Sound production unit and method of manufacturing the same

Abstract

A sound emitting unit and a manufacturing method thereof are disclosed. The sound emitting unit includes a diaphragm and an actuating layer. The diaphragm includes a first diaphragm sub-portion and a second diaphragm sub-portion, the first diaphragm sub-portion and the second diaphragm sub-portion are opposite to each other, and the actuating layer is arranged on the first diaphragm sub-portion and the second diaphragm sub-portion. The first diaphragm sub-portion includes a first anchoring edge, the first anchoring edge is completely anchored or partially anchored, and edges other than the first anchoring edge in the first diaphragm sub-portion are non-anchored. The second diaphragm sub-portion includes a second anchoring edge, the second anchoring edge is completely anchored or partially anchored, and edges other than the second anchoring edge in the second diaphragm sub-portion are non-anchored.

Description

Technical Field

[0001] This invention relates to a sound-generating unit and a method for manufacturing the same, and more particularly to a sound-generating unit with high yield and / or high performance and a method for manufacturing the same. Background Technology

[0002] Miniature sound generating devices, such as micro-electromechanical systems (MEMS) microspeakers, have seen rapid development in recent years due to their small size and applicability to various electronic devices. For example, MEMS microspeakers can use thin-film piezoelectric materials as actuators and silicon-containing layers as diaphragms, all formed using at least one semiconductor process. To enable wider applications of microspeakers, the industry is dedicated to designing high-yield and high-performance microspeakers. Summary of the Invention

[0003] Therefore, the main objective of this invention is to provide a sound-generating unit with a specific slit design and / or a specific groove design to improve its yield and performance, and to provide a method for manufacturing the sound-generating unit.

[0004] An embodiment of the present invention provides a sound-generating unit, which includes a diaphragm and an actuation layer. The diaphragm includes a first diaphragm sub-section and a second diaphragm sub-section, which are opposite to each other. The actuation layer is disposed on the first diaphragm sub-section and the second diaphragm sub-section. The first diaphragm sub-section includes a first anchoring edge, which is fully or partially anchored, and all edges of the first diaphragm sub-section except the first anchoring edge are non-anchored. The second diaphragm sub-section includes a second anchoring edge, which is fully or partially anchored, and all edges of the second diaphragm sub-section except the second anchoring edge are non-anchored.

[0005] Another embodiment of the present invention provides a method for manufacturing a sound-generating unit, comprising: providing a wafer, wherein the wafer includes a first layer and a second layer; patterning the first layer of the wafer to form at least one channel line; and disposing the wafer on a substrate. The first layer includes a diaphragm, wherein at least one slit is formed in the diaphragm by the channel line and extends through the diaphragm. The diaphragm includes a first diaphragm sub-section and a second diaphragm sub-section, wherein the first diaphragm sub-section and the second diaphragm sub-section are opposite to each other. The first diaphragm sub-section includes a first anchoring edge, which is fully anchored or partially anchored, and all edges of the first diaphragm sub-section other than the first anchoring edge are unanchored. The second diaphragm sub-section includes a second anchoring edge, which is fully anchored or partially anchored, and all edges of the second diaphragm sub-section other than the second anchoring edge are unanchored.

[0006] After reading the detailed description of the embodiments illustrated below with various figures, the object of the present invention should be clear to those skilled in the art. Attached Figure Description

[0007] Figure 1 The diagram shown is a top view of the sound-generating unit according to the first embodiment of the present invention.

[0008] Figure 2 As shown Figure 1 An enlarged schematic diagram of the structure in region R1.

[0009] Figures 3 to 8 The diagram shows the structure of a sound-generating unit manufacturing method according to an embodiment of the present invention at different stages.

[0010] Figure 9 The diagram shown is a top view of the sound-generating unit according to the second embodiment of the present invention.

[0011] Figure 10 As shown Figure 9 An enlarged schematic diagram of the structure in region R2.

[0012] Figure 11 The diagram shown is a top view of the sound-generating unit according to the third embodiment of the present invention.

[0013] Figure 12 The diagram shown is a top view of the sound-generating unit according to the fourth embodiment of the present invention.

[0014] Figure 13 The diagram shown is a top view of the sound-generating unit according to the fifth embodiment of the present invention.

[0015] Figure 14 The image shown is a top view of the sound-generating unit according to the sixth embodiment of the present invention.

[0016] Figure 15 As shown Figure 14 An enlarged schematic diagram of the structure in region R3.

[0017] Figure 16 The image shown is a top view of the sound-generating unit according to the seventh embodiment of the present invention.

[0018] Figure 17 The image shown is a top view of the sound-generating unit according to the eighth embodiment of the present invention.

[0019] Figure 18 The diagram shown is a top view of the sound-generating unit according to the ninth embodiment of the present invention.

[0020] Figure 19 The image shown is a side view of the sound-generating unit according to the ninth embodiment of the present invention.

[0021] Figure 20 The image shown is a top view of the sound-generating unit according to the tenth embodiment of the present invention.

[0022] Figure label:

[0023] 100, 200, 300, 400, 500, 600, 700, and 800, 900, 900' sound units

[0024] 110 diaphragm

[0025] 112 First diaphragm subsection

[0026] 112a First anchoring edge

[0027] 112n1 First non-anchored edge

[0028] 112n2 Second non-anchored edge

[0029] 114 Second diaphragm subsection

[0030] 114a Second Anchoring Edge

[0031] 114n3 Third non-anchored edge

[0032] 114n4 Fourth non-anchored edge

[0033] 116 Third diaphragm subsection

[0034] 116a Third Anchoring Edge

[0035] 116n5 Fifth non-anchored edge

[0036] 118 Fourth diaphragm sub-section

[0037] 118a Fourth Anchoring Edge

[0038] 118n6 Sixth non-anchored edge

[0039] 120 Anchoring Structure

[0040] 130 Actuation Layer

[0041] 310 Latch Structure

[0042] 312 First latching element

[0043] 314 Second latching element

[0044] 912p1, 912p2, 912p3 (partial)

[0045] AL adhesive layer

[0046] AM Actuation Materials

[0047] AP Anchoring Section

[0048] CPS Compensating Oxide Layer

[0049] CR corner area

[0050] CT1 First Conductive Layer

[0051] CT2 Second Conductive Layer

[0052] NP non-anchored part

[0053] Areas R1, R2, and R3

[0054] RS Groove Structure

[0055] SB substrate

[0056] SIL insulation layer

[0057] SL slit

[0058] SL1 First Slit

[0059] SL2 Second Slit

[0060] SL3 Third Slit

[0061] SL4, SL4' Fourth slit

[0062] SL5 Fifth Slit

[0063] SL6 Sixth Slit

[0064] SLi lateral slit

[0065] SLn1 First Internal Slit

[0066] SLn2 Second Internal Slit

[0067] SLs slit segments

[0068] SPR1 First Spring

[0069] SPR2 Second Spring

[0070] SPR3 Third Spring

[0071] TL channel line

[0072] WF wafer

[0073] WL1 First Floor

[0074] WL1a upper surface

[0075] WL2 Second Layer

[0076] WL3 insulation layer

[0077] X, Y, Z directions Detailed Implementation

[0078] To enable those skilled in the art to further understand the present invention, the preferred embodiments of the present invention, typical materials or parameter ranges of key components, and the composition and desired effects of the present invention will be described in detail below with reference to the marked drawings. It should be noted that the drawings are simplified schematic diagrams, and the materials and parameter ranges of key components are illustrated based on current technology. Therefore, only the elements and combinations related to the present invention are shown to provide a clearer description of the basic structure, implementation method, or operation of the present invention. Actual elements and layouts may be more complex, and the materials or parameter ranges used may change with future technological developments. Furthermore, for ease of explanation, the elements shown in the various drawings of the present invention may not be drawn to scale in terms of actual number, shape, or size; their details can be adjusted according to design requirements.

[0079] In the following description and claims, the terms "comprising," "containing," and "having" are open-ended terms and should therefore be interpreted as "containing but not limited to...". Thus, when the terms "comprising," "containing," and / or "having" are used in the description of this invention, they specify the presence of the corresponding features, areas, steps, operations, and / or components, but do not exclude the presence of one or more of the corresponding features, areas, steps, operations, and / or components.

[0080] In the following description and claims, when “the B1 component is formed by C1”, C1 is present in the formation of the B1 component or C1 is used in the formation of the B1 component, and the formation of the B1 component does not exclude the presence and use of one or more other features, areas, steps, operations and / or components.

[0081] In the following description and claims, the term "horizontal direction" refers to a direction parallel to a horizontal plane; the term "horizontal plane" refers to a surface parallel to directions X and Y in the drawings; and the term "vertical direction" refers to a direction parallel to direction Z in the drawings, wherein directions X, Y, and Z are perpendicular to each other. In the following description and claims, the term "top view" refers to the view along the vertical direction, and the term "side view" refers to the view along the horizontal direction.

[0082] In the following description and claims, the term "substantially" means that a slight deviation may or may not exist. For example, the terms "substantially parallel" or "substantially along" mean that the angle between two components may be less than or equal to a specific angular threshold, such as 10 degrees, 5 degrees, 3 degrees, or 1 degree. For example, the term "substantially aligned" means that the deviation between two components may be less than or equal to a specific difference threshold, such as 2 μm or 1 μm. For example, the term "substantially identical" means that the deviation is within a given value or a given range, such as within 10%, 5%, 3%, 2%, 1%, or 0.5%.

