Decontamination device

Abstract

Provided is a decontamination device capable of confirming whether a mist circulation dispersion unit is working properly before and after decontamination operation or during decontamination and capable of ensuring the operation of the decontamination device. The decontamination device is provided with a mist supply unit, a mist circulation dispersion unit, and an ultrasonic wave detection unit. The mist supply unit changes a decontamination liquid used for decontaminating the inside of a work chamber into a decontamination mist and supplies the decontamination mist to the inside of the work chamber. The mist circulation dispersion unit makes a vibration plate provided with a plurality of ultrasonic wave transmitters vibrate ultrasonically to generate an ultrasonic wave-based acoustic flow from the surface of the plate to the vertical direction, and makes a pressing action based on acoustic radiation pressure of the acoustic flow act on the decontamination mist to make the decontamination mist circulate and disperse in the work chamber. The ultrasonic wave detection unit is provided with an ultrasonic wave receiver for detecting the operation of the ultrasonic wave transmitters, and detects the operation of the plurality of ultrasonic wave transmitters as a whole and / or each ultrasonic wave transmitter provided in the vibration plate.

Description

Technical Field

[0001] The present invention relates to a decontamination apparatus having a mist circulation and dispersion unit for decontaminating the interior of a clean room or isolator device, and more particularly to a decontamination apparatus having an ultrasonic detection unit for detecting the operation of the mist circulation and dispersion unit. Background Technology

[0002] Maintaining a sterile environment is crucial in manufacturing facilities for pharmaceuticals or food, as well as in medical settings such as operating rooms. In particular, the decontamination process in pharmaceutical manufacturing workshops, i.e., sterile rooms, requires rigorous validation to meet GMP (Good Manufacturing Practice) standards.

[0003] In recent years, hydrogen peroxide (gas or mist) has been widely used in the decontamination of sterile rooms and other work areas (hereinafter referred to as the decontamination target room). Hydrogen peroxide has a strong bactericidal effect, is inexpensive and readily available, and is effective as an environmentally friendly decontamination gas that ultimately decomposes into oxygen and water.

[0004] The decontamination effect of hydrogen peroxide is achieved by a condensation film of hydrogen peroxide water that condenses on the surface of the area to be decontaminated, as described in Patent Document 1 below. Therefore, in order to achieve a perfect decontamination effect in the chamber to be decontaminated, it is possible to increase the supply of hydrogen peroxide to make the resulting condensation film of hydrogen peroxide water thicker or to achieve a high concentration.

[0005] When an excessive amount of hydrogen peroxide is supplied to the cleaning chamber, excessive condensation occurs, resulting in corrosion of various manufacturing equipment, precision measuring equipment, or the walls of the cleaning chamber by the condensate film formed by the high concentration of hydrogen peroxide water.

[0006] In addition, after decontamination with hydrogen peroxide, ventilation is performed using clean air to remove residual hydrogen peroxide and condensate film inside the decontamination chamber. However, when an excess of hydrogen peroxide is supplied, there is a problem that ventilation to remove the condensate film of high concentrations of hydrogen peroxide water generated on the walls of the decontamination chamber takes a long time.

[0007] Therefore, in Patent Document 2 below, the inventors proposed a decontamination device that achieves perfect decontamination effect and shortens the operation time of ventilation, etc., by employing an ultrasonic-based mist circulation dispersion unit.

[0008] Existing technical documents

[0009] Patent Document 1: Japanese Patent Publication No. 61-4543

[0010] Patent Document 2: Japanese Patent Application Publication No. 2020-156970 Summary of the Invention

[0011] The problem that the invention aims to solve

[0012] In the aforementioned Patent Document 2, the fog circulation dispersion unit uses multiple ultrasonic transmitters, but the method for verifying their operation is not disclosed, which presents a problem in ensuring the operation of the device as a decontamination device.

[0013] Therefore, the object of the present invention is to address the above-mentioned problems by providing a decontamination device that can confirm that the mist circulation dispersion unit is working correctly before, during, or after the decontamination operation and can ensure the operation of the decontamination device.

[0014] Methods for solving problems

[0015] In addressing the aforementioned problems, the inventors, through diligent research, concluded that the problems could be solved by equipping the fog circulation and dispersion unit with a mechanism that enables the multiple ultrasonic transmitters to operate sequentially and an ultrasonic receiver that confirms the operation of each transmitter, thus completing the present invention.

[0016] That is, the decontamination device (20) of the present invention, according to the description of the first technical solution, comprises:

[0017] The mist supply unit (30) converts the cleaning solution used to clean the interior of the work chambers (10, 70, 80) into cleaning mist and supplies the cleaning mist into the interior of the work chambers.

