Bellows lifting device suitable for hard shaft single crystal furnace auxiliary chamber

Abstract

The application discloses a bellows lifting device suitable for a hard shaft single crystal furnace auxiliary chamber, which comprises a base, one end of the base being connected with a rack, the other end of the base being connected with a flat bottom plate, a center hole allowing an extension pipe to pass through being formed in the center of the flat bottom plate, a bellows, two linear driving mechanisms being symmetrically arranged on the two sides of the bellows, the upper end of the linear driving mechanism being installed below the flat bottom plate, the lower end of the linear driving mechanism being connected with the lower end of the bellows, and the linear driving mechanism driving the lower end of the bellows to move up and down in the direction perpendicular to the upper end surface of the auxiliary chamber. The linear driving mechanism drives the bellows to move up and down linearly, so that the bellows and the auxiliary chamber are switched between the disengaged state and the combined state, the problems that the end arc movement of the lever mechanism causes the lateral displacement of the bellows in the horizontal direction, the dragging of the sealing position of the sealing ring lip, the early wear and tear and fatigue are effectively solved, and the service life of the bellows is prolonged.

Description

Technical Field

[0001] This invention relates to the field of hard-axis single crystal furnaces, and in particular to a bellows lifting device suitable for the auxiliary chamber of a hard-axis single crystal furnace. Background Technology

[0002] Hard-axis single-crystal furnaces do not suffer from the structural characteristics of soft-axis single-crystal furnaces, which are prone to inherent resonance interference similar to pendulums and spring oscillators. Therefore, they have advantages over soft-axis furnaces in improving the crystallization rate and intrinsic crystal quality of single-crystal materials. However, the hard-axis system is structurally more complex. To ensure high positional accuracy, the crystal lifting component of a hard-axis single-crystal furnace is fixed to the frame. The lower auxiliary chamber needs to be removed during hot zone cleaning and material feeding. This raises the issue of connection and disconnection between the crystal lifting component and the auxiliary chamber. Furthermore, a vacuum seal must be maintained between the auxiliary chamber and the crystal lifting component during connection.

[0003] In existing technologies, the engagement and disengagement of the crystal lifting component and the sub-chamber are achieved by an electric cylinder driving a lever mechanism to swing, generating vertical movement. However, the end trajectory of the lever mechanism is not a straight line perpendicular to the horizontal plane, but rather an arc, causing lateral displacement of the bellows in the horizontal direction. This lateral displacement of the lower flange of the bellows leads to stress between the bellows diaphragms, reducing the service life of the bellows. Furthermore, after the lower flange undergoes lateral displacement, its lower end face will not be parallel to the upper end face of the sub-chamber, resulting in dragging, premature wear, and fatigue of the sealing ring lip at the sealing position, ultimately leading to sealing failure. Summary of the Invention

[0004] The present invention aims to at least solve one of the technical problems existing in the prior art. To this end, the present invention provides a bellows lifting device suitable for the sub-chamber of a hard-axis single-crystal furnace.

[0005] To achieve the above objectives, the present invention provides the following technical solution:

[0006] A bellows lifting device suitable for the auxiliary chamber of a hard-axis single crystal furnace, the bellows lifting device being mounted on a frame, the bellows lifting device comprising:

[0007] The base has one end connected to the frame and the other end connected to a flat bottom plate. A central hole is provided in the center of the flat bottom plate to allow the extension tube to pass through.

[0008] A bellows is located between the central hole and the central hole on the upper end face of the sub-chamber, and the upper end of the bellows is connected to the bottom of the extension tube of the crystal lifting device.

[0009] Two linear driving mechanisms are symmetrically arranged on both sides of the bellows, upper ends of the linear driving mechanisms are installed below the flat bottom plate, lower ends of the linear driving mechanisms are connected with lower ends of the bellows, the linear driving mechanisms drive the lower ends of the bellows to move up and down in a direction perpendicular to the upper end surface of the sub-chamber, so as to switch the bellows and the sub-chamber between the disengaged state and the combined state.

[0010] In some embodiments of the present application, the base comprises a connecting plate, a vertical rod and a bracket, the vertical rod is vertically arranged, a lower part of one side of the vertical rod is fixedly connected with the connecting plate perpendicularly, an upper part of the other side of the vertical rod is fixedly connected with the bracket perpendicularly, an end of the bracket away from the vertical rod is fixedly connected with the mounting frame, and an upper surface of the mounting frame is fixedly connected with the flat bottom plate.

[0011] In some embodiments of the present application, the linear driving mechanism comprises a lead screw, a lead screw nut and a nut seat, the lead screw nut is installed in the nut seat, the lead screw nut is threadedly connected with the lead screw, and an upper end of the lead screw is connected with the power mechanism through a belt wheel transmission mechanism.