[0083] The ordinal numbers used in the specification and claims, such as "first" and "second," to modify elements do not inherently imply or represent any prior ordinal number for that element (or those elements), nor do they represent the order of one element with another, or the order of manufacturing processes. The use of these ordinal numbers is solely to clearly distinguish one named element from another with the same name. The claims and specification may not use the same terminology; therefore, a first component in the specification may be a second component in the claims.

[0084] It should be understood that the following embodiments can be modified by replacing, recombining, or mixing features from multiple different embodiments to complete other embodiments without departing from the spirit of the invention. Features between embodiments can be arbitrarily mixed and matched as long as they do not violate the spirit of the invention or conflict with it.

[0085] In this invention, the sound-generating unit can perform acoustic transformation, which converts a signal (e.g., an electrical signal or other suitable type of signal) into a sound wave. In some embodiments, the sound-generating unit may be a sound generating device, a loudspeaker, a miniature loudspeaker, or other suitable device for converting an electrical signal into a sound wave, but is not limited thereto. It should be noted that operation of the sound-generating unit refers to the sound-generating unit performing acoustic transformation (e.g., sound waves are generated by actuating the sound-generating unit via an electrically driven signal).

[0086] In the use of the sound-generating unit, the sound-generating unit can be disposed on a substrate. The substrate can be a rigid substrate or a flexible substrate, wherein the substrate can include silicon, germanium, glass, plastic, quartz, sapphire, metal, polymer (e.g., polyimide (PI), polyethylene terephthalate (PET)), any suitable material or combination thereof. In one example, the substrate can be a circuit board including, but not limited to, laminates (e.g., copper clad laminates (CCL)), land grid array boards (LGA boards), or any other suitable board containing conductive material. It should be noted that the normal direction of the substrate can be parallel to the direction Z in the attached figure.

[0087] Please refer to Figure 1 and Figure 2 , Figure 1 The figure shown is a top view of the sound-generating unit according to the first embodiment of the present invention. Figure 2 As shown Figure 1 An enlarged schematic diagram of the structure in region R1. (See attached diagram.) Figure 1 As shown, the sound-generating unit 100 includes a diaphragm 110 and at least one anchoring structure 120 outside the diaphragm 110, wherein the diaphragm 110 is connected to the anchoring structure 120 for being anchored by the anchoring structure 120. For example, the diaphragm 110 may be surrounded by the anchoring structure 120, but is not limited thereto.

[0088] During operation of the sound-generating unit 100, the diaphragm 110 can be actuated to move. In this embodiment, the diaphragm 110 can be actuated to move upward and downward, but is not limited thereto. It should be noted that in this invention, the terms "moving upward" and "moving downward" mean that the diaphragm 110 moves substantially along the Z direction. During operation of the sound-generating unit 100, the anchoring structure 120 can be fixed. In other words, during operation of the sound-generating unit 100, the anchoring structure 120 can be a fixed end (or fixed edge) relative to the diaphragm 110.

[0089] The shape of the diaphragm 110 can be designed according to requirements. In some embodiments, the shape of the diaphragm 110 may be polygonal (e.g., rectangular or chamfered), with curved edges, or other suitable shapes, but is not limited thereto. For example, Figure 1 The shape of the diaphragm 110 shown can be a rectangle with chamfers, but is not limited thereto.

[0090] The diaphragm 110 and the anchoring structure 120 may comprise any suitable material. In some embodiments, the diaphragm 110 and the anchoring structure 120 may each comprise silicon (e.g., monocrystalline silicon or polycrystalline silicon), silicon compounds (e.g., silicon carbide, silicon oxide), germanium, germanium compounds (e.g., gallium nitride, gallium arsenide), gallium, gallium compounds, or combinations thereof, but are not limited thereto. The diaphragm 110 and the anchoring structure 120 may have the same or different materials.

[0091] In this invention, the diaphragm 110 may include multiple sub-sections. For example... Figure 1 As shown, the diaphragm 110 includes a first diaphragm sub-section 112 and a second diaphragm sub-section 114, which are opposite to each other in top view. Only one edge of the first diaphragm sub-section 112 is anchored by connection to the anchoring structure 120, and only one edge of the second diaphragm sub-section 114 is anchored by connection to the anchoring structure 120. The other edges of the first diaphragm sub-section 112 and the other edges of the second diaphragm sub-section 114 are unanchored and not connected to the anchoring structure 120 (hereinafter referred to as "unanchored edges"). In other words, in Figure 1 In this design, the first anchoring edge 112a of the first diaphragm sub-part 112 is the only anchored edge in the first diaphragm sub-part 112, and the second anchoring edge 114a of the second diaphragm sub-part 114 is the only anchored edge in the second diaphragm sub-part 114. The first diaphragm sub-part 112 is directly connected to the anchoring structure 120 only through the first anchoring edge 112a, and the second diaphragm sub-part 114 is directly connected to the anchoring structure 120 only through the second anchoring edge 114a. In this invention, the first anchoring edge 112a and the second anchoring edge 114a can be completely or partially anchored. For example, in... Figure 1 In the embodiment shown, the first anchoring edge 112a and the second anchoring edge 114a are fully anchored.

[0092] like Figure 1 As shown, the diaphragm 110 has a plurality of slits SL, wherein the diaphragm 110 can be divided into a plurality of sub-sections by means of the slits SL. In this invention, the slits SL may have at least a straight line pattern, at least a curved pattern, or a combination thereof, and the width of the slits SL should be sufficiently small. For example, the width of the slits SL may be from 1 μm (micrometer) to 5 μm, but is not limited thereto.

[0093] exist Figure 1 and Figure 2In the diaphragm 110, a first slit SL1, at least one second slit SL2, and at least one third slit SL3 may be formed between a first diaphragm sub-section 112 and a second diaphragm sub-section 114, a second slit SL2 may be formed between the first diaphragm sub-section 112 and the anchoring structure 120, and a third slit SL3 may be formed between the second diaphragm sub-section 114 and the anchoring structure 120. One end of the second slit SL2 may be located in a corner region CR of the diaphragm 110 (e.g., ...). Figure 2 As shown), one end of the third slit SL3 can be located in another corner region CR of the diaphragm 110. For example, in Figure 1 In the diaphragm 110, there may be a first slit SL1, two second slits SL2 and two third slits SL3, all of which have a straight line pattern. The first diaphragm sub-section 112 may be located between the two second slits SL2 in top view, and the second diaphragm sub-section 114 may be located between the two third slits SL3 in top view, but is not limited thereto.

[0094] exist Figure 1 In this configuration, the non-anchored edges of each sub-section can be defined by slits SL. Regarding the first diaphragm sub-section 112, in top view, the first non-anchored edge 112n1 relative to the first anchored edge 112a can be defined by the first slit SL1, and the second non-anchored edge 112n2 adjacent to the first anchored edge 112a can be defined by the second slit SL2. Regarding the second diaphragm sub-section 114, in top view, the third non-anchored edge 114n3 relative to the second anchored edge 114a can be defined by the first slit SL1, and the fourth non-anchored edge 114n4 adjacent to the second anchored edge 114a can be defined by the third slit SL3.

[0095] In this invention, the shape of the sub-section of the diaphragm 110 can be designed according to requirements, wherein the shape of the sub-section of the diaphragm 110 can be polygonal (e.g., rectangular), a shape with curved edges, or other suitable shapes. For example, in Figure 1 In this configuration, the shapes of the first diaphragm sub-section 112 and the second diaphragm sub-section 114 can be substantially rectangular, and the first diaphragm sub-section 112 and the second diaphragm sub-section 114 can be substantially identical, but are not limited thereto. Therefore, in Figure 1 In this context, the second non-anchored edge 112n2 may be adjacent to and located between the first non-anchored edge 112n1 and the first anchored edge 112a, and the fourth non-anchored edge 114n4 may be adjacent to and located between the third non-anchored edge 114n3 and the second anchored edge 114a, but is not limited thereto. Figure 1 In this configuration, the second slit SL2 and the third slit SL3 are connected to the first slit SL1. For example, the first slit SL1 may be connected between two second slits SL2 and between two third slits SL3, but is not limited thereto.

[0096] Since the shapes of the first diaphragm sub-section 112 and the second diaphragm sub-section 114 can be substantially rectangular, the first anchoring edge 112a, the first non-anchoring edge 112n1, the second anchoring edge 114a, and the third non-anchoring edge 114n3 are substantially parallel to each other and have substantially the same length. The second non-anchoring edge 112n2 and the fourth non-anchoring edge 114n4 are substantially parallel to each other (i.e., parallel in the X direction) and have substantially the same length. In other words, the first slit SL1 defining the first non-anchoring edge 112n1 and the third non-anchoring edge 114n3 is parallel to the first anchoring edge 112a and the second anchoring edge 114a.

[0097] In some embodiments, Figure 1 In this configuration, the second slit SL2 and the third slit SL3 can be connected to each other, so that the second slit SL2 and the third slit SL3 can be combined to form a long straight slit, but this is not a limitation.