[0018] The fog circulation and dispersion unit (40, 60a) causes a vibrating disk (41, 42, 61) equipped with multiple ultrasonic transmitters (46, 51, 63) to vibrate ultrasonically, generating an ultrasonic-based acoustic stream from the disk surface in a vertical direction. The pressure of the acoustic radiation based on this acoustic stream acts on the decontamination fog, causing the decontamination fog to circulate and disperse within the working chamber.

[0019] The ultrasonic detection unit (60b) is equipped with ultrasonic receivers (52, 65) for detecting the operation of the ultrasonic transmitters and for detecting the operation of the multiple ultrasonic transmitters of the vibrating plate as a whole and / or individual ultrasonic transmitters.

[0020] Furthermore, according to the description of the second technical solution, the present invention, based on the decontamination device described in the first technical solution, is characterized in that...

[0021] The aforementioned fog circulation and dispersion unit has a working control mechanism (62) for controlling the operation of the multiple ultrasonic transmitters of the aforementioned vibrating plate.

[0022] By operating each of the multiple ultrasonic transmitters individually, the operation of each ultrasonic transmitter can be verified separately.

[0023] Furthermore, according to the description of the third technical solution, the present invention, in the decontamination device described in the first or second technical solution, is characterized in that...

[0024] The aforementioned fog circulation dispersion unit includes a transmission control mechanism that enables the ultrasonic waves generated by the plurality of ultrasonic transmitters on the aforementioned vibrating plate to be transmitted in a variable and / or intermittent manner, with varying frequency and output.

[0025] Invention Effects

[0026] According to the above structure, the decontamination device of the present invention includes: a mist supply unit, a mist circulation and dispersion unit, and an ultrasonic detection unit. The mist supply unit converts the decontamination solution used for decontaminating the interior of the work chamber into a decontamination mist and supplies the decontamination mist into the interior of the work chamber. The mist circulation and dispersion unit causes a vibrating disk equipped with multiple ultrasonic transmitters to vibrate ultrasonically, generating an ultrasonic-based acoustic stream from the disk surface in a vertical direction. The pressure of the acoustic radiation based on this acoustic stream acts on the decontamination mist, causing the decontamination mist to circulate and disperse within the work chamber. The ultrasonic detection unit includes an ultrasonic receiver for detecting the operation of the ultrasonic transmitters, detecting the operation of the multiple ultrasonic transmitters of the vibrating disk as a whole and / or each ultrasonic transmitter individually.

[0027] Therefore, a decontamination device can be provided that can confirm whether the mist circulation dispersion unit is working correctly before, during, or after decontamination operations and can ensure the operation of the decontamination device.

[0028] Furthermore, according to the above structure, the fog circulation and dispersion unit includes a control mechanism that controls the operation of the multiple ultrasonic transmitters mounted on the vibrating plate. This allows each ultrasonic transmitter to operate individually, thus enabling the operation of each transmitter to be monitored separately. Consequently, the aforementioned effects can be achieved more specifically and effectively.

[0029] Furthermore, according to the above structure, the fog circulation and dispersion unit includes a transmission control mechanism. This transmission control mechanism allows for the variation of the frequency and output of the ultrasonic waves generated by the multiple ultrasonic transmitters mounted on the vibrating plate. Additionally, this transmission control mechanism can intermittently transmit the ultrasonic waves generated by the multiple ultrasonic transmitters mounted on the vibrating plate. Therefore, the aforementioned effects can be achieved more specifically and effectively. Attached Figure Description

[0030] Figure 1 This is a schematic cross-sectional view of the interior of the separator of the invention equipped with the decontamination device of Patent Document 2, viewed from the side.

[0031] Figure 2It is shown in Figure 1 A schematic perspective view of the state in which the cleaning device has a vibrating plate with multiple ultrasonic speakers arranged in the speaker base.

[0032] Figure 3 This is a conceptual diagram illustrating the relationship between an ultrasonic transmitter and an ultrasonic receiver.

[0033] Figure 4 This is a structural diagram of a device that integrates a fog circulation dispersion device and an ultrasonic detection device.

[0034] Figure 5 This is a conceptual diagram of the testing operation to confirm the function of the ultrasonic transmitter.

[0035] Figure 6 This is an internal cross-sectional view of the isolator when viewed from the ceiling side, and is a conceptual diagram showing the operation of the ultrasonic transmitter before decontamination.

[0036] Figure 7 Is Figure 6 The internal sectional view shows a conceptual diagram illustrating the operation of the ultrasonic transmitter during decontamination.

