IGBT probe card

Abstract

The invention discloses an IGBT probe card, comprising a PCB main board, wherein a gas hood set is arranged in the middle of the PCB main board, wherein the gas hood set comprises a gas hood upper frame fixedly mounted on the PCB main board by means of flat-bottom round-head cross screws, a gas hood bottom ring fixedly mounted on the lower surface of the PCB main board, and a gas hood upper cover arranged on the upper side of the gas hood upper frame, wherein a locking metal block is fixedly connected to the middle of the PCB main board by means of a test head column hexagon socket screw, wherein the gas hood upper cover is fixedly mounted on the locking metal block by means of an upper cover column hexagon socket screw, and a probe test head is arranged on the lower side of the locking metal block; the invention adopts a designed gas hood set, a quick-connect gas valve and an air curtain spray hole, wherein a continuous air curtain is formed in the gas hood area and around a chip by means of the quick-connect gas valve when in use, so as to suppress an arc generated by ultra-high voltage and large current breaking through the air, thereby ensuring that a chip to be tested can be tested normally and is not burned, and wherein the gas hood set can be quickly assembled, disassembled and replaced when in use.

Description

Technical Field

[0001] The invention belongs to the technical field of IGBT probe cards, and in particular relates to an IGBT probe card. Background Art

[0002] With the rapid development of the domestic integrated circuit industry, IGBT chips are the core devices for energy conversion and transmission, commonly known as the "CPU" of power electronic devices. As a national strategic emerging industry, they are widely used in rail transportation, smart grids, aerospace, electric vehicles, and new energy equipment, and have huge market demand. Chip testing factories also have an urgent need for IGBT probe cards with high efficiency, stability, high reliability, and low maintenance costs. As a necessary test piece for IGBT chip testing, IGBT probe cards are the interface components between chips and testers, and their role directly affects the development of chip testing and the IGBT chip industry.

[0003] IGBT chip testing is a very special test that needs to withstand ultra-high voltage and ultra-large current when working. The market basically uses ordinary probe cards for alternative testing, which cannot fully cover the characteristics of IGBT testing, especially when testing ultra-high voltage (500-6000V) and high current (10-50A). The air near the needle tip will be broken down and the arc generated will burn the chip under test. The ordinary IGBT probe card on the market can only be used to test low voltage (<500V) and small current (<10A), which hinders the development of the domestic IGBT chip market. For this reason, we propose the IGBT probe card. Summary of the invention

[0004] The object of the present invention is to provide an IGBT probe card to solve the problems raised in the above background technology.

[0005] To achieve the above-mentioned purpose, the present invention provides the following technical solutions: an IGBT probe card, comprising a PCB main board, a gas hood set is arranged in the middle of the PCB main board, the gas hood set comprises a gas hood upper frame fixedly mounted on the PCB main board by flat-bottomed round head cross screws, a gas hood bottom ring fixedly mounted on the lower surface of the PCB main board and a gas hood upper cover arranged on the upper side of the gas hood upper frame, a locking metal block is fixedly connected to the middle of the PCB main board by a hexagon socket screw with a test head column head, the gas hood upper cover is fixedly mounted on the locking metal block by a hexagon socket screw with a column head of the upper cover, a probe test head is arranged on the lower side of the locking metal block, a quick-connect air valve is arranged on one side of the gas hood upper frame, an air curtain spray hole is opened on the surface of the PCB main board, the air curtain spray hole is located on the inner side of the gas hood upper frame, and the air curtain spray hole is opened around the locking metal block and the probe test head.

[0006] Preferably, the overall shape of the air hood set is set to be a square, the shapes of the air hood upper frame and the air hood bottom ring are square rings, and the shape of the air hood upper cover is set to be a square sheet.

[0007] Preferably, the overall shape of the air hood set is set to be circular, the shapes of the air hood upper frame and the air hood bottom ring are circular rings, and the shape of the air hood upper cover is set to be a circular sheet.

[0008] Preferably, a test needle is provided in the middle of the lower end of the probe test head, and an opening is provided in the middle of the locking metal block, and the position of the opening corresponds to the position of the test needle.

[0009] Preferably, signal connectors are provided at both ends of the PCB main board, and the signal connectors are conductively connected to the test needle through internal wiring.

[0010] Preferably, the quick-connect air valve is connected to the internal cavity of the air hood upper frame, and the quick-connect air valve is connected to the air curtain spray hole through the internal cavity.

[0011] Preferably, one end of the flat-bottomed round-head cross screw passes through the air hood upper frame and the PCB mainboard and is screwed into the air hood bottom ring. The air hood bottom ring and the air hood upper frame are concentric square rings and their positions correspond to each other.