[0012] In some embodiments of the present application, the belt wheel transmission mechanism comprises a driving wheel, a tension wheel, two driven wheels and a synchronous belt, the driving wheel, the tension wheel and the two driven wheels are arranged at four corners of the upper surface of the flat bottom plate, the driving wheel and the tension wheel are arranged opposite to each other, the two driven wheels are arranged opposite to each other, the driving wheel is connected with an output end of the power mechanism, and the synchronous belt is sequentially wound around the driving wheel, one of the driven wheels, the tension wheel and the other of the driven wheels, and centers of the two driven wheels are respectively connected with lead screws of the linear driving mechanisms.

[0013] In some embodiments of the present application, the bellows lifting device further comprises an adaptive rotating mechanism for dynamically adapting to the inclination between the upper end surface of the sub-chamber and the horizontal plane, the adaptive rotating mechanism comprises a hinge block and a hinge block shaft, a lower surface of the hinge block is fixed on a lower flange of the bellows, one side of the hinge block away from the bellows is fixed on the hinge block shaft, and the hinge block shaft is rotationally connected with the nut seat.

[0014] In some embodiments of the present application, one end of the hinge block shaft is outwardly protruded in a circumferential direction to form a blocking ring, an end of the nut seat close to the bellows is provided with a circular hole for accommodating the hinge block shaft, the hinge block shaft is sleeved in a shoulder wear-reducing sleeve, and the hinge block shaft and the shoulder wear-reducing sleeve are fixed by a pin shaft fixing ring.

[0015] In some embodiments of the present application, the lower part of the flat bottom plate is provided with a position detection mechanism, which comprises a travel switch support, an upper travel switch, a lower travel switch and a stopper, the travel switch support is located outside the nut seat and is arranged in parallel with the nut seat, the upper part of the travel switch support is vertically provided with an upper travel switch, the lower part of the travel switch support is vertically provided with a lower travel switch, and the side upper part of the nut seat close to the travel switch support is provided with a stopper.

[0016] In some embodiments of the present application, the upper part and the lower part of the travel switch support are respectively provided with height adjustment holes for installing the upper travel switch and the lower travel switch.

[0017] In some embodiments of the present application, the bellows lifting device further comprises a concentric adjustment mechanism for adjusting the concentricity of the bellows lifting device and the crystal lifting device, the concentric adjustment mechanism comprises a transverse adjustment hole and a longitudinal adjustment hole, the transverse adjustment hole and the longitudinal adjustment hole are arranged perpendicular to each other, a plurality of transverse adjustment holes are circumferentially arranged on the connecting plate, the bellows lifting device is threadedly connected with the rack through a tension bolt passing through the transverse adjustment hole, a plurality of longitudinal adjustment holes are uniformly circumferentially arranged on the mounting frame, and the mounting frame is threadedly connected with the flat bottom plate through a bolt passing through the longitudinal adjustment hole, the transverse adjustment hole is used for adjusting the position of the bellows lifting device in the front-rear direction, and the longitudinal adjustment hole is used for adjusting the position of the bellows lifting device in the left-right direction.

[0018] In some embodiments of the present application, the concentric adjustment mechanism further comprises a concentric adjustment hole and a jacking bolt, one height adjustment hole is arranged outside the concentric adjustment hole on the connecting plate, and the jacking bolt is jacked on the rack through the concentric adjustment hole, the concentric adjustment hole and the jacking bolt are used for adjusting the position of the bellows lifting device in the up-down direction.

[0019] Compared with the prior art, the present application has the following beneficial effects:

[0020] (1) The bellows lifting device suitable for the hard shaft single crystal furnace auxiliary chamber of the present application drives the driving wheel through the rotary motion of the power mechanism, drives the screw rod to rotate through the synchronous belt, and drives the nut seat to move up and down, so as to switch the bellows bottom and the upper end surface of the auxiliary chamber between the disengaged state and the combined state.

[0021] (2) The linear drive mechanism in the application has two, which are symmetrically located on both sides of the bellows, and the linear drive mechanism comprises a screw rod, a screw nut and a nut seat, the screw nut is installed in the nut seat, the screw nut is threadedly connected with the screw rod, and the upper end of the screw rod is connected with the power mechanism through a belt wheel transmission mechanism. The linear drive mechanism can drive the nut seat to move linearly up and down by driving the screw rod, thereby driving the bellows to move linearly up and down, effectively solving the problems that the end arc movement of the lever mechanism in the prior art causes the lateral displacement of the bellows in the horizontal direction, the dragging of the sealing lip sealing position, the early wear and tear of the sealing ring and the fatigue of the sealing ring, thereby prolonging the service life of the bellows.

[0022] (3) The belt wheel transmission mechanism in the application comprises a driving wheel, a tension wheel, two driven wheels and a synchronous belt, the driving wheel is connected with the output end of the power mechanism, the synchronous belt is sequentially wound around the driving wheel, one driven wheel, the tension wheel and the other driven wheel, and the centers of the two driven wheels are respectively connected with the screw rods of one linear drive mechanism. The belt wheel transmission mechanism can drive the two screw rods to produce synchronous rotary motion, and the setting of the tension wheel plays a role in tensioning the synchronous belt, and on the other hand, the synchronous belt is further expanded through the tension wheel to form a large enough space allowing the extension pipe to pass through.

