An automatic cleaning device and coating machine with alternating anode and cathode electric arc sources.

Abstract

This invention provides an automatic alternating cathode and anode arc source cleaning device and a coating machine, relating to the field of coating technology. The automatic alternating cathode and anode arc source cleaning device includes an arc power supply that automatically switches the polarity of its output electrodes and two cathode arc sources. The two output electrodes of the arc power supply are respectively connected to the two cathode arc sources. The negative and positive electrodes of the arc power supply automatically switch with each other. The functions of the two cathode arc sources automatically switch between cathode and anode functions, continuously generating electron streams to ionize argon gas. Argon ions are used to bombard and clean the workpiece, and the arc source target surface can also be automatically cleaned. The coating machine includes a single-chamber machine and a continuous production line coating machine. The automatic alternating cathode and anode arc source cleaning device is installed at different positions within the coating machine body. The workpiece cleaning process is automatic, convenient and reliable to operate, and highly efficient.

Description

Technical Field

[0001] This invention relates to the field of coating technology, specifically to an automatic cleaning device and coating machine that uses alternating anode and cathode electric arc sources. Background Technology

[0002] In vacuum ion plating technology, "ion cleaning" is necessary before plating to improve the adhesion between the thin film and the substrate. The development of "ion cleaning" has gone through several stages:

[0003] ① The workpiece is cleaned by bombarding it with argon ions generated by glow discharge, or by cleaning it with an anodic layer ion source, which is also a glow discharge ion source. In glow discharge, the plasma density is low; in a coating machine with a diameter of 1000mm, the workpiece deflection current is in the range of 2A to 7A.

[0004] ② Cleaning workpieces using "titanium ions" from a cathode arc source: The high-density arc discharge plasma generated by the cathode arc discharge contains a large number of electrons and ions. For a considerable period, titanium targets were used as cathode arc sources. The arc source was connected to the negative terminal of the arc power supply, and the coating chamber wall was connected to the positive terminal. After igniting the arc discharge, the high-density "titanium ions" within it bombarded and cleaned the workpiece. During cleaning, an 800V~1000V bias voltage was applied to the workpiece to accelerate the titanium ions; this is called "main arc bombardment." Titanium ions have high energy and good cleaning effect. However, the energy of titanium ions is too high, causing excessive bombardment and etching of the workpiece surface, resulting in damage or overheating. The film structure also contains large molten droplet particles, which become a source of damage to the tool coating, reducing the life of the tool and die; it also reduces the brightness of the decorative parts surface, making them appear "hazy," affecting the decorative effect.

[0005] ③ Utilizing the electron flow in the high-density arc plasma generated by a cathode arc source to ionize argon gas, and then bombarding the workpiece with a high-density argon ion stream: This technology, known as arc-enhanced glow discharge cleaning technology, has been used by SULZER-METAPLAS, BALZERS, and PLATIT in cathode arc ion plating machines. While still utilizing the energy of the arc plasma generated by a cathode arc source, this technology no longer uses high-energy titanium ions to clean the workpiece, but instead uses high-density argon ions obtained from arc discharge. Argon ions are lighter than titanium ions, resulting in less damage to the workpiece surface from bombardment and etching. The high argon ion density allows for a bias current exceeding 10A with only a 200V bias voltage, effectively cleaning the workpiece with high surface quality and brightness.

[0006] Currently available arc ion plating sources include circular planar small arc sources (small arc sources), rectangular planar large arc sources (large arc sources), and columnar arc sources, all of which can be used as cleaning sources to obtain high-density argon ion cleaning of workpieces.

[0007] This cleaning technology requires an electric arc source and a dedicated water-cooled anode. The anode's role is to attract the electron flow from the arc plasma. As the electron flow moves towards the anode, it ionizes the argon gas to obtain a high density of argon ions, which are then used to clean the workpiece. After cleaning the workpiece, a poorly conductive film is deposited on the anode surface during subsequent coating processes, reducing the anode's conductivity and becoming a contaminant layer. Therefore, the anode must be cleaned periodically (even for each batch), adding considerable trouble and impacting production efficiency.