[0098] like Figure 1 As shown, the first anchoring edge 112a of the first diaphragm sub-section 112 is one edge of the diaphragm 110, and the second anchoring edge 114a of the second diaphragm sub-section 114 is the other edge of the diaphragm 110. The second non-anchoring edge 112n2 of the first diaphragm sub-section 112 may or may not be an edge of the diaphragm 110, and the fourth non-anchoring edge 114n4 of the second diaphragm sub-section 114 may or may not be an edge of the diaphragm 110. For example, in Figure 1 In the first diaphragm sub-section 112, the second non-anchored edge 112n2 may not be the edge of the diaphragm 110, and the fourth non-anchored edge 114n4 of the second diaphragm sub-section 114 may not be the edge of the diaphragm 110, such that the second slit SL2 may be located between the first diaphragm sub-section 112 and one edge of the diaphragm 110 in a top view, and the third slit SL3 may be located between the second diaphragm sub-section 114 and one edge of the diaphragm 110 in a top view, but is not limited thereto.

[0099] It should be noted that the slit SL can release the residual stress of the diaphragm 110, which is generated during the manufacturing process of the diaphragm 110 or is present in the diaphragm 110.

[0100] The sound-generating unit 100 may include an actuation layer 130 disposed on a diaphragm 110, the actuation layer 130 being used to actuate the diaphragm 110. In some embodiments, such as Figure 1 As shown, the actuation layer 130 may not completely overlap the diaphragm 110 in a top view. For example, in Figure 1In this configuration, the actuation layer 130 may be disposed on the first diaphragm sub-part 112 and the second diaphragm sub-part 114, and the actuation layer 130 may overlap a portion of the first diaphragm sub-part 112 and a portion of the second diaphragm sub-part 114 in a top view. Alternatively, in Figure 1 In this process, the actuation layer 130 may be disposed on and overlapped with the anchoring structure 120, and the actuation layer 130 may overlap with the anchoring edge of the sub-part of the diaphragm 110, but is not limited thereto.

[0101] like Figure 1 As shown, in a top view, there is a distance between the actuation layer 130 and the slit SL to improve the reliability of the slit SL and the actuation layer 130, but this is not a limitation.

[0102] The actuation layer 130 may include an actuator that has a monotonic electromechanical conversion function for the movement of the diaphragm 110 in the Z direction. In some embodiments, the actuation layer 130 may include a piezoelectric actuator, an electrostatic actuator, a nanoscopic-electrostatic-drive (NED) actuator, an electromagnetic actuator, or any other suitable actuator, but is not limited thereto. For example, in one embodiment, the actuation layer 130 may include a piezoelectric actuator, which may include, for example, two electrodes and a piezoelectric material layer (e.g., lead zirconate titanate (PZT)) disposed between the two electrodes, wherein the piezoelectric material layer can actuate the diaphragm 110 according to a drive signal (e.g., a drive voltage) received by the electrodes, but is not limited thereto. For example, in another embodiment, the actuation layer 130 may include an electromagnetic actuator (such as a planar coil) that actuates the diaphragm 110 based on a received drive signal (e.g., drive current) and a magnetic field (i.e., the diaphragm 110 may be actuated by electromagnetic force), but is not limited thereto. For example, in another embodiment, the actuation layer 130 may include an electrostatic actuator (e.g., a conductive plate) or a NED actuator that actuates the diaphragm 110 based on a received drive signal (e.g., drive voltage) and an electric field (i.e., the diaphragm 110 may be actuated by electrostatic force), but is not limited thereto.

[0103] The diaphragm 110 is actuated by the actuation layer 130 to move along the Z direction, thereby performing acoustic conversion. In other words, a sub-section of the diaphragm 110 can be actuated to move up and down to perform acoustic conversion. It should be noted that sound waves are generated by the movement of the diaphragm 110 caused by the actuation of the actuation layer 130, and the movement of the diaphragm 110 is related to the sound pressure level (SPL) of the sound waves.

[0104] When the sub-section moves up and down, openings are formed in the Z direction, and these openings are adjacent to all the non-anchored edges of the sub-section. For example, in the operation of the sound-generating unit 100, the central opening may be formed between the first non-anchored edge 112n1 of the first diaphragm sub-section 112 and the third non-anchored edge 114n3 of the second diaphragm sub-section 114, while multiple side openings may be formed between the second non-anchored edge 112n2 of the first diaphragm sub-section 112 and the anchoring structure 120, and between the fourth non-anchored edge 114n4 of the second diaphragm sub-section 114 and the anchoring structure 120, respectively.

[0105] The multiple sub-sections of the diaphragm 110 can move in the same or different directions as needed. In some embodiments, the first diaphragm sub-section 112 and the second diaphragm sub-section 114 can move up and down synchronously in the Z direction (i.e., the first diaphragm sub-section 112 and the second diaphragm sub-section 114 can be actuated to move in the same direction) to avoid forming a large central opening between the first diaphragm sub-section 112 and the second diaphragm sub-section 114, but are not limited thereto.

[0106] The actuation layer 130 can actuate the diaphragm 110 to generate sound waves based on the received drive signal. The sound waves correspond to the input audio signal, and the drive signal applied to the actuation layer 130 corresponds to (related to) the input audio signal.

[0107] It should be noted that the shorter side of the driver unit 100 (or diaphragm 110) may be advantageous for achieving a higher resonant frequency, while the longer side of the driver unit 100 (or diaphragm 110) may be advantageous for increasing the sound pressure level. In other words, a driver unit 100 (or diaphragm 110) with a large aspect ratio (i.e., the ratio of the length of the longer side to the length of the shorter side) can achieve a higher resonant frequency and a higher sound pressure level compared to a unit with a smaller aspect ratio. The aspect ratio of the driver unit 100 (or diaphragm 110) can depend on actual needs. For example, the aspect ratio of the driver unit 100 (or diaphragm 110) can be greater than 2 to improve the performance of the driver unit 100, but this is not a limitation.

[0108] The manufacturing method of the sound-generating unit 100 will be further illustrated below. It should be noted that, in the manufacturing method described below, the actuation layer 130 in the sound-generating unit 100 may, for example, include a piezoelectric actuator, but is not limited thereto. Any suitable type of actuator may be used for the actuation layer 130 of the sound-generating unit 100.

[0109] In the manufacturing methods described below, the forming process may include atomic layer deposition (ALD), chemical vapor deposition (CVD), other suitable processes, or combinations thereof. Patterning processes may include, for example, photolithography, etching processes, any other suitable processes, or combinations thereof.

[0110] Please refer to Figures 3 to 8 , Figures 3 to 8 The diagram illustrates the structure of a sound-generating unit at different stages of a manufacturing method according to an embodiment of the present invention. In this embodiment, the sound-generating unit 100 can be manufactured using at least one semiconductor process to form a MEMS chip, but is not limited thereto. Figure 3 As shown, a wafer WF is provided, wherein the wafer WF may include a first layer WL1 and a second layer WL2, and may optionally include an insulating layer WL3 between the first layer WL1 and the second layer WL2.

[0111] The first layer WL1, the insulating layer WL3, and the second layer WL2 may each comprise any suitable material, allowing the wafer WF to be of any suitable type. For example, the first layer WL1 and the second layer WL2 may each comprise silicon (e.g., monocrystalline silicon or polycrystalline silicon), silicon carbide, germanium, gallium nitride, gallium arsenide, other suitable materials, or combinations thereof. In some embodiments, the first layer WL1 may comprise monocrystalline silicon, allowing the wafer WF to be a silicon-coated insulator (SOI) wafer, but this is not a limitation. For example, the insulating layer WL3 may comprise an oxide, such as silicon oxide (e.g., silicon dioxide), but this is not a limitation. The thicknesses of the first layer WL1, the insulating layer WL3, and the second layer WL2 may each be adjusted as needed.

[0112] exist Figure 3 In this process, the compensation oxide layer CPS can be selectively formed on the upper side of the wafer WF, wherein the upper side is higher than the upper surface WL1a of the first layer WL1, which is opposite to the upper surface of the second layer WL2, such that the first layer WL1 is located between the compensation oxide layer CPS and the second layer WL2. The material of the oxide contained in the compensation oxide layer CPS and the thickness of the compensation oxide layer CPS can be designed according to requirements.

[0113] exist Figure 3 In this process, a first conductive layer CT1 and an actuating material AM can be sequentially formed on the upper side of the wafer WF (formed on the first layer WL1), such that the first conductive layer CT1 can be located between the actuating material AM and the first layer WL1. In some embodiments, the first conductive layer CT1 and the actuating material AM can be in contact with each other.

[0114] The first conductive layer CT1 may comprise any suitable conductive material, and the actuating material AM may comprise any suitable material. In some embodiments, the first conductive layer CT1 may comprise a metal (e.g., platinum), and the actuating material AM may comprise a piezoelectric material, but is not limited thereto. For example, a piezoelectric material may comprise, for example, lead-zirconate-titanate (PZT), but is not limited thereto. Furthermore, the thickness of the first conductive layer CT1 and the thickness of the actuating material AM may each be adjusted as needed.

[0115] Then, in Figure 3 In this process, the actuation material AM, the first conductive layer CT1, and the compensation oxide layer CPS can be patterned sequentially.