[0023] (4) The self-adaptive rotating mechanism in the application comprises a hinge block and a hinge block shaft, the lower surface of the hinge block is fixed on the lower flange of the bellows, the side of the hinge block away from the bellows is fixed on the hinge block shaft, and the hinge block shaft is rotationally connected with the nut seat. It can be understood that when the front and rear directions of the upper end surface of the auxiliary chamber are inclined, the bellows is self-adaptively inclined with the upper end surface of the auxiliary chamber, and the hinge block shaft is rotated by a suitable angle. When the left and right directions of the upper end surface of the auxiliary chamber are inclined, the synchronous belt is loosened, the screw rod is manually rotated by a certain angle, and the nut seat moves up and down by a certain distance. The above structure and adjustment can ensure that the sealing ring lip on the lower flange of the bellows can adapt to the inclination of the upper end surface of the auxiliary chamber in any direction, the lip-shaped sealing ring is uniformly compressed, and the risk of vacuum leakage of the equipment under different working conditions is reduced.

[0024] (5) The position detection mechanism in the application comprises a travel switch support, an upper travel switch, a lower travel switch and a ram. The travel switch support is located outside the nut seat. The upper travel switch is vertically installed on the upper part of the travel switch support. The lower travel switch is vertically installed on the lower part of the travel switch support. The ram is installed on the upper part of the side of the nut seat close to the travel switch support. The upper travel switch and the lower travel switch are both signal connected with the control system of the hard shaft single crystal furnace. The screw rod drives the nut seat to move up and down, drives the ram to approach or move away from the upper travel switch or the lower travel switch, generates a switch signal, and the control system outputs a stop running signal after receiving the switch signal, controls the power mechanism to stop running, and further controls the bellows to stop moving. The position detection mechanism can control the position in the combined and separated state. The height of the upper travel switch and the lower travel switch is adjustable, so it can be applied to bellows with different requirements and bellows in different periods.

[0025] (6) The concentric adjustment mechanism in the application is used for adjusting the concentricity of the bellows lifting device and the crystal lifting device. The concentric adjustment mechanism comprises a transverse adjusting hole, a longitudinal adjusting hole, a concentric adjusting hole and a jacking bolt, so that the bellows lifting device can be adjusted in the front-back, left-right and up-down directions and freely moved within a certain range, which can compensate for the installation problems caused by the accumulation of manufacturing errors. BRIEF DESCRIPTION OF DRAWINGS

[0026] Figure 1 is a schematic diagram of the principle of the combination and separation of the bellows and the vice chamber of the hard shaft single crystal furnace in the prior art;

[0027] Figure 2 is a structural schematic diagram of the bellows lifting device suitable for the vice chamber of the hard shaft single crystal furnace according to an embodiment of the application;

[0028] Figure 3 is a top view of the base according to the application;

[0029] Figure 4 is a sectional view of the bellows lifting device suitable for the vice chamber of the hard shaft single crystal furnace according to an embodiment of the application;

[0030] Figure 5 is Figure 4 is an enlarged view of A in

[0031] Figure 6 is an exploded schematic diagram of the nut seat and the self-adaptive rotating mechanism in the application;

[0032] Figure 7 is a rear view of the travel switch support in the application;

[0033] Figure 8 is a schematic diagram of the tooling state of the bellows lifting device suitable for the vice chamber of the hard shaft single crystal furnace after being installed on the rack according to the application.

[0034] Reference signs:

[0035] Ribbon tube lifting device 100, rack 200, crystal lifting device 300, extension tube 310, sub-chamber 400, electric cylinder 500, electric cylinder rotation shaft 510, hinge point 520, lever mechanism 530, lever support point 540;

[0036] Base 10, connecting plate 11, vertical rod 12, support 13, mounting frame 14;

[0037] Flat bottom plate 20, center hole 21;

[0038] Ribbon tube 30, upper flange 31, lower flange 32, groove 321, sealing element 322;

[0039] Linear drive mechanism 40, lead screw 41, lead screw nut 42, nut seat 43, circular hole 431, vertical part 432, horizontal part 433, mounting hole 434;

[0040] Belt drive mechanism 50, driving wheel 51, tension wheel 52, driven wheel 53, synchronous belt 54;

[0041] Power mechanism 60;

[0042] Self-adapting rotation mechanism 70, hinge block 71, mounting groove 711, hinge block shaft 72, stop ring 721, shoulder wear-reducing sleeve 73, pin shaft fixing ring 74, wear-reducing ring 75;

[0043] Position detection mechanism 80, travel switch support 81, height adjustment hole 811, upper travel switch 82, lower travel switch 83, striker 84;

[0044] Concentric adjustment mechanism 90, transverse adjustment hole 91, longitudinal adjustment hole 92, concentric adjustment hole 93, jacking bolt 94. DETAILED DESCRIPTION

[0045] Embodiments of the present application are described in detail below, examples of which are shown in the accompanying drawings, wherein the same or similar reference signs represent the same or similar elements or elements having the same or similar functions throughout. The embodiments described below by reference to the drawings are exemplary and are intended to explain the present application, and cannot be understood as a limitation of the present application.