[0037] Figure 8 Viewed from the side of the ceiling, attached to Figure 6 The internal cross-sectional view of the transfer box of the isolator is a conceptual diagram showing the operation of the ultrasonic transmitter before (1) decontamination and during (2) decontamination. Detailed Implementation

[0038] In this invention, "fog" is interpreted broadly to include the state of finely dispersed airborne decontaminant droplets, the state of a mixture of decontaminant gas and droplets, and the state of decontaminant undergoing repeated condensation and evaporation between gas and droplets. Furthermore, regarding particle size, it is also broadly interpreted to include finely differentiated fog, dense fog, droplets, etc., depending on the specific circumstances.

[0039] Therefore, the fog of the present invention includes objects that are referred to as fog (sometimes defined as less than 10 μm) or dense fog (sometimes defined as less than 5 μm) depending on the situation, as well as objects with particle sizes of those sizes or larger. It should be noted that, in the present invention, it is believed that through the action of ultrasonic vibration, even droplets of 3 μm to 10 μm or larger, such as fog, dense fog, or liquid droplets, are homogenized into ultrafine particles of less than 3 μm, thereby achieving a high level of decontamination effect.

[0040] The present invention will now be described in detail through embodiments. It should be noted that the present invention is not limited to the embodiments described below.

[0041] In this embodiment, the working chamber, which is the object to be decontaminated, is illustrated using an isolator as an example. Figure 1 This is a schematic cross-sectional view of the interior of the isolator equipped with the decontamination device of the invention described in Patent Document 2, as presented by the inventor, viewed from the side. It should be noted that, in addition to the mist supply device and mist circulation and dispersion device included in the invention of Patent Document 2, the decontamination device of the present invention also includes an ultrasonic detection device for detecting the operation of the ultrasonic transmitter. Details regarding the ultrasonic detection device will be described later.

[0042] First, the decontamination device of the invention described in Patent Document 2 will be explained. Figure 1 In this embodiment, the isolator 10 has a decontamination device 20 disposed inside it. The decontamination device 20 consists of a mist supply device 30, a mist circulation and dispersion device 40, and a first control device (not shown). In this embodiment, a two-fluid spray nozzle 30 is used as the mist supply device 30 and is provided on the bottom wall surface 11 of the isolator 10. In addition, in this embodiment, hydrogen peroxide water (H2O2 aqueous solution) is used as the decontamination agent.

[0043] The dual-fluid spray nozzle 30 atomizes hydrogen peroxide water into hydrogen peroxide water mist 31 using compressed air from a compressor (not shown), and supplies it into the interior of the isolator 10. It should be noted that in this invention, the mist supply device is not limited to the dual-fluid spray nozzle, and the mist generation mechanism and output are not particularly limited.

[0044] Here, the fog circulation and dispersion device 40 will be described. In this embodiment, the fog circulation and dispersion device 40 includes two vibrating discs 41 and 42. The two vibrating discs 41 and 42 are arranged in a horizontal direction with their vibrating surfaces 41a and 42a facing inwards from the side walls 12 and 13 at the lower part of the right wall shown in the figure and the upper part of the left wall shown in the figure inside the isolator 10. The two vibrating discs 41 and 42 are arranged without their disc surfaces (vibrating surfaces) facing each other (the disc surfaces face each other directly). It should be noted that in the present invention, it is also possible not to arrange the two vibrating discs with their disc surfaces (vibrating surfaces) facing each other, but to arrange one or more discs on one side.

[0045] Here, the vibratory plate 41 (42 is the same) will be described. Figure 2 It is shown in Figure 1 A schematic perspective view of a cleaning device equipped with a vibrating disc containing multiple ultrasonic speakers (corresponding to ultrasonic transmitters) arranged on a speaker base. Figure 2 In the vibratory feeder 41, there is a base plate and multiple ultrasonic transmitters. Figure 2In the vibrating disk 41, a speaker base 45 is used as the base disk, and an ultrasonic speaker 46 is used as the transmitter. Furthermore, 25 ultrasonic speakers 46 are arranged on the plane 45a of the speaker base 45 in such a way that the transmission direction of their vibration surfaces 46a (to the left of the front view in the diagram) is uniform. It should be noted that the number of ultrasonic speakers is not particularly limited.

[0046] In this embodiment, a super-directional ultrasonic speaker is used as the ultrasonic speaker 46. Specifically, an ultrasonic speaker (DC12V, 50mA) with a frequency modulation method for transmitting ultrasonic waves at a frequency of around 40kHz is used. It should be noted that the type, size, structure, output, etc., of the ultrasonic speaker are not particularly limited. Furthermore, in this invention, the vibrating plate of the fog circulation and dispersion device is not limited to an ultrasonic speaker, and the ultrasonic wave generating mechanism, frequency range, and output are not particularly limited.

