Semiconductor element multi-degree-of-freedom positioning mechanism

Abstract

The application relates to a multi-degree-of-freedom positioning mechanism for semiconductor elements, which comprises a fixed base plate, a deviation rectifying mechanism, an X-direction deviation rectifying camera module, a Z-direction deviation rectifying camera module and a Y-direction deviation rectifying camera module, wherein the deviation rectifying mechanism, the X-direction deviation rectifying camera module, the Z-direction deviation rectifying camera module and the Y-direction deviation rectifying camera module are all installed on the fixed base plate, the X-direction deviation rectifying camera module is located on one side of the deviation rectifying mechanism along the negative direction of the Y axis, the Z-direction deviation rectifying camera module is located directly above the deviation rectifying mechanism, and the Y-direction deviation rectifying camera module is located on one side of the deviation rectifying mechanism along the negative direction of the X axis. Through the cooperation of the deviation rectifying mechanism, the X-direction deviation rectifying camera module, the Z-direction deviation rectifying camera module and the Y-direction deviation rectifying camera module, the micro component can be accurately positioned in six degrees of freedom in a micro space under the control of visual positioning in three directions.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of semiconductor element processing, in particular to a multi-degree-of-freedom positioning mechanism for semiconductor elements. BACKGROUND

[0002] In the semiconductor industry, when small elements need to be transported, processed, and the like, there is a need for accurate positioning and correction of the elements in multiple degrees of freedom. Traditional multi-axis positioning platforms have the problems of large size and high cost, which are not conducive to the miniaturization and cost optimization of processing equipment.

[0003] In view of the above-mentioned defects, the present design person actively researches and innovates to create a multi-degree-of-freedom positioning mechanism for semiconductor elements, so as to make it more useful in industry. SUMMARY

[0004] To solve the above technical problems, the purpose of the present application is to provide a multi-degree-of-freedom positioning mechanism for semiconductor elements.

[0005] To achieve the above-mentioned purpose, the present application adopts the following technical solutions:

[0006] The multi-degree-of-freedom positioning mechanism for semiconductor elements comprises a fixed base plate, a correction mechanism, an X-direction correction camera module, a Z-direction correction camera module and a Y-direction correction camera module. The correction mechanism, the X-direction correction camera module, the Z-direction correction camera module and the Y-direction correction camera module are all installed on the fixed base plate. The X-direction correction camera module is located on one side of the correction mechanism along the negative direction of the Y-axis. The Z-direction correction camera module is located directly above the correction mechanism. The Y-direction correction camera module is located on one side of the correction mechanism along the negative direction of the X-axis.

[0007] The correction mechanism comprises, from bottom to top, a correction base plate, a six-axis correction positioning mechanism and a correction adsorption base. The bottom of the six-axis correction positioning mechanism is installed on the fixed base plate through the lower correction base plate. The top of the six-axis correction positioning mechanism is connected with the upper correction adsorption base.

[0008] The X-direction correction camera module comprises an X-direction camera base plate, an X-direction camera linear motor and an X-direction camera detection mechanism. The bottom of the X-direction camera linear motor is installed on the fixed base plate along the X-axis direction through the lower X-direction camera base plate. The driving end of the top of the X-direction camera linear motor is drivingly connected with the upper X-direction camera detection mechanism through the X-direction camera sliding table plate. The X-direction camera detection mechanism comprises an X-direction camera, an X-direction lens, an X-direction camera light source and a prism. The X-direction camera, the X-direction lens and the prism are sequentially arranged along the negative direction of the X-axis and are installed on the X-direction camera double-axis driving mechanism through the X-direction lens mounting seat. The X-direction camera double-axis driving mechanism is installed on the X-direction camera sliding table plate. The X-direction camera light source is located on one side of the prism along the positive direction of the Y-axis and is installed on the X-direction camera sliding table plate through the X-direction camera light source support.