[0116] like Figure 4 As shown, the insulating layer SIL can be formed and patterned on the actuating material AM, and the thickness and material of the insulating layer SIL can be designed according to requirements. For example, the material of the insulating layer SIL can be an oxide, but is not limited to this.

[0117] like Figure 4 As shown, a second conductive layer CT2 can be formed on the actuating material AM and the insulating layer SIL, and then the second conductive layer CT2 can be patterned. The thickness and material of the second conductive layer CT2 can be designed as needed. For example, the second conductive layer CT2 may include a metal (e.g., platinum), but is not limited thereto. For example, the second conductive layer CT2 may contact the actuating material AM.

[0118] The actuating material AM, the first conductive layer CT1, and the second conductive layer CT2 may be sub-layers in the actuating layer 130 of the sound-generating unit 100, so that the actuating layer 130 has a piezoelectric actuator containing two electrodes and the actuating material AM located between the two electrodes.

[0119] exist Figure 4 In this process, the insulating layer SIL can be used to separate at least a portion of the first conductive layer CT1 from at least a portion of the second conductive layer CT2.

[0120] like Figure 5 As shown, the first layer WL1 of the wafer WF can be patterned to form the channel line TL. In Figure 5 In this context, the channel line TL is a portion that was removed from the first layer WL1. That is, the channel line TL is located between the two parts of the first layer WL1.

[0121] like Figure 6 As shown, a wafer WF is disposed on a substrate SB and an adhesive layer AL, wherein the adhesive layer AL is adhered between the substrate SB and the first layer WL1 of the wafer WF. Figure 6In this process, the actuation layer 130 is located between the wafer WF and the substrate SB. Due to this step, the first layer WL1 of the wafer WF and the structure disposed on the upper side of the wafer WF (i.e., the structure located on the upper surface WL1a of the wafer WF) can be protected in subsequent steps.

[0122] like Figure 7 As shown, the second layer WL2 of the wafer WF can be patterned to form an anchoring structure 120, and the first layer WL1 can form a diaphragm 110 anchored by the anchoring structure 120. Specifically, the second layer WL2 of the wafer WF may have a first portion and a second portion. The first portion of the second layer WL2 can be removed, and the second portion of the second layer WL2 can form the anchoring structure 120. Since the first portion of the second layer WL2 is removed, the first layer WL1 forms the diaphragm 110, where the diaphragm 110 corresponds in top view to the first portion removed in the second layer WL2. For example, the first portion of the second layer WL2 can be removed by a deep reactive ion etching (DRIE) process, but is not limited thereto. It should be noted that when the first layer WL1 of the wafer WF is patterned to form the channel line TL, the design of the sub-sections of the diaphragm 110 (e.g., the first diaphragm sub-section 112 and the second diaphragm sub-section 114) can be determined.

[0123] Optionally, in Figure 7 In this process, since the insulating layer WL3 of the wafer WF exists, after the second layer WL2 of the wafer WF is patterned, the portion of the insulating layer WL3 corresponding to the first part of the second layer WL2 can be removed so that the first layer WL1 forms a diaphragm 110, but this is not a limitation.

[0124] In addition, Figure 7 In the middle, the second part of the second layer WL2, the part of the insulating layer WL3 that overlaps with the second part of the second layer WL2, and the part of the first layer WL1 that overlaps with the second part of the second layer WL2 can be combined to form an anchoring structure 120.

[0125] like Figure 8 As shown, the substrate SB and the adhesive layer AL can be removed by a suitable process to complete the manufacturing of the sound-generating unit 100. For example, the substrate SB and the adhesive layer AL can be removed by a peel-off process, but are not limited thereto.

[0126] exist Figure 8In this configuration, since the first part of the second layer WL2 is removed to allow the first layer WL1 to form the diaphragm 110, the slit SL is formed within and through the diaphragm 110 by the channel line TL. Because the slit SL can be formed by the channel line TL, the width of the channel line TL can be designed according to the requirements of the slit SL. For example, the width of the channel line TL can be less than or equal to 5μm, less than or equal to 3μm, or less than or equal to 2μm, allowing the slit SL to have a desired width, but it is not limited to this.

[0127] The sound-generating unit and its manufacturing method of the present invention are not limited to the above embodiments. Other embodiments will continue to be disclosed below. However, in order to simplify the description and highlight the differences between each embodiment and the above embodiments, the same reference numerals are used to refer to the same elements below, and repeated parts will not be described again.

[0128] Please refer to Figure 9 and Figure 10 , Figure 9 The figure shown is a top view of the sound-generating unit according to the second embodiment of the present invention. Figure 10 As shown Figure 9 An enlarged schematic diagram of the structure in region R2. (See attached diagram.) Figure 9 and Figure 10 As shown, the difference between this embodiment and the first embodiment is that the sound-generating unit 200 in this embodiment includes a groove structure RS disposed outside the diaphragm 110 and at a corner of the sound-generating unit 200, wherein the groove structure RS is directly connected to the slit segment SLs in the corner region CR of the diaphragm 110. Figure 9 In the illustrated embodiment, the sound-generating unit 200 may include four groove structures RS disposed outside the diaphragm 110 and at the four corners of the sound-generating unit 200, but is not limited thereto.

[0129] The slit segments SLs in the corner region CR can be slits SL connected to the second slit SL2 or the third slit SL3, or the slit segments SLs in the corner region CR can be a portion of the second slit SL2 or a portion of the third slit SL3. The slit segments SLs can have curved patterns, straight patterns, or combinations thereof. For example, in... Figure 10 In this process, slit segments SLs can be connected between one end of the second slit SL2 located in the corner region CR and the groove structure RS, and slit segments SLs can have curved patterns, but are not limited thereto.

[0130] like Figure 9 and Figure 10 As shown, the groove structure RS can be formed on the anchoring structure 120 and located at a corner of the sound-emitting unit 200. For example, the sound-emitting unit 200 can have a first layer WL1 and a second layer WL2 disposed under the first layer WL1 (e.g., Figure 8In this configuration, a portion of the first layer WL1 can be used as a diaphragm 110 (i.e., the first layer WL1 may include a diaphragm 110), and another portion of the first layer WL1 may surround the diaphragm 110 and be combined with the second layer WL2 to form an anchoring structure 120. Slit segments SLs in the corner region CR of the diaphragm 110 may pass through the first layer WL1, and groove structures RS may pass through the first layer WL1 and have a bottom belonging to the anchoring structure 120 (e.g., the second layer WL2), but are not limited thereto. In this case, regarding the manufacturing method of the sound-generating unit 200, the slits SLs of the diaphragm 110 and the groove structures RS may be patterned (etched) in the same process (the same etching process).

[0131] like Figure 9 and Figure 10 As shown, the groove structure RS can have a curved pattern, and the curved pattern of the groove structure RS can be designed according to requirements. For example, in Figure 10 In the middle, the slit segments SLs of the corner area CR can be combined with the groove structure RS to form a semi-circular arc pattern, but this is not a limitation.

[0132] The presence of the curved groove structure RS connecting the slit segments SLs located in the corner region CR improves the success rate of the manufacturing process of the sound-generating unit 200, thereby increasing the yield of the sound-generating unit 200. Specifically, in the step of removing the substrate SB and the adhesive layer AL (e.g., a peeling process), due to the presence of the curved groove structure RS connecting the slit segments SLs located in the corner region CR, the stress concentration location can be changed from the corner region CR of the diaphragm 110 (e.g., one end of the slit SL) to the groove structure RS, and the stress applied to the groove structure RS can be dispersed to reduce damage to the diaphragm 110 in this process. Furthermore, since the groove structure RS has a curved pattern, the stress applied to the groove structure RS in this process can be more effectively dispersed to reduce damage to the groove structure RS, thereby improving the success rate of the manufacturing process of the sound-generating unit 200.

[0133] Please refer to Figure 11 , Figure 11 The image shown is a top view of the sound-generating unit according to a third embodiment of the present invention. Figure 11As shown, the difference between this embodiment and the first embodiment is that the diaphragm 110 of the sound-generating unit 300 in this embodiment includes a latch structure 310. When the first diaphragm sub-part 112 and the second diaphragm sub-part 114 move along the Z direction (i.e., the normal direction of the substrate on which the diaphragm 110 is provided), the latch structure 310 can lock the first diaphragm sub-part 112 and the second diaphragm sub-part 114 when the moving distance of the first diaphragm sub-part 112 in the Z direction and the moving distance of the second diaphragm sub-part 114 in the Z direction exceed a threshold. In other words, the latch structure 310 is used to limit the moving distance of the first diaphragm sub-part 112 and the second diaphragm sub-part 114.

[0134] Because the sub-parts of diaphragm 110 have only one anchoring edge, they may be fragile and susceptible to damage during manufacturing. In this embodiment, the presence of latching structure 310 improves the success rate of manufacturing diaphragm 110, thereby increasing the yield of sound-generating unit 300. Specifically, in the step of removing substrate SB and adhesive layer AL (e.g., peeling process), the displacement of the first diaphragm sub-part 112 along direction Z and the displacement of the second diaphragm sub-part 114 along direction Z are caused by the adhesive force of adhesive layer AL. In this case, when the displacement of the first diaphragm sub-part 112 and the second diaphragm sub-part 114 in direction Z exceeds a threshold, latching structure 310 can lock the first diaphragm sub-part 112 and the second diaphragm sub-part 114 to limit their movement and provide restoring force for them, thereby reducing damage to diaphragm 110.