[0008] The cathode arc source is typically used as an evaporation source in arc ion plating to evaporate film atoms from the target material. These film atoms then reach the workpiece during plating to form a thin film. Therefore, the arc source is the plating source in the plating stage. In this new cleaning technology, its role is to maintain a continuous flow of arc electrons moving towards the anode. During this movement, the electrons ionize argon gas, using argon ions to clean the workpiece. During the cleaning process, the cathode arc source continuously evaporates film particles from the target material, which can affect the purity of the film on the workpiece. This must be blocked; therefore, a baffle must be placed in front of the cathode arc source.

[0009] ④ In Wang Fuzhen's patent (application number: 201720302520.7), a method was proposed to use two cylindrical arc sources, which act as anodes and cathodes respectively, as arc discharge argon ion cleaning sources. Its advantages are: when one cylindrical arc source acts as the anode, it can attract the electron flow from the arc plasma to ionize the argon gas in the coating chamber, using high-density argon ions to clean the workpiece; when this cylindrical arc source is converted to the cathode, it can evaporate the contaminants on the target tube surface when it was originally used as the anode, thus cleaning the arc source target surface. The two cylindrical arc sources act as anodes and cathodes respectively, and the continuous switching between the cathode and anode functions of the two arc sources allows for cleaning both the workpiece and the arc source target surface, and continuous cleaning of the workpiece over a long period will not cause contamination.

[0010] Two cylindrical arc sources, acting as anode and cathode respectively, require a matching arc power supply that continuously switches the polarity of its output arc power. Without such an automatically switching arc power supply, the arc power must be shut off after a period of cleaning, and the polarities of the two arc power supplies must be manually switched before restarting to continue cleaning the workpiece. This operation is extremely cumbersome. Therefore, there is an urgent need to invent a device that can automatically switch the polarities of two cathode arc sources to clean the workpiece. Summary of the Invention

[0011] The purpose of this invention is to provide an automatic electric arc source cleaning device and coating machine that are mutually anode and cathode, so as to solve the above-mentioned technical problems existing in the prior art; the various technical effects that the various technical solutions provided by this invention can produce are described in detail below.

[0012] To achieve the above objectives, the present invention provides the following technical solution:

[0013] The present invention provides an automatic alternating cathode and anode arc source cleaning device, comprising an arc power source and a cathode arc source that automatically switch the polarity of their output electrodes, wherein: the two output electrodes of the arc power source that automatically switches the polarity of their output electrodes are respectively connected to the two cathode arc sources, and the negative and positive electrodes of the arc power source that automatically switches between each other, so that the two cathode arc sources automatically switch between cathode and anode functions.

[0014] The arc power supply with automatic switching of output electrode polarity employs two conversion technologies: one is automatic switching via a microcontroller or PLC connected to a host computer, supplemented by contactors and relays; the other is automatic switching via an MCU controlling IGBTs. The converter can control the switching speed and time interval between the positive and negative polarities of the two output electrodes.

[0015] When the electrode of a cathode arc source connected to the arc power supply with the automatically switching output electrode polarity is positive, this cathode arc source becomes the anode, attracting electrons. As these electrons move towards the anode cathode arc source, they ionize the argon gas in the coating chamber, using high-density argon ions to clean the workpiece. When the electrode of the arc power supply with the automatically switching output electrode polarity connected to this cathode arc source switches to the negative electrode, the cathode arc source transforms into a cathode, evaporating the contaminants deposited on the target surface when it was originally used as an anode, thus cleaning the arc source target surface. As the polarity of the arc power supply with the automatically switching output electrode polarity connected to two cathode arc sources continuously switches between positive and negative, the two cathode arc sources continuously convert to having both cathode and anode functions, capable of cleaning both the workpiece and the arc source target surface. Long-term continuous cleaning of the workpiece will not cause contamination.

[0016] Preferably, the two cathode arc sources are configured as columnar arc sources, circular planar small arc sources, or rectangular planar large arc sources; a baffle is provided in front of each of the two cathode arc sources.

[0017] Preferably, a workpiece rotating frame is provided between the cathode arc sources for mounting the workpiece to be cleaned; the automatic anode and cathode arc source cleaning device includes a workpiece bias power supply, which is connected to the workpiece rotating frame.