[0009] The Z-direction deviation correction camera module comprises a Z-direction top mounting plate and a Z-direction camera detection mechanism, the bottom of the Z-direction top mounting plate is provided with a Z-direction camera three-axis driving mechanism, the bottom of the Z-direction camera three-axis driving mechanism is provided with a Z-direction lens mounting seat, the Z-direction camera detection mechanism comprises a Z-direction camera, a Z-direction lens and a Z-direction camera light source, the Z-direction camera, the Z-direction lens and the Z-direction camera light source are sequentially arranged along the negative direction of the Z-axis and are mounted on the Z-direction camera three-axis driving mechanism through the Z-direction lens mounting seat, and the Z-direction camera light source is mounted on the Z-direction camera three-axis driving mechanism through a Z-direction camera light source support.

[0010] The Y-direction deviation correction camera module comprises a Y-direction camera bottom plate and a Y-direction camera detection mechanism, the Y-direction camera bottom plate is mounted on the fixed bottom plate, the Y-direction camera bottom plate is provided with a Y-direction camera three-axis driving mechanism, the Y-direction camera detection mechanism comprises a Y-direction camera, a Y-direction lens and a Y-direction camera light source, the Y-direction camera, the Y-direction lens and the Y-direction camera light source are sequentially arranged along the positive direction of the X-axis and are mounted on the Y-direction camera three-axis driving mechanism through a Y-direction lens mounting seat, and the Y-direction camera light source is mounted on the Y-direction camera three-axis driving mechanism through a Y-direction camera light source support.

[0011] As a further improvement of the application, the six-axis deviation correction positioning mechanism comprises, from bottom to top, a deviation correction electric Z-axis sliding table, a deviation correction X-axis linear displacement table, a deviation correction Y-axis linear displacement table, a deviation correction angle rotating table, a first arc swing table and a second arc swing table, the deviation correction electric Z-axis sliding table is mounted on the deviation correction bottom plate, the deviation correction electric Z-axis sliding table is connected with the deviation correction X-axis linear displacement table above through a deviation correction Z-axis table plate, the deviation correction X-axis linear displacement table, the deviation correction Y-axis linear displacement table, the deviation correction angle rotating table, the first arc swing table and the second arc swing table are sequentially arranged from bottom to top, and the top of the second arc swing table is provided with a deviation correction adsorption base.

[0012] As a further improvement of the application, the X-direction camera double-axis driving mechanism comprises, from bottom to top, an X-direction camera X-axis linear displacement table and an X-direction camera electric Z-axis sliding table, the X-direction camera X-axis linear displacement table is mounted on an X-direction camera sliding table plate, and the X-direction camera X-axis linear displacement table and the X-direction camera electric Z-axis sliding table are sequentially connected with the X-direction lens mounting seat above.

[0013] As a further improvement of the application, the Z-direction camera three-axis driving mechanism comprises, from top to bottom, a Z-direction camera Y-axis linear displacement table, a Z-direction camera X-axis linear displacement table and a Z-direction camera electric Z-axis sliding table, the Z-direction camera Y-axis linear displacement table is mounted at the bottom of the Z-direction top mounting plate, and the Z-direction camera Y-axis linear displacement table, the Z-direction camera X-axis linear displacement table and the Z-direction camera electric Z-axis sliding table are sequentially connected with the Z-direction lens mounting seat below.

[0014] As a further improvement of the present application, the Y-direction camera three-axis driving mechanism comprises, from bottom to top, a Y-direction camera X-axis linear displacement table, a Y-direction camera Y-axis linear displacement table and a Y-direction camera electric Z-axis sliding table, the Y-direction camera X-axis linear displacement table is installed on the Y-direction camera bottom plate, and the Y-direction camera X-axis linear displacement table, the Y-direction camera Y-axis linear displacement table and the Y-direction camera electric Z-axis sliding table are sequentially connected with the Y-direction lens mounting seat above from bottom to top.

[0015] By the above scheme, the present application has at least the following advantages:

[0016] The present application can realize accurate six-degree-of-freedom correction positioning of micro components in a micro space under the control of three-direction visual positioning through the cooperation of the correction mechanism, the X-direction correction camera module, the Z-direction correction camera module and the Y-direction correction camera module. The present application has good system integration, optimizes the installation space occupied by the mechanism and has a small floor area.