[0135] The latch structure 310 can be designed in any suitable way to meet specific needs. In this embodiment, Figure 11 The latching structure 310 shown can be formed by a slit SL. For example, in Figure 11 In this configuration, the latching structure 310 can be formed by two first slits SL1 and three fourth slits SL4, SL4', wherein the first slits SL1 and the fourth slits SL4, SL4' are located between the first diaphragm sub-section 112 and the second diaphragm sub-section 114, and the three fourth slits SL4, SL4' are connected between the two first slits SL1. Figure 11 In the middle, the first slits SL1 can be parallel to each other, but are not limited to this. Figure 11 In this context, the fourth slit SL4' extending along the X direction can be connected between the two fourth slits SL4 extending along the Y direction, and the fourth slit SL4 extending along the Y direction can be connected between the fourth slit SL4' extending along the X direction and the first slit SL1 extending along the X direction, but is not limited thereto.

[0136] like Figure 11As shown, the latching structure 310 may include a first latching element 312 and a second latching element 314. The first latching element 312 may be a part of the first diaphragm sub-section 112 (equivalently, the first latching element 312 may belong to the first diaphragm sub-section 112), and the second latching element 314 may be a part of the second diaphragm sub-section 114 (equivalently, the second latching element 314 may belong to the second diaphragm sub-section 114). Figure 11 In this configuration, the first latching element 312 may be disposed between the second latching element 314 of the second diaphragm sub-section 114 and another portion of the second diaphragm sub-section 114, and the second latching element 314 may be disposed between the first latching element 312 of the first diaphragm sub-section 112 and another portion of the first diaphragm sub-section 112. For example, in Figure 11 In this case, the longitudinal direction of the first latching element 312 and the longitudinal direction of the second latching element 314 may be substantially parallel to direction X, but are not limited thereto.

[0137] When the first diaphragm sub-section 112 and the second diaphragm sub-section 114 move along the Z direction and their displacement exceeds a threshold, the first latching element 312 and the second latching element 314 engage to lock the first diaphragm sub-section 112 and the second diaphragm sub-section 114. It should be noted that the width of the slit SL and the size of the latching element are related to the latching effect of the latching structure 310.

[0138] Please refer to Figure 12 , Figure 12 The image shown is a top view of the sound-generating unit according to the fourth embodiment of the present invention. Figure 12 As shown, the difference between this embodiment and the first embodiment is that the diaphragm 110 of the sound-generating unit 400 in this embodiment includes at least one spring connected between the sub-parts of the diaphragm 110, wherein the number of springs can be designed according to requirements. Figure 12 In this process, the diaphragm 110 may include a first spring SPR1 directly connected between the first diaphragm sub-section 112 and the second diaphragm sub-section 114.

[0139] The presence of the first spring SPR1 improves the success rate of manufacturing the diaphragm 110, thereby increasing the yield of the sound-generating unit 400. Specifically, during the step of removing the substrate SB and the adhesive layer AL, the displacement of the first diaphragm sub-part 112 along the Z direction and the displacement of the second diaphragm sub-part 114 along the Z direction are caused by the adhesive force of the adhesive layer AL. When the first diaphragm sub-part 112 and the second diaphragm sub-part 114 move along the Z direction with a large displacement, the first spring SPR1 restricts the movement of the first diaphragm sub-part 112 and the second diaphragm sub-part 114 and provides a restoring force for the first diaphragm sub-part 112 and the second diaphragm sub-part 114, thereby reducing damage to the diaphragm 110.

[0140] Springs can be designed in any suitable way to meet specific needs. For example... Figure 12As shown, the first spring SPR1 can be formed by the slit SL. In this embodiment, Figure 12 The first spring SPR1 shown may be formed by two first slits SL1 and two fifth slits SL5, wherein the fifth slits SL5 may be connected to the first slits SL1, and the fifth slits SL5 may have a curved pattern. For example, the fifth slits SL5 may include a hook-shaped curved pattern, and one end of the fifth slits SL5 may not be connected to the other slits SL, but this is not a limitation. For example, the two first slits SL1 may be parallel to each other, but this is not a limitation.

[0141] When the diaphragm 110 moves, the stress caused by the deformation of the diaphragm 110 may be applied to the spring. Figure 12 In this process, since the fifth slit SL5 includes a curved pattern (i.e., a hook-shaped curved pattern), the effect of stress concentration can be reduced, thereby reducing damage to the diaphragm 110 and the first spring SPR1, and thus improving the yield of the sound unit 400.

[0142] In addition, such as Figure 12 As shown, the connection direction from the first spring SPR1 to the first diaphragm sub-section 112 may differ from the connection direction from the first spring SPR1 to the second diaphragm sub-section 114. For example, in Figure 12 In this configuration, the connection direction from the first spring SPR1 to the first diaphragm sub-section 112 may be opposite to the connection direction from the first spring SPR1 to the second diaphragm sub-section 114, but is not limited thereto. For example, in Figure 12 In this case, the first spring SPR1 can be substantially in the shape of a straight line, but is not limited to this.

[0143] Please refer to Figure 13 , Figure 13 The image shown is a top view of the sound-generating unit according to the fifth embodiment of the present invention. Figure 13 As shown, the difference between this embodiment and the fourth embodiment lies in the design of the first spring SPR1. Figure 12 In the sound-generating unit 500, the first spring SPR1 of the diaphragm 110 can be formed by two first slits SL1, two fifth slits SL5, and a sixth slit SL6. The two fifth slits SL5 can be connected to the same first slit SL1, and the sixth slit SL6 can be connected to another first slit SL1. Each fifth slit SL5 can have two curved patterns and one straight pattern, while the sixth slit SL6 can be between the two fifth slits SL5 and has a curved pattern. For example, the fifth slit SL5 may include a hook-shaped curved pattern, and one end of the fifth slit SL5 may not be connected to any other slit SL, but this is not a limitation.

[0144] In addition, Figure 13In the first spring SPR1 shown, the connection direction from the first spring SPR1 to the first diaphragm sub-section 112 can be the same as the connection direction from the first spring SPR1 to the second diaphragm sub-section 114, but is not limited thereto. For example, in Figure 13 In this design, the first spring SPR1 can be substantially U-shaped, but is not limited to this. Due to this design, the size of the central opening between the first diaphragm sub-section 112 and the second diaphragm sub-section 114 can be reduced to decrease air leakage of the sound-generating unit 500 during operation.

[0145] When the diaphragm 110 moves, the stress caused by the deformation of the diaphragm 110 may be applied to the spring. Figure 13 In this design, the U-shaped first spring SPR1 with a curved slit SL reduces the effect of stress concentration, thereby reducing damage to the diaphragm 110 and the first spring SPR1, and thus improving the yield of the sound unit 500.

[0146] Please refer to Figure 14 and Figure 15 , Figure 14 The image shown is a top view of the sound-generating unit according to the sixth embodiment of the present invention. Figure 15 As shown Figure 14 An enlarged schematic diagram of the structure in region R3. (See attached diagram.) Figure 14 and Figure 15 As shown, the difference between this embodiment and the first embodiment is that the diaphragm 110 of the sound-generating unit 600 in this embodiment further includes a third diaphragm sub-part 116 and a fourth diaphragm sub-part 118. The third diaphragm sub-part 116 and the fourth diaphragm sub-part 118 can be disposed between the first diaphragm sub-part 112 and the second diaphragm sub-part 114 in a top view, and the third diaphragm sub-part 116 and the fourth diaphragm sub-part 118 can be opposite each other in a top view. In other words, the third diaphragm sub-part 116 can be disposed on a first side (e.g., the left side) of the sound-generating unit 600 located between the first diaphragm sub-part 112 and the second diaphragm sub-part 114 in a top view, and the fourth diaphragm sub-part 118 can be disposed on a second side (e.g., the right side) of the sound-generating unit 600 located between the first diaphragm sub-part 112 and the second diaphragm sub-part 114 in a top view, while the first and second sides of the sound-generating unit 600 can be opposite each other in a top view.

[0147] exist Figure 14In this configuration, only one edge of the third diaphragm sub-section 116 can be anchored by connecting to the anchoring structure 120, and only one edge of the fourth diaphragm sub-section 118 can be anchored by connecting to the anchoring structure 120. The other edges of the third diaphragm sub-section 116 and the other edges of the fourth diaphragm sub-section 118 are non-anchored and not connected to the anchoring structure 120. In other words, the third anchoring edge 116a of the third diaphragm sub-section 116 can be the only anchored edge in the third diaphragm sub-section 116, and the fourth anchoring edge 118a of the fourth diaphragm sub-section 118 can be the only anchored edge in the fourth diaphragm sub-section 118. The third diaphragm sub-section 116 can be directly connected to the anchoring structure 120 only through the third anchoring edge 116a, and the fourth diaphragm sub-section 118 can be directly connected to the anchoring structure 120 only through the fourth anchoring edge 118a.