[0046] The following disclosure provides many different embodiments, or examples, for implementing different structures of the present application. For the purpose of simplification, the components and arrangements of the specific examples are described in the following. Of course, they are merely examples and are not intended to limit the present application. In addition, the present application can repeatedly refer to the numbers and / or letters in different examples. Such repetition is for the purpose of simplification and clarity, which does not indicate the relationship between the various embodiments and / or arrangements discussed. In addition, the present application provides examples of various specific processes and materials, but those skilled in the art can realize the applicability of other processes and / or the use of other materials.

[0047] Reference Figure 1 As shown, in the prior art, the combination and disengagement action between the crystal lifting component 300 and the secondary chamber 400 is achieved by the electric cylinder 500 pushing the lever mechanism 530 to swing and thus generate the movement in the up-down direction. The electric cylinder 500 is connected with one end of the lever mechanism 530 through the hinge point 520, and the end of the lever mechanism 530 away from the hinge point 520 is connected with the lower flange 32 of the bellows 30. The electric cylinder 500 and the lever mechanism 530 have two working states. When the end of the electric cylinder 500 connected with the hinge point 520 moves downward, the end of the lever mechanism 530 away from the hinge point 520 drives the bellows 30 to move upward. When the end of the electric cylinder 500 connected with the hinge point 520 moves upward, the end of the lever mechanism 530 away from the hinge point 520 drives the bellows 30 to move downward (similar to a seesaw). However, the movement trajectory of the end of the lever mechanism 530 away from the hinge point 520 is not a straight line perpendicular to the horizontal plane, but a circular arc, thereby driving the bellows 30 to form a lateral displacement in the horizontal direction. The lateral displacement of the lower flange 32 of the bellows 30 will cause stress between the bellows membranes, reducing the service life of the bellows 30. Moreover, after the lower flange 32 of the bellows 30 forms a lateral displacement, the lower end surface of the lower flange 32 will not be parallel to the upper end surface of the secondary chamber 400, causing the sealing position of the lip seal to be dragged, prematurely worn, and the lip seal to be fatigued, resulting in sealing failure.

[0048] Reference Figure 1 As shown, the middle part of the electric cylinder 500 is provided with an electric cylinder rotating shaft 510, and the two ends of the electric cylinder 500 rotate around the electric cylinder rotating shaft 510. The lever mechanism 530 rotates around the lever support point 540.

[0049] Therefore, the present application provides a bellows lifting device 100 suitable for a hard shaft single crystal furnace secondary chamber.

[0050] The following refers to Figures 2-8A bellows lifting device 100 suitable for a hard shaft single crystal furnace sub-chamber according to an embodiment of the present application is described, the bellows lifting device 100 is installed on a rack 200, the bellows lifting device 100 comprises a base 10, a bellows 30 and a linear drive mechanism 40.

[0051] Reference Figure 2 , Figure 4 and Figure 8 As shown, one end of the base 10 is connected with the rack 200, and the other end is connected with a flat bottom plate 20, a center hole 21 allowing the extension tube 310 to pass through is formed at the center of the flat bottom plate 20, the hole diameter of the center hole 21 is greater than the outer diameter (the diameter of the outermost edge) of the bellows 30; the bellows 30 is located between the center hole 21 and the upper end center hole 21 of the sub-chamber 400, an upper flange 31 is installed at the upper end of the bellows 30, a lower flange 32 is installed at the lower end of the bellows 30, a groove 321 is formed in the circumferential direction at the lower end face of the lower flange 32, a sealing element 322 is embedded in the groove 321, and the sealing element 322 can be a sealing ring; the upper end of the bellows 30 is connected with the bottom of the extension tube 310 of the crystal lifting device 300, and the extension tube 310 of the crystal lifting device 300 passes through the center hole 21 from top to bottom and is connected with the upper flange 31 of the bellows 30.

[0052] The crystal lifting device 300 according to the embodiment of the present application is used to pull up the seed crystal after the seed crystal is inserted into the high-temperature silicon melt, to produce a crystal rod, and the extension tube 310 serves as a transition section between the crystal lifting device 300 and the bellows lifting device 100, the extension tube 310 is installed at the lower end center of the crystal lifting device 300, and the structure and connection relationship of the crystal lifting device 300 and the extension tube 310 and the operation are known to those skilled in the art and are not the invention points of the present application, which will not be described in detail here.

[0053] The linear drive mechanism 40 has two, and the two linear drive mechanisms 40 are symmetrically located on both sides of the bellows 30, the upper end of the linear drive mechanism 40 is installed below the flat bottom plate 20, the lower end of the linear drive mechanism 40 is connected with the lower end of the bellows 30, and the linear drive mechanism 40 drives the lower end of the bellows 30 to move up and down in the direction perpendicular to the upper end face of the sub-chamber 400, so as to switch the bellows 30 and the sub-chamber 400 between the disengaged state and the combined state. It can be understood that when the bellows 30 and the sub-chamber 400 need to be sealed, the upper end of the bellows 30 is stationary, the linear drive mechanism 40 drives the lower end of the bellows 30 to move downward, until the lower end of the bellows 30 is combined with the sub-chamber 400 to seal, that is, to reach the combined state; when the bellows 30 and the sub-chamber 400 need to be disengaged, the upper end of the bellows 30 is stationary, the linear drive mechanism 40 drives the lower end of the bellows 30 to move upward, until the lower end of the bellows 30 is disengaged from the sub-chamber 400, and the bellows 30 moves to a designated position to stop, that is, to reach the disengaged state.