[0017] The above description is only a summary of the technical scheme of the present application. In order to more clearly understand the technical means of the present application and to implement the content of the description, the following will describe the preferred embodiments of the present application in detail with reference to the accompanying drawings. BRIEF DESCRIPTION OF DRAWINGS

[0018] In order to more clearly illustrate the technical solutions of the embodiments of the present application, the following will briefly introduce the drawings needed to be used in the embodiments. It should be understood that the following drawings only show some embodiments of the present application, and therefore should not be regarded as a limitation on the scope. For those skilled in the art, other related drawings can also be obtained without creative labor.

[0019] Figure 1 is a structural schematic view of a semiconductor element multi-degree-of-freedom positioning mechanism of the present application;

[0020] Figure 2 is a structural schematic view of the correction mechanism in the present application; Figure 1

[0021] Figure 3 is a structural schematic view of the X-direction correction camera module in the present application; Figure 1

[0022] Figure 4 is a structural schematic view of the Z-direction correction camera module in the present application; Figure 1

[0023] Figure 5 is a structural schematic view of the Y-direction correction camera module in the present application. Figure 1

[0024] In the drawings, the meanings of various reference signs are as follows. ​​​​

[0025] 1 Fixed base plate 2 Deviation rectification mechanism

[0026] 3 X-direction deviation rectification camera module 4 Z-direction deviation rectification camera module

[0027] 5 Y-direction deviation rectification camera module 6 Deviation rectification base plate

[0028] 7 Deviation rectification electric Z-axis sliding table 8 Deviation rectification Z-axis table plate

[0029] 9 Deviation rectification X-axis linear displacement table 10 Deviation rectification Y-axis linear displacement table

[0030] 11 Deviation rectification angle rotating table 12 First arc swing table

[0031] 13 Second arc swing table 14 Deviation rectification adsorption base

[0032] 15 X-direction camera base plate 16 X-direction camera linear motor

[0033] 17 X-direction camera sliding table plate 18 X-direction camera X-axis linear displacement table

[0034] 19 X-direction camera electric Z-axis sliding table 20 X-direction camera

[0035] 21 X-direction lens 22 X-direction lens mounting seat

[0036] 23 X-direction camera light source 24 Prism

[0037] 25 X-direction camera light source support 26 Z-direction top mounting plate

[0038] 27 Z-direction camera Y-axis linear displacement table 28 Z-direction camera X-axis linear displacement table

[0039] 29 Z-direction camera electric Z-axis sliding table 30 Z-direction lens mounting seat

[0040] 31 Z-direction camera 32 Z-direction lens

[0041] 33 Z-direction camera light source 34 Z-direction camera light source support

[0042] 35 Y-direction camera base plate 36 Y-direction camera X-axis linear displacement table

[0043] 37 Y-direction camera Y-axis linear displacement table 38 Y-direction camera electric Z-axis sliding table

[0044] 39 Y-direction lens mounting seat 40 Y-direction camera

[0045] 41 Y-direction lens 42 Y-direction camera light source

[0046] 43 Y-direction camera light source support DETAILED DESCRIPTION

[0047] The following embodiments of the present invention are described in further detail with reference to the accompanying drawings and examples. The following examples are used to illustrate the present invention but are not intended to limit the scope of the present invention.

[0048] In order to enable those skilled in the art to better understand the solutions of the present invention, the technical solutions in the embodiments of the present invention will be clearly and completely described below in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. The components of the embodiments of the present invention generally described and shown in the drawings herein can be arranged and designed in various different configurations. Therefore, the following detailed description of the embodiments of the present invention provided in the drawings is not intended to limit the scope of the invention claimed for protection, but merely represents selected embodiments of the present invention. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without making creative work are within the scope of protection of the present invention.

[0049] Example

[0050] like Figures 1-5 As shown,

[0051] A multi-degree-of-freedom positioning mechanism for a semiconductor component includes a fixed base plate 1, a correction mechanism 2, an X-direction correction camera module 3, a Z-direction correction camera module 4, and a Y-direction correction camera module 5. The correction mechanism 2, the X-direction correction camera module 3, the Z-direction correction camera module 4, and the Y-direction correction camera module 5 are all installed on the fixed base plate 1. The X-direction correction camera module 3 is located on one side of the correction mechanism 2 along the negative direction of the Y axis. The Z-direction correction camera module 4 is located directly above the correction mechanism 2. The Y-direction correction camera module 5 is located on one side of the correction mechanism 2 along the negative direction of the X axis.