[0148] exist Figure 14 In this configuration, a second slit SL2 may be located between the first diaphragm sub-section 112 and the third diaphragm sub-section 116 to define a second non-anchored edge 112n2 of the first diaphragm sub-section 112 and a fifth non-anchored edge 116n5 of the third diaphragm sub-section 116. Another second slit SL2 may be located between the first diaphragm sub-section 112 and the fourth diaphragm sub-section 118 to define another second non-anchored edge 112n2 of the first diaphragm sub-section 112 and a sixth non-anchored edge 118n6 of the fourth diaphragm sub-section 118. A third slit SL3 may be located between the second diaphragm sub-section 114 and the third diaphragm sub-section 116 to define a fourth non-anchored edge 114n4 of the second diaphragm sub-section 114 and another fifth non-anchored edge 116n5 of the third diaphragm sub-section 116. Another third slit SL3 may be located between the second diaphragm sub-section 114 and the fourth diaphragm sub-section 118 to define another fourth non-anchored edge 114n4 of the second diaphragm sub-section 114 and another sixth non-anchored edge 118n6 of the fourth diaphragm sub-section 118. In some embodiments, the fifth non-anchored edge 116n5 of the third diaphragm sub-section 116 may be adjacent to the third anchored edge 116a of the third diaphragm sub-section 116, and the sixth non-anchored edge 118n6 of the fourth diaphragm sub-section 118 may be adjacent to the fourth anchored edge 118a of the fourth diaphragm sub-section 118, but is not limited thereto.

[0149] like Figure 14 As shown, the shapes of the first diaphragm sub-section 112 and the second diaphragm sub-section 114 can be substantially trapezoidal, and the shapes of the third diaphragm sub-section 116 and the fourth diaphragm sub-section 118 can be substantially triangular. The first diaphragm sub-section 112 and the second diaphragm sub-section 114 can be substantially congruent, and the third diaphragm sub-section 116 and the fourth diaphragm sub-section 118 can be substantially congruent, but this is not a limitation.

[0150] During operation of the sound-generating unit 600, the side openings are located between the first diaphragm sub-section 112 and the third diaphragm sub-section 116, between the second diaphragm sub-section 114 and the third diaphragm sub-section 116, between the first diaphragm sub-section 112 and the fourth diaphragm sub-section 118, and between the second diaphragm sub-section 114 and the fourth diaphragm sub-section 118, respectively. The size of the side openings is related to the low-frequency roll-off (LFRO) effect in the frequency response of the sound-generating unit 600, where a strong LFRO effect may cause a significant decrease in the sound pressure level of the sound waves at low frequencies.

[0151] In detail, regarding the side opening of the 600 speaker unit, the acoustic impedance at low frequencies can be calculated using the formula: R∝L / (b×d) 3 Where R is the acoustic impedance at low frequencies, L is the thickness of the diaphragm 110, b is the length of the second non-anchored edge 112n2 of the first diaphragm sub-section 112 or the length of the fourth non-anchored edge 114n4 of the second diaphragm sub-section 114, and d is the maximum dimension of the side opening in the Z direction. If the acoustic impedance at low frequencies is increased, the air leakage (e.g., acoustic leakage) of the sound-generating unit 600 during operation can be reduced, thereby reducing the low-frequency roll-off effect in the frequency response of the sound-generating unit 600.

[0152] According to the above formula, when d (i.e., the maximum size of the side opening in the Z direction) decreases, the acoustic impedance at low frequencies can be increased. Figure 1 In the first embodiment shown, regarding the first diaphragm sub-section 112, the maximum dimension of the side opening in the Z direction is the maximum distance in the Z direction between the second non-anchored edge 112n2 and the anchoring structure 120. Figure 14 In the sixth embodiment shown, regarding the first diaphragm sub-section 112, the maximum dimension of the side opening in the Z direction is the maximum distance in the Z direction between the second non-anchored edge 112n2 of the first diaphragm sub-section 112 and the fifth non-anchored edge 116n5 of the third diaphragm sub-section 116 (or the sixth non-anchored edge 118n6 of the fourth diaphragm sub-section 118). Figure 14 In the sixth embodiment shown, since the third diaphragm sub-section 116 and the fourth diaphragm sub-section 118 exist, during the operation of the sound-generating unit 600, the d in the formula can be reduced by controlling the third diaphragm sub-section 116 and the fourth diaphragm sub-section 118 to move closer to the first diaphragm sub-section 112 and the second diaphragm sub-section 114 in the Z direction. That is, in Figure 14 In the middle, the third diaphragm sub-section 116 can be used to reduce acoustic leakage on the first side (left side) of the sound-generating unit 600, and the fourth diaphragm sub-section 118 can be used to reduce acoustic leakage on the second side (right side) of the sound-generating unit 600.

[0153] The sound-generating unit 600 may include at least one suitable structure to reduce d (i.e., the maximum size of the side opening in the Z direction), thereby increasing the acoustic impedance at low frequencies. In this embodiment, due to this suitable structure, during operation of the sound-generating unit 600, the fifth non-anchored edge 116n5 of the third diaphragm sub-section 116 may be close in the Z direction to the second non-anchored edge 112n2 of the first diaphragm sub-section 112 and the fourth non-anchored edge 114n4 of the second diaphragm sub-section 114, respectively; and the sixth non-anchored edge 118n6 of the fourth diaphragm sub-section 118 may be close in the Z direction to the second non-anchored edge 112n2 of the first diaphragm sub-section 112 and the fourth non-anchored edge 114n4 of the second diaphragm sub-section 114, respectively. Accordingly, during operation of the sound-generating unit 600, the size of the side opening can be reduced to increase the acoustic impedance at low frequencies, thereby reducing the low-frequency roll-off effect in the frequency response of the sound-generating unit 600.

[0154] For example, to reduce d, the diaphragm 110 may include at least one spring connected between the sub-sections of the diaphragm 110, such that during operation of the sound-generating unit 600, the non-anchored edges of these sub-sections may approach each other in the Z direction. Figure 14 As shown, the diaphragm 110 may include at least one second spring SPR2 and at least one third spring SPR3. The second spring SPR2 may be directly connected between the first diaphragm sub-section 112 and the third diaphragm sub-section 116 or directly connected between the first diaphragm sub-section 112 and the fourth diaphragm sub-section 118. The third spring SPR3 may be directly connected between the second diaphragm sub-section 114 and the third diaphragm sub-section 116 or directly connected between the second diaphragm sub-section 114 and the fourth diaphragm sub-section 118. Figure 14 In this configuration, the diaphragm 110 may include two second springs SPR2 and two third springs SPR3. The two second springs SPR2 may be connected between the first diaphragm sub-section 112 and the third diaphragm sub-section 116, and between the first diaphragm sub-section 112 and the fourth diaphragm sub-section 118, respectively. The two third springs SPR3 may be connected between the second diaphragm sub-section 114 and the third diaphragm sub-section 116, and between the second diaphragm sub-section 114 and the fourth diaphragm sub-section 118, respectively, but are not limited thereto. It should be noted that the second springs SPR2 and the third springs SPR3 are formed by a slit SL (e.g., a slit SL other than the first slit SL1, the second slit SL2, and the third slit SL3).

[0155] In addition, Figure 14 In the spring shown, the connection direction from this spring to one sub-part can be the same as the connection direction from this spring to another sub-part, but is not limited thereto. For example, in Figure 14In this design, the spring can be substantially U-shaped, but is not limited to this. For example, a U-shaped spring can have a large curvature, but is not limited to this. Due to this design, the size of the side opening between the two sub-parts can be reduced (i.e., d is reduced) to reduce air leakage of the sound-generating unit 600 during operation, thereby reducing the low-frequency roll-off effect in the frequency response of the sound-generating unit 600.

[0156] For example, to reduce d, the actuation layer 130 may be disposed on the first diaphragm sub-section 112, the second diaphragm sub-section 114, the third diaphragm sub-section 116, and the fourth diaphragm sub-section 118. During operation of the sound-generating unit 600, the actuation layer 130 may actuate these sub-sections to move along the Z direction, such that the non-anchored edges of these sub-sections may approach each other in the Z direction.

[0157] In addition, Figure 15 In the region R3 shown, the sound-generating unit 600 may include a groove structure RS outside the diaphragm 110, wherein the groove structure RS may be directly connected to the slit segment SLs in the corner region CR of the diaphragm 110, and the groove structure RS may have a curved pattern (e.g., the groove structure RS may have a semi-circular arc pattern). For example, in Figure 15 In this process, slit segments SLs can be connected between one end of the second slit SL2 located in the corner region CR and the groove structure RS, and the slit segments SLs can have a straight pattern, but are not limited thereto. The presence of the curved groove structure RS connecting the slit segments SLs located in the corner region CR can improve the success rate of the manufacturing process of the sound unit 600, thereby improving the yield of the sound unit 600.

[0158] Please refer to Figure 16 , Figure 16 The image shown is a top view of the sound-generating unit according to the seventh embodiment of the present invention. Figure 16 As shown, the difference between this embodiment and the sixth embodiment lies in the design of the spring. Figure 16 In the sound-generating unit 700 shown, the fifth slit SL5, including both hook-shaped curved patterns and straight-line patterns, can be connected to the first slit SL1, the second slit SL2, or the third slit SL3, respectively. The second spring SPR2 and the third spring SPR3 can be formed by the first slit SL1, the second slit SL2, the third slit SL3, and the fifth slit SL5, but are not limited thereto. Furthermore, in Figure 16 In this context, the spring can be essentially V-shaped, but is not limited to this.