[0018] The present invention provides a coating machine equipped with the automatic anode and cathode arc source cleaning device, comprising a coating machine body, wherein the automatic anode and cathode arc source cleaning device is provided on the coating machine body.

[0019] Preferably, the coating machine body is a single-chamber coating machine body, and the single-chamber coating machine body is provided with a coating chamber, wherein: the coating chamber is connected to a vacuum system; the coating source provided in the coating chamber to provide film particles includes multiple planar magnetron sputtering targets, columnar magnetron sputtering targets, circular planar small arc sources, columnar arc sources or rectangular planar large arc sources.

[0020] Preferably, the two cathode arc sources disposed in the coating chamber are arranged on the side wall of the coating chamber.

[0021] Preferably, the two cathode arc sources disposed in the coating chamber are arranged opposite each other at the top and bottom of the coating chamber.

[0022] Preferably, the coating machine body is a continuous production line coating machine body, and the continuous production line coating machine body is provided with a cleaning chamber. On both sides of the cleaning chamber, there are two cathode arc sources connected to the arc power supply with the polarity of the automatically switching output electrode.

[0023] Preferably, the two cathode arc sources, which are connected to the arc power supply with the polarity of the automatically switching output electrode, are arranged opposite each other on both sides of the cleaning chamber.

[0024] Preferably, the two cathode arc sources connected to the arc power supply with the polarity of the automatically switching output electrode, which is disposed in the cleaning chamber, are arranged side by side on both sides of the cleaning chamber.

[0025] The automatic electric arc source cleaning device and coating machine that are mutually anode and cathode provided by the present invention have at least the following beneficial effects:

[0026] The automatic alternating cathode and anode arc source cleaning device includes an arc power supply that automatically switches the polarity of the output electrodes and two cathode arc sources connected thereto.

[0027] The workpiece to be cleaned is placed between the two cathode arc sources, and the workpiece rotating frame is connected to the workpiece bias power supply.

[0028] A baffle is installed in front of the cathode arc source.

[0029] In the configuration described above, after the arc discharge is ignited by an arc power supply with automatically switching output electrode polarities, the two cathode arc sources automatically switch to become anode and cathode, continuously attracting electrons (anode) and continuously evaporating contaminants from the arc source target surface (cathode). This allows for automatic cleaning of both the workpiece and the arc source target surface. Compared to existing devices, it eliminates the need for manual cleaning of the contaminant layer on the dedicated anode and manual switching of the polarities of the two cathode arc sources, making the operation of cleaning workpieces using arc discharge argon ion flow more convenient and reliable.

[0030] The coating machine provided by this invention, whether it is a single-chamber coating machine or a continuous production line coating machine, is equipped with the automatic anode and cathode arc source cleaning device, which can automatically clean both the workpiece and the arc source target surface. The workpiece cleaning process is simple and easy to implement, the cleaning effect is significant, and the production efficiency is high. Attached Figure Description

[0031] To more clearly illustrate the technical solutions in the embodiments of the present invention, the accompanying drawings used in the description of the embodiments will be briefly introduced below. Obviously, the accompanying drawings described below are only some embodiments of the present invention. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0032] Figure 1 This is a schematic diagram of a single-chamber coating machine structure, in which the cathode and cathode arc sources are placed opposite each other on both sides of the coating chamber.

[0033] Figure 2 A schematic diagram of a single-chamber coating machine in which the cathode and anode electric arc sources, which are mutually anode and cathode, are placed opposite each other at the top and bottom of the coating chamber;

[0034] Figure 3 This is a schematic diagram of the structure of a continuous production line coating machine of the present invention, in which the cathode arc sources, which are mutually anode and cathode, are placed opposite each other on both sides of the coating chamber;

[0035] Figure 4 This is a schematic diagram of the structure of a continuous production line coating machine of the present invention, in which the cathode arc sources, which are mutually anode and cathode, are arranged side by side on the same side of the coating chamber;

[0036] Figure 5 This invention relates to a converter in an arc power supply that automatically switches the polarity of the output electrodes.

[0037] Figure 6 This is another type of converter in the arc power supply that automatically switches the polarity of the output electrode according to the present invention.