[0012] Preferably, one end of the hexagon socket screw of the test head column passes through the locking metal block and the PCB main board and is screwed onto the probe test head.

[0013] Preferably, the gas hood set comprises an outer protective shell and an inner supporting shell, the inner supporting shell is arranged on the inner side of the outer protective shell, and a supporting frame is arranged inside the inner supporting shell.

[0014] Preferably, the space between the outer protective shell and the inner supporting shell is filled with an inner honeycomb filler, a heat sink or a shielding sheet.

[0015] Compared with the prior art, the present invention has the following beneficial effects:

[0016] 1. The present invention adopts the designed gas hood set, quick-connect gas valve and air curtain spray hole. When in use, a continuous air curtain is formed in the gas hood area and around the chip through the quick-connect gas valve to suppress the arc generated by the breakdown of the air by ultra-high voltage (500-6000V) and large current (10-50A), thereby ensuring that the chip under test can be tested normally and not burned. In addition, the gas hood set can be quickly assembled, disassembled and replaced when in use.

[0017] 2. The present invention is cost-effective, easy to operate, quick to use, and has low dependence on surrounding supporting equipment and environment. Through modular design, the commonality of product materials is widely covered, reducing procurement costs. The extremely simple manual operation during use can lower the operating threshold for personnel. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] Figure 1 It is a structural schematic diagram of the present invention;

[0019] Figure 2 It is a cross-sectional structural schematic diagram of the present invention;

[0020] Figure 3 It is a schematic diagram of the explosion structure of the present invention;

[0021] Figure 4 It is a schematic diagram of the gas hood upper cover structure of the present invention;

[0022] Figure 5 This is a schematic diagram of the inner structure of the gas hood set of the present invention;

[0023] Figure 6 It is a schematic diagram of the structure of the probe test head of the present invention;

[0024] Figure 7 This is a schematic diagram of the top view of the circular air hood set of the present invention;

[0025] Figure 8 It is a schematic diagram of the structure of the gas hood set frame of the present invention;

[0026] In the figure: 1. Probe test head; 2. PCB main board; 3. Locking metal block; 4. Hexagon socket screw on the test head column; 5. Signal connector; 6. Gas hood upper frame; 7. Gas hood bottom ring; 8. Flat-bottomed round-head cross screw; 9. Quick-connect gas valve; 10. Gas hood upper cover; 11. Hexagon socket screw on the upper cover column; 12. Gas hood set; 13. Test needle; 14. Air curtain spray hole; 15. Outer protective shell; 16. Inner honeycomb filling; 17. Inner support shell; 18. Support frame. DETAILED DESCRIPTION

[0027] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0028] Embodiment 1:

[0029] See also Figures 1 to 6The present invention provides a technical solution: an IGBT probe card comprises a PCB main board 2, a gas cover set 12 is arranged in the middle of the PCB main board 2, the gas cover set 12 comprises a gas cover upper frame 6 fixedly mounted on the PCB main board 2 by a flat bottom round head cross screw 8, a gas cover bottom ring 7 fixedly mounted on the lower surface of the PCB main board 2 and a gas cover upper cover 10 arranged on the upper side of the gas cover upper frame 6, the overall shape of the gas cover set 12 is set to be square, the shape of the gas cover upper frame 6 and the gas cover bottom ring 7 are square rings, the shape of the gas cover upper cover 10 is set to be a square sheet, the middle part of the PCB main board 2 is fixedly connected with a locking metal block 3 by a test head column head hexagon socket screw 4, the gas cover upper cover 10 is fixedly mounted on the locking metal block 3 by an upper cover column head hexagon socket screw 11, a probe test head 1 is arranged on the lower side of the locking metal block 3, one end of the test head column head hexagon socket screw 4 passes through the locking metal block 3 and the PCB main board 2 and is screwed on the probe test head 1, so that The probe test head 1 is more stable during the test. A quick-connect air valve 9 is provided on one side of the air hood upper frame 6. An air curtain spray hole 14 is provided on the surface of the PCB main board 2. The quick-connect air valve 9 is connected to the internal cavity of the air hood upper frame 6. The quick-connect air valve 9 is connected to the air curtain spray hole 14 through the internal cavity. When in use, nitrogen is conveniently sprayed from the air curtain spray hole 14 to form an air curtain isolation. The air curtain spray hole 14 is located on the inner side of the air hood upper frame 6, and the air curtain spray hole 14 surrounds the locking metal block 3 and the probe. The test head 1 is opened, and the nitrogen filling equipment is connected through the quick-connect air valve 9, and nitrogen is filled into the air hood upper frame 6, and then the nitrogen is sprayed out through the air curtain spray hole 14 to form a continuous air curtain around the probe test head 1 and the chip. One end of the flat-bottomed round head cross screw 8 passes through the air hood upper frame 6 and the PCB main board 2 and is screwed into the air hood bottom ring 7. The air hood bottom ring 7 and the air hood upper frame 6 are concentric square rings and their positions correspond to each other. When in use, the air hood bottom ring 7 and the air hood upper frame 6 are installed more stably.