[0159] Please refer to Figure 17 , Figure 17 The image shown is a top view of the sound-generating unit according to the eighth embodiment of the present invention. Figure 17As shown, the difference between this embodiment and the sixth embodiment is that the slit SL of the diaphragm 110 of the sound-generating unit 800 further includes at least one side slit SLi, which is formed on the third diaphragm sub-part 116 and / or the fourth diaphragm sub-part 118.

[0160] Due to the presence of the side slit SLi, the structural strength of the third diaphragm sub-section 116 and the fourth diaphragm sub-section 118 is weakened, so that during the operation of the sound-generating unit 800, the second spring SPR2 and the third spring SPR3 can pull up the third diaphragm sub-section 116 and the fourth diaphragm sub-section 118 so that their non-anchored edges are close to the non-anchored edges of the first diaphragm sub-section 112 and the second diaphragm sub-section 114 in the direction Z.

[0161] On the other hand, compared to a structure without side slits SLi, the diaphragm 110 of this embodiment can form multiple smaller openings during operation of the sound-generating unit 800 to replace the original larger opening located between the two non-anchored edges of the two sub-parts. At least one smaller opening can be formed between the two non-anchored edges, and at least one smaller opening can be formed via side slits SLi. In other words, the d of an original larger opening is transformed into multiple d's of multiple smaller openings, where d' is less than d. For example, according to the above formula, assuming an original larger opening is replaced by three smaller openings, and the d of the original larger opening is three times the d' of the smaller openings, then the acoustic impedance of the three smaller openings is nine times that of the original larger opening. Therefore, this design can improve the acoustic impedance at low frequencies.

[0162] like Figure 17 As shown, the second spring SPR2 may be formed by the first slit SL1, the second slit SL2, the fifth slit SL5 and the side slit SLi, and the third spring SPR3 may be formed by the first slit SL1, the third slit SL3, the fifth slit SL5 and the side slit SLi, but is not limited thereto.

[0163] In some embodiments, such as Figure 17 As shown, the actuation layer 130 may be disposed on the first diaphragm sub-section 112 and the second diaphragm sub-section 114, but the actuation layer 130 may not be disposed on the third diaphragm sub-section 116 and the fourth diaphragm sub-section 118 (that is, no actuation layer is disposed on the third diaphragm sub-section 116 and the fourth diaphragm sub-section 118), but this is not a limitation.

[0164] In addition, Figure 17 In this configuration, the diaphragm 110 may optionally include a first spring SPR1, directly connected between the first diaphragm sub-section 112 and the second diaphragm sub-section 114. For example, Figure 17 The first spring SPR1 shown can be formed by two first slits SL1 and two fifth slits SL5, but is not limited thereto.

[0165] Please refer to Figure 18 and Figure 19 , Figure 18 The image shown is a top view of the sound-generating unit according to the ninth embodiment of the present invention. Figure 19 The figure shown is a side view of the sound-generating unit according to the ninth embodiment of the present invention, wherein... Figure 18 and Figure 19 Only the first diaphragm sub-section 112 is shown, and the design of the second diaphragm sub-section 114 can be similar to the design of the first diaphragm sub-section 112. For example... Figure 18 As shown, the difference between this embodiment and the first embodiment lies in the design of the anchoring edge of the sub-section of the diaphragm 110. In the sound-generating unit 900 of this embodiment, the anchoring edge of the sub-section of the diaphragm 110 is partially anchored, such that the anchoring edge includes at least one anchored portion and at least one non-anchored portion, wherein the anchored portion of the anchoring edge is anchored, and the non-anchored portion of the anchoring edge is non-anchored. For example, in Figure 18 In the first diaphragm sub-section 112, the first anchoring edge 112a, which is partially anchored, may include two anchoring portions AP and a non-anchoring portion NP located between the two anchoring portions AP, but is not limited thereto. When the sound-generating unit 900 is operated (i.e., the first diaphragm sub-section 112 is actuated), the non-anchoring portion NP of the first anchoring edge 112a may move in the direction Z to increase the deformation of the diaphragm 110, thereby increasing the sound pressure level of the sound waves generated by the sound-generating unit 900.

[0166] To enable the anchoring edge to have an anchored portion AP and a non-anchored portion NP, the slit SL of the diaphragm 110 may include at least one internal slit. In this embodiment, the first diaphragm sub-part 112 may have at least one first internal slit SLn1 and at least one second internal slit SLn2, wherein the non-anchored portion NP of the first anchoring edge 112a may be defined by the first internal slit SLn1, and the second internal slit SLn2 is connected to the first internal slit SLn1, so that the first anchoring edge 112a has an anchored portion AP and a non-anchored portion NP. In other words, the first internal slit SLn1 may be parallel to the first anchoring edge 112a and located between the first diaphragm sub-part 112 and the anchoring structure 120, and the second internal slit SLn2 may not be parallel to the first anchoring edge 112a. For example, in Figure 18 In this configuration, the first diaphragm sub-section 112 may have one first slit SL1 and two second slits SL2. The second inner slit SLn2 may be a straight slit perpendicular to the first anchoring edge 112a, but is not limited thereto. For example, the second inner slit SLn2 may extend from the first anchoring edge 112a toward the first slit SL1, and the second inner slit SLn2 may not be connected to the first slit SL1.

[0167] The first internal slit SLn1 of the non-anchored portion NP of the first anchoring edge 112a can be connected between two slits SL. For example, in Figure 18 In this configuration, the first internal slit SLn1 can be connected between two second internal slits SLn2, such that the anchored portion AP and the non-anchored portion NP of the first anchoring edge 112a can be separated by the second internal slits SLn2, but this is not a limitation.

[0168] Optionally, in Figure 18 In this context, the first internal slit SLn1 and the second internal slit SLn2 can be separated from the first slit SL1, the second slit SL2 and the third slit SL3, but are not limited thereto.

[0169] like Figure 18 As shown, the first diaphragm sub-section 112 can be divided into multiple parts by an internal slit SL. For example, in Figure 18 In this configuration, the first diaphragm sub-section 112 can be divided into three parts 912p1, 912p2, and 912p3. Parts 912p1 and 912p3 can be located between the second slit SL2 and the second inner slit SLn2, while part 912p2 can be located between the two second inner slits SLn2. For example, in... Figure 18 In this configuration, portions 912p1 and 912p3 may have anchoring portions AP of a first anchoring edge 112a for anchoring to the anchoring structure 120. For example, in Figure 18 In the middle, part 912p2 may have a non-anchored portion NP of the first anchoring edge 112a, so that part 912p2 can move along the direction Z and have a large displacement during the operation of the sound generating unit 900 (compared to parts 912p1 and 912p3), thereby increasing the sound pressure level of the sound waves generated by the sound generating unit 900.

[0170] like Figure 18 As shown, the actuation layer 130 may include three parts, which are respectively disposed in three parts 912p1, 912p2, and 912p3 of the first diaphragm sub-part 112 to actuate the first diaphragm sub-part 112.

[0171] A side view of the sound-generating unit 900 during operation is shown. Figure 19 In the middle, part 912p2 can move along the direction Z during the operation of the sound-generating unit 900 and has a large displacement (compared to parts 912p1 and 912p3), and the non-anchored part NP of the first anchoring edge 112a can be higher than the anchored part AP in the direction Z.

[0172] Please refer to Figure 20 , Figure 20 The image shown is a top view of the sound-generating unit according to the tenth embodiment of the present invention. Figure 20As shown, the difference between this embodiment and the ninth embodiment lies in the design of the anchoring edge of the sub-section of the diaphragm 110. Figure 20 In the illustrated sound-generating unit 900', the first anchoring edge 112a of the first diaphragm sub-section 112 may include two non-anchored portions NP and an anchoring portion AP located between the two non-anchored portions NP, but is not limited thereto. Figure 20 In the first diaphragm sub-section 112, there may be two first internal slits SLn1 and two second internal slits SLn2. The first internal slits SLn1 may be connected between the second internal slits SLn2 and the second internal slits SL2, but are not limited thereto.

[0173] exist Figure 20 In the middle, a portion 912p2 may have an anchoring part AP with a first anchoring edge 112a to anchor to the anchoring structure 120. Figure 20 In the middle, portions 912p1 and 912p3 may have non-anchored portions NP of the first anchoring edge 112a, such that portions 912p1 and 912p3 can move along the direction Z and have a large displacement (compared to portion 912p2) during the operation of the sound generating unit 900', thereby increasing the sound pressure level of the sound waves generated by the sound generating unit 900'.

[0174] In summary, according to the design of the sound-generating unit of the present invention, the sound-generating unit can achieve higher resonant frequency, greater sound pressure level, high yield and / or low air leakage.

[0175] The above description is merely a preferred embodiment of the present invention and is not intended to limit the invention. Various modifications and variations can be made to the invention by those skilled in the art. Any modifications, equivalent substitutions, or improvements made within the spirit and principles of the invention should be included within the scope of protection of the invention.