[0047] In this embodiment, by unifying the transmission directions of the vibration surfaces 46a of the plurality of (25) ultrasonic loudspeakers 46 and making these transmitters operate in the same phase, the ultrasonic waves in the front direction of each ultrasonic loudspeaker 46 reinforce each other, and the ultrasonic waves in the lateral direction of each ultrasonic loudspeaker 46 cancel each other out. As a result, when the ultrasonic loudspeakers 46 disposed on the loudspeaker base 45 vibrate ultrasonically, a highly directional sound stream is generated that travels in the air vertically from each vibration surface 46a. It should be noted that by controlling the frequency and output of the ultrasonic loudspeakers 46 using a first control device (not shown), a highly efficient decontamination operation can be achieved.

[0048] Next, the behavior of the hydrogen peroxide water mist 31 inside the isolator 10 of the decontamination device 20 equipped with the above-described structure will be explained. It should be noted that... Figure 1 In the diagram, the vibrating disk 41, located inside the isolator 10, has its vibrating surface 41a (which is in the same direction as the vibrating surface 46a of the ultrasonic speaker 46) facing to the left.

[0049] When in Figure 1 When the ultrasonic loudspeaker 46 vibrates ultrasonically, a highly directional acoustic stream 41b, traveling from the vibration surface 41a in the vertical direction (left direction in the diagram), draws in the hydrogen peroxide water mist 31 emitted from the dual-fluid spray nozzle 30. The pressure, based on acoustic radiation pressure, causes the mist to move in the direction of travel of the acoustic stream 41b (left direction in the diagram). At this time, the hydrogen peroxide water mist 31 becomes a fine mist 31a, miniaturized by the ultrasonic vibration based on the acoustic stream 41b, and circulates and disperses into the interior of the isolator 10.

[0050] On the other hand, the vibrating disk 42, located inside the isolator 10 and positioned in the upper left of the diagram, has its vibrating surface 42a (which is in the same direction as the vibrating surface 46a of the ultrasonic loudspeaker 46) facing to the right of the diagram. When the ultrasonic loudspeaker 46 vibrates ultrasonically in this state, the highly directional sound stream 42b, traveling from the vibrating surface 42a in the vertical direction (to the right of the diagram), exerts a pressing effect based on acoustic radiation pressure on the fine mist 31a that has been atomized and transported by the sound stream 41b, causing it to move in the direction of travel of the sound stream 42b (to the right of the diagram). At this time, the fine mist 31a becomes a further stabilized fine mist 31b through the ultrasonic vibration based on the sound stream 42b, and is dispersed and circulated into the interior of the isolator 10.

[0051] Thus, inside the isolator 10, the vibrating disks 41 and 42 are arranged such that their vibrating surfaces 41a and 42a do not face each other directly. This is because if the vibrating surfaces 41a and 42a of the vibrating disks 41 and 42 face each other directly, the ultrasonic waves generated from each vibrating disk 41 and 42 interact to generate a standing wave sound field. With the generation of a standing wave sound field, the fine mists 31a and 31b are not pressed based on acoustic radiation pressure and cannot move. It should be noted that, as described above, one or more vibrating disks can also be arranged on one side to circulate the decontaminant mist inside the isolator 10.

[0052] Thus, inside the isolator 10, the fine mists 31a and 31b, which are stabilized by acoustic streams 41b and 42b, circulate in a manner that swirls in the direction of the arrows shown in the figure (clockwise). It should be noted that acoustic streams 41b and 42b are stable, steady longitudinal waves that propagate on a plane, and propagate as airflow without wind speed difference compared to the direct method from the mist nozzle and the fan method.

[0053] At this point, the fine mists 31a and 31b are refined through ultrasonic vibration, resulting in smaller particle sizes and larger surface areas. Therefore, the evaporation efficiency of the mist is considered high, and evaporation and condensation occur repeatedly. Furthermore, the fine mists 31a and 31b are highly refined, forming a uniform and thin condensation film on the inner wall of the isolator 10. Therefore, compared to conventional decontamination operations, uneven condensation films of varying thicknesses are not locally generated on the inner wall of the isolator 10.