[0054] In some embodiments of the present application, with reference to Figure 2 , Figure 3 , Figure 8 As shown in the drawings, the base 10 comprises a connecting plate 11, a vertical rod 12 and a bracket 13, the vertical rod 12 is vertically arranged, the lower part of one side of the vertical rod 12 is fixedly connected with the connecting plate 11 perpendicularly, the upper part of the other side of the vertical rod 12 is fixedly connected with the bracket 13 perpendicularly, the bracket 13 is fixedly connected with the mounting frame 14 at the end away from the vertical rod 12, and the upper surface of the mounting frame 14 is fixedly connected with the flat bottom plate 20. The connecting plate 11 is fixed on the rack 200, and the mounting frame 14 and the flat bottom plate 20 are concentrically arranged with the extension pipe 310 of the crystal lifting device 300.

[0055] With reference to Figure 2 , Figure 4 As shown in the drawings, the linear drive mechanism 40 comprises a lead screw 41, a lead screw nut 42 and a nut seat 43, the lead screw nut 42 is installed in the nut seat 43, the lead screw nut 42 is threadedly connected with the lead screw 41, and the upper end of the lead screw 41 is connected with the power mechanism 60 through the belt wheel transmission mechanism 50. The power mechanism 60 can be a speed reducer motor. It can be understood that the power mechanism 60 drives the belt wheel transmission mechanism 50 to rotate, the belt wheel transmission mechanism 50 drives the lead screw 41 to rotate, and the lead screw nut 42 converts the rotary motion of the lead screw 41 into the up-and-down lifting motion of the nut seat 43.

[0056] In some embodiments of the present application, with reference to Figure 2 As shown in the drawings, the belt wheel transmission mechanism 50 comprises a driving wheel 51, a tension wheel 52, two driven wheels 53 and a synchronous belt 54, the driving wheel 51, the tension wheel 52 and the two driven wheels 53 are located at the four corners of the upper surface of the flat bottom plate 20, the driving wheel 51 and the tension wheel 52 are oppositely arranged, and the two driven wheels 53 are oppositely arranged, in other words, the driving wheel 51 and the tension wheel 52 are located on one diagonal line of the flat bottom plate 20, and the two driven wheels 53 are located on the other diagonal line, the driving wheel 51 is connected with the output end of the power mechanism 60, and the synchronous belt 54 is sequentially wound around the driving wheel 51, one driven wheel 53, the tension wheel 52 and the other driven wheel 53, and the centers of the two driven wheels 53 are respectively connected with the lead screws 41 of one linear drive mechanism 40. The arrangement of the tension wheel 52 plays a role in tensioning the synchronous belt 54, and on the other hand, the synchronous belt 54 is further expanded through the tension wheel 52 to form a large enough space to allow the extension pipe 310 to pass through.

[0057] In actual situations, there is an inclination error between the upper end surface of the sub-chamber 400 and the horizontal plane, which is caused by the machining error of the sub-chamber 400 and the stacking of the furnace body from bottom to top. To solve this problem, in some embodiments of the present application, with reference to Figure 2 , Figures 4-6 and Figure 8As shown, the bellows lifting device 100 also includes an adaptive rotation mechanism 70 for dynamically adapting to the inclination between the upper end face of the auxiliary chamber 400 and the horizontal plane. The adaptive rotation mechanism 70 includes a hinge block 71 and a hinge block shaft 72. The lower surface of the hinge block 71 is fixed to the lower flange 32 of the bellows 30, and the side of the hinge block 71 away from the bellows 30 is fixed to the hinge block shaft 72. The hinge block shaft 72 is rotatably connected to the nut seat 43. It is understood that, with reference to... Figure 8 As shown, when the upper end of the auxiliary chamber 400 tilts in the front-back direction ( Figure 2 (With one end higher than the other in the front-to-back direction), because the hinge block shaft 72 and the nut seat 43 are rotatable, the bellows 30 adaptively follows the tilt of the upper end face of the secondary chamber 400, and the hinge block shaft 72 rotates accordingly at a suitable angle. (Reference) Figure 8 As shown, when the upper surface of the auxiliary chamber 400 is tilted in the left-right direction ( Figure 2 (One end is higher than the other in the left-right direction). In other words, when the upper end face of the auxiliary chamber 400 is tilted in the plane parallel to the central axis formed by the two lead screws 41, the lead screw nut 42 can be manually rotated to rotate one or two teeth up or down on the lead screw 41. That is, the lead screw 41 rotates a certain angle, causing the nut seat 43 to move up and down a certain distance. The above structure and adjustment can ensure that the sealing ring lip on the lower flange 32 of the bellows 30 can adapt to the tilt of the upper end face of the auxiliary chamber 400 in any direction, and the lip sealing ring is uniformly compressed, reducing the risk of vacuum leakage of the equipment under different operating conditions. The adaptive rotation mechanism 70 and the method of adjustment by rotating the lead screw nut 42 are only suitable for fine adjustment of the upper end face of the auxiliary chamber 400.