[0030] Furthermore, a test needle 13 is provided in the middle of the lower end of the probe test head 1, and an opening is provided in the middle of the locking metal block 3, and the position of the opening corresponds to the position of the test needle 13; signal connectors 5 are provided at both ends of the PCB main board 2, and the signal connector 5 is conductively connected to the test needle 13 through internal wiring, which facilitates the communication between the test needle 13 and the signal connector 5 when in use.

[0031] From the above description, it can be seen that the present invention has the following beneficial effects: when in use, a continuous air curtain is formed in the air hood area and around the chip through the quick-connect air valve 9 to suppress the arc generated by the ultra-high voltage (500-6000V) and large current 10-50A breaking through the air, ensuring that the chip under test can be tested normally and not burned, and the air hood set 12 can be quickly assembled, disassembled and replaced when in use.

[0032] It is cost-effective, easy to operate, quick to get started, and has low dependence on surrounding supporting equipment and environment. Through modular design, the commonality of product materials covers a wide range, reducing procurement costs. The extremely simple manual operation during use can lower the operating threshold for personnel.

[0033] The gas hood set 12 is made of transparent acrylic with precision processing and a transparent appearance. The test situation can be observed through the hood, and the upper cover can be closed or opened as needed.

[0034] IGBT chip is the core device of energy conversion and transmission. The corresponding detection pin card has different requirements and different test equipment functions in different stages of use. In some R&D or phased debugging, it is necessary to manually observe the contact between the pin tip and the chip (non-ATE equipment automated debugging), and it is necessary to observe the pin tip visible to the naked eye. Therefore, it is particularly important for us to design the gas hood so that the upper cover can be opened and locked as needed, which is also the core function of the gas hood.

[0035] Embodiment 2:

[0036] See also Figures 1 to 8 As shown, based on the first embodiment, the present invention provides a technical solution: the overall shape of the air hood set 12 is set to be circular, the shapes of the air hood upper frame 6 and the air hood bottom ring 7 are circular rings, and the shape of the air hood upper cover 10 is set to be a circular sheet, which is convenient for installation and use.

[0037] For further information, see Figure 8 The air mask suit 12 includes an outer protective shell 15 and an inner supporting shell 17. The inner supporting shell 17 is arranged on the inner side of the outer protective shell 15. A supporting frame 18 is arranged inside the inner supporting shell 17. An inner honeycomb filling 16 is filled between the outer protective shell 15 and the inner supporting shell 17 to ensure the strength of the air mask suit 12 when in use.

[0038] Embodiment three:

[0039] See also Figures 1 to 8 As shown, on the basis of the second embodiment, the present invention provides a technical solution: the gas hood set 12 includes an outer protective shell 15 and an inner supporting shell 17, the inner supporting shell 17 is arranged on the inner side of the outer protective shell 15, a supporting frame 18 is arranged inside the inner supporting shell 17, and a heat sink and a shielding sheet are filled between the outer protective shell 15 and the inner supporting shell 17. When in use, the heat dissipation effect can be enhanced as needed, and the influence of external signals on the detection signal can be reduced.

[0040] The working principle and use process of the present invention are as follows: design a probe card scheme and design related drawings in advance according to chip information and test related information; perform precision processing on the PCB main board 2 according to the design drawing, and open related air curtain spray holes 14 and screw through holes; process the corresponding fixture, and process the probe according to the design drawing to make a probe test head 1; install the probe test head 1 to the PCB main board 2, grind the test needle 13 to a suitable size, and adjust the plane of the test needle 13 to ensure that the relative position of the test needle 13 is accurate and the plane tolerance of the test needle 13 is within the specification requirements, so as to ensure the accuracy of the contact between the test needle 13 and the chip; install the air cover bottom ring 7 and the air cover upper frame 6 to the PCB main board 2 through the flat-bottomed round head cross screw 8, and then install the quick-connect air valve 9 and the upper cover column head hexagon socket screw 11 on the air cover upper frame 6; finally, weld and install the signal connector 5;