[0038] Figure Labels

[0039] 1. Vacuum system; 2. Magnetron sputtering target; 3. Baffle; 4. Cathode arc source; 5. Workpiece turntable; 6. Coating chamber; 7. Arc power supply with automatic switching output electrode polarity; 8. Workpiece bias power supply; 9. Magnetron sputtering power supply; 10. Cleaning chamber; 11. Power supply; 12. Relay; 13. Relay output port; 14. Relay coil; 15. Control port; 16. Controller; 17. Contactor coil; 18. Contactor; 19. Connecting harness. Detailed Implementation

[0040] To make the objectives, technical solutions, and advantages of this invention clearer, the technical solutions of this invention will be described in detail below. Obviously, the described embodiments are merely some embodiments of this invention, and not all embodiments. Based on the embodiments of this invention, all other implementation methods obtained by those skilled in the art without creative effort are within the scope of protection of this invention.

[0041] Example 1:

[0042] This invention provides an automatic cleaning device with alternating anode and cathode arc sources, referenced. Figures 1-4 As shown, the automatic alternating cathode and anode arc source cleaning device includes an arc power supply 7 that automatically switches the polarity of the output electrodes and two cathode arc sources 4.

[0043] The two output electrodes of the arc power supply 7 with automatic switching output electrode polarity are respectively connected to two cathode arc sources 4. In actual use, the negative and positive electrodes of the arc power supply 7 with automatic switching output electrode polarity can automatically switch between each other, enabling the two cathode arc sources 4 to automatically switch between cathode and anode functions.

[0044] As an optional implementation, a baffle 3 is provided in front of the two cathode arc sources 4.

[0045] As an optional implementation, the two cathode arc sources 4 are configured as columnar arc sources, circular planar small arc sources, or rectangular planar large arc sources.

[0046] As an optional implementation, a workpiece rotating frame 5 is provided between the two cathode arc sources 4 for mounting the workpiece to be cleaned.

[0047] The automatic electric arc source cleaning device with alternating positive and negative electrodes includes a workpiece bias power supply 8, which is connected to the workpiece rotating frame 5.

[0048] like Figure 5 and Figure 6 The diagram shown is an optional implementation of the "converter circuit diagram" of the arc power supply 7 that automatically switches the polarity of the output electrodes. Figure 5 and Figure 6 These are schematic diagrams of control circuits for two different implementations of the converter.

[0049] Figure 5 The first control circuit for an arc power supply converter that automatically switches the polarity of the output electrodes.

[0050] The power supply 11 is connected to the controller 16 via the corresponding connecting wire harness 19. The output electrode of the power supply 11 is connected to the contactor 18 via the corresponding connecting wire harness 19. The two control ports 15 of the controller 16 are respectively connected to the relay coil 14 and the contactor coil 17.

[0051] The output voltage of power supply 11 is DC50-400V, and the output current is 0-600A. Its output current is not limited to DC, but also includes DC pulse, DC superimposed single pulse, DC superimposed double pulse and other modes.

[0052] The relay 12 and its relay output port 13 are used for functions such as switching the arc ignition output port and the magnetic field control port.

[0053] The controller 16 can be configured as a PLC, touch screen, or MCU. It has built-in program control and can specify parameters such as output anode and cathode, arc ignition output, etc., and can control the conversion time and interval time. It also supports online programming, real-time data modification and execution, data saving and retrieval, and other functions.

[0054] like Figure 5 As shown, contactor 18 can be a DC contactor or an AC contactor. Under the control of controller 16, it is used to switch between positive and negative poles. When the contactor coil 17 and the relay coil 14 are subjected to a given voltage, the contacts of contactor 18 and relay 12 flip, thereby realizing the conversion of positive and negative poles and related control signal outputs.

[0055] Figure 6 The second control circuit for an arc power supply converter that automatically switches the polarity of the output electrodes.

[0056] Contactor 18 uses high-power IGBTs to form a bridge circuit, and controller 16 uses an MCU to control the IGBT conduction sequence, thereby controlling functions such as switching the positive and negative terminals and changing the arc-ignition output port. When IGBTs Q1 and Q4 are turned on, output port A is positive and output port B is negative. When IGBTs Q2 and Q3 are turned on, output port A is negative and output port B is positive. At the same time, relay coil 14, through a given voltage, realizes the conversion of positive and negative terminals and related control signal output.