[0054] In this way, the fine hydrogen peroxide mists 31a and 31b are constantly subjected to ultrasonic vibration while repeatedly evaporating, condensing, and refining within the isolator 10. Furthermore, the inner wall of the isolator 10 is also constantly subjected to ultrasonic vibration, resulting in repeated re-evaporation and condensation of a uniform, thin condensate film. Therefore, it can be considered that within the isolator 10, ultrafine hydrogen peroxide particles smaller than 3μm and hydrogen peroxide gas coexist while undergoing phase changes, creating a highly effective decontamination environment.

[0055] Furthermore, by repeatedly re-evaporating and condensing the condensate film uniformly and thinly formed on the inner wall surface of the isolator 10, the concentration of the decontaminant in the decontamination mist can be increased, enabling highly efficient decontamination with a small amount of decontaminant. Additionally, because decontamination can be performed efficiently with a small amount of decontaminant, the efficiency of ventilation after decontamination is also improved, allowing for shorter decontamination operation times. Moreover, although this is a secondary effect, the removal of deposits on the inner wall surface of the isolator 10 can also be achieved through ultrasonic vibration and acoustic radiation pressure based on acoustic flows 41b and 42b.

[0056] Next, the central technology of the present invention, namely the ultrasonic detection device, will be described. First, the ultrasonic transmitter and the ultrasonic receiver will be described. Figure 3 This is a conceptual diagram illustrating the relationship between an ultrasonic transmitter and an ultrasonic receiver. Figure 3 In (1), the transmitting surface 51a of the ultrasonic transmitter 51 and the receiving surface 52a of the ultrasonic receiver 52 face each other (the surfaces face each other directly).

[0057] In this state, the electrical signal 51b from the first control device (not shown) is converted into ultrasonic waves by the ultrasonic transmitter 51 and transmitted from the transmitting surface 51a as ultrasonic wave 53a. Then, the transmitted ultrasonic wave 53a is received by the receiving surface 52a of the ultrasonic receiver 52 and converted into an electrical signal 52b. The converted electrical signal 52b is identified by the second control device (not shown) of the ultrasonic detection device to confirm whether the ultrasonic transmitter 51 is operating correctly.

[0058] On the other hand, Figure 3 In (2), the transmitting surface 51a of the ultrasonic transmitter 51 and the receiving surface 52a of the ultrasonic receiver 52 do not face each other, but both face the same direction and are facing the reflecting surface 54.

[0059] In this state, the electrical signal 51b from the first control device (not shown) is converted into ultrasonic waves by the ultrasonic transmitter 51 and transmitted from the transmitting surface 51a as ultrasonic wave 53a. The transmitted ultrasonic wave 53a is then reflected by the reflecting surface 54 (with partial attenuation depending on the situation) to become ultrasonic wave 53b. Next, ultrasonic wave 53b is received by the receiving surface 52a of the ultrasonic receiver 52 and converted into an electrical signal 52b. The converted electrical signal 52b is identified by the second control device (not shown) of the ultrasonic detection device to confirm whether the ultrasonic transmitter 51 is operating correctly.

[0060] It should be noted that, as mentioned above, the ultrasonic transmitter is not limited to an ultrasonic speaker; any mechanism capable of converting electrical signals into ultrasonic waves is acceptable and not particularly limited. Furthermore, the ultrasonic receiver is constructed identically to the ultrasonic transmitter and can also use an ultrasonic speaker. Again, it is not limited to an ultrasonic speaker; any mechanism capable of converting ultrasonic waves into electrical signals is acceptable and not particularly limited.

[0061] Next, other examples of fog circulation and dispersion devices equipped with multiple ultrasonic transmitters and ultrasonic detection devices equipped with ultrasonic receivers will be described. Figure 4 This is a structural diagram of a device that integrates a fog circulation and dispersion device with an ultrasonic detection device. Figure 4 In the process, the integrated device 60 (hereinafter referred to as "integrated device 60"), which combines the fog circulation dispersion device 60a and the ultrasonic detection device 60b, consists of a vibrating plate 61, a first control device 62, and multiple ultrasonic transmitters 63 in the fog circulation dispersion device 60a. Figure 4 The device comprises 48 ultrasonic transmitters 63 and an ultrasonic receiver 65, which are integrated with the ultrasonic testing device 60a. It should be noted that the 48 ultrasonic transmitters 63 are evenly distributed on the surface of the vibrating plate 61, and one ultrasonic receiver 65 is positioned at the center of each transmitter. Additionally, an LED indicator 66 is provided on one end of the vibrating plate 61 to indicate the operation of the integrated device 60.