[0058] Further, refer to Figure 4 and Figure 6 As shown, the nut seat 43 is an L-shaped plate. The nut seat 43 includes a vertical part 432 and a horizontal part 433 that are vertically and integrally connected to each other. The screw nut 42 is installed in the vertical part 432 of the nut seat 43. The horizontal part 433 has a mounting hole 434 that penetrates its upper and lower surfaces in the middle. The horizontal part 433 of the nut seat 43 has a circular hole 431 that accommodates the hinge block shaft 72 at one end near the bellows 30. The circular hole 431 communicates with the mounting hole 434. The hinge block shaft 72 protrudes outward in the circumferential direction at one end near the bellows 30 to form a retaining ring 721. The hinge block shaft 72 is sleeved in the shouldered anti-friction sleeve 73. The hinge block shaft 72 and the shouldered anti-friction sleeve 73 extend into the circular hole 431 and are fixed by the pin retaining ring 74. The pin retaining ring 74 is located inside the mounting hole 434, and the hinge block shaft 72 is provided with a friction-reducing ring 76 between the pin retaining ring 74 and the side wall of the mounting hole 434 to reduce the friction between the pin retaining ring 74 and the side wall of the mounting hole 434.

[0059] refer to Figure 5 and Figure 6As shown, the hinge block 71 is in the shape of a circular arc near the end face of the bellows 30, a mounting groove 711 for accommodating a hinge block shaft 72 is formed in the middle of the side of the hinge block 71 away from the bellows 30, one end of the hinge block shaft 72 extends into the mounting groove 711 and is fastened by a bolt. The hinge block 71 is screwed from top to bottom through the hinge block 71 and is fixed on the lower flange 32 of the bellows 30 by a bolt.

[0060] In some embodiments of the present application, with reference to Figure 4 As shown, the lower part of the flat bottom plate 20 is provided with a position detection mechanism 80, the position detection mechanism 80 includes a travel switch bracket 81, an upper travel switch 82, a lower travel switch 83 and a stop block 84, the travel switch bracket 81 is located on the outside of the nut seat 43, and the travel switch bracket 81 is arranged in parallel with the nut seat 43, the upper part of the travel switch bracket 81 is vertically installed with the upper travel switch 82, and the lower part of the travel switch bracket 81 is vertically installed with the lower travel switch 83, the upper travel switch 82 is used to determine the separation position of the bellows 30 and the upper end face of the sub-chamber 400, and the lower travel switch 83 is used to determine the combination position of the bellows 30 and the upper end face of the sub-chamber 400. The stop block 84 is installed on the upper part of the side of the nut seat 43 close to the travel switch bracket 81, the upper travel switch 82 and the lower travel switch 83 are both in communication connection with the control system of the hard shaft single crystal furnace, the nut seat 43 is driven to move up and down by the lead screw 41, the stop block 84 is driven to approach or move away from the upper travel switch 82 or the lower travel switch 83, a switch signal is generated, after the control system receives the switch signal, a stop running signal is output, the power mechanism 60 is controlled to stop running, and then the bellows 30 is controlled to stop moving.

[0061] Further, with reference to Figure 7 As shown, the upper part and the lower part of the travel switch bracket 81 are respectively provided with height adjustment holes 811, the upper travel switch 82 and the lower travel switch 83 are respectively installed in the height adjustment holes 811, the height adjustment holes 811 can adjust the height of the upper travel switch 82 and the lower travel switch 83 to adapt to the bellows 30 with different requirements.

[0062] In some embodiments of the present application, with reference to Figure 1 and Figure 3As shown, the bellows lifting device 100 further comprises a concentric adjustment mechanism 90 for adjusting the concentricity of the bellows lifting device 100 and the crystal lifting device 300, the concentric adjustment mechanism 90 comprises transverse adjustment holes 91 and longitudinal adjustment holes 92, the transverse adjustment holes 91 and the longitudinal adjustment holes 92 are arranged perpendicular to each other, a plurality of transverse adjustment holes 91 are evenly arranged on the connecting plate 11 in the circumferential direction, the bellows lifting device 100 is screwed to the rack 200 through the transverse adjustment holes 91 by tension bolts, and a plurality of longitudinal adjustment holes 92 are evenly arranged on the mounting frame 14 in the circumferential direction, and the mounting frame 14 is screwed to the flat bottom plate 20 through the longitudinal adjustment holes 92 by bolts. The transverse adjustment holes 91 are used to adjust the position of the bellows lifting device 100 in the front-rear direction, and the longitudinal adjustment holes 92 are used to adjust the position of the bellows lifting device 100 in the left-right direction. For example, referring to Figure 1 As shown, there are four transverse adjustment holes 91, respectively located at the four corners of the connecting plate 11, and there are five longitudinal adjustment holes 92, the transverse adjustment holes 91 can adjust the position of the bellows lifting device 100 in the front-rear direction, and the longitudinal adjustment holes 92 adjust the position of the flat bottom plate 20, the bellows 30 connected to the flat bottom plate 20 and related structures in the left-right direction.