[0057] Both of the above circuits can be used to switch the polarity of the arc power supply output electrode, and the switching speed and the time interval between two switching operations can be controlled.

[0058] The arc power supply 7 with automatically switching output electrode polarity used in the specific embodiments described below all have this structure. The control circuits used are all... Figure 5 and Figure 6 These are control circuit diagrams for two different implementations of the converter.

[0059] Example 2

[0060] An example of a single-chamber coating machine provided by this invention, such as... Figure 1 As shown, there are AA half-section view and top view including this embodiment.

[0061] The coating machine includes a coating machine body, and the coating machine body is equipped with the automatic alternating positive and negative arc source cleaning device.

[0062] The coating machine body is a single-chamber coating machine, and the single-chamber coating machine body is provided with a coating chamber 6.

[0063] The coating chamber 6 is connected to a vacuum system 1.

[0064] The coating chamber 6 is equipped with multiple planar magnetron sputtering targets, columnar magnetron sputtering targets, circular planar small arc sources, columnar arc sources, or rectangular planar large arc sources to provide coating particles.

[0065] Two cathode arc sources 4 are arranged on the side wall of the coating chamber 6.

[0066] A columnar magnetron sputtering target 2 is installed around the coating chamber 6 as the coating source, and two columnar arc sources with opposite polarities are configured on the side of the coating chamber 6 as the cleaning source for the coating machine.

[0067] Before coating, install baffles 3 in front of the two columnar arc sources, then evacuate to a background vacuum of 5×10⁻³ Pa before introducing argon gas and adjusting the vacuum to 2×10⁻² Pa to 5×10⁻¹ Pa. Turn on the workpiece bias power supply 8. Start the arc power supply 7 that automatically switches the polarity of the output electrodes, generating an arc discharge between the two columnar arc sources. As the arc power supply 7 continuously switches the polarity of the output electrodes, the two columnar arc sources continuously switch between anode and cathode. The electron streams emitted from the two columnar arc sources ionize the argon gas, and the argon ions accelerate and bombard the workpiece to clean it. The workpiece bias voltage is 100V to 300V, and the cleaning time is 10 to 30 minutes. During this period, the time interval and switching speed of the polarity switching of the two columnar arc sources can be adjusted. A high-density electron stream can continuously generate in the coating chamber 6 to ionize the argon gas, bombarding and cleaning the workpiece with argon ions, while simultaneously cleaning the surface of the target tube.

[0068] After cleaning the workpiece, turn off the arc power supply 7 that automatically switches the output electrode polarity, and perform coating using the magnetron sputtering target 2 in a conventional manner. Once the predetermined film thickness is reached, turn off the magnetron sputtering power supply 9 and the workpiece bias power supply 8, and shut off the gas supply. Remove the workpiece when it has cooled to below 120°C.

[0069] Alternatively, after cleaning the workpiece, the arc power supply 7, which automatically switches the polarity of the output electrodes, can be left on while the columnar magnetron sputtering target 2 is turned on simultaneously. The columnar magnetron sputtering target 2 and the columnar arc source are deposited together. The two columnar arc sources can increase the thickness of the film, and the arc electron flow can also generate an auxiliary deposition effect, providing a high deposition rate and metal ionization rate for magnetron sputtering.

[0070] Example 3

[0071] Another single-chamber coating machine provided by the present invention, such as Figure 2 As shown, there are AA half-section view and top view including this embodiment.

[0072] The coating machine includes a coating machine body, and the coating machine body is equipped with the automatic alternating positive and negative arc source cleaning device.

[0073] The coating machine body is a single-chamber coating machine, and the single-chamber coating machine body is provided with a coating chamber 6.

[0074] The coating chamber 6 is connected to a vacuum system 1;

[0075] The coating chamber 6 is equipped with multiple planar magnetron sputtering targets, columnar magnetron sputtering targets, circular planar small arc sources, columnar arc sources, or rectangular planar large arc sources to provide coating particles.

[0076] Two cathode arc sources 4 are arranged opposite each other at the top and bottom of the coating chamber 6.