[0041] When in use, the test needle 13 is in direct contact with the chip, and the cable connector of the test machine is connected to the signal connector 5. When the test machine gives electrical properties, the electrical signal conduction between the chip and the test machine can be realized, so as to carry out the test. During the test, the nitrogen filling equipment is connected through the quick-connect air valve 9, and nitrogen is filled into the air cover upper frame 6. Then the nitrogen is sprayed out through the air curtain nozzle 14 to form a continuous air curtain around the probe test head 1 and the chip to suppress the arc generated by the ultra-high voltage (500-6000V) and large current 10-50A breaking through the air, ensuring that the chip under test can be tested normally and is not burned.

[0042] It should be noted that, in this article, relational terms such as first and second, etc. are only used to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Moreover, the terms "include", "comprise" or any other variants thereof are intended to cover non-exclusive inclusion, so that a process, method, article or device including a series of elements includes not only those elements, but also other elements not explicitly listed, or also includes elements inherent to such process, method, article or device. In the absence of further restrictions, the elements defined by the sentence "comprise a ..." do not exclude the existence of other identical elements in the process, method, article or device including the elements.

[0043] The above description is only used to illustrate the technical solution of the present invention rather than to limit it. Other modifications or equivalent substitutions made to the technical solution of the present invention by ordinary technicians in this field should be included in the scope of the claims of the present invention as long as they do not depart from the spirit and scope of the technical solution of the present invention.

Claims

1. An IGBT probe card, comprising a PCB main board (2), characterized in that: A gas hood set (12) is provided in the middle of the PCB main board (2), and the gas hood set (12) comprises a gas hood upper frame (6) fixedly mounted on the PCB main board (2) by means of flat-bottomed round-head cross screws (8), a gas hood bottom ring (7) fixedly mounted on the lower surface of the PCB main board (2), and a gas hood upper cover (10) provided on the upper side of the gas hood upper frame (6). A locking metal block (3) is fixedly connected to the middle of the PCB main board (2) by means of a test head column head hexagon socket screw (4). The upper cover (10) is fixedly mounted on the locking metal block (3) by means of an upper cover column head hexagon socket screw (11); a probe test head (1) is arranged on the lower side of the locking metal block (3); a quick-connect air valve (9) is arranged on one side of the gas cover upper frame (6); an air curtain spray hole (14) is provided on the surface of the PCB main board (2); the air curtain spray hole (14) is located on the inner side of the gas cover upper frame (6), and the air curtain spray hole (14) is provided around the locking metal block (3) and the probe test head (1); A test needle (13) is provided at the middle of the lower end of the probe test head (1), and an opening is provided at the middle of the locking metal block (3), and the position of the opening corresponds to the position of the test needle (13); Signal connectors (5) are provided at both ends of the PCB main board (2), and the signal connectors (5) are conductively connected to the test needle (13) via internal wiring; The quick-connect air valve (9) is connected to the internal cavity of the air hood upper frame (6), and the quick-connect air valve (9) is connected to the air curtain spray hole (14) through the internal cavity; One end of the flat-bottomed round-head cross screw (8) passes through the gas hood upper frame (6) and the PCB main board (2) and is screwed into the gas hood bottom ring (7); the gas hood bottom ring (7) and the gas hood upper frame (6) are concentric square rings and their positions correspond to each other; One end of the test head column hexagon socket screw (4) passes through the locking metal block (3) and the PCB main board (2) and is screwed onto the probe test head (1).

2. The IGBT probe card according to claim 1, characterized in that: The overall shape of the gas hood set (12) is set to be a square, the shape of the gas hood upper frame (6) and the gas hood bottom ring (7) are square rings, and the shape of the gas hood upper cover (10) is set to be a square sheet.

3. The IGBT probe card according to claim 1, characterized in that: The overall shape of the air hood set (12) is set to be circular, the shape of the air hood upper frame (6) and the air hood bottom ring (7) are circular rings, and the shape of the air hood upper cover (10) is set to be a circular sheet.

4. The IGBT probe card according to claim 1, characterized in that: The gas hood set (12) comprises an outer protective shell (15) and an inner supporting shell (17); the inner supporting shell (17) is arranged on the inner side of the outer protective shell (15); and a supporting frame (18) is arranged inside the inner supporting shell (17).

5. The IGBT probe card according to claim 4, characterized in that: An inner honeycomb filler (16), a heat sink or a shielding sheet is filled between the outer protective shell (15) and the inner supporting shell (17).

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