[0062] In this structure, the first control device 62 controls the independent operation of 48 ultrasonic transmitters 63 and the operation of the 48 ultrasonic transmitters 63 as a whole. On the other hand, the second control device 64 controls the operation of one ultrasonic receiver 65. It should be noted that in the integrated device 60, because the ultrasonic transmitters 63 and the ultrasonic receiver 65 are disposed on the same surface of the vibrating plate 61, the ultrasonic receiver 65, as described above... Figure 3 (2) describes the detection of reflected waves from the ultrasonic waves emitted by the ultrasonic transmitter 63. Alternatively, the ultrasonic transmitter 63 and the ultrasonic receiver 65 can be positioned in different locations, as described above. Figure 3As described in (1), the ultrasonic receiver 65 directly detects the ultrasonic waves emitted by the ultrasonic transmitter 63.

[0063] Here, the detection operation for verifying the operation of the ultrasonic transmitter 63 using the integrated device 60 of this embodiment will be described. Figure 5 This is a conceptual diagram of the testing operation to confirm the function of the ultrasonic transmitter. First, in Figure 5 In Operation 1, the operation of all ultrasonic transmitters is individually verified before cleaning. The result of Operation 1 is that the cleaning operation is performed after verifying the operation of all ultrasonic transmitters. Verification of the operation status before cleaning can also be performed by setting a threshold.

[0064] Next, in Figure 5 In Operation 2, the operation of the vibratory feeder (all ultrasonic transmitters) is confirmed during the cleaning process. The result of Operation 2 is confirmation that all ultrasonic transmitters are operating, thus completing the cleaning operation. If no stoppage of the vibratory feeder is detected during cleaning, the cleaning process can be considered successful. It should be noted that in Operation 2, the operation of each ultrasonic transmitter is not individually confirmed.

[0065] So, finally, in Figure 5 In (Operation 3), the same operation as before cleaning is performed after cleaning to individually verify the operation of all ultrasonic transmitters. The result of Operation 3 is that by verifying the operation of all ultrasonic transmitters, it can be considered that the ultrasonic transmitters were also working normally during cleaning. At this time, a threshold can also be set for the operating status of the ultrasonic transmitters. By verifying the operation of all ultrasonic transmitters in Operations 1-3 in this way, the operation of the cleaning device can be guaranteed.

[0066] The following is about Figure 5 Operations 1-3 shown here specifically illustrate the confirmation of the ultrasonic transmitter's operation. Here, the integrated device 60 (see reference 60) is placed inside the isolator. Figure 4 The following explanation uses the example of two units installed on one side wall for cleaning operations, but it is not limited to this. It should be noted that the following explanation focuses on confirming the operation of the ultrasonic transmitter; the explanation of the mist supply device for the cleaning system is omitted.

[0067] Figure 6 This is an internal cross-sectional view of the isolator when viewed from the ceiling side, and is a conceptual diagram showing the operation of the ultrasonic transmitter before decontamination. Figure 6 Figures (1) and (2) show the operational confirmation status of switching between two integrated units 60 in the same isolator. Figure 6Inside the isolator 70, two integrated units 60A and 60B are disposed on one side wall 70a. In addition, the diagram schematically shows multiple devices 71 to 77 used in the post-decontamination operation in the central part inside the isolator 70, either mounted on the lower wall or suspended from the ceiling by support members 78.

[0068] (Operation 1)

[0069] In this state, firstly, Figure 6 In (1), the 48 ultrasonic transmitters 63 of the integrated device 60A are operated sequentially (e.g., from number 1 to number 48) under the control of the first control device 62 (see reference). Figure 4 Additionally, simultaneously, the ultrasonic receiver 65 of the integrated device 60A is activated under the control of the second control device 64. Figure 6 In (1), an arrow indicates an ultrasonic wave emitted from an ultrasonic transmitter 63. Figure 6 (1) It is known that the emitted ultrasonic waves are reflected by the surfaces of multiple devices 71-77 and other sidewalls 70b of the isolator 70, traveling in various directions. The ultrasonic receiver 65 detects a portion of these reflected waves to confirm whether ultrasonic waves are being emitted from an ultrasonic transmitter 63 in operation.

[0070] In this way, the operation of each of the 48 ultrasonic transmitters 63 in the integrated device 60A is checked sequentially. On the other hand, after confirming the operation of all 48 ultrasonic transmitters 63 in the integrated device 60A, the operation of the remaining 48 ultrasonic transmitters 63 is checked using the integrated device 60B (see reference). Figure 6 (2)). After confirming the operation of all ultrasonic transmitters 63 of the two integrated devices 60A and 60B, the inside of the isolator 70 is cleaned and moved (operation 2). It should be noted that at this time, a threshold can also be set for the operating status of the ultrasonic transmitters 63.

