is extracted in real time.

[0125] The present invention also provides a combined functional body based on a self-sensing driving module, which is composed of any one or more of the self-sensing driving modules mentioned above. The self-sensing driving modules used may be the same type or a combination of multiple different types.

[0126] The modules of the combined functional body are connected into a whole by physical bonding or by adsorption by permanent magnets, and there is a physical or chemical electrical insulation layer 3 between the attached conductors 2 of each module to avoid short circuits.

[0127] Example 10:

[0128] like Figure 9 As shown, the combined functional unit has a cylindrical shape and is composed of several self-sensing drive modules of the same size, or as... Figure 10As shown, it consists of several self-sensing drive modules of different sizes in the form of thin sheets.

[0129] Each module of the combined functional unit has independent drive and sensing circuits, capable of inputting drive currents I1, ..., I2. n and output sensor signal V S1 , ..., V Sn The driving conductors 21 of each module can form a composite magnetic field inside the combined functional body. The direction of the composite magnetic field can be any direction in space. The actuator 1 can perform high and low frequency movements in the direction of excitation by the composite magnetic field, and output displacement and force in combination under the programming operation of the host computer 5.

[0130] The advantage of this example is that the combined functional unit is composed of multiple individual modules, which avoids the eddy current loss problem that is prone to occur in conventional magnetostrictive actuators in high-frequency driving scenarios. Furthermore, since each module has an independent driving attachment conductor 21 and sensing attachment conductor 22, the magnetic field distribution inside the module is uniform, thereby ensuring the uniform magnetic field distribution of the entire combined functional unit and further guaranteeing the control accuracy of output displacement and force.

[0131] Example 11:

[0132] This embodiment is a variation of Embodiment 8.

[0133] like Figure 11 As shown, the combined functional unit is composed of several self-sensing drive modules linearly stacked along the same axis, with a vertical linear shape. Each module of the combined functional unit has independent drive and sensing circuits, capable of inputting drive currents I1, ..., I... n and output sensor signal V S1 , ..., V Sn Several self-sensing drive modules can form a composite magnetic field inside the combined functional body. Under the programming operation of the host computer, it can synchronously output the displacement and force acting along the excitation direction of the composite magnetic field, or it can output the displacement and force in the form of fluctuation along the same direction.

[0134] The advantage of this example is that it amplifies the output capability of a single module.

[0135] Example 12:

[0136] This embodiment is the second variation of Embodiment 8.

[0137] like Figure 12 As shown, the combined functional unit consists of several self-sensing drive modules arranged side-by-side in the horizontal or vertical direction, presenting a linear shape. Each module of the combined functional unit has independent drive and sensing circuits, capable of inputting drive currents I1, ..., I... n and output sensor signal V S1, ..., V Sn Several self-sensing drive modules can form a composite magnetic field within the functional body. Each module can move according to its own magnetic field excitation direction. Under the programming operation of the host computer, the modules can be combined to synchronously output displacement and force acting in the direction of composite magnetic field excitation, or they can output displacement and force in a wave-like form in sequence and direction.

[0138] This example can be used for handling objects at the micro-nano scale, or as a standalone robot to perform tasks.

[0139] Example 13:

[0140] This embodiment is the third variation of Embodiment 8.

[0141] like Figure 13 As shown, the combined functional unit consists of several self-sensing drive modules arranged in any two directions in space to form a plane. Each module of the combined functional unit has independent drive and sensing circuits, capable of inputting drive currents I1, ..., I... m , ...I n and output sensor signal V S1 , ..., V Sm , ...V Sn Several self-sensing drive modules can move in the direction of their own driving magnetic field. Under the programming operation of the host computer, through the cumulative effect of several self-sensing drive modules, the combined functional body can move along the direction of the composite magnetic field excitation. The output can be planar translational or rotational peripheral or overall displacement and force.

[0142] This example can serve as a micro / nano-scale operating platform to perform specific tasks.

[0143] Example 14:

[0144] This embodiment is the fourth variation of Embodiment 8.

[0145] like Figure 14 As shown, each module of the combined functional unit has independent drive and sensing circuits, capable of inputting drive currents I1, ..., I2. m , ...I n and output sensor signal V S1 , ..., V Sm , ...V Sn Several self-sensing drive modules can move in the direction of their own driving magnetic field. Under the programming operation of the host computer, through the cumulative effect of several self-sensing drive modules, the combined functional body can move in six planes along the direction of the composite magnetic field excitation. The output can be local or overall displacement and force in three-dimensional translation or rotation in space.