[0077] In a single-chamber coating machine where a magnetron sputtering target 2 is installed around the coating chamber 6 as the coating source, a coating machine in which two small arc sources are installed on the upper top plate and the lower bottom of the coating chamber 6 as argon ion cleaning sources with mutual anode and cathode is used to clean the workpiece.

[0078] Before cleaning the workpiece before coating, install baffles 3 in front of the small arc sources installed above and below the coating chamber 6. Then, evacuate the chamber to a background vacuum of 5×10⁻³ Pa, and then introduce argon gas, adjusting the vacuum to 2×10⁻² Pa to 5×10⁻¹ Pa. Turn on the workpiece bias power supply 8. Start the arc power supply 7 that automatically switches the polarity of the output electrodes. Arc discharge is generated between the two small arc sources. Due to the continuous switching between anode and cathode, the electron stream emitted from the two small sources ionizes the argon gas, and the argon ions accelerate and bombard the workpiece to clean it. Clean for 10 to 30 minutes. During this period, the time interval and switching speed of the polarity switching between the two small arc sources can be adjusted to ensure that a high-density electron stream continuously occurs in the coating chamber 6 to ionize the argon gas, bombard the workpiece with argon ions, and simultaneously continuously clean the surface of the target tube.

[0079] After cleaning the workpiece, turn off the arc power supply 7 that automatically switches the output electrode polarity. Perform coating using a rotary target-tube type magnetron sputtering target 2 in a conventional manner. Once the predetermined film thickness is reached, turn off the magnetron sputtering power supply 9 and the workpiece bias power supply 8, and shut off the gas supply. Remove the workpiece when it has cooled to below 120°C.

[0080] Alternatively, after cleaning the workpiece, the arc power supply 7, which automatically switches the polarity of the output electrodes, can be left on while simultaneously turning on the magnetron sputtering target 2 and two small arc sources to participate in the film deposition. The two small arc sources can increase the film thickness, and the arc electron flow can generate an auxiliary deposition effect, providing a high deposition rate and metal ionization rate.

[0081] Example 4

[0082] This invention provides a coating machine, such as Figure 3 and Figure 4 As shown, the coating machine includes a coating machine body, and the automatic alternating positive and negative arc source cleaning device is provided on the coating machine body.

[0083] The coating machine body is a continuous production line coating machine body. The continuous production line coating machine body is provided with a cleaning chamber 10. On both sides of the cleaning chamber 10, there are two cathode arc sources 4 connected to the arc power supply 7 that automatically switches the polarity of the output electrode.

[0084] As an optional implementation, such as Figure 3 As shown, two cathode arc sources 4 connected to the arc power supply 7 that automatically switches the polarity of the output electrode are arranged opposite each other on both sides of the cleaning chamber 10.

[0085] As an optional implementation, such as Figure 4 As shown, two cathode arc sources 4 connected to the arc power supply 7 that automatically switches the polarity of the output electrode are arranged side by side on both sides of the cleaning chamber 10.

[0086] Figure 3 When the workpiece in the continuous production line is a steel plate type, two columnar arc sources are arranged side by side on the side wall of the cleaning chamber 10.

[0087] During cleaning, the arc power supply 7, which is connected to two columnar arc sources arranged side by side and automatically switches the polarity of the output electrodes, is activated. The two columnar arc sources generate arc discharge, automatically switch to anode and cathode, and continuously emit arc electron streams to ionize argon gas. The workpiece is cleaned by bombarding it with high-density argon ions, while the surface of the target tube is cleaned at the same time.

[0088] Figure 4 To accommodate gaps between workpiece racks in a continuous production line, two columnar arc sources are arranged opposite each other on the wall of the cleaning chamber 10.

[0089] During cleaning, the arc power supply 7, which is connected to the opposing columnar arc sources and automatically switches the polarity of the output electrodes, is activated. The two opposing columnar arc sources generate arc discharge and automatically switch to anode and cathode. The columnar arc sources located on both sides of the cleaning chamber 10 continuously emit electron streams to the columnar arc source opposite the workpiece, ionizing the argon gas around the workpiece and bombarding the workpiece with high-density argon ions to clean it, while simultaneously cleaning the surface of the target tube.