[0052] The correction mechanism 2 includes a correction base plate 6, a six-axis correction positioning mechanism and a correction adsorption base 14 from bottom to top. The bottom of the six-axis correction positioning mechanism is installed on the fixed base plate 1 through the correction base plate 6 below, and the top of the six-axis correction positioning mechanism is connected to the correction adsorption base 14 above. The six-axis correction and positioning mechanism includes, from bottom to top, a correction electric Z-axis slide 7, a correction X-axis linear displacement table 9, a correction Y-axis linear displacement table 10, a correction angle rotation table 11, a first arc swing table 12 and a second arc swing table 13. The correction electric Z-axis slide 7 is installed on the correction base plate 6. The correction electric Z-axis slide 7 is connected to the correction X-axis linear displacement table 9 above through the correction Z-axis table plate 8. The correction X-axis linear displacement table 9, the correction Y-axis linear displacement table 10, the correction angle rotation table 11, the first arc swing table 12 and the second arc swing table 13 are connected in sequence from bottom to top, and a correction adsorption base 14 is provided on the top of the second arc swing table 13.

[0053] The rectification angle rotating table 11 is arranged to rotate in the XY plane, the first arc swinging table 12 is arranged to swing in the XZ plane, and the second arc swinging table 13 is arranged to swing in the YZ plane.

[0054] The X-direction rectification camera module 3 comprises an X-direction camera bottom plate 15, an X-direction camera linear motor 16, and an X-direction camera detection mechanism. The bottom of the X-direction camera linear motor 16 is mounted on the fixed bottom plate 1 along the X-axis direction through the X-direction camera bottom plate 15 below. The driving end of the top of the X-direction camera linear motor 16 is drivingly connected and arranged with the X-direction camera detection mechanism above through the X-direction camera sliding table plate 17. The X-direction camera detection mechanism comprises an X-direction camera 20, an X-direction lens 21, an X-direction camera light source 23, and a prism 24. The X-direction camera 20, the X-direction lens 21, and the prism 24 are sequentially arranged along the negative direction of the X-axis and are mounted on the X-direction camera double-axis driving mechanism through the X-direction lens mounting seat 22. The X-direction camera double-axis driving mechanism is mounted on the X-direction camera sliding table plate 17. The X-direction camera light source 23 is located on one side of the prism 24 along the positive direction of the Y-axis and is mounted on the X-direction camera sliding table plate 17 through the X-direction camera light source support 25. The X-direction camera double-axis driving mechanism comprises an X-direction camera X-axis linear displacement table 18 and an X-direction camera electric Z-axis sliding table 19 from bottom to top in sequence. The X-direction camera X-axis linear displacement table 18 is mounted on the X-direction camera sliding table plate 17. The X-direction camera X-axis linear displacement table 18 and the X-direction camera electric Z-axis sliding table 19 are sequentially connected with the X-direction lens mounting seat 22 above from bottom to top.

[0055] The Z-direction rectification camera module 4 comprises a Z-direction top mounting plate 26 and a Z-direction camera detection mechanism. The bottom of the Z-direction top mounting plate 26 is provided with a Z-direction camera three-axis driving mechanism. The bottom of the Z-direction camera three-axis driving mechanism is provided with a Z-direction lens mounting seat 30. The Z-direction camera detection mechanism comprises a Z-direction camera 31, a Z-direction lens 32, and a Z-direction camera light source 33. The Z-direction camera 31, the Z-direction lens 32, and the Z-direction camera light source 33 are sequentially arranged along the negative direction of the Z-axis and are mounted on the Z-direction camera three-axis driving mechanism through the Z-direction lens mounting seat 30. The Z-direction camera light source 33 is mounted on the Z-direction camera three-axis driving mechanism through the Z-direction camera light source support 34. The Z-direction camera three-axis driving mechanism comprises a Z-direction camera Y-axis linear displacement table 27, a Z-direction camera X-axis linear displacement table 28, and a Z-direction camera electric Z-axis sliding table 29 from top to bottom in sequence. The Z-direction camera Y-axis linear displacement table 27 is mounted on the bottom of the Z-direction top mounting plate 26. The Z-direction camera Y-axis linear displacement table 27, the Z-direction camera X-axis linear displacement table 28, and the Z-direction camera electric Z-axis sliding table 29 are sequentially connected with the Z-direction lens mounting seat 30 below from top to bottom.