[0071] (Operation 2)

[0072] Figure 7 This is a conceptual diagram illustrating the operation of an ultrasonic transmitter during contamination removal. Figure 7 In the middle, inside the isolator 70, with Figure 6 It is equipped with two integrated devices 60A and 60B and multiple devices 71 to 77.

[0073] In this state, hydrogen peroxide mist is supplied to the interior of the isolator 70 to begin decontamination. In this state, all ultrasonic transmitters 63 of the two integrated devices 60A and 60B operate to circulate and disperse the hydrogen peroxide mist. Figure 7In the diagram, arrows indicate the ultrasonic waves emitted from all of the ultrasonic transmitters 63. The ultrasonic waves emitted from all of the ultrasonic transmitters 63 atomize the hydrogen peroxide water mist and cause it to circulate and disperse within the isolator 70, where some of the mist attenuates. Figure 7 It can be seen that the attenuated ultrasonic waves are reflected by the surfaces of multiple devices 71-77 and other sidewalls 70b of the isolator 70, and travel in various directions.

[0074] The ultrasonic receivers 65 of the two integrated devices 60A and 60B detect a portion of these reflected waves to confirm the operation of the two integrated devices 60A and 60B. It should be noted that the attenuated ultrasonic waves undergo complex and repeated reflections inside the isolator 70, therefore the process does not proceed to the point where it is confirmed that one of the two integrated devices 60A and 60B has stopped. Furthermore, the process does not proceed to the point where it is confirmed that one or more of the ultrasonic transmitters 63 (in this case, 96 units) of the two integrated devices 60A and 60B have stopped.

[0075] That is, in (Operation 2), it can be confirmed that both integrated devices 60A and 60B have completely stopped. In this case, if both integrated devices 60A and 60B have not completely stopped, the process moves to (Operation 3) as a final confirmation operation.

[0076] (Operation 3)

[0077] After completing the decontamination and ventilation processes, the same operations as before decontamination (Operation 1) are performed to verify the operation of all ultrasonic transmitters 63. If Operation 1 and Operation 2 are successfully verified, and the operation of all ultrasonic transmitters 63 of the two integrated devices 60A and 60B is successfully verified in Operation 3, the operation of the decontamination device can be guaranteed, and it can be determined that the decontamination of the isolator 70 was performed correctly. It should be noted that a threshold can also be set for the operating status of the ultrasonic transmitters 63 at this time.

[0078] Next, the decontamination of the inside of the transfer box when the isolator is equipped with a transfer box will also be explained. Figure 8 This is an internal cross-sectional view of the transfer box attached to the isolator, viewed from the ceiling side. It is a conceptual diagram showing the operation of the ultrasonic transmitter before (1) and during (2) decontamination. Figure 8 Inside the transfer box 80, an integrated device 60A is disposed on one side wall 80a. Additionally, a plurality of devices 81-83 are schematically shown mounted on the lower wall in the central portion inside the transfer box 80.

[0079] (Operation 1)

[0080] In this state, firstly, Figure 8 In (1), the 48 ultrasonic transmitters 63 of the integrated device 60A are operated sequentially (e.g., from number 1 to number 48) under the control of the first control device 62 (see reference). Figure 4 Additionally, simultaneously, the ultrasonic receiver 65 of the integrated device 60A is activated under the control of the second control device 64. Figure 8 In (1), an arrow indicates an ultrasonic wave emitted from an ultrasonic transmitter 63. Figure 8 (1) It is known that the emitted ultrasonic waves are reflected by the surfaces of multiple devices 81-83 and other sidewalls 80b of the transmission box 80, and travel in various directions. The ultrasonic receiver 65 detects a portion of these reflected waves to confirm that ultrasonic waves are being emitted from one ultrasonic transmitter 63 in operation.

[0081] In this way, the operation of each of the 48 ultrasonic transmitters 63 in the integrated device 60A is checked sequentially. After confirming the operation of all 48 ultrasonic transmitters 63 in the integrated device 60A, the interior of the transfer box 80 is cleaned and then moved (operation 2). It should be noted that at this time, a threshold can also be set for the operating status of the ultrasonic transmitters 63. In addition, the cleaning of the interior of the transfer box 80 can be performed simultaneously with the cleaning of the interior of the isolator 70 mentioned above.