[0146] This example can be used as a robot to move and perform specific tasks.

[0147] Example 15:

[0148] This embodiment is the fifth variation of Embodiment 8.

[0149] like Figure 15 As shown, the combined functional unit is formed by several self-sensing drive modules arranged in space to form a sphere. Modules can be placed at any position on the sphere's surface. Each module has independent drive and sensing circuits and can input drive currents I1, ..., I1. m , ...I n and output sensor signal V S1 , ..., V Sm , ...V Sn Several self-sensing drive modules can move in the direction of their own driving magnetic field. Under the programming operation of the host computer, they can output displacement and force at any position on the surface of the sphere according to a predetermined program.

[0150] In the description of this application, it should be understood that the terms "upper", "lower", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing this application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this application.

[0151] Specific embodiments of the present invention have been described above. It should be understood that the present invention is not limited to the specific embodiments described above, and those skilled in the art can make various changes or modifications within the scope of the claims, which do not affect the essence of the present invention. Unless otherwise specified, the embodiments and features described in this application can be arbitrarily combined with each other.

Claims

1. A self-sensing driving module, characterized in that, include: When a conductor (2) is attached, an excitation magnetic field can be generated when a driving electrical signal is applied; The actuator (1) is connected to the attached conductor (2) and outputs force and / or displacement under the action of the excitation magnetic field, which then acts on the attached conductor (2) to generate a changing induced electrical signal. The attached conductor (2) is covered on the outside of the actuator (1) in a single-layer or multi-layer structure, and each pair of adjacent attached conductors (2) is completely separated by an electrical insulation layer (3) or separated by the electrical insulation layer (3) and forms a closed loop through a notch (31) provided on the electrical insulation layer (3); The attachment conductor (2) includes a driving attachment conductor (21) and a sensing attachment conductor (22), wherein the driving attachment conductor (21) and the sensing attachment conductor (22) are arranged in any of the following structural configurations: The drive attachment conductor (21) and the sensing attachment conductor (22) are sequentially wrapped around the outside of the actuator (1) from the inside out and separated from each other by an electrical insulation layer (3); The driving attachment conductor (21) and the sensing attachment conductor (22) are arranged sequentially along the length or width direction of the actuator (1) and separated by an electrical insulation layer (3); One part of the actuator (1) is covered by the drive attachment conductor (21), and the other part is covered by the sensing attachment conductor (22), and the drive attachment conductor (21) and the sensing attachment conductor (22) are separated by an electrical insulation layer (3); The attachment conductor (2) includes multiple attachment conductor loops (23), each of which is coated with an electrical insulating layer (3) and independently surrounds the actuator (1) to form a circuit. A portion of the multiple attachment conductor loops (23) serves as a driving attachment conductor (21), and another portion serves as a sensing attachment conductor (22).

2. The self-sensing driving module according to claim 1, characterized in that, It also includes an external sensor (4), and the actuator (1) outputs force and / or displacement under the action of the excitation magnetic field to the external sensor (4) so ​​that the induced electrical signal is obtained through the external sensor (4).

3. The self-sensing driving module according to claim 1, characterized in that, The attached conductor (2) is attached to the surface of the actuator (1) by physical coating, sputtering, 3D printing, film bonding or chemical electrolysis.

4. The self-sensing driving module according to claim 1, characterized in that, Multiple attached conductor rings (23) are arranged in a cross pattern to form an attached conductor ring network (24). The attached conductor ring network (24) can generate a driving magnetic field in any direction inside the actuator (1), causing the actuator (1) to generate displacement and force in the corresponding direction.

5. The self-sensing driving module according to claim 1, characterized in that, The actuator (1) is a material body with both driving and sensing functions.

6. The self-sensing driving module according to claim 1, characterized in that, The execution body (1) is configured to have one or more basic units such that the execution body (1) can be connected and combined into a set shape by one or more basic units to match the application scenario of the execution body (1).

7. A combined functional unit based on a self-sensing driving module, characterized in that, The invention comprises multiple self-sensing drive modules as described in any one of claims 1 to 6 having identical, partially identical or completely different configurations and / or sizes, wherein an electrical insulating layer (3) is provided between each pair of adjacent self-sensing drive modules.

8. The combined functional unit based on the self-sensing driving module according to claim 7, characterized in that, Multiple self-sensing drive modules, arranged in an ordered or disordered structural combination, can be combined into a functional body by applying identical, partially identical, or completely different electrical signals. This allows the combined functional body to exhibit ordered or disordered shape deformations that match the electrical signals, thereby achieving the set function.

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