[0056] The Y-direction deviation rectification camera module 5 comprises a Y-direction camera base plate 35 and a Y-direction camera detection mechanism, the Y-direction camera base plate 35 is installed on the fixed base plate 1, the Y-direction camera base plate 35 is provided with a Y-direction camera three-axis drive mechanism, the Y-direction camera detection mechanism comprises a Y-direction camera 40, a Y-direction lens 41 and a Y-direction camera light source 42, the Y-direction camera 40, the Y-direction lens 41 and the Y-direction camera light source 42 are sequentially arranged along the positive direction of the X-axis and are installed on the Y-direction camera three-axis drive mechanism through the Y-direction lens mounting seat 39, and the Y-direction camera light source 42 is installed on the Y-direction camera three-axis drive mechanism through the Y-direction camera light source support 43. The Y-direction camera three-axis drive mechanism comprises a Y-direction camera X-axis linear displacement table 36, a Y-direction camera Y-axis linear displacement table 37 and a Y-direction camera electric Z-axis sliding table 38 from bottom to top in sequence, the Y-direction camera X-axis linear displacement table 36 is installed on the Y-direction camera base plate 35, and the Y-direction camera X-axis linear displacement table 36, the Y-direction camera Y-axis linear displacement table 37 and the Y-direction camera electric Z-axis sliding table 38 are sequentially connected with the Y-direction lens mounting seat 39 from bottom to top.

[0057] The deviation rectification electric Z-axis sliding table 7 is fixed on the deviation rectification base plate 6 through screws, and the deviation rectification electric Z-axis sliding table 7 is sequentially provided with a deviation rectification X-axis linear displacement table 9, a deviation rectification Y-axis linear displacement table 10, a deviation rectification angle rotating table 11, a first arc swing table 12, a second arc swing table 13 and a deviation rectification adsorption base 14.

[0058] The X-direction deviation rectification camera module 3 is provided with an X-direction camera detection mechanism, so that the X-direction camera 20 can cover the to-be-detected element in the X-direction.

[0059] The Z-direction deviation rectification camera module 4 is installed on the equipment frame above the deviation rectification mechanism 2 (not shown in the figure), and the Z-direction camera 31 can cover the to-be-detected element in the Z-direction.

[0060] The Y-direction deviation rectification camera module 5 is provided with a camera three-axis drive mechanism and a Y-direction camera detection mechanism, so that the Y-direction camera 40 can cover the to-be-detected element in the Y-direction.

[0061] The working process or working principle of the present application is briefly described as follows:

[0062] In the working process, first, the material is fixed on the to-be-detected element positioning mechanism, i.e., the deviation rectification adsorption base 14, through clamping, adsorption and other ways. First, the X-direction camera detection mechanism is driven by the X-direction camera linear motor 16 to perform visual target positioning on the element, the positioning data of the X-direction camera 20 is used to perform three-axis linkage deviation rectification positioning on the element under the movement of the first arc swing table 12, the deviation rectification X-axis linear displacement table 9 and the deviation rectification electric Z-axis sliding table 7, and the element is ensured to be always within the field of view of the camera.

[0063] Then, the Y-direction camera detection mechanism positions the component by vision, and under the movement of the Y-axis linear displacement table 10, the second arc swing table 13 and the Z-axis electric displacement table 7, the component is positioned by three-axis linkage according to the positioning data of the Y-direction camera 40, and it is ensured that the component is always within the field of view of the camera.

[0064] Finally, the Z-direction camera detection mechanism positions the component by vision, and under the movement of the X-axis linear displacement table 9, the Y-axis linear displacement table 10 and the angle rotation table 11, the component is positioned by three-axis linkage according to the positioning data of the Z-direction camera 31, and it is ensured that the component is always within the field of view of the camera.

[0065] At this point, the component has completed the positioning and correction work in six degrees of freedom, and continues to be processed or taken away according to subsequent process requirements.