Claims

1. A sound-generating unit, characterized in that, include: A diaphragm includes a first diaphragm sub-section, a second diaphragm sub-section, and a third diaphragm sub-section, wherein the first diaphragm sub-section and the second diaphragm sub-section are opposite to each other, a first slit is formed between the first diaphragm sub-section and the second diaphragm sub-section, and the third diaphragm sub-section, in a top view, is disposed on a first side of the sound-generating unit located between the first diaphragm sub-section and the second diaphragm sub-section; and An actuating layer is disposed on the first diaphragm sub-part and the second diaphragm sub-part to actuate the diaphragm to generate a sound wave; The first diaphragm sub-section includes a first anchoring edge, which is fully or partially anchored, and all edges in the first diaphragm sub-section other than the first anchoring edge are non-anchored. The second diaphragm sub-section includes a second anchoring edge, which is fully or partially anchored, and all edges in the second diaphragm sub-section other than the second anchoring edge are non-anchored; The first slit is parallel or partially parallel to the first anchoring edge; The third diaphragm sub-section is used to reduce acoustic leakage on the first side of the sound-generating unit; The third diaphragm sub-section includes a third anchoring edge, which is anchored, and all edges in the third diaphragm sub-section other than the third anchoring edge are non-anchored; At least one slit is formed on the third diaphragm sub-section; No actuator layer is disposed on the third diaphragm sub-section; The diaphragm includes a second spring, which is directly connected between the first diaphragm sub-section and the third diaphragm sub-section.

2. The sound-generating unit as described in claim 1, characterized in that, The diaphragm has a first ratio greater than 2, where the first ratio is the ratio of a first length of a long side of the diaphragm to a second length of a short side of the diaphragm.

3. The sound-generating unit as described in claim 1, characterized in that, The diaphragm includes: A second slit, wherein a second non-anchored edge of the first diaphragm sub-section is defined by the second slit, and the second non-anchored edge is adjacent to the first anchored edge; A first non-anchored edge of the first diaphragm sub-section is defined by the first slit, and the first non-anchored edge is relative to the first anchored edge in a top view.

4. The sound-generating unit as described in claim 3, characterized in that, The first non-anchored edge of the first diaphragm sub-part and a third non-anchored edge of the second diaphragm sub-part are defined by the first slit, and the third non-anchored edge of the second diaphragm sub-part is relative to the second anchored edge of the second diaphragm sub-part in a top view.

5. The sound-generating unit as described in claim 1, characterized in that, It also includes a groove structure disposed at one corner of the sound-generating unit, the groove structure being used to disperse the stress applied to the groove structure during a peeling process.

6. The sound-generating unit as described in claim 5, characterized in that, The diaphragm includes a slit segment disposed in a corner region of the diaphragm, and the groove structure is directly connected to the slit segment.

7. The sound-generating unit as described in claim 5, characterized in that, The groove structure has a curved pattern.

8. The sound-generating unit as described in claim 1, characterized in that, It also includes four groove structures, which are respectively disposed at the four corners of the sound-generating unit. The groove structures are used to disperse the stress applied to the groove structures during a peeling process.

9. The sound-generating unit as described in claim 1, characterized in that, The diaphragm includes a latching structure to limit the movement distance between the first diaphragm sub-section and the second diaphragm sub-section; The moving distance is the distance along a normal direction of a substrate on which the sound-generating unit is disposed.

10. The sound-generating unit as described in claim 9, characterized in that, The latching structure includes a first latching element and a second latching element, wherein the first latching element is part of the first diaphragm sub-section and the second latching element is part of the second diaphragm sub-section.

11. The sound-generating unit as described in claim 9, characterized in that, At least a portion of the latch structure is formed by the first slit.

12. The sound-generating unit as described in claim 1, characterized in that, The diaphragm also includes a first spring, which is directly connected between the first diaphragm sub-part and the second diaphragm sub-part.

13. The sound-generating unit as described in claim 12, characterized in that, The diaphragm also includes: At least one slit is formed between the first diaphragm sub-part and the second diaphragm sub-part; At least a portion of the first spring is formed by the at least one slit.

14. The sound-generating unit as described in claim 13, characterized in that, One of the at least one slits includes a hook-shaped curved pattern.

15. The sound-generating unit as described in claim 1, characterized in that, The diaphragm includes: A fourth diaphragm sub-section is disposed on a second side of the sound-generating unit, located between the first diaphragm sub-section and the second diaphragm sub-section, in a top view; The fourth diaphragm sub-section is used to reduce acoustic leakage on the second side of the sound-generating unit; The fourth diaphragm sub-section includes a fourth anchoring edge, which is anchored, and all edges in the fourth diaphragm sub-section other than the fourth anchoring edge are unanchored.

16. The sound-generating unit as described in claim 1, characterized in that, The diaphragm includes: A second slit is formed between the first diaphragm sub-part and the third diaphragm sub-part; A first non-anchored edge of the first diaphragm sub-part is defined by the first slit, and the first non-anchored edge is relative to the first anchored edge. A second non-anchored edge of the first diaphragm sub-part and a fourth non-anchored edge of the third diaphragm sub-part are defined by the second slit. The second non-anchored edge of the first diaphragm sub-part is adjacent to the first anchored edge of the first diaphragm sub-part, and the fourth non-anchored edge of the third diaphragm sub-part is adjacent to the third anchored edge of the third diaphragm sub-part.

17. The sound-generating unit as claimed in claim 1, characterized in that, The first anchoring edge is partially anchored; The first anchoring edge includes at least one anchoring portion and at least one non-anchoring portion, wherein the at least one anchoring portion is anchored and the at least one non-anchoring portion is not anchored; When the first diaphragm sub-part is actuated, the at least one non-anchored portion of the first anchoring edge moves toward a normal direction toward a substrate on which the sound-generating unit is disposed.

18. The sound-generating unit as described in claim 17, characterized in that, The first diaphragm sub-part has at least one first internal slit and at least one second internal slit; The at least one non-anchored portion of the first anchored edge is defined by the at least one first internal slit; The at least one second internal slit extends from the first anchoring edge toward the first slit; One non-anchored edge of the first diaphragm sub-section is defined by the first slit.

19. The sound-generating unit as described in claim 18, characterized in that, The first diaphragm sub-part includes two second internal slits, which extend from the first anchoring edge toward the first slit; A portion of the actuation layer is disposed between the two second internal slits.

20. The sound-generating unit as described in claim 18, characterized in that, The at least one anchored portion and the at least one non-anchored portion are separated by the at least one second internal slit.

21. A method for manufacturing a sound-generating unit, characterized in that, include: A wafer is disposed on a substrate, wherein the wafer includes a first layer and a second layer, and at least one channel line is formed in the first layer; Patterning the second layer of the wafer; and Remove the substrate; The first layer includes a diaphragm, and a first slit is formed in and through the diaphragm by the at least one channel line; The diaphragm includes a first diaphragm sub-section, a second diaphragm sub-section, and a third diaphragm sub-section, wherein the first diaphragm sub-section and the second diaphragm sub-section are opposite to each other, the first slit is formed between the first diaphragm sub-section and the second diaphragm sub-section, and the third diaphragm sub-section is disposed on a first side of the sound-generating unit located between the first diaphragm sub-section and the second diaphragm sub-section in a top view; The sound-generating unit includes an actuating layer disposed on the first diaphragm sub-part and the second diaphragm sub-part, used to actuate the diaphragm to generate a sound wave; The first diaphragm sub-section includes a first anchoring edge, which is fully or partially anchored, and all edges in the first diaphragm sub-section other than the first anchoring edge are non-anchored. The second diaphragm sub-section includes a second anchoring edge, which is fully or partially anchored, and all edges in the second diaphragm sub-section other than the second anchoring edge are non-anchored; The first slit is parallel or partially parallel to the first anchoring edge; The third diaphragm sub-section is used to reduce acoustic leakage on the first side of the sound-generating unit; The third diaphragm sub-section includes a third anchoring edge, which is anchored, and all edges in the third diaphragm sub-section other than the third anchoring edge are non-anchored; At least one slit is formed on the third diaphragm sub-section; No actuator layer is disposed on the third diaphragm sub-section; The diaphragm includes a second spring, which is directly connected between the first diaphragm sub-section and the third diaphragm sub-section.

22. The method for manufacturing a sound-generating unit as described in claim 21, characterized in that, Also includes: A groove structure is formed in one corner of the sound-generating unit.

23. The method for manufacturing a sound-generating unit as described in claim 21, characterized in that, Also includes: A latching structure is formed to limit the movement distance between the first diaphragm sub-section and the second diaphragm sub-section; The moving distance is the distance along a normal direction of a substrate on which the sound-generating unit is disposed.

24. The method for manufacturing a sound-generating unit as described in claim 21, characterized in that, Also includes: A first spring is formed between the first diaphragm sub-section and the second diaphragm sub-section.

25. The method for manufacturing a sound-generating unit as described in claim 21, characterized in that, The diaphragm also includes a fourth diaphragm sub-section for reducing acoustic leakage on a second side of the sound-generating unit.

26. The method for manufacturing a sound-generating unit as described in claim 21, characterized in that, Also includes: At least one first internal slit and at least one second internal slit are formed on the first diaphragm sub-part; The first anchoring edge is partially anchored; The first anchoring edge includes at least one anchoring portion and at least one non-anchoring portion; The at least one non-anchored portion of the first anchored edge is defined by the at least one first internal slit; The at least one anchored portion and the at least one non-anchored portion are separated by the at least one second internal slit.

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