[0082] (Operation 2)

[0083] exist Figure 8 In (2), inside the transfer box 80, with Figure 8 (1) An integrated device 60A and multiple devices 81-83 are similarly configured. In this state, hydrogen peroxide water mist is supplied to the interior of the transfer box 80 to begin decontamination. In this state, all ultrasonic transmitters 63 of the integrated device 60A operate to circulate and disperse the hydrogen peroxide water mist. Figure 8 In (2), arrows indicate the ultrasonic waves emitted from all of the ultrasonic transmitters 63. The ultrasonic waves emitted from all of the ultrasonic transmitters 63 atomize the hydrogen peroxide water mist and cause it to circulate and disperse into the interior of the transfer box 80, resulting in partial attenuation. Figure 8 (2) It can be seen that the attenuated ultrasonic waves are reflected by the surfaces of multiple devices 81 to 83 and other side walls 80b of the transmission box 80, and travel in various directions.

[0084] The ultrasonic receiver 65 of the integrated device 60A detects a portion of these reflected waves to confirm the operation of the integrated device 60A. It should be noted that the attenuated ultrasonic waves are repeatedly reflected complexly inside the transmission box 80, therefore the process does not proceed to confirm that one or more of the ultrasonic transmitters 63 (in this case, 48 units) of the integrated device 60A have stopped. That is, in (operation 2), it is possible to confirm that the integrated device 60A has completely stopped. Thus, if the integrated device 60A has not completely stopped, the process proceeds to (operation 3) as a final confirmation.

[0085] (Operation 3)

[0086] After completing the decontamination and ventilation processes, the operation of all ultrasonic transmitters 63 is individually verified by performing the same operation as before decontamination (Operation 1). If the operation of all ultrasonic transmitters 63 in the integrated device 60A is successfully verified in Operation 3, the operation of the decontamination device can be guaranteed, and it can be determined that the decontamination of the interior of the transfer box 80 was performed correctly. It should be noted that a threshold can also be set for the operating status of the ultrasonic transmitters 63 at this time.

[0087] As explained above, according to this embodiment, a decontamination device can be provided that can confirm the correct operation of the mist circulation dispersion unit before, during, or after decontamination operations and can ensure the operation of the decontamination device.

[0088] Explanation of reference numerals in the attached figures

[0089] 10, 70… Isolators, 80… Transfer boxes,

[0090] 11… Bottom wall surface, 12, 13, 70a, 70b, 80a, 80b… Side wall surfaces, 14… Top wall surface,

[0091] 20… Stain removal device, 30… Mist supply device (dual-fluid spray nozzle),

[0092] 31…hydrogen peroxide water mist, 31a…fine mist,

[0093] 40, 60a… mist circulation and dispersion devices; 60, 60A, 60B… integrated devices.

[0094] 60b…Ultrasonic testing device, 41, 42, 61…Vibrating plate, 41a, 42a…Vibrating surface,

[0095] 41b, 42b…acoustic flow, 45…loudspeaker base, 45a…plane of loudspeaker base,

[0096] 46, 51, 63… Ultrasonic transmitter (ultrasonic speaker),

[0097] 46a, 51a… wave-transmitting surface (vibrating surface) of the ultrasonic transmitter; 51b, 52b… electrical signal.

[0098] 52, 65… Ultrasonic receiver (ultrasonic speaker), 52a… Receiving surface (vibrating surface) of ultrasonic receiver.

[0099] 53a, 53b… Ultrasonic waves, 62… First control device, 64… Second control device

[0100] 66…LED indicator light, 71~77, 81~83…equipment, 78…support component.

Claims

1. A decontamination device comprising: a mist supply unit that changes a decontamination liquid used for decontaminating the inside of a work chamber into a decontamination mist and supplies the decontamination mist to the inside of the work chamber; a mist circulating and dispersing unit that makes a vibration plate provided with a plurality of ultrasonic transmitters vibrate ultrasonically to generate an ultrasonic-based acoustic flow in a vertical direction from a plate surface, and makes a pressing action of an acoustic radiation pressure based on the acoustic flow act on the decontamination mist to make the decontamination mist circulate and disperse in the work chamber; and an ultrasonic detection unit that includes an ultrasonic receiver for detecting the operation of the ultrasonic transmitters, detects the operation of the plurality of ultrasonic transmitters as a whole and / or each ultrasonic transmitter provided in the vibration plate, wherein the mist circulating and dispersing unit includes an operation control mechanism that controls the operation of the plurality of ultrasonic transmitters provided in the vibration plate, wherein the plurality of ultrasonic transmitters are made to operate one by one by the operation control mechanism, and the ultrasonic receiver can individually confirm the operation of each ultrasonic transmitter.

2. The decontamination device according to claim 1, wherein the mist circulating and dispersing unit includes a transmission control mechanism that makes the frequency and output of the ultrasonic waves generated from the plurality of ultrasonic transmitters provided in the vibration plate variable and / or intermittently transmits the ultrasonic waves. ​ ​ ​ ​ ​ ​

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