[0066] In the description of the present application, it should be understood that the terms "center", "longitudinal", "transverse", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer" and the like indicate the orientation or positional relationship based on the orientation or positional relationship shown in the drawings, and are only for the convenience of describing the present application and simplifying the description, and do not indicate or imply that the device or element referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore cannot be understood as a limitation on the present application. In addition, the terms "first", "second" and the like are only for descriptive purposes and cannot be understood as indicating or implying relative importance or implying the number of technical features indicated. Therefore, the features defined as "first", "second" and the like can explicitly or implicitly include one or more of the features. In the description of the present application, unless otherwise stated, the meaning of "a plurality of" is two or more.

[0067] In the description of the present application, it should be noted that unless otherwise explicitly specified and limited, the terms "mounting", "connecting", "connecting" should be understood broadly, for example, it can be fixedly connected, or it can be detachably connected, or it can be integrally connected; it can be mechanically connected, or it can be electrically connected; it can be directly connected, or it can be indirectly connected through an intermediate medium; it can be the communication between the two elements. For those skilled in the art, the specific meaning of the above terms in the present application can be understood according to the specific circumstances.

[0068] The above is only the preferred embodiment of the present application, and is not intended to limit the present application. It should be noted that for those skilled in the art, without departing from the technical principles of the present application, a number of improvements and modifications can be made, and these improvements and modifications should be considered as the protection scope of the present application.

Claims

1. A multi-degree-of-freedom positioning mechanism for semiconductor elements, comprising a fixed base plate (1), a deviation rectifying mechanism (2), an X-direction deviation rectifying camera module (3), a Z-direction deviation rectifying camera module (4), and a Y-direction deviation rectifying camera module (5), wherein the deviation rectifying mechanism (2), the X-direction deviation rectifying camera module (3), the Z-direction deviation rectifying camera module (4), and the Y-direction deviation rectifying camera module (5) are all mounted on the fixed base plate (1), characterized in that, The X-direction deviation correction camera module (3) is located on the side of the deviation correction mechanism (2) along the negative direction of the Y-axis, the Z-direction deviation correction camera module (4) is located on the positive direction of the deviation correction mechanism (2), and the Y-direction deviation correction camera module (5) is located on the side of the deviation correction mechanism (2) along the negative direction of the X-axis; The deviation correction mechanism (2) sequentially comprises a deviation correction bottom plate (6), a six-axis deviation correction positioning mechanism and a deviation correction adsorption base (14) from bottom to top, the bottom of the six-axis deviation correction positioning mechanism is installed on the fixed bottom plate (1) through the deviation correction bottom plate (6) below, and the top of the six-axis deviation correction positioning mechanism is connected with the deviation correction adsorption base (14) above; The X-direction deviation correction camera module (3) comprises an X-direction camera bottom plate (15), an X-direction camera linear motor (16) and an X-direction camera detection mechanism, the bottom of the X-direction camera linear motor (16) is installed on the fixed bottom plate (1) along the X-axis direction through the X-direction camera bottom plate (15) below, the driving end of the top of the X-direction camera linear motor (16) is drivingly connected with the X-direction camera detection mechanism above through the X-direction camera sliding table plate (17), the X-direction camera detection mechanism comprises an X-direction camera (20), an X-direction lens (21), an X-direction camera light source (23) and a prism (24), the X-direction camera (20), the X-direction lens (21) and the prism (24) are sequentially arranged along the negative direction of the X-axis and are installed on the X-direction camera double-axis driving mechanism through the X-direction lens mounting seat (22), the X-direction camera double-axis driving mechanism is installed on the X-direction camera sliding table plate (17), and the X-direction camera light source (23) is located on the side of the prism (24) along the positive direction of the Y-axis and is installed on the X-direction camera sliding table plate (17) through the X-direction camera light source support (25); The Z-direction deviation correction camera module (4) comprises a Z-direction top mounting plate (26) and a Z-direction camera detection mechanism, the bottom of the Z-direction top mounting plate (26) is provided with a Z-direction camera three-axis driving mechanism, the bottom of the Z-direction camera three-axis driving mechanism is provided with a Z-direction lens mounting seat (30), the Z-direction camera detection mechanism comprises a Z-direction camera (31), a Z-direction lens (32) and a Z-direction camera light source (33), the Z-direction camera (31), the Z-direction lens (32) and the Z-direction camera light source (33) are sequentially arranged along the negative direction of the Z-axis and are installed on the Z-direction camera three-axis driving mechanism through the Z-direction lens mounting seat (30), and the Z-direction camera light source (33) is installed on the Z-direction camera three-axis driving mechanism through the Z-direction camera light source support (34); The Y-direction deviation correction camera module (5) comprises a Y-direction camera bottom plate (35) and a Y-direction camera detection mechanism, the Y-direction camera bottom plate (35) is installed on the fixed bottom plate (1), a Y-direction camera three-axis driving mechanism is arranged on the Y-direction camera bottom plate (35), the Y-direction camera detection mechanism comprises a Y-direction camera (40), a Y-direction lens (41) and a Y-direction camera light source (42), the Y-direction camera (40), the Y-direction lens (41) and the Y-direction camera light source (42) are sequentially arranged along the positive direction of the X-axis and are installed on the Y-direction camera three-axis driving mechanism through the Y-direction lens mounting seat (39), and the Y-direction camera light source (42) is installed on the Y-direction camera three-axis driving mechanism through the Y-direction camera light source support (43).