[0063] The concentric adjustment mechanism 90 further comprises a concentric adjustment hole 93 and a jacking bolt 94, the connecting plate 11 is provided with a concentric adjustment hole 93 outside the transverse adjustment hole 91, and the jacking bolt 94 is jacked on the rack 200 through the concentric adjustment hole 93, and the concentric adjustment hole 93 and the jacking bolt 94 are used to adjust the position of the bellows lifting device 100 in the up-down direction. The arrangement of the concentric adjustment mechanism 90 enables the bellows lifting device 100 to be adjusted in the front-rear, left-right and up-down directions, and to move freely within a certain range, which can compensate for the installation problems caused by the accumulation of manufacturing errors.

[0064] Working principle:

[0065] Installation: the connecting plate 11 is fixed to the rack 200 through the transverse adjustment holes 91 by tension bolts, the bellows 30 is placed below the mounting frame 14, the upper flange 31 of the bellows 30 is connected to the extension pipe 310 after adjusting the concentricity of the bellows 30 and the extension pipe 310, the two nut seats 43 are connected to the lead screw 41 through the lead screw nut 42 respectively, the hinge block 71 is installed on the horizontal part 433 of the nut seat 43 through the hinge block shaft 72, and the hinge block 71 is fixed to the lower flange 32 of the bellows 30 by bolts.

[0066] Work: the rotary motion of the power mechanism 60 drives the driving wheel 51, which in turn drives the lead screw 41 to rotate through the synchronous belt 54, thereby driving the nut seat 43 to move up and down, and the up-down movement of the nut seat 43 drives the bottom of the bellows 30 and the upper end surface of the auxiliary chamber 400 to switch between the disengaged state and the combined state.

[0067] In the description of the present application, it is to be understood that the orientations or positional relationships indicated by the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "upper", "lower", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", "axial", "radial", "circumferential" and the like are based on the orientations or positional relationships shown in the drawings, and are merely for the purpose of facilitating the description of the present application and simplifying the description, and do not indicate or imply that the devices or elements indicated thereby must have a particular orientation, be constructed and operated in a particular orientation, and therefore cannot be understood as limiting the present application.

[0068] In addition, the terms "first", "second", "third", etc. are used only for descriptive purposes and cannot be understood as indicating or implying relative importance or implicitly indicating the number of technical features indicated thereby. Therefore, the features defined with "first", "second", etc. can explicitly or implicitly include one or more of the features. In the description of the present application, the meaning of "a plurality of" is two or more, unless otherwise explicitly specified and limited.

[0069] In the present application, unless otherwise explicitly specified and limited, the terms "mounting", "connecting", "connecting", "fixing" and the like should be understood broadly, for example, it can be fixed connection, or detachable connection, or integral; it can be mechanical connection, or electrical connection, or communication; it can be direct connection, or indirect connection through intermediate medium, or internal communication of two elements or interaction relationship between two elements. For those skilled in the art, the specific meaning of the above terms in the present application can be understood according to the specific circumstances.

[0070] In the present application, unless otherwise explicitly specified and limited, the first feature is "on" or "under" the second feature, which can be direct contact between the first and second features, or indirect contact between the first and second features through intermediate medium. Moreover, the first feature "above", "over" and "on" the second feature can be directly above or obliquely above the first feature, or only indicate that the horizontal height of the first feature is higher than that of the second feature. The first feature "below", "under" and "under" the second feature can be directly below or obliquely below the first feature, or only indicate that the horizontal height of the first feature is less than that of the second feature.

[0071] In the description of the specification, the description using the terms "one embodiment", "some embodiments", "an example", "a specific example", or "some examples" etc. means that the particular feature, structure, material or characteristic being described is included in at least one embodiment or example of the present application. The illustrative appearances of the above-mentioned terms in various places in the specification are not necessarily referred to the same embodiment or example. Moreover, the particular features, structures, materials, or characteristics can be combined in any suitable manner in one or more embodiments or examples. Furthermore, the description herein of certain examples does not necessarily exclude these examples from the scope of the application, and these examples can be combined with each other for the purpose of patentable inventions.

[0072] Although the embodiments of the present application have been shown and described, it would be appreciated by those skilled in the art that changes, modifications, alternatives and variations to these embodiments could be made without departing from the principles and spirit of the application, and the scope of the application is defined by the claims and their equivalents.