[0090] In the description of this application, it should be understood that the terms "upper", "lower", "inner", "outer", "top", "bottom", etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing this application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this application.

[0091] Furthermore, in the description of this application, "multiple" and "several" mean at least two, such as two, three, etc., unless otherwise explicitly specified.

[0092] In this application, unless otherwise expressly specified and limited, the terms "installation," "connection," "linking," "fixing," etc., should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components, unless otherwise expressly limited. Those skilled in the art can understand the specific meaning of the above terms in this application according to the specific circumstances.

[0093] The above description is merely a specific embodiment of the present invention, but the scope of protection of the present invention is not limited thereto. Any variations or substitutions that can be easily conceived by those skilled in the art within the technical scope disclosed in the present invention should be included within the scope of protection of the present invention. Therefore, the scope of protection of the present invention should be determined by the scope of the claims.

Claims

1. An automatic cleaning device with alternating anode and cathode electric arc sources, characterized in that... It includes an arc power supply that automatically switches the polarity of the output electrodes and two cathode arc sources, wherein: The two output electrodes of the arc power supply with automatic output electrode polarity switching are respectively connected to the two cathode arc sources. The negative and positive terminals of the arc power supply with automatic output electrode polarity switching can automatically switch between each other, so that the two cathode arc sources can automatically switch between cathode and anode functions. A baffle is provided in front of each of the two cathode arc sources. The arc power supply converter with automatic output electrode polarity switching can switch the polarity of the arc power supply output electrodes and can control the switching speed and the time interval between two switching operations. The converter in an arc power supply that automatically switches the polarity of the output electrodes includes a power supply, a controller, a relay, and a contactor; After cleaning the workpiece, the arc power supply that automatically switches the polarity of the output electrode is not turned off. At the same time, the magnetron sputtering target and two small arc sources are turned on to participate in the film deposition. The two small arc sources can not only increase the thickness of the film, but also generate an auxiliary deposition effect through the arc electron flow, providing a high deposition rate and metal ionization rate.

2. The automatic alternating cathode and anode arc source cleaning device according to claim 1, characterized in that... The two cathode arc sources are configured as columnar arc sources, circular planar small arc sources, or rectangular planar large arc sources.

3. The automatic alternating cathode and anode arc source cleaning device according to claim 1 or 2, characterized in that... A workpiece rotating frame is provided between the cathode arc sources for mounting the workpiece to be cleaned; The automatic electric arc source cleaning device with alternating positive and negative electrodes includes a workpiece bias power supply, which is connected to the workpiece rotating frame.

4. A coating machine, characterized in that... The coating machine body is provided with an automatic electric arc source cleaning device that is either anode or cathode, as described in any one of claims 1-3.

5. The coating machine according to claim 4, characterized in that... The coating machine body is a single-chamber coating machine body, and the single-chamber coating machine body is provided with a coating chamber, wherein: The coating chamber is connected to a vacuum system; The coating chamber is equipped with multiple planar magnetron sputtering targets, columnar magnetron sputtering targets, circular planar small arc sources, columnar arc sources, or rectangular planar large arc sources to provide coating particles.

6. The coating machine according to claim 5, characterized in that... The two cathode arc sources disposed in the coating chamber are arranged on the side wall of the coating chamber.

7. The coating machine according to claim 5, characterized in that... The two cathode arc sources disposed in the coating chamber are arranged opposite each other at the top and bottom of the coating chamber.

8. The coating machine according to claim 4, characterized in that... The coating machine body is a continuous production line coating machine body. The continuous production line coating machine body is provided with a cleaning chamber. On both sides of the cleaning chamber, there are two cathode arc sources connected to the arc power supply with the polarity of the automatically switching output electrode.

9. The coating machine according to claim 8, characterized in that... The two cathode arc sources, which are connected to the arc power supply with the polarity of the automatically switching output electrode, are arranged opposite each other on both sides of the cleaning chamber.

10. The coating machine according to claim 8, characterized in that... The two cathode arc sources, which are connected to the arc power supply with the polarity of the automatically switching output electrode, are arranged side by side on both sides of the cleaning chamber.

Images