2. The multi-degree-of-freedom positioning mechanism for a semiconductor element according to claim 1, wherein The six-axis deviation correction positioning mechanism comprises a deviation correction electric Z-axis sliding table (7), a deviation correction X-axis linear displacement table (9), a deviation correction Y-axis linear displacement table (10), a deviation correction angle rotating table (11), a first arc swing table (12) and a second arc swing table (13) from bottom to top, the deviation correction electric Z-axis sliding table (7) is installed on the deviation correction bottom plate (6), the deviation correction electric Z-axis sliding table (7) is connected with the deviation correction X-axis linear displacement table (9) above through the deviation correction Z-axis table plate (8), the deviation correction X-axis linear displacement table (9), the deviation correction Y-axis linear displacement table (10), the deviation correction angle rotating table (11), the first arc swing table (12) and the second arc swing table (13) are sequentially arranged from bottom to top, and the top of the second arc swing table (13) is provided with a deviation correction adsorption base (14).

3. The multi-degree-of-freedom positioning mechanism for a semiconductor device according to Claim 1, wherein The X-direction camera double-axis driving mechanism comprises an X-direction camera X-axis linear displacement table (18) and an X-direction camera electric Z-axis sliding table (19) from bottom to top, the X-direction camera X-axis linear displacement table (18) is installed on the X-direction camera sliding table plate (17), and the X-direction camera X-axis linear displacement table (18) and the X-direction camera electric Z-axis sliding table (19) are sequentially connected with the X-direction lens mounting seat (22) above from bottom to top.

4. The multi-degree-of-freedom positioning mechanism for semiconductor devices according to Claim 1, wherein The Z-direction camera three-axis driving mechanism comprises a Z-direction camera Y-axis linear displacement table (27), a Z-direction camera X-axis linear displacement table (28) and a Z-direction camera electric Z-axis sliding table (29) from top to bottom, the Z-direction camera Y-axis linear displacement table (27) is installed at the bottom of the Z-direction top mounting plate (26), and the Z-direction camera Y-axis linear displacement table (27), the Z-direction camera X-axis linear displacement table (28) and the Z-direction camera electric Z-axis sliding table (29) are sequentially connected with the Z-direction lens mounting seat (30) below from top to bottom.

5. The multi-degree-of-freedom positioning mechanism for semiconductor devices according to Claim 1, wherein The Y-direction camera three-axis driving mechanism comprises a Y-direction camera X-axis linear displacement table (36), a Y-direction camera Y-axis linear displacement table (37) and a Y-direction camera electric Z-axis sliding table (38) from bottom to top, the Y-direction camera X-axis linear displacement table (36) is installed on the Y-direction camera bottom plate (35), and the Y-direction camera X-axis linear displacement table (36), the Y-direction camera Y-axis linear displacement table (37) and the Y-direction camera electric Z-axis sliding table (38) are sequentially connected with the Y-direction lens mounting seat (39) above from bottom to top.

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