Claims

1. A bellows lifting device suitable for the auxiliary chamber of a hard-axis single crystal furnace, the bellows lifting device being mounted on a frame, characterized in that, The bellows lifting device includes: The base has one end connected to the frame and the other end connected to a flat bottom plate. A central hole is provided in the center of the flat bottom plate to allow the extension tube to pass through. The base includes a connecting plate, a vertical pole, and a bracket. The vertical pole is vertically installed. The connecting plate is vertically fixed to the lower part of one side of the vertical pole, and the bracket is vertically fixed to the upper part of the other side of the vertical pole. The bracket is fixedly connected to a mounting frame at the end away from the vertical pole, and the flat bottom plate is fixedly connected to the upper surface of the mounting frame. A bellows is located between the central hole and the central hole on the upper end face of the sub-chamber, and the upper end of the bellows is connected to the bottom of the extension tube of the crystal lifting device. The linear drive mechanism comprises two linear drive mechanisms symmetrically located on both sides of the bellows. The upper end of each linear drive mechanism is mounted below the flat bottom plate, and the lower end of each linear drive mechanism is connected to the lower end of the bellows. The linear drive mechanism drives the lower end of the bellows to move up and down in a direction perpendicular to the upper end face of the auxiliary chamber, thereby switching the bellows from the auxiliary chamber to a disengaged state and an engaged state. The linear drive mechanism includes a lead screw, a lead screw nut, and a nut seat. The lead screw nut is installed in the nut seat and is threadedly connected to the lead screw. The upper end of the lead screw is connected to the power mechanism through a pulley transmission mechanism. An adaptive rotation mechanism is used to dynamically adapt to the inclination between the upper end face of the auxiliary chamber and the horizontal plane. The adaptive rotation mechanism includes a hinge block and a hinge block shaft. The lower surface of the hinge block is fixed to the lower flange of the bellows. The side of the hinge block away from the bellows is fixed to the hinge block shaft. The hinge block shaft is rotatably connected to the nut seat. A concentric adjustment mechanism is used to adjust the concentricity of the corrugated pipe lifting device and the crystal lifting device. The concentric adjustment mechanism includes a lateral adjustment hole and a longitudinal adjustment hole, which are arranged perpendicularly to each other. A plurality of lateral adjustment holes are opened circumferentially on the connecting plate. The corrugated pipe lifting device is threadedly connected to the frame through the lateral adjustment hole by a tension bolt. A plurality of longitudinal adjustment holes are evenly opened circumferentially on the mounting frame. The mounting frame is threadedly connected to the flat bottom plate through the longitudinal adjustment hole by a bolt. The lateral adjustment hole is used to adjust the position of the corrugated pipe lifting device in the front-back direction, and the longitudinal adjustment hole is used to adjust the position of the corrugated pipe lifting device in the left-right direction.

2. The bellows lifting device for the auxiliary chamber of a hard-shaft single crystal furnace according to claim 1, characterized in that, The pulley transmission mechanism includes a driving pulley, a tensioning pulley, two driven pulleys, and a synchronous belt. The driving pulley, tensioning pulley, and two driven pulleys are located at the four corners of the upper surface of the flat bottom plate. The driving pulley and the tensioning pulley are arranged opposite each other, and the two driven pulleys are arranged opposite each other. The driving pulley is connected to the output end of the power mechanism. The synchronous belt passes around the driving pulley, one driven pulley, the tensioning pulley, and the other driven pulley in sequence. The centers of the two driven pulleys are respectively connected to the lead screw of the linear drive mechanism.

3. The bellows lifting device for the auxiliary chamber of a hard-axis single crystal furnace according to claim 1, characterized in that, One end of the hinge block shaft protrudes outward in the circumferential direction to form a retaining ring. The end of the nut seat near the bellows has a round hole to accommodate the hinge block shaft. The hinge block shaft is sleeved in the shouldered anti-friction sleeve. The hinge block shaft and the shouldered anti-friction sleeve extend into the round hole and are fixed by a pin retaining ring.

4. The bellows lifting device for the auxiliary chamber of a hard-axis single crystal furnace according to claim 1, characterized in that, A position detection mechanism is provided below the flat bottom plate. The position detection mechanism includes a limit switch bracket, an upper limit switch, a lower limit switch, and a stop block. The limit switch bracket is located outside the nut seat and is arranged parallel to the nut seat. The upper limit switch is vertically installed on the upper part of the limit switch bracket, and the lower limit switch is vertically installed on the lower part of the limit switch bracket. A stop block is installed on the upper part of the nut seat near the limit switch bracket.

5. The bellows lifting device for the auxiliary chamber of a hard-axis single crystal furnace according to claim 4, characterized in that, The upper and lower parts of the limit switch bracket are respectively provided with height adjustment holes for installing the upper limit switch and the lower limit switch.

6. The bellows lifting device for the auxiliary chamber of a hard-axis single crystal furnace according to claim 1, characterized in that, The concentric adjustment mechanism also includes a concentric adjustment hole and a tightening bolt. The connecting plate has a height adjustment hole on the outside of the concentric adjustment hole. The tightening bolt passes through the concentric adjustment hole and presses against the frame. The concentric adjustment hole and the tightening bolt are used to adjust the position of the bellows lifting device in the vertical direction.

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